Two-dimensional shaft system precision parameter compensation method, device, equipment and storage medium

Abstract

The present application provides a two-dimensional axis system precision parameter compensation method, device, equipment and storage medium, which relates to the field of industrial automation technology, and solves the problem that the accuracy measurement in the related technology has errors and it is difficult to accurately measure the accuracy of the two-dimensional axis system. The present application scheme determines the axis system coordinates corresponding to each feature point in the feature plate on the two-dimensional axis platform by utilizing the relative position of the industrial camera and the feature plate, so as to determine the axis system precision parameters of the two-dimensional axis platform by utilizing the same set of data, thereby realizing convenient and highly automated positioning precision measurement, and by compensating for the positioning precision of the two coordinate axes in one dimension, it can replace the interferometer to effectively compensate for the one-dimensional positioning precision, thereby effectively improving the two-dimensional positioning precision of the two-dimensional axis platform.

Description

Technical Field

[0001] The present application relates to the field of industrial automation technology, and in particular to a two-dimensional shaft system precision parameter compensation method, device, equipment and storage medium. Background Art

[0002] In semiconductor, display panel, micro display and other high-precision processing equipment, there is a hardware structure of two-dimensional axis, which can be composed of linear motor or piezoelectric motor, and its two-dimensional positioning accuracy is affected by the accuracy, stability and installation error of the mechanical structure. Therefore, the hardware structure of the two-dimensional axis of high-precision processing equipment will have more or less problems such as single-axis straightness, positioning accuracy, verticality, etc., which will eventually lead to large two-dimensional positioning accuracy errors. If the two-dimensional positioning error value (X, Y axis direction error) is greater than the required processing accuracy, it will cause abnormal final processing accuracy.

[0003] In the related art, during the assembly stage of high-precision processing equipment, the two-dimensional axis is fixed to the marble structure. Therefore, a laser interferometer is usually used to measure the positioning accuracy of the two single axes in the two-dimensional axis hardware structure multiple times, and compensate to reduce the influence of the two-dimensional positioning error value. However, this method requires the operator to continuously use the laser interferometer for measurement. For complex two-dimensional axis hardware structures, it is very difficult to set up a laser interferometer for measurement, and the test results cannot be well guaranteed.

[0004] Therefore, there are certain errors in the precision measurement in the related technology, and it is impossible to accurately evaluate the precision problems existing in the two-dimensional axis system, let alone provide systematic compensation to reduce the two-dimensional positioning accuracy error. Summary of the invention

[0005] The present application provides a two-dimensional axis system accuracy parameter compensation method, device, equipment and storage medium, which solves the problem that the accuracy of the two-dimensional axis system is difficult to accurately measure due to errors in precision measurement in related technologies. This solution can quantify the axis system accuracy parameters of the two-dimensional axis and improve the two-dimensional positioning accuracy by compensating for the single-axis positioning accuracy.

[0006] In a first aspect, the present application provides a two-dimensional axis system accuracy parameter compensation method, which is applied to electronic industrial equipment. The electronic industrial equipment obtains an image of a feature plate on a two-dimensional axis platform through an industrial camera. The shooting direction of the industrial camera is perpendicular to the plane where the two-dimensional axis platform is located. The two-dimensional axis system accuracy parameter compensation method includes:

[0007] After obtaining a plane image of the plane corresponding to the two-dimensional axis platform through an industrial camera, the pixel accuracy of the industrial camera is determined based on two feature points on the feature plate in the plane image. The pixel accuracy is used to represent the mapping relationship between the actual distance between the two feature points and the pixel spacing.

[0008] Determine the target feature point on the feature plate, and determine the axis coordinates of multiple feature points in two axial directions based on the pixel accuracy and the current position of the two-dimensional axis platform and taking the target feature point as the starting point;

[0009] Combined with the axis coordinates corresponding to the multiple characteristic points obtained, the axis accuracy parameters of the corresponding axial directions are determined respectively, and the axis accuracy parameters include positioning error values ​​in two axial directions;

[0010] According to the positioning error value and the preset accuracy threshold, the positioning accuracy compensation is performed on the two-dimensional axis platform.

[0011] In the second aspect, the present application further provides a two-dimensional axis system accuracy parameter compensation device, which is applied to electronic industrial equipment. The electronic industrial equipment obtains an image of a feature plate on a two-dimensional axis platform through an industrial camera. The shooting direction of the industrial camera is perpendicular to the plane where the two-dimensional axis platform is located. The two-dimensional axis system accuracy parameter compensation device includes:

[0012] The distance calibration module is configured to determine the pixel accuracy of the industrial camera based on two feature points on the feature plate in the plane image after acquiring the plane image of the plane corresponding to the two-dimensional axis platform through the industrial camera, wherein the pixel accuracy is used to represent the mapping relationship between the actual distance between the two feature points and the pixel spacing;

[0013] A coordinate extraction module is configured to determine a target feature point on the feature plate, and based on the pixel accuracy and the current position of the two-dimensional axis platform, determine the axis coordinates of a plurality of feature points in two axial directions with the target feature point as a starting point;

[0014] An error determination module is configured to determine the axis system accuracy parameters of the corresponding axial directions respectively according to the axis system coordinates corresponding to the multiple characteristic points obtained, and the axis system accuracy parameters include positioning error values ​​in two axial directions;

[0015] The error compensation module is configured to perform positioning accuracy compensation on the two-dimensional axis platform according to the positioning error value and a preset accuracy threshold.

[0016] In a third aspect, the present application further provides an electronic industrial device, the electronic industrial device comprising:

[0017] one or more processors;

[0018] a storage device for storing one or more programs,

[0019] When one or more programs are executed by one or more processors, the one or more processors implement the two-dimensional axis system precision parameter compensation method of the present application.

[0020] In a fourth aspect, the present application also provides a storage medium storing computer executable instructions, which, when executed by a processor, are used to execute the two-dimensional axis system precision parameter compensation method of the present application.

[0021] The present application scheme determines the axis coordinates corresponding to each feature point in the feature plate on the two-dimensional axis platform by utilizing the relative position of the industrial camera and the feature plate, so as to determine the axis accuracy parameters of the two-dimensional axis platform by utilizing the same set of data, thereby realizing convenient and highly automated positioning accuracy measurement to complete the measurement of the errors corresponding to the two coordinate axes of the two-dimensional axis platform, and then by compensating for the one-dimensional positioning accuracy corresponding to the two coordinate axes, it can replace the scheme of using an interferometer for measurement compensation, and can also utilize the compensation for each coordinate axis to compensate for the errors caused by the two-dimensional axis platform, thereby effectively improving the two-dimensional positioning accuracy of the two-dimensional axis platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram of the steps of a two-dimensional shaft system precision parameter compensation method provided in one embodiment of the present application.

