Particle detection equipment

Abstract

The present application provides a particle detection device, belonging to the field of microscopic detection. The present application includes: a light source, a device to be measured, and an imaging device. Among them, the light source is used to emit a detection beam, and the detection beam generates fluorescence when irradiating the particles to be measured; the device to be measured includes an optical detection area and a spraying device, and the particles to be measured flowing through the optical detection area are then sprayed out by the spraying device; the imaging device is disposed opposite to the optical detection area; the imaging device receives the fluorescence signal formed by the irradiation of the detection beam on the particles to be measured, and generates a detection signal based on the fluorescence signal, and the detection signal is used to detect the particles to be measured. In the present application, the particle detection is performed based on the detection device composed of the light source, the device to be measured, and the imaging device, which simplifies the device, improves the convenience of the device, and improves the accuracy of imaging, and further reduces the cost of the detection device.

Description

Technical Field

[0001] This application relates to the field of microscopic detection technology, and particularly to a particle detection device. Background Art

[0002] The microscopic particle size detection technology has extensive applications in fields such as biology, physics, and chemistry, such as measuring cell size, detecting powder particle size, and controlling the size of suspended particles in pharmaceuticals. Currently, the method for detecting the size of microscopic particles is microscopic image measurement method, but the microscopic image measurement method has problems such as complex lens elements, inaccurate defocusing of lens light leading to aberration and distortion, complex imaging focusing, high manufacturing cost of imaging equipment, large volume, heavy weight of the lens, and large limitation on the imaging wavelength band. Summary of the Invention

[0003] The main purpose of this application is to provide a particle detection device, aiming to improve the convenience and accuracy of particle detection.

[0004] In a first aspect, this application provides a particle detection device, which includes:

[0005] A light source, which is used to emit a detection beam, and the detection beam generates fluorescence when irradiating the particle to be detected;

[0006] A device to be detected, which includes an optical detection area and a spraying device, and the particle to be detected flowing through the optical detection area is then sprayed out by the spraying device;

[0007] An imaging device, which is disposed opposite to the optical detection area;

[0008] Wherein, the imaging device receives the fluorescence signal formed by the particle to be detected under the irradiation of the detection beam, and generates a detection signal based on the fluorescence signal, and the detection signal is used to detect the particle to be detected.

[0009] In some embodiments, the particle detection device further includes:

[0010] An imaging recognition device, which is connected to the imaging device;

[0011] Wherein, the imaging recognition device is used to receive the detection signal transmitted by the imaging device, and perform recognition calculation on the detection signal to obtain the physical parameters of the particle to be detected.

[0012] In some embodiments, the particle detection device further includes:

[0013] A fluorescence wavelength selection device, which is disposed between the device to be detected and the imaging device;

[0014] Wherein, the fluorescence wavelength selection device is used to filter the light source signals of non - preset fluorescence wavelengths and external stray light, so that the imaging device can obtain a detection image of the preset fluorescence wavelength.

[0015] In some embodiments, the fluorescence wavelength selection device includes:

[0016] A first lens base, which is rotatably arranged;

[0017] Multiple groups of fluorescence filters, each of the fluorescence filters is arranged in the first lens base, and the first lens base rotates to make different fluorescence filters rotate to the working state to filter the fluorescence signals emitted from the optical detection area.

[0018] In some embodiments, the particle detection device further includes:

[0019] A light source wavelength selection device, which is arranged between the light source and the device to be measured;

[0020] Wherein, the light source filtering device is used to filter the detection light beams that are not within the preset fluorescence wavelength range.

[0021] In some embodiments, the light source wavelength selection device includes:

[0022] A second lens base, which is rotatably arranged;

[0023] Multiple groups of light source filters, each of the light source filters is arranged on the light source wavelength selection device, and the second lens base rotates to make different light source filters rotate to the working state to filter the detection light beams emitted from the light source.

