A three-dimensional angle-resolved spectral imaging device and method

Abstract

The present application relates to the technical field of micro angle-resolved spectroscopy measurement, and more particularly to a three-dimensional angle-resolved spectral imaging device and method, comprising an excitation light module, a microscopic imaging module and a collection module; the excitation light module comprises a laser light source, a first convex lens, a pinhole filter, a second convex lens, a first mirror and a third convex lens; the microscopic imaging module comprises a second half-transmission half-reflection mirror, a 4f system, an objective lens and a sample stage; the focal point of the light beam focused by the third convex lens and then reflected by the second half-transmission half-reflection mirror is located at the rear focal plane of the 4f system, the front focal plane of the 4f system coincides with the rear focal plane of the objective lens, and the sample stage is located at the front focal plane of the objective lens; the collection module comprises a slit, a second mirror, an optical flat structure, an aspheric mirror and a photoelectric array detector; the rear focal point of the 4f system is located at the slit, and the first mirror, the slit, the optical flat structure, the aspheric mirror and the photoelectric array detector can rotate, so that the three-dimensional angle-resolved spectrum can be quickly reconstructed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of microscopic angle-resolved spectroscopy, and more particularly to a three-dimensional angle-resolved spectral imaging device and method. BACKGROUND

[0002] Angle-resolved spectroscopy is an important technology for studying the interaction of light and matter, including macroscopic angle resolution (mechanical rotation angle method) and microscopic micro-angle resolution (Fourier plane imaging method), which has wide application in the fields of biomedical science, material science and micro-nano photonics, and specific scenarios include quality monitoring of semiconductor chip surfaces, exploring unknown properties of artificially synthesized new materials, and non-invasive and efficient medical imaging technology.

[0003] The mechanical rotation angle method usually uses a stepping motor to drive a rotating arm, a sample stage, a mirror, or a lens to move in a direction perpendicular to the optical axis of the light path, thereby changing the incidence angle, receiving angle and azimuth angle of the light, and the variable-angle spectral information of the sample scattered light is collected by a spectrometer. However, this method currently has some obstacles in terms of measurement speed and system stability, and the measurement speed is limited by the response time and movement speed of mechanical components, and the complete acquisition of the spectrum takes a long time, while the wear and looseness of mechanical moving parts can affect the accuracy and stability of the angle. Unlike the mechanical rotation angle method, the Fourier plane imaging method acquires the angle range of the spectrum determined by the numerical aperture of the objective lens, does not need to be scanned, has faster measurement speed and high momentum resolution, but needs to be used with a traditional dispersive spectrometer, the overall device occupies a large space, and the measurement speed depends on the performance of the dispersive spectrometer.

[0004] The prior art discloses a microscopic angle-resolved spectroscopy measurement system based on a reflecting mirror to realize variable-angle excitation, which includes an excitation light path, an angle-resolved collection light path and a micro-imaging module. The excitation light path includes a laser light source, a first convex lens, a pinhole, a second convex lens, a reflecting mirror, a third convex lens, an objective lens and a three-axis sample displacement stage. The angle-resolved collection light path includes a three-axis sample displacement stage, an objective lens, a third convex lens, a first half-transmission half-reflection mirror, a fourth convex lens, a spectrometer slit, an EMCCD and a spectrometer. The micro-imaging module includes a second half-transmission half-reflection mirror, a third half-transmission half-reflection mirror, an objective lens, a three-axis sample displacement stage, an imaging CCD and a white light source. In this scheme, imaging is realized by an imaging CCD, wavelength resolution is realized by a spectrometer, and angle resolution is realized by an EMCCD. The overall device occupies a large space, and the measurement speed depends on the performance of the spectrometer. SUMMARY

[0005] The present application aims to overcome the shortcomings of the prior art and provide a three-dimensional angle-resolved spectral imaging device and method, which can quickly reconstruct three-dimensional angle-resolved spectra through a rotatable first reflecting mirror, an optical flat structure and a slit.

