A piezoelectric valve for a controlled nuclear fusion device and a controlled nuclear fusion device

Abstract

The present application relates to the field of fusion engineering technology, specifically a piezoelectric valve for a controlled nuclear fusion device and a controlled nuclear fusion device, wherein the piezoelectric valve includes a shell and a cover plate, the shell and the cover plate can form a sealed inner cavity; an air inlet port and an air outlet port are arranged on the shell and communicated with the inner cavity, the air outlet port includes a first hole and a second hole opened on the side wall of the shell and communicated with each other, wherein the first hole faces a first direction on the inner side of the side wall, and the second hole faces a second direction perpendicular to the cover plate; a sealing assembly is fixedly installed in the inner cavity, including a piezoelectric actuator and a sealing member, the piezoelectric actuator contacts the first hole through the sealing member, and the piezoelectric actuator can drive the sealing member to contract toward the first direction or expand away from the first direction. The thickness of the piezoelectric valve is reduced to a size that adapts to a narrow installation space, and after installation, the air outlet port directly faces the air supply position in the vacuum chamber, shortening the air supply path and improving the air supply response time.

Description

Technical Field

[0001] The present application relates to the field of fusion engineering technology, and in particular to a piezoelectric valve for a controlled nuclear fusion device and a controlled nuclear fusion device. Background Art

[0002] In magnetic confinement controlled nuclear fusion devices, the gas supply system is crucial for heating plasma and diagnostic applications, and the gas inlet valve is a key component in the gas supply system. The flow rate, response time and controllability of the valve play a very important role in the gas supply.

[0003] In the related art, the gas supply system for the controlled nuclear fusion device often uses a solenoid valve as the gas supply valve to control the gas path. However, due to the influence of the strong magnetic field, high temperature and other environments of the controlled nuclear fusion device, the gas supply valve is usually set at a position far away from the plasma, which will make the air intake path longer and may produce dead zones, resulting in a longer response time of the air intake system and a lower airflow injection rate, which in turn leads to low gas supply efficiency and poor effect.

[0004] Therefore, how to improve the gas supply response time of the gas supply system of the controlled nuclear fusion device has become a technical problem that needs to be solved urgently. Summary of the invention

[0005] The present application provides a piezoelectric valve for a controlled nuclear fusion device and a controlled nuclear fusion device to solve the technical problem of how to improve the gas supply response time of the gas supply system of the controlled nuclear fusion device mentioned in the above background technology.

[0006] According to a first aspect, the present application provides a piezoelectric valve for a controlled nuclear fusion device, comprising: a shell and a cover plate, wherein the shell and the cover plate can form a sealed inner cavity; an air inlet port and an air outlet port arranged on the shell and connected to the inner cavity, wherein the air inlet port, the inner cavity and the air outlet port form an air supply path; wherein the air outlet port comprises a first hole and a second hole which are opened on the side wall of the shell and connected to each other, wherein the first hole faces a first direction on the inner side of the side wall, and the second hole faces a second direction perpendicular to the cover plate; a sealing assembly, fixedly installed in the inner cavity, comprises a piezoelectric actuator and a sealing member, wherein the piezoelectric actuator contacts the first hole through the sealing member, and the piezoelectric actuator can drive the sealing member to contract toward the first direction or expand away from the first direction.

[0007] In one embodiment, a plug is installed on the first hole, and the sealing member is in contact with the plug.

[0008] In one embodiment, the plug includes a conical boss, and the conical boss is provided with an air outlet hole connected to the first hole and the second hole.

[0009] In one embodiment, when the sealing assembly is installed, a pre-tightening voltage is applied to the piezoelectric actuator to cause the piezoelectric actuator to be pre-tightened and contracted, wherein the pre-tightening voltage is less than a contraction operating voltage of the piezoelectric actuator.

[0010] In one embodiment, the sealing assembly further includes a first fixing seat, a second fixing seat and a sealing seat; wherein the first fixing seat, the piezoelectric actuator, the second fixing seat, the sealing seat and the sealing member are fixedly arranged in sequence relative to each other in a direction away from the first direction, and the first fixing seat is fixed on the shell.

[0011] In one embodiment, the second fixing seat is fixedly connected to the sealing seat by screws, and the hole of the connecting part of the sealing seat is a waist-shaped hole.

