Adjusting device and optical detection device

Abstract

The present application relates to light source adjustment, in particular to an adjusting device and an optical detection device. An adjusting device comprises a base and a translation adjusting assembly, the translation adjusting assembly comprising a translation base and a first optical element; the translation base is configured to move on the base in a translation manner, and the first optical element is arranged on the translation base; the first optical element has a change in optical characteristics along a translation direction of the translation base, and is used to cut into a light path of the adjusting device in a translation manner, and the translation direction intersects with a direction of the light path of the adjusting device; the translation adjusting assembly is provided with at least two groups, and the first optical elements in each group of the translation adjusting assembly are arranged side by side along the direction of the light path, so as to combine to form different optical characteristics when the first optical elements relatively translate. The present application can combine to form different optical characteristics, so as to have more abundant optical adjusting functions, and the first optical element in the form of translation can avoid occupying more space, and has a compact structure.

Description

Technical Field

[0001] This invention relates to light source adjustment, and particularly to an adjustment device and an optical detection device. Background Technology

[0002] Existing optical inspection devices typically include components such as a light source, a light source adjustment assembly, optical path equipment, and a detection unit. For semiconductor wafers, in order to meet the high-precision process requirements of wafer fabrication, it is often necessary to first adjust the orientation and optical characteristics of the detection light emitted by the light source using the light source adjustment assembly. This changes the incident angle and transmission performance of the detection light in the optical path equipment. Then, the optical path equipment further processes the detection light before finally sending it to the detection unit for inspection of the object under inspection.

[0003] However, existing light source adjustment components can only achieve a few levels of attenuation and filtering in adjusting the optical characteristics of the detection light, and cannot perform more optical adjustment functions, which limits the application scenarios of the light source adjustment components. Summary of the Invention

[0004] The main technical problem solved by this invention is that the optical adjustment methods of existing light source adjustment devices cannot meet the broader optical adjustment requirements.

[0005] In a first aspect, the present invention provides an adjustment device.

[0006] An adjusting device, comprising:

[0007] Base;

[0008] And a translation adjustment assembly, the translation adjustment assembly including a translation base and a first optical element; the translation base is configured to move on the base in a translational manner, the first optical element is disposed on the translation base; the first optical element has optical characteristic changes along the translational direction of the translation base, for cutting into the optical path of the adjustment device in a translational manner, the translational direction intersecting the optical path direction of the adjustment device;

[0009] The translation adjustment assembly is provided in at least two groups, and the first optical elements in each group of the translation adjustment assembly are arranged side by side along the optical path direction so as to combine to form different optical characteristics when the first optical elements are translated relative to each other.

[0010] In one technical solution, the first optical element in at least two sets of translation adjustment components is configured as a linear gradient filter, wherein each linear gradient filter has a different filtering capability range and the filtering capability ranges partially overlap.

[0011] In one technical solution, at least one set of translation adjustment components is configured with a linear gradient filter as a short-pass filter, and at least one set of translation adjustment components is configured with a linear gradient filter as a long-pass filter.

[0012] In one technical solution, the translation adjustment assembly is provided in two sets, and the translation bases in the two sets of translation adjustment assemblies are arranged side by side, and the two first optical elements in the two sets of translation adjustment assemblies are disposed on the side of the two translation bases that are close to each other.

[0013] In one technical solution, the translation base is provided with a rack structure, and the translation adjustment assembly further includes a gear and a gear drive motor, wherein the gear drive motor is connected to the gear to drive the translation base to translate.

[0014] In one technical solution, a slide rail and a slider are further included. The slide rail is fixed on the base, the slider is configured to move along the extension direction of the slide rail, and the translation base is fixed on the slider.

[0015] In one technical solution, the translation adjustment assembly further includes an element support plate, which is connected to the translation base and extends along the translation direction of the translation base. The surface of the element support plate is provided with a window for the light path to pass through, and the window is used to snap or glue the first optical element.

