Fluid generating device

Abstract

The present invention relates to the field of fluid control technology, and in particular to a fluid generating device, comprising a piezoelectrically driven actuator, a spacer and a diaphragm, wherein the diaphragm has a fixed portion and a vibrating portion, wherein the fixed portion is fixedly connected to one end of the spacer away from the actuator, and the vibration energy generated by the actuator, on the one hand, is transmitted to the diaphragm by causing pressure changes in the fluid in the chamber due to the vibration of the actuator, and more importantly, the energy is directly transmitted to the diaphragm by means of a mechanical coupling formed by the actuator and the diaphragm, thereby causing the diaphragm to vibrate, and the energy transfer efficiency is higher; in addition, by arranging a partition on the diaphragm, the partition separates the vibrating part into at least two vibration zones, and the ability of the diaphragm area opposite to the partition to resist elastic deformation when a force is applied is greater than the ability of the vibration zone to resist elastic deformation when a force is applied, and the vibration energy transmitted to the diaphragm will mainly act on the vibration zone, causing the vibration zone to generate vibrations with a larger amplitude, and the energy utilization rate is higher.

Description

Technical Field

[0001] The present invention relates to the technical field of fluid control, and in particular to a fluid generating device. Background Art

[0002] As 3C terminal products continue to develop rapidly towards intelligence, lightness and thinness, the heat load of internal electronic devices is gradually increasing, and efficient thermal management technology has become a hot topic of current research.

[0003] In recent years, gas generating devices using piezoelectric transducers as actuators, such as a piezoelectric pump declared with publication number CN101490419A, a fluid pump declared with publication number CN102597520A, and a piezoelectric micro blower declared with publication number CN101542122A, are installed in the internal space of terminal products and are believed to generate greater heat benefits.

[0004] However, the vibration energy of the actuator in the above-mentioned gas generating device is transmitted to the resonant component through the change of gas pressure. Due to the existence of pneumatic damping, this method of transmitting vibration energy through fluid-solid coupling has large losses and is not efficient. At the same time, the effective working space of the above-mentioned resonant system is mainly concentrated in the central large-amplitude area, while the vibration energy in the area outside the central large-amplitude area is not effectively utilized, resulting in low overall energy utilization. Summary of the invention

[0005] The technical problem to be solved by the present invention is: in order to solve the deficiencies in the prior art, a fluid generating device is provided, which has high energy transfer efficiency and energy utilization rate.

[0006] The technical solution adopted by the present invention to solve the technical problem is: a fluid generating device, comprising:

[0007] A piezoelectrically driven actuator having a first main surface and a second main surface disposed opposite to each other in a thickness direction;

[0008] A spacer, the first main surface and / or the second main surface are joined with the spacer, the spacer is joined with the actuator at one end close to the actuator, and the spacer and the actuator form a groove having an opening at one end away from the actuator;

[0009] and a diaphragm having a fixed portion and a vibrating portion, wherein the fixed portion is fixedly connected to an end of the partition portion away from the actuator, so that the diaphragm covers the opening of the groove portion and forms a chamber between the actuator, the groove portion and the diaphragm, wherein the fixed portion is connected to the vibrating portion, and the vibrating portion is formed as an end wall of the chamber, and a partition portion is further provided on the diaphragm, wherein the partition portion divides the vibrating portion into at least two vibrating regions, and at least a part of the partition portion is located between two adjacent vibrating regions;

[0010] The ability of the region of the diaphragm opposite to the partition to resist elastic deformation when a force is applied is greater than the ability of the vibration region of the diaphragm to resist elastic deformation when a force is applied;

[0011] When the actuator vibrates under the stimulation of an electrical signal, the actuator transmits vibration energy to the diaphragm to cause the diaphragm to vibrate. The vibration area of ​​the diaphragm is penetrated by at least one hole portion communicating with the chamber.

[0012] Furthermore, the partition portion protrudes from the surface of the vibration area of ​​the diaphragm.

[0013] The separator of the present invention can be combined as follows:

[0014] First, a local area of ​​the diaphragm is shaped to form the partition, and the partition is a partition rib disposed on the vibration part and protruding from the surface of the vibration area of ​​the diaphragm.

[0015] Secondly, the partition is formed by providing reinforcing ribs in a local area on one side of the diaphragm;

[0016] The reinforcing rib has a main body section arranged on the vibration part, the main body section protrudes from the surface of the vibration area of ​​the diaphragm, and the main body section divides the vibration part into at least two vibration areas.

[0017] Furthermore, the reinforcing rib is arranged on a side of the diaphragm away from the actuator, and a main body section constituting the reinforcing rib is arranged on a side of the vibration portion of the diaphragm away from the actuator.

[0018] Furthermore, the reinforcing rib also has an extension section extending from the main section to the fixing portion of the diaphragm, the extension section protrudes from the surface of the vibration zone of the diaphragm, and the extension section is fixedly connected to a side of the fixing portion of the diaphragm away from the spacer portion.

[0019] Furthermore, the reinforcing rib is arranged on a side of the diaphragm facing the actuator, and a main body section constituting the reinforcing rib is arranged on a side of the vibration part of the diaphragm facing the actuator.

[0020] Furthermore, the reinforcing rib also has an extension section extending from the main section to the diaphragm fixing portion, the extension section protrudes from the surface of the vibration area of ​​the diaphragm, and the extension section is fixedly clamped between the diaphragm fixing portion and the spacer portion.

[0021] Furthermore, a side of the main body section facing the actuator is fixedly connected to the actuator.

[0022] Furthermore, the partition is formed by providing a first reinforcing rib facing the actuator side and a second reinforcing rib facing away from the actuator in local areas on both sides of the diaphragm;

[0023] The first reinforcing rib has a first main body section disposed on the vibrating portion of the diaphragm, and the first main body section protrudes from the diaphragm;

[0024] The second reinforcing rib has a second main body section disposed on the vibrating portion of the diaphragm, and the second main body section protrudes from the diaphragm.

