A high-temperature co-fired aluminum nitride ceramic plate and its preparation process

Abstract

The present invention relates to the technical field of aluminum nitride ceramic plates, and specifically to a high-temperature co-fired aluminum nitride ceramic plate and its preparation process. The high-temperature co-fired aluminum nitride ceramic plate is provided with an installation notch for installing a sensor on the upper left side of the substrate layer, and after the sensor is installed in the installation notch, a filling material is filled. By embedding the sensor in the aluminum nitride ceramic plate, the functions of real-time monitoring and data transmission are realized. Moreover, a micro cooling channel layer is optimally set, and an insert-type joint component design is adopted, which is convenient for the connection and disassembly of the cooling channels. When disassembling, it can effectively prevent the leakage of the cooling fluid, improving the safety and reliability of the system. And in the preparation process, a filler mechanism is optimally used. The filling material oscillated and discharged in the blanking component is pushed flat and spread over the installation notch by the reciprocating lateral movement of the pushing and scraping component. At the same time, the aluminum nitride ceramic plate is vibrated by the vibrating and leveling component to level the filling material in the installation notch, improving the filling effect of the filling material to a certain extent.

Description

Technical Field

[0001] The present invention relates to the technical field of aluminum nitride ceramic plates, and specifically to a high-temperature co-fired aluminum nitride ceramic plate and its preparation process. Background Art

[0002] Aluminum nitride ceramic plates have high thermal conductivity, low expansion coefficient, high strength, high temperature resistance, chemical corrosion resistance, high resistivity, and low dielectric loss. They are ideal heat dissipation substrates and packaging materials for large-scale integrated circuits, and can be used to make Al evaporation dishes, magnetohydrodynamic power generation devices, and corrosion-resistant components of high-temperature turbines. Their optical properties can be used to make infrared windows, etc.

[0003] Currently, Chinese Patent Application No.: CN202420090476.8 discloses a high-temperature co-fired aluminum nitride ceramic plate, which includes an aluminum nitride ceramic plate body. A fixing bolt is provided on one side of the surface of the protection component. An installation groove is provided inside the protection component. A second clamping plate is provided on one side of the first clamping plate. Installation holes are provided on the surface of the protection component. A protection component is provided outside the aluminum nitride ceramic plate body. A back frame is provided on the back of the protection component. A buffer component is provided inside the installation groove. A first clamping plate is provided inside the protection component.

[0004] However, the high-temperature co-fired aluminum nitride ceramic plates of the current technology are inconvenient to realize the real-time monitoring and data transmission functions of the aluminum nitride ceramic plates during use, and the heat dissipation efficiency is poor. It is inconvenient to carry out daily maintenance and inspection when using cooling channels; and in the preparation process of high-temperature co-fired aluminum nitride ceramic plates, the filling process at the notch for installing sensors is cumbersome, and the filling effect is poor. Summary of the Invention

[0005] The purpose of the present invention is to provide a high-temperature co-fired aluminum nitride ceramic plate and its preparation process to solve the problems raised in the above background art.

[0006] To achieve the above purpose, the present invention adopts the following technical solutions: A high-temperature co-fired aluminum nitride ceramic plate, which is successively a matrix layer, a reinforcing layer, a micro cooling channel layer, a conductive composite layer, and a ceramic coating from top to bottom. An installation notch for installing a sensor is provided on the upper left side of the matrix layer, and after installing the sensor in the installation notch, it is filled with a filling material. The reinforcing layer introduces ceramic fiber as a reinforcing material, and both the upper and lower sides are honeycomb structures. The micro cooling channel layer includes a plate connected to the reinforcing layer and the conductive composite layer on the upper and lower sides respectively. A first channel is provided at the rear side inside the plate, and a second channel is provided at the front side inside the plate. Joint components are connected to the right inlet and outlet of the first channel and the second channel.

[0007] Preferably, the filling material is aluminum nitride ceramic powder and silicate binder.

[0008] Preferably, rectangular grooves are formed on the left and right sides of the top of the substrate layer, and strip grooves are formed on the front and back sides of the top of the substrate layer.

[0009] Preferably, the joint assembly includes a first socket connected to the inlets and outlets of the first channel and the second channel, a first support embedded in the left side of the interior of the first socket, a first sealing plug rod slidably penetrating through the middle side of the interior of the first support, a first spring connected to the outer side of the right side of the first support, a sliding sleeve slidably disposed on the right side of the outer surface of the first socket, a second spring disposed inside the left side of the sliding sleeve, a catch ball disposed on the right side of the inner wall of the first socket, a second socket disposed inside the right side of the first socket, a second support embedded in the right side of the interior of the second socket, a second sealing plug rod slidably penetrating through the middle side of the interior of the second support, and a third spring connected to the outer side of the left side of the second support. The right side of the first spring is connected to the first sealing plug rod, the left side of the second spring is connected to the first socket, the outer side of the catch ball is in contact with the sliding sleeve, and the left side of the third spring is connected to the second sealing plug rod.

