A piezoelectric sensor and piezoelectric device

Abstract

The application discloses a piezoelectric sensor and a piezoelectric device. The piezoelectric sensor comprises a sensor body, the sensor body comprising at least one positive electrode layer, at least one intermediate layer and at least one negative electrode layer which are stacked, and each intermediate layer is stacked with one positive electrode layer and one negative electrode layer on both sides; a hollow area is arranged on the sensor body and penetrates through the sensor body, and a plurality of sensing strips are arranged in the hollow area, each sensing strip comprising at least one positive electrode strip, at least one piezoelectric strip and at least one negative electrode strip which are stacked, and each piezoelectric strip is stacked with one positive electrode strip and one negative electrode strip on both sides; at least one end of the sensing strip in the length direction is connected with the sensor body, so that at least one positive electrode strip is connected with at least one positive electrode layer one by one, and at least one negative electrode strip is connected with at least one negative electrode layer one by one. The application can improve the strength and sensitivity of the electric signal, and is beneficial to fully meet the application requirements.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of piezoelectric sensors, and in particular to a piezoelectric sensor and a piezoelectric device. BACKGROUND

[0002] For piezoelectric devices such as piezoelectric keyboards using piezoelectric sensors, they are favored by the market because they not only have the function of positioning touch control, but also have the function of pressure sensing, and the piezoelectric sensor has high application value in the application fields of new generation human-computer interaction, pressure sensor, electronic skin, medical treatment (heart rate, blood pressure measurement) and the like.

[0003] In the related art, a conventional piezoelectric sensor mainly consists of a piezoelectric layer, a positive electrode layer and a negative electrode layer. For the working principle of the piezoelectric sensor, specifically, when the piezoelectric sensor is subjected to force, the piezoelectric layer deforms and generates an electric signal due to the piezoelectric effect, so that the force can be determined according to the electric signal.

[0004] However, the above conventional piezoelectric sensor has great limitations, because in the usual application scenarios, the conventional piezoelectric sensor has no large deformation space, resulting in small deformation of the piezoelectric sensor, and thus a weak electric signal, which cannot fully meet the application requirements. SUMMARY

[0005] In view of the above problems in the related art, the present application provides a piezoelectric sensor and a piezoelectric device to solve the problem of weak electric signal caused by small deformation of the piezoelectric sensor in the related art.

[0006] In order to solve the above technical problems, in a first aspect, the present application provides a piezoelectric sensor, which comprises:

[0007] A sensor body, the sensor body comprising at least one positive electrode layer, at least one intermediate layer and at least one negative electrode layer stacked along a first direction, and each intermediate layer is stacked with one positive electrode layer and one negative electrode layer on both sides in the first direction.

[0008] A hollow area is disposed in the sensor body and extends through the sensor body along the first direction. A plurality of sensing strips are disposed in the hollow area. Each sensing strip includes at least one positive electrode strip, at least one piezoelectric strip, and at least one negative electrode strip stacked along its own thickness direction. A positive electrode strip and a negative electrode strip are stacked on both sides of the piezoelectric strip in the thickness direction. The positive electrode strip, the piezoelectric strip, and the negative electrode strip extend in the same direction. At least one end of the sensing strip in the length direction is connected to the sensor body, so that at least one positive electrode strip is connected to at least one positive electrode layer, and at least one negative electrode strip is connected to at least one negative electrode layer.

[0009] In one possible implementation of the first aspect, one end of the sensing strip along its length is connected to the sensor body, and the other end is disconnected from the sensor body.

[0010] In one possible implementation of the first aspect, the end of the sensing strip connected to the sensor body is a connection end, and a plurality of the connection ends are arranged sequentially along a second direction, which is parallel to the intermediate layer.

[0011] The sensor body includes a first inner side and a second inner side for forming the hollow area. The first inner side and the second inner side are spaced apart and arranged opposite each other in a direction different from the second direction. In the second direction, one of any two adjacent connection ends is connected to the first inner side and the other is connected to the second inner side.

[0012] In a possible implementation of the first aspect, at least one end of the sensing strip along its length direction is a connection end connected to the sensor body, and the connection ends of the plurality of sensing strips are arranged sequentially along a second direction, which is parallel to the intermediate layer.

[0013] The sensing strip is a sensing strip of equal width, and the width direction of the connecting end extends along the second direction, with the width of the connecting end ranging from 50um to 500um; and / or, in the second direction, the distance between any two adjacent connecting ends of any two different sensing strips is less than or equal to 20um.

[0014] In one possible implementation of the first aspect, an insulating layer is provided on the outer surface of the sensing strip.

