Auxiliary positioning device, grinding equipment and grinding pad positioning method

Abstract

The invention provides an auxiliary positioning device, grinding equipment and a grinding pad positioning method. The auxiliary positioning device comprises a positioning piece and an auxiliary positioning piece. The positioning piece is arranged above the grinding disc and is used for forming a positioning mark on the grinding disc; the positioning mark is used for realizing positioning between the grinding disc and the grinding pad when the grinding pad is replaced; in the positioning process of the positioning piece, the auxiliary positioning piece and the grinding disc and / or the grinding pad are concentrically arranged, so that the auxiliary positioning piece forms a positioning mark; and the positioning piece is matched with the auxiliary positioning piece so as to ensure that the grinding disc and the replaced grinding pad are concentrically arranged. According to the configuration, the positioning piece is arranged in the process chamber instead of the edge area of the grinding disc, so that repeated disassembly and assembly due to space interference are not needed; meanwhile, the positioning piece and the auxiliary positioning piece are used in a matched mode, positioning operation only needs to be carried out during primary installation and grinding pad size replacement, repeated positioning operation is not needed when grinding pads of the same specification are replaced, and the replacement efficiency of the grinding pads is improved.

Description

Technical Field

[0001] The invention relates to the field of semiconductor manufacturing, and in particular to an auxiliary positioning device, a grinding device and a grinding pad positioning method. Background Art

[0002] In the semiconductor manufacturing process, Chemical Mechanical Polish (CMP) is a technology that globally flattens the surface of a wafer through physical and chemical reactions. In the polishing process, the wafer is fixed on the polishing head, and the polishing pad is placed on the polishing disk; the rotating polishing head presses on the rotating polishing pad with a certain pressure, and flowing polishing liquid is added between the wafer surface and the polishing pad. The polishing liquid is evenly coated under the transmission of the polishing pad and the action of centrifugal force, forming a liquid film between the wafer and the polishing pad; the wafer surface is flattened through the alternating process of chemical and mechanical film removal.

[0003] During the entire grinding process, the grinding pad, as a consumable, needs to be replaced frequently. When the operator replaces the grinding pad, he needs to manually tear off the old grinding pad and then stick a new grinding pad. An auxiliary positioning device is required during sticking to ensure that the new grinding pad is concentric with the grinding disc. Eccentric sticking of the grinding pad will cause abnormal factors in the process flow and affect the product yield.

[0004] However, the internal space of the process chamber of the CMP machine is limited. The polishing pad will rotate at high speed when stuck to the grinding disk, and there is a lifting water baffle on the edge. The existing auxiliary positioning devices all add large module devices near the grinding disk, which causes spatial interference. In addition, each time the polishing pad is auxiliary positioned and pasted, it needs to be loaded and unloaded, which increases the workload and prolongs the replacement time, affecting production efficiency.

[0005] Based on this, how to reduce the spatial interference of the auxiliary positioning device, reduce the number of loading and unloading times, and improve work efficiency has become a technical problem that technical personnel in this field need to solve. Summary of the invention

[0006] The purpose of the present invention is to provide an auxiliary positioning device, a grinding device and a grinding pad positioning method to solve the problem that the existing auxiliary positioning device has spatial interference and needs to be loaded and unloaded after each replacement, which affects the efficiency.

[0007] In order to achieve the above object, the present invention provides an auxiliary positioning device, comprising: a positioning member and an auxiliary positioning member;

[0008] The positioning member is arranged above the grinding disc and is used to form a positioning mark on the grinding disc; the positioning mark is used to realize the positioning between the grinding disc and the grinding pad during the process of replacing the grinding pad;

[0009] The auxiliary positioning member is arranged concentrically with the grinding disc and / or the grinding pad during the positioning of the positioning member to assist the positioning member in forming the positioning mark;

[0010] The positioning member cooperates with the auxiliary positioning member to ensure that the grinding disc and the replaced grinding pad are arranged concentrically.

[0011] Optionally, the positioning member includes a ray emitting device, and the ray emitting device forms the positioning mark by emitting rays onto the grinding disk.

[0012] Optionally, the ray emitting device is rotatable to adjust the emitting angle of the ray.

[0013] Optionally, the auxiliary positioning device includes a plurality of the positioning members, and the number of the positioning members matches the number of characteristic points of the grinding pad.

[0014] Optionally, the positioning member includes a plurality of edge positioning members and a central positioning member;

[0015] The edge positioning member is used to form an edge positioning mark at a position corresponding to the edge of the grinding disc and the grinding pad; the center positioning member is used to form a center positioning mark at the center position of the grinding disc.

