A photon chip detection mechanism and a detector

Abstract

The present invention discloses a photon chip detection mechanism and a detector, relating to the technical field of chip detection. It further includes a transfer seat, which is installed on the tabletop of the detection table. A support plate is vertically slidably installed in the transfer seat. A chip placement tray is embedded in the top of the support plate. An adjustment fixture is installed between the support plate and the chip placement tray. A frame is fixed to the top of the detection table, and a driving member and a positioning lifting frame that is unidirectionally driven by the driving member are installed in the frame. A detection head is installed on the top of the frame. In the present invention, the transfer seat is provided to transfer the support plate to the position of the frame. When the support plate is located on the positioning lifting frame and pushes the positioning lifting frame, the positioning lifting frame is forced to be in driving connection with the driving member. The driving member is used to drive the positioning lifting frame to rise smoothly. During the rising process, the adjustment fixture firmly fixes the chip placement tray and the support tray, avoiding the shaking and loosening of the chip placement tray, and the detection head detects the surface of the chip.

Description

Technical Field

[0001] The present invention relates to the technical field of chip detection, and specifically provides a photon chip detection mechanism and a detector. Background Art

[0002] Photon chips use light waves (electromagnetic waves) as carriers for information transmission or data operation. Generally, they rely on dielectric optical waveguides in integrated optics or silicon-based optoelectronics to transmit guided-mode optical signals. The modulation, transmission, demodulation, etc. of optical signals and electrical signals are integrated on the same substrate or chip. Before leaving the factory, photon chips need to undergo multiple complex detections. One step is to judge whether the quality and performance of the chip meet the requirements by observing the physical characteristics of the chip. The main physical detection methods include optical microscope detection, scanning electron microscope detection, atomic force microscope detection, X-ray diffraction detection, etc. These detection methods are used to observe the morphology, structure, and defects on the chip surface.

[0003] The patent publication number of the existing patent application is: CN112114247B, and the publication date is March 29, 2024. The name of this patent is "A Chip Detection Device". This patent includes a base and a placement seat. A positioning plate is installed inside the base, and a workbench is placed above the positioning plate. A support block is welded to the bottom of the workbench, and clamping grooves are provided on the left and right surfaces of the support block. A positioning rod is provided outside the clamping groove, and a clamping seat is slidably connected to the outside of the positioning rod. A dust-proof cover is provided above the clamping seat. Turntables are installed on both the left and right sides of the workbench. This chip detection device is provided with a positioning plate, which is used in cooperation with the support block to position and guide the moving direction of the support block. The setting between the belt and the rotating shaft can utilize the rotational relationship between the two to move the support block by pulling the belt, so as to facilitate taking out the workbench from the dust-proof cover and then taking out the chip to be detected, which is beneficial to preventing dust from falling into the interior of the dust-proof cover.

[0004] The above application has deficiencies. During the general detection process, it is necessary to lift the height of the chip to a height that can be detected by the microscope. Generally, it is driven by a driving member to lift and lower, and the lifting and lowering speeds are the same. If the speed is too fast, the accuracy of detection during lifting cannot be guaranteed. If the speed is too slow, the time for descending and resetting is relatively long, affecting the overall detection effect. And generally, it is necessary for the staff to fix the chip placement tray, otherwise the stability during its lifting and lowering process cannot be guaranteed. Summary of the Invention

[0005] The purpose of the present invention is to provide a photon chip detection mechanism and a detector to solve the above deficiencies in the prior art.

[0006] To achieve the above purpose, the present invention provides the following technical solutions:

[0007] A photon chip detection mechanism includes a detection table and also includes a transfer seat. The transfer seat is installed on the tabletop of the detection table, and a supporting plate is vertically slidably installed in the transfer seat. A chip placement tray is embedded at the top of the supporting plate, and an adjustment fixture is installed between the supporting plate and the chip placement tray. A frame is fixed to the top of the detection table, and a driving member and a positioning lifting frame that is unidirectionally driven by the driving member are installed in the frame. A detection head is installed on the top of the frame. When the transfer seat drives the supporting plate to push the positioning lifting frame, the driving member drives the positioning lifting frame to lift, and the adjustment fixture fixes the chip placement tray to the supporting plate. When the positioning lifting frame is lifted to the detection height, it resets under the action of gravity, and the adjustment fixture releases the chip placement tray.