[0015] In one possible implementation of the first aspect, at least some of the multiple sensor strips are arranged in a cross-stack configuration.

[0016] In one possible implementation of the first aspect, the sensing strip is spiral-shaped.

[0017] In one possible implementation of the first aspect, a plurality of the sensor strips are arranged sequentially in parallel and spaced apart along the second direction.

[0018] In one possible implementation of the first aspect, the piezoelectric sensor includes a flexible encapsulation layer that wraps around the outside of the sensor body to encapsulate the plurality of sensing strips within the space enclosed by the flexible encapsulation layer.

[0019] Secondly, this application also provides a piezoelectric device, which includes:

[0020] The first aspect describes any of the piezoelectric sensors.

[0021] Compared with related technologies, this application has at least the following beneficial effects:

[0022] In this application, when a piezoelectric sensor is used as a sensor, multiple sensing strips are arranged within the hollow area penetrating the sensor body. Each sensing strip includes a positive electrode strip, a piezoelectric strip, and a negative electrode strip stacked along its thickness direction. Therefore, when the sensing strip is subjected to external force, the piezoelectric strip within it deforms. Due to the piezoelectric effect, the positive and negative charge centers within the piezoelectric strip shift relative to each other under the influence of this deformation, resulting in polarized charges on its surface. The positive and negative electrode strips collect the positive and negative charges generated by the piezoelectric strips, thus creating a potential difference between them and generating an electrical signal. Furthermore, since the positive electrode strip is connected to the positive electrode layer and the negative electrode strip is connected to the negative electrode layer, the electrical signal generated by the sensing strip can be transmitted through the positive and negative electrode layers.

[0023] Compared to piezoelectric sensors in related technologies that are complete and lack cutouts and sensing strips, in this application, since each sensing strip is independent to a certain extent and there is no mutual restraint or constraint, the mutual influence between adjacent sensing strips is small when the sensing strip is subjected to external force. This allows each sensing strip to bend and stretch more freely, thus enabling greater deformation. Even if the piezoelectric sensor does not have a large deformation space, the sensing strip can still undergo significant deformation, thereby improving the strength and sensitivity of the electrical signal and fully meeting application requirements.

[0024] In addition, when a piezoelectric sensor is used as a vibration feedback device, since each sensing strip is independent to a certain extent, each independent sensing strip will vibrate independently. In this way, the vibration can have a richer, more diverse and multi-layered effect through the independent vibration of each independent sensing strip. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 A schematic diagram of a piezoelectric sensor provided in an embodiment of this application;

[0027] Figure 2 One of the schematic diagrams of the sensor body provided in the embodiments of this application;

[0028] Figure 3 A second schematic diagram of the sensor body provided in an embodiment of this application;

[0029] Figure 4 The third schematic diagram of the sensor body provided in the embodiments of this application;

[0030] Figure 5 Fourth schematic diagram of the sensor body provided in the embodiments of this application;

[0031] Figure 6 A schematic diagram of a piezoelectric device provided in an embodiment of this application.

[0032] Explanation of reference numerals in the attached figures:

[0033] 1-Sensor body; 11-Positive electrode layer; 12-Intermediate layer; 13-Negative electrode layer; 14-First inner surface; 15-Second inner surface;

[0034] 2-Openwork area;

[0035] 3-Sensing strip; 31-Connection end;

[0036] 4- Flexible encapsulation layer;

[0037] 10-Piezoelectric sensor;

[0038] 20 - Substrate; 201 - Clearance groove. Detailed Implementation

[0039] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0040] In this application, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0041] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0042] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0043] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0044] As described in the background section of this application, piezoelectric devices such as piezoelectric keyboards that utilize piezoelectric sensors are highly favored by the market because they not only have positioning and touch control functions but also pressure sensing functions. Furthermore, piezoelectric sensors have extremely high application value in fields such as next-generation human-computer interaction, pressure sensors, electronic skin, and medical applications (heart rate and blood pressure measurement).

[0045] In related technologies, conventional piezoelectric sensors are mainly composed of a piezoelectric layer and positive and negative electrode layers. Specifically, when a piezoelectric sensor is subjected to force, the piezoelectric layer deforms and generates an electrical signal due to the piezoelectric effect. The magnitude of the force can be determined based on this electrical signal.

[0046] However, the conventional piezoelectric sensors mentioned above have significant limitations because, in typical applications, conventional piezoelectric sensors do not have a large deformation range, resulting in small deformation and consequently weak electrical signals, which cannot fully meet application requirements.

