A magneto-domain imaging device and method for light source coupling

Abstract

The present invention discloses a magneto-domain imaging device and method for light source coupling, belonging to the technical field of magneto-domain imaging, and is used to solve the technical problem that the existing magneto-domain imaging devices cannot meet the different detection requirements of the object to be measured. The method includes: a light source assembly, a wavelength division multiplexer, an optical fiber, a polarizer, a digital micromirror device DMD, and a lens assembly disposed on the incident optical path of the object to be measured; a lens assembly, an analyzer, and a camera disposed on the exit optical path of the object to be measured; the light emitted from the light source assembly is incident on the digital micromirror device DMD after passing through at least the wavelength division multiplexer, the optical fiber, and the polarizer; the light reflected from different reflection regions of the digital micromirror device DMD is incident on different positions of the lens assembly and reaches the object to be measured; the light reflected by the object to be measured enters the camera after passing through at least the lens assembly and the analyzer.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetic domain imaging, and in particular to a magnetic domain imaging device and method with light source coupling. Background Art

[0002] In current magnetic domain imaging devices, the detection light emitted from a light source passes through a polarizer, an objective lens and other lens groups and then reaches the object to be measured. The light reflected by the object to be measured passes through the objective lens and other lens groups and a analyzer and then enters the camera, enabling the camera to capture a magnetic domain image.

[0003] However, in such a magnetic domain imaging device, after the positions of the light source and the object to be measured are fixed, the detection light emitted from the light source can only reach the object to be measured in a fixed incident direction or incident plane. In some cases, for the magnetic domain state of the object to be measured, it is necessary to select to use the polar magneto-optical Kerr effect or the longitudinal magneto-optical Kerr effect to image the object to be measured. The polar magneto-optical Kerr effect requires the incident light to be perpendicularly incident on the object to be measured, and the longitudinal Kerr effect requires the incident light to be obliquely incident on the object to be measured and requires the incident plane of the incident light to be parallel to the magnetic domain direction to be measured. In the case where the magnetic domain state of the object to be measured is not clear, it is necessary to adjust the optical path of the incident light multiple times to meet the imaging requirements. However, the existing magnetic domain imaging devices cannot arbitrarily adjust or change the incident plane or incident direction of the detection light and cannot adapt to different detection requirements of the object to be measured. Even if the incident plane or incident direction can be changed by adjusting the position of the light source, on the one hand, it is necessary to realign the optical path, the operation is complex, and the optical path alignment requires high precision and takes a long adjustment time. On the other hand, adjusting the position of the light source once can only change the incident plane or incident direction once. If it is necessary to continue to change, it is necessary to continue to adjust the position of the light source, resulting in low efficiency of changing the incident plane or incident mode. Summary of the Invention

[0004] The present invention provides a magnetic domain imaging device and method with light source coupling for solving at least one of the above technical problems.

[0005] The present invention adopts the following technical solutions:

[0006] On the one hand, the present invention provides a magnetic domain imaging device with light source coupling, the device includes: a light source assembly, a wavelength division multiplexer, an optical fiber, a polarizer, a digital micromirror device DMD and a lens assembly arranged in the incident optical path of the object to be measured, and a lens assembly, an analyzer and a camera arranged in the exit optical path of the object to be measured; the light source assembly includes LED lights of at least two colors, and the light emitted from the light source assembly is incident on the digital micromirror device DMD after passing through at least the wavelength division multiplexer, the optical fiber and the polarizer; the light reflected from different reflection regions of the digital micromirror device DMD is incident on different positions of the lens assembly and reaches the object to be measured; the light reflected by the object to be measured enters the camera after passing through at least the lens assembly and the analyzer.

[0007] In a possible implementation manner of the present invention, the light source assembly includes a three-color LED lamp.

[0008] In a possible implementation manner of the present invention, the device further includes at least one of a prism or a reflector; the light emitted from the polarizer is reflected by at least one of the prism or the reflector to the digital micromirror device DMD, or the light emitted from the digital micromirror device DMD is reflected by at least one of the prism or the reflector to the lens assembly.

[0009] In a possible implementation manner of the present invention, the device further includes a light trap assembly disposed in a partial reflection optical path of the digital micromirror device DMD to absorb stray light reflected by other reflection regions of the digital micromirror device DMD.

[0010] On the other hand, the present invention also provides a magnetic domain imaging method with light source coupling, which applies a magnetic domain imaging device with light source coupling as described above. The method includes: controlling the light source assembly including the three-color LED lamp to generate emitted light in a preset manner; making the emitted light that has passed through at least the wavelength division multiplexer enter the digital micromirror device DMD through the optical fiber and the polarizer; adjusting the digital micromirror device DMD to reflect the emitted light through different reflection regions of the digital micromirror device DMD, so that the emitted light reaches the object to be measured through different positions of the incident lens assembly at a preset incident plane or incident direction, and enabling the camera to obtain a magnetic domain image.