[0024] In some embodiments, the particle detection device further includes:

[0025] A first control device, which is used to control the first lens base and / or the second lens base to control the fluorescence filters or the light source filters arranged in the first lens base or the second lens base to rotate to the working state position.

[0026] In some embodiments, the imaging device includes an imaging lens and an image sensor;

[0027] The imaging lens is arranged between the device to be measured and the image sensor;

[0028] Wherein, the imaging lens is used to receive the fluorescence signal, and the image sensor generates the detection signal according to the fluorescence signal.

[0029] In some embodiments, the ejection device includes:

[0030] A substrate, the substrate comprising a microparticle liquid cavity for placing a microparticle liquid, the microparticle liquid cavity including a liquid inlet and a liquid outlet;

[0031] A first electrode, the first electrode being disposed on the substrate and outside the microparticle liquid cavity;

[0032] A piezoelectric substrate, the piezoelectric substrate being made of a piezoelectric material, the piezoelectric substrate being disposed on the first electrode;

[0033] A second electrode, the second electrode being disposed on the piezoelectric substrate, the second electrode and the first electrode having opposite polarities;

[0034] A second control device, the second control device being electrically connected to the first electrode and the second electrode;

[0035] Wherein, the second control device is configured to control the second electrode and the first electrode to drive the piezoelectric substrate to vibrate to propagate an acoustic pulse wave in the microparticle liquid in the microparticle liquid cavity, the acoustic pulse wave being configured to drive the microparticle liquid to vibrate to form at least one droplet to be measured, and to cause each droplet to be measured to be ejected through the liquid outlet, the droplet to be measured including at least one microparticle to be measured.

[0036] In some embodiments, the substrate includes a first substrate and a second substrate, the first electrode is disposed on a first side surface of the first substrate, and a second side surface of the first substrate is connected to a first side surface of the second substrate to form the microparticle liquid cavity.

[0037] The present application provides a microparticle detection device. The microparticle detection device in the present application includes: a light source, a device to be measured, and an imaging device. Wherein, the light source is configured to emit a detection beam, and the detection beam generates fluorescence when irradiating the microparticle to be measured; the device to be measured includes an optical detection region and a spraying device, and the microparticle to be measured flowing through the optical detection region is then ejected through the spraying device; the imaging device is disposed opposite to the optical detection region; the imaging device receives the fluorescence signal formed when the microparticle to be measured is irradiated by the detection beam, and generates a detection signal based on the fluorescence signal, and the detection signal is used to detect the microparticle to be measured. In the present application, the microparticle is detected based on the detection device composed of the light source, the device to be measured, and the imaging device, which simplifies the device, improves the convenience of the device, and improves the accuracy of imaging, and further reduces the cost of the detection device. Description of the Drawings

[0038] To more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0039] Figure 1 Schematic structural diagram of a particle detection device provided by an embodiment of the present application;

[0040] Figure 2 Schematic structural diagram of another particle detection device provided by an embodiment of the present application;

[0041] Figure 3 Schematic structural diagram of an injection device provided by an embodiment of the present application;

[0042] Figure 4 Schematic structural diagram of another particle detection device provided by an embodiment of the present application;

[0043] Figure 5 Schematic structural diagram of another particle detection device provided by an embodiment of the present application;

[0044] Figure 6 Schematic structural diagram of another particle detection device provided by an embodiment of the present application;

[0045] Figure 7 Schematic structural diagram of another particle detection device provided by an embodiment of the present application.

[0046] The realization of the objectives of the present application, functional features and advantages will be further described in conjunction with the embodiments and with reference to the drawings. Specific embodiments

[0047] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts fall within the scope of protection of the present application.

[0048] The flowcharts shown in the drawings are only illustrative examples, and do not necessarily include all the content and operations / steps, nor do they necessarily need to be executed in the described order. For example, some operations / steps can also be decomposed, combined or partially merged, so the actual execution order may change according to the actual situation.

