A MEMS angular velocity sensor

Abstract

The application discloses a MEMS angular velocity sensor, which comprises a first detection structure for detecting angular velocity in a first axis direction; a second detection structure for detecting angular velocity in a second axis direction, the second detection structure being located on two sides of the first detection structure, the projection of the whole structure formed by the second detection structure and the first detection structure being a cross structure, and four independent corner areas of the cross structure being formed; and first, second, third and fourth driving mass blocks which are of the same structure, each of the first, second, third and fourth driving mass blocks being located in one corner area. In the MEMS angular velocity sensor, the four driving mass blocks are located in the four corner areas formed by the first detection structure and the second detection structure as a whole, so that the influence of inter-axis interference on the precision of the sensor is avoided.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a MEMS angular velocity sensor. Background Technology

[0002] MEMS angular velocity sensors are widely used in consumer electronics, automotive electronics, and industrial electronics. Especially in emerging applications such as AR / VR and autonomous driving, MEMS angular velocity sensors are required to maintain high performance in vibration-prone environments.

[0003] Existing triaxial MEMS angular velocity sensors often have a design where two axes share a mass block, which can cause inter-axis interference when detecting the angular velocities of each axis, thereby reducing the detection accuracy of the MEMS angular velocity sensor. Summary of the Invention

[0004] In view of the above problems, the purpose of this application is to provide a MEMS angular velocity sensor with high detection accuracy.

[0005] According to one aspect of the present invention, a MEMS angular velocity sensor is provided, comprising:

[0006] The first detection structure is used to detect the angular velocity in the direction of the first axis;

[0007] The second detection structure is used to detect the angular velocity in the direction of the second axis. The first axis is perpendicular to the second axis. The second detection structure is located on both sides of the first detection structure. The projection of the overall structure formed by the second detection structure and the first detection structure is a cross structure, forming four independent corner regions of the cross structure.

[0008] A first driving mass block, a second driving mass block, a third driving mass block, and a fourth driving mass block with identical structures, each of the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block being located in one of the corner regions.

[0009] Optionally, the first driving mass block and the second driving mass block are respectively coupled to a second detection structure located between them, the third driving mass block and the fourth driving mass block are respectively coupled to a second detection structure located between them, the first driving mass block and the fourth driving mass block are respectively coupled to a first detection structure located between them, and the second driving mass block and the third driving mass block are respectively coupled to a first detection structure located between them.

[0010] Optionally, it also includes:

[0011] The third detection structure, used to detect the angular velocity in the direction of the third axis, is located within the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block. The third axis is perpendicular to the plane containing the first axis and the second axis.

[0012] Optionally, the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block are all symmetrical about the first axis and the second axis, or the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block are all symmetrical about the first axis, the second axis, and the center.

[0013] Optionally, the first detection structure is symmetrical about both the first axis and the second axis, or the first detection structure is symmetrical about the first axis, the second axis, and the center.

[0014] Optionally, the first detection structure includes:

[0015] Multiple coupled beams in the first detection structure;

[0016] A first detection mass block is located between the first driving mass block and the fourth driving mass block. The first detection mass block is coupled to the first driving mass block and the fourth driving mass block via a coupling beam of a corresponding first detection structure.

[0017] The second detection mass block is located between the second driving mass block and the third driving mass block. The second detection mass block is coupled to the second driving mass block and the third driving mass block via a coupling beam of a corresponding first detection structure. The second detection mass block is also coupled to the first detection mass block via a coupling beam of a corresponding first detection structure.

[0018] Optionally, the first detection mass block and the second detection mass block are arranged side by side along the first axis.

[0019] Optionally, the second detection structure includes:

[0020] The second detection structure has multiple coupled beams;

[0021] A third detection mass block and a fourth detection mass block are located on the first side of the first detection structure. The third detection mass block and the fourth detection mass block are located between the first driving mass block and the second driving mass block. The third detection mass block is coupled to the first driving mass block via a coupling beam of a corresponding second detection structure. The fourth detection mass block is coupled to the second driving mass block via a coupling beam of a corresponding second detection structure. The fourth detection mass block and the third detection mass block are coupled to each other via a coupling beam of a corresponding second detection structure.

[0022] The fifth and sixth detection mass blocks are located on the second side of the first detection structure. The fifth and sixth detection mass blocks are located between the third and fourth driving mass blocks. The fifth detection mass block is coupled to the third driving mass block via a coupling beam of the corresponding second detection structure. The sixth detection mass block is coupled to the fourth driving mass block via a coupling beam of the corresponding second detection structure. The sixth detection mass block and the fifth detection mass block are coupled to each other via a coupling beam of the corresponding second detection structure.

[0023] Optionally, the third and sixth detection mass blocks are arranged side by side along the second axis, the fourth and fifth detection mass blocks are arranged side by side along the second axis, the third and fourth detection mass blocks are arranged side by side along the first axis, and the fifth and sixth detection mass blocks are arranged side by side along the first axis.

[0024] Optionally, the second detection structure further includes:

[0025] The first anchor point and the second anchor point are located on the first side of the first detection structure. The first anchor point and the second anchor point are located between the third detection mass block and the fourth detection mass block. The third detection mass block and the fourth detection mass block are coupled to the first anchor point and the second anchor point via the coupling beam of the corresponding second detection structure.

[0026] The third and fourth anchor points are located on the second side of the first detection structure. The third and fourth anchor points are located between the fifth and sixth detection mass blocks. The fifth and sixth detection mass blocks are coupled to the third and fourth anchor points via coupling beams of the corresponding second detection structures.

[0027] Optionally, the first anchor point, the second anchor point, the third anchor point, and the fourth anchor point are distributed side by side along the second axis.

[0028] Optionally, the third detection structure is symmetrical about both the first axis and the second axis, or the third detection structure is symmetrical about the first axis, the second axis, and the center.

[0029] Optionally, the third detection structure includes:

[0030] The third detection structure consists of multiple coupled beams;

[0031] The seventh detection mass block is located in the first opening of the first driving mass block, and the seventh detection mass block is coupled to the first driving mass block via a coupling beam of a corresponding third detection structure.

[0032] The eighth detection mass block is located in the first opening of the second driving mass block, and the eighth detection mass block is coupled to the second driving mass block via a coupling beam of a corresponding third detection structure.

[0033] The ninth detection mass block is located in the first opening of the third driving mass block, and the ninth detection mass block is coupled to the third driving mass block via a coupling beam of the corresponding third detection structure.

[0034] The tenth detection mass block is located in the first opening of the fourth driving mass block, and the tenth detection mass block is coupled to the fourth driving mass block via a coupling beam of a corresponding third detection structure;

[0035] The first bridging beam is coupled to the seventh detection mass block via a coupling beam of the corresponding third detection structure, and is coupled to the eighth detection mass block via a coupling beam of the corresponding third detection structure; and

[0036] The second bridging beam is coupled to the ninth detection mass block via a coupling beam of the corresponding third detection structure, and is coupled to the tenth detection mass block via a coupling beam of the corresponding third detection structure.

[0037] Optionally, the seventh detection mass block and the tenth detection mass block are arranged side by side along the second axis, the eighth detection mass block and the ninth detection mass block are arranged side by side along the second axis, the seventh detection mass block and the eighth detection mass block are arranged side by side along the first axis, and the ninth detection mass block and the tenth detection mass block are arranged side by side along the first axis.

[0038] Optionally, it also includes:

[0039] Coupled beam driving the mass block;

[0040] Four sets of anchor points, each set including a fifth anchor point and a sixth anchor point arranged side by side along the first axis, each driving mass block is coupled to a set of anchor points via a corresponding coupling beam of the driving mass block, wherein the fifth anchor point and the sixth anchor point in each set are located on opposite sides of the driving mass block coupled thereto.

[0041] Optionally, in the driving mode, each of the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block moves linearly along the first axis direction;

[0042] The seventh detection mass block follows the first driving mass block in a linear motion, the eighth detection mass block follows the second driving mass block in a linear motion, the ninth detection mass block follows the third driving mass block in a linear motion, and the tenth detection mass block follows the fourth driving mass block in a linear motion.

[0043] The third detection mass block follows the first driving mass block in a linear motion, the fourth detection mass block follows the second driving mass block in a linear motion, the fifth detection mass block follows the third driving mass block in a linear motion, and the sixth detection mass block follows the fourth driving mass block in a linear motion.

[0044] The first detection mass block rotates within the plane defined by the first and fourth driving mass blocks coupled to it, along with the second and third driving mass blocks coupled to it.

[0045] In this configuration, the first driving mass block moves in the opposite direction to the second driving mass block, the first driving mass block moves in the same direction as the third driving mass block, and the first driving mass block moves in the opposite direction to the fourth driving mass block.

[0046] The first detection mass block and the second detection mass block rotate in opposite directions.