[0008] Preferably, a linear motor is installed between the transfer seat and the detection table. Plug rods are fixedly connected to both sides of the supporting plate, and through grooves that match the plug rods are vertically opened on both sides of the transfer seat.

[0009] Preferably, a receiving groove that matches the chip placement tray is opened on the top surface of the supporting plate, and openings are opened on both sides of the inner wall of the receiving groove, and the openings communicate with the receiving groove.

[0010] Preferably, the adjustment fixture includes a clamping frame elastically installed inside the opening. A butting frame is fixedly connected to the inner side wall of the transfer seat below the clamping frame, and the butting frame is inclined and abuts against the clamping frame.

[0011] Preferably, the driving member includes a connecting frame slidably installed on the top of the frame. A lead screw that is threadedly connected to the connecting frame is rotatably installed in the frame. An electric shaft rod is rotatably installed in the connecting frame, and driving gears are symmetrically installed on the electric shaft rod. Guide plates are symmetrically installed in the frame, and guide grooves for the translation of the electric shaft rod are opened on the guide plates.

[0012] Preferably, a chute is vertically opened on the outer side of the positioning lifting frame, and a plugging slider is slidably installed in the chute. A guide rail that matches the plugging slider is horizontally opened on the guide plate. A top spring is fixedly connected between one side of the inner wall of the guide rail and the plugging slider. A transmission rack that is adapted to the driving gear is fixedly connected to one side of the positioning lifting frame. A first cam is fixedly sleeved on the outside of the lead screw, and the top of the positioning lifting frame abuts and cooperates with the convex part of the first cam.

[0013] Preferably, a second cam is fixedly sleeved on the outside of the lead screw, and the convex part of the second cam is opposite to the convex part of the first cam in direction. A top rod is vertically slidably installed on the outside of the guide plate. A wedge-shaped abutting block is fixedly connected to the end of the plugging slider. The bottom of the top rod abuts against the wedge-shaped abutting block, and the top abuts against the convex part of the second cam.

[0014] Preferably, a pair of dust covers are slidably installed inside the frame, the detection head is located between the pair of dust covers, an adjusting gear ring is rotatably sleeved outside the detection head, and the two dust covers are respectively fixed with adjusting racks that mesh with the adjusting gear rings, and a connecting bracket is fixedly connected to the bottom of one of the dust covers, and the connecting bracket is slidably connected to the two positioning lifting frames.

[0015] Preferably, a stopper is fixedly connected to the bottom of the inner wall of the positioning lifting frame, and a slot matching the insertion rod is provided in the stopper.

[0016] A detection machine comprises the above-mentioned photonic chip detection mechanism.

[0017] In the above technical scheme, a transfer seat is provided to transfer the support plate to the rack. When the support plate is located on the positioning lifting frame and the positioning lifting frame is pushed, the positioning lifting frame is forced to be connected to the driving member for transmission. The driving member is used to drive the positioning lifting frame to rise smoothly. During the rising process, the clamp is adjusted to firmly fix the chip placement tray and the support tray to prevent the chip placement tray from shaking and loosening. Then, after the positioning lifting frame lifts the support plate to a height that the detection head can detect, the detection head detects the surface of the chip. At the same time, the positioning lifting frame will disconnect the transmission of the driving member with it after reaching the detection height, so that the reset and descent of the positioning lifting frame depends on its own gravity, thereby realizing rapid reset. After the complete reset, the adjustment clamp will also release the chip placement tray. When the transfer seat sends the support plate out of the rack, it is convenient to grab the chip placement tray, thereby improving the efficiency of detection.

[0018] It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.