[0011] In a possible implementation manner of the present invention, the method further includes: controlling the three-color LED lamps to light up at staggered times to generate emitted light; when one of the three-color LED lamps lights up, adjusting the digital micromirror device DMD to reflect the emitted light through a reflection region corresponding to one of the three-color LED lamps, so that the emitted light reaches the object to be measured through different positions of the incident lens assembly at different incident planes or incident directions respectively, and enabling the camera to obtain magnetic domain images of the object to be measured under different incident planes or incident directions of the three emitted lights.

[0012] In a possible implementation manner of the present invention, the method further includes: controlling two of the three-color LED lights to light up at staggered times to generate emitted light; when one of the two of the three-color LED lights lights up, adjusting the digital micromirror device DMD to reflect the emitted light through a first reflection area corresponding to a first incident surface or incident direction, so that the emitted light reaches the object to be measured through a first position of the lens assembly with the first incident surface or incident direction; when the other of the two of the three-color LED lights lights up, adjusting the digital micromirror device DMD to reflect the emitted light through another reflection area different from the first reflection area corresponding to another incident surface or incident direction different from the first incident surface or incident direction, so that the emitted light reaches the object to be measured through another position different from the first position of the lens assembly with another incident surface or incident aspect different from the first incident surface or incident direction, so that the camera obtains the magnetic domain images of the object to be measured under two different incident surfaces or incident directions of the emitted light.

[0013] In a possible implementation manner of the present invention, the method further includes: controlling the three-color LED lights to light up at staggered times to generate emitted light; when the three-color LED lights light up in sequence, adjusting the digital micromirror device DMD to reflect the emitted light through a second reflection area corresponding to a second incident surface or incident direction, so that the emitted light reaches the object to be measured through a second position of the lens assembly with the second incident surface or incident direction, so that the magnetic domain imaging device obtains the magnetic domain images of the object to be measured under the same incident surface or incident direction of three emitted lights.

[0014] In a possible implementation manner of the present invention, the method further includes: controlling all of the three-color LED lights to light up to generate emitted light; adjusting the digital micromirror device DMD to reflect the emitted light through any reflection area, and the camera is a color camera, and three magnetic domain images of the object to be measured under three colors are collected by the color camera.

[0015] In a possible implementation manner of the present invention, the camera is a color camera, and when the magnetic domain image collected by the color camera is a composite image including at least two emitted lights, the method further includes: decomposing the composite image according to wavelength and / or color.

[0016] A magnetic domain imaging device and method with light source coupling provided by the present invention have the following beneficial effects:

[0017] 1) In the present invention, by arranging a digital micromirror device (DMD) in the optical path structure and using a number of reflection units provided thereon, the reflection area or reflection units for reflecting the detection light can be arbitrarily changed. Since different reflection areas or reflection units correspond to different incident positions of the lens assemblies, and different incident positions of the lens assemblies can make the detection light reach the object to be measured with different incident surfaces or incident directions. Therefore, in the present invention, by changing different reflection areas or reflection units on the DMD, the detection light can be made to enter the object to be measured with different incident surfaces or incident directions, thereby realizing arbitrary adjustment of the incident surface or incident direction and meeting different detection requirements of the object to be measured.

[0018] 2) Since the digital micromirror device (DMD) is adopted in the present invention, the optical path alignment speed is faster and the alignment operation is simpler. On the one hand, it is because the response speed of the digital micromirror device (DMD) is extremely fast, and the reflection area can be quickly adjusted and changed to align the optical path. On the other hand, when aligning the optical path, if the reflection area of the digital micromirror device (DMD) is adjusted, there is no need to adjust the optical devices on the incident light path of the digital micromirror device (DMD) anymore. The alignment of the optical path can be achieved by only adjusting the digital micromirror device (DMD), and the operation is simpler and faster.

[0019] 3) The light source assembly in the present invention is realized by using a three-color LED lamp. On the one hand, by cooperating with different reflection units of the digital micromirror device (DMD), the three-color LED lamp can quickly find the best combination of color / wavelength and incident surface or incident direction, so that the camera can obtain the magnetic domain image with the best imaging effect of the object to be measured. On the other hand, the three-color LED lamp has low cost and fast adjustment speed, and cooperating with a color camera helps to quickly image. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings. In the drawings:

[0021] Figure 1 is an optical path structure diagram of a magnetic domain imaging device with light source coupling provided by the present invention;

[0022] Figure 2 is a flowchart of a magnetic domain imaging method with light source coupling provided by the present invention;

[0023] Figure 3 is a schematic diagram of adjusting the incident surface or incident direction provided by the present invention.

