A clamping device for a mirror and a mirror adjustment device

Abstract

The present application relates to a kind of clamping devices for mirror, it includes third micrometer connected on connecting rod by transmission rod and lever device, the tail of connecting rod is equipped with U-shaped slot, one end of U-shaped slot is equipped with fifth top bead, the other end of U-shaped slot has through threaded hole, top bead screw is assembled in threaded hole, top bead screw has sixth top bead, fifth top bead and sixth top bead are oppositely arranged and cooperate with mirror.The present application also relates to mirror adjusting device comprising above-mentioned clamping device.The present application is fixed by top bead to mirror up and down clamping to realize mirror surface, and fine adjustment is realized to the clamping point by micrometer, and plane mirror deformation can be corrected in large scale range.

Description

TECHNICAL FIELD

[0001] The present application relates to the clamping and face correction of a mirror, and more particularly to a clamping device for a mirror and a mirror adjustment device. BACKGROUND

[0002] In the light path processing of X-rays of synchrotron radiation, mirrors are often used, which change the direction of X-rays, correct the shape of X-rays, or affect the phase of X-rays. Mirrors vary in form according to different functions and requirements. Among them, a class of mirrors adopts an ultra-thin thickness to achieve various processing of X-rays.

[0003] These mirrors often deform under the action of gravity and installation stress, affecting the imaging quality of the mirror.

[0004] Before online installation, mirrors of synchrotron radiation often need to be tested offline. Thin mirrors often appear offline testing, and the face shape is corrected to perfect condition. However, during online installation, some unknown factors will have a great impact, so that the offline correction is completely lost.

[0005] Thin mirrors of synchrotron radiation are very valuable, but the thickness is very thin, and are easily damaged during transportation and handling due to factors such as vibration. SUMMARY

[0006] In order to solve the problems of deformation of the thin mirror in the prior art, the present application provides a clamping device for a mirror and a mirror adjustment device.

[0007] The clamping device for a mirror according to the present application comprises a third micrometer connected to a connecting rod through a transmission rod and a lever device, the tail of the connecting rod is provided with a U-shaped groove, one end of the U-shaped groove is provided with a fifth top bead, the other end of the U-shaped groove has a through threaded hole, a top bead screw is assembled in the threaded hole, the top bead screw has a sixth top bead, and the fifth top bead and the sixth top bead are oppositely arranged and matched with the mirror.

[0008] Preferably, the lever device is connected with the third micrometer, the transmission rod connects the lever device and the connecting rod, and the coupling of the transmission rod and the connecting rod allows the connecting rod to rotate at a certain angle.

[0009] Preferably, the end of the connecting rod away from the U-shaped groove has a connecting ball head, the center of the end of the transmission rod is formed with a first hemispherical hole, and a fastener with a second hemispherical hole seals the connecting ball head in the first and second hemispherical holes to achieve ball head connection.

[0010] Preferably, the end of the transmission rod away from the fastener is formed with an interface, and the transmission rod is hard connected with the lever device through the interface.

[0011] Preferably, the lever device is a scissors structure.

[0012] Preferably, the scissors structure has n groups of scissors units, the cross rods of the scissors units have an initial angle θ, and the ratio of the third micrometer to the moving amount of the connecting rod is

[0013] The mirror adjusting device according to the present application comprises a horizontal mirror and a vertical mirror respectively mounted on the same device base, the horizontal mirror and the vertical mirror respectively comprise a mirror and the above-mentioned clamping device, the mirrors are coupled to each other through the clamping devices in the optical path to act on the incident X-rays in all directions.

[0014] Preferably, the vertical mirror is controlled by a second adjusting mechanism, the second adjusting mechanism comprises a second adapter plate, a pitch motor, a second roll motor and a second translation motor, wherein the second adapter plate is connected with the vertical mirror, the pitch motor is connected with the second adapter plate to provide the vertical mirror with the freedom of pitching in the vertical plane, the second roll motor is connected with the pitch motor to provide the vertical mirror with the freedom of rolling in the plane perpendicular to the optical path, and the second translation motor is connected with the second roll motor to provide the vertical mirror with the freedom of moving in the vertical direction.

[0015] Preferably, the rotation axes of the pitch motor and the second roll motor coincide, and the center of the reflecting surface of the vertical mirror is located on the rotation axes of the pitch motor and the second roll motor.

[0016] Preferably, the horizontal mirror further comprises a second pad and a horizontal mirror base, the mirror of the horizontal mirror is supported and installed on the horizontal mirror base through the second pad, and the clamping device of the horizontal mirror is installed around the horizontal mirror base; the vertical mirror further comprises a third pad, a vertical mirror base and a back plate, the mirror of the vertical mirror is supported and installed on the vertical mirror base through the third pad, the back plate is assembled on the vertical mirror base, and the clamping device of the vertical mirror is installed around the back plate.

[0017] Preferably, the transmission rod is freely telescopic in the hollow transmission rod sleeve, so as to be installed on the back plate through the transmission rod sleeve.

[0018] Preferably, the second clamping device further comprises a micrometer mounting plate and a lever device mounting plate, wherein the micrometer mounting plate is mounted on the back plate to mount the third micrometer on the back plate, and the lever device mounting plate is mounted on the back plate to mount the lever device on the back plate.

[0019] The clamping device for mirror according to the present application, by the top bead clamping the mirror, realizes the fixing of the mirror surface, by the micrometer, realizes the fine adjustment of the clamping point, by the force to the clamping point, realizes the correction of the mirror surface, not only can be used for the short distance carrying and the long distance transportation process of the plane mirror, and also can be used to correct the plane mirror deformation from the large scale range caused by the gravity and the stress and other factors, and ensures the mirror surface stability in the short distance carrying and the long distance transportation. The mirror adjusting device according to the present application can correct the mirror deformation of the thin plane mirror of the synchrotron radiation in the installation and use process. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 The structure diagram of the mirror adjusting device according to a preferred embodiment of the present application.

[0021] Figure 2 The exploded view of the mirror adjusting device of Figure 1 .

[0022] Figure 3 The structure diagram of the horizontal mirror of Figure 2 .

[0023] Figure 4 The exploded view of the horizontal mirror of Figure 3 .

[0024] Figure 5 The exploded view of the first clamping device of Figure 4 .

[0025] Figure 6 The structure diagram of the first clamping device of Figure 5 .

[0026] Figure 7 The exploded view of the first clamping device of Figure 6 .

[0027] Figure 8 The partial another perspective view of the first clamping device of Figure 6 .

[0028] Figure 9 The side view of the first top bead lever of Figure 7 .

[0029] Figure 10 The side view of the second / third top bead lever of Figure 7 .

[0030] Figure 11 The flexible fixing of the micrometer and the lever arm is shown.

[0031] Figure 12 The structure diagram of the second clamping device of Figure 5 .

