Evacuation ring, process chamber, thin film deposition equipment and installation method of the extraction ring

Abstract

This invention discloses a suction ring component, a process chamber, a thin film deposition apparatus, and a method for installing the suction ring component. The suction ring component is installed in the chamber of the process chamber; the suction ring component includes a suction bushing and a suction ring; the suction bushing is installed in the chamber and has an annular overlap groove; the suction ring overlaps in the annular overlap groove, forming a suction channel connecting the chamber to the outside between the suction ring and the suction bushing; a leak-proof component is provided at the connection between the chamber, the suction bushing, and the suction ring to eliminate tolerance gaps at the connection, thereby ensuring the airtightness of the suction channel. This invention eliminates tolerance gaps at the connection between the chamber, the suction bushing, and the suction ring through the leak-proof component, ensuring good airtightness of the suction ring component during suction and preventing leakage that could affect the process.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a vacuum ring, a process cavity, a thin film deposition equipment, and a method for installing the vacuum ring. Background Technology

[0002] In atomic thin film deposition processes using semiconductor thin film deposition equipment (such as ALD equipment), especially in the DRAM memory chip manufacturing process, as process requirements become increasingly stringent and process run times and cycles become increasingly shorter, the influence of the suction ring structure on the flow field within the process chamber becomes significant.

[0003] In existing semiconductor thin film deposition equipment, since the suction ring and process cavity need to be positioned, they are basically equipped with positioning bosses and positioning grooves, which inevitably result in tolerance gaps. If the tolerance gaps are too large, gaps will appear and cause air leakage. Air leakage will affect the airflow field and thus affect the process. If the tolerance gaps are too small, assembly may not be possible. Summary of the Invention

[0004] The purpose of this invention is to provide a vacuum ring, a process chamber, a thin film deposition equipment, and a method for installing the vacuum ring, in order to solve the problem of air leakage that easily occurs during the positioning and fitting of existing vacuum rings and process chambers.

[0005] To solve the above-mentioned technical problems, the objective of this invention is achieved through the following technical solution: providing a vacuum ring component, installed in the chamber of a process cavity; the vacuum ring component includes:

[0006] An extraction bushing is installed in the chamber, and an annular overlapping groove is provided on the extraction bushing;

[0007] An extraction ring overlaps in the annular overlap groove, and an extraction channel connecting the chamber to the outside is formed between the extraction ring and the extraction bushing.

[0008] The connection between the chamber, the suction bushing, and the suction ring is provided with a leak-proof component. The leak-proof component is used to eliminate the tolerance gap at the connection between the chamber, the suction bushing, and the suction ring to ensure the airtightness of the suction channel.

[0009] Furthermore, the suction bushing and the chamber are connected by a concave-convex structure for positioning and fitting. The leak-proof component includes a leak-proof coating, which is applied to the concave-convex structure between the suction bushing and the chamber to fill the tolerance gap at the concave-convex structure.

[0010] Furthermore, the leak-proof component includes a sealant that seals the overlap angle between the suction ring and the suction bushing.

[0011] Furthermore, the suction ring has multiple suction holes along the circumferential direction, and the diameter and spacing of the suction holes on different suction rings are different.

[0012] The top of the suction ring is provided with a connecting part, which is used to connect and cooperate with an external tool to facilitate the removal of the suction ring from the suction bushing.

[0013] This invention also provides a process cavity, including a chamber and an air extraction ring as described above installed in the chamber;

[0014] The chamber includes a process area and an exhaust channel, the exhaust channel being located radially outside the process area; the suction ring is located between the process area and the exhaust channel, the process area and the exhaust channel being connected through the suction channel of the suction ring.

[0015] Furthermore, the chamber is provided with an arc-shaped protrusion, and the process area and the air outlet channel are separated in the radial direction by the arc-shaped protrusion;

[0016] The arc-shaped boss includes two bosses and an arc-shaped protrusion between the two bosses. The process area is located radially inside the arc-shaped protrusion, and the air outlet is located radially outside the arc-shaped protrusion.

[0017] Furthermore, the bottom of the suction bushing is mounted on the arc-shaped protrusion, and the bottom of the suction bushing and the top of the arc-shaped protrusion are positioned and fitted together by a concave-convex structure to achieve a tight fit. The bottom inner side of the suction bushing is connected to the process area, and the bottom outer side of the suction bushing is connected to the air outlet channel.