[0024] Among them, 101 is a light source assembly; 1011 is a red LED lamp; 1012 is a blue LED lamp; 1013 is a green LED lamp; 102 is a wavelength division multiplexer; 103 is an optical fiber; 104 is a collimator; 105 is a polarizer; 106 is a digital micromirror device DMD; 107 is a prism; 108 is a beam splitter; 109 is an objective lens; 110 is a measured object; 111 is an analyzer; 112 is a lens group; 113 is a camera; 114 is a light trap assembly; 301 is the outgoing light range of the objective lens 109; 302 is a light spot. Detailed implementation manners

[0025] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of this specification, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0026] The method in the present invention will be described in detail below with reference to the accompanying drawings.

[0027] Figure 1 The optical path structure diagram of a magneto - domain imaging device with light source coupling provided by the present invention is as Figure 1 shown. The magneto - domain imaging device of the present invention at least includes:

[0028] A light source assembly 101, which is used to provide detection light for the magneto - domain imaging device. It is shown as a three - color LED lamp in Figure 1 and includes a red LED lamp 1011, a blue LED lamp 1012, and a green LED lamp 1013. The LED lamp has a low price, which can reduce the structural cost of the magneto - domain imaging device. And the three - color LED lamp can provide detection light of three colors / wavelengths. When acting on the measured object, it can show the differences of the magnetic domain at different wavelengths in the image, obtaining a good imaging effect. At the same time, when the magneto - domain imaging device uses a color camera, multiple images of different colors / wavelengths can be collected at one time through the three - color LED lamp, improving the imaging speed.

[0029] A wavelength division multiplexer 102, which is used to combine the detection light emitted by the light source assembly 101 into a single beam of light.

[0030] An optical fiber 103, which is used to transmit the detection light and make the detection light exit the optical fiber 103 at the output structure of the optical fiber 103.

[0031] A collimator 104 is used to convert the light in the output of the optical fiber 103 into a parallel light beam, ensuring that the light incident on the digital micromirror device DMD106 is parallel light, so that the light reflected by different reflection regions of the digital micromirror device DMD106 is substantially parallel to each other.

[0032] A polarizer 105 is used to convert the detection light into polarized light.

[0033] For the digital micromirror device DMD106, the detection light (which is polarized light at this time) output from the polarizer 105 is incident on the digital micromirror device DMD106 after passing through the prism 107. Optionally, the detection light (which is polarized light at this time) output from the polarizer 105 can also be incident on the digital micromirror device DMD106 after being reflected by a mirror.

[0034] The digital micromirror device DMD106 is provided with a number of reflection regions, such as small lenses, which can reflect the incident light. In some cases, the light reflected by the digital micromirror device DMD106 can also be reflected to the lens assembly by at least one of a prism or a mirror.

[0035] A beam splitter 108 and an objective lens 109 can form a lens assembly disposed in the incident optical path of the object to be measured. The light reflected by different reflection regions of the digital micromirror device DMD106 (the reflection regions include at least one reflection unit) is substantially parallel and can be incident on different positions of the objective lens 109 respectively, so as to reach substantially the same position of the object to be measured 110 with different incident surfaces or incident directions.

[0036] In one example, when performing magnetic domain imaging on the object to be measured 110, by adjusting and changing the reflection regions on the digital micromirror device DMD106 for reflecting the detection light, that is, making different reflection regions on the digital micromirror device DMD106 reflect the detection light, the detection light can be incident on different positions of the objective lens 109, so as to achieve that the detection light reaches the object to be measured 110 with different incident surfaces or incident directions. Figure 3 This is a schematic diagram of adjusting the incident surface or incident direction provided by the present invention, as Figure 3As shown, the outgoing light range 301 of the objective lens 109 is a circular plane. L1, L2, L3, and L4 are respectively the detection lights incident on different positions of the objective lens 109. When these four detection lights form light spots 302 on the object to be measured, they have different incident directions and / or incident planes. Thus, when the detection light is incident on the object to be measured 110, the change of the incident plane or the incident direction can be realized, and any adjustment of the incident plane or the incident direction can be achieved, so as to meet different detection requirements of the object to be measured 110. In addition, due to the adoption of the digital micromirror device DMD106 in the optical path structure of the present invention, the difficulty of optical path alignment can also be reduced. For the optical path before the digital micromirror device DMD106, it is only necessary to make the detection light output by the optical fiber 103 irradiate on the digital micromirror device DMD106, instead of manually adjusting the position of the light source and the corresponding optical devices to align the optical path like the traditional magnetic domain imaging device, which greatly reduces the difficulty of optical path alignment.

