An automated vacuum coating method and system based on image recognition

Abstract

The present invention discloses an automated vacuum coating method and system based on image recognition, which relates to the technical field of material plating. The automated vacuum coating method based on image recognition includes the following steps: obtaining a surface quality index; obtaining a position-related index; obtaining an evaporation-related index. The present invention obtains the initial surface state parameters of the coating target object to obtain the surface quality index, then obtains the position-related index of the coating target object according to the surface quality index, and finally obtains the chemical property-related data of the coating target object based on the position-related index, and obtains the evaporation-related index according to the chemical property-related data, achieving the effect of improving the quality of vacuum coating and solving the problem of inaccurate determination of the coating area in existing vacuum coating technology.

Description

Technical Field

[0001] The present invention relates to the technical field of material plating, and particularly to an automated vacuum plating method and system based on image recognition. Background Art

[0002] With the continuous development of the manufacturing industry, especially the rapid growth in fields such as consumer electronics, integrated circuits, and optoelectronic components, the demand for vacuum plating technology has also increased significantly. At the same time, industries such as aerospace, machinery manufacturing, medical equipment, and construction have also put forward higher requirements for vacuum plating technology. Traditional electroplating technology has problems such as dust hazards, environmental pollution, and electric shock risks, which have a greater impact on the environment and human health. With the rigid requirements of environmental protection governance and ecological red lines, vacuum plating, with its advantages of high cost performance and low pollution, has gradually become the mainstream technology in the surface treatment industry. Traditional electroplating technology has deficiencies in coating quality and is difficult to meet the needs of high-precision and high-performance products. Vacuum plating technology can coat a variety of substrates through physical or chemical means in a vacuum environment, improving the anti-radiation, light transmittance enhancement, conductivity, wear resistance, and other properties of products, thereby improving product quality. During the vacuum plating process, all coating materials are in a vacuum environment and are deposited on the workpiece surface through plasma, without solution pollution and no harm to the environment. This meets the current rigid requirements of environmental protection governance and ecological red lines and is a green and environmentally friendly surface treatment technology.

[0003] Existing methods mainly involve heating and evaporating substances with an evaporator under vacuum conditions to make them sublime or evaporate, and the evaporated particle stream directly shoots towards the substrate and deposits to form a solid film on the substrate.

[0004] For example, the vacuum plating equipment and plating method announced in the invention patent announcement with the publication number: CN114164404B includes: a cavity with a vacuum plating space, an ion source emission component for providing a first ion beam moving towards the vacuum plating space, a multi-arc source generating component for providing a second ion beam moving towards the vacuum plating space; a deflection component for generating a magnetic field to change the moving direction and speed of the plating particles in the first ion beam or the second ion beam in the vacuum plating space, and a PID control system for sending instructions to the deflection component to adjust the magnitude of the magnetic field generated by the deflection component.

[0005] For example, a vacuum coating method for a protective film disclosed in the invention patent announcement with the announcement number of CN103774143B includes the following steps: Step 1: Vacuum pumping: Place the product to be coated in a vacuum chamber, then pump vacuum and heat simultaneously to form water vapor on the upper layer of the container; Step 2: Metal film coating: Coat the metal film using the evaporation process for metal film coating; Step 3: Introduce air after coating the metal film: Close the diffusion pump, open the molecular gate, fill the vacuum chamber with air through a flow meter, and stabilize the vacuum degree for 0.2 - 1 minute; Step 4: Clean the surface of the metal film: Start the ion bombardment power supply; Step 5: Then coat the protective film: Fill in the liquid vapor of silicone, keep the air pressure unchanged, and start the ion bombardment power supply again to make the silicone grow layer by layer on the metal film to form a protective film.

[0006] However, in the process of implementing the technical solution of the invention in the embodiments of the present application, it is found that the above technology has at least the following technical problems: In the prior art, due to uneven and defective surfaces, the coating layer may not form good adhesion, resulting in easy peeling or bubbling of the coating layer, and inaccurate determination of the coating area in vacuum coating. Summary of the Invention

[0007] The embodiments of the present application provide an automated vacuum coating method and system based on image recognition, which solve the problem of inaccurate determination of the coating area in vacuum coating in the prior art and improve the quality of vacuum coating.

[0008] The embodiments of the present application provide an automated vacuum coating method based on image recognition, including the following steps: S1, obtain the initial surface state parameters of the coating target object before vacuum coating, and obtain the surface quality index according to the initial surface state parameters. The surface quality index is used to evaluate the surface quality state of the coating target object, and the initial surface state parameters are used to describe the surface state of the coating target object identified by image recognition; S2, obtain the position-related index of the coating target object according to the surface quality index. The position-related index is used to evaluate the compliance of the coating target object for coating at a preset position point; S3, conduct chemical property analysis on the coating target object based on the position-related index to obtain chemical property-related data of the coating target object, and obtain the evaporation-related index according to the chemical property-related data. At the same time, compare the evaporation-related index with the preset evaporation-related index range. If the evaporation-related index is not within the preset evaporation-related index range, adjust the parameters of the coating device. Otherwise, mark the corresponding coating target object as an object to be coated and feedback it to the preset personnel. The chemical property-related data is used to describe the chemical properties of the coating target object, and the evaporation-related index is used to evaluate the influence degree of the chemical properties on the surface state of the coating target object.

[0009] Further, the specific process for obtaining the initial surface state parameters is as follows: First image data of the coating target object is obtained through an image acquisition device, which is used to collect image information of the coating target object; the first image data is pre-processed to obtain second image data, and the image pre-processing is used to remove noise in the image and enhance image details; the second image data is subjected to image feature extraction to obtain the initial surface state parameters, and the image feature extraction is used to extract the roughness, friction force, source-substrate distance, and evaporation rate of the coating target object.

[0010] Further, the specific process for obtaining the surface quality index is as follows: During a standard time period, quality-related data of the coating target object at a preset position point is obtained through a quality measurement device. The quality measurement device includes a pressure sensor and a laser rangefinder. The quality-related data includes a standard normal pressure and a standard sampling height. The standard normal pressure represents the pressure applied by the coating device corresponding to the preset position point of the coating target object during the standard time period, and the standard sampling height represents the sampling point height at the preset position point of the coating target object during the standard time period. The standard time period represents a preset time period before vacuum coating; the standard friction force measurement value is obtained based on the standard normal pressure and a preset friction coefficient, and at the same time, the standard roughness measurement value is obtained based on the standard sampling height; a preset friction force threshold, a preset roughness threshold, a first mass weight, and a second mass weight are obtained from a preset database, and the surface quality index is obtained by combining the standard friction force measurement value and the standard roughness measurement value.

