A multi-arm supported silicon wafer basket adsorption and lifting structure

Abstract

The present invention discloses a multi-arm supported silicon wafer basket adsorption and lifting structure, which belongs to the technical field of silicon wafer basket lifting. The present invention includes a supporting top plate, the bottom of the supporting top plate is provided with a connecting bottom plate, and the connecting bottom plate is used to install a negative pressure structure for limiting the adsorption of the silicon wafer basket; and further includes: a lifting module is installed at the upper end of the connecting bottom plate, and the lifting module is slidably installed on a limiting seat on the supporting top plate, and a lubricating and cleaning component for protecting the lifting module is installed at the lower end of the supporting top plate, and the lubricating and cleaning component is used to clean the impurities attached to the lifting module and lubricate the lifting module. The multi-arm supported silicon wafer basket adsorption and lifting structure can facilitate regular cleaning of dust and impurities on the guide rail, and at the same time, after the guide rail has been operating for a long time, lubricating oil is automatically applied to the surface of the guide rail to reduce the resistance of the guide rail during operation.

Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer flower basket lifting, in particular to a multi-arm supported silicon wafer flower basket adsorption and lifting structure. Background Art

[0002] Photovoltaic silicon wafers are important components in the photovoltaic industry. When processing silicon wafers, in order to facilitate the transmission of multiple silicon wafers, the silicon wafers are usually placed in corresponding baskets, and the baskets are lifted and transported using an adsorption lifting structure.

[0003] For example, the announcement number is: 2024-03-15, the name is: A new flower basket lifting mechanism, and the announcement number is:

[0004] Chinese patent CN117712017A, which includes a main bracket, a mounting plate, a fixing plate, a pneumatic cylinder, a limit assembly, a connecting assembly, a lifting seat, a transfer platform, an auxiliary limit assembly and a rotating assembly. The main bracket is symmetrically provided with two groups, and multiple groups of mounting holes are evenly spaced on the two groups of main brackets. A fixing plate is detachably installed between the two groups of main brackets through the mounting holes and bolts. The fixing plate is located at the middle end of the two groups of main brackets. A pneumatic cylinder is fixed on the top of the fixing plate. The pneumatic cylinder is fixedly connected to the limit assembly. The pneumatic cylinder is slidably connected to the main bracket through the limit assembly. The lower end of the main bracket is symmetrically provided with a lifting seat for lifting the silicon wafer basket. The limit assembly and the lifting seat are fixed by a connecting assembly.

[0005] The above-mentioned prior art has the following technical problems: the existing lifting mechanism achieves lifting and lowering by moving on the guide rail when lifting the silicon wafer flower basket. However, after a long period of use, a large amount of impurities are easily attached to the surface of the guide rail. The accumulation of these impurities easily increases the friction resistance of the guide rail. At the same time, it is not convenient to automatically apply lubricating oil to the surface of the guide rail after long-term operation. When the lubricating oil on the guide rail is exhausted, it is also easy to increase the resistance of the guide rail during operation.

[0006] Therefore, we proposed a multi-arm supported silicon wafer basket adsorption and lifting structure to solve the above problems. Summary of the invention

[0007] The object of the present invention is to provide a multi-arm supported silicon wafer basket adsorption and lifting structure to solve the problem raised in the above background technology that the existing lifting mechanisms on the market can achieve lifting and lowering by moving on a guide rail when lifting the silicon wafer basket. However, after a long period of use, a large amount of impurities are easily attached to the surface of the guide rail. The accumulation of these impurities easily increases the friction resistance of the guide rail. At the same time, it is not convenient to automatically apply lubricating oil to the surface of the guide rail after long-term operation. When the lubricating oil on the guide rail is exhausted, it is also easy to increase the resistance of the guide rail during operation.

[0008] To achieve the above object, the present invention provides the following technical solutions: a multi-arm supported silicon wafer basket adsorption and lifting structure, comprising a supporting top plate, a connecting bottom plate is provided at the bottom of the supporting top plate, and the connecting bottom plate is used to install a negative pressure structure for adsorbing and limiting the silicon wafer basket;

[0009] Also includes:

[0010] A lifting module is installed on the upper end of the connecting bottom plate, and the lifting module is slidably installed on a limit seat on the supporting top plate. A lubricating and cleaning component for protecting the lifting module is installed on the lower end of the supporting top plate. The lubricating and cleaning component is used to clean impurities attached to the lifting module and lubricate the lifting module with oil.

