A light-curing additive manufacturing system based on two galvanometric mirrors

Abstract

The present invention relates to a light-curing additive manufacturing system based on two galvanometric mirrors, comprising: a laser for emitting processing laser; a laser beam splitting and light transmission device, which is oppositely arranged with respect to the light-emitting port of the laser and is used for splitting the received processing laser into at least a first coherent light beam and a second coherent light beam; a first galvanometric mirror and a second galvanometric mirror, the first galvanometric mirror and the second galvanometric mirror are arranged at the rear end of the laser beam splitting and light transmission device, the first galvanometric mirror receives the first coherent light beam, the second galvanometric mirror receives the second coherent light beam, and the first coherent light beam controlled by the first galvanometric mirror and the second coherent light beam controlled by the second galvanometric mirror converge to form an interference spot; and a processing platform, the processing platform is arranged below the first galvanometric mirror and the second galvanometric mirror, and the interference spot scans on the processing platform according to a preset path and layer by layer prints a sliced pattern to form a processing pattern.

Description

Technical Field

[0001] The present invention relates to the technical field of micro-nano processing, and in particular to a light-curing additive manufacturing system based on a dual galvanometer. Background Art

[0002] The light-curing additive manufacturing technology is a technical means of using ultraviolet light to cure photosensitive resin to form a solid. In 1986, Charles W. Hull applied for the first patent for a 3D printing technology based on photosensitive resin - stereolithography (SLA). This technology uses an ultraviolet laser as a light source and a single galvanometer to control the scanning of the laser spot. The laser beam outlines the first layer of the object's shape on the surface of the liquid resin, and then the manufacturing platform descends a certain distance (between 0.05 - 0.025 mm), and then immerses the cured layer into the liquid resin, and so on, until the solid printing is finally completed.

[0003] However, the traditional stereolithography (SLA) additive manufacturing technology is difficult to process micro-nano structures, and the efficiency of preparing micro-nano structures is low, which greatly limits its application and popularization. Summary of the Invention

[0004] The purpose of the present invention is to provide a light-curing additive manufacturing system based on a dual galvanometer, which is used to solve the problems that the existing technology is difficult to process micro-nano structures and the efficiency of preparing micro-nano structures is low.

[0005] According to one aspect of the present invention, there is provided a light-curing additive manufacturing system based on a dual galvanometer, which includes:

[0006] A laser for emitting processing laser;

[0007] A laser beam splitting and light transmission device, which is disposed opposite to the light output port of the laser and is used to split the received processing laser into at least a first coherent beam and a second coherent beam;

[0008] A first galvanometer and a second galvanometer, the first galvanometer and the second galvanometer are disposed at the rear end of the laser beam splitting and light transmission device, the first galvanometer receives the first coherent beam, the second galvanometer receives the second coherent beam, and the first coherent beam controlled by the first galvanometer and the second coherent beam controlled by the second galvanometer converge to form an interference spot; and

[0009] A processing platform, which is disposed below the first galvanometer and the second galvanometer, and the interference spot scans on the processing platform according to a preset path and prints slice graphics layer by layer to form a processing pattern.

[0010] In one embodiment, the laser beam splitting light transmission device includes a beam splitting member and a reflecting mirror. The beam splitting member faces the light output port of the laser. The beam splitting member is configured to split the processing laser into the first coherent light beam and the second coherent light beam. The first coherent light beam continues to be transmitted after passing through the beam splitting member. The reflecting mirror is disposed at a spaced position on the opposite side of the beam splitting member. The second coherent light beam reflected and separated by the beam splitting member is transmitted to the reflecting mirror and then continues to be transmitted after being reflected by the reflecting mirror. Among them, the second coherent light beam is transmitted in parallel with the first coherent light beam.

[0011] In one embodiment, the beam splitting member is any one of a beam splitter mirror or a grating.

[0012] In one embodiment, the laser beam splitting light transmission device further includes a first polarizer and a first wave plate. The first polarizer is disposed at a spaced position at the rear end of the beam splitting member. The first wave plate is disposed at a spaced position at the rear end of the first polarizer and is located between the first polarizer and the first galvanometer.