[0025] Furthermore, the first reinforcing rib further comprises a first extension section extending from the first main body section to the fixing portion, and / or the second reinforcing rib comprises a second extension section extending from the second main body section to the fixing portion;

[0026] The first extension section protrudes from the surface of the vibration area of ​​the diaphragm, and the first extension section is fixedly clamped between the fixing portion of the diaphragm and the spacing portion;

[0027] The second extension section protrudes from the surface of the vibration area of ​​the diaphragm, and the second extension section is fixedly connected to a side of the fixing portion of the diaphragm away from the spacing portion.

[0028] Furthermore, a side of the first main body section facing the actuator is fixedly connected to the actuator.

[0029] Furthermore, the materials constituting the first reinforcing rib and the second reinforcing rib are the same or different.

[0030] Furthermore, the partition is integrally formed with the diaphragm or fixedly connected with it.

[0031] Further, the area of ​​the partition on the same side of the diaphragm is a continuous integral structure;

[0032] Alternatively, the partition is formed as a plurality of partition strips arranged at intervals in the region on the same side of the diaphragm.

[0033] Further, the spacer is an annular structure, the inner peripheral wall of the spacer and the actuator enclose an annular groove, and the end of the spacer away from the actuator is fully or partially engaged with the diaphragm on an annular path around the groove;

[0034] Alternatively, the spacer portion has multiple spacers, and the spacers of the same spacer portion are all joined to the first main surface or the second main surface. The multiple spacers are spaced apart and distributed along a circular path around the chamber to form the groove portion with the actuator, and the end of the spacer facing away from the actuator is fully or partially joined to the diaphragm.

[0035] Furthermore, the diaphragm is made of a polymer material, or a composite material of a polymer material and a metal material.

[0036] Furthermore, the actuator comprises a substrate, and at least one piezoelectric sheet is bonded to one or both sides of the substrate in the thickness direction, and the piezoelectric sheet is bonded to the substrate to form the actuator.

[0037] Furthermore, at least one hole portion communicating with the chamber passes through the maximum amplitude region or the adjacent region of the maximum amplitude region of the vibration region of the diaphragm.

[0038] The beneficial effects of the present invention are:

[0039] 1) The present invention provides a partition on the diaphragm, which separates the vibrating part of the diaphragm to form at least two vibration zones. The ability of the region of the diaphragm opposite to the partition to resist elastic deformation when subjected to force is greater than the ability of the vibrating zone of the diaphragm to resist elastic deformation when subjected to force, so that the vibration energy transmitted to the diaphragm by the actuator mainly acts on the vibrating zone of the diaphragm, prompting the vibrating zone of the diaphragm to generate vibrations with a larger amplitude, reducing the energy loss of the diaphragm at the partition, and improving the utilization rate of the vibration energy;

[0040] 2) The effective working space of the chamber between the actuator and the diaphragm of the present invention is no longer mainly concentrated in the central area where the actuator and the diaphragm are opposite to each other, but extends to a larger area than the central area, so that the utilization rate of vibration energy is higher.

[0041] 3) The vibration energy generated by the actuator of the present invention under the stimulation of an external electrical signal, on the one hand, drives the fluid in the chamber to produce pressure changes when the actuator vibrates, thereby causing the diaphragm to vibrate and transfer the energy to the diaphragm. More importantly, the design of the spacer is utilized to form a mechanical coupling between the actuator and the diaphragm, so that the energy is directly transferred to the diaphragm, and the energy transfer efficiency is higher.

[0042] Other features and advantages of the present application will become apparent from the following detailed description of exemplary embodiments of the present application with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0044] Figure 1 It is a schematic diagram of the partition dividing the diaphragm into two vibration zones;

[0045] Figure 2 is a cross-sectional schematic diagram of a fluid generating device in which a diaphragm is divided into vibration zones by a partition;

[0046] Figure 3 It is a schematic diagram of the partition that divides the diaphragm into four vibration zones;

[0047] Figure 4 is a schematic diagram of a diaphragm formed by shaping a partition;

[0048] Figure 5 is a schematic diagram of a diaphragm in which the partitions are discretely arranged;

[0049] Figure 6 It is a schematic diagram of the holes sucking fluid relatively independently during the working process;

[0050] Figure 7 It is a schematic diagram showing that the holes discharge fluid relatively independently during operation;

[0051] Figure 8 is a schematic diagram of forming a spacer by a spacer;

[0052] Fig. 9 is a cross-sectional schematic diagram of a fluid generating device in which a reinforcing rib is provided on the side of the diaphragm facing away from the actuator;

[0053] Fig.10 is a bottom view schematic diagram of a fluid generating device in which a reinforcing rib with an extended section is provided on the side of the diaphragm facing away from the actuator;

[0054] Fig.11 yes Fig.10 AA section view;

[0055] Fig.12 is a cross-sectional schematic diagram of a fluid generating device in which a reinforcing rib is provided on one side of the diaphragm close to the actuator;

[0056] Fig.13 is a cross-sectional schematic diagram of a fluid generating device in which a reinforcing rib connected to the actuator is provided on one side of the diaphragm close to the actuator;

[0057] Fig.14 is a cross-sectional schematic diagram of a fluid generating device in which a first reinforcing rib and a second reinforcing rib are respectively arranged on both sides of a diaphragm;

[0058] Fig.15 It is a schematic diagram of the structure of the groove formed by the spacer and the substrate;

[0059] Fig.16 It is a schematic diagram of a structure in which the spacer and the piezoelectric sheet are arranged on the same side surface of the substrate in the thickness direction;

[0060] Fig.17 A schematic diagram of a structure in which both main surfaces of the actuator are provided with spacers combined with the substrate, and a piezoelectric sheet is provided on any side surface of the substrate in the thickness direction;

[0061] Fig.18 A schematic diagram of a structure in which piezoelectric sheets and spacers are provided on both main surfaces of the actuator, and the spacers are bonded to the piezoelectric sheets;

[0062] Fig.19A schematic structural diagram of a structure in which spacers are provided on both main surfaces of the actuator, and the spacers on one side are bonded to the piezoelectric sheet, and the spacers on the other side are bonded to the substrate.

