Three-dimensional air knife mechanism, three-dimensional air knife device and chip cleaning device

Abstract

The application provides a three-dimensional air knife mechanism, a three-dimensional air knife device and a chip cleaning device. The three-dimensional air knife mechanism comprises an air outlet block and two cover plates. The upper surface of the air outlet block comprises a straight plane and two inclined planes; a plurality of air outlet grooves are arranged on the air outlet block, and the plurality of air outlet grooves are arranged on the two inclined planes; the plurality of air outlet grooves in the same group are arranged in a longitudinal direction; each air outlet groove is in a straight strip shape, and the air outlet projections of the two groups of air outlet grooves are parallel to each other; and the two cover plates are respectively attached to the two inclined planes and cover the openings of the air outlet grooves on the inclined planes. The airflow flowing out of the air outlet grooves is in a straight line shape, energy loss is reduced, and airflow intensity is ensured; the two groups of air outlet grooves can form two groups of airflows, which are respectively sprayed in a diagonal direction from two opposite directions, form a three-dimensional air knife, and make the four side surfaces of the needle pins be sprayed by the airflows, thereby effectively cleaning the needle pins; the cleaning is performed by using the airflows, the force can be controlled, the chip module is prevented from being damaged, there is no wear, and the cost is reduced.

Description

Technical Field

[0001] This invention relates to the field of chip processing equipment, and in particular to a three-dimensional air knife mechanism, a three-dimensional air knife device, and a chip cleaning apparatus. Background Technology

[0002] To protect the chip, it is typically encapsulated in plastic. This encapsulation forms a chip module, with the chip located inside the encapsulation substrate and its pins exposed on the outside. These pins allow the chip to be electrically connected to other electrical components. Since the chip pins are also within the encapsulation mold during the encapsulation process, encapsulation residue inevitably remains on them. To prevent this residue from affecting the chip's appearance, electrical connections, and other performance characteristics, it needs to be removed. Current technology typically uses brushes to clean the chip module. However, brushes wear down over time, resulting in a short lifespan and frequent replacements, increasing costs. Furthermore, the brush pressure is difficult to control; excessive pressure increases wear and may scratch the pins, while excessive pressure makes thorough cleaning difficult. Summary of the Invention

[0003] This invention provides a three-dimensional air knife mechanism, a three-dimensional air knife device, and a chip cleaning device, which can effectively clean chip modules, avoid damage to chip modules, and reduce costs.

[0004] On the one hand, the present invention provides a three-dimensional air knife mechanism, including an air outlet block and two cover plates;

[0005] The upper surface of the air outlet block includes a straight plane and two inclined planes; in the transverse direction, the straight plane is located between the two inclined planes, and the three are connected to form an isosceles trapezoid with a smaller upper part and a larger lower part; the inclination angle of the inclined planes is 40-50 degrees; the air outlet block is provided with multiple air outlet slots, which are divided into two groups and placed on the two inclined planes; the multiple air outlet slots in the same group are arranged at intervals along the longitudinal direction; each air outlet slot is a straight strip, and the length direction of the air outlet slot is parallel to the inclined plane, and forms an air outlet projection line on the plane where the straight plane is located, and the angle between the air outlet projection line and the longitudinal direction is 30-50 degrees; the air outlet projection lines of the two groups of air outlet slots are parallel to each other; one end of the air outlet slot extends to the straight plane and forms an air outlet on the straight plane; the other end of the air outlet slot is connected to the air source equipment;

[0006] The two cover plates are respectively attached to the two inclined planes and cover the opening of the air outlet slot on the inclined planes to form an air duct in the air outlet slot.

[0007] The inclined plane has an inclination angle of 45 degrees, and the angle between the air outlet projection line and the longitudinal direction is 35 degrees.

[0008] The air outlet block is also provided with an air inlet duct, which is provided in a one-to-one correspondence with the air outlet slot. The air inlet duct is arranged vertically. The top end of the air inlet duct extends to an inclined plane and is connected to the other end of the air outlet slot. The bottom end of the air inlet duct extends to the bottom surface of the air outlet block and is provided with an air source interface. The cover plate covers the top end of the air inlet duct.

