Precise rotary motion platform

Abstract

The application discloses a precision rotary motion platform, which comprises a base, a rotary table group, a rotary shaft, a deformable group and a driving assembly. The rotary table group comprises a first rotary table and a second rotary table which are arranged in a stacked and spaced manner. The first rotary table and the second rotary table are both annular. The first rotary table is fixedly connected with the base. The second rotary table is used for carrying a to-be-carried object. The rotary shaft is arranged at the central axis of the rotary table group. The deformable group comprises at least one first deformable member and at least one second deformable member. The first deformable member is connected with the first rotary table and the rotary shaft. The second deformable member is connected with the second rotary table and the rotary shaft. The driving assembly is used for driving the second rotary table to rotate. The precision rotary motion platform can improve the rotary motion stroke and expand the application range under the premise of ensuring high-precision positioning.

Description

Technical Field

[0001] This invention relates to the field of precision motion positioning technology, and in particular to a precision rotary motion platform. Background Technology

[0002] Precision rotational motion is a typical requirement in many high-precision positioning fields and can be applied to fields such as synchrotron radiation optics, semiconductor engineering, and space laser alignment and communication.

[0003] Traditional precision rotary tables based on worm gears are complex in structure, difficult to operate, and have low positioning accuracy. Flexible mechanisms, on the other hand, offer higher positioning accuracy due to their advantages of being frictionless, assembly-free, and lubrication-free.

[0004] However, since the high-precision positioning of flexible mechanisms relies on the minute elastic deformation of materials to generate minute displacements or rotations, the movement stroke of the device is limited, thus restricting its application in a wider range of fields. Summary of the Invention

[0005] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a precision rotary motion platform that can increase the rotary motion stroke while ensuring high-precision positioning, thereby expanding the application range.

[0006] This application provides a precision rotary motion platform, including a base, a turntable assembly, a rotation axis, a deformable assembly, and a drive component. The turntable assembly includes a first turntable and a second turntable stacked and spaced apart. Both the first and second turntables are annular. The first turntable is fixedly connected to the base, and the second turntable is used to carry the object to be loaded. The rotation axis is located at the central axis of the turntable assembly. The deformable assembly includes at least one first deformable member and at least one second deformable member. The first deformable member connects the first turntable and the rotation axis, and the second deformable member connects the second turntable and the rotation axis. The drive component is used to drive the second turntable to rotate.

[0007] According to the embodiment of this application, the precision rotary motion platform, by setting a first turntable and a second turntable connected by a rotary shaft, and a first deformable member and a second deformable member respectively for connecting the first turntable and the rotary shaft, and the second turntable and the rotary shaft, increases the number of deformable members when the second turntable rotates under the drive of the drive assembly, thereby generating a larger displacement through deformation, improving the rotary motion stroke, and expanding the application range.

[0008] In one possible implementation of this application, the deformable assembly further includes at least one third deformable member, at least one fourth deformable member, and at least one fifth deformable member. The third deformable member is disposed between the rotating shaft and the turntable assembly and is fixedly connected to the base. The rotating shaft includes a first shaft segment and a second shaft segment that are stacked and spaced apart. The first deformable member connects the first turntable and the first shaft segment, and the second deformable member connects the second turntable and the second shaft segment. The fourth deformable member connects the first shaft segment and the third deformable member, and the fifth deformable member connects the second shaft segment and the third deformable member.

[0009] In one possible implementation of this application, there are two first turntables, and a second turntable is disposed between the two first turntables, with the two first turntables connected by at least one fixing member; there are two first shaft segments, and a second shaft segment is disposed between the two first shaft segments; there are at least two first deformable members, with the first turntable and the first shaft segment connected by at least one first deformable member; there are at least two fourth deformable members, with each first shaft segment connected to a third deformable member by at least one first deformable member.

[0010] In one possible implementation of this application, the turntable assembly, the rotating shaft, and the deformable assembly are integrally formed.

[0011] In one possible implementation of this application, the turntable assembly further includes a loading platform, which is connected to a second turntable via a connector and is used to carry the object to be loaded.

[0012] In one possible implementation of this application, the drive assembly includes a drive member and a drive arm, the drive arm is fixedly connected to the second turntable, and the drive member drives the drive arm to rotate around the rotation axis.