[0012] In one embodiment, a liquid inlet pipeline and a liquid outlet pipeline are installed on the shell, and the shell wall of the shell is provided with the cooling liquid channel which is connected with the liquid inlet pipeline and the liquid outlet pipeline respectively. The cooling liquid can flow in from the liquid inlet pipeline, flow through the cooling liquid channel and then flow out from the liquid outlet pipeline.

[0013] In one embodiment, a cooling groove is provided on the outer side of the side wall and / or the shell bottom wall of the shell, and the cooling groove is sealed by a sealing plate to form the coolant channel.

[0014] In one embodiment, the sealing assembly also includes an electrode assembly, which is fed through the side wall of the shell and electrically connected to the piezoelectric actuator; the electrode assembly includes: a conductor core, a cuttable sleeve, a ceramic column, and a fixed sleeve, the two ends of the ceramic column are respectively fixedly connected to the cuttable sleeve and the fixed sleeve, the fixed sleeve is fixedly connected to the conductor core, and the fixed sleeve is fixedly connected to the shell.

[0015] According to the second aspect, an embodiment of the present application provides a controlled nuclear fusion device, comprising a vacuum chamber and a piezoelectric valve for a controlled nuclear fusion device as described in any one of the first aspects above, wherein the piezoelectric valve is arranged in the vacuum chamber, and an air outlet port of the piezoelectric valve faces an air supply position in the vacuum chamber.

[0016] This application has at least the following beneficial effects:

[0017] The piezoelectric valve provided in the present application includes a shell and a cover plate, wherein the shell and the cover plate can form a sealed inner cavity, and an air inlet port and an air outlet port are arranged on the shell and communicated with the inner cavity; the air inlet port, the inner cavity and the air outlet port form an air supply path. The air outlet port includes a first hole and a second hole that are connected to each other and are opened on the side wall of the shell, wherein the first hole faces a first direction on the inner side of the side wall, and the second hole faces a second direction perpendicular to the cover plate. That is, after the gas enters the inner cavity through the air inlet port, when the gas is supplied, there is gas that directly enters the first hole from the inner cavity, and then enters the second hole, and is ejected through the second hole to the air supply position for supplying gas, thereby saving the air supply path and improving the air supply response time. The sealing assembly is fixedly installed in the inner cavity, including a piezoelectric actuator and a seal, wherein the piezoelectric actuator contacts the first hole through the seal, and the piezoelectric actuator can drive the seal to contract toward the first direction or expand away from the first direction. The piezoelectric actuator deforms the piezoelectric element through the piezoelectric effect. When maintaining a switching state, it does not need to maintain current. Therefore, the piezoelectric actuator is not affected by the magnetic field. At the same time, the piezoelectric actuator can drive the sealing element to shrink toward the first direction or expand away from the first direction, that is, the piezoelectric actuator can shrink or expand in the radial direction (when the piezoelectric valve is circular) or in the width direction (when the piezoelectric valve is rectangular) to release or block the first hole, and the second hole is toward the thickness direction of the piezoelectric valve, that is, the airflow injection direction of the piezoelectric valve is toward the radial direction of the controlled nuclear fusion device. Therefore, when the action direction of the piezoelectric actuator is the first direction, the airflow outlet of the piezoelectric actuator is toward the second direction, that is, the radial direction of the controlled nuclear fusion device, so that the piezoelectric valve can save thickness and reduce the thickness to adapt to the narrow installation space, so that the piezoelectric valve can be directly installed in the controlled nuclear fusion device, and the gas outlet port is directly toward the gas supply position in the vacuum chamber, shortening the gas supply path and improving the gas supply response time.

[0018] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 A schematic diagram of the structure of a piezoelectric valve for a controlled nuclear fusion device provided in an embodiment of the present application;

[0021] Figure 2 A schematic structural diagram of a cross section of a piezoelectric valve for a controlled nuclear fusion device provided in an embodiment of the present application;

[0022] Figure 3 A schematic structural diagram of a sealing assembly of a piezoelectric valve for a controlled nuclear fusion device provided in an embodiment of the present application;

[0023] Figure 4 A schematic diagram of the structure of a coolant channel of a piezoelectric valve for a controlled nuclear fusion device provided in an embodiment of the present application;

[0024] Figure 5 A schematic diagram of the structure of an electrode assembly of a piezoelectric valve for a controlled nuclear fusion device provided in an embodiment of the present application;

[0025] Figure 6 A schematic diagram of a piezoelectric valve for a controlled nuclear fusion device provided in an embodiment of the present application being installed in the controlled nuclear fusion device.