[0037] The analyzer 111, the light reflected from the object to be measured 110 is incident on the analyzer 111 after passing through the objective lens 109 and the beam splitter 108, and finally enters the camera 113 through the lens group 112, and the magnetic domain image is obtained by the camera 113. In Figure 1 the camera 113 can be a color camera. By using a color camera, the imaging speed can be improved, and the magnetic domain image can be obtained quickly. Moreover, it can also cooperate with the three-color LED lamp to achieve simultaneous imaging, and the magnetic domain images of the object to be measured 110 under three colors / wavelengths can be collected through one exposure, improving the imaging efficiency and the imaging effect. In addition, the camera 113 can also be a black-and-white camera, and the magnetic domain images under the corresponding colors / wavelengths are collected respectively when the monochromatic LED lamp is on.

[0038] The light trap component 114 is arranged on the outgoing optical path of the digital micromirror device DMD106, and can be used to absorb the stray light reflected from other reflection regions / units of the digital micromirror device DMD106, so as to avoid the stray light acting on the object to be measured and affecting the imaging effect; the other reflection regions / units here refer to the remaining reflection regions / units in the digital micromirror device DMD106 except those set to reflect the detection light.

[0039] That is, in Figure 1Among them, the incident light path of the object 110 is composed of a light source component 101, a wavelength division multiplexer 102, an optical fiber 103, a collimator 104, a polarizer 105, a prism 107, a digital micromirror device DMD 106, a beam splitter 108, and an objective lens 109, and the exit light path of the object is composed of the beam splitter 108, the objective lens 109, an analyzer 111, a lens group 112, and a camera 113. The detection light emitted from the light source component 101, that is, a three-color LED lamp, is combined by the wavelength division multiplexer 102 and then output through the optical fiber 103, and is incident on the digital micromirror device DMD 106 after passing through the collimator 104, the polarizer 105, and the prism 107. After being reflected by different reflection areas on the digital micromirror device DMD 106, it is incident on different positions of the beam splitter 108 and the objective lens 109, and finally reaches the object 110 with different incident planes or incident directions. The light reflected from the object 110 enters the camera 113 after passing through the beam splitter 108, the objective lens 109, the analyzer 111, and the lens group 112, enabling the camera 113 to obtain magnetic domain images under different incident planes or incident directions, thereby realizing that the incident plane or incident direction of the detection light incident on the object 110 can be arbitrarily adjusted / changed, and being able to adapt to different detection requirements of various objects 110.

[0040] It should be noted that Figure 1 The optical path structure shown is only for exemplary illustration and is not used to limit the optical path structure of the present invention. During actual use, the positions / orders of optical devices such as the optical fiber 103 and the polarizer 105 on the incident light path of the object can be swapped, and the number or type of optical devices in the optical path structure can also be replaced or deleted according to actual situations, as long as it can ensure that the detection light emitted by the light source component is incident on the digital micromirror device DMD 106, and is reflected by different reflection areas of the digital micromirror device DMD 106 to different positions of the objective lens 109, thereby changing the incident direction or incident plane of the object 110 and then being imaged by the camera 113.

[0041] Figure 2 The following is a flowchart of a magnetic domain imaging method with light source coupling provided by the present invention. As Figure 2 shown, the magnetic domain imaging method in the present invention at least includes the following execution steps:

[0042] Step 201: Control the light source component including a three-color LED lamp to generate and emit light in a preset manner.

[0043] Step 202: Incident the emitted light that has at least passed through the wavelength division multiplexer on the digital micromirror device DMD through the optical fiber and the polarizer.

[0044] Step 203: Adjust the digital micromirror device DMD, reflect the emitted light through different reflection areas of the digital micromirror device DMD, so that the emitted light passes through different positions of the incident lens assembly to reach the object with a preset incident plane or incident direction, and enable the camera to obtain magnetic domain images.