[0047] Optionally, during the detection mode of angular velocity in the first axial direction, the first detection mass block and the second detection mass block rotate about the second axis, and the first detection mass block and the second detection mass block rotate in opposite phases;

[0048] Each of the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block does not move due to the constraints of the anchor points on both sides and the decoupling from the first detection structure;

[0049] The third, fourth, fifth, and sixth detection mass blocks in the second detection structure do not move;

[0050] The seventh, eighth, ninth, and tenth detection mass blocks in the third detection structure do not move.

[0051] Optionally, during the detection mode of angular velocity in the direction of the second axis, the third and fourth detection mass blocks rotate around the second axis, and the third and fourth detection mass blocks rotate in opposite phases; the fifth and sixth detection mass blocks rotate around the second axis, and the fifth and sixth detection mass blocks rotate in opposite phases.

[0052] The first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block do not move due to the constraints of the anchor points on both sides and the decoupling from the second detection structure;

[0053] The first detection mass block and the second detection mass block in the first detection structure do not move;

[0054] The seventh, eighth, ninth, and tenth detection mass blocks in the third detection structure do not move.

[0055] Optionally, in the detection mode of angular velocity in the direction of the third axis, each of the seventh, eighth, ninth, and tenth detection mass blocks moves linearly along the direction of the second axis. The seventh detection mass block moves in the opposite direction to the eighth detection mass block, the seventh detection mass block moves in the same direction as the ninth detection mass block, and the seventh detection mass block moves in the opposite direction to the tenth detection mass block.

[0056] The first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block do not move due to the constraints of the anchor points on both sides and the decoupling from the third detection structure;

[0057] The first detection mass block and the second detection mass block in the first detection structure do not move;

[0058] The third, fourth, fifth, and sixth detection mass blocks in the second detection structure do not move.

[0059] Optionally, each of the first drive mass block, the second drive mass block, the third drive mass block, and the fourth drive mass block includes:

[0060] First cavity;

[0061] The push-pull comb teeth are located in the first cavity, and two sets of push-pull comb teeth arranged adjacently and oppositely form a push-pull drive capacitor.

[0062] The drive feedback comb teeth are located in the first cavity, and two sets of drive feedback comb teeth arranged adjacent to each other form a set of drive feedback capacitors.

[0063] Optionally, the push-pull drive capacitors in the first drive mass block, the second drive mass block, the third drive mass block, and the fourth drive mass block are all symmetrical about the first axis and the second axis, or the push-pull drive capacitors in the first drive mass block, the second drive mass block, the third drive mass block, and the fourth drive mass block are all symmetrical about the first axis, the second axis, and the center.

[0064] Optionally, the drive feedback capacitors in the first drive mass block, the second drive mass block, the third drive mass block, and the fourth drive mass block are all symmetrical about the first axis and the second axis, or the drive feedback capacitors in the first drive mass block, the second drive mass block, the third drive mass block, and the fourth drive mass block are all symmetrical about the first axis, the second axis, and the center.

[0065] Optionally, each drive mass block includes three sets of push-pull drive capacitors and one set of drive feedback capacitors.

[0066] Optionally, each of the first and second detection mass blocks in the first detection structure is provided with a second cavity, which divides the detection mass block into a first part and a second part.

[0067] The first portion and the electrode located below it constitute a first detection capacitor; the second portion and the electrode located below it constitute a second detection capacitor.

[0068] The first detection capacitor and the second detection capacitor in the first detection structure are symmetrical about the first axis and the second axis, or the first detection capacitor and the second detection capacitor in the first detection structure are symmetrical about the first axis, the second axis, and the center.

[0069] Optionally, each of the third, fourth, fifth, and sixth detection mass blocks in the second detection structure has a third cavity, which divides the detection mass block into a first part and a second part.

[0070] The first portion and the electrode located below it constitute a third detection capacitor; the second portion and the electrode located below it constitute a fourth detection capacitor.

[0071] The third and fourth detection capacitors in the second detection structure are symmetrical about the first axis and the second axis, or the third and fourth detection capacitors in the second detection structure are symmetrical about the first axis, the second axis, and the center.

[0072] Optionally, each of the seventh, eighth, ninth, and tenth detection quality blocks in the third detection structure includes:

[0073] Fourth cavity;

[0074] Multiple connecting beams are located within the fourth cavity, dividing the fourth cavity into multiple spaces;

[0075] The first plate is located inside the fourth cavity and forms a fifth detection capacitor with the connecting beam;

[0076] The second plate, located within the fourth cavity, forms the sixth detection capacitor with the connecting beam.

[0077] Each space contains a first plate and a second plate, with the first plate and the second plate in each space positioned opposite each other.

[0078] Optionally, the fifth and sixth detection capacitors in the third detection structure are symmetrical about the first axis and the second axis, or the fifth and sixth detection capacitors in the third detection structure are symmetrical about the first axis, the second axis, and the center.

[0079] Optionally, the MEMS angular velocity sensor is symmetrical about both the first axis and the second axis, or the MEMS angular velocity sensor is symmetrical about the first axis, the second axis, and the center.

[0080] Optionally, the third detection structure further includes:

[0081] The seventh anchor point is located on the first side of the first detection structure and is coupled to the first bridging beam;

[0082] The eighth anchor point is located on the second side of the first detection structure and is coupled to the second bridging beam.

[0083] Optionally, the seventh anchor point and the eighth anchor point are arranged side by side along the second axis, with the seventh anchor point located in the recessed area at the center of the first bridging beam and the eighth anchor point located in the recessed area at the center of the second bridging beam.

[0084] Optionally, the second detection structure is symmetrical about both the first axis and the second axis, or the second detection structure is symmetrical about the first axis, the second axis, and the center.

[0085] Optionally, the four sets of anchor points are symmetrical about the first axis and the second axis, or the four sets of anchor points are symmetrical about the first axis, the second axis, and the center.

[0086] Optionally, in the driving mode, the sum of the momentum of the first driving mass block and the second driving mass block is 0, the sum of the momentum of the third driving mass block and the fourth driving mass block is 0, the sum of the momentum of the third detection mass block and the fourth detection mass block is 0, the sum of the momentum of the fifth detection mass block and the sixth detection mass block is 0, the sum of the momentum of the seventh detection mass block and the eighth detection mass block is 0, the sum of the momentum of the ninth detection mass block and the tenth detection mass block is 0, and the sum of the angular momentum of the first detection mass block and the second detection mass block is 0.

[0087] Optionally, in the detection mode of angular velocity in the first axial direction, the sum of the angular momentum of the first detection mass block and the second detection mass block is 0.

[0088] Optionally, in the detection mode of angular velocity in the second axial direction, the sum of the angular momentum of the third, fourth, fifth, and sixth detection mass blocks is 0.

[0089] Optionally, in the detection mode of angular velocity in the direction of the third axis, the sum of the angular momentum of the seventh detection mass block, the eighth detection mass block, the ninth detection mass block, and the tenth detection mass block is 0.

[0090] The MEMS angular velocity sensor provided in this application has an overall structure whose projection, consisting of the second detection structure and the first detection structure, is a cross shape, forming four independent corner regions. The first, second, third, and fourth driving mass blocks are each located in an independent corner region and are separated from each other. This structure avoids the impact of inter-axis interference on the sensor's accuracy.

[0091] The MEMS angular velocity sensor provided in this application includes a first driving mass block and a second driving mass block, each coupled to a second detection structure located between them. A third driving mass block and a fourth driving mass block are also coupled to the second detection structure located between them. The first and fourth driving mass blocks are coupled to the first detection structure located between them, and the second and third driving mass blocks are coupled to the first detection structure located between them. This eliminates frequency fragmentation of the driving mode and improves measurement accuracy. For example, when detecting the angular velocity along the first axis, it is only necessary to decouple the first detection structure from the first to fourth driving mass blocks; the second and third detection structures, as well as the first to fourth driving mass blocks, do not move. In other words, the structure in this application only needs to decouple the corresponding axis detection structure from the driving mass block when detecting the angular velocity along its respective axis to obtain a detection result without interference, avoiding the impact of inter-axis interference on sensor accuracy.

[0092] Furthermore, when an angular velocity is input along the first axis, the first and second detection mass blocks move in opposite phases. When an angular velocity is input along the second axis, the third and fourth detection mass blocks move in opposite phases, as do the fifth and sixth detection mass blocks. When an angular velocity is input along the third axis, the seventh and eighth detection mass blocks, as well as the ninth and tenth detection mass blocks, move in opposite phases. This eliminates capacitance changes caused by interference from linear and angular acceleration, improving the vibration resistance of the MEMS angular velocity sensor.

