Substrate transfer device for transferring a substrate in a vacuum chamber

Abstract

The present invention relates to a substrate transfer apparatus which transfers a substrate in a vacuum chamber, including: a lifting robot including a lifting plate and 1st to nth lifting shafts, and being sealingly coupled to a vacuum chamber through-hole formed in a lower region of the vacuum chamber; a traveling robot including a traveling arm platform, a 1st traveling arm unit, a 2nd traveling arm unit, and a transfer robot coupling unit, and reciprocating the transfer robot coupling unit in the 1st linear direction by operation of a 1st traveling drive motor and a 2nd traveling drive motor; and a transfer robot which transfers a substrate, and is coupled to the transfer robot coupling unit.

Description

Technical Field

[0001] This invention relates to a substrate conveying device, specifically, to a substrate conveying device capable of conveying high-load substrates over long distances in a vacuum chamber. Background Technology

[0002] Typically, substrates such as semiconductor wafers, display devices, or thin-film solar cells are manufactured by performing various processes on the substrate. At this time, the substrate is processed after being loaded into a substrate processing apparatus that provides the optimal conditions required for each process. Furthermore, a mask is used as the substrate to form various patterns.

[0003] Currently, in order to improve productivity, cluster-type substrate processing devices capable of batch processing substrates have been developed and used.

[0004] The clustered substrate processing apparatus includes a load locking chamber for loading and unloading substrates, a transfer chamber for transporting substrates, and multiple process chambers for performing each process.

[0005] In addition, the substrate transfer robot is set in a vacuum transfer chamber, which can transfer the substrate from the load locking chamber to the transfer chamber, transfer the substrate from the transfer chamber to the load locking chamber, transfer the substrate between the transfer chambers, or transfer the substrate to introduce and withdraw it from the process chamber.

[0006] In recent years, in order to cope with the increasing size of substrates and improve substrate processing capabilities, research is being conducted on structures that can process two substrates in one process chamber or octagonal structures with four process chambers equally spaced in the transfer chamber, and quadrangular structures with process chambers located on both sides of the substrate transfer path in the transfer chamber.

[0007] In particular, when two substrates are placed in a process chamber, it may be unavoidable to move the position of the transfer robot in order to correspond to the offset of the position relative to each substrate and to correspond to the mounting position of each process chamber in the quadrangular structure.

[0008] Therefore, in recent years, in a vacuum chamber with a walking robot and a transfer robot mounted on it, the transfer robot is moved to a set position in the vacuum chamber by driving the walking robot, and then the transfer robot is driven to transfer the substrate.

[0009] However, in the existing substrate conveying device described above, when conveying a substrate with a high load over a long distance, the robot conveying the substrate will sag due to the high load.

[0010] Therefore, when a substrate that has tilted due to the robot's drop is placed on a processing station in the process room, the front of the substrate contacts the processing station first, resulting in slippage.

[0011] If the substrate slips beyond the preset error range, it will detach from the preset mounting position, requiring readjustment to return it to the correct position. This results in a time loss for readjustment. Summary of the Invention

[0012] The problem the invention aims to solve

[0013] The present invention aims to solve all the above-mentioned problems.

[0014] Another object of the present invention is to provide a substrate conveying device that can accurately convey a substrate under high load over a long distance.

[0015] Another object of the present invention is to provide a substrate conveying device that can reduce robot sagging when conveying high-load substrates over long distances.

[0016] Another object of the present invention is to provide a substrate conveying apparatus that can reduce substrate slippage in a processing station when conveying high-load substrates over long distances.

[0017] Another object of the present invention is to provide a substrate conveying device that can accurately position a substrate at a processing station when conveying a high-load substrate over a long distance.

[0018] Problem-solving methods

[0019] The features of this invention are used to achieve the objectives of this invention described above and the characteristic effects of this invention described later, and its structure is as follows.

[0020] According to an embodiment of the present invention, a substrate conveying device is provided, which conveys a substrate in a vacuum chamber. The device includes a lifting robot comprising a lifting plate and a first to an nth lifting shaft, and is sealed to a vacuum chamber through-hole formed in a lower region of the vacuum chamber. A first to an nth through-hole are formed on the lifting plate in a first linear direction on a plane. The lifting plate is formed below the vacuum chamber and is moved up and down by a lifting drive unit, where n is an integer greater than or equal to 2. One side end of each of the first to the nth lifting shafts is coupled to the top surface of the lifting plate, such that each... The hollow shaft corresponds to the center of each of the through holes a1_1 to a1_n, and its other end is located inside the vacuum chamber; the walking robot includes a walking arm platform, a first walking arm unit, a second walking arm unit, and a transfer robot assembly unit, and the transfer robot assembly unit is reciprocated in the first linear direction by the operation of the first walking drive motor and the second walking drive motor, wherein the walking arm platform forms the b1_1 to b1_n assembly holes, the b2 assembly hole, and the b3 assembly hole, the b1_1 to b1_n assembly holes, the b1_n ... The n-th connecting hole is formed in the first straight direction. Each of the connecting holes from the b1_1 to the b1_n is divided into an upper space and a lower space from the b1_1 to the b1_n, respectively, by each of the b1_1 to the b1_n locking members. Each of the upper spaces from the b1_1 to the b1_n can be sealed by the b1_1 to the b1_n cover. The b1_1 to the b1_n locking members are formed with a b1_1-th locking member corresponding to the hollow space of the first to the nth lifting shafts. The first through hole extends to the nth through hole; the second connecting hole is formed in the first front end region of the second straight direction perpendicular to the first straight direction, and is divided into an upper space and a lower space due to the second locking member, the lower space of the second being sealed by the second cover, wherein the second through hole is formed on the second locking member; the third connecting hole is formed in the other front end region of the second straight direction, and is divided into an upper space and a lower space due to the third locking member, the lower space of the second being sealed by the third cover, wherein the third through hole is formed on the third locking member;In this configuration, each of the other ends of the first lifting shaft inserted into each of the lower spaces from b1_1 to b1_n is fixedly connected to each of the locking members from b1_1 to b1_n. The first traveling arm unit includes a first traveling linkage arm and a second traveling linkage arm. A first traveling drive motor and a first reducer that is linked to the first traveling drive motor and reduces its speed to 1 / 2 are disposed within the sealed internal space of the first traveling linkage arm. A first driving shaft that is linked to the first reducer and forms a hollow structure is sealed in the first front end region of the first traveling linkage arm. The first_1 walking arm unit includes a first_1 output shaft that is linked to the first_1 drive shaft. A second driving shaft that is linked to the first walking drive motor and forms a hollow structure is sealed in the other front end region of the first_1 walking arm. A second output shaft that is linked to the first_2 drive shaft is also sealed in the first_1 walking arm. The first_1 output shaft is fixedly connected to the first_1 connector. The first_1 connector is inserted into the upper b2 space of the walking arm platform, thereby being fixedly connected to the b2 locking member. The first_2 front end region of the first_2 walking arm is fixedly connected to the first_2 output shaft of the first_1 walking arm. The second walking arm unit includes a second_1 walking link. The first travel link arm and the second travel linkage arm are provided. A second travel drive motor and a second reducer, which is linked to the second travel drive motor and reduces its speed to 1 / 2, are disposed within the sealed internal space of the second travel linkage arm. A hollow second drive shaft, linked to the second reducer, and a second output shaft, linked to the second drive shaft, are sealed and disposed in the second-first front end region of the second-first travel linkage arm. A hollow second drive shaft, linked to the second travel drive motor, and a second output shaft, linked to the second drive shaft, are sealed and disposed in the other front end region of the second-first travel linkage arm. The second output shaft is fixed. The first and second connectors are inserted into the upper b3 space of the walking arm platform, thereby fixing them to the b3 locking member; the second front end region of the second walking linkage arm is fixedly connected to the second output shaft of the second walking linkage arm; the second front end region of the transfer robot connecting unit is rotatably connected to the other front end region of the first and second walking linkage arm; the other front end region of the transfer robot connecting unit is rotatably connected to the other front end region of the second and second walking linkage arm; and a rotary drive motor is formed in the first central region of the transfer robot connecting unit; and;

[0021] A transfer robot, its transfer base plate, and is attached to the transfer robot attachment unit.

[0022] The lifting drive unit of the lifting robot includes: a first nut fixedly coupled to one side of the lifting plate; a second nut fixedly coupled to the other side corresponding to the first side; a first screw shaft formed in a vertical direction perpendicular to the first straight line and perpendicular to the ground, and rotated by coupling with the first nut; a second screw shaft formed in the straight direction and rotated by coupling with the second nut; a lifting drive motor providing driving force to rotate the first screw shaft and the second screw shaft; and a first belt and a second belt transmitting the driving force of the lifting drive motor to each of the first screw shaft and the second screw shaft.

[0023] The lifting drive unit of the lifting robot further includes: at least one first sliding guide formed on one side of the lifting plate and supporting the vertical movement direction of the lifting plate; and at least one second sliding guide formed on the other side of the lifting plate and supporting the vertical movement direction of the lifting plate.

[0024] The lifting robot further includes: a first cover having a second through hole (a2_1) to a2_n) formed thereon, and sealingly connected to the vacuum chamber through hole of the vacuum chamber, wherein each of the first to the nth lifting shafts is inserted into the second through hole (a2_1) to the third through hole (a2_n) in the first straight direction; and a first to the nth bellows, wherein each of the first to the nth lifting shafts is inserted therein, one end of which is connected to the top surface of the lifting plate, and the other end of which is connected to the first cover.

[0025] The transport robot assembly unit of the walking robot further includes: a flexible body, which, through a corresponding external force, changes the position of the first_2 walking link arm rotatably coupled to the position of the second ...

[0026] The flexible body includes: a flexible main body that is movable along the length direction of the transfer robot assembly unit from the interior of any one of the second front end regions to the second other front end regions, and rotatably coupled to any one of the first other front end regions of the first_2 walking link arm to the second other front end region of the second_2 walking link arm; at least one first slider formed on the top surface of the flexible body; at least one second slider whose one side slides along the length direction of the transfer robot assembly unit by being coupled to the first slider, and whose other side is fixedly coupled to the transfer robot assembly unit; and elastic members formed on both sides of the flexible main body along the movement paths inside any one of the second front end regions to the second other front end regions of the transfer robot assembly unit.

[0027] The walking arm platform of the walking robot further includes: a first wiring hole connecting the upper space of b1_k and the lower space of b2, wherein the upper space of b1_k is any one of the upper spaces of b1_1 to b1_n; and a second wiring hole connecting the upper space of b1_k and the lower space of b3.

[0028] The walking arm platform of the walking robot further includes: a first wiring hole 1_1, which connects from one side of the main body of the walking arm platform to an upper space b1_k, which is any one of the upper spaces b1_1 to b1_n; a second wiring hole 2_1, which connects from one side of the main body of the walking arm platform to the lower space b2; a first wiring hole 1_2, which connects from the other side of the main body of the walking arm platform to the upper space b1_k, with the other side of the main body of the walking arm platform symmetrical to one side of the main body of the walking arm platform, with a first straight line direction as a reference; a second wiring hole 2_2, which connects from the other side of the main body of the walking arm platform to the lower space b3; a first sealing cover, which seals the first wiring hole 1_1 and the second wiring hole 2_1 on one side of the main body of the conveying arm platform; and a second sealing cover, which seals the first wiring hole 1_2 and the second wiring hole 2_2 on one side of the main body of the conveying arm platform.

[0029] In the walking robot, the point where the line in the second straight direction connecting the center points of the b2 and b3 connecting holes in the walking arm platform intersects the center line of the length direction of the 1_1 walking link arm 2210 is called the 1_1 contact point; the point where the line in the second straight direction intersects the center line of the length direction of the 2_1 walking link arm is called the 1_2 contact point; and the point where the center line of the length direction of the 1_1 walking link arm intersects the center line of the length direction of the 1_2 walking link arm is called the 2_1 contact point. The point where the centerline of the first-first walking link arm intersects the centerline of the second-second walking link arm is called the second-second contact point. The point where the centerline of the first-second walking link arm intersects the centerline of the transfer robot assembly unit is called the third-first contact point. Similarly, when the point where the centerline of the second-second walking link arm intersects the centerline of the transfer robot assembly unit is called the third-second contact point, the distance between the first-first contact point and the first-second contact point is set accordingly. The distance between contact point _1 and the third_2 contact point is set similarly to the distance between contact point 1_1 and contact point 2_1, the distance between contact point 2_1 and contact point 3_1, the distance between contact point 1_2 and contact point 2_2, and the distance between contact point 2_2 and contact point 3_2. Similarly, the angle formed by the traveling arm platform and the first traveling linkage arm at contact point 1_1, and the angle formed by the traveling arm platform and the third traveling linkage arm at contact point 1_2 are also set. The absolute values ​​of the angles formed by the walking linkage arms are set in the same way as the angles formed by the first walking linkage arm and the first walking linkage arm at the second contact point, and the absolute values ​​of the angles formed by the second walking linkage arm and the second walking linkage arm at the second contact point. Similarly, the absolute values ​​of the angles formed by the first walking linkage arm and the transfer robot assembly unit at the third contact point, and the absolute values ​​of the angles formed by the second walking linkage arm and the transfer robot assembly unit at the third contact point are also set in the same way.

