Detection equipment and detection method and detection system thereof

Abstract

The embodiment of the invention relates to the technical field of optical detection equipment, provides detection equipment, a detection method thereof and a detection system, and can solve the problem that the accuracy of the detection result of the optical performance of a convergence element in the related technology is low. The detection equipment comprises a bearing body, a light source support, a convergence element support, a first detection device and a second detection device, and the light source support is arranged on the bearing body and used for arranging a light source; the convergence element support is arranged on the bearing body and located on one side of the light source support, the convergence element support is used for arranging a convergence element, and the convergence element is used for converging a first light beam emitted by the light source towards one side of the convergence element support; the first detection device is used for detecting the diameter value of the focal spot; wherein the focal spot is a light spot formed by the emergent light beam on the focal plane of the convergence element; the second detection device is used for detecting the uniformity of the luminous flux on the target surface; wherein the target surface is located on a light path of the emergent light beam. The method can be applied to detection of convergence elements.

Description

Technical Field

[0001] The present application relates to the technical field of optical detection equipment, and in particular to a detection equipment and a detection method and a detection system thereof. Background Art

[0002] As people's requirements for the performance of optical systems become higher and higher, traditional converging elements with spherical surfaces (such as convex lenses) are difficult to meet the requirements of optical systems, so converging elements with complex surfaces (such as free-form surfaces) have come into being. Since converging elements with complex surfaces have high requirements for processing accuracy, their optical performance needs to be tested after the converging elements are processed. Through testing, converging elements with unqualified optical performance can be detected in time to avoid being installed in the optical system to affect the overall performance of the optical system. Among them, how to detect converging elements has become an important topic in the industry.

[0003] In the related technology, the reflected light beam of the converging element is cut by the blade of a knife-edge instrument, and the changes in the light spot of the reflected light beam are directly observed by the human eye behind the blade to compare the difference between the wavefront of the reflected light beam at the cutting position of the blade and the ideal wavefront, thereby determining the imaging quality of the converging element and realizing the detection of the optical performance of the converging element.

[0004] Since there are many factors that affect the optical performance of the convergence element, it is necessary not only to detect the imaging quality of the convergence element, but also to detect other parameters of the convergence element. The relevant technology can detect the imaging quality of the convergence element. If other parameters of the convergence element are to be detected, the convergence element needs to be installed on another detection device to detect the relevant parameters. However, in the latter detection process, since the assembly position of the convergence element has changed compared with the previous detection, the error caused by the inconsistent assembly position will affect the accuracy of the latter detection result, and further affect the detection result of the optical performance of the convergence element. Summary of the invention

[0005] The embodiments of the present application provide a detection device and a detection method and a detection system thereof, which are used to solve the problem of low accuracy of the detection results of the optical performance of the converging element in the related art.

[0006] To achieve the above objectives, the embodiments of the present application adopt the following technical solutions:

[0007] In the first aspect, an embodiment of the present application provides a detection device, including a carrier, a light source bracket, a converging element bracket, a first detection device and a second detection device, wherein the light source bracket is arranged on the carrier and is used to set the light source; the converging element bracket is arranged on the carrier and is located on one side of the light source bracket, the converging element bracket is used to set a converging element, and the converging element is used to converge a first light beam emitted by the light source toward one side of the converging element bracket; the first detection device is used to detect the diameter value of the focal spot, and determine the imaging quality of the converging element based on the diameter value of the focal spot; wherein the focal spot is a light spot formed by the outgoing light beam on the focal plane of the converging element, and the outgoing light beam is the first light beam after passing through the converging element; the second detection device is used to detect the uniformity of the luminous flux on the target surface; wherein the target surface is located on the optical path of the outgoing light beam.

[0008] The detection device in the embodiment of the present application is equipped with a first detection device and a second detection device, so that the detection device can not only detect the diameter value of the focal spot, but also detect the uniformity of the luminous flux on the target surface. Since the detection of the diameter value of the focal spot and the uniformity of the luminous flux on the target surface are both completed on the same device, the assembly position of the converging element does not need to be moved, thereby ensuring the consistency of the assembly position of the converging element during the detection of the diameter value of the focal spot and the uniformity of the luminous flux on the target surface, which is beneficial to improving the accuracy of the detection results.

[0009] In combination with the first aspect, in a first optional implementation of the first aspect, the first detection device includes a knife edge, a driving device, a first sensor, and a first processing device, the driving device is connected to the knife edge, and is used to drive the knife edge to move relative to the carrier along a first direction parallel to the optical axis of the outgoing light beam and a second direction perpendicular to the optical axis of the outgoing light beam; the first sensor is arranged on the carrier, and is used to obtain a spot image of the outgoing light beam; wherein the spot image includes a spot area; the first processing device is used to: when the knife edge cuts the outgoing light beam along the second direction, according to the movement distance of the knife edge between the moment when the spot area begins to darken and the moment when it completely darkens, determine the diameter value of the spot of the outgoing light beam at the cutting position of the knife edge. With such a configuration, the cost of the first detection device can be controlled, and the cost requirements of the general laboratory for measuring the diameter value of the focal spot can be met, and the accuracy of the measurement result can be met by taking an average value of multiple measurements.

[0010] In combination with the first optional implementation of the first aspect, in the second optional implementation of the first aspect, the first processing device is used to: determine the moment when the sum of the grayscale values ​​of each pixel in the light spot area decreases to a first preset value as the moment when darkening begins; determine the moment when the sum of the grayscale values ​​decreases to a second preset value as the moment when darkening completely occurs; wherein the first preset value is less than the sum of the grayscale values ​​when the blade does not cut the outgoing light beam, and the second preset value is greater than zero and less than the first preset value. Such a setting can make the determination of the moment when darkening begins and the moment when darkening completely occurs more accurate.

[0011] In combination with the first or second optional implementation of the first aspect, in a third optional implementation of the first aspect, the first processing device is used to: control the driving device to drive the blade to move to the position of the focal plane according to the position information of the focal plane, and then control the driving device to drive the blade to cut the outgoing light beam along the second direction; determine the diameter value of the focal spot according to the movement distance of the blade. Such a setting not only makes the operation of the first detection device simpler, but also makes the movement accuracy of the blade higher.

[0012] In combination with the third optional implementation of the first aspect, in the fourth optional implementation of the first aspect, the first processing device is used to: before controlling the driving device to drive the blade to move to the position of the focal plane, perform the following steps: control the driving device to drive the blade to cut the outgoing light beam along the second direction at the position of the first preset section; determine the first diameter value of the light spot at the position of the outgoing light beam at the first preset section according to the movement distance of the blade; control the driving device to drive the blade to cut the outgoing light beam along the second direction at the position of the second preset section; determine the second diameter value of the light spot at the position of the outgoing light beam at the second preset section according to the movement distance of the blade; wherein the first preset section and the second preset section are both perpendicular to the first direction; determine the position information of the focal plane according to the first diameter value, the second diameter value, and the distance value between the first preset section and the second preset section. In this way, the number of times the blade cuts the outgoing light beam can be greatly reduced, thereby greatly shortening the time for determining the position information of the focal plane.

[0013] In combination with any one of the first to fourth optional implementations of the first aspect, in a fifth optional implementation of the first aspect, the first sensor includes a first optical platform disposed on the carrier, and a first sensor body disposed on the first optical platform, the first optical platform being used to adjust the angle between the orientation of the first light entrance of the first sensor body and the first direction, and / or to adjust the position of the first sensor body relative to the carrier in the first direction and in a direction perpendicular to the first direction. This arrangement ensures that the outgoing light beam can evenly enter the first sensor body, thereby ensuring the accuracy of focal spot value detection.

[0014] In combination with any one of the first to fifth optional implementations of the first aspect, in a sixth optional implementation of the first aspect, the target surface is located on a side of the first sensor away from the converging element support; the first sensor is detachably disposed on the carrier, and / or the driving device is detachably connected to the carrier. With such an arrangement, the outgoing light beam can be avoided from being blocked, thereby ensuring the normal detection of the uniformity of the light flux on the target surface.

[0015] In combination with any one of the first to fifth optional implementations of the first aspect, in the seventh optional implementation of the first aspect, the detection device further includes a beam splitter bracket for setting a beam splitter, and along the arrangement direction of the light source bracket and the converging element bracket, the beam splitter bracket is arranged between the first sensor, one of the target surfaces and the converging element bracket; along the third direction, the first sensor and the other of the target surfaces are located on one side of the beam splitter bracket, that is: the first sensor, the other of the target surfaces and the beam splitter bracket are arranged along the third direction, wherein the third direction is perpendicular to the arrangement direction. With such an arrangement, the first detection device and the second detection device can perform detection at the same time, thereby facilitating improving the detection efficiency of the detection device.

[0016] In combination with the first aspect, and any one of the first to seventh optional implementations of the first aspect, in the eighth optional implementation of the first aspect, the second detection device includes a fixing frame, a second sensor, and a second processing device, the fixing frame is arranged on the carrier; the second sensor is arranged on the fixing frame, and the position of the second sensor relative to the carrier can be adjusted in the longitudinal and transverse directions of the fixing frame; the second sensor is used to obtain the optical parameter values ​​at the multiple detection points on the target surface; the second processing device is used to determine the uniformity of the luminous flux on the target surface according to the optical parameter values ​​at the multiple detection points; wherein the optical parameter value includes one of the illumination value, the light intensity value, and the brightness value; the target surface is located at the light entrance of the second sensor and is parallel to both the transverse and longitudinal directions. With such a configuration, it is possible to avoid the second sensor occupying space outside the fixing frame, thereby making the structure of the second detection device more compact.

[0017] In combination with the eighth optional implementation of the first aspect, in a ninth optional implementation of the first aspect, the fixing frame includes a vertical frame arranged on the carrier, and a horizontal frame arranged on the vertical frame, the vertical frame extends along the longitudinal direction, and the horizontal frame extends along the transverse direction; the position of the horizontal frame relative to the vertical frame in the longitudinal direction is adjustable, and the second sensor is arranged on the horizontal frame, and the position of the second sensor relative to the horizontal frame in the transverse direction is adjustable. In this arrangement, by adjusting the position of the horizontal frame and the position of the second sensor respectively, the optical parameter values ​​of multiple detection points arranged in an array on the target surface can be obtained, thereby facilitating the improvement of the accuracy of the light flux detection on the target surface.

[0018] In combination with the eighth or ninth optional implementation of the first aspect, in a tenth optional implementation of the first aspect, along a fourth direction, the position of the fixing frame relative to the carrier is adjustable, and the fourth direction is perpendicular to both the transverse direction and the longitudinal direction. Such an arrangement enables the target surface to receive a complete light spot of the outgoing light beam, thereby making the detection of the uniformity of the light flux on the target surface more accurate.

[0019] In combination with any one of the eighth to tenth optional implementations of the first aspect, in the eleventh optional implementation of the first aspect, the second sensor includes a second optical platform disposed on the fixing frame, and a second sensor body disposed on the second optical platform and having the second light entrance, the second optical platform is used to adjust the angle between the orientation of the second light entrance and a fourth direction, the fourth direction being perpendicular to both the horizontal direction and the longitudinal direction. In this way, the orientation of the light entrance of the second sensor body can be made parallel to the fourth direction, so that the second sensor body can accurately obtain the optical parameter value at the position of the light entrance of the second sensor body.

[0020] In combination with the first aspect, and any one of the first to seventh optional implementations of the first aspect, in the twelfth optional implementation of the first aspect, the second detection device includes a reflector, a second sensor, and a second processing device, the reflector is arranged on the carrier, the reflector has a reflective surface, and the reflective surface is the target surface; the second sensor is used to obtain the optical parameter values ​​at multiple detection points on the target surface; wherein the optical parameter value includes one of an illumination value, a light intensity value, and a brightness value; the second processing device is used to determine the uniformity of the luminous flux on the target surface according to the optical parameter values ​​at multiple detection points. With such an arrangement, the outgoing light beam can be distributed in a larger space around the reflector after being reflected by the reflective surface, thus providing a more sufficient setting space for the second sensor.

[0021] In combination with the twelfth optional implementation of the first aspect, in the thirteenth optional implementation of the first aspect, along a direction perpendicular to the reflecting surface, the position of the reflecting member relative to the carrier is adjustable. With such an arrangement, the reflecting surface can receive a complete light spot of the outgoing light beam, so that the position distribution of the detection point of the second sensor can be more comprehensive.

[0022] In combination with the twelfth or thirteenth optional implementation manner of the first aspect, in the fourteenth optional implementation manner of the first aspect, the second sensor includes a third optical platform disposed on the carrier, and an imaging luminance meter disposed on the third optical platform, and the third optical platform is used to adjust the angle between the lens orientation of the imaging luminance meter and the reflecting surface. With such an arrangement, the imaging luminance meter can obtain an image of the complete light spot of the outgoing light beam, thereby making the detection of the uniformity of the luminous flux on the target surface more accurate.