[0016] In one technical solution, a rotation adjustment assembly is further included, which includes a turntable body and a second optical element; the turntable body is rotatably mounted on the base, and the second optical element is disposed on the turntable body and distributed around the rotation axis of the turntable body; the second optical element has optical characteristic changes around the rotation axis of the turntable body, and is used to cut into the optical path according to the rotation mode.

[0017] In one technical solution, the second optical element is configured as a plurality of attenuators or filters with different optical properties, and each attenuator or filter is uniformly distributed around the rotation axis of the turntable body.

[0018] In one technical solution, two sets of rotation adjustment components are included, each equipped with an attenuator. The attenuator has varying attenuation characteristics around the rotation axis of the turntable body. The two sets of rotation adjustment components equipped with the attenuator are used to combine different light transmittances.

[0019] In one technical solution, the rotation adjustment assembly is provided in multiple groups and arranged side by side along the optical path direction. On the axial direction of the turntable body, the first optical element in each of the translation adjustment assemblies is located on the same side of all the turntable bodies and is adjacent to the turntable body.

[0020] In one technical solution, the rotation adjustment assembly is provided in two sets, and each set of the rotation adjustment assembly includes a turntable mounting shaft for fixing the turntable body. The two turntable mounting shafts are arranged in a form where their end faces face each other, and the turntable body in the two sets of the rotation adjustment assembly is respectively fixed to one end of the two turntable mounting shafts that are close to each other.

[0021] In one technical solution, the rotation adjustment assembly includes a turntable mounting shaft for fixed installation of the turntable body. At least two sets of the rotation adjustment assemblies have their turntable mounting shafts arranged side by side, and the turntable body is fixed on the same axial side of the two turntable mounting shafts respectively. The turntable mounting shaft in one set of the rotation adjustment assemblies passes radially outward from the turntable body in the other set of the rotation adjustment assemblies.

[0022] In one technical solution, the rotation adjustment assembly includes a turntable drive motor, which is coaxially arranged and connected to the turntable mounting shaft for driving the turntable body to rotate.

[0023] In one technical solution, the base includes a first base portion and a second base portion, the first base portion and the second base portion are arranged at intervals and both are used to support the rotation adjustment assembly; the rotation adjustment assembly is configured as one or more groups, and the turntable body of each rotation adjustment assembly is arranged in the interval between the first base portion and the second base portion.

[0024] In one technical solution, the first seat portion and / or the second seat portion are provided with a clearance space on the side near the interval, and at least a portion of at least one of the translational bases is located within the clearance space.

[0025] Secondly, the present invention provides an optical detection device.

[0026] Optical inspection device, including:

[0027] A light source, used to generate detection light;

[0028] An adjustment device, which is the adjustment device mentioned in the first aspect above, is used at least to adjust the optical characteristics of the detection light to change the transmission performance of the detection light into the optical path device;

[0029] An optical path device, wherein the optical path device is used to process the detection light that has passed through the adjustment device;

[0030] And a detection unit, which is used to receive detection light to detect the object being inspected.

[0031] The beneficial effects of this invention are:

[0032] According to the aforementioned adjustment device, since at least two sets of translation adjustment components including the first optical element are provided, and the translation adjustment components can realize the translation of the first optical element through the translation base, and the first optical element has optical characteristics that change along the translation direction of the translation base, when two different translation adjustment components translate relative to each other, the first optical element in different translation adjustment components can also translate relative to each other, so that different optical characteristics can be formed by combination, thereby having richer optical adjustment functions. Furthermore, the first optical element in the translation form can avoid occupying more space and has a compact structure. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of one embodiment of an adjusting device according to the present invention;

[0034] Figure 2 for Figure 1 A schematic diagram of the structure of a type of adjustment device from another perspective;

[0035] Figure 3 for Figure 2 An exploded view of an adjustment device, wherein the rotation adjustment component and the translation adjustment component are displayed separately from the base;

[0036] Figure 4 This is a partial structural diagram of the translation adjustment component;

[0037] Figure 5 This is a schematic diagram of another embodiment of an adjustment device according to the present invention.