[0030] In the walking robot, the first walking drive motor and the second walking drive motor operate in the same way but rotate in opposite directions.

[0031] The transfer robot may include: a transfer arm platform, which includes a c1 connecting hole, a c2 connecting hole, a c3 connecting hole, a first 1-1 blade and a first 2-2 blade, and a second 1-1 blade and a second 2-2 blade, in a center line corresponding to the linear movement direction of the substrate moved by the transfer robot. The c1 connecting hole is formed in a second central region, which is a specific region. The c1 connecting hole is divided into an upper c1 space and a lower c1 space by a c1 locking member forming a c1 through hole, and the upper c1 space is sealed by a c1 cover. The c1 locking member corresponds to the hollow of the rotary drive shaft of the rotary drive motor of the transfer robot connecting unit. The c2 connecting hole is formed in a third front end region of a side region with the center line as a reference. The c2 connecting hole is divided into an upper c2 space and a lower c2 space by a c2 locking member forming a c2 through hole, and the c2 connecting hole is formed in a third front end region, which is ... The lower space of c2 is sealed by the c2 cover. The c3 connecting hole is formed in the third other front end region corresponding to the third front end region in the region on the other side with the center line as a reference. The c3 connecting hole is divided into the upper space of c3 and the lower space of c3 by the c3 locking member that forms the c3 through hole. The lower space of c3 is sealed by the c3 cover. The first blade and the first blade are formed in front of and behind the c2 connecting hole, respectively. The front is the direction in which the process chamber is located when the transfer robot is positioned to transfer the substrate to the process chamber combined with the vacuum chamber. The rear is the opposite direction of the front. The second blade and the second blade are formed in front of and behind the c3 connecting hole, respectively. The rotary drive shaft of the rotary drive motor inserted into the lower space of c1 is fixedly connected to the c1 locking member.The first transmission arm unit includes a first transmission linkage arm, a first transmission linkage arm, a first common linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, and a first end effector. A first transmission drive motor and a third reducer, which is linked to the first transmission drive motor and reduces its speed to half, are disposed within the sealed internal space of the first transmission linkage arm. A third drive shaft, which is linked to the third reducer and forms a hollow structure, and a third output shaft, which is linked to the third drive shaft, are sealed in the third front end region of the first transmission linkage arm. The third_1 front end region of the lever arm is sealed with a hollow third_2 drive shaft that is linked to the first transmission drive motor, and a third_2 output shaft that is linked to the third_2 drive shaft. The third_1 output shaft is fixedly connected to the second_1 connector. The second_1 connector is inserted into the upper c2 space of the transmission arm platform, thereby being fixedly connected to the c2 locking member. The third_2 front end region of the first_2 transmission linkage arm is fixedly connected to the third_2 output shaft of the first_1 transmission linkage arm through the first fixed connection shaft. The third central region of the first common linkage arm is rotatably connected to the first fixed connection shaft. The first_1 auxiliary linkage arm... Parallel to the first 1_1 transmission link arm, the 3_4 front end region of the first 1_1 auxiliary link arm is rotatably coupled to the first 1_1 blade of the transmission arm platform; the other front end region of the 3_4 of the first 1_1 auxiliary link arm is rotatably coupled to the 3_3 front end region of the first common link arm; the first 1_2 auxiliary link arm is parallel to the first 1_1 transmission link arm; the 3_5 front end region of the first 1_2 auxiliary link arm is rotatably coupled to the first 1_2 blade of the transmission arm platform; the other front end region of the 3_5 of the first 1_2 auxiliary link arm is rotatably coupled to the other front end region of the 3_3 of the first common link arm; the first 1_3 auxiliary link arm... The lever arm is parallel to the first 1_2 transmission link arm. The 3_6 front end region of the first 1_3 auxiliary link arm is rotatably connected to the other 3_3 front end region of the first common link arm. The first 1_4 auxiliary link arm is parallel to the first common link arm. The 3_7 front end region of the first 1_4 auxiliary link arm is rotatably connected to the other 3_6 front end region of the first 1_3 auxiliary link arm. The other 3_7 front end region of the first 1_4 auxiliary link arm is rotatably connected to the other 3_2 front end region of the first 1_2 transmission link arm. The first end effector is fixed to the other 3_7 front end region of the first 1_4 auxiliary link arm to support the base plate.and a second transmission arm unit, comprising a 2_1 transmission linkage arm, a 2_2 transmission linkage arm, a 2nd common linkage arm, a 2_1 auxiliary linkage arm, a 2_2 auxiliary linkage arm, a 2_3 auxiliary linkage arm, a 2_4 auxiliary linkage arm, and a 2nd end effector. A 2nd transmission drive motor and a 4th reducer, linked to the 2nd transmission drive motor and reducing its speed to 1 / 2, are disposed within the sealed internal space of the 2_1 transmission linkage arm. A 4_1 drive shaft, linked to the 4th reducer and forming a hollow structure, and a 4_1 output shaft, linked to the 4_1 drive shaft, are sealed in the 4_1 front end region of the 2_1 transmission linkage arm. The other front end region of the 4_1 transmission link arm is sealed with a hollow 4_2 drive shaft that is linked to the 2nd transmission drive motor, and a 4_2 output shaft that is linked to the 4_2 drive shaft. The 4_1 output shaft is fixedly connected to the 2_2 connector. The 2_2 connector is inserted into the upper space of the c3 of the transmission arm platform, thereby being fixedly connected to the c3 locking member. The front end region of the 4_2 transmission link arm is fixedly connected to the 4_2 output shaft of the 2_1 transmission link arm via a 2 fixed connection shaft. The 4th central region of the 2nd common link arm is rotatably connected to the 2nd fixed connection shaft. The 2_1 auxiliary link arm... The 2_1 auxiliary link arm is parallel to the 2_1 transfer link arm. The 4_4 front end region of the 2_1 auxiliary link arm is rotatably coupled to the 2_1 blade of the transfer arm platform. The other front end region of the 4_4 of the 2_1 auxiliary link arm is rotatably coupled to the 4_3 front end region of the 2nd common link arm. The 2_2 auxiliary link arm is parallel to the 2_1 transfer link arm. The 4_5 front end region of the 2_2 auxiliary link arm is rotatably coupled to the 2_2 blade of the transfer arm platform. The other front end region of the 4_5 of the 2_2 auxiliary link arm is rotatably coupled to the other front end region of the 4_3 of the 2nd common link arm. The 2_3 auxiliary link arm... The lever arm is parallel to the second-second transmission link arm. The fourth-sixth front end region of the second-third auxiliary link arm is rotatably connected to the other fourth-third front end region of the second common link arm. The second-fourth auxiliary link arm is parallel to the second common link arm. The fourth-seventh front end region of the second-fourth auxiliary link arm is rotatably connected to the other fourth-sixth front end region of the second-third auxiliary link arm. The other fourth-seventh front end region of the second-fourth auxiliary link arm is rotatably connected to the other fourth-second front end region of the second-second transmission link arm. The second end effector is fixed to the other fourth-seventh front end region of the second-fourth auxiliary link arm, thereby supporting the base plate.

[0032] By making the height of the second fixed coupling shaft higher than the height of the first fixed coupling shaft, the first end effector and the second end effector are located at different heights on the same path.

[0033] The conveyor arm platform may further include a third wiring hole and a fourth wiring hole, the third wiring hole connecting the upper space of c1 and the lower space of c2, and the fourth wiring hole connecting the upper space of c1 and the lower space of c3.

[0034] The conveyor arm platform includes an upper plate and a lower plate. The upper plate includes the first 1-1 blade, the first 2-2 blade, the second 1-1 blade, and the second 2-2 blade. The lower plate is coupled to the upper plate. A c1 upper coupling hole, serving as part of the c1 coupling hole, is formed in the second central region of the upper plate. A c2 upper coupling hole, serving as part of the c2 coupling hole, is formed in the third front end region of the upper plate. The c2 upper coupling hole is equipped with a c2 retaining member having a c2 through hole, thereby separating the internal space of the c2 upper coupling hole. A c3 coupling hole, serving as part of the c3 coupling hole, is formed in the other third front end region of the upper plate. An upper connecting hole is formed, and a c3 locking member with a c3 through hole is provided inside the upper connecting hole, thereby separating the internal space of the upper connecting hole. A lower connecting hole c1 is formed in the second central region of the lower plate as another part of the connecting hole c1, and a c1 locking member with a c1 through hole is provided inside the lower connecting hole c1, thereby separating the internal space of the lower connecting hole c1. A lower connecting hole c2 is formed in the third front end region of the lower plate as another part of the connecting hole c2, and a lower connecting hole c3 is formed in the third other front end region of the lower plate as another part of the connecting hole c3.

[0035] The bottom surface of the upper plate forms a third upper wiring groove and a fourth upper wiring groove. The third upper wiring groove connects the internal space of the upper connecting hole of c1 and the lower space of the upper connecting hole of c2. The fourth upper wiring groove connects the internal space of the upper connecting hole of c1 and the lower space of the upper connecting hole of c3. The top surface of the lower plate forms a third lower wiring groove and a fourth lower wiring groove. The third lower wiring groove connects the upper space of the lower connecting hole of c1 and the internal space of the lower connecting hole of c2. The fourth lower wiring groove connects the upper space of the lower connecting hole of c1 and the internal space of the lower connecting hole of c3.

[0036] Invention Effects

[0037] This invention provides a substrate conveying device for accurately conveying high-load substrates over long distances.

[0038] In addition, a substrate conveying device is provided that can reduce robot sagging when conveying high-load substrates over long distances.

[0039] In addition, a substrate conveying apparatus is provided that can reduce substrate slippage in a processing station when conveying high-load substrates over long distances.

[0040] In addition, a substrate conveying apparatus is provided that can accurately position a substrate at a processing station when conveying a high-load substrate over a long distance. Attached Figure Description

[0041] The following drawings, which are used to describe embodiments of the present invention, are only a part of the embodiments of the present invention, and those skilled in the art to which the present invention pertains (hereinafter referred to as "skilled persons") can obtain other drawings based on these drawings without any creative work.

[0042] Figure 1 This is a diagram illustrating another example of a clustered substrate processing apparatus equipped with a substrate transfer device according to an embodiment of the present invention.

[0043] Figure 2A and Figure 2B This is a schematic diagram of a substrate transfer device according to an embodiment of the present invention.

[0044] Figure 3A and Figure 3B This is a schematic diagram of a lifting robot in a substrate conveying device according to an embodiment of the present invention.

[0045] Figures 4A to 4C This is a schematic diagram of the walking arm platform of a walking robot in a substrate conveying device according to an embodiment of the present invention.

[0046] Figure 5 This is a schematic diagram of the first walking linkage arm of a walking robot in a substrate conveying device according to an embodiment of the present invention.

[0047] Figure 6 This is a schematic diagram of the flexible robot body of a walking robot in a substrate conveying device according to an embodiment of the present invention.

[0048] Figure 7 This is a schematic diagram of the linkage arm of a walking robot in a substrate conveying device according to an embodiment of the present invention.

[0049] Figure 8A and Figure 8B This is a schematic diagram of a transfer robot in a substrate transfer apparatus according to an embodiment of the present invention.

[0050] Figures 9A to 9CThis is a schematic diagram of the transfer arm platform of the transfer robot in a substrate transfer device according to an embodiment of the present invention.

[0051] Figure 10 This is a schematic diagram of the first transmission link arm of the transmission robot in a substrate transmission device according to an embodiment of the present invention.

[0052] Figure 11 This is a schematic diagram of the connection portion of the first 1st transfer link arm and the first 1st 2nd transfer link arm of the transfer robot in a substrate transfer device according to an embodiment of the present invention.

[0053] Explanation of reference numerals in the attached figures

[0054] TA: Substrate transfer device

[0055] 1000: Lifting Robot

[0056] 2000: Walking Robot

[0057] 3000: Teleportation Robot Detailed Implementation

[0058] The following detailed description of the invention refers to the accompanying drawings, which schematically illustrate specific embodiments in which the invention can be practiced to illustrate the objectives, technical solutions, and advantages of the invention. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention.

