Optical chip with reconfigurable link

Abstract

The invention discloses a link reconfigurable optical chip. The chip comprises a plurality of transverse optical waveguide buses and a plurality of longitudinal optical waveguide buses, the two ends of the transverse optical waveguide bus or the longitudinal optical waveguide bus are connected with grating coupler ports; an MEMS switching device is arranged in a cross connection area of each transverse optical waveguide bus and each longitudinal optical waveguide bus, so that the plurality of MEMS switching devices are arranged in matrix rows and columns; a coupling waveguide is arranged in each MEMS switching device, and link switching is carried out on optical signals through the coupling waveguides by controlling the opening and closing states of the MEMS switching devices, so that access from any grating coupler port to any grating coupler port is realized. Compared with a traditional Cross-Bar structure, under the condition that extra nodes are not increased, the port connection multiple is doubled, and the random addressing function of the on-chip port is achieved.

Description

Technical Field

[0001] The invention relates to a link reconfigurable optical chip, belonging to the technical field of optical chips. Background Art

[0002] Photonic integrated chips have advantages that cannot be ignored in the field of information transmission and processing, so they are widely used in applications such as communications, data centers, and quantum information processing. Among them, optical routing technology arranges multiple optical switches in a certain topological structure to achieve the switching of optical paths, thereby realizing the routing function of optical signals. At present, the well-known Cross-Bar structure is mainly composed of 1×2 optical switches, and the Pi-Loss structure is mainly composed of 2×2 optical switches. However, with the increase in input and output points, the number of crosspoints of Cross-Bar has also expanded rapidly, resulting in increased hardware complexity. The Pi-Loss structure cannot realize the connection between any input and any port, which makes the connection performance relatively low. Summary of the invention

[0003] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a link reconfigurable optical chip that implements the access function from any port to any port through MEMS switch devices in different arrangements and combinations.

[0004] To achieve the above object, the present invention is implemented by adopting the following technical solutions: The present invention discloses a link reconfigurable optical chip, the chip comprising a plurality of transverse optical waveguide buses and a plurality of longitudinal optical waveguide buses; both ends of the transverse optical waveguide buses or the longitudinal optical waveguide buses are connected with grating coupler ports; A MEMS switch device is provided in the cross-connection area between each transverse optical waveguide bus and each longitudinal optical waveguide bus, so that multiple MEMS switch devices are arranged in rows and columns in a matrix; a coupling waveguide is provided in each MEMS switch device, and by controlling the opening and closing state of the MEMS switch device, the optical signal is switched through the coupling waveguide to achieve access from any grating coupler port to any grating coupler port.

[0005] Furthermore, the MEMS switch devices are arranged in a matrix with M rows and N columns, and the number of the MEMS switch devices is M*N, where M and N are both integers, and M≥2, N≥2; Among them, the MEMS switch devices located around the matrix, except for the MEMS switch devices in the 1st row and the Nth column and the 1st row and the Nth column, the directions of the coupling waveguides on the other MEMS switch devices are the same.

[0006] Further, the MEMS switch device includes an upper port, a lower port, a left port and a right port; the coupling waveguide includes a first coupling waveguide and a second coupling waveguide; When the direction of the coupling waveguide is left-slanting, the first coupling waveguide is arranged between the upper port and the left port, and the second coupling waveguide is arranged between the lower port and the right port; the right port serves as the Cross end of the left port and the Bar end of the lower port, and the upper port serves as the Bar end of the left port and the Cross end of the lower port; When the direction of the coupling waveguide is right-slanting, the first coupling waveguide is arranged between the upper port and the right port, and the second coupling waveguide is arranged between the lower port and the left port; the right port serves as the Cross end of the left port and the Bar end of the upper port, and the lower port serves as the Bar end of the left port and the Cross end of the upper port; In response to the state of the MEMS switch device being on, the optical signal propagates in the Bar end; otherwise, the optical signal propagates in the Cross end.

