A temperature fluctuation attenuator based on cascade system and optimized manufacturing method

Abstract

The present invention discloses a temperature fluctuation attenuator based on a cascade system and an optimized manufacturing method. The temperature fluctuation attenuator includes a main shell and a plurality of porous plates. The interior of the main shell is hollow to form a cavity structure. Each porous plate is a circular plate with small holes. The plurality of porous plates are arranged in parallel and spaced along the flow direction of the fluid. Each porous plate is perpendicular to the flow direction of the fluid and is used to block the flow and attenuate the fluctuation of the fluid. The optimized manufacturing method includes obtaining the volume V of the cavity structure, the diameter D of the porous plate, the density ρ of the ultra-clean fluid, the flow velocity v of the fluid and the time lag time τ, and then constructing a time lag model G(s) of the temperature fluctuation attenuator. Finally, the time lag model G(s) is optimized and solved to solve the number N of the porous plates, the number n of the small holes on the porous plates, and the aperture d of the small holes on the porous plates, thereby manufacturing the optimized temperature fluctuation attenuator. The present invention improves the attenuation performance of the attenuator under high-frequency temperature disturbance, which is beneficial to improving the temperature control accuracy of the lithography machine.

Description

Technical Field

[0001] The invention relates to the technical field of immersion lithography, and in particular to a temperature fluctuation attenuator based on a cascade system and an optimized manufacturing method. Background Art

[0002] The immersion unit is a key component of the immersion lithography machine. Its function is to immerse the exposure area between the last-stage projection lens and the silicon wafer with ultra-clean fluid. According to the Rayleigh formula, R = k1×(λ / NA) = k1×(λ / (n×sinθ)); where R is the resolution of the lithography machine, k1 is the process influencing factor, λ is the wavelength of the laser light source, NA is the numerical aperture of the lithography machine, n is the refractive index of the immersion liquid, sin(θ) is the incident angle of the light source, and the resolution is related to the process influencing factor, the wavelength of the laser light source and the numerical aperture. Acting as a liquid lens, it increases the numerical aperture of the system and improves the lithography resolution without reducing the wavelength and process factors. However, the refractive index of the ultra-clean liquid will change due to temperature fluctuations, resulting in imaging aberrations. Therefore, maintaining the temperature stability of the ultra-clean fluid is the key to ensuring the resolution of lithography.

[0003] According to the actual temperature control requirements of the ultra-clean fluid in the immersion unit of the lithography machine, its long-term temperature fluctuation is required to be no more than 0.01°C. However, based on the internal process architecture of the lithography machine, the immersion temperature control system that provides ultra-clean fluid is attached to the immersion water treatment module, which is easily disturbed by the internal heat load, changes in the external environment temperature and poor factory input. These problems will bring challenges to the high-precision temperature control of ultra-clean fluid. Specifically, since temperature control elements such as heaters or heat exchangers are limited by bandwidth limitations and hardware characteristics, they only have a good control effect on low-frequency disturbances and cannot effectively control high-frequency disturbances. High-frequency disturbances require buffer tanks for attenuation. The performance of a general buffer tank depends on the degree of mixing and volume in the tank. It is often necessary to significantly increase the volume to enhance its attenuation performance in the high-frequency band, but due to factors such as the volume space in the lithography machine, the effect is often less than expected.

[0004] Some temperature control devices proposed in the prior art use a combination of temperature control elements and buffer tanks to achieve high-precision temperature control, but the performance of the buffer tank is limited by the degree of mixing. Some have proposed using a bypass liquid to suppress the temperature fluctuation of the main pipeline fluid in a principle similar to that of a heat exchanger, but this greatly weakens the heat exchange performance through heat exchange, and the temperature fluctuation in the bypass fluid will also be transmitted to the fluid in the main circuit, causing secondary disturbances. In addition, the structural design of the heat exchange tube is complex, and it will cause processing difficulties when using ultra-clean materials for processing. Therefore, since the temperature control element cannot effectively control high-frequency temperature disturbances, optimizing the performance of the attenuator under a limited volume becomes a crucial factor. Summary of the invention