[0038] List of feature names corresponding to the labels in the figure:

[0039] 10. Base; 11. First base section; 12. Second base section; 13. Clearance space;

[0040] 21. First rotation adjustment assembly; 211. First sub-rotation assembly; 212. Second sub-rotation assembly; 22. Second rotation adjustment assembly; 23. Turntable body; 24. Turntable mounting shaft; 25. Turntable drive motor; 26. Second motor bracket;

[0041] 31. First translation adjustment assembly; 32. Second translation adjustment assembly; 33. Translation base; 34. Linear gradient filter; 35. Gear; 36. Gear drive motor; 37. Slide rail; 38. Slider; 39. First motor bracket; 310. Component support plate;

[0042] 40. Displacement adjustment assembly;

[0043] 51. Outgoing optical fiber; 52. Incoming optical fiber. Detailed Implementation

[0044] The present invention will now be described in further detail with reference to specific embodiments and accompanying drawings. Similar elements in different embodiments are referred to by associated similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of this application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to this application are not shown or described in the specification. This is to avoid obscuring the core parts of this application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0045] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments. At the same time, the steps or actions in the method description can be rearranged or adjusted in a manner obvious to those skilled in the art. Therefore, the various orders in the specification and drawings are only for the clear description of a particular embodiment and do not imply a necessary order, unless otherwise stated that a particular order must be followed.

[0046] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).

[0047] In embodiments of the present invention, the optical detection device is provided with at least two sets of translation adjustment components including first optical elements. The first optical elements have varying optical characteristics. When two different translation adjustment components are translated relative to each other, the first optical elements in those components can also be translated relative to each other. Thus, two first optical elements with varying optical characteristics can be combined to form different optical properties, thereby enabling the optical detection device to have richer optical adjustment functions. Simultaneously, using a translational first optical element avoids occupying excessive space, resulting in a compact structure that can be better integrated with the rotation adjustment components, achieving a wide range of optical adjustment functions.

[0048] Please refer to Figures 1 to 3In one embodiment, an adjustment device is used to perform optical processing on the optical path between the outgoing optical fiber 51 and the incoming optical fiber 52. It should be noted that in some other embodiments, the adjustment device of the present invention can also be used to perform optical processing on other optical paths. Additionally, in some other embodiments, the positions of the outgoing optical fiber 51 and the incoming optical fiber 52 can also be adjusted. The adjustment device includes a base 10 and a translation adjustment assembly, the translation adjustment assembly including a translation base 33 and a first optical element; the translation base 33 is configured to move on the base 10 in a translational manner, i.e., to be assembled on the base 10 in a translational manner, and the first optical element is disposed on the translation base 33; the first optical element has optical characteristic changes along the translation direction of the translation base 33, used to cut into the optical path of the adjustment device in a translational manner; the translation adjustment assembly has at least two sets, and the first optical elements in each set of the translation adjustment assembly are arranged side-by-side along the optical path direction, so as to combine to form different optical characteristics when the first optical elements are translated relative to each other, the translation direction intersecting the optical path direction of the adjustment device. The translation direction and the optical path direction of the adjustment device are arranged in an intersecting manner, allowing the light beam to pass sequentially through the first optical elements on the two sets of translation adjustment components, thereby processing the light beam twice. In such cases... Figure 1 In the embodiment shown, the translation direction is perpendicular to the optical path direction of the adjustment device. Those skilled in the art will understand that in some other embodiments, the translation direction and the optical path direction of the adjustment device may intersect in a non-perpendicular manner, for example, at an acute angle.

[0049] It should be noted that the change in optical characteristics of the first optical element refers to the gradual change in the element's own optical properties, such as different filtering wavelengths or optical transmittance at different locations on the element's surface, or a gradual change along the extension direction of the element. Different combinations of the first optical elements to form different optical characteristics refer to different optical performances, such as different filtering bandpass ranges or different precisions of optical transmittance.

[0050] To clearly illustrate the specific embodiments and technical solutions of the present invention, the following will use the term... Figure 1 The orientation indicated by the coordinate system is described, and the adjustment device has, for example, the orientation shown by the coordinate system. Figure 1 The top, bottom, left, right, front, and rear sides are shown. Of course, the above orientations do not limit the specific embodiments and technical solutions of the present invention to be arranged in this way.