[0023] Figure 2 A schematic diagram of the steps for calculating shaft system accuracy parameters provided in one embodiment of the present application.

[0024] Figure 3 A schematic diagram of the steps for calculating shaft system accuracy parameters provided in another embodiment of the present application.

[0025] Figure 4 A schematic diagram of the steps for calculating shaft system accuracy parameters provided in yet another embodiment of the present application.

[0026] Figure 5 A schematic structural diagram of a two-dimensional shaft system precision parameter compensation device provided in one embodiment of the present application.

[0027] Figure 6 A schematic diagram of the structure of an electronic industrial device provided in one embodiment of the present application. DETAILED DESCRIPTION

[0028] The embodiments of the present application are further described in detail below in conjunction with the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are only used to explain the embodiments of the present application, rather than to limit the embodiments of the present application. It should also be noted that, for ease of description, only the parts related to the embodiments of the present application rather than all structures are shown in the accompanying drawings, and those skilled in the art should be able to think of it after reading the specification of this application that as long as the technical features do not contradict each other, any combination of the technical features can constitute an optional implementation method.

[0029] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable when appropriate, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally a class, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally represents that the objects associated before and after are in an "or" relationship. In the description of the present application, "multiple" means two or more, and "several" means one or more.

[0030] In high-precision processing equipment such as semiconductors, display panels, and microdisplays, a hardware structure with a two-dimensional axis is used. The hardware structure may be composed of a linear motor or a piezoelectric motor, and its two-dimensional positioning accuracy is affected by the accuracy, stability, and installation errors of the mechanical structure.

[0031] In the related art, during the assembly stage of high-precision processing equipment, the two-dimensional axis is fixed to the marble structure. Therefore, a laser interferometer is usually used to measure the positioning accuracy of the two single axes in the two-dimensional axis hardware structure multiple times, and compensate to reduce the influence of the two-dimensional positioning error value. However, this method requires the operator to continuously use the laser interferometer for measurement. For complex two-dimensional axis hardware structures, it is very difficult to set up a laser interferometer for measurement, and the test results cannot be well guaranteed.

[0032] In this regard, an embodiment of the present application provides a two-dimensional shaft system precision parameter compensation method, which is applied to electronic industrial equipment. It is conceivable that the electronic industrial equipment can be the high-precision processing equipment itself or a part of the high-precision processing equipment. The electronic industrial equipment includes a processor and a memory, so that the processor executes computer executable instructions stored in the memory to implement the two-dimensional shaft system precision parameter compensation method provided in the embodiment of the present application.

[0033] The electronic industrial equipment can obtain an image of a characteristic plate on a two-dimensional axis platform through an industrial camera, wherein the two-dimensional axis platform is a motion structure composed of two motor shafts with perpendicular motion directions, and also includes a storage table to place objects to be detected, such as characteristic plates, etc. It can be imagined that the industrial camera and the two-dimensional axis platform are external devices and equipment of the electronic industrial equipment, and the shooting direction of the industrial camera is perpendicular to the plane where the two-dimensional axis platform is located. For example, the two-dimensional axis platform is placed in the horizontal direction, and the shooting direction of the industrial camera corresponds to the vertical direction. It should be noted that this example is only an exemplary description of the installation position of the two-dimensional axis platform, and in some embodiments, the two-dimensional axis platform can also be installed in the vertical direction.

[0034] In addition, the feature plate can be made of rigid materials, such as photolithography glass, wafer, etc., on which feature points arranged in an array are set. It can be imagined that the feature points on the feature plate meet the two-dimensional arrangement, and its accuracy is higher than the processing accuracy of the processing equipment. Therefore, the feature plate can be used as a standard to measure the axis system accuracy of the two-dimensional axis platform.

[0035] Optionally, in some embodiments, the electronic industrial equipment may also include the above-mentioned industrial camera and two-dimensional axis platform. In addition, optionally, a light source is also provided in one embodiment, and the industrial camera can capture clearer images through the illumination of the light source.

[0036] Based on this, electronic industrial equipment can implement the measurement of the two-dimensional axis platform by executing the two-dimensional axis system accuracy parameter compensation method of the present application. Figure 1 A schematic diagram of the steps of a two-dimensional shaft system accuracy parameter compensation method provided in an embodiment of the present application is shown in FIG. Figure 1 As shown, the two-dimensional axis system accuracy parameter compensation method includes steps S110 to S140:

[0037] Step S110: After acquiring a plane image of the plane corresponding to the two-dimensional axis platform through an industrial camera, the pixel accuracy of the industrial camera is determined based on two feature points on the feature plate in the plane image.

[0038] It is understandable that the electronic industrial equipment can obtain the plane image of the plane corresponding to the two-dimensional axis platform by controlling the industrial camera. Since the feature plate is located on the two-dimensional axis plane, the image content on the plane image includes the feature plate. A clear plane image is obtained by the industrial camera, that is, the feature points on the feature plate in the plane image are clearly displayed, and the electronic industrial equipment can determine the pixel accuracy of the industrial camera based on the two feature points on the plane image.

[0039] It can be imagined that any two feature points on the feature plate can be selected. The feature points on the feature plate are arranged in an array according to the corresponding spacing, that is, the feature points on the feature plate are set according to a fixed spacing. In this regard, the electronic industrial equipment can obtain the pixel spacing between the two feature points on the plane image, and then combine the actual distance between the two feature points to determine the pixel accuracy corresponding to the industrial camera, that is, the pixel accuracy is used to represent the mapping relationship between the actual distance between the two feature points and the pixel spacing, so as to facilitate the subsequent determination of the corresponding moving distance based on the pixel accuracy, and then drive the two-dimensional axis platform.

[0040] Step S120, determine the target feature point on the feature plate, and based on the pixel accuracy and the current position of the two-dimensional axis platform, determine the axis coordinates of multiple feature points in two axial directions with the target feature point as the starting point.