[0005] In order to overcome the shortcomings of the prior art, the temperature control elements and buffer tanks in the temperature control of the ultra-clean fluid in the immersion unit of the existing lithography machine cannot meet the demand for suppressing high-frequency temperature fluctuations. The present invention provides a temperature fluctuation attenuator based on a cascade system, which is mainly used for ultra-clean fluid temperature control to solve the problem that high-frequency temperature disturbances cannot be effectively attenuated by the existing buffer tank due to volume and mixing limitations.

[0006] The technical solution adopted by the present invention is:

[0007] 1. A temperature fluctuation attenuator based on a cascade system

[0008] It includes a main shell and a plurality of porous plates;

[0009] The interior of the main shell is hollow to form a cavity structure, and the cavity structure is provided with inlets and outlets at both ends along the flow direction of the fluid;

[0010] Each of the porous plates is a circular plate with small holes. A plurality of porous plates are arranged in parallel and at intervals along the flow direction of the fluid. Each porous plate is perpendicular to the flow direction of the fluid and is used to block the flow and attenuate the fluctuation of the fluid.

[0011] The cavity structure is provided with fluid ports at both ends along the flow direction of the fluid, serving as an outlet and an inlet respectively; the fluid ports are conical ports, and the two fluid ports are symmetrically opened at the two ends of the cavity structure along the flow direction of the fluid, the small ends of the two fluid ports serve as the inlet and the outlet of the fluid respectively, and the large ends of the two fluid ports are connected to the two ends of the cavity structure respectively.

[0012] The cavity structure is divided into a middle cavity located in the center and an annular cavity located around the middle cavity. The annular cavity and the middle cavity are separated by an annular partition. At least one annular partition is arranged in the annular cavity to divide itself into multiple annular sub-cavities arranged concentrically from the inside to the outside; each annular partition is provided with a through opening at one end close to the inlet or outlet, so that the two adjacent cavities where the annular partition is located are connected through the through opening, the through openings opened by each two adjacent annular partitions are close to different ports, and the innermost annular partition has a through opening at one end close to the outlet; a through opening is opened at one point on the outer wall of the outermost annular sub-cavity, the through opening is connected to the collector, and the through opening opened on the outer wall of the outermost annular cavity is different from the through opening opened on the corresponding annular partition on the inner side of the outermost annular cavity.

[0013] The cavity structure is divided into a middle cavity located in the center and an inner annular cavity and an outer annular cavity located on the periphery of the middle cavity. The middle cavity, the inner annular cavity and the outer annular cavity are arranged in sequence from the inside to the outside and adjacent cavities are separated by annular partitions. The middle cavity and the inner annular cavity are connected only at one end close to the outlet, and the inner annular cavity and the outer annular cavity are connected only at one end close to the inlet; the outer annular cavity has an opening on the outer wall close to the outlet, and the opening is connected to the collector.

[0014] Each fluid port is divided into a threaded sealing port and a fluid expansion port; the fluid expansion port is a conical port, one end of the threaded sealing port serves as the inlet or outlet of the fluid, the other end of the threaded sealing port is connected to the small end of the fluid expansion port, and the large end of the fluid expansion port is connected to one end of the main body of the cavity structure.

[0015] There are several small holes on each of the porous plates, which are divided into at least two circles of small hole groups. The small hole groups are radially arranged from the inside to the outside, and each circle of small hole groups is composed of multiple through holes distributed circumferentially along the same circle; the distribution of the through holes of the small holes on each of the porous plates is consistent, or may be inconsistent.

[0016] 2. An optimized manufacturing method for a temperature fluctuation attenuator based on a cascade system

[0017] Step S1, first, obtain the volume V of the cavity structure, the diameter D of the porous plate, the density ρ of the ultra-clean fluid, the flow velocity v of the fluid and the time lag τ;

[0018] Step S2, constructing a time lag model G(s) of the temperature fluctuation attenuator;

[0019] Step S3, optimizing and solving the time-delay model G(s), solving the number N of the porous plates, the number n of the small holes on the porous plates, and the diameter d of the small holes on the porous plates, and then manufacturing an optimized temperature fluctuation attenuator.

