Water-cooled mirrors for high-energy laser systems

Abstract

The present invention provides a water-cooled reflector for use in a high-energy laser system, and relates to the technical field of high-energy laser systems. The water-cooled reflector includes a mirror body, a mounting substrate, a back flexible support assembly, a side flexible support assembly, and a water circulation assembly; the back of the mirror body is provided with a back mounting hole for mounting the back flexible support assembly, and a back water circulation port is provided in the back mounting hole; the side of the mirror body is provided with a side water circulation port, and the side flexible support assembly is arranged on the outside of the side water circulation port; the interior of the mirror body is provided with a water circulation pipeline connected to the back water circulation port and the side water circulation port; the water circulation assembly includes a first pipeline and a second pipeline. Through the above-mentioned manner, the present invention can effectively guarantee the surface accuracy of the reflector in a wide temperature difference and complex vibration environment while ensuring miniaturization and lightweight, and solve the problem of system beam quality degradation and target power reduction caused by thermal deformation of the reflector due to absorption of heat under long-term laser irradiation.

Description

Technical Field

[0001] The invention relates to the technical field of high energy laser systems, and in particular to a water-cooled reflecting mirror applied to high energy laser systems. Background Art

[0002] In recent years, with the continuous advancement of laser-related technologies, the output power of laser light sources has continued to rise, and high-energy laser systems with high output power have developed rapidly. However, during the operation of high-energy laser systems, the reflector needs to withstand the irradiation of high-power density laser beams for a long time, and the mirror body will inevitably absorb part of the energy, resulting in thermal distortion, which seriously affects the beam quality of the laser system.

[0003] In the prior art, the patent with publication number CN207442175U provides a cooling and adjustment structure for a high-power laser metal reflector. The patent connects the water inlet and outlet pipes hidden inside the mirror frame support body with the cooling and heat exchange pipes inside the reflector through sealing rings, and connects them to a constant temperature chiller to form a whole closed circulating water circuit, thereby providing continuous water cooling for the high-power laser metal reflector to alleviate the problem caused by excessive temperature.

[0004] However, the method provided by the above patent is only applicable to small-aperture reflectors. For large-aperture reflectors, the increase in mirror size significantly increases its sensitivity to temperature and structural changes. The heat dissipation and support structures provided by the above patent cannot meet the needs of large-aperture reflectors. In addition, based on the requirements of high-energy laser systems for miniaturization and lightweight products, it is necessary to make smaller and lighter laser systems have higher energy laser output capabilities, which puts forward further requirements on the load capacity of reflectors. How to design a more reasonable heat dissipation structure and support structure for large-aperture reflectors so that they can be miniaturized and lightweight while still having high surface accuracy and strong light tolerance is still a problem that needs to be solved urgently.

[0005] In view of this, it is necessary to design an improved water-cooled reflector for use in high-energy laser systems to solve the above problems. Summary of the invention

[0006] In view of the defects of the above-mentioned prior art, the purpose of the present invention is to provide a water-cooled reflecting mirror for use in high-energy laser systems, which can effectively guarantee the surface accuracy of the reflecting mirror in a wide temperature difference and complex vibration environment while ensuring miniaturization and lightweight, and solve the problem of system beam quality degradation and target power reduction caused by thermal deformation of the reflecting mirror due to heat absorption under long-term laser irradiation.

[0007] To achieve the above object, the present invention provides a water-cooled reflecting mirror for use in a high-energy laser system, comprising a mirror body, a mounting substrate, a back flexible support assembly, a side flexible support assembly and a water circulation assembly, wherein the mirror body is connected to the mounting substrate via the back flexible support assembly and the side flexible support assembly;

[0008] The back of the mirror body is provided with a back mounting hole for mounting the back flexible support assembly, and the back mounting hole is provided with a back water circulation port;

[0009] A side water circulation port is provided on the side of the mirror body, and the side flexible support component is provided on the outside of the side water circulation port of the mirror body;

[0010] The mirror body is provided with a water circulation pipeline in communication with the back water circulation port and the side water circulation port;

[0011] The water circulation component includes an inlet and outlet water pipe, which includes a first pipe that runs through the back flexible support component and is connected to the back water circulation port, and a second pipe that runs through the side flexible support component and is connected to the side water circulation port.