[0045] The emitted light (i.e., the aforementioned detection light) from the three-color LED lamp is combined by the wavelength division multiplexer 102, and then exits through the optical fiber 103 and enters the collimator 104 and the polarizer 105. Then, it enters the digital micromirror device DMD106 through the prism 107. Different reflection regions on the digital micromirror device DMD106 (one reflection region includes at least one reflection unit, and here the reflection unit can be understood as a mirror on the digital micromirror device DMD106, such as a small mirror) reflect the detection light, and then the detection light enters the object 110 through different positions of the beam splitter 108 and the objective lens 109. When the position of the detection light incident on the objective lens 109 is different, the incident direction or incident plane when the detection light enters the object 110 through the objective lens 109 is different. The light reflected from the object 110 enters the camera 113 after passing through the objective lens 109, the beam splitter 108, the analyzer 111, and the lens group 112, enabling the camera 113 to obtain a magnetic domain image. During this process, by enabling different reflection regions on the digital micromirror device DMD106, the detection light can enter different positions of the objective lens 109, and finally reach the object 110 with different incident planes or incident directions, realizing that the incident plane or incident direction of the detection light when entering the object 110 can be adjusted arbitrarily to meet different detection requirements for the object 110.

[0046] As Figure 3 shown by L1, L2, L3, and L4 in the figure, when the detection light reflected by different reflection regions on the digital micromirror device DMD106 exits through different positions of the objective lens 109 and forms a light spot 302 on the object, L1, L2, L3, and L4 have different incident planes and / or incident directions.

[0047] In one example, by adjusting the light emission mode of the three-color LED lamp and the action of different reflection regions on the digital micromirror device DMD106, the following can be achieved:

[0048] Magnetic domain images of the object under different incident planes or incident directions of the three emitted lights: By controlling the three-color LED lamp to light up at different times, the light source assembly can generate emitted lights (i.e., the aforementioned detection lights) of three colors / wavelengths, red, blue, and green, at different times. During the time period when each LED lamp is lit, the emitted light generated by the LED lamp passes through Figure 1The wavelength division multiplexer 102, optical fiber 103, collimator 104, polarizer 105, and prism 107 shown in the figure are incident on the digital micromirror device DMD106. It should be noted that the emission lights of different colors / wavelengths generated by different LED lights are reflected by different reflection regions after being incident on the digital micromirror device DMD106. The different reflection regions reflect the emission lights to different positions of the beam splitter 108 and the objective lens 109, so that the emission lights reach the object to be measured 110 with different incident surfaces or incident directions. The light reflected by the object to be measured 110 enters the camera 113 after passing through the beam splitter 108, the objective lens 109, the analyzer 111, and the lens group 112. Finally, the camera 113 obtains the magnetic domain images of the object to be measured 110 under the emission lights of three colors / wavelengths and different incident surfaces or incident directions.

[0049] For example, when the three-color LED lights light up at different times, that is, only one LED light lights up each time to generate emission light. Assume that the red LED light 1011 lights up first, the blue LED light 1012 lights up next, and the green LED light 1013 lights up finally. When the red LED light 1011 lights up, the first reflection region of the digital micromirror device DMD106 is controlled to be turned on to reflect the red emission light. When the blue LED light 1012 lights up, the second reflection region of the digital micromirror device DMD106 is controlled to be turned on to reflect the blue emission light. When the green LED light 1013 lights up, the third reflection region of the digital micromirror device DMD106 is controlled to be turned on to reflect the green emission light. In this way, when each LED light of the three-color LED lights lights up to generate emission light, there is a corresponding reflection region on the digital micromirror device DMD106 to reflect the emission light, and the three different reflection regions can make the emission light incident on three different positions of the objective lens 109 when reflecting the emission light, so that the emission light reaches the object to be measured 110 with three different incident surfaces or incident directions. Finally, the light reflected by the object to be measured 110 enters the camera 113 after passing through the objective lens 109, the beam splitter 108, the analyzer 111, and the lens group 112, so that the camera 113 obtains three magnetic domain images of the object to be measured 110 under the emission lights of three different colors / wavelengths and three different incident surfaces or incident directions.

[0050] Of course, in the above process, it can also be set that within the time period when each LED light lights up, the three reflection regions of the digital micromirror device DMD106 are adjusted to sequentially reflect the emission light generated by the lit LED light, so that three magnetic domain images with different incident surfaces or incident directions are collected for the object to be measured 110 under the emission light of each color / wavelength. Finally, the camera 113 collects nine magnetic domain images of the object to be measured 110 under three different colors / wavelengths and three different incident surfaces or incident directions.

[0051] Magnetic domain images of the object under test 110 with two different incident surfaces or incident directions of the emitted light: By controlling two of the three-color LED lights to light up at different times, the light source assembly 101 generates two colors of emitted light at different times. Two different reflection areas on the digital micromirror device DMD106 are adjusted so that the two different reflection areas correspond one-to-one with the two colors of emitted light. That is, when any one of the two LED lights that can light up to generate emitted light is lit, there will be a corresponding reflection area on the digital micromirror device DMD106 to reflect the emitted light. The light reflected by the two different reflection areas on the digital micromirror device DMD106 can enter different positions of the objective lens 109, so that the two different colors / wavelengths of emitted light can reach the object under test 110 with different incident surfaces or incident directions, and finally the camera 113 obtains the magnetic domain images of the object under test 110 with the two colors / wavelengths of emitted light, different incident surfaces or incident directions.