[0020] The time lag model G(s) in step S2 is specifically:

[0021] G(s) = (1×e -τs / ((θ×((1-(d×n 1 / 2 / D) 4 ×(1-C 2 )) 1 / 2 / (0.47+0.1×C×d×n 1 / 2 / D)-1) 2 ×ρ×V×s) / (v×(N+1)) + 1)) N + 1

[0022] Among them, G(s) is the transfer function model of the influence of the inlet temperature change of the temperature fluctuation attenuator on the outlet temperature, s is the Laplace operator, θ is the mixing coefficient, ρ is the density of the ultra-clean fluid, V is the volume of the cavity structure, D is the diameter of the porous plate, v is the flow rate of the fluid, τ is the lag time, C is the porous plate outflow coefficient, N is the number of porous plates, n is the number of small holes on the porous plate, and d is the aperture of the small holes on the porous plate.

[0023] The present invention solves the problem that high-frequency temperature disturbances cannot be effectively attenuated by existing buffer tanks due to volume and mixing limitations through the design of cascaded porous plates and flow channel structures. It also improves structural performance and compactness by optimizing manufacturing methods, avoids external thermal disturbances, and greatly improves the attenuation performance of the temperature fluctuation attenuator in the high frequency band.

[0024] The beneficial effects of the present invention are:

[0025] In the present invention, a porous plate is used to decompose a single large cavity in the temperature fluctuation attenuator into a multi-stage small cavity connected in series. The characteristics of the multi-stage system in series are utilized, and the backflow and turbulence formed by the porous plate baffle and the effect of the small hole jet are coordinated to change the order of the system while improving the mixing coefficient θ, thereby greatly improving the attenuation performance of the temperature fluctuation attenuator in the high frequency band. Moreover, the volume does not change compared to the ordinary attenuator, and the structure is compact, which is conducive to use on complex lithography equipment.

[0026] The connection between the intermediate cavity and the annular cavity provided in the present invention allows the attenuated high-temperature stable fluid at the outlet of the intermediate cavity to flow back into the annular cavity and exchange heat with the fluid in the intermediate cavity. The outermost annular cavity is used for the outermost fluid to exchange heat with the external heat source and discharge the fluid, thereby avoiding the influence of thermal disturbance caused by the external heat source. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a three-dimensional schematic diagram of the device structure of the present invention;

[0028] Figure 2 It is a schematic cross-sectional view of the device structure of the present invention;

[0029] Figure 3 It is a schematic diagram of the structure of the porous plate of the present invention;

[0030] Figure 4 It is a comparison diagram of the amplitude-frequency characteristic curve of the device experiment of the present invention and an empty can.

[0031] In the figure: 1, threaded sealing port, 2, middle cavity, 3, fluid expansion port, 4, porous plate, 5, inner annular cavity, 6, outer annular cavity, 7, through port, 8, small hole. DETAILED DESCRIPTION

[0032] The present invention is further described below with reference to the accompanying drawings and examples.

[0033] like Figure 1 and Figure 2 As shown, a temperature fluctuation attenuator based on a cascade system includes a main shell and a plurality of porous plates 4; the interior of the main shell is hollow to form a cavity structure, and the cavity structure is provided with inlets and outlets at both ends along the flow direction of the fluid.

[0034] like Figure 3 As shown, each porous plate 4 is a circular plate with small holes 8, and multiple porous plates 4 are arranged in parallel and spaced apart along the flow direction of the fluid, dividing the cavity structure into multiple small cavity structures. Each porous plate 4 is perpendicular to the flow direction of the fluid, and is used to block the flow and attenuate the fluctuation of the fluid, causing backflow and turbulence to form in the small cavity structure.

