Multi-mode energy-saving semiconductor temperature control device and control method thereof

Abstract

The application provides a multi-mode energy-saving semiconductor temperature control device and a control method thereof, which comprises a refrigeration system, a circulating liquid system and a PID controller; the refrigeration system comprises a compressor, an evaporator, a three-way valve, a water condenser, an air condenser, a refrigeration quick-opening electromagnetic valve and a hot gas bypass electromagnetic valve; the circulating liquid system comprises a heater and an outlet temperature sensor; the PID controller controls the conduction of the interface of the three-way valve to control the heat exchange switching of the water condenser and an air speed regulator; the PID controller determines an output percentage according to a first temperature value collected by the outlet temperature sensor and a target temperature value; in the case of a first constant temperature control mode, the refrigeration quick-opening electromagnetic valve and the hot gas bypass electromagnetic valve are switched on and off in a refrigeration cycle according to the output percentage; in the case of a second constant temperature control mode, the power-on time of the heater in a heating cycle is controlled according to the output percentage. The multi-operation mode and energy-saving temperature control purposes are achieved.

Description

Technical Field

[0001] This invention relates to the field of temperature control technology, and in particular to a multi-mode energy-saving semiconductor temperature control device and its control method. Background Technology

[0002] In the etching process of semiconductor manufacturing, radio frequency devices generate a lot of heat, requiring dedicated temperature control equipment to cool and control the temperature by delivering coolant through circulating pipelines. Existing cooling systems have solved the temperature control problem in wafer manufacturing, but since their cooling is mostly based on a single PCW (Plant Cooling Water) system, it depends on the stable operation of the plant system.

[0003] Therefore, the PCW will not function properly when the plant system malfunctions or malfunctions. Even under low load or low exhaust temperature, the PCW still operates at high flow rates, resulting in relatively high energy consumption. Furthermore, the temperature stabilization method is a hot-cold counter-current mode, which undoubtedly contributes to the high energy consumption of the system. Summary of the Invention

[0004] This invention provides a multi-mode energy-saving semiconductor temperature control device and its control method to solve the defects of single PCW water cooling in the prior art, which has a single operating mode and high energy consumption, and to achieve the purpose of multiple operating modes and energy-saving temperature control.

[0005] This invention provides a multi-mode energy-saving semiconductor temperature control device, comprising: a refrigeration system, a circulating fluid system, and a PID controller;

[0006] The refrigeration system includes a compressor, an evaporator, a three-way valve, a water condenser, an air condenser, a quick-opening refrigeration solenoid valve, and a hot gas bypass solenoid valve. The first port of the three-way valve is connected to the exhaust port of the compressor, the second port of the three-way valve is connected to the first port of the water condenser, and the third port of the three-way valve is connected to the first port of the air condenser. The second ports of the water condenser and the air condenser are connected to the first liquid inlet of the evaporator through a junction point. The first port of the quick-opening refrigeration solenoid valve is connected to the junction point, and the second port of the quick-opening refrigeration solenoid valve is connected to the first liquid inlet of the evaporator. The first port of the hot gas bypass solenoid valve is connected to the exhaust port of the compressor, and the second port of the hot gas bypass solenoid valve is connected to both the exhaust port of the compressor and the first gas outlet of the evaporator.

[0007] The circulating liquid system includes a heater and an outlet temperature sensor. The heater and the outlet temperature sensor are connected in series between the second gas outlet and the second liquid inlet of the evaporator, and the outlet temperature sensor is located after the outlet of the heater.

[0008] The PID controller is used to control the opening of the interface of the three-way valve in order to control the heat exchange switching between the water condenser and the air condenser.

[0009] The PID controller is also used to determine the output percentage based on the first temperature value and the target temperature value collected by the outlet temperature sensor;

[0010] In the first constant temperature control mode, the PID controller is also used to control the switching of the cooling quick-opening solenoid valve and the hot gas bypass solenoid valve within a cooling cycle according to the output percentage.

[0011] In the second constant temperature control mode, the PID controller is also used to control the energizing time of the heater within a heating cycle based on the output percentage.

[0012] According to a multi-mode energy-saving semiconductor temperature control device provided by the present invention, the refrigeration system further includes: a condensing pressure regulating valve and a fan speed regulator, wherein the condensing pressure regulating valve is connected to the water condenser and the air condenser is connected to the fan speed regulator;

[0013] The condensing pressure regulating valve is used to regulate the cooling water flow rate of the water condenser when heat exchange occurs through the water condenser.

[0014] The wind speed regulator is used to adjust the fan power of the air condenser when heat exchange is performed through the wind speed regulator.

[0015] According to a multi-mode energy-saving semiconductor temperature control device provided by the present invention, the refrigeration system further includes a refrigeration thermostatic expansion valve, which is disposed between the refrigeration quick-opening solenoid valve and the first liquid inlet of the evaporator.

[0016] According to the multi-mode energy-saving semiconductor temperature control device provided by the present invention, during the cooling process, it further includes:

[0017] When the output percentage is the first output percentage, the PID controller is also used to control the opening of the refrigeration quick-opening solenoid valve, and to control the opening degree of the refrigeration hot gas expansion valve according to the superheat of the evaporator in the refrigeration system.

[0018] When the output percentage is the second output percentage, the PID controller is also used to control the switching of the cooling quick-opening solenoid valve and the hot gas bypass solenoid valve within a cooling cycle according to the output percentage, wherein the second output percentage is less than the first output percentage.

[0019] According to the multi-mode energy-saving semiconductor temperature control device provided by the present invention, during the heating process, it further includes:

[0020] When the output percentage is the third output percentage, the PID controller is also used to control the heater to be continuously powered.

[0021] When the output percentage is the fourth output percentage, the PID controller is also used to control the energizing time of the heater in a heating cycle according to the output percentage, wherein the fourth output percentage is less than the third output percentage.