[0047] Example 1

[0048] In view of the above-mentioned problems, this application provides a piezoelectric sensor to solve the problem of weak electrical signal caused by the small deformation of the piezoelectric sensor in the related art.

[0049] The technical solution of this application will be further described below with reference to specific embodiments and accompanying drawings:

[0050] like Figure 1 , Figure 2 and Figure 3 As shown, the piezoelectric sensor 10 includes a sensor body 1 and a hollowed-out area 2. Wherein, as... Figure 1 As shown, the sensor body 1 includes components along a first direction (such as...). Figure 1 At least one positive electrode layer 11, at least one intermediate layer 12 and at least one negative electrode layer 13 are stacked in the Z direction, and a positive electrode layer 11 and a negative electrode layer 13 are stacked on both sides of each intermediate layer 12 in the first direction.

[0051] The hollow area 2 is disposed on the sensor body 1 and penetrates the sensor body 1 along the first direction. Multiple sensing strips 3 are disposed in the hollow area 2. Each sensing strip 3 includes at least one positive electrode strip, at least one piezoelectric strip and at least one negative electrode strip (not shown in the figure) stacked along its own thickness direction. A positive electrode strip and a negative electrode strip are stacked on both sides of the thickness direction of each piezoelectric strip.

[0052] The positive electrode strip, piezoelectric strip, and negative electrode strip extend in the same direction. At least one end of the sensing strip 3 in the aforementioned length direction is connected to the sensor body 1, so that at least one positive electrode strip is connected to at least one positive electrode layer 11 and at least one negative electrode strip is connected to at least one negative electrode layer 13.

[0053] In this application, when the piezoelectric sensor 10 is used as a sensor, multiple sensing strips 3 are disposed within the hollow area 2 penetrating the sensor body 1. Each sensing strip 3 includes a positive electrode strip, a piezoelectric strip, and a negative electrode strip stacked along its thickness direction. Therefore, when the sensing strip 3 is subjected to external force, the piezoelectric strip in the sensing strip 3 will deform. Due to the piezoelectric effect, the positive and negative charge centers within the piezoelectric strip undergo relative displacement under the influence of this deformation, resulting in polarized charges appearing on its surface. The positive and negative electrode strips will correspondingly collect the positive and negative charges generated by the piezoelectric strips, thus generating a potential difference between the positive and negative electrode strips, thereby forming an electrical signal. Simultaneously, since the positive electrode strip is connected to the positive electrode layer 11 and the negative electrode strip is connected to the negative electrode layer 13, the electrical signal generated by the sensing strip 3 can be transmitted through the positive electrode layer 11 and the negative electrode layer 13.

[0054] Compared with the piezoelectric sensors in related technologies that are complete and do not have hollow areas or sensing strips 3, in this application, since each sensing strip 3 is independent to a certain extent and there is no mutual restraint or constraint, the mutual influence between adjacent sensing strips 3 is small when the sensing strip 3 is subjected to external force. This allows each sensing strip 3 to bend and stretch more freely, thereby undergoing greater deformation. In this way, even if the piezoelectric sensor 10 does not have a large deformation space, the sensing strip 3 can still undergo large deformation, thereby improving the strength and sensitivity of the electrical signal and helping to fully meet application requirements.

[0055] In addition, when the piezoelectric sensor 10 is used as a vibration feedback device, since each sensing strip 3 is independent to a certain extent, each independent sensing strip 3 will vibrate independently. In this way, the vibration can have a richer, more diverse and multi-layered effect through the independent vibration of each independent sensing strip.

[0056] In this embodiment, the piezoelectric sensor 10 is a single-layer piezoelectric structure, that is, the sensor body 1 includes a positive electrode layer 11, an intermediate layer 12 and a negative electrode layer 13. Correspondingly, each sensing strip 3 includes a positive electrode strip, a piezoelectric strip and a negative electrode strip.

[0057] In other embodiments, the piezoelectric sensor 10 may also be a multilayer piezoelectric structure, that is, the sensor body 1 includes multiple positive electrode layers 11, multiple intermediate layers 12 and multiple negative electrode layers 13, and correspondingly, each sensing strip 3 includes multiple positive electrode strips, multiple piezoelectric strips and multiple negative electrode strips.

[0058] Specifically, when the piezoelectric sensor 10 is used as a sensor, it is stacked sequentially along the first direction in the order of positive electrode layer 11, intermediate layer 12, negative electrode layer 13, intermediate layer 12, and positive electrode layer 11. When the piezoelectric sensor 10 is used as a vibration feedback device, one positive electrode layer 11, one intermediate layer 12, and one negative electrode layer 13 constitute a piezoelectric unit. Multiple piezoelectric units are stacked sequentially along the first direction, and an isolation layer is stacked between any two adjacent piezoelectric units.