[0006] To solve the above technical problems, the technical scheme adopted by the present application is:

[0007] The present application provides a three-dimensional angle resolution spectral imaging device, which comprises an excitation light module, a microscopic imaging module and a collection module.

[0008] The excitation light module comprises a laser light source, a first convex lens, a pinhole filter, a second convex lens, a first mirror and a third convex lens arranged in sequence; the pinhole filter is located at the focal point position of the first convex lens and the focal point position of the second convex lens; the first mirror is rotatable.

[0009] The microscopic imaging module comprises a second half-transmission half-reflection mirror, a 4f system, an objective lens and a sample stage arranged in sequence; the focal point of the light beam focused by the third convex lens and then reflected by the second half-transmission half-reflection mirror is located at the rear focal plane of the 4f system, the front focal plane of the 4f system coincides with the rear focal plane of the objective lens, and the sample stage is located at the front focal plane of the objective lens.

[0010] The collection module comprises a slit, a second mirror, an optical flat structure, an aspheric mirror and a photoelectric array detector arranged in sequence; the rear focal point of the 4f system is located at the slit, the slit is rotatable, and the optical flat structure, the aspheric mirror and the photoelectric array detector are rotatable.

[0011] The three-dimensional angle-resolved spectral imaging device of the present application uses the excitation light emitted by the laser light source to converge on the pinhole filter through the first convex lens, filters out high-frequency stray light, and then passes through the second convex lens to obtain a parallel Gaussian light beam, which is reflected by the first mirror to the third convex lens, focused by the third convex lens, and then reflected by the second half-transmission half-reflection mirror to the rear focal plane of the 4f system, and the light beam is focused on the rear focal plane of the objective lens through the 4f system, and the objective lens converts the laser light into parallel light and acts on the sample, while collecting the signal light with angle information of the sample, and the 4f system transfers the momentum space information of the rear focal plane of the objective lens to the slit, and the signal light passing through the slit is reflected into the optical flat structure for filtering through the second mirror, and then the aspheric mirror and the photoelectric array detector are used for spectral imaging; in the embodiment, the incident angle of the excitation light is changed by rotating the first mirror, so that the laser beam is focused at different positions of the rear focal plane of the objective lens, and the sample is excited by the parallel light at multiple angles; the incident angle of the signal light and the optical flat structure is changed by rotating the optical flat structure, so that the transmission wavelength of the optical flat structure is also changed; and the aspheric mirror and the photoelectric array detector rotate at the same angle as the optical flat structure, and the signal light resonantly transmitted by the flat structure is focused at different transverse positions of the photoelectric array detector, and the angular spectrum and spectral measurement of the signal light parallel to the slit direction are realized based on the direction projection and intensity information of the signal light on the photoelectric array detector. Due to the effect of the slit, the signal light parallel to the slit direction in the momentum space is projected on different longitudinal positions of the photoelectric array detector after being focused by the aspheric mirror, and the angularly resolved spectral information in different directions can be collected by controlling the rotation of the slit, and the three-dimensional angular spectrum and spectral measurement of the signal light are further completed.

[0012] Further, the optical flat structure, the aspheric mirror and the photoelectric array detector are integrally arranged in a cage structure.

[0013] Further, the excitation light module further comprises a first filter and a first polarizer, the first filter is located between the second convex lens and the first polarizer, and the first polarizer is located between the first filter and the first mirror.

[0014] Further, it further comprises an illumination module, the illumination module comprises a white light source and a first half-transmission half-reflection mirror arranged in sequence; the first half-transmission half-reflection mirror is located between the third convex lens and the second half-transmission half-reflection mirror; the slit can be removed from between the second half-transmission half-reflection mirror and the second mirror, and the optical flat structure can be removed from between the second mirror and the aspheric mirror.