[0012] As a further improvement of the present invention, the back flexible support assembly includes an adhesive structure disposed in the back mounting hole and a back flexible joint connecting the adhesive structure and the mounting substrate.

[0013] As a further improvement of the present invention, the adhesive structure includes a peripheral wall adapted to the inner wall of the back mounting hole and a bottom plate arranged inside the peripheral wall; a glue injection groove is arranged on the outer side of the peripheral wall, and the bottom plate is perpendicular to the axial direction of the peripheral wall; a first through hole for the first pipe to pass through is arranged in the middle of the bottom plate, and a plurality of first threaded holes for connecting with the back flexible joint are arranged on the outer side of the first through hole on the bottom plate.

[0014] As a further improvement of the present invention, one end of the back flexible joint is provided with a flange for connecting to the mounting substrate, and the other end of the back flexible joint is arranged in the peripheral wall; a second through hole connected to the first through hole and a second threaded hole connected to the first threaded hole are axially arranged in the back flexible joint.

[0015] As a further improvement of the present invention, the side flexible support assembly includes a mounting ear connected to the mounting substrate and a side flexible joint connected to the mounting ear; glue injection holes are provided at both ends of the side flexible joint, and a third through hole for the second pipe to pass through is provided in the middle of the side flexible joint.

[0016] As a further improvement of the present invention, three back mounting holes are arranged at intervals along the circumferential direction on the back of the mirror body; three side water circulation ports are arranged at intervals along the circumferential direction on the side of the mirror body, and correspond one-to-one to the back water circulation ports in the back mounting holes; there are three water circulation pipes, and both ends of each of the water circulation pipes are respectively connected to the back water circulation port and the side water circulation port corresponding to the back water circulation port.

[0017] As a further improvement of the present invention, the spacing angle between adjacent back mounting holes is 120°, the spacing angle between adjacent side water circulation ports is 120°; the spacing angle between the back water circulation port and the corresponding side water circulation port is 180°.

[0018] As a further improvement of the present invention, the mirror body is made of SiC, a thermally conductive gasket is embedded in the central area inside the mirror body, and the thermally conductive gasket is arranged on the side of the water circulation pipe outside close to the mirror surface.

[0019] As a further improvement of the present invention, the water circulation component also includes a water cooling mechanism connected to the inlet and outlet water pipes, and a water valve arranged between the water cooling mechanism and the inlet and outlet water pipes.

[0020] As a further improvement of the present invention, the water cooling mechanism includes a water tank, a circulating water pump connected to the water tank and the inlet and outlet water pipes, and a temperature control system for adjusting the water temperature in the water tank.

[0021] The beneficial effects of the present invention are:

[0022] 1. The water-cooled reflecting mirror used in the high-energy laser system provided by the present invention can maintain the mirror body at an optimal working temperature by using the water circulation pipe inside the mirror body and the water circulation component outside the mirror body, while ensuring that the weight and size of the water-cooled reflecting mirror are not significantly increased, by respectively arranging the openings at both ends of the water circulation pipe inside the mirror body on the back and side of the mirror body, and respectively arranging corresponding back flexible support components and side flexible support components at corresponding positions on the back and side of the mirror body. At the same time, the back flexible support component and the side flexible support component are used to jointly effectively support the mirror body itself and the water inlet and outlet pipes, thereby effectively ensuring the surface accuracy of the reflecting mirror in a wide temperature difference and complex vibration environment.

[0023] 2. The water-cooled reflector for high-energy laser systems provided by the present invention can efficiently extract the heat of the mirror body by further optimizing the mirror body structure, utilizing the heat-conducting gaskets embedded in the mirror body, water circulation pipes, and external water circulation components, effectively improving the heat dissipation capacity of the mirror body, and keeping the mirror body temperature constant, so as to ensure the stability of the beam under long-term irradiation of the high-energy laser system, and ensure that the power of the system to the target is not affected. On this basis, the present invention can not only provide stable and effective flexible support for the mirror body itself, but also effectively support the inlet and outlet water pipes, avoiding the influence of the related structures added for heat dissipation on the surface accuracy of the mirror body, and the overall structure is simple, easy to install, and the overall weight and size of the water-cooled reflector do not change much, which meets the requirements of miniaturization and lightweight. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a front structural schematic diagram of a water-cooled reflecting mirror applied to a high-energy laser system provided by the present invention.