[0059] In one embodiment, the sensor strip 3 is cut once at certain intervals on the complete sensor body 1. This not only cuts out the hollow area 2 on the sensor body 1, but also cuts out multiple sensor strips 3 located in the hollow area 2.

[0060] The sensing strip 3 is formed by cutting, which allows the sensing strip 3 to be integrally connected with the sensor body 1. This helps to ensure the reliability of the connection between the sensing strip 3 and the sensor body 1, and thus helps to ensure that the piezoelectric sensor 10 has a longer service life.

[0061] In another embodiment, the sensing strip 3 can be manufactured separately. After the sensing strip 3 is manufactured, it can be connected to the hollow area 2 on the sensor body 1. This arrangement facilitates the formation of the sensing strip 3 to some extent.

[0062] In the first embodiment, the intermediate layer 12 is a complete piezoelectric sheet, and each piezoelectric strip of each sensing strip 3 is connected to this piezoelectric sheet. This arrangement simplifies the structure of the intermediate layer 12 to a certain extent and facilitates its processing and manufacturing.

[0063] In the second embodiment, the intermediate layer 12 may also include multiple piezoelectric strips, and the multiple piezoelectric strips in the intermediate layer 12 are correspondingly connected to the piezoelectric strips in the multiple sensing strips 3. With this configuration, since there is a gap between any two adjacent piezoelectric strips in the intermediate layer 12, this gap not only helps to reduce the weight of the intermediate layer 12, and thus the weight of the entire piezoelectric sensor 10, but also helps to reduce the amount of piezoelectric material used, thereby reducing costs.

[0064] In the third embodiment, the intermediate layer 12 is not a piezoelectric layer, but a filler material layer. In this case, the piezoelectric strip in the sensing strip 3 does not need to be connected to the intermediate layer 12. This arrangement helps to further reduce the amount of piezoelectric material used, thereby further reducing costs.

[0065] Regarding the filling material layer, in this embodiment of the application, the constituent material of the filling material layer can be insulating material, damping material, etc. The selection of the constituent material of the filling material layer is quite flexible, and this embodiment of the application does not make specific limitations on it.

[0066] In one embodiment, the positive electrode layer 11 and the negative electrode layer 13 each include a complete electrode sheet layer, and each electrode strip of each sensing strip is connected to the corresponding electrode sheet layer.

[0067] This configuration has several advantages. First, since the positive electrode layer 11 and the negative electrode layer 13 cannot distinguish the signal of each piezoelectric strip in this case, it is suitable for application scenarios where it is not necessary to confirm the pressing position but only the pressing pressure. Second, to a certain extent, it simplifies the structure of the positive electrode layer 11 and the negative electrode layer 13, which is beneficial for the processing and manufacturing of the positive electrode layer 11 and the negative electrode layer 13.

[0068] In another embodiment, the positive electrode layer 11 and the negative electrode layer 13 each include a plurality of electrode strips, and the plurality of electrode strips in the positive electrode layer 11 are connected one-to-one with the positive electrode strips in the plurality of sensing strips, and the plurality of electrode strips in the negative electrode layer 13 are connected one-to-one with the negative electrode strips in the plurality of sensing strips.

[0069] This configuration has several advantages. First, since the electrode strips in the positive electrode layer 11 and the negative electrode layer 13 are independent, the signal transmission of each electrode strip is also independent. This allows for the differentiation of the signals from the piezoelectric strips in each sensing strip, making it suitable not only for applications that confirm the pressing pressure but also for applications that confirm the pressing position. Second, since there is a gap between any two adjacent electrode strips, this gap not only helps to reduce the weight of the positive electrode layer 11 and the negative electrode layer 13, thereby reducing the weight of the entire piezoelectric sensor 10, but also helps to reduce the amount of material used in the positive electrode layer 11 and the negative electrode layer 13, thus reducing costs.

[0070] Regarding the cutout area 2, in this embodiment, the cutout area 2 can be formed by a perforation or a notch on the sensor body 1, that is, the cutout area 2 penetrates the side of the sensor body 1 in a direction perpendicular to the first direction. The structure of the cutout area 2 is flexible, and this embodiment does not specifically limit it.

[0071] Regarding the shape of the cutout area 2, in this embodiment, the cutout area 2 can be rectangular, circular, or any other arbitrary shape. For example, when the cutout area 2 is circular, the inner surface surrounding the cutout area 2 is a cylindrical surface, and in this case, both the first inner surface 14 and the second inner surface 15 belong to this cylindrical surface. The shape of the cutout area 2 is quite flexible, and this embodiment does not specifically limit it.