[0013] In one embodiment, the laser beam splitting light transmission device further includes a second polarizer and a second wave plate. The second polarizer is disposed at a spaced position at the rear end of the reflecting plate. The second wave plate is disposed at a spaced position at the rear end of the second polarizer and is located between the second polarizer and the second galvanometer.

[0014] In one embodiment, the processing platform includes a lifting drive mechanism, a support arm, a printing stage, and a solution tank. One end of the support arm is connected to the lifting drive mechanism, and the other end of the support arm is connected to the printing stage to support the printing stage in the solution tank.

[0015] In one embodiment, the support arm includes a connecting portion and a depth support portion. The connecting portion is horizontally disposed and one end thereof is connected to the lifting drive mechanism. The other end of the connecting portion is connected to one end of the depth support portion. The depth support portion is vertically disposed in the solution tank, and the other end of the depth support portion is connected to the printing stage.

[0016] In one embodiment, the processing platform further includes a rotation drive unit and a locking unit. The rotation drive unit is connected between the support arm and the lifting drive mechanism. The rotation drive unit is configured to drive the support arm to rotate in the Z-axis vertical plane. The locking unit is disposed on the lifting drive mechanism and can cooperate with the support arm to be locked or unlocked.

[0017] In one embodiment, the lifting drive mechanism includes a base, a drive motor, a precision lead screw, a precision nut, and a displacement sensor. The drive motor is disposed on the base, and a drive shaft of the drive motor is connected to one end of the precision lead screw. The precision nut is screwed outside the precision lead screw. The displacement sensor is installed on the precision nut and can perform detection operations with the top surface of the base as a reference plane. The support arm is connected to the precision nut.

[0018] In one embodiment, the dual galvanometer-based light-curing additive manufacturing system further includes an industrial control computer and a motion controller. The industrial control computer is electrically connected to the motion controller, and the motion controller is electrically connected to the laser, the first galvanometer, and the second galvanometer.

[0019] Implementing the embodiments of the present invention will have the following beneficial effects:

[0020] When the dual galvanometer-based light-curing additive manufacturing system of this solution works, the processing laser emitted by the laser will first be transmitted to the laser beam splitting light transmission device. The laser beam splitting light transmission device will split the processing laser into at least a first coherent light beam and a second coherent light beam. Immediately afterwards, the first coherent light beam continues to be transmitted to the first galvanometer, and at the same time, the second coherent light beam continues to be transmitted to the second galvanometer, so that the first coherent light beam controlled by the first galvanometer and the second coherent light beam controlled by the second galvanometer will converge on the processing platform and form an interference spot. The overlapping area of the scanning ranges of the first galvanometer and the second galvanometer is the processing range. The first coherent light beam and the second coherent light beam are focused on the interference spot and, under the continuous control of the first galvanometer and the second galvanometer, scan along a preset path and print the slice pattern layer by layer from low to high to finally obtain the required 3D printing processing pattern. Compared with the prior art, this solution combines the characteristics of the galvanometer-controlled high-speed scanning of the laser beam with the advantages of large-area and high-precision patterning by laser interference, and combines the advantages of the fast scanning speed of the galvanometer control system with the advantages of laser interference technology being easy to realize the manufacture of micro-nano scale structures in the field of micro-nano manufacturing. Thus, it can achieve rapid additive manufacturing, adjust the scanning speed and angle of the galvanometer, as well as the power and pulse width of the laser, to control the depth, width, and feature size of the micro-structure, so as to achieve the best additive manufacturing quality and efficiency, thereby achieving the purpose of reducing the processing difficulty of micro-nano structures and improving the preparation efficiency of micro-nano structures. Description of the Drawings

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0022] Figure 1 Schematic structural diagram of a galvanometer-based light-curing additive manufacturing system according to an embodiment;

[0023] Figure 2 Schematic diagram of the processing range of a galvanometer-based light-curing additive manufacturing system;

[0024] Figure 3 Schematic diagram of the movement of the interference spot on the Z-axis;

[0025] Figure 4 Schematic diagram of the movement of the interference spot on the X-axis;

[0026] Figure 5 Schematic diagram of the effect of processing and spreading a glass substrate with photocurable resin;

[0027] Figure 6 SEM scan of the glass substrate processed with photocurable resin.