[0063] In the figure: 1, actuator, 11, substrate, 12, piezoelectric sheet, 1a, first main surface, 1b, second main surface;

[0064] 2. a spacer portion, 21. a groove portion, 22. a spacer body;

[0065] 3. diaphragm, 31. fixing portion, 32. vibration portion, 321. vibration region, 321a. hole portion, 3211. maximum amplitude region;

[0066] 4. Chamber;

[0067] 5. Partition, 51. First reinforcing rib, 52. Second reinforcing rib, 53. Reinforcing rib, 531. Main section, 532. Extension section, 54. Partition rib, 5a. Partition strip. DETAILED DESCRIPTION

[0068] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams that only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention, and directions and references (e.g., up, down, left, right, etc.) may only be used to help describe the features in the drawings. Therefore, the following specific embodiments are not to be taken in a limiting sense, and the scope of the subject matter claimed is limited only by the attached claims and their equivalents.

[0069] Example 1

[0070] like Figure 2 As shown, a fluid generating device can be used as a fan, comprising: a piezoelectrically driven actuator 1, a spacer 2 and a diaphragm 3;

[0071] like Figure 1-8 As shown in FIGS. 15 to 19 , at least one piezoelectric sheet 12 is bonded to one or both sides of the substrate 11 in the thickness direction. The piezoelectric sheet 12 may be a piezoelectric ceramic sheet. The piezoelectric sheet 12 is bonded to the substrate 11 to form an actuator 1. The actuator 1 has a first main surface 1a and a second main surface 1b that are arranged opposite to each other in the thickness direction. The piezoelectric sheet 12 causes the actuator 1 to vibrate under the excitation of an electrical signal.

[0072] The substrate 11 may be, but is not limited to, circular, rectangular, polygonal or elliptical, etc. In this embodiment, the substrate 11 is in the shape of a circular plate as an example. A single piezoelectric film 12 can be bonded to any side surface of the substrate 11 in the thickness direction to form a piezoelectric unimorph actuator 1; or two piezoelectric films 12 are respectively arranged on the two side surfaces of the substrate 11 in the thickness direction to form a piezoelectric dual-chip actuator 1; or a plurality of piezoelectric films 12 are arranged on the same side surface of the substrate 11 in the thickness direction to form a composite multilayer piezoelectric actuator 1, etc. The piezoelectric film 12 causes the actuator 1 to vibrate under the excitation of an external periodic electrical signal.

[0073] The first main surface 1 a and / or the second main surface 1 b are joined with a spacer 2 , which is joined to the actuator 1 at one end close to the actuator 1 , and the spacer 2 and the actuator 1 form a groove 21 having an opening at one end away from the actuator 1 .

[0074] Specifically:

[0075] The spacer 2 can be bonded to one side or both sides of the substrate 11 constituting the actuator 1 in the thickness direction. In this case, it is not difficult to understand that the spacer 2 can be bonded to either one side of the substrate 11 in the thickness direction or the other side of the substrate 11 in the thickness direction. Fig.15 and 16 As shown, of course, when there are multiple spacers 2 at the same time, for example, the fluid control device of the present application can have a bidirectional working function. In this case, the spacers 2 need to be provided on both main surfaces of the actuator 1. The spacers 2 can be provided on both side surfaces of the substrate 11 in the thickness direction, such as Fig.17 As shown; Under this structure, when the spacer 2 and the piezoelectric sheet 12 are arranged on the same side surface of the substrate 11 in the thickness direction, the piezoelectric sheet 12 is located in the groove 21 of the spacer 2, and at the same time, the spacer 2 has a height protruding from the surface of the piezoelectric sheet 12, as shown in FIG. Fig.16 and Fig.17 When the spacer 2 and the piezoelectric sheet 12 are respectively disposed on both side surfaces of the substrate 11 in the thickness direction, this limitation is not applied; the bonding between the spacer 2 and the substrate 11 may be bonding or integrally formed.

[0076] In addition, the spacer 2 can also be joined to the side surface of the piezoelectric sheet 12 constituting the actuator 1 that is away from the actuator 1. Under this structure, it is not difficult to understand that when the actuator 1 constitutes the above-mentioned piezoelectric single-chip actuator 1, the spacer 2 can be joined to the side surface of the piezoelectric sheet 12 constituting the piezoelectric single-chip actuator 1 that is away from the substrate 11; when the actuator 1 constitutes the above piezoelectric dual-chip actuator 1, the spacer 2 can be joined to the side surface of the piezoelectric sheet 12 on any side of the piezoelectric dual-chip actuator 1 that is away from the substrate 11. Of course, when there are multiple spacers 2 at the same time, for example, the fluid control device of the present application can have a bidirectional working function. At this time, the first main surface 1a and the second main surface 1b of the actuator 1 need to be provided with a spacer 2. The spacer 2 can be respectively provided on the side surfaces of the piezoelectric sheets 12 on both sides of the piezoelectric dual-chip actuator 1 that are away from the substrate 11, such as Fig.18 shown.

[0077] In addition, it is not difficult to understand that when there are multiple spacers 2 at the same time, the bonding methods of the above-mentioned spacers 2 can also be combined with each other. For example, the fluid generating device of the present application can have a bidirectional working function. At this time, the first main surface 1a and the second main surface 1b of the actuator 1 both need to be provided with spacers 2, wherein at least one spacer 2 is bonded to the surface of the side of the piezoelectric sheet 12 constituting the actuator 1 away from the actuator 1, and at least one spacer 2 is bonded to the side of the substrate 11 away from the actuator 1, such as Fig.19 As shown; under this structure, the connection between the spacer 2 and the substrate 11 can be adhesively bonded or integrally formed.