[0049] The following will describe in detail some embodiments of the present application with reference to the accompanying drawings. In the case of no conflict, the following embodiments and the features in the embodiments may be combined with each other.

[0050] Please refer to Figure 1 , Figure 1 which is a schematic structural diagram of a particle detection device provided for an embodiment of the present application.

[0051] As Figure 1 shown, the particle detection device 100 includes a light source 110, a device under test 120, and an imaging device 130. The device under test 120 is disposed between the light source 110 and the imaging device 130.

[0052] In some embodiments, the light source 110 is used to emit a detection beam 201, and the detection beam 201 generates fluorescence when irradiating the particles to be detected. The device under test 120 includes an optical detection region 122 and an ejection device 121. The particles to be detected flowing through the optical detection region 122 are ejected by the ejection device 121. The imaging device 130 is disposed opposite to the optical detection region 122. Among them, the imaging device 130 receives the fluorescence signal formed by the particles to be detected under the irradiation of the detection beam 201, and generates a detection signal based on the fluorescence signal. The detection signal is used to detect the particles to be detected. Detecting particles based on the lensless detection device composed of the light source, the device under test, and the imaging device simplifies the device, improves the convenience of the device, and improves the imaging accuracy, and further reduces the cost of the detection device.

[0053] It should be noted that the particles to be detected can be selected according to the actual situation, and the embodiments of the present invention do not make specific limitations in this regard. For example, the particles to be detected can be cells.

[0054] In some embodiments, the detection beam 201 is a spectral excitation light. The detection beam 201 can be a monochromatic light source, or a monochromatic light source obtained by filtering a composite light source. The wavelength range of the detection beam 201 is 400 nm to 700 nm.

[0055] In some embodiments, as Figure 2 shown, the device under test 120 includes an optical detection region 122 and an ejection device 121. The particles to be detected flowing through the optical detection region 122 are ejected by the ejection device 121. It should be noted that the ejection device 121 may further include a microfluidic chip or a particle sorting device, and the microfluidic chip or the particle sorting device orderly inputs the particles to be detected 10 into the optical detection region 122.

[0056] Exemplarily, as Figure 2 shown, Figure 2The device under test 120 includes a spraying device 121 and an optical detection area 122. The detection beam 201 emitted by the light source 110 irradiates the particle under test 10 to generate fluorescence, so as to generate a fluorescence signal.

[0057] In some embodiments, as Figure 3 shown, the spraying device 121 includes a substrate 30, a first electrode 304, a piezoelectric substrate 306, a second electrode 305 and a second control device 307. Among them, the substrate 30 includes a particle liquid cavity 308 for placing particle liquid. The particle liquid cavity 308 includes a liquid inlet 309 and a liquid outlet 310; the first electrode 304 is arranged on the substrate 30 and is located outside the particle liquid cavity; the piezoelectric substrate 306 is made of piezoelectric material and is arranged on the first electrode 304; the second electrode 305 is arranged on the piezoelectric substrate 306, and the polarities of the second electrode 305 and the first electrode 304 are opposite; the second control device 307 is electrically connected to the first electrode 304 and the second electrode 305; wherein, the second control device 307 is used to control the second electrode 305 and the first electrode 304 to drive the piezoelectric substrate 306 to vibrate to propagate an acoustic pulse wave in the particle liquid in the particle liquid cavity 308, and the acoustic pulse wave is used to drive the particle liquid to vibrate to form at least one droplet containing the particle under test 10, and each droplet containing the particle under test 10 is ejected through the liquid outlet 310.

[0058] In some embodiments, the substrate 30 includes a first substrate 301 and a second substrate 302. The first electrode 304 is arranged on the first side surface of the first substrate 301, and the second side surface of the first substrate 301 and the first side surface of the second substrate 302 form the particle liquid cavity 308.