[0010] Preferably, sealing rubber rings are disposed on the right side of the outer surface of the first sealing plug rod and the left side of the outer surface of the second sealing plug rod. A sealing ring is embedded in the middle right side of the interior of the first socket. A limiting ring for limiting the sliding sleeve is disposed at the right end of the outer surface of the first socket. A slot for contacting and engaging with the catch ball is disposed in the middle side of the outer surface of the second socket.

[0011] In addition, the present invention provides a preparation process for a high-temperature co-fired aluminum nitride ceramic plate, including the following steps:

[0012] S1. Remove the joint assembly of the micro cooling channel layer, then stack the substrate layer, the reinforcing layer, the micro cooling channel layer, the conductive composite layer, and the ceramic coating from top to bottom and place them in a high-temperature furnace for high-temperature co-firing to fully combine the materials of each layer to form a dense aluminum nitride ceramic plate.

[0013] S2. After the sintered aluminum nitride ceramic plate is cooled, use a grinding device to open mounting slots, rectangular grooves, and strip grooves on the top side of the substrate layer, and clean the opened grooves. Then place the sensor into the mounting slot to ensure its stability and correct connection to the electrical interface.

[0014] S3. Use a filling mechanism to fill the filling material into the mounting slot, compact the filling material, and then perform high-temperature curing to ensure the bonding strength between the filling material and the substrate layer.

[0015] S4. After filling, polish the surface of the substrate layer to ensure it is flat and consistent with the surrounding surface, and then install the joint assembly into the micro cooling channel layer to complete the preparation of the high-temperature co-fired aluminum nitride ceramic plate.

[0016] Preferably, the filler mechanism includes a bottom plate, a cylinder rotatably arranged in the middle right part of the top side of the bottom plate, a slider connected to the top end of the cylinder, a support frame rotatably connected to the left side of the top of the bottom plate, a push-scraping assembly installed on the left side of the top of the support frame, a sliding frame connected to the right side of the push-scraping assembly, a support platform slidably connected to the inner side of the sliding frame, a blanking assembly fastened to the middle right part of the right side of the sliding frame, and two vibrating and leveling assemblies arranged on the left and right sides inside the support platform. The slider is slidably connected to the middle left side inside the support frame, and the bottom of the support platform is fastened to the support frame.

[0017] Preferably, the push-scraping assembly includes a first motor with the bottom fastened to the support frame, a rotating rod connected to the front output end of the first motor, a push rod rotatably connected to the left front part of the rotating rod, a rotating frame rotatably connected to the right end of the push rod, and a scraping blade arranged at the bottom of the rotating frame. The middle upper part of the rotating frame is rotatably connected to the sliding frame, and the bottom of the scraping blade is in a Y-shaped structure.

[0018] Preferably, the blanking assembly includes a mounting seat with the left side fastened to the sliding frame, a second motor fastened to the right side of the top of the mounting seat, a turntable connected to the bottom output end of the second motor, a connecting rod frame connected to the inner side of the turntable, support shaft columns rotatably connected to the front and rear sides inside the connecting rod frame, a discharge hopper fastened to the right end of the support shaft column, and a hose arranged on the top side of the discharge hopper. The turntable rotates through the inner side of the top of the mounting seat, the left end of the support shaft column is rotatably connected to the mounting seat, the top end of the hose is connected to the external filling material end, a displacement groove is opened in the left side inside the turntable, a positioning block is arranged inside the displacement groove, the middle side inside the positioning block is rotatably connected to the connecting rod frame through, two rows of hole grooves are arranged on the left rear side of the turntable, and the two rows of hole grooves are respectively located on the upper and lower sides behind the displacement groove, and the rear side of the positioning block is fastened inside the hole grooves.

[0019] Preferably, the vibrating and leveling assembly includes a sleeve with the side fastened to the support platform, a third motor fastened to the top side inside the sleeve, an eccentric wheel connected to the front output end of the third motor, a swing rod rotatably connected to one side of the front of the eccentric wheel, a vertical rod rotatably connected to the bottom of the swing rod, a knocking column fixed to the bottom end of the vertical rod, an inner bin arranged in the middle lower side inside the sleeve, a convex ring integrally formed on the middle upper part of the outer surface of the knocking column, a fourth spring connected to the top side of the convex ring, and a fifth spring connected to the bottom side of the convex ring. The knocking column penetrates and slides inside the middle side of the inner bin, and the upper and lower sides inside the inner bin are respectively connected to the fourth spring and the fifth spring.