[0016] Optionally, the polishing pad is circular, the number of the edge positioning members is at least three, and the edge positioning marks formed by at least three edge positioning members are arranged around the edge of the polishing pad.

[0017] Optionally, the edge positioning marks formed by at least three edge positioning members are evenly distributed around the edge of the polishing pad.

[0018] Optionally, the auxiliary positioning member includes a transparent plate having a positioning pattern thereon that matches the shape of the grinding disk and / or the grinding pad, and when the auxiliary positioning member is placed on the grinding disk and / or the grinding pad, the positioning pattern coincides with the edge of the grinding disk and / or the grinding pad to assist the positioning member in forming the positioning mark.

[0019] In order to achieve the above object, the present invention further provides a grinding device, comprising: a grinding disc, a grinding pad, a process chamber and the auxiliary positioning device as described above;

[0020] The grinding disc is arranged in the process chamber, the positioning member is arranged on the top and / or side wall of the process chamber and is located above the grinding disc, and the grinding pad is laid on the grinding disc;

[0021] The positioning member cooperates with the auxiliary positioning member to achieve positioning between the grinding disc and the grinding pad when the grinding pad is replaced.

[0022] In order to achieve the above object, the present invention also provides a polishing pad positioning method, comprising:

[0023] When laying the grinding pad for the first time, or when changing the size of the grinding pad, performing a positioning operation;

[0024] The positioning operation includes:

[0025] Locate the center position of the grinding disc and form a center positioning mark;

[0026] Positioning the grinding disc at a position corresponding to the edge of the grinding pad to be replaced, forming a plurality of edge positioning marks;

[0027] Based on the type of the polishing pad, the center positioning mark and / or the edge positioning mark is selected for positioning.

[0028] Optionally, the positioning of the center position of the grinding disc and forming a center positioning mark includes:

[0029] An auxiliary positioning piece is placed on the grinding disc, wherein the auxiliary positioning piece is arranged concentrically with the grinding disc, and the positioning piece locates the center of the grinding disc to form the center positioning mark.

[0030] Optionally, the positioning of the grinding disc at a position corresponding to the edge of the grinding pad to be replaced to form a plurality of edge positioning marks includes:

[0031] The grinding pad to be replaced is placed on an auxiliary positioning member, which is concentrically arranged with the grinding pad. The positioning member positions the grinding disc at positions corresponding to the edges of the grinding pad to form a plurality of edge positioning marks.

[0032] Compared with the existing polishing pad positioning device and method, the auxiliary positioning device, polishing equipment and polishing pad positioning method provided by the present application have the following advantages:

[0033] The auxiliary positioning device provided by the present application, by setting the positioning piece above the grinding disc rather than the edge area of ​​the grinding disc, does not need to be repeatedly disassembled and assembled due to spatial interference such as the grinding disc or the water baffle; at the same time, the positioning piece is used in conjunction with the auxiliary positioning piece, and positioning is achieved by forming a positioning mark on the grinding disc. Positioning operations only need to be performed during the initial installation and when the grinding pad size is changed. When replacing a grinding pad of the same specification, the positioning mark can be used directly for positioning without repeating the positioning operation, thus saving the time and manpower required for the positioning operation and improving the replacement efficiency of the grinding pad.

[0034] The grinding equipment provided in the present application uses the above-mentioned auxiliary positioning device to set the positioning parts on the top and / or side walls of the process chamber. There is no spatial interference and there is no need for repeated disassembly and assembly during use. In addition, the auxiliary positioning parts are cooperated to make the grinding disc and the replaced grinding pad concentrically arranged, which reduces the probability of abnormalities in the process flow and indirectly improves the product yield.

[0035] The polishing pad positioning method provided in the present application, by using the above-mentioned auxiliary positioning device, only needs to perform a positioning operation when laying the polishing pad for the first time or changing the size of the polishing pad, to form a center positioning mark and an edge positioning mark respectively. When replacing a polishing pad of the same size, it is only necessary to select the center positioning mark and / or the edge positioning mark according to the type of polishing pad to directly perform positioning without repeating the positioning operation, thereby simplifying the polishing pad replacement process and improving the polishing pad replacement efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 A schematic diagram of the structure of an auxiliary positioning device provided in an embodiment of the present invention;

[0037] Figure 2 A schematic diagram of the structure of a positioning member provided in an embodiment of the present invention;

[0038] Figure 3 A schematic diagram of the structure of an auxiliary positioning member provided in an embodiment of the present invention;

[0039] Figure 4 A flow chart of a polishing pad positioning method provided by an embodiment of the present invention;

[0040] Figure 5 A schematic diagram of a central positioning mark formed by an auxiliary positioning device provided by an embodiment of the present invention;

[0041] Figure 6 A schematic diagram of an auxiliary positioning device provided in an embodiment of the present invention forming an edge positioning mark.