[0009] Wherein, the cross-sectional area of ​​the air outlet channel is smaller than the cross-sectional area of ​​the air inlet channel; the cross-sectional area of ​​the air outlet channel is rectangular, and the cross-sectional area of ​​the air inlet channel is circular.

[0010] The two sets of air outlet slots are the first air outlet slot and the second air outlet slot, respectively;

[0011] The other end of the first air outlet duct is directly connected to the corresponding air inlet duct;

[0012] The other end of the second air outlet slot is connected to the corresponding air inlet duct through a transition slot; the transition slot is straight, and its two ends are respectively connected to the other end of the second air outlet slot and the top end of the air inlet duct; the length direction of the transition slot is parallel to the inclined plane, and a transition projection line is formed on the plane where the straight plane is located, and the transition projection line is parallel to the transverse direction.

[0013] The air outlets of the two sets of air outlet slots are located on both sides of the longitudinal central axis of the straight plane; the number of air outlet slots in each set is the same, and the two sets of air outlet slots are set in a one-to-one correspondence, with the center line connecting the air outlets of the corresponding two air outlet slots parallel to the air outlet projection line.

[0014] The air outlets of the two sets of air outlet slots are arranged alternately along the longitudinal direction.

[0015] The top of the cover plate protrudes from the straight plane along the inclined plane.

[0016] On the other hand, the present invention also provides a three-dimensional air knife device, including an air source, a two-position three-way solenoid valve and the aforementioned three-dimensional air knife mechanism;

[0017] The number of air outlet slots in the two groups of the three-dimensional air knife mechanism is the same, and the number is the same as that of the two-position three-way solenoid valves.

[0018] The air source is connected to the air inlet of each of the two-position three-way solenoid valves; the two air outlets of the two-position three-way solenoid valves are respectively connected to the two sets of air outlet slots to control the two sets of air outlet slots to pulse-type alternating air jet.

[0019] In another aspect, the present invention also provides a chip cleaning device for cleaning plastic encapsulation residue from chip modules, including a chip moving device, an air knife moving device, and the aforementioned three-dimensional air knife device; the air knife moving device is connected to the three-dimensional air knife mechanism and is used to drive the three-dimensional air knife mechanism to move laterally; the chip moving device is used to clamp the chip module and drive the chip module to move longitudinally; the chip module is located above the three-dimensional air knife mechanism, and the pins of the chip module are arranged downwards.

[0020] The three-dimensional air knife mechanism, three-dimensional air knife equipment, and chip cleaning device provided by this invention have straight air outlet slots, and the airflow flowing out of the air outlet slots is straight, ensuring that the airflow flows in a preset direction, reducing the energy loss of the airflow, and ensuring the airflow intensity. The two sets of air outlet slots are placed on two inclined planes, and the airflow projection lines of the two are parallel to each other. The two sets of air outlet slots can form two sets of airflows, which are sprayed obliquely upward from two opposite directions, thereby forming a three-dimensional air knife. This allows airflow to reach all four side surfaces of the pins, thereby effectively cleaning the pins. The airflow cleans the chip module with high controllability, avoids damage to the chip module, and causes no wear, thus reducing costs. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the chip module structure;

[0022] Figure 2 This is a schematic diagram of the chip cleaning device provided in a preferred embodiment of the present invention;

[0023] Figure 3 yes Figure 2 A schematic diagram of the structure of the three-dimensional air knife equipment in the chip cleaning device;

[0024] Figure 4 yes Figure 3 A schematic diagram of the three-dimensional air knife mechanism of the three-dimensional air knife equipment;

[0025] Figure 5 yes Figure 4 Exploded view of the three-dimensional air knife mechanism;

[0026] Figure 6 yes Figure 4 A schematic diagram of the air outlet block of the three-dimensional air knife mechanism;

[0027] Figure 7 yes Figure 6 Top view of the center air outlet block;

[0028] Figure 8 yes Figure 6 Orthographic projection of one longitudinal end of the central air outlet block;

[0029] Figure 9 yes Figure 2 A partial structural diagram of the chip cleaning device;

[0030] Figure 10 yes Figure 9 A schematic diagram of the air knife moving device and three-dimensional air knife mechanism of the chip cleaning device;

[0031] Figure 11 yes Figure 9 A schematic diagram of the support and protective cover of the chip cleaning device;

[0032] Figure 12 This is a schematic diagram of the air outlet block provided in another embodiment of the present invention. Detailed Implementation

[0033] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0034] In the diagram, units with similar structures are represented by the same labels.