[0020] Compared with the prior art, the beneficial effects of the present invention are:

[0021] The high-temperature co-fired aluminum nitride ceramic plate of the present invention is provided with an installation notch for installing a sensor on the upper left side above the substrate layer, and after installing the sensor in the installation notch, a filling material is filled. By embedding the sensor in the aluminum nitride ceramic plate, the functions of real-time monitoring and data transmission are realized. The reinforcing layer introduces ceramic fibers as the reinforcing material, and both the upper and lower sides are honeycomb structures to improve the overall strength and toughness. Moreover, the micro cooling channel layer is optimally arranged, and an insert-type joint component design is adopted, making the connection and disassembly of the cooling channels more convenient, facilitating daily maintenance and inspection, and effectively preventing the leakage of cooling fluid during disassembly, improving the safety and reliability of the system.

[0022] In the preparation process of the high-temperature co-fired aluminum nitride ceramic plate of the present invention, a filling mechanism is optimally used. Through the action of the air cylinder, the slider jacks up the support frame, enabling the support frame to be lifted and lowered on the bottom plate, so as to place the support frame above the outer side of the installation notch where the filling material needs to be filled. Then, the filling material oscillated and discharged in the feeding component is pushed flat and spread in the installation notch by the reciprocating lateral movement of the scraping component. At the same time, the aluminum nitride ceramic plate generates vibration through the contact between the vibrating and leveling component and the aluminum nitride ceramic plate to vibrate and level the filling material in the installation notch, preventing gaps from occurring, and improving the compaction filling effect of the filling material to a certain extent.

[0023] Sealing rubber rings are arranged on the right side of the outer surface of the first sealing plug rod and the left side of the outer surface of the second sealing plug rod of the present invention to respectively improve their sealing effects when they are in the first socket and the second socket. To prevent the leakage of the cooling fluid in the channel through the contact between the first sealing plug rod and the sealing rubber ring and the first socket, a sealing ring is embedded in the right side of the inner part of the first socket to increase the sealing performance when contacting the second socket. A limiting ring for limiting the sliding sleeve is arranged at the right end of the outer surface of the first socket to prevent the sliding sleeve from running off. A clamping groove for contacting and engaging with the ball is arranged in the middle of the outer surface of the second socket, thereby improving the connection effect between the second socket and the first socket after the second socket is inserted into the first socket.

[0024] Two rows of hole grooves are arranged on the left side of the rear part of the turntable of the present invention, and the two rows of hole grooves are respectively located on the upper and lower sides of the rear part of the displacement groove. The rear side of the positioning block is fastened inside the hole groove. By the cooperation of the positioning block and the hole grooves at different positions, the positioning block changes its position in the displacement groove, thereby changing the rate and effect of the positioning block driving the connecting rod frame to rotate, so as to change the range and speed of the front and rear swing of the discharge hopper. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic structural diagram of the high-temperature co-fired aluminum nitride ceramic plate of the present invention;

[0026] Figure 2 It is a schematic structural diagram of the micro cooling channel layer of the present invention;

[0027] Figure 3Schematic structural diagram of the joint assembly of the present invention;

[0028] Figure 4 Process flow chart for preparing the high-temperature co-fired aluminum nitride ceramic plate of the present invention;

[0029] Figure 5 Schematic structural diagram of the filler mechanism of the present invention;

[0030] Figure 6 Schematic structural diagram of the blanking assembly of the present invention;

[0031] Figure 7 Schematic structural diagram of the connection between the turntable and the connecting rod frame of the present invention;

[0032] Figure 8 For the present invention Figure 7 Rear view;

[0033] Figure 9 Schematic structural diagram of the vibration leveling assembly of the present invention.

[0034] In the figure: matrix layer - 1, reinforcing layer - 2, micro cooling channel layer - 3, conductive composite layer - 4, ceramic coating - 5, mounting notch - 6, rectangular groove - 7, strip groove - 8, plate - 31, first channel - 32, second channel - 33, joint assembly - 34, first socket - 341, first support - 342, first sealing plug rod - 343, first spring - 344, sliding sleeve - 345, second spring - 346, ball - 347, second socket - 348, second support - 349, second sealing plug rod - 3410, third spring - 3411, sealing ring - 3412, limiting ring - 3413, clamping groove - 3481, bottom plate - 91, air cylinder - 92, slider - 93, support frame - 94, push scraping assembly - 95, sliding frame - 96, support platform - 97, blanking assembly - 98, vibration leveling assembly - 99, first motor - 951, rotating rod - 952, push rod - 953, rotating frame - 954, scraping blade - 955, mounting seat - 981, second motor - 982, turntable - 983, connecting rod frame - 984, support shaft column - 985, discharge hopper - 986, hose - 987, shifting groove - 9831, positioning block - 9832, hole groove - 9833, sleeve - 991, third motor - 992, eccentric wheel - 993, swing rod - 994, vertical rod - 995, knocking column - 996, inner bin - 997, convex ring - 998, fourth spring - 999, fifth spring - 9910. Detailed implementation manners

[0035] In order to further explain the technical solution of the present invention, it will be elaborated in detail below through specific embodiments.

