A recovery device for semiconductor stripping solution

Abstract

The application belongs to the technical field of semiconductor production, and discloses a recovery device for semiconductor stripping liquid, which comprises a base, a cylinder, a stirring device and a transmission device. In the application, when the transmission device drives the main shaft to rotate, the main stirring rod drives the sliding frame to move up and down through the transmission, and the main stirring rod and the auxiliary stirring rod stir the waste liquid in the horizontal direction, and the sliding frame stirs the waste liquid in the vertical direction, so that the precipitant and the pH neutralizing agent in the waste liquid are more evenly diffused. Meanwhile, the force applied to the waste liquid by the sliding frame when moving downward is greater than that when moving upward, and at this time, the solid in the waste liquid moves to the bottom of the cylinder along with the movement of the waste liquid, so that the solid gradually sinks to the bottom and enters the slag discharge pipe and is taken out by the spiral blade, thereby accelerating the filtration speed of the waste liquid.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor production, and particularly relates to a recovery device for semiconductor stripping solution. BACKGROUND

[0002] The semiconductor stripping solution refers to a cleaning solution used in a photoetching link in a semiconductor production link. In the photoetching link, when a silicon wafer completes an exposure step, if different photoetching patterns need to be replaced, stripping solution needs to be used to clean the existing photoresist. When the stripping solution is used, the stripping solution is uniformly coated on the surface of the silicon wafer, and then the coated silicon wafer is soaked at a proper temperature, and then the silicon wafer is cleaned by using deionized water or the like to remove the residual stripping solution and photoresist. At this time, the stripping solution waste liquid contains various organic solvents and metal ions, and if it is directly discharged, it will cause pollution to the environment, and will also cause waste of the metal ions and the organic solvents in the waste liquid, so the stripping solution waste liquid needs to be recovered.

[0003] At present, in the recovery of the waste liquid, a recovery process of coarse filtration, pH value adjustment, chemical precipitation, re-filtration and rectification is mainly used. This not only has the defect of long recovery process, but also in the process of adjusting the pH value and chemical precipitation, in order to make the pH value adjusting agent and the precipitant uniformly diffuse, the waste liquid also needs to be stirred for a long time, which further increases the time required for recovery, and seriously affects the recovery efficiency. SUMMARY

[0004] The application aims to provide a recovery device for semiconductor stripping solution to solve the problems in the background art.

[0005] In order to achieve the above-mentioned purpose, the application provides the following technical scheme: a recovery device for semiconductor stripping solution, comprising a base and a cylinder body fixedly installed on the base, further comprising:

[0006] A main shaft is rotatably installed in the inside of the cylinder body, a plurality of center-symmetrical slag discharge pipes are fixedly connected to the inner bottom surface of the cylinder body, and the top ends of the slag discharge pipes extend out of the top surface of the cylinder body;

[0007] The stirring device comprises a third gear and a plurality of main stirring rods, the third gear is fixedly sleeved on the outer side of the main shaft and abuts against the inner top surface of the cylinder, the inner top surface of the cylinder is rotationally installed with a plurality of fourth gears meshing with the third gear, the two ends of the main stirring rod are fixedly connected with universal joints, the outer surface of the main shaft is slidingly connected with a sliding frame, the sliding frame is located below the third gear, the main stirring rod is parallel to the axis of the main shaft, the universal joint at the top end of the main stirring rod is fixedly connected to the bottom surface of the fourth gear above it, and the universal joint at the bottom end of the main stirring rod is fixedly connected to the top surface of the sliding frame, the sliding frame is composed of a plurality of upper and lower connected circular discs, a plurality of center-symmetric water passages are formed in the bottom surface of the circular disc, and a plurality of closing plates are hingedly connected to the bottom surface of the circular disc, and when the closing plate abuts against the bottom surface of the circular disc, the corresponding water passage is closed.

[0008] Preferably, the side surface of the slag discharge pipe is fixedly connected with a slag outlet communicating with the inside thereof, and the slag outlet is located on the part of the slag discharge pipe extending out of the cylinder and faces away from the main shaft.