[0013] In one possible implementation of this application, the driving component is a linear motor, and the output end of the linear motor is located on one side of the driving arm so that the driving arm rotates under the push of the output end; the driving component also includes an elastic element, one end of which is connected to the base and the other end is connected to the driving arm, and the elastic element has a preload when the driving arm rotates under the push of the output end.

[0014] In one possible implementation of this application, the drive assembly further includes a high-precision driver connected to the drive arm; the drive member has a first position and a second position, in the first position, the output end of the drive member can abut against the drive arm, and in the second position, the output end of the drive member can abut against the high-precision driver.

[0015] In one possible implementation of this application, the drive assembly further includes a drive seat connected to a base, and a drive member detachably and fixedly connected to the drive seat to switch between a first position and a second position; one end of the elastic member is connected to the base via the drive seat.

[0016] In one possible implementation of this application, a sensor assembly is also included, comprising a displacement measuring element and a reading element. The displacement measuring element is connected to the drive arm, and the reading element is connected to the base and close to the displacement measuring element to read the displacement of the drive arm measured by the displacement measuring element.

[0017] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0019] Figure 1 This is a schematic diagram of the structure of a precision rotary motion platform at one angle according to an embodiment of the present invention;

[0020] Figure 2 This is a front view of a precision rotary motion platform according to an embodiment of the present invention.

[0021] Figure 3 This is a schematic diagram of the structure of one embodiment of a precision rotary motion platform according to an embodiment of the present invention;

[0022] Figure 4 This is a schematic diagram of the structure of a precision rotary motion platform according to an embodiment of the present invention from another angle;

[0023] Figure 5 This is a schematic diagram of the deformable assembly and the rotating shaft cooperating in a precision rotary motion platform according to an embodiment of the present invention;

[0024] Figure 6 This is a schematic diagram of the cooperation between the turntable assembly and the drive arm in a precision rotary motion platform according to an embodiment of the present invention;

[0025] Figure 7 This is a schematic diagram of the structure of a precision rotary motion platform according to an embodiment of the present invention from another angle;

[0026] Figure 8 This is a schematic diagram of the drive assembly of a precision rotary motion platform according to an embodiment of the present invention;

[0027] Figure 9 This is a schematic diagram of the turntable assembly and sensor components of a precision rotary motion platform according to an embodiment of the present invention.

[0028] Figure label:

[0029] Precision rotary motion platform 100

[0030] Base 10

[0031] Turntable assembly 20, first turntable 21, second turntable 22, platform 23, fixing component 24, adapter component 25.

[0032] Rotational shaft 30, first shaft segment 31, second shaft segment 32

[0033] Deformable assembly 40, first deformable component 41, second deformable component 42, third deformable component 43, fourth deformable component 44, fifth deformable component 45

[0034] Drive assembly 50, drive component 51, drive arm 52, elastic component 53, high-precision driver 54, drive base 55, elongated hole 551, limiting component 56.

[0035] Sensor assembly 60, displacement measuring component 61, reading component 62, displacement measuring base 63, and reading base 64. Detailed Implementation

[0036] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0037] In the description of this invention, it should be understood that the terms "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, features defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0038] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0039] The precision rotary motion platform 100 of this application embodiment is described below with reference to the accompanying drawings.

[0040] Reference Figure 1 and Figure 2 This application provides a precision rotary motion platform 100, including a base 10, a turntable assembly 20, a rotation shaft 30, a deformable assembly 40, and a drive component 50. The turntable assembly 20 includes a first turntable 21 and a second turntable 22 stacked and spaced apart. Both the first turntable 21 and the second turntable 22 are annular. The first turntable 21 is fixedly connected to the base 10, and the second turntable 22 is used to carry the object to be loaded. The rotation shaft 30 is located at the central axis of the turntable assembly 20. The deformable assembly 40 includes at least one first deformable member 41 and at least one second deformable member 42. The first deformable member 41 connects the first turntable 21 and the rotation shaft 30, and the second deformable member 42 connects the second turntable 22 and the rotation shaft 30. The drive component 50 is used to drive the second turntable 22 to rotate.

[0041] Specifically, refer to Figure 1 The precision rotary motion platform 100 in this embodiment of the invention includes a base 10, which supports a turntable assembly 20, a rotating shaft 30, a deformable assembly 40, and a drive assembly 50, etc.