[0011] Further, the surface quality index is calculated using the following formula:

[0012]

[0013] In the formula, represents the surface quality index of the nth preset position point on the surface of the coating target object in the mth standard time period, where m = 1, 2,... r, m represents the number of the standard time period, r represents the total number of standard time periods, n = 1, 2,... s, n represents the number of the preset position point, s represents the total number of preset position points, F mn represents the standard friction force measurement value of the nth preset position point on the surface of the coating target object in the mth standard time period, R m represents the standard roughness measurement value of the surface of the coating target object in the mth standard time period, F 0 represents the preset friction force threshold, R 0 represents the preset roughness threshold, μ 1 represents the first mass weight, μ 2 represents the second mass weight, and e represents the natural constant.

[0014] Further, the specific process for obtaining the position-related index is as follows: A1. Compare the surface quality index corresponding to the preset position point obtained with the preset quality range to determine whether the surface quality index corresponding to the preset position point is within the preset quality range. If it is within the preset quality range, then execute A2; otherwise, feedback it to the preset personnel. A2. Obtain the position-related data of the coating target object at the preset position point through the position measurement device during the standard time period. The position measurement device includes a film thickness monitor, an evaporation rate monitor, and a laser scanner. The position-related data includes the standard evaporation rate, the standard base area, and the standard film layer thickness. The standard evaporation rate represents the amount of material overflowing from the coating target object at the preset position point during the standard time period. The standard base area represents the surface area of the coating target object at the preset position point during the standard time period. The standard film layer thickness represents the thickness of the film layer of the coating target object at the preset position point during the standard time period. A3. Obtain the standard source-base distance measurement value based on the position-related data, the preset coating time, and the preset deposition efficiency. A4. Obtain the preset source-base distance threshold from the preset database and combine it with the standard source-base distance measurement value to obtain the position-related index.

[0015] Further, the position-related index is calculated using the following formula:

[0016]

[0017] In the formula, represents the position-related index of the nth preset position point on the surface of the coating target object in the mth standard time period, where m = 1, 2,... r, m represents the number of the standard time period, r represents the total number of standard time periods, n = 1, 2,... s, n represents the number of the preset position point, s represents the total number of preset position points, and B mn represents the standard source-base distance measurement value of the nth preset position point on the surface of the coating target object in the mth standard time period, and B 0 represents the preset source-base distance threshold, and e represents the natural constant.

[0018] Further, the specific process for obtaining the chemical property-related data is as follows: B1. Compare the position-related index corresponding to the preset position point obtained with the preset position-related index range to determine whether the position-related index corresponding to the preset position point is within the preset position-related index range. If the position-related index is within the preset position-related index range, then determine that the coating target object meets the coating conditions; otherwise, execute B2. B2. Conduct chemical property analysis at the preset position point corresponding to the position-related index to obtain the chemical property-related data corresponding to the preset position point.

[0019] Further, the specific process for obtaining the evaporation-related index is as follows: Obtain evaporation-related data of the coating target object at a preset position point through an evaporation measurement device during a standard time period. The evaporation measurement device includes a mass flowmeter, a timer, and a vernier caliper. The evaporation-related data includes standard evaporation mass, standard evaporation area, and standard evaporation time. The standard evaporation mass represents the mass of evaporation of the coating target object at the preset position point during the standard time period. The standard evaporation area represents the area of evaporation of the coating target object at the preset position point during the standard time period. The standard evaporation time difference represents the time required for the evaporation of the coating target object at the preset position point during the standard time period. Obtain a standard evaporation rate measurement value based on the evaporation-related data. Obtain a preset evaporation rate threshold from a preset database, and combine the standard evaporation rate measurement value to obtain the evaporation-related index.

[0020] Further, the evaporation-related index is calculated using the following formula:

[0021]

[0022] In the formula, represents the evaporation-related index at the nth preset position point on the surface of the coating target object in the mth standard time period, m = 1, 2,... r, where m represents the number of the standard time period, r represents the total number of standard time periods, n = 1, 2,... s, where n represents the number of the preset position point, s represents the total number of preset position points, Q mn represents the standard evaporation rate measurement value at the nth preset position point on the surface of the coating target object in the mth standard time period, Q 0 represents the preset evaporation rate threshold, and e represents the natural constant.

[0023] An embodiment of the present application provides an automated vacuum coating system based on image recognition, which implements the automated vacuum coating method based on image recognition described in any one of the above, including: a surface quality index acquisition module, a position-related index acquisition module, and an evaporation-related index acquisition module; wherein, the surface quality index acquisition module is configured to acquire initial surface state parameters of a coating target object before vacuum coating, and obtain a surface quality index according to the initial surface state parameters, the surface quality index is used to evaluate the surface quality state of the coating target object, and the initial surface state parameters are used to describe the surface state of the coating target object recognized by image recognition; the position-related index acquisition module is configured to obtain a position-related index of the coating target object according to the surface quality index, and the position-related index is used to evaluate the compliance of the coating target object for coating at a preset position point; the evaporation-related index acquisition module is configured to perform chemical property analysis on the coating target object based on the position-related index to obtain chemical property-related data of the coating target object, and obtain an evaporation-related index according to the chemical property-related data, and at the same time compare the evaporation-related index with a preset evaporation-related index range. If the evaporation-related index is not within the preset evaporation-related index range, the parameters of the coating device are adjusted. Otherwise, the corresponding coating target object is marked as a to-be-coated object and fed back to a preset person. The chemical property-related data is used to describe the chemical properties of the coating target object, and the evaporation-related index is used to evaluate the influence degree of the chemical properties on the surface state of the coating target object.