[0009] Preferably, a spiral blade is rotationally installed in the inside of the slag discharge pipe, the top end of the rotation axis of the spiral blade penetrates the top of the slag discharge pipe, the side surface of the slag discharge pipe close to the inner bottom surface of the cylinder is provided with a slag inlet, the slag inlet faces the main shaft, and a plurality of anti-blocking holes are formed in the surface of the spiral blade.

[0010] Preferably, the stirring device further comprises a transmission device, the transmission device comprises a motor fixedly connected to the top surface of the cylinder, the output shaft of the motor is fixedly sleeved with a first gear, the outer surface of the main shaft is fixedly sleeved with a second gear meshing with the first gear, the top end of the rotation axis of the main shaft and the spiral blade is fixedly sleeved with a belt pulley, and a plurality of belt pulleys are drivingly connected through a belt, so that the main shaft drives the spiral blade to rotate through the belt.

[0011] Preferably, the outer surface of the main stirring rod is fixedly connected with a plurality of auxiliary stirring rods, the axis of the auxiliary stirring rod is perpendicular to the axis of the main stirring rod, and the axes of the auxiliary stirring rods connected to adjacent main stirring rods are non-parallel.

[0012] Preferably, the top surface of the cylinder is fixedly connected with a top cover, the slag outlet penetrates the side surface of the top cover and extends out, and the bottom surface of the cylinder is raised in a circular table shape.

[0013] Preferably, the side surface of the cylinder is fixedly connected with an input port, and the bottom surface of the cylinder is fixedly connected with an output port.

[0014] Preferably, the universal joint connected to the bottom surface of the fourth gear is fixedly connected to the part of the bottom surface of the fourth gear close to the teeth thereof, and when the fourth gear rotates, the universal joint moves around the axis of the corresponding fourth gear.

[0015] The beneficial effects of the present application are as follows:

[0016] 1、In the present application, by setting the stirring device, when the starting transmission device drives the main shaft to rotate, the third gear drives the fourth gear to rotate, and then drives the connected universal joint to move, at this time the main stirring rod drives the sliding frame to move up and down, at this time the main stirring rod and the auxiliary stirring rod stir the waste liquid in the horizontal direction, and the sliding frame stirs the waste liquid in the vertical direction, so that the precipitant and the pH neutralizing agent in the waste liquid are more evenly diffused, and the treatment effect of the waste liquid is ensured. At the same time, during the upward movement of the sliding frame, the resistance provided by the waste liquid causes the closing plate to open, and during the downward movement of the sliding frame, the resistance of the waste liquid causes the closing plate to adhere to the bottom surface of the disc, closing the water outlet, so that the force exerted by the sliding frame on the waste liquid when moving downward is greater than when moving upward. At this time, the solid in the waste liquid will move to the bottom of the cylinder along with the movement of the waste liquid, and then gradually sink to the bottom and enter the slag discharge pipe and be carried out by the spiral blade, thereby accelerating the filtration speed of the waste liquid.

[0017] 2、Secondly, during the upward movement of the sliding frame, the solid that has not entered the slag discharge pipe will be carried upward by the water flow generated by the upward movement of the sliding frame, and as the sliding frame moves downward, the water flow generated by the downward movement of the sliding frame will cause the floating solid to move upward and in the direction of the main shaft. With the continuous upward and downward movement of the sliding frame, the solid continuously moves and finally enters the slag discharge pipe with the water flow to ensure the filtration effect of the solid in the waste water.

[0018] 3、Finally, by opening the anti-blocking hole on the spiral blade, during the transportation of the solid by the spiral blade, the continuous upward and downward movement of the sliding frame causes the liquid level in the slag discharge pipe to change, and then the solid adhering to the surface of the spiral blade is stripped by the water flow, preventing the solid from continuously adhering to the surface of the spiral blade and ensuring the filtration effect of the solid. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the present application;

[0020] Figure 2 It is a schematic diagram of the transmission device structure of the present application;

[0021] Figure 3 It is a schematic diagram of the cross-sectional structure of the cylinder of the present application;

[0022] Figure 4 It is a schematic diagram of the cross-sectional structure of the slag discharge pipe of the present application; Figure 3

[0023] Figure 5 It is a schematic diagram of the cross-sectional structure of the slag discharge pipe of the present application;

[0024] ​ Figure 6 This is a cross-sectional view of the sliding frame structure of the present invention.