[0035] A preferred embodiment of the present invention provides a chip cleaning device for cleaning plastic encapsulation residue from a chip module 9. Please refer to... Figure 1 The chip module 9 includes a molding substrate 91 and pins 92. There are multiple pins 92, which are disposed on one side of the molding substrate 91. The pins 92 are generally quadrangular prisms with four side surfaces, two of which are arranged opposite each other in the lateral direction and the other two are arranged opposite each other in the longitudinal direction.

[0036] Please see Figure 2 The chip cleaning device includes a chip moving device (not shown in the figure), an air knife moving device 200, and a three-dimensional air knife device 100. Combined with... Figure 2 and Figure 3 As shown, the three-dimensional air knife device 100 includes an air source 3, a two-position three-way solenoid valve 2, and a three-dimensional air knife mechanism 1. The air source 3 is connected to the three-dimensional air knife mechanism 1 through the two-position three-way solenoid valve 2. The air knife moving device 200 is connected to the three-dimensional air knife mechanism 1 and is used to drive the three-dimensional air knife mechanism 1 to move laterally. The chip moving device is used to clamp the plastic encapsulation substrate 91 of the chip module 9 and drive the chip module 9 to move longitudinally. The chip module 9 is located above the three-dimensional air knife mechanism 1, and its pins 92 are located below the plastic encapsulation substrate 91, so that the pins 92 are set downwards, and the three-dimensional air knife mechanism 1 cleans the chip module 9 by facing upwards.

[0037] like Figure 4 , Figure 5 , Figure 6 and Figure 7 As shown, the three-dimensional air knife mechanism 1 includes an air outlet block 11 and two cover plates 12. The upper surface of the air outlet block 11 includes a straight plane 111 and two inclined planes 112. In the transverse direction X, the straight plane 111 is located between the two inclined planes 112, and the straight plane 111 and the two inclined planes 112 are connected to form an isosceles trapezoid that is smaller at the top and larger at the bottom. Figure 8 As shown, the inclination angle α of the inclined plane 112 is 40-50 degrees, that is, the downward inclination angle of the inclined plane 112 relative to the straight plane 111 is 40-50 degrees.

[0038] like Figure 5 , Figure 6 and Figure 7 As shown, the air outlet block 11 is provided with multiple air outlet slots 110. The multiple air outlet slots 110 are divided into two groups and placed on two inclined planes 112. In this embodiment, there are six air outlet slots 110, divided into two groups, each group containing three air outlet slots 110.

[0039] Multiple air outlet slots 110 in the same group are arranged at intervals along the longitudinal direction Y, so that each air outlet slot 110 can output air independently without interfering with each other. Each air outlet slot 110 is straight, and the direction of the outgoing airflow is the length direction of the air outlet slot 110. The airflow flowing out of the air outlet slot 110 is straight, ensuring that the airflow flows in the preset direction, reducing the energy loss of the airflow and ensuring the airflow intensity.

[0040] like Figure 7 As shown, the length direction of the air outlet slot 110 is parallel to the inclined plane 112, and forms an air outlet projection line M on the plane where the straight plane 111 is located. The angle β between the air outlet projection line and the longitudinal direction Y is 30-50 degrees, and the air outlet projection lines of the two sets of air outlet slots 110 are parallel to each other.

[0041] like Figure 5 , Figure 6 As shown, one end of the air outlet slot 110 extends to a straight plane 111, forming an air outlet 1101 on the straight plane 111. The other end of the air outlet slot 110 is connected to the air source 3. Two cover plates 12 are respectively attached to two inclined planes 112 and cover the openings of the air outlet slot 110 on the inclined planes 112 to form an air duct in the air outlet slot 110.