[0023] In combination with the first aspect, and any one of the first to fourteenth optional implementations of the first aspect, in the fifteenth optional implementation of the first aspect, the carrier includes a linear guide rail, the light source bracket and the converging element bracket are both arranged on the linear guide rail and arranged in a direction parallel to the linear guide rail; the detection device also includes a plurality of first aperture brackets for setting the first aperture diaphragms, the plurality of first aperture brackets are arranged on the linear guide rail and arranged in a direction parallel to the linear guide rail; each first aperture bracket is located on a side of the converging element bracket away from the light source bracket. In this arrangement, whether the light source and the converging element are installed in place can be judged by whether the first light beam emitted by the light source passes through a plurality of first aperture diaphragms at the same time, which facilitates the adjustment of the light path.

[0024] In combination with the fifteenth optional implementation of the first aspect, in the sixteenth optional implementation of the first aspect, the detection device further includes an optical attenuator bracket for setting an optical attenuator, a collimator bracket for setting a collimator, and a second aperture bracket for setting a second aperture diaphragm; the optical attenuator bracket is arranged between the light source bracket and the collimator bracket, and the second aperture bracket is arranged between the collimator bracket and the converging element bracket; an adjustment platform is respectively arranged between each of the light source bracket, the optical attenuator bracket, the collimator bracket, the second aperture bracket, the converging element bracket, and the plurality of first aperture brackets and the linear guide rail, and the adjustment platform is at least used to adjust the position of each of the brackets relative to the linear guide rail in a direction parallel to the linear guide rail and a direction perpendicular to the linear guide rail. In this arrangement, the adjustment of the adjustment platform can make the first light beam emitted by the light source pass through the optical attenuator, the collimator, the first aperture diaphragm, and the converging element, and then pass through the plurality of first aperture diaphragms at the same time, so that the optical axis of the first light beam is parallel to the linear guide rail, so as to meet the requirements of subsequent detection.

[0025] In combination with the fifteenth or sixteenth optional implementation of the first aspect, in a seventeenth optional implementation of the first aspect, each of the first aperture brackets is detachably connected to the linear guide rail. With such an arrangement, after the optical path is adjusted, the first aperture bracket is removed to avoid blocking the light beam by the first aperture bracket, thereby ensuring normal operation of the rear optical device.

[0026] In a second aspect, an embodiment of the present application provides a detection method, which is applied to a detection device, wherein the detection device includes a carrier, a light source bracket and a converging element bracket, wherein the light source bracket is arranged on the carrier and is used to set the light source; the converging element bracket is arranged on the carrier and is located on one side of the light source bracket, and the converging element bracket is used to set a converging element, and the converging element is used to converge a first light beam emitted by the light source toward one side of the converging element bracket, and the detection method includes: detecting a diameter value of a focal spot, and determining an imaging quality of the converging element based on the diameter value of the focal spot; wherein the focal spot is a light spot formed by an outgoing light beam on a focal plane of the converging element, and the outgoing light beam is the first light beam after passing through the converging element; detecting the uniformity of the luminous flux on a target surface; wherein the target surface is located on the optical path of the outgoing light beam.

[0027] The detection method in the embodiment of the present application has the same technical effect as that achieved by the detection device in the first aspect, and will not be repeated here.

[0028] In combination with the second aspect, in a first optional implementation of the second aspect, the detection device includes a blade and a driving device, the driving device is connected to the blade, and is used to drive the blade to move relative to the carrier along a first direction parallel to the optical axis of the outgoing light beam and a second direction perpendicular to the optical axis of the outgoing light beam, and detect the diameter value of the focal spot, including: obtaining a spot image of the outgoing light beam; wherein the spot image includes a spot area; according to the position information of the focal plane, controlling the driving device to drive the blade to move to the position of the focal plane, and then controlling the driving device to drive the blade to cut the outgoing light beam along the second direction; according to the movement distance of the blade between the moment when the spot area begins to darken and the moment when it completely darkens, determining the diameter value of the focal spot. Such a setting can control the cost of detection, can meet the cost requirements of general laboratories for measuring the diameter value of the focal spot; and can perform multiple measurements to obtain an average value to meet the accuracy of the measurement result.

[0029] In combination with the first optional implementation of the second aspect, in the second optional implementation of the second aspect, the moment of starting to darken and the moment of completely darkening are determined by the following method: the moment when the sum of the grayscale values ​​of each pixel in the light spot area decreases to a first preset value is determined as the moment of starting to darken; the moment when the sum of the grayscale values ​​decreases to a second preset value is determined as the moment of completely darkening; wherein the first preset value is less than the sum of the grayscale values ​​when the blade does not cut the outgoing light beam, and the second preset value is greater than zero and less than the first preset value. Such a setting can make the determination of the moment of starting to darken and the moment of completely darkening more accurate, so that the measurement of the movement distance of the blade between the moment of starting to darken and the moment of completely darkening can be made more accurate.

[0030] In combination with the first or second optional implementation of the second aspect, in a third optional implementation of the second aspect, before controlling the driving device to drive the blade to move to the position of the focal plane, the method further includes: controlling the driving device to drive the blade to cut the outgoing light beam along the second direction at the position of the first preset section; determining the first diameter value of the spot of the outgoing light beam at the position of the first preset section according to the movement distance of the blade between the moment when the spot area starts to darken and the moment when it is completely darkened; controlling the driving device to drive the blade to cut the outgoing light beam along the second direction at the position of the second preset section; determining the second diameter value of the spot of the outgoing light beam at the position of the second preset section according to the movement distance of the blade between the moment when the spot area starts to darken and the moment when it is completely darkened; wherein the first preset section and the second preset section are both perpendicular to the first direction; determining the position information of the focal plane according to the first diameter value, the second diameter value, and the distance value between the first preset section and the second preset section. In this way, the number of times the blade cuts the outgoing light beam can be greatly reduced, so that the time for determining the position information of the focal plane can be greatly shortened.

[0031] In combination with the second aspect, and any of the first or third optional implementations in the second aspect, in a fourth optional implementation of the second aspect, detecting the uniformity of the luminous flux on the target surface includes: obtaining optical parameter values ​​at multiple detection points on the target surface; wherein the optical parameter values ​​include one of illuminance values, light intensity values, and brightness values; determining the uniformity of the luminous flux on the target surface according to the ratio of the maximum value to the minimum value, or the ratio of the minimum value to the maximum value, of the optical parameter values ​​at the multiple detection points. Such a setting can more intuitively reflect the difference in the distribution of the luminous flux on the target surface, which is conducive to more accurately determining the uniformity of the luminous flux on the target surface.

[0032] In a third aspect, an embodiment of the present application provides a detection system, comprising a light source and a detection device described in any optional implementation in the first aspect.

[0033] The detection system in the embodiment of the present application has the same technical effect as that achieved by the detection device in the first aspect, which will not be repeated here.

[0034] In a fourth aspect, an embodiment of the present application provides a detection system, comprising a light source, a beam splitter, and the first detection device in the seventh optional implementation method in the first aspect; the outgoing light beam comprises a first sub-beam passing through the beam splitter, and a second sub-beam reflected by the beam splitter, the first sensor and one of the target surface are located on the optical path of the first sub-beam, and the other of the first sensor and the target surface is located on the optical path of the second sub-beam.

[0035] The detection system in the embodiment of the present application has the same technical effect as that achieved by the detection device in the first aspect, which will not be repeated here.

[0036] In a fifth aspect, an embodiment of the present application provides a detection system, comprising a light source, a light attenuator, a collimator, a first aperture stop, a second aperture stop, and the detection device described in the sixteenth or seventeenth optional implementation in the first aspect.

[0037] The detection system in the embodiment of the present application has the same technical effect as that achieved by the detection device in the first aspect, which will not be repeated here.

[0038] In a sixth aspect, an embodiment of the present application provides a processing system, wherein the processing system stores computer program instructions, and the processing system executes the computer program instructions to implement the detection method described in any optional implementation manner in the second aspect.

[0039] The processing system in the embodiment of the present application has the same technical effect as that achieved by the detection device in the first aspect, which will not be repeated here.

[0040] In the seventh aspect, an embodiment of the present application provides a computer-readable storage medium, on which computer program instructions are stored. When the computer program instructions are executed by a detection device, the detection method described in any optional implementation method in the second aspect is implemented.

[0041] The computer-readable storage medium in the embodiment of the present application has the same technical effect as that achieved by the detection device in the first aspect, which will not be repeated here.

[0042] In an eighth aspect, an embodiment of the present application provides a computer program product, which includes computer program instructions. When the computer program instructions are executed by a detection device, the detection method described in any optional implementation manner in the second aspect is implemented.

[0043] The computer program product in the embodiment of the present application has the same technical effect as that achieved by the detection device in the first aspect, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 A schematic diagram of a detection device (knife-edge gauge) in the related art;

[0045] Figure 2 is a top view of the detection system in the first embodiment of the present application;

[0046] Figure 3 for Figure 2 A view of the detection system shown;

[0047] Figure 4 for Figure 2 A schematic diagram of a processing system of a first detection device in the detection system shown;

[0048] Figure 5 is a schematic diagram of the first detection device in some embodiments of the present application when detecting the diameter value of the focal spot;

[0049] Figure 6 A schematic diagram of the uniformity of the light flux of the second detection device on the target surface in some embodiments of the present application;

[0050] Figure 7 for Figure 6 A schematic diagram of a processing system of a second detection device;

[0051] Figure 8 Schematic diagram of a spot image in an embodiment of the present application;

[0052] Fig. 9 It is a schematic diagram of the light spot area of ​​the light spot image in the embodiment of the present application at the moment when it starts to darken and the moment when it is completely darkened;

[0053] Fig.10a A curve diagram between the total gray value and time in the embodiment of the present application;

[0054] Fig.10b A curve diagram between the area ratio and time in the embodiment of the present application;

[0055] Fig.11 A curve diagram of the distance of movement of the blade and time in the embodiment of the present application;

[0056] Fig.12 Schematic diagram of the first detection device acquiring the position information of the focal plane in the embodiment of the present application Figure 1 ;

[0057] Fig.13 Schematic diagram of the first detection device acquiring the position information of the focal plane in the embodiment of the present application Figure 2 ;

[0058] Fig.14 Schematic diagram of the first detection device acquiring the position information of the focal plane in the embodiment of the present application Figure 3 ;

[0059] Fig.15 for Figure 6 A B-direction view of the second detection device in FIG.

[0060] Fig.16 is a top view of a detection system in a second embodiment of the present application;

[0061] Fig.17for Fig.16 A schematic diagram of the structure of a fixing frame of a second detection device in a detection system;

[0062] Fig.18 is a top view of a detection system in a third embodiment of the present application;

[0063] Fig.19 for Fig.18 A C-direction view of the detection system shown;

[0064] Fig. 20 for Fig.18 A schematic diagram of a processing system of a second detection device in the detection system shown;

[0065] Fig.21 for Fig.18 A schematic diagram of the uniformity of the luminous flux of the detection system on the detection target surface shown;

[0066] Fig. 22 It is a schematic diagram of the diameter value of the focal spot detected by the first detection device in the detection system in the fourth embodiment of the present application;

[0067] Fig.23 It is a schematic diagram of the second detection device in the detection system of the fourth embodiment of the present application detecting the uniformity of the luminous flux on the target surface;

[0068] Fig.24 is a schematic diagram of a detection system in a fifth embodiment of the present application;

[0069] Fig.25 for Fig.24 The detection system shown is a D-direction view after the driving device, the reflector and the second sensor are removed;

[0070] Fig.26 A flow chart of a detection method of a detection device in some embodiments of the present application;

[0071] Fig. 27 A flow chart of a method for a first detection device to detect a diameter value of a focal spot in some embodiments of the present application;

[0072] Fig.28 This is a flow chart of a method for a second detection device to detect uniformity of luminous flux on a target surface in some embodiments of the present application. DETAILED DESCRIPTION

[0073] The technical solutions in some embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings.

[0074] Converging elements such as convex lenses and curved reflectors are widely used in many optical systems. For example, holographic optical elements (HOE) exposure systems, car lighting systems, medical endoscopy systems, and projection systems all require converging elements to adjust the light path. As people's performance requirements for optical systems become higher and higher, traditional converging elements with spherical surfaces are difficult to meet the requirements of optical systems, so converging elements with complex surfaces (such as free-form surfaces) have emerged. Converging elements with complex surfaces have better curvature radius and can maintain good aberration correction, thereby meeting the design requirements of optical systems.

[0075] Although the converging element with complex surface has good optical performance, its complex surface requires high processing accuracy. In order to avoid the influence of processing tolerance on the optical performance of the converging element, its optical performance needs to be tested after the converging element is processed. Through testing, the converging element with unqualified optical performance can be detected in time to avoid its installation in the optical system and affecting the overall performance of the optical system. Among them, how to test the converging element has become an important topic in the industry.

[0076] like Figure 1 As shown, Figure 1 It is a schematic diagram of a detection device (knife-edge instrument) in the related art. The detection device includes a light source device 01 and a knife edge 02. The light source device 01 includes a light source 011, a collimating lens 012, a converging lens 013, and a pinhole plate 014 having a pinhole 0141. The knife edge 02 is arranged on one side of the pinhole plate 014. The converging element 03 is a curved reflector and is arranged on the other side of the pinhole plate 014. A reflector 021 is arranged on the knife edge 02. Along the propagation direction of the first light beam 04 emitted by the light source 011, the collimating lens 012, the converging lens 013 and the reflector 021 are arranged in sequence on the optical path of the first light beam 04. The reflector 021 on the knife edge 02 can reflect the first light beam 04 to the pinhole 0141. After the first light beam 04 passes through the pinhole 0141, it forms a second light beam 05 with a spherical wavefront. The converging element 03 is arranged on the optical path of the second light beam 05.

