Tungsten wire rope calibration equipment for semiconductor crystal growth

Abstract

The present invention relates to the field of semiconductor production equipment calibration tool equipment, and discloses a tungsten wire rope calibration equipment for semiconductor crystal growth, including a support frame, the inner wall of the support frame is fixedly connected with a fixed plate, the lower surface of the fixed plate is fixedly connected with a first motor, the output end of the first motor is fixedly connected with a rotating disk, the lower surface of the rotating disk is rotatably connected to the upper surface of the fixed plate, the upper surface of the adjustment block is fixedly connected with a first fixed column, the outer wall of the first fixed column is rotatably connected with a connecting sleeve rod, and the inner wall of the connecting sleeve rod is rotatably connected with a second fixed column. By turning on the first motor, its output end drives the adjustment block to revolve through the rotating disk, and the adjustment block drives the moving frame to slide back and forth on the guide rail through the connecting sleeve rod supported by the first fixed column, which can meet the reciprocating tensile test of the tungsten wire rope, thereby achieving the effect of effectively evaluating the fatigue strength and durability of the tungsten wire rope during repeated stretching and retraction.

Description

Technical Field

[0001] The invention relates to the field of semiconductor production equipment calibration tool equipment, in particular to tungsten wire rope calibration equipment for semiconductor crystal growth. Background Art

[0002] During the growth process of semiconductor crystals, the tungsten wire rope undertakes the important task of lifting and slowly pulling the crystal raw materials. By precisely controlling the speed and strength of the suspension and pulling, the crystal can be guided to grow in a predetermined direction and shape. The tungsten wire rope has to withstand huge tensile force. The tensile test can determine whether the tungsten wire rope can maintain structural integrity and stable performance within the specified tensile force range. It is usually stretched continuously during the tensile test until the tungsten wire rope breaks, in order to determine its basic mechanical properties such as tensile strength.

[0003] However, with current technology, it is impossible to perform reciprocating continuous tensile tests when calibrating tungsten wire ropes, which makes it difficult to reflect the performance of tungsten wire ropes under complex and dynamic stress conditions, making it difficult to detect the fatigue performance and durability of tungsten wire ropes. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides a tungsten wire rope calibration device for semiconductor crystal growth, which solves the problem that it is impossible to perform a continuous reciprocating tensile test on the tungsten wire rope and it is difficult to reflect the performance of the tungsten wire rope under complex and dynamic stress conditions.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0006] The tungsten wire rope calibration equipment for semiconductor crystal growth comprises a support frame, the inner wall of the support frame is fixedly connected with a fixed plate, the lower surface of the fixed plate is fixedly connected with a first motor, the output end of the first motor is fixedly connected with a rotating disk, the lower surface of the rotating disk is rotatably connected to the upper surface of the fixed plate, the upper surface of the rotating disk is fixedly connected with a fixed frame, the inner wall of the fixed frame is slidably connected with an adjusting block, the upper surface of the adjusting block is fixedly connected with a first fixed column, the outer wall of the first fixed column is rotatably connected with a connecting sleeve rod, the inner wall of the connecting sleeve rod is rotatably connected with a second fixed column, the bottom end of the second fixed column is fixedly connected with a support plate, the outer wall of the support plate is fixedly connected with a moving frame, the inner wall of the moving frame is slidably connected with a guide rail, the lower surface of the guide rail is fixedly connected to the upper surface of the fixed plate, and the outer wall of the fixed frame is provided with an adjusting component, and the adjusting component is used to adjust the effect on the reciprocating stretching distance of the tungsten wire rope.

[0007] Preferably, the adjustment component includes a screw disk, the outer wall of the screw disk is rotatably connected to the outer wall of the fixed frame, the outer wall of the screw disk is fixedly connected to a first screw rod, the outer wall of the first screw rod is rotatably connected to the inner wall of the fixed frame, the outer wall of the first screw rod is threadedly connected to the interior of the adjustment block, and a through groove is opened inside the support frame.

[0008] Preferably, the inner wall of the movable frame is fixedly connected to a second motor, the output end of the second motor is fixedly connected to positive and negative wire columns, the outer walls of the positive and negative wire columns are rotatably connected to the inner wall of the movable frame, the outer walls of the positive and negative wire columns are threadedly connected to a U-shaped block, and the outer wall of the U-shaped block is slidably connected to the inner wall of the movable frame.