[0007] Furthermore, the chip also includes N upper electrode circuits and M*N lower electrode circuits; Each upper electrode circuit is connected to an upper electrode of a corresponding MEMS switch device; each lower electrode circuit is connected to a lower electrode of a corresponding MEMS switch device; A voltage is applied to the upper electrode through the upper electrode circuit, and / or a voltage is applied to the lower electrode through the lower electrode circuit to control the opening and closing state of the MEMS switch device.

[0008] Furthermore, the transverse optical waveguide bus is connected to the longitudinal optical waveguide bus via a cross junction, and the number of the cross junctions is M*N.

[0009] Furthermore, coupling calibration input ports and coupling calibration output ports are provided on both sides of the chip to achieve coupling calibration when the chip receives and transmits optical signals with the outside world.

[0010] Furthermore, the coupling waveguide is a 90° bent coupling waveguide.

[0011] Furthermore, the MEMS switch device includes a 2×2 Si-Photonics MEMS actuator.

[0012] Compared with the prior art, the present invention has the following beneficial effects: The link reconfigurable optical chip of the present invention provides a new optical switch device array architecture mode, which realizes the access function from any port to any port through MEMS switch devices with different arrangements and combinations. Compared with the traditional Cross-Bar structure, the port connection multiple is increased by 1 times without adding additional nodes, thereby realizing the arbitrary addressing function of the on-chip port. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is a schematic diagram of the structure of the link reconfigurable optical chip provided in Example 1; Figure 2 is a schematic diagram of the structure of an 8×8 link reconfigurable optical chip provided in Example 2; Figure 3 is a structural detail diagram of an 8×8 link reconfigurable optical chip provided in Example 2; Figure 4 is a schematic diagram of the overall waveguide structure of an 8×8 link reconfigurable optical chip provided in Example 2; Figure 5 is a schematic structural diagram of a MEMS switch device provided in Example 2; Figure 6 is a schematic diagram of an upper electrode circuit and a lower electrode circuit provided in Example 2; In the figure: 1, optical waveguide bus; 2, MEMS switch device; 3, upper electrode circuit; 4, lower electrode circuit; 11, grating coupler port; 12, cross junction; 21, upper electrode; 22, lower electrode; 23, plate; 24, coupled waveguide; 241, first coupled waveguide; 242, second coupled waveguide; 25, upper port; 26, lower port; 27, left port; 28, right port. DETAILED DESCRIPTION

[0014] The present invention will be further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention. Example 1

[0015] This embodiment 1 discloses a link reconfigurable optical chip, the chip includes a plurality of transverse optical waveguide buses 1 and a plurality of longitudinal optical waveguide buses 1; both ends of the transverse optical waveguide buses 1 or the longitudinal optical waveguide buses 1 are connected to grating coupler ports 11; A MEMS switch device 2 is provided in the cross-connection area between each transverse optical waveguide bus 1 and each longitudinal optical waveguide bus 1, so that multiple MEMS switch devices 2 are arranged in a matrix of rows and columns; each MEMS switch device 2 is provided with a coupling waveguide 24, and by controlling the opening and closing state of the MEMS switch device 2, the optical signal switches the path through the coupling waveguide 24, thereby realizing access from any grating coupler port 11 to any grating coupler port 11.

[0016] The technical concept of the present invention is: the link reconfigurable optical chip of the present invention provides a new optical switch device array architecture mode, which realizes the access function from any port to any port through MEMS switch devices 2 with different arrangements and combinations. Compared with the traditional Cross-Bar structure, the port connection multiple is increased by 1 times without adding additional nodes, thereby realizing the arbitrary addressing function of the on-chip port.

[0017] Specifically, Figure 1 As shown, the MEMS switch devices 2 are arranged in a matrix with M rows and N columns, and the number of the MEMS switch devices 2 is M*N, where M and N are both integers, and M≥2, N≥2; Among them, among the MEMS switch devices 2 located around the matrix, except for the MEMS switch devices 2 in the 1st row and the Nth column and the 1st row and the Nth column, the directions of the coupling waveguides 24 on the other MEMS switch devices 2 are the same.