[0026] The diagram is as follows:

[0027] 1. Shell; 2. Cover plate; 3. Inner cavity; 4. Air inlet port; 5. Air outlet port; 51. First hole; 52. Second hole; 6. Sealing assembly; 61. Piezoelectric actuator; 62. Seal; 63. First fixing seat; 64. Second fixing seat; 65. Sealing seat; 7. Plug; 71. Air outlet; 8. Liquid inlet pipeline; 9. Liquid outlet pipeline; 10. Cooling liquid channel; 11. Cooling trough; 12. Sealing plate; 13. Electrode assembly; 131. Conductor core; 132. Vacuable sleeve; 133. Ceramic column; 134. Fixing sleeve; 135. Nut; 100. Vacuum chamber; 110. Vacuum chamber wall; 120. Center column; 130. Plasma; 140. Equatorial plane; 200. Piezoelectric valve. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0029] The embodiment of the present application provides a piezoelectric valve for a controlled nuclear fusion device. The piezoelectric valve is used in a gas supply system of the controlled nuclear fusion device as a gas supply valve of the gas supply system. Figure 1 and 2 As shown, the piezoelectric valve comprises: a housing 1 and a cover plate 2, wherein the housing 1 and the cover plate 2 can form a sealed inner cavity 3, and an inlet port 4 and an outlet port 5 are arranged on the housing 1 and communicated with the inner cavity 3; the inlet port 4, the inner cavity 3 and the outlet port 5 form an air supply path. A sealing component 6 is arranged in the inner cavity 3. The opening and closing of the valve of the piezoelectric valve is realized by blocking or opening the outlet port 5 through the sealing component 6, thereby completing the air supply to the controlled nuclear fusion device.

[0030] In the present application, in order to shorten the gas supply path, the piezoelectric valve can be arranged inside the controlled nuclear fusion device to directly supply gas to the gas supply position, thereby improving the gas supply response time and gas flow rate. In actual working conditions, the installation space in the radial direction of the controlled nuclear fusion device is narrow, which makes it difficult to install the piezoelectric valve. Therefore, in the present embodiment, the gas outlet port 5 includes a first hole 51 and a second hole 52 that are connected to each other and opened on the side wall of the shell 1, wherein the first hole 51 faces the first direction of the inner side of the side wall, and the second hole 52 faces the second direction perpendicular to the cover plate 2. That is, after the gas enters the inner cavity 3 through the air inlet port 4, when the gas is supplied, the gas directly enters the first hole 51 from the inner cavity 3, and then enters the second hole 52, and is ejected through the second hole 52 to the gas supply position for gas supply, thus saving the gas supply path and improving the gas supply response time.

[0031] In this embodiment, if Figure 1 The schematic diagram shown is a state where the shell 1 and the cover plate 2 are separated. The shell 1 and the cover plate 2 are split structures. A sealing gasket is arranged between the shell 1 and the cover plate 2 and the shell 1 and the cover plate 2 are fastened by screws to form a sealed inner cavity 3. Furthermore, a rectangular groove is opened on the side of the shell 1 that contacts the cover plate 2 to place the sealing gasket.

[0032] In order to achieve the effect of improving the gas supply response time and installing the piezoelectric valve in a narrow space, the sealing assembly 6 is fixedly installed in the inner cavity 3, including a piezoelectric actuator 61 and a sealing member 62. The piezoelectric actuator 61 contacts the first hole 51 through the sealing member 62, and the piezoelectric actuator 61 can drive the sealing member 62 to shrink toward the first direction or expand away from the first direction. The piezoelectric actuator 61 deforms the piezoelectric element through the piezoelectric effect, and does not need to maintain current when maintaining a switching state. Therefore, the piezoelectric actuator 61 is not affected by the magnetic field. At the same time, the piezoelectric actuator 61 can drive the sealing member 62 to shrink toward the first direction or expand away from the first direction, that is, the piezoelectric actuator 61 can shrink or expand in the radial direction (when the piezoelectric valve is circular) or in the width direction (when the piezoelectric valve is rectangular) to release or block the first hole 51. The second hole 52 is toward the thickness direction of the piezoelectric valve, that is, the airflow injection direction of the piezoelectric valve is toward the radial direction of the controlled nuclear fusion device. Therefore, when the action direction of the piezoelectric actuator 61 is the first direction, the air flow outlet of the piezoelectric actuator 61 is toward the second direction, that is, the radial direction of the controlled nuclear fusion device, so that the piezoelectric valve can save thickness and reduce the thickness to adapt to the narrow installation space, so that the piezoelectric valve can be directly installed in the controlled nuclear fusion device, and the gas outlet port 5 is directly toward the gas supply position in the vacuum chamber, shortening the gas supply path and improving the gas supply response time.