[0093] The MEMS angular velocity sensor provided in this application has an overall structure that is symmetrical about the first axis and the second axis, or symmetrical about the first axis, the second axis, and the center. Furthermore, the first and second detection mass blocks move in opposite phases, as do the third and fourth, fifth and sixth, seventh and eighth, and ninth and tenth detection mass blocks. The first and second driving mass blocks also move in opposite phases, as do the third and fourth driving mass blocks. This ensures that the MEMS angular velocity sensor maintains momentum and angular momentum balance in all mass block movements within the driving mode and the three detection modes; that is, the sum of momentum and angular momentum caused by mass block movements is zero in all operating modes. The advantage of this design is that it avoids the coupling of forces and torques generated by mass block movements into the sensor design, and it also avoids interference from external linear and angular accelerations on the sensor's angular velocity detection signal. Attached Figure Description

[0094] The above and other objects, features and advantages of the present invention will become more apparent from the following description of embodiments of the invention with reference to the accompanying drawings, in which:

[0095] Figure 1 A top view of the structure of a MEMS angular velocity sensor provided according to an embodiment of this application is shown.

[0096] Figure 2 A schematic diagram showing the distribution of capacitors in a MEMS angular velocity sensor according to an embodiment of this application is shown;

[0097] Figure 3 This diagram illustrates a first detection structure in a MEMS angular velocity sensor according to an embodiment of this application.

[0098] Figure 4 This diagram illustrates a second detection structure in a MEMS angular velocity sensor according to an embodiment of this application.

[0099] Figure 5 This diagram illustrates the structure of the driving mass block in a MEMS angular velocity sensor according to an embodiment of this application.

[0100] Figure 6 This diagram illustrates a third detection structure in a MEMS angular velocity sensor according to an embodiment of this application.

[0101] Figure 7 This diagram illustrates the motion of the driving mode of a MEMS angular velocity sensor provided according to an embodiment of this application.

[0102] Figure 8 This illustration shows a schematic diagram of the motion modes of the MEMS angular velocity sensor provided in this embodiment when it has an angular velocity input in the X-axis direction;

[0103] Figure 9 This illustration shows a schematic diagram of the motion modes of the MEMS angular velocity sensor provided in this application embodiment when it has an angular velocity input in the Y-axis direction;

[0104] Figure 10 This paper illustrates a schematic diagram of the motion modes of a MEMS angular velocity sensor provided in an embodiment of this application when it has an angular velocity input in the Z-axis direction. Detailed Implementation

[0105] Various embodiments of the invention will now be described in more detail with reference to the accompanying drawings. In the various drawings, the same elements are indicated by the same or similar reference numerals. For clarity, the various parts in the drawings are not drawn to scale.

[0106] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples.

[0107] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixing," and "coupling" should be interpreted broadly; for example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0108] Figure 1 This diagram shows a top view of the structure of a MEMS angular velocity sensor provided according to an embodiment of this application. Figure 2 A schematic diagram showing the distribution of capacitors in a MEMS angular velocity sensor according to an embodiment of this application is shown. Figure 3 A schematic diagram of a first detection structure in a MEMS angular velocity sensor provided according to an embodiment of this application is shown. Figure 4 A schematic diagram of a second detection structure in a MEMS angular velocity sensor provided according to an embodiment of this application is shown. Figure 5 A schematic diagram of the structure of the driving mass block in a MEMS angular velocity sensor provided according to an embodiment of this application is shown. Figure 6 A schematic diagram of a third detection structure in a MEMS angular velocity sensor provided according to an embodiment of this application is shown.

[0109] like Figure 1 As shown, the MEMS angular velocity sensor includes a first detection structure 200, a second detection structure 300, a third detection structure 400, a first driving mass block 101, a second driving mass block 102, a third driving mass block 103, and a fourth driving mass block 104.

[0110] The first detection structure 200 is used to detect the angular velocity in the direction of the first axis (e.g., the X-axis direction).

[0111] The second detection structure 300 is used to detect the angular velocity in the direction of the second axis (e.g., the Y-axis direction), and the first axis is perpendicular to the second axis. The second detection structure 300 is located on both sides of the first detection structure 200. The projection of the overall structure composed of the second detection structure 300 and the first detection structure 200 is a cross structure, forming four independent corner regions of the cross structure.

[0112] Furthermore, the first detection structure 200 is symmetrical about both the first and second axes, or symmetrical about both the first and second axes and its center. The second detection structure is symmetrical about both the first and second axes, or symmetrical about both the first and second axes and its center.

[0113] Each of the structurally identical drive mass blocks 101, 102, 103, and 104 is located in a corner region. For example, the first drive mass block 101 is located in the upper left corner region, the second drive mass block 102 in the upper right corner region, the third drive mass block 103 in the lower right corner region, and the fourth drive mass block 104 in the lower left corner region. Each pair of adjacent drive mass blocks is coupled via a first detection structure 200 or a second detection structure 300 located between them. Furthermore, the first driving mass block 101 and the second driving mass block 102 are respectively coupled to the second detection structure 300 located between them, the third driving mass block 103 and the fourth driving mass block 104 are respectively coupled to the second detection structure 300 located between them, the first driving mass block 101 and the fourth driving mass block 104 are respectively coupled to the first detection structure 200 located between them, and the second driving mass block 102 and the third driving mass block 103 are respectively coupled to the first detection structure 200 located between them.

[0114] Furthermore, the first driving mass block 101, the second driving mass block 102, the third driving mass block 103, and the fourth driving mass block 104 are symmetrical about the first axis, the second axis, or about the first axis, the second axis, and the center.

[0115] The third detection structure 400 is used to detect the angular velocity in the direction of the third axis (e.g., the Z-axis direction). It is located within the first driving mass block 101, the second driving mass block 102, the third driving mass block 103, and the fourth driving mass block 104. Each driving mass block is coupled to the third detection structure 400. The third axis is perpendicular to the plane containing the first axis and the second axis. Furthermore, the third detection structure 400 is symmetrical about the first axis, the second axis, and the center, or symmetrical about the first axis, the second axis, and the center.

[0116] Combination Figure 1 , Figure 3 As shown, the first detection structure 200 includes multiple coupling beams, a first detection mass block 201, and a second detection mass block 202.

[0117] The first detection mass block 201 is located between the first driving mass block 101 and the fourth driving mass block 104. The first detection mass block 201 is coupled to the first driving mass block 101 via coupling beam 211, and to the fourth driving mass block 104 via coupling beam 212. The second detection mass block 202 is located between the second driving mass block 102 and the third driving mass block 103. The second detection mass block 202 is coupled to the second driving mass block 102 via coupling beam 221, and to the third driving mass block 103 via coupling beam 222. The first detection mass block 201 and the second detection mass block 202 are coupled together via coupling beam 231.

[0118] Furthermore, the first detection mass block 201 and the second detection mass block 202 are arranged side by side along the first axis.

[0119] Furthermore, combined Figure 2 , Figure 3 The first detection structure 200 also includes a first detection capacitor C. x1,p First detection capacitor C x2,p Second detection capacitor C x1,n Second detection capacitor C x2,n It is used to detect the angular velocity in the direction of the first axis. The first detection capacitor and the second detection capacitor in the first detection structure 200 are symmetrical about the first axis, the second axis, and the center, or symmetrical about the first axis, the second axis, and the center. The first detection mass block 201 has a second cavity 213, which divides the first detection mass block 201 into a first part and a second part. In the direction of the third axis, the first part and the electrode located below it (not shown in the figure, located between the paper and the detection mass block) constitute the first detection capacitor C. x1,p The second part, together with the electrode located below it (not shown in the figure, situated between the paper and the detection mass block), constitutes the second detection capacitor C. x1,n The second detection mass block 202 has a second cavity 223, which divides the second detection mass block 202 into a first part and a second part. In the direction of the third axis, the first part and the electrode (not shown in the figure) located below it constitute the first detection capacitor C. x2,p The second part, together with the electrode located below it, constitutes the second detection capacitor C. x2,n .

[0120] Combination Figure 1 , Figure 4 As shown, the second detection structure 300 includes multiple coupling beams, a third detection mass block 301, a fourth detection mass block 302, a fifth detection mass block 303, and a sixth detection mass block 304.

[0121] The third detection mass block 301 and the fourth detection mass block 302 are located on the first side of the first detection structure 200, and are located between the first driving mass block 101 and the second driving mass block 102. The third detection mass block 301 is coupled to the first driving mass block 101 via a coupling beam 311, and the fourth detection mass block 302 is coupled to the second driving mass block 102 via a coupling beam 321. The fourth detection mass block 302 and the third detection mass block 301 are coupled to each other via coupling beams 312 and 322.

[0122] The fifth detection mass block 303 and the sixth detection mass block 304 are located on the second side of the first detection structure 200, and are located between the third driving mass block 103 and the fourth driving mass block 104. The fifth detection mass block 303 is coupled to the third driving mass block 103 via a coupling beam 331, and the sixth detection mass block 304 is coupled to the fourth driving mass block 104 via a coupling beam 341. The sixth detection mass block 304 and the fifth detection mass block 303 are coupled together via coupling beams 332 and 342.