[0032] Figure 13 is an exploded view of the second clamping device of Figure 12

[0033] Figure 14 is an assembly view of the clamping block assembly of the second clamping device of Figure 12

[0034] Figure 15 is a structural view of the first clamping block of Figure 13

[0035] Figure 16 is a structural view of the second clamping block of Figure 13

[0036] Figure 17 is a structural view of the fixing device of Figure 5

[0037] Figure 18 is a side view of the first clamping device of Figure 5

[0038] Figure 19 is a side view of the second clamping device of Figure 5

[0039] Figure 20 is a structural view of the vertical mirror of Figure 2

[0040] Figure 21 is an exploded view of the vertical mirror of Figure 20

[0041] Figure 22 is an exploded view of the second clamping device of Figure 21

[0042] Figure 23 is a structural view of the second clamping device of Figure 22

[0043] Figure 24 is a structural view of the vertical mirror base of Figure 22

[0044] Figure 25 shows the initial assembly state of the vertical mirror of Figure 20

[0045] Figure 26 is a structural view of the vertical mirror of the mirror adjustment device according to another preferred embodiment of the present application.

[0046] Figure 27 is an assembly view of the second clamping device of Figure 26 ​​​​​​​​​​​​​​

[0047] Figure 28 is Figure 27 a sectional view of the transmission rod of the second clamping device of

[0048] Figure 29 is Figure 27 a sectional view of the transmission rod of the second clamping device of

[0049] Figure 30 is Figure 27 a sectional view of the lever device of the second clamping device of

[0050] Figure 31 is Figure 30 a sectional view of the lever device of the second clamping device of

[0051] Figure 32 is

[0052] Figure 33 is Figure 32 a sectional view of the lever device of the second clamping device of

[0053] Figure 34 is Figure 32 a sectional view of the lever device of the second clamping device of

[0054] Figure 35 is Figure 32 a sectional view of the lever device of the second clamping device of

[0055] Figure 36 is Figure 32 a sectional view of the lever device of the second clamping device of

[0056] Figure 37 is Figure 32 a sectional view of the lever device of the second clamping device of

[0057] Figure 38 is Figure 1 a sectional view of the lever device of the second clamping device of DETAILED DESCRIPTION

[0058] The application will be described below in more detail with reference to the drawings, in which

[0059] Example 1

[0060] As Figure 2As shown, a reflector adjustment device according to a preferred embodiment of the present invention includes a horizontal mirror 201 and a vertical mirror 207, which are respectively controlled by two sets of adjustment mechanisms, and are both mounted on the same device base 212. The horizontal mirror 201 is a vertically placed reflector mechanism, also known as an H-mirror, which is placed in the optical path to modulate the horizontal properties of the incident X-ray. The vertical mirror 207 is a horizontally placed reflector mechanism, also known as a V-mirror, which is placed in the optical path to modulate the vertical properties of the incident X-ray. The horizontal mirror 201 and the vertical mirror 207 are coupled to each other to act on the X-rays in all directions.

[0061] In this embodiment, the device base 212 is a bottom plate that provides a mounting platform for the horizontal mirror 201 and the vertical mirror 207, so that the entire reflector adjustment device can be moved as a whole. In this way, the reflector can be easily moved as a whole after offline testing and calibration.

[0062] In this embodiment, the horizontal mirror 201 is controlled by a first adjustment mechanism, and the vertical mirror 207 is controlled by a second adjustment mechanism. The first adjustment mechanism and the second adjustment mechanism are evenly distributed to achieve stability and ease of coupling between the horizontal mirror 201 and the vertical mirror 207.

[0063] like Figure 2 As shown, the first adjustment mechanism includes a first adapter plate 202 connected to the level mirror 201, and four positioning pins are designed at its four corners. When the level mirror 201 is installed on the first adapter plate 202, it can be firmly locked, so that the level mirror 201 can be removed as a whole for offline calibration.

[0064] like Figure 2 As shown, the first adjustment mechanism also includes a rotary motor 203 connected to the first adapter plate 202 and a first roll motor 204 connected to the rotary motor 203. The rotary motor 203 provides the horizontal mirror 201 with the freedom to rotate within the horizontal plane, while the first roll motor 204 provides the horizontal mirror 201 with the freedom to roll within a plane perpendicular to the optical path. Specifically, the rotary motor 203 is a high-precision rotary motor with a minimum resolution of greater than 0.001 degrees, providing a slight angle of incidence for the reflector of the horizontal mirror 201. Specifically, when the horizontal mirror 201 is mounted on the first adapter plate 202, the center of the reflective surface of the horizontal mirror 201 is precisely located on the rotation axis of the rotary motor 203 and also on the rotation center of the first roll motor 204. In this embodiment, the error is controlled within 1 mm.

[0065] like Figure 2As shown, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level.

[0066] As shown in FIG. 2, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level. Figure 2

[0067] It should be understood that, in order to ensure that the horizontal mirror 201 and the first adjusting mechanism as a whole can be easily moved into or out of the light path according to the experimental requirements and maintain the calibrated posture after calibration, the installation sequence of the horizontal mirror 201 and the first adjusting mechanism is fixed and cannot be adjusted.

[0068] As shown in FIG. 2, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level. Figure 2 As shown in FIG. 2, the second adjusting mechanism comprises a second adapter plate 208 connected with the vertical mirror 207, and four positioning pins are designed at four corners of the second adapter plate 208. When the vertical mirror 207 is installed on the second adapter plate 208, it can be firmly locked, so that the vertical mirror 207 can be taken off as a whole for offline calibration.

[0069] Figure 2 As shown in FIG. 2, the second adjusting mechanism further comprises a pitch motor 209 connected with the second adapter plate 208 and a second roll motor 210 connected with the pitch motor 209, so as to provide a pitch degree of freedom of the vertical mirror 207 in the vertical plane through the pitch motor 209 and a roll degree of freedom of the vertical mirror 207 in the plane perpendicular to the light path through the second roll motor 210. In particular, the pitch motor 209 is a high-precision rotary motor, and the minimum resolution is 0.001 degrees or more, which provides a slight incident angle for the reflecting mirror of the vertical mirror 207. In particular, the rotation axes of the pitch motor 209 and the second roll motor 210 completely coincide. In particular, when the vertical mirror 207 is installed on the second adapter plate 208, the center of the reflecting surface of the vertical mirror 207 is located on the rotation axes of the pitch motor 209 and the second roll motor 210. In the embodiment, the error is controlled within 1 mm.