[0024] One or more technical solutions provided in the embodiments of the present application have at least the following technical effects or advantages:

[0025] 1. By acquiring the initial surface state parameters of the coating target object before vacuum coating, obtaining the surface quality index according to the initial surface state parameters, then obtaining the position-related index of the coating target object according to the surface quality index, and finally performing chemical property analysis on the coating target object based on the position-related index to obtain the chemical property-related data of the coating target object, and obtaining the evaporation-related index according to the chemical property-related data, the refinement of coating is realized, and further the improvement of the vacuum coating quality is realized, effectively solving the problem of inaccurate determination of the coating area in vacuum coating in the prior art.

[0026] 2. By using an image acquisition device to acquire the first image data of the coating target object, then performing image preprocessing on the first image data to obtain the second image data, and finally performing image feature extraction on the second image data to obtain the initial surface state parameters, the reliability of obtaining coating-related data is improved, and further the more accurate acquisition of coating-related data is realized.

[0027] 3. By comparing the surface quality index corresponding to the obtained preset position points with the preset quality range, it is determined whether the surface quality index corresponding to the preset position points is within the preset quality range. If it is within the preset quality range, the position-related data of the coating target object at the preset position points is obtained through the position measurement device during the standard time period. Otherwise, it is fed back to the preset personnel, thereby realizing the authenticity of the acquisition of coating-related data, and further realizing the effectiveness of evaluating whether the coating target object has the coating conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a flowchart of an automated vacuum coating method based on image recognition provided by the present application;

[0029] Figure 2 It is a statistical change diagram of evaporation-related indexes provided by the present application;

[0030] Figure 3 It is a schematic structural diagram of an automated vacuum coating system based on image recognition provided by the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0031] By providing an automated vacuum coating method and system based on image recognition in the embodiments of the present application, the problem of inaccurate determination of the coating area in vacuum coating in the prior art is solved. By obtaining the initial surface state parameters of the coating target object before vacuum coating, the surface quality index is obtained according to the initial surface state parameters, then the position-related index of the coating target object is obtained according to the surface quality index, and finally the chemical property analysis of the coating target object is carried out based on the position-related index to obtain the chemical property-related data of the coating target object, and the evaporation-related index is obtained according to the chemical property-related data, thereby improving the quality of vacuum coating.

[0032] The technical solutions in the embodiments of the present application are to solve the problem of inaccurate determination of the coating area in the above-mentioned vacuum coating. The general idea is as follows:

[0033] By obtaining the initial surface state parameters of the coating target object to obtain the surface quality index, then obtaining the position-related index of the coating target object according to the surface quality index, and finally obtaining the evaporation-related index based on the position-related index, the effect of improving the quality of vacuum coating is achieved.

[0034] In order to better understand the above technical solutions, the above technical solutions will be described in detail below in conjunction with the accompanying drawings of the specification and specific embodiments.

[0035] As Figure 1 shown, it is a flowchart of an automated vacuum coating method based on image recognition provided by an embodiment of the present application. The method includes the following steps:

[0036] S1. Before vacuum coating, obtain the initial surface state parameters of the coating target object, and obtain the surface quality index according to the initial surface state parameters. The surface quality index is used to evaluate the surface quality state of the coating target object, and the initial surface state parameters are used to describe the surface state of the coating target object recognized by image recognition.

[0037] S2. Obtain the position-related index of the coating target object according to the surface quality index. The position-related index is used to evaluate the compliance of the coating target object for coating at a preset position point.

[0038] S3. Conduct chemical property analysis on the coating target object based on the position-related index to obtain chemical property-related data of the coating target object, and obtain the evaporation-related index according to the chemical property-related data. At the same time, compare the evaporation-related index with the preset evaporation-related index range. If the evaporation-related index is not within the preset evaporation-related index range, adjust the parameters of the coating device. Otherwise, mark the corresponding coating target object as the object to be coated and feedback it to the preset personnel. The chemical property-related data is used to describe the chemical properties of the coating target object, and the evaporation-related index is used to evaluate the influence degree of the chemical properties on the surface state of the coating target object. The device-related parameters include evaporation source power and temperature.

[0039] In this embodiment, as a preliminary evaluation before coating, the surface quality index reflects the basic quality state of the surface before coating and is an important prerequisite for the success of subsequent coating processes. After understanding the surface quality, the position-related index further evaluates the compliance of the coating target object for coating at a preset position point. The level of the surface quality index will indirectly affect the position-related index because uneven surfaces or defects may lead to inaccurate position control or non-uniform coating thickness during the coating process. The position-related index ensures that the target object is in the correct and stable position during the coating process, which is crucial for the effective coverage of the evaporation source and coating uniformity. If the position control is inaccurate, it may cause the evaporation material to fail to be precisely deposited in the target area, reducing the coating effect and further affecting the evaporation-related index, thus achieving an improvement in the quality of vacuum coating.

[0040] Furthermore, the specific process for obtaining the initial surface state parameters is as follows: Obtain the first image data of the coating target object through an image acquisition device. The image acquisition device is used to collect the image information of the coating target object, and the first image data represents the original data of the image information of the coating target object. Perform image preprocessing on the first image data to obtain the second image data. The image preprocessing is used to remove noise in the image and enhance image details, and the second image data represents the first image data after image preprocessing. Perform image feature extraction on the second image data to obtain the initial surface state parameters. The image feature extraction is used to extract the roughness, friction, source-substrate distance, and evaporation rate of the coating target object.

[0041] In this embodiment, a high-resolution and low-noise camera or scanner is selected as the image acquisition device, such as a laser industrial camera and a CMOS industrial digital camera, to ensure that the details of the coating target object can be captured. Selecting a high-resolution and low-noise camera or scanner as the image acquisition device ensures that the details of the coating target object can be captured; the improvement of the vacuum coating quality is achieved.

[0042] Further, the specific process for obtaining the surface quality index is as follows: During the standard time period, quality-related data of the coating target object at the preset position points is obtained by a quality measurement device. The quality measurement device includes a pressure sensor and a laser rangefinder. The quality-related data includes the standard normal pressure and the standard sampling height. The standard normal pressure represents the pressure applied by the coating device corresponding to the preset position points of the coating target object during the standard time period. The standard sampling height represents the sampling point height of the preset position points of the coating target object during the standard time period. The standard time period represents the preset time period before vacuum coating; the standard friction force measurement value is obtained based on the standard normal pressure and the preset friction coefficient, and at the same time, the standard roughness measurement value is obtained based on the standard sampling height. The standard friction force measurement value represents the measured value of the friction force at the preset position points of the coating target object during the standard time period. The standard roughness measurement value represents the measured value of the roughness at the preset position points of the coating target object during the standard time period. The preset friction coefficient is obtained from the preset database; the preset friction force threshold, the preset roughness threshold, the first quality weight, and the second quality weight are obtained from the preset database, and the surface quality index is obtained by combining the standard friction force measurement value and the standard roughness measurement value. The first quality weight is used to evaluate the influence degree of the standard normal pressure on the surface quality index, and the second quality weight is used to evaluate the influence degree of the standard sampling height on the surface quality index.