[0123] Furthermore, the third detection mass block 301 and the sixth detection mass block 304 are arranged side by side along the second axis, the fourth detection mass block 302 and the fifth detection mass block 305 are arranged side by side along the second axis, the third detection mass block 301 and the fourth detection mass block 302 are arranged side by side along the first axis, and the fifth detection mass block 303 and the sixth detection mass block 304 are arranged side by side along the first axis.

[0124] Furthermore, the second detection structure 300 also includes a first anchor point 313, a second anchor point 323, a third anchor point 333, and a fourth anchor point 343.

[0125] The first anchor point 313 and the second anchor point 323 are located on the first side of the first detection structure 200. The first anchor point 313 and the second anchor point 323 are located between the third detection mass block 301 and the fourth detection mass block 302. The third detection mass block 301 and the fourth detection mass block 302 are coupled to the first anchor point 313 and the second anchor point 323 via the coupling beam 312 and the coupling beam 322.

[0126] The third anchor point 333 and the fourth anchor point 343 are located on the second side of the first detection structure 200. The third anchor point 333 and the fourth anchor point 343 are located between the fifth detection mass block 303 and the sixth detection mass block 304. The fifth detection mass block 303 and the sixth detection mass block 304 are coupled to the third anchor point 333 and the fourth anchor point 343 via the coupling beam 332 and the coupling beam 342.

[0127] Furthermore, the first anchor point 313, the second anchor point 323, the third anchor point 333, and the fourth anchor point 343 are distributed in parallel along the second axis.

[0128] Furthermore, combined Figure 2 , Figure 4 The second detection structure 300 also includes a third detection capacitor C. y1,p The third detection capacitor C y2,p The third detection capacitor C y3,p The third detection capacitor C y4,p Fourth detection capacitor C y1,n Fourth detection capacitor C y2,n Fourth detection capacitor C y3,n Fourth detection capacitor C y4,n It is used to detect the angular velocity in the direction of the second axis. The third and fourth detection capacitors in the second detection structure 300 are symmetrical about the first axis, the second axis, and the center.

[0129] The third detection mass block 301 has a third cavity 314, which divides the third detection mass block 301 into a first part and a second part. In the direction of the third axis, the first part and the electrode located below it (not shown in the figure, located between the paper and the detection mass block) constitute the third detection capacitor C. y1,p The second part, together with the electrode located below it (not shown in the figure, situated between the paper and the detection mass block), constitutes the fourth detection capacitor C. y1,n The fourth detection mass block 302 has a third cavity 324, which divides the fourth detection mass block 302 into a first part and a second part. In the direction of the third axis, the first part and the electrode located below it (not shown in the figure, located between the paper and the detection mass block) constitute the third detection capacitor C. y2,p The second part, together with the electrode located below it (not shown in the figure, situated between the paper and the detection mass block), constitutes the fourth detection capacitor C. y2,n The fifth detection mass block 303 has a third cavity 334, which divides the fifth detection mass block 303 into a first part and a second part. In the direction of the third axis, the first part and the electrode located below it (not shown in the figure, located between the paper and the detection mass block) constitute the third detection capacitor C. y3,p The second part, together with the electrode located below it (not shown in the figure, situated between the paper and the detection mass block), constitutes the fourth detection capacitor C. y3,nThe sixth detection mass block 304 has a third cavity 344, which divides the sixth detection mass block 304 into a first part and a second part. In the direction of the third axis, the first part and the electrode located below it (not shown in the figure, located between the paper and the detection mass block) constitute the third detection capacitor C. y4,p The second part, together with the electrode located below it (not shown in the figure, situated between the paper and the detection mass block), constitutes the fourth detection capacitor C. y4,n .

[0130] Combination Figure 1 , Figure 5 , Figure 6 As shown, the third detection structure 400 includes multiple coupling beams, a seventh detection mass block 401, an eighth detection mass block 402, a ninth detection mass block 403, a tenth detection mass block 404, a first bridging beam 405, and a second bridging beam 407.

[0131] The seventh detection mass block 401 is located in the first opening 115 of the first driving mass block 101. The seventh detection mass block 401 is coupled to the first driving mass block 101 via coupling beams 411, 412, 413, and 414.

[0132] The eighth detection mass block 402 is located in the first opening 125 of the second driving mass block 102, and the eighth detection mass block 402 is coupled to the second driving mass block 102 via coupling beams 421, 422, 423, and 424.

[0133] The ninth detection mass block 403 is located in the first opening 135 of the third driving mass block 103, and the ninth detection mass block 403 is coupled to the third driving mass block 103 via coupling beams 431, 432, 433, and 434.

[0134] The tenth detection mass block 404 is located in the first opening 145 of the fourth driving mass block 104, and the tenth detection mass block 404 is coupled to the fourth driving mass block 104 via coupling beams 441, 442, 443, and 444.

[0135] The first bridging beam 405 is coupled to the seventh detection mass block 401 via a corresponding coupling beam 415, and to the eighth detection mass block 402 via a corresponding coupling beam 425. The second bridging beam 407 is coupled to the ninth detection mass block 403 via a corresponding coupling beam 435, and to the tenth detection mass block 404 via a corresponding coupling beam 445.

[0136] Furthermore, the seventh detection mass block 401 and the tenth detection mass block 404 are arranged side by side along the second axis, the eighth detection mass block 402 and the ninth detection mass block 403 are arranged side by side along the second axis, the seventh detection mass block 401 and the eighth detection mass block 402 are arranged side by side along the first axis, and the ninth detection mass block 403 and the tenth detection mass block 404 are arranged side by side along the first axis.

[0137] Furthermore, the third detection structure 400 also includes a seventh anchor point 406 and an eighth anchor point 408.

[0138] The seventh anchor point 406 is located on the first side of the first detection structure 200 and is coupled to the first bridging beam 405. The eighth anchor point 408 is located on the second side of the first detection structure 200 and is coupled to the second bridging beam 407.

[0139] The seventh anchor point 406 and the eighth anchor point 408 are arranged side by side along the second axis. The seventh anchor point 406 is located in the recessed area at the center of the first bridging beam 405, and the eighth anchor point 408 is located in the recessed area at the center of the second bridging beam 407.

[0140] Furthermore, combined Figure 2 , Figure 6 The third detection structure 400 also includes a fifth detection capacitor C. z1,p Fifth detection capacitor C z2,p Fifth detection capacitor C z3,p Fifth detection capacitor C z4,p The sixth detection capacitor C z1,n The sixth detection capacitor C z2,n The sixth detection capacitor C z3,n The sixth detection capacitor C z4,n It is used to detect the angular velocity in the direction of the third axis. The fifth and sixth detection capacitors in the third detection structure 400 are symmetrical about the first axis, the second axis, and the center.

[0141] The seventh detection mass block 401 has a fourth cavity 416. Multiple bridging beams 417 divide the fourth cavity 416 into multiple spaces. Each space contains a first plate 419 and a second plate 418, which are positioned opposite each other. The first plate 419 and the connecting beams 417 form a fifth detection capacitor C. z1,p The second plate 418 and the connecting beam 417 form the sixth detection capacitor C. z1,n .

[0142] The eighth detection mass block 402 has a fourth cavity 426. Multiple bridging beams 427 divide the fourth cavity 426 into several spaces. Each space contains a first plate 429 and a second plate 428, which are positioned opposite each other. The first plate 429 and the connecting beams 427 form the fifth detection capacitor C. z2,p The second plate 428 and the connecting beam 427 form the sixth detection capacitor C. z2,n .

[0143] The ninth detection mass block 403 has a fourth cavity 436. Multiple bridging beams 437 divide the fourth cavity 436 into multiple spaces. Each space contains a first plate 439 and a second plate 438, which are positioned opposite each other. The first plate 439 and the connecting beams 437 form the fifth detection capacitor C. z3,p The second plate 438 and the connecting beam 437 form the sixth detection capacitor C. z3,n .

[0144] The tenth detection mass block 404 has a fourth cavity 446. Multiple bridging beams 447 divide the fourth cavity 446 into several spaces. Each space contains a first plate 449 and a second plate 448, which are positioned opposite each other. The first plate 449 and the connecting beams 447 form a fifth detection capacitor C. z4,p The second plate 448 and the connecting beam 447 form the sixth detection capacitor C. z4,n .

[0145] Combination Figure 1 , Figure 5 As shown, the MEMS angular velocity sensor also includes four sets of anchor points. Each set of anchor points includes a fifth anchor point and a sixth anchor point arranged side by side along the first axis. Each driving mass is coupled to a set of anchor points via a corresponding coupling beam. The fifth and sixth anchor points in each set are located on opposite sides of the driving mass with which they are coupled. The four sets of anchor points are symmetrical about the first axis, the second axis, and the center, or symmetrical about the first axis, the second axis, and the center.