[0052] For example, when two of the three-color LED lights light up at different times, the red LED light 1011 lights up first, and the blue LED light 1012 lights up later. By adjusting the digital micromirror device DMD106, when the red LED light 1011 lights up, the first reflection area reflects the red emitted light, and when the blue LED light 1012 lights up, the second reflection area reflects the blue emitted light. In this way, when the red LED light 1011 lights up, the first reflection area on the digital micromirror device DMD106 reflects the red emitted light, and after the emitted light enters the first position of the objective lens 109, it reaches the object under test 110 with the first incident surface or incident direction. When the blue LED light 1012 lights up, the second reflection area on the digital micromirror device DMD106 reflects the blue emitted light, and after the emitted light enters the second position of the objective lens 109, it reaches the object under test 110 with the second incident surface or incident direction. Here, the first and the second indicate different positions, different incident surfaces or incident directions. In this way, the light reflected by the object under test 110 enters the camera 113 through the objective lens 109, the beam splitter 108, the analyzer 111 and the lens group 112, and the camera 113 can obtain two magnetic domain images of the object under test 110 with two different colors / wavelengths and two different incident surfaces or incident directions.

[0053] Of course, in the above process, it can also be set that within the time period when each LED light lights up, the two reflection areas of the digital micromirror device DMD106 are adjusted to sequentially reflect the emitted light generated by the lit LED light, so that two magnetic domain images with different incident surfaces or incident directions are collected for the object under test 110 under each color / wavelength of emitted light. Finally, the camera 113 collects four magnetic domain images of the object under test 110 with two different colors / wavelengths and two different incident surfaces or incident directions.

[0054] Similarly, following the above process logic, it is also possible to control one of the three-color LED lights to emit light, generating emitted light of one color, and adjusting two or three reflection areas on the digital micromirror device DMD106 to reflect the emitted light in sequence. In this way, the camera 113 can obtain two / three magnetic domain images of the object 110 under one color / wavelength and two / three different incident surfaces or incident directions.

[0055] That is to say, the present invention can reflect the emitted light by adjusting different reflection areas of the digital micromirror device DMD106, so that when the emitted light is incident on the object 110, it can reach the object 110 with different incident surfaces or incident directions, realizing arbitrary adjustment of the incident surface or incident direction, meeting different detection requirements of the object 110. At the same time, by using a three-color LED light, emitted light of different colors / wavelengths can be realized, enabling arbitrary combination of emitted light of different colors / wavelengths with different incident surfaces or incident directions, which is convenient for quickly finding the best combination of color / wavelength and incident surface or incident direction during detection, and ensuring a good imaging effect of the magnetic domain image.

[0056] Magnetic domain images of the object 110 under three kinds of emitted light, the same incident surface or incident direction: By adjusting the digital micromirror device DMD106 to make any one of its reflection areas reflect the emitted light, controlling the three-color LED lights to emit light at different times to generate three kinds of emitted light with different colors / wavelengths, so that the emitted light can reach the object 110 with the incident surface or incident direction corresponding to any one of the reflection areas. The light reflected from the object 110 enters the camera 113 after passing through the objective lens 109, the beam splitter 108, the analyzer 111 and the lens group 112, and magnetic domain images are obtained. Thus, three magnetic domain images of the object 110 under three kinds of emitted light with different colors / wavelengths and the same incident surface or incident direction can be obtained.

[0057] Similarly, if two of the three-color LED lights are controlled to emit light at different times, and there is still only one reflection area on the digital micromirror device DMD106 that can reflect the emitted light, then two magnetic domain images of the object 110 under two kinds of emitted light with different colors / wavelengths and the same incident surface or incident direction can be obtained.

[0058] Since the light source assembly 101 of the present invention uses a three-color LED light, it has a low cost and a fast light source adjustment speed, which can enable the camera 113 to quickly obtain magnetic domain images of the object 110 under different colors / wavelengths, facilitating finding the color / wavelength with the best imaging effect of the object 110, and contributing to quickly obtaining high-quality magnetic domain images.