[0022] According to a multi-mode energy-saving semiconductor temperature control device provided by the present invention, the refrigeration system further includes: an exhaust temperature sensor, a cold bypass quick-opening solenoid valve, and a cold bypass thermostatic expansion valve. The exhaust temperature sensor is disposed between the exhaust port of the compressor and the first interface of the three-way valve. The first interface of the cold bypass quick-opening solenoid valve is connected to the junction point and the first interface of the refrigeration quick-opening solenoid valve. The second interface of the cold bypass quick-opening solenoid valve is connected to the first interface of the cold bypass thermostatic expansion valve. The second interface of the cold bypass thermostatic expansion valve is connected to the first outlet of the evaporator and the inlet of the compressor.

[0023] The PID controller is also used to control the cold bypass quick-opening solenoid valve to open when the second temperature value collected by the exhaust temperature sensor exceeds the first temperature threshold, and to control the cold bypass thermal expansion valve to adjust its opening degree according to the superheat of the compressor.

[0024] According to a multi-mode energy-saving semiconductor temperature control device provided by the present invention, the circulating liquid system further includes a water tank and a circulating pump, wherein the water tank, the circulating pump and the heater are connected in series between the second air outlet and the second liquid inlet of the evaporator.

[0025] According to a multi-mode energy-saving semiconductor temperature control device provided by the present invention, the refrigeration system further includes: an exhaust pressure sensor, wherein the exhaust pressure sensor is disposed between the outlet of the compressor and the first interface of the three-way valve;

[0026] The PID controller is further configured to, when the exhaust pressure monitored by the exhaust pressure sensor is not greater than the pressure threshold, control the first port of the three-way valve to be connected to the second port of the three-way valve, and when the exhaust pressure monitored by the exhaust pressure sensor is greater than the pressure threshold, control the second port of the three-way valve to be connected to the third port of the three-way valve.

[0027] According to the present invention, a multi-mode energy-saving semiconductor temperature control device is provided, wherein the circulating liquid system further includes: an ambient temperature sensor, and the PID controller is further configured to control the first interface of the three-way valve to be connected to the second interface of the three-way valve when the third temperature value collected by the ambient temperature sensor is greater than the second temperature threshold, and to control the condensing pressure regulating valve to adjust the cooling water flow rate of the water condenser according to the monitored exhaust pressure.

[0028] The PID controller is also used to control the first interface of the three-way valve to be connected to the third interface of the three-way valve when the third temperature value collected by the ambient temperature sensor is less than the second temperature threshold, and to control the wind speed regulator to adjust the fan power of the air condenser according to the monitored exhaust pressure.

[0029] The present invention also provides a control method applied to any of the multi-mode energy-saving semiconductor temperature control devices described above, the method comprising:

[0030] The PID controller controls the opening of the three-way valve interface to control the heat exchange switching between the water condenser and the fan speed regulator;

[0031] The PID controller determines the output percentage based on the first temperature value and the target temperature value collected by the outlet temperature sensor corresponding to the heater;

[0032] In the first constant temperature control mode, the PID controller controls the switching of the cooling quick-opening solenoid valve and the hot gas bypass solenoid valve within a cooling cycle based on the output percentage.

[0033] In the first constant temperature control mode, the PID controller controls the energizing time of the heater within a heating cycle based on the output percentage.

[0034] The present invention also provides an electronic device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the program to implement the control method described above.

[0035] The present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the control method as described above.

[0036] The present invention also provides a computer program product, including a computer program that, when executed by a processor, implements the control method as described above.

[0037] This invention provides a multi-mode energy-saving semiconductor temperature control device and its control method. The device is designed with a refrigeration system incorporating both water-cooled and air-cooled condensers. A three-way valve allows for flexible selection of the cooling mode based on actual operating conditions or fault situations. When one cooling mode (e.g., water cooling) fails, it can quickly switch to another mode (e.g., air cooling), thus preventing system failure or equipment damage due to the failure of a single cooling mode. Furthermore, the PID controller intelligently adjusts the conduction state of the three-way valve based on real-time temperature feedback and the target temperature value, selecting the optimal cooling mode to minimize energy consumption. The logic design of the PID controller, combined with a quick-opening refrigeration solenoid valve and a hot gas bypass solenoid valve, ensures that refrigeration and heating do not operate simultaneously, reducing the device's operating energy consumption. Attached Figure Description

[0038] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0039] Figure 1 This is one of the structural schematic diagrams of the multi-mode energy-saving semiconductor temperature control device provided by the present invention;

[0040] Figure 2 This is the second schematic diagram of the structure of the multi-mode energy-saving semiconductor temperature control device provided by the present invention;

[0041] Figure 3 This is the third schematic diagram of the structure of the multi-mode energy-saving semiconductor temperature control device provided by the present invention;

[0042] Figure 4 This is the fourth schematic diagram of the structure of the multi-mode energy-saving semiconductor temperature control device provided by the present invention;

[0043] Figure 5 This is the fifth schematic diagram of the structure of the multi-mode energy-saving semiconductor temperature control device provided by the present invention;

[0044] Figure 6 This is the sixth schematic diagram of the structure of the multi-mode energy-saving semiconductor temperature control device provided by the present invention;

[0045] Figure 7 This is the seventh schematic diagram of the structure of the multi-mode energy-saving semiconductor temperature control device provided by the present invention;

[0046] Figure 8 This is a schematic diagram of the structure of the electronic device provided by the present invention.

