An etching device for COF packaging and testing

Abstract

An etching device for COF packaging and testing, which belongs to the technical field of packaging substrates, includes a first support plate for supporting and fixing. A support table is installed at the upper end of the first support plate. A driving and regulating component, a cleaning component, and a drying component are respectively installed on the upper wall of the support table. A second support plate is also installed on the upper wall of the support table. A connecting and fixing component is installed on the upper wall of the second support plate. The lower end of the connecting and fixing component is movably arranged in the cleaning component. The driving and regulating component is respectively connected to the cleaning component, the connecting and fixing component, and the drying component. The cleaning liquid with reduced speed gently flushes the substrate, overcoming both the defect that the rapidly moving cleaning liquid is likely to damage the substrate and the defect that the static cleaning liquid is not easy to wash away dirt. Without damaging the substrate, the cleanliness of the substrate is increased, and at the same time, it also has a drying function.

Description

Technical Field

[0001] The present invention belongs to the technical field of packaging substrates, and particularly relates to an etching device for COF packaging and testing. Background Art

[0002] Etching is a technology that removes materials through chemical reactions or physical impacts. The etching technology is widely used in the processing of weight-reducing instrument panels, nameplates, and thin workpieces that are difficult to process by traditional processing methods; through continuous improvement and the development of process equipment, it can be used for the processing of precision-etched products of electronic thin parts in the aviation, machinery, and chemical industries. Especially in the semiconductor manufacturing process, etching is an indispensable technology. In the production of COF packaging substrates, the COF packaging substrates need to undergo an etching production process, and after the etching of the packaging substrates, a series of processes such as cleaning and drying are required. However, during cleaning, if the cleaning liquid fluctuates greatly, it is easy to damage the substrate. If the cleaning liquid is stationary, it is very difficult to clean the polymers generated on the surface after etching; therefore, there is an urgent need to develop a device that can both protect the packaging substrate during cleaning after etching, clean the packaging substrate thoroughly, and also have a drying function to overcome the disadvantages in the cleaning process after etching in the prior art. Summary of the Invention

[0003] In view of the above situation, to overcome the defects of the prior art, the present invention provides an etching device for COF packaging and testing, which at least partially solves the problems raised in the above background art.

[0004] The technical solution adopted by the present invention is as follows: An etching device for COF packaging and testing includes a first support plate for support and fixation. A support table is installed at the upper end of the first support plate. A drive control component, a cleaning component, and a drying component are respectively installed on the upper wall of the support table. A second support plate is also installed on the upper wall of the support table. A connection and fixation component is installed on the upper wall of the second support plate. The lower end of the connection and fixation component is movably disposed in the cleaning component. The drive control component is respectively connected to the cleaning component, the connection and fixation component, and the drying component to provide driving forces for the cleaning component, the connection and fixation component, and the drying component.

[0005] The drive control component includes a second support seat, which is disposed on the upper wall of the support table. A first gear is movably installed at the upper end of the second support seat. The side wall of the first gear is provided with teeth and a flat area, and the teeth and the flat area are arranged alternately. A drive table is installed on the upper wall of the first gear. The side wall of the drive table is provided with slot holes for limiting. The slot holes include parallel slots and V-shaped slots, and the parallel slots and the V-shaped slots are arranged alternately. The two adjacent groups of parallel slots are respectively connected to the two ends of the V-shaped slot in a through manner, and the parallel slots are disposed above the V-shaped slots. The parallel slots are disposed above the teeth, and the V-shaped slots are disposed above the flat area.

[0006] Preferably, a first connecting plate is installed at the upper end of the second support plate, and a second connecting plate is installed on the side wall of the second support plate. The first connecting plate is arranged above the second connecting plate.