[0041] The target feature point can be any feature point on the feature plate, and the target feature is used as the starting point of the moving process. It is conceivable that the feature plate located on the two-dimensional axis platform can move with the placement table when the motor shaft of the two-dimensional axis platform drives the placement table to move, so that the corresponding feature point on the plate can be aligned with the center of the field of view of the industrial camera. Based on this, when the target feature point is determined, the target feature point is used as the starting point, and then the feature points on it are located along the two axial directions respectively to record the corresponding axis coordinates.

[0042] It is worth noting that the above two axial directions correspond to those on the feature plate. It can be understood that the feature points on the feature plate are arranged in an array, so the feature points in the same row or column thereon are parallel to one axial direction.

[0043] In this regard, the target feature point is used as the starting point, and the feature points in the direction are traversed along the corresponding axial direction to obtain the corresponding axis coordinates. It can be imagined that the acquired axis coordinates are associated with the actual values ​​of the encoders of the two motors corresponding to different motion directions on the two-dimensional axis platform, and then used as the corresponding axis coordinates. Optionally, in one embodiment, the axis coordinates corresponding to the feature points in the direction can be collected according to a preset number. In addition, optionally, in some embodiments, the axis coordinates corresponding to the feature points in the direction can also be collected according to the corresponding intervals.

[0044] It can be imagined that the two-dimensional axis platform is a moving structure composed of two motor axes with perpendicular moving directions. The electronic industrial equipment can determine the corresponding moving distance based on the pixel accuracy and the current position of the two-dimensional axis platform, and then control the motors corresponding to the two moving directions on the two-dimensional axis platform to drive the feature points on the feature plate to move relative to the industrial camera, so that the center of the camera field of the industrial camera can traverse the feature points on the feature plate in the same axial direction.

[0045] It should be noted that, for the selection of target feature points, the feature points in different axial directions may be the same or different. For example, among the feature points arranged in the array, feature point P 11 The feature point P is the first row and the first column. When the coordinates of the corresponding feature points are collected in the X-axis direction, the feature point P 11 As the target feature point; when collecting the coordinates of the corresponding feature points in the Y-axis direction, the feature point P 11 Of course, in some embodiments, when collecting the coordinates corresponding to the corresponding feature points in the Y-axis direction, it is also possible to select the feature point P 1n As the target feature point, the feature point P 1n is the last feature point collected in the X-axis direction.

[0046] Step S130 , combining the axis coordinates corresponding to the multiple characteristic points obtained, respectively determining the axis accuracy parameters of the corresponding axial directions, where the axis accuracy parameters include positioning error values ​​in the two axial directions.

[0047] After obtaining the axis coordinates of features corresponding to different axial directions, the electronic industrial equipment calculates the axis coordinates of the feature points in the same direction according to the axial directions corresponding to each feature point, such as determining the fitting straight line corresponding to the feature points in the same direction, and then calculating the corresponding axis accuracy parameters based on the fitting straight line.

[0048] In one embodiment, the shaft system accuracy parameter includes positioning error values ​​in two axial directions. For positioning error values ​​in different axial directions, refer to Figure 2 , electronic industrial equipment obtains the corresponding fitting straight line by collecting the axis coordinates corresponding to the feature points in the same axial direction, so as to determine the corresponding positioning error value. Figure 2 A schematic diagram of the steps for calculating the shaft system accuracy parameters provided in an embodiment of the present application, as shown in the figure, specifically includes steps S210 to S230:

[0049] Step S210: Based on a straight line fitting algorithm, the axis system coordinates corresponding to the plurality of feature points are fitted to form a first fitting straight line, and a line angle between the first fitting straight line and the corresponding axial direction is determined.

[0050] Step S220: Taking the first characteristic point in the axial direction as a fixed point, reversely rotate the first fitting line according to the line angle, and determine the coordinate position corresponding to each characteristic point on the rotated first fitting line.

[0051] Step S230: Determine the positioning error value corresponding to each feature point in two axial directions according to the sampling interval, the axis coordinates of each feature point and the coordinate position. The sampling interval is the actual distance between two adjacent sampling feature points.

[0052] It can be understood that, taking the positioning error value of one of the axial directions as an example, the fitting straight line in this direction is determined. To this end, the corresponding fitting straight line is obtained based on the straight line fitting algorithm, such as the least squares method, the weighted fitting straight line equation method, the gradient descent method, etc., the axis coordinates corresponding to the multiple feature points collected in the same axial direction are fitted to form a first fitting straight line, and then after the first fitting straight line is determined, the angle between the first fitting straight line and the corresponding axial direction can be further determined, which is recorded as the line angle.

[0053] Then, a feature point is selected as the rotation center, such as the first feature point is selected as the rotation center, wherein the first feature point is used as the feature point in the axial direction, and when the first fitting line is rotated, it is used as a fixed point, and then the rotation is performed around it. For example, the target feature point is used as the first feature point, and the target feature point is used as the rotation center, that is, it is used as a fixed point, and then rotated to be parallel to the axial direction.

[0054] In this regard, the first fitting straight line is reversely rotated according to the line angle. It can be understood that the line angle obtained from the axial direction to the first fitting straight line is a positive angle. In order to make the first fitting straight line parallel to the axial direction, the first fitting straight line is correspondingly rotated in the opposite direction, that is, the angle between the first fitting straight line and the axial direction is gradually reduced during the rotation process, so that the final line angle is 0. Furthermore, after the rotation is completed, the coordinate values ​​corresponding to the feature points will also change, and the coordinates of each feature point after the rotation are re-determined accordingly.

[0055] It can be understood that when the coordinates of the first feature point remain unchanged, the first feature point can be used as the base point to calculate the positioning error values ​​corresponding to other feature points. For example, the positioning error value corresponding to the rotated feature point can be calculated based on the sampling interval, the coordinate position corresponding to the rotated feature point (i.e., the rotated coordinates) and the axis system coordinates corresponding to the first feature point.

[0056] For example, the first fitting line is a line fitted in association with a plurality of feature points collected in the corresponding X-axis direction. Accordingly, the line angle between the first fitting line and the X-axis direction is further determined. Then, according to the line angle, the first fitting line is reversely rotated so that the first fitting line coincides with the X-axis, and the axis coordinates of each feature point are re-determined, and the coordinate data can be obtained: (Xr 0 ', Yr 0 ')、(Xr 1 ', Yr 1 '), ..., (Xr i ', Yr i ').

