A precision lifting platform

Abstract

The present invention provides a precision lifting platform. The precision lifting platform includes: a platform base; and also includes: a lifting component consisting of a first wedge block, a first cross roller guide, a second wedge block, a second cross roller guide, and at least a pair of linear guide mechanisms; the first wedge block is connected to a portion of the first cross roller guide to guide the first wedge block to move in a first direction; the second wedge block is connected to the first wedge block through the second cross roller guide and the linear guide mechanism, so that the second wedge block can move following the movement of the first wedge block; the linear motor connected to the first wedge block can be used to drive the first wedge block to move; the feedback device installed on the second wedge block and / or the platform base can be used to obtain the position parameters of the second wedge block. This precision lifting platform has a long-term market prospect, and its motion accuracy and motion stability are at the forefront of the technology of existing lifting platforms, and can achieve certain social benefits.

Description

Technical Field

[0001] This invention relates to the field of lifting platform technology, and in particular to a precision lifting platform. Background Technology

[0002] More and more industries are beginning to deeply develop cutting-edge manufacturing technologies such as automation, high precision, and ultra-high precision. Among them, the increasing prosperity of intelligent manufacturing, flexible manufacturing, and extreme manufacturing has led to a growing demand for precision machinery and instruments. Micro-displacement technology is one of the key technologies for precision machinery and instruments, thus accelerating the research and development of micro-displacement technology.

[0003] Generally speaking, micro-displacement technology is widely used in fields such as microelectronics manufacturing, biomedical engineering, optical micro-assembly and ultra-precision machining, and the micro-displacement work platform, as the core functional component of micro-displacement technology, has become an important research direction in the field of micro-displacement technology.

[0004] Specifically, micro-displacement work platforms (e.g., precision lifting platforms) require a high-precision micro-motion drive method to achieve precise control of the platform within a short stroke under high-speed motion conditions.

[0005] Precision lifting platforms are crucial components in precision testing equipment, providing precise motion capabilities for fields such as microlithography, CNC machining, biotechnology, integrated circuit packaging equipment, and nanoscale surface topography measurement. High-precision lifting platforms with high stability are of decisive significance for the development of advanced electronic manufacturing equipment. In advanced electronic manufacturing equipment (e.g., lithography machines), the increasingly smaller product dimensions necessitate high-precision, low-friction rolling bearings capable of operating in extreme environments. Therefore, precision lifting technology is indispensable in the manufacturing and testing of Micro-Electro-Mechanical Systems (MEMS), optical measurement and processing, ultra-precision machining, and aero-engine measurement and manufacturing. High-rigidity lifting platforms with precise small displacements are ideal choices.

[0006] Under the guidance of my country's policy of vigorously developing the information industry, IC (Integrated Circuit) manufacturing has entered a new era of rapid development. With the rapid development of fields such as chip lithography and packaging in IC manufacturing, device packaging and assembly in MEMS (Micro Electromechanical Systems) manufacturing, high-speed sample dispensing and liquid handling in biomedical engineering, high-speed precision machining, and high-speed scanning and detection, extremely high requirements have been placed on the motion stroke, speed, acceleration, and motion accuracy of the execution system. Therefore, lifting platforms with high-speed and high-precision characteristics have become a research hotspot in the field of advanced manufacturing technology.

[0007] Existing lifting platforms still have some shortcomings:

[0008] (1) Most traditional lifting platforms have low lifting accuracy and are difficult to lift smoothly, which makes them unusable in some environments with high lifting accuracy requirements (for example, the ultra-precision Z-axis used in semiconductor or optical platforms cannot achieve high-precision lifting).

[0009] (2) Traditional rotary motor drive uses a rotary motor to drive the system, while the transmission device uses gears, ball screws, and guide rails to achieve linear motion. The advantages of this drive method are that the structure is mature, the control method is easy to implement, the thrust is large, and the cost is low. However, the traditional rotary motor drive method requires many intermediate transmission links to be converted into linear feed motion. The increase of transmission links will introduce error sources and increase the system inertia, which will slow down the dynamic response and limit the improvement of motion acceleration. Moreover, the ball screw has low stiffness, and its elastic deformation during the motion process will limit the overall performance of the system and is prone to mechanical resonance, which will further deteriorate the motion performance. In addition, the gaps and elastic deformations in the above-mentioned intermediate transmission links will introduce a series of nonlinear factors, making it difficult to further improve the control accuracy of the system. Finally, the dead zone and friction factors in the intermediate transmission links have a serious impact on the minimum stroke motion during the lifting process, thus limiting the resolution of the existing lifting platform. Due to the above defects, the traditional rotary motor drive method is difficult to meet the increasingly higher motion accuracy requirements, and it also limits its use and development in precision lifting platforms. Summary of the Invention

[0010] The precision lifting platform provided in this application is intended to overcome at least some of the defects of existing lifting platforms.