[0025] Figure 2 This is a schematic diagram of the back structure of a water-cooled reflecting mirror applied to a high-energy laser system provided by the present invention.

[0026] Figure 3 This is a schematic structural diagram of a support structure in a water-cooled reflecting mirror used in a high-energy laser system provided by the present invention.

[0027] Figure 4 This is a perspective structural schematic diagram of a mirror body in a water-cooled reflecting mirror used in a high-energy laser system provided by the present invention.

[0028] Figure 5 This is a schematic structural diagram of a side flexible support assembly in a water-cooled reflecting mirror used in a high-energy laser system provided by the present invention.

[0029] Figure 6 A schematic structural diagram of a viscose structure in a water-cooled reflecting mirror for use in a high-energy laser system provided by the present invention.

[0030] Figure 7 This is a schematic structural diagram of the back flexible section of the water-cooled reflecting mirror used in a high-energy laser system provided by the present invention.

[0031] Reference numerals

[0032] 10. Mirror body; 11. Back mounting hole; 12. Back water circulation port; 13. Side water circulation port; 14. Water circulation pipeline; 15. Thermal pad; 20. Mounting substrate; 30. Back flexible support assembly; 31. Glue structure; 311. Peripheral wall; 3111. Glue injection groove; 312. Bottom plate; 3121. First through hole; 3122. First threaded hole; 32. Back flexible joint; 321. Flange; 322. Second through hole; 323. Second threaded hole; 40. Side flexible support assembly; 41. Mounting ear; 42. Side flexible joint; 421. Glue injection hole; 422. Third through hole; 51. First pipeline; 52. Second pipeline. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0034] It should also be noted that, in order to avoid obscuring the present invention due to unnecessary details, only structures and / or processing steps closely related to the scheme of the present invention are shown in the drawings, while other details that are not closely related to the present invention are omitted.

[0035] In addition, it should be noted that the terms "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or apparatus.

[0036] like Figure 1-3 As shown, the present invention provides a water-cooled reflecting mirror for a high-energy laser system, comprising a mirror body 10, a supporting structure and a water circulation component; wherein the supporting structure comprises a mounting substrate 20, a back flexible supporting component 30 and a side flexible supporting component 40; the mirror body 10 is connected to the mounting substrate 20 via the back flexible supporting component 30 and the side flexible supporting component 40;

[0037] The back of the mirror body 10 is provided with a back mounting hole 11 for mounting the back flexible support assembly 30, and the back mounting hole 11 is provided with a back water circulation port 12;

[0038] The side of the mirror body 10 is provided with a side water circulation port 13, and the side flexible support component 40 is provided outside the side water circulation port 13 of the mirror body 10;

[0039] The mirror body 10 is provided with a water circulation pipe 14 in communication with the back water circulation port 12 and the side water circulation port 13;

[0040] The water circulation component includes water inlet and outlet pipes, which include a first pipe 51 that runs through the back flexible support component 30 and is connected to the back water circulation port 12 , and a second pipe 52 that runs through the side flexible support component 40 and is connected to the side water circulation port 13 .

[0041] Through the above-mentioned method, the water circulation pipe 14 inside the mirror body 10 and the water circulation assembly outside the mirror body 10 can be used to keep the mirror body 10 at the optimal working temperature under the condition that the weight and size of the water-cooled reflector are not significantly increased, so as to solve the problem of system beam quality degradation and target power reduction caused by thermal deformation of the reflector due to absorption of heat under long-term laser irradiation; at the same time, the back flexible support assembly 30 and the side flexible support assembly 40 are used to jointly effectively support the mirror body 10 itself and the inlet and outlet water pipes, effectively ensuring the surface accuracy of the reflector in a wide temperature difference and complex vibration environment. In addition, based on the joint action of the above-mentioned support assembly, water circulation pipe 14 and water circulation assembly, the support and heat dissipation requirements of the large-caliber mirror body 10 can be met, and the added equipment has no obvious effect on the overall weight and size of the water-cooled reflector, so that it still has high surface accuracy and strong light tolerance while maintaining miniaturization and lightness.