[0011] Preferably, the lifting module comprises a driving motor, a transmission rod, a guide gear, a guide rack, a supporting arm, a movable wheel and a first magnetic block;

[0012] The driving motor is installed on the upper end of the supporting top plate, and the output end of the driving motor is connected to a transmission rod, a guide gear is keyed on the transmission rod, and a guide rack is arranged on the side of the guide gear, the guide rack is fixed on the supporting force arm, and the supporting force arm is slidably connected to the limiting seat, a movable wheel is fixedly connected to the transmission rod, and a first magnetic block is fixedly connected to the side of the movable wheel.

[0013] By adopting the above technical solution, the guide rack in meshing connection can drive the support arm to move up and down through the rotation of the guide gear.

[0014] Preferably, a plurality of the support force arms are evenly distributed on the upper end of the connection base plate, and each support force arm is fixedly connected to a guide rack.

[0015] By adopting the above technical solution and providing a plurality of supporting force arms, the bearing capacity of the connecting base plate can be improved.

[0016] Preferably, two first magnetic blocks are arranged in the circumferential direction of the movable wheel, and the two first magnetic blocks are symmetrically arranged about the vertical center axis of the movable wheel.

[0017] By adopting the above technical solution, the first magnetic block can be rotated synchronously by the movable wheel rotating along with the transmission rod.

[0018] Preferably, the lubricating and cleaning components include a horizontal plate, a cylinder, a moving block, a magnetic metal block, a liquid absorbing rubber block, a cleaning brush, a suction tube, a storage block, a liquid infusion tube, an oil spray hole, a vertical plate, a second magnetic block, a third magnetic block, a booster spring and a mixing rod;

[0019] The middle part of the horizontal plate is fixed on the telescopic end of the cylinder, and the fixed end of the cylinder is fixed on the lower end of the supporting top plate, a moving block is provided on the side of the horizontal plate facing the guide rack, and a magnetic metal block is fixedly connected to the upper end of the moving block, the bottom of the moving block is connected to the horizontal plate through a liquid-absorbing rubber block, and a cleaning brush is fixedly connected to the side of the moving block facing the guide rack, the liquid-absorbing rubber block is connected to the storage block through a suction tube, and the interior of the storage block is filled with lubricating oil, the liquid-absorbing rubber block is connected to the moving block through an infusion tube, and a one-way circulation valve is installed on the infusion tube and the suction tube, an oil injection hole is opened in the middle part of the moving block, a vertical plate is provided on the side of the storage block, and a second magnetic block is inlaid on the vertical plate, a third magnetic block is provided on the side of the second magnetic block, and the third magnetic block is fixed above the end of the moving block, a mixing rod is fixedly connected to the vertical plate, and the mixing rod is inserted into the interior of the storage block, and the vertical plate is connected to the storage block through a booster spring.

[0020] By adopting the above technical solution, the auxiliary spring can be set to enable the vertical plate to return to its original position after moving on the storage block.

[0021] Preferably, the moving block can slide along the vertical direction of the transverse plate, and a plurality of cleaning bristles are evenly distributed on one side of the moving block facing the guide rack.

[0022] By adopting the above technical solution, the cleaning bristles can be moved synchronously by the up and down movement of the moving block, so as to clean the impurities attached to the guide rack.

[0023] Preferably, the interior of the moving block is set as a hollow structure, and a plurality of oil injection holes are evenly distributed on the moving block, and the liquid absorbing rubber block at the bottom of the moving block is set to a rubber material.

[0024] By adopting the above technical solution, when oil enters the interior of the moving block, the oil can be sprayed outwards onto the cleaning bristles through the oil spray holes.

[0025] Preferably, the third magnetic block on the moving block has the same magnetic properties as the second magnetic block on the vertical plate, and when the cleaning bristles on the moving block contact the guide rack after the moving block moves, the end of the moving block fits against the vertical plate.

[0026] By adopting the above technical solution, after the moving block moves up and down reciprocatingly, the vertical plate can be made to move synchronously by utilizing the change in the distance between the third magnetic block and the second magnetic block.

[0027] Preferably, the mixing rod is slidably connected to the storage block, and a plurality of mixing blades are evenly distributed on one end of the mixing rod located inside the storage block.

[0028] By adopting the above technical solution, the oil inside the storage block can be stirred by the mixing blades on the mixing rod through the rotation of the mixing rod.