[0051] In one embodiment, please refer to Figure 3The base 10 includes a first base portion 11 and a second base portion 12, which are arranged at intervals. In one specific embodiment, the base 10 includes a base plate and two support seats. The base plate is used to fix the adjustment device. The first base portion 11 and the second base portion 12 are formed by the two support seats, which are arranged on the base plate at intervals from left to right as shown in the figure. An outgoing optical fiber 51 and an incoming optical fiber 52 are fixed on the two support seats respectively. The light beam can be emitted from the outgoing optical fiber 51 and received by the incoming optical fiber 52. To achieve optical axis alignment of the two fiber heads of the outgoing optical fiber 51 and the incoming optical fiber 52, please refer to... Figure 1 , Figure 3 The adjustment device also includes a displacement adjustment component 40, which is used to perform three-dimensional movement adjustment of the fiber optic head used in the incident fiber 52. Of course, in some other embodiments, the displacement adjustment component 40 can also be used to perform three-dimensional movement adjustment of the fiber optic head used in the output fiber 51. The displacement adjustment component 40 can adopt any structure capable of adjusting the position of the fiber optic head; since it is not directly related to the technical solution to be protected by this invention, it will not be described in detail here. In other embodiments, the displacement adjustment component 40 can be omitted, and the output fiber 51 and the incident fiber 52 can be directly fixed by aligning their optical axes.

[0052] In one specific embodiment, please refer to Figure 3 and 4 Two sets of translation adjustment components are provided, and the two sets of translation adjustment components are disposed in the interval between the first seat portion 11 and the second seat portion 12. The two sets of translation adjustment components have the same structure, each including a slide rail 37 and a slider 38. The slide rail 37 is fixed to the base 10, and the slider 38 is configured to move along the extending direction of the slide rail 37. The translation base 33 is fixed to the slider 38. Please refer to... Figure 1 The slide rail 37 extends in the front-to-back direction, and the slider 38 can move in the front-to-back direction. Thus, the translation base 33 can translate on the base 10 via the slide rail 37 and the slider 38. In some other embodiments, depending on actual usage requirements, the number of translation adjustment components can be more than two sets, for example, three or four sets. Additionally, in some other embodiments, the translation base 33 can be directly mounted onto the base 10, for example, by providing a dovetail slide rail or a linear slide rail on the base 10, and a guide structure corresponding to the dovetail slide rail or linear slide rail on the translation base 33, directly realizing the translation movement. It should be noted that the guide structure is a structure that can constrain and guide the movement path of an object so that the object moves in a set direction, such as a dovetail groove adapted to a dovetail slide rail.

[0053] To drive the translation base 33, in one embodiment, the translation base 33 is provided with a rack structure. The translation adjustment assembly further includes a gear 35 and a gear drive motor 36. The gear drive motor 36 is connected to the gear 35 to drive the translation base 33 to translate. In a specific embodiment, the translation base 33 is a geared rail with the aforementioned rack structure on its top surface. The geared rail meshes with the gear 35, achieving a transmission accuracy of 0.1 mm. A first motor bracket 39 is fixed to the rear of both the first seat portion 11 and the second seat portion 12 of the base 10. A gear drive motor 36 is fixed to each of the first motor brackets 39. During operation, the gear 35 is directly driven to rotate by the gear drive motor 36, realizing the translation of the translation base 33 and the first optical element thereon. Of course, in some other embodiments, the translation adjustment assembly can also use other driving methods, such as a linear motor or an electric actuator.

[0054] In one embodiment, please refer to Figure 3 , Figure 4 The translation adjustment assembly further includes a component support plate 310, which is connected to the translation base 33 and extends along the translation direction of the translation base 33. The surface of the component support plate 310 has a window for the light path to pass through, and the window is used for snapping or bonding the first optical component. For one specific embodiment, please refer to... Figure 4 The component support plate 310 is rectangular, with its lower half fixed to the translation base 33, and its upper half having a rectangular opening as a window. The first optical element is sheet-shaped, with its edge fixed to the component support plate 310, and thus indirectly mounted on the translation base 33 via the component support plate 310 to move with the translation base 33. In some other embodiments, the first optical element can also be directly fixed to the translation base 33.