[0042] After the air outlet 110 is connected to the air source 3, the outgoing airflow is ejected from the air outlet 1101 on the straight plane 111 along the air outlet 110. Since the air outlet 110 is straight, the outgoing airflow is also straight. The length direction of the air outlet 110 is parallel to the inclined plane 112, and the angle β between its outgoing projection line M and the longitudinal direction Y is 30-50 degrees, so that the air outlet 110 and the outgoing airflow are ejected obliquely upward. It has angles with the horizontal X, longitudinal Y and vertical Z directions, so that the outgoing airflow has angles with the bottom surface of the molding substrate 91 and the outer surfaces of the pins 92, which is beneficial for cleaning molding residue.

[0043] The inclination angle α of the inclined plane 112 is 40-50 degrees, and the length direction of the air outlet slot 110 is parallel to the inclined plane 112, so that the jet force of the outgoing airflow is approximately the same in the horizontal and vertical directions, which is beneficial for cleaning up debris.

[0044] There are two sets of air outlet slots 110, which are placed on two inclined planes 112 respectively, and the air outlet projection lines of the two planes are parallel to each other. The two sets of air outlet slots 110 can form two sets of airflows, which are sprayed obliquely upward from two opposite directions, thus forming a three-dimensional air knife. The pin 92 has two adjacent side surfaces in each direction. The airflow from the two opposite directions can ensure that all four side surfaces of the pin 92 are sprayed with airflow, thereby effectively cleaning the pin 92. The chip module 9 is cleaned by airflow. The airflow intensity can be controlled by controlling the output of the air source 3. The intensity is highly controllable and wear-free, which reduces costs.

[0045] In this embodiment, as Figure 8 As shown, the inclination angle α of the inclined plane 112 is 45 degrees, making the included angle between the two inclined planes 112 90 degrees, which facilitates the processing and shaping of the air outlet block 11. Figure 7 As shown, the angle β between the projected airflow line M and the longitudinal direction Y is 35 degrees. Combined with the 45-degree angle of the inclined plane 112, this can further ensure that the force of the outgoing airflow on the chip module 9 is approximately the same in all directions, which is beneficial for cleaning up residues.

[0046] like Figure 5 , Figure 6 As shown, the air outlet block 11 is also provided with an air inlet duct 1102. The air inlet duct 1102 is arranged one-to-one with the air outlet slot 110, meaning there are also six air outlet ducts. The air inlet duct 1102 is arranged vertically along the Z-axis, with its top extending to the inclined plane 112 and connecting to the other end of the air outlet slot 110. The bottom end of the air inlet duct 1102 extends to the bottom surface of the air outlet block 11. The air inlet duct 1102 penetrates the air outlet block 11 vertically along the Z-axis to facilitate its processing and fabrication.

[0047] like Figure 5 , Figure 6As shown, an air source interface 119 is provided at the bottom of the air inlet duct 1102, which allows for easy connection of an air source 3. The cover plate 12 covers the top of the air inlet duct 1102, which can seal the top opening of the air inlet duct 1102 to prevent air leakage. At the same time, the cover plate 12 is attached to the inclined plane 112 and is also inclined at 45 degrees, which facilitates the change of airflow direction between the air inlet duct 1102 and the air outlet slot 110.

[0048] The cross-sectional area of ​​the air outlet duct 110 is smaller than that of the air inlet duct 1102, which can increase the airflow velocity in the air outlet duct 110 and improve the cleaning capacity. Here, it can be understood that the cross-sectional area of ​​the duct in this invention refers to the cross-section perpendicular to the airflow direction.

[0049] The cross-section of the air outlet duct 110 is rectangular, and the cross-section of the air inlet duct 1102 is circular, so that the air outlet duct 110 and the air inlet duct 1102 can be formed by milling on the air outlet block 11. Here, the cross-section of the air outlet duct 110 and the air inlet duct 1102 is not limited to the above shape, and other cross-sectional shapes can be formed by casting or other methods.

[0050] like Figure 5 , Figure 6 As shown, in this embodiment, the connection structure at the other end of the two sets of air outlet slots 110 is different. For ease of description, the two sets of air outlet slots 110 are named the first air outlet slot 110a and the second air outlet slot 110b, respectively. The first air outlet slot 110a and the second air outlet slot 110b are located on the two sides of the air outlet block 11, and there are three of each.