[0035] The cavity structure is provided with fluid ports at both ends along the flow direction of the fluid as the outlet and the inlet respectively. The fluid ports are conical ports. The two fluid ports are symmetrically opened at the two ends of the cavity structure along the flow direction of the fluid. The small ends of the two fluid ports serve as the inlet and the outlet of the fluid respectively, and the large ends of the two fluid ports are respectively connected to the two ends of the main body of the cavity structure.

[0036] The cavity structure is divided into a middle cavity 2 located in the center and an annular cavity located around the middle cavity 2. The annular cavity and the middle cavity 2 are separated by an annular partition. At least one annular partition is arranged in the annular cavity to divide itself into multiple annular sub-cavities arranged concentrically from the inside to the outside.

[0037] Each annular partition has a through-hole 7 at one end near the inlet or outlet, so that the two adjacent chambers where the annular partition is located are connected through the through-hole 7. The through-holes 7 opened in each two adjacent annular partitions are close to different ports, namely, close to the inlet and the outlet respectively, that is, in each two adjacent annular partitions, the through-hole 7 of one annular partition is opened near the inlet, and the through-hole 7 of the other annular partition is opened near the outlet. And the innermost annular partition between the annular chamber and the middle chamber 2 has a through-hole 7 at one end near the outlet, so that the innermost annular sub-chamber and the middle chamber 2 are connected only at one end near the outlet.

[0038] A through opening 7 is opened at an outer wall of the outermost annular sub-cavity, and the through opening 7 is connected to the collector. The through opening 7 opened on the outer wall of the outermost annular cavity and the through opening 7 opened on the corresponding annular partition on the inner side of the outermost annular cavity are close to different openings, so that a part of the fluid flowing into the inlet of the middle cavity 2 finally flows through the inside of the annular cavity in an S-shaped path and then flows out.

[0039] The cavity structure is divided into a middle cavity 2 located in the center and an inner annular cavity 5 and an outer annular cavity 6 located on the periphery of the middle cavity 2. The middle cavity 2, the inner annular cavity 5 and the outer annular cavity 6 are arranged in sequence from the inside to the outside and adjacent cavities are separated by annular partitions. The annular partition between the middle cavity 2 and the inner annular cavity 5 has a through hole 7 at the end close to the outlet so that the middle cavity 2 and the inner annular cavity 5 are connected only at the end close to the outlet. The annular partition between the inner annular cavity 5 and the outer annular cavity 6 has a through hole 7 at the end close to the inlet so that the inner annular cavity 5 and the outer annular cavity 6 are connected only at the end close to the inlet.

[0040] The outer annular cavity 6 is provided with a through opening 7 at a location on the outer wall near the outlet, and the through opening 7 is communicated with the collector.

[0041] Each fluid port is divided into a threaded sealing port 1 and a fluid expansion port 3. The fluid expansion port 3 is a tapered port, one end of the threaded sealing port 1 serves as the inlet or outlet of the fluid, the other end of the threaded sealing port 1 is connected to the small end of the fluid expansion port 3, and the large end of the fluid expansion port 3 is connected to one end of the main body of the cavity structure.

[0042] There are several small holes 8 on each porous plate 4, which are divided into at least two circles of small hole groups. The small hole groups are evenly spaced from the inside to the outside along the radial direction, and each circle of small hole groups is composed of multiple through holes evenly spaced along the circumference of the same circle; the distribution of the through holes of the small holes 8 on each porous plate 4 may be consistent, or may not be consistent.

[0043] The small holes 8 formed in the porous plate 4 are axially arranged along the flow direction of the fluid.

[0044] The flow process of the fluid under the device of the present invention is:

[0045] The fluid enters from the threaded sealing port 1 near the entrance, expands through the fluid expansion port 3, and enters the middle cavity 2 of the cavity structure. The porous plate 4 blocks the fluid, causing backflow and turbulence in the multiple small cavity structures, thereby enhancing the mixing effect. The fluid passes through the small hole 8, and the fluid passing through the small hole 8 forms a sudden change in diameter with the blocking fluid. The flow rate of the fluid will increase, forming a small hole jet, so that when it flows into the lower small cavity structure, a jet is formed, thereby enhancing the mixing effect.