[0055] In one embodiment, the first optical element in at least two sets of the translation adjustment components is configured as a linear graded filter 34, which has a gradually changing filtering capability along the linear extension direction of the filter. This results in the linear graded filter 34 exhibiting optical characteristic changes (such as a gradually changing filtering wavelength) in the translation direction. The filtering capability ranges of the linear graded filters 34 in different sets are different, and there is some overlap in the filtering capability ranges. A linear graded filter 34 (LVF) is an optical device whose spectral characteristics change linearly with position, possessing a nearly continuous spectral channel, and achieving high spectral resolution through spectral dispersion. In a specific embodiment, the linear graded filters 34 configured in at least one set of translation adjustment components are short-pass filters (e.g., 0-400 nm), and the linear graded filters 34 configured in at least one set of translation adjustment components are long-pass filters (e.g., 300-600 nm). In this way, by reasonably moving the two linear graded filters 34, a suitable bandpass filtering range can be selected within the constraint range of 300-400nm, achieving different levels of filter adjustment. This results in different optical characteristics (such as different bandpass filtering ranges) when each linear graded filter 34 is relatively translated. It should be noted that in some other embodiments, the first optical element can also be in other forms, such as an attenuator, depending on the optical processing requirements. In one embodiment, please refer to... Figure 1 and Figure 2 The translation bases 33 in the two sets of translation adjustment assemblies are arranged side by side, and the two first optical elements in the two sets of translation adjustment assemblies are disposed on the side of the two translation bases 33 that are close to each other. Specifically, each element support plate 310 forms an offset structure relative to the corresponding translation base 33, and the element support plates 310 in the two sets of translation adjustment assemblies are fixed on the side of the two translation bases 33 that are close to each other, which can save space and make the structure compact. In order to save more space and better realize the integration of translation adjustment assembly and rotation adjustment assembly, in one embodiment, the first seat part 11 and / or the second seat part 12 are provided with a clearance space 13 on the side near the interval, and at least a part of at least one translation base 33 is located within the clearance space 13. In a specific embodiment, please refer to Figure 1 and Figure 3 Observing along the front and back direction, it is located at Figure 1The second seat portion 12 on the right side has an L-shaped structure, forming a clearance space 13 at the lower left. The slide rail 37, slider 38, and toothed rail of the corresponding set of translation adjustment components are all located within the clearance space 13, which helps to reduce the overall size of the adjustment device in the left-right direction. It should be noted that in some other embodiments, the clearance space 13 is not a necessary structure. In addition, in some other embodiments, the translation adjustment components and / or rotation adjustment components can also be located on the side of the first seat portion 11 or the second seat portion 12 opposite to the interval.

[0056] In one embodiment, please refer to Figure 3 The adjustment device also includes a rotation adjustment assembly, which includes a turntable body 23 and a second optical element. The turntable body 23 is rotatably mounted on the base 10. The second optical element is disposed on the turntable body 23 and distributed around the rotation axis of the turntable body 23. The second optical element has optical characteristic changes around the rotation axis of the turntable body 23, and is used to cut into the optical path according to the rotation mode.

[0057] In one embodiment, see Figure 1 The base 10 includes a first seat portion 11 and a second seat portion 12, which are arranged at intervals and both serve to support the rotation adjustment components. The rotation adjustment components can be configured as one or more groups, allowing the turntable bodies of each rotation adjustment component to be arranged within the interval between the first seat portion 11 and the second seat portion 12. Furthermore, the first seat portion 11 and / or the second seat portion 12 have a clearance space 13 on the side near the interval, and at least a portion of at least one translational base is located within this clearance space 13.