[0009] Preferably, the inner wall of the U-shaped block is rotatably connected to a cross plate, the inside of the cross plate is rotatably connected to a limiting column, the outer wall of the cross plate is rotatably connected to a push plate, the upper surface of the push plate is fixedly connected to a positioning frame, the outer wall of the positioning frame is fixedly connected to a guide block, and the outer wall of the guide block is slidably connected to the inner wall of the movable frame.

[0010] Preferably, a frame is fixedly connected to the upper surface of the positioning frame, a support column is fixedly connected to the inner wall of the frame, and a first gear is fixedly connected to the outer wall of the support column.

[0011] Preferably, an outer wall of the support column is rotatably connected to an adjusting disk, and an outer wall of the adjusting disk is fixedly connected to a third motor.

[0012] Preferably, the output end of the third motor is fixedly connected to a movable column, the outer wall of the movable column is rotatably connected to the inside of the adjustment disk, the outer wall of the movable column is fixedly connected to a second gear, and the outer wall of the second gear is meshingly connected to the outer wall of the first gear.

[0013] Preferably, the outer wall of the adjusting disk is fixedly connected to a crimping frame, the internal thread of the crimping frame is connected to a second screw rod, the bottom end of the second screw rod is rotatably connected to a crimping head, the outer wall of the crimping head is fixedly connected to a slider, and the outer wall of the slider is slidably connected to the inner wall of the crimping frame.

[0014] Preferably, a frame plate is fixedly connected to the upper surface of the support frame, a winding motor is fixedly connected to the outer wall of the frame plate, a winding drum is fixedly connected to the output end of the winding motor, and the outer wall of the winding drum is rotatably connected to the outer wall of the frame plate.

[0015] Preferably, a traction wheel is provided on the upper surface of the support frame, and the height position of the traction wheel is lower than the winding position of the winding drum.

[0016] Working principle: When the equipment is needed, the technician can pass the tungsten wire rope that needs to be calibrated through the inner wall of the crimping frame, and then wrap it around the outer wall of the winding drum through the bottom end of the traction wheel, and turn on the winding motor fixed on the outer wall of the frame plate. The output end of the winding motor can drive the winding drum to rotate to reel in the tungsten wire rope. At the same time, during the tungsten wire rope tensile test, the stability of the tungsten wire rope is ensured. Then, the second screw rod is twisted, and the second screw rod can drive the crimping head to move, and then the crimping head can press and fix the tungsten wire rope through the slider, and then the first motor fixed on the lower surface of the fixed plate is turned on, and the output of the first motor The end can drive the rotating disk to rotate, and the rotating disk can drive the adjusting block to revolve through the fixed frame, and then the adjusting block pulls or pushes the connecting sleeve rod to move through the first fixed column, so that the connecting sleeve rod can drive the moving frame to slide back and forth on the outer wall of the guide rail through the second fixed column fixed by the support plate to reciprocate the tungsten wire rope, effectively evaluating the fatigue strength and durability of the tungsten wire rope during repeated stretching and retraction. At the same time, the technician can rotate the screw disk through the through slot to drive the first screw rod to rotate on the inner wall of the fixed frame, and then drive the adjusting block to move in the fixed frame through the threaded connection. The inner wall slides, so the revolution distance of the adjustment block can be adjusted, and the reciprocating interval distance of the mobile frame can be adjusted to comprehensively examine the performance of the tungsten wire rope under different fatigue levels, so as to achieve a more accurate evaluation of the performance and reliability of the tungsten wire rope. Then the second motor is turned on, and the output end of the second motor can drive the positive and negative wire columns to rotate on the inner wall of the mobile frame, and then drive the U-shaped blocks at both ends of the positive and negative wire columns to move relative to each other. When the U-shaped blocks at both ends move, the cross plate can be driven to cross-rotate on the outer wall of the limit column, and the positioning frame can be pushed up and down by the push plate, and the positioning frame can drive the guide block to move. The tungsten wire rope is subjected to synchronous sliding to ensure the stability when the upper and lower positions of the locating frame are adjusted, so that the tension control of the tungsten wire rope under the traction wheel can be adjusted to simulate the tilting force condition. At the same time, when the third motor is turned on, the third motor can drive the second gear to rotate through the movable column. When the second gear rotates, the reverse force generated by the engagement with the outer wall of the first gear can drive the adjusting disk to rotate on the outer wall of the supporting column. Then, the tungsten wire rope can be twisted during stretching, so as to achieve the effect of accurately measuring the torsional strength and fatigue life of the tungsten wire rope under the simultaneous action of stretching and torsion, and discovering the potential risk of torsional failure in advance.

