A rotating rack device for uniform vacuum coating of parts surface

Abstract

The invention discloses a turret device for uniform vacuum coating of part surfaces, belonging to the technical field of vacuum coating auxiliary equipment, the turret device comprises an upper fixing plate and a lower fixing plate, a plurality of fixing rods and a transmission shaft are arranged between the fixing plate and the lower fixing plate; each transmission shaft is provided with at least one part coating turret unit along its length direction, the part coating turret unit comprises a bearing fixing seat and a paddle fixing seat, a part fixture is provided with a lower top column and an upper top column for clamping the plated part, the lower top column is provided with a sprocket, and a spring paddle is provided on the paddle fixing seat; the transmission shaft drives the plated part on the part fixture to revolve, and during the revolution of the part fixture, the spring paddle paddle paddles the sprocket to realize the rotation of the lower top column around its own axis, and finally the plated part can be realized to revolve around the axis of the transmission shaft and to rotate around its own axis, so that all-round thin film deposition can be realized on the surface of the plated part, thereby improving the uniformity of the film layer on the surface of the plated part.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum coating auxiliary equipment, and in particular relates to a rotating rack device for uniform vacuum coating of a part surface. Background Art

[0002] Vacuum coating technology, especially physical vapor deposition (PVD) technology, occupies a pivotal position in modern industry. This technology deposits the coating material in the form of vapor phase on the surface of the substrate under a vacuum environment to form a thin film with specific properties. This thin film can not only improve the surface properties of the substrate, such as improving hardness, wear resistance, and corrosion resistance, but also give the substrate new functions, such as electrical conductivity, thermal conductivity, and optical properties. Therefore, vacuum coating technology has been widely used in many fields such as automobiles, aerospace, electronics, optics, and decoration. However, during the coating process, the uniformity of the surface of the parts is often affected by the structure and process parameters of the coating equipment. During the coating process, the traditional coating tooling may cause uneven coating thickness due to the fixed position or uneven rotation of the parts, affecting the product quality. In addition, unlike electroplating, the vacuum coating process has a shadow effect, which makes it impossible to coat the clamping end of the part, and the coating thickness near the clamping part is lower than that of other areas due to the shadow effect. Therefore, the existing vacuum coating tooling is not only difficult to ensure that the surface of the plated part can be completely coated with a thin film, but also the uniformity of the film cannot be guaranteed. Summary of the invention

[0003] In view of the above problems, the present invention aims to provide a rotating rack device for uniform vacuum coating of part surfaces, which solves the problem of uneven coating thickness in traditional coating tooling.

[0004] In order to achieve the above-mentioned object of the invention, the technical solution adopted by the present invention is as follows:

[0005] A rotating rack device for uniform vacuum coating of a part surface is provided, which comprises an upper fixing plate and a lower fixing plate which are coaxially arranged at intervals, a plurality of fixing rods and a plurality of transmission shafts are circumferentially arranged at intervals between the upper fixing plate and the lower fixing plate, the two ends of each fixing rod are respectively fixedly connected to the upper fixing plate and the lower fixing plate, and the two ends of each transmission shaft are respectively rotatably connected to the upper fixing plate and the lower fixing plate;

[0006] Each transmission shaft is provided with at least one parts coating turret unit along its length direction, and each parts coating turret unit comprises a bearing fixing seat fixedly connected to the transmission shaft, a paddle fixing seat is connected to the outer side of the bearing fixing seat through a bearing, and a plurality of spring paddles are circumferentially provided on the upper end surface of the paddle fixing seat;

[0007] A parts fixture is arranged on the top of the bearing fixing seat, and the parts fixture comprises a first lower top column fixing plate, a second lower top column fixing plate and an upper top column fixing plate which are arranged coaxially at intervals and fixedly connected to each other; a notch for the transmission shaft to pass through is opened on the first lower top column fixing plate, the second lower top column fixing plate and the upper top column fixing plate;