[0057]

[0058] Among them, Err i is the positioning error value corresponding to the i-th feature point, Xr i ' is the coordinate of the i-th feature point on the X-axis, Xr 0 ' is the coordinate of the first feature point after rotation corresponding to the X-axis, Step is the sampling interval, where the sampling interval is the actual distance between two adjacent sampling feature points.

[0059] It can be imagined that, taking the feature points of the interval sampling in an axial direction as an example, that is, the feature points are selected at intervals as sampling feature points, if there are feature points P1, P2, P3... arranged in sequence, the feature points obtained after the interval sampling include feature points P1, P3..., wherein the feature points P1, P3... are sampling feature points, and the actual distance between the feature point P1 and the feature point P3 is the above-mentioned sampling interval. In this regard, the corresponding positioning error value can be calculated for each feature point to determine the error sequence corresponding to the X axis (Err 0 , Err 1 , ..., Err i ), in order to compensate the X-axis. It should be noted that, similarly, for the Y-axis, the corresponding fitting straight line is obtained in the same way and then rotated to obtain the corresponding coordinates after rotation, and then determine the error sequence corresponding to the Y-axis.

[0060] Therefore, by performing straight line fitting on the coordinates corresponding to the feature points, the electronic industrial equipment can measure the positioning accuracy of the two-dimensional axis platform on a single axis, and then more accurately determine the axis system accuracy of the two-dimensional axis platform, so as to improve the two-dimensional positioning accuracy by compensating for the single-axis positioning accuracy.

[0061] Step S140: Perform positioning accuracy compensation on the two-dimensional axis platform according to the positioning error value and the preset accuracy threshold.

[0062] It can be imagined that for the positioning compensation in each axial direction, the electronic industrial equipment is provided with a corresponding preset accuracy threshold, so as to determine the corresponding allowable error range through the preset accuracy threshold. After determining the positioning error value corresponding to each axial direction, it is necessary to further compare the positioning error value with the preset accuracy threshold. When the positioning error value is less than or equal to the preset accuracy threshold, it is determined that the accuracy requirement is met. When the positioning error value is greater than the preset accuracy threshold, the axis system coordinates provided by the two-dimensional axis platform are compensated according to the positioning error data, so as to compensate the collected data when the corresponding coordinates are collected later.

[0063] In one embodiment, in the process of comparing the positioning error value corresponding to the feature point with the corresponding preset accuracy threshold, if the positioning error value corresponding to any feature point does not meet the preset accuracy threshold, the electronic industrial equipment determines the feature point corresponding to the positioning error value as the feature point to be compensated, that is, the feature point to be compensated is the feature point whose positioning error value does not meet the preset accuracy threshold. In this regard, the electronic industrial equipment can determine the compensation value of the two-dimensional axis platform in the axial direction according to the compensation position corresponding to the feature point to be compensated and the corresponding positioning error value, such as the moving distance of the two-dimensional axis platform in the corresponding axial direction when the compensation position is adjusted according to the positioning error value, so as to compensate the positioning error accurately. Moreover, after the compensation is completed, the axis coordinates of the feature point are collected again, and then the corresponding positioning error value is calculated. It can be imagined that after the new positioning error value is re-determined, the electronic industrial equipment can further determine whether the positioning error value meets the preset accuracy threshold. Of course, if the positioning error value does not meet the preset accuracy threshold, the corresponding compensation value is re-determined. By compensating the positioning accuracy in a loop until the positioning error value meets the preset accuracy threshold, the electronic industrial equipment can achieve more accurate accuracy compensation.

[0064] It can be seen from the above scheme that the present application scheme determines the axis coordinates corresponding to each feature point in the feature plate on the two-dimensional axis platform by utilizing the relative position of the industrial camera and the feature plate, so as to determine the axis accuracy parameters of the two-dimensional axis platform by utilizing the same set of data, thereby realizing convenient and highly automated positioning accuracy measurement to complete the measurement of the errors corresponding to the two coordinate axes of the two-dimensional axis platform, and then by compensating for the one-dimensional positioning accuracy corresponding to the two coordinate axes, it can replace the scheme of using an interferometer for measurement compensation, and can also utilize the compensation of each coordinate axis to compensate for the errors caused by the two-dimensional axis platform, thereby effectively improving the two-dimensional positioning accuracy of the two-dimensional axis platform.

[0065] In some embodiments, in the process of collecting corresponding axis coordinates of multiple feature points in an axial direction with the target feature point as the starting point, the electronic industrial equipment needs to align the feature point with the center of the field of view of the industrial camera to obtain the corresponding axis coordinates. The corresponding steps include step S121-step S122:

[0066] Step S121, when the two-dimensional axis platform drives the feature point on the feature plate to move to the center of the field of view of the industrial camera, based on the position of the feature point in the plane image, determine whether the feature point is aligned with the center of the field of view of the industrial camera by a circular approximation method.

[0067] Step S122: When the feature point is aligned with the center of the field of view of the industrial camera, the moving position of the two-dimensional axis platform is recorded to determine the axis coordinates of the feature point.

[0068] It is understandable that in the process of the two-dimensional axis platform driving the feature plate to move, the electronic industrial equipment can continuously capture the corresponding plane image through the industrial camera, and then adjust the position of the feature plate on the two-dimensional axis platform according to the position of the center of the field of view and the position of the corresponding feature point, so that the feature point can be aligned with the center of the field of view. It is conceivable that the two-dimensional axis platform drives the placement table to move by motors in two directions of movement, and accordingly, the feature plate on the placement table will move with the movement of the placement table. In this regard, the electronic industrial equipment can determine the pixel spacing between the feature point and the center of the field of view in the plane image, and then determine the required moving distance based on the pixel accuracy, thereby determining the adjustment strategy for the two-dimensional axis platform.

[0069] Electronic industrial equipment uses a cyclic approximation method to determine whether the feature points are aligned with the center of the field of view, that is, by continuously adjusting the position of the feature plate and judging whether the feature points in the plane image obtained after each adjustment are aligned with the center of the field of view, so as to adjust the position of the feature plate again if they are not aligned. In this regard, the electronic industrial equipment can make the feature points continuously approach the center of the field of view by adjusting the position of the feature plate and judging whether they are aligned in a cycle, thereby aligning the feature points with the center of the field of view.

[0070] Accordingly, when the feature point is aligned with the center of the field of view, the electronic industrial equipment records the moving position of the two-dimensional axis platform to determine the axis coordinates of the feature point, such as recording the actual value of the encoder of the motor in different movement directions of the two-dimensional axis platform. Of course, after completing the recording of the axis coordinates of a feature point, the axis coordinates of another feature point are determined according to the above steps until the axis coordinates of all feature points are determined.