[0043] In this embodiment, the preset position points are selected based on the historical vacuum coating position point data and are distributed at the center, edge, and different curvature surfaces of the coating target object. The preset friction force threshold is represented by the mean value of the friction force data in the preset database. The preset roughness threshold is represented by the mean value of the roughness data in the preset database. The preset friction coefficient is represented by the mean value of the friction coefficient data in the preset database. The pressure sensor is an electronic device used to measure pressure. It can convert the sensed pressure into an electrical signal and, through circuit processing, finally output an electrical signal corresponding to the input pressure. The laser rangefinder is a device that uses a laser beam for non-contact distance measurement. It calculates the distance between the transmitter and the target object by measuring the time or phase difference of the laser beam from the transmitter to the target object and then back; the improvement of the vacuum coating quality is achieved.

[0044] Specifically, the first quality weight is obtained from a preset database; in a specific embodiment, a mapping set of the standard normal pressure deviation value and its corresponding weight is constructed according to the relationship between the historical standard normal pressure deviation value and the surface quality index, and the real-time standard normal pressure deviation value is input into the mapping set to obtain the corresponding first quality weight.

[0045] Specifically, the second quality weight is obtained from a preset database; in a specific embodiment, a mapping set of the standard sampling height deviation value and its corresponding weight is constructed according to the relationship between the historical standard sampling height deviation value and the surface quality index, and the real-time standard sampling height deviation value is input into the mapping set to obtain the corresponding second quality weight.

[0046] Furthermore, the surface quality index is calculated using the following formula:

[0047]

[0048] In the formula, represents the surface quality index at the nth preset position on the surface of the coating target object in the mth standard time period, m = 1, 2,... r, where m represents the number of the standard time period, r represents the total number of standard time periods, n = 1, 2,... s, where n represents the number of the preset position, s represents the total number of preset positions, F mn represents the standard friction measurement value at the nth preset position on the surface of the coating target object in the mth standard time period, R m represents the standard roughness measurement value at the nth preset position on the surface of the coating target object in the mth standard time period, F 0 represents the preset friction threshold, R 0 represents the preset roughness threshold, μ 1 represents the first quality weight, μ 2 represents the second quality weight, and e represents the natural constant.

[0049] In this embodiment, the standard friction measurement value is calculated based on F mn = ρ * N mn The formula is calculated, and the standard roughness measurement value is based on The formula is calculated, ρ represents the preset friction coefficient, N mn represents the standard normal pressure at the nth preset position on the surface of the coating target object in the mth standard time period, Z mn represents the standard sampling height at the nth preset position on the surface of the coating target object in the mth standard time period. The standard sampling height is used to indicate the degree of unevenness of the surface of the coating target object.

[0050] The algorithm of this embodiment combines the standard normal pressure N mn and the standard sampling height Z mn, a surface quality index is obtained through comprehensive analysis. In this formula, the standard normal pressure N mn and the standard sampling height Z mn have a co - adjustment relationship. When the surface quality index is calculated by the following formula: At this time, the standard friction force measurement value is not greater than the preset friction force threshold, and the standard roughness measurement value is not greater than the preset roughness threshold. As the standard normal pressure N mn and the standard sampling height Z mn increase, the surface quality index gradually increases, and the standard normal pressure N mn and the standard sampling height Z mn are positively correlated with the surface quality index; when the surface quality index is calculated by the following formula: The standard friction force measurement value is not less than the preset friction force threshold, and the standard roughness measurement value is not less than the preset roughness threshold. Therefore, precise analysis is carried out by establishing a mathematical form.

[0051] It should be noted that the expression of the standard normal pressure N mn is: where N mn ′ represents the standard normal pressure data at the nth preset position point on the surface of the coating target object in the mth standard time period, and N mn 0 represents the reference standard normal pressure data at the nth preset position point on the surface of the coating target object in the mth standard time period, and ΔN mn represents the standard normal pressure reference deviation. The expression of the standard sampling height Z mn is: where Z mn ′ represents the standard sampling height data at the nth preset position point on the surface of the coating target object in the mth standard time period, and Z mn 0 represents the reference standard sampling height data at the nth preset position point on the surface of the coating target object in the mth standard time period, and ΔZ mn represents the standard sampling height reference deviation.

[0052] It should be understood that the standard normal pressure data is represented by the standard normal pressure measurement value measured at the nth preset position point on the surface of the coating target object during the mth standard time period. The reference standard normal pressure data is represented by the result of calculating the average value of the standard normal pressure data at the nth preset position point on the surface of the coating target object during the mth standard time period. The standard normal pressure reference deviation is obtained by calculating the standard normal pressure data and the reference standard normal pressure data using the deviation formula. The standard sampling height data is represented by the standard sampling height measurement value measured at the nth preset position point on the surface of the coating target object during the mth standard time period. The reference standard sampling height data is represented by the result of calculating the average value of the standard sampling height data at the nth preset position point on the surface of the coating target object during the mth standard time period. The standard sampling height reference deviation is obtained by calculating the standard sampling height data and the reference standard sampling height data using the deviation formula. The deviation formula is used to measure the difference between the reference value and the true measurement value, and is represented by the result of taking the average value of the difference between the reference value and the true measurement value, thus realizing the improvement of the vacuum coating quality.

[0053] Furthermore, the specific process of obtaining the position-related index is as follows:

[0054] A1. Compare the surface quality index corresponding to the obtained preset position point with the preset quality range to determine whether the surface quality index corresponding to the preset position point is within the preset quality range. If it is within the preset quality range, then execute A2; otherwise, feedback it to the preset personnel.