[0029] Compared with the prior art, the invention has the following beneficial effects: the multi-arm supported silicon wafer basket adsorption and lifting structure can facilitate regular cleaning of dust and impurities on the guide rail, and automatically apply lubricating oil to the surface of the guide rail after the guide rail has been operating for a long time, thereby reducing the resistance of the guide rail during operation;

[0030] 1. A support arm is provided, and the meshing guide rack drives the support arm and the connecting bottom plate to move upward by the rotation of the guide gear. The setting of multiple support arms can improve the bearing capacity of the connecting bottom plate;

[0031] 2. A cleaning brush is provided, and the horizontal plate is controlled to move by a cylinder. The movement of the horizontal plate can make the cleaning brush on the side of the moving block contact with the guide rack. When the guide rack moves upward, the cleaning brush can be used to clean the impurities attached to the surface of the guide rack;

[0032] 3. A liquid-absorbing rubber block is provided. After the movable wheel rotates, the first magnetic block and the magnetic metal block on the movable wheel are brought close to and away from each other, so that the movable block can be reciprocated up and down on the horizontal plate. After the movable block moves, the liquid-absorbing rubber block can be intermittently squeezed, so that the liquid-absorbing rubber block can absorb the oil inside the storage block through the suction tube, and the oil is transported to the inside of the movable block through the delivery tube and sprayed outward onto the cleaning bristles through the oil spray hole. At this time, the cleaning bristles can apply the oil on the surface when cleaning the guide rack, thereby reducing the friction resistance between the guide rack and the guide gear;

[0033] 4. A mixing rod is provided. When the cleaning bristles on the side of the moving block move and contact with the guide rack, the side of the moving block and the vertical plate fit together. At this time, when the moving block moves back and forth up and down, the distance change between the third magnetic block and the second magnetic block on the vertical plate can be used to enable the vertical plate to drive the mixing rod to move back and forth on the storage block. The reciprocating movement of the mixing rod can be used to turn over the oil inside the storage block to avoid stratification of the oil due to long-term stillness. At the same time, the reciprocating movement of the vertical plate can be used to impact the fitted moving block. The vibration generated by the impact of the vertical plate on the moving block can shake off impurities attached to the cleaning bristles. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 This is a schematic diagram of the front three-dimensional structure of the present invention;

[0035] Figure 2 This is a schematic diagram of the guide rack and support arm structure of the present invention;

[0036] Figure 3It is a schematic diagram of the structure of the transmission rod and the guide gear of the present invention;

[0037] Figure 4 It is a schematic diagram of the structure of the horizontal plate and the cylinder of the present invention;

[0038] Figure 5 For the present invention Figure 4 The enlarged structural diagram at A in the middle;

[0039] Figure 6 It is a schematic diagram of the structure of the movable wheel and the first magnetic block of the present invention;

[0040] Figure 7 This is a schematic diagram of the structure of the moving block and the oil injection hole of the present invention;

[0041] Figure 8 This is a schematic diagram of the structure of the moving block and the magnetic metal block of the present invention;

[0042] Fig. 9 It is a schematic diagram of the storage block and mixing rod structure of the present invention.

[0043] In the figure: 1. Support top plate; 2. Connecting bottom plate; 3. Lifting module; 301. Driving motor; 302. Transmission rod; 303. Guide gear; 304. Guide rack; 305. Support force arm; 306. Movable wheel; 307. First magnetic block; 4. Limit seat; 5. Lubricating and cleaning parts; 501. Cross plate; 502. Cylinder; 503. Moving block; 504. Magnetic metal block; 505. Liquid absorption rubber block; 506. Cleaning brush; 507. Suction tube; 508. Storage block; 509. Infusion tube; 5010. Oil injection hole; 5011. Vertical plate; 5012. Second magnetic block; 5013. Third magnetic block; 5014. Power assist spring; 5015. Mixing rod. DETAILED DESCRIPTION