[0046] A part of the fluid flows out directly through the middle cavity 2 of the cavity structure through the fluid expansion port 3 and the threaded sealing port 1 of the fluid port near the outlet, and the other part of the fluid flows to one end of the middle cavity 2 near the outlet, and then flows into the annular cavity. When the fluid flows through the innermost annular sub-cavity, the fluid exchanges heat with the fluid in the small cavity structure divided by the porous plate 4 in the middle cavity 2 step by step through the annular partition, thereby reducing the temperature fluctuation of the fluid in the small cavity structure divided by the porous plate 4. The fluid flows in an S-shaped path inside the annular cavity. When it flows to the outermost annular sub-cavity, the fluid exchanges heat with the outside world and is finally discharged to the collector through the through port 7, avoiding the external heat source directly affecting the fluid inside the temperature fluctuation attenuator.

[0047] The optimized manufacturing process of the temperature fluctuation attenuator of the present invention is as follows:

[0048] Step S1, first, obtain the volume V of the cavity structure, the diameter D of the porous plate 4, the density ρ of the ultra-clean fluid, the flow velocity v of the fluid and the time lag τ;

[0049] Step S2, constructing a time-delay model G(s) of the temperature fluctuation attenuator according to the model definition of the series system in the automatic control principle;

[0050] Step S3, optimizing and solving the time-delay model G(s), solving the number N of the porous plates 4, the number n of the small holes on the porous plates 4, and the aperture d of the small holes on the porous plates 4, and then manufacturing an optimized temperature fluctuation attenuator.

[0051] The time lag model G(s) in step S2 is specifically:

[0052] G(s) = (1×e -τs / ((θ×((1-(d×n 1 / 2 / D) 4 ×(1-C 2 )) 1 / 2 / (0.47+0.1×C×d×n 1 / 2 / D)-1) 2 ×ρ×V×s) / (v×(N+1)) + 1)) N + 1

[0053] Among them, G(s) is the transfer function model of the influence of the inlet temperature change of the temperature fluctuation attenuator on the outlet temperature, s is the Laplace operator, θ is the mixing coefficient, ρ is the density of the ultra-clean fluid, V is the volume of the cavity structure, D is the diameter of the porous plate 4, v is the flow rate of the fluid, τ is the time lag, C is the outflow coefficient of the porous plate 4, N is the number of porous plates 4, n is the number of small holes on the porous plate 4, and d is the aperture of the small holes on the porous plate 4.

[0054] The embodiment is as follows:

[0055] Under the actual working condition where the inlet temperature disturbance period is mainly concentrated in 30s-100s, the cavity structure volume V is 1L, the diameter D is set to 80mm, the fluid flow rate v is 0.75kg / min, the ultra-clean fluid density ρ is 1000 kg / m³, the time delay time τ is the ratio of volume to flow rate is 80s, and the mixing coefficient θ is experimentally calibrated to 0.9. The parameter determination process is as follows: first, assuming d=2mm, n=12, the number of multiple groups of orifice plates N is pre-selected as 1, 4, 8, and 12, and the N with the best performance in the attenuation amplitude in the period of 30s-100s is selected according to the amplitude-frequency characteristic curve, and finally N is selected as 4; after determining the parameter N, the parameters d=1mm, 2.5mm, 4mm and the parameters n=12, 24, and 48 are optimally selected to achieve efficient attenuation of temperature disturbances in the target frequency band.