[0077] During detection, the detection device drives the blade 02 to move to cut the reflected light beam of the converging element 03. The human eye directly observes the changes in the light spot of the reflected light beam behind the blade 02 to compare the difference between the wavefront of the reflected light beam at the cutting position of the blade 02 and the ideal wavefront, thereby determining the imaging quality of the converging element 03.

[0078] Since there are many factors that affect the optical performance of the converging element 03, it is not comprehensive enough to determine the optical performance of the converging element 03 only by testing the imaging quality of the converging element 03. Therefore, it is necessary not only to test the imaging quality of the converging element 03, but also to test other parameters of the converging element 03, such as the uniformity of the luminous flux on the target surface.

[0079] like Figure 1 As shown, the detection device in the related art can detect the imaging quality of the convergence element 03. If other parameters of the convergence element 03 are to be detected, the convergence element 03 needs to be installed on another detection device to detect the relevant parameters. However, when the convergence element 03 is transferred from one detection device to another detection device, the disassembly and assembly operations of the convergence element 03 are increased, which is not conducive to shortening the detection time. In addition, in the latter detection process, since the assembly position of the convergence element 03 is changed compared with the previous detection, the error caused by the inconsistent assembly position will affect the accuracy of the latter detection result, and further affect the detection result of the optical performance of the convergence element 03.

[0080] To this end, the embodiments of the present application provide a detection device and a detection method and a detection system, which can detect the imaging quality of the converging element and the uniformity of the luminous flux on the target surface in a set of detection equipment. In this way, the converging element does not need to change the assembly position in two detections, thereby solving the problem of low accuracy of the detection results of the optical performance of the converging element in the related art.

[0081] like Figure 2 , Figure 3 and Figure 4 As shown, Figure 2 is a top view of the detection system in the first embodiment of the present application, Figure 3 for Figure 2 The A-direction view of the detection system shown, Figure 4 for Figure 2 The schematic diagram of the processing system of the first detection device 3 in the detection system is shown. The detection system includes a light source 100 and a detection device.

[0082] The detection device comprises a carrier 1 , a light source bracket 21 , a converging element bracket 22 , a first detection device 3 and a second detection device 4 .

[0083] In some embodiments, Figure 2 and Figure 3 As shown, the carrier 1 includes a carrier 11 and a linear guide rail 12 disposed on the carrier 11. Of course, the carrier 1 is not limited to the above structure, and the carrier 1 can also be a carrier plate or the like.

[0084] like Figure 3As shown, the light source bracket 21 is disposed on the carrier 1 and is used to set the light source 100. In some embodiments, as Figure 2 and Figure 3 As shown, the light source 100 is a laser, but it is not limited thereto. The light source 100 may also be a light source 100 such as a spotlight that can emit a light beam to one side.

[0085] like Figure 3 As shown, the converging element bracket 22 is arranged on the carrier 1 and located on one side of the light source bracket 21 . The converging element bracket 22 is used to set the converging element 200 . The converging element 200 is used to converge the first light beam 110 emitted by the light source 100 toward one side of the converging element bracket 22 .

[0086] In some embodiments, Figure 2 and Figure 3 As shown, the converging element 200 is a lens, wherein the lens may be a free-form surface lens (such as an aspheric lens) or a spherical lens, which is not specifically limited here.

[0087] In some embodiments, Figure 2 and Figure 3 As shown, the light source bracket 21 and the converging element bracket 22 are both arranged on the linear guide rail 12 and arranged along a direction X parallel to the linear guide rail 12. The detection system further includes a first aperture diaphragm 300, and the detection device further includes a plurality of first diaphragm brackets 23 for setting the first aperture diaphragms 300, and the plurality of first diaphragm brackets 23 are arranged on the linear guide rail 12 and arranged along a direction X parallel to the linear guide rail 12; each first diaphragm bracket 23 is located on a side of the converging element bracket 22 away from the light source bracket 21.

[0088] When installing the light source 100 and the converging element 200, whether the light source 100 and the converging element 200 are properly installed can be determined by whether the first light beam 110 emitted by the light source 100 passes through multiple first aperture diaphragms 300 at the same time. The multiple first aperture diaphragms 300 are equivalent to a "ruler" of the optical path, which greatly facilitates the adjustment of the optical path.

[0089] In some embodiments, Figure 2 and Figure 3 As shown, the detection system further includes a light attenuator 400, a collimator 500 and a second aperture stop 600. The detection device further includes a light attenuator bracket 24 for setting the light attenuator 400, a collimator bracket 25 for setting the collimator 500, and a second stop bracket 26 for setting the second aperture stop 600; the light attenuator bracket 24 is arranged between the light source bracket 21 and the collimator bracket 25, and the second stop bracket 26 is arranged between the collimator bracket 25 and the converging element bracket 22.

[0090] By setting the optical attenuator 400, the light intensity of the first light beam 110 emitted by the light source 100 can be adjusted to meet the requirements of subsequent detection; by setting the collimator 500, the first light beam 110 can be shaped to form a parallel light beam or a nearly parallel light beam; by setting the second aperture diaphragm 600, the diameter of the first light beam 110 can be adjusted to control the first light beam 110 of a suitable diameter to be emitted to the converging element 200.

[0091] In some embodiments, Figure 2 and Figure 3 As shown, the optical attenuator 400 is an adjustable optical attenuator, for example, the optical attenuator 400 can be an optical attenuation plate, which has different transmittances along its circumference. The optical attenuation plate can be rotatably arranged on the optical attenuator bracket 24. Rotating the optical attenuation plate can make the first light beam 110 pass through areas with different transmittances on the optical attenuation plate, thereby adjusting the light intensity of the first light beam 110 to avoid the light intensity of the first light beam 110 being too small to facilitate subsequent detection, and also to avoid the light intensity of the first light beam 110 being too large to damage the components on the subsequent optical path.

[0092] In some embodiments, Figure 2 and Figure 3 As shown, the collimator 500 is a parallel light pipe.

[0093] In some embodiments, Figure 2 and Figure 3 As shown, the second aperture stop 600 is an aperture stop with a variable aperture, so that the diameter of the first light beam 110 can be flexibly adjusted.

[0094] In some embodiments, Figure 2 and Figure 3 As shown, an adjustment platform 27 is respectively provided between each of the light source bracket 21, the light attenuator bracket 24, the collimator bracket 25, the second aperture bracket 26, the converging element bracket 22 and the plurality of first aperture brackets 23 and the linear guide rail 12. The adjustment platform 27 is used to adjust each of the above-mentioned in a direction X parallel to the linear guide rail 12 and a direction perpendicular to the linear guide rail 12 (for example, Figure 2 and Figure 3 In this way, before installing the first detection device 3, by adjusting the adjustment platform 27, the first light beam 110 emitted by the light source 100 can pass through the light attenuator 400, the collimator 500, the first aperture stop 300, and the converging element 200, and then pass through multiple first aperture stops 300, so that the optical axis of the first light beam 110 is parallel to the linear guide 12, so as to meet the requirements of subsequent detection.

[0095] The adjustment platform 27 can be one of a two-axis optical fine-tuning platform, a three-axis optical fine-tuning platform, and a four-axis optical fine-tuning platform (with rotation adjustment), which can be determined according to actual adjustment requirements. The light source bracket 21, the light attenuator bracket 24, the collimator bracket 25, the second aperture bracket 26, the converging element bracket 22, and the first aperture bracket 23 can be a columnar structure, a plate structure, a frame structure, or a combination of the above two structures, which is not specifically limited here.

[0096] In some embodiments, Figure 2 and Figure 3 As shown, each first aperture bracket 23 is detachably connected to the linear guide rail 12. With such a design, after the optical path adjustment is completed, the first aperture bracket 23 is removed to make room for the linear guide rail 12 to facilitate the arrangement of other optical devices; at the same time, when the optical device is arranged at the rear side of the first aperture bracket 23, the first aperture bracket 23 is detachably connected to the linear guide rail 12 to avoid the first aperture bracket 23 from blocking the light beam, so as to ensure the normal operation of the optical device at the rear side.

[0097] Among them, Figure 2 and Figure 3 As shown, when an adjustment platform 27 is provided between the first aperture bracket 23 and the linear guide rail 12, the first aperture bracket 23 may be detachably connected to the adjustment platform 27, or the adjustment platform 27 may be detachably connected to the linear guide rail 12, which is not specifically limited here.

[0098] like Figure 4 and Figure 5 As shown, Figure 5 This is a schematic diagram of the first detection device 3 in some embodiments of the present application when detecting the diameter value of the focal spot, wherein the first detection device 3 is used to detect the diameter value of the focal spot; wherein the focal spot is a light spot formed by the outgoing light beam 111 on the focal plane 51 of the converging element 200, and the outgoing light beam 111 is the first light beam 110 after passing through the converging element 200.

[0099] like Figure 6 and Figure 7 As shown, Figure 6 This is a schematic diagram of the uniformity of the light flux of the second detection device 4 on the target surface 40 in some embodiments of the present application. Figure 7 for Figure 6 Schematic diagram of a processing system of the second detection device 4 in FIG. The second detection device 4 is used to detect the uniformity of the light flux on the target surface 40 ; wherein the target surface 40 is located on the optical path of the outgoing light beam 111 .

[0100] The detection equipment in the embodiment of the present application is provided with a first detection device 3, so that the diameter value of the focal spot can be detected by the first detection device 3, and then the imaging quality of the converging element 200 can be determined according to the diameter value of the focal spot, that is: if the diameter value of the focal spot is small, it means that the converging element 200 has a better converging ability for the first light beam 110, the surface processing accuracy of the converging element 200 is high, and the imaging quality of the converging element 200 is good; if the diameter value of the focal spot is large, it means that the converging element 200 has a poor converging ability for the first light beam 110, the surface processing accuracy of the converging element 200 is low, and the imaging quality of the converging element 200 is poor. By setting the first detection device 3 and the second detection device 4, the detection equipment can not only detect the diameter value of the focal spot, but also detect the uniformity of the luminous flux on the target surface 40. Since the detection of the diameter value of the focal spot and the uniformity of the luminous flux on the target surface 40 are completed on the same device, the assembly position of the converging element 200 does not need to be moved, which ensures the consistency of the assembly position of the converging element 200 during the detection of the diameter value of the focal spot and the uniformity of the luminous flux on the target surface 40, thereby facilitating improving the accuracy of the detection results.

[0101] In some embodiments, the first detection device 3 is further used to determine the imaging quality of the converging element 200 according to the diameter value of the focal spot. In this way, it is not necessary to manually determine the imaging quality of the converging element 200 according to the diameter value of the focal spot, which is conducive to improving the detection efficiency.

[0102] The structure of the first detection device 3 is not unique. In some embodiments, for example Figure 4 and Figure 5 As shown, the first detection device 3 includes a knife edge 31 , a driving device 32 , a first sensor 33 and a first processing device 34 .

[0103] The driving device 32 is connected to the blade 31 and is used to drive the blade 31 to move along a first direction (eg, Figure 5 ) and a second direction perpendicular to the optical axis 113 of the outgoing light beam 111 (e.g. Figure 5 The Y direction shown in FIG. 1 ) moves relative to the carrier 1 .

[0104] The first sensor 33 is disposed on the carrier 1 and is used to obtain a spot image 112 of the outgoing light beam 111. Figure 8 As shown, the spot image 112 includes a spot area 1121 .

[0105] Among them, Figure 5As shown, the first sensor 33 is a CMOS (Complementary Metal Oxide Semiconductor) detector, but it is not limited thereto. The first sensor 33 may also be a CCD (Charge Coupled Device) detector or the like.

[0106] like Figure 4 and Figure 5 As shown, the first processing device 34 is used to determine the diameter value of the light spot of the outgoing light beam 111 at the cutting position of the blade 31 according to the movement distance of the blade 31 between the moment when the light spot area 1121 begins to darken and the moment when it completely darkens, when the blade 31 cuts the outgoing light beam 111 along the second direction.

[0107] Among them, Figure 4 As shown, the first processing device 34 is a computer or device, such as a laptop computer. However, it is not limited thereto, and the first processing device 34 may also be a terminal device with image processing function, such as a mobile phone or a tablet computer.

[0108] When measuring the diameter of the focal spot, Figure 5 As shown, the driving device 32 drives the blade 31 to move to the position of the focal plane 51 of the converging element 200, and then the driving device 32 drives the blade 31 to cut the outgoing light beam 111 along the second direction. When the blade 31 does not cut the outgoing light beam 111, as shown in FIG. Figure 8 As shown in FIG. 1 , the spot area 1121 in the spot image 112 acquired by the first sensor 33 is brighter, and the energy of the spot area 1121 is the highest. As the blade 31 gradually cuts the outgoing light beam 111 along the second direction, the outgoing light beam 111 is gradually blocked by the blade 31. Fig. 9 As shown, the light spot area 1121 gradually darkens from one side to the other side ( Fig. 9 The light spot area 1121 shown in the figure gradually darkens from the left to the right. When the outgoing light beam 111 is completely blocked by the knife edge 31, the light spot area 1121 becomes completely dark. At this time, the energy of the light spot area 1121 is the smallest. Fig. 9 and Fig.11 As shown, the first processing device 34 can determine the diameter value of the focal spot according to the movement distance of the blade 31 from the moment T1 when the light spot area 1121 begins to darken to the moment T2 when it completely darkens.