[0042] Reference Figure 2 The turntable assembly 20 includes a first turntable 21 and a second turntable 22 stacked and spaced apart. That is, the first turntable 21 and the second turntable 22 are not directly connected. For example, the first turntable 21 and the second turntable 22 can be stacked along the thickness direction of the base 10. The first turntable 21 and the second turntable 22 can be arranged sequentially from bottom to top or from top to bottom. Both the first turntable 21 and the second turntable 22 are annular, and can be one or two of circular rings, square rings, or irregular rings. The first turntable 21 is fixedly connected to the base 10. For example, the first turntable 21 and the base 10 can be fixedly connected by welding, threaded connection, snap-fit ​​connection, or connecting components. The second turntable 22 is used to support the object to be loaded. For example, the second turntable 22 can have a support portion to support the object, or it can support the object by connecting other structural components.

[0043] The rotating shaft 30 is located at the central axis of the turntable assembly 20 and can serve as the rotation center of the turntable assembly 20.

[0044] It should be noted that the rotating shaft 30 is located at the central axis of the turntable assembly 20, but is not directly connected to the base 10, and the rotating shaft 30 can undergo slight deformation.

[0045] Reference Figure 1 and Figure 2The deformable assembly 40 includes at least one first deformable member 41 and at least one second deformable member 42. The first deformable member 41 connects the first turntable 21 and the rotating shaft 30, and the second deformable member 42 connects the second turntable 22 and the rotating shaft 30. Since the first turntable 21 is fixedly connected to the base 10, and the rotating shaft 30 is connected to the first turntable 21, the first turntable 21 provides support for the rotating shaft 30 through the first deformable member 41, and the rotating shaft 30 provides support for the second turntable 22 through the second deformable member 42.

[0046] For example, there may be one or more of the first deformable member 41 and the second deformable member 42; preferably, there are two or more of the first deformable member 41 and the second deformable member 42, and they are distributed at intervals along the inner periphery of the first turntable 21 and the second turntable 22, respectively; further, two or more of the first deformable member 41 and the second deformable member 42 are evenly distributed along the inner periphery of the first turntable 21 and the second turntable 22; even further, the first deformable member 41 and the second deformable member 42 are stacked and spaced apart corresponding to the first turntable 21 and the second turntable 22, which can save space and make the arrangement neat.

[0047] It is understood that the two ends of the first deformable part 41 can be fixedly connected to the first turntable 21 and the rotating shaft 30 respectively, for example, by welding, threaded connection, snap-fit ​​connection or connection through connecting components, or it can be integrally formed. The two ends of the second deformable part 42 can be fixedly connected to the second turntable 22 and the rotating shaft 30 respectively, for example, by welding, threaded connection, snap-fit ​​connection or connection through connecting components, or it can be integrally formed.

[0048] The drive assembly 50 drives the second turntable 22 to rotate, providing rotational power to the rotary motion platform. The drive assembly 50 drives the second turntable 22 to rotate, and the second turntable 22 transmits the rotational power to the second deformable member 42, then to the rotational shaft 30, then to the first deformable member 41, and finally to the first turntable 21. Compared to the prior art where the drive assembly 50 is directly connected to the first turntable 21, the rotational power only passes through the first deformable member 41. The deformable structure is expanded from the existing first deformable member 41 to include the first deformable member 41, the second deformable member 42, and the rotational shaft 30, thereby generating a larger displacement, increasing the rotational stroke, and thus expanding the application range.

[0049] Therefore, referring to Figure 1 and Figure 2According to the embodiment of this application, the precision rotary motion platform 100, by setting a first turntable 21 and a second turntable 22 connected by a rotary shaft 30, and a first deformable member 41 and a second deformable member 42 respectively for connecting the first turntable 21 and the rotary shaft 30, and the second turntable 22 and the rotary shaft 30, increases the number of deformable members when the second turntable 22 rotates under the drive of the drive assembly 50, thereby generating a larger displacement through deformation, improving the rotary motion stroke, and expanding the application range.

[0050] It is understandable that the drive assembly 50 can be a rotary drive or a linear drive, etc. When the drive assembly 50 drives the second turntable 22 to rotate, it can be connected to or abut against the second turntable 22, etc.