[0007] Furthermore, the connection and fixation assembly includes a limiting rod and a sleeve. The upper end of the limiting rod is arranged on the bottom wall of the first connecting plate. The lower end of the limiting rod penetrates through the second connecting plate and is arranged in the cleaning assembly. The sleeve is movably sleeved outside the limiting rod. The upper end of the sleeve is arranged above the second connecting plate. The lower end of the sleeve movably penetrates through the second connecting plate and is arranged in the cleaning assembly. A third connecting plate is installed on the sleeve. The third connecting plate is arranged below the second connecting plate. An expansion rod is installed between the third connecting plate and the second connecting plate. A first connecting rod is installed on the bottom wall of the end of the third connecting plate away from the sleeve. A driving rod is installed at the lower end of the first connecting rod. The end of the driving rod away from the first connecting rod is movably clamped in the slot hole. Balls are installed at the end and the side wall of the end of the driving rod away from the first connecting rod, which can reduce the friction between the driving rod and the slot hole.

[0008] As a preference of the present invention, a pushing plate is installed on the upper wall of the third connecting plate, and a fixing plate is installed on the bottom wall of the second connecting plate. A folding bladder is installed between the fixing plate and the pushing plate. The folding bladder is arranged between the expansion rod and the sleeve. A sealed chamber is formed among the fixing plate, the pushing plate and the folding bladder. A connecting pipe is installed on the upper wall of the fixing plate. The connecting pipe is connected to the side wall of the drying assembly. A one-way valve is arranged on the upper wall of the fixing plate, which is convenient for external gas to enter the folding bladder.

[0009] Among them, the cleaning assembly includes a first connecting shaft. The first connecting shaft is arranged on the upper wall of the support platform. A second gear is movably installed at the upper end of the first connecting shaft. The second gear meshes with the teeth on the first gear. A cleaning bucket is installed on the second gear. Multiple stirring plates for stirring the cleaning liquid and air are installed on the inner side wall of the cleaning bucket. The multiple stirring plates are arranged on the inner side wall of the cleaning bucket at equal intervals in a ring shape.

[0010] Preferably, the drying assembly includes a first support base which is arranged on the upper wall of the support table. A drying barrel is installed on the first support base. A plurality of elastic members for temporarily storing gas are arranged in the drying barrel. The plurality of elastic members are evenly arranged at equal intervals in a ring on the inner side wall of the drying barrel. A fan is installed on the inner bottom wall of the drying barrel, which is convenient for drying the cleaned substrate. An air vent cavity and a plurality of tracheas for gas circulation are arranged in the side wall of the drying barrel. The lower end of the connecting pipe penetrates through the drying barrel and is connected to the air vent cavity in a through manner. A one-way valve is arranged in the connecting pipe to control the gas in the folding bladder to enter the air vent cavity. The plurality of tracheas are evenly placed at equal intervals in a ring. One end of the trachea is connected to the air vent cavity in a through manner, and the other end of the trachea is connected to the elastic member in a through manner; the gas in the air vent cavity enters the elastic member through the trachea, and the elastic member bulges. An air vent hole for gas discharge is arranged on the elastic member. When the elastic member bulges, the air vent hole becomes larger, and the gas is discharged from the elastic member to dry the substrate in the drying barrel.

[0011] Wherein, a second connecting shaft is movably installed in the second support base, and a third connecting shaft is movably installed in the first support base. Both the third connecting shaft and the second connecting shaft are movably connected to the upper wall of the support table. The upper end of the second connecting shaft is connected to the first gear, the upper end of the third connecting shaft is connected to the fan, a first driving roller is installed on the second connecting shaft, a second driving roller is installed on the third connecting shaft, and a transmission belt is installed between the first driving roller and the second driving roller.

[0012] Preferably, an installation plate is connected to the first support plate, and a motor is placed on the upper wall of the installation plate. The output shaft end of the motor is connected to the lower end of the second connecting shaft.

[0013] Wherein, a placement plate is installed at the lower end of the sleeve. The placement plate is of a grid structure, which is convenient for the cleaning liquid to flow through. The substrate to be cleaned after etching is placed on the placement plate. A support cover is installed on the drying barrel, and a second connecting rod is installed at the center of the support cover for receiving the placement plate.

[0014] Furthermore, a limiting plate is installed at the upper end of the sleeve. The limiting plate is arranged at the upper end of the second connecting plate for limiting the movement of the sleeve.