[0015] Further, the collection module further comprises a second filter and a second polarizer, the second filter is located between the second mirror and the second polarizer, and the second polarizer is located between the second filter and the optical flat structure; the second filter and the second polarizer can be removed from between the second mirror and the aspherical mirror.

[0016] Further, the optical flat structure is a single-wavelength optical filter.

[0017] Further, the inclination angles of the first half-transmission half-reflection mirror and the second half-transmission half-reflection mirror are consistent.

[0018] The application further provides a three-dimensional angle-resolved spectral imaging method applied to the three-dimensional angle-resolved spectral imaging device.

[0019] The laser light source emits parallel excitation light, the excitation light is converged on the pinhole filter through the first convex lens, the high-frequency stray light is filtered out through the pinhole filter, and then the excitation light is emitted as a parallel Gaussian light beam through the second convex lens;

[0020] The parallel Gaussian light beam is reflected by the first mirror, focused by the third convex lens, reflected by the second half-transmission half-reflection mirror, converged on the back focal plane of the objective lens through the 4f system, and then converted into parallel light by the objective lens to act on the sample on the sample stage;

[0021] The signal light with angle information reflected from the sample is converged on the slit through the objective lens, the 4f system and the second half-transmission half-reflection mirror;

[0022] The signal light passing through the slit is reflected by the second mirror into the optical flat structure for filtering, and then imaged on the photonic array detector through the aspherical mirror.

[0023] Wherein, the first mirror can be rotated to change the incident angle of the Gaussian light beam, so that the laser is focused on different positions of the back focal plane of the objective lens, and the angle-selective excitation of the sample by the parallel light at multiple angles is realized; the optical flat structure, the aspherical mirror and the photonic array detector can be rotated to collect the angle-resolved spectral information parallel to the direction of the slit, and then the slit is rotated to collect the angle-resolved spectral information in different directions to reconstruct the three-dimensional angle-resolved spectrum.

[0024] The three-dimensional angle-resolved spectral imaging method of the application changes the incident angle of the excitation light by rotating the first mirror, focuses the laser beam at different positions of the back focal plane of the objective lens, and realizes angle-selective excitation of the sample by the parallel light at multiple angles; the incident angle of the signal light and the optical flat structure changes by rotating the optical flat structure, so that the transmission wavelength of the optical flat structure also changes; the aspherical mirror and the photoelectric array detector rotate the same angle as the optical flat structure, and the signal light resonantly transmitted by the flat structure is focused at different lateral positions of the photoelectric array detector, and the angular spectrum and spectral measurement of the signal light parallel to the slit direction are realized based on the direction projection and intensity information of the signal light on the photoelectric array detector; due to the effect of the slit, the signal light parallel to the slit direction in the momentum space is projected at different longitudinal positions of the photoelectric array detector after being focused by the aspherical mirror, and the angularly resolved spectral information in different directions can be collected by controlling the rotation of the slit, and the three-dimensional angular spectrum and spectral measurement of the signal light are further completed.

[0025] Preferably, the optical flat structure, aspherical mirror and photoelectric array detector are integrally arranged in a cage structure, so that the optical flat structure, aspherical mirror and photoelectric array detector can rotate the same angle when rotating.

[0026] Preferably, it also includes an image acquisition mode:

[0027] The slit is removed from between the second half-mirror and the second mirror, and the optical flat structure is removed from between the second mirror and the aspherical mirror;

[0028] The white light source is turned on, and the white light source emits parallel light, which is reflected after passing through the first half-mirror, the second half-mirror and the 4f system, and the objective lens focuses the parallel light on the sample on the sample stage and receives the reflected signal of the sample;

[0029] The reflected signal is reflected by the 4f system, transmitted through the second half-mirror and incident on the second mirror, and the parallel light emitted by the second mirror is focused on the photoelectric array detector by the aspherical mirror for near-field imaging.