[0058] In one embodiment, multiple sets of the rotation adjustment components are arranged side-by-side along the optical path. In a specific embodiment, two sets of rotation adjustment components are provided, each set including a turntable mounting shaft 24 for fixed mounting of the turntable body 23. The two turntable mounting shafts 24 are arranged with their end faces facing each other, and the turntable body 23 in each set of rotation adjustment components is fixed to the ends of the two turntable mounting shafts 24 that are close to each other. In a specific embodiment, both sets of rotation adjustment components include a turntable drive motor 25, which is coaxially arranged with and driven by the turntable mounting shaft 24 to drive the turntable body 23 to rotate. Both the first base portion 11 and the second base portion 12 of the base 10 have a second motor bracket 26 fixed at their front. Each second motor bracket 26 has a turntable drive motor 25 fixed to it. The shaft of the turntable drive motor 25 extends in the left-right direction, and its end passes through the second motor bracket 26. The turntable body 23 is fixed to the end of the shaft of the turntable drive motor 25 via a turntable mounting shaft 24 to achieve rotational assembly. It should be noted that, depending on the optical processing requirements, only one set of rotation adjustment components may be provided. Additionally, in some other embodiments, the turntable body 23 may be directly fixed to the shaft of the turntable drive motor 25, using the shaft of the turntable drive motor 25 as the turntable mounting shaft.

[0059] In one embodiment, the second optical element is configured as a plurality of attenuators or filters with different optical properties, which are uniformly distributed around the rotation axis of the turntable body 23, thereby causing the second optical element to have varying optical properties (such as a gradually changing filter wavelength or a gradually changing optical transmittance) around the rotation axis. In a specific embodiment, please refer to... Figure 1 The left-hand rotating disk body 23 has attenuation filters with different attenuation characteristics (such as attenuation filters with transmittances of 0.1, 0.2, ..., 1.0) arranged in a ring, while the right-hand rotating disk body 23 has filters with different filtering performances (such as filters with wavelengths around 200nm, 300nm, ..., 800nm). It should be noted that, in order to create the ring-shaped variation of different optical characteristics, depending on the structure of the second optical element, the second optical element can be a single sheet or a discrete arrangement. For example, for... Figure 1 Middle left ( Figure 2 , Figure 3 The rotation adjustment assembly (on the right side) has a second optical element that is a circular plate with fan-shaped sections distributed along the circumference. Different fan-shaped sections have different optical characteristics; for example, for Figure 1 Middle right ( Figure 2 , Figure 3The rotating adjustment component (left side) has openings distributed along the circumference on its turntable body 23. Different optical filters with different optical properties are set in different openings to form a ring-shaped change with different optical characteristics.

[0060] In one embodiment, the rotation adjustment assembly is provided in multiple sets and arranged side by side along the optical path direction. Along the axial direction of the turntable body 23, the first optical element in each translation adjustment assembly is located on the same side of all the turntable bodies 23 and is adjacent to the turntable body 23. Taking the case with two sets of rotation adjustment assemblies as an example, the turntable bodies 23 in the two sets of rotation adjustment assemblies are close to each other and simultaneously located on the left side of the interval formed by the first seat portion 11 and the second seat portion 12. The first optical elements in the two translation adjustment assemblies are simultaneously located on the right side of the interval formed by the first seat portion 11 and the second seat portion 12, and on the right side of the two turntable bodies 23, while also being adjacent to the turntable bodies 23. This arrangement of the first optical element and the turntable body 23 fully utilizes the space formed by the first seat portion 11 and the second seat portion 12, resulting in a compact structure that facilitates volume control. In some other embodiments, the two turntable bodies 23 and the two component support plates 310 can also be arranged in other ways, such as alternating between them, or the two turntable bodies 23 can be placed between the two component support plates 310, or the two component support plates 310 can be placed between the two turntable bodies 23.