[0015] After adopting the above structure, the beneficial effects of the present invention are as follows:

[0016] (1) The driving and regulating assembly is respectively connected to the cleaning assembly, the connecting and fixing assembly, and the drying assembly, providing driving force for the cleaning assembly, the connecting and fixing assembly, and the drying assembly, and improving the working efficiency.

[0017] (2)The cleaning liquid with reduced speed is used to gently rinse the substrate, which overcomes the defect that the rapidly moving cleaning liquid is likely to damage the substrate, while the static cleaning liquid is not easy to wash away dirt. Without damaging the substrate, the cleanliness of the substrate is increased.

[0018] (3)When the cleaned substrate is pulled out of the cleaning liquid, the stirring plate rotates driven by the cleaning bucket to stir the air and the cleaning liquid, and the air circulation performs an initial drying treatment on the cleaned substrate.

[0019] (4)The gas in the ventilation cavity enters into the elastic member through the ventilation pipe, the elastic member bulges, the ventilation holes become larger, and the gas is discharged from the elastic member to dry the substrate in the drying box from the side. Description of the Drawings

[0020] The drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation to the present invention.

[0021] Figure 1 It is a schematic structural diagram of an etching device for COF packaging and testing proposed by the present invention;

[0022] Figure 2 It is a schematic structural diagram of the connection and fixing component proposed by the present invention;

[0023] Figure 3 It is a perspective view of an etching device for COF packaging and testing proposed by the present invention;

[0024] Figure 4 It is a top view of an etching device for COF packaging and testing proposed by the present invention;

[0025] Figure 5 It is Figure 4 a partial enlarged view of the A position of

[0026] Figure 6 It is a top cross-sectional view of an etching device for COF packaging and testing proposed by the present invention.

[0027] In the attached drawings: 1. First support plate, 2. Support platform, 3. Drive control component, 4. Cleaning component, 5. Drying component, 6. Second support plate, 7. Connection and fixation component, 8. Second support base, 9. First gear, 10. Teeth, 11. Flattening area, 12. Drive platform, 13. Slot hole, 14. Parallel slot, 15. V-shaped slot, 16. First connecting plate, 17. Second connecting plate, 18. Limit rod, 19. Sleeve, 20. Third connecting plate, 21. Telescopic rod, 22. First connecting rod, 23. Drive rod, 24. Pushing plate, 25. Fixed plate, 26. Folding bladder, 27. Connecting pipe, 28. First connecting shaft, 29. Second gear, 30. Cleaning barrel, 31. Stirring plate, 32. First support base, 33. Drying barrel, 34. Elastic member, 35. Fan, 36. Ventilation cavity, 37. Ventilation pipe, 38. Second connecting shaft, 39. Third connecting shaft, 40. First transmission roller, 41. Second transmission roller, 42. Transmission belt, 43. Mounting plate, 44. Motor, 45. Placing plate, 46. Substrate, 47. Support cover, 48. Second connecting rod, 49. Limit plate. Detailed implementation mode

[0028] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the attached drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments; based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0029] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or elements inherent to such process, method, article or device.

[0030] Such as Figures 1-6As shown in the figure, an etching device for COF packaging and testing includes a first support plate 1 for support and fixation. A support platform 2 is installed at the upper end of the first support plate 1. A drive control component 3, a cleaning component 4, and a drying component 5 are respectively installed on the upper wall of the support platform 2. A second support plate 6 is also installed on the upper wall of the support platform 2. A connection and fixation component 7 is installed on the upper wall of the second support plate 6. The lower end of the connection and fixation component 7 is movably arranged in the cleaning component 4. The drive control component 3 is respectively connected to the cleaning component 4, the connection and fixation component 7, and the drying component 5 to provide driving force for the cleaning component 4, the connection and fixation component 7, and the drying component 5.

[0031] The drive control component 3 includes a second support seat 8. The second support seat 8 is arranged on the upper wall of the support platform 2. A first gear 9 is movably installed at the upper end of the second support seat 8. Tooth regions 10 and flat regions 11 are arranged on the side wall of the first gear 9. The tooth regions 10 and the flat regions 11 are arranged alternately. A drive platform 12 is installed on the upper wall of the first gear 9. A slot hole 13 for limiting is arranged on the side wall of the drive platform 12. The slot hole 13 includes a parallel slot 14 and a V-shaped slot 15. The parallel slot 14 and the V-shaped slot 15 are arranged alternately. The two adjacent groups of parallel slots 14 are respectively connected to both ends of the V-shaped slot 15 in a penetrating manner, and the parallel slot 14 is arranged at the upper end of the V-shaped slot 15. The parallel slot 14 is arranged at the upper end of the tooth region 10. The V-shaped slot 15 is arranged at the upper end of the flat region 11.