[0047] Figure label:

[0048] Refrigeration system 10, compressor 100, evaporator 101, three-way valve 102, water condenser 103, air condenser 104, refrigeration quick-opening solenoid valve 105, hot gas bypass solenoid valve 106, condensing pressure regulating valve 107, fan speed regulator 108, refrigeration thermal expansion valve 109, exhaust temperature sensor 110, cold bypass quick-opening solenoid valve 111, cold bypass thermal expansion valve 112, exhaust pressure sensor 113, oil separator 114, first check valve 115, second check valve 116, liquid receiver 117, dryer filter 118, sight glass 119, manifold A;

[0049] Circulating liquid system 20, heater 201, outlet temperature sensor 202, water tank 203, circulating pump 204, flow meter 205, pressure sensor 206, return temperature sensor 207. Detailed Implementation

[0050] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0051] Currently, most temperature control devices use a single cooling mode, such as single PCW water cooling. Cooling depends on the stable operation of the plant system. When a sudden failure occurs in the plant system, it can cause the temperature control device to overpressure and shut down, leading to manufacturing stagnation and irreversible losses.

[0052] The PCW flow rate is not dynamically controlled. When the refrigeration system is under low load or the exhaust pressure is low, the required cooling water flow rate will decrease, but the plant system will still operate under high flow conditions, resulting in a lot of waste.

[0053] Temperature control devices often use electronic expansion valves for cooling. Under minimum load operating conditions, a control dead zone is prone to occur. The current practice is to set a minimum opening degree to avoid the dead zone. At this opening degree, the cooling output is relatively large. At this time, a heater is used to counteract the effect and achieve stability, resulting in energy waste.

[0054] In view of this, this invention proposes a multi-mode energy-saving semiconductor temperature control device. This device mainly consists of a PID controller, a refrigeration system, and a circulating liquid system. The refrigeration system has two cooling modes: air condenser and water condenser, which are automatically switched by a three-way valve. In addition, the logic design of the PID controller, combined with the cooling quick-opening solenoid valve and the hot gas bypass solenoid valve, ensures that cooling and heating do not work simultaneously, thereby reducing the operating energy consumption of the device.

[0055] The following is combined with Figures 1-7 This invention describes a multi-mode energy-saving semiconductor temperature control device according to embodiments of the present invention.

[0056] Figure 1 This is one of the structural schematic diagrams of the multi-mode energy-saving semiconductor temperature control device provided by the present invention, such as... Figure 1 As shown, the device includes a refrigeration system 10, a circulating liquid system 20, and a PID controller;

[0057] The refrigeration system 10 includes a compressor 100, an evaporator 101, a three-way valve 102, a water-cooled condenser 103, an air-cooled condenser 104, a quick-opening solenoid valve 105, and a hot gas bypass solenoid valve 106. The first port of the three-way valve 102 is connected to the exhaust port of the compressor 100, the second port of the three-way valve 102 is connected to the first port of the water-cooled condenser 103, the third port of the three-way valve 102 is connected to the first port of the air-cooled condenser 104, and the second port of the water-cooled condenser 102 is connected to the first port of the air-cooled condenser 104. The second port of the condenser 104 is connected to the first liquid inlet of the evaporator 101 through a manifold A. The first port of the refrigeration quick-opening solenoid valve 105 is connected to the manifold A. The second port of the refrigeration quick-opening solenoid valve 105 is connected to the first liquid inlet of the evaporator 101. The first port of the hot gas bypass solenoid valve 106 is connected to the exhaust port of the compressor 100. The second port of the hot gas bypass solenoid valve 106 is connected to the exhaust port of the compressor 100 and the first gas outlet of the evaporator 101.

[0058] The circulating liquid system 20 includes a heater 201 and an outlet temperature sensor 202. The heater 201 and the outlet temperature sensor 202 are connected in series between the second gas outlet and the second liquid inlet of the evaporator 101, and the outlet temperature sensor 202 is located after the outlet of the heater 201.

[0059] The PID controller is used to control the opening of the interface of the three-way valve 102, so as to control the heat exchange switching between the water condenser 103 and the air condenser 104.

[0060] The PID controller is also used to determine the output percentage based on the first temperature value and the target temperature value collected by the outlet temperature sensor 202;

[0061] In the first constant temperature control mode, the PID controller is also used to control the switching of the cooling quick-opening solenoid valve 105 and the hot gas bypass solenoid valve 106 within a cooling cycle according to the output percentage.

[0062] In the second constant temperature control mode, the PID controller is also used to control the energizing time of the heater 201 within a heating cycle based on the output percentage.

[0063] Here, the refrigeration system uses compressor 100 to compress the refrigerant, generating high-temperature, high-pressure gas. The refrigerant evaporates in evaporator 101, absorbing heat and achieving a cooling effect. A three-way valve 102 switches the refrigerant flow to either a water-cooled condenser or a fan-cooled condenser to accommodate different heat dissipation requirements. Specifically, the water-cooled condenser 103 dissipates heat through water circulation, while the fan-cooled condenser 104 dissipates heat through a fan. Furthermore, the flow rate of refrigerant to evaporator 101 is controlled by a quick-opening solenoid valve 105 and a hot gas bypass solenoid valve 106, thereby adjusting the cooling intensity.

[0064] Here, when heating is required, the heater in the circulating fluid system 20 raises the temperature of the circulating fluid by electric heating. The outlet temperature sensor 202 in the circulating fluid system 20 monitors the temperature of the circulating fluid after heating in real time, providing feedback signals to the PID controller.

[0065] It should be noted that in this embodiment, the PID controller calculates the output percentage (i.e., control quantity) based on the deviation between the preset target temperature value Tm and the actual temperature value To monitored by the outlet temperature sensor 202, using proportional (P), integral (I), and derivative (D) algorithms. Then, it controls the operation of relevant actuators, such as the three-way valve, the refrigeration quick-opening solenoid valve, the hot gas bypass solenoid valve, and the heater, to achieve precise temperature control.

[0066] Specifically, when it is necessary to maintain a low and constant temperature (i.e., the first constant temperature control mode), the PID controller will control the switching of the cooling quick-opening solenoid valve 105 and the hot gas bypass solenoid valve 106 according to the output percentage, so as to regulate the refrigerant flow and the system pressure.