[0146] For example, the first driving mass 101 has a fifth anchor point 111 and a sixth anchor point 112 arranged side by side along the first axis on both sides. The first driving mass 101 is coupled to the fifth anchor point 111 via a coupling beam 113 and to the sixth anchor point 112 via a coupling beam 114. The second driving mass 102 has a fifth anchor point 121 and a sixth anchor point 122 arranged side by side along the first axis on both sides. The second driving mass 102 is coupled to the fifth anchor point 121 via a coupling beam 123 and to the sixth anchor point 122 via a coupling beam 124. The third driving mass 103 has a fifth anchor point 131 and a sixth anchor point 132 arranged side by side along the first axis on both sides. The third driving mass 103 is coupled to the fifth anchor point 131 via a coupling beam 133 and to the sixth anchor point 132 via a coupling beam 134. The fourth driving mass block 104 has a fifth anchor point 141 and a sixth anchor point 142 arranged side by side along the first axis. The fourth driving mass block 104 is coupled to the fifth anchor point 141 via a coupling beam 143, and to the sixth anchor point 142 via a coupling beam 144.

[0147] Furthermore, combined Figure 2 , Figure 5 The MEMS angular velocity sensor also includes a push-pull drive capacitor C. a1,1 Push-pull drive capacitor C a1,2 Push-pull drive capacitor C a1,3 Push-pull drive capacitor C b1,1 Push-pull drive capacitor C b1,2 Push-pull drive capacitor C b1,3 Push-pull drive capacitor C c1,1 Push-pull drive capacitor C c1,2 Push-pull drive capacitor C c1,3 Push-pull drive capacitor C d1,1 Push-pull drive capacitor C d1,2 Push-pull drive capacitor C d1,3 and drive feedback capacitor C A1 , drive feedback capacitor C B1 , drive feedback capacitor C C1 , drive feedback capacitor C D1 .

[0148] For example, each drive mass block includes three sets of push-pull drive capacitors and one set of drive feedback capacitors.

[0149] The first driving mass block 101 has a first cavity 116 inside, which contains driving push-pull comb teeth 117 and driving feedback comb teeth 118. The driving push-pull comb teeth 117 arranged opposite to each other form a push-pull driving capacitor C. a1,1 Push-pull drive capacitor C a1,2Push-pull drive capacitor C a1,3 The drive feedback comb teeth 118, which are set relatively oppositely, form the drive feedback capacitor C. A1 .

[0150] The second driving mass block 102 has a first cavity 126 inside. The first cavity 116 contains driving push-pull comb teeth 127 and driving feedback comb teeth 128. The driving push-pull comb teeth 127 arranged opposite to each other form a push-pull driving capacitor C. b1,1 Push-pull drive capacitor C b1,2 Push-pull drive capacitor C b1,3 The drive feedback comb teeth 128, which are set relatively oppositely, form the drive feedback capacitor C. B1 .

[0151] The third drive mass block 103 has a first cavity 136 inside, which contains drive push-pull comb teeth 137 and drive feedback comb teeth 138. The drive push-pull comb teeth 137 arranged opposite to each other form a push-pull drive capacitor C. c1,1 Push-pull drive capacitor C c1,2 Push-pull drive capacitor C c1,3 The drive feedback comb teeth 138, which are set relatively oppositely, form the drive feedback capacitor C. C1 .

[0152] The fourth drive mass block 104 has a first cavity 146 inside, which contains drive push-pull comb teeth 147 and drive feedback comb teeth 148. The drive push-pull comb teeth 147 arranged opposite to each other form a push-pull drive capacitor C. d1,1 Push-pull drive capacitor C d1,2 Push-pull drive capacitor C d1,3 The drive feedback comb teeth 148, which are set relatively oppositely, form the drive feedback capacitor C. D1 .

[0153] Furthermore, the push-pull drive capacitors in the first drive mass block 101, the second drive mass block 102, the third drive mass block 103, and the fourth drive mass block 104 are symmetrical about the first axis, the second axis, or about the first axis, the second axis, and the center. The drive feedback capacitors in the first drive mass block 101, the second drive mass block 102, the third drive mass block 103, and the fourth drive mass block 104 are symmetrical about the first axis, the second axis, or about the first axis, the second axis, and the center.

[0154] In this embodiment, the MEMS angular velocity sensor is symmetrical about the first axis, the second axis, or about the center.

[0155] Figure 7A schematic diagram of the motion of the driving mode of a MEMS angular velocity sensor provided according to an embodiment of this application is shown.

[0156] like Figure 7 As shown, under the action of electrostatic force, the first driving mass block 101, the second driving mass block 102, the third driving mass block 103, and the fourth driving mass block 104 perform linear motion within a plane (XOY plane) defined by the first axis and the second axis, specifically linear motion along the direction of the first axis (e.g., the X-axis direction). Specifically, the first driving mass block 101 moves in the opposite direction to the second driving mass block 102, the first driving mass block 101 moves in the same direction as the third driving mass block 103, and the first driving mass block 101 moves in the opposite direction to the fourth driving mass block 104.

[0157] For example, the second driving mass block 102 and the fourth driving mass block 104 move linearly along the positive direction of the first axis (e.g., the X-axis), while the first driving mass block 101 and the third driving mass block 103 move linearly along the negative direction of the X-axis. In other embodiments, the second driving mass block 102 and the fourth driving mass block 104 may also move linearly along the negative direction of the first axis (e.g., the X-axis), while the first driving mass block 101 and the third driving mass block 103 move linearly along the positive direction of the X-axis. That is, the adjacent driving mass blocks among the first driving mass block 101, the second driving mass block 102, the third driving mass block 103, and the fourth driving mass block 104 move in opposite directions.

[0158] The seventh detection mass block 401, eighth detection mass block 402, ninth detection mass block 403, and tenth detection mass block 404 in the third detection structure 400 follow the corresponding driving mass block in linear motion. Further, the seventh detection mass block 401 follows the first driving mass block 101 in linear motion along the same direction within the plane (XOY plane) defined by the first and second axes. The eighth detection mass block 402 follows the second driving mass block 102 in linear motion along the same direction within the plane (XOY plane) defined by the first and second axes. The ninth detection mass block 403 follows the third driving mass block 103 in linear motion along the same direction within the plane (XOY plane) defined by the first and second axes. The tenth detection mass block 404 follows the fourth driving mass block 104 in linear motion along the same direction within the plane (XOY plane) defined by the first and second axes.

[0159] For example, the eighth detection mass block 402 and the tenth detection mass block 404 move linearly along the positive direction of the first axis (e.g., the X-axis), while the seventh detection mass block 401 and the ninth detection mass block 403 move linearly along the negative direction of the X-axis. In other embodiments, the eighth detection mass block 402 and the tenth detection mass block 404 move linearly along the negative direction of the first axis (e.g., the X-axis), while the seventh detection mass block 401 and the ninth detection mass block 403 move linearly along the positive direction of the X-axis.

[0160] The third detection mass block 301, fourth detection mass block 302, fifth detection mass block 303, and sixth detection mass block 304 in the second detection structure 300 follow the corresponding driving mass block in linear motion. Further, the third detection mass block 301 follows the first driving mass block 101 in linear motion along the same direction within the plane (XOY plane) defined by the first and second axes. The fourth detection mass block 302 follows the second driving mass block 102 in linear motion along the same direction within the plane (XOY plane) defined by the first and second axes. The fifth detection mass block 303 follows the third driving mass block 103 in linear motion along the same direction within the plane (XOY plane) defined by the first and second axes. The sixth detection mass block 304 follows the fourth driving mass block 104 in linear motion along the same direction within the plane (XOY plane) defined by the first and second axes.

[0161] For example, the fourth detection mass block 302 and the sixth detection mass block 304 move linearly along the positive direction of the first axis (e.g., the X-axis), while the third detection mass block 301 and the fifth detection mass block 303 move linearly along the negative direction of the X-axis. In other embodiments, the fourth detection mass block 302 and the sixth detection mass block 304 move linearly along the negative direction of the first axis (e.g., the X-axis), while the third detection mass block 301 and the fifth detection mass block 303 move linearly along the positive direction of the X-axis.

[0162] The first detection mass block 201 in the first detection structure 200, under the action of coupling beams 211 and 212, rotates within the plane defined by the first driving mass block 101 and the fourth driving mass block 104 coupled thereto. The second detection mass block 202 in the first detection structure 200, under the action of coupling beams 221 and 222, rotates within the plane defined by the second driving mass block 102 and the third driving mass block 103 coupled thereto. The rotation directions of the first detection mass block 201 and the second detection mass block 202 are opposite.