[0025] In the diagram: 1. Base; 2. Cylinder; 21. Inlet; 22. Outlet; 23. Top cover; 24. Main shaft; 25. Slag discharge pipe; 26. Slag outlet; 27. Spiral blade; 28. Slag inlet; 29. ​​Anti-clogging hole; 3. Transmission device; 31. Motor; 32. First gear; 33. Second gear; 34. Pulley; 4. Stirring device; 41. Main stirring rod; 42. Third gear; 43. Fourth gear; 44. Sliding frame; 441. Disc; 442. Water outlet; 443. Closing plate; 45. Universal joint; 46. Auxiliary stirring rod. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] like Figures 1 to 6 As shown, this embodiment of the invention provides a device for recovering semiconductor stripping fluid, including a base 1 and a cylinder 2 fixedly mounted thereon, and further comprising:

[0028] A main shaft 24 is rotatably installed inside the cylinder 2, and multiple centrally symmetrical slag discharge pipes 25 are fixedly connected to the inner bottom surface of the cylinder 2, with the top end of the slag discharge pipes 25 extending out of the top surface of the cylinder 2.

[0029] The stirring device 4 includes a third gear 42 and multiple main stirring rods 41. The third gear 42 is fixedly sleeved on the outer side of the main shaft 24 and abuts against the inner top surface of the cylinder 2. Multiple fourth gears 43 that mesh with the third gear 42 are rotatably mounted on the inner top surface of the cylinder 2. Universal joints 45 are fixedly connected to both ends of the main stirring rods 41. A sliding frame 44 is slidably connected to the outer surface of the main shaft 24. The sliding frame 44 is located below the third gear 42. The main stirring rods 41 and the main shaft 24 are connected to the main shaft 24. The axis of 24 is parallel, and the universal joint 45 at its top is fixedly connected to the bottom surface of the fourth gear 43 above it. The universal joint 45 at its bottom is fixedly connected to the top surface of the sliding frame 44. The sliding frame 44 is composed of multiple layers of discs 441 connected vertically. The bottom surface of the discs 441 has multiple centrally symmetrical water inlets 442. The bottom surface of the discs 441 is hinged with multiple closing plates 443. When the closing plates 443 abut against the bottom surface of the discs 441, they close the corresponding water inlets 442.

[0030] In the present application, by setting the stirring device 4, when starting the transmission device 3 to drive the main shaft 24 to rotate, the third gear 42 drives the fourth gear 43 to rotate, and then drives the connected universal joint 45 to move, at this time the main stirring rod 41 drives the sliding frame 44 to move up and down, at this time the main stirring rod 41 and the auxiliary stirring rod 46 stir the waste liquid in the horizontal direction, and the sliding frame 44 stirs the waste liquid in the vertical direction, so that the precipitator and the pH neutralizing agent in the waste liquid are more evenly dispersed, and the treatment effect of the waste liquid is ensured. At the same time, in the process of the sliding frame 44 moving up and down, when the sliding frame 44 moves up, the resistance provided by the waste liquid makes the closing plate 443 open, and when the sliding frame 44 moves down, the resistance of the waste liquid makes the closing plate 443 adhere to the bottom surface of the disc 441, which closes the water inlet 442, so that the force exerted by the sliding frame 44 on the waste liquid when moving down is greater than that when moving up. At this time, the solid in the waste liquid will move to the bottom of the cylinder 2 along with the movement of the waste liquid, and then gradually sink to the bottom and enter the slag discharge pipe 25 and be carried out by the spiral blade 27, thereby accelerating the filtration speed of the waste liquid.

[0031] Secondly, in the process of the sliding frame 44 moving up, the solid that has not entered the slag discharge pipe 25 will be carried upward by the water flow generated by the movement of the sliding frame 44, and as the sliding frame 44 moves down, the water flow generated by the sliding frame 44 pushing the waste liquid downward will make the floating solid move upward along with the direction of the main shaft 24. With the continuous up-and-down movement of the sliding frame 44, the solid continuously moves, and finally enters the slag discharge pipe 25 along with the water flow, so as to ensure the filtration effect of the solid in the waste water.

