Swing lift device and wafer inspection equipment

Abstract

The present invention discloses a swing-type lifting device and wafer detection equipment, which relate to the technical field of printing equipment, and are provided by setting a base, a carrier and a swing-type lifting module including a rotary drive mechanism, an eccentric swing mechanism and a reversing transmission mechanism. When in use, the rotary drive mechanism drives the eccentric swing mechanism to perform eccentric rotational motion, and when the eccentric swing mechanism swings in the vertical plane, it drives the reversing transmission mechanism to drive the carrier to lift and lower. The driving mechanism can complete the carrier lifting cycle for loading and unloading by unidirectional rotation, avoiding the loss of position accuracy caused by the direction of motor rotation. At the same time, the carrier stroke depends entirely on the eccentric distance of the eccentric wheel, and no additional mechanical limiter or other safety devices are required. The mechanism has a clear principle, a simple structure, a low manufacturing cost, a large load capacity, can achieve a high lifting motion accuracy, and can ensure the stability of the lifting process under large load conditions.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing equipment, and in particular to a swing-type lifting device and wafer detection equipment. Background Art

[0002] Wafer lifting technology is a key technology in the semiconductor manufacturing process. With the rapid development of integrated circuits, the requirements for the precision, stability, and reliability of wafer lifting mechanisms are becoming increasingly stringent. Early wafer lifting technologies relied primarily on simple mechanical structures such as levers and sliders. While these structures were capable of achieving basic lifting functions, they lacked precision and stability. With technological advancements, more complex mechanical designs have gradually been introduced into wafer lifting mechanisms, such as ramp lift mechanisms and lead screw rotary drive mechanisms. These designs have improved the performance of the lifting mechanism to a certain extent, but some limitations still exist.

[0003] At present, wafer lifting technology has developed to a stage that includes a variety of complex mechanisms and drive methods. For example, some lifting mechanisms use multiple inclined block lifting mechanisms to offset the horizontal force, thereby preventing the guide mechanism from being subjected to large forces, thereby ensuring the guidance accuracy and movement smoothness of the probe station lifting movement. In addition, some designs use screw drives to achieve wafer lifting. Although the transmission efficiency is high, the vertically placed screw mechanism occupies valuable vertical working space and has problems with poor self-locking and deformation under force. In addition, some designs attempt to achieve wafer lifting and rotation by rotating the lifting platform, but these designs still face the problems of precision loss and affected synchronous belt transmission accuracy in actual applications.

[0004] Although the existing wafer lifting technology meets the needs of industrial applications to a certain extent, the existing wafer lifting mechanism cannot guarantee high-precision lifting motion under large load conditions. Summary of the Invention

[0005] The main purpose of the present invention is to propose a swing-type lifting device and wafer detection equipment, aiming to solve the technical problem that the wafer lifting mechanism in the prior art cannot ensure high-precision lifting movement under heavy load conditions.

[0006] To achieve the above objectives, in a first aspect, the present invention provides a swing-type lifting device, comprising a base, a loading platform, and a swing-type lifting module, wherein the swing-type lifting module comprises:

[0007] a rotary drive mechanism, the rotary drive mechanism being mounted on the base;

[0008] an eccentric swing mechanism, wherein the output end of the rotary drive mechanism is eccentrically connected to the eccentric swing mechanism, and the rotary drive mechanism can drive the eccentric swing mechanism to eccentrically rotate so as to swing the eccentric swing mechanism in a vertical plane; and

[0009] a reversing transmission mechanism, the reversing transmission mechanism being movably connected to the eccentric swing mechanism, and the loading platform being mounted on the top of the reversing transmission mechanism;

[0010] The reversing transmission mechanism can cooperate with the eccentric swing mechanism to drive the loading platform to move up and down when the rotary drive mechanism drives the eccentric swing mechanism to swing in the vertical plane.

[0011] In one embodiment, the eccentric swing mechanism includes:

[0012] an eccentric wheel, wherein the eccentric hole of the eccentric wheel is connected to the output shaft of the rotary drive mechanism; and

[0013] A swing seat, wherein a mounting hole is formed near the bottom of the swing seat, the eccentric wheel is mounted in the mounting hole and rotatably engaged with the hole wall of the mounting hole, and the top of the swing seat is movably connected to the reversing transmission mechanism;

[0014] The rotation drive mechanism can drive the eccentric wheel to rotate eccentrically, so that the swing seat swings in the vertical plane.