[0032] A first connecting plate 16 is installed at the upper end of the second support plate 6. A second connecting plate 17 is installed on the side wall of the second support plate 6. The first connecting plate 16 is arranged at the upper end of the second connecting plate 17.

[0033] The connection and fixation component 7 includes a limiting rod 18 and a sleeve 19. The upper end of the limiting rod 18 is arranged on the bottom wall of the first connecting plate 16. The lower end of the limiting rod 18 penetrates through the second connecting plate 17 and is arranged in the cleaning component 4. The sleeve 19 is movably sleeved outside the limiting rod 18. The upper end of the sleeve 19 is arranged at the upper end of the second connecting plate 17. The lower end of the sleeve 19 movably penetrates through the second connecting plate 17 and is arranged in the cleaning component 4. A third connecting plate 20 is installed on the sleeve 19. The third connecting plate 20 is arranged at the lower end of the second connecting plate 17. An expansion rod 21 is installed between the third connecting plate 20 and the second connecting plate 17. A first connecting rod 22 is installed on the bottom wall of the end of the third connecting plate 20 away from the sleeve 19. A drive rod 23 is installed at the lower end of the first connecting rod 22. The end of the drive rod 23 away from the first connecting rod 22 is movably clamped in the slot hole 13. Ball bearings are installed at both the end and the side wall of the end of the drive rod 23 away from the first connecting rod 22, which can reduce the friction between the drive rod 23 and the slot hole 13.

[0034] It should be noted that when the first gear 9 rotates, it can drive the driving platform 12 to rotate, and the driving platform 12 can drive the slot hole 13 to rotate. When the driving rod 23 is stuck in the V-shaped groove 15, since the movement of the driving rod 23 is restricted by the first connecting rod 22, the movement of the first connecting rod 22 is restricted by the third connecting plate 20, and the movement of the third connecting plate 20 is restricted by the sleeve 19, the driving rod 23 can only drive the sleeve 19 to move downward along the limiting rod 18 under the action of the V-shaped groove 15 first, and then move upward. When the driving rod 23 is clamped in the parallel groove 14, with the rotation of the driving platform 12, the position of the driving rod 23 is relatively fixed.

[0035] A pushing plate 24 is installed on the upper wall of the third connecting plate 20. A fixing plate 25 is installed on the bottom wall of the second connecting plate 17. A folding bladder 26 is installed between the fixing plate 25 and the pushing plate 24. The folding bladder 26 is arranged between the telescopic rod 21 and the sleeve 19. A sealed chamber is formed among the fixing plate 25, the pushing plate 24 and the folding bladder 26. A connecting pipe 27 is installed on the upper wall of the fixing plate 25. The connecting pipe 27 is connected to the side wall of the drying assembly 5. A one-way valve is arranged on the upper wall of the fixing plate 25 to facilitate the entry of external gas into the folding bladder 26.

[0036] It should be noted that when the driving rod 23 rises along the V-shaped groove 15, it drives the first connecting rod 22 to rise. The first connecting rod 22 drives the third connecting plate 20 to rise. The third connecting plate 20 drives the pushing plate 24 and the sleeve 19 to rise. The pushing plate 24 squeezes the folding bladder 26, and the folding bladder 26 is compressed, and the gas enters the connecting pipe 27. When the driving rod 23 descends along the V-shaped groove 15, it drives the first connecting rod 22 to descend. The first connecting rod 22 drives the third connecting plate 20 to descend. The third connecting plate 20 drives the pushing plate 24 and the sleeve 19 to descend. The pushing plate 24 stretches the folding bladder 26, and the folding bladder 26 is stretched, and external gas enters the folding bladder 26.