[0051] The other end of the first air outlet slot 110a is directly connected to the corresponding air inlet duct 1102, that is, the airflow directly enters the first air outlet slot 110a from the air inlet duct 1102.

[0052] The other end of the second air outlet slot 110b is connected to the corresponding air inlet duct 1102 via a transition slot 1103. The transition slot 1103 is straight, with its two ends connected to the other end of the second air outlet slot 110b and the top end of the air inlet duct 1102, respectively. Figure 8 As shown, the length direction of the transition groove 1103 is parallel to the inclined plane 112, and a transition projection line N is formed on the plane containing the straight plane 111. The transition projection line N is parallel to the transverse direction X. By utilizing the transition groove 1103, the angle between the length direction of the transition groove 1103 and the axial direction (i.e., vertical Z) of the air inlet duct 1102 is smaller than the angle between the air inlet duct 1102 and the second air outlet groove 110b, making the change in airflow direction smoother and reducing the energy loss of the airflow.

[0053] The airflow changes between the first air outlet slot 110a, the second air outlet slot 110b and their respective corresponding air inlets 1102 are slightly different, which makes the outgoing airflow of the two different. This can change the vibration amplitude of the residue and facilitate the residue to fall off the chip module 9.

[0054] In other embodiments, the first air outlet slot 110a, the second air outlet slot 110b and their respective corresponding air inlet slots can use the same structure to change the direction of airflow.

[0055] The air outlet 1101 of the first air outlet slot 110a and the air outlet 1101 of the second air outlet slot 110b are respectively located on both sides of the longitudinal central axis T of the plane. Figure 7 As shown, the longitudinal central axis T is a straight line extending longitudinally and located at the transverse midpoint of the straight plane 111. The air outlets 1101 of both sets of air outlet slots 110 do not cross the transverse midpoint of the straight plane 111.

[0056] The number of air outlet slots 110 in both groups is the same; in this embodiment, each group has three air outlet slots 110. Furthermore, the two groups of air outlet slots 110 are arranged in a one-to-one correspondence, with the center line connecting the air outlets 1101 of the corresponding two air outlet slots 110 parallel to the air outlet projection line M. The outgoing airflow from the two air outlet slots 110 can act on the opposite sides of the same pin 92, ensuring that airflow reaches all sides of the pin 92, guaranteeing that the pin 92 is cleaned.

[0057] like Figure 4 As shown, the top of the cover plate 12 protrudes from the straight plane 111 along the inclined plane 112. Its protruding part can also play a certain guiding role in the outgoing airflow at the air outlet 1101, ensuring the outgoing direction of the outgoing airflow.

[0058] In this embodiment, as Figure 3 As shown, the number of air outlet slots 110 in both groups is the same, and the number is also the same as the number of two-position three-way solenoid valves 2, that is, each group contains three air outlet slots 110, and the number of two-position three-way solenoid valves 2 is also three. The air source 3 is connected to the air inlet of each two-position three-way solenoid valve 2, and the two air outlets of the two-position three-way solenoid valve 2 are respectively connected to the two groups of air outlet slots 110 to control the two groups of air outlet slots 110 to pulse alternately spray air.

[0059] By using a two-position three-way solenoid valve 2, the two air outlets are connected to the air inlet in two states respectively, that is, the two air outlets alternately emit air, which in turn causes the two sets of air outlet slots 110 to alternately emit air, thereby achieving a pulse jet effect. This can increase the impact force on the residue on the chip module 9, which is conducive to the removal of residue and improves the cleaning effect.

[0060] A fluid control valve 4 is also connected between the gas source 3 and the two-position three-way solenoid valve 2. The fluid control valve 4 is used to control the gas flow rate, thereby controlling the outgoing speed and flow rate of the outgoing gas flow.

[0061] Combination Figure 2 , Figure 9 , Figure 10 As shown, the chip moving device drives the chip module 9 to move longitudinally, and the air knife moving device 200 drives the three-dimensional air knife mechanism 1 to move laterally. Through the relative movement of the chip module 9 and the three-dimensional air knife mechanism 1 in both the lateral and longitudinal directions, the plastic encapsulation residue on the chip module 9 can be effectively cleaned.