[0067] For example, when the constant low temperature To ≤ 20℃, the output percentage A is obtained by inputting To and Tm into the PID controller. Here, the refrigeration cycle is Tsc. Then, the opening time of the quick-opening solenoid valve 105 in one refrigeration cycle is s = A × Tsc, and the opening time of the hot gas bypass solenoid valve 106 is Tsc - s. For example, if A = 80% and Tsc = 10s, then the quick-opening solenoid valve 105 will open for 8 seconds and then close, and the hot gas bypass solenoid valve 106 will open for 2 seconds and then close. The heater 201 will not participate in the operation, avoiding energy waste.

[0068] Specifically, when it is necessary to maintain a high and constant temperature (i.e., the second constant temperature control mode), the PID controller will control the power-on time of the heater 201 in a heating cycle according to the output percentage.

[0069] For example, when the constant high temperature To ≥ 35℃, the output percentage A is obtained by inputting To and Tm into the PID controller. Here, the heating cycle is Tsh, so the on-time of heater 201 in one heating cycle is s = A × Tsh. For example, if A = 80% and Tsh = 10s, heater 201 will first turn on for 8 seconds and then turn off for 2 seconds in one heating cycle, and the refrigeration system 10 will not participate in the operation to avoid energy waste.

[0070] This invention provides a multi-mode energy-saving semiconductor temperature control device. The device's refrigeration system 10 includes two cooling methods: a water-cooled condenser 103 and an air-cooled condenser 104. By switching via a three-way valve 102, the cooling method can be flexibly selected according to actual operating conditions or fault situations. When one cooling method (such as water cooling) fails, it can quickly switch to another method (such as air cooling), thus avoiding system paralysis or equipment damage caused by the failure of a single cooling mode. Furthermore, the PID controller intelligently adjusts the conduction state of the three-way valve 102 based on real-time temperature feedback and the target temperature value, selecting the optimal cooling method to minimize energy consumption. Through the logic design of the PID controller combined with the cooling quick-opening solenoid valve 105 and the hot gas bypass solenoid valve 106, it is ensured that cooling and heating do not operate simultaneously, reducing the device's operating energy consumption.

[0071] In some embodiments, reference Figure 2 The refrigeration system 10 further includes: a condensing pressure regulating valve 107 and a fan speed regulator 108, wherein the condensing pressure regulating valve 107 is connected to the water condenser 103, and the air condenser 104 is connected to the fan speed regulator 108.

[0072] The condensing pressure regulating valve 107 is used to regulate the cooling water flow rate of the water condenser 104 when heat exchange is performed through the water condenser 103.

[0073] The wind speed regulator 108 is used to adjust the fan power of the air condenser 104 when heat exchange is performed through the wind speed regulator 108.

[0074] The condensing pressure regulating valve 107 is connected to the water condenser 103 and is also connected to the plant water supply. When the refrigeration system 10 selects to exchange heat through the water condenser 103 (i.e., the three-way valve 102 directs the refrigerant to the water condenser 103), the condensing pressure regulating valve 107 is responsible for regulating the flow rate of cooling water entering the water condenser 103. By adjusting the flow rate of the cooling water, the heat exchange rate and efficiency of the water condenser 103 can be controlled.

[0075] The fan speed regulator 108 is connected to the fan of the air condenser 104 and usually adjusts the airflow by controlling the fan motor speed or the damper opening. When the refrigeration system 10 selects to exchange heat through the air condenser 104 (i.e., the three-way valve 102 directs the refrigerant to the air condenser 104), the fan speed regulator 108 is responsible for adjusting the fan power of the air condenser 104, thereby controlling the airflow through the condenser.

[0076] In some embodiments, reference Figure 3 The refrigeration system 10 further includes a refrigeration thermal expansion valve 109, which is disposed between the refrigeration quick-opening solenoid valve 108 and the first liquid inlet of the evaporator 101.

[0077] The refrigeration thermostatic expansion valve 109 is installed after the refrigeration quick-opening solenoid valve 108 and before the first liquid inlet of the evaporator 101. In this way, after the refrigerant flow is controlled by the refrigeration quick-opening solenoid valve 108, it will be further regulated by the refrigeration thermostatic expansion valve 109 before entering the evaporator 101.

[0078] It should be noted that the refrigeration thermostatic expansion valve 109 regulates the valve opening by sensing changes in the refrigerant temperature and / or pressure at the outlet of the evaporator 101, thereby controlling the refrigerant flow rate. When the refrigerant in the evaporator 101 evaporates and absorbs heat, its temperature and pressure decrease. Upon sensing this change, the refrigeration thermostatic expansion valve 109 adjusts its opening accordingly to maintain a stable evaporation pressure and temperature within the evaporator 101.

[0079] In some embodiments, during the cooling process, the method further includes:

[0080] When the output percentage is the first output percentage, the PID controller is also used to control the opening of the refrigeration quick-opening solenoid valve, and to control the opening degree of the refrigeration hot gas expansion valve according to the superheat of the evaporator in the refrigeration system.

[0081] When the output percentage is the second output percentage, the PID controller is also used to control the switching of the cooling quick-opening solenoid valve and the hot gas bypass solenoid valve within a cooling cycle according to the output percentage, wherein the second output percentage is less than the first output percentage.

[0082] Here, the first output percentage is 100%, and the second output percentage is -S% < A < 100%. Here, S is the preset initial control value, which can be customized according to the system or operating conditions. For example, S can be 5.

[0083] For example, during the cooling process, when the PID controller output is 100%, the refrigeration system 10 is in the full-speed cooling stage, A×Tsc=Tsc. At this time, the refrigeration quick-opening solenoid valve 108 is normally open, and the temperature sensing bulb of the refrigeration thermal expansion valve 109 detects the superheat of the evaporator 101 and automatically adjusts the opening degree.