[0042] Please refer to Figure 4 In some preferred embodiments of the present invention, three back mounting holes 11 are arranged at intervals along the circumferential direction on the back of the mirror body 10, a back water circulation port 12 is arranged at the center of each back mounting hole 11, the interval angle between adjacent back mounting holes 11 is 120°, and the connecting line of the three back mounting holes 11 forms an equilateral triangle; similarly, three side water circulation ports 13 are arranged at intervals along the circumferential direction on the side of the mirror body 10, and correspond one-to-one to the back water circulation ports 12 in the back mounting holes 11, the interval angle of adjacent side water circulation ports 13 is 120°, the interval angle between adjacent side water circulation ports 13 and the back water circulation port 12 is 60°, and the connecting line of the three side water circulation ports 13 forms an equilateral triangle that is staggered by 60° with the back mounting hole 11. On this basis, there are three water circulation pipes 14 inside the mirror body 10, and the two ends of each water circulation pipe 14 are respectively connected to the back water circulation port 12 and the side water circulation port 13 which is 180° away from the back water circulation port 12; each water circulation pipe 14 is in a curved arc shape, and the three water circulation pipes 14 are evenly distributed in various areas inside the mirror body 10, and each water circulation pipe 14 is independent of each other and not connected to each other.

[0043] Such a configuration can not only utilize multiple water circulation pipes 14 to increase the heat dissipation area in the mirror body 10 to improve the heat dissipation efficiency, but also can control different water circulation pipes 14 separately as needed to adjust the heat dissipation effect more accurately and effectively. Moreover, the back flexible support assembly 30 and the side flexible support assembly 40 set on this basis can play a stable supporting role for the mirror body 10 and the water inlet and outlet pipes with as few as possible and smaller volume, effectively ensuring the surface accuracy of the reflector in a wide temperature difference and complex vibration environment.

[0044] It should be noted that the design of the back mounting holes 11 described above is only a preferred embodiment. In other embodiments of the present invention, the number of back mounting holes 11 and the spacing angles between adjacent back mounting holes 11 can be designed according to the required heat dissipation demand data. For example, four, five, six or other multiple back mounting holes 11 can be set, and correspondingly, the spacing angles between four, five, six or other multiple back mounting holes 11 are 90°, 72°, and 60°; therefore, it can be understood that more of the above structures can be set to further improve the heat dissipation effect, and the specific number of designs can be comprehensively considered based on the size of the mirror body 10, the required heat dissipation demand data, and the production cost. In general, it is preferred to set three back mounting holes 11 so as to reduce the overall weight of the device as much as possible while ensuring the surface accuracy of the mirror body 10.

[0045] More preferably, in some embodiments of the present invention, the mirror body 10 is made of SiC, which can meet the demand for lightweight. A thermally conductive gasket 15 is embedded in the central area inside the mirror body 10, and the thermally conductive gasket 15 is arranged on the side of the water circulation pipe 14 outside close to the mirror surface, which is conducive to uniform heat dissipation.

[0046] In a specific embodiment of the present invention, the diameter of the mirror body 10 is 500 mm, the thickness is 62 mm, and the design weight is about 19 kg, which can meet the structural stiffness requirements; the water circulation pipe 14 in the mirror body 10 is integrally formed with the mirror body 10, and its diameter can be selected to be 20 mm, and its main pipes are evenly arranged in a circular shape 40 mm away from the back of the mirror body 10.

[0047] It is understandable that the diameter of the water circulation pipe 14 can be designed based on the diameter, thickness and other data of the mirror body 10, and the optimal size data can be obtained through numerical simulation.