[0072] Regarding the shape of the piezoelectric sensor 10, in this embodiment of the application, the shape of the piezoelectric sensor 10 can be rectangular, circular or other arbitrary shapes. The shape setting of the piezoelectric sensor 10 is relatively flexible, and this embodiment of the application does not make specific limitations on it.

[0073] Regarding the connection between the sensing strip 3 and the sensor body 1, in the first embodiment, as follows: Figure 2 As shown, the aforementioned length direction of the sensing strip 3 (e.g.) Figure 2 One end of the sensor (in the X direction) is connected to the sensor body 1, and the other end is disconnected from the sensor body 1.

[0074] With this configuration, the disconnected end can move freely to a certain extent, and the degree of freedom of the sensing strip 3 can also be increased through this end. When subjected to force, the sensing strip 3 will be subject to less constraint and obstruction from the surroundings, and can extend and contract more freely, thus having a greater deformation. This is beneficial to further improve the strength and sensitivity of the electrical signal, and at the same time, it is also beneficial to make the vibration of the sensing strip 3 have a richer, more diverse, and more multi-layered effect.

[0075] Furthermore, in a preferred embodiment, the end of the sensing strip 3 connected to the sensor body 1 is a connection end 31, and multiple connection ends 31 are arranged along a second direction (e.g., Figure 2 The Y-direction in the middle is arranged sequentially, and the second direction is parallel to the middle layer 12.

[0076] like Figure 2 As shown, the sensor body 1 includes a first inner side 14 and a second inner side 15 for forming a hollow area 2. The first inner side 14 and the second inner side 15 are spaced apart and arranged opposite each other in a direction different from the second direction. In the second direction, one of any two adjacent connecting ends 31 is connected to the first inner side 14 and the other is connected to the second inner side 15.

[0077] Since the two adjacent connecting ends 31 are respectively connected to the two opposite inner surfaces, the free movement of the other end of the sensing strip 3 also helps to ensure that the sensing strip 3 is evenly distributed within the hollow area 2. This allows the force to be evenly distributed to different parts of the sensor body 1 through the sensing strip 3 when subjected to external force, reducing local stress concentration and thus improving the durability and stability of the piezoelectric sensor 10. Secondly, the uniform distribution of the sensing strip 3 allows it to more comprehensively and evenly reflect the force situation when sensing external force, reducing measurement errors. Furthermore, the alternating connection of the connecting ends 31 in the direction of the first inner surface 14 and the second inner surface 15 makes the structure of the piezoelectric sensor 10 more symmetrical, reducing performance deviations caused by structural asymmetry.

[0078] In another embodiment, without considering the aforementioned effects such as the uniform distribution of the sensing strips 3, each connecting end 31 can also be connected to either the first inner surface 14 or the second inner surface 15. This arrangement simplifies the connection method between the sensing strips 3 and the sensor body 1 to a certain extent, which is beneficial for the manufacturing of the sensor body 1.

[0079] In another embodiment, two sensing strips 3 form a sensing strip group, and multiple sensing strip groups are arranged sequentially along the second direction. Within the same sensing strip group, the connecting end 31 of one sensing strip 3 is connected to the first inner surface 14, and the connecting end 31 of the other sensing strip 3 is connected to the second inner surface 15, with the two connecting ends 31 arranged opposite to each other. This arrangement not only facilitates the uniform sensing and transmission of external forces from different directions but also effectively utilizes limited space.

[0080] Furthermore, an insulating layer (not shown in the figure) is provided on the outer surface of the sensing strip 3.

[0081] Since one end of the sensing strip 3 can move freely, during the movement of this end, the sensing strip 3 at this end may come into contact with other sensing strips 3. Therefore, by providing an insulating layer on the outer surface of the sensing strip 3, short circuits can be avoided when the sensing strips 3 come into contact with each other, which is beneficial to ensuring the normal use of the piezoelectric sensor 10.

[0082] Regarding the material of the insulation layer, in this embodiment of the application, the material of the insulation layer can be acrylate, polyurethane, perfluorinated resin, etc. The choice of the material of the insulation layer is quite flexible, and this embodiment of the application does not make specific limitations on it.

[0083] Furthermore, regarding the arrangement of the sensing strip 3 within the hollowed-out area 2, in the first embodiment, as follows: Figure 4 As shown, at least some of the multiple sensor strips 3 are arranged in a cross-stack configuration.