[0059] The following detailed description of the invention describes specific embodiments in which the invention can be practiced, with reference to the accompanying drawings. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that the various embodiments of the invention are different but not mutually exclusive. For example, specific shapes, structures, and characteristics described in this specification can be implemented by other embodiments without departing from the inventive concept and scope of the invention. Furthermore, it should be understood that the position or configuration of the constituent elements in each disclosed embodiment can be changed without departing from the inventive concept and scope of the invention. Therefore, the detailed description that follows is not intended to be limiting, and the scope of the invention is defined only by all the scopes equivalent to those stated in the claims and the appended claims, provided that appropriate description is possible. Similar reference numerals in the drawings refer to the same or similar functions in several respects.

[0060] To enable those skilled in the art to readily implement this invention, preferred embodiments of the invention will now be described in detail with reference to the accompanying drawings.

[0061] Figure 1 This is a schematic diagram of a clustered substrate processing apparatus equipped with a substrate conveying device according to an embodiment of the present invention.

[0062] Figure 1 The invention relates to a substrate processing apparatus in which a process chamber PC1 and PC2 are provided on each of the two sides of a vacuum chamber VC, which is a quadrangular transfer chamber. Two substrates can be arranged in each process chamber. A substrate transfer device TA is fixedly disposed at a specific position P1 in the vacuum chamber VC. A walking robot of the substrate transfer device TA moves the transfer robot to transfer the substrates so that the substrates correspond to the positions of each process chamber and the positions of the two substrates in each process chamber.

[0063] For example, in order to correspond to the first substrate position S1 in the first process chamber PC1, the walking robot of the substrate transfer device TA can move the transfer robot so that the transfer robot is located at the first position P2. The transfer robot of the substrate transfer device TA can load or unload a substrate at the first substrate position S1 by operating the end effector while facing the first substrate position S1 of the first process chamber PC1 through rotation operation.

[0064] In addition, in order to correspond to the second substrate position S2 in the first process chamber PC1, the walking robot of the substrate transfer device TA can move the transfer robot so that the transfer robot is located at the second position P3. The transfer robot of the substrate transfer device TA can load or unload the substrate at the second substrate position S2 by operating the end effector while facing the second substrate position S2 of the first process chamber PC1 through rotation operation.

[0065] The above Figure 1 An exemplary substrate processing apparatus with a quadrangular structure is shown, but the present invention is not limited thereto. In the state where the substrate transfer device TA is fixedly installed at a specific position in a vacuum chamber of various structures according to an embodiment of the present invention, the walking robot can make the transfer robot walk along various preset paths.

[0066] Figure 2A and Figure 2B This is a schematic diagram of a substrate transfer device TA according to an embodiment of the present invention.

[0067] Reference Figure 2A and Figure 2B The substrate conveying device TA may include a lifting robot 1000, a walking robot 2000 attached to the lifting robot 1000, and a conveying robot 3000 attached to the walking robot 2000.

[0068] First, the lifting robot 1000 can be located in the lower outer region of the housing, with its upper end sealed to the vacuum chamber through-hole (not shown). It can move the hollow first to nth lifting shafts 1200_1 and 1200_2 vertically. The housing seals the interior of the vacuum chamber VC, and the vacuum chamber through-hole is formed in the lower region of the housing of the vacuum chamber VC. Here, n is an integer greater than or equal to 2. Although only two lifting shafts are shown in the figure, the invention is not limited to this; the lifting shafts can be formed in a number greater than or equal to two. Furthermore, in the following figures, the components corresponding to the lifting shafts also correspond to two lifting shafts, but each component of the corresponding lifting shaft can be formed in a number corresponding to the number of lifting shafts formed.

[0069] Therefore, the lifting robot 1000 adjusts the vertical position of the conveying robot 3000, so that the conveying robot 3000 is positioned at a suitable height for loading or unloading substrates in the process room or the like.

[0070] For example, refer to Figure 3A and Figure 3B The lifting robot 1000 is described in further detail.

[0071] The lifting robot 1000 may include a lifting plate 1100, which is formed below the vacuum chamber and moves up and down by a lifting drive unit. The lifting plate 1100 may form through holes a1_1 to a1_n 1110_1 and 1110_2 in the first straight line direction L on the plane.

[0072] Furthermore, the lifting robot 1000 may include a first to an nth lifting shaft 1200_1, 1200_2. One side of each of the first to an nth lifting shaft 1200_1, 1200_2 is connected to the top surface of the lifting plate 1100, and the other side is located inside the vacuum chamber. The first to an nth lifting shaft 1200_1, 1200_2, which are hollow, can have one side connected to the top surface of the lifting plate 1100, so that each hollow shaft corresponds to the center of each of the a1_1 through hole to the a1_n through hole 1110_1, 1110_2.

[0073] On the other hand, the lifting drive unit of the lifting robot 1000 that moves the lifting plate 1100 up and down may include a first nut 1310_1 and a second nut (not shown). The first nut 1310_1 is fixedly connected to one side of the lifting plate 1100, and the second nut is fixedly connected to the other side of the lifting plate 1100 corresponding to one side of the lifting plate 1100. In this case, one side and the other side of the lifting plate 1100 may be symmetrical about the center of gravity of the lifting plate 1100, but are not limited to this.

[0074] Furthermore, each of the first nut 1310_1 and the second nut is rotatably coupled to the first screw shaft 1320_1 and the second screw shaft 1320_2, respectively, which are formed in a direction perpendicular to the first straight line direction L.

[0075] Furthermore, the lifting drive unit of the lifting robot 1000 may further include a lifting drive motor 1330, and may be provided with a first belt 1340_1 and a second belt (not shown). The lifting drive motor 1330 provides driving force to rotate the first screw shaft 1320_1 and the second screw shaft 1320_2. The first belt 1340_1 can transmit the driving force of the lifting drive motor 1330 to the first screw shaft 1320_1, and the second belt can transmit the driving force of the lifting drive motor 1330 to the second screw shaft 1320_2.

[0076] At this time, the first belt and the second belt can be synchronous belts. The first belt can be connected to synchronous pulleys connected to the drive shaft of the lifting drive motor 1330 and the first screw shaft 1320_1, respectively, and the second belt can be connected to synchronous pulleys connected to the drive shaft of the lifting drive motor 1330 and the second screw shaft 1320_2, respectively. Although it has been described that the driving force between the lifting drive motor and the screw shaft is transmitted by pulleys, the present invention is not limited to this, and various methods for transmitting driving force, such as gears, can be used.

[0077] Therefore, in the lifting drive unit of the lifting robot 1000, the first screw shaft and the second screw shaft rotate by the operation of the lifting drive motor, and thus the lifting plate 1100, which is coupled with the first nut and the second nut, moves up and down in accordance with the rotation direction of the lifting drive motor.

[0078] Furthermore, the lifting drive unit of the lifting robot 1000 may include at least one first sliding guide 1350_1 and at least one second sliding guide 1350_2. The first sliding guide 1350_1 is formed on one side of the lifting plate 1100 and supports the vertical movement direction of the lifting plate, while the second sliding guide 1350_2 is formed on the other side of the lifting plate 1100 and supports the vertical movement direction of the lifting plate. In this way, by forming a plurality of sliding guides formed on each side, the vertical movement direction of the lifting plate 1100 can be supported more stably.

[0079] Furthermore, the lifting robot 1000 can use the a-cover 1400 to seal the vacuum chamber through hole connected to the vacuum chamber, and the a-cover 1400 can form the a2_1 through hole to the a2_n through hole 1410_1, 1410_2. Each of the first lifting shaft to the nth lifting shaft 1200_1, 1200_2 is inserted into the a2_1 through hole to the a2_n through hole 1410_1, 1410_2 in the first straight line direction.

[0080] Furthermore, the lifting robot 1000 may include first to nth bellows 1500_1, 1500_2, each of the first to nth lifting shafts 1200_1, 1200_2 inserted into the first to nth bellows 1500_1, 1500_2. One end of the first to nth bellows 1500_1, 1500_2 is attached to the top surface of the lifting plate 1100, and the other end of the first to nth bellows 1500_1, 1500_2 is attached to the a-th cover 1400. Thus, the vacuum chamber is sealed from the external environment and maintains a vacuum due to the bellows. On the other hand, the above description describes bellows being provided on each of the first to nth lifting shafts; however, it is also possible to provide a single bellows with a diameter sufficient for all of the first to nth lifting shafts to be inserted.

[0081] Then, refer to again Figure 2B The walking robot 2000 may include a walking arm platform 2100, a first walking arm unit 2200 and a second walking arm unit 2300, and a transfer robot assembly unit 2400. The walking arm platform 2100 is coupled to the first to nth lifting axes 1200_1 and 1200_2 of the lifting robot 1000. The first walking arm unit 2200 and the second walking arm unit 2300 are symmetrically coupled to the walking arm platform 2100. The transfer robot assembly unit 2400 is coupled to the first walking arm unit 2200 and the second walking arm unit 2300 and a transfer robot 3000 for transferring a substrate is coupled thereto. The transfer robot assembly unit 2400 can move forward and backward through the operation of the first walking arm unit 2200 and the second walking arm unit 2300, thereby enabling the transfer robot 3000 to move within the vacuum chamber.

[0082] Therefore, with the walking robot 2000 fixed at a specific position in the vacuum chamber, the transfer robot assembly unit 2400 can be moved forward and backward by the operation of the first walking arm unit 2200 and the second walking arm unit 2300, so that the transfer robot 3000 attached to the transfer robot assembly unit 2400 can move, thereby placing the transfer robot 3000 at a set position, such as a process chamber for loading or unloading substrates. Furthermore, the position of the transfer robot 3000 in the height direction can be adjusted by the up and down movement of the lifting robot 1000, thereby enabling the transfer robot 3000 to load or unload substrates in the process chamber or the like.

[0083] The walking robot 2000 of the substrate conveying device according to an embodiment of the present invention is described in further detail as described above.

[0084] First, refer to Figures 4A to 4B The traveling arm platform 2100 may include the first b1_1 connecting hole to the second b1_n connecting hole 2110_1, 2110_2, the second b2 connecting hole 2120, and the third b3 connecting hole 2130. The first b1_1 connecting hole to the second b1_n connecting hole 2110_1, 2110_2 are formed in a first straight line direction L on the plane. The second b2 connecting hole 2120 is formed in a first front end region in a second straight line direction perpendicular to the first straight line direction L. The third b3 connecting hole 2130 is formed in another first front end region in the second straight line direction.

[0085] Each of the connecting holes 2110_1 and 2110_2 from the first connecting hole to the second connecting hole 2110_1 is divided into an upper space 2113 and a lower space 2114 from the first locking member to the second locking member, and an upper space (not shown) and a lower space (not shown) from the second locking member to the third locking member. Each of the upper spaces 2113 to the third locking member can be sealed by the covers 2111_1 and 2111_2 from the first cover to the third cover. The second locking member to the third locking member forms through holes 2111 to the third locking member corresponding to the hollow of the first lifting shaft to the nth lifting shaft of the lifting robot.

[0086] Furthermore, the b2 connecting hole 2120 is divided into an upper space 2123 and a lower space 2124 due to the b2 locking member, and the lower space 2124 can be sealed by the b2 cover 2121, wherein the b2 locking member forms a b2 through hole.

[0087] Furthermore, the b3 connecting hole 2130 is divided into an upper b3 space 2133 and a lower b3 space 2134 due to the b3 locking member, and the lower b3 space 2134 can be sealed by the b3 cover 2131, wherein the b3 locking member forms a b3 through hole.

[0088] Furthermore, the walking arm platform 2100 can be combined with the lifting robot. Specifically, when each of the other ends of the first lifting shaft to the other end of the nth lifting shaft is inserted into each of the lower spaces 2114 to the lower spaces 2110_1 and 2110_2 of the first to the nth lifting shaft, each of the other ends of the first lifting shaft to the other end of the nth lifting shaft can be fixedly combined with each of the locking members 2110_1 to 2110_2.

[0089] At this point, when each of the other ends of the first lifting shaft to the other end of the nth lifting shaft is fixedly connected to each of the b1_1 to b1_n locking members, the sealing performance of the fixed connection area can be improved by adding O-rings, gaskets, or other sealing elements. The technique of adding O-rings, gaskets, or other sealing elements is equally applicable to other connection units described later, and therefore will not be repeated in the following description.

[0090] Therefore, the external environment caused by the hollowness of the first to the nth lifting shafts can be sealed from the vacuum environment inside the vacuum chamber within the connecting holes 2110_1 and 2110_2 of the b1_1 to b1_n connecting holes.