[0084] When the PID controller output percentage is 5% < A < 100%, then A × Tsc < Tsc. In this case, the opening time of the cooling quick-opening solenoid valve 108 is s = A × Tsc, and the opening time of the hot gas bypass solenoid valve 106 is Tsc - s. The heater does not participate in operation to avoid energy waste. For example, if A = 80% and Tsc = 10s, then the cooling quick-opening solenoid valve 105 opens for 8 seconds and then closes, and the hot gas bypass solenoid valve 106 opens for 2 seconds and then closes. They alternate opening and closing.

[0085] When the PID controller output percentage is -5%≤A≤5%, it is in a constant low temperature state. The valve opening is the same as when the output percentage is 5%<A<100%, which will not be elaborated here.

[0086] In some embodiments, during the heating process, the method further includes:

[0087] When the output percentage is the third output percentage, the PID controller is also used to control the heater to be continuously powered.

[0088] When the output percentage is the fourth output percentage, the PID controller is also used to control the energizing time of the heater in a heating cycle according to the output percentage, wherein the fourth output percentage is less than the third output percentage.

[0089] Here, the third output percentage is 100%, and the fourth output percentage is -S% < A < 100%. Here, S is the preset initial control value, which can be customized according to system or operating conditions, for example, S is 5.

[0090] For example, during the heating process, when the PID controller output is 100%, the heating system is in the full-speed heating stage, A×Tsh=Tsh, and the heater 201 continuously outputs; when the output percentage is -5%≤A<100%, the solid-state energizing time of the heater 201 is s=A×Tsh, and the duty cycle is adjusted to ensure temperature stability. During this process, the refrigeration system does not participate, reducing its own power and thus reducing the plant's energy consumption.

[0091] In some embodiments, reference Figure 4 The refrigeration system 10 further includes: an exhaust temperature sensor 110, a cold bypass quick-opening solenoid valve 111, and a cold bypass thermal expansion valve 112. The exhaust temperature sensor 110 is disposed between the exhaust port of the compressor 100 and the first interface of the three-way valve 102. The first interface of the cold bypass quick-opening solenoid valve 111 is connected to the junction point A and the first interface of the refrigeration quick-opening solenoid valve 105. The second interface of the cold bypass quick-opening solenoid valve 111 is connected to the first interface of the cold bypass thermal expansion valve 112. The second interface of the cold bypass thermal expansion valve 112 is connected to the first outlet of the evaporator 101 and the inlet of the compressor 100.

[0092] The PID controller is also used to control the cold bypass quick-opening solenoid valve 111 to open when the second temperature value collected by the exhaust temperature sensor 110 exceeds the first temperature threshold, and to control the cold bypass thermal expansion valve 112 to adjust the opening degree according to the superheat of the compressor 100.

[0093] Understandably, the exhaust temperature sensor 110 is installed between the exhaust port of the compressor 100 and the first interface of the three-way valve 102 to monitor the temperature of the refrigerant discharged by the compressor 100 in real time.

[0094] When the second temperature value collected by the exhaust temperature sensor 110 exceeds the first temperature threshold (e.g., 90°C), the compressor exhaust temperature needs to be reduced. The PID controller will then control the cold bypass quick-opening solenoid valve 111 to open. In this way, some of the high-temperature and high-pressure refrigerant will bypass the evaporator 101, be depressurized by the cold bypass thermostatic expansion valve 112, and then return to the intake port of the compressor 100 for recirculation.

[0095] Meanwhile, the cold bypass thermostatic expansion valve 112 adjusts its opening according to the superheat of the compressor 100 to adjust the refrigerant flow through the cold bypass circuit, thereby reducing the compressor discharge temperature.

[0096] In some embodiments, reference Figure 5The circulating liquid system 20 further includes a water tank 203 and a circulating pump 204. The water tank 203, the circulating pump 204 and the heater 201 are connected in series between the second air outlet and the second liquid inlet of the evaporator 101.

[0097] It should be noted that placing the water tank 203, the circulating pump 204, and the heater 201 after the air outlet of the evaporator 101 helps to reduce the constant temperature zone of the cold and heat resistance, and reduce the heating or cooling power.

[0098] For example, during heating: the heat dissipation of water tank 203 and circulating pump 204 acts in the same direction as heater 201, thus reducing the output ratio that relies solely on heater 201 for temperature stabilization. During cooling, water tank 203 and circulating pump 204 are positioned after evaporator 101, which reduces the temperature of the refrigerant entering evaporator 101, thereby reducing the cooling load. This achieves a two-way energy-saving effect.

[0099] In some embodiments, reference Figure 6 The refrigeration system 10 further includes: an exhaust pressure sensor 113, which is disposed between the outlet of the compressor 100 and the first interface of the three-way valve 102;

[0100] The PID controller is further configured to, when the exhaust pressure monitored by the exhaust pressure sensor 113 is not greater than the pressure threshold, control the first interface of the three-way valve 102 to be connected to the second interface of the three-way valve 102, and when the exhaust pressure monitored by the exhaust pressure sensor 113 is greater than the pressure threshold, control the second interface of the three-way valve 102 to be connected to the third interface of the three-way valve 102.

[0101] It should be noted that in this embodiment, the exhaust pressure monitored by the exhaust pressure sensor 113 is used to determine whether the plant system or the water condenser 103 is malfunctioning.

[0102] For example, when the monitored value M≤19bar, it is determined that the plant system or water condenser 103 is in normal condition. The first port of the three-way valve 102 is connected to the second port of the three-way valve 102, and heat exchange is carried out by the water condenser 103 to meet the system operation requirements. The condensing pressure regulating valve 107 increases or decreases the cooling water by monitoring the system exhaust pressure, thereby saving energy.

[0103] When the monitored value M > 19 bar, a fault is determined in the plant system or water condenser 103. The circulating fan starts, and the first and third ports of the three-way valve 102 are connected, switching to the air condenser 104 for heat exchange. The fan speed regulator 108 dynamically adjusts the power of the air condenser fan by decreasing or increasing the power when the system pressure decreases or increases, thereby achieving energy saving.