[0018] Furthermore, the process cavity also includes:

[0019] A heating plate is disposed within the process area and located radially inside the extraction bushing;

[0020] An edge ring is provided on the outer periphery of the top of the heating plate;

[0021] A spray plate is disposed within the process area and located on top of the heating plate;

[0022] The outer periphery of the edge ring is bent to form a first annular groove with an upward opening, and the inner side of the suction bushing is provided with a second annular groove with a downward opening. The outer periphery of the edge ring and the inner side of the suction bushing are interlocked through the first and second annular grooves to form a labyrinthine air passage.

[0023] This invention also provides a thin film deposition apparatus, including the process chamber described above.

[0024] This invention also provides a method for installing a vacuum ring component, applied to the vacuum ring component described above, comprising:

[0025] Assemble the finished process chamber and the vacuum bushing;

[0026] The area other than the uneven structure between the extraction bushing and the chamber is covered;

[0027] Metal or non-metallic spraying is applied to the uneven structure to form a leak-proof coating for filling the tolerance gaps of the uneven structure;

[0028] Remove the vacuum bushing and clean away any excess paint residue;

[0029] The suction ring is installed in the annular overlapping groove of the suction bushing;

[0030] Apply sealant evenly to the overlap corner of the suction ring and suction bushing to seal the gap at the overlap corner.

[0031] The beneficial effects of the embodiments of the present invention are as follows: The present invention eliminates the tolerance gap at the connection between the chamber, the suction bushing and the suction ring by using a leak-proof component, ensuring that the suction ring component has good airtightness during the suction process and avoiding air leakage that would affect the process.

[0032] This invention provides a connecting part on the suction ring, which can be easily removed and replaced with external tools. During the research and development stage, suction rings with different hole arrangements can be designed and replaced for process verification without replacing the suction bushing. It is simple, convenient and low in cost. Attached Figure Description

[0033] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 This is a schematic diagram of the internal explosion structure of the process cavity provided in an embodiment of the present invention.

[0035] Figure 2 This is a schematic diagram of the assembly structure of the process cavity and the suction ring provided in an embodiment of the present invention.

[0036] Figure 3 This is a schematic cross-sectional view of the internal structure of the process cavity provided in an embodiment of the present invention.

[0037] Figure 4 This is a schematic diagram of the gas flow direction during evacuation within the process chamber provided in an embodiment of the present invention.

[0038] Figure 5 This is a schematic diagram of the bottom view structure of the extraction bushing provided in an embodiment of the present invention.

[0039] Figure 6 This is a schematic diagram of the chamber structure within the process cavity provided in an embodiment of the present invention.

[0040] Figure 7 Provided for embodiments of the present invention Figure 3 A magnified structural diagram of part A in the middle.

[0041] Figure 8 This is a comparative schematic diagram of the air extraction hole arrangement of different air extraction rings provided in the embodiments of the present invention.

[0042] Figure 9 This is a flowchart illustrating the installation method of the extraction ring component provided in an embodiment of the present invention.

[0043] Explanation of the markings in the image:

[0044] 1. Vacuum ring; 11. Vacuum bushing; 111. Annular overlap groove; 112. Arc-shaped opening; 113. Protrusion; 114. Second annular groove; 12. Vacuum ring; 13. Sealant;

[0045] 2. Process cavity; 21. Process area; 22. Air outlet channel; 23. Boss; 231. Notch; 24. Arc-shaped raised edge;

[0046] 3. Heating plate;

[0047] 4. Edge ring;

[0048] 5. Sprayer plate. Detailed Implementation

[0049] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0050] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0051] It should also be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the invention. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0052] It should also be further understood that the term "and / or" as used in this specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0053] like Figure 1 and Figure 2 As shown, to facilitate understanding of the installation structure of the suction ring 1 in the process cavity 2 of this embodiment, the process cavity 2 of this embodiment will be introduced in general first.

[0054] In one embodiment, the chamber within the process cavity 2 can be divided into a process area 21 and an exhaust channel 22, with the exhaust channel 22 located radially outward from the process area 21. An extraction ring 1 is located between the process area 21 and the exhaust channel 22, and the process area 21 and the exhaust channel 22 are connected via the extraction channel of the extraction ring 1. That is, the extraction ring 1, as a transition structure between the process area 21 and the exhaust channel 22, needs to ensure tight positioning within the chamber to guarantee the formation of a sealed gas channel between the process area 21, the extraction channel, and the exhaust channel 22, thereby preventing air leakage that could affect the process.