[0008] The first lower push column fixing plate is located below the second lower push column fixing plate, and the first lower push column fixing plate is fixedly connected to the upper end surface of the bearing fixing seat, and multiple lower push columns are rotatably arranged on the first lower push column fixing plate, and a sprocket is arranged on the outside of each lower push column, and each sprocket is matched with a spring paddle, which is used to contact the outer contour of the sprocket, and the top end of the lower push column passes through the second lower push column fixing plate and is located above it; an upper push column is rotatably arranged on the upper push column fixing plate, which is in a one-to-one matching relationship with the lower push column, and the axes of the lower push column and the upper push column coincide, and a plated part is arranged between the lower push column and the upper push column.

[0009] The principle of a turret device for uniform vacuum coating of part surfaces is as follows: when vacuum coating is required for the part to be coated, the part to be coated is first placed between a lower ejector column and an upper ejector column for fixation, and then the transmission shaft rotates around its own axis, thereby driving multiple part coating turret units on the transmission shaft to rotate, wherein the transmission shaft drives the bearing fixing seat and the part fixture to rotate, thereby realizing the revolution of the part to be coated around the axis of the transmission shaft, and a bearing is provided between the bearing fixing seat and the paddle fixing seat, then the bearing fixing seat will not transmit the rotational power to the paddle fixing seat, the paddle fixing seat will hardly rotate, and when the bearing fixing seat and the part fixture are revolving around the axis of the transmission shaft, the lower ejector column and the paddle fixing seat are rotating. The sprocket on the column contacts with multiple spring paddles on the upper end surface of the paddle fixing seat, and the spring paddle drives the sprocket to realize the rotation of the lower push column around its own axis. Since the plated part is pressed tightly between the push column and the upper push column, the lower push column transmits the rotational power to the plated part and the upper push column, thereby realizing the rotation of the plated part around its own axis. The rotating rack device of this scheme can ultimately realize the revolution of the plated part around the axis of the transmission shaft and the rotation around its own axis, so that the surface of the plated part can realize all-round thin film deposition, which can not only improve the uniformity of the film layer on the surface of the plated part and realize all-round coating on the surface of the plated part, but also effectively avoid the problems of jamming and low rotation frequency during the coating process.

[0010] Furthermore, a rotation blocking piece for contacting the fixed rod is fixed on the upper end surface of each paddle fixing seat. Although a bearing is arranged between the bearing fixing seat and the paddle fixing seat, when the transmission shaft drives the bearing fixing seat and the part fixture to rotate, the sprocket will contact the multiple spring paddles on the paddle fixing seat, which will cause a part of the rotational power to be transmitted, causing the paddle fixing seat to rotate along with the bearing fixing seat. After the rotation blocking piece contacts the fixed rod, it will prevent the paddle fixing seat from rotating along with the bearing fixing seat, so that the sprocket will contact the multiple spring paddles better, improve the self-rotation effect of the upper and lower top columns and the upper top column of the part fixture, and finally improve the uniformity and coating quality of the surface film layer of the plated part between the lower top column and the upper top column.

[0011] Furthermore, the upper end surface of each paddle fixing seat is provided with a plurality of cylindrical protrusions and fixed sockets, each spring paddle matches a cylindrical protrusion and a fixed socket, the spring paddle sleeve is provided on the cylindrical protrusion, the bottom end of the spring paddle sleeve is fixedly matched with the fixed socket, and the top end of the spring paddle sleeve is vertically provided and contacts the outer contour of the sprocket. The cylindrical protrusion and the fixed socket together prevent the spring paddle from deflecting during the contact process with the sprocket, and prevent the spring paddle from being away from the sprocket due to multiple collisions during long-term use, and failing to play the role of turning the sprocket.

[0012] Furthermore, the ends of each lower top column and upper top column that contact the plated parts are pointed structures, so that the exposed surface area of ​​the plated parts is almost the entire area, avoiding the surface of the plated parts that cannot be plated due to clamping, so that all-round thin film deposition can be achieved on the surface of the plated parts.