[0071] Therefore, by determining whether the feature point is aligned with the center of the field of view through a circular approximation method, the electronic industrial equipment can obtain more accurate axis coordinates, ensuring the accuracy of the collected data and helping to better compensate the two-dimensional axis platform.

[0072] Specifically, in one embodiment, for the cyclic approximation method, the electronic industrial equipment sets a corresponding number of cycles, that is, in the preset number of cycles, each cycle obtains the plane image corresponding to the current movement process, and then determines the pixel spacing between the feature point in the plane image and the center of the field of view. It can be imagined that the electronic industrial equipment sets an approximation threshold for determining whether the feature point is aligned with the center of the field of view. Therefore, after determining the pixel spacing, by comparing the pixel spacing and the approximation threshold, if the pixel spacing is greater than the preset approximation threshold, the plane image is re-acquired to re-determine the new pixel spacing; and if the pixel spacing is less than or equal to the approximation threshold, it is determined that the current feature point is aligned with the center of the field of view. It can be imagined that if the feature point is still not aligned with the center of the field of view in the preset number of cycles, the electronic industrial equipment can determine that an abnormal situation has occurred and then issue an alarm. It should be noted that the setting of the preset number of times can be set according to actual application requirements. Therefore, this scheme sets a corresponding number of loops and determines the positional relationship between the feature point and the center of the field of view by comparing the pixel spacing with the approximation threshold, so as to gradually align the feature point with the center of the field of view, so as to obtain more accurate axis coordinates of the feature point, which in turn helps to measure and compensate for the positioning accuracy of the two-dimensional axis.

[0073] Figure 3 A schematic diagram of the steps for calculating the axis system accuracy parameters provided by another embodiment of the present application. In one embodiment, the axis system accuracy parameters also include straightness. For the calculation of straightness, after the electronic industrial equipment determines the axis system coordinates corresponding to the feature points obtained by moving along different axial directions, it performs straight line fitting on them to facilitate determining the straightness corresponding to different axial directions. As shown in the figure, the specific steps include steps S310-S330:

[0074] Step S310: Based on a straight line fitting algorithm, the axis system coordinates corresponding to the plurality of feature points are fitted to form a first fitting straight line, and a line angle between the first fitting straight line and the corresponding axial direction is determined.

[0075] Step S320: Taking the first characteristic point in the axial direction as a fixed point, reversely rotate the first fitting straight line according to the line angle to obtain a second fitting straight line perpendicular to the other axial direction.

[0076] Step S330, determining the straightness of each feature point corresponding to the first axial direction and the straightness of each feature point corresponding to the second axial direction according to the difference between the axis system coordinates of the rotated feature point and the value of the second fitting straight line in the perpendicular axial direction.

[0077] It can be understood that after collecting data in one axial direction to obtain the axis coordinates corresponding to multiple feature points, the electronic industrial equipment can use a linear fitting algorithm such as the least squares method, the weighted fitting linear equation method, the gradient descent method, etc. to fit a first fitting straight line, and further determine the line angle between the first fitting straight line and the corresponding axial direction.

[0078] Then, the first feature point in the axial direction (such as the X-axis direction) is selected as the rotation center. When rotating the first fitting line, it is used as a fixed point, and then the rotation is performed around it. In this regard, the first fitting line is reversely rotated according to the line angle. It can be understood that the line angle obtained from the axial direction to the first fitting line is a positive angle. In this regard, the first fitting line is rotated in the opposite direction, that is, the angle between the first fitting line and the axial direction is gradually reduced during the rotation process, so that the final line angle is 0, thereby obtaining a second fitting line perpendicular to another axial direction (such as the Y-axis direction).

[0079] Since the second fitting straight line is perpendicular to the other axial direction, the value of the second fitting straight line corresponding to the perpendicular axial direction is a constant. For example, each feature point is currently located according to the X-axis direction and the first fitting straight line is fitted. The second fitting straight line obtained after rotation is perpendicular to the Y-axis. Therefore, the equation of the second fitting straight line can be determined as: y=Y r1 . Where Y r1 That is, it is the value of the second fitting straight line in the perpendicular axial direction, and its value is equal to the coordinate of the first feature point as a fixed point on the Y axis.

[0080] For this, the difference between the axis coordinates corresponding to the rotated feature points and the value of the second fitting line in the perpendicular axial direction is calculated to determine the corresponding straightness. For example, for the straightness in the X-axis direction, after the second fitting line is formed by rotation, the axis coordinates of each rotated feature point are determined, and then the corresponding data can be obtained, such as (Xr 1 ', Yr 1 '), ..., (Xr i ', Yr i '). According to the axis coordinates of each feature point, the corresponding difference is calculated to obtain the straightness LxErr in the X-axis direction. i , where i represents the i-th feature point, and the corresponding calculation formula is as follows:

[0081]

[0082] Similarly, for the straightness in the Y-axis direction, after fitting the axis coordinates of multiple feature points obtained along the Y-axis direction to form a first fitting straight line, it is rotated to obtain a fitting straight line perpendicular to the X-axis, and then the corresponding difference is calculated to determine the straightness in the corresponding Y-axis direction. Therefore, based on the fitting straight line formed by fitting the axis coordinates corresponding to the feature points, the electronic industrial equipment can measure the straightness of the two-dimensional axis platform in the axial direction, so that the positioning accuracy of the two-dimensional axis platform in the X and Y axes can be systematically compensated, thereby improving the two-dimensional positioning accuracy.

[0083] Figure 4 A schematic diagram of the steps for calculating the shaft system accuracy parameters provided by another embodiment of the present application. In one embodiment, the shaft system accuracy parameters also include verticality. For the calculation of verticality, the electronic industrial equipment needs to determine the fitting straight line formed by fitting the characteristic points obtained in the corresponding two axial directions, so as to combine the angle difference between the two fitting straight lines to determine the corresponding verticality. As shown in the figure, the specific steps include step S410-step S430:

[0084] Step S410: Based on a straight line fitting algorithm, the axis system coordinates corresponding to the plurality of feature points corresponding to the first axial direction are fitted to form a first straight line, and a first line angle between the first straight line and the first axial direction is determined.