[0163] By way of example, the first detection mass block 201 rotates clockwise within the plane defined by the first axis and the second axis, and the second detection mass block 202 rotates counterclockwise within the plane defined by the first axis and the second axis. In an alternative embodiment, the first detection mass block 201 rotates counterclockwise within the plane defined by the first axis and the second axis, and the second detection mass block 202 rotates clockwise within the plane defined by the first axis and the second axis.

[0164] In the driving mode, the masses of the first driving mass block 101 and the second driving mass block 102 are M. Q，1 M Q，2 The corresponding linear velocity is V. Q，1 V Q，2 The sum of the momentum of the first driving mass block 101 and the second driving mass block 102 = M Q，1 *V Q，1 +M Q，2 *V Q，2 =M Q，1 *V Q，1 +M Q，2 *(-V Q，1 =0. Similarly, the sum of the momentum of the third driving mass block 103 and the fourth driving mass block 104 is also 0. Similarly, the sum of the momentum of the third detection mass block 301 and the fourth detection mass block 302, which have the same structure, is also 0, as are the sum of the momentum of the fifth detection mass block 303 and the sixth detection mass block 304, which have the same structure. The sum of the momentum of the seventh detection mass block 401 and the eighth detection mass block 402, which have the same structure, is also 0, as are the sum of the momentum of the ninth detection mass block 403 and the tenth detection mass block 404, which have the same structure.

[0165] For the first detection mass block 201 and the second detection mass block 202 with identical structures, the moment of inertia is J. x，1 J x，2 The corresponding linear velocity is ω x，1 ω x，2 The sum of the angular momentum of the first detection mass 201 and the second detection mass 202 is J x，1 *ω x，1 +J x，2 *ω x，2 =J x，1 *ω x，1 +J x，2 *(-ω x，1 =0. That is, in the driving mode, the sum of the momentum and angular momentum of the MEMS angular velocity sensor is 0, and the overall structure reaches full equilibrium.

[0166] Figure 8This illustration shows a schematic diagram of the motion modes of the MEMS angular velocity sensor provided in this embodiment when it has an angular velocity input in the X-axis direction.

[0167] like Figure 8 As shown, when an angular velocity is input in the X-axis direction, the first detection mass block 201 and the second detection mass block 202 rotate around the second axis (Y-axis), and the first detection mass block 201 and the second detection mass block 202 rotate in opposite directions. At this time, each of the first driving mass blocks 101, the second driving mass block 102, the third driving mass block 103, and the fourth driving mass block 104 does not move due to the constraints of the fifth and sixth anchor points on both sides and the decoupling between them and the corresponding detection mass blocks in the first detection structure 200. Furthermore, there are no shared mass blocks between the first detection structure 200 and the second detection structure 300 and the third detection structure 400, so there is no inter-axis cross-interference, and therefore the accuracy of the X-axis capacitance detection is not affected.

[0168] The third detection mass block 301, the fourth detection mass block 302, the fifth detection mass block 303, and the sixth detection mass block 304 in the second detection structure 300 do not move. The seventh detection mass block 401, the eighth detection mass block 402, the ninth detection mass block 403, and the tenth detection mass block 404 in the third detection structure 400 do not move.

[0169] When there is an angular velocity input in the X-axis direction, the first detection capacitor C... x1,p First detection capacitor C x2,p Second detection capacitor C x1,n Second detection capacitor C x2,n A change has occurred. Specifically, in point C... x1,p Increase, C x1,n Decrease, C x2,p Increase, C x2,n The angular velocity in the X-axis direction is reduced. Therefore, the angular velocity is obtained by calculating the changes in the first and second detection capacitors mentioned above. Specifically, the angular velocity signal Ωx is proportional to ΔC. x1,p -ΔC x1,n +ΔC x2,p -ΔC x2,n For the first detection mass block 201 and the second detection mass block 202, the moment of inertia at this time is J. x，3 J x，4 The corresponding linear velocity is ω x，3 ω x，4 Angular momentum and J x，3 *ω x，3 +J x，4 *ω x，4 =J x，3 *ω x，4 +J x，4*(-ω x，3 When )=0, the overall structure achieves full balance.

[0170] Figure 9 This paper illustrates a schematic diagram of the motion modes of a MEMS angular velocity sensor provided in an embodiment of this application when it has an angular velocity input in the Y-axis direction.

[0171] like Figure 9 As shown, when an angular velocity is input in the Y-axis direction, the third and fourth detection mass blocks 301 and 302 in the second detection structure 300 rotate around the second axis (Y-axis), and the third and fourth detection mass blocks 301 and 302 rotate in opposite phases. The fifth and sixth detection mass blocks 303 and 304 in the second detection structure 300 rotate around the second axis, and the fifth and sixth detection mass blocks 303 and 304 rotate in opposite phases.

[0172] At this time, each of the first driving mass block 101, the second driving mass block 102, the third driving mass block 103, and the fourth driving mass block 104 does not move due to the constraints of the fifth and sixth anchor points on both sides and the decoupling between them and the corresponding detection mass block in the second detection structure 300.

[0173] Furthermore, since the first detection structure 200 does not share any mass blocks with the second detection structure 300 and the third detection structure 400, there will be no inter-axis cross-interference, thus not affecting the accuracy of X-axis capacitance detection. The first detection mass block 201 and the second detection mass block 202 in the first detection structure 200 do not move. The seventh detection mass block 401, the eighth detection mass block 402, the ninth detection mass block 403, and the tenth detection mass block 404 in the third detection structure 400 do not move.

[0174] When there is an angular velocity input in the Y-axis direction, the third detection capacitor C y1,p The third detection capacitor C y2,p The third detection capacitor C y3,p The third detection capacitor C y4,p Fourth detection capacitor C y1,n Fourth detection capacitor C y2,n Fourth detection capacitor C y3,n Fourth detection capacitor C y4,n Changes occur. Specifically, when the second detection structure, located on the first side of the first detection structure 200, performs detection, C y1,p Increase, C y1,n Decrease, C y2,p Increase, C y2,n The angular velocity in the Y-axis direction is reduced. Therefore, the angular velocity in the Y-axis direction is obtained by calculating the change in the detection capacitor, specifically the angular velocity signal Ω. x Proportional to ΔCy1,p -ΔC y1,n +ΔC y2,p -ΔC y2,n The detection performed by the second detection structure located on the first side of the first detection structure 200 is similar to that performed by the second detection structure located on the second side of the first detection structure 200, and will not be described again. For the third detection mass block 301, the fourth detection mass block 302, the fifth detection mass block 303, and the sixth detection mass block 304, the moment of inertia at this time is J. y，1 J y，2 J y，3 J y，4 The corresponding linear velocity is ω y，1 ω y，2 ω y，3 ω y，4 The sum of the angular momentum of the third detection mass block 301, the fourth detection mass block 302, the fifth detection mass block 303, and the sixth detection mass block 304 is J. y，1 *ω y，1 +J y，2 *ω y，2 +J y，3 *ω y，3 +J y，4 *ω y，4 =0, the overall structure achieves full balance.

[0175] Figure 10 This paper illustrates a schematic diagram of the motion modes of a MEMS angular velocity sensor provided in an embodiment of this application when it has an angular velocity input in the Z-axis direction.

[0176] like Figure 10 As shown, when there is an angular velocity input in the Z-axis direction, each of the seventh detection mass block 401, the eighth detection mass block 402, the ninth detection mass block 403, and the tenth detection mass block 404 moves linearly along the second axis. The seventh detection mass block 401 and the eighth detection mass block 402 move in opposite directions, the seventh detection mass block 401 and the ninth detection mass block 403 move in the same direction, and the seventh detection mass block 401 and the tenth detection mass block 404 move in opposite directions.

[0177] Each of the first driving mass block 101, the second driving mass block 102, the third driving mass block 103, and the fourth driving mass block 104 does not move due to the constraints of the fifth and sixth anchor points on both sides and the decoupling between them and the corresponding detection mass block in the third detection structure 400.

[0178] Furthermore, since the first detection structure 200 does not share any mass blocks with the second detection structure 300 and the third detection structure 400, there will be no inter-axis cross-interference, thus not affecting the accuracy of the X-axis capacitance detection. The first detection mass block 201 and the second detection mass block 202 in the first detection structure 200 do not move. The third detection mass block 301, the fourth detection mass block 302, the fifth detection mass block 303, and the sixth detection mass block 304 in the second detection structure 300 do not move.