[0032] Finally, by opening the anti-blocking hole 29 on the spiral blade 27, in the process of the solid being transported by the spiral blade 27, the sliding frame 44 continuously moves up and down, so that the liquid level in the slag discharge pipe 25 changes, and then the solid adhering to the surface of the spiral blade 27 is stripped by the water flow, preventing the solid from continuously adhering to the surface of the spiral blade 27, and ensuring the filtration effect of the solid.

[0033] As shown in Figures 2 to 5 The side surface of the slag discharge pipe 25 is fixedly connected with the slag outlet 26 which communicates with the inside of the slag discharge pipe 25, the slag outlet 26 is located on the part of the slag discharge pipe 25 extending out of the cylinder 2 and faces away from the main shaft 24, the inside of the slag discharge pipe 25 is rotatably installed with the spiral blade 27, the top end of the rotating shaft of the spiral blade 27 penetrates through the top of the slag discharge pipe 25, the side surface of the slag discharge pipe 25 close to the inner bottom surface of the cylinder 2 is provided with the slag inlet 28 which faces the main shaft 24, and the surface of the spiral blade 27 is provided with a plurality of anti-blocking holes 29.

[0034] The anti-blocking hole 29 is arranged to prevent the solid in the waste liquid from adhering to the surface of the spiral blade 27, causing the solid to be accumulated at the top of the slag discharge pipe 25 and stuck in the spiral blade 27 during the movement of the spiral blade 27. During the rotation of the main shaft 24, the lower sliding frame 44 moves up and down under the traction of the main stirring rod 41. When the sliding frame 44 moves downward, the waste liquid in the barrel 2 is extruded downward, and part of the waste liquid enters the slag discharge pipe 25 through the slag inlet 28 and is lifted upward in the slag discharge pipe 25 through the anti-blocking hole 29, preventing the solid from being stuck in the anti-blocking hole 29 and adhering to the surface of the spiral blade 27, and ensuring the filtering effect of the device.

[0035] As shown in Figure 2 , the transmission device 3 is further arranged, which includes a motor 31 fixedly connected to the top surface of the barrel 2. The output shaft of the motor 31 is fixedly sleeved with a first gear 32. The outer surface of the main shaft 24 is fixedly sleeved with a second gear 33 engaged with the first gear 32. The top end of the rotation shaft of the spiral blade 27 and the main shaft 24 are fixedly sleeved with a belt pulley 34. The plurality of belt pulleys 34 are connected through a belt drive, so that the main shaft 24 drives the spiral blade 27 to rotate through the belt.

[0036] The transmission device 3 is arranged to drive the main shaft 24 and the spiral blade 27 to work simultaneously. When the motor 31 drives the main shaft 24 to rotate, the third gear 42 drives the fourth gear 43 to rotate, and the fourth gear 43 drives the corresponding main stirring rod 41 to move through the universal joint 45, and then drives the lower sliding frame 44 to move up and down. During the downward movement of the sliding frame 44, the closing plate 443 closes the water inlet 442, so that the solid in the waste liquid is pushed downward, and the circular table arranged at the bottom of the barrel 2 moves the solid to the slag discharge pipe 25. When the solid enters the slag discharge pipe 25 through the slag inlet 28, the spiral blade 27 transports it upward and discharges it from the slag outlet 26, improving the separation efficiency of the solid in the waste liquid.

[0037] As shown in Figure 3 and Figure 4 , the outer surface of the main stirring rod 41 is fixedly connected with a plurality of auxiliary stirring rods 46. The axis of the auxiliary stirring rod 46 is perpendicular to the axis of the main stirring rod 41. The axes of the auxiliary stirring rods 46 connected to the adjacent main stirring rods 41 are non-parallel.

[0038] During the rotation of the main shaft 24, it drives the third gear 42 to rotate, and then drives the fourth gear 43 to rotate. At this time, the universal joint 45 rotates around the rotation axis of the fourth gear 43, and then drives the main stirring rod 41 connected thereto to move around its bottom end. With the movement of the main stirring rod 41, the auxiliary stirring rod 46 connected to its surface moves together to stir the waste liquid to improve the precipitation speed and the diffusion speed of the pH neutralizing agent.