[0015] In one embodiment, the reversing transmission mechanism includes:

[0016] A connecting rod, the bottom of which is rotatably connected to the top of the swing seat via a latch, and the top of which is connected to the loading platform; and

[0017] A guide member, the guide member is located above the base and connected to the base, and the guide member is provided with a first guide cylinder for the top of the connecting rod to pass through and to slide with the connecting rod;

[0018] The connecting rod can cooperate with the swing seat to drive the loading platform to rise and fall when the rotary drive mechanism drives the eccentric wheel to rotate eccentrically and drives the swing seat to swing in the vertical plane.

[0019] In one embodiment, the reversing transmission mechanism includes:

[0020] A slide rail, the slide rail being horizontally mounted on the top of the swing seat;

[0021] A connecting plate, wherein a slider slidably engaged with the slide rail is installed at the bottom of the connecting plate, and the loading platform is installed at the top of the connecting plate;

[0022] When the rotary drive mechanism drives the eccentric wheel to rotate eccentrically and causes the swing seat to swing in the vertical plane, the slide rail on the top of the swing seat and the sliding block slide together to drive the loading platform to rise and fall through the connecting plate.

[0023] In one embodiment, there are multiple swing-type lifting modules, and the multiple swing-type lifting modules are distributed at intervals along the circumference of the loading platform, and the multiple swing-type lifting modules are distributed opposite to each other. The swing directions of the eccentric swing mechanisms in any two relatively arranged swing-type lifting modules are opposite, and the swing amplitudes of the eccentric swing mechanisms in all the swing-type lifting modules are consistent.

[0024] In one embodiment, the eccentric swing mechanism includes a sun wheel and a moon wheel, the sun wheel is located inside the moon wheel, and the sun wheel and the moon wheel are eccentrically arranged, the sun wheel is fixedly connected to the output shaft of the rotation drive mechanism, the reversing transmission mechanism is formed with a placement hole near its bottom, the moon wheel is installed in the placement hole, and the moon wheel is rotatably engaged with the inner wall of the placement hole, the rotation drive mechanism can drive the sun wheel to drive the moon wheel to rotate eccentrically, so that the moon wheel swings in the vertical plane.

[0025] In one embodiment, the reversing transmission mechanism includes:

[0026] a guide plate, the guide plate being located above the base and connected to the base, and the guide plate being provided with a second guide cylinder;

[0027] A reversing transmission member, wherein the placement hole is formed near the bottom of the reversing transmission member, the top of the reversing transmission member passes through the second guide cylinder and slides with the second guide cylinder, the top of the reversing transmission member is equipped with the loading platform, and the reversing transmission member can drive the sun wheel to drive the moon wheel to rotate eccentrically when the rotating drive mechanism drives the sun wheel to drive the moon wheel to rotate eccentrically, so that the moon wheel swings in the vertical plane and drives the loading platform to rise and fall.

[0028] In one embodiment, the rotation drive mechanism includes:

[0029] a driving member, the driving member being mounted on the base;

[0030] a first synchronous wheel mounted on the output shaft of the driving member;

[0031] a second synchronous wheel, the second synchronous wheel being eccentrically connected to the eccentric swing mechanism via a rotating shaft; and

[0032] A synchronous belt is sleeved on the outer circumference of the first synchronous wheel and the second synchronous wheel, and the driving member can drive the first synchronous wheel to rotate, so as to drive the eccentric swing mechanism to rotate eccentrically through the synchronous belt and the second synchronous wheel, so that the eccentric swing mechanism swings in the vertical plane.

[0033] In one embodiment, an outer diameter of the first synchronous wheel is smaller than an outer diameter of the second synchronous wheel.

[0034] Based on the same technical concept, in a second aspect, the present invention further proposes a wafer inspection device, which uses the swing-type lifting device described in the first aspect, and a wafer is placed on the stage.