[0030] Compared with the prior art, the three-dimensional angle-resolved spectral imaging device and method of the application has the following beneficial effects:

[0031] The first rotatable mirror, the optical flat structure, the aspherical mirror, the photoelectric array detector and the slit can quickly reconstruct the three-dimensional angle-resolved spectrum;

[0032] By selectively removing the optical flat structure and the slit, microscopic imaging or spectral projection can be performed on the photoelectric array detector for spectral measurement, and the device can be miniaturized. BRIEF DESCRIPTION OF DRAWINGS

[0033] Figure 1A structural schematic diagram of a three-dimensional angle-resolved spectral imaging device in an embodiment of the present application;

[0034] Figure 2 A schematic diagram of the three-dimensional angle-resolved spectral imaging device in an embodiment of the present application in a spectral acquisition mode;

[0035] Figure 3 A schematic diagram of the three-dimensional angle-resolved spectral imaging device in an embodiment of the present application in an image acquisition mode.

[0036] In the drawings: 1-laser light source; 2-first convex lens; 3-pinhole filter; 4-second convex lens; 5-first filter; 6-first polarizer; 7-first mirror; 8-third convex lens; 9-white light source; 10-first half-transmission half-reflection mirror; 11-second half-transmission half-reflection mirror; 12-fourth convex lens; 13-fifth convex lens; 14-objective lens; 15-sample stage; 16-slit; 17-second mirror; 18-second filter; 19-second polarizer; 20-optical flat structure; 21-aspheric mirror; 22-photoelectric array detector. DETAILED DESCRIPTION

[0037] The present application will be further described below in conjunction with specific embodiments. The drawings are merely used for illustrative description, and represent only schematic diagrams, not physical diagrams, and should not be understood as limiting the present patent; in order to better illustrate the embodiments of the present application, some components in the drawings may be omitted, enlarged or reduced, and do not represent the actual size of the product; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the drawings may be omitted.

[0038] The same or similar reference numerals in the drawings of the embodiments of the present application correspond to the same or similar components; in the description of the present application, it should be understood that the orientations or positional relationships indicated by terms such as "upper", "lower", "left", "right" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore the terms describing the positional relationships in the drawings should not be understood as limiting the present patent, and the above terms should be understood according to the specific meanings by those skilled in the art according to the specific circumstances.

[0039] Embodiment one

[0040] A three-dimensional angle-resolved spectral imaging device, as shown in Figure 1 , Figure 2 , includes an excitation light module, a microscopic imaging module and an acquisition module;

[0041] The excitation light module comprises a laser light source 1, a first convex lens 2, a pinhole filter 3, a second convex lens 4, a first mirror 7 and a third convex lens 8 arranged in sequence; the pinhole filter 3 is located at the focal point position of the first convex lens 2 and the focal point position of the second convex lens 4; the first mirror 7 is rotatable;

[0042] The microscopic imaging module comprises a second half-transmission half-reflection mirror 11, a 4f system, an objective lens 14 and a sample stage 15 arranged in sequence; the focal point of the light beam focused by the third convex lens 8 and then reflected by the second half-transmission half-reflection mirror 11 is located at the rear focal plane of the 4f system, the front focal plane of the 4f system coincides with the rear focal plane of the objective lens 14, and the sample stage 15 is located at the front focal plane of the objective lens 14;

[0043] The acquisition module comprises a slit 16, a second mirror 17, an optical flat structure 20, an aspheric mirror 21 and a photoelectric array detector 22 arranged in sequence; the rear focal point of the 4f system is located at the slit 16, the slit 16 is rotatable, and the optical flat structure 20, the aspheric mirror 21 and the photoelectric array detector 22 are rotatable.