[0042] The description of each reference numeral is as follows:

[0043] 10-positioning piece; 100-center positioning piece; 101-edge positioning piece;

[0044] 20- auxiliary positioning piece; 200- positioning pattern;

[0045] 30-grinding disc; 300-center positioning mark; 301-edge positioning mark;

[0046] 40-Abrasive pad. DETAILED DESCRIPTION

[0047] In order to make the purpose, advantages and features of the present invention clearer, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing is different, and sometimes different scales are used.

[0048] As used in this specification, the singular forms "a", "an" and "the" include plural objects, the term "or" is generally used to include the meaning of "and / or", the term "several" is generally used to include the meaning of "at least one", and the term "at least two" is generally used to include the meaning of "two or more". In addition, the terms "first", "second" and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second" and "third" may explicitly or implicitly include one or at least two of the features, "one end" and "the other end" and "the proximal end" and "the distal end" generally refer to two corresponding parts, which include not only the endpoints, and the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral body; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. In addition, as used in this specification, an element disposed on another element generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements may be direct or indirect through an intermediate element, and it cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element may be in any orientation such as inside, outside, above, below or on one side of another element, unless the content clearly indicates otherwise. The terms "upper", "lower", "top" and "bottom" are generally relative position relationships arranged in the direction of gravity; the terms "vertical, vertical direction" generally refer to the direction of gravity, which is generally perpendicular to the ground, and "horizontal, horizontal plane direction" generally refers to the direction parallel to the ground; for ordinary technicians in this field, the specific meanings of the above terms in this specification can be understood according to specific circumstances.

[0049] The purpose of the present invention is to provide an auxiliary positioning device, a grinding device and a grinding pad positioning method to solve the problem that the existing auxiliary positioning device has spatial interference and needs to be loaded and unloaded after each replacement, which affects the efficiency.

[0050] It can be understood by those skilled in the art that the grinding pad is a large consumable in the chemical mechanical polishing (CMP) process. After a certain period of use, it is necessary to replace a new grinding pad to ensure that the grinding effect of the CMP process meets the requirements. In the process of replacing a new grinding pad, it is usually necessary to use an auxiliary tool to assist in positioning, so as to achieve the concentric arrangement of the replaced grinding pad and the grinding disc. The existing auxiliary tools are usually arranged at the peripheral position of the grinding disc. Since the grinding disc needs to rotate during the grinding process, and the periphery of the grinding disc is also provided with a lifting water retaining plate, the lifting and lowering also need to be completed during the grinding process. Therefore, after the auxiliary tool is positioned, it needs to be removed in time to avoid spatial interference during the grinding process, affecting the normal process flow, which increases the workload of replacing the grinding pad, thereby affecting the production efficiency. Based on this, the present embodiment provides an auxiliary positioning device, a grinding device and a grinding pad positioning method. By arranging the positioning member in the process chamber, the problems of spatial interference and repeated disassembly and assembly are avoided. At the same time, by forming a positioning mark on the grinding disc, the number of positioning operations is reduced, and the replacement efficiency of the grinding pad is further improved.