[0055] A2. Obtain the position-related data of the coating target object at the preset position point through the position measurement device during the standard time period. The position measurement device includes a film thickness monitor, an evaporation rate monitor, and a laser scanner. The position-related data includes the standard evaporation rate, the standard base area, and the standard film layer thickness. The standard evaporation rate represents the amount of material overflowing from the coating target object at the preset position point during the standard time period. The standard base area represents the surface area of the coating target object at the preset position point during the standard time period. The standard film layer thickness represents the thickness of the film layer of the coating target object at the preset position point during the standard time period.

[0056] A3. Obtain the standard source-substrate distance measurement value according to the position-related data, the preset coating time, and the preset deposition efficiency. The preset coating time and the preset deposition efficiency are obtained from the preset database. The standard source-substrate distance measurement value represents the measured value of the source-substrate distance of the coating target object at the preset position point during the standard time period.

[0057] A4. Obtain the preset source-substrate distance threshold from the preset database and obtain the position-related index in combination with the standard source-substrate distance measurement value.

[0058] In this embodiment, the preset source-substrate distance threshold is represented by the mean value of the source-substrate distance data in the preset database, the preset coating time is represented by the mean value of the coating time data in the preset database, the preset deposition efficiency is represented by the mean value of the deposition efficiency data in the preset database, and the preset quality range is generally set based on the mean value of the coating quality data in the preset database, with a range of 5 to 10 times the mean value of the coating quality data. The film thickness monitor often uses the principle of quartz crystal oscillation and combines frequency measurement technology to perform on-line monitoring of the film thickness. The evaporation rate monitor can monitor the reduction of the mass of the substance or the change of the vapor flow rate during the evaporation process. The evaporation rate monitor may use various principles to measure the evaporation rate, such as the mass change method, the flow rate monitoring method, etc. If it is within the preset quality range, then A2 is executed; otherwise, it is fed back to the preset personnel to re-clean and replace the materials of the coating target object, and re-detect until the surface quality index is within the preset quality range, realizing the improvement of the vacuum coating quality. The preset personnel can at least be understood as the preset staff or the preset operator or the preset processing personnel.

[0059] Further, the position-related index is calculated using the following formula:

[0060]

[0061] In the formula, represents the position-related index of the nth preset position point on the surface of the coating target object in the mth standard time period, where m = 1, 2,... r, m represents the number of the standard time period, r represents the total number of the standard time periods, n = 1, 2,... s, n represents the number of the preset position point, s represents the total number of the preset position points, and B mn represents the standard source-substrate distance measurement value of the nth preset position point on the surface of the coating target object in the mth standard time period, and B 0 represents the preset source-substrate distance threshold, and e represents the natural constant.

[0062] In this embodiment, the standard source-substrate distance measurement value is calculated based on the formula, where v mn represents the standard evaporation rate of the nth preset position point on the surface of the coating target object in the mth standard time period, s mn represents the standard base area of the nth preset position point on the surface of the coating target object in the mth standard time period, d mn represents the standard film layer thickness of the nth preset position point on the surface of the coating target object in the mth standard time period, t represents the preset coating time, and x represents the preset deposition efficiency.

[0063] The algorithm of this embodiment combines the standard evaporation rate v mn , the standard base area s mn and the standard film layer thickness d mn, a position - related index is obtained through comprehensive analysis. In this formula, the standard evaporation rate v mn , the standard base area s mn and the standard film thickness d mn have a co - regulatory relationship. When the position - related index is calculated by the following formula: At this time, the measured value of the standard source - base distance is not less than the preset source - base distance threshold. As the standard evaporation rate v mn increases, the standard base area s mn and the standard film thickness d mn decrease, and the position - related index gradually decreases. The standard evaporation rate v mn is negatively correlated with the position - related index, and the standard base area s mn and the standard film thickness d mn are positively correlated with the position - related index. When the position - related index is calculated by the following formula: The measured value of the standard source - base distance is not greater than the preset source - base distance threshold. Therefore, precise analysis is carried out by establishing a mathematical form.

[0064] Specifically, assume that the range of the standard evaporation rate v mn is 0.1 - 10 (nm / s), the range of the standard base area s mn is 1 - 100 (cm 2 ), the range of the standard film thickness d mn is 10 - 100 (nm), the preset source - base distance threshold B 0 is 0.1 (nm), the preset coating time t is 100 (min), and the preset deposition efficiency x is 0.7. Then the statistical change table of the position - related index is shown in Table 1:

[0065] Table 1 Statistical change table of the position - related index

[0066]

[0067]

[0068] It can be seen from the table that here the standard evaporation rate v mn is negatively correlated with the position - related index, and the standard base area s mn and the standard film thickness d mn are positively correlated with the position - related index. As the standard evaporation rate v mn gradually increases, the standard base area s mn and the standard film thickness d mnWith the gradual decrease of [[ID=]], the position - related index gradually decreases, and the gradual reduction of the standard base area enhances the bonding force between the coating layer and the target substrate, ensuring the stability and reliability of the coating quality. This means that the degree of compliance of the coating target object with the coating requirements at the preset position points gradually increases, achieving an improvement in the quality of vacuum coating.

[0069] Furthermore, the specific process of obtaining the chemical - property - related data is as follows:

[0070] B1. Compare the position - related index corresponding to the obtained preset position point with the preset position - related index range to determine whether the position - related index corresponding to the preset position point is within the preset position - related index range. If the position - related index is within the preset position - related index range, it is determined that the coating target object meets the coating conditions; otherwise, execute B2.

[0071] B2. Conduct chemical - property analysis at the preset position point corresponding to the position - related index to obtain the chemical - property - related data corresponding to the preset position point. Chemical - property analysis means irradiating the surface of the coating target object with an X - ray source to excite the atoms on the surface of the coating target object and measuring the kinetic energy through an electron energy analyzer, thereby determining the chemical composition and chemical state of the surface of the coating target object, and further reflecting the temperature and evaporation rate on the surface of the coating target object. The chemical - property - related data includes temperature and evaporation rate.