[0059] Specifically, the provided spraying device 121 controls the vibration of the particle suspension 311 through an acoustic pulse wave, so that droplets containing a preset number of particles under test can be ejected through the liquid outlet 310 without being damaged, so that the provided spraying device 121 can avoid damaging the particles in the ejected droplets.

[0060] Through the cooperative setting of the first substrate 301 and the second substrate 302, the present application can form a sealed particle liquid cavity 308 inside the spraying device 121, thereby ensuring that the particle suspension 311 can reduce the damage to the particles in the particle liquid cavity 308 and improving the accuracy of the experiment using the ejected particles under test.

[0061] Exemplarily, a solution tank is provided on the first side surface of the second substrate 302. When the second side surface of the first substrate 301 is connected to the first side surface of the second substrate 302, the solution tank and the second side surface of the first substrate form the particle liquid cavity 308.

[0062] It should be noted that, in some embodiments, the liquid inlet is provided on the second side surface of the second substrate; the solution tank includes an outlet tank, and the outlet tank and the second side surface of the first substrate form an outlet port.

[0063] In some embodiments, the material of the first substrate 301 is a light-transmitting material, such as glass, and the material of the second substrate 302 can be either light-transmitting or light-blocking, such as silicon. The material types of the first substrate 301 and the second substrate 302 are selected by those skilled in the relevant art according to actual needs, and the embodiments of the present application do not limit the material types of the first substrate 301 and the second substrate 302.

[0064] In some embodiments, the first substrate 301 and the second substrate 302 are integrally formed. Thereby, the step of connecting the first substrate 301 and the second substrate 302 can be omitted, and the process difficulty of the spraying device 121 can be reduced.

[0065] In some embodiments, the length of the first electrode 304 in the direction of the cell suspension flow is a first preset length, and the length of the piezoelectric material in the direction of the cell suspension flow is a second preset length; the first preset length is greater than the second preset length.

[0066] In the method provided by the present application, the first electrode 304 must cover the piezoelectric material in the direction of the cell suspension flow to ensure that the piezoelectric material can vibrate sufficiently. If the first preset length is equal to or slightly less than the second preset length, the solution provided by the embodiments of the present application can also be achieved, but the vibration effect of the piezoelectric material on the particle liquid cavity 308 will be affected.

[0067] Exemplarily, the length of the second electrode 305 in the direction of the cell suspension flow can be less than the second preset length or greater than or equal to the second preset length, and the embodiments of the present application do not limit the length of the second electrode 305 in the direction of the cell suspension flow.

[0068] In some embodiments, the shapes of the cross-sections of the first electrode 304, the second electrode 305, and the piezoelectric substrate 306 in the direction of the particle suspension 311 flow are the same as the shape of the cross-section of the particle liquid cavity 308 in the direction of the particle suspension 311 flow.

[0069] It should be noted that when the shapes of the cross-sections of the first electrode 304, the second electrode 305, and the piezoelectric substrate 306 in the direction of the particle suspension 311 flow are different from the shape of the cross-section of the particle liquid cavity 308 in the direction of the particle suspension 311 flow, the cross-sections of the first electrode 304, the second electrode 305, and the piezoelectric substrate 306 in the direction of the particle suspension 311 flow cover the cross-section of the particle liquid cavity 308 in the direction of the particle suspension 311 flow, thereby ensuring that the piezoelectric substrate 306 can vibrate the particle liquid cavity 308 sufficiently.

[0070] Exemplarily, the shape of the cross section of the microparticle liquid cavity 308, the first electrode 304, the second electrode 305 and the piezoelectric substrate 306 relative to the flow direction of the microparticle suspension 311 is any one of a rectangular, circular, and annular. The specific shape is set and selected according to actual needs, and the embodiment of the present application does not limit the shape of the cross section of the microparticle liquid cavity 308, the first electrode 304, the second electrode 305 and the piezoelectric substrate 306 relative to the flow direction of the microparticle suspension 311.