[0028] Wherein:

[0029] 100. Galvanometer-based light-curing additive manufacturing system; 10. Laser; 20. Laser beam splitting and light transmission device; 21. Beam splitting element; 22. Reflector; 23. First polarizer; 24. First wave plate; 25. Second polarizer; 26. Second wave plate; 30. First galvanometer; 40. Second galvanometer; 50. Processing platform; 51. Lifting drive mechanism; 52. Support arm; 53. Printing stage; 54. Solution tank; 60. Industrial control computer; 70. Motion controller; 200. First coherent light beam; 300. Second coherent light beam. Detailed implementation manners

[0030] For the convenience of understanding the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. The preferred embodiments of the present invention are shown in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0031] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for the purpose of illustration.

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this invention belongs. The terms used in the description of the present invention herein are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0033] Please refer to Figure 1 , for an optical curing additive manufacturing system 100 according to an embodiment, which includes a laser 10 for emitting processing laser; a laser beam splitting and light transmission device 20, the laser beam splitting and light transmission device 20 is disposed opposite to the light outlet of the laser 10 and is used for splitting the received processing laser into at least a first coherent light beam 200 and a second coherent light beam 300; a first galvanometer 30 and a second galvanometer 40, the first galvanometer 30 and the second galvanometer 40 are disposed at the rear end of the laser beam splitting and light transmission device 20, the first galvanometer 30 receives the first coherent light beam 200, the second galvanometer 40 receives the second coherent light beam 300, and the first coherent light beam 200 controlled by the first galvanometer 30 and the second coherent light beam 300 controlled by the second galvanometer 40 converge to form an interference spot; and a processing platform 50, the processing platform 50 is disposed below the first galvanometer 30 and the second galvanometer 40, and the interference spot scans on the processing platform 50 along a preset path and prints slice patterns layer by layer to form a processing pattern.

[0034] Implementing the embodiments of the present invention will have the following beneficial effects: When the optical curing additive manufacturing system 100 based on double galvanometers of this solution works, the processing laser emitted by the laser 10 will first be transmitted to the laser beam splitting and light transmission device 20, and the laser beam splitting and light transmission device 20 will split the processing laser into at least a first coherent light beam 200 and a second coherent light beam 300. Immediately afterwards, the first coherent light beam 200 continues to be transmitted to the first galvanometer 30, and at the same time the second coherent light beam 300 continues to be transmitted to the second galvanometer 40, so that the first coherent light beam 200 controlled by the first galvanometer 30 and the second coherent light beam 300 controlled by the second galvanometer 40 will converge on the processing platform 50 and form an interference spot. The overlapping area of the scanning ranges of the first galvanometer 30 and the second galvanometer 40 is the processing range. The first coherent light beam 200 and the second coherent light beam 300 are focused on the interference spot and, under the continuous control of the first galvanometer 30 and the second galvanometer 40, scan along a preset path and print slice patterns layer by layer from low to high to finally obtain the required 3D printing processing pattern.

[0035] Compared with the prior art, this solution combines the characteristics of galvanometer-controlled high-speed laser beam scanning with the advantages of laser interference for large-area and high-precision patterning. It combines the advantage of the fast scanning speed of the galvanometer control system with the advantage of laser interference technology, which is easy to achieve the fabrication of micro-nano scale structures in the field of micro-nano manufacturing. Thus, it can achieve rapid additive manufacturing. By adjusting the scanning speed and angle of the galvanometer, as well as the power and pulse width of the laser 10, the depth, width, and feature size of the micro-structure can be controlled to achieve the best additive manufacturing quality and efficiency, thereby achieving the purpose of reducing the processing difficulty of micro-nano structures and improving the preparation efficiency of micro-nano structures.

[0036] It should be noted that the processing laser beam emitted by the same laser 10 is split into a first coherent beam 200 and a second coherent beam 300. Since they have the same wavelength, when they are irradiated onto the same plane, laser interference will occur when the first coherent beam 200 and the second coherent beam 300 converge.