[0044] The three-dimensional angle-resolved spectral imaging device uses the excitation light emitted by the laser light source 1 to converge on the pinhole filter 3 through the first convex lens 2, filters out high-frequency stray light, and then obtains a parallel Gaussian light beam through the second convex lens 4. The parallel light is reflected by the first mirror 7 to the third convex lens 8, focused by the third convex lens 8, and then the focal point of the light beam reflected by the second half-transmission half-reflection mirror 11 is located on the rear focal plane of the 4f system. The light beam is focused on the rear focal plane of the objective lens 14 through the 4f system, the objective lens 14 converts the laser light into parallel light and acts on the sample, and at the same time collects the signal light with angle information of the sample. The 4f system transfers the momentum space information on the rear focal plane of the objective lens 14 to the slit 16. The signal light passing through the slit 16 is reflected into the optical flat structure 20 for filtering through the second mirror 17, and then the spectral imaging is performed through the aspheric mirror 21 and the photoelectric array detector 22. In this embodiment, the incident angle of the excitation light is changed by rotating the first mirror 7, so that the laser light beam is focused on different positions of the rear focal plane of the objective lens 14, and the sample is excited by the parallel light with multiple angles and angle selectivity. By rotating the optical flat structure 20, the incident angle of the signal light and the optical flat structure 20 changes, so that the transmission wavelength of the optical flat structure 20 also changes. The aspheric mirror 21 and the photoelectric array detector 22 rotate the same angle as the optical flat structure 20, and the signal light resonantly transmitted by the flat structure is focused on different transverse positions of the photoelectric array detector 22. Based on the direction projection and intensity information of the signal light on the photoelectric array detector 22, the angular spectrum and spectral measurement of the signal light parallel to the direction of the slit 16 are realized. Due to the effect of the slit 16, the signal light parallel to the direction of the slit 16 in the momentum space is projected on different longitudinal positions of the photoelectric array detector 22 after being focused by the aspheric mirror 21. By controlling the rotation of the slit 16, the angularly resolved spectral information in different directions can be collected, and the three-dimensional angular spectrum and spectral measurement of the signal light are further completed.

[0045] Specifically, as shown in Figures 1 to 3 , the 4f system includes a fourth convex lens 12 and a fifth convex lens 13 with the same focal length, and the front focal point of the fourth convex lens 12 coincides with the rear focal point of the fifth convex lens 13. The rear focal point of the fourth convex lens 12 is located on the slit 16, and the front focal point of the fifth convex lens 13 is located on the rear focal plane of the objective lens 14.

[0046] As shown in Figure 1 , Figure 2 , the excitation light module further includes a first filter 5 and a first polarizer 6. The first filter 5 is located between the second convex lens 4 and the first polarizer 6, and the first polarizer 6 is located between the first filter 5 and the first mirror 7. The Gaussian light beam passing through the second convex lens 4 can select the required wavelength and polarization direction of the excitation light through the first filter 5 and the first polarizer 6.

[0047] As shown in Figure 1 , Figure 2As shown, the collection module further comprises a second filter 18 and a second polarizer 19, the second filter 18 is located between the second mirror 17 and the second polarizer 19, and the second polarizer 19 is located between the second filter 18 and the optical flat structure 20. The second filter 18 and the second polarizer 19 can select the wavelength and polarization direction of the signal light to be measured.

[0048] The second filter 18, the second polarizer 19, the optical flat structure 20, the aspheric mirror 21 and the photoelectric array detector 22 are integrally arranged in a cage structure. The optical flat structure 20, the aspheric mirror 21 and the photoelectric array detector 22 can be synchronously rotated by the cage structure, so that the rotation angles of the optical flat structure 20, the aspheric mirror 21 and the photoelectric array detector 22 are kept the same, and the signal light is focused on different lateral positions of the photoelectric array detector 22.

[0049] The optical flat structure 20 is a single-wavelength optical filter. Specifically, the single-wavelength optical filter includes a Bragg medium cavity, a metal thin film structure, etc.