[0070] As shown in FIG. 2, the second adjusting mechanism further comprises a pitch motor 209 connected with the second adapter plate 208 and a second roll motor 210 connected with the pitch motor 209, so as to provide a pitch degree of freedom of the vertical mirror 207 in the vertical plane through the pitch motor 209 and a roll degree of freedom of the vertical mirror 207 in the plane perpendicular to the light path through the second roll motor 210. In particular, the pitch motor 209 is a high-precision rotary motor, and the minimum resolution is 0.001 degrees or more, which provides a slight incident angle for the reflecting mirror of the vertical mirror 207. In particular, the rotation axes of the pitch motor 209 and the second roll motor 210 completely coincide. In particular, when the vertical mirror 207 is installed on the second adapter plate 208, the center of the reflecting surface of the vertical mirror 207 is located on the rotation axes of the pitch motor 209 and the second roll motor 210. In the embodiment, the error is controlled within 1 mm. Horizontal mirror 201 As shown in FIG. 2, the second adjusting mechanism further comprises a second translational motor 211 connected with the second roll motor 210, so as to provide a translational degree of freedom of the vertical mirror 207 in the vertical direction through the second translational motor 211, so that the vertical mirror 207 can cut into or out of the light path as needed. In the embodiment, the second translational motor 211 is a high-precision translational motor, and the motion accuracy is micron level.​​

[0071] It should be understood that the installation order of the vertical mirror 207 and the second adjusting mechanism is fixed and cannot be adjusted to ensure that the calibration is as a whole, according to the experimental requirements to easily move in or out of the light path and maintain the calibrated posture.

[0072] Figures 3-4

[0073] As shown in Figure 5 , the horizontal mirror 201 includes a first reflecting mirror 201a, a second cushion block 201b, a horizontal mirror base 201c and a first clamping device 201d, wherein the first reflecting mirror 201a is installed on the second cushion block 201b, placed on the horizontal mirror base 201c, and finally fixed by the first clamping device 201d. In this way, the horizontally placed first reflecting mirror 201a is clamped and fixed. In this embodiment, the horizontal mirror base 201c has three-point support devices, and the first reflecting mirror 201a and the second cushion block 201b can be positioned by the three-point support devices due to gravity.

[0074] As shown in Figure 6 , the first clamping device 201d includes a first clamping device 301, a second clamping device 302, 303 and a fixing device 304 installed around the horizontal mirror base 201c, wherein the first clamping device 301 is installed at both ends of the horizontal mirror base 201c respectively, the second clamping device 302, 303 is installed symmetrically at the central position of the horizontal mirror base 201c, and the fixing device 304 is installed on the horizontal mirror base 201c at both sides of the second clamping device 302, 303 respectively, for firmly fixing the second cushion block 201b on the horizontal mirror base 201c, thereby stabilizing the first reflecting mirror 201a. The first clamping device 301 and the second clamping device 302, 303 can effectively adjust the overall curvature of the first reflecting mirror 201a in a large range.

[0075] As shown in Figure 5 , the first clamping device 301 includes a first top bead lever 501, a second top bead lever 503, a third top bead lever 506, a first bracket 509, a second bracket 510 and a first clamping base 511, wherein the first clamping base 511 is fixedly installed at both ends of the horizontal mirror base 201c (see Figures 7-8 ), the first bracket 509 and the second bracket 510 are fixedly installed on the first clamping base 511 at a distance from each other, the first top bead lever 501 is rotatably installed between the first bracket 509 and the second bracket 510, the second top bead lever 503 is rotatably installed on the first bracket 509, and the third top bead lever 506 is rotatably installed on the second bracket 510.

[0076] As shown in Figure 9As shown, the first clamping device 301 further comprises a first flexible hinge 502, which adopts a three-segment design, with both ends fixedly connected to the first support 509 and the second support 510 respectively, and the middle part passing through the first mounting hole 603 (see Figures 7-8 ) of the first top bead lever 501. In this way, the first top bead lever 501 is allowed to rotate slightly along a predetermined trajectory through the first flexible hinge 502, and the trajectory of such rotation is very accurate, and the first top bead lever 501 is not prone to distortion during the entire rotation process.

[0077] As shown in Figures 7-8 , the first clamping device 301 further comprises a second flexible hinge 504, which adopts a two-segment design, and the second top bead lever 503 is mounted on the first support 509 through the second flexible hinge 504. In addition, the first clamping device 301 further comprises a first locking ring 505, which tightly locks the second top bead lever 503 on the first clamping base 511 after adjusting the posture of the second top bead lever 503, ensuring its stability and accuracy.

[0078] As shown in Figures 7-8 , the first clamping device 301 further comprises a third flexible hinge 507, which adopts a two-segment design, and the third top bead lever 506 is mounted on the second support 510 through the third flexible hinge 507. In addition, the first clamping device 301 further comprises a second locking ring 508, which tightly locks the third top bead lever 506 on the first clamping base 511 after adjusting the posture of the third top bead lever 506.

[0079] As shown in Figure 9 , the first clamping device 301 further comprises a first micrometer 512, which has a body and a telescopic head as a precision tool, wherein the body is mounted on the first clamping base 511, and the telescopic head is flexibly connected to the first top bead lever 501, the second top bead lever 503 and the third top bead lever 506 respectively. By adjusting the first micrometer 512, the slight rotation of the first top bead lever 501, the second top bead lever 503 and the third top bead lever 506 along the flexible hinge shaft can be accurately controlled, thereby realizing high-precision adjustment and positioning.

[0080] As shown in Figure 7As shown, the first top bead lever 501 comprises a first top bead 601 and a first lever arm 604, wherein the first top bead 601 is mounted on a lateral extension of the first lever arm 604. The first top bead 601 is made of stainless steel, has a diameter no less than 5mm, and has a surface polished with a flatness between Ra0.1 and Ra0.4. The top end of the first lever arm 604 has a lever top point 602, and the upper top point of the first top bead 601 is at the same horizontal plane as the lever top point 602. The top of the first lever arm 604 has a first mounting hole 603 for mounting the first flexible hinge 502 (see Figure 7 ), and the bottom of the first lever arm 604 has a first mounting position 605 for coupling and mounting the telescopic head of the first micrometer 512 (see Figure 3 ). The first distance (i.e. the top bead action arm) 607 is between the upper top point of the first top bead 601 and the center of the first mounting hole 603, and the second distance (i.e. the lever action arm) 608 is between the first mounting position 605 and the center of the first mounting hole 603. The greater the ratio of the second distance 608 to the first distance 607, the more precise the control of the mirror surface of the first reflecting mirror 201a (see Figure 9 ). In the embodiment, the ratio of the second distance 608 to the first distance 607 is greater than 5.

[0081] As shown in Figure 10 , the first top bead lever 501 further comprises a first limit locking device 606 for locking the position of the first top bead lever 501. In the embodiment, the first limit locking device 606 is in the shape of a circular arc, and the center of the circular arc coincides with the center of the first mounting hole 603.