[0036] Please refer to Figure 1 、 Figure 2 andFigure 3 , the present invention provides a high-temperature co-fired aluminum nitride ceramic plate, which includes a substrate layer 1, a reinforcement layer 2, a micro cooling channel layer 3, a conductive composite layer 4, and a ceramic coating 5 from top to bottom. An installation notch 6 for installing a sensor is provided on the upper left side of the substrate layer 1, and after the sensor is installed in the installation notch 6, a filling material is filled. By embedding the sensor in the aluminum nitride ceramic plate, the functions of real-time monitoring and data transmission are realized. The reinforcement layer 2 introduces ceramic fibers as reinforcement materials, and both the upper and lower sides are honeycomb structures to improve the overall strength and toughness. The micro cooling channel layer 3 includes a plate 31 whose upper and lower sides are respectively connected to the reinforcement layer 2 and the conductive composite layer 4. A first channel 32 is arranged at the rear side inside the plate 31, and a second channel 33 is arranged at the front side inside the plate 31. Connector assemblies 34 are connected to the right-side inlets and outlets of the first channel 32 and the second channel 33. The connector assemblies 34 adopt an insertion design, making the connection and disassembly of the cooling channels more convenient, facilitating daily maintenance and inspection, and effectively preventing the leakage of cooling fluid during disassembly, improving the safety and reliability of the system.

[0037] Among them, the filling material is aluminum nitride ceramic powder and silicate binder, ensuring the stable installation of the sensor and not affecting the performance of the overall structure. Rectangular grooves 7 are provided on the left and right sides of the top of the substrate layer 1, and strip-shaped grooves 8 are provided on the front and rear sides of the top of the substrate layer 1 to reduce the thermal stress concentration of the material, thereby improving the overall thermal stability.

[0038] Among them, the joint assembly 34 includes a first socket 341 connected to the inlets and outlets of the first channel 32 and the second channel 33, a first support 342 embedded in the left side inside the first socket 341, a first sealing plug rod 343 slidably penetrating through the middle side inside the first support 342, and a first spring 344 connected to the outer side of the right side of the first support 342. The first spring 344 provides a rightward acting force on the first sealing plug rod 343. A sliding sleeve 345 is slidably arranged on the right side outer surface of the first socket 341, a second spring 346 is arranged on the left side inside the sliding sleeve 345, and a catch bead 347 is arranged on the right side inner wall of the first socket 341. The outer side of the catch bead 347 is in contact with the sliding sleeve 345. The second spring 346 provides a rightward thrust on the sliding sleeve 345. After the sliding sleeve 345 is pushed to compress the second spring 346, the sliding sleeve 345 releases the limit on the catch bead 347, enabling the catch bead 347 to move its position inside the first socket 341. A second socket 348 is arranged on the right side inside the first socket 341, a second support 349 is embedded in the right side inside the second socket 348, a second sealing plug rod 3410 slidably penetrating through the middle side inside the second support 349, and a third spring 3411 connected to the outer side of the left side of the second support 349. The third spring 3411 provides a leftward thrust on the second sealing plug rod 3410. The right side of the first spring 344 is connected to the first sealing plug rod 343, the left side of the second spring 346 is connected to the first socket 341, and the left side of the third spring 3411 is connected to the second sealing plug rod 3410. Sealing rubber rings are arranged on the right side outer surface of the first sealing plug rod 343 and the left side outer surface of the second sealing plug rod 3410 respectively to improve their sealing effects when they are inside the first socket 341 and the second socket 348 respectively. To prevent the cooling fluid in the channel from leaking through the contact between the first sealing plug rod 343 and the sealing rubber ring and the first socket 341, a sealing ring 3412 is embedded in the middle right side inside the first socket 341 to increase the sealing performance when contacting the second socket 348. A limiting ring 3413 for limiting the sliding sleeve 345 is arranged at the right end of the outer surface of the first socket 341 to prevent the sliding sleeve 345 from slipping off. A card slot 3481 for contacting and engaging with the catch bead 347 is arranged at the middle side of the outer surface of the second socket 348, thereby improving the connection effect between the second socket 348 and the first socket 341 after the second socket 348 is inserted into the first socket 341.