[0019] This application document provides an overview of various implementations or examples of the technology described in the present disclosure, and is not a comprehensive disclosure of the entire scope or all features of the disclosed technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0021] Figure 1 This is a schematic diagram of the overall structure of a photon chip detection mechanism of the present invention;

[0022] Figure 2 A bottom view of the overall structure of a photon chip detection mechanism of the present invention;

[0023] Figure 3Side cross-sectional view of a photon chip detection mechanism of the present invention;

[0024] Figure 4 Enlarged view of part A of a photon chip detection mechanism of the present invention;

[0025] Figure 5 Schematic diagram of the internal structure of the frame in a photon chip detection mechanism of the present invention;

[0026] Figure 6 Schematic diagram of the structures of the supporting plate and the chip placement tray in a photon chip detection mechanism of the present invention;

[0027] Figure 7 Schematic diagram of the internal structures of the transfer seat and the supporting plate in the adjustment assembly in a photon chip detection mechanism of the present invention;

[0028] Figure 8 Enlarged view of part B of a photon chip detection mechanism of the present invention;

[0029] Figure 9 Schematic diagram of the structure of the driving member in a photon chip detection mechanism of the present invention.

[0030] Explanation of reference numerals:

[0031] 1, detection table; 101, linear motor; 2, transfer seat; 201, supporting plate; 202, chip placement tray; 203, insertion rod; 204, through groove; 205, receiving groove; 206, opening; 3, adjustment fixture; 301, clamping frame; 302, abutting frame; 303, positioning rod; 304, compression spring; 4, frame; 401, guide plate; 402, guide groove; 403, guide rail; 404, top spring; 405, top rod; 406, guide rod; 5, driving member; 501, connecting frame; 502, lead screw; 503, electric shaft rod; 504, driving gear; 505, first cam; 506, second cam; 6, positioning lifting frame; 601, sliding groove; 602, plugging slider; 603, transmission rack; 604, wedge-shaped abutting block; 605, stop block; 606, clamping groove; 7, detection head; 701, adjustment gear ring; 8, dust cover; 801, adjustment rack; 802, connecting bracket. Detailed implementation manners

[0032] To make the objectives, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present disclosure. Obviously, the described embodiments are some, but not all, of the embodiments of the present disclosure. All other embodiments obtained by those of ordinary skill in the art based on the described embodiments of the present disclosure without creative efforts shall fall within the scope of protection of the present disclosure.

[0033] Please refer to Figures 1-9 Figures 1-9 , a photon chip detection mechanism provided by an embodiment of the present invention includes a detection table 1, and further includes a transfer seat 2. The transfer seat 2 is installed on the tabletop of the detection table 1, and a support plate 201 is vertically slidably installed in the transfer seat 2. A chip placement tray 202 is embedded at the top of the support plate 201. An adjustment fixture 3 is installed between the support plate 201 and the chip placement tray 202. A frame 4 is fixed to the top of the detection table 1, and a driving member 5 and a positioning lifting frame 6 that is unidirectionally driven by the driving member 5 are installed in the frame 4. A detection head 7 is installed on the top of the frame 4. When the transfer seat 2 drives the support plate 201 to push the positioning lifting frame 6, the driving member 5 drives the positioning lifting frame 6 to lift, and the adjustment fixture 3 fixes the chip placement tray 202 on the support plate 201. When the positioning lifting frame 6 is lifted to the detection height, it resets under the action of gravity, and the adjustment fixture 3 releases the chip placement tray 202.