[0085] Step S420: Based on a straight line fitting algorithm, the axis system coordinates corresponding to the plurality of feature points corresponding to the second axial direction are fitted to form a second straight line, and a second line angle between the second straight line and the first axial direction is determined, wherein the second axial direction is perpendicular to the first axial direction.

[0086] Step S430, determining the verticality of the two-dimensional axis platform according to the first line angle and the second line angle, wherein the verticality is associated with the difference between the first line angle and the second line angle.

[0087] It can be understood that, according to the preset straight line fitting algorithm, the axis coordinates of the multiple feature points recorded in different axial directions are respectively fitted to determine the first straight line and the second straight line. For example, the first axial direction of the two axial directions corresponds to the X-axis, and the second axial direction corresponds to the Y-axis. Accordingly, the axis coordinates corresponding to the multiple feature points obtained along the X-axis are used to fit the fitted straight line as the first straight line, and the axis coordinates corresponding to the multiple feature points obtained along the Y-axis are used to fit the fitted straight line as the second straight line. In this regard, the first line angle between the first straight line and the X-axis and the second line angle between the second straight line and the X-axis are obtained.

[0088] Then, the angle between the first straight line and the second straight line is calculated, that is, the difference between the angle between the first line and the second line is calculated. It can be imagined that the difference is taken as an absolute value to represent the angle between the first straight line and the second straight line. In this regard, the verticality of the two-dimensional axis platform can be determined. The verticality is used to represent the errors in the two axial directions, and the verticality is associated with the difference between the angle between the first line and the second line. Specifically, the supplementary angle representing the angle between the first straight line and the second straight line is used as the verticality of the two-dimensional axis platform. When the angle is 90°, the verticality of the two-dimensional axis platform is 90°; when the angle is 91°, the verticality of the two-dimensional axis platform is 89°. It can be understood that since the two motors with different movement directions of the two-dimensional axis platform drive the feature points to move relative to the center of the field of view, and the feature points are arranged in an array, in the process of driving the feature points to move by the two-dimensional axis platform, the error caused by the verticality of the two-dimensional axis platform will cause the fitting straight line formed by the feature points to form an angle compared to the coordinate axis. Therefore, the angle between the two fitting straight lines and the verticality of the two-dimensional axis platform are complementary angles, and then after determining the angle between the two fitting straight lines, the verticality of the two-dimensional axis platform can be determined.

[0089] Therefore, based on the angle between the fitted straight lines formed by the axis coordinates corresponding to the feature points, the electronic industrial equipment can measure the verticality of the two-dimensional axis platform in the axial direction, so as to systematically compensate for the positioning accuracy of the two-dimensional axis platform in the X and Y axes, thereby improving the two-dimensional positioning accuracy.

[0090] Figure 5 The schematic diagram of the structure of a two-dimensional axis system accuracy parameter compensation device provided in one embodiment of the present application is applied to electronic industrial equipment and used to execute the two-dimensional axis system accuracy parameter compensation method provided in the above embodiment, and has the corresponding functional modules and beneficial effects of the execution method. The electronic industrial equipment obtains the image of the feature plate on the two-dimensional axis platform through an industrial camera, and the shooting direction of the industrial camera is perpendicular to the plane where the two-dimensional axis platform is located, such as Figure 5 As shown, the two-dimensional axis system precision parameter compensation device includes a distance calibration module 501 , a coordinate extraction module 502 , an error determination module 503 and an error compensation module 504 .

[0091] The distance calibration module 501 is configured to determine the pixel accuracy of the industrial camera based on two feature points on the feature plate in the plane image after acquiring the plane image of the plane corresponding to the two-dimensional axis platform through the industrial camera, and the pixel accuracy is used to represent the mapping relationship between the actual distance between the two feature points and the pixel spacing;

[0092] The coordinate extraction module 502 is configured to determine a target feature point on the feature plate, and based on the pixel accuracy and the current position of the two-dimensional axis platform, determine the axis coordinates of multiple feature points in two axial directions with the target feature point as the starting point;

[0093] The error determination module 503 is configured to determine the axis system accuracy parameters of the corresponding axial directions respectively according to the axis system coordinates corresponding to the multiple characteristic points obtained, and the axis system accuracy parameters include positioning error values ​​in two axial directions;

[0094] The error compensation module 504 is configured to perform positioning accuracy compensation on the two-dimensional axis platform according to the positioning error value and a preset accuracy threshold.

[0095] Based on the above embodiment, the coordinate extraction module 502 is specifically configured as follows:

[0096] In the process of the two-dimensional axis platform driving the feature point on the feature plate to move to the center of the field of view of the industrial camera, based on the position of the feature point in the plane image, it is judged whether the feature point is aligned with the center of the field of view of the industrial camera in a circular approximation manner;

[0097] When the feature point is aligned with the center of the field of view of the industrial camera, the moving position of the two-dimensional axis platform is recorded to determine the axis coordinates of the feature point.

[0098] Based on the above embodiment, the coordinate extraction module 502 is further specifically configured as follows:

[0099] Start a loop of a preset number of times to continuously acquire a plane image during the movement, and determine the pixel distance between the feature point and the center of the field of view based on the plane image;

[0100] In a preset number of cycles, each time a pixel spacing is determined, if the pixel spacing is greater than a preset approximation threshold, the plane image is reacquired to redetermine a new pixel spacing, until the pixel spacing is less than or equal to the approximation threshold, then the current feature point is determined to be aligned with the center of the field of view.

[0101] Based on the above embodiment, the error determination module 503 is specifically configured as follows:

[0102] Based on a straight line fitting algorithm, the axis system coordinates corresponding to the plurality of feature points are fitted to form a first fitting straight line, and a line angle between the first fitting straight line and the corresponding axial direction is determined;

[0103] Taking the first characteristic point in the axial direction as a fixed point, reversely rotating the first fitting line according to the line angle, and determining the coordinate positions corresponding to each characteristic point on the rotated first fitting line;

[0104] According to the sampling interval, the axis coordinates and coordinate positions of each feature point, the positioning error value corresponding to each feature point in two axial directions is determined. The sampling interval is the actual spacing between two adjacent sampling feature points.

[0105] Based on the above embodiment, the error compensation module 504 is specifically configured as follows:

[0106] When the positioning error value corresponding to any feature point does not meet the preset accuracy threshold, determine the compensation position of the corresponding feature point to be compensated, and the feature point to be compensated is the feature point whose positioning error value does not meet the preset accuracy threshold;

[0107] According to the compensation position corresponding to the feature point to be compensated and the positioning error value, the compensation value of the two-dimensional axis platform in the axial direction is determined to re-determine the positioning error value until the positioning error value meets the preset accuracy threshold.