[0035] The technical solution of the present invention is to provide a base, a loading platform, and a swing-type lifting module including a rotary drive mechanism, an eccentric swing mechanism, and a reversing transmission mechanism. When in use, the rotary drive mechanism drives the eccentric swing mechanism to perform eccentric rotary motion, and when the eccentric swing mechanism swings in the vertical plane, it drives the reversing transmission mechanism to drive the loading platform to rise and fall. The driving mechanism can complete the loading platform lifting cycle for loading and unloading by unidirectional rotation, avoiding the loss of position accuracy caused by the direction of the motor. At the same time, the loading platform stroke is completely determined by the eccentricity of the eccentric wheel, and no additional mechanical limiter or other safety devices are required. The mechanism has a clear principle, a simple structure, a low manufacturing cost, a large load capacity, can achieve a high lifting motion accuracy, and can ensure the smoothness of the lifting process under heavy load conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0037] Figure 1 A schematic structural diagram of an embodiment of a swing-type lifting device provided by the present invention;

[0038] Figure 2 for Figure 1 A schematic diagram of the structure of the enlarged portion A of the example;

[0039] Figure 3 A schematic structural diagram of another embodiment of the swing-type lifting device provided by the present invention;

[0040] Figure 4 for Figure 3 A schematic diagram of the structure of the enlarged portion B of the example;

[0041] Figure 5A schematic structural diagram of another embodiment of the swing-type lifting device provided by the present invention;

[0042] Figure 6 for Figure 5 Schematic diagram of the side structure of the example;

[0043] Figure 7 for Figure 6 Schematic diagram of the CC cross-section structure of the example.

[0044] Description of Figure Numbers:

[0045] 100. Base; 200. Loading table; 300. Swinging lifting module; 310. Rotary drive mechanism; 320. Eccentric swing mechanism; 330. Reversing transmission mechanism; 321. Eccentric wheel; 322. Swing seat; 323. Mounting hole; 331. Connecting rod; 332. Guide member; 324. Slide rail; 325. Slider; 333. Connecting member; 327. Moon wheel; 328. Placement hole; 334. Guide plate; 335. Reversing transmission member; 311. Driving member; 312. First synchronous wheel; 313. Second synchronous wheel; 314. Synchronous belt; 400. Wafer; 336. First guide cylinder; 337. Second guide cylinder.

[0046] The purpose, features and advantages of the present invention will be further described with reference to the accompanying drawings and in conjunction with the embodiments. DETAILED DESCRIPTION

[0047] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of the present invention.

[0048] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0049] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0050] The present invention provides a swing-type lifting device and wafer detection equipment.

[0051] See also Figures 1 to 7 For ease of understanding, the swing-type lifting device includes a base 100, a loading platform 200 and a swing-type lifting module 300, wherein the swing-type lifting module 300 includes a rotary drive mechanism 310, an eccentric swing mechanism 320 and a reversing transmission mechanism 330. The rotary drive mechanism 310 is installed on the base 100, and the output end of the rotary drive mechanism 310 is eccentrically connected to the eccentric swing mechanism 320. The rotary drive mechanism 310 can drive the eccentric swing mechanism 320 to eccentrically rotate so that the eccentric swing mechanism 320 swings in a vertical plane. The reversing transmission mechanism 330 is movably connected to the eccentric swing mechanism 320, and the loading platform 200 is installed on the top of the reversing transmission mechanism 330; the reversing transmission mechanism 330 can cooperate with the eccentric swing mechanism 320 to drive the loading platform 200 to rise and fall when the rotary drive mechanism 310 drives the eccentric swing mechanism 320 to swing in the vertical plane.

[0052] In this embodiment, a base 100, a loading platform 200, and a swing-type lifting module 300 including a rotation drive mechanism 310, an eccentric swing mechanism 320, and a reversing transmission mechanism 330 are provided. During use, the rotation drive mechanism 310 drives the eccentric swing mechanism 320 to perform eccentric rotational motion. As the eccentric swing mechanism 320 swings within a vertical plane, it drives the reversing transmission mechanism 330 to raise and lower the loading platform 200. This mechanism has a clear principle, a simple structure, and low manufacturing cost.

[0053] It should be particularly and clearly stated that, in this embodiment, the rotary drive mechanism 310 can complete the stage lifting cycle for loading and unloading by unidirectional rotation, thereby avoiding the position accuracy loss caused by the rotation of the rotary drive mechanism 310 in conventional technology.

[0054] It is important to note that in this embodiment, the effective operating positions of the stage 200, namely the loading and unloading position and the wafer inspection position, are located at the two extremes of its travel. The travel of the stage 200 is entirely determined by the eccentricity of the eccentric wheel, and no additional safety devices such as mechanical limiters are required.