[0091] On the other hand, wiring holes for inserting wiring into the first walking arm unit 2200 and the second walking arm unit 2300 can be formed on the walking arm platform 2100, wherein the wiring is inserted through the hollow of at least one of the first to nth lifting axes of the lifting robot.

[0092] That is, an upper space 2113 (b1_k) can be formed by connecting one side of the walking arm platform 2100 body as any one of the upper spaces b1_1 to b1_n. Figure 4A and Figure 4BAssuming the upper space of b1_k is the upper space of b1_1, the first wiring hole 2141 is connected to the lower space of b2 2124 from one side of the walking arm platform 2100 body, the first wiring hole 2142 is connected to the upper space of b1_k 2113 from the other side of the walking arm platform 2100 body, and the second wiring hole 2152 is connected to the lower space of b3 2134 from the other side of the walking arm platform 2100 body. With the first straight line direction L as the reference, the other side of the walking arm platform 2100 body is symmetrical to one side of the walking arm platform 2100 body.

[0093] In addition, to seal the wiring holes, a first sealing cover 2143 and a second sealing cover 2153 can be provided. The first sealing cover 2143 seals the first wiring hole 2141 and the second wiring hole 2142 on one side of the main body of the traveling arm platform 2100, and the second sealing cover 2153 seals the first wiring hole 2151 and the second wiring hole 2152 on the other side of the main body of the conveyor arm platform 200.

[0094] In addition, refer to Figure 4C As another example, wiring holes for inserting wiring into the first walking arm unit 2200 and the second walking arm unit 2300 can also be formed inside the main body of the walking arm platform 2100, wherein the wiring is inserted through the hollow of at least one of the first to nth lifting axes of the lifting robot.

[0095] That is, by forming the first wiring hole 2125 and the second wiring hole 2135 inside the main body of the traveling arm platform 2100, the internal sealing of the traveling arm platform 2100 can be achieved without setting an additional seal. The first wiring hole 2125 connects to the upper space 2113 of the b1_k (…). Figure 4C Assuming the upper space of b1_k is the upper space of b1_1 and the lower space of b2 is 2124, the upper space of b1_k is 2113, which is any one of the upper spaces of b1_1 to b1_n, and the second wiring hole 2135 connects the upper space of b1_k 2113 and the lower space of b3 2134.

[0096] Then, refer to again Figure 2B The first walking arm unit 2200 can be connected to the first walking arm unit 2200's first walking arm link arm 2210 via the b2 connection hole 2120, and the second walking arm unit 2300's second walking arm link arm 2310 can be connected to the second walking arm unit 2300 via the b3 connection hole 2130.

[0097] At this time, refer to Figure 5The first traveling arm unit 2200 has a sealed internal space for the first traveling link arm 2210. The first traveling drive motor 2211 and the first reducer 2212 can be installed in the sealed internal space. The first reducer 2212 is linked with the first traveling drive motor 2211 to reduce the speed to 1 / 2.

[0098] Furthermore, a hollow first-stage drive shaft 2213, linked to the first reducer 2212, and a first-stage output shaft 2214, linked to the first-stage drive shaft 2213, can be sealed in the first-stage front end region of the first-stage travel linkage arm 2210. A hollow first-stage drive shaft 2216, linked to the first travel drive motor 2211, and a first-stage output shaft 2217, linked to the first-stage drive shaft 2216, can be sealed in the other front end region of the first-stage travel linkage arm 2210. In this case, the linkage between the first travel drive motor 2211 and the first reducer 2212, the linkage between the first reducer 2212 and the first-stage drive shaft 2213, and the linkage between the first travel drive motor 2211 and the first-stage drive shaft 2216 can be implemented using pulleys, but the invention is not limited to this; various methods for transmitting rotational force, such as gears, can also be used. Furthermore, the first drive shaft 2213 and the first output shaft 2214, and the first drive shaft 2216 and the first output shaft 2217 can each be formed as a reducer with the same reduction ratio. Furthermore, the rotation directions of the first output shaft 2214 and the first output shaft 2217 can be opposite to each other. Furthermore, the first output shaft 2214 can be inserted into the upper b2 space 2123 of the b2 engagement hole 2120 of the traveling arm platform 2100, thereby being fixedly engaged with the b2 locking member. The first output shaft 2214 is located in the first front end region of the first traveling link arm 2210 of the first traveling arm unit 2200.

[0099] At this time, the first connecting member 2215 can be used to connect the first output shaft 2214 and the second locking member. The first connecting member 2215 is a tubular shaft and has a length extending from the junction of the walking arm platform 2100 and the first walking linkage arm 2210 to a length equal to the distance between the first output shaft 2214 and the second locking member. The two ends of the first connecting member 2215 can be fixedly connected to the first output shaft 2214 and the second locking member, respectively.

[0100] Furthermore, the second_1 traveling link arm 2310 of the second traveling arm unit 2300 can be connected with... Figure 5 The first traveling link arm 2210 of the first traveling arm unit 2200 described herein is similarly configured.

[0101] That is, the second_1 travel linkage arm 2310 of the second travel arm unit 2300 has a sealed internal space, and the second travel drive motor and the second reducer can be set in the sealed internal space. The second reducer is linked with the second travel drive motor to reduce the speed to 1 / 2.

[0102] Furthermore, a hollow 2_1 drive shaft, linked to the 2_1 reducer, and a 2_1 output shaft, linked to the 2_1 drive shaft, are sealed in the 2_1 front end region of the 2_1 travel linkage arm 2310. A hollow 2_2 drive shaft, linked to the 2_1 travel drive motor, and a 2_2 output shaft, linked to the 2_2 drive shaft, are sealed in the other 2_1 front end region of the 2_1 travel linkage arm 2310. In this case, the linkage between the 2_1 travel drive motor and the 2 reducer, the linkage between the 2 reducer and the 2_1 drive shaft, and the linkage between the 2_2 travel drive motor and the 2_2 drive shaft can be implemented using pulleys, but the invention is not limited to this; various methods for transmitting rotational force, such as gears, can also be used. Furthermore, the 2_1 drive shaft and the 2_1 output shaft, as well as the 2_2 drive shaft and the 2_2 output shaft, can each be formed as a reducer with the same reduction ratio. Furthermore, the rotation directions of the 2_1 output shaft and the 2_2 output shaft can be opposite to each other.

[0103] In addition, the second_1 output shaft 2214 can be inserted into the upper b3 space 2133 of the b3 engagement hole 2130 of the walking arm platform 2100, thereby fixing it to the b3 locking member. The second_1 output shaft 2214 is located in the second_1 front end region of the second_1 walking linkage arm 2310 of the second walking arm unit 2300.

[0104] At this time, the first and second connecting members can be used to connect the second and third output shafts and the third locking member. The first and second connecting members are tubular shafts and have a length extending from the junction of the walking arm platform 2100 and the second and third walking linkage arm 2310 to a length equal to the distance between the second and third output shafts and the third locking member. The two ends of the first and second connecting members can be fixedly connected to the second and third output shafts and the third locking member, respectively.

[0105] Then, the first-second front end region of the first-second walking link arm 2220 can be fixedly coupled to the first-second output shaft 2217 of the first-second walking link arm 2210 of the first walking arm unit 2200, and the second-second front end region of the second-second walking link arm 2320 can be fixedly coupled to the second-second output shaft of the second-second walking link arm 2310 of the second walking arm unit 2300.

[0106] At this time, the connector 2218 can be used to connect the first and second output shafts 2217 and the first and second front end regions. The connector 2218 is a tubular shaft and has a length extending from the junction of the first and second travel linkage arms 2210 and 2220 to a length equal to the distance between the junction areas of the first and second output shafts 2217 and the first and second front end regions. Both ends of the connector 2218 can be fixedly connected to the junction areas of the first and second output shafts 2217 and the first and second front end regions, respectively. Furthermore, the connector can be used to connect the second and second output shafts and the second and second front end regions. The connector is a tubular shaft and has a length extending from the junction of the second and second travel linkage arms 2310 and 2320 to a length equal to the distance between the junction areas of the second and second output shafts and the second and second front end regions, respectively. Both ends of the connector can be fixedly connected to the junction areas of the second and second output shafts and the second and second front end regions, respectively.

[0107] Then, refer to again Figure 2B The transfer robot assembly unit 2400 can be assembled to the first and second walking linkage arm 2220 and the second and second walking linkage arm 2320.

[0108] That is, the second front end region of the transfer robot assembly unit 2400 is rotatably coupled to the first and second other front end regions of the first and second walking linkage arm 2220, and the second other front end region of the transfer robot assembly unit 2400 is rotatably coupled to the second and second other front end regions of the second and second walking linkage arm 2320.

[0109] Furthermore, the first central region of the transfer robot assembly unit 2400 can be sealed to form a rotary drive motor (not shown), which includes a hollow rotary drive shaft 2410, and the transfer robot 3000 for transferring the substrate can be sealed to the hollow rotary drive shaft 2410.

[0110] Furthermore, a flexible body 2420 can be formed on any one of the front end regions of the second front end region to the second other front end region of the transfer robot assembly unit 2400. The flexible body 2420 can change the position of the first and second other front end regions of the first and second walking linkage arms 2220 to any one of the positions of the second and second other front end regions of the second and second walking linkage arms 2320 within the transfer robot assembly unit 2400 by corresponding external forces.

[0111] At this point, refer back. Figure 6The flexible body 2420 may include a flexible body 2421, which is formed inside any one of the second front end regions to the second other front end region of the transfer robot coupling unit 2400. Furthermore, the bottom surface of the flexible body 2421 can be rotatably coupled to any one of the first other front end regions of the first_2 walking link arm 2220 to the second other front end region of the second_2 walking link arm 2320. Figure 6 This is shown in its rotatable connection to the second travel link arm 2320. Furthermore, the flexible body 2421 can be configured to move along the length of the transport robot assembly unit 2400 within any one of the second front end regions to the second other front end region.

[0112] On the other hand, at least one first sliding member 2423 may be formed on the top surface of the flexible body 2421, and the first sliding member 2423 is formed in the length direction of the transfer robot connecting unit 2400.

[0113] Furthermore, at least one second slider 2424 can be coupled to each of at least one first slider 2423. In this case, one side of the second slider 2424 can slide along the length direction of the transfer robot coupling unit by being coupled to the first slider, and the other side can be fixedly coupled to the transfer robot coupling unit.

[0114] Furthermore, the flexible body 2420 can be configured to include elastic elements 2422, which are formed on both sides of the moving path of the flexible body 2421 within either the second front end region to the second other front end region of the transfer robot assembly unit. However, in addition to utilizing the elastic element technique, the flexible body 2420 according to the present invention can also be implemented by various means such as utilizing a hydraulically plied cylindrical shape.

[0115] On the other hand, refer to Figure 7 In the second straight direction of the traveling arm platform 2100 (its connection to the b2 connecting hole (corresponding to) Figure 5 The center point of 2120) and the b3 connecting hole (corresponding to Figure 5The point where the line from the center point of the first traveling link arm 2130 intersects the center line of the first traveling link arm 2210 along its length is called the first contact point C1. The point where the line from the second straight line of the traveling link arm platform 2100 intersects the center line of the second traveling link arm 2310 along its length is called the first contact point C2. The point where the center line of the first traveling link arm 2210 along its length intersects the center line of the first traveling link arm 2220 along its length is called the second contact point C3. The point where the center line of the second traveling link arm 2310 along its length intersects the center line of the second traveling link arm 2310 along its length is called the second contact point C3. The point where the centerlines of the 20-degree travel links intersect in the length direction is called the 2nd contact point C4. The point where the centerline of the 1st travel link 2220-degree travel link intersects with the centerline of the transfer robot assembly unit 2400 in the length direction is called the 3rd contact point C5. The point where the centerline of the 2nd travel link 2320-degree travel link intersects with the centerline of the transfer robot assembly unit 2400 in the length direction is called the 3rd contact point C6. Similarly, the distances between the 1st contact point C1 and the 1st contact point C2, and between the 3rd contact point C5 and the 3rd contact point C6 are also set. Furthermore, the distances between the 1st contact point C1 and the 2nd contact point C3, between the 2nd contact point C3 and the 3rd contact point C5, between the 1st contact point C2 and the 2nd contact point C4, and between the 2nd contact point C4 and the 3rd contact point C6 are also set in the same way.