[0050] Embodiment Two

[0051] This embodiment is similar to Embodiment One, except that it further comprises an illumination module, as shown in Figure 1 , Figure 3 As shown, the illumination module comprises a white light source 9 and a first half-transmission half-reflection mirror 10 arranged in sequence; the first half-transmission half-reflection mirror 10 is located between the third convex lens 8 and a second half-transmission half-reflection mirror 11; the slit 16 can be removed from between the second half-transmission half-reflection mirror 11 and the second mirror 17, and the optical flat structure 20, the second filter 18 and the second polarizer 19 can be removed from between the second mirror 17 and the aspheric mirror 21.

[0052] When collecting images, the optical flat structure 20, the second filter 18, the second polarizer 19 and the slit 16 are removed, and the white light source 9 is turned on, as shown in Figure 3 The parallel light emitted by the white light source 9 is reflected by the first half-transmission half-reflection mirror 10 and the second half-transmission half-reflection mirror, transmitted through the 4f system, and focused on the observation area of the sample by the objective lens 14, while collecting the reflection signal of the sample. The reflection signal is reflected by the 4f system and then transmitted through the second half-transmission half-reflection mirror 11 to the second mirror 17. The parallel light emitted by the second mirror 17 is focused on the photoelectric array detector 22 by the aspheric mirror 21 for near-field imaging.

[0053] As shown in Figure 1 , Figure 3 The inclination angles of the first half-transmission half-reflection mirror 10 and the second half-transmission half-reflection mirror 11 are consistent, so that the size of the light beam remains consistent before and after reflection.

[0054] Embodiment Three

[0055] A three-dimensional angle-resolved spectral imaging method applied to the three-dimensional angle-resolved spectral imaging device of embodiment one or embodiment two; the method comprises a spectral acquisition mode, such as Figure 2 as shown in

[0056] The laser light source 1 emits parallel excitation light, the excitation light is converged on the pinhole filter 3 through the first convex lens 2, the high-frequency stray light is filtered out through the pinhole filter 3, and then the excitation light is emitted as a parallel Gaussian light beam through the second convex lens 4;

[0057] The parallel Gaussian light beam is reflected by the first reflector 7, focused by the third convex lens 8, reflected by the second half-transmission half-reflection mirror 11, converged on the back focal plane of the objective lens 14 through the 4f system, and then converted into parallel light by the objective lens 14 to act on the sample on the sample stage 15;

[0058] The signal light with angle information reflected from the sample is converged on the slit 16 through the objective lens 14, the 4f system and the second half-transmission half-reflection mirror 11;

[0059] The signal light passing through the slit 16 is reflected into the optical flat structure 20 for filtering through the second reflector 17, and then the spectral imaging is performed on the photosensitive array detector 22 through the aspheric mirror 21;

[0060] Wherein, the first reflector 7 can be rotated to change the incident angle of the Gaussian light beam, so that the laser is focused at different positions on the back focal plane of the objective lens 14, and the angle-selective excitation of the sample by the parallel light at multiple angles is realized; the optical flat structure 20, the aspheric mirror 21 and the photosensitive array detector 22 can be rotated to collect the angle-resolved spectral information parallel to the direction of the slit 16, and then the slit 16 is rotated to collect the angle-resolved spectral information in different directions to reconstruct the three-dimensional angle-resolved spectrum.

[0061] The three-dimensional angle-resolved spectral imaging method described above changes the incident angle of the excitation light by rotating the first reflector 7, so that the laser beam is focused at different positions on the back focal plane of the objective lens 14, and the angle-selective excitation of the sample by the parallel light at multiple angles is realized; the incident angle of the signal light and the optical flat structure 20 changes by rotating the optical flat structure 20, so that the transmission wavelength of the optical flat structure 20 also changes; and the aspheric mirror 21 and the photosensitive array detector 22 rotate at the same angle as the optical flat structure 20, the signal light resonantly transmitted by the flat structure is focused at different transverse positions of the photosensitive array detector 22, and the angle spectrum and spectral measurement of the signal light parallel to the direction of the slit 16 are realized based on the direction projection and intensity information of the signal light on the photosensitive array detector 22; due to the effect of the slit 16, the signal light parallel to the direction of the slit 16 in the momentum space is projected on different longitudinal positions of the photosensitive array detector 22 after being focused by the aspheric mirror 21, and the angle-resolved spectral information in different directions can be collected by controlling the rotation of the slit 16, and the three-dimensional angle spectrum and spectral measurement of the signal light are further completed.