[0109] In this embodiment, the first detection device 3 measures the diameter of the focal spot by cutting the outgoing light beam 111 with the blade 31, and can perform multiple measurements to obtain an average value to meet the accuracy of the measurement result. In addition, the structure of the first detection device 3 is relatively simple, and no expensive optical instrument is used, so that the cost of the first detection device 3 can be controlled, and the cost requirements of the general laboratory for measuring the diameter of the focal spot can be met.

[0110] like Figure 8 As shown, the spot area 1121 can be segmented and determined by the light intensity threshold method. Specifically, the first processing device 34 is used to obtain the light intensity distribution from the center to the edge of the spot image 112, and determine the area in the spot image 112 where the light intensity value is greater than the light intensity threshold as the spot area 1121. The light intensity threshold can be 1 / e of the maximum light intensity value in the spot image 112. 2 However, it is not limited thereto, and other values ​​may be selected according to actual conditions.

[0111] The spot area 1121 can also be segmented and determined by the grayscale threshold method: specifically, the first processing device 34 is used to obtain the grayscale value distribution of each pixel point from the center to the edge of the spot image 112, and determine the area formed by the pixels in the spot image 112 whose grayscale values ​​are greater than the grayscale threshold as the spot area 1121.

[0112] In some embodiments, the first processing device 34 is used to: determine the imaging quality of the converging element 200 according to the diameter value of the focal spot. Specifically, the first processing device 34 is used to: determine that the imaging quality of the converging element 200 is unqualified if the diameter value of the focal spot is greater than the diameter threshold; and determine that the imaging quality of the converging element 200 is qualified if the diameter value of the focal spot is less than or equal to the diameter threshold.

[0113] For example, the diameter threshold is 1 mm. If the diameter of the focal spot is 0.8 mm, the first processing device 34 determines that the imaging quality of the converging element 200 is qualified; if the diameter of the focal spot is 1.2 mm, the first processing device 34 determines that the imaging quality of the converging element 200 is unqualified.

[0114] The first processing device 34 determines the time T1 when the light starts to darken and the time T2 when the light completely darkens in different ways. In some embodiments, the time T1 when the light starts to darken and the time T2 when the light completely darkens can be determined by setting a threshold value of the sum of the grayscale values ​​of each pixel in the light spot area 1121, such as Fig. 9 and Fig.10aAs shown, when the outgoing light beam 111 is not blocked by the knife edge 31, the spot area 1121 is brighter, and the total grayscale value of each pixel in the spot area 1121 is the highest, and the total grayscale value is M. In the process of the outgoing light beam 111 being gradually blocked by the knife edge 31, the spot area 1121 gradually darkens from one side to the other, and then the total grayscale value gradually decreases from the highest to M. When the outgoing light beam 111 is completely blocked by the knife edge 31, the spot area 1121 completely darkens, and the total grayscale value decreases to a stable value and no longer changes significantly.

[0115] According to the change of the total gray value when the blade 31 cuts the outgoing light beam 111, the time when the light starts to darken T1 and the time when the light completely darkens T2 can be determined by reasonably setting the threshold of the total gray value. Fig. 9 and Fig.10a As shown, the first processing device 34 is used to: determine the moment when the sum of the grayscale values ​​of each pixel in the spot area 1121 decreases to a first preset value as the moment of beginning to darken, and determine the moment when the sum of the grayscale values ​​decreases to a second preset value as the moment of complete darkening.

[0116] The first preset value is less than the total gray value M when the blade 31 does not cut the outgoing light beam 111, that is, the first preset value is equal to λ1M, and the coefficient λ1 is less than 1. The range of λ1 can be (0.99-0.95), and of course, λ1 can also take a value other than (0.99-0.95) according to actual conditions, such as 0.93.

[0117] The second preset value is greater than zero and less than the first preset value, that is, the second preset value is equal to λ2M, and the coefficient λ1>λ2>0. The range of λ2 can be (0.05-0.1). Of course, λ2 can also take a value other than (0.05-0.1) according to actual conditions, such as 0.02.

[0118] In this embodiment, since the change in the sum of gray values ​​can accurately reflect the change in the brightness of pixels in a row or a column in the pixel array of the spot area 1121, the determination of time T1 and time T2 can be made more accurate by setting the threshold of the sum of gray values, thereby making the measurement of the movement distance of the blade 31 between time T1 and time T2 more accurate, and further making the measurement of the diameter value of the focal spot more accurate.

[0119] Of course, in addition to determining the time T1 and the time T2 by setting the threshold of the total gray value, the time T1 and the time T2 can also be determined by the change in the area of ​​the actual unblocked area in the spot area 1121, as follows: Fig. 9 and Fig.10bAs shown, the first processing device 34 is used to: determine the time when the area ratio decreases to the first threshold as the time T1; and determine the time when the area ratio decreases to the second threshold as the time T2.

[0120] The area ratio is the maximum area of ​​the unblocked area in the spot area 1121 and the area of ​​the spot area 1121, 1> first threshold> second threshold> 0. The maximum area of ​​the spot area 1121 specifically refers to the area value of the spot area 1121 when the blade 31 does not cut the outgoing light beam 111.

[0121] The first threshold value may be in the range of (0.99-0.95), and of course, may also be a value other than (0.99-0.95) according to actual conditions, such as 0.93. The second threshold value may be in the range of (0.05-0.1), and of course, may also be a value other than (0.05-0.1) according to actual conditions, such as 0.02.

[0122] In some embodiments, Figure 4 and Figure 5 As shown, the first processing device 34 is used to: according to the position information of the focal plane 51, control the driving device 32 to drive the blade 31 to move to the position of the focal plane 51, and then control the driving device 32 to drive the blade 31 to cut the outgoing light beam 111 along the second direction; Fig.11 As shown, the diameter value of the focal spot is determined according to the movement distance of the knife edge 31 between the moment T1 when the light spot area 1121 begins to darken and the moment T2 when it completely darkens.

[0123] In this embodiment, the driving device 32 drives the blade 31 to move to the position of the focal plane 51 and the blade 31 cuts the outgoing light beam 111 along the second direction, which are all controlled by the first processing device 34. In this way, there is no need to manually operate the driving device 32 to drive the blade 31 to move, which not only makes the operation of the first detection device 3 simpler, but also makes the movement accuracy of the blade 31 higher.

[0124] The position information of the focal plane 51 may be pre-stored in the first processing device 34, or may be obtained in the following manner. In some embodiments, Figure 5 and Fig.12 As shown, the first processing device 34 is used to: before the control driving device 32 drives the blade 31 to move to the position of the focal plane 51, perform the following steps: control the driving device 32 to drive the blade 31 to cut the outgoing light beam 111 along the second direction at the position of the first preset section 52; determine the first diameter value D1 of the light spot of the outgoing light beam 111 at the position of the first preset section 52 according to the movement distance of the blade 31 between the moment T1 when the light spot area 1121 begins to darken and the moment T2 when it is completely dark.

[0125] The control driving device 32 drives the blade 31 to cut the outgoing light beam 111 along the second direction at the position of the second preset section 53; the second diameter value D2 of the light spot of the outgoing light beam 111 at the position of the second preset section 53 is determined according to the movement distance of the blade 31 between the moment T1 when the light spot area 1121 begins to darken and the moment T2 when it is completely darkened; wherein the first preset section 52 and the second preset section 53 are both perpendicular to the first direction, that is, the first preset section 52 and the second preset section 53 are both perpendicular to the optical axis 113 of the outgoing light beam 111.

[0126] The position information of the focal plane 51 is determined according to the first diameter value D1 , the second diameter value D2 , and the distance value d between the first preset cross section 52 and the second preset cross section 53 .

[0127] By obtaining the position information of the focal plane 51 in the above manner, the number of times the blade 31 cuts the outgoing light beam 111 can be greatly reduced. The blade 31 only needs to cut the outgoing light beam 111 twice to obtain the position information of the focal plane 51. This can greatly shorten the time for determining the position information of the focal plane 51, thereby facilitating the improvement of the detection efficiency of the diameter value of the focal spot.

[0128] The position information of the focal plane 51 can be determined in the following three ways:

[0129] The first method: Fig.12 As shown, the first preset section 52 and the second preset section 53 are both set at the front focal position of the converging element 200, and the first preset section 52 is located on the side of the second preset section 53 close to the converging element 200. According to the principle of similar triangles, it can be concluded that: the distance d1 between the focal plane 51 and the first preset section 52 = D1d / (D1-D2). Since the position of the first preset section 52 is preset, the position information of the focal plane 51 can be obtained according to the position of the first preset section 52 and the distance d1 between the focal plane 51 and the first preset section 52.

[0130] Among them, since the first preset cross section 52 and the second preset cross section 53 are both set at the front focal position of the converging element 200, Figure 5 and Figure 8 As shown, in the process that the blade 31 cuts the outgoing light beam 111 along the second direction, the spot area 1121 of the spot image 112 acquired by the first sensor 33 gradually darkens from the left side to the right side.

[0131] The second method: Fig.13As shown, the first preset section 52 is set at the front focus position of the converging element 200, and the second preset section 53 is set at the rear focus position of the converging element 200. According to the principle of similar triangles, it can be concluded that the distance d1 between the focal plane 51 and the first preset section 52 is equal to D1d / (D1+D2), so the position information of the focal plane 51 can be obtained according to the position of the first preset section 52 and the distance d1 between the focal plane 51 and the first preset section 52.

[0132] The third method: Fig.14 As shown, the first preset section 52 and the second preset section 53 are both set at the post-focus position of the converging element 200, and the first preset section 52 is located on the side of the second preset section 53 close to the converging element 200. According to the principle of similar triangles, it can be concluded that: the distance d1 between the focal plane 51 and the first preset section 52 = D1d / (D2-D1), so according to the position of the first preset section 52 and the distance d1 between the focal plane 51 and the first preset section 52, the position information of the focal plane 51 can be obtained.

[0133] Among them, since the first preset cross section 52 and the second preset cross section 53 are both set at the post-focus position of the converging element 200, Figure 5 and Figure 8 As shown, in the process that the blade 31 cuts the outgoing light beam 111 along the second direction, the spot area 1121 of the spot image 112 acquired by the first sensor 33 gradually darkens from the right side to the left side.

[0134] Of course, the position information of the focal plane 51 may also be acquired according to the position of the second preset cross section 53 and the distance d2 between the focal plane 51 and the second preset cross section 53 .

[0135] It should be understood that: for the converging element 200 to be detected, the approximate position of its focal plane 51 is known. According to the approximate position of the focal plane 51, the first preset section 52 and the second preset section 53 can be set at the pre-focus position and the post-focus position. By using the above method for determining the position information of the focal plane 51, the precise position of the focal plane 51 can be further obtained.

[0136] The structure of the driving device 32 is not unique. In some embodiments, for example Figure 5 As shown, the driving device 32 can be a two-dimensional motion platform. Specifically, the driving device 32 includes a base 321, a first servo motor, a second servo motor, a first displacement detection component, a second displacement detection component, a first motion table 322 arranged on the base 321, and a second motion table 323 arranged on the first motion table 322, and the blade 31 is fixed on the second motion table 323.

[0137] The first servo motor is disposed on the base 321 and connected to the first moving platform 322 through the first transmission mechanism. The first servo motor can drive the first moving platform 322 to move relative to the base 321 along the second direction through the first transmission mechanism. The second servo motor is disposed on the first moving platform 322 and connected to the second moving platform 323 through the second transmission mechanism. The second servo motor can drive the second moving platform 323 to move relative to the first moving platform 322 along the first direction through the second transmission mechanism. The first transmission mechanism and the second transmission mechanism can both be screw nut transmission mechanisms.

[0138] The first displacement detection component is used to detect the first displacement of the first moving platform 322 relative to the base 321 along the second direction, and the second displacement detection component is used to detect the second displacement of the second moving platform 323 relative to the first moving platform 322 along the first direction. Both the first displacement detection component and the second displacement detection component can be grating rulers.

[0139] The first processing device 34 is connected to the first servo motor, the second servo motor, the first displacement detection component, and the second displacement detection component. The first processing device 34 is used to control the speed, start and stop of the first servo motor and the second servo motor. The first processing device 34 can obtain the first displacement detected by the first displacement detection component and the second displacement detected by the second displacement detection component.

[0140] Of course, in addition to being a two-dimensional motion platform, the driving device 32 can also be a three-dimensional motion platform, a manipulator, etc., which is not specifically limited here.

[0141] In some embodiments, Figure 5 As shown, the first sensor 33 includes a first optical platform 331 disposed on the carrier 1, and a first sensor body 332 disposed on the first optical platform 331. The first optical platform 331 is used to adjust the angle between the orientation of the first light entrance of the first sensor body 332 and the first direction. By adjusting the first optical platform 331, the orientation of the first light entrance of the first sensor body 332 can be made parallel to the first direction, ensuring that the outgoing light beam 111 can evenly enter the first sensor body 332, so that the brightness of the spot area 1121 of the spot image 112 acquired by the first sensor body 332 is relatively uniform, thereby ensuring the accuracy of the focal spot value detection.