[0055] like Figure 3 and Figure 4 The working process of the suction ring 1 will be described below using a specific suction scenario.

[0056] In one embodiment, a heating plate 3, an edge ring 4, and a spray plate 5 are provided inside the process cavity 2;

[0057] The heating plate 3 is located within the process area 21 and is located radially inside the suction ring 1 (i.e., the suction bushing 11 of the suction ring 1).

[0058] Among them, the edge ring 4 is set on the outer periphery of the top of the heating plate 3;

[0059] The spray plate 5 is located within the process area 21 and is situated on top of the heating plate 3.

[0060] In one scenario, reference Figure 4In the direction of the arrow in the figure, during the cleaning process of thin film deposition (as shown in the figure), the purging gas is blown upward from the bottom of the heating plate 3 into the process area 21 for cleaning. The cleaned gas flows from the outer periphery of the edge ring 4 to the suction ring 1, and then flows from the suction channel in the suction ring 1 to the outlet channel 22 for discharge.

[0061] Another scenario, see reference Figure 4 In the direction of the arrow, during the reaction stage of the thin film deposition process, the reaction gas is blown down from the spray plate 5 into the process area 21 and reacts at the top of the heating plate 3. The reacted gas continues to flow into the suction ring 1, and then flows from the suction channel in the suction ring 1 to the outlet channel 22 for discharge.

[0062] In both scenarios described above, an external suction pump connected to the exhaust channel 22 is installed. After the suction pump is started, the gas in the process area 21 can flow through the suction channel of the suction ring 1 to the exhaust channel 22 for discharge. Therefore, it is necessary to ensure that the suction ring 1 is tightly installed in the chamber to reduce the risk of gas leakage during discharge.

[0063] In one embodiment, the suction ring 1 is installed in the chamber of the process cavity 2; the suction ring 1 includes a suction bushing 11 and a suction ring 12.

[0064] The air extraction bushing 11 is installed in the chamber, and the air extraction bushing 11 is provided with an annular overlapping groove 111.

[0065] The suction ring 12 overlaps in the annular overlap groove 111, and the suction ring 12 and the suction bushing 11 form a suction channel connecting the chamber to the outside.

[0066] Leak-proof components are provided at the connection between the chamber, the suction bushing 11, and the suction ring 12. These components are used to eliminate the tolerance gaps at the connection between the chamber, the suction bushing 11, and the suction ring 12 to ensure the airtightness of the suction channel.

[0067] In this embodiment, the connection between the chamber, the suction bushing 11, and the suction ring 12 is a location where there is a risk of air leakage. Therefore, it is only necessary to eliminate the tolerance gap at the connection between the chamber, the suction bushing 11, and the suction ring 12 to reduce the risk of air leakage.

[0068] like Figure 2 and Figure 5In one embodiment for eliminating the tolerance gap between the chamber and the extraction bushing 11, the extraction bushing 11 and the chamber are connected by a concave-convex structure for positioning and fitting. The leak-proof component includes a leak-proof coating (not shown in the figure), which is applied to the concave-convex structure between the extraction bushing 11 and the chamber to fill the tolerance gap at the concave-convex structure. This ensures the tightness between the extraction bushing 11 and the chamber, reducing the risk of leakage at the connection between the extraction bushing 11 and the chamber. The leak-proof coating may include metallic coatings such as yttrium oxide coating, yttrium fluoride coating, and yttrium fluoride oxyfluoride coating, or non-metallic coatings such as polytetrafluoroethylene coating, which can be selected according to actual needs.

[0069] Specifically, an arc-shaped boss is provided in the chamber, and the process area 21 and the air outlet channel 22 are separated in the radial direction by the arc-shaped boss; the arc-shaped boss includes two bosses 23 and an arc-shaped protrusion 24 located between the two bosses 23, the process area 21 is located on the radial inner side of the arc-shaped protrusion 24, and the air outlet channel 22 is located on the radial outer side of the arc-shaped protrusion 24.