[0037] The cleaning assembly 4 includes a first connecting shaft 28. The first connecting shaft 28 is arranged on the upper wall of the support platform 2. A second gear 29 is movably installed at the upper end of the first connecting shaft 28. The second gear 29 meshes with the teeth 10 on the first gear 9. A cleaning bucket 30 is installed on the second gear 29. A plurality of stirring plates 31 for stirring the cleaning liquid and air are installed on the inner side wall of the cleaning bucket 30. The plurality of stirring plates 31 are arranged on the inner side wall of the cleaning bucket 30 at equal intervals in a ring shape.

[0038] It should be noted that when the first gear 9 rotates, it drives the teeth 10 and the flat area 11 thereon to rotate. When the tooth 10 rotates to the position of the second gear 29, the tooth 10 on the first gear 9 meshes with the second gear 29, driving the second gear 29 to rotate. The second gear 29 drives the cleaning bucket 30 to rotate, and the cleaning bucket 30 and the stirring plate 31 drive the cleaning liquid and air inside the cleaning bucket 30 to rotate. At this time, the driving rod 23 is arranged in the parallel groove 14, and the sleeve 19 drives the substrate 46 to be cleaned and is arranged at the upper end of the cleaning liquid. When the flat area 11 on the first gear 9 rotates to the position of the second gear 29, the second gear 29 stops rotating, and the cleaning liquid in the cleaning bucket 30 is still in a rotating state. At this time, the driving rod 23 is arranged in the V-shaped groove 15. Under the action of the V-shaped groove 15, the driving rod 23 drives the sleeve 19 to move downward, and the sleeve 19 drives the substrate 46 to move downward into the cleaning liquid. The cleaning liquid with reduced speed gently flushes the substrate 46, overcoming the defect that the fast-moving cleaning liquid is likely to damage the substrate 46, and the static cleaning liquid is not easy to wash away dirt. Without damaging the substrate 46, the cleanliness of the substrate 46 is increased. When the tooth 10 rotates to the position of the second gear 29 again, the tooth 10 on the first gear 9 meshes with the second gear 29, starting a new round of cleaning movement. When the cleaned substrate 46 is pulled out of the cleaning liquid, the stirring plate 31 rotates under the drive of the cleaning bucket 30, stirring the air and the cleaning liquid. The air circulation performs an initial drying treatment on the cleaned substrate 46. Then, after taking out the placement plate 45 and the substrate 46 in the cleaning bucket 30, they are placed in the drying assembly 5.

[0039] The drying assembly 5 includes a first support seat 32, the first support seat 32 is arranged on the upper wall of the support table 2, a drying barrel 33 is installed on the first support seat 32, a plurality of elastic members 34 for temporarily storing gas are arranged in the drying barrel 33, and the plurality of elastic members 34 are arranged on the inner side wall of the drying barrel 33 at equal intervals in a ring shape. A fan 35 is installed on the inner bottom wall of the drying barrel 33, which is convenient for drying the cleaned substrate 46. An air vent cavity 36 and a plurality of air pipes 37 for gas circulation are arranged in the side wall of the drying barrel 33. The lower end of the connecting pipe 27 penetrates through the drying barrel 33 and is connected to the air vent cavity 36 in a through manner. A one-way valve is arranged in the connecting pipe 27 to control the gas in the folding bladder 26 to enter the air vent cavity 36. The plurality of air pipes 37 are arranged at equal intervals in a ring shape. One end of the air pipe 37 is connected to the air vent cavity 36 in a through manner, and the other end of the air pipe 37 is connected to the elastic member 34 in a through manner;

[0040] It should be noted that the gas in the air vent cavity 36 enters the elastic member 34 through the air pipe 37, and the elastic member 34 bulges. The elastic member 34 is provided with air vents for gas discharge. When the elastic member 34 bulges, the air vents become larger, and the gas is discharged from the elastic member 34 to dry the substrate 46 in the drying barrel 33.