[0011] This invention provides a precision lifting platform. The precision lifting platform includes: a platform base. The precision lifting platform also includes:

[0012] A lifting component; the lifting component includes: a first wedge block, a first cross roller guide rail, a second wedge block, a second cross roller guide rail, and at least one pair of linear guide mechanisms;

[0013] The first wedge block has a horizontal mounting portion and an oblique mounting portion, and the oblique mounting portion is inclined relative to the horizontal mounting portion; a portion of the first cross roller guide is fixedly mounted on the platform base, and the other portion is fixedly connected to the horizontal mounting portion to guide the first wedge block to reciprocate in a first direction;

[0014] The second wedge block has a bearing portion and an assembly portion, and the assembly portion is inclined to the bearing portion; a portion of the second cross roller guide is fixedly mounted on the inclined mounting portion, and the other portion is fixedly connected to the assembly portion; a portion of each of the linear guide mechanisms is fixedly mounted on the platform base, and the other portion is fixedly connected to the second wedge block;

[0015] With the cooperation of the second cross roller guide and the linear guide mechanism, the second wedge block can follow the movement of the first wedge block in the first direction and move along the second direction, and the second direction and the first direction are orthogonal to each other;

[0016] A linear motor; one part of the linear motor is fixedly mounted on the platform base, and the other part is fixedly connected to the first wedge block to drive the first wedge block to reciprocate in the first direction;

[0017] Feedback device; the feedback device is installed on the second wedge block and / or the platform base, and is used to obtain the position parameters of the second wedge block.

[0018] In some embodiments, a first angle is formed between the oblique mounting portion and the horizontal mounting portion, and a second angle is formed between the assembly portion and the bearing portion, wherein the first angle and the second angle are equal.

[0019] In some embodiments, the platform base includes:

[0020] A substrate and a pair of support plates; the pair of support plates are disposed on opposite sides of the substrate in the first direction and protrude from the surface of the substrate in the second direction;

[0021] The surface of the substrate and the surfaces of the pair of support plates enclose a receiving space, and the lifting component and the linear motor are both housed within the receiving space.

[0022] In some embodiments, the first cross roller guides are arranged in pairs on the surface of the substrate and extend along a first direction;

[0023] The second cross roller guide is arranged in pairs between the first wedge block and the second wedge block, and extends in the third direction;

[0024] Wherein, the third direction is inclined to the first direction or the second direction, and the preset angle between the third direction and the first direction is equal to the first angle or the second angle.

[0025] In some embodiments, the first wedge block has a motor mounting slot, and both the horizontal mounting portion and the oblique mounting portion are located outside the motor mounting slot.

[0026] In some embodiments, the linear motor includes at least:

[0027] A stator component and a mover component; the stator component is fixedly mounted on the base plate, the mover component is fixedly connected to the first wedge block, and both the stator component and the mover component are located inside the motor mounting slot;

[0028] The moving part can move relative to the stator part to drive the first wedge block to reciprocate in the first direction.

[0029] In some embodiments, at least one pair of the linear guide mechanisms are disposed on opposite sides of the second wedge block in the first direction.

[0030] In some embodiments, the linear guide mechanism includes:

[0031] A linear guide and a slider, one of which is fixedly mounted on the second wedge block, and the other is fixedly connected to the support plate;

[0032] The linear guide rail extends along the second direction; the slider is sleeved on the linear guide rail so that the slider can reciprocate along the second direction on the linear guide rail.

[0033] In some embodiments, the feedback device includes at least:

[0034] A grating ruler and a grating reading head; the grating ruler is attached to the second wedge block, and the grating reading head is connected to the substrate through a reading head fixing block;

[0035] The grating ruler can move relative to the grating reading head as the second wedge block moves in the second direction;

[0036] The grating reading head can cover at least a portion of the grating ruler; when the grating ruler moves relative to the grating reading head, the position parameters of the second wedge block can be obtained in real time.

[0037] The reading head fixing block has multiple adjustable degrees of freedom.

[0038] In some embodiments, the precision lifting platform further includes:

[0039] First photoelectric switch, second photoelectric switch, and shielding plate;

[0040] The first photoelectric switch and the second photoelectric switch are fixed on the substrate, and the first photoelectric switch and the second photoelectric switch are far apart from each other along the first direction;

[0041] The first photoelectric switch is spaced apart from one end of the substrate in the first direction by a predetermined distance; the second photoelectric switch is spaced apart from the other end of the substrate in the first direction by a predetermined distance.

[0042] The baffle is fixed to the first wedge block so that the baffle can move along with the movement of the first wedge block.

[0043] In some embodiments, both the first photoelectric switch and the second photoelectric switch can be connected to the moving part via cables and cooperate with the baffle to limit the travel range of the first wedge block in the first direction.

[0044] In some embodiments, the precision lifting platform further includes:

[0045] A plurality of anti-collision blocks; the plurality of anti-collision blocks are fixedly mounted on the substrate and are arranged in pairs at both ends of the first wedge block in the first direction;

[0046] When the shield is located at the position of the first photoelectric switch or the second photoelectric switch, the anti-collision block can buffer the first wedge block.

[0047] At least one advantage of the precision lifting platform provided in this invention is that it incorporates a first wedge block, a second wedge block, a first cross roller guide rail, a second cross roller guide rail, and a feedback device. This allows the wedge-shaped lifting components, the miniature cross roller guide rail, and the feedback device for acquiring position parameters to be combined to form a specific structural design. Through this specific structural design and the use of a linear motor instead of a traditional rotary motor, motion error compensation can be achieved, thereby improving the lifting platform's movement speed and accuracy, even reaching micron-level accuracy. This meets the precision and speed requirements of a precision lifting platform and gives it the advantage of a compact structure. The cross roller guide rails incorporated in this precision lifting platform have the advantages of a large contact area and small elastic deformation, thus enabling high rigidity and high-load movement. This precision lifting platform has a long-term market prospect; its motion accuracy and stability are at the forefront of existing lifting platform technology, offering significant development opportunities and the potential to achieve certain social benefits. Attached Figure Description

[0048] One or more embodiments are illustrated by way of example with reference to the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements having the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0049] Figure 1 A schematic diagram of the structure of the precision lifting platform provided in an embodiment of the present invention (I);

[0050] Figure 2 A schematic diagram (II) of the structure of the precision lifting platform provided in an embodiment of the present invention;

[0051] Figure 3 An exploded perspective view of the precision lifting platform provided in an embodiment of the present invention;

[0052] Figure 4 This is a schematic diagram of the structure of the first wedge block provided in an embodiment of the present invention;

[0053] Figure 5 This is a schematic diagram of the structure of the second wedge block provided in an embodiment of the present invention;

[0054] Figure 6 This is a front sectional view of the precision lifting platform provided in an embodiment of the present invention.