[0013] Furthermore, a plurality of nut columns are arranged between the first lower top column fixing plate and the second lower top column fixing plate, and between the second lower top column fixing plate and the upper top column fixing plate, so that the first lower top column fixing plate, the second lower top column fixing plate and the upper top column fixing plate are connected and fixed as a whole, and rotate together with the transmission shaft.

[0014] Furthermore, a gap is provided between the first lower push column fixing plate and the paddle fixing seat to prevent the first lower push column fixing plate from interfering with the paddle fixing seat when the first lower push column fixing plate rotates along with the transmission shaft.

[0015] Furthermore, as a specific connection method between the lower push column and the first lower push column fixing plate and the second lower push column fixing plate, the outer side of each lower push column is threadedly connected to a lower push screw fixing threaded barrel, the lower push screw fixing threaded barrel is located between the first lower push column fixing plate and the second lower push column fixing plate, and a first thrust bearing is arranged between the lower push screw fixing threaded barrel and the upper end surface of the first lower push column fixing plate; the bottom of the lower push screw passes through the inner ring of the first thrust bearing and is rotatably connected to the first lower push column fixing plate, the upper end surface of the first thrust bearing contacts with the lower end surface of the lower push screw fixing threaded barrel, the lower end surface of the first thrust bearing contacts with the upper end surface of the first lower push column fixing plate, and a sprocket is welded to the bottom circumferential outer wall of the lower push screw fixing threaded barrel.

[0016] Since the lower ejector column and the lower ejector screw fixing threaded barrel are threadedly connected, and the lower ejector screw fixing threaded barrel is movably connected to the first lower ejector column fixing plate, the movably connected lower ejector column and the first lower ejector column fixing plate are realized, and the lower ejector column is prevented from being separated from the first lower ejector column fixing plate, and the length of the lower ejector column in the lower ejector screw fixing threaded barrel is adjusted, so that the plated parts are fixed between the lower ejector column and the upper ejector screw. The provision of the first thrust bearing reduces the rotational friction between the lower ejector screw fixing threaded barrel and the first lower ejector column fixing plate, so that the lower ejector screw fixing threaded barrel and the lower ejector column inside it rotate around their own axis more smoothly, avoiding the occurrence of a jamming phenomenon.

[0017] Furthermore, as a specific setting mode for connecting the upper pillar and the upper pillar fixing plate, the top of each upper pillar is matched with an upper top screw fixing threaded barrel, and the top of the upper pillar is threadedly connected to the upper top screw fixing threaded barrel; the circumferential outer wall of the upper top screw fixing threaded barrel is rotationally connected to the upper pillar fixing plate, and the top end of the upper top screw fixing threaded barrel is located through the upper pillar fixing plate and a circle of grooves is arranged on its upper circumferential outer wall, and a retaining spring for contacting the upper end surface of the upper pillar fixing plate is arranged in the groove. The retaining spring is arranged to prevent the upper top screw fixing threaded barrel and the upper pillar inside it from falling off. The upper top screw fixing threaded barrel is arranged to adjust the relative height of the upper pillar, and then cooperate with the lower pillar to achieve the clamping of the plated parts.

[0018] Furthermore, the bottom end of each upper top screw fixing threaded barrel is provided with a cylindrical limiting step located below the upper top column fixing disk; a second thrust bearing sleeved on the circumferential outer wall of the upper top screw fixing threaded barrel is provided between the cylindrical limiting step and the upper top column fixing disk, and the end faces of the thrust bearing are respectively in contact with the upper end face of the cylindrical limiting step and the lower end face of the upper top column fixing disk. The provision of the second thrust bearing reduces the rotational friction between the upper top screw fixing threaded barrel and the upper top column fixing disk, making the upper top screw fixing threaded barrel and the upper top column inside it rotate more smoothly around their own axis, avoiding the occurrence of a jamming phenomenon, and finally achieving a smoother rotation of the plated parts between the lower top column and the upper top column, thereby improving the coating quality of the surface film layer of the plated parts.