[0051] In some embodiments of this application, reference is made to Figure 1 and Figure 5 The deformable assembly 40 further includes at least one third deformable member 43, at least one fourth deformable member 44, and at least one fifth deformable member 45. For example, the third deformable member 43, the fourth deformable member 44, and the fifth deformable member 45 can be one or more. Preferably, there are two or more third deformable members 43, the fourth deformable member 44, and the fifth deformable member 45, which are distributed at intervals along the circumference of the rotation axis 30, the inner circumference of the first turntable 21, and the inner circumference of the second turntable 22, respectively. Further, the two or more third deformable members 43, the fourth deformable member 44, and the fifth deformable member 45 are evenly distributed along the circumference of the rotation axis 30, the inner circumference of the first turntable 21, and the inner circumference of the second turntable 22, respectively. Furthermore, the fourth deformable member 44 and the fifth deformable member 45 are stacked and spaced apart corresponding to the first turntable 21 and the second turntable 22, which can save space and make the arrangement neat.

[0052] The third deformable member 43 is disposed between the rotating shaft 30 and the turntable assembly 20. Specifically, the third deformable member can be disposed at any position between the rotating shaft 30 and the turntable assembly 20. Preferably, the third deformable member 43 is disposed close to the rotating assembly to further increase the stroke. The third deformable member 43 is fixedly connected to the base 10 to provide support.

[0053] The rotating shaft 30 includes a first shaft segment 31 and a second shaft segment 32 arranged in a stacked and spaced manner, meaning that the first shaft segment 31 and the second shaft segment 32 are not directly connected. Specifically, the first shaft segment 31 and the second shaft segment 32 are arranged along the central axis direction. A first deformable member 41 connects the first turntable 21 and the first shaft segment 31, and a second deformable member 42 connects the second turntable 22 and the second shaft segment 32; a fourth deformable member 44 connects the first shaft segment 31 and the third deformable member 43, and a fifth deformable member 45 connects the second shaft segment 32 and the third deformable member 43. In this way, the first turntable 21 provides support for the first shaft segment 31 through the first deformable member 41, the third deformable member 43 provides support for the second shaft segment 32 through the fifth deformable member 45, and also provides support for the second turntable 22 through the second deformable member 42. At the same time, the third deformable member 43 can also provide support for the first shaft segment 31 through the fourth deformable member 44.

[0054] By setting the rotation shaft 30 as the first shaft segment 31 and the second shaft segment 32, and by setting the third deformable member 43, the fourth deformable member 44 and the fifth deformable member 45, when the second turntable 22 rotates, the rotational force acts sequentially on the second deformable member 42, the second shaft segment 32, the fifth deformable member 45, the third deformable member 43, the fourth deformable member 44, the first shaft segment 31, the first deformable member 41 and the first turntable 21, which further increases the number of deformable structures and the deformation displacement that can be generated, thereby further improving the motion stroke.

[0055] It is understood that the first deformable component 42, the second deformable component 44, and the fifth deformable component 45 are all metal sheets, and after being stacked, they remain sheet-like along the thickness direction of the base 10. The third deformable component 43 is a metal block for connection with the base 10.

[0056] In some embodiments of this application, reference is made to Figure 1 and Figure 2 Two first turntables 21 are provided, and a second turntable 22 is positioned between the two first turntables 21. The two first turntables 21 are connected by at least one fixing member 24. This arrangement of first turntables 21 on the upper and lower sides of the second turntable 22, with each first turntable 21 connected to the base 10, improves the rotational stability and rigidity of the second turntable 22, thereby enhancing the overall stability and rigidity of the platform. Simultaneously, it increases the load-bearing capacity of the turntable assembly 20 in vertical applications and reduces axial drift during movement. The fixing members 24 are fixedly connected to the first turntables 21. There can be one or more fixing members 24; preferably, there are two or more fixing members 24, evenly distributed along the outer periphery of the first turntables 21.

[0057] There are two first shaft segments 31, and the second shaft segment 32 is located between the two first shaft segments 31. The two first shaft segments 31 correspond to the two first turntables 21 respectively, and the second shaft segment 32 corresponds to the second turntable 22.

[0058] There are at least two first deformable members 41. The first turntable 21 and the first shaft segment 31 are connected by at least one first deformable member 41. That is, the first turntable 21 located below the second turntable 22 is connected to the first shaft segment 31 located below the second shaft segment 32 by at least one first deformable member 41, and the first turntable 21 located above the second turntable 22 is connected to the first shaft segment 31 located above the second shaft segment 32 by at least one first deformable member 41.