[0041] A second connecting shaft 38 is movably installed in the second support base 8, and a third connecting shaft 39 is movably installed in the first support base 32. Both the third connecting shaft 39 and the second connecting shaft 38 are movably connected to the upper wall of the support table 2. The upper end of the second connecting shaft 38 is connected to the first gear 9, the upper end of the third connecting shaft 39 is connected to the fan 35, a first driving roller 40 is installed on the second connecting shaft 38, a second driving roller 41 is installed on the third connecting shaft 39, and a transmission belt 42 is installed between the first driving roller 40 and the second driving roller 41.

[0042] An installation plate 43 is connected to the first support plate 1, and a motor 44 is placed on the upper wall of the installation plate 43. The output shaft end of the motor 44 is connected to the lower end of the second connecting shaft 38;

[0043] It should be noted that when the motor 44 operates, it drives the second connecting shaft 38 to rotate. The second connecting shaft 38 drives the first driving roller 40 and the first gear 9 to rotate. The first driving roller 40 drives the second driving roller 41 to rotate through the transmission belt 42. The second driving roller 41 drives the third connecting shaft 39 to rotate, and the third connecting shaft 39 drives the fan 35 to rotate.

[0044] A placement plate 45 is installed at the lower end of the sleeve 19. The placement plate 45 has a grid structure to facilitate the flow of the cleaning liquid. A substrate 46 that needs to be cleaned after etching is placed on the placement plate 45. A support cover 47 is installed on the drying barrel 33, and a second connecting rod 48 is installed at the center of the support cover 47 for receiving the placement plate 45.

[0045] A limiting plate 49 is installed at the upper end of the sleeve 19. The limiting plate 49 is located above the upper end of the second connecting plate 17 and is used to limit the movement of the sleeve 19.

[0046] The specific use is as follows: Initially, the driving rod 23 is located in the parallel groove 14. After placing the substrate 46 that needs to be cleaned after etching on the placement plate 45, the placement plate 45 with the substrate 46 is placed at the lower end of the sleeve 19. After removing the placement plate 45 with the substrate 46 after cleaning from the lower end of the sleeve 19, it is placed at the lower end of the second connecting rod 48. The support cover 47 is covered on the upper wall of the drying barrel 33, and the placement plate 45 with the substrate 46 after cleaning is located inside the drying barrel 33;

[0047] The motor 44 operates to drive the second connecting shaft 38 to rotate. The second connecting shaft 38 drives the first driving roller 40 and the first gear 9 to rotate. The first driving roller 40 drives the second driving roller 41 to rotate through the transmission belt 42. The second driving roller 41 drives the third connecting shaft 39 to rotate, and the third connecting shaft 39 drives the fan 35 to rotate to clean the substrate 46 inside the drying barrel 33 from the bottom;

[0048] When the first gear 9 rotates, it can drive the driving platform 12 to rotate, and the driving platform 12 can drive the slot hole 13 to rotate. When the driving rod 23 is stuck in the V-shaped groove 15, since the movement of the driving rod 23 is restricted by the first connecting rod 22, the movement of the first connecting rod 22 is restricted by the third connecting plate 20, and the movement of the third connecting plate 20 is restricted by the sleeve 19, so that the driving rod 23 can only drive the sleeve 19 to move downward along the limiting rod 18 under the action of the V-shaped groove 15 first, and then move upward. When the driving rod 23 is clamped in the parallel groove 14, with the rotation of the driving platform 12, the position of the driving rod 23 is relatively fixed;