[0055] It should be particularly and clearly stated that, in this embodiment, the four-bar mechanism composed of the eccentric swing mechanism and the reversing transmission mechanism has a self-locking condition, and can therefore withstand a larger workload when the stage is in the wafer detection position.

[0056] It should be particularly and clearly stated that in this embodiment, when the stage is in the wafer detection position, the transmission mechanism, in addition to providing vertical force to balance the working load, does not generate or only generates a small horizontal force, so as to prevent the guide mechanism from bearing a large load.

[0057] Of course, it should be clearly stated that the swing-type wafer 400 lifting mechanism illustrated in this embodiment is mainly used in the inspection process of the wafer 400 .

[0058] In some specific embodiments, the eccentric swing mechanism 320 includes an eccentric wheel 321 and a swing seat 322. The eccentric hole of the eccentric wheel 321 is connected to the output shaft of the rotary drive mechanism 310. The swing seat 322 has a mounting hole 323 formed near its bottom. The eccentric wheel 321 is installed in the mounting hole 323 and rotates with the hole wall of the mounting hole 323. The top of the swing seat 322 is movably connected to the reversing transmission mechanism 330. The rotary drive mechanism 310 can drive the eccentric wheel 321 to rotate eccentrically so that the swing seat 322 swings in the vertical plane.

[0059] In this embodiment, the eccentric swing mechanism 320 is configured to include an eccentric wheel 321 and a swing seat 322. When in use, the eccentric wheel 321 is installed at the output end of the rotary drive mechanism 310, and a mounting hole 323 is provided near the bottom of the swing seat 322. The eccentric wheel 321 is installed in the mounting hole 323, and the eccentric wheel 321 is rotated and matched with the inner wall of the mounting hole 323. The rotary drive mechanism 310 is used to drive the eccentric wheel 321 to rotate eccentrically, so that the present invention can utilize the eccentric rotation of the eccentric wheel 321 to achieve the function of driving the swing seat 322 to swing and lift when in use.

[0060] In some specific embodiments, the reversing transmission mechanism 330 includes:

[0061] A connecting rod 331, the bottom of which is rotatably connected to the top of the swing seat 322 via a latch; and

[0062] The guide member 332 is located above the base 100 and is connected to the base 100. The guide member 332 is provided with a first guide cylinder 336 that is slidably engaged with the connecting rod 331;

[0063] When the rotary drive mechanism 310 drives the eccentric wheel 321 to rotate eccentrically and drives the swing seat 322 to swing in the vertical plane, the connecting rod 331 can cooperate with the swing seat 322 to drive the loading platform 200 to move up and down.

[0064] In this embodiment, a connecting rod 331 and a guide member 332 are provided. During use, the connecting rod 331 is rotatably connected to the top of the swing base 322 via a latch, while the connecting rod 331 is slidably engaged with the first guide cylinder 336 of the guide member 332 to enable the stage 200 to move the wafer 400 upward and downward. This prevents the connecting rod 331 from swinging as it moves up and down with the swing base 322, effectively resolving the prior art defect of swinging the wafer 400 upward and downward, which affects its stability.

[0065] It should be particularly and clearly stated that, in this embodiment, the guide member 332 and the base 100 are different parts of the same component, or two parts that are fixedly connected.

[0066] It should be specifically and clearly stated that in this embodiment, the connecting rod 331 and the first guide cylinder 336 of the guide member 332 are slidably engaged to achieve the motion guidance function. Alternatively, a linear guide rail and a slider can be slidably engaged to achieve the motion guidance function. Using multiple guide mechanisms for joint guidance can improve guidance accuracy.

[0067] In some improved embodiments, the example reversing transmission mechanism 330 may also include a slide rail 324, a slider 325 and a connecting member 333, the slide rail 324 is installed on the top of the swing seat 322, the slider 325 slides with the slide rail 324, the bottom of the connecting member 333 is connected to the slider 325, and the top of the connecting member 333 is connected to the workbench 200; the connecting member 333 can drive the eccentric wheel 321 to rotate eccentrically and drive the slider 325 to slide along the slide rail 324 in the vertical plane to drive the workbench 200 to rise and fall.

[0068] It should be particularly and clearly stated that, in this embodiment, the sliding cooperation between the slide rail 324 and the slider 325 only transmits force in the vertical direction.