[0078] Of course, the joining method of the spacer 2 is not limited to this. The joining method of the spacer 2 follows the principle that the end of the spacer 2 close to the actuator 1 is connected to the actuator 1, and the spacer 2 and the actuator 1 form a groove 21 with an opening at the end facing away from the actuator 1.

[0079] This embodiment is described in the form that the actuator 1 is configured as a piezoelectric single-crystal actuator 1, there is one spacer 2, and the spacer 2 is bonded to the surface of the substrate 11 located on the side where the second main surface 1b of the actuator 1 is located, for easy understanding.

[0080] The spacer 2 is bonded to the surface of the substrate 11 on the side where the second main surface 1b is located, and the end of the spacer 2 close to the substrate 11 is connected to the substrate 11, and the spacer 2 and the substrate 11 form a groove 21 with an opening at the end facing away from the substrate 11, such as Fig.15 As shown; the connection between the spacer 2 and the substrate 11 can be bonding or integrally formed, the spacer 2 is an annular structure, so that the inner peripheral wall of the spacer 2 itself encloses the groove 21;

[0081] One end of the spacer 2 close to the substrate 11 is joined to the surface of the substrate 11 on the side where the second main surface 1b is located, and the diaphragm 3 is connected to the end of the spacer 2 facing away from the substrate 11, thereby allowing the vibration of the actuator 1 to directly drive the spacer 2 and the diaphragm 3 to vibrate, so as to transfer the vibration energy to the diaphragm 3 through mechanical coupling.

[0082] The diaphragm 3 has a fixed portion 31 and a vibrating portion 32. The fixed portion 31 is fixedly connected to the end of the partition portion 2 away from the actuator 1, so that the diaphragm 3 covers the opening of the groove portion 21 and forms a chamber 4 between the actuator 1, the groove portion 21 and the diaphragm 3. The fixed portion 31 and the vibrating portion 32 are integrally formed or fixedly connected, and the vibrating portion 32 forms an end wall of the chamber 4. Figure 1 and 2 As shown; thus, the diaphragm 3 is fixedly connected to the actuator 1 through the spacer 2, and the vibration of the actuator 1 causes the diaphragm 3 to vibrate. This process is accompanied by the transfer of energy. The vibration energy generated by the actuator 1 under the excitation of the external electrical signal, on the one hand, drives the fluid in the chamber 4 to produce pressure changes when the actuator 1 vibrates, thereby causing the diaphragm 3 to vibrate and transfer the energy to the diaphragm 3. More importantly, the energy is directly transferred to the diaphragm 3 through the mechanical coupling formed by the actuator 1 and the diaphragm 3; compared with the prior art that only relies on the fluid to transfer vibration energy, the energy transfer efficiency is higher. Under the same excitation conditions, the diaphragm 3 can be caused to generate a larger amplitude to achieve a higher flow output; under the same amplitude requirement, the input power of the actuator 1 can be reduced, the heat generation can be reduced, and the energy utilization rate, product stability and service life can be improved.

[0083] A partition 5 is provided on the diaphragm 3, and the partition 5 divides the vibration part 32 of the diaphragm 3 into at least two vibration areas 321. At least a part of the partition 5 is located between two adjacent vibration areas 321. The ability of the area of ​​the diaphragm 3 opposite to the partition 5 to resist elastic deformation when a force is applied is greater than the ability of the vibration area 321 of the diaphragm 3 to resist elastic deformation when a force is applied. Therefore, the energy required to cause the area of ​​the diaphragm 3 opposite to the partition 5 to vibrate is much greater than the energy required to cause the vibration area 321 to vibrate, which is equivalent to that the area of ​​the diaphragm 3 opposite to the partition 5 is substantially constrained, the vibration is suppressed, and the vibration energy transmitted to the diaphragm 3 by the actuator 1 will mainly act on the vibration. In addition, compared with the prior art, the vibrating portion 32 of the diaphragm 3 is divided into a plurality of vibration zones 321 by the partition 5, so that the effective working space of the chamber 4 between the actuator 1 and the diaphragm 3 is no longer mainly concentrated in the central area of ​​the diaphragm 3, but is extended to a larger area than the central area, and the utilization rate of the vibration energy is higher. When the actuator 1 vibrates under the excitation of the electrical signal, the vibration energy is transmitted to the diaphragm 3 to cause the diaphragm 3 to vibrate. At least one hole 321a connected to the chamber 4 is passed through the vibration zone 321, such as Figure 1 and 2 As shown; specifically, at least one hole portion 321a connecting the chamber 4 may be passed through the maximum amplitude region 3211 of the vibration zone 321 of the diaphragm 3 or the adjacent area of ​​the maximum amplitude region 3211; the adjacent area of ​​the maximum amplitude region 3211 refers to an area close to the side of the maximum amplitude region 3211 in the interval between the maximum amplitude region 3211 of the vibration zone 321 and the adjacent partition portion 5 but not including the maximum amplitude region 3211.

[0084] In this embodiment, the partition 5 can be protruded from the surface of the vibration area 321 of the diaphragm 3, so that the ability of the region of the diaphragm 3 opposite to the partition 5 to resist elastic deformation when subjected to force is greater than the ability of the vibration area 321 of the diaphragm 3 to resist elastic deformation when subjected to force. However, this is not limited to this. For example, the diaphragm 3 itself can also be made of a non-homogeneous material, or other rigid dielectric bodies (such as metal ribs) can be embedded in the region of the diaphragm 3 opposite to the partition 5, which can also achieve that the ability of the region of the diaphragm 3 opposite to the partition 5 to resist elastic deformation when subjected to force is greater than the ability of the vibration area 321 of the diaphragm 3 to resist elastic deformation when subjected to force.