[0071] Exemplarily, the shape of the liquid inlet 309 is consistent with the shape of the injection device for injecting the particle suspension 311 , thereby ensuring that the particle suspension 311 can flow completely into the liquid inlet 309 .

[0072] In some embodiments, the second control device is used to determine the preset parameters corresponding to the acoustic pulse wave according to the volume of the expected ejected droplet, so as to control the first electrode and the second electrode to drive the piezoelectric substrate to vibrate so as to propagate the acoustic pulse wave with the preset parameters in the cell suspension in the microparticle liquid cavity; wherein, when the acoustic pulse wave is a single pulse signal, the pulse width is 0.5μs to 20μs, the peak-to-peak voltage ranges from 0-500V, and the pulse amplitude is the first pulse amplitude; or, when the acoustic pulse wave is a double pulse signal or a bipolar pulse signal, the pulse width is 1μs to 3μs, the pulse interval is 4μs to 30us, the pulse amplitude is the second pulse amplitude, and the second pulse amplitude is less than the first pulse amplitude. wherein, the second pulse amplitude can be 0.3 to 0.6 times of the first pulse amplitude.

[0073] By setting the parameters of the single pulse signal and the double pulse signal or the bipolar pulse signal, it is ensured that the injection device 121 provided in the embodiment of the present application can generate droplets containing the particles to be tested that meet the requirements.

[0074] In some embodiments, Figure 4 As shown, the particle detection device 100 further includes an imaging recognition device 140, which is connected to the imaging device 130. The imaging recognition device is used to receive the detection signal transmitted by the imaging device, and perform recognition calculation on the detection signal to obtain the physical parameters of the particle to be detected.

[0075] It should be noted that the physical parameters include but are not limited to the diameter, roundness and morphology of the particles to be measured. The imaging recognition device can be set according to actual conditions, and the embodiment of the present invention does not specifically limit this. For example, the imaging recognition device can be a personal computer, a server, a mobile phone or other smart device.

[0076] like Figure 5As shown, the particle detection device 100 further includes a fluorescence wavelength selection device 150, which is disposed between the device under test 120 and the imaging device 130; wherein, the fluorescence wavelength selection device 150 is configured to filter the excitation light source signals of non-preset fluorescence wavelengths and external stray light, so that the imaging device can obtain a detection image of a preset fluorescence wavelength. Among them, the fluorescence signal of the preset wavelength can be set according to the actual situation, and the embodiments of the present invention do not make specific limitations in this regard. For example, the fluorescence signal of the preset wavelength can be a fluorescence signal with a wavelength of 480 nm. By filtering the fluorescence signal through the fluorescence wavelength selection device, the purity of the fluorescence signal can be improved, and thus the accuracy of particle detection can be improved.

[0077] In some embodiments, as Figure 5 shown, the fluorescence wavelength selection device 150 includes a first lens base 151 and multiple groups of fluorescence filters 152. Among them, the first lens base 151 is rotatably arranged, and each fluorescence filter 152 is arranged in the first lens base 151. The rotation of the first lens base 151 causes different fluorescence filters 152 to rotate to the working state to filter the fluorescence signal emitted from the optical detection area 120.

[0078] Exemplarily, the fluorescence filters 152 include blue fluorescence filters, green fluorescence filters, orange fluorescence filters, orange-red fluorescence filters, red fluorescence filters, and purple fluorescence filters. When the particles to be detected are cells stained with orange light, the first lens base 151 is rotated to make the orange fluorescence filter in the working state to filter the fluorescence signal emitted from the optical detection area 120.

[0079] In some embodiments, as Figure 6 shown, the particle detection device 100 further includes a light source wavelength selection device 160, which is disposed between the light source 110 and the device under test 120; wherein, the light source wavelength selection device 160 is configured to filter the detection light that is not within the preset wavelength band range. Among them, the detection light of the preset wavelength band can be set according to the actual situation, and the embodiments of the present invention do not make specific limitations in this regard. For example, the imaging light of the preset wavelength band can be detection light with a wavelength of 480 nm. By filtering the detection light through the light source filter device, the required detection light can be accurately obtained, and thus the accuracy of particle detection can be improved.