[0055] Reference numerals: 100, Precision lifting platform; 1001, First direction; 1002, Second direction; 1, Platform base; 11, Base plate; 12, Support plate; 2, Lifting component; 21, First wedge block; 22, First cross roller guide rail; 23, Second wedge block; 24, Second cross roller guide rail; 25, Linear guide mechanism; 210, Motor mounting slot; 211, Horizontal mounting part; 212, Angled mounting part; 231, Bearing part; 232, Assembly part; 251, Linear guide rail; 252, Slider; 3, Linear motor; 31, Stator component; 32, Mover component; 4, Feedback device; 41, Grating reading head; 411, Reading head fixing block; 5, First photoelectric switch; 6, Second photoelectric switch; 7, Shielding plate; 8, Anti-collision block. Detailed Implementation

[0056] The present invention will now be described in detail with reference to specific embodiments. It should be emphasized that the following description is merely exemplary and is not intended to limit the scope and application of the present invention.

[0057] It should be noted that, unless otherwise expressly specified and limited, the terms "first direction," "second direction," "third direction," "mutually opposed," etc., used in this specification indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. The terms "installation," "fitting," "connection," and "fixing" should be interpreted broadly. For example, "connection" can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. "Fixing" can be bolted, clipped, or glued. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," and "third" may explicitly or implicitly include one or more of those features. "A plurality" or "several" means two or more. In addition, "and / or" includes any and all combinations of one or more of the related listed items. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0058] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0059] In the embodiments of this application, the specific shape, structure and size of the "precision lifting platform" are not limited. Those skilled in the art can selectively use any suitable implementation method according to actual needs.

[0060] Figure 1 A schematic diagram of the structure of the precision lifting platform provided in an embodiment of the present invention (I). Figure 2 A schematic diagram (II) of the structure of the precision lifting platform provided in an embodiment of the present invention. Figure 3 This is an exploded perspective view of the precision lifting platform provided in an embodiment of the present invention. Figure 4 This is a schematic diagram of the structure of the first wedge block provided in an embodiment of the present invention. Figure 5 This is a schematic diagram of the structure of the second wedge block provided in an embodiment of the present invention.

[0061] See also Figures 1-5 The precision lifting platform 100 includes: a platform base 1. The precision lifting platform 100 also includes: a lifting component 2, a linear motor 3, and a feedback device 4.

[0062] The lifting component 2 includes: a first wedge block 21, a first cross roller guide rail 22, a second wedge block 23, a second cross roller guide rail 24, and at least one pair of linear guide mechanisms 25.

[0063] In addition, the first wedge block 21 has a horizontal mounting portion 211 and an oblique mounting portion 212, and the oblique mounting portion 212 is inclined relative to the horizontal mounting portion 211; one part of the first cross roller guide rail 22 is fixedly mounted on the platform base 1, and the other part is fixedly connected to the horizontal mounting portion 211 to guide the first wedge block 21 to reciprocate in the first direction 1001.

[0064] Furthermore, the second wedge block 23 has a bearing portion 231 and an assembly portion 232, with the assembly portion 232 inclined to the bearing portion 231; one part of the second cross roller guide rail 24 is fixedly mounted on the inclined mounting portion 212, and the other part is fixedly connected to the assembly portion 232; one part of each linear guide mechanism 25 is fixedly mounted on the platform base 1, and the other part is fixedly connected to the second wedge block 23.

[0065] Moreover, with the cooperation of the second cross roller guide 24 and the linear guide mechanism 25, the second wedge block 23 can move along the second direction 1002 following the movement of the first wedge block 21 in the first direction 1001, and the second direction 1002 and the first direction 1001 are orthogonal to each other.

[0066] It should be noted that one part of the linear motor 3 is fixedly mounted on the platform base 1, and the other part is fixedly connected to the first wedge block 21 to drive the first wedge block 21 to reciprocate in the first direction 1001.

[0067] It is understood that the feedback device 4 is mounted on the second wedge block 23 and / or the platform base 1, and is used to obtain the position parameters of the second wedge block 23.

[0068] In this embodiment, the precision lifting platform 100 incorporates a first wedge block 21, a second wedge block 23, a first cross roller guide rail 22, a second cross roller guide rail 24, and a feedback device 4 to form a specific structural design. Through the above-mentioned specific structural design and the use of a linear motor 3 to replace the traditional rotary motor, motion error compensation can be achieved, thereby improving the motion speed and motion accuracy of the lifting platform, and even achieving micron-level motion accuracy, thus meeting the precision and speed requirements of the precision lifting platform.

[0069] Specifically, a crossed roller guide is a guiding mechanism with high precision, high rigidity, low friction, and high repeatability. It can be widely used in high-precision machine tools, industrial robots, semiconductor equipment, and aerospace. The crossed roller guide consists of a guide frame, guide rails, rollers, and a cage. Its characteristic is that the rollers are arranged in an alternating orthogonal manner. Through the combination design of a dedicated cage and V-shaped rails, high-precision linear motion is achieved.