[0142] In some embodiments, Figure 3 and Figure 5 As shown, the first optical platform 331 is used to adjust the first sensor body 332 in the first direction and in a direction perpendicular to the first direction (for example Figure 5The position of the optical beam 111 relative to the carrier 1 in the Y direction in the first optical platform 331 can be adjusted to make the optical axis 113 of the outgoing light beam 111 coincide with the central axis of the first light inlet of the first sensor body 332, so as to ensure that the outgoing light beam 111 can enter the first sensor body 332 uniformly, so that the brightness of the spot area 1121 of the spot image 112 acquired by the first sensor body 332 is relatively uniform, thereby ensuring the accuracy of the focal spot value detection.

[0143] Among them, Figure 3 and Figure 5 As shown, the first optical platform 331 can be a four-axis optical displacement platform, that is, the first optical platform 331 can adjust the first sensor body 332 to move in the first direction, the second direction and the height direction of the first optical platform 331, and can also adjust the first sensor body 332 to rotate around the vertical axis, and the vertical axis is parallel to the height direction of the first optical platform 331.

[0144] In some embodiments, Figure 5 and Figure 6 As shown, the target surface 40 is located on the side of the first sensor 33 away from the convergence element bracket 22, and the first sensor 33 is detachably arranged on the carrier 1. Figure 6 As shown, when detecting the uniformity of the luminous flux on the target surface 40 , the first sensor 33 can be detached from the carrier 1 , so that the first sensor 33 can be prevented from blocking the outgoing light beam 111 , thereby ensuring the normal detection of the uniformity of the luminous flux on the target surface 40 .

[0145] In some embodiments, Figure 5 and Figure 6 As shown, the target surface 40 is located on the side of the first sensor 33 away from the convergence element bracket 22, and the drive device 32 is detachably connected to the carrier 1. Figure 6 As shown, when detecting the uniformity of the luminous flux on the target surface 40 , the driving device 32 can be detached from the carrier 1 , so as to avoid the driving beam blocking the outgoing beam 111 , thereby ensuring the normal detection of the uniformity of the luminous flux on the target surface 40 .

[0146] In some embodiments, Figure 5 As shown, the first sensor 33 is disposed on the linear guide rail 12 , the driving device 32 is disposed on the carrier 11 and the driving device 32 is located at one side of the linear guide rail 12 .

[0147] In addition to the above-mentioned structure, the first detection device 3 in the embodiment of the present application can also be a beam analyzer, which is arranged on the linear guide 12 of the carrier 1 and can move relative to the linear guide 12 along a direction X parallel to the linear guide 12. During measurement, by moving the beam analyzer along the direction X parallel to the linear guide 12, the beam analyzer is used to obtain a change curve of the spot diameter value of the outgoing light beam 111 from the pre-focus position to the post-focus position, and determine the minimum value of the spot diameter value as the diameter value of the focal spot.

[0148] The second detection device 4 has a non-unique structure. Figure 6 , Figure 7 and Fig.15 A first structure of the second detection device 4 is shown, Fig.15 for Figure 6 In the embodiment, the second detection device 4 includes a fixing frame 41, a second sensor 42 and a second processing device 43.

[0149] The fixing frame 41 is arranged on the carrier 1, and the second sensor 42 is arranged on the fixing frame 41. The position of the second sensor 42 relative to the carrier 1 can be adjusted in the longitudinal direction Z and the transverse direction Y of the fixing frame 41; the second sensor 42 is used to obtain the optical parameter values ​​at multiple detection points on the target surface 40.

[0150] The second sensor 42 may be a CMOS detector, but is not limited thereto. The second sensor 42 may also be a CCD detector or the like.

[0151] The second processing device 43 is used to determine the uniformity of the light flux on the target surface 40 according to the optical parameter values ​​at multiple detection points. The optical parameter value includes one of the illumination value, the light intensity value and the brightness value. The target surface 40 is located at the light entrance of the second sensor 42 and is parallel to the horizontal direction Y and the vertical direction Z. Figure 6 As shown, the target plane 40 is perpendicular or approximately perpendicular to the optical axis 113 of the outgoing light beam 111 (for example, the deviation is within 2 degrees).

[0152] Among them, Figure 7 As shown, the second processing device 43 can be a computer device, such as a laptop computer. However, it is not limited thereto, and the second processing device 43 can also be a terminal device with image processing function, such as a mobile phone, a tablet computer, etc. The second processing device 43 and the first processing device 34 can be the same processing device, or different processing devices, which is not specifically limited here.

[0153] In this embodiment, since the position of the second sensor 42 relative to the carrier 1 can be adjusted in the longitudinal direction Z and the transverse direction Y of the fixing frame 41, the second sensor 42 can sequentially obtain the optical parameter values ​​of multiple detection points on the target surface 40 by adjusting the position of the second sensor 42 relative to the carrier 1, and then the second processing device 43 can determine the uniformity of the light flux on the target surface 40 according to the optical parameter values ​​at the multiple detection points. Since the second sensor 42 is arranged on the fixing frame 41, it is possible to avoid the second sensor 42 occupying the space outside the fixing frame 41, so that the structure of the second detection device 4 is more compact and occupies less space on the carrier 1.

[0154] In some embodiments, the second processing device 43 is used to determine the uniformity of the luminous flux on the target surface 40 according to the ratio of the maximum value to the minimum value of the optical parameter values ​​at multiple detection points. The larger the ratio, the worse the uniformity of the luminous flux; the smaller the ratio, the better the uniformity of the luminous flux.

[0155] The second processing device 43 is further used to: if the ratio is greater than the first ratio threshold, determine that the uniformity of the luminous flux on the target surface 40 is unqualified; if the ratio is less than or equal to the first ratio threshold, determine that the uniformity of the luminous flux on the target surface 40 is unqualified.

[0156] In some embodiments, the second processing device 43 is used to determine the uniformity of the luminous flux on the target surface 40 according to the ratio of the minimum value to the maximum value of the optical parameter values ​​at multiple detection points. The smaller the ratio, the worse the uniformity of the luminous flux; the larger the ratio, the better the uniformity of the luminous flux.

[0157] The second processing device 43 is further used to: if the ratio is greater than or equal to the second ratio threshold, determine that the uniformity of the luminous flux on the target surface 40 is qualified; if the ratio is less than the second ratio threshold, determine that the uniformity of the luminous flux on the target surface 40 is unqualified.

[0158] In some embodiments, the second processing device 43 is used to determine the uniformity of the luminous flux on the target surface 40 according to the difference between the maximum value and the minimum value of the optical parameter values ​​at multiple detection points. The smaller the difference, the better the uniformity of the luminous flux; the larger the difference, the worse the uniformity of the luminous flux.

[0159] The second processing device 43 is further used to: if the difference is greater than the difference threshold, determine that the uniformity of the luminous flux on the target surface 40 is unqualified; if the difference is less than or equal to the difference threshold, determine that the uniformity of the luminous flux on the target surface 40 is qualified.

[0160] The structure of the fixing frame 41 is not unique. In some embodiments, for example Fig.15As shown, the fixed frame 41 includes a vertical frame 411 arranged on the carrier 1, and a horizontal frame 412 arranged on the vertical frame 411, the vertical frame 411 extends along the longitudinal direction Z, and the horizontal frame 412 extends along the transverse direction Y; the position of the horizontal frame 412 relative to the vertical frame 411 in the longitudinal direction Z is adjustable, the second sensor 42 is arranged on the horizontal frame 412, and the position of the second sensor 42 relative to the horizontal frame 412 in the transverse direction Y is adjustable.

[0161] like Fig.15 As shown, when detecting the uniformity of the luminous flux on the target surface 40, the horizontal frame 412 is adjusted to the first height position on the vertical frame 411 along the longitudinal direction Z, and then the position of the second sensor 42 relative to the horizontal frame 412 is adjusted along the transverse direction Y to sequentially obtain the optical parameter values ​​at the detection point a and the detection point b. The horizontal frame 412 is adjusted to the second height position on the vertical frame 411 along the longitudinal direction Z, and then the position of the second sensor 42 relative to the horizontal frame 412 is adjusted along the transverse direction Y to sequentially obtain the optical parameter values ​​at the detection point c and the detection point d. The horizontal frame 412 is adjusted to the third height position on the vertical frame 411 along the longitudinal direction Z, and then the position of the second sensor 42 relative to the horizontal frame 412 is adjusted along the transverse direction Y to sequentially obtain the optical parameter values ​​at the detection point e and the detection point f.

[0162] In this embodiment, since the position of the horizontal frame 412 relative to the vertical frame 411 in the longitudinal direction Z is adjustable, the position of the second sensor 42 relative to the horizontal frame 412 in the transverse direction Y is adjustable, the optical parameter values ​​of multiple detection points arranged in an array on the target surface 40 can be obtained by adjusting the position of the horizontal frame 412 and the position of the second sensor 42 respectively. In this way, the position distribution of the detection points reached by the second sensor 42 can be more uniform, which is beneficial to improve the accuracy of luminous flux detection on the target surface 40.

[0163] The first adjustment structure 413 between the vertical frame 411 and the horizontal frame 412 is not unique. In some embodiments, such as Fig.15 As shown, the first adjustment structure 413 includes a connecting sleeve 4131 fixed on the horizontal frame 412, and a plurality of first pin holes arranged on the vertical frame 411 at intervals along the longitudinal direction Z. The vertical frame 411 is a columnar structure, and the connecting sleeve 4131 is sleeved on the vertical frame 411. A second pin hole is provided on the sleeve wall of the connecting sleeve 4131. The connecting sleeve 4131 is connected to the vertical frame 411 by means of pin shafts passing through the first pin holes and the second pin holes.

[0164] In other embodiments, the first adjustment structure 413 includes a connecting sleeve 4131 fixed on the horizontal frame 412, and a plurality of first threaded holes arranged on the vertical frame 411 at intervals along the longitudinal direction Z. The vertical frame 411 is a columnar structure, and the connecting sleeve 4131 is sleeved on the vertical frame 411. A through hole is provided on the sleeve wall of the connecting sleeve 4131. The connecting sleeve 4131 is connected to the vertical frame 411 by a first fastener passing through the through hole and the first threaded hole.

[0165] In some embodiments, Figure 6 and Fig.16 As shown, Fig.16 It is a top view of the detection system in the second embodiment of the present application. Along the fourth direction X, the position of the fixing frame 41 relative to the carrier 1 can be adjusted, and the fourth direction X is perpendicular to both the transverse direction Y and the longitudinal direction Z. By adjusting the position of the fixing frame 41 relative to the carrier 1 in the fourth direction X, the target surface 40 can receive the complete light spot of the outgoing light beam 111, so that the position distribution of the detection point of the second sensor 42 can be more comprehensive, thereby making the detection of the uniformity of the light flux on the target surface 40 more accurate.

[0166] The second adjustment structure 45 between the fixing frame 41 and the carrier 1 is not unique. In some embodiments, for example Fig.15 As shown, the second adjustment structure 45 includes a guide groove provided on the linear guide rail 12 and an adjustment block 451 provided at the bottom of the stand 411, the linear guide rail 12 and the guide groove both extend along the fourth direction X, and the adjustment block 451 is slidably matched with the guide groove. In other embodiments, the second adjustment structure 45 includes a plurality of third threaded holes provided on the linear guide rail 12 of the carrier 1 at intervals along the fourth direction X, and the stand 411 is connected to the third threaded holes through a third fastener.

[0167] The number of the stand 411 can be one or two. In some embodiments, Fig.15 As shown, there is one vertical frame 411, and the middle portion of the horizontal frame 412 is connected to the vertical frame 411 through a first adjustment structure 413. In other embodiments, such as Fig.16 and Fig.17 As shown, Fig.17 for Fig.16 Schematic diagram of the structure of the fixing frame 41 of the second detection device 4 in the detection system. There are two vertical frames 411, both of which are arranged on the carrier 1 and spaced apart along the horizontal direction Y, and the two ends of the horizontal frame 412 are respectively connected to the vertical frames 411 through the first adjustment structure 413. By arranging the horizontal frame 412 on the two vertical frames 411, the vertical frames 411 can well support the horizontal frame 412 to prevent the horizontal frame 412 from tilting and deforming.

[0168] like Fig.17As shown, when detecting the uniformity of the luminous flux on the target surface 40, the horizontal frame 412 is adjusted to the first height position on the vertical frame 411 along the longitudinal direction Z, and then the position of the second sensor 42 relative to the horizontal frame 412 is adjusted along the transverse direction Y to sequentially obtain the optical parameter values ​​at the detection point a, the detection point b, and the detection point c. The horizontal frame 412 is adjusted to the second height position on the vertical frame 411 along the longitudinal direction Z, and then the position of the second sensor 42 relative to the horizontal frame 412 is adjusted along the transverse direction Y to sequentially obtain the optical parameter values ​​at the detection point d, the detection point e, and the detection point f. The horizontal frame 412 is adjusted to the third height position on the vertical frame 411 along the longitudinal direction Z, and then the position of the second sensor 42 relative to the horizontal frame 412 is adjusted along the transverse direction Y to sequentially obtain the optical parameter values ​​at the detection point g, the detection point h, and the detection point i.