[0048] Please refer to Figure 5In some preferred embodiments of the present invention, the side flexible support component 40 includes a mounting ear 41 connected to the mounting substrate 20 and a side flexible joint 42 connected to the mounting ear 41; both ends of the side flexible joint 42 are provided with glue injection holes 421, and the middle part of the side flexible joint 42 is provided with a third through hole 422 for the second pipe 52 to pass through.

[0049] In a specific embodiment of the present invention, the material of the side flexible support component 40 is preferably TC4 titanium alloy material, and the flexibility of the side flexible joint 42 can be selected according to the weight of the mirror body 10 so as to stably support the radial gravity of the mirror body 10.

[0050] With such a configuration, the side flexible support assembly 40 can be fixed on the mounting substrate 20 through the mounting lug 41, and then glue is injected through the glue injection hole 421, so that the side flexible joint 42 is firmly bonded to the side of the mirror body 10, and the second pipe 52 can pass through the third through hole 422 to connect with the side water circulation port 13. The overall installation process is simple, and the three side flexible support assemblies 40 can jointly support the radial force exerted on the mirror body 10, thereby ensuring the position accuracy and surface accuracy of the mirror body 10.

[0051] Please refer to Figure 3 and Figure 6-7 In some preferred embodiments of the present invention, the back flexible support component 30 includes an adhesive structure 31 disposed in the back mounting hole 11 and a back flexible joint 32 connecting the adhesive structure 31 and the mounting substrate 20. The material of the back flexible support component 30 is preferably TC4 titanium alloy; the overall height of the adhesive structure 31 is preferably 20 mm, and the diameter is preferably 65 mm, so as to provide sufficient bonding area to ensure the stability of the support. It should be noted that Figure 3 The external adhesive structure 31 is not shown in the lower back flexible support component 30, which is only for the convenience of observing the structure of the back flexible joint 32. In the actual device, each back flexible support component 30 contains both the adhesive structure 31 and the back flexible joint 32.

[0052] Specifically, the adhesive structure 31 includes a peripheral wall 311 adapted to the inner wall of the back mounting hole 11, and a bottom plate 312 arranged inside the peripheral wall 311; a glue injection groove 3111 is arranged on the outer side of the peripheral wall 311, and the bottom plate 312 is perpendicular to the axial direction of the peripheral wall 311; a first through hole 3121 for the first pipe 51 to pass through is arranged in the middle of the bottom plate 312, and a plurality of first threaded holes 3122 for connecting with the back flexible joint 32 are arranged on the outer side of the first through hole 3121 on the bottom plate 312. One end of the back flexible joint 32 is provided with a flange 321 for connecting with the mounting substrate 20, and the other end of the back flexible joint 32 is provided in the peripheral wall 311; the back flexible joint 32 is provided with a second through hole 322 communicating with the first through hole 3121 and a second threaded hole 323 communicating with the first threaded hole 3122 along the axial direction, and the first pipe 51 can be connected with the back water circulation port 12 after passing through the second through hole 322 and the first through hole 3121 in sequence. With such a configuration, the back flexible support assembly 30 can support the axial force exerted on the mirror body 10 without increasing the overall size of the water-cooled reflector.

[0053] In the above manner, the mounting substrate 20 serves as the main load-bearing structural member of the mirror body 10, and stably bears the weight of the mirror body 10 through the flange 321 of the back flexible joint 32 and the mounting lug 41 of the side flexible support assembly 40, and the water-cooled reflector as a whole still has a small size and light weight. Specifically, in some embodiments of the present invention, the material of the mounting substrate 20 is preferably a 2A12 aluminum alloy material with strong thermal conductivity and low density; a fourth through hole connected to the second through hole 322 is also provided in the mounting substrate 20, so that the first pipe 51 passes through the mounting substrate 20 and is connected to the back water circulation port 12. Based on this, a structure for fixing the first pipe 51 and the second pipe 52 can also be provided on the back of the mounting substrate 20.

[0054] In some embodiments of the present invention, the water circulation component also includes a water cooling mechanism connected to the inlet and outlet water pipes, and a water valve arranged between the water cooling mechanism and the inlet and outlet water pipes; wherein, a flow meter can be arranged in the inlet and outlet water pipes to observe the actual flow rate; the water cooling mechanism includes a water tank, a circulating water pump connected to the water tank and the inlet and outlet water pipes, and a temperature control system for adjusting the water temperature in the water tank, which can be assembled as needed or a commercially available water cooler can be directly selected.