[0072] In this embodiment, the preset position - related index range is generally set based on the mean value of the coating position data in the preset database, taking 5 - 10 times the mean value of the coating position data as the range, and irradiating with an X - ray source. X - rays can penetrate the surface of a substance and interact with the atoms inside, thus exciting the surface atoms. The excited atoms will release characteristic energies, which are emitted in the form of photoelectrons. By measuring the kinetic energy of these photoelectrons with an electron energy analyzer, information about the atomic structure and chemical state can be obtained. By analyzing the changes in the surface chemical composition and chemical state, the presence of certain elements or compounds may indicate that the surface has undergone high - temperature treatment or evaporation processes, such as sulfates, nitrates, iron oxides, etc., and the temperature and evaporation rate on the surface can be indirectly inferred; achieving an improvement in the quality of vacuum coating.

[0073] Further, the specific process for obtaining the evaporation-related index is as follows: During a standard time period, evaporation-related data of the coating target object at a preset position point is obtained through an evaporation measurement device. The evaporation measurement device includes a mass flow meter, a timer, and a vernier caliper. The evaporation-related data includes standard evaporation mass, standard evaporation area, and standard evaporation time. The standard evaporation mass represents the mass of evaporation of the coating target object at the preset position point during the standard time period. The standard evaporation area represents the area of evaporation of the coating target object at the preset position point during the standard time period. The standard evaporation time difference represents the time required for the evaporation of the coating target object at the preset position point during the standard time period. Based on the evaporation-related data, a standard evaporation rate measurement value is obtained, which represents the measured value of the evaporation rate of the coating target object at the preset position point during the standard time period. A preset evaporation rate threshold is obtained from a preset database, and the evaporation-related index is obtained by combining the standard evaporation rate measurement value.

[0074] In this embodiment, the preset evaporation rate threshold is represented by the average value of the evaporation rate data in the preset database. There are two parallel flow tubes inside the mass flow meter, with a driving coil in the middle and detection coils at both ends. When the fluid flows through the sensor, a Coriolis force effect will be generated on the vibrating tube, causing the two vibrating tubes to twist and vibrate. The detection coils installed at both ends of the vibrating tube will generate two groups of signals with different phases. The phase difference between these two signals is proportional to the mass flow rate of the fluid flowing through the sensor, thereby calculating the mass flow rate. The timer is a device used to measure time. The working principle of the vernier caliper is to measure the size of an object through the relative movement of the vernier and the main scale. The vernier is engraved with fine scales that can be precisely aligned with the scales on the main scale to obtain the measurement result, achieving an improvement in the quality of vacuum coating.

[0075] Further, the evaporation-related index is calculated using the following formula:

[0076]

[0077] In the formula, represents the evaporation-related index at the nth preset position point on the surface of the coating target object in the mth standard time period, where m = 1, 2,... r, m represents the number of the standard time period, r represents the total number of standard time periods, n = 1, 2,... s, n represents the number of the preset position point, s represents the total number of preset position points, Q mn represents the standard evaporation rate measurement value at the nth preset position point on the surface of the coating target object in the mth standard time period, Q 0 represents the preset evaporation rate threshold, and e represents the natural constant.

[0078] In this embodiment, the standard evaporation rate measurement value is calculated based on the formula, M mnDenote the standard evaporation mass at the nth preset position point on the surface of the coating target object in the mth standard time period, G mn Denote the standard evaporation area at the nth preset position point on the surface of the coating target object in the mth standard time period, T mn Denote the standard evaporation time at the nth preset position point on the surface of the coating target object in the mth standard time period. In this embodiment, the algorithm combines the standard evaporation mass M mn , the standard evaporation area G mn and the standard evaporation time T mn , and comprehensively analyzes to obtain the evaporation-related index. In this formula, the standard evaporation mass M mn , the standard evaporation area G mn and the standard evaporation time T mn have a co-regulation relationship. When the evaporation-related index can be calculated by the following formula: At this time, the measured value of the standard evaporation rate is not greater than the preset evaporation rate threshold. As the standard evaporation mass M mn increases, the standard evaporation area G mn and the standard evaporation time T mn decrease, and the evaporation-related index gradually increases. The standard evaporation mass M mn is positively correlated with the evaporation-related index, and the standard evaporation area G mn and the standard evaporation time T mn are negatively correlated with the evaporation-related index. When the evaporation-related index is calculated by the following formula: At this time, the measured value of the standard evaporation rate is not less than the preset evaporation rate threshold. The standard evaporation mass M mn is negatively correlated with the evaporation-related index, and the standard evaporation area G mn and the standard evaporation time T mn are positively correlated with the evaporation-related index. Therefore, precise analysis is carried out by establishing a mathematical form.

[0079] Specifically, let H mn = G mn *T mn , H mn denotes the area-time threshold at the nth preset position point on the surface of the coating target object in the mth standard time period. Then the calculation formula of the evaporation-related index can be further refined as: Assume that the range of the area-time threshold H mn is 1000 - 5000 (cm 2 *min), the range of the standard evaporation mass M mn is 0 - 100 (mg), and the preset evaporation rate threshold Q 0 is 0.1 (mg / (cm 2 *min)), such asFigure 2 As shown, it is a statistical change diagram of evaporation-related indexes provided by the embodiment of the present application. It can be seen from Figure 2 that at this time, the measured value of the standard evaporation rate is not greater than the preset evaporation rate threshold. As the standard evaporation mass M mn gradually increases, the area-time threshold H mn gradually decreases, that is, the spatial expansion ability of evaporation weakens, and the evaporation-related index gradually increases, indicating that the influence degree of chemical properties on the surface state of the coating target object gradually increases; the improvement of the vacuum coating quality is realized.

[0080] As Figure 3 shown, it is a schematic structural diagram of an automated vacuum coating system based on image recognition provided by the embodiment of the present application. An automated vacuum coating system based on image recognition provided by the embodiment of the present application realizes any one of the above-mentioned automated vacuum coating methods based on image recognition, including: a surface quality index acquisition module, a position-related index acquisition module, and an evaporation-related index acquisition module;

[0081] Among them, the surface quality index acquisition module is used to acquire the initial surface state parameters of the coating target object before vacuum coating, and obtain the surface quality index according to the initial surface state parameters. The surface quality index is used to evaluate the surface quality state of the coating target object, and the initial surface state parameters are used to describe the surface state of the coating target object identified by image recognition;

[0082] The position-related index acquisition module is used to obtain the position-related index of the coating target object according to the surface quality index. The position-related index is used to evaluate the compliance of the coating target object for coating at a preset position point;

[0083] The evaporation-related index acquisition module is used to perform chemical property analysis on the coating target object based on the position-related index to obtain chemical property-related data of the coating target object, and obtain the evaporation-related index according to the chemical property-related data. At the same time, the evaporation-related index is compared with the preset evaporation-related index range. If the evaporation-related index is not within the preset evaporation-related index range, the parameters of the coating device are adjusted. Otherwise, the corresponding coating target object is recorded as a to-be-coated object and fed back to the preset personnel. The chemical property-related data is used to describe the chemical properties of the coating target object, and the evaporation-related index is used to evaluate the influence degree of chemical properties on the surface state of the coating target object. The device-related parameters include evaporation source power and temperature.