[0019] Furthermore, when the lower push column and the upper push column clamp the plated parts, there is a gap between the retaining spring and the upper end surface of the upper push column fixing plate. When the upper push screw fixes the threaded barrel to rotate, the retaining spring and the upper end surface of the upper push column fixing plate are prevented from rubbing against each other to produce noise, and the upper push screw fixes the threaded barrel to rotate.

[0020] The beneficial effects of the present invention are:

[0021] 1. A rotating rack device for uniform vacuum coating on the surface of parts, which can realize the revolution of the plated parts around the axis of the transmission shaft and the rotation around its own axis, so that the surface of the plated parts can achieve all-round thin film deposition, which can not only improve the uniformity of the film layer on the surface of the plated parts and realize all-round coating on the surface of the plated parts, but also effectively avoid the problems of jamming and low rotation frequency during the coating process.

[0022] 2. A rotating rack device for uniform vacuum coating of parts surface. The lower top column and the upper top column for clamping the plated parts are both of pointed design, so that the exposed surface area of ​​the plated parts is almost the entire area, avoiding the surface of the plated parts that cannot be coated due to clamping, so that the surface of the plated parts can achieve all-round thin film deposition. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 The present invention is a schematic diagram of the structure of a rotating rack device used for uniform vacuum coating on the surface of parts.

[0024] Figure 2 It is a schematic diagram of the enlarged partial cross-section of the parts coating turret unit.

[0025] Figure 3 It is a structural schematic diagram of the paddle fixing seat.

[0026] Figure 4 It is a schematic diagram of the structure in which the spring pick contacts the sprocket.

[0027] Figure 5 It is a schematic diagram of the structure of the upper top column fixing plate.

[0028] Among them, 1. upper fixing plate; 2. lower fixing plate; 3. fixing rod; 4. transmission shaft; 5. parts coating turret unit; 6. bearing fixing seat; 7. paddle fixing seat; 8. spring paddle; 9. first lower push column fixing plate; 10. second lower push column fixing plate; 11. upper push column fixing plate; 12. notch; 13. lower push column; 14. sprocket; 15. plated parts; 16. rotation blocking plate; 17. cylindrical protrusion; 18. fixing socket; 19. nut column; 20. lower push screw fixing threaded barrel; 21. first thrust bearing; 22. upper push screw fixing threaded barrel; 23. retaining spring; 24. cylindrical limiting step; 25. second thrust bearing; 26. upper push column. DETAILED DESCRIPTION

[0029] The specific implementation modes of the present invention are described below so that those skilled in the art can understand the present invention. However, it should be clear that the present invention is not limited to the scope of the specific implementation modes. For those of ordinary skill in the art, as long as various changes are within the spirit and scope of the present invention as defined and determined by the attached claims, these changes are obvious, and all inventions and creations utilizing the concept of the present invention are protected.

[0030] like Figure 1 As shown, the present invention provides a rotating rack device for uniform vacuum coating of a part surface, which comprises an upper fixing plate 1 and a lower fixing plate 2 which are spaced and coaxially arranged, a plurality of fixing rods 3 and a plurality of transmission shafts 4 are circumferentially spaced between the upper fixing plate 1 and the lower fixing plate 2, two ends of each fixing rod 3 are respectively fixedly connected to the upper fixing plate 1 and the lower fixing plate 2, and two ends of each transmission shaft 4 are respectively rotatably connected to the upper fixing plate 1 and the lower fixing plate 2;

[0031] like Figure 1 and Figure 2 As shown, each transmission shaft 4 is provided with at least one part coating turret unit 5 along its length direction, and each part coating turret unit 5 includes a bearing fixing seat 6 fixedly connected to the transmission shaft 4, and a paddle fixing seat 7 is connected to the outer side of the bearing fixing seat 6 through a bearing, as shown in FIG. Figure 3 As shown, a plurality of spring paddles 8 are circumferentially arranged on the upper end surface of the paddle fixing seat 7;