[0084] The cross-stacked structure increases the gaps and voids between the sensing strips 3. When subjected to external forces, these gaps and voids provide more space for the sensing strips 3 to bend, twist and stretch, enabling them to undergo more complex and larger-scale deformations, which in turn helps to further improve the strength and sensitivity of the electrical signal.

[0085] In this embodiment, since the broken end of the sensor strip 3 can move freely to a certain extent, the sensor strips 3 can be stacked in a crisscross manner as this end moves freely. This, to a certain extent, facilitates the crisscross stacking arrangement of the sensor strips 3.

[0086] In the second implementation method, such as Figure 5 As shown, the sensor strip 3 is spiral-shaped.

[0087] First, the spiral structure itself has greater elasticity and extensibility. Compared with the straight structure, the spiral sensing strip 3 can be stretched, compressed and twisted along the spiral path when subjected to external force, thus achieving more dimensional and greater deformation, which is conducive to further improving the strength and sensitivity of the electrical signal.

[0088] Secondly, the spiral-shaped sensing strip 3 has a more complex spatial layout and more diverse contact and interaction with the surrounding environment. When an external force is applied, it can not only stretch and contract along the axial direction of the spiral-shaped sensing strip 3, but also bend and twist in the radial direction, thus utilizing the entire space to achieve deformation and increasing the possibility and magnitude of deformation.

[0089] Furthermore, the spiral design allows the sensor strip 3 to distribute stress when subjected to force. The force is not concentrated at a specific point or area, but is evenly distributed along the spiral lines. This helps to avoid excessive local deformation or damage, thus allowing the sensor strip 3 to undergo greater overall deformation.

[0090] In this embodiment, the broken end of the sensing strip 3 is held and stretched along its length. When the sensing strip 3 is released, it will naturally relax and form a spiral shape. This facilitates the formation of the spiral-shaped sensing strip 3.

[0091] In the third implementation method, such as Figure 2 As shown, multiple sensor strips 3 are arranged in sequence, parallel and spaced apart, along the second direction.

[0092] This arrangement facilitates orderly signal transmission and processing. The parallel and spaced arrangement minimizes mutual interference between the electrical signals generated by each sensor strip 3 during transmission, allowing subsequent signal processing circuits to more clearly distinguish and process signals from each sensor strip 3, thus improving the accuracy and reliability of the measurement.

[0093] Secondly, it facilitates the uniform sensing of external force distribution. This arrangement allows the piezoelectric sensor 10 to receive external force more evenly in the second direction, avoiding situations where localized force concentration occurs while other parts are not effectively sensed, thus providing a more comprehensive and accurate reflection of the force situation.

[0094] Furthermore, it facilitates manufacturing and installation. The parallel and spaced arrangement makes it easier to achieve standardized processes during production, improving production efficiency and product quality consistency.

[0095] In this embodiment, since there is a gap between any two adjacent sensing strips 3, the sensing strips 3 may or may not have an insulating layer. This application does not specifically limit this.

[0096] In addition, in order to ensure that each sensing strip 3 can be arranged parallel and spaced apart along the second direction, a material with good elasticity can be filled between two adjacent sensing strips 3. The specific material of this application embodiment is not specifically limited.

[0097] Regarding the connection between the sensing strip 3 and the sensor body 1, in the second embodiment, as follows: Figure 3 As shown, both ends of each sensing strip 3 in the length direction are connection ends 31, and in the same sensing strip 3, one of the two connection ends 31 is connected to the first inner side 14 and the other is connected to the second inner side 15.

[0098] This design, firstly, enhances the stability and reliability of the sensor strip 3. The connection at both ends makes the sensor strip 3 less prone to positional shift or excessive twisting when subjected to external forces, reducing the risk of measurement errors or damage caused by instability.

[0099] Secondly, it improves the efficiency of force transmission. External force can be transmitted to the sensing strip 3 more effectively through the connection at both ends, making it more sensitive to and responsive to changes in external force, thereby improving the measurement accuracy and sensitivity of the piezoelectric sensor 10.

[0100] Furthermore, it helps to balance the force. When an external force is applied to the piezoelectric sensor 10, the two ends are connected to the opposite inner surfaces, which allows the sensing strip 3 to bear the force more evenly in the length direction. This avoids the situation where one end is subjected to excessive force while the other end is subjected to insufficient force, further improving the accuracy and stability of the measurement.

[0101] In this embodiment, the piezoelectric sensor 10 can be any of the piezoelectric sensors 10 described in the first embodiment above, and can bring the same or similar beneficial effects. For example, in this embodiment, an insulating layer can be provided on the outer surface of the sensing strip 3, at least some of the sensing strips 3 can be stacked crosswise, the sensing strip 3 can be spiral-shaped, and the multiple sensing strips 3 can be arranged in parallel and spaced apart along the second direction. This application embodiment will not elaborate on these details.