[0062] The chip moving device can employ a combination of a clamping mechanism and a longitudinal moving mechanism. The clamping mechanism can be a mature clamping mechanism from the existing technology, capable of clamping the chip module 9 with pins 92 facing downwards. The longitudinal moving mechanism can be any type of linear moving mechanism, connected to the clamping mechanism, to drive the clamping mechanism and the chip module 9 to translate longitudinally.

[0063] like Figure 9 , Figure 10 As shown, the air knife moving device 200 includes a lateral moving mechanism 201 and a support plate 202. The support plate 202 is arranged vertically, and its top end is connected to one side of the air outlet block 11 in the longitudinal direction to avoid the influence of the support plate 202 on the airflow. The lateral moving mechanism 201 is connected to the bottom end of the support plate 202 to drive the support plate 202 and the air outlet block 11 to move laterally. The support plate 202 can support the three-dimensional air knife mechanism 1 to a certain height, which is convenient for spraying air onto the chip module 9, and also facilitates the connection of pipes to the bottom of the air outlet block 11 to connect to the air source 3.

[0064] The air outlet block 11 and the lateral movement mechanism 201 are located on the same side of the support plate 202 in the longitudinal direction Y, so as to facilitate the installation of a cable chain mechanism 203 on the other side of the support plate 202 in the longitudinal direction. The cable chain mechanism 203 is used to accommodate the pipe that connects to the air outlet slot 110. The support plate 202 is provided with an opening so that the pipe can pass through the support plate 202 and connect to the air outlet block 11.

[0065] like Figure 9 , Figure 11As shown, the chip cleaning device also includes a bracket 300 and a protective cover 400. The bracket 300 is located on the side of the air outlet block 11 away from the support plate 202. The protective cover 400 is fixed to the bracket 300. The protective cover 400 includes a first baffle 401 and two second baffles 402. The first baffle 401 is located below the air outlet block 11 and is longitudinally positioned between the transverse moving mechanism 201 and the bracket 300. The first baffle 401 is arranged transversely, and its two ends are respectively connected to the two second baffles 402. The two second baffles 402 are located between the first baffle 401 and the bracket 300, and the second baffles 402 are fixedly connected to the bracket 300. The air outlet block 11 is arranged transversely between the two second baffles 402. The protective cover 400 can prevent blown-off residue from scattering everywhere and affecting the operation of the transverse moving mechanism 201 and other structures. A dust suction mechanism is also provided at the bottom of the protective cover 400 to suck up the residue.

[0066] The air outlet block 11 is a long strip arranged along the longitudinal direction Y. One end of its longitudinal direction is fixedly connected to the support plate 202. The air outlet duct 110 is arranged at the other end of the longitudinal direction of the air outlet block 11, so that the air outlet duct 110 can be completely located in the space between the two second baffles 402, thus preventing residue from splashing everywhere.

[0067] like Figure 12 As shown, the invention also provides another embodiment of the air outlet block 11. The air outlet block 11 has two sets of air outlet slots 110, which are positioned on both sides of the horizontal (X) axis of the air outlet block 11. The air outlets 1101 of the two sets of air outlet slots 110 are alternately arranged along the vertical (Y) axis, allowing the chip module 9 to clean the surfaces of the pins 92 at two opposite positions during longitudinal translation. In this embodiment, the air outlets 1101 of the two sets of air outlet slots 110 can be positioned on both sides of the longitudinal central axis of the straight plane 111, or they can cross the longitudinal central axis. In this embodiment, each set has two air outlet slots 110, for a total of four air outlet slots 110. However, in other embodiments, the number of air outlet slots 110 in the two sets is not limited to this and can vary.

[0068] In summary, although the present invention has been disclosed above with reference to preferred embodiments, the above preferred embodiments are not intended to limit the present invention. Those skilled in the art can make various modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the scope defined in the claims.