[0104] In some embodiments, the circulating fluid system 20 further includes: an ambient temperature sensor, and the PID controller is further configured to control the first interface of the three-way valve 102 to be connected to the second interface of the three-way valve 102 when the third temperature value collected by the ambient temperature sensor is greater than the second temperature threshold, and to control the condensing pressure regulating valve 107 to adjust the cooling water flow rate of the water condenser 103 according to the monitored exhaust pressure.

[0105] The PID controller is also used to control the first interface of the three-way valve 102 to be connected to the third interface of the three-way valve 102 when the third temperature value collected by the ambient temperature sensor is less than the second temperature threshold, and to control the wind speed regulator 108 to adjust the fan power of the air condenser 104 according to the monitored exhaust pressure.

[0106] Understandably, this embodiment also includes an ambient temperature sensor to monitor the temperature of the environment in which the circulating fluid system 20 is located. When the third temperature value collected by the ambient temperature sensor is greater than the second temperature threshold (e.g., 5°C), the first port of the three-way valve 102 is connected to the second port of the three-way valve 102, and heat exchange is carried out by the water condenser 103. The condensing pressure regulating valve 107 increases or decreases the cooling water by monitoring the system exhaust pressure. When the third temperature value collected by the ambient temperature sensor is less than the second temperature threshold (e.g., 5°C), the first port of the three-way valve 102 is connected to the third port of the three-way valve 102, and heat exchange is carried out by the air condenser 104. The fan speed regulator 108 increases or decreases the fan power by monitoring the system exhaust pressure, thereby saving energy.

[0107] Furthermore, the components in the multi-mode energy-saving semiconductor temperature control device in the embodiments of the present invention include, but are not limited to, the components mentioned above, such as... Figure 7 As shown in the embodiment of the present invention, the refrigeration system 10 further includes: an oil separator 114, a first one-way valve 115, a second one-way valve 116, a liquid receiver 117, a dryer filter 118, and a sight glass 119.

[0108] Understandably, the oil separator 114 is installed after the discharge port of the compressor 100 to separate and collect the lubricating oil entrained in the compressor 100 discharge. A one-way valve is provided at the refrigerant passage of both the water condenser 103 and the air condenser 104 to allow the refrigerant to flow freely in one direction and prevent flow in the opposite direction. The receiver 117 is installed on the refrigerant line after the condensers (i.e., the water condenser 103 and the air condenser 104) and before the evaporator 101 to store and regulate the refrigerant flow rate in the system. The dryer filter 118 is installed on the refrigerant line after the receiver 117 and before the evaporator 101 to remove moisture and impurities from the refrigerant. The sight glass 119 is installed on the refrigerant line after the dryer filter 118 and before the evaporator 101 to observe the state and flow of the refrigerant.

[0109] In addition, the circulating fluid system 20 also includes: a flow meter 205, a pressure sensor 206, and a return port temperature sensor 207.

[0110] Flow meter 205 is installed on the pipeline of the circulating liquid system to measure the flow rate of the circulating liquid. Pressure sensor 206 is installed at the outlet of the heater to monitor and record the pressure data of the circulating liquid system in real time. Return temperature sensor 207 is installed at the inlet of the evaporator to monitor and record the temperature data of the circulating liquid when it returns to the evaporator in real time.

[0111] The control method provided by the embodiments of the present invention is described below. The control method provided by the embodiments of the present invention includes steps 301, 302, 303 and 304.

[0112] Step 301: The PID controller controls the opening of the interface of the three-way valve to control the heat exchange switching between the water condenser and the fan speed regulator.

[0113] Step 302: The PID controller determines the output percentage based on the first temperature value and the target temperature value collected by the outlet temperature sensor corresponding to the heater.

[0114] Step 303: In the first constant temperature control mode, the PID controller controls the switching of the cooling quick-opening solenoid valve and the hot gas bypass solenoid valve within a cooling cycle according to the output percentage.

[0115] Step 304: In the first constant temperature control mode, the PID controller controls the power-on time of the heater in one heating cycle according to the output percentage.

[0116] Here, the refrigeration system uses compressor 100 to compress the refrigerant, generating high-temperature, high-pressure gas. The refrigerant evaporates in evaporator 101, absorbing heat and achieving a cooling effect. A three-way valve 102 switches the refrigerant flow to either a water-cooled condenser or a fan-cooled condenser to accommodate different heat dissipation requirements. Specifically, the water-cooled condenser 103 dissipates heat through water circulation, while the fan-cooled condenser 104 dissipates heat through a fan. Furthermore, the flow rate of refrigerant to evaporator 101 is controlled by a quick-opening solenoid valve 105 and a hot gas bypass solenoid valve 106, thereby adjusting the cooling intensity.

[0117] Here, when heating is required, the heater in the circulating fluid system 20 raises the temperature of the circulating fluid by electric heating. The outlet temperature sensor 202 in the circulating fluid system 20 monitors the temperature of the circulating fluid after heating in real time, providing feedback signals to the PID controller.

[0118] It should be noted that in this embodiment, the PID controller calculates the output percentage (i.e., control quantity) based on the deviation between the preset target temperature value Tm and the actual temperature value To monitored by the outlet temperature sensor 202, using proportional (P), integral (I), and derivative (D) algorithms. Then, it controls the operation of relevant actuators, such as the three-way valve, the refrigeration quick-opening solenoid valve, the hot gas bypass solenoid valve, and the heater, to achieve precise temperature control.

[0119] Specifically, when it is necessary to maintain a low and constant temperature (i.e., the first constant temperature control mode), the PID controller will control the switching of the cooling quick-opening solenoid valve 105 and the hot gas bypass solenoid valve 106 according to the output percentage, so as to regulate the refrigerant flow and the system pressure.