[0082] The second top bead lever 503 and the third top bead lever 506 have the same structure, and only the second top bead lever 503 will be described in detail below. As shown in Figure 7 , the second top bead lever 503 comprises a second top bead 701 and a second lever arm 703, wherein the second top bead 701 is mounted on a lateral extension of the second lever arm 703. The second top bead 701 is made of stainless steel, has a diameter no less than 5mm, and has a surface polished with a flatness between Ra0.1 and Ra0.4. The top of the second lever arm 703 has a second mounting hole 702 for mounting the second flexible hinge 504 (see Figure 7 ), and the bottom of the second lever arm 703 has a second mounting position 705 for coupling and mounting the telescopic head of the first micrometer 512 (see Figure 10The second top bead lever 503 is coupled to the second mounting hole 702 of the second mounting position 705. The lower vertex of the second top bead 701 is in the same horizontal plane as the center of the second mounting hole 702, and the center of the second mounting hole 702 is in the same vertical line as the second mounting position 705. The third distance (i.e., the top bead action arm) 706 is between the lower vertex of the second top bead 701 and the center of the second mounting hole 702, and the fourth distance (i.e., the lever action arm) 707 is between the second mounting position 705 and the center of the second mounting hole 702. The ratio of the fourth distance 707 to the third distance 706 is the magnification effect of the lever, which can make the first micrometer 512 more accurately adjust the mirror surface. In this embodiment, the ratio of the fourth distance 707 to the third distance 706 is greater than 5.

[0083] As shown in Figures 11 , the second top bead lever 503 further includes a second limit locking device 704 for locking the position of the second top bead lever 503, for locking the second lever arm 703.

[0084] As shown in Figures 12-14 , the telescopic head of the first micrometer 512 is flexibly fixed on the lever arms 604, 703 of the first top bead lever 501, the second top bead lever 503 and the third top bead lever 506, so that the telescopic head can push or pull back the lever arm, and can also rotate around the lever arm, but cannot be detached from the lever arm. The lever arms 604, 703 are provided with symmetrical semispherical recesses 801, and the two semispherical recesses 801 are connected by a through hole 802 in the middle. The telescopic head of the first micrometer 512 has a semispherical head 806 with a threaded hole at the top. When the semispherical head 806 is placed in the semispherical recess 801, the ball 803 of the threaded rod 805 is inserted from the other side of the semispherical recess 801, and the threaded rod 805 is inserted into the threaded hole of the semispherical head 806. The diameter of the threaded rod 805 is smaller than the diameter of the through hole 802. After installation, the ball 803 and the semispherical head 806 are moderately fixed at both ends of the through hole 802, so that the telescopic head of the first micrometer 512 can move the lever arms 604, 703 forward and backward, and can also rotate around the lever arms 604, 703.

[0085] As shown in Figure 5 , the second clamping device 302, 303 respectively includes a clamping block assembly 1011, a third bracket 1009, a second clamping base 1006 and a second micrometer 1010. The second clamping base 1006 is fixedly installed on the horizontal mirror base 201c (see Figures 12-14The third support 1009 is fixedly installed on the second clamping base 1006 in the middle of the two sides of the second clamping device 302, 303, the clamping block assembly 1011 is installed on the third support 1009, and the second micrometer 1010 is installed on the second clamping base 1006 and is flexibly connected with the clamping block assembly 1011. The clamping block assembly 1011 comprises a first clamping block 1001, a second clamping block 1004, a fourth flexible hinge 1002 and a clamping block screw 1007, wherein the first clamping block 1001 is installed on the second clamping block 1004 via the fourth flexible hinge 1002, the clamping block screw 1007 is installed on the first clamping block 1001 and is pressed on the second clamping block 1004 through the first clamping block 1001, and the clamping block screw 1007 can adjust the opening and closing angle of the first clamping block 1001 and the second clamping block 1004. In the embodiment, the fourth flexible hinge 1002 adopts a three-section design, and two ends are installed on the first clamping block 1001 and the middle part is installed on the second clamping block 1004. In the embodiment, the top end of the clamping block screw 1007 is spherical. It should be understood that the second clamping device 302, 303 is mirror-symmetrically designed, the third support 1009 and the clamping block assembly 1011 are completely the same in structure, the second clamping base 1006 is mirror-symmetrically designed, and the clamping block assembly 1011 is designed in different assembly modes to realize the mirror symmetry of the second clamping device 302, 303.

[0086] As shown in Figures 12-14 , the second clamping device 302, 303 further comprises a fifth flexible hinge 1008, which adopts a two-section design, one end of which is installed on the third support 1009 and the other end of which is installed on the second clamping block 1004.

[0087] As shown in Figure 15 , the second clamping device 302, 303 further comprises a third locking ring 1003 and a fourth locking ring 1005, wherein the third locking ring 1003 connects the first clamping block 1001 and the second clamping block 1004 to lock the opening and closing angle of the first clamping block 1001 and the second clamping block 1004, and the fourth locking ring 1005 connects the second clamping block 1004 and the second clamping base 1006 to lock the second clamping block 1004 on the second clamping base 1006 after adjustment.

[0088] As shown in Figure 14 , the first clamping block 1001 comprises a third top bead 1101, which is made of stainless steel, has a diameter not less than 5 mm and a surface polished to a flatness of Ra0.1 to Ra0.4. The first clamping block 1001 has a third mounting hole 1102, and the clamping block screw 1007 (see Figure 16) through the third mounting hole 1102. The first clamping block 1001 has a first locking hole 1103, and the third locking ring 1003 cooperates with the first locking hole 1103 to lock the opening and closing angle of the first clamping block 1001 and the second clamping block 1004. The first clamping block 1001 has a fourth mounting hole 1104 for mounting the fourth flexible hinge 1002. When the first clamping block 1001 is placed horizontally, the center of the fourth mounting hole 1104 is on the same horizontal plane as the lower vertex of the third top bead 1101.

[0089] As shown in Figure 11 , the second clamping block 1004 includes a fourth top bead 1201 and a third lever arm 1202, wherein the fourth top bead 1201 is mounted on the lateral extension of the third lever arm 1202. The fourth top bead 1201 is made of stainless steel, with a diameter not less than 5 mm, and the surface is polished to a flatness of Ra0.1 to Ra0.4. The top of the third lever arm 1202 has a fifth mounting hole 1205 and a sixth mounting hole 1206, wherein the fifth flexible hinge 1008 is installed through the fifth mounting hole 1205 to mount the second clamping block 1004 on the third bracket 1009, and the fourth flexible hinge 1002 is installed through the sixth mounting hole 1206 to mount the second clamping block 1004 on the first clamping block 1001. The bottom of the third lever arm 1202 has a third mounting position 1204 for coupling and mounting the extension head of the second micrometer 1010, and the mounting method is as shown in Figure 17 . The third lever arm 1202 has a second locking hole 1203, and the fourth locking ring 1005 cooperates with the second locking hole 1203 to lock the swing arm angle of the second clamping block 1004. The upper vertex of the fourth top bead 1201, the center of the fifth mounting hole 1205 and the sixth mounting hole 1206 are on a horizontal line. Their front and back order cannot be changed. At the same time, the center of the fifth mounting hole 1205 and the third mounting position 1204 are on the same plumb line.