[0044] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0045] Example 1: Please refer to Figure 1-Figure 9The existing lifting mechanism achieves lifting and lowering by moving on the guide rail when lifting the silicon wafer flower basket. However, after a long period of use, a large amount of impurities are easily attached to the surface of the guide rail. The accumulation of these impurities easily increases the friction resistance of the guide rail. At the same time, it is not convenient to automatically apply lubricating oil to the surface of the guide rail after long-term operation. When the lubricating oil on the guide rail is exhausted, it is also easy to increase the resistance of the guide rail during operation. In order to solve this technical problem, the present embodiment discloses the following technical content, including a supporting top plate 1, a connecting bottom plate 2 is provided at the bottom of the supporting top plate 1, and the connecting bottom plate 2 is used to install a negative pressure structure for adsorbing and limiting the silicon wafer flower basket; a lifting module 3 is installed at the upper end of the connecting bottom plate 2, and the lifting module 3 is slidably installed on the limiting seat 4 on the supporting top plate 1, and a lubricating cleaning component 5 for protecting the lifting module 3 is installed at the lower end of the supporting top plate 1, and the lubricating cleaning component 5 is used to clean impurities attached to the lifting module 3 and lubricate the lifting module 3. The lifting module 3 includes a driving motor 301, a transmission rod 302, a guide gear 303, a guide rack 304, a support arm 305, a movable wheel 306 and a first magnetic block 307; the driving motor 301 is installed on the upper end of the supporting top plate 1, and the output end of the driving motor 301 is connected to the transmission rod 302, the transmission rod 302 is keyed to the guide gear 303, and the side of the guide gear 303 is provided with a guide rack 304, the guide rack 304 is fixed on the support arm 305, and the support arm 305 is slidably connected to the limit seat 4, the transmission rod 302 is fixedly connected to the movable wheel 306, and the side of the movable wheel 306 is fixedly connected to the first magnetic block 307. There are multiple support arms 305 evenly distributed on the upper end of the connecting bottom plate 2, and each support arm 305 is fixedly connected to the guide rack 304. Two first magnetic blocks 307 are arranged in the circumference of the movable wheel 306 , and the two first magnetic blocks 307 are symmetrically arranged about the vertical center axis of the movable wheel 306 .The lubricating and cleaning component 5 includes a horizontal plate 501, a cylinder 502, a moving block 503, a magnetic metal block 504, a liquid absorbing rubber block 505, a cleaning brush 506, a suction tube 507, a storage block 508, an infusion tube 509, an oil injection hole 5010, a vertical plate 5011, a second magnetic block 5012, a third magnetic block 5013, an assist spring 5014 and a mixing rod 5015; the middle part of the horizontal plate 501 is fixed on the telescopic end of the cylinder 502, and the fixed end of the cylinder 502 is fixed to the lower end of the supporting top plate 1, and the moving block 503 is arranged on the side of the horizontal plate 501 facing the guide rack 304, and the upper end of the moving block 503 is fixedly connected to the magnetic metal block 504, and the bottom of the moving block 503 is fixedly connected to the magnetic metal block 504. The parts are connected to each other through the liquid-absorbing rubber block 505 and the horizontal plate 501, and a cleaning bristle 506 is fixedly connected to the side of the moving block 503 facing the guide rack 304, the liquid-absorbing rubber block 505 is connected to each other through the suction tube 507 and the storage block 508, and the storage block 508 is filled with lubricating oil, the liquid-absorbing rubber block 505 is connected to the moving block 503 through the infusion tube 509, and a one-way flow valve is installed on both the infusion tube 509 and the suction tube 507, and an oil injection hole 5010 is opened in the middle of the moving block 503, the moving block 503 can slide along the vertical direction of the horizontal plate 501, and a plurality of cleaning bristles 506 are evenly distributed on the side of the moving block 503 facing the guide rack 304. The interior of the moving block 503 is set as a hollow structure, and a plurality of oil injection holes 5010 are evenly distributed on the moving block 503, and the liquid-absorbing rubber block 505 at the bottom of the moving block 503 is set as a rubber material.