[0033] In one embodiment, in order to further improve the gas outlet rate and further improve the sealing performance, a plug 7 is installed on the first hole 51, and the sealing member 62 contacts the plug 7. The plug 7 can be fixed to the first hole 51 by laser welding, and a gas outlet hole 71 connected to the first hole 51 or the second hole 52 is opened on the plug 7, and the gas outlet port 5 is sealed by the sealing member 62 contacting the plug 7.

[0034] In one embodiment, the plug 7 can be a conical boss, and the conical surface of the conical boss and the seal 62 form a sealing interface. In order to ensure the sealing effect, the conical surface can be polished, and the surface roughness is less than 1.6μm. In this embodiment, the seal 62 can adopt a vacuum rubber sealing pad, such as butyl rubber, silicone rubber pad, fluororubber pad, etc. The plug 7 is provided with a smaller inner diameter air outlet 71, which can increase the air outlet rate, and the sealing effect is further improved by forming a smooth and smaller contact area sealing interface between the conical surface of the plug 7 and the seal 62.

[0035] In one embodiment, if Figure 3As shown, the sealing assembly 6 further includes a first fixing seat 63, a second fixing seat 64 and a sealing seat 65. The first fixing seat 63, the piezoelectric actuator 61, the second fixing seat 64, the sealing seat 65 and the sealing member 62 are fixedly arranged one after another in sequence in a direction away from the first direction, and the first fixing seat 63 is fixed on the housing 1. The first fixing seat 63 plays a fixing role on the piezoelectric actuator 61. When the piezoelectric actuator 61 is in motion, it can drive the second fixing seat 64 to move, thereby driving the sealing seat 65 and the sealing member 62 installed on the sealing seat 65 to block or open the plug 7, thereby realizing the opening and closing of the valve of the piezoelectric valve.

[0036] In one embodiment, the second fixing seat 64 is fixedly connected to the sealing seat 65 by screws, and the hole of the connecting part of the sealing seat 65 is a waist-shaped hole, which can realize the adjustment of the position of the sealing seat 65 relative to the second fixing seat 64.

[0037] In one embodiment, when installing the sealing assembly 6, a pre-tightening voltage is applied to the piezoelectric actuator 61 to pre-tighten and shrink the piezoelectric actuator 61. At this time, the position of the sealing seat 65 is adjusted to make the seal 62 and the plug 7 on the interface come into contact. Then the pre-tightening voltage is removed. After the installation is completed, a valve body can be formed. By adjusting the input voltage, the piezoelectric valve can be opened and closed. The pre-tightening voltage is less than the contraction working voltage of the piezoelectric actuator 61. By pre-tightening the piezoelectric actuator 61, when there is no input voltage to the piezoelectric actuator 61, the seal 62 and the plug 7 can be compressed by the expansion force to ensure the airtightness of the inner cavity 3 of the piezoelectric valve.

[0038] In one embodiment, the piezoelectric valve is installed in a controlled nuclear fusion device. In actual working conditions, the working environment temperature of the piezoelectric valve is relatively high, which may affect the performance of the piezoelectric actuator 61, and may further reduce the sealing of the piezoelectric valve or affect the gas supply response of the piezoelectric valve. Therefore, in this embodiment, the piezoelectric valve can be cooled.

[0039] In the related art, an external cooling device is often used to cool the piezoelectric valve, which is difficult to fit into the installation space of the embodiment of the present application. Therefore, in this embodiment, the cooling liquid channel can be integrated into the housing 1 of the piezoelectric valve.