[0090] As shown in Figure 5 , the fixing device 304 includes a fixed base 1302, and the lower part of the fixed base 1302 has a seventh mounting hole 1303. The fixed base 1302 is installed and fixed on the horizontal mirror base 201c (see Horizontal mirror 201 assembly ) through the seventh mounting hole 1303. The top of the fixed base 1302 has a completely threaded hole, and the locking bolt 1304 is assembled on the threaded hole. One end of the locking bolt 1304 is a hand wheel, and the other end is a locking sheet 1301. In this embodiment, the locking sheet 1301 is a high-density polytetrafluoroethylene sheet.

[0091] Figure 5

[0092] The clamping devices 301, 302, 303 (see Figure 18During assembly, pay attention to the angles of the flexible hinges 502, 504, 507, 1002, and 1008. Ensure that when each flexible hinge 502, 504, 507, 1002, and 1008 is in a balanced position, the jaws of the clamping devices 301, 302, and 303 are fully open. Furthermore, when the jaws of the clamping devices 301, 302, and 303 are fully closed, they do not exceed the travel range of each flexible hinge 502, 504, 507, 1002, and 1008.

[0093] like Figure 19 As shown, for the first clamping device 301, when assembling the flexible hinges 502, 504, and 507, the opening between the first and second top beads 601 and 701 is made as large as possible. The lever arms 604 and 703 are then assembled and coupled to the telescopic head of the first micrometer 512. The test device ensures that within the travel range of the first micrometer 512, the maximum swing angle of the lever arms 604 and 703 does not exceed the travel of the flexible hinges 502, 504, and 507. At the maximum swing angle of the lever arms 604 and 703, the first limit lock 606 and locking rings 505 and 508 are locked.

[0094] like Figure 4 As shown, for the second clamping device 302, 303, first completely loosen the clamping block screw 1007, then assemble the fourth flexible hinge 1002. When the device is relaxed, the opening between the third and fourth top beads 1101, 1201 is maximized due to the elastic action of the fourth flexible hinge 1002. At the same time, when the third and fourth top beads 1101, 1201 close, they do not exceed the travel of the fourth flexible hinge 1002. When the opening between the third and fourth top beads 1101, 1201 is maximized, the third locking ring 1003 is tightened. Then, the fifth flexible hinge 1008 is assembled. First, couple the third lever arm 1202 to the telescopic head of the second micrometer 1010. Then, move the second micrometer 1010 to the midpoint of its travel, and then assemble the fifth flexible hinge 1008 at this position. The result is that the equilibrium position of the fifth flexible hinge 1008 is exactly at the midpoint of the travel of the second micrometer 1010. At this time, the fourth locking ring 1005 is locked.

[0095] See also Figure 5 , place the first reflecting mirror 201a and the second pad 201b on the horizontal mirror base 201c, which has a three-point support device. The first reflecting mirror 201a and the second pad 201b can be positioned by the three-point support device due to gravity.

[0096] See also Figure 17 , assemble the fixture 304 on the horizontal mirror base 201c. Slowly tighten the handwheels of the four fixtures 304 in sequence. Tighten each locking bolt 1304 (see Figure 5) Tighten 1 / 4 or 1 / 8 turn clockwise each time until all the locking bolts 1304 are tightened. The first mirror 201a and the second spacer 201b are locked on the horizontal mirror base 201c.

[0097] Referring to Figure 5 Install the first clamping device 301 on the horizontal mirror base 201c. Note that the top beads 601, 701 will not touch the mirror surface of the first mirror 201a. If necessary, loosen the first limit lock 606 and the locking rings 505, 508, and adjust the first micrometer 512 to move the top beads 601, 701 away from the mirror surface.

[0098] Referring to Vertical mirror 207 Install the second clamping device 302, 303 on the horizontal mirror base 201c. Note that the top beads 1101, 1201 will not touch the mirror surface of the first mirror 201a. If necessary, loosen the locking rings 1003, 1005, and adjust the second micrometer 1010 to move the top beads 1101, 1201 away from the mirror surface. The second clamping device 302, 303 is mirror-symmetrical, and when installed, the top beads 1101, 1201 are exactly acting on the middle of the first mirror 201a.

[0099] Place the device under a laser interferometer.

[0100] Loosen the first limit lock 606 and the locking rings 505, 508, 1003, 1005.

[0101] Fine-tune the micrometers 512, 1010 according to the surface profile results fed back by the laser interferometer to correct the surface profile of the first mirror 201a. For the second clamping device 302, 303, first use the second micrometer 1010 to slightly stick the top bead 1201 to the first mirror 201a, then rotate the clamping screw 1007 to make the top bead 1101 also slightly stick to the first mirror 201a. After that, fine-tune the second micrometer 1010 to correct the surface profile of the first mirror 201a.

[0102] After getting the appropriate surface profile structure, lock the first limit lock 606 and the locking rings 505, 508, 1003, 1005.

[0103] Figures 20-21

[0104] As Figures 20-21As shown, vertical mirror 207 includes a second reflector 201e, a third spacer 201f, a vertical mirror base 306, and a second clamping device 201g. Second reflector 201e is mounted on third spacer 201f, then placed on vertical mirror base 306, and finally secured by second clamping device 201g. Thus, vertically positioned second reflector 201e is clamped and secured. In this embodiment, vertical mirror base 306 has a three-point support mechanism, which allows second reflector 201e and third spacer 201f to be positioned by gravity.

[0105] like Figure 22 As shown, the vertical mirror 207 further includes a back plate 305, which is assembled on the vertical mirror base 306, and a gap is left between the second reflecting mirror 201e and the third spacer 201f so that they are not in direct contact.

[0106] like Figures 6-11 As shown, the second clamping device 201g includes a first clamping device 301, second clamping devices 302, 303 and a fixing device 304 installed around the back plate 305, wherein the first clamping device 301 is respectively installed at both ends of the back plate 305, the second clamping device 302 is installed on the back plate 305, the second clamping device 303 is simultaneously installed on the back plate 305 and the vertical mirror base 306, and the fixing devices 304 are respectively installed on both sides of the second clamping device 302 on the back plate 305 for fixing the third pad 201f, thereby stabilizing the second reflector 201e and being able to effectively adjust the overall curvature of the second reflector 201e over a wide range of scales. The structure of the first clamping device 301 is as shown in FIG. Figure 18 and Figures 12-16 As shown, the structure of the second clamping device 302 is as follows Figure 19 and Figure 17 As shown, the structure of the fixing device 304 is as shown in FIG. Figure 23 shown.