[0017] The present invention provides a tungsten wire rope calibration device for semiconductor crystal growth. It has the following beneficial effects:

[0018] 1. The present invention starts the first motor, and its output end drives the adjusting block to revolve through the rotating disk, and the adjusting block drives the moving frame to slide back and forth on the guide rail through the connecting sleeve rod supported by the first fixed column, which can meet the requirements of reciprocating tensile test of the tungsten wire rope, thereby achieving the effect of effectively evaluating the fatigue strength and durability of the tungsten wire rope during repeated stretching and retraction.

[0019] 2. The present invention drives the adjusting block to slide on the inner wall of the fixed frame by twisting the screw disk through the first screw rod, thereby adjusting the revolution distance of the adjusting block, and then adjusting the reciprocating distance of the moving frame on the guide rail, so as to comprehensively examine the performance of the tungsten wire rope under different fatigue levels, thereby achieving the effect of more accurately evaluating the performance and reliability of the tungsten wire rope.

[0020] 3. The present invention starts the second motor to drive the U-shaped blocks at both ends of the positive and negative wire columns to move relative to each other through the positive and negative wire columns, thereby driving the cross plate to cross-rotate on the outer wall of the limit column, and driving the positioning frame to adjust up and down through the push plate, thereby achieving the tension control of the tungsten wire rope under the traction wheel to simulate the inclined force condition and further improve the effect of the tungsten wire rope testing range.

[0021] 4. The present invention drives the adjustment disk to rotate on the outer wall of the support column through the reverse force generated by the engagement of the second gear with the outer wall of the first gear when the second gear rotates, so as to twist the tungsten wire rope during stretching, thereby achieving the effect of accurately measuring the torsional strength and fatigue life of the tungsten wire rope under the simultaneous action of stretching and torsion, and discovering the potential risk of torsional failure in advance. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A perspective view of the present invention;

[0023] Figure 2 is a cross-sectional view of the support frame of the present invention;

[0024] Figure 3 It is a schematic diagram of the rotating disk of the present invention;

[0025] Figure 4 It is a schematic diagram of a cross plate of the present invention;

[0026] Figure 5 It is a schematic diagram of a movable column of the present invention;

[0027] Figure 6 It is a schematic diagram of the crimping frame of the present invention.

[0028] Among them, 1. support frame; 2. fixed plate; 3. first motor; 4. rotating disk; 5. fixed frame; 6. adjusting block; 7. first fixed column; 8. connecting sleeve rod; 9. support plate; 10. second fixed column; 11. movable frame; 12. guide rail; 13. screw disk; 14. first screw rod; 15. through slot; 16. second motor; 17. positive and negative screw columns; 18. U-shaped block; 19. cross plate; 20. limit column; 21. push plate; 22. positioning frame; 23. guide block; 24. frame; 25. support column; 26. first gear; 27. adjusting disk; 28. third motor; 29. ​​movable column; 30. second gear; 31. crimping frame; 32. second screw rod; 33. crimping joint; 34. slider; 35. frame plate; 36. winding motor; 37. winding drum; 38. traction wheel. DETAILED DESCRIPTION