[0059] In one example, in order to achieve rapid imaging, the camera 113 in the optical path structure of the present invention can adopt a color camera, and the color camera can realize one-time exposure to collect magnetic domain images of the object 110 under three colors / wavelengths. Specifically, the three-color LED lights are controlled to light up to generate emission light, and the emission lights of the three colors are synthesized into a beam of light after passing through the wavelength division multiplexer 102. The emission light is reflected by controlling a reflection area on the digital micromirror device DMD106, so that the emission light reaches the object 110 under test with an incident plane or an incident direction. The light reflected from the object 110 passes through the objective lens 109, the beam splitter 108, the analyzer 111 and the lens group 112 and then enters the color camera, so that the color camera collects the composite magnetic domain image of the object 110 under three colors at one time and outputs it as one magnetic domain image, or collects the magnetic domain images of the object 110 under three colors and outputs them as three magnetic domain images respectively, so that multiple magnetic domain images can be collected at one time and rapid imaging can be achieved.

[0060] Furthermore, if the image captured by the color camera is a composite magnetic domain image, the composite magnetic domain image will be decomposed according to color / wavelength to obtain three magnetic domain images in different colors. In addition, the color corresponding to the photosensitive element of the color camera can also be matched with the color of the light source, so that the image composed of the signal output by the photosensitive element of a certain color of the color camera can be used as the magnetic domain image under the action of the light source of the corresponding color.

[0061] It should be noted that in the above process, the three-color LED lights can also be controlled to light up at different times to generate emitted light, but in this case, the single exposure time of the color camera needs to be controlled to be greater than the total time when the three-color LED lights light up at different times, so as to ensure effective imaging of the color camera.

[0062] In one example, the magnetic domain imaging method of the present invention can also be implemented by the following steps:

[0063] S1: Select a test area of the object 110 to be tested, turn on the light source assembly 101 (such as a three-color LED light), and adjust the light path so that the test area can be illuminated;

[0064] S2: The color camera enters the exposure state;

[0065] S2: Turn on one of the three-color LED lights, adjust the digital micromirror device DMD106 so that the emitted light is along the first straight line (for example Figure 3 L2 in the figure) is incident on the object to be measured 110, the LED is turned off; another of the three-color LED lights is turned on, and the digital micromirror device DMD106 is adjusted so that the emitted light is along the second straight line (for example Figure 3 L3 in the figure) is incident on the object to be measured 110, and the LED is turned off; the first straight line and the second straight line are set at an interval;

[0066] S4: The color camera ends the exposure state;

[0067] S5: Based on the composite magnetic domain image collected by the color camera, perform color / wavelength decomposition to obtain two magnetic domain images along the first incident plane or incident direction and the second incident plane or incident direction.

[0068] Through the above steps, it is possible to collect magnetic domain images formed by light of at least two arbitrary incident planes or incident directions through a single exposure of the color camera, and be able to perform image decomposition according to color / wavelength, improving the detection speed of the object to be measured.

[0069] By using the corresponding magnetic domain images obtained by the present invention, it is possible to compare the magnetic domain images of the emitted light of different colors in the same incident plane or incident direction to know the quality of the imaging effect of the current object to be measured 110 when it is under the emitted light of what color; it is also possible to compare the magnetic domain images of the emitted light of the same color in different incident planes or incident directions to meet the imaging requirements of different magnetic domains on the object to be measured 110; it is also possible to splice the magnetic domain images of different colors, different incident planes or incident directions to obtain a three-dimensional magnetic domain image that can reflect different magnetic domains in one picture; it is also possible to obtain a magnetic domain image with a better effect according to the combination of the color, incident direction or incident plane of the emitted light with a better imaging effect.

[0070] Each embodiment in the present invention is described in a progressive manner. For the same or similar parts between the embodiments, reference can be made to each other. The key point of each embodiment is to illustrate the differences from other embodiments. In particular, for the embodiments of the Internet of Things devices and media, since they are basically similar to the method embodiments, the description is relatively simple, and the relevant parts can refer to the partial description of the method embodiments.

[0071] Those skilled in the art should understand that the embodiments of the present invention can be provided as a method, a system, or a computer program product. Therefore, the present invention can take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware aspects. Moreover, the present invention can take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0072] It should also be noted that the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, such that a process, method, commodity or device comprising a series of elements not only includes those elements but also other elements not expressly listed, or elements inherent to such process, method, commodity or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, commodity or device comprising the element.