[0107] like Figure 24 As shown, the second clamping device 303 includes a third micrometer 401, whose telescopic head is fixed to a connecting rod 402, and the tail of the connecting rod 402 is equipped with a U-shaped groove 403 and a guide rail 404. A fifth top ball 405 is installed at one end of the U-shaped groove 403. A threaded hole is provided at the other end of the U-shaped groove 403, and a top ball screw 406 is installed in the threaded hole. One end of the top ball screw 406 is a handwheel, and the other end is a sixth top ball 407. In this embodiment, the fifth top ball 405 and the sixth top ball 407 are respectively made of stainless steel, with a diameter of not less than 5 mm, and the surface is polished with a flatness between Ra0.1 and Ra0.4.

[0108] like Figure 23As shown, three positioning support balls 501 are arranged on the top surface of the vertical mirror base 306 in an isosceles triangle pattern. The vertical mirror base 306 has a track groove 502 for accommodating the connecting rod 402 (see Figure 23 ). The vertical mirror base 306 also has a slide rail mounting hole 503 for mounting the guide rail 404 (see Vertical mirror 207 assembly ).

[0109] Figure 25

[0110] As shown in Figure 24 , the third micrometer 401 is assembled on the back plate 305 without being tightened.

[0111] The back plate 305 is assembled on the vertical mirror base 306. Note that the third micrometer 401 is placed into the track groove 502 (see Figure 24 ) of the vertical mirror base 306.

[0112] The connecting rod 402 is assembled from the front of the track groove 502 (see Figure 23 ) of the vertical mirror base 306 and coupled with the third micrometer 401.

[0113] The connecting rod 402 is lightly screwed on the vertical mirror base 306. Rotate the third micrometer 401 to move the connecting rod 402 and correct the posture of the connecting rod 402 and the third micrometer 401 in the process. Until no resistance is felt, the screw on the connecting rod 402 is tightened.

[0114] The fixing screw of the third micrometer 401 is tightened to tightly fix it on the back plate 305. At this point, the second clamping device 303 composed of the third micrometer 401 and the connecting rod 402 is assembled.

[0115] Referring to Figure 25 , the fifth top bead 405 and the sixth top bead 407 are completely loosened, and the opening is maximized.

[0116] From top to bottom, the second reflecting mirror 201e and the third pad 201f are placed on the vertical mirror base 306, which has three-point support devices, and the second reflecting mirror 201e and the third pad 201f can be positioned by the three-point support devices due to gravity. During the placement process, pay attention to adjust the third micrometer 401 so that the fifth top bead 405 and the sixth top bead 407 do not touch the second reflecting mirror 201e.

[0117] Referring to Figure 18, respectively assemble the clamping devices 301 and 302. During assembly, pay attention to the angles of the flexible hinges 502, 504, 507, 1002, and 1008. Ensure that when each flexible hinge 502, 504, 507, 1002, and 1008 is in a balanced position, the jaws of the clamping devices 301, 302, and 303 are fully open. Furthermore, when the jaws of the clamping devices 301, 302, and 303 are fully closed, they do not exceed the travel range of each flexible hinge 502, 504, 507, 1002, and 1008.

[0118] like Figure 19 As shown, for the first clamping device 301, when assembling the flexible hinges 502, 504, and 507, the opening between the first and second top beads 601 and 701 is made as large as possible. The lever arms 604 and 703 are then assembled and coupled to the telescopic head of the first micrometer 512. The test device ensures that within the travel range of the first micrometer 512, the maximum swing angle of the lever arms 604 and 703 does not exceed the travel of the flexible hinges 502, 504, and 507. At the maximum swing angle of the lever arms 604 and 703, the first limit lock 606 and locking rings 505 and 508 are locked.

[0119] like Figure 25 As shown, for the second clamping device 302, first completely loosen the clamping block screw 1007, then assemble the fourth flexible hinge 1002. When the device is relaxed, the opening between the third and fourth top beads 1101, 1201 is maximized due to the elasticity of the fourth flexible hinge 1002. At the same time, when the third and fourth top beads 1101, 1201 close, they do not exceed the travel of the fourth flexible hinge 1002. When the opening between the third and fourth top beads 1101, 1201 is maximized, the third locking ring 1003 is tightened. Then, the fifth flexible hinge 1008 is assembled. First, couple the third lever arm 1202 to the telescopic head of the second micrometer 1010. Then, move the second micrometer 1010 to the midpoint of its travel, and assemble the fifth flexible hinge 1008 at this position. The result is that the equilibrium position of the fifth flexible hinge 1008 is exactly at the midpoint of the travel of the second micrometer 1010. At this time, the fourth locking ring 1005 is locked.

[0120] See also Figure 17 , assemble the fixture 304 on the back plate 305. Slowly tighten the handwheels of the two fixtures 304 in sequence. Tighten each locking bolt 1304 (see Figure 25 ) Tighten the screws 1304 clockwise by 1 / 4 or 1 / 8 of a turn each time until all the locking bolts 1304 are tightened. The second reflector 201e and the third spacer 201f are locked on the back plate 305.

[0121] See also Figure 5Two first clamping devices 301 are assembled on the back plate 305. Note that the top beads 601, 701 will not touch the mirror surface of the second mirror 201e. If necessary, loosen the first limit locking device 606 and the locking rings 505, 508, adjust the first micrometer 512 to make the top beads 601, 701 away from the mirror surface.

[0122] Referring to Figures 20-21 The second clamping device 302 is assembled on the back plate 305. Note that the top beads 1101, 1201 will not touch the mirror surface of the second mirror 201e. If necessary, loosen the locking rings 1003, 1005, adjust the second micrometer 1010 to make the top beads 1101, 1201 away from the mirror surface. When assembled, the top beads 1101, 1201 are just acting on the middle of the second mirror 201e.

[0123] Put the device under the laser interferometer.

[0124] Loosen the first limit locking device 606 and the locking rings 505, 508, 1003, 1005.

[0125] Fine tune the micrometers 512, 1010, 401 according to the surface profile results from the laser interferometer to correct the surface profile of the second mirror 201e. For the second clamping device 302, first use the second micrometer 1010 to make the top bead 1201 slightly touch the second mirror 201e, then rotate the clamping screw 1007 to make the top bead 1101 also slightly touch the second mirror 201e. Then fine tune the second micrometer 1010 to correct the surface profile of the first mirror 201a. For the second clamping device 303, first use the third micrometer 401 to make the fifth top bead 405 slightly touch the second mirror 201e, then rotate the top bead screw 406 to make the sixth top bead 407 slightly touch the second mirror 201e. Adjust the third micrometer 401 to correct the surface profile of the second mirror 201e according to the results from the laser interferometer.