[0039] After moving the sliding sleeve 345 to the left and inserting the second socket 348 into the first socket 341, the sliding sleeve 345 releases the limit on the locking ball 347, causing the locking ball 347 to move upward and insert into the slot 3481 of the second socket 348. Then, after releasing the leftward thrust on the sliding sleeve 345, the sliding sleeve 345 moves under the action of the second spring 346 to contact the left side of the limit ring 3413. At this time, the sliding sleeve 345 restricts the movement of the locking ball 347 to clamp the second socket 348 tightly inside the first socket 341. At the same time, the left side of the second sealing plug rod 3410 contacts the right side of the first sealing plug rod 343, so that the first sealing plug rod 343 is pressed into the inside of the first support 342, and the second sealing plug rod 3410 is pressed into the inside of the second support 349, opening the channels inside the first socket 341 and the second socket 348 to facilitate the flow of the cooling fluid.

[0040] Please refer to Figure 1 、 Figure 2 、 Figure 4 、 Figure 5 、 Figure 6 、 Figure 7 、 Figure 8 and Figure 9 ,The present invention provides a preparation process for a high-temperature co-fired aluminum nitride ceramic plate, including the following steps:

[0041] S1. Remove the joint assembly 34 of the micro cooling channel layer 3, then stack the substrate layer 1, the reinforcement layer 2, the micro cooling channel layer 3, the conductive composite layer 4, and the ceramic coating 5 from top to bottom and put them into a high-temperature furnace for high-temperature co-firing to fully bond the materials of each layer and form a dense aluminum nitride ceramic plate;

[0042] S2. After the sintered aluminum nitride ceramic plate is cooled, use a grinding device to open an installation notch 6, a rectangular groove 7, and a strip groove 8 on the top side of the substrate layer 1, and clean the opened grooves. Then put the sensor into the installation notch 6 to ensure its stability and correct connection to the electrical interface;

[0043] S3. Use a filling mechanism to fill the installation notch 6 with a filling material, compact the filling material, and then perform high-temperature curing to ensure the bonding strength between the filling material and the substrate layer 1;

[0044] S4. After filling, polish the surface of the substrate layer 1 to ensure it is flat and consistent with the surrounding surface, and then install the joint assembly 34 into the micro cooling channel layer 3 to complete the preparation of the high-temperature co-fired aluminum nitride ceramic plate.

[0045] Among them, the filling mechanism includes a bottom plate 91, a cylinder 92 rotatably arranged in the upper right part of the top side of the bottom plate 91, a slider 93 connected to the top end of the cylinder 92, a support frame 94 rotatably connected to the left side of the top of the bottom plate 91. Under the action of the cylinder 92, the slider 93 jacks up the support frame 94 upward, so that the support frame 94 can be lifted and lowered on the bottom plate 91. A push-scraping assembly 95 installed on the left side of the top of the support frame 94, a slide carriage 96 connected to the right side of the push-scraping assembly 95, a support platform 97 slidably connected to the inner side of the slide carriage 96, a blanking assembly 98 fastened to the middle right part of the right side of the slide carriage 96, and two vibrating and leveling assemblies 99 arranged on the left and right sides inside the support platform 97. The bottom of the support platform 97 is fastened to the support frame 94. The filling material discharged in a swinging manner in the blanking assembly 98 is pushed flat and spread over the installation notch 6 by the reciprocating lateral movement of the push-scraping assembly 95. At the same time, the vibration of the aluminum nitride ceramic plate is generated by the contact between the vibrating and leveling assembly 99 and the aluminum nitride ceramic plate to vibrate and level the filling material in the installation notch 6 to prevent gaps from being generated. The slider 93 is slidably connected to the middle left side inside the support frame 94 to ensure that the support frame 94 is parallel to the aluminum nitride ceramic plate after being lowered.

[0046] Among them, the push-scraping assembly 95 includes a first motor 951 whose bottom is fastened to the support frame 94, a rotating rod 952 connected to the front output end of the first motor 951, a push rod 953 rotatably connected to the left front part of the rotating rod 952, a rotating frame 954 rotatably connected to the right end of the push rod 953, and a scraping blade 955 arranged at the bottom of the rotating frame 954. The middle upper part of the rotating frame 954 is rotatably connected to the slide carriage 96. Under the action of the first motor 951, the rotating rod 952 drives the rotating frame 954 to reciprocate left and right, so that the scraping blade 955 moves left and right to scrape the filling material flat. The bottom of the scraping blade 955 is in a Y-shaped structure, and the rotating frame 954 can rotate on the slide carriage 96 to make the scraping blade 955 swing slightly left and right by a small angle, thereby improving the scraping effect of the scraping blade 955 on the filling material.