[0032] A parts fixture is provided on the top of the bearing fixing seat 6, and the parts fixture includes a first lower top column fixing plate 9, a second lower top column fixing plate 10 and an upper top column fixing plate 11 which are spaced and coaxially arranged and fixedly connected to each other; a notch 12 for the transmission shaft 4 to pass through is opened on the first lower top column fixing plate 9, the second lower top column fixing plate 10 and the upper top column fixing plate 11;

[0033] The first lower top column fixing plate 9 is located below the second lower top column fixing plate 10, and the first lower top column fixing plate 9 is fixedly connected to the upper end surface of the bearing fixing seat 6. A plurality of lower top columns 13 are rotatably arranged on the first lower top column fixing plate 9, and a sprocket 14 is arranged on the outside of each lower top column 13, and each sprocket 14 is matched with a spring paddle 8, which is used to contact the outer contour of the sprocket 14, and the top end of the lower top column 13 passes through the second lower top column fixing plate 10 and is located above it; an upper top column 26 is rotatably arranged on the upper top column fixing plate 11, which is in a one-to-one matching relationship with the lower top column 13, and the axes of the lower top column 13 and the upper top column 26 coincide, and a plated part 15 is arranged between the lower top column 13 and the upper top column 26.

[0034] When it is necessary to vacuum coat the part 15 to be plated, the part 15 to be plated is first placed between the lower top column 13 and the upper top column 26 to be fixed, and then the transmission shaft 4 rotates around its own axis, thereby driving the multiple part coating turret units 5 on the transmission shaft 4 to rotate, wherein the transmission shaft 4 drives the bearing fixing seat 6 and the part fixture to rotate, thereby realizing the revolution of the part 15 to be plated around the axis of the transmission shaft 4, and a bearing is provided between the bearing fixing seat 6 and the paddle fixing seat 7, then the bearing fixing seat 6 will not transmit the rotational power to the paddle fixing seat 7, the paddle fixing seat 7 will hardly rotate, and when the bearing fixing seat 6 and the part fixture revolve around the axis of the transmission shaft 4, the sprocket 14 on the lower top column 13 and the paddle fixing seat 7 The spring paddles 8 on the upper end surface contact with each other, and the spring paddles 8 drive the sprocket 14 to realize the rotation of the lower push column 13 around its own axis. Since the plated part 15 is pressed tightly between the push column and the upper push column 26, the lower push column 13 transmits the rotational power to the plated part 15 and the upper push column 26, so that the plated part 15 rotates around its own axis. The rotating rack device of this scheme can finally realize the revolution of the plated part 15 around the axis of the transmission shaft 4 and the rotation around its own axis, so that the surface of the plated part 15 can realize all-round thin film deposition, which can not only improve the uniformity of the film layer on the surface of the plated part 15 and realize all-round coating on the surface of the plated part 15, but also effectively avoid the problems of jamming and low rotation frequency during the coating process.

[0035] Specifically, Figure 4 As shown, a rotation blocking piece 16 for contacting the fixing rod 3 is fixed to the upper end surface of each paddle fixing seat 7. Although a bearing is arranged between the bearing fixing seat 6 and the paddle fixing seat 7, when the transmission shaft 4 drives the bearing fixing seat 6 and the part fixture to rotate, the sprocket 14 will contact the multiple spring paddles 8 on the paddle fixing seat 7, which will cause a part of the rotational power to be transmitted, causing the paddle fixing seat 7 to rotate along with the bearing fixing seat 6. After the rotation blocking piece 16 contacts the fixing rod 3, it will prevent the paddle fixing seat 7 from rotating along with the bearing fixing seat 6, so that the sprocket 14 and the multiple spring paddles 8 can be better contacted, thereby improving the self-rotation effect of the upper and lower top columns 13 and the upper top column 26 of the part fixture, and finally improving the uniformity and coating quality of the surface film layer of the plated part 15 between the lower top column 13 and the upper top column 26.