[0126] After getting the proper surface profile structure, lock the first limit locking device 606 and the locking rings 505, 508, 1003, 1005.

[0127] Example 2

[0128] Similar to the structure of the second clamping device 303 of the vertical mirror of the mirror adjusting device according to a preferred embodiment of the present application, Figures 26-27 Figure 28 ​The second clamping device 303' of the vertical mirror of the reflector adjustment device according to another preferred embodiment of the present invention comprises a connecting rod 402' driven by a third micrometer 401', the tail of the connecting rod 402' is provided with a U-shaped groove 403' and two guide rails 404'. The guide rails 404' are linear guide rails mounted on the vertical mirror base 306. The connecting rod 402' is mounted on the waist groove 501 (see Figure 28 ) is mounted on the guide rail 404', thereby ensuring high-precision linear movement of the connecting rod 402' and preventing distortion when adjusting the mirror surface shape. A fifth top bead 405' is installed at one end of the U-shaped groove 403', and a threaded hole 502 is inserted at the other end of the U-shaped groove 403' (see Figures 20-21 ), a ball screw 406' is installed in the threaded hole, and one end of the ball screw 406' is a sixth ball 407'. The fifth ball 405' and the sixth ball 407' cooperate to fix the mirror.

[0129] and Figure 28 Unlike the second clamping device 303 of the vertical mirror of the reflector adjustment device according to a preferred embodiment of the present invention, the third micrometer 401' is not directly connected to the connecting rod 402'. Specifically, the second clamping device 303' further includes a transmission rod 408 and a lever assembly 409. The lever assembly 409 is connected to the third micrometer 401' behind the back plate 305. The transmission rod 408 is mounted on the back plate 305 and can be telescopically extended and connected to the lever assembly 409 and the connecting rod 402'. The coupling between the transmission rod 408 and the connecting rod 402' allows the connecting rod 402' to rotate at a certain angle.

[0130] like Figure 30 As shown, the end of the connecting rod 402' away from the U-shaped groove 403' has a connecting ball head 503, as shown in FIG. Figure 29 As shown, the center of the end of the transmission rod 408 is formed with a hemispherical hole 408a, and the fastener 901 with a hole is fixedly installed on the end of the transmission rod 408. The center of the end face of the fastener 901 facing the transmission rod 408 is formed with a hemispherical hole 901a, and the connecting ball head 503 of the connecting rod 402' is accommodated in the hemispherical holes 408a, 901a, thereby realizing the ball head connection by sealing the connecting ball head 503 with the fastener 901. In this way, the transmission rod 408 can rotate around the connecting rod 402' in a small range. When the transmission rod 408 drives the connecting rod 402' to move, the connecting rod 402' can advance along the path constrained by the linear guide 404' without distortion. Adjusting the mirror shape is a small-scale slight adjustment, and the transmission rod 408 constraint and the linear guide 404' constraint are basically in a straight line, so there is no need to consider the slippage problem between the connection of the transmission rod 408 and the connecting rod 402'.

[0131] like Figure 29As shown, the transmission rod 408 is accommodated in the hollow transmission rod housing 602 and can be freely extended and retracted, thereby being mounted on the back plate 305 through the transmission rod housing 602 .

[0132] like Figure 30 As shown, an interface 408 b is formed at the end of the transmission rod 408 away from the fastener 901 , and the transmission rod 408 is rigidly connected to the lever device 409 via the interface 408 b .

[0133] like Figure 31 As shown, the lever device 409 is a scissor-type structure, wherein the ends A and D are fixed, and the ends B and C can slide. When the third micrometer 401' pushes and pulls the lever device 409 up and down, the end B is connected to the transmission rod 408 and can drive the transmission rod 408. The scissor-type structure of the lever device 409 can be provided with several groups of scissor-type units as needed, and each scissor-type unit is composed of two cross bars. In this embodiment, there are three groups of scissor-type units. The scissor-type structure can adjust the initial angle, such as Figures 26-31 As shown, when the scissor structure is adjusted to the angle θ, it is connected to the transmission rod 408. If the scissor structure is provided with n sets of scissor units, the transmission efficiency from the third micrometer 401' to the connecting rod 402' is 2csc 2 θ / n, that is, the ratio of the movement of the third micrometer 401' and the connecting rod 402' is

[0134] The second clamping device 303' also includes a micrometer mounting plate 401a and a lever device mounting plate 409a, wherein the micrometer mounting plate 401a is mounted on the back plate 305 at the top to mount the third micrometer 401' on the back plate 305, and the lever device mounting plate 409a is mounted on the back plate 305 at the bottom to mount the lever device 409 on the back plate 305.

[0135] In this embodiment, the third micrometer 401', transmission rod 408, and lever assembly 409 are placed close to the back plate 305 and the vertical mirror base 306, taking up little space. The lever assembly 409 utilizes the lever principle to subdivide the scale of the third micrometer 401', achieving more precise control.

[0136] Example 3

[0137] and Figure 32 The second clamping device 303' of the vertical mirror of the reflector adjustment device according to another preferred embodiment of the present invention is different in that: Figure 33 The lever device 409 ″ of the second clamping device 303 ″ of the vertical mirror of the reflector adjustment device according to yet another preferred embodiment of the present invention has a different structure.

[0138] like Figure 34As shown, the lever device 409" includes a lever chamber 902, a first piston 903, a second piston 904 and a lever 905, wherein the lever chamber 902 defines a hollow cavity, the first piston 903 is connected to the third micrometer 401" and can be telescopically inserted vertically into the hollow cavity to move up and down, the second piston 904 is connected to the transmission rod 408" and can be telescopically inserted horizontally into the hollow cavity to move left and right, and the lever 905 connects the first piston 903 and the second piston 904 in the hollow cavity.

[0139] like Figure 35 As shown, the lever chamber 902 is a frame-shaped structure and includes side walls 9021 spaced apart from each other in front and back. The side walls 9021 define a first slide rail 9021a, a second slide rail 9021b, and a third slide rail 9021c. The first slide rail 9021a defines a vertically extending linear track, the second slide rail 9021b defines a horizontally extending linear track, and the third slide rail 9021c defines a substantially vertically extending curved track. In addition, the lever chamber 902 also includes a top wall 9022, which connects the two side walls 9021 at the top of the side walls 9021. A first slide bore 9022a extends through the top wall 9022 and communicates with the hollow cavity. Furthermore, the lever chamber 902 also includes an end wall 9023, which connects the two side walls 9021 at the right end of the side walls 9021. A second slide bore 9023a extends through the side walls 9021 and communicates with the hollow cavity.