[0069] In an exemplary embodiment, there are multiple swing-type lifting modules 300, and the multiple swing-type lifting modules 300 are distributed at intervals along the circumferential direction, and the multiple swing-type lifting modules 300 are distributed opposite to each other in pairs. The swing directions of any two relatively arranged swing-type lifting modules 300 are opposite, and all the swing-type lifting modules 300 move synchronously.

[0070] It is understood that the number of swing-type lifting modules 300 can be set to multiple. In an exemplary embodiment, the number of swing-type lifting modules 300 is set to four, and the four swing-type lifting modules 300 are spaced apart along the circumference and arranged in pairs opposite to each other. Any two swing-type lifting modules 300 arranged opposite to each other swing in opposite directions, and all swing-type lifting modules 300 move synchronously.

[0071] It should be particularly and clearly stated that, in this embodiment, the number of the swing-type lifting modules 300 is preferably four or six.

[0072] In this embodiment, by setting the number of swing-type lifting modules 300 to four, the four swing-type lifting modules 300 are spaced apart circumferentially and arranged in pairs facing each other during operation. During operation, any two opposing swing-type lifting modules 300 swing in opposite directions. The synchronous drive of multiple motors can serve as a motion guide.

[0073] It should be clearly stated that in this embodiment, when four swing-type lifting modules 300 are configured, the four swing-type lifting modules 300 should be spaced apart along the circumferential direction, and the four swing-type lifting modules 300 should be arranged opposite each other in pairs. During the lifting operation, the four swing-type lifting modules 300 are driven in a synchronous lifting manner. At the same time, the rotation direction of two swing-type lifting modules 300 in one group of the four swing-type lifting modules 300 is opposite to the rotation direction of the other group of swing-type lifting modules 300. That is, when the eccentric wheels 321 of the two swing-type lifting modules 300 arranged opposite to each other rotate clockwise, the eccentric wheels 321 of the other two swing-type lifting modules 300 rotate counterclockwise. At the same time, when in use, the eccentric wheel 321 and the worktable 200 are connected through the sliding cooperation of the slide rail 324 and the slider 325. When the worktable 200 carries the wafer 400, the horizontal force generated by the worktable 200 can be completely eliminated by the cooperation of the slide rail 324 and the slider 325. As a result, the present invention can completely eliminate the horizontal force generated by the worktable 200 during specific use, thereby ensuring the stability of the overall structure.

[0074] In addition, in this embodiment, the swing-type lifting module 300 is used to drive the lifting of the stage 200, which means that when in use, the present invention only needs to drive the eccentric wheel 321 to rotate in one direction. This also allows the present invention to avoid the defects of the driving mechanism causing micro-deformation of the stage 200, the gap between the stage 200 and the wafer 400, and the accuracy of the stage 200 being affected, thereby ensuring the accuracy of the swing-type wafer 400 lifting mechanism during operation. At the same time, because the stroke of the stage 200 can be directly determined by the eccentric distance of the eccentric wheel 321, the present invention can be implemented without the need for additional limiting devices, simplifying the structure and reducing manufacturing costs.

[0075] In other improved embodiments, the eccentric oscillating mechanism 320 includes a sun wheel 329 and a moon wheel 327. The sun wheel 329 is located within the moon wheel 327, and the two rotate in unison. The eccentric hole of the sun wheel 329 is fixedly connected to the output shaft of the rotary drive mechanism 310. The reversing transmission mechanism 330 has a placement hole 328 near its bottom, and the moon wheel 327 is installed in the placement hole 328. The two rotate in unison. The rotary drive mechanism 310 can drive the sun wheel 329 to rotate eccentrically, causing the moon wheel 327 to oscillate in the vertical plane.

[0076] In some preferred embodiments, the reversing transmission mechanism 330 includes:

[0077] The guide plate 334 is located above the base 100, and the two are different parts of the same component, or two parts fixedly connected. The guide plate 334 is provided with a second guide cylinder 337;

[0078] The reversing transmission member 335 has a placement hole 328 near its bottom. The top of the reversing transmission member 335 is fixedly connected to the workbench 200. The reversing transmission member 335 slides with the second guide cylinder 337. The reversing transmission member 335 can drive the workbench 200 to rise and fall when the rotating drive mechanism 310 drives the sun wheel 329 to rotate eccentrically and drives the moon wheel 327 to swing in the vertical plane.