[0120] For example, when the constant low temperature To ≤ 20℃, the output percentage A is obtained by inputting To and Tm into the PID controller. Here, the refrigeration cycle is Tsc. Then, the opening time of the quick-opening solenoid valve 105 in one refrigeration cycle is s = A × Tsc, and the opening time of the hot gas bypass solenoid valve 106 is Tsc - s. For example, if A = 80% and Tsc = 10s, then the quick-opening solenoid valve 105 will open for 8 seconds and then close, and the hot gas bypass solenoid valve 106 will open for 2 seconds and then close. The heater 201 will not participate in the operation, avoiding energy waste.

[0121] Specifically, when it is necessary to maintain a high and constant temperature (i.e., the second constant temperature control mode), the PID controller will control the power-on time of the heater 201 in a heating cycle according to the output percentage.

[0122] For example, when the constant high temperature To ≥ 35℃, the output percentage A is obtained by inputting To and Tm into the PID controller. Here, the heating cycle is Tsh, so the on-time of heater 201 in one heating cycle is s = A × Tsh. For example, if A = 80% and Tsh = 10s, heater 201 will first turn on for 8 seconds and then turn off for 2 seconds in one heating cycle, and the refrigeration system 10 will not participate in the operation to avoid energy waste.

[0123] This invention provides a control method that allows for flexible selection of cooling methods based on actual operating conditions or fault situations through the switching of a three-way valve 102. When one cooling method (such as water cooling) fails, it can quickly switch to another method (such as air cooling), thereby avoiding system paralysis or equipment damage caused by the failure of a single cooling mode. Furthermore, the PID controller intelligently adjusts the conduction state of the three-way valve 102 based on real-time temperature feedback and the target temperature value, selecting the optimal cooling method to minimize energy consumption. Through the logic design of the PID controller combined with the cooling quick-opening solenoid valve 105 and the hot gas bypass solenoid valve 106, it is ensured that cooling and heating do not operate simultaneously, reducing operating energy consumption.

[0124] The control method provided in this embodiment of the invention is applied to the multi-mode energy-saving semiconductor temperature control device described above. The control method described below can be referred to in correspondence with the multi-mode energy-saving semiconductor temperature control device described above, and will not be described in detail here.

[0125] Figure 8 An example is a schematic diagram of the physical structure of an electronic device, such as... Figure 8 As shown, the electronic device may include: a processor 810, a communications interface 820, a memory 830, and a communication bus 840, wherein the processor 810, the communications interface 820, and the memory 830 communicate with each other via the communication bus 840. The processor 810 can call logical instructions in the memory 830 to execute a control method, which includes:

[0126] The PID controller controls the opening of the three-way valve interface to control the heat exchange switching between the water condenser and the fan speed regulator;

[0127] The PID controller determines the output percentage based on the first temperature value and the target temperature value collected by the outlet temperature sensor corresponding to the heater;

[0128] In the first constant temperature control mode, the PID controller controls the switching of the cooling quick-opening solenoid valve and the hot gas bypass solenoid valve within a cooling cycle based on the output percentage.

[0129] In the first constant temperature control mode, the PID controller controls the energizing time of the heater within a heating cycle based on the output percentage.

[0130] Furthermore, the logical instructions in the aforementioned memory 70 can be implemented as software functional units and, when sold or used as independent products, can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, essentially, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0131] On the other hand, the present invention also provides a computer program product, the computer program product comprising a computer program, the computer program being able to be stored on a non-transitory computer-readable storage medium, and when the computer program is executed by a processor, the computer being able to execute the control methods provided by the above methods, the method comprising:

[0132] The PID controller controls the opening of the three-way valve interface to control the heat exchange switching between the water condenser and the fan speed regulator;

[0133] The PID controller determines the output percentage based on the first temperature value and the target temperature value collected by the outlet temperature sensor corresponding to the heater;

[0134] In the first constant temperature control mode, the PID controller controls the switching of the cooling quick-opening solenoid valve and the hot gas bypass solenoid valve within a cooling cycle based on the output percentage.

[0135] In the first constant temperature control mode, the PID controller controls the energizing time of the heater within a heating cycle based on the output percentage.

[0136] In another aspect, the present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, is implemented to perform the control methods provided by the methods described above, the method comprising:

[0137] The PID controller controls the opening of the three-way valve interface to control the heat exchange switching between the water condenser and the fan speed regulator;

[0138] The PID controller determines the output percentage based on the first temperature value and the target temperature value collected by the outlet temperature sensor corresponding to the heater;

[0139] In the first constant temperature control mode, the PID controller controls the switching of the cooling quick-opening solenoid valve and the hot gas bypass solenoid valve within a cooling cycle based on the output percentage.

[0140] In the first constant temperature control mode, the PID controller controls the energizing time of the heater within a heating cycle based on the output percentage.

[0141] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0142] Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus necessary general-purpose hardware platforms, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solutions, in essence or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the methods described in the various embodiments or some parts of the embodiments.