[0169] In some embodiments, Fig.17 As shown, the two vertical frames 411 are connected at the bottom (close to the end of the carrier 1) by a connecting frame 414. Such a design can play a role of fixed support for the two vertical frames 411, and when the horizontal frame 412 moves along the longitudinal direction Z relative to the two vertical frames 411, the relative deformation between the two vertical frames 411 can be reduced.

[0170] Among them, Fig.16 and Fig.17 As shown, three linear guides 12 are provided, the three linear guides 12 are parallel and spaced apart along the horizontal direction Y, and the light source bracket 21 and the converging element bracket 22 are both provided on the middle linear guide 12. The two vertical frames 411 are respectively connected to the linear guides 12 located on both sides through the second adjustment structure 45. The middle part of the connecting frame 414 is connected to the linear guide 12 located in the middle through the second adjustment structure 45.

[0171] The third adjustment structure 44 between the second sensor 42 and the cross frame 412 is not unique. In some embodiments, the third adjustment structure 44 includes a plurality of second threaded holes arranged on the cross frame 412 at intervals along the horizontal direction Y, and the second sensor 42 is connected to the second threaded holes through a second fastener. In other embodiments, the third adjustment structure 44 includes a slide rail arranged on the cross frame 412 and a slider arranged on the second sensor 42, the slide rail extends along the horizontal direction Y, and the slider is provided with a slide groove, and the slide groove and the slide rail are slidably matched.

[0172] In some embodiments, Fig.16 and Fig.17As shown, the second sensor 42 includes a second optical platform 421 disposed on the fixing frame 41, and a second sensor body 422 disposed on the second optical platform 421 and having a second light entrance K. The second optical platform 421 is used to adjust the angle between the orientation of the second light entrance K of the second sensor body 422 and the fourth direction X. By adjusting the second optical platform 421, the orientation of the second light entrance K of the second sensor body 422 can be made parallel to the fourth direction X, that is, the center of the light entrance K of the second sensor body 422 coincides with the position of the detection point on the target surface 40, so that the second sensor body 422 can accurately obtain the optical parameter value at the position of the second light entrance K of the second sensor body 422, thereby making the detection of the uniformity of the light flux on the target surface 40 more accurate.

[0173] In addition to being designed as Fig.14 and Fig.17 In addition to the structure shown, the fixing frame 41 can also be designed as a plate-like structure, and a plurality of mounting portions for mounting the second sensor 42 are provided on a side plate surface of the fixing frame 41 close to the convergence element bracket 22. The mounting portions are arranged in an array, such as a 3×3 array, and the second sensor 42 is detachably connected to the mounting portions. By installing the second sensor 42 at different mounting portions, the second sensor 42 can obtain optical parameter values ​​at multiple detection points. In some embodiments, the mounting portion is a threaded hole, and the second sensor 42 is connected to the mounting portion by a fastener. In other embodiments, the mounting portion is a clamping hole, and the mounting portion is detachably clamped with a buckle provided on the second sensor 42.

[0174] Figure 18 to Figure 21 A second structure of the second detection device 4 is shown. Fig.18 is a top view of the detection system in the third embodiment of the present application, Fig.19 for Fig.18 The C-direction view of the detection system shown, Fig. 20 for Fig.18 The schematic diagram of the processing system of the second detection device 4 in the detection system shown, Fig.21 for Fig.18 The schematic diagram of the detection system shown is a schematic diagram of the uniformity of the light flux of the detection target surface 40. In this embodiment, the second detection device 4 includes a reflector 46, a second sensor 42 and a second processing device 43.

[0175] The reflector 46 is disposed on the carrier 1, and the reflector 46 has a reflective surface, and the reflective surface is the target surface 40. Fig.18 and Fig.19 As shown, the reflector 46 may be a diffuse reflector, such as a whiteboard; but the present invention is not limited thereto, and the reflector 46 may also be a specular reflector.

[0176] The second sensor 42 is used to obtain optical parameter values ​​at multiple detection points on the target surface 40; wherein the optical parameter values ​​include one of illumination values, light intensity values ​​and brightness values; the second processing device 43 is used to determine the uniformity of the luminous flux on the target surface 40 based on the optical parameter values ​​at multiple detection points.

[0177] In this embodiment, by providing the reflector 46, the outgoing light beam 111 can be distributed in a larger space around the reflector 46 after being reflected by the reflective surface, thereby providing a more sufficient setting space for the second sensor 42 and increasing the flexibility of the position setting of the second sensor 42, such as Fig.18 As shown, the second sensor 42 can be disposed on any of the two opposite sides of the linear guide rail 12 along the width direction Y according to actual needs.

[0178] In some embodiments, Fig.21 As shown, the second sensor 42 includes a third optical platform 423 disposed on the carrier 1, and an imaging luminance meter 424 disposed on the third optical platform 423. The third optical platform 423 is used to adjust the angle between the lens direction N of the imaging luminance meter 424 and the reflective surface.

[0179] By adjusting the angle between the lens direction of the imaging luminance meter 424 and the reflecting surface through the third optical platform 423, the light spot formed by the outgoing light beam 111 on the reflecting surface can be located within the field of view angle of the imaging luminance meter 424, so that the imaging luminance meter 424 can obtain the image of the complete light spot of the outgoing light beam 111, so that the distribution of the positions of the detection points can be made more comprehensive, thereby making the detection of the uniformity of the luminous flux on the target surface 40 more accurate.

[0180] Among them, the imaging luminance meter 424 can obtain the brightness distribution image of the light spot on the reflecting surface and transmit the brightness distribution image to the second processing device 43. The second processing device 43 can obtain the optical parameter values ​​(brightness values) of multiple detection points on the brightness distribution image based on the brightness distribution image, and the uniformity of the luminous flux on the target surface 40 can be determined based on the optical parameter values ​​of the multiple detection points.

[0181] In some embodiments, Fig.21 As shown, the position of the reflector 46 relative to the carrier 1 is adjustable along the direction X perpendicular to the reflective surface. By adjusting the position of the reflector 46 relative to the carrier 1 in the direction X perpendicular to the reflective surface, the reflective surface can receive the complete light spot of the outgoing light beam 111, so that the position distribution of the detection point of the second sensor 42 can be more comprehensive, thereby making the detection of the uniformity of the light flux on the target surface 40 more accurate.

[0182] The fourth adjustment structure 47 between the reflector 46 and the carrier 1 is not unique. In some embodiments, for example Fig.19 As shown, the fourth adjustment structure 47 includes a slide seat 471 disposed at the bottom of the reflector 46 . The slide seat 471 is provided with a groove, and the groove is slidably matched with the linear guide rail 12 of the carrier 1 .

[0183] Among them, Fig.19 As shown, a mounting post 48 is disposed on the slide seat 471 , and the reflective member 46 is disposed on the mounting post 48 , so that the mounting post 48 plays a role of fixing and supporting the reflective member 46 , thereby reducing deformation of the reflective member 46 .

[0184] In other embodiments, the fourth adjustment structure 47 is disposed on a plurality of fourth threaded holes on the linear guide rail 12 of the carrier 1, the plurality of fourth threaded holes are spaced apart in a direction parallel to the linear guide rail 12, and the reflector 46 is connected to the fourth threaded holes via a fourth fastener.

[0185] like Fig. 22 and Fig.23 As shown, Fig. 22 Schematic diagram of the first detection device 3 detecting the diameter value of the focal spot in the detection system in the fourth embodiment of the present application, Fig.23 FIG. 4 is a schematic diagram of the second detection device 4 in the detection system of the fourth embodiment of the present application detecting the uniformity of the light flux on the target surface 40. Figure 2 to Figure 21 The main difference between the structures of the detection systems shown is that the types of the converging elements 200 are different, as described below:

[0186] The converging element 200 is a curved reflector, the optical axis of which is arranged at an acute angle to the arrangement direction X of the light source bracket 21 and the converging element bracket 22 , so that the optical axis 113 of the outgoing light beam 111 is arranged at an acute angle to the arrangement direction X.

[0187] The reflecting surface of the curved reflector may be a spherical surface or a free-form surface (such as an aspherical surface), which is not specifically limited here.

[0188] In some embodiments, Fig. 22 As shown, the light source bracket 21 and the converging element bracket 22 are arranged on the linear guide rail 12, and the first detection device 3 and the second detection device 4 are arranged on the carrier 11. For example, the driving device 32 and the first sensor 33 of the first detection device 3, and the reflecting part 46 and the second sensor 42 of the second detection device 4 are all arranged on the carrier 11 and are located on the same side of the linear guide rail 12.

[0189] As for the specific structure of the first detection device 3, the specific structure of the second detection device 4, the arrangement of other optical devices on the linear guide rail 12, etc., please refer to Figure 2 to Figure 21 The specific structure of the detection system shown is set up and will not be repeated here.

[0190] like Fig.24 and Fig.25 As shown, Fig.24 is a schematic diagram of a detection system in a fifth embodiment of the present application, Fig.25 for Fig.24 The detection system shown is a D-direction view after the drive device 32, the reflector 46 and the second sensor 42 are removed. The structure of the detection system in the fifth embodiment is similar to that in the embodiment of FIG. Figure 2 to Figure 21 The main difference in the structure of the detection system shown is that a beam splitter 700 is added, as described below:

[0191] The detection system further includes a beam splitter 700 (also called a spectroscope); wherein the beam splitter 700 may be a plane beam splitter 700 or a spectroscope, such as Fig.24 The polarizing beam splitter (PBS) shown is not specifically limited herein.

[0192] The detection device also includes a beam splitter bracket 28 for setting the beam splitter 700. Along the arrangement direction X of the light source bracket 21 and the converging element bracket 22, the beam splitter bracket 28 is arranged between the first sensor 33 and the converging element bracket 22. In the third direction Y, the target surface 40 is located on one side of the beam splitter bracket 28, that is, the target surface 40 and the beam splitter bracket 28 are arranged along the third direction Y, wherein the third direction Y is perpendicular to the arrangement direction X.

[0193] The beam splitter bracket 28 may be a columnar structure, a plate structure, a frame structure, or a combination of the two structures, depending on the shape of the beam splitter 700 .

[0194] The outgoing light beam 111 includes a first sub-beam 116 passing through the beam splitter 700 and a second sub-beam 114 reflected by the beam splitter 700. The first sensor 33 is located on the optical path of the first sub-beam 116, and the target plane 40 is located on the optical path of the second sub-beam 114. The target plane 40 is perpendicular or approximately perpendicular to the optical axis 1141 of the second sub-beam 114 (for example, the deviation is within 2 degrees).

[0195] The outgoing light beam 111 is split into a first sub-beam 116 and a second sub-beam 114 by a beam splitter 700, so that the positions of the first sensor 33 and the target surface 40 can be staggered, avoiding the first sensor 33 from blocking the outgoing light beam 111 and affecting the target surface 40 from receiving the complete light spot of the outgoing light beam 111, thereby reducing the interference between the first detection device 3 and the second detection device 4. Then the first detection device 3 and the second detection device 4 can perform detection at the same time, which is beneficial to improving the detection efficiency of the detection equipment.

[0196] In some embodiments, Fig.24 As shown, the optical axis 1161 of the first sub-beam 116 is perpendicular to the optical axis 1141 of the second sub-beam 114. However, this is not limited thereto, and the optical axis 1161 of the first sub-beam 116 and the optical axis 1141 of the second sub-beam 114 may also be arranged at an acute angle.

[0197] In some embodiments, Fig.24 and Fig.25 As shown, the light source bracket 21 , the converging element bracket 22 , the beam splitter bracket 28 and the first sensor 33 are all arranged on the linear guide rail 12 of the carrier 1 .

[0198] The first sensor 33 and the target surface 40 may also be arranged in opposite positions, that is, along the arrangement direction, the beam splitter bracket 28 is arranged between the target surface 40 and the converging element bracket 22, along the third direction Y, the first sensor 33 is located on one side of the beam splitter bracket 28, the target surface 40 is located on the optical path of the first sub-beam 116, and the first sensor 33 is located on the optical path of the second sub-beam 114. The target surface 40 is perpendicular or approximately perpendicular to the optical axis 1161 of the first sub-beam 116 (for example, the deviation is within 2 degrees).

[0199] In some embodiments, Fig.24 and Fig.25 As shown, an adjustment platform 27 is provided between the beam splitter support 28 and the linear guide rail 12. By providing the adjustment platform 27, the beam splitter 700 can be accurately located at a set position, thereby reducing the optical path position deviation of the first sub-beam 116 and the second sub-beam 114.

[0200] As for the specific structure of the first detection device 3, the specific structure of the second detection device 4, the arrangement of other optical devices on the linear guide rail 12, etc., please refer to Figure 2 to Figure 21 The specific structure of the detection system shown is set up and will not be repeated here.

[0201] Below Figure 2 and Figure 3 The detection system shown in is used as an example to introduce the installation process of the optical components of the detection system in the embodiment of the present application:

[0202] The first aperture diaphragms 300 are placed on the plurality of first diaphragm holders 23 , respectively; the light source 100 is placed on the light source holder 21 ; and the light attenuator 400 is placed on the light attenuator holder 24 . The light attenuator 400 is an adjustable light attenuator.