[0029] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] Please refer to the attached Figure 1 -Attached Figure 6 The embodiment of the present invention provides a tungsten wire rope calibration device for semiconductor crystal growth, including a support frame 1, the inner wall of the support frame 1 is fixedly connected with a fixed plate 2, the lower surface of the fixed plate 2 is fixedly connected with a first motor 3, the output end of the first motor 3 is fixedly connected with a rotating disk 4, the lower surface of the rotating disk 4 is rotatably connected to the upper surface of the fixed plate 2, the upper surface of the rotating disk 4 is fixedly connected with a fixed frame 5, the inner wall of the fixed frame 5 is slidably connected with an adjusting block 6, the upper surface of the adjusting block 6 is fixedly connected with a first fixed column 7, the outer wall of the first fixed column 7 is rotatably connected with a connecting sleeve rod 8, the inner wall of the connecting sleeve rod 8 is rotatably connected with a second fixed column 10, the bottom end of the second fixed column 10 is fixedly connected with a support plate 9, the outer wall of the support plate 9 is fixedly connected with a moving frame 11, the inner wall of the moving frame 11 is slidably connected with a guide rail 12, the lower surface of the guide rail 12 is fixedly connected to the upper surface of the fixed plate 2, and the outer wall of the fixed frame 5 is provided with an adjusting component, and the adjusting component is used to adjust the effect of the reciprocating stretching distance of the tungsten wire rope;

[0031] Specifically, the support frame 1 has a fixed support function for the fixed plate 2, and the fixed plate 2 can fix the position of the first motor 3 to ensure the stability of the first motor 3 during operation, and when the first motor 3 is turned on, its output end can drive the rotating disk 4 to rotate, and the first motor 3 can support the rotating position of the rotating disk 4 to ensure its stability, and the rotating disk 4 has a fixed support function for the fixed frame 5, and the fixed frame 5 has a limiting function on the adjustment block 6, which can support the sliding position of the adjustment block 6, and the adjustment block 6 has a fixed support function for the first fixed column 7. When the rotating disk 4 rotates, It can drive the first fixed column 7 to revolve, and the first fixed column 7 can support the rotation position of the connecting sleeve rod 8, and then drive the connecting sleeve rod 8 to move, and the second fixed column 10 can support the rotation position of the other end of the connecting sleeve rod 8, so that the support plate 9 can be driven to move by the second fixed column 10, and at the same time, the moving frame 11 has a fixed supporting function for the support plate 9, and can drive the moving frame 11 to reciprocate on the outer wall of the guide rail 12, and the fixed plate 2 has a fixed supporting function for the guide rail 12, and the guide rail 12 can ensure the stability of the moving frame 11 when it is reciprocating.

[0032] The adjustment assembly includes a screw disk 13, the outer wall of the screw disk 13 is rotatably connected to the outer wall of the fixed frame 5, the outer wall of the screw disk 13 is fixedly connected to the first screw rod 14, the outer wall of the first screw rod 14 is rotatably connected to the inner wall of the fixed frame 5, the outer wall of the first screw rod 14 is threadedly connected to the inside of the adjustment block 6, and a through groove 15 is opened inside the support frame 1;

[0033] Specifically, the fixed frame 5 can support the rotation position of the screw disk 13. At the same time, when the fixed frame 5 is turned, the fixed frame 5 can drive the first screw rod 14 to rotate on the inner wall of the fixed frame 5. The fixed frame 5 can support the rotation position of the first screw rod 14. When the first screw rod 14 rotates, it can drive the adjustment block 6 to move on the inner wall of the fixed frame 5 through the rotation of the thread, thereby adjusting the reciprocating distance of the movable frame 11, and the through groove 15 facilitates the operating space for technicians when turning the through groove 15.

[0034] The inner wall of the mobile frame 11 is fixedly connected with a second motor 16, and the output end of the second motor 16 is fixedly connected with a positive and negative thread column 17, and the outer wall of the positive and negative thread column 17 is rotatably connected to the inner wall of the mobile frame 11, and the outer wall of the positive and negative thread column 17 is threadedly connected with a U-shaped block 18, and the outer wall of the U-shaped block 18 is slidably connected to the inner wall of the mobile frame 11;

[0035] Specifically, the movable frame 11 has the function of fixed support for the second motor 16, which can ensure the stability of the second motor 16 during operation. When the second motor 16 is turned on, its output end can drive the positive and negative wire columns 17 to rotate, and the movable frame 11 can support the rotation position of the positive and negative wire columns 17. When the positive and negative wire columns 17 rotate, they can drive the U-shaped blocks 18 at both ends to move synchronously relative to each other through threaded connections, and the movable frame 11 can support the sliding position of the U-shaped blocks 18.