Claims

1. A three-dimensional air knife mechanism, characterized in that, Includes an air outlet and two cover plates; The upper surface of the air outlet block includes a straight plane and two inclined planes; in the transverse direction, the straight plane is located between the two inclined planes, and the three are connected to form an isosceles trapezoid with a smaller upper part and a larger lower part; the inclination angle of the inclined planes is 40-50 degrees; the air outlet block is provided with multiple air outlet slots, which are divided into two groups and placed on the two inclined planes; the multiple air outlet slots in the same group are arranged at intervals along the longitudinal direction; each air outlet slot is a straight strip, and the length direction of the air outlet slot is parallel to the inclined plane, and forms an air outlet projection line on the plane where the straight plane is located, and the angle between the air outlet projection line and the longitudinal direction is 30-50 degrees; the air outlet projection lines of the two groups of air outlet slots are parallel to each other; one end of the air outlet slot extends to the straight plane and forms an air outlet on the straight plane; the other end of the air outlet slot is connected to the air source equipment; The two cover plates are respectively attached to the two inclined planes and cover the opening of the air outlet slot on the inclined planes to form an air duct in the air outlet slot; The air outlet block is also provided with an air inlet duct, which is provided in a one-to-one correspondence with the air outlet slot. The air inlet duct is arranged vertically. The top end of the air inlet duct extends to an inclined plane and is connected to the other end of the air outlet slot. The bottom end of the air inlet duct extends to the bottom surface of the air outlet block and is provided with an air source interface. The cover plate covers the top end of the air inlet duct. The cross-sectional area of ​​the air outlet slot is smaller than that of the air inlet duct; the cross-sectional area of ​​the air outlet slot is rectangular, and the cross-sectional area of ​​the air inlet duct is circular. The air outlets of the two sets of air outlet slots are arranged alternately along the longitudinal direction.

2. The three-dimensional air knife mechanism according to claim 1, characterized in that, The inclined plane has an inclination angle of 45 degrees, and the angle between the air outlet projection line and the longitudinal direction is 35 degrees.

3. The three-dimensional air knife mechanism according to claim 1, characterized in that, The two sets of air outlet slots are the first air outlet slot and the second air outlet slot, respectively; The other end of the first air outlet duct is directly connected to the corresponding air inlet duct; The other end of the second air outlet slot is connected to the corresponding air inlet duct through a transition slot; the transition slot is straight, and its two ends are respectively connected to the other end of the second air outlet slot and the top end of the air inlet duct; the length direction of the transition slot is parallel to the inclined plane, and a transition projection line is formed on the plane where the straight plane is located, and the transition projection line is parallel to the transverse direction.

4. The three-dimensional air knife mechanism according to claim 1, characterized in that, The air outlets of the two sets of air outlet slots are located on both sides of the longitudinal central axis of the straight plane; the number of air outlet slots in each set is the same, and the two sets of air outlet slots are set in a one-to-one correspondence, with the center line connecting the air outlets of the corresponding two air outlet slots parallel to the air outlet projection line.

5. The three-dimensional air knife mechanism according to claim 1, characterized in that, The top of the cover plate protrudes from the straight plane along the inclined plane.

6. A three-dimensional air knife device, characterized in that, Includes an air source, a two-position three-way solenoid valve, and the three-dimensional air knife mechanism as described in any one of claims 1 to 5; The number of air outlet slots in the two groups of the three-dimensional air knife mechanism is the same, and the number is the same as that of the two-position three-way solenoid valves. The air source is connected to the air inlet of each of the two-position three-way solenoid valves; the two air outlets of the two-position three-way solenoid valves are respectively connected to the two sets of air outlet slots to control the two sets of air outlet slots to pulse-type alternating air jet.

7. A chip cleaning device for cleaning plastic encapsulation residue from chip modules, characterized in that, The device includes a chip moving device, an air knife moving device, and the three-dimensional air knife device as described in claim 6; the air knife moving device is connected to the three-dimensional air knife mechanism and is used to drive the three-dimensional air knife mechanism to move laterally; the chip moving device is used to clamp the chip module and drive the chip module to move longitudinally; the chip module is located above the three-dimensional air knife mechanism, and the pins of the chip module are arranged downwards.

Images