[0049] At the same time, when the first gear 9 rotates, it drives the teeth 10 and the flat area 11 on it to rotate. When the teeth 10 rotate to the position of the second gear 29, the teeth 10 on the first gear 9 are meshed and connected with the second gear 29, driving the second gear 29 to rotate. The second gear 29 drives the cleaning bucket 30 to rotate, and the cleaning bucket 30 and the stirring plate 31 drive the cleaning liquid and air inside the cleaning bucket 30 to rotate. At this time, the driving rod 23 is arranged in the parallel groove 14, and the sleeve 19 drives the substrate 46 to be cleaned to be arranged at the upper end of the cleaning liquid. When the flat area 11 on the first gear 9 rotates to the position of the second gear 29, the second gear 29 stops rotating, and the cleaning liquid in the cleaning bucket 30 is still in a rotating state. At this time, the driving rod 23 is arranged in the V-shaped groove 15. Under the action of the V-shaped groove 15, the driving rod 23 drives the sleeve 19 to move downward, and the sleeve 19 drives the substrate 46 to move downward into the cleaning liquid. The cleaning liquid with reduced speed gently flushes the substrate 46, which not only overcomes the defect that the fast-moving cleaning liquid is easy to damage the substrate 46, but also the static cleaning liquid is not easy to wash away dirt. Without damaging the substrate 46, the cleanliness of the substrate 46 is increased. When the teeth 10 rotate to the position of the second gear 29 again, the teeth 10 on the first gear 9 are meshed and connected with the second gear 29, starting a new round of cleaning movement. When the cleaned substrate 46 is pulled out of the cleaning liquid, the stirring plate 31 rotates under the drive of the cleaning bucket 30, stirring the air and the cleaning liquid. The air circulation performs an initial drying treatment on the cleaned substrate 46. Then, after taking out the placement plate 45 and the substrate 46 in the cleaning bucket 30, they are placed in the drying assembly 5;

[0050] When the driving rod 23 rises along the V-shaped groove 15, it drives the first connecting rod 22 to rise. The first connecting rod 22 drives the third connecting plate 20 to rise. The third connecting plate 20 drives the pushing plate 24 and the sleeve 19 to rise. The pushing plate 24 squeezes the folding bladder 26, and the folding bladder 26 is compressed. The gas enters the ventilation cavity 36 through the connecting pipe 27. The gas in the ventilation cavity 36 enters the elastic member 34 through the ventilation pipe 37. After the elastic member 34 bulges, the ventilation holes become larger, and the gas is discharged from the elastic member 34 to perform a drying treatment on the substrate 46 in the drying bucket 33 from the side;

[0051] When the driving rod 23 descends along the V-shaped groove 15, it drives the first connecting rod 22 to descend. The first connecting rod 22 drives the third connecting plate 20 to descend. The third connecting plate 20 drives the pushing plate 24 and the sleeve 19 to descend. The pushing plate 24 stretches the folding bladder 26. The folding bladder 26 is stretched, and external gas enters the folding bladder 26.

[0052] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents. Generally speaking, if those of ordinary skill in the art are inspired by it and, without departing from the purpose of the present invention, design similar structural methods and embodiments to this technical solution without creative efforts, they should all fall within the protection scope of the present invention.

Claims

1. An etching device for COF sealing and testing, comprising a support plate 1 for supporting and fixing, wherein a support platform is installed on the upper end of the support plate 1, characterized in that: The upper wall of the support platform is respectively installed with a driving and regulating component, a cleaning component and a drying component, and the upper wall of the support platform is also installed with a supporting plate 2, and a connecting and fixing component is installed on the upper wall of the supporting plate 2, and the lower end of the connecting and fixing component is movably arranged in the cleaning component, and the driving and regulating component is respectively connected with the cleaning component, the connecting and fixing component and the drying component; The driving and regulating component comprises a support seat 2, wherein the support seat 2 is arranged on the wall of the support platform, a gear 1 is movably mounted on the upper end of the support seat 2, a side wall of the gear is provided with gear teeth and a flattened area, the gear teeth and the flattened area are staggered, a driving platform is mounted on the upper wall of the gear 1, a side wall of the driving platform is provided with slots for limiting, the slots comprise parallel slots and V-shaped slots, the parallel slots and the V-shaped slots are staggered, two adjacent groups of the parallel slots are respectively connected with the two ends of the V-shaped slots, and the parallel slots are arranged at the upper end of the V-shaped slots, the parallel slots are arranged at the upper end of the gear teeth, and the V-shaped slots are arranged at the upper end of the flattened area; The cleaning assembly includes a connecting shaft 1, which is arranged on the wall of the support platform, and a gear 2 is movably installed on the upper end of the connecting shaft 1, and the gear 2 is meshed with the gear teeth on the gear 1. A cleaning bucket is installed on the gear 2, and a plurality of stirring plates for stirring the cleaning liquid and air are installed on the inner wall of the cleaning bucket, and the plurality of stirring plates are evenly arranged on the inner wall of the cleaning bucket in a ring shape and at equal intervals; The upper end of the support plate 2 is installed with a connecting plate 1, the side wall of the support plate 2 is installed with a connecting plate 2, and the connecting plate 1 is arranged at the upper end of the connecting plate 2; The connecting and fixing assembly includes a limiting rod and a sleeve, the upper end of the limiting rod is arranged on the bottom wall of the connecting plate one, the sleeve is movably sleeved on the outside of the limiting rod, a connecting plate three is installed on the sleeve, a telescopic rod is installed between the connecting plate three and the connecting plate two, a connecting rod one is installed on the bottom wall of one end of the connecting plate three away from the sleeve, a driving rod is installed on the lower end of the connecting rod one, and one end of the driving rod away from the connecting rod one is movably clamped in the slot.

