Deterioration diagnosis device, deterioration diagnosis system, and deterioration diagnosis method

Abstract

The invention provides a deterioration diagnosis device, a deterioration diagnosis system and a deterioration diagnosis method, which can diagnose the deterioration of an ozone generator by using a simple index. A deterioration diagnosis device according to the present disclosure comprises: a measurement unit that acquires measurement data, which is an operation state including a pressure difference between an inlet and an outlet of a gas system of an ozone generator, an inlet pressure, or an outlet pressure; and a diagnosis unit that diagnoses a deterioration state of the ozone generator on the basis of the pressure difference, the inlet pressure, or the outlet pressure.

Description

Technical Field

[0001] The present disclosure relates to a degradation diagnosis device, a degradation diagnosis system and a degradation diagnosis method, which use on-site operation data of a silent discharge type ozone generator to diagnose performance degradation of the ozone generator. Background Art

[0002] In silent discharge type ozone generators, the ozone generation efficiency often decreases with long-term use. Therefore, under normal circumstances, maintenance such as opening for inspection or cleaning, replacement of parts or repairs is generally performed within a certain period. However, when maintenance is performed at a certain period, there are problems such as useless maintenance due to exceeding the necessary frequency and failure to stop due to untimely maintenance. Therefore, a method has been proposed to monitor the performance of the ozone generator, issue an alarm when the performance decreases, and notify the period when maintenance is required.

[0003] The ozone generation efficiency used as an indicator for diagnosing the degradation of the ozone generator mainly depends on three parameters: the water temperature of the cold water used to cool the ozone generator, the ozone concentration, and the power density (obtained by dividing the discharge power by the discharge area in the ozone generator). In order to accurately evaluate the performance of the ozone generator, it is necessary to consider that these parameters will change with the operating conditions of the ozone generator. In Patent Document 1, the initial value of the unit power consumption (similar to the indicator of ozone generation efficiency) is calculated corresponding to the current water temperature. By comparing the initial value and the current value of the unit power consumption, the performance degradation of the ozone generator can be detected even when the water temperature is different during the initial operation and the current operation. Prior art literature Patent Literature

[0004] Patent Document 1: Japanese Patent Laid-Open No. 8-217415 Summary of the invention Technical problem to be solved by the invention

[0005] However, in the prior art, water temperature, ozone concentration and power density vary according to the operating conditions of the ozone generator on site. Therefore, correction of these three parameters is required in order to accurately perform degradation diagnosis using unit power consumption. There is a problem that it is difficult to perform degradation diagnosis of the ozone generator using simple indicators.

[0006] The present disclosure is made to solve the above-mentioned problems, and an object thereof is to provide a degradation diagnosis device, a degradation diagnosis system, and a degradation diagnosis method, which can perform degradation diagnosis of an ozone generator using simple indicators. Technical means for solving technical problems

[0007] The degradation diagnosis device involved in the present disclosure includes: a measuring unit, which obtains operating conditions, i.e., measurement data, including the pressure difference between the inlet and outlet of a gas system including an ozone generator, an inlet pressure, or an outlet pressure; and a diagnostic unit, which diagnoses the degradation condition of the ozone generator based on the pressure difference, the inlet pressure, or the outlet pressure.

[0008] The degradation diagnosis system involved in the present disclosure includes: an ozone generator; a measuring unit, which obtains measurement data of the operating status including the pressure difference between the inlet and outlet of the gas system of the ozone generator, the inlet pressure or the outlet pressure; and a diagnostic unit, which diagnoses the degradation status of the ozone generator based on the pressure difference, the inlet pressure or the outlet pressure.

[0009] The degradation diagnosis method involved in the present disclosure includes: a step of obtaining measurement data of operating conditions including the pressure difference between the inlet and outlet of a gas system including an ozone generator, an inlet pressure or an outlet pressure; and a step of diagnosing the degradation condition of the ozone generator based on the pressure difference, the inlet pressure or the outlet pressure. Effects of the Invention

[0010] According to the degradation diagnosis device, degradation diagnosis system, and degradation diagnosis method involved in the present disclosure, the degradation condition of the ozone generator is diagnosed based on the pressure or pressure difference of the ozone generator, so that the degradation diagnosis of the ozone generator can be performed using a simple indicator. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is a diagram showing a schematic configuration of a degradation diagnosis system according to Embodiment 1 of the present disclosure. Figure 2 1 is a schematic configuration diagram showing a hardware configuration of the degradation diagnosis device according to the first embodiment of the present disclosure. Figure 3 This is a flowchart showing a degradation diagnosis method of the degradation diagnosis device according to the first embodiment of the present disclosure. Figure 4 : is a graph showing an example of the corrected differential pressure and the discharge power of the degradation diagnosis device according to the first embodiment of the present disclosure. Figure 5 This is a diagram schematically showing the configuration of a degradation diagnosis device according to a second embodiment of the present disclosure. Figure 6 : is a graph showing an example of the corrected differential pressure and the discharge power of the degradation diagnosis device according to the second embodiment of the present disclosure. Figure 7 This is a flowchart showing a degradation diagnosis method of the degradation diagnosis device according to the third embodiment of the present disclosure. Figure 8: is a graph showing an example of the correction differential pressure magnification and the discharge power of the degradation diagnosis device according to the third embodiment of the present disclosure. Fig. 9 Schematic diagram showing the relationship between the ozone generator and pressure in the degradation diagnosis device according to Embodiment 4 of the present disclosure. Fig.10 Schematic diagram showing the relationship between the ozone generator and pressure in the degradation diagnosis device according to Embodiment 5 of the present disclosure. DETAILED DESCRIPTION

[0012] Implementation method 1. Figure 1 1 is a schematic diagram showing the structure of the degradation diagnosis system according to the first embodiment of the present disclosure. Figure 1 As shown, the degradation diagnosis system 100 includes an ozone generator 10 and a degradation diagnosis device 1. The degradation diagnosis device 1 includes an item-related information acquisition unit 2, a measurement unit 4, and a diagnosis unit 5. Figure 1 In the embodiment, the degradation diagnosis device 1 includes the item-related information acquisition unit 2 and the item-specific information calculation unit 3, but these may not be provided and may be provided outside the degradation diagnosis device 1. The item-specific information calculation unit 3 may be included as a function in the item-related information acquisition unit 2 or in the diagnosis unit 5.