[0102] Regarding the size of sensor strip 3, further, such as Figure 2 and Figure 3 As shown, at least one end of the sensing strip 3 along its length is a connection end 31 connected to the sensor body 1, and the connection ends 31 of the plurality of sensing strips 3 are along the second direction (e.g., Figure 2 The Y-direction in the middle is arranged sequentially, and the second direction is parallel to the middle layer 12.

[0103] like Figure 2 and Figure 3As shown, the sensing strip 3 is a sensing strip of equal width, and the width direction of the connecting end 31 extends along the second direction, with the width range of the connecting end 31 being 50um-500um; and / or, in the second direction, the distance between any two adjacent connecting ends 31 of any two different sensing strips 3 is less than or equal to 20um.

[0104] Since the width of the connecting end 31 ranges from 50µm to 500µm, and since the sensing strip 3 is a uniform width, the width of the sensing strip 3 also ranges from 50µm to 500µm. This configuration has several advantages. First, in terms of sensitivity, a narrower width (e.g., close to 50µm) allows the sensing strip 3 to deform more easily, making it more sensitive to smaller changes in external force and thus improving detection sensitivity. Conversely, a wider width (e.g., close to 500µm) ensures that the sensing strip 3 has sufficient strength and stability, making it suitable for detecting larger external forces.

[0105] Secondly, from a manufacturing process perspective, this width range is feasible and easily achievable with current processing technology, ensuring high production yield and consistency.

[0106] Furthermore, in terms of space utilization, a reasonable setting of the width range allows for the arrangement of more sensor strips 3 within a limited space, thereby improving detection density and resolution.

[0107] When multiple sensing strips 3 are arranged parallel and spaced apart along the second direction, the spacing between any two adjacent sensing strips 3 is less than or equal to 20 μm. Therefore, this arrangement has several advantages. First, the smaller spacing allows for a greater amount of piezoelectric material to participate in sensing, enabling the piezoelectric sensor 10 to more sensitively detect minute changes in external force and subtle differences in physical quantities, thus improving detection resolution and accuracy. Second, from a manufacturing process and cost perspective, a spacing range of less than or equal to 20 μm is relatively easy to achieve with current manufacturing technology, ensuring both production feasibility and stability while controlling production costs.

[0108] In a preferred embodiment, the width of the connecting end 31 ranges from 50µm to 500µm, and the distance between any two adjacent connecting ends 31 of any two different sensing strips 3 is less than or equal to 20µm. This configuration further optimizes the size of the sensing strip 3, thereby improving the resolution and accuracy of the detection.

[0109] In this embodiment of the application, the width of the sensing strip 3 can be any value within the range of 50um, 500um, or 50um-500um. This embodiment of the application does not impose any specific limitation on this.

[0110] Regarding the spacing between the connecting ends 31, in this embodiment of the application, the spacing between the connecting ends 31 can be 20um or any value less than 20um. This embodiment of the application does not make any specific limitation on this.

[0111] like Figure 1 As shown, the piezoelectric sensor 10 includes a flexible encapsulation layer 4, which wraps around the outside of the sensor body 1 to encapsulate multiple sensing strips 3 within the space enclosed by the flexible encapsulation layer 4.

[0112] This design serves two purposes. First, the flexible encapsulation layer 4 provides excellent protection, preventing erosion and damage to the sensor body 1 and the sensing strip 3. This, in turn, improves the stability and reliability of the piezoelectric sensor 10 and extends its service life. Second, the flexible encapsulation layer 4 not only provides sufficient deformation space for the sensing strip 3 but also limits excessive displacement and deformation, ensuring its optimal performance.

[0113] Regarding the material of the flexible encapsulation layer 4, in this embodiment of the application, the material of the flexible encapsulation layer 4 can be PET, PDMS, PMMA, etc., and this embodiment of the application does not make specific limitations on this.

[0114] Example 2

[0115] This application also provides a piezoelectric device, such as Figure 6 As shown, the piezoelectric device includes a piezoelectric sensor 10 and a substrate 20, wherein the substrate 20 and the piezoelectric sensor 10 are aligned along a first direction (e.g., ...). Figure 6 The piezoelectric sensor 10 is stacked in the Z direction and has the same structure as any of the piezoelectric sensors 10 in the above embodiments, and can bring the same or similar beneficial effects. For details, please refer to the description in the above embodiments. This embodiment will not be repeated here.