[0079] In this embodiment, a guide plate 334 and a reversing transmission member 335 are provided to connect the guide plate 334 to the base 100, and a second guide cylinder 337 is provided on the guide plate 334 so that the reversing transmission member 335 and the second guide cylinder 337 can be slidably fitted together. Thus, when the present invention is implemented, the second guide cylinder 337 can be used to guide the reversing transmission member 335, thereby ensuring the stability of the overall structure.

[0080] It should be noted that, in this embodiment, the reversing transmission member 335 and the second guide cylinder 337 are slidably engaged to achieve the motion guidance function. Alternatively, a linear guide rail and a slider can be slidably engaged to achieve the motion guidance function. Using multiple guide mechanisms for joint guidance can improve guidance accuracy.

[0081] In some specific embodiments, the rotation drive mechanism 310 includes:

[0082] A driving member 311 , the driving member 311 is mounted on the base 100 ;

[0083] A first synchronous wheel 312 , which is mounted on the output shaft of the driving member 311 ;

[0084] A second synchronous wheel 313, which is eccentrically connected to the eccentric swing mechanism 320 via a bearing; and

[0085] The synchronous belt 314 is sleeved on the outer circumference of the first synchronous wheel 312 and the second synchronous wheel 313, and the driving member 311 can drive the second synchronous wheel 313 to rotate through the synchronous belt 314 sleeved on the first synchronous wheel 312, and drive the eccentric swing mechanism 320 to rotate eccentrically, so that the eccentric swing mechanism 320 swings in the vertical plane.

[0086] In this embodiment, by providing a driving member 311, a first synchronous wheel 312, a second synchronous wheel 313, and a synchronous belt 314, the present invention can utilize the driving member 311 to drive the transmission belt via the first synchronous wheel 312 to drive the second synchronous wheel 313 during use, thereby enabling the overall rotation drive structure to maintain high stability during movement. It should be specifically and clearly stated that in this embodiment, the driving member 311 is preferably a drive motor.

[0087] Of course, the connecting shaft connected to the eccentric shaft illustrated in this embodiment may also be a crankshaft or a crankshaft-like structure. By setting the connecting shaft connected to the eccentric shaft as a crankshaft or a crankshaft-like structure, the present invention can increase the eccentric motion amplitude of the eccentric wheel 321 during the process of driving the eccentric wheel 321 to rotate, thereby allowing the worktable to have a larger stroke.

[0088] Based on the same technical concept, in a second aspect, the present invention further proposes a wafer inspection device, which applies the swing-type lifting device of the first aspect, and a wafer 400 is placed on the stage 200 .

[0089] The wafer 400 inspection device provided in this application utilizes the wafer 400 lifting mechanism of the aforementioned embodiment, which can resolve the technical issues of the wafer 400 lifting device having a complex system structure and high manufacturing and maintenance costs during operation. Compared with the prior art, the beneficial effects of the wafer 400 inspection device provided in this application are the same as those of the wafer 400 lifting mechanism provided in the aforementioned embodiment, and the other technical features of the wafer 400 inspection device are the same as those disclosed in the previous embodiment, and are not further described here.

[0090] Of course, the wafer 400 lifting device illustrated in this embodiment is not only used in the wafer 400 detection equipment, but can also be used in the transportation process of the wafer 400 photolithography process. If the wafer 400 lifting device illustrated in this embodiment is applied to the wafer 400 photolithography process, the wafer 400 lifting device illustrated in this embodiment can be replaced with the corresponding equipment in the wafer 400 photolithography process, which will not be elaborated here.

[0091] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformation made by utilizing the contents of the present invention's description and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields, is included in the patent protection scope of the present invention.