[0070] More specifically, the bottom of the suction bushing 11 is mounted on the arc-shaped protrusion. The bottom of the suction bushing 11 and the top of the arc-shaped protrusion are positioned and fitted together through a concave-convex structure to achieve a tight fit. For example, two protrusions 113 are provided on the bottom of the suction bushing 11, and two recesses 231 are provided on the top of the two protrusions 23. Positioning is achieved through the cooperation of the two protrusions 113 and the two recesses 231. After positioning, the bottom of the suction bushing 11 can fit tightly against the arc-shaped protrusion 24, so that the inner bottom of the suction bushing 11 is connected to the process area 21, and the outer bottom of the suction bushing 11 is connected to the exhaust channel 22 through the arc-shaped opening 112. This prevents direct connection between the process area 21 and the exhaust channel 22.

[0071] like Figure 3 and Figure 6 In one embodiment for eliminating the tolerance gap between the suction bushing 11 and the suction ring 12, the annular overlapping groove 111 on the suction bushing 11 can be stepped, and an arc-shaped opening 112 communicating with the air outlet channel 22 is opened at the bottom of the annular overlapping groove 111; the suction ring 12 has multiple suction holes along the circumferential direction, and the suction ring 12 overlaps in the annular overlapping groove 111. The stepped shape of the annular overlapping groove 111 maintains a distance between the suction ring 12 and the bottom of the annular overlapping groove 111; thus, all the suction holes on the suction ring 12 can communicate with the air outlet channel 22 through the arc-shaped opening 112; it should be understood that the suction channel is the channel formed by the suction holes and the arc-shaped opening 112. To ensure the airtightness of the suction ring 12 after it overlaps the suction bushing 11, a leak-proof component is provided at the overlap angle between the suction ring 12 and the annular overlap groove 111 (that is, the gap between the inner and outer sides of the suction ring 12 and the inner wall of the annular overlap groove 111); the leak-proof component may include a sealant 13.

[0072] like Figure 8 As shown in Figures a and b, two types of suction rings 12 with different suction hole arrangements are illustrated. The arrangement of the multiple suction holes on different suction rings 12 varies; for example, the diameter and spacing of the suction holes differ. By providing a connecting part on the suction ring 12, the suction ring 12 can be easily removed and replaced using external tools. During the research and development phase, suction rings 12 with different hole arrangements can be designed and replaced for process verification without replacing the suction bushing 11, which is simple, convenient, and low-cost.

[0073] Specifically, the connecting part can be a threaded blind hole that does not affect the flow field, and the vacuum ring 12 can be removed by using an external tool with threads; the connecting part can also be a groove structure that can be used with a hook-shaped tool, both of which can facilitate the replacement of the vacuum ring 12.

[0074] like Figure 7 As shown, in some other embodiments of the suction ring 1, the suction bushing 11 of the suction ring 1 can cooperate with the edge ring 4 to prevent reactive gases from entering below the heating plate 3 during the reaction stage of the thin film deposition process. Specifically, the outer periphery of the edge ring 4 is bent to form a first annular groove with an upward opening, and the inner side of the suction bushing 11 is provided with a second annular groove 114 with a downward opening. The outer periphery of the edge ring 4 and the inner side of the suction bushing 11 are interlocked through the first annular groove and the second annular groove 114 to form a labyrinthine gas path.

[0075] Understandably, in the reaction stage of the thin film deposition process, the spray plate 5 inputs the reaction gas downwards and reacts at the top of the heating plate 3. The reacted gas then flows radially to the suction ring 1. At this time, the labyrinthine gas path prevents the reaction gas from entering below the heating plate 3. In the purging stage of the thin film deposition process, the spray plate 5 does not input the reaction gas, and purging gas is input upwards from below the heating plate 3. The purging gas can reach the suction ring 1 from the labyrinthine gas path and flow to the outlet channel 22 through the suction channel of the suction ring 1.

[0076] This invention also provides a thin film deposition apparatus, including the process chamber 2 as described above.

[0077] like Figure 9 As shown, this embodiment of the invention also provides a method for installing a vacuum ring component, applied to the vacuum ring component 1 described above, comprising:

[0078] S901. Assemble the finished process chamber 2 and the vacuum bushing 11;

[0079] S902, Cover the area other than the concave-convex structure between the exhaust bushing 11 and the chamber;

[0080] S903. Apply metal or non-metal spray to the uneven structure to form a leak-proof coating for filling the tolerance gaps of the uneven structure.