[0059] There are at least two fourth deformable members 44. Each first shaft segment 31 is connected to the third deformable member 43 through at least one first deformable member 41. That is, the first shaft segment 31 located below the second shaft segment 32 and the third deformable member 43 are connected through at least one fourth deformable member 44, and the first shaft segment 31 located above the second shaft segment 32 and the third deformable member 43 are connected through at least one fourth deformable member 44.

[0060] In some embodiments, the fastener 24 can be U-shaped, with the two ends of the open end connected to two first turntables 21 respectively.

[0061] In some embodiments of this application, reference is made to Figure 1 and Figure 2 The turntable assembly 20, the rotating shaft 30, and the deformable assembly 40 are integrally formed. Specifically, the turntable assembly 20, the rotating shaft 30, and the deformable assembly 40 are integrally formed using wire machining technology, and a wire-passing hole structure is designed in the structure to facilitate wire machining. The integrally formed structure avoids problems such as mismatch of rotation center and vibration due to installation gaps that occur when assembling multiple structures.

[0062] In some embodiments of this application, reference is made to Figure 3 The turntable assembly 20 also includes a loading platform 23, which is connected to the second turntable 22 via an adapter 25. The loading platform 23 is used to carry the object to be loaded.

[0063] Specifically, the stage 23 and the turntable assembly 20 are stacked and spaced apart. The stage 23 is connected to the second turntable 22 via one or more adapters 25; preferably, there are two or more adapters 25; further, the two or more adapters 25 are evenly distributed along the outer periphery of the second turntable 22. The adapters 25 are fixedly connected to the stage 23 and the second turntable 22 so that the stage 23 can rotate with the second turntable 22. The loading surface of the stage 23 is perpendicular to the rotation axis 30.

[0064] By setting up the stage 23, larger objects can be mounted, such as mirrors, crystals, clamps, templates, etc.

[0065] In some embodiments, the adapter 25 can be Z-shaped, with its two ends connected to the first turntable 21 and the platform 23, respectively.

[0066] In some embodiments of this application, reference is made to Figure 1 and Figure 6 The drive assembly 50 includes a drive member 51 and a drive arm 52. The drive arm 52 is fixedly connected to the second turntable 22. The drive member 51 drives the drive arm 52 to rotate around the rotation axis 30.

[0067] By setting up the drive arm 52, it is easy for the drive component 51 to drive the second turntable 22 to rotate.

[0068] The drive arm 52 and the second turntable 22 can be fixedly connected, for example, by welding, threaded connection, snap-fit ​​connection or connection through connecting components; or they can be integrally formed.

[0069] In some embodiments of this application, reference is made to Figure 1 , Figure 4 , Figure 7 and Figure 8 The driving component 51 is a linear motor, and the output end of the linear motor is located on one side of the driving arm 52 so that the driving arm 52 rotates under the push of the output end; the driving assembly 50 also includes an elastic component 53, one end of which is connected to the base 10 and the other end is connected to the driving arm 52, and the elastic component 53 has a preload when the driving arm 52 rotates under the push of the output end.

[0070] Specifically, the output end of the linear motor is not connected to the drive arm 52. When the drive arm 52 is rotated, the output end abuts against one side of the drive arm 52, driving the drive arm 52 to rotate. This is because the motion of the output end of the linear motor is linear motion, while the motion of the drive arm 52 is rotational motion. When the output end drives the drive arm 52 to rotate, the abutting position of the output end on the drive arm 52 will change. Therefore, the two are not connected, and they only abut against each other when the output end drives the drive arm 52 to rotate. Since the linear motor is not connected to the drive arm 52 and is located on one side of the drive arm 52, the linear motor can only apply a thrust to the drive arm 52. That is, the drive arm 52 can only rotate in one direction. Therefore, in order to enable the drive arm 52 to rotate in the opposite direction, elastic members 53 are provided at both ends, which are connected to the base 10 and the drive arm 52 respectively. The elastic members 53 have a preload when the drive arm 52 rotates in one direction. In this way, when the driving force of the drive member 51 disappears, the drive arm 52 will rotate in the opposite direction under the action of the preload, thus realizing the forward rotation of the drive arm 52.

[0071] It should be noted that when the drive arm 52 rotates under the push of the output end, the elastic element 53 can be in an extended state or a compressed state; if the elastic element 53 and the linear motor are located on the same side of the drive arm 52, the elastic element 53 is in an extended state; if the elastic element 53 and the linear motor are located on opposite sides of the drive arm 52, the elastic element 53 is in a compressed state.