[0070] To further explain, the crossed roller guide is equipped with high-precision balls, resulting in a low coefficient of friction. This allows the crossed roller guide to achieve high-precision linear motion, thus meeting the needs of precision machining and positioning. Furthermore, the crossed roller guide, through its unique roller retaining mechanism, increases the effective contact length of the rollers, improving the rigidity of the system (which can be understood as a precision lifting platform 100 equipped with the aforementioned crossed roller guide). This ensures that the system maintains stable motion even under high-speed or heavy-load conditions. Moreover, the low coefficient of friction of the crossed roller guide helps reduce energy loss, thereby improving the system's operating efficiency. Finally, during multiple movements or positioning processes, the system maintains extremely high precision consistency. Therefore, the crossed roller guide is suitable for applications requiring frequent positioning or repetitive machining.

[0071] Generally speaking, the working principle of crossed roller guides is based on the rolling motion of rollers on a V-shaped raceway surface. Specifically, the cylindrical rollers arranged in a crisscross pattern reciprocate on the precision-ground V-shaped raceway surface, achieving linear motion through the contact and rolling between the rollers and the raceway surface. Moreover, since the rollers are arranged in an alternating orthogonal manner and are fixed and supported by retainers, the stability and accuracy of the rollers during the rolling process can be ensured.

[0072] Specifically, crossed roller guides can withstand loads in all directions and transfer the load to the guide frame through the rolling motion of the rollers, thereby achieving stable linear motion. At the same time, due to the large contact area and small elastic deformation between the rollers and the raceway surface, friction and wear can be reduced, thereby improving the service life and stability of the system.

[0073] In summary, crossed roller guides have the advantages of low rolling friction, good stability, large contact area, small elastic deformation, multiple effective moving parts, easy to achieve high rigidity and high load movement, flexible structural design, convenient installation and use, low mechanical energy consumption, high precision, high speed, large load capacity and long service life.

[0074] In this embodiment, the wedge-shaped lifting component 2, the miniature cross roller guide (i.e., the first cross roller guide 22 and the second cross roller guide 24), and the feedback device 4 for obtaining position parameters are combined to form a specific structural design. Furthermore, by adopting the above-mentioned specific structural design and replacing the traditional rotary motor with a linear motor 3, motion error compensation can be achieved, thereby improving the motion speed and motion accuracy of the lifting platform, and even achieving micron-level motion accuracy. This satisfies the accuracy and speed requirements of the precision lifting platform 100, and makes the precision lifting platform 100 have the advantage of a more compact structure.

[0075] In other words, this precision lifting platform 100 is based on a wedge-driven lifting platform. By using inclined planes, it converts the large stroke displacement of the first wedge block 21 in the horizontal direction (i.e., the first direction 1001) into the small stroke displacement of the second wedge block 23 in the vertical direction (i.e., the second direction 1002), which significantly improves the motion accuracy of the small stroke displacement of the second wedge block 23 in the vertical direction (i.e., the second direction 1002).

[0076] Combination Figures 1-5 As can be seen, the first wedge block 21 and the second wedge block 23 in this precision lifting platform 100 cooperate with each other using wedge-shaped inclined surfaces, which makes the platform height of the precision lifting platform 100 relatively low, further enabling the precision lifting platform 100 to perform high-precision and high-stability adjustments; in addition, the precision lifting platform 100 uses a linear motor 3 (e.g., a precision linear motor or a high-precision linear motor), which has good motion stability; next, the precision lifting platform 100 uses a linear guide mechanism 25 (e.g., a bidirectional high-precision linear guide rail), which makes the precision lifting platform 100 have the characteristics of small vibration and small flatness change during the vertical lifting movement (i.e., the second direction 1002); moreover, the cooperation of the wedge-shaped inclined surfaces can also obtain continuous thrust, thereby realizing the lifting of heavy objects and the smooth operation of large objects.

[0077] To further explain, the precision lifting platform 100 can also have a load plate (not shown in the figure) installed on the bearing part 231 so that the load to be lifted can be placed or installed on the second wedge block 23.

[0078] In some embodiments, such as Figure 3-5 As shown, a first angle is formed between the oblique mounting portion 212 and the horizontal mounting portion 211, and a second angle is formed between the assembly portion 232 and the bearing portion 231, and the first angle and the second angle are equal; in other words, when the first wedge block 21 and the second wedge block 23 cooperate with each other, the bearing portion 231 and the horizontal mounting portion 211 are parallel to each other.

[0079] In some embodiments, refer to Figures 1-3 It can be seen that the platform base 1 includes: a base plate 11 and a pair of support plates 12.

[0080] It should be noted that a pair of support plates 12 are disposed on opposite sides of the substrate 11 in the first direction 1001 and protrude from the surface of the substrate 11 in the second direction 1002.

[0081] It is understood that the surface of the substrate 11 and the surface of the pair of support plates 12 enclose a receiving space, and the lifting component 2 and the linear motor 3 are both housed within the receiving space.

[0082] In some embodiments, according to Figures 1-3 It can be seen that the first cross roller guides 22 are arranged in pairs on the surface of the substrate 11 and extend along the first direction 1001.

[0083] Specifically, the second cross roller guide 24 is arranged in pairs between the first wedge block 21 and the second wedge block 23, and extends in the third direction.

[0084] In this embodiment of the application, the third direction is inclined to the first direction 1001 or the second direction 1002, and the preset angle between the third direction and the first direction 1001 is equal to the first angle or the second angle.