[0061] In other embodiments, at least two sets of the rotation adjustment assemblies have their turntable mounting shafts 24 arranged side by side, and the turntable bodies 23 are respectively fixed on the same axial side of the two turntable mounting shafts 24, wherein the turntable mounting shaft 24 of one set of the rotation adjustment assemblies passes radially outward from the turntable body 23 of the other set of the rotation adjustment assemblies. In one specific embodiment, please refer to... Figure 5 , Figure 1The rotation adjustment assembly on the right side is divided into two sub-rotation assemblies: a first sub-rotation assembly 211 and a second sub-rotation assembly 212. The turntable mounting shafts 24 of the first and second sub-rotation assemblies 211 and 212 are arranged side-by-side with their end faces facing the same direction. A turntable body 23 is fixed to the end of each of the two turntable mounting shafts 24. Attenuation plates with different performance are arranged in a ring on each turntable body 23. That is, the adjustment device includes two sets of rotation adjustment assemblies equipped with the attenuation plates. The attenuation plates have varying attenuation characteristics around the rotation axis of the turntable body 23. The two sets of rotation adjustment assemblies equipped with the attenuation plates are used to combine different light transmittances. The rotation switching of the two sets of attenuators can expand the attenuation capability of the beam. For example, after the first sub-rotation component 211 is configured, the light transmittance can be configured as n*n (n is the number of attenuators carried by a single sub-rotation component), such as achieving a transmittance of 0.1*0.1=0.01 or 0.2*0.6=0.12. In this way, each combination of second optical elements can form different optical characteristics (such as different optical transmittance accuracies).

[0062] During operation, based on the light source adjustment requirements, the light emitted from the outgoing fiber 51 can achieve filtering adjustment when passing through the translation adjustment component and / or rotation adjustment component in the adjustment device. This allows for different bandpass filtering adjustments, while the light can achieve both filtering and attenuation adjustments when passing through the rotation adjustment component. This overall capability satisfies a wide range of filtering adjustment needs. Furthermore, the translation adjustment component uses a linear graded filter 34 as its first optical element, achieving high spectral resolution and a more continuous combination of optical performance, thus enriching the application scenarios of the optical detection device.

[0063] Embodiments of the optical detection device in this invention:

[0064] An optical inspection device includes: a light source for generating inspection light; an adjustment device, which is the adjustment device described in any of the above embodiments, and is at least used to adjust the optical characteristics of the inspection light to change its transmission performance to an optical path device; an optical path device for processing the inspection light that has passed through the adjustment device; and a detection unit for receiving the inspection light to inspect an object. The light source, optical path device, and detection unit can all employ existing structures, and will not be described in detail here.

[0065] The above examples illustrate the present invention only to aid in understanding it and are not intended to limit the scope of the invention. Those skilled in the art can make various simple deductions, modifications, or substitutions based on the principles of this invention.

Claims

1. An adjusting device, characterized in that The application relates to an optical adjustment device, comprising: a base; and a translation adjustment assembly, which comprises a translation base and a first optical element; the translation base is configured to move on the base in a translation mode, and the first optical element is arranged on the translation base; the first optical element has optical property variation along a translation direction of the translation base, and is used for cutting into the optical path of the adjustment device in a translation mode, wherein the translation direction intersects with the optical path direction of the adjustment device; the translation adjustment assembly is provided with at least two groups, including a first translation adjustment assembly and a second translation adjustment assembly, and the first optical elements in each group of the translation adjustment assembly are arranged side by side along the optical path direction, so as to combine to form different optical properties when the first optical elements relatively translate; the adjustment device further comprises a first rotation adjustment assembly and a second rotation adjustment assembly, and the first rotation adjustment assembly and the second rotation adjustment assembly comprise a rotating disc body and a second optical element; the rotating disc body is rotationally arranged on the base, the second optical element is arranged on the rotating disc body and is distributed around the rotation axis of the rotating disc body; the second optical element has optical property variation around the rotation axis of the rotating disc body, and is used for cutting into the optical path in a rotation mode; the base comprises a first seat body part and a second seat body part, the first seat body part is used for bearing the first rotation adjustment assembly, and the second seat body part is used for bearing the second rotation adjustment assembly; the rotating disc bodies of the first rotation adjustment assembly and the second rotation adjustment assembly are arranged in a space between the first seat body part and the second seat body part; the first seat body part and / or the second seat body part are provided with a clearance space on the side close to the space, and at least a part of the translation base is located in the clearance space.