[0055] Preferably, the second pipe 52 connected to the side water circulation port 13 is used as a water inlet pipe, and the first pipe 51 connected to the back water circulation port 12 is used as a water outlet pipe, so as to dissipate heat more efficiently. Quick-connect plugs can be provided at the side water circulation port 13 and the back water circulation port 12, so that the first pipe 51 and the second pipe 52 can be quickly connected when inserted into the corresponding water circulation port. When there are multiple water circulation pipes 14 in the mirror body 10, each water circulation channel corresponds to a water valve, so as to independently control the flow in each water circulation channel, and more accurately control the temperature of the mirror body 10 to stabilize it at the optimal working temperature.

[0056] The following is a detailed description of the steps for installing and using the water-cooled reflector for a high-energy laser system provided by the present invention:

[0057] First, a water flow test is performed on the mirror body 10. Each water circulation pipeline 14 in the mirror body 10 is tested for water flow to ensure that each water circulation pipeline 14 can flow water normally, to prevent the mirror body 10 from being damaged due to water flow blockage or heat dissipation from being affected due to too small flow rate during water circulation.

[0058] Then, the whole assembly of the water-cooled reflector is performed. First, the adhesive structure 31 is placed into the back mounting hole 11 of the mirror body 10, so that the adhesive structure 31 and the back mounting hole 11 are coaxial; then, the epoxy resin glue is injected between the outer wall of the adhesive structure 31 and the inner wall of the back mounting hole 11 through the glue injection groove 3111, and the glue layer is left to solidify; then, the back flexible joint 32 with the first pipe 51 in the second through hole 322 is connected to the adhesive structure 31 by screws, and the screws are passed through the second threaded hole 323 and the first threaded hole 3122 in sequence, and the end of the first pipe 51 is quickly plugged and locked with the back water circulation port 12; then, the mounting substrate 20 is connected to the flange 321 of the back flexible joint 32 by screws, and the installation of the back support assembly and the mounting substrate 20 is completed. After that, the mounting base plate 20 is connected to the mounting lug 41 of the side support assembly by screws, and the third through hole 422 of the side flexible joint 42 is aligned with the side water circulation port 13, and the second pipe 52 is passed through the third through hole 422 and quickly plugged and locked with the side water circulation port 13, and then epoxy resin glue is injected through the glue injection hole 421 to make the side flexible joint 42 and the side of the mirror body 10 tightly bonded, that is, the installation of the side flexible support assembly 40 is completed. After that, the first pipe 51 and the second pipe 52 are connected to the water cooler through the water valve to complete the installation of the water circulation assembly.

[0059] Finally, the water-cooled reflector is tested as a whole. The water valve is opened to the maximum flow rate, and then the water cooler is turned on to circulate the coolant in the water circulation assembly and the water circulation pipe 14 in the mirror body 10. By adjusting the flow rate and the temperature of the coolant, the temperature of the mirror body 10 can be effectively regulated to reach the optimal working temperature of the mirror body 10.

[0060] In summary, the present invention provides a water-cooled reflector for use in a high-energy laser system, and relates to the technical field of high-energy laser systems. The water-cooled reflector includes a mirror body 10, a mounting substrate 20, a back flexible support assembly 30, a side flexible support assembly 40, and a water circulation assembly; the back of the mirror body 10 is provided with a back mounting hole 11 for mounting the back flexible support assembly 30, and the back mounting hole 11 is provided with a back water circulation port 12; the side of the mirror body 10 is provided with a side water circulation port 13, and the side flexible support assembly 40 is arranged outside the side water circulation port 13; the inside of the mirror body 10 is provided with a water circulation pipeline 14 connected to the back water circulation port 12 and the side water circulation port 13; the water circulation assembly includes a first pipeline 51 and a second pipeline 52. In the above manner, the present invention can effectively ensure the surface accuracy of the reflector in a wide temperature difference and complex vibration environment while ensuring miniaturization and lightweight, and solve the problem of system beam quality degradation and target power reduction caused by thermal deformation of the reflector due to absorption of heat under long-term laser irradiation.