[0013] The measuring unit 4 obtains the measurement data 14 of the operating status including the pressure difference between the inlet and outlet of the gas system of the ozone generator 10 (hereinafter referred to as the pressure difference). The inlet of the ozone generator 10 refers to the part where the raw gas is put in. In addition, the outlet of the ozone generator 10 refers to the part where the ozone-containing gas is discharged. Hereinafter, in the present application, unless otherwise specified, the pressure (inlet pressure or outlet pressure or pressure difference) refers to the pressure of the gas system. Here, it is preferred that the pressure measurement position is near the ozone generator 10, but it can also be far away from the measurement position when the pressure loss of the piping from the ozone generator 10 to the measurement position can be ignored. In addition, the operating status of the ozone generator 10 represents the changes in various data when the ozone generator 10 is running from the past to the present, for example, the change from the initial value to the current value of the data that can be obtained when the ozone generator 10 is in operation. The diagnostic unit 5 diagnoses the degradation status of the ozone generator based on the pressure difference of the ozone generator. The degradation status represents the change over time in the performance degradation of the ozone generator 10 and the degree of performance degradation. Hereinafter, as an example, a case will be described in which the measurement unit 4 acquires the differential pressure of the ozone generator 10 and the diagnosis unit 5 diagnoses the deterioration state of the ozone generator 10 based on the differential pressure.

[0014] The item-related information acquisition unit 2 acquires item-related information 12 including information on the constant operating conditions of the ozone generator 10. The constant operating conditions of the ozone generator 10 refer to conditions uniquely determined when the ozone generator 10 is input, for example, a predetermined value of any one or more items such as the rated raw material gas flow rate, rated ozone concentration, rated water temperature, rated inlet pressure, rated outlet pressure, and rated pressure difference of the ozone generator 10. The item-specific information calculation unit 3 calculates the item-specific information 13 based on the item-related information 12.

[0015] The ozone generator 10 is, for example, a general silent discharge type ozone generator. When a raw gas containing oxygen is fed into the ozone generator 10, power is supplied to the ozone generator 10 from a power supply device (not shown). As a result, a silent discharge is generated inside the ozone generator 10, and ozone is generated from the oxygen in the raw gas and discharged as an ozone-containing gas. In addition, since the discharge at this time generates heat, cold water for cooling the ozone generator 10 passes through the ozone generator 10. The cold water flow rate is usually set for the ozone generator 10 so that the cold water outlet temperature rises by about 3 to 5°C relative to the cold water inlet temperature.

[0016] The ozone generation amount is represented by the product of the ozone concentration and the raw gas flow rate. The rated ozone generation amount is the maximum ozone generation amount assumed in the operation of the ozone generator 10. Hereinafter, the ozone concentration and the raw gas flow rate required to obtain the rated ozone generation amount are referred to as the rated ozone concentration and the rated raw gas flow rate.

[0017] In normal operation, the ozone generator 10 is often operated with the ozone generation amount reduced relative to the rated ozone generation amount. Hereinafter, such operation is referred to as partial load operation. As control methods under partial load operation, there are two methods: a method of constant concentration and variable raw material flow rate and a method of constant raw material flow rate and variable concentration.

[0018] The method of constant concentration and variable raw material flow is a method of keeping the ozone concentration at the rated ozone concentration and reducing the raw material gas flow rate. This method can save the raw material gas flow rate, so it is often used when using liquid oxygen as the raw material.

[0019] The method of constant raw material flow and variable concentration is a method in which the raw material gas flow rate maintains the rated raw material gas flow rate and reduces the ozone concentration. This method is often used in the following cases: the raw material gas cost (including the electricity cost for manufacturing) is relatively low and the reduction of the raw material gas flow rate does not contribute much to the reduction of the raw material gas cost; the raw material supply device is difficult to follow the arbitrary changes in the raw material gas flow rate due to its structure, etc. Specifically, it is the case that the raw material gas of the ozone generator 10 is an air raw material and a PSA raw material. When the raw material gas is a VPAS raw material, both constant concentration and variable raw material flow rate and constant raw material flow rate and variable concentration are adopted.

[0020] In the first embodiment, the case where the partial load operation is performed by the control method of constant concentration and variable raw material flow rate is described.

[0021] Figure 2 : is a schematic block diagram showing the hardware structure of the degradation diagnosis device involved in the first embodiment of the present disclosure. The computer 22 includes, for example, a CPU (Central Process Unit) 23, a main storage device 24, and an auxiliary storage device 25. For example, the main storage device 24 may include a storage medium such as a RAM, and the auxiliary storage device 25 may include a storage medium such as a hard disk. An input device 21 and an output device 28 are provided outside the computer 22. The input device 21 is, for example, a mouse and a keyboard. In addition, the output device 28 may include, for example, a display monitor that displays the output results from the computer 22. In addition, as Figure 2 As shown, the computer 22 is connected to an external storage device 27 via a network 26, and acquires information required for calculation from the external storage medium. In addition, the computer 22 can store the calculation results in the external storage medium.

[0022] The item-related information acquisition unit 2, the item-specific information calculation unit 3, the measurement unit 4, and the diagnosis unit 5 are implemented by the CPU 23 and the main storage device 24 as internal calculation processing of the computer 22. That is, each process in the diagnosis unit 5 and the like is implemented by the CPU 23 as a processor executing a program developed on the main storage device 24 as a memory. The CPU 23 reads the data on the main storage device 24, performs each process, and stores the result in the main storage device 24.

[0023] Figure 3 1 is a flowchart showing a degradation diagnosis method of the degradation diagnosis device according to the first embodiment of the present disclosure. Figure 3 The method of performing cracking diagnosis of the ozone generator 10 by the degradation diagnosis device 1 will be described. Figure 3In step S101, the item related information 12 is acquired, and in step S102, the item specific information 13 is calculated, but these steps may not be included. In addition, the pressure difference is corrected in step S104, but the pressure difference obtained from the measurement data 14 may be used directly for the deterioration diagnosis of the ozone generator 10 without correction.

[0024] First, in step S101, the project-related information acquisition unit 2 acquires the project-related information 12. The project-related information 12 includes, for example, the constant operating conditions of the ozone generator 10 used in the project to which the degradation diagnosis system is applied. If the target project is determined, the project-related information is uniquely determined. The project is not limited to being determined for each airport or each project. For example, if there are two types of ozone generators a and i in a project called A water purification plant B phase project, it can be said that there are two projects, A water purification plant B phase project a and A water purification plant B phase project i.

[0025] The item-related information 12 includes, for example, the type of raw material, the rated ozone generation amount Gr [kg / h], the rated ozone concentration Cr and its unit (unit [g / m 3 (N)] or [wt%]), rated cold water temperature tr [℃], maximum discharge power Emax [kW], rated pressure difference Pr [Pa], etc. The types of raw materials include, for example, air raw materials, liquid oxygen raw materials, (V) PSA raw materials, etc. The rated cold water temperature is the temperature at the inlet of the raw materials of the ozone generator.

[0026] Next, in step S102, the item-specific information calculation unit 3 calculates the item-specific information 13 based on the item-related information 12. The item-specific information 13 includes, for example, the rated raw gas flow rate fr[m 3 / h(N)], etc. In addition, although the example in which the item-specific information 13 is calculated from the item-related information 12 is shown here, the item-specific information 13 may be input in advance as the item-related information 12 .