[0056] like Figure 4 As shown, under the above working conditions, when the parameters N=4, d=1mm, and n=24 are selected, the amplitude-frequency characteristic curve of the cascaded orifice plate attenuator is measured experimentally as follows: Figure 4 Curve 1 with a circle in the figure; Curve 2 is the amplitude-frequency characteristic curve of the non-porous plate structure under the same cavity structure volume V and the same flow rate. Comparing Curve 1 and Curve 2, it can be found that the attenuation performance of the cascaded orifice plate attenuator is much better than that of Curve 2 of the non-porous plate structure in the high-frequency part, that is, the frequency band higher than 0.0067Hz (fluctuation period of 150s), and as the frequency increases, its attenuation performance also increases synchronously; in the low-frequency part, that is, the frequency band lower than 0.0067Hz (fluctuation period of 150s), Curve 1 is slightly worse than Curve 2, and Curve 1 will slightly lose 2-3db of attenuation performance compared to Curve 2. However, since the temperature fluctuation in the low-frequency band is mainly compensated by the heater for temperature control, the impact of the slight performance loss of Curve 1 in the low-frequency band can be ignored.

[0057] It can be seen from the implementation that the porous plate of the present invention increases the mixing effect in the attenuator, enhances the attenuation performance, and avoids the method of enhancing the attenuation effect of the high-frequency band by significantly increasing the volume of the traditional single cavity. It is beneficial to the high-frequency disturbance control of the ultra-clean fluid in the immersion unit of the lithography equipment, and the design structure is compact, which is conducive to use inside complex lithography machines.

[0058] The connection between the intermediate chamber 2 and the annular chamber provided in the present invention causes the attenuated high-temperature stability fluid at the outlet of the intermediate chamber 2 to flow back into the inner annular chamber 5, and flow from bottom to top. In this process, heat exchange is performed step by step with the fluid in the intermediate chamber 2 divided by the porous plate. Since the temperature stability of the fluid in the inner annular chamber 5 is higher than that of the fluid in the intermediate chamber 2, the above-mentioned heat exchange process is beneficial to improving the temperature stability of the fluid in the intermediate chamber 2; the fluid in the inner annular chamber 5 flows to the outermost outer annular chamber 6 after heat exchange from bottom to top, and flows from top to bottom, absorbing the thermal disturbance of the external heat source through heat exchange, thereby avoiding the influence of the thermal disturbance brought by the external heat source on the high-temperature stability fluid in the intermediate chamber 2. Finally, the fluid in the outer annular chamber 6 flows to the collector through the port 7 after absorbing the external thermal disturbance.

[0059] In the description of the positional relationship of the present invention, terms such as "inside", "outside", "up", "down", "left", "right", etc. that indicate orientation or positional relationship are based on the orientation or positional relationship shown in the drawings and are only for the convenience of describing the embodiments and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0060] The above content and structure describe the basic principle, main features and advantages of the product of the present invention, which should be understood by those skilled in the art. The above examples and descriptions are only for explaining the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which are within the scope of the present invention. The scope of the present invention is defined by the attached claims and their equivalents.

Claims

1. A temperature fluctuation attenuator based on a cascade system, characterized in that: It comprises a main shell and a plurality of porous plates (4); The interior of the main shell is hollow to form a cavity structure, and the cavity structure is provided with inlets and outlets at both ends along the flow direction of the fluid; Each of the porous plates (4) is a circular plate with small holes (8), and a plurality of the porous plates (4) are arranged in parallel and at intervals along the flow direction of the fluid, and each porous plate (4) is perpendicular to the flow direction of the fluid, and is used to block the flow and attenuate the fluctuation of the fluid; The cavity structure is divided into a middle cavity (2) located in the center and an annular cavity located around the middle cavity (2); the annular cavity and the middle cavity (2) are separated by an annular partition; at least one annular partition is arranged in the annular cavity so as to separate the cavity into a plurality of annular sub-cavities arranged concentrically from the inside to the outside; each annular partition is provided with a through-hole (7) at one end close to an inlet or an outlet, so that two adjacent cavities where the annular partition is located are connected through the through-hole (7); the through-holes (7) provided in each two adjacent annular partitions are close to different ports, and the innermost annular partition is provided with a through-hole (7) at one end close to the outlet; the outer wall of the outermost annular sub-cavity is provided with a through-hole (7), the through-hole (7) is connected to a collector, and the through-hole (7) provided in the outer wall of the outermost annular cavity and the through-hole (7) provided in the corresponding annular partition on the inner side of the outermost annular cavity are close to different ports.