[0081] S904. Remove the extraction bushing 11 and clean up any excess paint residue.

[0082] S905. Install the suction ring 12 in the annular overlapping groove 111 of the suction bushing 11;

[0083] S906. Apply sealant 13 evenly to the overlapping corner of the suction ring 12 and the suction bushing 11 to seal the gap at the overlapping corner.

[0084] In this embodiment, the installation of the suction ring 1 can be completed based on the process of S901~S906, which can eliminate the tolerance gap at the connection between the chamber, the suction bushing 11 and the suction ring 12, and ensure that the suction ring 1 has good airtightness during the suction process, so as to avoid air leakage and affect the process.

[0085] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present invention, and these modifications or substitutions should all be covered within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A vacuum ring component, installed in a chamber of a process cavity; characterized in that, The suction ring component includes: An extraction bushing is installed in the chamber, and an annular overlapping groove is provided on the extraction bushing; An extraction ring overlaps in the annular overlap groove, and an extraction channel connecting the chamber to the outside is formed between the extraction ring and the extraction bushing. The connection between the chamber, the suction bushing, and the suction ring is provided with a leak-proof component. The leak-proof component is used to eliminate the tolerance gap at the connection between the chamber, the suction bushing, and the suction ring to ensure the airtightness of the suction channel. The vacuum bushing and the chamber are connected by a concave-convex structure for positioning and fitting. The leak-proof component includes a leak-proof coating and a sealant. The leak-proof coating is applied to the concave-convex structure between the vacuum bushing and the chamber to fill the tolerance gap at the concave-convex structure. The sealant is sealed at the overlap angle between the vacuum ring and the vacuum bushing.

2. The suction ring according to claim 1, characterized in that, The suction ring has multiple suction holes along the circumferential direction, and the diameter and spacing of the suction holes are different on different suction rings. The top of the suction ring is provided with a connecting part, which is used to connect and cooperate with an external tool to facilitate the removal of the suction ring from the suction bushing.

3. A process cavity, characterized in that, Includes a chamber and an air extraction ring as described in any one of claims 1 to 2 installed in the chamber; The chamber includes a process area and an exhaust channel, the exhaust channel being located radially outside the process area; the suction ring is located between the process area and the exhaust channel, the process area and the exhaust channel being connected through the suction channel of the suction ring.

4. The process cavity according to claim 3, characterized in that, The chamber is provided with an arc-shaped protrusion, and the process area and the air outlet channel are separated in the radial direction by the arc-shaped protrusion; The arc-shaped boss includes two bosses and an arc-shaped protrusion between the two bosses. The process area is located radially inside the arc-shaped protrusion, and the air outlet is located radially outside the arc-shaped protrusion.

5. The process cavity according to claim 4, characterized in that, The bottom of the suction bushing is mounted on the arc-shaped protrusion. The bottom of the suction bushing and the top of the arc-shaped protrusion are positioned and fitted together by a concave-convex structure to achieve a tight fit. The bottom inner side of the suction bushing is connected to the process area, and the bottom outer side of the suction bushing is connected to the air outlet channel.

6. The process cavity according to claim 5, characterized in that, Also includes: A heating plate is disposed within the process area and located radially inside the extraction bushing; An edge ring is provided on the outer periphery of the top of the heating plate; A spray plate is disposed within the process area and located on top of the heating plate; The outer periphery of the edge ring is bent to form a first annular groove with an upward opening, and the inner side of the suction bushing is provided with a second annular groove with a downward opening. The outer periphery of the edge ring and the inner side of the suction bushing are interlocked through the first and second annular grooves to form a labyrinthine air passage.

7. A thin film deposition apparatus, characterized in that, Includes the process cavity as described in any one of claims 3 to 6.

8. A method for installing a vacuum ring component, applied to the vacuum ring component as described in claim 2, characterized in that, include: Assemble the finished process chamber and the vacuum bushing; The area other than the uneven structure between the extraction bushing and the chamber is covered; Metal or non-metallic spraying is applied to the uneven structure to form a leak-proof coating for filling the tolerance gaps of the uneven structure; Remove the vacuum bushing and clean away any excess paint residue; The suction ring is installed in the annular overlapping groove of the suction bushing; Apply sealant evenly to the overlap corner of the suction ring and suction bushing to seal the gap at the overlap corner.

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