[0072] Understandably, the elastic element 53 can be a spring, etc. The linear motor can be a piezoelectric actuator with a displacement resolution in the sub-nanometer range.

[0073] In some embodiments of this application, reference is made to Figure 1 and Figure 4 The drive assembly 50 also includes a high-precision driver 54, which is connected to the drive arm 52. The drive member 51 has a first position and a second position. In the first position, the output end of the drive member 51 can abut against the drive arm 52. In the second position, the output end of the drive member 51 can abut against the high-precision driver 54.

[0074] By setting a high-precision driver 54, the precision rotary motion platform 100 can position the displacement of the object to be carried with higher precision requirements, further expanding the application range of the motion platform of this application.

[0075] When the drive unit 51 is in the first position, its output end can abut against the drive arm 52. By driving the drive arm 52 to rotate through the drive unit 51, the displacement of the object to be loaded with a large stroke can be positioned. When the drive unit 51 is in the second position, its output end can abut against the high-precision driver 54. By applying power to the drive unit 51 through the high-precision driver 54, the high-precision driver 54 and the drive arm 52 can rotate, thereby positioning the displacement of the object to be loaded with higher precision requirements.

[0076] In some embodiments, the high-precision actuator 54 is a piezoelectric ceramic with a displacement resolution of 1 nm to 1000 nm.

[0077] The high-precision driver 54 can be located at the end of the drive arm 52 away from the turntable assembly 20, or it can be located above or below the drive arm 52, etc.

[0078] In some embodiments of this application, reference is made to Figure 1 and Figure 4 The drive assembly 50 also includes a drive seat 55, which is connected to the base 10. The drive member 51 is detachably and fixedly connected to the drive seat 55 to switch between a first position and a second position. One end of the elastic member 53 is connected to the base 10 through the drive seat 55.

[0079] By setting the drive seat 55, it is easy to connect the drive component 51 to the base 10. The drive component 51 and the drive seat 55 are detachably and fixedly connected, which facilitates switching between the first position and the second position. One end of the elastic component 53 is connected to the base 10 through the drive seat 55, which makes it easy for both ends of the elastic component 53 to be at the same height.

[0080] The drive seat 55 can be fixed to the base 10. For example, the drive seat 55 and the base 10 can be welded, threaded, snap-fitted or connected by connecting components; or it can be integrally formed on the base 10.

[0081] The driving component 51 and the driving base 55 can be detachably and fixedly connected by means of threaded connection, snap-fit ​​connection, or connection through connecting components. In this application, the base 10 has an elongated hole 551, through which the driving component 51 passes and is limited and fixed by a limiting member 56. The elongated hole 551 extends vertically, and the high-precision driver 54 is located above the driving arm 52. When the driving component 51 is at the lower end of the elongated hole 551, it can abut against the driving arm 52; when the driving component 51 is above the elongated hole 551, it can abut against the high-precision driver 54.

[0082] In some embodiments of this application, reference is made to Figure 1 and Figure 9 It also includes a sensor assembly 60, which includes a displacement measuring element 61 and a reading element 62. The displacement measuring element 61 is connected to the drive arm 52, and the reading element 62 is connected to the base 10 and close to the displacement measuring element 61 to read the displacement of the drive arm 52 measured by the displacement measuring element 61.

[0083] By setting up sensor assembly 60, the rotational displacement of the object to be loaded can be obtained. Displacement measuring component 61 rotates synchronously with drive arm 52, and the rotational displacement of displacement measuring component 61 is the same as that of drive arm 52. Reading component 62 can obtain the rotational displacement of drive arm 52 by reading the displacement of displacement measuring component 61, thereby obtaining the rotational displacement of the object to be loaded. The amount of rotation can be obtained after conversion.

[0084] In some embodiments, refer to Figure 1 and Figure 9 The sensor assembly 60 also includes a displacement measuring base 63 and a reading base 64. The displacement measuring base 63 is connected to the drive arm 52. The end of the displacement measuring base 63 away from the turntable assembly 20 is an arc-shaped surface. The displacement measuring element 61 is a grating ruler, which is located on the arc-shaped surface. The reading element 62 is a reading head, which is mounted on the reading base 64 and close to the displacement measuring element 61. When the turntable assembly 20 rotates, the drive arm 52 rotates, causing the grating ruler to rotate, which creates a relative misalignment with the reading head. This allows the reading head to read the displacement, which can then be converted to obtain the rotation amount.