[0061] The above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solution of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present invention.

Claims

1. A water-cooled reflector for use in a high-energy laser system, characterized in that: It includes a mirror body, a mounting substrate, a back flexible support component, a side flexible support component and a water circulation component, wherein the mirror body is connected to the mounting substrate through the back flexible support component and the side flexible support component; The back of the mirror body is provided with a back mounting hole for mounting the back flexible support assembly, and the back mounting hole is provided with a back water circulation port; A side water circulation port is provided on the side of the mirror body, and the side flexible support component is provided on the outside of the side water circulation port of the mirror body; The mirror body is provided with a water circulation pipeline in communication with the back water circulation port and the side water circulation port; The water circulation assembly includes water inlet and outlet pipes, and the water inlet and outlet pipes include a first pipe that runs through the back flexible support assembly and is connected to the back water circulation port, and a second pipe that runs through the side flexible support assembly and is connected to the side water circulation port; The back flexible support assembly includes a viscose structure arranged in the back mounting hole, and a back flexible joint connecting the viscose structure and the mounting substrate; the viscose structure includes a peripheral wall adapted to the inner wall of the back mounting hole, and a bottom plate arranged in the peripheral wall; a first through hole for the first pipe to pass through is arranged in the middle of the bottom plate; a flange for connecting to the mounting substrate is arranged at one end of the back flexible joint, and the other end of the back flexible joint is arranged in the peripheral wall; a second through hole communicating with the first through hole is arranged in the axial direction in the back flexible joint; The side flexible support assembly includes a mounting ear connected to the mounting base plate and a side flexible joint connected to the mounting ear; a third through hole for the second pipe to pass through is arranged in the middle of the side flexible joint.

2. The water-cooled reflecting mirror for use in a high-energy laser system according to claim 1, characterized in that: The outer side of the peripheral wall is provided with a glue injection groove, and the bottom plate is perpendicular to the axial direction of the peripheral wall; the outer side of the first through hole on the bottom plate is provided with a plurality of first threaded holes for connecting with the back flexible joint.

3. The water-cooled reflecting mirror for use in a high-energy laser system according to claim 2, characterized in that: A second threaded hole communicating with the first threaded hole is axially arranged in the back flexible joint.

4. The water-cooled reflecting mirror for high-energy laser system according to claim 1, characterized in that: Glue injection holes are arranged at both ends of the side flexible joint.

5. The water-cooled reflecting mirror for high-energy laser system according to claim 1, characterized in that: The back of the mirror body is provided with three back mounting holes at intervals along the circumferential direction; the side of the mirror body is provided with three side water circulation ports at intervals along the circumferential direction, and correspond one-to-one to the back water circulation ports in the back mounting holes; there are three water circulation pipes, and the two ends of each of the water circulation pipes are respectively connected to the back water circulation port and the side water circulation port corresponding to the back water circulation port.

6. The water-cooled reflecting mirror for use in a high-energy laser system according to claim 5, characterized in that: The spacing angle between adjacent back mounting holes is 120°, and the spacing angle between adjacent side water circulation ports is 120°; the spacing angle between the back water circulation port and the corresponding side water circulation port is 180°.

7. The water-cooled reflecting mirror for use in a high-energy laser system according to claim 1, characterized in that: The mirror body is made of SiC, a thermally conductive gasket is embedded in the central area of ​​the mirror body, and the thermally conductive gasket is arranged on the side of the water circulation pipe outside close to the mirror surface.

8. The water-cooled reflecting mirror for use in a high-energy laser system according to claim 1, characterized in that: The water circulation component also includes a water cooling mechanism communicated with the inlet and outlet water pipes, and a water valve arranged between the water cooling mechanism and the inlet and outlet water pipes.

9. The water-cooled reflecting mirror for use in a high-energy laser system according to claim 8, characterized in that: The water cooling mechanism comprises a water tank, a circulating water pump connected with the water tank and the water inlet and outlet pipes, and a temperature control system for adjusting the water temperature in the water tank.

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