[0018] like Figure 1 As shown, there are 2 (M+N) grating coupler ports 11, which are: .

[0019] The MEMS switch device 2 includes an upper port 25, a lower port 26, a left port 27 and a right port 28; the coupling waveguide 24 includes a first coupling waveguide 241 and a second coupling waveguide 242; When the direction of the coupling waveguide 24 is oblique to the left, the first coupling waveguide 241 is arranged between the upper port 25 and the left port 27, and the second coupling waveguide 242 is arranged between the lower port 26 and the right port 28; the right port 28 serves as the Cross end of the left port 27 and the Bar end of the lower port 26, and the upper port 25 serves as the Bar end of the left port 27 and the Cross end of the lower port 26; When the direction of the coupling waveguide 24 is right-slanting, the first coupling waveguide 241 is arranged between the upper port 25 and the right port 28, and the second coupling waveguide 242 is arranged between the lower port 26 and the left port 27; the right port 28 serves as the Cross end of the left port 27 and the Bar end of the upper port 25, and the lower port 26 serves as the Bar end of the left port 27 and the Cross end of the upper port 25; In response to the state of the MEMS switch device 2 being on, the propagation direction of the optical signal is the Bar end; otherwise, the electrostatic force MEMS actuator is suspended above the main waveguide, and the propagation direction of the optical signal along the main waveguide is the Cross end.

[0020] The chip also includes N upper electrode circuits 3 and M*N lower electrode circuits 4; Each upper electrode circuit 3 is respectively connected to an upper electrode 21 of a corresponding column of MEMS switch devices 2; each lower electrode circuit 4 is connected to a lower electrode of a corresponding MEMS switch device 2; A voltage is applied to the upper electrode 21 through the upper electrode circuit 3 , and / or a voltage is applied to the lower electrode 22 through the lower electrode circuit 4 , so as to control the opening and closing state of the MEMS switch device 2 .

[0021] Furthermore, the transverse optical waveguide bus 1 is connected to the longitudinal optical waveguide bus 1 via a cross junction 12 , and the number of the cross junctions 12 is M*N.

[0022] Furthermore, coupling calibration input ports and coupling calibration output ports are provided on both sides of the chip to achieve coupling calibration when the chip receives and transmits optical signals with the outside world.

[0023] Specifically, the coupling waveguide 24 in this embodiment is a 90° bent coupling waveguide 24. The MEMS switch device 2 uses a 2×2 Si-Photonics MEMS actuator.

[0024] A 90° bent coupling waveguide 24 is added to the movable cantilever structure of the integrated 2×2 Si-Photonics MEMS actuator. The displacement of the MEMS actuator is controlled by applying voltage to the upper and lower electrodes 22, and the optimized design realizes adiabatic spatial coupling with the top silicon waveguide. The MEMS actuator realizes the opening and closing of the optical path through the position change generated by the electrostatic force, and adjusts the size of the air gap through the mechanical movement driven by electrostatics to achieve the switch conversion between the "down" conduction state and the "up" cutoff state, thereby realizing the spatial coupling of light waves and achieving the application function of switching the optical path.

[0025] Therefore, the link reconfigurable optical chip structure constructed by the present invention can control the switching state of the corresponding MEMS switch device 2 through electrical signals, so that the optical signal of the input port can be output from the specified output port, and the link switching function can be realized by controlling one or more optical switches, thereby realizing link reconstruction from any port to other ports.

[0026] The invention creates a breakthrough in the chip optical path, circuit design and architecture layout in which the selected port can access any port. This design can improve the port utilization efficiency of a multi-port chip based on a 2×2 optical switch as a unit. Example 2

[0027] This embodiment 2 provides an 8×8 link reconfigurable optical chip, such as Figure 2-6 There are 32 grating coupler ports 11 , and 64 MEMS switch devices 2.