[0080] In some embodiments, as Figure 6As shown, the light source wavelength selection device 160 includes a second lens base 161 and a plurality of light source filter lenses 162. Among them, the second lens base 161 is rotatably arranged, and each light source filter lens 162 is arranged on the second lens base 161. The second lens base 161 rotates to rotate different light source filter lenses to the working state to filter the detection light emitted by the light source. The detection light can be screened and filtered through the second lens base 161, greatly improving the accuracy of the detection of the particles to be measured.

[0081] Exemplarily, the light source filter lens 162 includes a blue light source filter lens, a green light source filter lens, an orange-red light source filter lens, a red light source filter lens, and a purple fluorescence filter lens. When the particle to be measured is a fluorescent cell stained green, the second lens base 161 is rotated so that the green light source filter lens is in the working state to filter the detection light emitted by the light source 110, thereby generating green detection light.

[0082] In some embodiments, as Figure 7 shown, the particle detection device 100 further includes a first control device 170. The first control device 170 is used to control the first lens base 151 and / or the second lens base 162 to control the fluorescence filter lens arranged in the first lens base 151 or the light source filter lens arranged in the second lens base 161 to rotate to the working state position. Through the control device, the light source wavelength selection device and the light source wavelength selection device can be accurately controlled, greatly improving the accuracy of particle detection.

[0083] In some embodiments, the imaging device includes an imaging lens and an image sensor. The imaging lens is arranged between the device to be measured and the image sensor; wherein, the imaging lens is used to receive the fluorescence signal, and the image sensor generates the detection signal according to the fluorescence signal.

[0084] In some embodiments, the particle detection device 100 further includes a plurality of light sources. Each light source can independently provide detection light, and the corresponding light source can be selected according to needs, greatly improving the convenience of particle detection.

[0085] The particle detection device provided by the above embodiments includes a light source, a device under test, and an imaging device. Among them, the light source is used to emit a detection beam, and the detection beam generates fluorescence when irradiating the particle to be detected; the device under test includes an optical detection area and a spraying device, and the particle to be detected flowing through the optical detection area is then sprayed out by the spraying device; the imaging device is disposed opposite to the optical detection area; the imaging device receives the fluorescence signal formed by the particle to be detected under the irradiation of the detection beam, and generates a detection signal based on the fluorescence signal, and the detection signal is used to detect the particle to be detected. In this application, the particle is detected by the detection device composed of the light source, the device under test, and the imaging device, which simplifies the device, improves the convenience of the device, and improves the accuracy of imaging, and further reduces the cost of the detection device.

[0086] It should be understood that the terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. As used in the specification of this application, unless the context clearly indicates otherwise, the singular forms "a", "an", and "the" are intended to include the plural forms.

[0087] It should also be understood that the term "and / or" used in the specification of this application refers to any combination and all possible combinations of one or more of the related listed items, and includes these combinations. It should be noted that in this article, the term "comprising", "including" or any other variant thereof is intended to cover a non-exclusive inclusion, so that a process, method, article or system including a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or system. Without further limitation, an element defined by the statement "including a..." does not exclude the existence of additional identical elements in the process, method, article or system including the element.

[0088] The serial numbers of the above embodiments of this application are only for description and do not represent the advantages and disadvantages of the embodiments. The above is only the specific implementation manner of this application, but the protection scope of this application is not limited thereto. Any person skilled in the art within the technical scope disclosed by this application can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should be covered within the protection scope of this application.