[0062] The optical flat structure 20, the aspheric mirror 21 and the photoelectric array detector 22 are integrated in a cage structure, so that the optical flat structure 20, the aspheric mirror 21 and the photoelectric array detector 22 can rotate the same angle when rotating.

[0063] The image acquisition mode also includes:

[0064] The slit 16 is removed from between the second half mirror 11 and the second mirror 17, and the optical flat structure 20 is removed from between the second mirror 17 and the aspheric mirror 21, as shown in Figure 3 ;

[0065] The white light source 9 is turned on, and the white light source 9 emits parallel light. After the parallel light is reflected by the 4f system, the objective lens 14 focuses the parallel light on the sample on the sample stage 15 and receives the reflected signal of the sample.

[0066] The reflected signal is transmitted through the second half mirror 11 after being reflected by the 4f system and is incident on the second mirror 17. The parallel light emitted by the second mirror 17 is focused by the aspheric mirror 21 to the photoelectric array detector 22 for near-field imaging.

[0067] In the specific content of the above specific embodiments, each technical feature can be combined arbitrarily without contradiction. In order to make the description simple, all possible combinations of the above technical features are not described, but as long as the combination of the technical features does not exist contradiction, it should be considered as the scope of the present application.

[0068] Obviously, the above embodiments of the present application are only examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. Based on the above description, other different forms of changes or variations can be made by those skilled in the art. Here, all the implementation modes do not need to be exhausted. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application should be included in the protection scope of the claims of the present application.

Claims

1. A three-dimensional angular-resolved spectral imaging device, characterized in that, It includes an excitation light module, a microscopic imaging module, and a data acquisition module; The excitation light module includes a laser light source (1), a first convex lens (2), a pinhole filter (3), a second convex lens (4), a first reflector (7), and a third convex lens (8) arranged in sequence; the pinhole filter (3) is located at the focal position of the first convex lens (2) and the focal position of the second convex lens (4); the first reflector (7) is rotatable; The microscopic imaging module includes a second semi-transparent mirror (11), a 4f system, an objective lens (14), and a sample stage (15) arranged in sequence. The focal point of the light beam focused by the third convex lens (8) and reflected by the second semi-transparent mirror (11) is located at the rear focal plane of the 4f system. The front focal plane of the 4f system coincides with the rear focal plane of the objective lens (14), and the sample stage (15) is located at the front focal plane of the objective lens (14). The acquisition module includes a slit (16), a second reflector (17), an optical flat structure (20), an aspherical mirror (21), and a photoelectric array detector (22) arranged in sequence; the back focus of the 4f system is located at the slit (16), the slit (16) is rotatable, and the optical flat structure (20), the aspherical mirror (21), and the photoelectric array detector (22) are rotatable.

2. The three-dimensional angle-resolved spectral imaging device according to claim 1, characterized in that, The optical flat panel structure (20), aspherical mirror (21) and photoelectric array detector (22) are integrated into a cage structure.

3. The three-dimensional angle-resolved spectral imaging device according to claim 1, characterized in that, The excitation light module further includes a first filter (5) and a first polarizer (6). The first filter (5) is located between the second convex lens (4) and the first polarizer (6), and the first polarizer (6) is located between the first filter (5) and the first reflector (7).