[0028] like Figure 4 As shown, coupling calibration input ports and coupling calibration output ports are also provided on both sides of the chip to realize coupling calibration when the chip receives and transmits optical signals with the outside world.

[0029] like Figure 5 As shown, the MEMS switch device 2 includes an upper electrode 21, a lower electrode 22, a plate 23 and a coupling waveguide 24. The upper electrode 21 and the lower electrode 22 are arranged on the plate 23. In this embodiment, a 90° bent coupling waveguide 24 is used, which is represented as . Among them, the MEMS switch devices 2 located around the matrix, except for the coupling waveguides 24 of the MEMS switch devices 2 in the 1st row and 8th column and the 1st row and 8th column, which are slanted to the right, the directions of the coupling waveguides 24 on the other MEMS switch devices 2 are the same, all slanted to the left. In this embodiment, the directions of the coupling waveguides 24 on the internal MEMS switch devices 2 are the same, also slanted to the left. Among them, the directions of the coupling waveguides 24 on the internal MEMS switch devices 2 can be designed according to actual conditions and are not limited here.

[0030] like Figure 3 and Figure 6 As shown, it includes 8 upper electrode circuits 3 and 64 lower electrode circuits 4, wherein #1 to #8 are control numbers of the upper electrode circuits 3, and 1-1 to 8-8 are control numbers of the lower electrode circuits 4.

[0031] Any port can be accessed randomly through different optical transmission paths, and the optical path after specifying the input and output ports is not unique. Assume that the input port is X 1 , the technical solutions for different output ports are as follows: Expected output port is X 2 When voltages are applied to the upper electrode circuit #8 and the lower electrode circuits 1-8 and 2-8, the optical signal switches the path through the 1 / 8 and 2 / 8 90° bent coupling waveguides 24 to reach the port X. 2 . Output port X 3 -X 8 The path mode is the same, voltage is applied to the upper electrode circuit #8 and the lower electrode circuit 1-8 respectively, and the corresponding ports are powered on the lower electrode circuits 3-8, 4-8, 5-8, 6-8, 7-8, and 8-8 respectively. The optical signal switches the path through the 90° bent coupling waveguide 24 of 1 / 8 and 3 / 8, 4 / 8, 5 / 8, 6 / 8, 7 / 8, and 8 / 8 to reach the corresponding output port.

[0032] The expected output port is Y 1 When voltages are applied to the upper electrode circuit #1 and the lower electrode circuit 1-1, the optical signal switches the path through the 1 / 1 90° bent coupling waveguide 24 and reaches the port Y. 1 Output port Y 2 -Y 7The path modes are the same, and the corresponding ports are powered on respectively, the upper electrode circuit #2 and the lower electrode circuit 1-2, the upper electrode circuit #3 and the lower electrode circuit 1-3, the upper electrode circuit #4 and the lower electrode circuit 1-4, the upper electrode circuit #5 and the lower electrode circuit 1-5, the upper electrode circuit #6 and the lower electrode circuit 1-6, the upper electrode circuit #7 and the lower electrode circuit 1-7, and the optical signal reaches the corresponding output port through the 90° bent coupling waveguide 24 switching paths of 1 / 1 and 1 / 2, 1 / 3, 1 / 4, 1 / 5, 1 / 6, 1 / 7 / .

[0033] Output port is Y 8 When voltages are applied to upper electrode circuit #8, lower electrode circuit 1-8, lower electrode circuit 8-8, upper electrode circuit #1, lower electrode circuit 8-1, lower electrode circuit 7-1, and lower electrode circuit 7-8, respectively, the optical signal switches the path through the 90° bent coupling waveguide 24 of 1 / 8, 8 / 8, 8 / 1, 7 / 1, and 7 / 8 to reach port Y. 8 .