[0027] Rated raw gas flow rate fr (unit: [m 3 / h(N)] or [kg / h]) according to the rated ozone generation Gr [kg / h] and rated ozone concentration Cr (unit: [g / m 3 (N)] or [wt%]) can be calculated as in formula (1) or formula (2).

[0028] [Mathematical formula 1] fr[m 3 / h(N)]=Gr[kg / h] / Cr[g / m 3 (N)]x1000 (1) fr[kg / h]=Gr[kg / h] / Cr[wt%]x100 (2)

[0029] As shown in formula (2), for example, when the unit of the rated ozone concentration is [wt%], the unit of the rated raw gas flow rate is considered to be [kg / h]. At this time, the unit of the raw gas flow meter on site is [kg / h], and the unit of the measured data is also [kg / h].

[0030] Next, in step S103, the measuring unit 4 acquires the operating status, namely, the measurement data 14, including the pressure difference of the ozone generator 10. The measurement data 14 includes, for example, the discharge power E (output power of the power supply device) [kW], the ozone concentration C (in units of [wt%] or [g / m 3 (N)]), raw gas flow rate f (unit: [wt%] or [m 3 / h(N)]), the pressure of the ozone generator 10 [Pa], etc. The pressure of the ozone generator 10 includes the inlet pressure Pi [Pa], the outlet pressure Po [Pa], or the pressure difference P [Pa] between the inlet and the outlet. In addition, when obtaining the pressure difference P, the pressure difference of the ozone generator 10 can be directly measured using a differential pressure gauge, or the inlet pressure Pi and the outlet pressure Po can be measured and the pressure difference can be obtained by subtraction. Since it can be discontinuous data (can be discrete data), when the pressure difference is obtained by subtraction, a pressure gauge can be used to switch the port, etc., so as to alternately measure the inlet pressure Pi and the outlet pressure Po.

[0031] The measurement data 14 at this time may be data of the minimum unit of sampling of the on-site measurement data, but it may also be appropriately spaced, or the average value of several seconds, several minutes or about one hour may be calculated, and one set of data may be made every several seconds, several minutes or about one hour. In addition, for the measurement data 14, the first data of the object evaluation period is input, the cycle up to step S105 described later is repeated, and the last data of the object evaluation period is input. In addition, the object evaluation period, etc. can be predetermined by another input, etc.

[0032] Next, in step S104, the diagnostic unit 5 calculates the corrected differential pressure after the differential pressure is corrected based on the project-specific information 13 and the measurement data 14. When the raw gas flow rate is different, the differential pressure of the measurement data 14 cannot be compared. Therefore, the differential pressure can be compared by correcting it to the value when the raw gas flow rate is the rated condition. The corrected differential pressure P'[Pa] is, for example, as shown in formula (3) using the differential pressure P, the rated raw gas flow rate fr of the project-specific information 13, and the raw gas flow rate f of the measurement data 14. [Mathematical formula 2] P'[Pa]=P[Pa]×fr[kg / h] / f[kg / h] (3)

[0033] In addition, in formula (3), the units of the rated raw gas flow rate fr and the raw gas flow rate f need to be the same. In addition, the flow of gas in the discharge gap of the ozone generator is laminar, so in formula (3), the gas flow rate and the pressure difference are proportional, but they can also be corrected more accurately. In addition, the raw gas flow rate and the ozone-containing gas flow rate are the same when the unit is kg / h, but in m 3 / h (N) units are slightly different. In this embodiment, for simplicity, the left side of formula (1) is set to the rated raw gas flow rate, but more accurately, the left side of formula (1) is the rated ozone-containing gas flow rate. In order to convert from the ozone-containing gas flow rate to the raw gas flow rate, it can be multiplied by a coefficient corresponding to the ozone concentration. Since this coefficient is close to 1, it is omitted in this embodiment. In addition, when measuring the ozone-containing gas flow rate instead of the raw gas flow rate, the rated value and measured value of the ozone-containing gas flow rate can also be used to correct the pressure difference.

[0034] Next, in step S105, it is determined whether the input and calculation up to the last data of the target evaluation period are completed. Steps S103 to S104 are repeated for each instant of data until completion. In addition, the calculation results are appropriately stored.

[0035] Figure 4 is a graph showing an example of the corrected differential pressure and the discharge power of the degradation diagnosis device according to the first embodiment of the present disclosure. In step S106, the diagnosis unit 5 performs the following steps, for example, Figure 4 A graph is drawn with time (year, month, day) on the horizontal axis and corrected differential pressure on the vertical axis, and the graph is output to a screen such as the output device 28. The horizontal axis is plotted with time (year, month, day), and the vertical axis is plotted with corrected differential pressure and discharge power (measured data). The corrected differential pressure is the first axis (left vertical axis), and the discharge power is the second axis (right vertical axis). Figure 4 For example, at the current moment (the rightmost point of the graph), the corrected pressure difference is about 15 kPa, which is 1.5 times the initial value. Here, we found that when the pressure difference of the gas flow path in the ozone generator 10 (the difference between the raw gas inlet pressure and the ozone-containing gas outlet pressure) becomes larger, the ozone generation efficiency decreases. Therefore, it can be known that Figure 4 In the example of , the ozone generator 10 is degraded. Thus, by using the pressure difference of the ozone generator 10, the deterioration state of the ozone generator 10 can be diagnosed.

[0036] In this embodiment, an example including the item-related information acquisition unit 2 and the item-specific information calculation unit 3 is shown, but the degradation diagnosis device 1 may also be composed of the measurement unit 4 and the diagnosis unit 5. In this case, the measurement unit 4 acquires the measurement data 14 of the operating status including the pressure difference of the ozone generator 10, and the diagnosis unit 5 diagnoses the degradation status of the ozone generator 10 based on the pressure difference of the ozone generator 10 in the measurement data 14.

[0037] In addition, in the present embodiment, an example of using differential pressure when diagnosing the degradation of the ozone generator 10 is shown, but the measuring unit 4 may acquire measurement data of the operating status including at least one of the inlet pressure and the outlet pressure of the ozone generator 10, and the diagnosing unit 5 may diagnose the degradation status of the ozone generator based on at least one of the inlet pressure and the outlet pressure of the ozone generator 10. The example of using at least one of the inlet pressure and the outlet pressure will also be described in the following embodiments.

[0038] As described above, the degradation diagnosis device 1 of the present embodiment includes: a measuring unit 4 that obtains measurement data of the operating status including the pressure difference of the ozone generator 10; and a diagnosis unit 5 that diagnoses the degradation status of the ozone generator 10 based on the pressure difference, thereby diagnosing the degradation of the ozone generator 10. In addition, the degradation diagnosis system 100 includes the ozone generator 10 and the degradation diagnosis device 1. In this case, the degradation diagnosis system 100 may include a monitoring control device (not shown) that monitors the operating status of the ozone generator 10 and controls the ozone generator 10. Alternatively, the degradation diagnosis device 1 or the degradation diagnosis system 100 may be assembled into a monitoring control device that monitors and controls the entire ozone system, or may be assembled into a monitoring control system that monitors and controls the entire water purification plant, factory, etc. On the other hand, the degradation diagnosis device 1 may be located at a place far away from the ozone generator 10, and the measurement data exchange of the ozone generator 10 in this case may be online or offline.