[0085] In this embodiment, a local area of ​​the diaphragm 3 is shaped to form a partition 5, which is a partition rib 54 arranged on the vibration part 32 and protruding from the surface of the vibration area 321 of the diaphragm 3. That is, the partition 5 is formed by shaping a local area of ​​the diaphragm 3.

[0086] The ribs 54 protrude from the diaphragm 3. The ribs 54 may protrude toward the side of the diaphragm 3 away from the actuator 1 or toward the side of the diaphragm 3 toward the actuator 1. Figure 3 and 4 As shown; part of the ribs 54 may protrude toward the side of the diaphragm 3 away from the actuator 1, while another part of the ribs 54 may protrude toward the side of the diaphragm 3 toward the actuator 1; or the ribs 54 protruding from the diaphragm 3 may have a part protruding toward both the side of the diaphragm 3 away from the actuator 1 and the side of the diaphragm 3 toward the actuator 1. This is not limited here; the cross-sectional shape of the ribs 54 may be angular, sawtooth, or wavy, which is also not limited here.

[0087] In addition, it should be noted that the partition 5 can be a continuous integral structure, such as Figure 3 and 4 As shown, the partition 5 may also be a plurality of partition bars 5a arranged at intervals, that is, the partition 5 is a plurality of discretely arranged partition bars 5a, such as Figure 5 As shown, in principle, it is sufficient as long as the vibration area 321 of the diaphragm 3 can be separated.

[0088] During operation, the piezoelectric sheet 12 causes the actuator 1 to vibrate under the stimulation of an electrical signal, and transmits the vibration energy to the diaphragm 3, so as to cause the diaphragm 3 to vibrate. The holes 321a formed in or near the areas with the largest amplitude of each vibration zone 321 of the diaphragm 3 inhale and discharge the fluid relatively independently during operation. When the area where the hole 321a is located is deformed toward the side away from the actuator 1, the local volume of the area corresponding to the hole 321a in the chamber 4 increases, the pressure decreases, and the external fluid enters the chamber 4 along the hole 321a. Figure 6 As shown; when the area where the hole 321a is located is deformed toward the actuator 1, the local volume of the area corresponding to the hole 321a in the chamber 4 becomes smaller, the pressure increases, and the fluid sucked into the chamber 4 in the previous process is discharged from the chamber 4 along the hole 321a with a certain momentum. The fluid with a certain momentum flows out of the hole 321a to form a jet, and can entrain the surrounding fluid, further increasing the output flow rate, as shown in FIG. Figure 7 As shown, this goes back and forth.

[0089] It should be noted that, under this structure, the height of chamber 4 in the thickness direction of actuator 1 may be greater than the sum of the maximum displacements of actuator 1 and diaphragm 3 when they vibrate and deform toward each other, so as to avoid motion interference between actuator 1 and diaphragm 3 during vibration and make full use of vibration energy. In addition, under this structure, if the height of chamber 4 is too large, the fluid pressure and flow rate discharged from chamber 4 by hole 321a will be reduced, which will affect the formation of jet and even make it impossible to form a jet, and the surrounding fluid will not be sucked in, resulting in a reduction in the final output flow rate. Preferably, the height of chamber 4 in the thickness direction of actuator 1 is not greater than 20 times the sum of the maximum displacements of actuator 1 and diaphragm 3 when they vibrate and deform toward each other.

[0090] The spacer 2 is an annular structure, the inner peripheral wall of the spacer 2 and the substrate 11 of the actuator 1 enclose an annular groove 21, and the end of the spacer 2 away from the actuator 1 is fully or partially engaged with the diaphragm 3 on an annular path around the groove 21; or, the spacer 2 has a plurality of discrete spacers 22 distributed in an annular shape, such as Figure 8 As shown, the spacers 22 of the same spacer portion 2 are all joined to the first main surface 1a or the second main surface 1b, and multiple spacers 22 are spaced apart and distributed along a circular path around the chamber 4 to form a groove portion 21 with the actuator 1, and the end of the spacer 22 facing away from the actuator 1 is fully or partially joined to the diaphragm 3.

[0091] That is, the substrate 11, the diaphragm 3 and the spacer 2 form a chamber 4, the spacer 2 forms the inner wall of the chamber 4, the inner wall of the chamber 4 can be closed, without a channel connected to the outside, and the spacer 2 is a ring-shaped structure; the inner wall of the chamber 4 can also be open, the spacer 2 has a plurality of discrete spacers 22 distributed in a ring shape, and the gaps between the plurality of spacers 22 are formed as channels connected to the outside, and the channels are connected to the chamber 4; although external gas can enter the chamber 4 through the above-mentioned channels, toward the chamber 4, but because the pressure in the area opposite to the hole 321a in the chamber 4 changes more dramatically than that in the channel formed in the peripheral wall of the chamber 4, the fluid is mainly sucked in and discharged through the hole 321a, and the fluid entering the chamber 4 from the above-mentioned channel reverses its flow direction before reaching the area opposite to and adjacent to the hole 321a in the chamber 4, and flows out of the chamber 4 along the original path, which does not substantially affect the suction and discharge of the fluid from the hole 321a or has little effect, so the inner peripheral wall of the chamber 4 can be open.

[0092] The actuator 1 generates vibration under external excitation and transmits the vibration energy to the diaphragm 3, thereby causing the diaphragm 3 to vibrate. The resonance mode of the coordinated vibration of the actuator 1 and the diaphragm 3 is related to the structural shape of the substrate 11, the structural shape of the diaphragm 3 and the connection method between the two. The above factors do not constitute a limitation on the scope of protection of the claims of the present invention. The substrate 11 can be but is not limited to circular, rectangular, polygonal or elliptical, etc., the shape of the diaphragm 3 can also be but is not limited to circular, rectangular, polygonal or elliptical, etc., and the spacer 2 connected between the substrate 11 and the diaphragm 3 can also be but is not limited to a circular ring structure, a rectangular ring structure, a polygonal ring structure or an elliptical ring structure.