[0085] In some embodiments, by Figures 3-5 It can be seen that the first wedge block 21 has a motor mounting groove 210, and the horizontal mounting part 211 and the oblique mounting part 212 are both located outside the motor mounting groove 210.

[0086] Figure 6 This is a front sectional view of the precision lifting platform provided in an embodiment of the present invention.

[0087] In some embodiments, please refer to Figure 3 and Figure 6 The linear motor 3 includes at least a stator component 31 and a mover component 32.

[0088] The stator component 31 is fixedly mounted on the base plate 11, and the mover component 32 is fixedly connected to the first wedge block 21. Both the stator component 31 and the mover component 32 are located inside the motor mounting groove 210.

[0089] In addition, the moving part 32 can move relative to the stator part 31 to drive the first wedge block 21 to reciprocate in the first direction 1001.

[0090] Generally speaking, a linear motor is a type of mechanical energy that directly converts electrical energy into linear motion. In other words, the linear motion generated by a linear motor does not require any intermediate transmission links. Therefore, linear motors have the advantages of no wear, no backlash, easy maintenance, high speed, high acceleration and deceleration, high precision, unlimited stroke, high dynamic characteristics, stable speed, and multiple movers.

[0091] Specifically, the selection of linear motors differs greatly from that of traditional rotary motors because linear motors do not require any intermediate transmission links. Therefore, linear motors can directly drive the first wedge block 21 to make linear motion. So, when selecting a linear motor, the following parameters should be given priority: maximum acceleration, maximum speed, rated thrust at constant speed, and maximum thrust.

[0092] To further explain, the selection of a linear motor includes, but is not limited to, the following steps:

[0093] (1) The structural form of the linear motor is initially selected based on the mechanism form, and the holding force required for constant speed operation is calculated based on the load mass, the planned stroke, the speed and acceleration.

[0094] (2) Then, calculate the maximum acceleration force and maximum deceleration force of the linear motor based on the technical data of the linear motor, and then obtain the average continuous output force to initially select a certain model of linear motor.

[0095] (3) Considering the influence of the quality of the selected linear motor's motion coil, repeatedly calculate the peak force and average continuous output force of the linear motor, check whether the selected linear motor meets the requirements, and calculate the temperature of the linear motor to check whether the temperature rise of the linear motor meets the requirements.

[0096] Generally speaking, linear motors can be based on Frms ＝ The continuous thrust of the linear motor is calculated by (ML+MP)×g×μ+Ff; then, the peak thrust of the linear motor is calculated by Famax=(ML+MP)×amax+Frms; finally, the peak thrust and continuous thrust can be obtained by referring to the relevant technical parameters of the mover and stator components.

[0097] Where Frms is the continuous thrust, Famax is the peak thrust, ML is the mass of the load, MP is the mass of the moving part of the linear motor, g is the acceleration due to gravity, μ is the coefficient of friction, Ff is other external resistance (e.g., air resistance), and amax is the maximum acceleration.

[0098] Specifically, there are three control methods for linear motors: pulse, analog, and communication control. Different control methods should be selected for linear motors in different application scenarios.

[0099] In some embodiments, see Figures 1-3 At least one pair of linear guide mechanisms 25 are disposed on opposite sides of the second wedge block 23 in the first direction 1001.

[0100] In some embodiments, such as Figures 1-3 As shown, the linear guide mechanism 25 includes a linear guide rail 251 and a slider 252. One of the linear guide rail 251 and the slider 252 is fixedly mounted on the second wedge block 23, and the other is fixedly connected to the support plate 12.

[0101] Specifically, the linear guide 251 extends along the second direction 1002; the slider 252 is fitted onto the linear guide 251 so that the slider 252 can reciprocate along the second direction 1002 on the linear guide 251.

[0102] In some embodiments, according to Figure 2 and Figure 3 It can be seen that the feedback device 4 includes at least: a grating ruler (not shown in the figure) and a grating reading head 41.

[0103] It should be noted that the grating ruler is attached to the second wedge block 23, and the grating reading head 41 is connected to the substrate 11 through the reading head fixing block 411.

[0104] Understandably, the grating ruler can move relative to the grating reading head 41 as the second wedge block 23 moves in the second direction 1002.

[0105] Specifically, the grating reading head 41 can cover at least a portion of the grating ruler; when the grating ruler moves relative to the grating reading head 41, the position parameters of the second wedge block 23 can be obtained in real time.

[0106] In this embodiment, the reading head fixing block 411 has multiple adjustable degrees of freedom, which can conveniently and quickly adjust the grating reading head 41 and the grating ruler to the optimal spatial position, so as to reduce the measurement error caused by the measuring instrument.

[0107] In some embodiments, combined with Figure 1 and Figure 3 It can be seen that the precision lifting platform 100 also includes: a first photoelectric switch 5, a second photoelectric switch 6, and a baffle plate 7.

[0108] The first photoelectric switch 5 and the second photoelectric switch 6 are fixed on the substrate 11, and the first photoelectric switch 5 and the second photoelectric switch 6 are far apart from each other along the first direction 1001.

[0109] In addition, the first photoelectric switch 5 and one end of the substrate 11 in the first direction 1001 are separated by a predetermined distance; the second photoelectric switch 6 and the other end of the substrate 11 in the first direction 1001 are separated by a predetermined distance.

[0110] In addition, the baffle plate 7 is fixed to the first wedge block 21 so that the baffle plate 7 can move along with the movement of the first wedge block 21.