[0039] According to the degradation diagnosis device 1, degradation diagnosis system 100 and degradation diagnosis method involved in the present disclosure, the degradation condition of the ozone generator 10 is diagnosed based on the pressure difference of the ozone generator 10, thereby having the effect of accurately diagnosing the degradation of the ozone generator 10 using simple indicators.

[0040] Furthermore, according to the degradation diagnosis device 1, the degradation diagnosis system 100, and the degradation diagnosis method of the present disclosure, the differential pressure is corrected to a value assuming that the raw gas flow rate is at the rated condition. Therefore, even in an operation method in which the raw gas flow rate is constantly changing, the differential pressure can be evaluated under the same conditions, which has the effect of being able to accurately perform degradation diagnosis of the ozone generator 10 without being affected by the conditions on site. In addition, in Embodiment 1 of the present disclosure, the differential pressure is corrected to a value assuming that the raw gas flow rate is at the rated condition, but the inlet pressure and outlet pressure of the ozone generator 10 may be corrected to diagnose the degradation condition.

[0041] In addition, in this embodiment, since an example of constant concentration and variable raw material flow rate operation is shown, the raw material gas flow rate is corrected, but in the case of constant raw material flow rate and variable concentration operation, the raw material gas flow rate does not necessarily need to be corrected. However, even in the case of constant raw material flow rate and variable concentration operation, the raw material gas flow rate sometimes deviates from the rated value (initial setting value) as it changes over time, so correction can be performed. In addition, not only the raw material gas flow rate is corrected, but also the cold water temperature of the ozone generator or the pressure of the ozone generator is measured. Therefore, if corrections for temperature and pressure are also added, evaluation can be performed more accurately.

[0042] Implementation method 2. In the second embodiment, the same reference numerals are used for the same components as those in the first embodiment of the present disclosure, and descriptions of the same or corresponding parts are omitted. Hereinafter, a degradation diagnosis device 1b and a degradation diagnosis system 100b according to the second embodiment will be described with reference to the drawings.

[0043] Figure 5 2 is a schematic diagram showing the structure of the degradation diagnosis device according to the second embodiment of the present disclosure. Figure 5 As shown, degradation diagnosis device 1 b includes determination unit 6 in addition to the configuration of degradation diagnosis device 1 .

[0044] The determination unit 6 determines the maintenance period of the ozone generator 10 using the differential pressure or the corrected differential pressure calculated by the diagnosis unit 5. Figure 4 In the curve graph, a threshold value of the maintenance period can be set, and the maintenance period can be determined by comparing the correction pressure difference with the threshold value. Specifically, when the threshold value of the correction pressure difference is set to 15 [kPa], it is determined that Figure 4 When the curve of becomes 15 [kPa], maintenance is required. Here, the maintenance work in the present disclosure refers to opening and checking the ozone generator 10, opening and cleaning, replacing and repairing parts, etc.

[0045] In addition, the determination unit 6 may have a function of determining the maintenance period of the ozone generator 10 using a load level that is information indicating the differential pressure or the corrected differential pressure and the load condition of the ozone generator 10. The load level includes discharge power, power supply device input power, output command value of the power supply device, etc. When viewed from the power supply device, the following relationship (4) holds between the discharge power E [kW] equivalent to the output power, the power supply device input power Ei [kW], and the power supply efficiency er [%].

[0046] [Mathematical formula 3] er[%]=E[kw] / Ei[kw]×100 (4)

[0047] According to formula (4), for example, when the input power is obtained as the value of the measurement data 14, the input power can be set to the load level. The larger the load level, the higher the load, and the smaller the load level, the lower the load. By simultaneously displaying such an indicator representing the load, although not illustrated, it is possible to find that, for example, there is a high possibility that the pressure difference increases faster during a period of continuous high load than during a period of continuous low load. Therefore, by observing the historical changes in performance degradation including load, it is also possible to make judgments such as "since high load is expected in the future, maintenance is required in advance even if the performance degradation threshold has not been reached at the current moment" or "since low load is expected in the future, although the performance degradation threshold has been reached, immediate maintenance is not required." Such a high-level judgment, for example, can be made by a person observing the curve graph shown in the diagnosis unit 5 ( Figure 4 If AI (artificial intelligence) is used, such a high-level judgment can be automatically made in the judgment unit 6. In addition, if the value obtained by accumulating the load level is used, the past usage status closer to the actual state can be grasped compared with the simple cumulative value of the operating time.

[0048] Figure 6 1 is a graph showing an example of the corrected differential pressure and discharge power of the degradation diagnosis device according to Embodiment 2 of the present disclosure. The determination unit 6 predicts the future differential pressure or the corrected differential pressure of the ozone generator 10 based on the value corresponding to the corrected differential pressure or the operating status of the performance degradation index, and determines the maintenance period of the ozone generator 10. For example, Figure 6 As shown, the judgment unit 6 first Figure 4 The approximate curve is added to the graph showing the time-varying changes in the corrected pressure difference up to the current time. The best approximate curve with the smallest error is selected from linear approximation, quadratic function, cubic function, etc. Here, the cubic function is selected. Next, Figure 6 In the example, the future corrected pressure difference is predicted by extending the approximate curve representing the trend of the corrected pressure difference up to the current moment. Therefore, it is possible to make a future prediction assuming that the performance degradation trend up to now continues. Therefore, for example, when the next maintenance period is determined, by extending the approximate curve to that period, it is possible to predict the degree of performance degradation by the next maintenance period.

[0049] In order to accurately set the approximate curve, for example, during periods when the operation is stopped, in other words, during periods when the correction differential pressure cannot be calculated, the value is not set to zero but is set to blank. Figure 6In the case where, for example, the graph shows the entire period from the start of operation, the setting of the approximate curve is also approximated based on the entire period of the graph. However, the pressure difference increase trend is not limited to the same during the above entire period. For example, in the case where there is no pressure difference increase for about 2 years from the start of operation (the point on the left end of the graph), and a pressure difference increase trend is found after 2 years, when setting the approximate curve, only the second year and beyond can more accurately predict the future. This judgment becomes easy if a person observes the graph, and if it is performed automatically by the system, such judgment can be made using AI (artificial intelligence) or the like.

[0050] As described above, the degradation diagnosis device 1b of the present embodiment includes: a measuring unit 4 that obtains measurement data of the operating status including the pressure difference of the ozone generator 10; and a diagnostic unit 5 that diagnoses the degradation status of the ozone generator 10 based on the pressure difference of the ozone generator 10, thereby diagnosing the degradation of the ozone generator 10. In addition, the degradation diagnosis system 100b includes the ozone generator 10 and the degradation diagnosis device 1b. Therefore, the degradation diagnosis device 1b and the degradation diagnosis system 100b of the present embodiment can also perform degradation diagnosis of the ozone generator by simple indicators as in the first embodiment.