[0037] In addition, it should also be noted that in this case, the interference spot formed by the convergence of the first coherent beam 200 and the second coherent beam 300 is used to provide the processing efficiency of the micro-nano structure, which has no direct relation with the magnitude of the energy density of the first coherent beam 200 and the second coherent beam 300. That is to say, according to actual needs, after the processing laser beam is split, the energy density of the first coherent beam 200 can be greater than that of the second coherent beam 300, or the energy density of the second coherent beam 300 can be greater than that of the first coherent beam 200.

[0038] In this application, the function of the first galvanometer 30 is to control the scanning direction and speed of the corresponding first coherent beam 200 to focus with the second coherent beam 300 controlled by the second galvanometer 40, so as to form an interference spot on the workbench plane and achieve the marking purpose according to the preset pattern and parameters. The function of the second galvanometer 40 is to control the scanning direction and speed of the corresponding second coherent beam 300 to focus with the first coherent beam 200 controlled by the first galvanometer 30, so as to form an interference spot on the workbench plane and achieve the additive manufacturing purpose according to the preset pattern and parameters.

[0039] Refer to Figure 1, in an alternative embodiment, the laser beam splitting light transmission device 20 includes a beam splitting member 21 and a reflecting mirror 22. The beam splitting member 21 faces the light output port of the laser 10. The beam splitting member 21 is configured to split the processing laser into a first coherent light beam 200 and a second coherent light beam 300. The first coherent light beam 200 continues to be transmitted after passing through the beam splitting member 21. The reflecting mirror 22 is disposed at an interval on the opposite side of the beam splitting member 21. The second coherent light beam 300 separated by reflection from the beam splitting member 21 is transmitted to the reflecting mirror 22 and then continues to be transmitted after being reflected by the reflecting mirror 22. Among them, the second coherent light beam 300 is transmitted in parallel with the first coherent light beam 200. When the processing laser irradiates the beam splitting member 21, the beam splitting member 21 can split the processing laser into the first coherent light beam 200 and the second coherent light beam 300. And after being processed by only the beam splitting member 21 and the reflecting mirror 22 respectively, the first coherent light beam 200 and the second coherent light beam 300 can continue to be transmitted backward in a parallel relationship, avoiding the intersection of the first coherent light beam 200 and the second coherent light beam 300 before reaching the first galvanometer 30 and the second galvanometer 40.

[0040] According to actual needs, the beam splitting member 21 can be any one of a beam splitter or a grating. In actual use, the beam splitter is fixedly installed by an adjustable bracket. The mirror surface of the beam splitter faces the light output port of the laser 10. After the processing laser irradiates the beam splitter, a part of the laser beam will penetrate the beam splitter to form the first coherent light beam 200, and the other part of the laser beam will be reflected on the mirror surface and irradiate the reflecting mirror 22, and then be reflected by the reflecting mirror 22 to form the second coherent light beam 300. The laser beam splitting structure is simple and highly feasible.

[0041] Preferably, the adjustable bracket is adjustable in angle rotation and / or height lifting, so that the beam splitter and the laser 10 form different distances and azimuth relationships, thereby obtaining different first coherent light beams 200 and second coherent light beams 300 according to actual needs.

[0042] In addition, in yet another alternative embodiment, the laser beam splitting light transmission device 20 further includes a first polarizer 23 and a first wave plate 24. The first polarizer 23 is disposed at an interval at the rear end of the beam splitting member 21, and the first wave plate 24 is disposed at an interval at the rear end of the first polarizer 23 and is located between the first polarizer 23 and the first galvanometer 30. The first coherent light beam 200 is transmitted through the first polarizer 23 and the first wave plate 24 once, so that the first coherent light beam 200 can be shaped to obtain the required spot shape, and the laser energy is more concentrated, improving the transmission efficiency and quality of the first coherent light beam 200.

[0043] Further, the laser beam splitting and light transmission device 20 further includes a second polarizer 25 and a second wave plate 26. The second polarizer 25 is disposed at an interval at the rear end of the reflecting sheet, and the second wave plate 26 is disposed at an interval at the rear end of the second polarizer 25 and is located between the second polarizer 25 and the second galvanometer 40. The second coherent light beam 300 is transmitted through the second polarizer 25 and the second wave plate 26 once, so that the second coherent light beam 300 can be shaped to obtain a required spot shape, and the laser energy is made more concentrated, thereby improving the transmission efficiency and quality of the second coherent light beam 300.