[0040] Specifically, Figure 4 As shown, a liquid inlet pipeline 8 and a liquid outlet pipeline 9 are installed on the housing 1, and the housing wall of the housing 1 is provided with the cooling liquid channel 10 which is connected with the liquid inlet pipeline 8 and the liquid outlet pipeline 9 respectively, and the cooling liquid can flow in from the liquid inlet pipeline 8, flow through the cooling liquid channel 10 and then flow out from the liquid outlet pipeline 9. The cooling liquid channel 10 is provided on the housing wall of the housing 1, so that the volume of the piezoelectric valve is not increased while cooling the piezoelectric valve, and the piezoelectric valve can adapt to a narrow installation space.

[0041] A cooling groove 11 is provided on the outer side of the side wall and / or the bottom wall of the housing 1 , and the cooling groove 11 is sealed by a sealing plate 12 to form the coolant channel 10 .

[0042] In one embodiment, a cooling groove 11 may be provided at the bottom of the housing 1 on the side away from the cover plate 2 and toward the side wall of the housing 1, and the cooling groove 11 may be sealed by a sealing plate 12 to form a coolant channel 10. In another embodiment, the cooling groove 11 may be provided in the side wall of the housing 1; or provided on the bottom wall of the housing 1, or may be provided in the side wall of the housing 1 and on the bottom wall of the housing 1 at the same time.

[0043] In one embodiment, the inlet pipe 8 and the outlet pipe 9 are installed as close as possible to increase the length of the cooling liquid channel 10. Taking the shell 1 as a rectangle as an example, the inlet pipe 8 and the outlet pipe 9 can be installed on one side wall of the shell 1, and the cooling liquid channel 10 on the shell wall can surround the other three side walls. The cooling liquid enters from the inlet pipe 8, and when flowing through the cooling liquid channel 10, it can bypass the other three side walls and then flow out from the outlet pipe 9. The valve body is liquid cooled to ensure the working environment temperature of the piezoelectric actuator 61. In another embodiment, the inlet pipe 8 and the outlet pipe 9 can be installed on two opposite side walls and as close to the same adjacent side wall as possible, so as to increase the length of the cooling liquid channel 10.

[0044] In one embodiment, the sealing assembly 6 further includes an electrode assembly 13, which is fed through the side wall of the housing 1 and is electrically connected to the piezoelectric actuator 61; Figure 5 As shown, the electrode assembly 13 includes: a conductor core 131, a kovar sleeve 132, a ceramic column 133 and a fixed sleeve 134. The two ends of the ceramic column 133 are fixedly connected to the kovar sleeve 132 and the fixed sleeve 134 respectively, the fixed sleeve 134 is fixedly connected to the conductor core 131, and the fixed sleeve 134 is fixedly connected to the shell 1. The ceramic column 133 is made of A95 or A99, the kovar sleeve 132 and the fixed sleeve 134 are made of kovar alloy 4J33, and the conductor core 131 can be made of copper core, both left and right ends of which are threaded, and each is equipped with two nuts 135, and the two nuts 135 are used to fix the communication cable.

[0045] The present application also provides a controllable nuclear fusion device, such as Figure 6 As shown, the device includes a vacuum chamber 100 and the piezoelectric valve 200 for the controlled nuclear fusion device in the above embodiment, wherein the piezoelectric valve 200 is arranged in the vacuum chamber 100 , and the gas outlet port of the piezoelectric valve 200 faces the gas supply position in the vacuum chamber 100 .

[0046] In this embodiment, the controlled nuclear fusion device is introduced by taking the tokamak device as an example. The vacuum chamber of the tokamak device has a vacuum chamber wall 110 and a central column 120. The central column 120 is arranged at the center of the vacuum chamber. The space on the low-field side (that is, the outer side of the plasma 130 of the tokamak device away from the central column 120) of the vacuum chamber wall 110 of the tokamak device is relatively large, while the space on the high-field side (that is, the inner side of the plasma 130 of the tokamak device adjacent to the central column 120) is extremely narrow. The installation width on the equatorial plane 140 on the high-field side (that is, the upper and lower symmetric planes of the tokamak device) is generally between 1-2 cm, and there is a strong magnetic field at the equatorial plane 140 on the high-field side, which is close to the high-temperature plasma, so that conventional valves cannot be installed on the high-field side.