[0039] As shown in Figure 1and Figure 3 As shown, a top cover 23 is fixedly connected to the top surface of the cylinder 2, and a slag outlet 26 extends through the side of the top cover 23. The bottom center of the cylinder 2 rises upward in a frustum shape. An inlet 21 is fixedly connected to the side of the cylinder 2, and an outlet 22 is fixedly connected to the bottom surface of the cylinder 2.

[0040] The top cover 23 is designed to protect the transmission device 3 and prevent it from being jammed by external debris during operation, which would prevent the device from operating normally. At the same time, the bottom of the cylinder 2 is designed as a frustum, which allows impurities and other objects that need to be filtered out inside the cylinder 2 to move along the slag discharge pipe 25 with an inclined surface to the sides, thereby improving the filtration efficiency.

[0041] like Figure 3 As shown, the universal joint 45, which is connected to the bottom surface of the fourth gear 43, is fixedly connected to the part of the bottom surface of the fourth gear 43 near its teeth. When the fourth gear 43 rotates, the universal joint 45 moves around the axis of the corresponding fourth gear 43.

[0042] Universal joint 45 is fixed at an eccentric position on the bottom surface of the fourth gear 43. When the fourth gear 43 rotates, as the universal joint 45 approaches the main shaft 24, it will cause the main stirring rod 41 below to tilt. This will cause the sliding frame 44 below to move upward through the main stirring rod 41. As the universal joint 45 moves away from the main shaft 24, the main stirring rod 41 will cause the sliding frame 44 below to move downward. This will cause the sliding frame 44 to move up and down during the rotation of the main shaft 24, thus stirring the waste liquid in the cylinder 2 in the vertical direction and accelerating the treatment efficiency of the waste liquid.

[0043] Working principle:

[0044] When using this invention, the waste liquid is first fed into the cylinder 2 through the inlet 21, and then the motor 31 is turned on. At this time, the motor 31 drives the first gear 32 to rotate, the first gear 32 drives the second gear 33 to rotate, and then drives the main shaft 24 to rotate. At this time, the third gear 42 fixed on it rotates and drives the fourth gear 43 meshing with the third gear 42 to rotate.

[0045] In the process of the rotation of the fourth gear 43, the universal joint 45 fixed on the bottom surface of the fourth gear 43 rotates around the rotation axis of the fourth gear 43, and in the process of the movement of the universal joint 45, the top end of the main stirring rod 41 is moved together, at this time, the main stirring rod 41 moves at the top end and drives the sliding frame 44 to move up and down through itself and the universal joint 45 connected at the bottom end, when the sliding frame 44 moves upward, the closure plate 443 is opened under the resistance of the waste liquid, and the overflow port 442 is no longer closed, at this time, part of the solid in the waste liquid will move along the top surface of the closure plate 443 to the lower part of the water body, and then when the sliding frame 44 moves downward, the closure plate 443 closes the overflow port 442 under the resistance of the waste liquid, the pushing force of the sliding frame 44 on the water is improved, at this time, the solid will continue to move to the lower part of the water body under the pushing of the sliding frame 44, until it enters the slag discharge pipe 25 from the slag inlet 28, and then the solid in the slag discharge pipe 25 is conveyed upward by the spiral blade 27 and exits the slag discharge pipe 25 from the slag outlet 26.

[0046] In the process of the movement of the main stirring rod 41 driven by the fourth gear 43, the secondary stirring rod 46 connected to the outer surface of the main stirring rod 41 moves with the main stirring rod 41, thereby stirring the waste liquid in the horizontal direction, and in the process of the movement of the main stirring rod 41, the upward and downward movement of the sliding frame 44 stirs the waste liquid in the vertical direction, and the two stirring directions make the precipitant and the pH adjuster in the waste liquid more fully mixed with the waste liquid.