[0111] In some embodiments, such as Figure 1 and Figure 3 As shown, both the first photoelectric switch 5 and the second photoelectric switch 6 can be connected to the moving part 32 via cables and cooperate with the baffle plate 7 to limit the travel range of the first wedge block 21 in the first direction 1001, thereby preventing the first wedge block 21 from disengaging from the first cross roller guide rail 22.

[0112] In this embodiment, the first photoelectric switch 5 can be composed of two photoelectric switches arranged in parallel. This arrangement can expand the detection range on the side where the first photoelectric switch 5 is located, forming a redundant design to increase the safety, stability and reliability of the system, and can also effectively expand the detection area to further cover more potential targets; while the second photoelectric switch 6 can be composed of only one photoelectric switch. This arrangement can reduce the detection cost while ensuring detection accuracy.

[0113] In some embodiments, please continue reading Figures 1-3 The precision lifting platform 100 also includes several anti-collision blocks 8.

[0114] Specifically, a number of anti-collision blocks 8 are fixedly installed on the base plate 11 and are arranged in pairs at both ends of the first wedge block 21 in the first direction 1001.

[0115] In this embodiment, when the shielding plate 7 is located at the position of the first photoelectric switch 5 or the second photoelectric switch 6, the anti-collision block 8 can buffer the first wedge block 21.

[0116] Combination Figures 1-6The motion principle of this precision lifting platform 100 is described in detail below: First, the moving part 32 of the linear motor 3 drives the first wedge block 21 to move in the first direction 1001; then, the first wedge block 21 causes the second wedge block 23 to move in the second direction 1002 through the inclined surface cooperation, thereby completing the lifting motion of the second wedge block 23.

[0117] It should be noted that the precision lifting platform 100 employs an inclined surface engagement between the second wedge block 23 and the first wedge block 21, converting the large stroke displacement of the first wedge block 21 in the first direction 1001 into a small stroke displacement of the second wedge block 23 in the second direction 1002. This multiplicative subdivision of the large stroke displacement effectively improves the motion accuracy of the second wedge block 23 in the second direction 1002, while also shortening the stroke. Furthermore, the inclined surface engagement allows the second wedge block 23 to perform lifting motion in the second direction 1002, increasing the accuracy of the second wedge block 23 in the first direction 1002. The increased load area in the second direction 1002 further enhances the load capacity of the second wedge block 23. Furthermore, the precision lifting platform 100 guides the second wedge block 23 to move in the second direction 1002 through the cooperation between the linear guide mechanism 25 and the second cross roller guide rail 24. This constrains the degrees of freedom of movement of the first wedge block 21 and the second wedge block 23, ensuring the smooth operation of the precision lifting platform 100. This further improves the motion accuracy of the precision lifting platform 100 and reduces the dimensional margin in the second direction 1002, resulting in a more compact structure.

[0118] It is understandable that the detection accuracy of precision testing equipment is often related to the motion accuracy of the precision lifting platform 100. The motion accuracy of the precision lifting platform 100 is affected not only by manufacturing and installation accuracy, but also by the component accuracy of various parts of the precision lifting platform 100 (for example, the precision lifting platform 100 is also affected by the machining accuracy of the cross roller guide mounting surface and assembly errors). Moreover, stress deformation also has a significant impact on the motion accuracy of the precision lifting platform 100. Therefore, it is necessary to analyze and optimize the stress deformation of the precision lifting platform 100 by combining theoretical calculations with the actual working environment of the precision lifting platform 100.

[0119] In layman's terms, motion control algorithms refer to algorithms that control the trajectory of a target. These algorithms are typically built into the motion control system. In practical applications, commands are sent to the motion control system to coordinate the movement of various components (e.g., controlling XYZ three-dimensional fixed-point motion). Common motion control algorithms include interpolation and trajectory look-ahead. The two most common interpolation methods are linear interpolation and circular interpolation. Interpolation requires at least two axes. During interpolation, the planned axes are mapped to the corresponding machine coordinate system. The motion controller then controls the movement of each axis according to the coordinate mapping to achieve the preset trajectory. Furthermore, interpolation commands are stored in a motion buffer, and commands are retrieved and executed sequentially until the entire interpolation is completed. Additionally, in actual operation, continuous interpolation is sometimes enabled to improve efficiency, further enhancing the motion trajectory. If deceleration is not applied at corners, especially at large corners, it can cause significant impact on the machine tool, affecting operational accuracy. In actual operation, disabling continuous interpolation to reduce deceleration to zero at corners protects the machine tool but significantly impacts efficiency. Therefore, look-ahead commands are provided to automatically determine whether to reduce the corner speed to a reasonable value, ensuring both operational accuracy and increased speed. This is the function of trajectory look-ahead. Specifically, the motion controller's trajectory look-ahead can automatically calculate a smooth speed plan based on the user's motion path, reducing impact on the machine tool and improving operational accuracy. Generally, it automatically analyzes the inflection points of the command trajectory within the motion buffer zone and calculates the corner speed based on user-defined corner conditions. It also calculates the speed plan based on the user-defined maximum acceleration value, ensuring that acceleration and deceleration during any process do not exceed ACCEL (Acceleration Acceleration). The values ​​of l (acceleration) and DECEL (deceleration) are used to prevent destructive impact forces on mechanical parts. Furthermore, a motion control algorithm is an algorithm that uses machine controllers and computer programs to achieve precise control of a mechanical system. It is typically used to control the motion of a mechanical system to achieve desired performance. In summary, motion control algorithms can make the motion of mechanical systems more precise, stable, fast, and reliable, and can achieve automated control. Motion control algorithms can be divided into two categories: motion control and position control.