[0051] Furthermore, in the present embodiment, the determination unit 6 determines the maintenance period of the ozone generator 10 by comparing the pressure difference or the corrected pressure difference with a threshold value, thereby having the following effect: it is not affected by abnormal data or temporary changes, and can determine the correct maintenance period based on the performance degradation as a certain trend.

[0052] Furthermore, in the present embodiment, the judgment unit 6 has a function of judging the maintenance period of the ozone generator 10 by using information indicating the load condition of the ozone generator 10, namely the load level and the pressure difference or corrected pressure difference of the ozone generator 10, thereby having the effect of being able to make a judgment that is more in line with the actual condition.

[0053] Furthermore, in the diagnostic unit 5, the degradation diagnosis of the ozone generator 10 can also be performed using information indicating the load condition of the ozone generator 10, namely the load level and the pressure difference or corrected pressure difference of the ozone generator 10. In this case, the effect of being able to make a judgment that is more in line with the actual condition can also be achieved.

[0054] Furthermore, in the present embodiment, the judgment unit 6 predicts the future corrected pressure difference of the ozone generator 10 based on the value corresponding to the operating status of the corrected pressure difference or the performance degradation index, and judges the maintenance period of the ozone generator 10, thereby having the effect of being able to judge the future degradation status and the maintenance period required, etc.

[0055] Implementation method 3. In the third embodiment, the same reference numerals are used for the same components as those in the first embodiment of the present disclosure, and descriptions of the same or corresponding parts are omitted. Hereinafter, a degradation diagnosis device 1c and a degradation diagnosis system 100c according to the third embodiment will be described with reference to the drawings.

[0056] The degradation diagnosis device 1 c and the degradation diagnosis system of the present embodiment include an item-related information acquisition unit 2 , an item-specific information calculation unit 3 , a measurement unit 4 , and a diagnosis unit 5 , similarly to the first embodiment.

[0057] Figure 7 This is a flowchart showing a degradation diagnosis method of the degradation diagnosis device according to the third embodiment of the present disclosure. Figure 7 In, relative to Figure 3 The flowchart of the present invention is the same except that step S301 and step S302 are added. First, in step S301, the diagnostic unit 5 calculates the ratio of the pressure difference to the constant operating condition, i.e., the correction pressure difference multiplier p, based on the item association information 12 and the correction pressure difference. The correction pressure difference multiplier p is represented by the correction pressure difference P' and the rated pressure difference Pr, and becomes as shown in formula (5).

[0058] [Formula 4] p=P'[kPa] / Pr[kPa] (5)

[0059] Here, the rated pressure difference may be a measured value of the gas system pressure difference of the ozone generator under rated operating conditions during factory testing or field adjustment, or a value (design value) based on design calculation. In addition, an example of the case where the rated pressure difference is input in step S101 is shown here, but it is not limited to this. It can be standardized according to a certain benchmark, so the average of the initial constant period after the start of operation can be used as the initial value instead of the rated pressure difference.

[0060] Next, in step S302, the diagnostic unit 5 obtains a performance degradation index indicating the performance degradation of the ozone generator based on the correction differential pressure multiplier, and uses the performance degradation index to diagnose the degradation condition of the ozone generator. The performance degradation index α is determined by the correction differential pressure multiplier p, as shown in formula (6). In formula (6), coefficients a, b, and c are constants.

[0061] [Formula 5] α=a×p 2 +b×p+c (6)

[0062] Figure 8 : is a graph showing an example of the performance degradation index, the correction differential pressure ratio, and the discharge power of the degradation diagnosis device according to the third embodiment of the present disclosure. Figure 8In the figure, the performance degradation index is plotted when a=0, b=20, and c=-20. By comparing the performance degradation index, the correction differential pressure ratio, and the discharge power, it is easy to know how much the differential pressure has increased relative to the rated value or the initial value. In addition, the difference in the value of the item itself when the correction differential pressure is used directly is also eliminated. Therefore, for example, when setting a threshold for determining the maintenance period, it can also be set to a constant value independent of the item. In addition, if converted to a performance degradation index, it can be treated as an indicator that the performance degradation is zero at the beginning and the performance degradation gradually increases, so it can be consistent with the actual performance degradation image of the ozone generator 10. In addition, the value of the above example is a linear function, so the degree of performance degradation is proportional to the increase in the correction differential pressure ratio, but a quadratic function or a cubic function can be used to further emphasize the increase in the correction differential pressure. By defining the performance degradation index in this way, it can be treated as an index in which the change in the performance degradation index becomes significant when the correction differential pressure increases, so it can be set according to the manufacturer's technology.

[0063] As described above, the degradation diagnosis device 1c of the present embodiment includes: a measuring unit 4 that obtains measurement data of the operating status including the pressure difference of the ozone generator 10; and a diagnostic unit 5 that diagnoses the degradation status of the ozone generator 10 based on the pressure difference of the ozone generator 10, thereby diagnosing the degradation of the ozone generator 10. In addition, the degradation diagnosis system 100c includes the ozone generator 10 and the degradation diagnosis device 1c. Therefore, the degradation diagnosis device 1c and the degradation diagnosis system 100c of the present embodiment can also perform degradation diagnosis of the ozone generator by simple indicators, as in the first embodiment.

[0064] In addition, in the degradation diagnosis device 1c of the present embodiment, the differential pressure can be standardized by the design value or the initial value in the diagnosis unit, and the degradation condition of the ozone generator can be diagnosed using the standardized differential pressure. By performing the diagnosis in this way, the same effect as the correction differential pressure can be achieved, and the difference in the value itself caused by the item can be eliminated. Therefore, there is an effect that, for example, when a threshold value for determining the maintenance period is set, it can be set as a constant value without depending on the item. In addition, there is an effect that the correction differential pressure is converted into a performance degradation index by a function, so that it can also be set as an index consistent with the actual state of performance degradation. In this embodiment, the degradation diagnosis of the ozone generator 10 based on the performance evaluation index is described, but the diagnosis unit 5 can also use the correction differential pressure multiplier to diagnose the degradation condition of the ozone generator 10. In addition, in this embodiment 3, the case where the differential pressure is standardized by the design value or the initial value and the normalized differential pressure is used to diagnose the degradation condition of the ozone generator 10 is shown, but the inlet pressure or the outlet pressure can also be standardized to diagnose the degradation condition of the ozone generator 10.

[0065] The degradation diagnosis device 1c of this embodiment may include the determination unit 6 as in Embodiment 2. In this case, the maintenance period of the ozone generator 10 can be determined by providing a function for determining a prediction or a threshold value based on an approximate curve for the performance degradation index or the corrected differential pressure ratio.