[0036] The inner wall of the U-shaped block 18 is rotatably connected to a cross plate 19, the inner part of the cross plate 19 is rotatably connected to a limiting column 20, the outer wall of the cross plate 19 is rotatably connected to a push plate 21, the upper surface of the push plate 21 is fixedly connected to a positioning frame 22, the outer wall of the positioning frame 22 is fixedly connected to a guide block 23, and the outer wall of the guide block 23 is slidably connected to the inner wall of the moving frame 11;

[0037] Specifically, the U-shaped block 18 can support the rotation position of the cross plate 19, and the cross plate 19 can support the position of the limit column 20. When the U-shaped blocks 18 at both ends move relative to each other, the cross plate 19 can be driven to cross-rotate through the limit column 20, and the push plate 21 can support the rotation position of the upper end of the cross plate 19. At the same time, the positioning frame 22 has a fixed support function for the push plate 21, and can then drive the positioning frame 22 to move up and down. At the same time, the positioning frame 22 has a fixed support function for the guide block 23, and can drive the guide block 23 to slide on the inner wall of the moving frame 11, thereby ensuring the stability of the height adjustment of the positioning frame 22.

[0038] The upper surface of the positioning frame 22 is fixedly connected with a frame 24, the inner wall of the frame 24 is fixedly connected with a support column 25, and the outer wall of the support column 25 is fixedly connected with a first gear 26;

[0039] Specifically, the positioning frame 22 has a function of fixing and supporting the frame 24 , and the frame 24 can fix the position of the support column 25 , while the support column 25 has a function of fixing and supporting the first gear 26 .

[0040] The outer wall of the support column 25 is rotatably connected to an adjusting disk 27, and the outer wall of the adjusting disk 27 is fixedly connected to a third motor 28;

[0041] Specifically, the support column 25 can support the rotation position of the adjustment disk 27, and the adjustment disk 27 has a fixed support function for the third motor 28, which can ensure the stability of the third motor 28 during operation.

[0042] The output end of the third motor 28 is fixedly connected to a movable column 29, the outer wall of the movable column 29 is rotatably connected to the inside of the adjustment disk 27, the outer wall of the movable column 29 is fixedly connected to a second gear 30, and the outer wall of the second gear 30 is meshedly connected to the outer wall of the first gear 26;

[0043] Specifically, when the third motor 28 is turned on, its output end can drive the movable column 29 to rotate, and the adjusting disk 27 can support the rotation position of the adjusting disk 27, and the movable column 29 has a fixed supporting function for the second gear 30. When the movable column 29 rotates, it can drive the second gear 30 to rotate synchronously, and when the second gear 30 rotates, it can drive the adjusting disk 27 to rotate on the outer wall of the support column 25 through the reverse force generated by the engagement with the first gear 26.

[0044] The outer wall of the adjusting disk 27 is fixedly connected to a crimping frame 31, the inner thread of the crimping frame 31 is connected to a second screw rod 32, the bottom end of the second screw rod 32 is rotatably connected to a crimping head 33, the outer wall of the crimping head 33 is fixedly connected to a slider 34, and the outer wall of the slider 34 is slidably connected to the inner wall of the crimping frame 31;

[0045] Specifically, the adjusting disk 27 has a fixed supporting function for the crimping frame 31. When the second screw rod 32 is screwed, the second screw rod 32 can be driven to perform threaded rotation inside the crimping frame 31, and the crimping frame 31 can support the position of the threaded rotation of the crimping frame 31. At the same time, the crimping head 33 can slide downward through the slider 34 to compress and fix the tungsten wire rope.

[0046] The upper surface of the support frame 1 is fixedly connected with a frame plate 35, the outer wall of the frame plate 35 is fixedly connected with a winding motor 36, the output end of the winding motor 36 is fixedly connected with a winding drum 37, and the outer wall of the winding drum 37 is rotatably connected to the outer wall of the frame plate 35;

[0047] Specifically, the support frame 1 has a fixed support function for the frame plate 35, and the frame plate 35 can fix the position of the winding motor 36 to ensure its stability during operation. When the winding motor 36 is turned on, its output end can drive the winding drum 37 to rotate, and the frame plate 35 can ensure the stability of the winding drum 37 during rotation, thereby ensuring the stability of the tungsten wire rope during tensile testing.