[0047] In this embodiment, by setting the action direction of the piezoelectric actuator to the first direction and the air flow outlet of the piezoelectric actuator to the second direction, that is, the radial direction of the controlled nuclear fusion device, the piezoelectric valve 200 can save thickness and reduce the thickness by about 1 cm, so as to adapt to the installation space on the equatorial plane on the high field side. At the same time, the gas outlet of the piezoelectric valve 200 is oriented in the second direction, that is, the thickness direction of the piezoelectric valve 200. Therefore, the piezoelectric valve can be installed on the equatorial plane on the high field side, so that the air outlet port of the piezoelectric valve 200 is facing the equatorial plane 140 on the high field side, so that the air flow can be directly ejected from the piezoelectric valve 200 to the equatorial plane 140 on the high field side, thereby shortening the air supply path and improving the air supply response time.

[0048] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0049] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0050] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0051] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application. It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

Claims

1. A piezoelectric valve for a controlled nuclear fusion device, characterized in that: The piezoelectric valve is arranged in a vacuum chamber of a controlled nuclear fusion device, and comprises: a shell and a cover plate, wherein the shell and the cover plate can form a sealed inner cavity; An air inlet port and an air outlet port are arranged on the shell and communicate with the inner cavity, and the air inlet port, the inner cavity and the air outlet port form an air supply path; wherein the air outlet port comprises a first hole and a second hole which are arranged on the side wall of the shell and communicate with each other, wherein the first hole faces a first direction of the inner side of the side wall, the second hole faces a second direction perpendicular to the cover plate, and the air outlet port of the piezoelectric valve faces an air supply position in the vacuum chamber; The sealing assembly is fixedly installed in the inner cavity, and comprises a piezoelectric actuator and a sealing member. The piezoelectric actuator contacts the first hole through the sealing member, and the piezoelectric actuator can drive the sealing member to contract toward the first direction or expand away from the first direction.

2. The piezoelectric valve according to claim 1, wherein: A plug is installed on the first hole, and the sealing member is in contact with the plug.

3. The piezoelectric valve according to claim 2, characterized in that The plug includes a conical boss, and an air outlet hole communicating with the first hole and the second hole is formed on the conical boss.

4. The piezoelectric valve according to claim 1, wherein: When the sealing assembly is installed, a pre-tightening voltage is applied to the piezoelectric actuator to cause the piezoelectric actuator to be pre-tightened and contracted, wherein the pre-tightening voltage is less than a contraction operating voltage of the piezoelectric actuator.

5. The piezoelectric valve according to any one of claims 1 to 4, characterized in that: The sealing assembly also includes a first fixing seat, a second fixing seat and a sealing seat; wherein the first fixing seat, the piezoelectric actuator, the second fixing seat, the sealing seat and the sealing member are fixedly arranged one after another in sequence along a direction away from the first direction, and the first fixing seat is fixed on the shell.

6. The piezoelectric valve according to claim 5, characterized in that The second fixing seat is fixedly connected to the sealing seat by screws, and the hole of the connecting part of the sealing seat is a waist-shaped hole.

7. The piezoelectric valve according to claim 1, wherein: A liquid inlet pipeline and a liquid outlet pipeline are installed on the shell, and a cooling liquid channel connected to the liquid inlet pipeline and the liquid outlet pipeline respectively is opened in the shell wall of the shell. The cooling liquid can flow in from the liquid inlet pipeline, flow through the cooling liquid channel and then flow out from the liquid outlet pipeline.

8. The piezoelectric valve according to claim 7, wherein: A cooling groove is provided on the outer side of the side wall and / or the shell bottom wall of the shell, and the cooling groove is sealed by a sealing plate to form the coolant channel.

9. The piezoelectric valve according to claim 1, wherein: The sealing assembly also includes an electrode assembly, which is fed through the side wall of the shell and is electrically connected to the piezoelectric actuator; the electrode assembly includes: a conductor core, a cuttable sleeve, a ceramic column, and a fixed sleeve, the two ends of the ceramic column are respectively fixedly connected to the cuttable sleeve and the fixed sleeve, the fixed sleeve is fixedly connected to the conductor core, and the fixed sleeve is fixedly connected to the shell.

10. A controlled nuclear fusion device, characterized in that: It comprises a vacuum chamber and the piezoelectric valve for a controlled nuclear fusion device according to any one of claims 1 to 9, wherein the piezoelectric valve is arranged in the vacuum chamber, and the gas outlet port of the piezoelectric valve faces the gas supply position in the vacuum chamber.

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