[0143] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A multi-mode energy saving semiconductor temperature control device, characterized by, The application relates to a refrigeration system, a circulating liquid system and a PID controller. The refrigeration system comprises a compressor, an evaporator, a three-way valve, a water condenser, an air condenser, a refrigeration quick-opening electromagnetic valve and a hot gas bypass electromagnetic valve; the first interface of the three-way valve is connected with the exhaust port of the compressor; the second interface of the three-way valve is connected with the first interface of the water condenser; the third interface of the three-way valve is connected with the first interface of the air condenser; the second interface of the water condenser is connected with the second interface of the air condenser and the first liquid inlet of the evaporator through a confluence point; the first interface of the refrigeration quick-opening electromagnetic valve is connected with the confluence point; the second interface of the refrigeration quick-opening electromagnetic valve is connected with the first liquid inlet of the evaporator; the first interface of the hot gas bypass electromagnetic valve is connected with the exhaust port of the compressor; and the second interface of the hot gas bypass electromagnetic valve is connected with the exhaust port of the compressor and the first gas outlet of the evaporator. The circulating liquid system comprises a heater and an outlet temperature sensor; the heater and the outlet temperature sensor are connected in series between the second gas outlet and the second liquid inlet of the evaporator; and the outlet temperature sensor is arranged behind the outlet of the heater. The PID controller is used for controlling the conduction of the interfaces of the three-way valve, so as to control the heat exchange switching of the water condenser and the air condenser. The PID controller is also used for determining an output percentage according to a first temperature value collected by the outlet temperature sensor and a target temperature value. In the first constant temperature control mode, the PID controller is also used for controlling the switching of the refrigeration quick-opening electromagnetic valve and the hot gas bypass electromagnetic valve in a refrigeration cycle according to the output percentage. In the second constant temperature control mode, the PID controller is also used for controlling the power-on time of the heater in a heating cycle according to the output percentage. The refrigeration system further comprises a condensing pressure regulating valve and an air speed regulator; the condensing pressure regulating valve is connected with the water condenser; and the air condenser is connected with the air speed regulator.

2. The multi-mode energy saving semiconductor temperature control device of claim 1, wherein, The condensing pressure regulating valve is used for adjusting the cooling water flow of the water condenser when heat exchange is performed through the water condenser. The air speed regulator is used for adjusting the fan power of the air condenser when heat exchange is performed through the air speed regulator. The refrigeration system further comprises a refrigeration thermal expansion valve; and the refrigeration thermal expansion valve is arranged between the refrigeration quick-opening electromagnetic valve and the first liquid inlet of the evaporator.

3. The multi-mode energy saving semiconductor temperature control device of claim 1, wherein, In the cooling process, the PID controller is also used for controlling the refrigeration quick-opening electromagnetic valve to be opened and controlling the refrigeration thermal expansion valve to be adjusted in opening degree according to the superheat of the evaporator in the refrigeration system when the output percentage is a first output percentage.

4. The multi-mode energy saving semiconductor temperature control device of claim 3, wherein, ​ ​ In a case that the output percentage is a second output percentage, the PID controller is further configured to control switching of the refrigeration fast open electromagnetic valve and the hot gas bypass electromagnetic valve in a refrigeration cycle according to the output percentage, the second output percentage being less than the first output percentage.

5. The multi-mode energy saving semiconductor temperature control device of claim 3, wherein, In the case of being in the process of heating, further comprising: In a case that the output percentage is a third output percentage, the PID controller is further configured to control the heater to be continuously powered on; In a case that the output percentage is a fourth output percentage, the PID controller is further configured to control a power-on time of the heater in a heating cycle according to the output percentage, the fourth output percentage being less than the third output percentage.

6. The multi-mode energy saving semiconductor temperature control device of claim 1, wherein, The refrigeration system further comprises an exhaust temperature sensor, a cold bypass fast open electromagnetic valve and a cold bypass thermal expansion valve, the exhaust temperature sensor is arranged between an exhaust port of the compressor and a first interface of the three-way valve, a first interface of the cold bypass fast open electromagnetic valve is connected with the confluence point and a first interface of the refrigeration fast open electromagnetic valve, a second interface of the cold bypass fast open electromagnetic valve is connected with a first interface of the cold bypass thermal expansion valve, and a second interface of the cold bypass thermal expansion valve is connected with a first gas outlet of the evaporator and an air inlet of the compressor. The PID controller is further configured to control the cold bypass fast open electromagnetic valve to be opened and control the cold bypass thermal expansion valve to be adjusted in opening degree according to a superheat of the compressor in a case that a second temperature value collected by the exhaust temperature sensor exceeds a first temperature threshold.

7. The multi-mode energy saving semiconductor temperature control device of claim 1, wherein, The circulating liquid system further comprises a water tank and a circulating pump, the water tank, the circulating pump and the heater are connected in series between a second gas outlet of the evaporator and a second liquid inlet.

8. The multi-mode energy saving semiconductor temperature control device of claim 1, wherein, The refrigeration system further comprises an exhaust pressure sensor, the exhaust pressure sensor is arranged between an exhaust port of the compressor and a first interface of the three-way valve. The PID controller is further configured to control the first interface of the three-way valve to be conductive with the second interface of the three-way valve in a case that an exhaust pressure monitored by the exhaust pressure sensor is not greater than a pressure threshold, and control the second interface of the three-way valve to be conductive with the third interface of the three-way valve in a case that the exhaust pressure monitored by the exhaust pressure sensor is greater than the pressure threshold.

9. The multi-mode energy saving semiconductor temperature control device of claim 2, wherein, The circulating liquid system further comprises an ambient temperature sensor, and the PID controller is further configured to control the first interface of the three-way valve to be conductive with the second interface of the three-way valve and control the condenser pressure regulating valve to adjust a cooling water flow of the water condenser according to the monitored exhaust pressure in a case that a third temperature value collected by the ambient temperature sensor is greater than a second temperature threshold. The PID controller is further configured to control the first interface of the three-way valve to be conductive with the third interface of the three-way valve and control the air speed regulator to adjust a fan power of the air condenser according to the monitored exhaust pressure in a case that the third temperature value collected by the ambient temperature sensor is less than the second temperature threshold.

10. A control method characterized by, The method is applied to the multi-mode energy-saving semiconductor temperature control device in any one of claims 1 to 9, and the method comprises: The PID controller controls the conduction of the interface of the three-way valve to control the heat exchange switching of the water condenser and the air speed regulator; The PID controller determines the output percentage according to the first temperature value collected by the outlet temperature sensor corresponding to the heater and the target temperature value; In the case of the first constant temperature control mode, the PID controller controls the switching of the refrigeration quick-opening electromagnetic valve and the hot gas bypass electromagnetic valve in a refrigeration cycle according to the output percentage. In the case of the first constant temperature control mode, the PID controller controls the energization time of the heater in a heating cycle according to the output percentage.

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