[0140] like Figure 34 As shown, the first piston 903 includes a first cylinder 9031 and two first sliders 9032, wherein the first cylinder 9031 passes through the first slide bore 9022a (see Figure 34 ) is vertically inserted into the hollow cavity, and the two first sliders 9032 extend radially outward from the first cylinder 9031 and are inserted into the first slide rail 9021a (see Figure 36 ) in the navigation pane.

[0141] like Figure 34 As shown, the second piston 904 includes a second cylinder 9041 and a piston hole 9042, wherein the second cylinder 9041 passes through the second sliding bore 9023a (see Figure 37 ) is horizontally inserted into the hollow cavity, and the piston hole 9042 extends through the second cylinder 9041.

[0142] like Figure 34 As shown, the lever 905 includes a plate 9051, the width of which is slightly smaller than the two side walls 9021 (see Figure 33 ), one end of the plate body 9051 includes two convex plates 9051b separated by a first groove 9051a, each convex plate 9051b has a fourth slide rail 9051c that penetrates relatively, and the first piston 903 (see Figure 35 ) is accommodated in the first groove 9051a and the two first sliders 9032 (see Figure 33) is inserted in the fourth slide rail 9051c (see Figure 33 ) and slides. The lever 905 further comprises a second slide block 9052, the other end of the plate body 9051 comprises two convex plates 9051e spaced apart by a second groove 9051d, the second piston 904 (see Figure 34 ) is accommodated in the first groove 9051a, the second slide block 9052 extends outwardly away from each other through the piston hole 9042 of the second piston 90 and extends outwardly away from each other to be inserted in the second slide rail 9021b (see Figure 34 ) to slide. The lever 905 further comprises a third slide block 9053 which extends outwardly away from each other to be inserted in the third slide rail 9021c (see Figure 38 ).

[0143] As shown in ​ , the direction along the first slide rail 9021a is defined as the Y axis, positive upward; the direction along the second slide rail 9021b is defined as the X axis, positive to the right. They intersect at the origin O. The length of the first slide rail 9021a is AB, the length of the second slide rail 9021b is CD=d, the stroke amplification ratio is n. That is, AB=nCD=nd. The length of AC is defined as l, the length of CP:AC=k. ∠ACO=θ. Then the coordinates of point P are given by the following formula:

[0144]

[0145]

[0146] When designing, select a suitable n, determine d, θ, k, and then determine the shape of the third slide rail 9021c. So that the second piston 904 moves at a deceleration ratio of 1 / n throughout the stroke of the first piston 903.

[0147] For example, if the deceleration ratio n=5 is selected, d needs to move 1mm, the initial position is θ=45°, k=0.5, AO=8mm.

[0148] d takes a value between 0-1, with an interval of 0.1mm, and the coordinates of point P can be obtained, as shown in Table 1 below.

[0149] Table 1

[0150]

[0151] In this embodiment, even if the transmission lever 408" has a large movement range, the transmission ratio of the lever device 409" remains a fixed value.

[0152] The above merely describes preferred embodiments of the present application, and is not intended to limit the scope of the present application. The above-described embodiments of the present application can be variously changed. That is, simple, equivalent changes and modifications made in accordance with the content of the claims and the specification of the present application are intended to fall within the scope of the present application. The present application is not limited by the above-described embodiments.

Claims

1. A holding device for a mirror, characterized in that The clamping device comprises a third micrometer connected to a connecting rod by a transmission rod and a lever device, the tail of the connecting rod is provided with a U-shaped groove, one end of the U-shaped groove is provided with a fifth top bead, the other end of the U-shaped groove is provided with a through threaded hole, a top bead screw is assembled in the threaded hole, the top bead screw is provided with a sixth top bead, the fifth top bead and the sixth top bead are oppositely arranged and matched with the mirror, the lever device is connected with the third micrometer, the transmission rod connects the lever device and the connecting rod, and the coupling of the transmission rod and the connecting rod allows the connecting rod to rotate at a certain angle.

2. The clamping device of claim 1, wherein The end of the connecting rod away from the U-shaped groove is provided with a connecting ball head, the center of the end of the transmission rod is formed with a first hemispherical hole, and a fastener with a second hemispherical hole is used to seal the connecting ball head in the first and second hemispherical holes to realize ball head connection.

3. The clamping device of claim 1, wherein The end of the transmission rod away from the fastener is formed with an interface, and the transmission rod is hard-connected with the lever device through the interface.

4. The clamping device of claim 1, wherein The lever device is a scissors structure.

5. The clamping device of claim 4, wherein The scissors structure has n groups of scissors units, the intersecting rods of the scissors units have an initial angle θ, and the ratio of the third micrometer to the moving amount of the connecting rod is .

6. A mirror adjustment device, characterized by The mirror adjusting device comprises a horizontal mirror and a vertical mirror mounted on the same device base respectively, the horizontal mirror and the vertical mirror each comprise a mirror and the clamping device according to any one of claims 1-5, and the mirrors are coupled to each other through the clamping devices to act on the incident X-rays in all directions.

7. The mirror adjustment apparatus according to claim 6, characterized by The vertical mirror is controlled by a second adjusting mechanism, the second adjusting mechanism comprises a second adapter plate, a pitch motor, a second roll angle motor and a second translation motor, wherein the second adapter plate is connected with the vertical mirror, the pitch motor is connected with the second adapter plate to provide the vertical mirror with the freedom of pitching in the vertical plane, the second roll angle motor is connected with the pitch motor to provide the vertical mirror with the freedom of rolling in the plane perpendicular to the light path, and the second translation motor is connected with the second roll angle motor to provide the vertical mirror with the freedom of moving in the vertical direction.

8. The mirror adjustment apparatus according to claim 7, characterized by The rotation axes of the pitch motor and the second roll angle motor coincide, and the center of the reflecting surface of the vertical mirror is located on the rotation axes of the pitch motor and the second roll angle motor.

9. The mirror adjustment apparatus according to claim 6, characterized by The horizontal mirror further comprises a second pad and a horizontal mirror base, the mirror of the horizontal mirror is supported and mounted on the horizontal mirror base through the second pad, and the clamping device of the horizontal mirror is mounted around the horizontal mirror base; the vertical mirror further comprises a third pad, a vertical mirror base and a back plate, the mirror of the vertical mirror is supported and mounted on the vertical mirror base through the third pad, the back plate is assembled on the vertical mirror base, and the clamping device of the vertical mirror is mounted around the back plate.

10. The mirror adjustment apparatus according to claim 9, characterized by The transmission rod is freely telescopic in the hollow transmission rod sleeve, so as to be mounted on the back plate through the transmission rod sleeve.

11. The mirror adjustment apparatus according to claim 9, characterized by The second clamping device further comprises a micrometer mounting plate and a lever device mounting plate, wherein the micrometer mounting plate is mounted on the back plate to mount the third micrometer on the back plate, and the lever device mounting plate is mounted on the back plate to mount the lever device on the back plate.

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