[0116] Compared to piezoelectric sensors in related technologies that are complete and lack cutout areas and sensing strips 3, in this application, since each sensing strip 3 is independent to a certain extent and there is no mutual restraint or constraint, the mutual influence between adjacent sensing strips 3 is small when the sensing strip 3 is subjected to external force. This allows each sensing strip 3 to bend and stretch more freely, thus enabling greater deformation. Even if the force applied to the sensing strip 3 is very weak, the sensing strip 3 can still undergo significant deformation, thereby improving the strength and sensitivity of the electrical signal and fully meeting application requirements.

[0117] Furthermore, such as Figure 6 As shown, the substrate 20 is an elastic substrate; and / or, the substrate 20 is provided with a clearance groove 201 on the side facing the piezoelectric sensor, and the clearance groove 201 is provided corresponding to the hollow area 2 in the first direction.

[0118] First, the substrate 20 is configured as an elastic substrate. Under stress, the elastic deformation of the substrate 20 provides a larger deformation space for the sensor strip 3, allowing for greater deformation and thus improving the strength and sensitivity of the electrical signal. Second, under stress, the clearance groove 201 provides even more deformation space for the sensor strip 3, enabling greater deformation and further improving the strength and sensitivity of the electrical signal.

[0119] like Figure 6 As shown, in a preferred embodiment, the substrate 20 is an elastic substrate, and a clearance groove 201 is provided on the side of the substrate 20 facing the piezoelectric sensor.

[0120] With this configuration, when subjected to force, the elastic substrate and the clearance groove 201 can provide a larger deformation space for the deformation of the sensing strip 3, thereby enabling the sensing strip 3 to undergo greater deformation, which in turn helps to further improve the strength and sensitivity of the electrical signal.

[0121] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A piezoelectric sensor, characterized in that, include: The sensor body includes at least one positive electrode layer, at least one intermediate layer and at least one negative electrode layer stacked along a first direction, wherein a positive electrode layer and a negative electrode layer are respectively stacked on both sides of each intermediate layer in the first direction; A hollow area is disposed in the sensor body and extends through the sensor body along the first direction. Multiple sensing strips are disposed within the hollow area. Each sensing strip includes at least one positive electrode strip, at least one piezoelectric strip, and at least one negative electrode strip stacked along its thickness direction. A positive electrode strip and a negative electrode strip are stacked on both sides of each piezoelectric strip in the thickness direction. The positive electrode strip, the piezoelectric strip, and the negative electrode strip extend in the same direction. At least one end of each sensing strip in the length direction is connected to the sensor body, so that at least one positive electrode strip is connected to at least one positive electrode layer, and at least one negative electrode strip is connected to at least one negative electrode layer. One end of the sensing strip along its length is connected to the sensor body, and the other end is disconnected from the sensor body. The end of the sensing strip connected to the sensor body is a connection end, and multiple connection ends are arranged sequentially along a second direction, which is parallel to the intermediate layer. The sensor body includes a first inner side and a second inner side for forming the hollow area. The first inner side and the second inner side are spaced apart and arranged opposite each other in a direction different from the second direction. In the second direction, one of any two adjacent connection ends is connected to the first inner side and the other is connected to the second inner side.

2. The piezoelectric sensor according to claim 1, characterized in that, At least one end of the sensing strip along its length is a connection end connected to the sensor body, and the connection ends of the plurality of sensing strips are arranged sequentially along a second direction, which is parallel to the intermediate layer. The sensing strip is a sensing strip of equal width, and the width direction of the connecting end extends along the second direction, with the width of the connecting end ranging from 50um to 500um; and / or, in the second direction, the distance between any two adjacent connecting ends of any two different sensing strips is less than or equal to 20um.

3. The piezoelectric sensor according to any one of claims 1-2, characterized in that, An insulating layer is provided on the outer surface of the sensing strip.

4. The piezoelectric sensor according to claim 3, characterized in that, At least some of the multiple sensor strips are arranged in a cross-stack configuration.

5. The piezoelectric sensor according to claim 3, characterized in that, The sensing strip is spiral-shaped.

6. The piezoelectric sensor according to any one of claims 1-2, characterized in that, The plurality of the sensor strips are arranged in sequence, parallel and spaced apart, along the second direction.

7. The piezoelectric sensor according to any one of claims 1-2, characterized in that, The piezoelectric sensor includes a flexible encapsulation layer that wraps around the outside of the sensor body to encapsulate the plurality of sensing strips within the space enclosed by the flexible encapsulation layer.

8. A piezoelectric device, characterized in that, include: The piezoelectric sensor according to any one of claims 1-7.

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