2. The temperature fluctuation attenuator according to claim 1, characterized in that: The cavity structure is provided with fluid ports at both ends along the flow direction of the fluid, serving as an outlet and an inlet respectively; the fluid ports are conical ports, and the two fluid ports are symmetrically opened at the two ends of the cavity structure along the flow direction of the fluid, the small ends of the two fluid ports serve as the inlet and the outlet of the fluid respectively, and the large ends of the two fluid ports are connected to the two ends of the cavity structure respectively.

3. The temperature fluctuation attenuator according to claim 1, characterized in that: The cavity structure is divided into a middle cavity (2) located in the center and an inner annular cavity (5) and an outer annular cavity (6) located on the periphery of the middle cavity (2); the middle cavity (2), the inner annular cavity (5) and the outer annular cavity (6) are arranged in sequence from the inside to the outside and adjacent cavities are separated by annular partitions; the middle cavity (2) and the inner annular cavity (5) are connected only at one end close to the outlet, and the inner annular cavity (5) and the outer annular cavity (6) are connected only at one end close to the inlet; the outer annular cavity (6) is provided with a through opening (7) at a location on the outer wall close to the outlet, and the through opening (7) is connected to the collector.

4. The temperature fluctuation attenuator according to claim 2, characterized in that: Each of the fluid ports is divided into a threaded sealing port (1) and a fluid expansion port (3); The fluid expansion port (3) is a conical port, one end of the threaded sealing port (1) serves as an inlet or outlet for the fluid, the other end of the threaded sealing port (1) is connected to the small end of the fluid expansion port (3), and the large end of the fluid expansion port (3) is connected to one end of the main body of the cavity structure.

5. The temperature fluctuation attenuator according to claim 1, characterized in that: Each of the porous plates (4) has a plurality of small holes (8) which are divided into at least two circles of small hole groups, each circle of small hole groups being arranged radially from the inside to the outside at intervals, and each circle of small hole groups is composed of a plurality of through holes distributed circumferentially at intervals along the same circumference; The through-hole distribution of the small holes (8) on each of the porous plates (4) may be consistent, or may be inconsistent.

6. An optimized manufacturing method for a temperature fluctuation attenuator as claimed in any one of claims 1 to 5, characterized in that: The steps include: Step S1, first, obtain the volume V of the cavity structure, the diameter D of the porous plate (4), the density ρ of the ultra-clean fluid, the flow velocity v of the fluid and the time lag τ; Step S2, constructing a time lag model G(s) of the temperature fluctuation attenuator; Step S3, optimizing and solving the time-delay model G(s), solving for the number N of the porous plates (4), the number n of small holes on the porous plates (4), and the diameter d of the small holes on the porous plates (4), thereby manufacturing an optimized temperature fluctuation attenuator.

7. The optimized manufacturing method of the temperature fluctuation attenuator according to claim 6, characterized in that: The time lag model G(s) in step S2 is specifically: G(s) = (1×e -τs / ((θ×((1-(d×n 1 / 2 / D) 4 ×(1-C 2 )) 1 / 2 / (0.47+0.1×C×d×n 1 / 2 / D)-1) 2 ×ρ×V×s) / (v×(N+1)) + 1)) N + 1 Wherein, G(s) is the transfer function model of the influence of the inlet temperature change of the temperature fluctuation attenuator on the outlet temperature, s is the Laplace operator, θ is the mixing coefficient, ρ is the density of the ultra-clean fluid, V is the volume of the cavity structure, D is the diameter of the porous plate (4), v is the flow rate of the fluid, τ is the time lag, C is the outflow coefficient of the porous plate (4), N is the number of the porous plate (4), n is the number of small holes on the porous plate (4), and d is the aperture of the small holes on the porous plate (4).

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