4. The three-dimensional angle-resolved spectral imaging device according to claim 1, characterized in that, It also includes an illumination module, which includes a white light source (9) and a first semi-transparent mirror (10) arranged in sequence; the first semi-transparent mirror (10) is located between the third convex lens (8) and the second semi-transparent mirror (11); the slit (16) can be moved out from between the second semi-transparent mirror (11) and the second reflector (17), and the optical flat structure (20) can be moved out from between the second reflector (17) and the aspherical mirror (21).

5. The three-dimensional angle-resolved spectral imaging device according to claim 3, characterized in that, The acquisition module further includes a second filter (18) and a second polarizer (19). The second filter (18) is located between the second reflector (17) and the second polarizer (19), and the second polarizer (19) is located between the second filter (18) and the optical plate structure (20). The second filter (18) and the second polarizer (19) can be moved out from between the second reflector (17) and the aspherical mirror (21).

6. The three-dimensional angle-resolved spectral imaging device according to claim 1, characterized in that, The optical flat panel structure (20) is a single-wavelength optical filter.

7. The three-dimensional angle-resolved spectral imaging device according to claim 4, characterized in that, The tilt angles of the first semi-transparent mirror (10) and the second semi-transparent mirror (11) are the same.

8. A three-dimensional angle-resolved spectral imaging method, applied to the three-dimensional angle-resolved spectral imaging device according to any one of claims 1 to 7; characterized in that, The methods include spectral acquisition modes: The laser source (1) emits parallel excitation light, which is then focused by the first convex lens (2) onto the pinhole filter (3). The pinhole filter (3) filters out high-frequency stray light, and the light is then emitted as a parallel Gaussian beam through the second convex lens (4). The parallel Gaussian beam is reflected by the first reflecting mirror (7), focused by the third convex lens (8), and then reflected by the second semi-transparent and semi-reflective mirror (11). The reflected beam is converged by the 4f system to the back focal plane of the objective lens (14), and then converted into parallel light by the objective lens (14) to act on the sample on the sample stage (15). The signal light with angular information reflected from the sample is converged at the slit (16) by the objective lens (14), the 4f system and the second semi-transparent mirror (11). The signal light passing through the slit (16) is reflected by the second mirror (17) and enters the optical flat structure (20) for filtering, and then passes through the aspherical mirror (21) for spectral imaging by the photoelectric array detector (22); Among them, the rotatable first reflecting mirror (7) changes the incident angle of the Gaussian beam, so that the laser beam is focused at different positions on the back focal plane of the objective lens (14), thereby achieving angle-selective excitation of the sample by parallel light from multiple angles; the rotatable optical plate structure (20), aspherical mirror (21) and photoelectric array detector (22) collect angle-resolved spectral information parallel to the direction of the slit (16), and then rotate the slit (16) to collect angle-resolved spectral information in different directions to reconstruct the three-dimensional angle-resolved spectrum.

9. The three-dimensional angle-resolved spectral imaging method according to claim 8, characterized in that, The optical flat plate structure (20), aspherical mirror (21) and photoelectric array detector (22) are integrated in a cage structure so that the optical flat plate structure (20), aspherical mirror (21) and photoelectric array detector (22) can rotate by the same angle when rotating.

10. The three-dimensional angular-resolved spectral imaging method according to claim 8, characterized in that, It also includes image acquisition modes: Remove the slit (16) from between the second semi-transparent mirror (11) and the second mirror (17), and remove the optical flat structure (20) from between the second mirror (17) and the aspherical mirror (21); When the white light source (9) is turned on, the white light source (9) emits parallel light. After the parallel light is reflected by the first semi-transparent mirror (10), the second semi-transparent mirror (11), and the 4f system, the objective lens (14) focuses the parallel light onto the sample on the sample stage (15) and receives the reflected signal of the sample. The reflected signal is reflected by the 4f system and then passes through the second semi-transparent mirror (11) and enters the second reflector (17). The parallel light emitted from the second reflector (17) is focused by the aspherical mirror (21) onto the photoelectric array detector (22) for near-field imaging.

Images