[0066] Implementation method 4. In the fourth embodiment, the same reference numerals are used for the same components as those in the first embodiment of the present disclosure, and descriptions of the same or corresponding parts are omitted. Hereinafter, a degradation diagnosis device 1d and a degradation diagnosis system 100d according to the fourth embodiment will be described with reference to the drawings.

[0067] The degradation diagnosis device 1d and the degradation diagnosis system 100d of this embodiment include the item-related information acquisition unit 2, the item-specific information calculation unit 3, the measurement unit 4, and the diagnosis unit 5, as in the first embodiment. In addition, the degradation diagnosis device 1d and the degradation diagnosis system 100d of this embodiment are examples of performing degradation diagnosis by using other than the pressure difference (inlet pressure or outlet pressure) when the raw gas flow rate is constant. The explanation is focused on the outlet pressure of the ozone generator 10, but it may also be the inlet pressure.

[0068] Fig. 9 Schematic diagram showing the relationship between the ozone generator and pressure of the degradation diagnosis device involved in Embodiment 4 of the present disclosure. The compressor 41 sucks in the atmosphere to produce high-pressure compressed air. The oxygen generator 42 is a pressure swing method device called PSA that removes nitrogen from the compressed air to generate oxygen with an oxygen concentration of about 90% to 93%. The pressure reducing valve 43 reduces the pressure to make it approximately constant. The pressure gauge 45 measures the gas pressure on the outlet side of the ozone generator. The flow meter 46 measures the flow rate of the ozone-containing gas. The manual flow regulating valve 47 can manually adjust the flow rate.

[0069] Next, the operation will be described with an eye on the pressure of the system. Here, since this is an ozone generation system for PSA raw materials, the raw material flow rate is constant and the concentration is variable. First, at the start of operation, the manual flow control valve 47 is adjusted by on-site adjustment or the like so that a specified gas flow rate flows through, and then this state is maintained to continue operation. The raw material gas flow rate is kept constant, and the concentration of ozone generated is controlled by adjusting the power from the power supply device (not shown) to the ozone generator 10. Fig. 9 The pressure distribution of the system at this time is schematically shown in the figure below.

[0070] The position (distance) of the horizontal axis is shown by the dotted line, corresponding to Fig. 9. In the pressure reducing valve 43, as the name implies, the pressure is greatly reduced, and the pressure on the secondary side, that is, after the pressure reduction, remains roughly constant. There is also some pressure loss in the piping, but it is negligible compared to the pressure loss in the machine, so the pressure of the piping part in the figure is constant, that is, horizontal. There is a slight pressure loss in the ozone generator 10 and the flow meter 46, so the pressure drops. The pressure is greatly reduced through the manual flow regulating valve 47 and is supplied to the next stage. The initial pressure is represented by a solid line. In subsequent operations, since the raw gas flow rate is constant, the pressure distribution hardly changes in principle. However, in the case where the pressure loss in the ozone generator 10 increases due to changes over time, the flow rate decreases slightly and the pressure distribution changes as shown by the dotted line in the figure.

[0071] Here, an example is shown in which the pressure loss of the ozone generator 10 exceeds 2 times per unit flow rate. From the perspective of the pressure loss of the entire system, the increase in pressure loss is very small, so the decrease in flow rate is very small. In the ozone generator 10, the pressure loss exceeds 2 times per unit flow rate, but the flow rate is slightly reduced, so the actual pressure loss is 2 times. The pressure drop in the flowmeter 46 and the manual flow control valve 47 is reduced by the amount equivalent to the amount of flow reduction. In addition, the supply pressure (discharge pressure) to the rear stage is based on the use form of the rear stage, but as the sum of the head pressure (constant pressure loss that does not depend on the flow rate) and the pressure loss of the machine (pressure loss that depends on the flow rate), an example of a slight decrease is shown. As described above, the increase in the pressure loss (pressure difference) of the ozone generator 10 is manifested as a decrease in the outlet pressure. Therefore, by measuring the outlet pressure of the ozone generator 10, the diagnosis unit 5 can diagnose the degree of increase in the pressure loss (pressure difference) of the ozone generator 10, that is, the degree of deterioration of the ozone generator 10, according to the outlet pressure of the ozone generator 10.

[0072] As described above, the degradation diagnosis device 1d of the present embodiment includes: a measuring unit 4 that obtains measurement data of the operating status including the outlet pressure of the ozone generator 10; and a diagnostic unit 5 that diagnoses the degradation status of the ozone generator 10 based on the outlet pressure of the ozone generator 10, thereby diagnosing the degradation of the ozone generator 10. In addition, the degradation diagnosis system 100d includes the ozone generator 10 and the degradation diagnosis device 1c. Therefore, the degradation diagnosis device 1d and the degradation diagnosis system 100d of the present embodiment can also perform degradation diagnosis of the ozone generator by simple indicators as in the first embodiment.

[0073] Furthermore, in the case of constant raw material flow and changing concentration, when the voltage on the inlet side of the ozone generator 10 is kept roughly constant, the increase in the differential pressure of the ozone generator is expressed as the outlet pressure, and therefore, the decrease in the outlet pressure can be considered to be roughly the increase in the differential pressure. Therefore, by measuring the outlet pressure of the ozone generator 10, the diagnostic unit 5 can diagnose the deterioration of the ozone generator 10 based on the outlet pressure of the ozone generator 10. In the degradation diagnostic device and degradation diagnostic system of this embodiment, as in embodiments 2 to 3, for example, it can also be determined that it is a maintenance period when the pressure drops by more than a certain value. In addition, in this embodiment, a relatively expensive differential pressure gauge can be omitted, thereby having the effect of reducing costs.

[0074] In addition, the above embodiment shows an example of using the outlet pressure, but it is not limited to this. For example, in the operation of constant raw material flow and variable concentration, when the pressure loss on the outlet side is only the head pressure, the outlet pressure is kept constant and does not depend on the flow rate. In other words, when a manual flow control valve is set on the inlet side and the initial flow adjustment is performed on the inlet side, if the pressure loss of the ozone generator increases, the pressure increase on the inlet side of the ozone generator is equivalent to the amount of flow reduction. Therefore, by focusing on the increase in the inlet pressure of the ozone generator, the same effect can be achieved.

[0075] Implementation method 5. In the fifth embodiment, the same reference numerals are used for the same components as those in the first embodiment of the present disclosure, and descriptions of the same or corresponding parts are omitted. Hereinafter, a degradation diagnosis device 1e and a degradation diagnosis system 100e according to the fifth embodiment will be described with reference to the drawings.

[0076] The degradation diagnosis device 1e and the degradation diagnosis system 100e of this embodiment include an item-related information acquisition unit 2, an item-specific information calculation unit 3, a measurement unit 4, and a diagnosis unit 5, as in the first embodiment. In addition, the degradation diagnosis device 1e and the degradation diagnosis system 100e of this embodiment are examples of performing degradation diagnosis by using a method other than a pressure difference (inlet pressure or outlet pressure) in a structure capable of controlling the flow rate of raw gas. The description is made with an eye on the inlet pressure of the ozone generator 10, but the outlet pressure may also be used.