[0034] Specifically, the transfer seat 2 moves back and forth on the detection table 1 to send the chip placement tray 202 on the support plate 201 into the frame 4 to facilitate the detection head 7 to detect the chips on the chip placement tray 202. Multiple chips are respectively fixed in the chip placement tray 202, and the chip placement tray 202 is then embedded in the support plate 201. The support plate 201 can move up and down in the transfer seat 2. When the support plate 201 is at the bottom of the up and down movement interval, the adjustment fixture 3 releases the chip placement tray 202. At this time, the chip placement tray 202 can be easily placed on or removed from the support plate 201. When the support plate 201 leaves the bottom of the up and down movement interval, the adjustment fixture 3 will firmly fix the chip placement tray 202 on the support plate 201. Since the support plate 201 can move up and down, when the transfer seat 2 drives the support plate 201 into the frame 4, the position of the transfer seat 2 will not be adjusted again, and the positioning lifting frame 6 is always pressed against the driving member 5 to drive between the driving member 5 and the positioning lifting frame 6. Then, the driving member 5 drives the positioning lifting frame 6 to slowly lift vertically. Through the lifting of the positioning lifting frame 6, the support plate 201 moves up in the transfer seat 2, and the adjustment fixture 3 always clamps the chip placement tray 202 on the support plate 201 to prevent the chip placement tray 202 from loosening and shaking during the lifting or lowering of the support plate 201. When the positioning lifting frame 6 drives the chip to the detection height and the detection head 7 finishes detecting, the transmission between the driving member 5 and the positioning lifting frame 6 is cancelled, so that the positioning lifting frame 6 quickly moves down and resets under the action of its own gravity and the gravity of the support plate 201. At the same time, after the support plate 201 is completely reset to the previous height, the adjustment fixture 3 will release the chip placement tray 202 again. Then, the transfer seat 2 sends the support plate 201 back outside the frame 4 to facilitate the next process.

[0035] Compared with the prior art, in the embodiment of the present invention, the transfer seat 2 is provided to transfer the supporting plate 201 to the frame 4. When the supporting plate 201 is located on the positioning lifting frame 6 and pushes the positioning lifting frame 6, the positioning lifting frame 6 is forced to be in transmission connection with the driving member 5. The driving member 5 is used to drive the positioning lifting frame 6 to rise gently. During the rising process, the adjusting fixture 3 firmly fixes the chip placement tray 202 and the supporting tray to avoid the chip placement tray 202 from shaking and loosening. Then, after the positioning lifting frame 6 lifts the supporting plate 201 to a height that the detection head 7 can detect, the detection head 7 detects the surface of the chip. At the same time, after reaching the detection height, the positioning lifting frame 6 will disconnect the driving member 5 from its transmission, so that the reset and descent of the positioning lifting frame 6 rely on its own gravity, thus realizing rapid reset. After complete reset, the adjusting fixture 3 will also loosen the chip placement tray 202. When the transfer seat 2 sends the supporting plate 201 out of the frame 4, it is convenient to grab the chip placement tray 202, improving the detection efficiency.

[0036] In a further embodiment of the present invention, a linear motor 101 is installed between the transfer seat 2 and the detection table 1. Insertion rods 203 are fixedly connected to both sides of the supporting plate 201. Through slots 204 matching the insertion rods 203 are vertically opened on both sides of the transfer seat 2. Specifically, the transfer seat 2 is driven by the linear motor 101 to reciprocate inside and outside the frame 4, quickly and smoothly driving the supporting plate 201 to reach the corresponding position. Although at this time the insertion rods 203 on the supporting plate 201 are placed at the bottom slot opening of the through slots 204 and the adjusting fixture 3 does not clamp the chip placement tray 202, the moving direction of the transfer seat 2 is horizontal. As long as the chip placement tray 202 is normally embedded on the supporting plate 201, there will be no phenomenon of falling off and shaking. Since the transfer seat 2 has through slots 204 that limit the left and right movement of the insertion rods 203, after the positioning lifting frame 6 lifts the supporting plate 201, as long as the position of the transfer seat 2 does not change, the supporting plate 201 can move vertically upward, avoiding the phenomenon of chip position deviation.

[0037] In a further embodiment of the present invention, a receiving groove 205 matching the chip placement tray 202 is opened on the top surface of the supporting plate 201. Openings 206 are opened on both sides of the inner wall of the receiving groove 205, and the openings 206 communicate with the receiving groove 205. One side of the opening 206 extends to the lower side of the chip placement tray 202. Specifically, before detection, the chip placement tray 202 loaded with chips is placed in the receiving groove 205 on the supporting plate 201. The openings 206 reserved on both sides of the receiving groove 205 facilitate the staff to take the chip placement tray 202.