[0047] Among them, the blanking assembly 98 includes a mounting seat 981 fastened to the left side of the carriage 96, a second motor 982 fastened to the right side of the top of the mounting seat 981, a turntable 983 connected to the bottom output end of the second motor 982, a connecting rod frame 984 connected to the inner side of the turntable 983, a support shaft column 985 rotatably connected to the front and rear sides inside the connecting rod frame 984, a discharge hopper 986 fastened to the right end of the support shaft column 985, and a hose 987 arranged on the top side of the discharge hopper 986. The turntable 983 rotates through the inner side of the top of the mounting seat 981. The left end of the support shaft column 985 is rotatably connected to the mounting seat 981. The top end of the hose 987 is connected to the external filling material end. Under the action of the second motor 982, the turntable 983 drives the support shaft column 985 to make a reciprocating rotation in the front and rear directions on the mounting seat 981 through the cooperation with the connecting rod frame 984, so that the discharge hopper 986 swings back and forth, so as to discharge the filling material into different positions in the mounting notch 6, improve the scraping efficiency and ensure the filling effect. A displacement groove 9831 is formed in the left side inside the turntable 983. A positioning block 9832 is arranged inside the displacement groove 9831. The middle side inside the positioning block 9832 is rotatably connected to the connecting rod frame 984 through. When the turntable 983 rotates, the connecting rod frame 984 is driven to make a transposition action through the positioning block 9832. Two rows of hole grooves 9833 are arranged on the left side of the rear part of the turntable 983, and the two rows of hole grooves 9833 are respectively located on the upper and lower sides of the rear part of the displacement groove 9831. The rear side of the positioning block 9832 is fastened inside the hole groove 9833. Through the cooperation of the positioning block 9832 and the hole grooves 9833 at different positions, the positioning block 9832 changes its position in the displacement groove 9831, so as to change the rate and effect of the positioning block 9832 driving the connecting rod frame 984 to make a transposition, so as to change the range and speed of the discharge hopper 986 swinging back and forth.

[0048] Among them, the vibrating and leveling component 99 includes a sleeve 991 whose side is fastened to the support platform 97, a third motor 992 fastened to the top side inside the sleeve 991, an eccentric wheel 993 connected to the front output end of the third motor 992, a swing rod 994 rotatably connected to one side of the front of the eccentric wheel 993, a vertical rod 995 rotatably connected to the bottom of the swing rod 994, and a knocking column 996 fixed to the bottom end of the vertical rod 995. Under the action of the third motor 992, the eccentric wheel 993 makes the vertical rod 995 drive the knocking column 996 to perform a reciprocating up-and-down displacement action through cooperation with the swing rod 994. There is an inner bin 997 arranged at the middle and lower side inside the sleeve 991, a convex ring 998 integrally formed on the upper middle part of the outer surface of the knocking column 996, a fourth spring 999 connected to the top side of the convex ring 998, and a fifth spring 9910 connected to the bottom side of the convex ring 998. The knocking column 996 passes through and slides in the middle side inside the inner bin 997 to play a role in limiting the knocking column 996 and ensure the stable longitudinal displacement of the knocking column 996. The upper and lower sides inside the inner bin 997 are respectively connected to the fourth spring 999 and the fifth spring 9910 to respectively provide downward and upward acting forces to the knocking column 996 through the fourth spring 999 and the fifth spring 9910, so that the knocking column 996 has a certain buffer force when contacting the aluminum nitride ceramic plate, avoiding damage to the aluminum nitride ceramic plate and ensuring that the filling material is vibrated and leveled in the installation notch 6.

[0049] The working principle of filling the filling material into the installation notch 6 by the filling mechanism is as follows:

[0050] First, install the overall filling mechanism at the position where the installation notch 6 of the aluminum nitride ceramic plate needs to be filled through the bottom plate 91. Then, after the aluminum nitride ceramic plate is moved to the lower right side under the support frame 94, control and start the cylinder 92 to make the slider 93 drive the support frame 94 to rotate downward with the left side of the top of the bottom plate 91 as the fulcrum, so that the lower right side of the support frame 94 contacts and wraps the outside above the installation notch 6.