[0034] Expected output port is X 2 ', voltages are applied to upper electrode circuit #8, lower electrode circuit 1-8, lower electrode circuit 2-8, upper electrode circuit #1, lower electrode circuit 2-1, lower electrode circuit 8-1, and lower electrode circuit 8-8 respectively, and the optical signal switches the path through the 90° bent coupling waveguide 24 of 1 / 8, 2 / 8, 2 / 1, 8 / 1, 8 / 8, and 2 / 8 to reach port X 2 '; Output port is X 3 '- X 7 ', voltages are applied to upper electrode circuit #8, lower electrode circuit 1-8, lower electrode circuit 2-8, upper electrode circuit #1, lower electrode circuit 2-1, lower electrode circuit 8-1, and lower electrode circuit 8-8 respectively, and corresponding ports are powered on 3-8, 4-8, 5-8, 6-8, and 7-8 respectively, and optical signals switch paths through 1 / 8, 2 / 8, 2 / 1, 8 / 1, 8 / 8, 3 / 8, or 4 / 8, or 5 / 8, or 6 / 8, or 7 / 8 90° bent coupling waveguide 24 to reach corresponding ports; Output port is X 8 ', voltages are applied to upper electrode circuit #8, lower electrode circuit 1-8, lower electrode circuit 7-8, upper electrode circuit #1, lower electrode circuit 7-1, and lower electrode circuit 8-1, respectively, and the optical signal switches the path through the 90° bent coupling waveguides 24 of 1 / 8, 7 / 8, 7 / 1, and 8 / 1 to reach port X 8 '; Output port X 1 'For port X 1 The cross end does not need to be powered.

[0035] The expected output port is Y2 ', voltages are applied to the upper electrode circuit #8, the lower electrode circuit 1-8, the lower electrode circuit 8-8, the upper electrode circuit #2, and the lower electrode circuit 8-2, respectively, and the optical signal switches the path through the 90° bent coupling waveguide 24 of 1 / 8, 8 / 8, and 8 / 2 to reach the port Y 2 '; Output port is Y 3 ' -Y 7 ', voltages are applied to the upper electrode circuit #8, the lower electrode circuit 1-8, and the lower electrode circuit 8-8 respectively, and the corresponding ports are powered on the upper electrode circuit #3 and the lower electrode circuit 8-3, the upper electrode circuit #4 and the lower electrode circuit 8-4, the upper electrode circuit #5 and the lower electrode circuit 8-5, the upper electrode circuit #6 and the lower electrode circuit 8-6, the upper electrode circuit #7 and the lower electrode circuit 8-7 respectively, and the optical signal switches the path through the 90° bent coupling waveguide 24 of 1 / 8, 8 / 8, 8 / 3 or 8 / 4 or 8 / 5 or 8 / 6 or 8 / 7 to reach the corresponding port; Output port is Y 1 ', voltages are applied to the upper electrode circuit #8, the lower electrode circuit 1-8, the lower electrode circuit 2-8, the upper electrode circuit #1, and the lower electrode circuit 2-1, respectively, and the optical signal switches the path through the 90° bent coupling waveguide 24 of 1 / 8, 2 / 8, and 2 / 1 to reach the port Y 1 ', and can also switch from 3, 4, 5, 6, 7 lines of light path; Output port is Y 8 ', voltages are applied to the upper electrode circuit #8 and the lower electrode circuit 1-8 respectively, and the optical signal switches the path through the 1 / 8 90° bent coupling waveguide 24 to reach the port Y 8 '.

[0036] The optical switching paths of the remaining input ports can be analogized in this way, and the selected port can be accessed at will.

[0037] In summary, by applying voltage to the upper and lower electrodes 22 to control the displacement of the MEMS actuator, the optimized design is realized to achieve adiabatic spatial coupling with the top silicon waveguide. The MEMS actuator realizes the opening and closing of the optical path through the position change generated by the electrostatic force, and adjusts the size of the air gap through the mechanical movement driven by electrostatics to achieve the switch conversion between the "down" conduction state and the "up" cutoff state, thereby realizing the spatial coupling of light waves and achieving the application function of switching the optical path.

[0038] The invention creates a breakthrough in the chip optical path, circuit design and architecture layout in which the selected port can access any port. This design can improve the port utilization efficiency of a multi-port chip based on a 2×2 optical switch as a unit.