[0044] Referring to Figure 1 , in an alternative embodiment, the processing platform 50 includes a lifting drive mechanism 51, a support arm 52, a printing stage 53, and a solution tank 54. One end of the support arm 52 is connected to the lifting drive mechanism 51, and the other end of the support arm 52 is connected to the printing stage 53 to support the printing stage 53 in the solution tank 54. According to the working principle of solidification additive manufacturing, the solution tank 54 is filled with a photocurable resin (liquid state), and the printing stage 53 is immersed in the photocurable resin. When the interference spot moves on the printing stage 53 along a preset path, the photocurable resin is first cured to form a first layer of sliced pattern. Immediately afterwards, the lifting drive mechanism 51 drives the support arm 52 to drive the printing stage 53 to descend by a preset height along the Z-axis, and then a second layer of sliced pattern is cured on the first layer of sliced pattern, and so on until a complete 3D pattern required for solidification molding is formed.

[0045] In the present application, the solution tank 54 is a square tank with an open upper end, and the opening facilitates adding the photocurable resin into the solution tank 54 and taking out the formed 3D product. In one embodiment, the support arm 52 includes a connecting portion and a depth support portion. The connecting portion is horizontally disposed and one end thereof is connected to the lifting drive mechanism 51, and the other end of the connecting portion is connected to one end of the depth support portion. The depth support portion is vertically disposed in the solution tank 54, and the other end of the depth support portion is connected to the printing stage 53.

[0046] The horizontally spanning connecting portion is used to extend the depth support portion and the printing stage 53 below the liquid level of the photocurable resin in the solution tank 54, so that the tabletop of the printing stage 53 has sufficient photocurable resin to receive the interference spot for processing. The depth support portion has a sufficient length to meet the need for the printing stage 53 to gradually and continuously descend to print and form each layer of sliced pattern while avoiding the problem of interference blockage between the connecting portion and the solution tank 54.

[0047] Both the support part and the depth support part are plate components, and the support part, the depth support part and the printing stage 53 are preferably of an integrally formed structure, having sufficient connection strength. A spiral heating wire is embedded in the tabletop of the printing stage 53. After the 3D product is formed, the heating wire is electrified to form a certain high temperature, and the heat can slightly melt the contact part between the 3D product and the tabletop, so as to quickly remove the 3D product from the printing stage 53.

[0048] In an alternative embodiment, the lifting drive mechanism 51 includes a base, a drive motor, a precision lead screw, a precision nut and a displacement sensor. The drive motor is disposed on the base, and the drive shaft of the drive motor is connected to one end of the precision lead screw. The precision nut is screwed on the outside of the precision lead screw. The displacement sensor is installed on the precision nut and can perform detection operations with the top surface of the base as a reference plane. The support arm 52 is connected to the precision nut. During operation, the drive motor drives the precision lead screw to rotate, and the precision lead screw can further drive the precision nut to axially move a preset distance. Since the precision lead screw and the precision nut have high movement precision and good transmission stability, the dimensional accuracy and forming quality of each layer of sliced graphics can be ensured. During this process, the displacement sensor performs real-time position detection with the top surface of the base as a reference plane (for example, the displacement sensor can emit detection light to the reference plane, and the moving stroke can be further calculated by calculating the round-trip time of the detection light), so as to calibrate the moving stroke of the precision nut (that is, the descending height of the printing stage 53), so as to feedback signals in time when displacement errors occur for correction, and improve the self-repairing ability of the manufacturing system.

[0049] For example, the displacement sensor can be any one of an infrared sensor, a laser sensor, etc.

[0050] Furthermore, the processing platform 50 further includes a rotation drive unit and a locking unit. The rotation drive unit is connected between the support arm 52 and the lifting drive mechanism 51. The rotation drive unit is used to drive the support arm 52 to rotate in the Z-axis vertical plane. The locking unit is disposed on the lifting drive mechanism 51 and can be locked or unlocked in cooperation with the support arm 52. For products with special curved surface structures, additional structures on the outer surface, etc., the main body structure of the product can be first processed by the above-mentioned printing stage 53 descending layer by layer, and then the printing stage 53 can be driven to rotate by the rotation drive unit to adjust the main body structure of the product to different inclined angle postures, and the printing stage 53 can be locked and positioned by the locking unit, so as to facilitate the secondary processing of complex curved surfaces or additional structures by interference light spots and meet the processing requirements of special products.