[0038] In a further embodiment of the present invention, the adjusting fixture 3 includes a clamping frame 301 elastically mounted inside the opening 206. One side of the clamping frame 301 is fixedly connected to a positioning rod 303 that penetrates through the supporting plate 201. A compression spring 304 is sleeved outside the positioning rod 303. An abutting frame 302 is fixedly connected to the inner side wall of the transfer seat 2 below the clamping frame 301. The abutting frame 302 abuts against the clamping frame 301 obliquely. Specifically, when the supporting plate 201 is not lifted, the clamping frame 301 is pushed away by the abutting frame 302 in the moving seat, so that the distance between the clamping frame 301 and the chip placement tray 202 becomes larger. At this time, the clamping frame 301 does not play a role in clamping and fixing the chip placement tray 202, and the chip placement tray 202 can be easily taken and placed. When the supporting plate 201 is lifted, because the height of the abutting frame 302 cannot be adjusted together with it, the clamping frame 301 is no longer blocked by the abutting frame 302, and the clamping frame 301 clamps the chip placement tray 202 under the action of the compression spring 304, making the connection between the chip placement tray 202 and the supporting plate 201 more reliable.

[0039] In a further embodiment of the present invention, the driving member 5 includes a connecting frame 501 slidably mounted on the top of the frame 4. A lead screw 502 that is rotationally mounted in the frame 4 and threadedly connected to the connecting frame 501 is also installed in the frame 4. A guide rod 406 that penetrates through the connecting frame 501 is installed. An electric shaft rod 503 is rotationally mounted in the connecting frame 501. Driving gears 504 are symmetrically installed on the electric shaft rod 503. Guide plates 401 are symmetrically installed in the frame 4. Guide grooves 402 for the translation of the electric shaft rod 503 are provided on the guide plates 401. Specifically, the electric shaft rod 503 is driven by a motor to rotate. After the positioning lifting frame 6 and the driving gears 504 on the electric shaft rod 503 are engaged, the rotation of the electric shaft rod 503 is used to drive the positioning lifting frame 6 to move up gently. The position of the connecting frame 501 can also be adjusted by rotating the lead screw 502, so that after the positioning lifting frame 6 is lifted to a corresponding height, the driving gear 504 is adjusted in position to cancel the driving cooperation with the positioning lifting frame 6, allowing the positioning lifting frame 6 to descend by itself.

[0040] In a further embodiment of the present invention, a chute 601 is vertically formed on the outer side of the positioning lifting frame 6, and a plugging slider 602 is slidably installed in the chute 601. A guide rail 403 matching the plugging slider 602 is horizontally formed on the guide plate 401. A top spring 404 is fixedly connected between one side of the inner wall of the guide rail 403 and the plugging slider 602. A transmission rack 603 adapted to the driving gear 504 is fixedly connected to one side of the positioning lifting frame 6. A first cam 505 is fixedly sleeved outside the lead screw 502, and the top of the positioning lifting frame 6 is in abutting cooperation with the protruding part of the first cam 505. Specifically, the plugging slider 602 is respectively inserted into the chute 601 of the positioning lifting frame 6 and the guide rail 403 on the guide plate 401, so that when the transfer seat 2 drives the supporting plate 201 to press the positioning lifting frame 6, the positioning lifting frame 6 can move horizontally. When the driving gear 504 on the electric shaft rod 503 meshes with the transmission rack 603 on the positioning lifting frame 6, the positioning lifting frame 6 can vertically rise. And when the positioning lifting frame 6 moves up to a suitable height to complete the chip detection, its top will also push up the first cam 505 on the lead screw 502, causing the lead screw 502 to rotate by a suitable angle, making the connecting frame 501 move away from the positioning lifting frame 6, separating the driving gear 504 on the electric shaft rod 503 from the transmission rack 603 on the positioning lifting frame 6. After the positioning lifting frame 6 has no external transmission source, it quickly descends under the action of gravity. When it is about to complete the descent and reset, the clamping frame 301 abuts against the abutting frame 302, causing the clamping frame 301 to release the chip placement plate. Finally, the transfer seat 2 sends out the supporting plate 201 and the chip placement plate placed on the supporting plate 201 from the machine frame 4. Since the adjusting fixture 3 between the chip placement plate and the supporting plate 201 has been released, the staff can easily remove the chip placement plate for the next process, which is more convenient to use without manual fixing or releasing. When the transfer seat 2 moves out, the top spring 404 will push the plugging slider 602 in the direction of the outward movement of the transfer seat 2, making the positioning lifting frame 6 move to its previous position in the machine frame 4.