[0073] The above are only embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A magnetic domain imaging device with light source coupling, characterized in that, The device includes: A light source component, a wavelength division multiplexer, an optical fiber, a polarizer, a digital micromirror device (DMD), and a lens assembly that are at least disposed in the incident optical path of the object to be measured, and a lens assembly, an analyzer, and a camera that are at least disposed in the exit optical path of the object to be measured; wherein, the lens assembly includes a beam splitter and an objective lens; The light source component includes a three-color LED lamp, and the light emitted from the light source component is incident on the digital micromirror device (DMD) after passing through at least the wavelength division multiplexer, the optical fiber, and the polarizer; The light reflected from different reflection regions of the digital micromirror device (DMD) is incident on different positions of the lens assembly, so as to reach the same position of the object to be measured with different incident surfaces or incident directions, and form a spot with an unchanged position on the object to be measured; The light reflected by the object to be measured enters the camera after passing through at least the lens assembly and the analyzer; The device further includes: A collimator, which is used to convert the light in the output of the optical fiber into a parallel beam, ensure that the light incident on the digital micromirror device (DMD) is parallel light, and make the light reflected from different reflection regions of the digital micromirror device (DMD) parallel to each other; A light trap assembly that is at least disposed in a partial reflection optical path of the digital micromirror device (DMD) to absorb the stray light reflected by other reflection regions of the digital micromirror device (DMD).

2. The magneto-domain imaging device with light source coupling according to claim 1, characterized in that The device further includes at least one of a prism or a mirror; The light emitted from the polarizer is reflected to the digital micromirror device (DMD) by at least one of the prism or the mirror, Or, The light emitted from the digital micromirror device (DMD) is reflected to the lens assembly by at least one of the prism or the mirror.

3. A method for magneto-domain imaging with light source coupling, which applies a magneto-domain imaging device with light source coupling as described in any one of claims 1-2, characterized in that, The method includes: Controlling the light source component including the three-color LED lamp to generate emitted light in a preset manner; Making the emitted light that has passed through at least the wavelength division multiplexer enter the digital micromirror device (DMD) through the optical fiber and the polarizer; Adjusting the digital micromirror device (DMD) to reflect the emitted light through different reflection regions of the digital micromirror device (DMD), so that the emitted light reaches the object to be measured through different positions of the incident lens assembly with a preset incident surface or incident direction, and enabling the camera to obtain a magnetic domain image.

4. A magnetic domain imaging method for light source coupling according to claim 3, characterized in that, The method further includes: Controlling the three-color LED lamp to light up at staggered times to generate emitted light; When one of the three-color LED lamps lights up, adjusting the digital micromirror device (DMD) to reflect the emitted light through the reflection region corresponding to one of the three-color LED lamps, so that the emitted light reaches the object to be measured through different positions of the incident lens assembly with different incident surfaces or incident directions respectively, and enabling the camera to obtain the magnetic domain images of the object to be measured under different incident surfaces or incident directions of the three emitted lights.

5. A magnetic domain imaging method for light source coupling according to claim 3, characterized in that, The method further includes: Controlling two of the three-color LED lamps to light up at staggered times to generate emitted light; When one of the two of the three-color LED lights is lit, adjust the digital micromirror device DMD to reflect the emitted light through the first reflection area corresponding to the first incident surface or incident direction, so that the emitted light reaches the object to be measured through the first position of the lens assembly with the first incident surface or incident direction. When the other of the two of the three-color LED lights is lit, adjust the digital micromirror device DMD to reflect the emitted light through other reflection areas different from the first reflection area corresponding to other incident surfaces or incident directions different from the first incident surface or incident direction, so that the emitted light reaches the object to be measured through other positions of the lens assembly different from the first position with other incident surfaces or incident aspects different from the first incident surface or incident direction, so that the camera obtains the magnetic domain images of the object to be measured under two different incident surfaces or incident directions of the emitted light.

6. A magnetic domain imaging method for light source coupling according to claim 3, characterized in that The method further includes: Controlling the three-color LED lights to be lit at staggered times to generate emitted light; When the three-color LED lights are lit in sequence, adjust the digital micromirror device DMD to reflect the emitted light through the second reflection area corresponding to the second incident surface or incident direction, so that the emitted light reaches the object to be measured through the second position of the lens assembly with the second incident surface or incident direction, so that the magnetic domain imaging device obtains the magnetic domain images of the object to be measured under the same incident surface or incident direction of the three emitted lights.

7. A magnetic domain imaging method for light source coupling according to claim 3, characterized in that, The method further includes: Controlling all of the three-color LED lights to be lit to generate emitted light; Adjust the digital micromirror device DMD to reflect the emitted light through any reflection area. The camera is a color camera, and the color camera is used to collect the magnetic domain images of the object to be measured in three colors.

8. A magnetic domain imaging method for light source coupling according to claim 3, characterized in that, The camera is a color camera. When the magnetic domain image collected by the color camera is a composite image including at least two emitted lights, the method further includes: Decomposing the composite image according to wavelength and / or color.

Images