[0046] When the silicon wafer basket needs to be lifted, the silicon wafer basket is adsorbed by the negative pressure structure at the lower end of the connecting bottom plate 2, and the driving motor 301 is turned on at the same time. After the driving motor 301 is turned on, the transmission rod 302 can be rotated, and the transmission rod 302 can rotate after the rotation of the guide gear 303. The rotation of the guide gear 303 can use the meshing guide rack 304 to drive the support arm 305 and the connecting bottom plate 2 to rise and fall, thereby realizing the lifting and transfer of the silicon wafer basket. When the guide gear 303 is turned on, the guide rack 304 can be meshed with the guide rack 304 to drive the support arm 305 and the connecting bottom plate 2 to rise and fall, thereby realizing the lifting and transfer of the silicon wafer basket. When the guide rack 304 is operated for a long time and needs maintenance, the cylinder 502 is turned on. The opening of the cylinder 502 can make the cross plate 501 move toward the direction of the guide rack 304. After the cross plate 501 moves, the cleaning bristles 506 on the moving block 503 can contact with the guide rack 304. At this time, the magnetic metal block 504 on the moving block 503 moves to the bottom of the movable wheel 306. Then, when the guide rack 304 is lifted or lowered, the impurities on it can be wiped off by the cleaning bristles 506. At the same time, the transmission rod After the first magnetic block 307 rotates, the movable wheel 306 can be driven to rotate. The rotation of the movable wheel 306 can make the first magnetic block 307 rotate synchronously. When the first magnetic block 307 rotates and approaches the magnetic metal block 504, the moving block 503 can be moved upward by the magnetic attraction. Since the lower end of the moving block 503 is fixed to the liquid absorbing rubber block 505, the moving block 503 can stretch the liquid absorbing rubber block 505 after it moves upward. After the liquid absorbing rubber block 505 is stretched, the storage block 503 can be sucked by the suction tube 507. 8 absorbs the lubricating oil inside. When the first magnetic block 307 and the magnetic metal block 504 are separated from each other, the liquid-absorbing rubber block 505 is reset by its own elastic force. The reset liquid-absorbing rubber block 505 squeezes the internal lubricating oil into the interior of the moving block 503 through the infusion tube 509 and sprays it outwardly through the spray hole 5010 to the cleaning bristles 506. At this time, the cleaning bristles 506 can apply the lubricating oil to the surface of the guide rack 304 after contacting with the guide rack 304, so as to realize automatic lubrication of the guide rack 304 and the guide gear 303.

[0047] Embodiment 2: This embodiment is a further improvement made on the basis of the above-mentioned embodiment 1, and the following technical contents are disclosed in this embodiment: a vertical plate 5011 is provided on the side of the storage block 508, and a second magnetic block 5012 is inlaid on the vertical plate 5011, a third magnetic block 5013 is provided on the side of the second magnetic block 5012, and the third magnetic block 5013 is fixed above the end of the moving block 503, a mixing rod 5015 is fixedly connected to the vertical plate 5011, and the mixing rod 5015 is inserted into the interior of the storage block 508, and the vertical plate 5011 is connected to the storage block 508 through the booster spring 5014. The third magnetic block 5013 on the moving block 503 has the same magnetic properties as the second magnetic block 5012 on the vertical plate 5011, and when the cleaning bristles 506 on the moving block 503 contact each other with the guide rack 304 after the moving block 503 moves, the end of the moving block 503 and the vertical plate 5011 are mutually attached. The mixing rod 5015 is slidably connected to the storage block 508, and a plurality of mixing blades are evenly distributed on one end of the mixing rod 5015 located inside the storage block 508.

[0048] When the cleaning bristles 506 on the side of the moving block 503 come into contact with the guide rack 304, the end side of the moving block 503 fits with the vertical plate 5011. When the moving block 503 moves up and down, the distance between the third magnetic block 5013 on the moving block 503 and the second magnetic block 5012 embedded in the vertical plate 5011 can change. When the third magnetic block 5013 and the second magnetic block 5012 on the vertical plate 5011 are close to each other, the repulsive magnetic force can be used to move the mixing rod 5015 toward the inner side of the storage block 508. When the second magnetic block 5012 on 011 moves away from each other, the vertical plate 5011 and the mixing rod 5015 are reset under the action of the assist spring 5014. The reciprocating movement of the mixing rod 5015 can mix the oil inside the storage block 508 to prevent the oil inside the storage block 508 from stratifying due to long-term standing. At the same time, because the vertical plate 5011 and the moving block 503 fit each other, the vertical plate 5011 can collide with the moving block 503 after reciprocating movement. The vibration generated by the collision with the moving block 503 can shake off impurities attached to the cleaning bristles 506.