[0116] Furthermore, the absolute values ​​of the angles formed by the walking arm platform 2100 and the first walking linkage arm 2210 at the first contact point C1 and the angles formed by the walking arm platform 2100 and the second walking linkage arm 2310 at the first contact point C2 are also set in the same way. The absolute values ​​of the angles formed by the first walking linkage arm 2210 and the first walking linkage arm 2220 at the second contact point C3 and the angles formed by the second walking linkage arm 2310 and the second walking linkage arm 2320 at the second contact point C4 are also set in the same way. The absolute values ​​of the angles formed by the first walking linkage arm 2220 and the transfer robot combination unit 2400 at the third contact point C5 and the angles formed by the second walking linkage arm 2320 and the transfer robot combination unit 2400 at the third contact point C6 are also set in the same way.

[0117] Thus, the walking robot 2000 can move the conveying robot 3000 by moving forward or backward in the first straight direction, wherein the conveying robot 3000 is supported by the conveying robot coupling unit 2400.

[0118] At this time, the first travel drive motor 2211 installed in the first travel linkage arm 2210 and the second travel motor installed in the second travel linkage arm 2310 can be operated in the same way but in opposite directions of rotation.

[0119] In addition, the first wiring and the second wiring are respectively disposed in the sealed space inside the walking robot 2000. The first wiring is used for the operation of the first walking drive motor 2211, and the second wiring is used for the operation of the second walking drive motor.

[0120] At this time, the first wiring can be inserted into the first travel drive motor 2211 through the hollow of at least one lifting shaft and the first drive shaft 2213 respectively, to seal from the internal space of the vacuum chamber, and the second wiring can be inserted into the second travel drive motor through the hollow of at least one lifting shaft and the second drive shaft respectively, to seal from the internal space of the vacuum chamber. On the other hand, the first wiring and the second wiring can branch from at least one lifting shaft into the first travel arm unit 2200 and the second travel arm unit 2300 respectively through wiring holes formed on the travel arm platform 2100.

[0121] The following describes in further detail a transfer robot 3000 of a substrate transfer apparatus according to an embodiment of the present invention.

[0122] Reference Figure 8A and Figure 8B The substrate transfer robot 3000 may include a transfer arm platform 3100, a first transfer arm unit 3200, and a second transfer arm unit 3300. The transfer arm platform 3100 is coupled to the transfer robot coupling unit 2400 of the walking robot 2000. The first transfer arm unit 3200 and the second transfer arm unit 3300 are coupled to the transfer arm platform 3100. A first end effector 3400 and a second end effector 3500 for supporting the substrate may be respectively coupled to the first transfer arm unit 3200 and the second transfer arm unit 3300. For reference, Figure 8A The diagram shows a state where a mask serving as a substrate is supported in the first end effector 3400 and a glass substrate serving as a substrate is supported in the second end effector 3500. Figure 8B This shows the state in which the clamps used to support the substrate in the first end effector 3400 and the second end effector 3500 have been removed.

[0123] Thus, the transfer robot 3000 travels within the vacuum chamber by means of the operation of the first and second walking arm units of the walking robot, thereby positioning itself in a specific location. When the first end effector 3400 or the second end effector 3500 is positioned for loading or unloading the substrate due to the lifting motion of the lifting robot, the substrate supported by the first end effector 3400 or the second end effector 3500 can be loaded or unloaded by the operation of the first transfer arm unit 3200 or the second transfer arm unit 3300.

[0124] Furthermore, the transfer arm platform 3100 may include a c1 connecting hole 3110, a c2 connecting hole 3120, and a c3 connecting hole 3130. When the linear movement direction of the first transfer arm unit 3200 or the second transfer arm unit 3300 is taken as a reference, which is the linear movement direction of the substrate moved by the transfer robot 3000, the center line CL of the transfer arm platform 3100 is bisected. The c1 connecting hole 3110 is formed in the second central region, which is a specific region. The c2 connecting hole 3120 is formed in the third front end region of one side region when the center line CL is taken as a reference. The c3 connecting hole 3130 is formed in the third other front end region of the other side region corresponding to the third front end region when the center line CL is taken as a reference.

[0125] Furthermore, in the transfer arm platform 3100, blades 1_1 3171 and 1_2 3172 for link connection are formed in front of and behind the c2 connection hole 3120, and blades 2_1 3181 and 2_2 3182 for link connection are formed in front of and behind the c3 connection hole 3130. At this time, "front" can refer to the direction of the process chamber when the transfer robot 3000 is positioned to transfer the substrate to the process chamber connected to the vacuum chamber, and "rear" can be the opposite direction of "front".

[0126] At this time, refer to Figure 9A The c1 connecting hole 3110 of the conveyor arm platform 3100 is divided into an upper c1 space 3113 and a lower c1 space 3114 by the c1 locking member 3112 forming the c1 through hole 3111 in the second central region, and the upper c1 space 3113 can be sealed by the c1 cover 3140, wherein the c1 locking member 3112 corresponds to the hollow of the rotary drive shaft of the rotary drive motor of the conveyor robot connecting unit.

[0127] Furthermore, the c2 engagement hole 3120 of the transfer arm platform 3100 is divided into an upper c2 space 3123 and a lower c2 space 3124 by the c2 locking member 3122 forming the c2 through hole 3121 in the third front end region, and the lower c2 space 3124 can be sealed by the c2 cover 3150.

[0128] Furthermore, the c3 engagement hole 3130 of the transfer arm platform 3100 is divided into an upper c3 space 3133 and a lower c3 space 3134 by the c3 locking member 3132 forming the c3 through hole 3131 in the third other front end region, and the lower c3 space 3134 can be sealed by the c3 cover 3160.

[0129] In addition, the transfer arm platform 3100 may include the aforementioned wiring holes, which are used to insert wiring that is hollowly inserted through the rotary drive shaft of the walking robot into the first transfer arm unit 3200 and the second transfer arm unit 3300.

[0130] That is, the interior of the conveyor arm platform 3100 can form a third wiring hole H110 and a fourth wiring hole H120. The third wiring hole H110 connects the upper space 3113 of c1 and the lower space 3124 of c2, and the fourth wiring hole H120 connects the upper space 3113 of c1 and the lower space 3134 of c3.

[0131] For example, in addition to the above Figure 9A In addition, refer to Figure 9B and Figure 9C The conveyor arm platform 3100 can be formed by combining an upper plate 3100a and a lower plate 3100b. The upper plate 3100a includes a first blade 3171, a first blade 3172, a second blade 3181, and a second blade 3182.

[0132] In the second central region of the upper plate 3100a, a c1 upper joint hole 3110_1 is formed as part of the c1 joint hole; in the third front end region, a c2 upper joint hole 3120_1 is formed as part of the c2 joint hole; and in the third other front end region, a c3 upper joint hole 3130_1 is formed as part of the c3 joint hole.

[0133] Furthermore, a c2 locking member 3122 is formed inside the upper c2 connecting hole 3120_1, thereby separating the internal space of the upper c2 connecting hole 3120_1. A c3 locking member 3132 is formed inside the upper c3 connecting hole 3130_1, thereby separating the internal space of the upper c3 connecting hole 3130_1. A c2 through hole 3121 is formed on the c2 locking member 3122, and a c3 through hole 3131 is formed on the c3 locking member 3132.

[0134] In addition, the bottom surface of the upper plate 3100a forms a third upper wiring groove H110_1 and a fourth upper wiring groove H120_1. The third upper wiring groove H110_1 connects the internal space of the c1 upper connecting hole 3110_1 and the lower space of the c2 upper connecting hole 3120_1. The fourth upper wiring groove H120_1 connects the internal space of the c1 upper connecting hole 3110_1 and the lower space of the c3 upper connecting hole 3130_1.

[0135] On the other hand, a lower c1 connecting hole 3110_2, which is another part of the c1 connecting hole, is formed in the second central region of the lower plate 3100b, a lower c2 connecting hole 3120_2, which is another part of the c2 connecting hole, is formed in the third front end region, and a lower c3 connecting hole 3130_2, which is another part of the c3 connecting hole, is formed in the third other front end region.

[0136] Furthermore, a c1 locking member 3112 is formed inside the lower c1 connecting hole 3110_2, thereby separating the internal space of the lower c1 connecting hole 3110_2, wherein a c1 through hole 3111 is formed on the c1 locking member 3112.

[0137] In addition, the top surface of the lower plate 3100b forms a third lower wiring groove H110_2 and a fourth lower wiring groove H120_2. The third lower wiring groove H110_2 connects the upper space of the lower connecting hole 3110_2 of c1 and the inner space of the lower connecting hole 3120_2 of c2. The fourth lower wiring groove H120_2 connects the upper space of the lower connecting hole 3110_2 of c1 and the inner space of the lower connecting hole 3130_2 of c3.

[0138] Therefore, by combining the upper plate 3100a and the lower plate 3100b, the c1 connecting hole 3110 can be formed by combining the upper connecting hole 3110_1 and the lower connecting hole 3110_2 of c1; the c2 connecting hole 3120 can be formed by combining the upper connecting hole 3120_1 and the lower connecting hole 3120_2 of c2; and the c3 connecting hole 3130 can be formed by combining the upper connecting hole 3130_1 and the lower connecting hole 3130_2 of c3. Furthermore, by combining the upper plate 3100a and the lower plate 3100b, the third wiring hole H110 can be formed by combining the third upper wiring groove H110_1 and the third lower wiring groove H110_2; and the fourth wiring hole H120 can be formed by combining the fourth upper wiring groove H120_1 and the fourth lower wiring groove H120_2.

[0139] Re-reference Figure 8A and Figure 8BThe conveyor arm platform 3100 can be integrated with a walking robot. Specifically, by inserting the rotary drive shaft of the rotary drive motor of the conveyor robot integration unit of the walking robot into the lower c1 space of the c1 integration hole 3110, the rotary drive shaft can be fixedly integrated with the c1 locking member. At this time, when fixing the rotary drive shaft to the c1 locking member, the sealing performance of the fixed integration area can be improved by adding O-rings, gaskets, or other sealing components. The technique of adding O-rings, gaskets, or other sealing components is also applicable to other integration units described later, and therefore will not be repeated in the following description.

[0140] Therefore, the external environment caused by the hollowness of the rotary drive shaft can be sealed from the vacuum environment inside the vacuum chamber through the c1 connecting hole 3110.

[0141] Furthermore, the first transmission link arm 3210 of the first transmission arm unit 3200 can be coupled to the c2 coupling hole 3120 of the transmission arm platform 3100, and the second transmission link arm 3310 of the second transmission arm unit 3300 can be coupled to the c3 coupling hole 3130 of the transmission arm platform 3100.

[0142] At this time, refer to Figure 10 The first transmission arm unit 3200 has a sealed internal space. The first transmission drive motor 3211 and the third reducer 3212 can be installed in the sealed internal space. The third reducer 3212 reduces the speed to 1 / 2 by linkage with the first transmission drive motor 3211.

[0143] Furthermore, a hollow third-first drive shaft 3213, which is linked to the third reducer 3212, and a third-first output shaft 3214, which is linked to the third drive shaft 3213, are sealed in the third-first front end region of the first-first transmission link arm 3210. A hollow third-second drive shaft 3216, which is linked to the first transmission drive motor 3211, and a third-second output shaft 3217, which is linked to the third drive shaft 3216, are sealed in the third-first other front end region of the first-first transmission link arm 3210. At this time, the linkage between the first transmission drive motor 3211 and the third reducer 3212, the linkage between the third reducer 3212 and the third-first drive shaft 3213, and the linkage between the first transmission drive motor 3211 and the third-second drive shaft 3216 can be realized by pulleys, but the present invention is not limited to this, and various methods for transmitting rotational force, such as gears, can also be used. Furthermore, the third drive shaft 3213 and the third output shaft 3214, and the third drive shaft 3216 and the third output shaft 3217 can each be configured as a reducer with the same reduction ratio. Additionally, the rotation directions of the third output shaft 3214 and the third output shaft 3217 can be opposite to each other.

[0144] Re-reference Figure 8A and Figure 8B The 3_1 output shaft, located in the 3_1 front end region of the 1_1 transmission link arm 3210 of the 1st transmission arm unit 3200, can be fixedly coupled to the c2 locking member by inserting it into the c2 upper space of the c2 coupling hole 3120 of the transmission arm platform 3100.

[0145] At this time, the 2_1 connector ( Figure 10 3215) can be used for the connection of the 3_1 output shaft and the c2 locking member. The 2_1 connecting member is a tubular shaft and has a length extending from the junction of the transmission arm platform 3100 and the 1_1 transmission link arm 3210 to a length equal to the distance between the 3_1 output shaft and the c2 locking member. The two ends of the 2_1 connecting member can be fixedly connected to the 3_1 output shaft and the c2 locking member, respectively.