[0203] The position of the light source 100 in the width direction Y of the linear guide 12 is adjusted by the adjustment platform 27 at the bottom of the light source bracket 21, and the inclination angle of the light outlet of the light source 100 relative to the linear guide 12 is adjusted. At the same time, the position of the first aperture diaphragm 300 relative to the linear guide 12 is adjusted by the adjustment platform 27 at the bottom of the first diaphragm bracket 23, so that the first light beam 110 emitted by the light source 100 passes through the light attenuator 400 and the plurality of first aperture diaphragms 300 at the same time. When the first light beam 110 passes through the plurality of first aperture diaphragms 300 at the same time, it means that the light outlet of the light source 100 and the optical axes of the plurality of first aperture diaphragms 300 are collinear, and the optical axis of the first light beam 110 emitted by the light source 100 is parallel to the linear guide 12.

[0204] A second aperture stop 600 is placed on the second aperture stop bracket 26. The second aperture stop 600 is a variable aperture stop. The aperture size of the second aperture stop 600 is adjusted (in this case, the aperture of the second aperture stop 600 is reduced), and the position of the second aperture stop 600 is adjusted through the adjustment platform 27 at the bottom of the second aperture stop bracket 26, so that the first light beam 110 can pass through the second aperture stop 600.

[0205] A collimator 500 is disposed on the collimator bracket 25, and the position of the collimator 500 is adjusted by the adjustment platform 27 at the bottom of the collimator bracket 25, and the intensity of the first light beam 110 is adjusted by the optical attenuator 400, so that the first light beam 110 is at a suitable intensity for easy observation, and the first light beam 110 passes through multiple first aperture diaphragms 300 at the same time.

[0206] The converging element 200 is placed on the converging element support 22 , and the position of the converging element 200 is adjusted through the adjustment platform 27 at the bottom of the converging element 200 , so that the first light beam 110 passes through the plurality of first aperture stops 300 .

[0207] A fixing frame 41 is placed on the linear guide 12, and the position of the fixing frame 41 in a direction parallel to the linear guide 12 is adjusted according to the position of the converging element 200 to ensure that the target surface 40 can receive a complete light spot of the outgoing light beam 111 (the first light beam 110 after passing through the converging element 200). A second optical platform 421 is set on the fixing frame 41, and then a second sensor body 422 is fixed on the second optical platform 421. The angle between the direction of the second light entrance K of the second sensor body 422 and the fourth direction X is adjusted by the second optical platform 421, so that the direction of the second light entrance K of the second sensor 42 is parallel to the fourth direction X, and then the second sensor body 422 is connected to the second processing device 43.

[0208] A first optical platform 331 is arranged on the linear guide rail 12 between the converging element 200 and the first aperture stop 300, and then a first sensor body 332 is fixedly arranged on the first optical platform 331 to ensure that the first sensor body 332 can receive the light spot of the outgoing light beam 111. The angle between the orientation of the first light entrance of the first sensor body 332 and the first direction is adjusted by the first optical platform 331. Since the aperture of the second aperture stop 600 is smaller at this time, when the light reflected by the first sensor body 332 passes through the second aperture stop 600 again, it is considered that the orientation of the first light entrance of the first sensor 33 is parallel to the first direction.

[0209] The aperture of the second aperture diaphragm 600 is enlarged as required, so that the first light beam 110 can be well received by the first sensor 33, and then the light intensity of the first light beam 110 after passing through the second aperture diaphragm 600 is reduced by the light attenuator 400 to prevent the first light beam 110 from damaging the first sensor 33 after the aperture of the second aperture diaphragm 600 is enlarged. At this time, according to the convergence position of the outgoing light beam 111, a driving device 32 is set on one side of the linear guide 12, and then a knife edge 31 is installed on the driving device 32, and the first sensor 33 and the driving device 32 are respectively connected to the first processing device 34.

[0210] The present application also provides a detection method, which is applied to a detection device, such as Figure 2 and Figure 3 As shown, the detection device includes a carrier 1, a light source bracket 21 and a converging element bracket 22. The light source bracket 21 is arranged on the carrier 1 and is used to set the light source 100; the converging element bracket 22 is arranged on the carrier 1 and is located on one side of the light source bracket 21. The converging element bracket 22 is used to set the converging element 200. The converging element 200 is used to converge the first light beam 110 emitted by the light source 100 toward one side of the converging element bracket 22.

[0211] like Figure 2 , Figure 3 and Fig.26 As shown, the detection method includes:

[0212] S1, detecting the diameter value of the focal spot; wherein the focal spot is a light spot formed by the outgoing light beam 111 on the focal plane 51 of the converging element 200, and the outgoing light beam 111 is the first light beam 110 after passing through the converging element 200;

[0213] S2. Detect the uniformity of the light flux on the target surface 40 ; wherein the target surface 40 is located on the optical path of the outgoing light beam 111 .

[0214] The execution order of steps S1 and S2 is not limited to the above order, and S2 may be executed first and then S1, or S1 and S2 may be executed synchronously.

[0215] The beneficial effects of the detection method in the embodiment of the present application are the same as the beneficial effects of the detection device described above, and will not be repeated here.

[0216] In some embodiments, Figure 3 and Figure 5 As shown, the detection device includes a blade 31 and a driving device 32, which is connected to the blade 31 and is used to drive the blade 31 to move relative to the carrier 1 along a first direction parallel to the optical axis 113 of the outgoing light beam 111 and a second direction perpendicular to the optical axis 113 of the outgoing light beam 111.

[0217] like Fig. 27 As shown, S1 includes:

[0218] S11 , acquiring a spot image 112 of an outgoing light beam 111 ; wherein the spot image 112 includes a spot area 1121 .

[0219] S12. According to the position information of the focal plane 51, the driving device 32 is controlled to drive the blade 31 to move to the position of the focal plane 51, and then the driving device 32 is controlled to drive the blade 31 to cut the outgoing light beam 111 along the second direction.

[0220] S13, determining the diameter value of the focal spot according to the movement distance of the blade 31 from the moment when the light spot area 1121 begins to darken to the moment when it completely darkens.

[0221] The detection method shown in S11 to S13 is to measure the diameter of the focal spot by cutting the outgoing light beam 111 with the knife edge 31, so that the accuracy of the measurement result can be met by taking an average value for multiple measurements. In addition, such a detection method has relatively simple requirements on equipment, and does not require the use of expensive optical instruments for detection, so that the cost of detection can be controlled and the cost requirements of the general laboratory for the measurement of the diameter of the focal spot can be met.

[0222] In some embodiments, after S13, the method further includes: determining the imaging quality of the converging element 200 according to the diameter value of the focal spot. Specifically, if the diameter value of the focal spot is greater than the diameter threshold, it is determined that the imaging quality of the converging element 200 is unqualified; if the diameter value of the focal spot is less than or equal to the diameter threshold, it is determined that the imaging quality of the converging element 200 is qualified.

[0223] In some embodiments, Figure 8As shown, the moment of starting to darken and the moment of complete darkening are determined by the following method: the moment when the sum of the grayscale values ​​of each pixel in the spot area 1121 decreases to a first preset value is determined as the moment of starting to darken; the moment when the sum of the grayscale values ​​decreases to a second preset value is determined as the moment of complete darkening; wherein the first preset value is less than the sum of the grayscale values ​​when the blade 31 does not cut the outgoing light beam 111, and the second preset value is greater than zero and less than the first preset value. With such a setting, the moment of starting to darken and the moment of complete darkening can be determined more accurately, so that the measurement of the movement distance of the blade 31 between the moment of starting to darken and the moment of complete darkening can be made more accurate, and thus the measurement of the diameter value of the focal spot can be made more accurate.

[0224] In the embodiment of the present application, in addition to determining the time when the darkening starts and the time when the darkening is completely darkened by setting a threshold value of the total gray value, the time when the darkening starts and the time when the darkening is completely darkened can also be determined by the change in the area of ​​the actual unblocked area in the spot area 1121, as follows:

[0225] like Fig. 9 and Fig.10b As shown, the moment when the area ratio decreases to the first threshold is determined as the moment when darkening begins; and the moment when the area ratio decreases to the second threshold is determined as the moment when darkening is completely completed.

[0226] Among them, the area ratio is the maximum area of ​​the unblocked area in the spot area 1121 and the area of ​​the spot area 1121. The maximum area of ​​the spot area 1121 specifically refers to the area value of the spot area 1121 when the blade 31 does not cut the emergent light beam 111.

[0227] In some embodiments, before controlling the driving device 32 to drive the blade 31 to move to the position of the focal plane 51, the method further includes:

[0228] S1101, control the driving device 32 to drive the blade 31 to cut the outgoing light beam 111 along the second direction at the position of the first preset section 52; determine the first diameter value of the light spot of the outgoing light beam 111 at the position of the first preset section 52 according to the movement distance of the blade 31 between the moment when the light spot area 1121 begins to darken and the moment when it completely darkens.

[0229] S1102, controlling the driving device 32 to drive the blade 31 to cut the outgoing light beam 111 along the second direction at the position of the second preset cross section 53; determining a second diameter value of the light spot of the outgoing light beam 111 at the position of the second preset cross section 53 according to the movement distance of the blade 31 from the moment when the light spot area 1121 begins to darken to the moment when it completely darkens; wherein the first preset cross section 52 and the second preset cross section 53 are both perpendicular to the first direction;

[0230] S1103 , determining position information of the focal plane 51 according to the first diameter value, the second diameter value, and the distance value between the first preset cross section 52 and the second preset cross section 53 .

[0231] By obtaining the position information of the focal plane 51 through the above method, the number of times the blade 31 cuts the outgoing light beam 111 can be greatly reduced. The blade 31 only needs to cut the outgoing light beam 111 twice to obtain the position information of the focal plane 51. This can greatly shorten the time for determining the position information of the focal plane 51, thereby facilitating the improvement of the detection efficiency of the diameter value of the focal spot.

[0232] In the embodiment of the present application, in addition to determining the diameter value of the focal spot by the movement distance of the blade 31 between the moment when the spot area 1121 begins to darken and the moment when it completely darkens, the diameter value of the focal spot can also be obtained by the following method: obtain a change curve of the spot diameter value of the light beam 111 emitted from the pre-focus position to the post-focus position, and determine the minimum value of the spot diameter value as the diameter value of the focal spot.

[0233] In some embodiments, Fig.13 and Fig.28 As shown, S2 includes:

[0234] S21. Obtain optical parameter values ​​at multiple detection points on the target surface 40; wherein the optical parameter value includes one of an illumination value, a light intensity value, and a brightness value. The number of detection points may be 4, 6, 9, etc., depending on actual measurement needs. Multiple detection points may be arranged in an array, for example, when there are 9 detection points, the 9 detection points are arranged in a 3×3 array.

[0235] S22. Determine the uniformity of the luminous flux on the target surface 40 according to the ratio of the maximum value to the minimum value, or the ratio of the minimum value to the maximum value, of the optical parameter values ​​at the plurality of detection points.

[0236] By determining the uniformity of the luminous flux on the target surface 40 through the above ratio, the difference in the distribution of the luminous flux on the target surface 40 can be more intuitively reflected, which is conducive to more accurately determining the uniformity of the luminous flux on the target surface 40. That is, if the above ratio is close to 1 (the difference between the ratio and 1 is small), it means that the uniformity of the luminous flux on the target surface 40 is good; if the above ratio is far from 1 (the difference between the ratio and 1 is large), it means that the uniformity of the luminous flux on the target surface 40 is poor.

[0237] In some embodiments, S22, determining the uniformity of the luminous flux on the target surface 40 according to the ratio of the maximum value to the minimum value of the optical parameter values ​​at the plurality of detection points, comprises:

[0238] If the ratio is greater than the first ratio threshold, it is determined that the uniformity of the luminous flux on the target surface 40 is unqualified; if the ratio is less than or equal to the first ratio threshold, it is determined that the uniformity of the luminous flux on the target surface 40 is unqualified.

[0239] In some embodiments, S22, determining the uniformity of the luminous flux on the target surface 40 according to the ratio of the minimum value to the maximum value of the optical parameter values ​​at the plurality of detection points, comprises:

[0240] If the ratio is greater than or equal to the second ratio threshold, it is determined that the uniformity of the luminous flux on the target surface 40 is qualified; if the ratio is less than the second ratio threshold, it is determined that the uniformity of the luminous flux on the target surface 40 is unqualified.

[0241] For the features in the detection method embodiment that are the same as or similar to those in the product embodiment of the above-mentioned detection device, specific reference may be made to the description in the product embodiment of the above-mentioned detection device, and no further details will be given here.

[0242] An embodiment of the present application further provides a processing system, which stores computer program instructions, and the processing system executes the computer program instructions to implement the detection method described in any of the above embodiments.

[0243] In some embodiments, Figure 4 and Fig.15 As shown, the processing system includes a first processing device 34 , a first sensor 33 , a second processing device 43 and a second sensor 42 .

[0244] An embodiment of the present application also provides a computer-readable storage medium, on which computer program instructions are stored. When the computer program instructions are executed by a detection device, the detection method described in any of the above embodiments is implemented.