[0108] On the basis of the above embodiment, the shaft system accuracy parameter also includes straightness, and the error determination module 503 is specifically configured as follows:

[0109] Based on a straight line fitting algorithm, the axis system coordinates corresponding to the plurality of feature points are fitted to form a first fitting straight line, and a line angle between the first fitting straight line and the corresponding axial direction is determined;

[0110] Taking the first characteristic point in the axial direction as a fixed point, the first fitting straight line is rotated inversely according to the line angle to obtain a second fitting straight line perpendicular to the other axial direction;

[0111] According to the difference between the axis system coordinates of the rotated feature points and the value of the axial direction perpendicular to the second fitting straight line, the straightness of each feature point corresponding to the first axial direction and the straightness corresponding to the second axial direction are determined.

[0112] Based on the above embodiment, the axis system accuracy parameter also includes verticality, and the error determination module 503 is specifically configured as follows:

[0113] Based on a straight line fitting algorithm, the axis system coordinates corresponding to the plurality of feature points corresponding to the first axial direction are fitted to form a first straight line, and a first line angle between the first straight line and the first axial direction is determined;

[0114] Based on a straight line fitting algorithm, the axis coordinates corresponding to the plurality of feature points corresponding to the second axial direction are fitted to form a second straight line, and a second line angle between the second straight line and the first axial direction is determined, and the second axial direction is perpendicular to the first axial direction;

[0115] The verticality of the two-dimensional axis platform is determined according to the first line angle and the second line angle, and the verticality is related to the difference between the first line angle and the second line angle.

[0116] It is worth noting that in the embodiment of the above-mentioned device, the modules included are only divided according to functional logic, but are not limited to the above-mentioned division, as long as the corresponding functions can be achieved; in addition, the specific names of the modules are only for the convenience of distinguishing each other, and are not used to limit the protection scope of the embodiments of the present application.

[0117] Figure 6 The schematic diagram of the structure of the electronic industrial equipment provided in one embodiment of the present application is used to execute the two-dimensional shaft system accuracy parameter compensation method provided in the above embodiment, and has the functional modules and beneficial effects corresponding to the execution method. As shown in the figure, the electronic industrial equipment includes a processor 601, a memory 602, an input device 603 and an output device 604. The number of processors 601 can be one or more, and one processor 601 is taken as an example in the figure; the processor 601, the memory 602, the input device 603 and the output device 604 can be connected by a bus or other means, and the figure takes the connection through a bus as an example. The memory 602, as a computer-readable storage medium, can be used to store software programs, computer executable programs and modules, such as the program instructions / modules corresponding to the two-dimensional shaft system accuracy parameter compensation method in the embodiment of the present application. The processor 601 executes the corresponding various functional applications and data processing by running the software programs, instructions and modules stored in the memory 602, that is, the above-mentioned two-dimensional shaft system accuracy parameter compensation method is realized.

[0118] The memory 602 may mainly include a program storage area and a data storage area, wherein the program storage area may store an operating system and at least one application required for a function; the data storage area may store data recorded or created during use, etc. In addition, the memory 602 may include a high-speed random access memory, and may also include a non-volatile memory, such as at least one disk storage device, a flash memory device, or other non-volatile solid-state storage device. In some embodiments, the memory 602 may further include a memory remotely arranged relative to the processor 601, and these remotely arranged memories may be connected to the device via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0119] The input device 603 can be used to input corresponding digital or character information to the processor 601, and generate key signal input related to the user settings and function control of the device; the output device 604 can be used to send or display key signal output related to the user settings and function control of the device.

[0120] An embodiment of the present application also provides a storage medium storing computer executable instructions, which, when executed by a processor, are used to perform relevant operations in the two-dimensional axis system precision parameter compensation method provided in any embodiment of the present application.

[0121] Computer-readable storage media include permanent and non-permanent, removable and non-removable media that can be implemented by any method or technology to store information. Information can be computer-readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disk read-only memory (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device.

[0122] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0123] Note that the above are only preferred embodiments of the present application and the technical principles used. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the scope of protection of the present application. Therefore, although the present application is described in more detail through the above embodiments, the present application is not limited to the above embodiments, and may include more other equivalent embodiments without departing from the concept of the present application, and the scope of the present application is determined by the scope of the appended claims.

Claims

1. A two-dimensional axis system accuracy parameter compensation method, characterized in that: Applied to electronic industrial equipment, the electronic industrial equipment acquires an image of a feature plate on a two-dimensional axis platform through an industrial camera, the feature plate includes a plurality of feature points arranged in an array, the shooting direction of the industrial camera is perpendicular to the plane where the two-dimensional axis platform is located, and the two-dimensional axis system accuracy parameter compensation method includes: After acquiring a plane image corresponding to the plane where the two-dimensional axis platform is located through the industrial camera, the pixel accuracy of the industrial camera is determined based on two feature points on the feature plate in the plane image, and the pixel accuracy is used to represent the mapping relationship between the actual distance between the two feature points and the pixel spacing; Determine a target feature point on the feature plate, and determine the axis coordinates of a plurality of feature points in two axial directions based on the pixel accuracy and the current position of the two-dimensional axis platform and taking the target feature point as a starting point; In combination with the axis coordinates corresponding to the plurality of characteristic points obtained, the axis accuracy parameters of the corresponding axial directions are determined respectively, wherein the axis accuracy parameters include positioning error values ​​in two axial directions; Performing positioning accuracy compensation on the two-dimensional axis platform according to the positioning error value and a preset accuracy threshold; The axis system coordinates corresponding to the plurality of characteristic points obtained are combined to respectively determine the axis system accuracy parameters corresponding to the axial directions, and the axis system accuracy parameters include positioning error values ​​in two axial directions, including: Based on a straight line fitting algorithm, the axis system coordinates corresponding to the plurality of feature points are fitted to form a first fitting straight line, and a line angle between the first fitting straight line and the corresponding axial direction is determined; Taking the first characteristic point in the axial direction as a fixed point, reversely rotating the first fitting straight line according to the line angle, and determining the coordinate positions corresponding to each characteristic point on the rotated first fitting straight line; The positioning error values ​​corresponding to each feature point in two axial directions are determined according to the sampling interval, the axis coordinates of each feature point and the coordinate position. The sampling interval is the actual spacing between two adjacent sampling feature points.