[0047] It should be noted that, in the present text, relational terms such as first and second and the like can only be used to distinguish one entity or operation from another entity or operation, without necessarily requiring or implying any such actual relationship or order between these entities or operations. Moreover, the terms "comprising", "containing" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such a process, method, article or equipment.

[0048] Although the embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made thereto without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A device for recovering semiconductor stripping fluid, comprising a base (1) and a cylinder (2) fixedly mounted thereon, characterized in that, Also includes: The cylinder (2) is rotatably mounted with a main shaft (24), and a plurality of centrally symmetrical slag discharge pipes (25) are fixedly connected to the inner bottom surface of the cylinder (2), with the top end of the slag discharge pipes (25) extending out of the top surface of the cylinder (2). A stirring device (4) includes a third gear (42) and multiple main stirring rods (41). The third gear (42) is fixedly sleeved on the outer side of the main shaft (24) and abuts against the inner top surface of the cylinder (2). Multiple fourth gears (43) meshing with the third gear (42) are rotatably mounted on the inner top surface of the cylinder (2). Universal joints (45) are fixedly connected to both ends of the main stirring rods (41). A sliding frame (44) is slidably connected to the outer surface of the main shaft (24). The sliding frame (44) is located below the third gear (42). The main stirring rods (41) are... 1) Parallel to the axis of the main shaft (24), the universal joint (45) at its top end is fixedly connected to the bottom surface of the fourth gear (43) above it, and the universal joint (45) at its bottom end is fixedly connected to the top surface of the sliding frame (44). The sliding frame (44) is composed of multiple layers of discs (441) connected vertically. The bottom surface of the discs (441) is provided with multiple centrally symmetrical water inlets (442). The bottom surface of the discs (441) is hinged with multiple closing plates (443). When the closing plates (443) abut against the bottom surface of the discs (441), they close the corresponding water inlets (442). The slag discharge pipe (25) is fixedly connected to a slag outlet (26) that communicates with its interior. The slag outlet (26) is located at the part of the slag discharge pipe (25) that extends out of the cylinder (2) and faces away from the main shaft (24). The slag discharge pipe (25) is rotatably mounted with a spiral blade (27). The top end of the spiral blade (27) shaft passes through the top of the slag discharge pipe (25). The slag discharge pipe (25) has a slag inlet (28) on the side near the bottom of the inner surface of the cylinder (2). The slag inlet (28) faces the main shaft (24). The surface of the spiral blade (27) has multiple sets of anti-clogging holes (29). The universal joint (45) connected to the bottom surface of the fourth gear (43) is fixedly connected to the part of the bottom surface of the fourth gear (43) near its teeth. When the fourth gear (43) rotates, the universal joint (45) moves around the axis of the corresponding fourth gear (43).

2. The device for recovering semiconductor stripping fluid according to claim 1, characterized in that: It also includes a transmission device (3), which includes a motor (31) fixedly connected to the top surface of the cylinder (2). The output shaft of the motor (31) is fixedly sleeved with a first gear (32). The outer surface of the main shaft (24) is fixedly sleeved with a second gear (33) that meshes with the first gear (32). The top ends of the shafts of the main shaft (24) and the spiral blade (27) are both fixedly sleeved with pulleys (34). Multiple pulleys (34) are connected by belt drive, so that the main shaft (24) drives the spiral blade (27) to rotate through the belt.

3. The device for recovering semiconductor stripping fluid according to claim 2, characterized in that: Multiple auxiliary stirring rods (46) are fixedly connected to the outer surface of the main stirring rod (41). The axis of the auxiliary stirring rod (46) is perpendicular to the axis of the main stirring rod (41), and the axes of the auxiliary stirring rods (46) connected to adjacent main stirring rods (41) are not parallel.

4. The device for recovering semiconductor stripping fluid according to claim 3, characterized in that: The top surface of the cylinder (2) is fixedly connected to a top cover (23), the slag outlet (26) penetrates the side of the top cover (23) and extends out, and the bottom center of the cylinder (2) rises upward in a frustum shape.

5. The device for recovering semiconductor stripping fluid according to claim 4, characterized in that: An inlet (21) is fixedly connected to the side of the cylinder (2), and an outlet (22) is fixedly connected to the bottom of the cylinder (2).

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