[0048] A traction wheel 38 is provided on the upper surface of the support frame 1, and the height position of the traction wheel 38 is lower than the winding position of the winding drum 37;

[0049] Specifically, the support frame 1 can support the position of the traction wheel 38, and the tungsten wire rope can pass through the bottom of the traction wheel 38 and then be wound around the outer wall of the winding drum 37, so as to ensure the test position of the tungsten wire rope during the test.

[0050] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A tungsten wire rope calibration device for semiconductor crystal growth, comprising a support frame, characterized in that: The inner wall of the support frame is fixedly connected with a fixing plate, the lower surface of the fixing plate is fixedly connected with a first motor, the output end of the first motor is fixedly connected with a rotating disk, the lower surface of the rotating disk is rotatably connected to the upper surface of the fixing plate, the upper surface of the rotating disk is fixedly connected with a fixing frame, the inner wall of the fixing frame is slidably connected with an adjusting block, the upper surface of the adjusting block is fixedly connected with a first fixing column, the outer wall of the first fixing column is rotatably connected with a connecting sleeve rod, the inner wall of the connecting sleeve rod is rotatably connected with a second fixing column, the bottom end of the second fixing column is fixedly connected with a supporting plate, the outer wall of the supporting plate is fixedly connected with a moving frame, the inner wall of the moving frame is slidably connected with a guide rail, the lower surface of the guide rail is fixedly connected to the upper surface of the fixing plate, and the outer wall of the fixing frame is provided with an adjusting component, and the adjusting component is used to adjust the effect on the reciprocating stretching distance of the tungsten wire rope; The inner wall of the mobile frame is fixedly connected to a second motor, the output end of the second motor is fixedly connected to a positive and negative thread column, the outer wall of the positive and negative thread column is rotatably connected to the inner wall of the mobile frame, the outer wall of the positive and negative thread column is threadedly connected to a U-shaped block, and the outer wall of the U-shaped block is slidably connected to the inner wall of the mobile frame; The inner wall of the U-shaped block is rotatably connected to a cross plate, the interior of the cross plate is rotatably connected to a limiting column, the outer wall of the cross plate is rotatably connected to a push plate, the upper surface of the push plate is fixedly connected to a positioning frame, the outer wall of the positioning frame is fixedly connected to a guide block, and the outer wall of the guide block is slidably connected to the inner wall of the moving frame; The adjusting assembly comprises a screw disk, the outer wall of which is rotatably connected to the outer wall of the fixing frame, the outer wall of which is fixedly connected to a first screw rod, the outer wall of which is rotatably connected to the inner wall of the fixing frame, the outer wall of which is threadedly connected to the inside of the adjusting block, and a through groove is provided inside the supporting frame; The upper surface of the positioning frame is fixedly connected with a frame, the inner wall of the frame is fixedly connected with a support column, and the outer wall of the support column is fixedly connected with a first gear; The outer wall of the support column is rotatably connected to an adjustment disk, and the outer wall of the adjustment disk is fixedly connected to a third motor; The output end of the third motor is fixedly connected to a movable column, the outer wall of the movable column is rotatably connected to the inside of the adjustment disk, the outer wall of the movable column is fixedly connected to a second gear, and the outer wall of the second gear is meshedly connected to the outer wall of the first gear; The outer wall of the adjusting disk is fixedly connected to a crimping frame, the internal thread of the crimping frame is connected to a second screw rod, the bottom end of the second screw rod is rotatably connected to a crimping head, the outer wall of the crimping head is fixedly connected to a slider, and the outer wall of the slider is slidably connected to the inner wall of the crimping frame.

2. The tungsten wire rope calibration equipment for semiconductor crystal growth according to claim 1, characterized in that: A frame plate is fixedly connected to the upper surface of the support frame, a winding motor is fixedly connected to the outer wall of the frame plate, a winding drum is fixedly connected to the output end of the winding motor, and the outer wall of the winding drum is rotatably connected to the outer wall of the frame plate.

3. The tungsten wire rope calibration equipment for semiconductor crystal growth according to claim 2, characterized in that: A traction wheel is arranged on the upper surface of the support frame, and the height position of the traction wheel is lower than the winding position of the winding drum.

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