[0084] In this embodiment, the evaporation-related index is compared with a preset evaporation-related index range to determine whether it is within the preset evaporation-related index range. If the evaporation-related index is within the preset evaporation-related index range, the corresponding coating target object is marked as the object to be coated and fed back to the preset personnel. Otherwise, power adjustment and temperature adjustment are performed on the coating device to obtain device-related parameters. Power adjustment means gradually increasing the evaporation source power of the coating device by a preset multiple of the preset power threshold. The preset multiple generally takes 1.5 times, 2 times, 2.5 times. For example, taking 1.5 times of the preset power threshold, calculate whether the evaporation-related index is within the preset evaporation-related index range. If the evaporation-related index is not within the preset evaporation-related index range, take 2 times of the preset power threshold and continue the calculation until the evaporation-related index is within the preset evaporation-related index range. Temperature adjustment means gradually increasing the evaporation source temperature of the coating device by a preset multiple of the preset temperature threshold. For example, taking 1.5 times of the preset temperature threshold, calculate whether the evaporation-related index is within the preset evaporation-related index range. If the evaporation-related index is not within the preset evaporation-related index range, take 2 times of the preset temperature threshold and continue the calculation until the evaporation-related index is within the preset evaporation-related index range. The device-related parameters include evaporation source power and evaporation source temperature. The preset power threshold is represented by the mean value of the power data in the preset database, and the preset temperature threshold is represented by the mean value of the temperature data in the preset database, thus improving the quality of vacuum coating.

[0085] In summary, in the embodiment of the present application, the initial surface state parameters of the coating target object are obtained before vacuum coating, the surface quality index is obtained according to the initial surface state parameters, then the position-related index of the coating target object is obtained according to the surface quality index, and finally, chemical property analysis is performed on the coating target object based on the position-related index to obtain the chemical property-related data of the coating target object, and the evaporation-related index is obtained according to the chemical property-related data, thereby realizing the refinement of coating and further improving the quality of vacuum coating, effectively solving the problem of inaccurate determination of the coating area in vacuum coating in the prior art.

[0086] Those skilled in the art should understand that the embodiments of the present invention can be provided as a method, a system, or a computer program product. Therefore, the present invention can take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware aspects. Moreover, the present invention can take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0087] The present invention is described with reference to the flowcharts and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the invention. It should be understood that each flow and / or block in the flowcharts and / or block diagrams, and combinations of flows and / or blocks in the flowcharts and / or block diagrams can be implemented by computer program instructions. These computer program instructions can be provided to the processors of general purpose computers, special purpose computers, embedded processors, or other programmable data processing devices to produce a machine, such that the instructions executed by the processors of the computer or other programmable data processing devices create means for implementing the functions specified in the flow Figure 1 one or more flows and / or blocks Figure 1 or means for implementing the functions specified in one or more blocks.

[0088] These computer program instructions can also be stored in a computer-readable memory that can direct a computer or other programmable data processing device to operate in a particular manner, such that the instructions stored in the computer-readable memory produce a manufacture including instruction means that implement the functions specified in the flow Figure 1 one or more flows and / or blocks Figure 1 or means for implementing the functions specified in one or more blocks.

[0089] These computer program instructions can also be loaded onto a computer or other programmable data processing device, such that a series of operational steps are executed on the computer or other programmable device to produce a computer-implemented process, so that the instructions executed on the computer or other programmable device provide steps for implementing the functions specified in the flow Figure 1 one or more flows and / or blocks Figure 1 or means for implementing the functions specified in one or more blocks.

[0090] Although the preferred embodiments of the present invention have been described, additional changes and modifications can be made to these embodiments by those skilled in the art once they learn of the basic inventive concept. Therefore, the appended claims are intended to be construed to include the preferred embodiments as well as all changes and modifications that fall within the scope of the present invention. Obviously, those skilled in the art can make various changes and variations to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, the present invention is also intended to include these modifications and variations.