[0049] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0050] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A multi-arm supported silicon wafer basket adsorption and lifting structure, comprising a supporting top plate (1), wherein a connecting bottom plate (2) is provided at the bottom of the supporting top plate (1), and the connecting bottom plate (2) is used to install a negative pressure structure for adsorbing and limiting the silicon wafer basket; It is characterized in that Also includes: A lifting module (3) is installed at the upper end of the connecting bottom plate (2), and the lifting module (3) is slidably installed on a limit seat (4) on the supporting top plate (1), and a lubricating cleaning component (5) for protecting the lifting module (3) is installed at the lower end of the supporting top plate (1), and the lubricating cleaning component (5) is used to clean impurities attached to the lifting module (3) and lubricate the lifting module (3); The lifting module (3) comprises a driving motor (301), a transmission rod (302), a guide gear (303), a guide rack (304), a support arm (305), a movable wheel (306) and a first magnetic block (307); The driving motor (301) is mounted on the upper end of the supporting top plate (1), and the output end of the driving motor (301) is connected to a transmission rod (302), a guide gear (303) is keyed to the transmission rod (302), and a guide rack (304) is provided on the side of the guide gear (303), the guide rack (304) is fixed on the supporting force arm (305), and the supporting force arm (305) is slidably connected to the limiting seat (4), a movable wheel (306) is fixedly connected to the transmission rod (302), and a first magnetic block (307) is fixedly connected to the side of the movable wheel (306); The lubricating and cleaning component (5) comprises a horizontal plate (501), a cylinder (502), a moving block (503), a magnetic metal block (504), a liquid absorbing rubber block (505), cleaning bristles (506), a suction tube (507), a storage block (508), an infusion tube (509), an oil injection hole (5010), a vertical plate (5011), a second magnetic block (5012), a third magnetic block (5013), an assist spring (5014) and a mixing rod (5015); The middle part of the horizontal plate (501) is fixed on the telescopic end of the cylinder (502), and the fixed end of the cylinder (502) is fixed on the lower end of the supporting top plate (1); a moving block (503) is provided on the side of the horizontal plate (501) facing the guide rack (304), and the upper end of the moving block (503) is fixedly connected to a magnetic metal block (504); the bottom of the moving block (503) and the horizontal plate (501) are connected to each other through a liquid absorbing rubber block (505), and a cleaning brush (506) is fixedly connected to the side of the moving block (503) facing the guide rack (304); the liquid absorbing rubber block (505) and the storage block (508) are connected to each other through a suction tube (507), and the interior of the storage block (508) is filled with lubricating oil; the liquid absorbing rubber block (505) and the moving block (503) are connected to each other through a liquid infusion tube (509). The movable block (503) and the storage block (508) are interconnected, and a one-way flow valve is installed on both the infusion tube (509) and the suction tube (507). Both the infusion tube (509) and the suction tube (507) are made of a hose material. An oil injection hole (5010) is opened in the middle of the movable block (503). A vertical plate (5011) is arranged on the side of the storage block (508), and a second magnetic block (5012) is inlaid on the vertical plate (5011). A third magnetic block (5013) is arranged on the side of the second magnetic block (5012), and the third magnetic block (5013) is fixed above the end of the movable block (503). A mixing rod (5015) is fixedly connected to the vertical plate (5011), and the mixing rod (5015) is inserted into the interior of the storage block (508). The vertical plate (5011) and the storage block (508) are interconnected through a booster spring (5014).

2. The multi-arm supported silicon wafer basket adsorption and lifting structure according to claim 1, characterized in that: A plurality of the support force arms (305) are evenly distributed on the upper end of the connection base plate (2), and each support force arm (305) is fixedly connected to a guide rack (304).

3. The multi-arm supported silicon wafer basket adsorption and lifting structure according to claim 1, characterized in that: Two first magnetic blocks (307) are arranged in the circumferential direction of the movable wheel (306), and the two first magnetic blocks (307) are symmetrically arranged about the vertical center axis of the movable wheel (306).

4. The multi-arm supported silicon wafer basket adsorption and lifting structure according to claim 1, characterized in that: The moving block (503) is capable of sliding in the vertical direction of the transverse plate (501), and a plurality of cleaning bristles (506) are evenly distributed on one side of the moving block (503) facing the guide rack (304).

5. The multi-arm supported silicon wafer basket adsorption and lifting structure according to claim 1, characterized in that: The interior of the moving block (503) is configured as a hollow structure, and a plurality of oil injection holes (5010) are evenly distributed on the moving block (503), and the liquid absorbing rubber block (505) at the bottom of the moving block (503) is configured as a rubber material.

6. The multi-arm supported silicon wafer basket adsorption and lifting structure according to claim 1, characterized in that: The third magnetic block (5013) on the moving block (503) has the same magnetic properties as the second magnetic block (5012) on the vertical plate (5011), and when the cleaning bristles (506) on the moving block (503) contact the guide rack (304) after the moving block (503) moves, the end of the moving block (503) and the vertical plate (5011) fit together.

7. The multi-arm supported silicon wafer basket adsorption and lifting structure according to claim 1, characterized in that: The mixing rod (5015) is slidably connected to the storage block (508), and a plurality of mixing blades are evenly distributed on one end of the mixing rod (5015) located inside the storage block (508).

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