[0039] Those skilled in the art will appreciate that the embodiments of the present application may be provided as methods, systems, or computer program products. Therefore, the present application may adopt the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Moreover, the present application may adopt the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program codes.

[0040] The present application is described with reference to the flowcharts and / or block diagrams of the methods, devices (systems), and computer program products according to the embodiments of the present application. It should be understood that each process and / or box in the flowchart and / or block diagram, as well as the combination of the processes and / or boxes in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0041] These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0042] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing instructions for implementing the process. Figure 1 A process or multiple processes and / or boxes Figure 1 A step that specifies a function in one or more boxes.

[0043] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A link reconfigurable optical chip, characterized in that: The chip comprises a plurality of transverse optical waveguide buses and a plurality of longitudinal optical waveguide buses; both ends of the transverse optical waveguide buses or the longitudinal optical waveguide buses are connected with grating coupler ports; A MEMS switch device is provided in the cross-connection area between each transverse optical waveguide bus and each longitudinal optical waveguide bus, so that multiple MEMS switch devices are arranged in rows and columns in a matrix; a coupling waveguide is provided in each MEMS switch device, and by controlling the opening and closing state of the MEMS switch device, the optical signal is switched through the coupling waveguide to achieve access from any grating coupler port to any grating coupler port.

2. The link reconfigurable optical chip according to claim 1, characterized in that: The MEMS switch devices are arranged in a matrix with M rows and N columns, the number of the MEMS switch devices is M*N, M and N are both integers, and M≥2, N≥2; Among them, the MEMS switch devices located around the matrix, except for the MEMS switch devices in the 1st row and the Nth column and the 1st row and the Nth column, the directions of the coupling waveguides on the other MEMS switch devices are the same.

3. The link reconfigurable optical chip according to claim 2, characterized in that: The MEMS switch device includes an upper port, a lower port, a left port and a right port; the coupling waveguide includes a first coupling waveguide and a second coupling waveguide; When the direction of the coupling waveguide is left-slanting, the first coupling waveguide is arranged between the upper port and the left port, and the second coupling waveguide is arranged between the lower port and the right port; the right port serves as the Cross end of the left port and the Bar end of the lower port, and the upper port serves as the Bar end of the left port and the Cross end of the lower port; When the direction of the coupling waveguide is right-slanting, the first coupling waveguide is arranged between the upper port and the right port, and the second coupling waveguide is arranged between the lower port and the left port; the right port serves as the Cross end of the left port and the Bar end of the upper port, and the lower port serves as the Bar end of the left port and the Cross end of the upper port; In response to the state of the MEMS switch device being on, the optical signal propagates in the Bar end; otherwise, the optical signal propagates in the Cross end.

4. The link reconfigurable optical chip according to claim 3, characterized in that: The chip also includes N upper electrode circuits and M*N lower electrode circuits; Each upper electrode circuit is connected to an upper electrode of a corresponding MEMS switch device; each lower electrode circuit is connected to a lower electrode of a corresponding MEMS switch device; A voltage is applied to the upper electrode through the upper electrode circuit, and / or a voltage is applied to the lower electrode through the lower electrode circuit to control the opening and closing state of the MEMS switch device.

5. The link reconfigurable optical chip according to claim 2, characterized in that: The transverse optical waveguide bus is connected to the longitudinal optical waveguide bus via a cross junction, and the number of the cross junctions is M*N.

6. The link reconfigurable optical chip according to claim 1, characterized in that: Both sides of the chip are provided with a coupling calibration input port and a coupling calibration output port to realize coupling calibration when the chip receives and transmits optical signals with the outside world.

7. The link reconfigurable optical chip according to claim 1, characterized in that: The coupling waveguide is a 90° bent coupling waveguide.

8. The link reconfigurable optical chip according to claim 1, characterized in that: The MEMS switch device includes a 2×2 Si-Photonics MEMS actuator.

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