[0093] The diaphragm 3 can be made of metal film materials, such as copper foil, titanium foil, stainless steel foil, etc. Preferably, the diaphragm 3 is made of polymer materials, such as PET, PI, PPS, PEI, FEP or other polymer films, or the diaphragm 3 is made of a composite material composed of a polymer material and other metal materials, such as PI copper clad plate / film, PET copper clad plate / film, PET nickel-plated plate / film, carbon fiber metal composite plate / film, etc.; whether it is a polymer material or a composite material composed of a polymer material and other materials, compared with metal materials, they all show the characteristics of light weight and high elastic strain limit, and the limit amplitude during resonance is usually much higher than that of metal materials, which is particularly suitable for high requirements on flow output, such as heat dissipation of smart 3C terminal products.

[0094] Example 2

[0095] The difference between Example 2 and Example 1 is that the partition 5 is formed by providing a reinforcing rib 53 in a local area on one side of the diaphragm 3 , and the reinforcing rib 53 protrudes from the diaphragm 3 .

[0096] The reinforcing rib 53 has a main body section 531 disposed on the vibration portion 32, the main body section 531 protrudes from the surface of the vibration area 321 of the diaphragm 3, and the main body section 531 divides the vibration portion 32 into at least two vibration areas 321. The reinforcing rib 53 is disposed on the side of the diaphragm 3 away from the actuator 1, and the main body section 531 is disposed on the side of the vibration portion 32 of the diaphragm 3 away from the actuator 1, as shown in FIG. Fig. 9 shown.

[0097] In addition, the reinforcing rib 53 may also include an extension section 532 extending from the main section 531 to the fixing portion 31 of the diaphragm 3, the extension section 532 protruding from the surface of the vibration area 321 of the diaphragm 3, and the extension section 532 is fixedly connected to the side of the fixing portion 31 of the diaphragm 3 away from the spacer 2, such as Fig.10 and 11 shown.

[0098] The partition 5 is a continuous integral structure, that is, the reinforcing ribs 53 constituting the partition 5 are formed into a continuous whole while dividing the vibration portion 32 of the diaphragm 3 into at least two vibration areas 321; the partition 5 is formed into a plurality of spaced-apart partition strips 5a, that is, the reinforcing ribs 53 constituting the partition 5 are also discretely arranged while dividing the vibration portion 32 of the diaphragm 3 into at least two vibration areas 321;

[0099] The reinforcing rib 53 is integrally formed with or fixedly connected to the diaphragm 3; the reinforcing rib 53 may be made of the same material as the diaphragm 3, or may be made of a different material from the diaphragm 3. For example, when the diaphragm 3 is made of a polyimide film, the material of the reinforcing rib 53 may be a polyimide film material, or may be SUS304 stainless steel. The material of the reinforcing rib 53 is not limited here, but the principle to be followed is to ensure that the ability of the area of ​​the diaphragm 3 opposite to the partition 5 to resist elastic deformation when subjected to force is greater than the ability of the vibration zone 321 of the diaphragm 3 to resist elastic deformation when subjected to force, so that the partition 5 separates the vibration portion 32 of the diaphragm 3 to form at least two vibration zones 321.

[0100] In addition, the reinforcing ribs 53 constituting the partition 5 may be of a uniform cross-section or a variable cross-section, which is not limited here.

[0101] Example 3

[0102] The difference between Example 3 and Example 2 is that the partition 5 is formed by providing a reinforcing rib 53 in a local area of ​​the side of the diaphragm 3 facing the actuator 1 , and the reinforcing rib 53 protrudes from the diaphragm 3 .

[0103] The reinforcing rib 53 has a main section 531 disposed on the vibrating portion 32 of the diaphragm 3. The main section 531 divides the vibrating portion 32 of the diaphragm 3 into at least two vibrating areas 321. The main section 531 constituting the reinforcing rib 53 is disposed on one side of the vibrating portion 32 of the diaphragm 3 facing the actuator 1. Fig.12 shown.

[0104] In addition, similarly, the reinforcing rib 53 also has an extension section 532 extending from the main section 531 to the fixing portion 31 of the diaphragm 3, the extension section 532 protrudes from the surface of the vibration area 321 of the diaphragm 3, and the extension section 532 is fixedly clamped between the fixing portion 31 of the diaphragm 3 and the spacer portion 2.

[0105] Even more, the main body section 531 constituting the reinforcing rib 53 is fixedly connected to the actuator 1 on one side facing the actuator 1, such as Fig.13 shown.

[0106] The partition 5 is a continuous integral structure, that is, the reinforcing ribs 53 constituting the partition 5 form a continuous whole while dividing the vibration portion 32 of the diaphragm 3 into at least two vibration zones 321; or, the partition 5 is formed as a plurality of spaced-apart partition strips 5a, that is, the reinforcing ribs 53 constituting the partition 5 are discretely arranged while dividing the vibration portion 32 of the diaphragm 3 into at least two vibration zones 321.

[0107] It should be noted that, when the main section 531 constituting the reinforcing rib 53 is connected to the actuator 1 on the side facing the actuator 1, and the partition 5 is arranged as a continuous integral partition 5, especially when the main section 531 constituting the partition 5 is formed as a continuous integral body, the chamber 4 is formed into a plurality of spaced sub-chambers, and the number of the sub-chambers matches the number of the vibration zones 321.

[0108] Similarly, the reinforcing rib 53 is integrally formed with or fixedly connected to the diaphragm 3; the reinforcing rib 53 may be made of the same material as the diaphragm 3, or of a different material from the diaphragm 3. For example, when the diaphragm 3 is made of a polyimide film, the reinforcing rib 53 may be made of a polyimide film or SUS304 stainless steel. The material of the reinforcing rib 53 is not limited here, but the principle to be followed is to ensure that the ability of the area of ​​the diaphragm 3 opposite to the partition 5 to resist elastic deformation when subjected to force is greater than the ability of the vibration zone 321 of the diaphragm 3 to resist elastic deformation when subjected to force, so that the partition 5 separates the vibration portion 32 of the diaphragm 3 to form at least two vibration zones 321.