[0051] In yet another embodiment, the galvanometer-based light-curing additive manufacturing system 100 further includes an industrial control computer 60 and a motion controller 70. The industrial control computer 60 is electrically connected to the motion controller 70, and the motion controller 70 is electrically connected to the laser 10, the first galvanometer 30, and the second galvanometer 40. The industrial control computer 60 is configured to generate pattern module codes, which are used to generate control codes for the rotation trajectories and rotation rates of the first galvanometer 30 and the second galvanometer 40 according to the patterns and parameters input or selected by the user. The motion controller 70 is configured to implement the opening and closing modes of the laser 10, and at the same time, implement the motion control of the x-axis and y-axis galvanometer mirrors in the first galvanometer 30 and the second galvanometer 40.

[0052] Consult Figures 2 to 6 , in this application, during the movement of the interference spot of the galvanometer-based light-curing additive manufacturing system 100 along the Z axis, θ1 is the interference incident angle of the coherent laser LB1, θ2 is the interference incident angle of the coherent laser LB2, θ3 is the deflection angle of the first galvanometer 30, and θ4 is the deflection angle of the second galvanometer 40. It can be known from the equality of alternate interior angles that θ1 = θ3 and θ2 = θ4. Under the action of the first galvanometer 30 and the second galvanometer 40, the interference spot moves from point A(0, 0, z1) to point B(0, 0, z2). During the movement, θ1, θ2, θ3, and θ4 all change, and: θ1 = θ2, θ3 = θ4. By changing the position of the interference spot on the Z axis, the interference incident angles θ1 and θ2 can be changed, thereby realizing the periodic regulation of the micro-nano structure.

[0053] During the movement of the interference spot of the galvanometer-based light-curing additive manufacturing system 100 along the X axis, θ1 is the interference incident angle of the coherent laser LB1, θ2 is the interference incident angle of the coherent laser LB2, θ3 is the deflection angle of the first galvanometer 30, and θ4 is the deflection angle of the first galvanometer 30. Under the action of the first galvanometer 30 and the second galvanometer 40, the interference spot moves from point C(x1, y1, z1) to point D(x2, y1, z1). During the movement, θ1, θ2, θ3, and θ4 all change, and: θ1 ≠ θ2, θ3 ≠ θ4. By changing the position of the interference spot on the X axis, the interference incident angles θ1 and θ2 can be changed, thereby realizing the periodic regulation of the micro-nano structure.

[0054] In addition, the present application also provides a processing example. The laser 10 is a continuous-wave laser 10 with a wavelength of 360 nm, a spot diameter of 10 mm, and an output power of 60 mW. The distance between the first galvanometer 30 and the second galvanometer 40 is 150 mm, and the distance from the light exit to the surface of the workpiece is 540 mm. The processing substrate is a 5×5 glass sheet, coated with a uniform light-curing resin (HTL Resin). After being processed by the light-curing additive manufacturing system 100 based on dual galvanometers, the letter "X" appears on the processing substrate, showing a color-changing effect. Under the processing of the continuous-wave laser 10 with an output power of 60 mW and a spot diameter of 10 mm, the processing speed is: 0.4 mm 2 / s, and the writing linear speed is: 41.7 mm / s, and its efficiency is much higher than the traditional direct laser writing speed.

[0055] In this embodiment, after being processed by the light-curing additive manufacturing system 100 based on dual galvanometers, under the microscopic area framed by the upper right of the letter "X" on the processing substrate, the characteristic size of the interference fringes is about 0.76 um, and the interference fringe period is about 1.3 um.

[0056] The above-described embodiments only represent several implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention patent shall be subject to the appended claims.