[0077] Fig.10 Schematic diagram showing the relationship between the ozone generator and pressure of the degradation diagnosis device according to Embodiment 5 of the present disclosure. The automatic flow control valve 51 automatically adjusts the flow rate so that the indication value of the flow meter 46 becomes a specified value. The pressure gauge 52 measures the inlet pressure of the raw gas to the ozone generator. The back pressure control valve 53 always operates to set the outlet pressure of the ozone generator 10 to a constant value, such as a mechanical back pressure valve, an electronic back pressure control valve, etc. Fig. 9 The description of repeated structures is omitted.

[0078] Next, the action will be described with an eye on the pressure of the system. Here, for the sake of simplicity, the case of constant raw material flow and variable concentration control is described, but the control method when the ozone generator 10 is in operation is not limited to this, and the raw gas flow rate can be changed. During operation, the pressure on the outlet side of the ozone generator 10 is always kept constant by the back pressure regulating valve. Here, the case where the pressure loss of the rear stage is only the head pressure that is independent of the gas flow rate is shown, so the pressure after the outlet side of the ozone generator 10 is all kept the same and does not depend on the flow rate. In addition, in the case where the pressure loss of the rear stage is the head pressure that is independent of the gas flow rate, and the head pressure equivalent to the operating pressure of the ozone generator 10 is always applied, the back pressure regulating valve 53 is not required, but the back pressure regulating valve 53 is set here to keep the outlet pressure of the ozone generator 10 at an appropriate value above the head pressure. The initial pressure distribution at the beginning of operation is, for example, a solid line. On the other hand, if the pressure loss, i.e., the pressure difference of the ozone generator increases after long-term use, the gas flow rate begins to decrease. Therefore, in order to prevent this, the valve opening of the automatic flow regulating valve 51 becomes larger, and the same flow rate flows. As a result, the pressure drop in the automatic flow regulating valve 51 becomes smaller, and the pressure distribution becomes as shown by the dotted line in the figure, and the inlet pressure of the ozone generator 10 increases. That is, the increase in the pressure loss (pressure difference) of the ozone generator 10 is manifested as an increase in the inlet pressure. Therefore, by measuring the inlet pressure of the ozone generator 10, the diagnosis unit 5 can diagnose the degree of increase in the pressure loss (pressure difference) of the ozone generator 10, in other words, the degree of deterioration of the ozone generator 10, based on the inlet pressure of the ozone generator 10.

[0079] As described above, the degradation diagnosis device 1e of the present embodiment includes: a measuring unit 4 that obtains measurement data of the operating status including the inlet pressure of the ozone generator 10; and a diagnostic unit 5 that diagnoses the degradation status of the ozone generator 10 based on the inlet pressure of the ozone generator 10, thereby diagnosing the degradation of the ozone generator 10. In addition, the degradation diagnosis system 100e includes the ozone generator 10 and the degradation diagnosis device 1c. Therefore, the degradation diagnosis device 1e and the degradation diagnosis system 100e of the present embodiment can also perform degradation diagnosis of the ozone generator by simple indicators, as in the first embodiment.

[0080] Furthermore, in the degradation diagnosis device 1e and the degradation diagnosis device system 100e of the present embodiment, the increase in the inlet pressure of the ozone generator 10 becomes an increase in the differential pressure, and therefore, by measuring the inlet pressure of the ozone generator 10, the diagnosis unit 5 can diagnose the degradation condition of the ozone generator 10 based on the inlet pressure of the ozone generator 10. In the degradation diagnosis device and the degradation diagnosis system of the present embodiment, for example, when the degradation exceeds a certain value, it can also be determined that it is a maintenance period, as in Embodiments 2 to 3. In addition, in the present embodiment, it is not necessary to use a relatively expensive differential pressure gauge, so there is an effect of reducing costs.

[0081] In addition, in this embodiment, the case of constant raw material flow rate and variable concentration control is described, but in a system that can use an automatic flow control valve to automatically change to an arbitrary flow rate, even in the constant concentration and variable raw material flow rate control, the same effect as monitoring the pressure difference of the ozone generator can be obtained by simply monitoring the ozone generator inlet pressure. In this case, the pressure difference of the ozone generator changes according to the flow rate, and the inlet pressure of the ozone generator also changes. Therefore, if a consideration method such as the pressure difference correction described in Embodiment 1 is introduced, the inlet pressure of the ozone generator 10 assuming the rated flow rate can be estimated at an arbitrary flow rate.

[0082] Furthermore, in the present embodiment, an example is shown in which the automatic flow regulating valve is present on the upstream side of the ozone generator, but it may also be located on the downstream side of the ozone generator. For example, there is a pressure reducing valve on the upstream side of the ozone generator, through which the inlet pressure of the ozone generator is kept substantially constant even if the raw gas flow rate changes. In this case, the increase in the pressure loss (pressure difference) of the ozone generator is manifested as a decrease in the outlet pressure of the ozone generator, and therefore, the degradation diagnosis can also be performed by measuring the outlet pressure. However, in the case of a change in the raw gas flow rate, as in the case of using the inlet pressure, it is preferable to introduce a consideration method such as the pressure difference correction described in Embodiment 1.

[0083] In addition, the deterioration of the ozone generator 10 in the present disclosure is not limited to being irreversible, and includes a case where the deterioration can be restored by maintenance such as cleaning or component replacement.

[0084] In addition, the present disclosure basically focuses on the annual changes in the performance evaluation index. However, if it is not specifically stated, the concept of time is added here, and the accumulated time during the operation period will also have an impact.

[0085] Furthermore, generally, diagnosis often includes judgment, but in the present disclosure, diagnosis is separated from judgment, and data processing, data output, etc. used for judgment are used.

[0086] In addition, in the above-mentioned embodiments 1 to 5, examples are shown in which the pressure difference or inlet pressure or outlet pressure of the ozone generator is used together with an index related to the load of the ozone generator for deterioration diagnosis and maintenance period judgment, but it can also be combined with an index such as ozone generation efficiency and unit power efficiency that represents performance that is completely different from the pressure relationship. The structure shown in the above-mentioned embodiment is an example of the content of the present disclosure and can also be combined with other known technologies. In addition, part of the structure can also be omitted or changed within the scope of the main purpose of the present disclosure.