[0041] In a further embodiment of the present invention, a second cam 506 is fixedly sleeved outside the lead screw 502, and the protruding portion of the second cam 506 is in the opposite direction to the protruding portion of the first cam 505. A push rod 405 is slidably mounted vertically outside the guide plate 401. A wedge-shaped abutting block 604 is fixedly connected to the end of the plugging slider 602. The bottom of the push rod 405 abuts against the wedge-shaped abutting block 604, and the top abuts against the protruding portion of the second cam 506. Specifically, after the positioning lifting frame 6 descends and resets, during the process of the plugging slider 602 being pushed by the top spring 404, the wedge-shaped abutting block 604 jacks up the push rod 405, and then through the push rod 405, the protruding portion of the second cam 506 is jacked up, causing the lead screw 502 to rotate in the other direction by the same angle, so that the connecting frame 501 drives the electric shaft 503 to reset. After the next chip placement tray 202 is placed on the supporting plate 201, the positioning lifting frame 6 can still be transmitted with the driving member 5 when being pushed to the same position, so as to realize continuous detection and improve the continuity of detection.

[0042] In a further embodiment of the present invention, a pair of dust covers 8 are slidably mounted inside the frame 4. The detection head 7 is located between the pair of dust covers 8. An adjusting gear ring 701 is rotatably sleeved outside the detection head 7. Adjusting racks 801 meshing with the adjusting gear ring 701 are respectively fixed on the two dust covers 8. The bottom of one of the dust covers 8 is fixedly connected with a connecting bracket 802. The connecting bracket 802 is slidably connected with the two positioning lifting frames 6 respectively. Specifically, when the positioning lifting frame 6 is pushed inwards, the positioning lifting frame 6 will push the connecting bracket 802 again, causing the dust cover 8 connected to the connecting bracket 802 to move together. The dust cover 8 drives the adjusting gear ring 701 to rotate through the adjusting rack 801, so that the other dust cover 8 moves outwards synchronously, opening the two dust covers 8, enabling the detection head 7 to work normally after the chip placement tray 202 enters the frame 4. When the positioning lifting frame 6 resets, one of the dust covers 8 drives the other dust cover 8 to approach each other, protecting and surrounding the lens of the detection head 7 and reducing dust accumulation.

[0043] In a further embodiment of the present invention, a stop block 605 is fixedly connected to the bottom of the inner wall of the positioning lifting frame 6. A card slot 606 adapted to the insertion rod 203 is formed in the stop block 605. Specifically, after the transfer seat 2 drives the supporting plate 201 into the frame 4, the insertion rods 203 on both sides of the supporting plate 201 will respectively be inserted into the card slots 606 in the stop block 605. At this time, the height of the supporting plate 201 is limited by the positioning lifting frame 6 and cannot be freely lifted as before, ensuring the stability of the supporting plate 201 when the positioning lifting frame 6 lifts the supporting plate 201.

[0044] A detection machine includes the above-mentioned photon chip detection mechanism.