[0109] In addition, the reinforcing ribs 53 constituting the partition 5 may be of a uniform cross-section or a variable cross-section, which is not limited here.

[0110] Example 4

[0111] The difference between this embodiment and embodiments 2 and 3 is that the partition 5 is formed by providing a first reinforcing rib 51 facing the actuator 1 and a second reinforcing rib 52 facing away from the actuator 1 in local areas on both sides of the diaphragm 3, and the first reinforcing rib 51 and the second reinforcing rib 52 are both protruding from the diaphragm 3. Fig.14 shown.

[0112] The first reinforcing rib 51 has a first main body section 531 disposed on the vibration portion 32 of the diaphragm 3 , and the first main body section 531 protrudes from the diaphragm 3 ;

[0113] The second reinforcing rib 52 has a second main body section 531 disposed on the vibration portion 32 of the diaphragm 3 , and the second main body section 531 protrudes from the diaphragm 3 ;

[0114] The first main body section 531 and the second main body section 531 separate the vibration portion 32 of the diaphragm 3 into at least two vibration areas 321 .

[0115] In addition, the first reinforcing rib 51 further comprises a first extending section 532 extending from the first main section 531 to the fixing portion 31 or / and the second reinforcing rib 52 comprises a second extending section 532 extending from the second main section 531 to the fixing portion 31;

[0116] The first extension section 532 protrudes from the surface of the vibration area 321 of the diaphragm 3, and the first extension section 532 is fixedly clamped between the fixing portion 31 of the diaphragm 3 and the spacer portion 2;

[0117] The second extension section 532 protrudes from the surface of the vibration area 321 of the diaphragm 3 , and the second extension section 532 is fixedly connected to a side of the fixing portion 31 of the diaphragm 3 that is away from the spacing portion 2 .

[0118] Furthermore, the first main body section 531 constituting the first reinforcing rib 51 is fixedly connected to the actuator 1 at a side facing the actuator 1 .

[0119] Similarly, the partition 5 is a continuous integral structure in the area on the same side of the diaphragm 3, that is, the partition 5 is composed of a first reinforcing rib 51 and a second reinforcing rib 52 located on both sides of the diaphragm 3, and the first reinforcing rib 51 and the second reinforcing rib 52 separate the vibration portion 32 of the diaphragm 3 into at least two vibration zones 321 while forming a continuous whole; the partition 5 can also be a plurality of discretely arranged partition strips 5a, that is, the partition 5 is composed of a first reinforcing rib 51 and a second reinforcing rib 52 located on both sides of the diaphragm 3, and the first reinforcing rib 51 and the second reinforcing rib 52 separate the vibration portion 32 of the diaphragm 3 into at least two vibration zones 321 while also being discretely arranged.

[0120] The first reinforcing rib 51 and / or the second reinforcing rib 52 are integrally formed with or fixedly connected to the diaphragm 3; the materials of the first reinforcing rib 51 and the second reinforcing rib 52 can be the same or different. For example, when the material of the diaphragm 3 is polyimide film, the material of the first reinforcing rib 51 and the second reinforcing rib 52 can be polyimide film material, or the material of the first reinforcing rib 51 and the second reinforcing rib 52 can be SUS304 stainless steel, or the material of the first reinforcing rib 51 is brass, and the material of the second reinforcing rib 52 is SUS304 stainless steel. There is no limitation on the materials of the first reinforcing rib 51 and the second reinforcing rib 52, but the principle to be followed is to ensure that the ability of the area of ​​the diaphragm 3 opposite to the partition 5 to resist elastic deformation when subjected to force is greater than the ability of the vibration zone 321 of the diaphragm 3 to resist elastic deformation when subjected to force, so that the partition 5 separates the vibration portion 32 of the diaphragm 3 to form at least two vibration zones 321.

[0121] In addition, the first reinforcing rib 51 and / or the second reinforcing rib 52 constituting the partition 5 may be of a constant cross-section or a variable cross-section, which is not limited here.

[0122] The above-mentioned ideal embodiments of the present invention are for inspiration. Through the above-mentioned description, relevant staff can make various changes and modifications without departing from the technical idea of ​​the present invention. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A fluid generating device, characterized in that: include: A piezoelectrically driven actuator (1) having a first main surface (1a) and a second main surface (1b) arranged opposite to each other in a thickness direction; A spacer (2), the first main surface (1a) or / and the second main surface (1b) being joined with the spacer (2), the spacer (2) being joined with the actuator (1) at one end close to the actuator (1), and the spacer (2) and the actuator (1) forming a groove (21) having an opening at one end facing away from the actuator (1); and a diaphragm (3), comprising a fixed portion (31) and a vibrating portion (32), wherein the fixed portion (31) is fixedly connected to one end of the spacer portion (2) away from the actuator (1), so that the diaphragm (3) covers the opening of the groove portion (21) and forms a chamber (4) between the actuator (1), the groove portion (21) and the diaphragm (3), wherein the fixed portion (31) is connected to the vibrating portion (32), and the vibrating portion (32) forms an end wall of the chamber (4), and the diaphragm (3) is also provided with a partition (5), wherein the partition (5) partitions the vibrating portion (32) into at least two vibrating areas (321), and at least a portion of the partition (5) is located between two adjacent vibrating areas (321); The ability of the region of the diaphragm (3) opposite to the partition (5) to resist elastic deformation when subjected to force is greater than the ability of the vibration region (321) of the diaphragm (3) to resist elastic deformation when subjected to force; When the actuator (1) vibrates under the stimulation of an electrical signal, it transmits vibration energy to the diaphragm (3) to cause the diaphragm (3) to vibrate, and the vibration area (321) of the diaphragm (3) is penetrated by at least one hole (321a) communicating with the chamber (4).