[0036] Preferably, but not limited to, Figure 3As shown, the upper end surface of each paddle fixing seat 7 is provided with a plurality of cylindrical protrusions 17 and fixed sockets 18, each spring paddle 8 is matched with a cylindrical protrusion 17 and a fixed socket 18, the spring paddle 8 sleeves are all arranged on the cylindrical protrusions 17, the bottom end of the spring paddle 8 sleeves is fixedly matched with the fixed sockets 18, and the top end of the spring paddle 8 sleeves is arranged vertically and contacts the outer contour of the sprocket 14. The cylindrical protrusions 17 and the fixed sockets 18 prevent the spring paddle 8 from deflecting during the contact process with the sprocket 14, and prevent the spring paddle 8 from moving away from the sprocket 14 due to multiple collisions during long-term use, and thus failing to play the role of turning the sprocket 14. The ends of each lower top column 13 and upper top column 26 that contact the plated part 15 are all pointed structures, so that the exposed surface area of ​​the plated part 15 is almost the entire area, and the surface of the plated part 15 is prevented from having an area that cannot be coated due to clamping, so that the surface of the plated part 15 can achieve all-round thin film deposition.

[0037] Furthermore, a plurality of nut columns 19 are arranged between the first lower top column fixing plate 9 and the second lower top column fixing plate 10, and between the second lower top column fixing plate 10 and the upper top column fixing plate 11. The first lower top column fixing plate 9, the second lower top column fixing plate 10 and the upper top column fixing plate 11 are connected and fixed as a whole, and rotate together with the transmission shaft 4.

[0038] like Figure 2 As shown, as a specific connection method between the lower push column 13 and the first lower push column fixing plate 9 and the second lower push column fixing plate 10, the outer part of each lower push column 13 is threadedly connected to a lower push screw fixing threaded barrel 20, the lower push screw fixing threaded barrel 20 is located between the first lower push column fixing plate 9 and the second lower push column fixing plate 10, and a first thrust bearing 21 is arranged between the lower push screw fixing threaded barrel 20 and the upper end surface of the first lower push column fixing plate 9; the bottom of the lower push screw passes through the inner ring of the first thrust bearing 21 and is rotatably connected to the first lower push column fixing plate 9, the upper end surface of the first thrust bearing 21 contacts with the lower end surface of the lower push screw fixing threaded barrel 20, the lower end surface of the first thrust bearing 21 contacts with the upper end surface of the first lower push column fixing plate 9, and a sprocket 14 is welded to the bottom circumferential outer wall of the lower push screw fixing threaded barrel 20.

[0039] Since the lower ejector column 13 is threadedly connected to the lower ejector screw fixing threaded barrel 20, and the lower ejector screw fixing threaded barrel 20 is movably connected to the first lower ejector column fixing plate 9, the movably connected between the lower ejector column 13 and the first lower ejector column fixing plate 9 is realized, and the lower ejector column 13 is prevented from being separated from the first lower ejector column fixing plate 9, and the length of the lower ejector column 13 in the lower ejector screw fixing threaded barrel 20 is adjusted, so that the plated part 15 is fixed between the lower ejector column 13 and the upper ejector screw. The provision of the first thrust bearing 21 reduces the rotational friction between the lower ejector screw fixing threaded barrel 20 and the first lower ejector column fixing plate 9, so that the lower ejector screw fixing threaded barrel 20 and the lower ejector column 13 inside it rotate around their own axis more smoothly, avoiding the occurrence of a jamming phenomenon.