[0045] Only some exemplary embodiments of the present invention have been described by way of illustration. Without doubt, for those of ordinary skill in the art, the described embodiments can be modified in various different ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and description are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A photon chip detection mechanism, comprising a detection table (1), characterized in that, It further includes: A transfer seat (2), which is installed on the tabletop of the detection table (1), and a support plate (201) is vertically slidably installed in the transfer seat (2). A chip placement tray (202) is embedded at the top of the support plate (201), and an adjustment fixture (3) is installed between the support plate (201) and the chip placement tray (202); A frame (4), which is fixed to the top of the detection table (1), and a driving member (5) and a positioning lifting frame (6) that is unidirectionally driven by the driving member (5) are installed in the frame (4). A detection head (7) is installed on the top of the frame (4); The driving member (5) includes a connecting frame (501) slidably installed on the top of the frame (4). A lead screw (502) that is threadedly connected to the connecting frame (501) is rotatably installed in the frame (4). An electric shaft (503) is rotatably installed in the connecting frame (501). Driving gears (504) are symmetrically installed on the electric shaft (503). Guide plates (401) are symmetrically installed in the frame (4), and a guide groove (402) for the translation of the electric shaft (503) is opened on the guide plate (401); A chute (601) is vertically opened on the outer side of the positioning lifting frame (6). A plugging slider (602) is slidably installed in the chute (601). A guide rail (403) that matches the plugging slider (602) is horizontally opened on the guide plate (401). A top spring (404) is fixedly connected between one side of the inner wall of the guide rail (403) and the plugging slider (602). A transmission rack (603) that is adapted to the driving gear (504) is fixedly connected to one side of the positioning lifting frame (6). A first cam (505) is fixedly sleeved on the outside of the lead screw (502), and the top of the positioning lifting frame (6) is in abutting cooperation with the convex part of the first cam (505); When the transfer seat (2) drives the support plate (201) to push the positioning lifting frame (6), the driving member (5) drives the positioning lifting frame (6) to lift, and the adjustment fixture (3) fixes the chip placement tray (202) on the support plate (201). When the positioning lifting frame (6) is lifted to the detection height, it resets under the action of gravity, and the adjustment fixture (3) releases the chip placement tray (202).

2. The photon chip detection mechanism according to claim 1, wherein A linear motor (101) is installed between the transfer seat (2) and the detection table (1). Plug rods (203) are fixedly connected to both sides of the support plate (201), and through grooves (204) that match the plug rods (203) are vertically opened on both sides of the transfer seat (2).

3. A photon chip detection mechanism according to claim 1, characterized in that, A receiving groove (205) that matches the chip placement tray (202) is opened on the top surface of the support plate (201). Openings (206) are opened on both sides of the inner wall of the receiving groove (205), and the openings (206) communicate with the receiving groove (205).

4. A photon chip detection mechanism according to claim 3, characterized in that, The adjusting fixture (3) includes a clamping frame (301) elastically mounted inside the opening (206). A butting frame (302) is fixedly connected to the inner side wall of the transfer seat (2) below the clamping frame (301), and the butting frame (302) abuts against the clamping frame (301) obliquely.

5. A photon chip detection mechanism according to claim 1, characterized in that, A second cam (506) is fixedly sleeved outside the lead screw (502), and the protruding part of the second cam (506) is opposite to the protruding part of the first cam (505). A ejector rod (405) is vertically slidably mounted on the outside of the guide plate (401). A wedge-shaped abutting block (604) is fixedly connected to the end of the plugging slider (602). The bottom of the ejector rod (405) abuts against the wedge-shaped abutting block (604), and the top abuts against the protruding part of the second cam (506).

6. The photon chip detection mechanism according to claim 1, characterized in that, A pair of dust covers (8) are slidably mounted inside the frame (4). The detection head (7) is located between the pair of dust covers (8). An adjusting gear ring (701) is rotatably sleeved outside the detection head (7). Adjusting racks (801) meshing with the adjusting gear ring (701) are respectively fixed on the two dust covers (8). A connecting bracket (802) is fixedly connected to the bottom of one of the dust covers (8), and the connecting bracket (802) is respectively slidably connected to the two positioning lifting frames (6).

7. A photon chip detection mechanism according to claim 2, characterized in that, A stop block (605) is fixedly connected to the bottom of the inner wall of the positioning lifting frame (6), and a card slot (606) adapted to the plug rod (203) is formed in the stop block (605).

8. A detection machine, characterized in that, It includes the photon chip detection mechanism according to any one of claims 1-7.

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