[0051] Second, control the external filling material end to discharge the filling material into the discharge hopper 986. Then start the first motor 951 and the second motor 982. Under the action of the second motor 982, the turntable 983 drives the support shaft column 985 to perform a reciprocating rotation in the front and back directions on the mounting seat 981 through cooperation with the connecting rod frame 984, so that the discharge hopper 986 swings back and forth. Under the action of the first motor 951, the rotating rod 952 drives the rotating frame 954 and the sliding frame 96 to perform a reciprocating left and right push on the support platform 97, so that the discharge hopper 986 discharges the filling material into different positions inside the installation notch 6, and at the same time, the scraping blade 955 moves left and right to scrape and fill the filling material flat inside the installation notch 6.

[0052] Again, when leveling and filling the filling material, the third motor 992 can be controlled to start. Under the action of the third motor 992, the eccentric wheel 993 makes the vertical rod 995 drive the knocking column 996 to perform an up-and-down reciprocating displacement action through the cooperation with the swing rod 994. During the up-and-down movement of the knocking column 996, through the cooperation of the convex ring 998 with the fourth spring 999 and the fifth spring 9910, the knocking column 996 has a certain buffer force when moving downward and contacting the aluminum nitride ceramic plate, avoiding damage to the aluminum nitride ceramic plate, and ensuring that the filling material is vibrated evenly in the installation notch 6.

[0053] The foregoing are only preferred examples of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A process for preparing a high temperature co-fired aluminum nitride ceramic plate, characterized in that: The high-temperature co-fired aluminum nitride ceramic plate comprises, from top to bottom, a base layer (1), a reinforcement layer (2), a micro-cooling channel layer (3), a conductive composite layer (4) and a ceramic coating (5); a mounting notch (6) for mounting a sensor is provided on the upper left side of the base layer (1); and a filling material is filled in the mounting notch (6) after the sensor is mounted; ceramic fiber is introduced into the reinforcement layer (2) as a reinforcement material, and both upper and lower sides are honeycomb structures; the micro-cooling channel layer (3) comprises a plate (31) connected to the reinforcement layer (2) and the conductive composite layer (4) on the upper and lower sides respectively; a first channel (32) is provided on the rear side of the plate (31), and a second channel (33) is provided on the front side of the plate (31); and joint components (34) are connected to the right inlet and outlet of the first channel (32) and the second channel (33); rectangular grooves (7) are provided on the left and right sides of the top of the base layer (1), and strip grooves (8) are provided on the front and rear sides of the top of the base layer (1); The preparation process comprises the following steps: S1, removing the joint assembly (34) of the micro-cooling channel layer (3), then stacking the base layer (1), the reinforcement layer (2), the micro-cooling channel layer (3), the conductive composite layer (4) and the ceramic coating (5) from top to bottom and placing them in a high-temperature furnace for high-temperature co-firing to fully combine the materials of each layer to form a dense aluminum nitride ceramic plate; S2. After the sintered aluminum nitride ceramic plate has cooled, a notch (6), a rectangular groove (7) and a strip groove (8) are installed at the top side of the substrate layer (1) by means of a grinding device, and the opened grooves are cleaned. Then, the sensor is placed in the installation notch (6) to ensure that it is stable and the electrical interface is correctly connected; S3, using a filling mechanism to fill the filling material into the installation slot (6), compacting the filling material, and then performing high temperature curing to ensure the bonding strength between the filling material and the base layer (1); S4. After the filling is completed, the surface of the base layer (1) is polished to ensure that it is flat and consistent with the surrounding surface, and then the joint assembly (34) is installed in the micro cooling channel layer (3) to complete the preparation of the high-temperature co-fired aluminum nitride ceramic plate.

2. A process for preparing a high temperature co-fired aluminum nitride ceramic plate according to claim 1, characterized in that: The filling materials are aluminum nitride ceramic powder and silicate binder.

3. The process for preparing a high temperature co-fired aluminum nitride ceramic plate according to claim 1, characterized in that: The joint assembly (34) comprises a first seat (341) connected to the inlet and outlet of the first channel (32) and the second channel (33), a first support (342) embedded in the left side of the first seat (341), a first sealing plug rod (343) sliding through the middle side of the first support (342), a first spring (344) connected to the right side of the first support (342), a sliding sleeve (345) slidingly arranged on the right side of the outer surface of the first seat (341), a second spring (346) arranged on the left side of the sliding sleeve (345), a bead (347) arranged on the right side of the inner wall of the first seat (341), and a sealing plug rod (343) arranged on the right side of the inner wall of the first seat (341). A second seat (348) is provided on the right side of the interior of the second seat (341), a second support (349) is embedded in the right side of the interior of the second seat (348), a second sealing plug rod (3410) is slidably passed through the middle side of the interior of the second support (349), and a third spring (3411) is connected to the left outer surface of the second support (349), the first spring (344) is connected to the first sealing plug rod (343) on the right side, the second spring (346) is connected to the first seat (341) on the left side, the outer side of the bead (347) is in contact with the sliding sleeve (345), and the left side of the third spring (3411) is connected to the second sealing plug rod (3410).