Claims

1. An automated vacuum coating method based on image recognition, characterized in that: The following steps are involved: S1, obtaining initial surface state parameters of the coating target object before vacuum coating, and obtaining a surface quality index according to the initial surface state parameters, wherein the surface quality index is used to evaluate the surface quality state of the coating target object, and the initial surface state parameters are used to describe the surface state of the coating target object identified by image; S2, obtaining a position-related index of the coating target object according to the surface quality index, wherein the position-related index is used to evaluate the conformity of the coating target object to coating at a preset position point; S3, performing chemical property analysis on the coating target object based on the position-related index to obtain chemical property-related data of the coating target object, and obtaining an evaporation-related index based on the chemical property-related data, and comparing the evaporation-related index with a preset evaporation-related index range. If the evaporation-related index is not within the preset evaporation-related index range, adjusting the parameters of the coating device, otherwise recording the corresponding coating target object as an object to be coated and feeding back to a preset person, the chemical property-related data is used to describe the chemical property of the coating target object, and the evaporation-related index is used to evaluate the influence of the chemical property on the surface state of the coating target object; The specific process of obtaining the surface quality index is as follows: Acquire quality-related data of the coating target object at a preset position point by means of a quality measurement device in a standard time period, the quality measurement device comprising a pressure sensor and a laser rangefinder, the quality-related data comprising a standard positive pressure and a standard sampling height, the standard positive pressure representing the pressure applied by the coating device corresponding to the preset position point of the coating target object in the standard time period, the standard sampling height representing the height of the sampling point of the preset position point of the coating target object in the standard time period, and the standard time period representing a preset time period before vacuum coating; Obtaining a standard friction measurement value based on a standard normal pressure and a preset friction coefficient, and obtaining a standard roughness measurement value based on a standard sampling height; Obtaining a preset friction threshold, a preset roughness threshold, a first quality weight, and a second quality weight from a preset database, and obtaining a surface quality index by combining a standard friction measurement value and a standard roughness measurement value; The specific process of obtaining the location-related index is as follows: A1, compare the surface quality index corresponding to the preset position point with the preset quality range, and determine whether the surface quality index corresponding to the preset position point is within the preset quality range. If it is within the preset quality range, execute A2, otherwise feedback is given to the preset personnel; A2, obtaining position-related data of the coating target object at a preset position point by means of a position measuring device in a standard time period, wherein the position measuring device includes a film thickness monitor, an evaporation rate monitor and a laser scanner, and the position-related data includes a standard evaporation rate, a standard base area and a standard film thickness, wherein the standard evaporation rate represents the amount of material overflowed from the coating target object at the preset position point in the standard time period, the standard base area represents the surface area of ​​the coating target object at the preset position point in the standard time period, and the standard film thickness represents the thickness of the film layer of the coating target object at the preset position point in the standard time period; A3, obtaining a standard source-substrate distance measurement value according to position-related data, preset coating time and preset deposition efficiency; A4, obtaining a preset source-base distance threshold from a preset database, and obtaining a position-related index in combination with a standard source-base distance measurement value; The specific process of obtaining the chemical property related data is as follows: B1, comparing the position correlation index corresponding to the preset position point with the preset position correlation index range, and judging whether the position correlation index corresponding to the preset position point is within the preset position correlation index range. If the position correlation index is within the preset position correlation index range, judging that the coating target object meets the coating conditions, otherwise executing B2; B2, performing chemical property analysis at a preset position point corresponding to the position correlation index to obtain chemical property related data corresponding to the preset position point; The specific process of obtaining the evaporation-related index is as follows: Acquire evaporation-related data of the coating target object at a preset position point by an evaporation measuring device in a standard time period, the evaporation measuring device includes a mass flow meter, a timer and a vernier caliper, the evaporation-related data includes a standard evaporation mass, a standard evaporation area and a standard evaporation time, the standard evaporation mass represents the mass of evaporation of the coating target object at the preset position point in the standard time period, the standard evaporation area represents the area of ​​evaporation of the coating target object at the preset position point in the standard time period, and the standard evaporation time difference represents the time required for evaporation of the coating target object at the preset position point in the standard time period; Obtain standard evaporation rate measurements based on evaporation-related data; Obtaining a preset evaporation rate threshold from a preset database, and obtaining an evaporation-related index in combination with a standard evaporation rate measurement value; The specific process of obtaining the initial surface state parameters is as follows: Acquire first image data of the coating target object by using an image acquisition device, wherein the image acquisition device is used to acquire image information of the coating target object; Performing image preprocessing on the first image data to obtain second image data, wherein the image preprocessing is used to remove noise in the image and enhance image details; Performing image feature extraction on the second image data to obtain initial surface state parameters, wherein the image feature extraction is used to extract roughness, friction, source-substrate distance and evaporation rate of the coating target object; The surface quality index is calculated using the following formula: In the formula, represents the surface quality index of the nth preset position point on the surface of the coating target object in the mth standard time period, m=1,2,...r, m represents the number of the standard time period, r represents the total number of standard time periods, n=1,2,...s, n represents the number of the preset position point, s represents the total number of the preset position points, F mn represents the standard friction force measurement value at the nth preset position point on the surface of the coated target object in the mth standard time period, R m represents the standard roughness measurement value of the coating target object surface in the mth standard time period, F0 represents the preset friction threshold, R0 represents the preset roughness threshold, μ1 represents the first mass weight, μ2 represents the second mass weight, and e represents the natural constant; The position correlation index is calculated using the following formula: In the formula, represents the position correlation index of the nth preset position point on the surface of the coating target object in the mth standard time period, m=1,2,...r, m represents the number of the standard time period, r represents the total number of standard time periods, n=1,2,...s, n represents the number of the preset position point, s represents the total number of the preset position points, B mn represents the standard source-substrate distance measurement value of the nth preset position point on the surface of the coating target object in the mth standard time period, B0 represents the preset source-substrate distance threshold, and e represents a natural constant.

2. The automated vacuum coating method based on image recognition as claimed in claim 1, characterized in that: The evaporation-related index is calculated using the following formula: In the formula, represents the evaporation-related index of the nth preset position point on the surface of the coating target object in the mth standard time period, m=1,2,...r, m represents the number of the standard time period, r represents the total number of standard time periods, n=1,2,...s, n represents the number of the preset position point, s represents the total number of the preset position points, Q mn represents the standard evaporation rate measurement value of the nth preset position point on the surface of the coating target object in the mth standard time period, Q0 represents the preset evaporation rate threshold, and e represents the natural constant.

3. An automated vacuum coating system based on image recognition, which implements the automated vacuum coating method based on image recognition according to any one of claims 1 to 2, characterized in that: It includes a surface quality index acquisition module, a position-related index acquisition module and an evaporation-related index acquisition module; The surface quality index acquisition module is used to acquire initial surface state parameters of the coating target object before vacuum coating, and acquire the surface quality index according to the initial surface state parameters, wherein the surface quality index is used to evaluate the surface quality state of the coating target object, and the initial surface state parameters are used to describe the surface state of the coating target object identified by image recognition; The position-related index acquisition module is used to acquire the position-related index of the coating target object according to the surface quality index, and the position-related index is used to evaluate the conformity of the coating target object to be coated at a preset position point; The evaporation-related index acquisition module is used to perform chemical property analysis on the coating target object based on the position-related index to obtain chemical property-related data of the coating target object, and to obtain the evaporation-related index based on the chemical property-related data, and at the same time compare the evaporation-related index with a preset evaporation-related index range. If the evaporation-related index is not within the preset evaporation-related index range, the parameters of the coating device are adjusted, otherwise the corresponding coating target object is recorded as an object to be coated and fed back to the preset personnel, the chemical property-related data is used to describe the chemical properties of the coating target object, and the evaporation-related index is used to evaluate the influence of the chemical properties on the surface state of the coating target object.

Images