2. The COF sealing and testing etching device according to claim 1, characterized in that: The lower end of the limit rod passes through the connecting plate 2 and is arranged in the cleaning component. The upper end of the sleeve is arranged at the upper end of the connecting plate 2. The lower end of the sleeve movably passes through the connecting plate 2 and is arranged in the cleaning component. The connecting plate 3 is arranged at the lower end of the connecting plate 2. The end and side wall of the driving rod away from the connecting rod 1 are both installed with balls.

3. The COF sealing and testing etching device according to claim 2, characterized in that: A pushing plate is installed on the upper wall of the connecting plate three, a fixed plate is installed on the bottom wall of the connecting plate two, a folding bag is installed between the fixed plate and the pushing plate, the folding bag is arranged between the telescopic rod and the sleeve, and a sealed chamber is formed between the fixed plate, the pushing plate and the folding bag, a connecting pipe is installed on the upper wall of the fixing plate, the connecting pipe is connected to the side wall of the drying component, and a one-way valve is provided on the upper wall of the fixing plate.

4. The COF sealing and testing etching device according to claim 3, characterized in that: The drying component includes a support seat 1, which is arranged on the upper wall of the support platform, and a drying barrel is installed on the support seat 1. A plurality of groups of elastic members for temporarily storing gas are arranged in the drying barrel, and the plurality of groups of elastic members are evenly arranged on the inner wall of the drying barrel in a ring shape with equal intervals. A fan is installed on the inner bottom wall of the drying barrel, and a ventilation cavity and a plurality of groups of ventilation pipes for gas circulation are arranged in the side wall of the drying barrel. The lower end of the connecting pipe passes through the drying barrel and is connected with the ventilation cavity. A one-way valve is arranged in the connecting pipe. The plurality of groups of ventilation pipes are evenly arranged in a ring shape with equal intervals. One end of the ventilation pipe is connected with the ventilation cavity, and the other end of the ventilation pipe is connected with the elastic member. The elastic member is provided with a ventilation hole for gas discharge.

5. The COF sealing and testing etching device according to claim 4, characterized in that: A connecting shaft 2 is movably installed in the support seat 2, a connecting shaft 3 is movably installed in the support seat 1, the connecting shaft 3 and the connecting shaft 2 are both movably connected to the upper wall of the support platform, the upper end of the connecting shaft 2 is connected to the gear 1, the upper end of the connecting shaft 3 is connected to the fan, a transmission roller 1 is installed on the connecting shaft 2, a transmission roller 2 is installed on the connecting shaft 3, and a transmission belt is installed between the transmission roller 1 and the transmission roller 2.

6. The COF sealing and testing etching device according to claim 5, characterized in that: The support plate 1 is connected with a mounting plate, the upper wall of the mounting plate is provided with a motor, and the output shaft end of the motor is connected with the lower end of the connecting shaft 2.

7. The COF sealing and testing etching device according to claim 6, characterized in that: A placement plate is installed at the lower end of the sleeve, and the placement plate is a grid structure. The substrate that needs to be cleaned after etching is placed on the placement plate. A support cover is installed on the drying barrel, and a connecting rod 2 is installed at the center of the support cover.

8. The COF sealing and testing etching device according to claim 7, characterized in that: A limit plate is installed on the upper end of the sleeve, and the limit plate is arranged on the second upper end of the connecting plate.

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