Claims

1. A swing-type lifting device, characterized in that: The invention comprises a base, a loading platform and a swing-type lifting module, wherein the swing-type lifting module comprises: a rotary drive mechanism, the rotary drive mechanism being mounted on the base; an eccentric swing mechanism, wherein the output end of the rotary drive mechanism is eccentrically connected to the eccentric swing mechanism, and the rotary drive mechanism can drive the eccentric swing mechanism to eccentrically rotate so as to swing the eccentric swing mechanism in a vertical plane; and a reversing transmission mechanism, the reversing transmission mechanism being movably connected to the eccentric swing mechanism, and the loading platform being mounted on the top of the reversing transmission mechanism; The reversing transmission mechanism can cooperate with the eccentric swing mechanism to drive the loading platform to move up and down when the rotary drive mechanism drives the eccentric swing mechanism to swing in the vertical plane; The eccentric swing mechanism comprises: an eccentric wheel, wherein the eccentric hole of the eccentric wheel is connected to the output shaft of the rotary drive mechanism; and A swing seat, wherein a mounting hole is formed near the bottom of the swing seat, the eccentric wheel is mounted in the mounting hole and rotatably engaged with the hole wall of the mounting hole, and the top of the swing seat is movably connected to the reversing transmission mechanism; The rotary drive mechanism can drive the eccentric wheel to rotate eccentrically, so that the swing seat swings in the vertical plane; The reversing transmission mechanism comprises: A connecting rod, the bottom of which is rotatably connected to the top of the swing seat via a latch, and the top of which is connected to the loading platform; and A guide member, the guide member is located above the base and connected to the base, and the guide member is provided with a first guide cylinder for the top of the connecting rod to pass through and to slide with the connecting rod; The connecting rod can cooperate with the swing seat to drive the loading platform to rise and fall when the rotary drive mechanism drives the eccentric wheel to rotate eccentrically and drives the swing seat to swing in the vertical plane.

2. The swing type lifting device according to claim 1, characterized in that: The reversing transmission mechanism comprises: A slide rail, the slide rail being horizontally mounted on the top of the swing seat; A connecting plate, wherein a slider slidably engaged with the slide rail is installed at the bottom of the connecting plate, and the loading platform is installed at the top of the connecting plate; When the rotary drive mechanism drives the eccentric wheel to rotate eccentrically and causes the swing seat to swing in the vertical plane, the slide rail on the top of the swing seat and the sliding block slide together to drive the loading platform to rise and fall through the connecting plate.

3. The swing type lifting device according to claim 2, characterized in that: There are multiple swing-type lifting modules, and the multiple swing-type lifting modules are distributed at intervals along the circumference of the loading platform, and the multiple swing-type lifting modules are distributed opposite to each other. The swing directions of the eccentric swing mechanisms in any two relatively arranged swing-type lifting modules are opposite, and the swing amplitudes of the eccentric swing mechanisms in all the swing-type lifting modules are consistent.

4. The swing type lifting device according to claim 1, characterized in that: The eccentric swing mechanism includes a sun wheel and a moon wheel. The sun wheel is located inside the moon wheel, and the sun wheel and the moon wheel are eccentrically arranged. The sun wheel is fixedly connected to the output shaft of the rotation drive mechanism. The reversing transmission mechanism is formed with a placement hole near its bottom. The moon wheel is installed in the placement hole, and the moon wheel is rotatably matched with the inner wall of the placement hole. The rotation drive mechanism can drive the sun wheel to drive the moon wheel to rotate eccentrically, so that the moon wheel swings in the vertical plane.

5. The swing type lifting device according to claim 4, characterized in that: The reversing transmission mechanism comprises: a guide plate, the guide plate being located above the base and connected to the base, and the guide plate being provided with a second guide cylinder; A reversing transmission member, wherein the placement hole is formed near the bottom of the reversing transmission member, the top of the reversing transmission member passes through the second guide cylinder and slides with the second guide cylinder, the top of the reversing transmission member is equipped with the loading platform, and the reversing transmission member can drive the sun wheel to drive the moon wheel to rotate eccentrically when the rotating drive mechanism drives the sun wheel to drive the moon wheel to rotate eccentrically, so that the moon wheel swings in the vertical plane and drives the loading platform to rise and fall.

6. The swing type lifting device according to any one of claims 1 to 5, characterized in that: The rotary drive mechanism comprises: a driving member, the driving member being mounted on the base; a first synchronous wheel mounted on the output shaft of the driving member; a second synchronous wheel, the second synchronous wheel being eccentrically connected to the eccentric swing mechanism via a rotating shaft; and A synchronous belt is sleeved on the outer circumference of the first synchronous wheel and the second synchronous wheel, and the driving member can drive the first synchronous wheel to rotate, so as to drive the eccentric swing mechanism to rotate eccentrically through the synchronous belt and the second synchronous wheel, so that the eccentric swing mechanism swings in the vertical plane.

7. The swing type lifting device according to claim 6, characterized in that: An outer diameter of the first synchronous wheel is smaller than an outer diameter of the second synchronous wheel.

8. A wafer inspection device, characterized in that: The swing lifting device according to any one of claims 1 to 7 is applied, and a wafer is placed on the stage.

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