[0120] Specifically, motion control refers to controlling the speed, acceleration, and torque of a mechanical system to achieve the desired objective; while position control refers to controlling the position of a mechanical system to achieve the required precision. Furthermore, among various motion control algorithms, the most commonly used include PID (Proportional Integral-Derivative) control, fuzzy control, neural network control, and sliding mode control. PID control is the most frequently used motion control algorithm, using feedback signals to control the speed and position of the mechanical system. Fuzzy control utilizes fuzzy logic to control the mechanical system, effectively suppressing the influence of noise. Neural network control uses neural network technology to control the mechanical system, exhibiting strong robustness and adaptability. Sliding mode control utilizes sliding mode theory to control the mechanical control system, possessing strong robustness (the ability of a system to maintain stable performance and function when faced with changes in its internal structure and external environment; specifically, a robust system can still operate normally and maintain good performance under the influence of various adverse factors such as interference, noise, and faults).

[0121] Motion control algorithms play a crucial role in engineering practice, effectively controlling the motion of mechanical systems to improve their performance, reduce energy consumption, and achieve precise control. Furthermore, motion control algorithms enable intelligent control of mechanical systems, allowing them to complete tasks more independently and intelligently.

[0122] Specifically, the control system is required to enable the expansion of I / O ports (Input / Output) to control the precision lifting platform 100, and can also be driven by position comparison differential output pulses, and connected to the feedback device of electronic subdivision (i.e., grating ruler and grating reading head) to improve motion accuracy.

[0123] In this embodiment, the improvement of the overall efficiency and control accuracy of the precision lifting platform 100 requires the use of a PID algorithm. The PID controller consists of a proportional unit, an integral unit, and a derivative unit. In addition, although it is difficult to achieve the motion performance indicators by relying solely on the PID controller in a high-precision and high-acceleration motion system, the performance of the PID controller can be significantly improved by adding targeted compensation and correction steps, including improving the response speed, motion accuracy, and tracking error of the PID controller.

[0124] It is understandable that the comprehensive control strategy combining the PID algorithm with the feedforward compensation method is to add two links, velocity feedforward and acceleration feedforward, to the control loop, which can better achieve high-precision control.

[0125] It should be noted that during the movement of this precision lifting platform 100, changes in load and environmental vibrations, temperature, etc., will cause disturbances. Therefore, the control system needs to have strong anti-interference capabilities to ensure that the precision lifting platform 100 can maintain its motion performance under a certain degree of interference. For ultra-precision measuring equipment, the environment itself has strict requirements. This precision lifting platform 100, in conjunction with existing air-bearing vibration isolation platforms, can block vibrations of a certain frequency, thereby effectively reducing external vibrations to the precision lifting platform 100. Furthermore, by adding precision natural granite to the shock absorbers, the precision lifting platform 100 can eliminate external interference vibrations when running on the shock absorbers. Then, by adding adjustable mechanical devices to the shock absorbers, the flatness of the precision lifting platform 100 can be adjusted through these mechanical devices when running on the vibration isolation platform, thus allowing the precision lifting platform 100 to operate normally.

[0126] Generally, when measuring the positioning accuracy and axial data of this precision lifting platform 100, it is necessary to obtain various parameters (e.g., speed, acceleration, parallelism, perpendicularity, and flatness error, etc.), including the x-axis (i.e., the coordinate axis orthogonal to both the y-axis and z-axis), the y-axis (i.e., the coordinate axis parallel to the first direction 1001), the z-axis (i.e., the coordinate axis parallel to the second direction 1002), pitch angle, yaw angle, and roll angle. The testing equipment used to perform these measurements on the precision lifting platform 100 should possess, but is not limited to, the following characteristics:

[0127] (1) It has a geometric accuracy detection function, which can be used to detect straightness, perpendicularity, pitch and yaw, flatness, parallelism, etc.;

[0128] (2) It has the function of position accuracy detection and automatic compensation, and can detect the positioning accuracy, repeatability, and micro-displacement accuracy of CNC machine tools; that is, the detection equipment can not only automatically measure the machine error, but also automatically compensate for its linear error through the interface, and can maximize the number of compensation points on the measured axis to make the platform achieve the best accuracy.

[0129] (3) It can perform fully automatic measurement at any angle position and at any angle interval, and give statistical results processed according to relevant standards;

[0130] (4) It can compensate for linearity errors;

[0131] (5) It has dynamic performance detection function, which can realize dynamic characteristic analysis of linear motor, response characteristic analysis of servo drive system and dynamic characteristic (low speed crawling) analysis of guide rail, etc.

[0132] (6) It can simultaneously measure linear positioning error, straightness error, yaw angle, pitch angle and roll angle, as well as measure parameters such as speed, acceleration and vibration, and evaluate the dynamic characteristics of the precision lifting platform 100.

[0133] In summary, the precision lifting platform provided by this invention incorporates a first wedge block, a second wedge block, a first cross roller guide rail, a second cross roller guide rail, and a feedback device. This allows the wedge-shaped lifting components, the miniature cross roller guide rail, and the feedback device for acquiring position parameters to be combined, forming a specific structural design. Through this specific structural design and the use of a linear motor instead of a traditional rotary motor, motion error compensation can be achieved, thereby improving the lifting platform's motion speed and accuracy, even reaching micron-level motion accuracy. This meets the precision and speed requirements of a precision lifting platform and gives it the advantage of a compact structure. The cross roller guide rails incorporated in this precision lifting platform have the advantages of a large contact area and small elastic deformation, thus enabling high rigidity and high-load motion. This precision lifting platform has a long-term market prospect; its motion accuracy and stability are at the forefront of existing lifting platform technology, offering significant development opportunities and the potential to achieve certain social benefits. Therefore, the precision lifting platform provided by this invention has a certain degree of novelty compared to traditional lifting platforms.