[0179] When there is an angular velocity input in the Z-axis direction, the fifth detection capacitor C... z1,p Fifth detection capacitor C z2,p Fifth detection capacitor C z3,p Fifth detection capacitor C z4,p The sixth detection capacitor C z1,n The sixth detection capacitor C z2,n The sixth detection capacitor C z3,n The sixth detection capacitor C z4,n A change has occurred. Specifically, the direction of the change is: C z1,p Increase, C z1,n Decrease, C z2,p Increase, C z2,n Decrease, C z3,p Increase, C z3,n Decrease, C z4,p Increase, C z4,n The angular velocity in the Z-axis direction is reduced. Therefore, the angular velocity is obtained by calculating the change in the detection capacitor, specifically the angular velocity signal Ω. z Proportional to ΔC z1,p -ΔC z1,n +ΔC z2,p -ΔC z2,n +ΔC z3,p -ΔC z3,n +ΔC z4,p -ΔC z4,n The masses of the seventh detection mass block 401, the eighth detection mass block 402, the ninth detection mass block 403, and the tenth detection mass block 404 are respectively: M z，1 M z，2 M z，3 M z，4 The corresponding linear motion velocities are V z，1 V z，2 V z，3 V z，4 The sum of the angular momentum of the seventh detection mass block 401, the eighth detection mass block 402, the ninth detection mass block 403, and the tenth detection mass block 404 is M. z，1 *V z，1 +M z，2 *V z，2 +Mz，3 *V z，3 +M z，4 *V z，4 =0. That is, during the motion detection along the Z-axis, the total momentum of the entire structure is 0, and the entire structure achieves full equilibrium.

[0180] Furthermore, the torque of the MEMS angular velocity sensor is 0 in both the driving and detection modes.

[0181] The MEMS angular velocity sensor provided in this application has an overall structure that is symmetrical about the first axis, the second axis, and the center. Furthermore, the first and second detection mass blocks move in opposite phases, as do the third and fourth, fifth and sixth, seventh and eighth, and ninth and tenth detection mass blocks. The first and second driving mass blocks also move in opposite phases, as do the third and fourth driving mass blocks. This ensures that the MEMS angular velocity sensor maintains momentum and angular momentum balance in all mass block movements within the driving mode and the three detection modes; that is, the sum of momentum and angular momentum caused by mass block movements is zero in all operating modes. The advantage of this design is that it avoids the coupling of forces and torques generated by mass block movements into the sensor design, and it also avoids interference from external linear and angular accelerations on the sensor's angular velocity detection signal.

[0182] In other words, the MEMS angular velocity sensor provided in this application achieves a fully balanced design for resonant vibration, thereby effectively improving the sensor's ability to resist external linear and angular acceleration interference. These benefits will ultimately be reflected in the sensor's performance indicators. The improved vibration interference resistance helps reduce the sensor's vibration rectification error (VRE) and vibration-induced noise (VIN), thereby effectively reducing the sensor's noise spectral density and helping to improve the sensor's dynamic range.

[0183] As described above, these embodiments of the present invention do not exhaustively cover all details, nor do they limit the invention to the specific embodiments described. Clearly, many modifications and variations can be made based on the above description. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to effectively utilize the invention and its modifications. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A MEMS angular velocity sensor, comprising: The first detection structure is used to detect the angular velocity in the direction of the first axis; The second detection structure is used to detect the angular velocity in the direction of the second axis. The first axis is perpendicular to the second axis. The second detection structure is located on both sides of the first detection structure. The projection of the overall structure formed by the second detection structure and the first detection structure is a cross structure, forming four independent corner regions of the cross structure. A first driving mass block, a second driving mass block, a third driving mass block, and a fourth driving mass block with identical structures, wherein each of the first, second, third, and fourth driving mass blocks is located in a corner region and separated from each other. The second detection structure includes a third detection mass block, a fourth detection mass block, a fifth detection mass block, and a sixth detection mass block. The third and fourth detection mass blocks are located on a first side of the first detection structure, between the first driving mass block and the second driving mass block. The fifth and sixth detection mass blocks are located on a second side of the first detection structure, between the third driving mass block and the fourth driving mass block. The first detection structure is symmetrical about both the first axis and the second axis.

2. The MEMS angular velocity sensor according to claim 1, wherein, The first driving mass block and the second driving mass block are respectively coupled to the second detection structure located between them, the third driving mass block and the fourth driving mass block are respectively coupled to the second detection structure located between them, the first driving mass block and the fourth driving mass block are respectively coupled to the first detection structure located between them, and the second driving mass block and the third driving mass block are respectively coupled to the first detection structure located between them.

3. The MEMS angular velocity sensor according to claim 2, wherein, Also includes: The third detection structure, used to detect the angular velocity in the direction of the third axis, is located within the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block. The third axis is perpendicular to the plane containing the first axis and the second axis.

4. The MEMS angular velocity sensor according to claim 1, wherein, The first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block are all symmetrical about the first axis and the second axis, or the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block are all symmetrical about the first axis, the second axis, and the center.

5. The MEMS angular velocity sensor according to claim 3, wherein, The first detection structure includes: Multiple coupled beams in the first detection structure; A first detection mass block is located between the first driving mass block and the fourth driving mass block. The first detection mass block is coupled to the first driving mass block and the fourth driving mass block via a coupling beam of a corresponding first detection structure. The second detection mass block is located between the second driving mass block and the third driving mass block. The second detection mass block is coupled to the second driving mass block and the third driving mass block via a coupling beam of a corresponding first detection structure. The second detection mass block is also coupled to the first detection mass block via a coupling beam of a corresponding first detection structure.

6. The MEMS angular velocity sensor according to claim 5, wherein, The first detection mass block and the second detection mass block are arranged side by side along the first axis.

7. The MEMS angular velocity sensor according to claim 5, wherein, The second detection structure also includes: The second detection structure has multiple coupled beams; The third detection mass block is coupled to the first driving mass block via a coupling beam of a corresponding second detection structure, the fourth detection mass block is coupled to the second driving mass block via a coupling beam of a corresponding second detection structure, and the fourth detection mass block and the third detection mass block are coupled to each other via a coupling beam of a corresponding second detection structure. The fifth detection mass block is coupled to the third driving mass block via a coupling beam of a corresponding second detection structure, the sixth detection mass block is coupled to the fourth driving mass block via a coupling beam of a corresponding second detection structure, and the sixth detection mass block and the fifth detection mass block are coupled to each other via a coupling beam of a corresponding second detection structure.

8. The MEMS angular velocity sensor according to claim 7, wherein, The third and sixth detection mass blocks are arranged side by side along the second axis, the fourth and fifth detection mass blocks are arranged side by side along the second axis, the third and fourth detection mass blocks are arranged side by side along the first axis, and the fifth and sixth detection mass blocks are arranged side by side along the first axis.

9. The MEMS angular velocity sensor according to claim 7, wherein, The second detection structure also includes: The first anchor point and the second anchor point are located on the first side of the first detection structure. The first anchor point and the second anchor point are located between the third detection mass block and the fourth detection mass block. The third detection mass block and the fourth detection mass block are coupled to the first anchor point and the second anchor point via the coupling beam of the corresponding second detection structure. The third and fourth anchor points are located on the second side of the first detection structure. The third and fourth anchor points are located between the fifth and sixth detection mass blocks. The fifth and sixth detection mass blocks are coupled to the third and fourth anchor points via coupling beams of the corresponding second detection structures.

10. The MEMS angular velocity sensor according to claim 9, wherein, The first anchor point, the second anchor point, the third anchor point, and the fourth anchor point are distributed side by side along the second axis.

11. The MEMS angular velocity sensor according to claim 3, wherein, The third detection structure is symmetrical about both the first axis and the second axis, or the third detection structure is symmetrical about the first axis, the second axis, and the center.

12. The MEMS angular velocity sensor according to claim 7, wherein, The third detection structure includes: The third detection structure consists of multiple coupled beams; The seventh detection mass block is located in the first opening of the first driving mass block, and the seventh detection mass block is coupled to the first driving mass block via a coupling beam of a corresponding third detection structure. The eighth detection mass block is located in the first opening of the second driving mass block, and the eighth detection mass block is coupled to the second driving mass block via a coupling beam of a corresponding third detection structure. The ninth detection mass block is located in the first opening of the third driving mass block, and the ninth detection mass block is coupled to the third driving mass block via a coupling beam of the corresponding third detection structure. The tenth detection mass block is located in the first opening of the fourth driving mass block, and the tenth detection mass block is coupled to the fourth driving mass block via a coupling beam of a corresponding third detection structure; The first bridging beam is coupled to the seventh detection mass block via a coupling beam of the corresponding third detection structure, and is coupled to the eighth detection mass block via a coupling beam of the corresponding third detection structure; and The second bridging beam is coupled to the ninth detection mass block via a coupling beam of the corresponding third detection structure, and is coupled to the tenth detection mass block via a coupling beam of the corresponding third detection structure.

13. The MEMS angular velocity sensor according to claim 12, wherein, The seventh and tenth detection mass blocks are arranged side by side along the second axis, the eighth and ninth detection mass blocks are arranged side by side along the second axis, the seventh and eighth detection mass blocks are arranged side by side along the first axis, and the ninth and tenth detection mass blocks are arranged side by side along the first axis.