[0085] In the description of this specification, references to terms such as "embodiment," "example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0086] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A precision rotary motion platform, characterized in that, include: Base (10); Turntable assembly (20), the turntable assembly (20) includes a first turntable (21) and a second turntable (22) stacked and spaced apart, the first turntable (21) and the second turntable (22) are both annular, the first turntable (21) is fixedly connected to the base (10), and the second turntable (22) is used to carry the object to be carried; A rotating shaft (30) is located at the central axis of the turntable assembly (20); Deformable assembly (40), the deformable assembly (40) includes at least one first deformable member (41) and at least one second deformable member (42), the first deformable member (41) is connected to the first turntable (21) and the rotating shaft (30), and the second deformable member (42) is connected to the second turntable (22) and the rotating shaft (30). A drive assembly (50) is provided for driving the second turntable (22) to rotate. The deformable assembly (40) further includes at least one third deformable member (43), at least one fourth deformable member (44), and at least one fifth deformable member (45). The third deformable member (43) is disposed between the rotating shaft (30) and the turntable assembly (20) and is fixedly connected to the base (10). The rotating shaft (30) includes a first shaft segment (31) and a second shaft segment (32) stacked and spaced apart. The first deformable member (41) connects the first turntable (21) and the first shaft segment (31), and the second deformable member (42) connects the second turntable (22) and the second shaft segment (32). The fourth deformable member (44) connects the first shaft segment (31) and the third deformable member (43), and the fifth deformable member (45)... (45) Connect the second shaft segment (32) and the third deformable member (43), there are two first turntables (21), the second turntable (22) is located between the two first turntables (21), and the two first turntables (21) are connected by at least one fixing member (24); there are two first shaft segments (31), and the second shaft segment (32) is located between the two first shaft segments (31); there are at least two first deformable members (41), and the first turntable (21) and the first shaft segment (31) are connected by at least one first deformable member (41); there are at least two fourth deformable members (44), and each first shaft segment (31) is connected to the third deformable member (43) by at least one fourth deformable member (44).

2. The precision rotary motion platform according to claim 1, characterized in that, The turntable assembly (20), the rotating shaft (30), and the deformable assembly (40) are integrally formed structures.

3. The precision rotary motion platform according to claim 1, characterized in that, The turntable assembly (20) also includes a loading platform (23), which is connected to the second turntable (22) via a connector (25). The loading platform (23) is used to carry the object to be loaded.

4. The precision rotary motion platform according to claim 1, characterized in that, The drive assembly (50) includes a drive member (51) and a drive arm (52). The drive arm (52) is fixedly connected to the second turntable (22). The drive member (51) drives the drive arm (52) to rotate around the rotation axis (30).

5. The precision rotary motion platform according to claim 4, characterized in that, The driving component (51) is a linear motor, and the output end of the linear motor is located on one side of the driving arm (52) so that the driving arm (52) rotates under the push of the output end; The drive assembly (50) also includes an elastic element (53), one end of which is connected to the base (10) and the other end is connected to the drive arm (52). When the drive arm (52) rotates under the push of the output end, the elastic element (53) has a preload.

6. The precision rotary motion platform according to claim 5, characterized in that, The drive assembly (50) also includes a high-precision driver (54) connected to the drive arm (52); The drive unit (51) has a first position and a second position. In the first position, the output end of the drive unit (51) can abut against the drive arm (52). In the second position, the output end of the drive unit (51) can abut against the high-precision driver (54).

7. The precision rotary motion platform according to claim 6, characterized in that, The drive assembly (50) further includes a drive seat connected to the base (10), and the drive member (51) is detachably and fixedly connected to the drive seat to switch between the first position and the second position; One end of the elastic element (53) is connected to the base (10) via the drive seat.

8. The precision rotary motion platform according to claim 4, characterized in that, It also includes a sensor assembly (60) comprising a displacement measuring element (61) and a reading element (62), the displacement measuring element (61) being connected to the drive arm (52), and the reading element (62) being connected to the base (10) and close to the displacement measuring element (61) to read the displacement of the drive arm (52) measured by the displacement measuring element (61).

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