Claims

1. A light-curing additive manufacturing system based on dual galvanometers, characterized in that: include: A laser, for emitting a processing laser; A laser beam splitting light transmission device, which is arranged opposite to the light outlet of the laser and is used to split the received processing laser into at least a first coherent light beam and a second coherent light beam; a first galvanometer and a second galvanometer, wherein the first galvanometer and the second galvanometer are arranged at the rear end of the laser beam splitting light transmission device, the first galvanometer receives the first coherent light beam, and the second galvanometer receives the second coherent light beam, the first coherent light beam controlled by the first galvanometer and the second coherent light beam controlled by the second galvanometer converge to form an interference light spot, wherein the overlapping area of ​​the scanning range of the first galvanometer and the second galvanometer is the processing range; and A processing platform, wherein the processing platform is arranged below the first galvanometer and the second galvanometer, and the interference light spot is scanned on the processing platform according to a preset path and prints the slice graphics layer by layer to form a processing pattern; The laser beam splitting light transmission device includes a beam splitter and a reflector. The beam splitter is opposite to the light outlet of the laser. The beam splitter is used to split the processing laser into the first coherent light beam and the second coherent light beam. The first coherent light beam continues to be transmitted after passing through the beam splitter. The reflector is arranged at intervals on the opposite side of the beam splitter. The second coherent light beam separated by reflection from the beam splitter is transmitted to the reflector and then continues to be transmitted after reflection from the reflector. The second coherent light beam is transmitted in parallel with the first coherent light beam.

2. The dual-galvanometer-based light-curing additive manufacturing system according to claim 1, characterized in that: The beam splitter is a beam splitter or a grating.

3. The dual-galvanometer-based light-curing additive manufacturing system according to claim 1, characterized in that: The laser beam splitting light transmission device also includes a first polarizer and a first wave plate, wherein the first polarizer is disposed at a rear end of the beam splitter, and the first wave plate is disposed at a rear end of the first polarizer and is located between the first polarizer and the first galvanometer.

4. The dual-galvanometer-based light-curing additive manufacturing system according to claim 3, characterized in that: The laser beam splitting light transmission device also includes a second polarizer and a second wave plate, wherein the second polarizer is spaced apart at the rear end of the reflector, and the second wave plate is spaced apart at the rear end of the second polarizer and is located between the second polarizer and the second galvanometer.

5. The dual-galvanometer-based light-curing additive manufacturing system according to claim 1, characterized in that: The processing platform includes a lifting drive mechanism, a support arm, a printing platform and a solution pool, one end of the support arm is connected to the lifting drive mechanism, and the other end of the support arm is connected to the printing platform to support the printing platform in the solution pool.

6. The dual-galvanometer-based light-curing additive manufacturing system according to claim 5, characterized in that: The support arm includes a connecting part and a depth supporting part. The connecting part is horizontally arranged and one end of which is connected to the lifting drive mechanism, and the other end of the connecting part is connected to one end of the depth supporting part. The depth supporting part is vertically arranged in the solution pool, and the other end of the depth supporting part is connected to the printing carrier.

7. The dual-galvanometer-based light-curing additive manufacturing system according to claim 5, characterized in that: The processing platform also includes a rotation drive unit and a locking unit. The rotation drive unit is connected between the support arm and the lifting drive mechanism. The rotation drive unit is used to drive the support arm to rotate in the vertical plane of the Z axis. The locking unit is arranged on the lifting drive mechanism and can cooperate with the support arm to lock or unlock.

8. The dual-galvanometer-based light-curing additive manufacturing system according to claim 5, characterized in that: The lifting drive mechanism includes a base, a driving motor, a precision screw, a precision nut and a displacement sensor. The driving motor is arranged on the base, and the driving shaft of the driving motor is connected to one end of the precision screw. The precision nut is screwed to the outside of the precision screw. The displacement sensor is installed on the precision nut and can perform detection operations with the top surface of the base as a reference surface. The support arm is connected to the precision nut.

9. The dual-galvanometer-based light-curing additive manufacturing system according to claim 1, characterized in that: The dual-galvanometer-based photocuring additive manufacturing system also includes an industrial computer and a motion controller. The industrial computer is electrically connected to the motion controller, and the motion controller is electrically connected to the laser, the first galvanometer, and the second galvanometer.

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