[0146] Furthermore, the third-second front end region of the first-second transmission link arm 3220 can be fixedly coupled to the third-second output shaft of the first-first transmission link arm 3210 of the first transmission arm unit 3200.

[0147] At this time, the first fixed coupling shaft ( Figure 10 3218) can be used for the connection of the 3210 of the first transmission link arm 3210 and the 3210 of the front end region. The first fixed connection shaft is a tubular shaft and has a length extending from the connection of the first transmission link arm 3210 and the first transmission link arm 3220 to a length equal to the distance between the connection regions of the 3210 of the first transmission link arm 3210 and the 3210 of the front end region. The two ends of the first fixed connection shaft can be fixedly connected to the connection regions of the 3210 of the first transmission link arm 3210 and the 3210 of the front end region, respectively.

[0148] In addition, the first common linkage arm 3230 can be disposed in the joint area of ​​the first transmission linkage arm 3210 and the first transmission linkage arm 3220, that is, the joint area of ​​the third output shaft and the third front end area.

[0149] That is, refer to Figure 11 The third central region of the first common linkage arm 3230 is rotatably coupled to the first fixed coupling shaft 3218, which is coupled to the third-second output shaft 3217 and the third-second front end region.

[0150] In addition, re-reference Figure 8A and Figure 8BThe first transmission arm unit 3200 may include a first auxiliary linkage arm 3240, which is parallel to the first transmission linkage arm 3210. The third and fourth front end regions of the first auxiliary linkage arm 3240 are rotatably connected to the first blade 3171 of the transmission arm platform 3100, and the third and fourth other front end regions of the first auxiliary linkage arm 3240 are rotatably connected to the third and third front end regions of the first common linkage arm 3230.

[0151] In addition, the first transfer arm unit 3200 may include a first-second auxiliary linkage arm 3250, which is parallel to the first-first transfer linkage arm 3210. The third-fifth front end region of the first-second auxiliary linkage arm 3250 can be rotatably coupled to the first-second blade 3172 of the transfer arm platform 3100, and the third-fifth other front end region of the first-second auxiliary linkage arm 3250 can be rotatably coupled to the third-third other front end region of the first common linkage arm 3230.

[0152] Therefore, two single parallel links can be formed in the region of the first transmission link arm 3210, forming a double parallel link with the first transmission link arm 3210 as the reference.

[0153] That is, the joint where the 3_1 front end region of the 1_1 transmission link arm 3210 and the c2 engagement hole 3120 of the transmission arm platform 3100 are joined, and the joint where the 3_4 front end region of the 1_1 auxiliary link arm 3240 and the 1_1 blade 3171 of the transmission arm platform 3100 are joined, forms a frame; the 1_1 transmission link arm 3210 forms an input link; the joint where the 3_1 other front end region of the 1_1 transmission link arm 3210 and the 3rd center region of the 1st common link arm 3230 are joined, and the joint where the 3_3 front end region of the 1st common link arm 3230 and the 3_4 other front end region of the 1_1 auxiliary link arm 3240 are joined, forms a connecting arm; and the 1_1 auxiliary link arm 3240 forms a follower, thereby constituting a single parallel link. Here, "frame" is a concept that may or may not physically exist. It is a predetermined reference line or reference plane that fixes one end of the input link and one end of the driven link that constitute the parallel link. The term "frame" mentioned below should be interpreted in a similar way.

[0154] Furthermore, the joint where the 3_1 front end region of the 1_1 transmission link arm 3210 and the c2 engagement hole 3120 of the transmission arm platform 3100 are joined, and the joint where the 3_5 front end region of the 1_2 auxiliary link arm 3250 and the 1_2 blade 3172 of the transmission arm platform 3100 are joined, forms a frame. The 1_1 transmission link arm 3210 forms an input link. The joint where the 3_1 other front end region of the 1_1 transmission link arm 3210 and the 3rd center region of the 1st common link arm 3230 are joined, and the joint where the 3_3 other front end region of the 1st common link arm 3230 and the 3_5 other front end region of the 1_2 auxiliary link arm 3250 are joined, forms a connecting arm. The 1_2 auxiliary link arm 3250 forms a follower, thereby constituting another single parallel link.

[0155] By using the dual parallel linkages as described above, vibration and / or disturbance of the first end effector 3400 on the substrate transport path can be reduced.

[0156] Furthermore, the first transmission arm unit 3200 may include a first-third auxiliary linkage arm 3260, which is parallel to the first-second transmission linkage arm 3220. The third-sixth front end region of the first-third auxiliary linkage arm 3260 can be rotatably coupled to the third-third other front end region of the first common linkage arm 3230. In this case, a joint that connects the third-sixth front end region of the first-third auxiliary linkage arm 3260 and the third-third other front end region of the first common linkage arm 3230, as well as the joint that connects the third-fifth other front end region of the first common linkage arm 3230 and the third-third other front end region of the first common linkage arm 3230, can be formed at the same or different positions.

[0157] In addition, the first transmission arm unit 3200 may include a first-fourth auxiliary linkage arm 3270, which is parallel to the first common linkage arm 3230. The third-seventh front end region of the first-fourth auxiliary linkage arm 3270 can be rotatably connected to the third-sixth front end region of the first-third auxiliary linkage arm 3260, and the third-seventh front end region of the first-fourth auxiliary linkage arm 3270 can be rotatably connected to the third-second front end region of the first-second transmission linkage arm 3220.

[0158] Furthermore, the first transfer arm unit 3200 may include a first end effector 3400, which may be fixed to the third-seventh other front end region of the first-fourth auxiliary linkage arm 3270 to support the substrate. For reference, in Figure 8B In this process, the clamp plate of the first end effector 3400 used to fix the support base plate is integrated with the first-fourth auxiliary linkage arm 3270.

[0159] The first transfer arm unit 3200 configured as described above can enable the first end effector 3400 to move back and forth in a straight line by means of each transfer arm and auxiliary arm, thereby loading or unloading the substrate at a set position by means of the first end effector 3400.

[0160] In addition, re-reference Figure 8A and Figure 8B The second transfer arm unit 3300 can be configured similarly to the first transfer arm unit 3200 and can be set on the transfer arm platform 3100 so that it is symmetrical with respect to the center line CL of the transfer arm platform 3100.

[0161] That is, the second transmission link arm 3310 of the second transmission arm unit 3300 has a sealed internal space, and the second transmission drive motor and the fourth reducer can be installed in the sealed internal space. The fourth reducer is linked with the second transmission drive motor to reduce the speed to 1 / 2.

[0162] Furthermore, a hollow 4_1 drive shaft, linked to the 4th reducer, and a 4_1 output shaft, linked to the 4_1 drive shaft, are sealed in the 4_1 front end region of the 2_1 transmission link arm 3310. A hollow 4_2 drive shaft, linked to the 2nd transmission drive motor, and a 4_2 output shaft, linked to the 4_2 drive shaft, are sealed in the other 4_1 front end region of the 2_1 transmission link arm 3310. In this case, the linkage between the 2nd transmission drive motor and the 4th reducer, the linkage between the 4th reducer and the 4_1 drive shaft, and the linkage between the 2nd transmission drive motor and the 4_2 drive shaft can each be implemented using pulleys. However, the invention is not limited to this; various methods for transmitting rotational force, such as gears, can be used. Additionally, the 4_1 drive shaft and 4_1 output shaft, and the 4_2 drive shaft and 4_2 output shaft, can each be formed as a reducer with the same reduction ratio. Furthermore, the rotation directions of the 4_1 output shaft and the 4_2 output shaft can be opposite to each other.

[0163] In addition, the 4_1 output shaft can be inserted into the upper space of the c3 of the c3 engagement hole 3130 of the transmission arm platform 3100, thereby fixing it to the c3 locking member. The 4_1 output shaft is located in the 4_1 front end area of ​​the 2_1 transmission link arm 3310 of the 2nd transmission arm unit 3300.

[0164] At this time, the 2_2 connector can be used to connect the 4_1 output shaft and the c3 locking member. The 2_2 connector is a tubular shaft and has a length extending from the junction of the transmission arm platform 3100 and the 2_1 transmission link arm 3310 to a length equal to the distance between the 4_1 output shaft and the c3 locking member. The two ends of the 2_2 connector can be fixedly connected to the 4_1 output shaft and the c3 locking member, respectively.

[0165] Furthermore, the fourth front end region of the second transmission link arm 3320 can be fixedly coupled to the fourth output shaft of the second transmission link arm 3310 of the second transmission arm unit 3300.

[0166] At this time, the second fixed coupling shaft 3318 can be used to connect the fourth output shaft of the second-first transmission link arm 3310 and the fourth front end region of the second-second transmission link arm 3320. The second fixed coupling shaft 3318 is a tubular shaft and has a length extending from the connection point of the second-first transmission link arm 3310 and the second-second transmission link arm 3320 to a length equal to the distance between the connection area of ​​the fourth output shaft and the fourth front end region. The two ends of the second fixed coupling shaft 3318 can be fixedly connected to the connection area of ​​the fourth output shaft and the fourth front end region, respectively. Furthermore, by making the height of the second fixed coupling shaft 3318 higher than the height of the first fixed coupling shaft, the first end effector 3400 of the first transmission arm unit 3200 and the second end effector 3500 of the second transmission arm unit 3300 can be located at different heights on the same path. The second fixed coupling shaft 3318 connects the second-first transmission link arm 3310 and the second-second transmission link arm 3320 of the second transmission arm unit 3300, and the first fixed coupling shaft connects the first-first transmission link arm 3210 and the first-second transmission link arm 3220 of the first transmission arm unit 3200. However, the invention is not limited to this; the height of the first fixed coupling shaft can also be higher than the height of the second fixed coupling shaft.

[0167] Then, the second common linkage arm 3330 can be set in the joint area of ​​the second_1 transmission linkage arm 3310 and the second_2 transmission linkage arm 3320, that is, the joint area of ​​the fourth_2 output shaft and the fourth_2 front end area.

[0168] That is, the fourth central region of the second common linkage arm 3330 can be rotatably coupled to the second fixed coupling shaft, which is coupled to the fourth output shaft and the fourth front end region.

[0169] In addition, the second transfer arm unit 3300 may include a second auxiliary linkage arm 3340, which is parallel to the second transfer linkage arm 3310. The fourth front end region is rotatably connected to the second blade 3181 of the transfer arm platform 3100, and the other front end region of the fourth is rotatably connected to the fourth front end region of the second common linkage arm 3330.

[0170] In addition, the second transmission arm unit 3300 may include a second auxiliary linkage arm 3350, which is parallel to the second transmission linkage arm 3310. The fourth and fifth front end regions of the second auxiliary linkage arm 3350 can be rotatably coupled to the second blade 3182 of the transmission arm platform 3100, and the other fourth and fifth front end regions of the second auxiliary linkage arm 3350 can be rotatably coupled to the other fourth and third front end regions of the second common linkage arm 3330.

[0171] Therefore, two single parallel links can be formed in the region of the 2_1 transmission link arm 3310, forming a double parallel link with the 2_1 transmission link arm 3310 as the reference.

[0172] That is, the joint where the 4_1 front end region of the 2_1 transmission link arm 3310 and the c3 engagement hole 3130 of the transmission arm platform 3100 are joined, and the joint where the 4_4 front end region of the 2_1 auxiliary link arm 3340 and the 2_1 blade 3181 of the transmission arm platform 3100 are joined, forms a frame; the 2_1 transmission link arm 3310 forms an input link; the joint where the 4_1 other front end region of the 2_1 transmission link arm 3310 and the 4th center region of the 2nd common link arm 3330 are joined, and the joint where the 4_3 front end region of the 2nd common link arm 3330 and the 4_4 other front end region of the 2_1 auxiliary link arm 3340 are joined, forms a connecting arm; and the 2_1 auxiliary link arm 3340 forms a follower, thereby constituting a single parallel link.

[0173] Furthermore, the joint where the 4_1 front end region of the 2_1 transmission link arm 3310 and the c3 engagement hole 3130 of the transmission arm platform 3100 are joined, and the joint where the 4_5 front end region of the 2_2 auxiliary link arm 3350 and the 2_2 blade 3182 of the transmission arm platform 3100 are joined, forms a frame. The 2_1 transmission link arm 3310 forms an input link. The joint where the 4_1 other front end region of the 2_1 transmission link arm 3310 and the 4th center region of the 2nd common link arm 3330 are joined, and the joint where the 4_3 other front end region of the 2nd common link arm 3330 and the 4_5 other front end region of the 2_2 auxiliary link arm 3350 are joined, forms a connecting arm. The 2_2 auxiliary link arm 3350 forms a follower, thereby constituting another single parallel link.