[0040] like Figure 2 and Figure 5 As shown, as a specific setting mode of connection between the upper push column 26 and the upper push column fixing plate 11, the top of each upper push column 26 is matched with an upper push screw fixing threaded barrel 22, and the top of the upper push column 26 is threadedly connected to the upper push screw fixing threaded barrel 22; the circumferential outer wall of the upper push screw fixing threaded barrel 22 is rotatably connected to the upper push column fixing plate 11, and the top end of the upper push screw fixing threaded barrel 22 is located through the upper push column fixing plate 11 and a circle of grooves is arranged on its upper circumferential outer wall, and a retaining spring 23 for contacting the upper end surface of the upper push column fixing plate 11 is arranged in the groove. The provision of the retaining spring 23 is used to prevent the upper push screw fixing threaded barrel 22 and the upper push column 26 inside it from falling off. The provision of the upper push screw fixing threaded barrel 22 is used to adjust the relative height of the upper push column 26, and then cooperate with the lower push column 13 to achieve the clamping of the plated part 15.

[0041] The bottom end of each upper top screw fixing threaded barrel 22 is provided with a cylindrical limiting step 24 located below the upper top column fixing disk 11; a second thrust bearing 25 sleeved on the circumferential outer wall of the upper top screw fixing threaded barrel 22 is provided between the cylindrical limiting step 24 and the upper top column fixing disk 11, and the end faces of both ends of the thrust bearing are in contact with the upper end face of the cylindrical limiting step 24 and the lower end face of the upper top column fixing disk 11 respectively. The provision of the second thrust bearing 25 reduces the rotational friction between the upper top screw fixing threaded barrel 22 and the upper top column fixing disk 11, so that the upper top screw fixing threaded barrel 22 and the upper top column 26 inside it rotate around their own axis more smoothly, avoiding the occurrence of a stuck phenomenon, and finally achieving a smoother rotation of the plated part 15 between the lower top column 13 and the upper top column 26, thereby improving the coating quality of the surface film layer of the plated part 15.

[0042] When the lower push column 13 and the upper push column 26 clamp the plated part 15, there is a gap between the retaining spring 23 and the upper end surface of the upper push column fixing plate 11. When the upper push screw fixing threaded barrel 22 rotates, the retaining spring 23 is prevented from rubbing against the upper end surface of the upper push column fixing plate 11 to produce noise and hinder the rotation of the upper push screw fixing threaded barrel 22.

[0043] In summary, a rotating rack device for uniform vacuum coating on the surface of parts can realize the revolution of the plated part 15 around the axis of the transmission shaft 4 and the rotation around its own axis, so that all-round thin film deposition can be achieved on the surface of the plated part 15. This can not only improve the uniformity of the film layer on the surface of the plated part 15 and realize all-round coating on the surface of the plated part 15, but also effectively avoid the problems of jamming and low rotation frequency during the coating process.

Claims

1. A rotating rack device for uniform vacuum coating of a part surface, characterized in that: It comprises an upper fixing plate and a lower fixing plate which are coaxially arranged at intervals, a plurality of fixing rods and a plurality of transmission shafts are circumferentially arranged at intervals between the upper fixing plate and the lower fixing plate, the two ends of each fixing rod are respectively fixedly connected to the upper fixing plate and the lower fixing plate, and the two ends of each transmission shaft are respectively rotatably connected to the upper fixing plate and the lower fixing plate; Each transmission shaft is provided with at least one parts coating turret unit along its length direction, and each of the parts coating turret units comprises a bearing fixing seat fixedly connected to the transmission shaft, a paddle fixing seat is connected to the outer side of the bearing fixing seat via a bearing, and a plurality of spring paddles are circumferentially provided on the upper end surface of the paddle fixing seat; A parts fixture is arranged on the top of the bearing fixing seat, and the parts fixture comprises a first lower top column fixing plate, a second lower top column fixing plate and an upper top column fixing plate which are arranged coaxially at intervals and fixedly connected to each other; a notch for the transmission shaft to pass through is opened on the first lower top column fixing plate, the second lower top column fixing plate and the upper top column fixing plate; The first lower push column fixing plate is located below the second lower push column fixing plate, the first lower push column fixing plate is fixedly connected to the upper end surface of the bearing fixing seat, a plurality of lower push columns are rotatably arranged on the first lower push column fixing plate, a sprocket is arranged on the outside of each of the lower push columns, and each of the sprockets matches a spring pick, the spring pick is used to contact the outer contour of the sprocket, and the top end of the lower push column passes through the second lower push column fixing plate and is located above it; an upper push column is rotatably arranged on the upper push column fixing plate in a one-to-one matching relationship with the lower push column, the axes of the lower push column and the upper push column coincide, and a plated part is arranged between the lower push column and the upper push column; A rotation blocking piece for contacting the fixing rod is fixed on the upper end surface of each of the paddle fixing seats.