2. The adjustment device of claim 1, wherein The first optical elements in at least two groups of the translation adjustment assembly are configured as linear gradient filters, the filtering capacity ranges of the linear gradient filters are different, and there is partial intersection in the filtering capacity ranges.

3. The adjustment device of claim 2, wherein The linear gradient filter configured in at least one group of the translation adjustment assembly is a short-pass filter, and the linear gradient filter configured in at least one group of the translation adjustment assembly is a long-pass filter.

4. Adjusting device according to claim 1 or 2 or 3, characterized in that The translation adjustment assembly is provided with two groups, the translation bases in the two groups of the translation adjustment assembly are arranged side by side, and the two first optical elements in the two groups of the translation adjustment assembly are arranged on the side close to each other of the two translation bases.

5. The adjustment device of claim 1 or 2 or 3, wherein The translation base is provided with a rack structure, the translation adjustment assembly further comprises a gear and a gear driving motor, and the gear driving motor is connected with the gear to drive the translation base to translate.

6. The adjustment device of claim 5, wherein, The application further comprises a slide rail and a slide block, the slide rail is fixed on the base, the slide block is configured to move along the extension direction of the slide rail, and the translation base is fixed on the slide block.

7. The adjustment device of claim 1 or 2 or 3, wherein, The translation adjustment assembly further comprises an element supporting plate, the element supporting plate is connected on the translation base and extends along the translation direction of the translation base, the surface of the element supporting plate is provided with a window for the optical path to pass through, and the window is used for clamping or bonding the first optical element.

8. The adjustment device of claim 1 or 2 or 3, wherein, The second optical element is configured as a plurality of attenuation pieces or filters with different optical properties, each of which is uniformly distributed around the rotation axis of the rotating disc body.

9. The adjustment device of claim 8, wherein, The rotation adjustment assembly includes two sets of the attenuation pieces with varying attenuation properties around the rotation axis of the rotating disc body, and the two sets of the attenuation pieces are used to combine different light transmittances.

10. The adjustment device of claim 1 or 2 or 3, wherein, The rotation adjustment assembly is provided with a plurality of sets of the translation adjustment assemblies arranged side by side in the light path direction, and in the axial direction of the rotating disc body, the first optical element in each of the translation adjustment assemblies is located on the same side of the rotating disc body and adjacent to the rotating disc body.

11. The adjustment device of claim 1 or 2 or 3, wherein, The rotation adjustment assembly is provided with two sets of the rotation adjustment assemblies, each of which includes a rotating disc mounting shaft for fixedly mounting the rotating disc body, and the two rotating disc mounting shafts are arranged in a form of facing end surfaces, and the rotating disc body in each of the two sets of the rotation adjustment assemblies is fixed at one end of the rotating disc mounting shaft close to each other.

12. The adjustment device of claim 1 or 2 or 3, wherein, The rotation adjustment assembly includes a rotating disc mounting shaft for fixedly mounting the rotating disc body, and the rotating disc mounting shafts of at least two sets of the rotation adjustment assemblies are arranged side by side and the rotating disc body is fixed at the axial same side of the two rotating disc mounting shafts, wherein the rotating disc mounting shaft in one set of the rotation adjustment assemblies passes from the radial outside of the rotating disc body in another set of the rotation adjustment assemblies.

13. The adjustment device of claim 1 or 2 or 3, wherein, The rotation adjustment assembly includes a rotating disc driving motor coaxially arranged and drivingly connected with the rotating disc mounting shaft, for driving the rotating disc body to rotate.

14. An optical detection device, characterized in that Comprising: a light source for generating detection light; an adjustment device according to any one of claims 1 to 13, the adjustment device being used at least for adjusting the optical properties of the detection light to change the transmission performance of the detection light into the light path device; a light path device for processing the detection light that has passed through the adjustment device; and a detection unit for receiving the detection light to detect the object under test.

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