[0245] The computer-readable medium includes, but is not limited to, various media that can store program codes, such as a USB flash drive, a mobile hard disk, a ROM (read-only memory), a RAM (random access memory), a magnetic disk or an optical disk.

[0246] An embodiment of the present application also provides a computer program product, which includes computer program instructions. When the computer program instructions are executed by a detection device, the detection method described in any of the above embodiments is implemented.

[0247] The drawings of this application are intended to illustrate the composition of the detection system and the connection relationship between the various components, and are not shown according to the actual proportions of the various components in the actual product.

[0248] Although the description of this application will be introduced in conjunction with some embodiments, this does not mean that the features of this application are limited to the implementation mode. On the contrary, the purpose of introducing the application in conjunction with the implementation mode is to cover other options or modifications that may be extended based on the claims of this application. In order to provide a deep understanding of the present application, many specific details will be included in the above description. The present application can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of this application, some specific details will be omitted in the description. It should be noted that the embodiments in this application and the features in the embodiments can be combined with each other without conflict.

[0249] In the embodiments of the present application, the terms "first", "second", "third", and "fourth" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second", "third", and "fourth" may explicitly or implicitly include one or more of the features.

[0250] In the embodiments of the present application, "and / or" is only a description of the association relationship of the associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0251] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installation" and "connection" should be understood in a broad sense. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. The directional terms mentioned in the embodiments of the present application, such as "upper", "lower", "left", "right", "inside", "outside", etc., are only reference directions of the accompanying drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of the present application, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present application. "Multiple" means at least two.

[0252] References to "one embodiment" or "some embodiments" etc. described in this specification mean that a particular feature, structure or characteristic described in conjunction with the embodiment is included in one or more embodiments of the present application. Thus, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. that appear at different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0253] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A detection device, characterized in that: include: Carrier; A light source bracket is arranged on the carrier and is used to arrange the light source; A converging element support, arranged on the carrier and located at one side of the light source support, the converging element support is used to set a converging element, and the converging element is used to converge a first light beam emitted by the light source toward one side of the converging element support; A first detection device, used to detect the diameter value of the focal spot; wherein the focal spot is a light spot formed by the outgoing light beam on the focal plane of the converging element, and the outgoing light beam is the first light beam after passing through the converging element; The second detection device is used to detect the uniformity of the light flux on the target surface; wherein the target surface is located on the optical path of the outgoing light beam.

2. The detection device according to claim 1, characterized in that: The first detection device comprises: blade; a driving device connected to the knife edge and used to drive the knife edge to move relative to the carrier along a first direction parallel to the optical axis of the outgoing light beam and a second direction perpendicular to the optical axis of the outgoing light beam; A first sensor is disposed on the carrier and is used to obtain a spot image of the outgoing light beam; wherein the spot image includes a spot area; The first processing device is used to determine the diameter value of the light spot of the outgoing light beam at the cutting position of the blade according to the movement distance of the blade between the moment when the light spot area starts to darken and the moment when it is completely darkened when the blade cuts the outgoing light beam along the second direction.

3. The detection device according to claim 2, characterized in that: The first processing device is used to: determine the moment when the sum of the grayscale values ​​of each pixel in the light spot area decreases to a first preset value as the moment when darkening begins; determine the moment when the sum of the grayscale values ​​decreases to a second preset value as the moment when darkening is completely completed; wherein the first preset value is less than the sum of the grayscale values ​​when the blade does not cut the outgoing light beam, and the second preset value is greater than zero and less than the first preset value.

4. The detection device according to claim 2 or 3, characterized in that: The first processing device is used to: control the driving device to drive the blade to move to the position of the focal plane according to the position information of the focal plane, and then control the driving device to drive the blade to cut the outgoing light beam along the second direction; The diameter value of the focal spot is determined according to the movement distance of the knife edge.

5. The detection device according to claim 4, characterized in that: The first processing device is used to: before controlling the driving device to drive the knife edge to move to the position of the focal plane, perform the following steps: Control the driving device to drive the blade to cut the outgoing light beam along the second direction at the position of the first preset cross section; Determining a first diameter value of a spot at a position of the outgoing light beam at the first preset cross section according to the movement distance of the knife edge; Control the driving device to drive the blade to cut the outgoing light beam along the second direction at the position of the second preset cross section; Determine a second diameter value of the light spot at the position of the outgoing light beam at the second preset cross section according to the movement distance of the knife edge; wherein the first preset cross section and the second preset cross section are both perpendicular to the first direction; The position information of the focal plane is determined according to the first diameter value, the second diameter value, and the distance value between the first preset cross section and the second preset cross section.

6. The detection device according to any one of claims 2 to 5, characterized in that: The first sensor includes a first optical platform disposed on the carrier, and a first sensor body disposed on the first optical platform, wherein the first optical platform is used to adjust the angle between the orientation of the first light entrance port of the first sensor body and the first direction, and / or to adjust the position of the first sensor body relative to the carrier in the first direction and in a direction perpendicular to the first direction.

7. The detection device according to any one of claims 2 to 6, characterized in that: The target surface is located at a side of the first sensor away from the converging element bracket; the first sensor is detachably arranged on the carrier; and / or the driving device is detachably connected to the carrier.

8. The detection device according to any one of claims 2 to 6, characterized in that: The detection device further comprises a beam splitter bracket for setting a beam splitter, and along the arrangement direction of the light source bracket and the converging element bracket, the beam splitter bracket is arranged between the first sensor, one of the target surfaces and the converging element bracket; Along a third direction, the other of the first sensor and the target surface is located on one side of the beam splitter bracket, and the third direction is perpendicular to the arrangement direction.

9. The detection device according to any one of claims 1 to 8, characterized in that: The second detection device comprises: A fixing frame, arranged on the carrier; A second sensor is arranged on the fixing frame, and the position of the second sensor relative to the carrier can be adjusted in the longitudinal direction and the transverse direction of the fixing frame; the second sensor is used to obtain the optical parameter values ​​at the plurality of detection points on the target surface; a second processing device, for determining the uniformity of the luminous flux on the target surface according to the optical parameter values ​​at the plurality of detection points; The optical parameter value includes one of an illumination value, a light intensity value and a brightness value; and the target surface is located at the second light entrance of the second sensor and is parallel to both the horizontal direction and the vertical direction.

10. The detection device according to claim 9, characterized in that: The fixed frame includes a vertical frame arranged on the carrier, and a horizontal frame arranged on the vertical frame, the vertical frame extends along the longitudinal direction, and the horizontal frame extends along the transverse direction; the position of the horizontal frame relative to the vertical frame in the longitudinal direction is adjustable, the second sensor is arranged on the horizontal frame, and the position of the second sensor relative to the horizontal frame in the transverse direction is adjustable.

11. The detection device according to claim 9 or 10, characterized in that: Along a fourth direction, the position of the fixing frame relative to the supporting body is adjustable, and the fourth direction is perpendicular to both the transverse direction and the longitudinal direction.

12. The detection device according to any one of claims 9 to 11, characterized in that: The second sensor comprises a second optical platform disposed on the fixing frame, and a second sensor body disposed on the second optical platform and having the second light entrance port; The second optical platform is used to adjust the angle between the orientation of the second light entrance and a fourth direction, and the fourth direction is perpendicular to both the horizontal direction and the vertical direction.

13. The detection device according to any one of claims 1 to 8, characterized in that: The second detection device comprises: A reflector, disposed on the carrier, wherein the reflector has a reflective surface, and the reflective surface is the target surface; A second sensor is used to obtain optical parameter values ​​at a plurality of detection points on the target surface; wherein the optical parameter value includes one of an illumination value, a light intensity value and a brightness value; The second processing device is used to determine the uniformity of the luminous flux on the target surface according to the optical parameter values ​​at the plurality of detection points.

14. The detection device according to claim 13, characterized in that: Along a direction perpendicular to the reflecting surface, the position of the reflecting member relative to the supporting body is adjustable.

15. The detection device according to claim 13 or 14, characterized in that: The second sensor includes a third optical platform disposed on the carrier, and an imaging luminance meter disposed on the third optical platform, wherein the third optical platform is used to adjust an angle between a lens orientation of the imaging luminance meter and the reflective surface.

16. The detection device according to any one of claims 1 to 15, characterized in that: The carrier includes a linear guide rail, and the light source bracket and the converging element bracket are both arranged on the linear guide rail and arranged in a direction parallel to the linear guide rail; The detection device also includes a plurality of first aperture brackets for setting a first aperture, wherein the plurality of first aperture brackets are arranged on the linear guide rail and arranged in a direction parallel to the linear guide rail; each first aperture bracket is located on a side of the converging element bracket away from the light source bracket.

17. The detection device according to claim 16, characterized in that: The detection device further comprises an optical attenuator bracket for setting an optical attenuator, a collimator bracket for setting a collimator, and a second aperture bracket for setting a second aperture aperture; the optical attenuator bracket is arranged between the light source bracket and the collimator bracket, and the second aperture bracket is arranged between the collimator bracket and the converging element bracket; An adjustment platform is respectively provided between the light source bracket, the light attenuator bracket, the collimator bracket, the second aperture bracket, the converging element bracket and each of the plurality of first aperture brackets and the linear guide rail, and the adjustment platform is at least used to adjust the position of each of the brackets relative to the linear guide rail in a direction parallel to the linear guide rail and a direction perpendicular to the linear guide rail.

18. The detection device according to claim 16 or 17, characterized in that: Each of the first aperture brackets is detachably connected to the linear guide rail.

19. A detection method, applied to a detection device, the detection device comprising a carrier, a light source bracket and a converging element bracket, the light source bracket being arranged on the carrier and used to set the light source; the converging element bracket being arranged on the carrier and located on one side of the light source bracket, the converging element bracket being used to set a converging element, the converging element being used to converge a first light beam emitted by the light source toward one side of the converging element bracket, characterized in that: The detection method comprises: Detecting the diameter value of the focal spot; wherein the focal spot is a light spot formed by the outgoing light beam on the focal plane of the converging element, and the outgoing light beam is the first light beam after passing through the converging element; Detect the uniformity of the luminous flux on a target surface; wherein the target surface is located on the optical path of the outgoing light beam.

20. The detection method according to claim 19, wherein the detection device comprises a knife edge and a driving device, wherein the driving device is connected to the knife edge and is used to drive the knife edge to move relative to the carrier along a first direction parallel to the optical axis of the outgoing light beam and a second direction perpendicular to the optical axis of the outgoing light beam, wherein: Detect the diameter of the focal spot, including: Acquire a spot image of the outgoing light beam; wherein the spot image includes a spot area; According to the position information of the focal plane, controlling the driving device to drive the blade to move to the position of the focal plane, and then controlling the driving device to drive the blade to cut the outgoing light beam along the second direction; The diameter value of the focal spot is determined according to the movement distance of the knife edge between the moment when the light spot area starts to darken and the moment when it completely darkens.

21. The detection method according to claim 20, characterized in that: The time when the darkening starts and the time when the darkening completely occurs are determined by the following method: Determine the moment when the sum of the grayscale values ​​of each pixel in the light spot area decreases to a first preset value as the moment when darkening begins; Determine the moment when the total gray value decreases to a second preset value as the moment when the gray value becomes completely dark; The first preset value is smaller than the sum of the grayscale values ​​when the blade does not cut the outgoing light beam, and the second preset value is greater than zero and smaller than the first preset value.

22. The detection method according to claim 20 or 21, characterized in that: Before controlling the driving device to drive the knife edge to move to the position of the focal plane, the method further includes: Control the driving device to drive the blade to cut the outgoing light beam along the second direction at the position of the first preset cross section; determine a first diameter value of the light spot of the outgoing light beam at the position of the first preset cross section according to the movement distance of the blade between the moment when the light spot area starts to darken and the moment when it completely darkens; Control the driving device to drive the blade to cut the outgoing light beam along the second direction at the position of the second preset cross section; determine the second diameter value of the light spot of the outgoing light beam at the position of the second preset cross section according to the movement distance of the blade between the moment when the light spot area starts to darken and the moment when it completely darkens; wherein the first preset cross section and the second preset cross section are both perpendicular to the first direction; The position information of the focal plane is determined according to the first diameter value, the second diameter value, and the distance value between the first preset cross section and the second preset cross section.

23. The detection method according to any one of claims 19 to 22, characterized in that: Detect the uniformity of the light flux on the target surface, including: Acquire optical parameter values ​​at a plurality of detection points on the target surface; wherein the optical parameter value comprises one of an illumination value, a light intensity value and a brightness value; The uniformity of the luminous flux on the target surface is determined according to the ratio of the maximum value to the minimum value, or the ratio of the minimum value to the maximum value, of the optical parameter values ​​at the plurality of detection points.

24. A detection system, characterized in that: The invention comprises a light source and the detection device according to any one of claims 1 to 18.

25. A detection system, characterized in that: It includes a light source, a beam splitter and the detection device according to claim 8; the outgoing light beam includes a first sub-beam passing through the beam splitter, and a second sub-beam reflected by the beam splitter, the first sensor and one of the target surface are located on the optical path of the first sub-beam, and the other of the first sensor and the target surface is located on the optical path of the second sub-beam.

26. A detection system, characterized in that: It comprises a light source, a light attenuator, a collimator, a first aperture stop, a second aperture stop and the detection device according to claim 17 or 18.

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