Claims

1. A particle detection device, characterized in that: The particle detection device comprises: A light source, the light source is used to emit a detection light beam, the detection light beam generates fluorescence when irradiating the particle to be detected; A device to be tested, the device to be tested comprising an optical detection area and a spraying device, and the particles to be tested flowing through the optical detection area are then sprayed out through the spraying device; An imaging device, the imaging device being arranged opposite to the optical detection area; The spray device comprises a substrate, a first electrode, a piezoelectric substrate, a second electrode and a second control device. The substrate comprises a microparticle liquid cavity, the microparticle liquid cavity is used to place microparticle liquid, and the microparticle liquid cavity comprises a liquid inlet and a liquid outlet. The first electrode is arranged on the substrate and located outside the microparticle liquid cavity. The piezoelectric substrate is made of piezoelectric material and is arranged on the first electrode. The second electrode is arranged on the piezoelectric substrate, and the polarity of the second electrode is opposite to that of the first electrode. The second control device is electrically connected to the first electrode and the second electrode. Among them, the imaging device receives the fluorescence signal formed by the particle to be detected when irradiated by the detection light beam, and generates a detection signal based on the fluorescence signal, and the detection signal is used to detect the particle to be detected; the second control device is used to control the second electrode and the first electrode to drive the piezoelectric substrate to vibrate so as to propagate an acoustic pulse wave in the particle liquid in the particle liquid cavity, and the acoustic pulse wave is used to drive the particle liquid to vibrate to form at least one droplet to be detected, and each droplet to be detected is ejected through the liquid outlet, and the droplet to be detected includes at least one particle to be detected.

2. The particle detection device according to claim 1, characterized in that: The particle detection device also includes: An imaging recognition device, the imaging recognition device being connected to the imaging device; The imaging recognition device is used to receive the detection signal transmitted by the imaging device, and perform recognition calculation on the detection signal to obtain the physical parameters of the particle to be detected.

3. The particle detection device according to claim 1, characterized in that: The particle detection device also includes: A fluorescence wavelength selection device, wherein the fluorescence wavelength selection device is arranged between the device to be tested and the imaging device; The fluorescence wavelength selection device is used to filter light source signals of non-preset fluorescence wavelengths and external stray light, so that the imaging device can obtain a detection image of the preset fluorescence wavelength.

4. The particle detection device according to claim 3, characterized in that: The fluorescence wavelength selection device comprises: A first lens base, wherein the first lens base is rotatably arranged; A plurality of groups of fluorescent filters, each of which is arranged in the first lens base, and the first lens base is rotated to rotate different fluorescent filters to a working state to filter the fluorescent signal emitted from the optical detection area.

5. The particle detection device according to claim 1, characterized in that: The particle detection device also includes: A light source wavelength selection device, the light source wavelength selection device is arranged between the light source and the device to be tested; Wherein, the light source filtering device is used to filter the detection light beam that is not within the preset fluorescence wavelength range.

6. The particle detection device according to claim 5, characterized in that: The light source wavelength selection device comprises: A second lens base, wherein the second lens base is rotatably arranged; A plurality of groups of light source filters, each of which is arranged on the light source wavelength selection device, and the second lens base is rotated to rotate different light source filters to a working state to filter the detection light beam emitted by the light source.

7. The particle detection device according to any one of claims 4 or 6, characterized in that: The particle detection device also includes: A first control device, wherein the first control device is used to control the first lens base and / or the second lens base to control the fluorescent filter or the light source filter provided in the first lens base or the second lens base to rotate to a working state position.

8. The particle detection device according to claim 1, characterized in that: The imaging device comprises an imaging lens and an image sensor; The imaging lens is arranged between the device under test and the image sensor; The imaging lens is used to receive the fluorescence signal, and the image sensor generates the detection signal according to the fluorescence signal.

9. The particle detection device according to claim 1, characterized in that: The substrate includes a first substrate and a second substrate. The first electrode is arranged on a first side surface of the first substrate. The second side surface of the first substrate is connected to the first side surface of the second substrate to form the microparticle liquid cavity.

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