4. A process for preparing a high temperature co-fired aluminum nitride ceramic plate according to claim 3, characterized in that: Sealing rubber rings are provided on the right side of the outer surface of the first sealing plug rod (343) and the left side of the outer surface of the second sealing plug rod (3410), a sealing ring (3412) is embedded in the right side of the interior of the first sleeve (341), a limiting ring (3413) for limiting the sliding sleeve (345) is provided at the right end of the outer surface of the first sleeve (341), and a groove (3481) for contacting and engaging with the card bead (347) is provided on the middle side of the outer surface of the second sleeve (348).

5. The process for preparing a high temperature co-fired aluminum nitride ceramic plate according to claim 1, characterized in that: The packing mechanism comprises a bottom plate (91), a cylinder (92) rotatably arranged at the middle right portion of the top side of the bottom plate (91), a slider (93) connected to the top end of the cylinder (92), a support frame (94) rotatably connected to the left side of the top of the bottom plate (91), a push-scraping assembly (95) installed at the left side of the top of the support frame (94), a slide frame (96) connected to the right side of the push-scraping assembly (95), a support platform (97) slidably connected to the inner side of the slide frame (96), a material discharge assembly (98) fastened to the middle portion of the right side of the slide frame (96), and two vibration-leveling assemblies (99) arranged on the left and right sides of the support platform (97), wherein the slider (93) is slidably connected to the middle left portion of the inside of the support frame (94), and the bottom of the support platform (97) is fastened to the support frame (94).

6. A process for preparing a high temperature co-fired aluminum nitride ceramic plate according to claim 5, characterized in that: The push-scrape assembly (95) comprises a first motor (951) whose bottom is fastened to a support frame (94), a rotating rod (952) connected to the front output end of the first motor (951), a push rod (953) rotatably connected to the left front portion of the rotating rod (952), a rotating frame (954) rotatably connected to the right end of the push rod (953), and a scraper (955) arranged at the bottom of the rotating frame (954); the upper middle portion of the rotating frame (954) is rotatably connected to a slide frame (96), and the bottom of the scraper (955) is in a Y-shaped structure.

7. The process for preparing a high temperature co-fired aluminum nitride ceramic plate according to claim 5, characterized in that: The unloading assembly (98) includes a mounting seat (981) fastened to the left side of the slide (96), a second motor (982) fastened to the right side of the top of the mounting seat (981), a turntable (983) connected to the bottom output end of the second motor (982), a connecting rod frame (984) connected to the inner side of the turntable (983), a fulcrum column (985) rotatably connected to the front and rear sides of the connecting rod frame (984), a discharge hopper (986) fastened to the right end of the fulcrum column (985), and a hose (987) arranged on the top side of the discharge hopper (986). The turntable (983) penetrates and rotates on the inner side of the top of the mounting seat (981). The fulcrum column The left end of the rotating disk (985) is rotatably connected to the mounting seat (981), the top end of the hose (987) is connected to the end of the external filling material, a displacement groove (9831) is opened on the left side inside the rotating disk (983), a positioning block (9832) is arranged inside the displacement groove (9831), the middle side of the positioning block (9832) is rotatably connected to the connecting rod frame (984), two rows of hole grooves (9833) are arranged on the left side of the rear of the rotating disk (983), and the two rows of hole grooves (9833) are respectively located on the upper and lower sides of the rear of the displacement groove (9831), and the rear side of the positioning block (9832) is fastened inside the hole groove (9833).

8. The process for preparing a high temperature co-fired aluminum nitride ceramic plate according to claim 5, characterized in that: The vibration homogenization component (99) comprises a sleeve (991) whose side is fastened to the support (97), a third motor (992) fastened to the top side of the sleeve (991), an eccentric wheel (993) connected to the front output end of the third motor (992), a swing rod (994) rotatably connected to one side of the front of the eccentric wheel (993), a vertical rod (995) rotatably connected to the bottom of the swing rod (994), a knocking column (996) fixed to the bottom end of the vertical rod (995), and a vertical rod (997) disposed on the sleeve. (991) an inner bin (997) at the middle and lower side of the interior, a convex ring (998) integrally formed at the middle and upper part of the outer surface of the knocking column (996), a fourth spring (999) connected to the top side of the convex ring (998) and a fifth spring (9910) connected to the bottom side of the convex ring (998), the knocking column (996) penetrates and slides in the middle side of the inner bin (997), and the upper and lower sides of the inner bin (997) are respectively connected to the fourth spring (999) and the fifth spring (9910).

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