2. The rotating rack device for uniform vacuum coating of parts surface according to claim 1 is characterized in that: The upper end surface of each of the paddle fixing seats is provided with a plurality of cylindrical protrusions and fixed sockets, each of the spring paddles matches one of the cylindrical protrusions and fixed sockets, the spring paddle sleeves are arranged on the cylindrical protrusions, the bottom end of the spring paddle sleeves is fixedly matched with the fixed sockets, and the top end of the spring paddle sleeves is vertically arranged and contacts with the outer contour of the sprocket.

3. The rotating rack device for uniform vacuum coating of parts surface according to claim 1, characterized in that: The end of each of the lower top column and the upper top column that contacts the plated part is a pointed structure.

4. The rotating rack device for uniform vacuum coating of parts surface according to claim 1, characterized in that: A plurality of nut columns are arranged between the first lower top column fixing plate and the second lower top column fixing plate, and between the second lower top column fixing plate and the upper top column fixing plate.

5. The rotating rack device for uniform vacuum coating of parts surface according to claim 1, characterized in that: A gap is provided between the first lower top column fixing plate and the paddle fixing seat.

6. The rotating rack device for uniform vacuum coating of parts surface according to claim 1, characterized in that: The outer part of each of the lower push columns is threadedly connected to a lower push screw fixing threaded cylinder, the lower push screw fixing threaded cylinder is located between the first lower push column fixing plate and the second lower push column fixing plate, and a first thrust bearing is arranged between the lower push screw fixing threaded cylinder and the upper end surface of the first lower push column fixing plate; the bottom of the lower push screw passes through the inner ring of the first thrust bearing and is rotatably connected to the first lower push column fixing plate, the upper end surface of the first thrust bearing contacts with the lower end surface of the lower push screw fixing threaded cylinder, the lower end surface of the first thrust bearing contacts with the upper end surface of the first lower push column fixing plate, and a sprocket is welded to the bottom circumferential outer wall of the lower push screw fixing threaded cylinder.

7. The rotating rack device for uniform vacuum coating of parts surface according to claim 1, characterized in that: The top of each of the upper push columns is matched with an upper push screw fixing threaded barrel, and the top of the upper push column is threadedly connected to the upper push screw fixing threaded barrel; the circumferential outer wall of the upper push screw fixing threaded barrel is rotatably connected to the upper push column fixing disk, and the top of the upper push screw fixing threaded barrel is located through the upper push column fixing disk and a circle of grooves is arranged on its upper circumferential outer wall, and a retaining spring for contacting the upper end surface of the upper push column fixing disk is arranged in the groove.

8. The rotating rack device for uniform vacuum coating of parts surface according to claim 7, characterized in that: The bottom end of each of the upper top screw fixing threaded cylinders is provided with a cylindrical limiting step located below the upper top column fixing disk; a second thrust bearing sleeved on the circumferential outer wall of the upper top screw fixing threaded cylinder is provided between the cylindrical limiting step and the upper top column fixing disk, and the end faces at both ends of the thrust bearing are respectively in contact with the upper end face of the cylindrical limiting step and the lower end face of the upper top column fixing disk.

9. The rotating rack device for uniform vacuum coating of parts surface according to claim 8, characterized in that: When the lower ejector column and the upper ejector column clamp the plated part, there is a gap between the clamping spring and the upper end surface of the upper ejector column fixing plate.

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