[0174] By using the dual parallel linkages as described above, vibration and / or disturbance of the second end effector 3500 on the substrate transport path can be reduced.

[0175] Furthermore, the second transmission arm unit 3300 may include a second-third auxiliary linkage arm 3360, which is parallel to the second-second transmission linkage arm 3320. The fourth-sixth front end region is rotatably coupled to the fourth-third other front end region of the second common linkage arm 3330. In this case, a joint connecting the fourth-sixth front end region of the second-third auxiliary linkage arm 3360 and the fourth-third other front end region of the second common linkage arm 3330, as well as the joint connecting the fourth-fifth other front end region of the second-second auxiliary linkage arm 3350 and the fourth-third other front end region of the second common linkage arm 3330, can be formed in the same or different positions.

[0176] In addition, the second transmission arm unit 3300 may include a second-fourth auxiliary linkage arm 3370, which is parallel to the second common linkage arm 3330. The fourth-seventh front end region can be rotatably coupled to the fourth-sixth other front end region of the second-third auxiliary linkage arm 3360, and the fourth-seventh other front end region can be rotatably coupled to the fourth-seventh other front end region of the second-second transmission linkage arm 3320.

[0177] Furthermore, the second transfer arm unit 3300 may include a second end effector 3500, which may be fixed to the fourth-seventh other front end region of the second-fourth auxiliary linkage arm 3370 to support the substrate. For reference, in Figure 8BIn the second end effector 3500, a plate that forms a clamp for fixing the support substrate is attached to the second auxiliary link arm 3370, thereby fixing the plate of the clamp for fixing the support substrate in the second end effector 3500 to the fourth and seventh other front end regions of the second auxiliary link arm 3370.

[0178] The second transfer arm unit 3300 configured as described above can enable the second end effector 3500 to move back and forth in a straight line by means of each transfer arm and auxiliary arm, thereby loading or unloading the substrate at a set position by means of the second end effector 3500.

[0179] At this time, the third front end region of the first transmission link arm 3210 of the first transmission arm unit 3200 and the fourth front end region of the second transmission link arm 3310 of the second transmission arm unit 3300 can be located in the front or rear region of the transmission arm platform 3100.

[0180] Alternatively, the third front end region of the first transmission link arm 3210 of the first transmission arm unit 3200 can be located in the front region of the transmission arm platform 3100, and the fourth front end region of the second transmission link arm 3310 of the second transmission arm unit 3300 can be located in the rear region of the transmission arm platform 3100.

[0181] In addition, the third and fourth wirings are respectively configured in the sealed space inside the conveyor robot 3000. The third wiring is used for the operation of the first conveyor drive motor 3211, and the fourth wiring is used for the operation of the second conveyor drive motor.

[0182] At this time, the third wiring can be inserted into the first transfer drive motor 3211 through the hollow of each of at least one lifting shaft of the lifting robot 1000, the first drive shaft 2213, the first drive shaft 2216, the rotary drive shaft 2410 of the walking robot 2000, and the third drive shaft 3213 of the transfer robot 3000, thereby sealing it from the internal space of the vacuum chamber. The fourth wiring can be inserted into the second transfer drive motor through the hollow of each of at least one lifting shaft of the lifting robot 1000, the second drive shaft 21, the second drive shaft 2216, the rotary drive shaft 2410 of the walking robot 2000, and the fourth drive shaft 41 of the transfer robot 3000, thereby sealing it from the internal space of the vacuum chamber. On the other hand, the third and fourth wirings can branch from the rotary drive shaft 2410 into the first transfer arm unit 3200 and the second transfer arm unit 3300, respectively, through the wiring holes formed in the transfer arm platform 3100.

[0183] The substrate conveying device according to an embodiment of the present invention, configured as described above, improves the sag of the robot when conveying a high-load substrate over a long distance by forming a plurality of lifting axes of a lifting robot in a first straight direction, attaching a walking arm platform of a walking robot to the plurality of lifting axes, and attaching each walking arm unit to a symmetrical two-sided region with the first straight direction in which the plurality of lifting axes of the walking arm platform are attached as a reference.

[0184] Therefore, according to an embodiment of the present invention, the substrate conveying apparatus improves the sagging caused by high-load substrates, thereby enabling the high-load substrates to be conveyed to the accurate position in the process chamber.

[0185] The present invention has been described above with reference to specific constituent elements and limited embodiments, as well as the accompanying drawings. However, this is only to help to fully understand the present invention, and the present invention is not limited thereto. Those skilled in the art to which the present invention pertains can make various modifications and variations based on the above description.

[0186] Therefore, the technical concept of the present invention should not be limited to the embodiments described above, and the claims and modifications equivalent to or equivalent to the claims are all within the scope of the technical concept of the present invention.

Claims

1. A substrate transfer apparatus that transfers a substrate in a vacuum chamber, comprising: a lifting robot that includes a lifting plate and 1st to nth lifting shafts, and is sealingly coupled to a vacuum chamber through hole formed in a lower area of the vacuum chamber, wherein 1st to nth a1 holes are formed in a 1st straight line direction on a plane of the lifting plate formed below the vacuum chamber and moved up and down by a lifting drive unit, n is an integer greater than or equal to 2; one side end of each of the 1st to nth lifting shafts is coupled to a top surface of the lifting plate so that each hollow shaft corresponds to a center of each of the 1st to nth a1 holes, and the other side end is located inside the vacuum chamber; A walking robot comprising a walking arm platform, a first walking arm unit, a second walking arm unit, and a transfer robot combining unit, and reciprocating the transfer robot combining unit in the first linear direction by the operation of the first walking drive motor and the second walking drive motor, wherein the first b1_1 combining hole to the first b1_n combining hole are formed on the walking arm platform, the first b1_1 combining hole to the first b1_n combining hole are formed in the first linear direction, each of the first b1_1 combining hole to the first b1_n combining hole is divided into the first b1_1 upper space and the first b1_1 lower space to the first b1_n upper space by each of the first b1_1 stopper to the first b1_n stopper, and each of the first b1_1 upper space to the first b1_n upper space is sealed by the first b1_1 cover to the first b1_n cover, wherein the first b1_1 through hole to the first b1_n through hole corresponding to the hollow of the first lifting shaft to the n lifting shaft are formed on the first b1_1 stopper to the first b1_n stopper; the first b2 combining hole is formed in the first front end region of the second linear direction perpendicular to the first linear direction, and is divided into the first b2 upper space and the first b2 lower space by the first b2 stopper, the first b2 lower space is sealed by the first b2 cover, wherein the first b2 through hole is formed on the first b2 stopper; the first b3 combining hole is formed in the first other front end region of the second linear direction, and is divided into the first b3 upper space and the first b3 lower space by the first b3 stopper, the first b3 lower space is sealed by the first b3 cover, wherein the first b3 through hole is formed on the first b3 stopper; wherein each of the other side end of the first lifting shaft to the other side end of the n lifting shaft inserted into each of the first b1_1 lower space to the first b1_n lower space is fixedly combined to each of the first b1_1 stopper to the first b1_n stopper, the first walking arm unit comprises a first_1 walking link arm and a first_2 walking link arm, the first walking drive motor and the first speed reducer which is linked with the first walking drive motor and reduces the rotating speed to 1 / 2 are arranged in the sealed internal space of the first_1 walking link arm, the first_1 driving shaft which is linked with the first speed reducer and forms a hollow is sealingly arranged in the first_1 front end region of the first_1 walking link arm, and the first_1 output shaft which is linked with the first_1 driving shaft, the first_2 driving shaft which is linked with the first walking drive motor and forms a hollow is sealingly arranged in the first_1 other front end region of the first_1 walking link arm, and the first_2 output shaft which is linked with the first_2 driving shaft, the first_1 output shaft is fixedly combined to the first_1 connecting piece, the first_1 connecting piece is inserted into the first b2 upper space of the walking arm platform, and is fixedly combined to the first b2 stopper in this way.The first 1_2 front end region of the walking link arm is fixedly combined with the first 1_2 output shaft of the first 1_1 walking link arm, the second walking arm unit includes a second 1_1 walking link arm and a second 2_2 walking link arm, a second walking driving motor and a second speed reducer which reduces the speed to 1 / 2 and is linked with the second walking driving motor are arranged in the sealed internal space of the second 1_1 walking link arm, a second 1_1 driving shaft which is linked with the second speed reducer and forms a hollow is arranged in the second 1_1 front end region of the second 1_1 walking link arm, a second 1_1 output shaft which is linked with the second 1_1 driving shaft is arranged in the second 1_1 front end region of the second 1_1 walking link arm, a second 2_2 driving shaft which is linked with the second walking driving motor and forms a hollow is arranged in the second 1_1 other front end region of the second 1_1 walking link arm, a second 2_2 output shaft which is linked with the second 2_2 driving shaft is arranged in the second 1_1 other front end region of the second 1_1 walking link arm, the second 1_1 output shaft is fixedly combined with the first 1_2 connecting piece, the first 1_2 connecting piece is inserted into the b3 upper space of the walking arm platform, and the first 1_2 connecting piece is fixedly combined with the b3 locking piece; the second 2_2 front end region of the second 2_2 walking link arm is fixedly combined with the second 2_2 output shaft of the second 1_1 walking link arm, the second front end region of the conveying robot combined unit is rotatably combined with the first 1_2 other front end region of the first 1_2 walking link arm, the second other front end region of the conveying robot combined unit is rotatably combined with the second 2_2 other front end region of the second 2_2 walking link arm, and the first central region of the conveying robot combined unit forms a rotary driving motor; and; a transfer robot that transfers a substrate, and is coupled to the transfer robot coupling unit, the lifting robot further includes: a 1st to nth a2 cover in which 1st to nth a2 holes are formed, and is sealingly coupled to the vacuum chamber through hole of the vacuum chamber, wherein each of the 1st to nth lifting shafts is inserted into the 1st to nth a2 holes in the 1st straight line direction; and 1st to nth bellows in which each of the 1st to nth lifting shafts is inserted, one side end of which is coupled to the top surface of the lifting plate, and the other side end of which is coupled to the 1st to nth a2 cover.

2. The substrate transfer apparatus according to claim 1, wherein the lifting drive unit of the lifting robot includes: a 1st nut that is fixedly coupled to one side surface of the lifting plate; a 2nd nut that is fixedly coupled to the other side surface corresponding to the one side surface; a 1st screw shaft that is formed in a vertical direction perpendicular to the 1st straight line direction and perpendicular to the ground, and is rotated by being coupled to the 1st nut; a 2nd screw shaft that is formed in the straight direction, and is rotated by being coupled to the 2nd nut; a lifting drive motor that provides a driving force to rotate the 1st and 2nd screw shafts; and 1st and 2nd belts that transmit the driving force of the lifting drive motor to each of the 1st and 2nd screw shafts.

3. The substrate transfer apparatus according to claim 2, wherein the lifting drive unit of the lifting robot further includes: at least one 1st slide guide that is formed in the one side surface of the lifting plate and supports the up and down moving direction of the lifting plate; and at least one 2nd slide guide that is formed in the other side surface of the lifting plate and supports the up and down moving direction of the lifting plate.

4. The substrate transfer apparatus according to claim 1, wherein the transfer robot coupling unit of the walking robot further includes: a flexible body which changes a position of the 1_2 another front end region of the 1_2 walking link arm rotatably coupled to a position of the 2_2 another front end region of the 2_2 walking link arm rotatably coupled within the transfer robot coupling unit by a corresponding external force on a front end region of any one of the 2 front end regions to the 2 another front end regions.

5. The substrate transfer device of claim 4, wherein, the flexible body includes: a flexible main body which is movable inside any one of the 2 front end regions to the 2 another front end regions in a length direction of the transfer robot coupling unit, and is rotatably coupled to any one of the 1_2 another front end region of the 1_2 walking link arm to the 2_2 another front end region of the 2_2 walking link arm; at least one 1st slide formed on a top surface of the flexible body, at least one 2nd slide which slides in a length direction of the transfer robot coupling unit by being coupled to the 1st slide on one side, and is fixedly coupled to the transfer robot coupling unit on the other side; and elastic members which are respectively formed on both sides of the flexible main body in a moving path inside any one of the 2 front end regions to the 2 another front end regions of the transfer robot coupling unit.

6. The substrate transfer device of claim 1, wherein, the walking robot further includes: a 1st wiring hole which connects a b1_k upper space which is any one of the b1_1 upper space to the b1_n upper space and the b2 lower space; and a 2nd wiring hole which connects the b1_k upper space and the b3 lower space.