[0087] Hereinafter, each aspect of the present disclosure will be collectively described as a supplementary note. (Note 1) A degradation diagnosis device includes: a measuring unit that obtains operating conditions, i.e., measurement data, including a pressure difference between an inlet and an outlet of a gas system including an ozone generator, an inlet pressure, or an outlet pressure; and A diagnostic unit diagnoses a degradation condition of the ozone generator based on the pressure difference, the inlet pressure, or the outlet pressure. (Note 2) The degradation diagnosis device according to Supplementary Note 1 further comprises an item-related information acquisition unit for acquiring item-related information including information on a constant operating condition of the ozone generator. In the diagnosis unit, based on the item-related information and the measurement data, the measurement data of the pressure difference, the inlet pressure or the outlet pressure is corrected to a value assuming a rated condition, and the corrected pressure difference, inlet pressure or outlet pressure is used to diagnose the degradation condition of the ozone generator. (Note 3) In the degradation diagnosis device as described in Note 1 or 2, in the diagnosis unit, the measurement data of the pressure difference, the inlet pressure or the outlet pressure are standardized using their respective design values ​​or initial values, and the standardized pressure difference, inlet pressure or outlet pressure is used to diagnose the degradation condition of the ozone generator. (Note 4) As in any one of Appendixes 1 to 3, in the diagnostic unit, a performance degradation index indicating a performance degradation of the ozone generator is obtained from measurement data of the pressure difference, the inlet pressure or the outlet pressure, and the degradation condition of the ozone generator is diagnosed using the performance degradation index. (Note 5) The degradation diagnosis device according to any one of Supplementary Notes 1 to 4 includes a diagnosis unit that is the diagnosis unit and outputs a load level that is information indicating a load condition of the ozone generator. (Note 6) The degradation diagnosis device according to any one of Supplementary Notes 1 to 5, further comprising a determination unit configured to determine a maintenance period of the ozone generator using the pressure difference, the inlet pressure, or the outlet pressure. (Note 7) In the degradation diagnosis device as described in Note 6, the judgment unit uses a value corresponding to the operating condition of the pressure difference or the inlet pressure or the outlet pressure to predict the future pressure difference or the inlet pressure or the outlet pressure of the ozone generator and judge the maintenance period of the ozone generator. (Note 8) In the degradation diagnosis device according to Supplementary Note 6 or 7, the determination unit determines the maintenance period of the ozone generator using the differential pressure or the inlet pressure or the outlet pressure and a load level which is information indicating a load condition of the ozone generator. (Note 9) A degradation diagnosis system includes: an ozone generator; a measuring unit that acquires measurement data of an operation status including a pressure difference between an inlet and an outlet of a gas system of the ozone generator, an inlet pressure, or an outlet pressure; and A diagnostic unit diagnoses a degradation condition of the ozone generator based on the pressure difference, the inlet pressure, or the outlet pressure. (Note 10) The degradation diagnosis system according to Supplementary Note 9 further includes a monitoring control device that monitors an operating condition of an item using the ozone generator and controls the ozone generator. (Note 11) A degradation diagnosis method, comprising: the steps of obtaining measurement data of operating conditions including a pressure difference between an inlet and an outlet, an inlet pressure, or an outlet pressure of a gas system including an ozone generator; and The step of diagnosing a degradation condition of the ozone generator based on the pressure difference, the inlet pressure or the outlet pressure. Description of symbols

[0088] 1, 1b, 1c, 1d, 1e Degradation diagnosis device 2 Project related information acquisition department 3. Project specific information acquisition department 4 Measurement unit 5 Diagnosis Department 6. Judgment Department 10. Ozone generator 12 Project related information 13 Project specific information 14 Measurement data 21 Input Devices 22 Computer 23CPU 24 Main storage device 25 Auxiliary storage device 26 Network 27 External storage device 28 Output device 41 Compressor 42 Oxygen Generator 43 Pressure reducing valve 45, 52 pressure gauge 46 Flow Meter 47 Manual flow control valve 51 Automatic flow control valve 53 Back pressure regulating valve 100, 100b, 100c, 100d, 100e are degradation diagnosis systems.

Claims

1. A degradation diagnosis device, characterized in that: include: a measuring unit that acquires operating conditions, i.e., measurement data, including a pressure difference between an inlet and an outlet of a gas system of the ozone generator, an inlet pressure, or an outlet pressure; as well as A diagnostic unit diagnoses a degradation condition of the ozone generator based on the pressure difference, the inlet pressure, or the outlet pressure.

2. The degradation diagnosis device according to claim 1, wherein: The method further comprises an item-related information acquisition unit for acquiring item-related information including information on the constant operating condition of the ozone generator. In the diagnosis unit, based on the item-related information and the measurement data, the measurement data of the pressure difference, the inlet pressure or the outlet pressure is corrected to a value assuming a rated condition, and the corrected pressure difference, inlet pressure or outlet pressure is used to diagnose the degradation condition of the ozone generator.

3. The degradation diagnosis device according to claim 1 or 2, characterized in that: In the diagnosis unit, the measured data of the differential pressure, the inlet pressure, or the outlet pressure are standardized using respective design values ​​or initial values, and the deterioration condition of the ozone generator is diagnosed using the standardized differential pressure, inlet pressure, or outlet pressure.

4. The degradation diagnosis device according to claim 1 or 2, characterized in that: The diagnostic unit obtains a performance degradation index indicating a performance degradation of the ozone generator from the measurement data of the differential pressure, the inlet pressure, or the outlet pressure, and diagnoses a deterioration condition of the ozone generator using the performance degradation index.

5. The degradation diagnosis device according to claim 1 or 2, characterized in that: A diagnostic unit is provided, which is the diagnostic unit and outputs a load level which is information indicating a load condition of the ozone generator.

6. The degradation diagnosis device according to claim 1 or 2, characterized in that: The invention further includes a determination unit configured to determine a maintenance period of the ozone generator using the pressure difference, the inlet pressure, or the outlet pressure.

7. The degradation diagnosis device according to claim 6, wherein: The determination unit predicts the future differential pressure, the inlet pressure, or the outlet pressure of the ozone generator using a value corresponding to the operating status of the differential pressure, the inlet pressure, or the outlet pressure, and determines the maintenance period of the ozone generator.

8. The degradation diagnosis device according to claim 6, wherein: The determination unit determines the maintenance period of the ozone generator using the differential pressure, the inlet pressure, or the outlet pressure, and a load level which is information indicating a load condition of the ozone generator.

9. A degradation diagnosis system, characterized in that: include: Ozone generator; a measuring unit that acquires measurement data of operating conditions including a pressure difference between an inlet and an outlet of a gas system of the ozone generator, an inlet pressure, or an outlet pressure; as well as A diagnostic unit diagnoses a degradation condition of the ozone generator based on the pressure difference, the inlet pressure, or the outlet pressure.

10. The degradation diagnosis system according to claim 9, wherein: A monitoring control device is further provided, the monitoring control device monitoring the operating status of an item using the ozone generator and controlling the ozone generator.

11. A degradation diagnosis method, characterized in that: Include: The step of obtaining measurement data of the operating conditions including the pressure difference between the inlet and outlet of the gas system of the ozone generator, the inlet pressure or the outlet pressure; and The step of diagnosing a degradation condition of the ozone generator based on the pressure difference, the inlet pressure or the outlet pressure.

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