[0134] The above description, in conjunction with specific / preferred embodiments, provides a further detailed explanation of the present invention, but it should not be construed as limiting the specific implementation of the invention to these descriptions. Those skilled in the art will recognize that various modifications and improvements can be made without departing from the concept of the present invention, and all such modifications and improvements fall within the scope of protection of the present invention.

Claims

1. A precision lifting platform, comprising: Platform base; characterized in that it further includes: A lifting component; the lifting component includes: a first wedge block, a first cross roller guide rail, a second wedge block, a second cross roller guide rail, and at least one pair of linear guide mechanisms; The first wedge block has a horizontal mounting portion and an oblique mounting portion, and the oblique mounting portion is inclined relative to the horizontal mounting portion; a portion of the first cross roller guide is fixedly mounted on the platform base, and the other portion is fixedly connected to the horizontal mounting portion to guide the first wedge block to reciprocate in a first direction; The second wedge block has a bearing portion and an assembly portion, and the assembly portion is inclined to the bearing portion; a portion of the second cross roller guide is fixedly mounted on the inclined mounting portion, and the other portion is fixedly connected to the assembly portion; a portion of each of the linear guide mechanisms is fixedly mounted on the platform base, and the other portion is fixedly connected to the second wedge block; With the cooperation of the second cross roller guide and the linear guide mechanism, the second wedge block can follow the movement of the first wedge block in the first direction and move along the second direction, and the second direction and the first direction are orthogonal to each other; A linear motor; one part of the linear motor is fixedly mounted on the platform base, and the other part is fixedly connected to the first wedge block to drive the first wedge block to reciprocate in the first direction; Feedback device; the feedback device is installed on the second wedge block and / or the platform base, and is used to obtain the position parameters of the second wedge block.

2. The precision lifting platform according to claim 1, characterized in that, A first angle is formed between the oblique mounting part and the horizontal mounting part, and a second angle is formed between the assembly part and the bearing part, wherein the first angle and the second angle are equal.

3. The precision lifting platform according to claim 2, characterized in that, The platform base includes: A substrate and a pair of support plates; the pair of support plates are disposed on opposite sides of the substrate in the first direction and protrude from the surface of the substrate in the second direction; The surface of the substrate and the surfaces of the pair of support plates enclose a receiving space, and the lifting component and the linear motor are both housed within the receiving space.

4. The precision lifting platform according to claim 3, characterized in that, The first cross roller guides are arranged in pairs on the surface of the substrate and extend along a first direction; The second cross roller guide is arranged in pairs between the first wedge block and the second wedge block, and extends in the third direction; Wherein, the third direction is inclined to the first direction or the second direction, and the preset angle between the third direction and the first direction is equal to the first angle or the second angle.

5. The precision lifting platform according to claim 3, wherein the first wedge block has a motor mounting groove, and both the horizontal mounting portion and the oblique mounting portion are located outside the motor mounting groove; characterized in that, The linear motor includes at least: A stator component and a mover component; the stator component is fixedly mounted on the base plate, the mover component is fixedly connected to the first wedge block, and both the stator component and the mover component are located inside the motor mounting slot; The moving part can move relative to the stator part to drive the first wedge block to reciprocate in the first direction.

6. The precision lifting platform according to claim 3, wherein at least one pair of the linear guide mechanisms are disposed on opposite sides of the second wedge block in the first direction; characterized in that, The linear guide mechanism includes: A linear guide and a slider, one of which is fixedly mounted on the second wedge block, and the other is fixedly connected to the support plate; The linear guide rail extends along the second direction; the slider is sleeved on the linear guide rail so that the slider can reciprocate along the second direction on the linear guide rail.

7. The precision lifting platform according to claim 3, characterized in that, The feedback device includes at least: A grating ruler and a grating reading head; the grating ruler is attached to the second wedge block, and the grating reading head is connected to the substrate through a reading head fixing block; The grating ruler can move relative to the grating reading head as the second wedge block moves in the second direction; The grating reading head can cover at least a portion of the grating ruler; when the grating ruler moves relative to the grating reading head, the position parameters of the second wedge block can be obtained in real time. The reading head fixing block has multiple adjustable degrees of freedom.

8. The precision lifting platform according to claim 5, characterized in that, Also includes: First photoelectric switch, second photoelectric switch, and shielding plate; The first photoelectric switch and the second photoelectric switch are fixed on the substrate, and the first photoelectric switch and the second photoelectric switch are far apart from each other along the first direction; The first photoelectric switch is spaced at a predetermined distance from one end of the substrate in the first direction; the second photoelectric switch is spaced at a predetermined distance from the other end of the substrate in the first direction. The baffle is fixed to the first wedge block so that the baffle can move along with the movement of the first wedge block.

9. The precision lifting platform according to claim 8, characterized in that, Both the first photoelectric switch and the second photoelectric switch can be connected to the moving part via cables and cooperate with the baffle plate to limit the travel range of the first wedge block in the first direction.

10. The precision lifting platform according to claim 8, characterized in that, Also includes: A plurality of anti-collision blocks; the plurality of anti-collision blocks are fixedly mounted on the substrate and are arranged in pairs at both ends of the first wedge block in the first direction; When the shield is located at the position of the first photoelectric switch or the second photoelectric switch, the anti-collision block can buffer the first wedge block.

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