2. The fluid generating device according to claim 1, characterized in that: The partition (5) protrudes from the surface of the vibration area (321) of the diaphragm (3).

3. The fluid generating device according to claim 2, characterized in that: The partition (5) is formed by shaping a local area of ​​the diaphragm (3), and the partition (5) is a partition rib (54) arranged on the vibration part (32) and protruding from the surface of the vibration area (321) of the diaphragm (3).

4. The fluid generating device according to claim 2, characterized in that: The partition (5) is formed by providing a reinforcing rib (53) in a local area on one side of the diaphragm (3); The reinforcing rib (53) comprises a main body section (531) arranged on the vibration part (32), the main body section (531) protruding from the surface of the vibration area (321) of the diaphragm (3), and the main body section (531) divides the vibration part (32) into at least two vibration areas (321).

5. The fluid generating device according to claim 4, characterized in that: The reinforcing rib (53) is arranged on a side of the diaphragm (3) away from the actuator (1), and the main body section (531) constituting the reinforcing rib (53) is arranged on a side of the vibration part (32) of the diaphragm (3) away from the actuator (1).

6. The fluid generating device according to claim 5, characterized in that: The reinforcing rib (53) also has an extension section (532) extending from the main section (531) to the fixed portion (31) of the diaphragm (3), the extension section (532) protruding from the surface of the vibration area (321) of the diaphragm (3), and the extension section (532) is fixedly connected to the side of the fixed portion (31) of the diaphragm (3) facing away from the spacer portion (2).

7. The fluid generating device according to claim 4, characterized in that: The reinforcing rib (53) is arranged on a side of the diaphragm (3) facing the actuator (1), and a main body section (531) constituting the reinforcing rib (53) is arranged on a side of the vibration part (32) of the diaphragm (3) facing the actuator (1).

8. The fluid generating device according to claim 7, characterized in that: The reinforcing rib (53) also has an extension section (532) extending from the main section (531) to the fixing portion (31) of the diaphragm (3), wherein the extension section (532) protrudes from the surface of the vibration area (321) of the diaphragm (3), and the extension section (532) is fixedly clamped between the fixing portion (31) of the diaphragm (3) and the spacer portion (2).

9. The fluid generating device according to claim 7, characterized in that: The side of the main body section (531) facing the actuator (1) is fixedly connected to the actuator (1).

10. The fluid generating device according to claim 2, characterized in that: The partition (5) is formed by arranging a first reinforcing rib (51) facing the actuator (1) and a second reinforcing rib (52) facing away from the actuator (1) in local areas on both sides of the diaphragm (3); The first reinforcing rib (51) comprises a first main body section (531) arranged on the vibrating portion (32) of the diaphragm (3), and the first main body section (531) protrudes from the diaphragm (3); The second reinforcing rib (52) has a second main body section (531) arranged on the vibrating portion (32) of the diaphragm (3), and the second main body section (531) protrudes from the diaphragm (3).

11. The fluid generating device according to claim 10, characterized in that: The first reinforcing rib (51) further comprises a first extension section extending from the first main body section (531) to the fixing portion (31) or / and the second reinforcing rib (52) comprises a second extension section extending from the second main body section (531) to the fixing portion (31); The first extension section protrudes from the surface of the vibration area (321) of the diaphragm (3), and the first extension section is fixedly clamped between the fixing portion (31) of the diaphragm (3) and the spacing portion (2); The second extension section protrudes from the surface of the vibration area (321) of the diaphragm (3), and the second extension section is fixedly connected to a side of the fixing portion (31) of the diaphragm (3) that is away from the spacing portion (2).

12. The fluid generating device according to claim 10, characterized in that: The side of the first main body section (531) facing the actuator (1) is fixedly connected to the actuator (1).

13. The fluid generating device according to claim 10, characterized in that: The materials constituting the first reinforcing rib (51) and the second reinforcing rib (52) are the same or different.

14. The fluid generating device according to any one of claims 2 or 4-13, characterized in that: The partition (5) is integrally formed with the diaphragm (3) or fixedly connected.

15. The fluid generating device according to any one of claims 2 to 13, characterized in that: The partition (5) is a continuous integral structure in the area on the same side of the diaphragm (3); Alternatively, the partition (5) is formed as a plurality of partition strips (5a) arranged at intervals in the region on the same side of the diaphragm (3).

16. The fluid generating device according to claim 1, characterized in that: The spacer (2) is an annular structure, the inner peripheral wall of the spacer (2) and the actuator (1) enclose an annular groove (21), and the end of the spacer (2) away from the actuator (1) is fully or partially engaged with the diaphragm (3) on an annular path around the groove (21); Alternatively, the spacer portion (2) has a plurality of spacers (22), and the spacers (22) of the same spacer portion (2) are all joined to the first main surface (1a) or the second main surface (1b), and the plurality of spacers (22) are spaced and distributed along an annular path around the chamber (4) to enclose the groove portion (21) with the actuator (1), and one end of the spacer (22) facing away from the actuator (1) is fully or partially joined to the diaphragm (3).

17. The fluid generating device according to claim 1, characterized in that: The diaphragm (3) is made of a polymer material, or a composite material consisting of a polymer material and a metal material.

18. The fluid generating device according to claim 1, characterized in that: The actuator (1) comprises a substrate (11), and at least one piezoelectric sheet (12) is bonded to one or both surfaces of the substrate (11) in the thickness direction, and the piezoelectric sheet (12) is bonded to the substrate (11) to form the actuator (1).

19. The fluid generating device according to claim 1, characterized in that: At least one hole (321a) communicating with the chamber (4) passes through the maximum amplitude region (3211) or a region adjacent to the maximum amplitude region (3211) of the vibration region (321) of the diaphragm (3).

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