14. The MEMS angular velocity sensor according to claim 1, wherein, Also includes: Coupled beam driving the mass block; Four sets of anchor points, each set including a fifth anchor point and a sixth anchor point arranged side by side along the first axis, each driving mass block is coupled to a set of anchor points via a corresponding coupling beam of the driving mass block, wherein the fifth anchor point and the sixth anchor point in each set are located on opposite sides of the driving mass block coupled thereto.

15. The MEMS angular velocity sensor according to claim 12, wherein, In the driving mode, each of the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block moves linearly along the first axis direction; The seventh detection mass block follows the first driving mass block in a linear motion, the eighth detection mass block follows the second driving mass block in a linear motion, the ninth detection mass block follows the third driving mass block in a linear motion, and the tenth detection mass block follows the fourth driving mass block in a linear motion. The third detection mass block follows the first driving mass block in a linear motion, the fourth detection mass block follows the second driving mass block in a linear motion, the fifth detection mass block follows the third driving mass block in a linear motion, and the sixth detection mass block follows the fourth driving mass block in a linear motion. The first detection mass block rotates within the plane defined by the first and fourth driving mass blocks coupled to it, along with the second and third driving mass blocks coupled to it. In this configuration, the first driving mass block moves in the opposite direction to the second driving mass block, the first driving mass block moves in the same direction as the third driving mass block, and the first driving mass block moves in the opposite direction to the fourth driving mass block. The first detection mass block and the second detection mass block rotate in opposite directions.

16. The MEMS angular velocity sensor according to claim 12, wherein, During the detection mode of angular velocity in the first axial direction, the first detection mass block and the second detection mass block rotate around the second axis, and the first detection mass block and the second detection mass block rotate in opposite phases; Each of the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block does not move due to the constraints of the anchor points on both sides and the decoupling from the first detection structure; The third, fourth, fifth, and sixth detection mass blocks in the second detection structure do not move; The seventh, eighth, ninth, and tenth detection mass blocks in the third detection structure do not move.

17. The MEMS angular velocity sensor according to claim 12, wherein, During the detection mode of angular velocity in the direction of the second axis, the third and fourth detection mass blocks rotate around the second axis, and the third and fourth detection mass blocks rotate in opposite phases; the fifth and sixth detection mass blocks rotate around the second axis, and the fifth and sixth detection mass blocks rotate in opposite phases. The first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block do not move due to the constraints of the anchor points on both sides and the decoupling from the second detection structure; The first detection mass block and the second detection mass block in the first detection structure do not move; The seventh, eighth, ninth, and tenth detection mass blocks in the third detection structure do not move.

18. The MEMS angular velocity sensor according to claim 12, wherein, In the detection mode of angular velocity along the third axis, each of the seventh, eighth, ninth, and tenth detection mass blocks moves linearly along the second axis. The seventh detection mass block moves in the opposite direction to the eighth detection mass block, the seventh detection mass block moves in the same direction as the ninth detection mass block, and the seventh detection mass block moves in the opposite direction to the tenth detection mass block. The first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block do not move due to the constraints of the anchor points on both sides and the decoupling from the third detection structure; The first detection mass block and the second detection mass block in the first detection structure do not move; The third, fourth, fifth, and sixth detection mass blocks in the second detection structure do not move.

19. The MEMS angular velocity sensor according to claim 1, wherein, Each of the first drive mass block, the second drive mass block, the third drive mass block, and the fourth drive mass block includes the following internal components: First cavity; The push-pull comb teeth are located in the first cavity, and two sets of push-pull comb teeth arranged adjacently and oppositely form a push-pull drive capacitor. The drive feedback comb teeth are located in the first cavity, and two sets of drive feedback comb teeth arranged adjacent to each other form a set of drive feedback capacitors.

20. The MEMS angular velocity sensor according to claim 19, wherein, The push-pull drive capacitors in the first drive mass block, the second drive mass block, the third drive mass block, and the fourth drive mass block are all symmetrical about the first axis and the second axis, or the push-pull drive capacitors in the first drive mass block, the second drive mass block, the third drive mass block, and the fourth drive mass block are all symmetrical about the first axis, the second axis, and the center.

21. The MEMS angular velocity sensor according to claim 19, wherein, The driving feedback capacitors in the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block are all symmetrical about the first axis and the second axis, or the driving feedback capacitors in the first driving mass block, the second driving mass block, the third driving mass block, and the fourth driving mass block are all symmetrical about the first axis, the second axis, and the center.

22. The MEMS angular velocity sensor according to claim 19, wherein, Each drive mass block includes three sets of push-pull drive capacitors and one set of drive feedback capacitors.

23. The MEMS angular velocity sensor according to claim 5, wherein, In the first detection structure, each of the first and second detection mass blocks has a second cavity, which divides the detection mass block into a first part and a second part. The first portion and the electrode located below it constitute a first detection capacitor; the second portion and the electrode located below it constitute a second detection capacitor. The first detection capacitor and the second detection capacitor in the first detection structure are symmetrical about the first axis and the second axis, or the first detection capacitor and the second detection capacitor in the first detection structure are symmetrical about the first axis, the second axis, and the center.

24. The MEMS angular velocity sensor according to claim 7, wherein, In the second detection structure, each of the third, fourth, fifth, and sixth detection mass blocks has a third cavity, which divides the detection mass block into a first part and a second part. The first portion and the electrode located below it constitute a third detection capacitor; the second portion and the electrode located below it constitute a fourth detection capacitor. The third and fourth detection capacitors in the second detection structure are symmetrical about the first axis and the second axis, or the third and fourth detection capacitors in the second detection structure are symmetrical about the first axis, the second axis, and the center.

25. The MEMS angular velocity sensor according to claim 12, wherein, Each of the seventh, eighth, ninth, and tenth detection quality blocks in the third detection structure includes: Fourth cavity; Multiple connecting beams are located within the fourth cavity, dividing the fourth cavity into multiple spaces; The first plate is located inside the fourth cavity and forms a fifth detection capacitor with the connecting beam; The second plate, located within the fourth cavity, forms the sixth detection capacitor with the connecting beam. Each space contains a first plate and a second plate, with the first plate and the second plate in each space positioned opposite each other.

26. The MEMS angular velocity sensor according to claim 25, wherein, The fifth and sixth detection capacitors in the third detection structure are symmetrical about the first axis and the second axis, or the fifth and sixth detection capacitors in the third detection structure are symmetrical about the first axis, the second axis, and the center.

27. The MEMS angular velocity sensor according to claim 1, wherein, The MEMS angular velocity sensor is symmetrical about the first axis and the second axis, or the MEMS angular velocity sensor is symmetrical about the first axis, the second axis, and the center.

28. The MEMS angular velocity sensor according to claim 13, wherein, The third detection structure also includes: The seventh anchor point is located on the first side of the first detection structure and is coupled to the first bridging beam; The eighth anchor point is located on the second side of the first detection structure and is coupled to the second bridging beam.

29. The MEMS angular velocity sensor according to claim 28, wherein, The seventh anchor point and the eighth anchor point are arranged side by side along the second axis. The seventh anchor point is located in the recessed area at the center of the first bridging beam, and the eighth anchor point is located in the recessed area at the center of the second bridging beam.

30. The MEMS angular velocity sensor according to claim 1, wherein, The second detection structure is symmetrical about both the first axis and the second axis, or the second detection structure is symmetrical about the first axis, the second axis, and the center.

31. The MEMS angular velocity sensor according to claim 14, wherein, The four sets of anchor points are symmetrical about the first axis and the second axis, or the four sets of anchor points are symmetrical about the first axis, the second axis, and the center.

32. The MEMS angular velocity sensor according to claim 15, wherein, In the driving mode, the sum of the momentum of the first driving mass and the second driving mass is 0, the sum of the momentum of the third driving mass and the fourth driving mass is 0, the sum of the momentum of the third detection mass and the fourth detection mass is 0, the sum of the momentum of the fifth detection mass and the sixth detection mass is 0, the sum of the momentum of the seventh detection mass and the eighth detection mass is 0, the sum of the momentum of the ninth detection mass and the tenth detection mass is 0, and the sum of the angular momentum of the first detection mass and the second detection mass is 0.

33. The MEMS angular velocity sensor according to claim 16, wherein, In the detection mode of angular velocity along the first axis, the sum of the angular momentum of the first detection mass and the second detection mass is 0.

34. The MEMS angular velocity sensor according to claim 17, wherein, In the detection mode of angular velocity along the second axis, the sum of the angular momentum of the third, fourth, fifth, and sixth detection mass blocks is 0.

35. The MEMS angular velocity sensor according to claim 18, wherein, In the detection mode of angular velocity along the third axis, the sum of the angular momentum of the seventh, eighth, ninth, and tenth detection mass blocks is 0.

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