2. The two-dimensional axis system accuracy parameter compensation method according to claim 1 is characterized in that: The step of determining a target feature point on the feature plate and determining axis coordinates of a plurality of feature points in two axial directions based on the pixel accuracy and the current position of the two-dimensional axis platform and taking the target feature point as a starting point comprises: In the process of the two-dimensional axis platform driving the feature point on the feature plate to move to the center of the field of view of the industrial camera, based on the position of the feature point in the plane image, it is determined in a circular approximation manner whether the feature point is aligned with the center of the field of view of the industrial camera; When the feature point is aligned with the center of the field of view of the industrial camera, the moving position of the two-dimensional axis platform is recorded to determine the axis coordinates of the feature point.

3. The two-dimensional axis system accuracy parameter compensation method according to claim 2, characterized in that: In the process of the two-dimensional axis platform driving the feature point on the feature plate to move to the center of the field of view of the industrial camera, judging whether the feature point is aligned with the center of the field of view of the industrial camera in a circular approximation manner based on the position of the feature point in the plane image, including: Starting a loop of a preset number of times to continuously acquire a plane image during the moving process, and determining a pixel distance between a feature point and a center of a field of view based on the plane image; In a preset number of cycles, each time a pixel spacing is determined, if the pixel spacing is greater than a preset approximation threshold, the plane image is reacquired to redetermine a new pixel spacing, until the pixel spacing is less than or equal to the approximation threshold, and the current feature point is determined to be aligned with the center of the field of view.

4. The two-dimensional axis system accuracy parameter compensation method according to claim 1, characterized in that: The performing positioning accuracy compensation on the two-dimensional axis platform according to the positioning error value and the preset accuracy threshold comprises: When the positioning error value corresponding to any feature point does not satisfy the preset accuracy threshold, determining the compensation position of the corresponding feature point to be compensated, wherein the feature point to be compensated is a feature point whose positioning error value does not satisfy the preset accuracy threshold; According to the compensation position corresponding to the feature point to be compensated and the positioning error value, the compensation value of the two-dimensional axis platform in the axial direction is determined to re-determine the positioning error value until the positioning error value meets the preset accuracy threshold.

5. The two-dimensional axis system accuracy parameter compensation method according to claim 1, characterized in that: The axis system accuracy parameters also include straightness. The axis system accuracy parameters corresponding to each axial direction are determined by combining the axis system coordinates corresponding to the plurality of characteristic points obtained, including: Based on a straight line fitting algorithm, the axis system coordinates corresponding to the plurality of feature points are fitted to form a first fitting straight line, and a line angle between the first fitting straight line and the corresponding axial direction is determined; Taking the first characteristic point in the axial direction as a fixed point, reversely rotating the first fitting straight line according to the line angle to obtain a second fitting straight line perpendicular to another axial direction; The straightness of each feature point corresponding to the first axial direction and the straightness of each feature point corresponding to the second axial direction are determined according to the difference between the axis system coordinates of the rotated feature point and the value of the axial direction perpendicular to the second fitting straight line.

6. The two-dimensional shaft system accuracy parameter compensation method according to claim 1 or 5, characterized in that: The axis system accuracy parameters also include verticality. The axis system accuracy parameters corresponding to the axial directions are determined by combining the axis system coordinates corresponding to the plurality of characteristic points obtained, respectively, including: Based on a straight line fitting algorithm, the axis system coordinates corresponding to the plurality of feature points corresponding to the first axial direction are fitted to form a first straight line, and a first line angle between the first straight line and the first axial direction is determined; Based on a straight line fitting algorithm, the axis system coordinates corresponding to the plurality of feature points corresponding to the second axial direction are fitted to form a second straight line, and a second line angle between the second straight line and the first axial direction is determined, wherein the second axial direction is perpendicular to the first axial direction; The verticality of the two-dimensional axis platform is determined according to the first line angle and the second line angle, and the verticality is associated with the difference between the first line angle and the second line angle.

7. A two-dimensional shaft system accuracy parameter compensation device, characterized in that: Applied to electronic industrial equipment, the electronic industrial equipment acquires an image of a feature plate on a two-dimensional axis platform through an industrial camera, the feature plate includes a plurality of feature points arranged in an array, the shooting direction of the industrial camera is perpendicular to the plane where the two-dimensional axis platform is located, and the two-dimensional axis system accuracy parameter compensation device includes: A distance calibration module is configured to determine the pixel accuracy of the industrial camera based on two feature points on a feature plate in the plane image after acquiring a plane image corresponding to the plane where the two-dimensional axis platform is located through the industrial camera, wherein the pixel accuracy is used to represent a mapping relationship between an actual distance between the two feature points and a pixel spacing; a coordinate extraction module configured to determine a target feature point on the feature plate, and based on the pixel accuracy and the current position of the two-dimensional axis platform, determine the axis coordinates of a plurality of feature points in two axial directions with the target feature point as a starting point; An error determination module is configured to determine the axis system accuracy parameters of the corresponding axial directions respectively based on the axis system coordinates corresponding to the multiple characteristic points obtained, wherein the axis system accuracy parameters include positioning error values ​​in two axial directions; an error compensation module, configured to perform positioning accuracy compensation on the two-dimensional axis platform according to the positioning error value and a preset accuracy threshold; Wherein, the error determination module is specifically configured as follows: Based on a straight line fitting algorithm, the axis system coordinates corresponding to the plurality of feature points are fitted to form a first fitting straight line, and a line angle between the first fitting straight line and the corresponding axial direction is determined; Taking the first characteristic point in the axial direction as a fixed point, reversely rotating the first fitting straight line according to the line angle, and determining the coordinate positions corresponding to each characteristic point on the rotated first fitting straight line; The positioning error values ​​corresponding to each feature point in two axial directions are determined according to the sampling interval, the axis coordinates of each feature point and the coordinate position. The sampling interval is the actual spacing between two adjacent sampling feature points.

8. An electronic industrial equipment, characterized in that: include: one or more processors; A storage device for storing one or more programs, when the one or more programs are executed by the one or more processors, enables the one or more processors to implement the two-dimensional axis system precision parameter compensation method as described in any one of claims 1-6.

9. A storage medium storing computer executable instructions, characterized in that: The computer executable instructions are used to execute the two-dimensional axis system accuracy parameter compensation method according to any one of claims 1 to 6 when executed by a processor.

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