7. The substrate transfer device of claim 1, wherein, the walking robot further includes: a 1st_1 wiring hole which connects a b1_k upper space which is any one of the b1_1 upper space to the b1_n upper space from one side of a main body of the walking arm platform; a 2nd_1 wiring hole which connects the b2 lower space from one side of the main body of the walking arm platform; a 1st_2 wiring hole which connects the b1_k upper space from the other side of the main body of the walking arm platform, the other side of the main body of the walking arm platform being symmetrical to the one side of the main body of the walking arm platform with reference to a 1st linear direction; a 2nd_2 wiring hole which connects the b3 lower space from the other side of the main body of the walking arm platform; a 1st sealing cover which seals the 1st_1 wiring hole and the 2nd_1 wiring hole on the one side of the main body of the walking arm platform; and a 2nd sealing cover which seals the 1st_2 wiring hole and the 2nd_2 wiring hole on the one side of the main body of the walking arm platform.

8. The substrate transfer device of claim 1, wherein, in the walking robot, The position where the line in the second straight line direction connecting the center point of the b2 coupling hole and the center point of the b3 coupling hole intersects with the center line in the length direction of the first_1 walking link arm is referred to as a first_1 contact point, the position where the line in the second straight line direction intersects with the center line in the length direction of the second_1 walking link arm is referred to as a first_2 contact point, the position where the center line in the length direction of the first_1 walking link arm intersects with the center line in the length direction of the first_2 walking link arm is referred to as a second_1 contact point, the position where the center line in the length direction of the second_1 walking link arm intersects with the center line in the length direction of the second_2 walking link arm is referred to as a second_2 contact point, the position where the center line in the length direction of the first_2 walking link arm intersects with the center line in the length direction of the transfer robot coupling unit is referred to as a third_1 contact point, and the position where the center line in the length direction of the second_2 walking link arm intersects with the center line in the length direction of the transfer robot coupling unit is referred to as a third_2 contact point, The distance between the first_1 contact point and the first_2 contact point and the distance between the third_1 contact point and the third_2 contact point are set to be the same, and the distance between the first_1 contact point and the second_1 contact point, the distance between the second_1 contact point and the third_1 contact point, the distance between the first_2 contact point and the second_2 contact point, and the distance between the second_2 contact point and the third_2 contact point are set to be the same, The absolute value of the angle formed by the walking arm platform and the first_1 walking link arm at the first_1 contact point and the absolute value of the angle formed by the walking arm platform and the second_1 walking link arm at the first_2 contact point are set to be the same, the absolute value of the angle formed by the first_1 walking link arm and the first_2 walking link arm at the second_1 contact point and the absolute value of the angle formed by the second_1 walking link arm and the second_2 walking link arm at the second_2 contact point are set to be the same, and the absolute value of the angle formed by the first_2 walking link arm and the transfer robot coupling unit at the third_1 contact point and the absolute value of the angle formed by the second_2 walking link arm and the transfer robot coupling unit at the third_2 contact point are set to be the same.

9. The substrate transfer device according to claim 1, wherein In the walking robot, the first walking drive motor and the second walking drive motor are operated identically but in opposite directions.

10. The substrate transfer device according to claim 1, wherein The transfer robot can include The transfer arm platform includes a first c1 coupling hole, a first c2 coupling hole, a first c3 coupling hole, a first 1_1 blade and a first 1_2 blade, and a second 1_1 blade and a second 1_2 blade, in a center line corresponding to a linear movement direction of the substrate moved by the transfer robot, the first c1 coupling hole is formed in a second center area as a specific area, the first c1 coupling hole is divided into a first c1 upper space and a first c1 lower space due to a first c1 stopper forming a first c1 through hole, and the first c1 upper space is sealed by a first c1 cover, wherein the first c1 stopper corresponds to the hollow of the rotating drive shaft of the rotating drive motor of the transfer robot coupling unit, the first c2 coupling hole is formed in a third front end area of one side area with the center line as a reference, the first c2 coupling hole is divided into a first c2 upper space and a first c2 lower space due to a first c2 stopper forming a first c2 through hole, and the first c2 lower space is sealed by a first c2 cover, the first c3 coupling hole is formed in a third other front end area corresponding to the third front end area in the other side area with the center line as a reference, the first c3 coupling hole is divided into a first c3 upper space and a first c3 lower space due to a first c3 stopper forming a first c3 through hole, and the first c3 lower space is sealed by a first c3 cover, the first 1_1 blade and the first 1_2 blade are formed in front and back of the first c2 coupling hole respectively, wherein the front is the direction of the process chamber in the state that the transfer robot is positioned for transferring the substrate to the process chamber combined with the vacuum chamber, and the back is the opposite direction of the front, the second 1_1 blade and the second 1_2 blade are formed in the front and the back of the first c3 coupling hole respectively, wherein the rotating drive shaft of the rotating drive motor inserted into the first c1 lower space is fixedly coupled to the first c1 stopper; A first transfer arm unit includes a first 1 transfer link arm, a first 2 transfer link arm, a first common link arm, a first 1 auxiliary link arm, a first 2 auxiliary link arm, a first 3 auxiliary link arm, a first 4 auxiliary link arm, and a first end effector, wherein a first 1 transfer drive motor is disposed in a sealed interior space of the first 1 transfer link arm, a third speed reducer that is linked to the first 1 transfer drive motor and reduces a rotational speed to 1 / 2 is disposed in the sealed interior space of the first 1 transfer link arm, a third 1 drive shaft that is linked to the third speed reducer and is hollow is sealingly disposed in a third 1 front end region of the first 1 transfer link arm, a third 1 output shaft that is linked to the third 1 drive shaft is sealingly disposed in the third 1 front end region of the first 1 transfer link arm, a third 2 drive shaft that is linked to the first 1 transfer drive motor and is hollow is sealingly disposed in a third 1 other front end region of the first 1 transfer link arm, a third 2 output shaft that is linked to the third 2 drive shaft is sealingly disposed in the third 1 other front end region of the first 1 transfer link arm, the third 1 output shaft is fixedly coupled to a second 1 coupling member, the second 1 coupling member is inserted into the c2 upper space of the transfer arm platform, and is thus fixedly coupled to the c2 locking member, a third 2 front end region of the first 2 transfer link arm is fixedly coupled to the third 2 output shaft of the first 1 transfer link arm through a first fixed coupling shaft, a third central region of the first common link arm is rotatably coupled to the first fixed coupling shaft, the first 1 auxiliary link arm is parallel to the first 1 transfer link arm, a third 4 front end region of the first 1 auxiliary link arm is rotatably coupled to the first 1 blade of the transfer arm platform, a third 4 other front end region of the first 1 auxiliary link arm is rotatably coupled to a third 3 front end region of the first common link arm, the first 2 auxiliary link arm is parallel to the first 1 transfer link arm, a third 5 front end region of the first 2 auxiliary link arm is rotatably coupled to the first 2 blade of the transfer arm platform, a third 5 other front end region of the first 2 auxiliary link arm is rotatably coupled to a third 3 other front end region of the first common link arm, the first 3 auxiliary link arm is parallel to the first 2 transfer link arm, a third 6 front end region of the first 3 auxiliary link arm is rotatably coupled to the third 3 other front end region of the first common link arm, the first 4 auxiliary link arm is parallel to the first common link arm, a third 7 front end region of the first 4 auxiliary link arm is rotatably coupled to a third 6 other front end region of the first 3 auxiliary link arm, a third 7 other front end region of the first 4 auxiliary link arm is rotatably coupled to a third 2 other front end region of the first 2 transfer link arm, and the first end effector is fixed to the third 7 other front end region of the first 4 auxiliary link arm, and thus supports the substrate; and The second transfer arm unit includes a second 1 transfer link arm, a second 2 transfer link arm, a second common link arm, a second 1 auxiliary link arm, a second 2 auxiliary link arm, a second 3 auxiliary link arm, a second 4 auxiliary link arm, and a second end effector, wherein a second 1 transfer driving motor is provided in a sealed inner space of the second 1 transfer link arm, a fourth speed reducer that is linked to the second 1 transfer driving motor and reduces a rotational speed to 1 / 2 is provided, a fourth 1 driving shaft that is linked to the fourth speed reducer and is hollow is provided in a fourth 1 front end region of the second 1 transfer link arm, a fourth 1 output shaft that is linked to the fourth 1 driving shaft is provided, a fourth 2 driving shaft that is linked to the second 1 transfer driving motor and is hollow is provided in a fourth 1 other front end region of the second 1 transfer link arm, a fourth 2 output shaft that is linked to the fourth 2 driving shaft is provided, the fourth 1 output shaft is fixedly combined to a second 2 connecting member, the second 2 connecting member is inserted into the c3 upper space of the transfer arm platform, and is thus fixedly combined to the c3 locking member, a fourth 2 front end region of the second 2 transfer link arm is fixedly combined to the fourth 2 output shaft of the second 1 transfer link arm through a second fixed combination shaft, a fourth central region of the second common link arm is rotatably combined to the second fixed combination shaft, the second 1 auxiliary link arm is parallel to the second 1 transfer link arm, a fourth 4 front end region of the second 1 auxiliary link arm is rotatably combined to the second 1 blade of the transfer arm platform, a fourth 4 other front end region of the second 1 auxiliary link arm is rotatably combined to a fourth 3 front end region of the second common link arm, the second 2 auxiliary link arm is parallel to the second 1 transfer link arm, a fourth 5 front end region of the second 2 auxiliary link arm is rotatably combined to the second 2 blade of the transfer arm platform, a fourth 5 other front end region of the second 2 auxiliary link arm is rotatably combined to a fourth 3 other front end region of the second common link arm, the second 3 auxiliary link arm is parallel to the second 2 transfer link arm, a fourth 6 front end region of the second 3 auxiliary link arm is rotatably combined to the fourth 3 other front end region of the second common link arm, the second 4 auxiliary link arm is parallel to the second common link arm, a fourth 7 front end region of the second 4 auxiliary link arm is rotatably combined to a fourth 6 other front end region of the second 3 auxiliary link arm, a fourth 7 other front end region of the second 4 auxiliary link arm is rotatably combined to the fourth 2 other front end region of the second 2 transfer link arm, and the second end effector is fixed to the fourth 7 other front end region of the second 4 auxiliary link arm, and thus supports the substrate.

11. The substrate transfer device according to claim 10, wherein By making the height of the second fixed coupling shaft higher than the height of the first fixed coupling shaft, the first end effector and the second end effector are located at different heights on the same path.

12. The substrate transfer device of claim 10, wherein, The transfer arm platform can further include a third wiring hole and a fourth wiring hole, The third wiring hole connects the first cl upper space and the second cl lower space, The fourth wiring hole connects the first cl upper space and the third cl lower space.

13. The substrate transfer device of claim 10, wherein, The transfer arm platform includes an upper plate and a lower plate, The upper plate includes the first 1 blade, the first 2 blade, the second 1 blade, and the second 2 blade, and the lower plate is coupled to the upper plate, wherein the second central region of the upper plate forms a first cl upper coupling hole as part of the first cl coupling hole, the third front end region of the upper plate forms a second cl upper coupling hole as part of the second cl coupling hole, and the second cl upper coupling hole is internally equipped with the second cl stopper formed with the second cl through hole, whereby the internal space of the second cl upper coupling hole is separated, the third other front end region of the upper plate forms a third cl upper coupling hole as part of the third cl coupling hole, and the third cl upper coupling hole is internally equipped with the third cl stopper formed with the third cl through hole, whereby the internal space of the third cl upper coupling hole is separated, the second central region of the lower plate forms a first cl lower coupling hole as another part of the first cl coupling hole, and the first cl lower coupling hole is internally equipped with the first cl stopper formed with the first cl through hole, whereby the internal space of the first cl lower coupling hole is separated, the third front end region of the lower plate forms a second cl lower coupling hole as another part of the second cl coupling hole, and the third other front end region of the lower plate forms a third cl lower coupling hole as another part of the third cl coupling hole.

14. The substrate transfer device of claim 13, wherein, the bottom surface of the upper plate forms a third upper wiring groove and a fourth upper wiring groove, the third upper wiring groove connecting the internal space of the first cl upper coupling hole and the lower space of the second cl upper coupling hole, and the fourth upper wiring groove connecting the internal space of the first cl upper coupling hole and the lower space of the third cl upper coupling hole, the top surface of the lower plate forms a third lower wiring groove and a fourth lower wiring groove, the third lower wiring groove connecting the upper space of the first cl lower coupling hole and the internal space of the second cl lower coupling hole, and the fourth lower wiring groove connecting the upper space of the first cl lower coupling hole and the internal space of the third cl lower coupling hole.

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