[0051] Please refer to Figures 1 to 3 The present invention provides an auxiliary positioning device, including: a positioning member 10 and an auxiliary positioning member 20; the positioning member 10 is arranged above the grinding disc 30, and is used to form a positioning mark on the grinding disc 30; the positioning mark is used to realize the positioning between the grinding disc 30 and the grinding pad 40 during the process of replacing the grinding pad 40; the auxiliary positioning member 20 is concentrically arranged with the grinding disc 30 and / or the grinding pad 40 during the positioning process of the positioning member 10, so as to assist the positioning member 10 in forming the positioning mark; the positioning member 10 cooperates with the auxiliary positioning member 20 to ensure that the grinding disc 30 is concentrically arranged with the replaced grinding pad 40. Those skilled in the art can understand that in order to ensure the accuracy of positioning, it is usually necessary to set a plurality of positioning marks. Figure 1 For example, the grinding disc 30, the grinding pad 40 and the auxiliary positioning member 20 are all circular components. During the positioning process, if the center point can be accurately found on the grinding pad 40, the positioning can be achieved through the positioning mark located at the center of the grinding disc 30. Once the center point cannot be accurately found on the grinding pad 40, at least three positioning marks located at the edge are required to achieve positioning. Of course, in other embodiments, the grinding disc 30 and the grinding pad 40 may also be components of other shapes, in which case more positioning marks may be required to achieve precise positioning. As an optional embodiment, the positioning mark may be a light spot, light spots of different shapes, or graphic marks of different shapes. Figure 1In the illustrated example, the positioning member 10 is disposed on the top of the process chamber, and the auxiliary positioning member 20 is laid on the grinding disc 30, which can assist the positioning member 20 to form a positioning mark at the center of the grinding disc 30, and the grinding pad 40 to be replaced is laid on the auxiliary positioning member 20, which can assist the positioning member 10 to form a positioning mark at a position corresponding to the edge of the grinding disc 30 and the grinding pad 40; in another embodiment, the positioning member 10 can also be disposed on the side wall of the process chamber, and when positioning is performed, the grinding pad 40 to be replaced can also be laid on the grinding disc 30, and then the auxiliary positioning member 20 is laid on the grinding pad 40 to assist positioning, and after the positioning is completed, the grinding pad 40 is pasted on the grinding disc 30. It should be noted that the grinding pad 40 to be replaced mentioned in this article refers to an unused new grinding pad 40, rather than a used grinding pad 40 pasted on the grinding disc 30.

[0052] With such configuration, by setting the positioning member 10 above the grinding disc 30 rather than the edge area of ​​the grinding disc 30, there is no need for repeated disassembly and assembly due to spatial interference of the grinding disc 30 or the water retaining plate; at the same time, the positioning member 10 is used in conjunction with the auxiliary positioning member 20, and positioning is achieved by forming a positioning mark on the grinding disc 30. Positioning operations only need to be performed during the initial installation and when the size of the grinding pad 40 is replaced. When replacing a grinding pad 40 of the same specification, the positioning mark can be used directly for positioning without repeating the positioning operation, thereby saving the time and manpower required for the positioning operation and improving the replacement efficiency of the grinding pad 40.

[0053] In an alternative embodiment, please refer to Figure 2 , the positioning member 10 includes a ray emitting device, which emits rays onto the grinding disc 30 to form a positioning mark. Further, the ray emitting device can be rotated to adjust the emission angle of the rays. It should be noted that in the present embodiment, the ray emitting device can be a device that emits infrared rays, ultraviolet rays or other visible rays, as long as it can show identifiable light spots or spots on the grinding disc 30. At the same time, the ray emitting device can be rotated arbitrarily to adjust the emission angle of the rays, so that the ray emitting device can achieve full coverage of the entire area of ​​the grinding disc 30 at a fixed position. In addition, using the above-mentioned ray emitting device, it can be turned on during positioning or replacement to form a clear positioning mark on the grinding disc 30. After positioning or replacement, the power can be turned off, which is simple and efficient. Of course, in other embodiments, the positioning member 10 can also be other components with similar functions, and this embodiment does not limit this.

[0054] In an alternative exemplary embodiment, the auxiliary positioning device includes a plurality of positioning members 10, and the number of positioning members 10 is adapted to the number of characteristic points of the grinding pad 40. As can be seen from the foregoing, in order to ensure the accuracy of positioning, it is usually necessary to set a plurality of positioning marks, and a positioning member 10 can usually only form one positioning mark, so it is necessary to set positioning members 10 that are adapted to the number of characteristic points of the grinding pad 40. It should be noted that the characteristic points of the grinding pad 40 are related to the shape of the grinding pad 40. For example, if the grinding pad 40 is circular, the characteristic points of the grinding pad 40 can be the center of the circle, or three points located on the edge of the circle, so the positioning members 10 can be set to four. In other embodiments, the grinding pad 40 can also be other shapes, so its characteristic points can also be corners, places where curvature changes suddenly, etc. For example, if the grinding pad 40 is elliptical, then its characteristic points can be the two end points of the major axis and the two end points of the minor axis.

[0055] Please refer to Figure 1 to Figure 2 The positioning member 10 includes a plurality of edge positioning members 101 and a center positioning member 100; the edge positioning members 101 are used to form edge positioning marks 301 at positions corresponding to the edges of the grinding disc 30 and the grinding pad 40; the center positioning member 100 is used to form a center positioning mark 300 at the center position of the grinding disc 30. It should be noted that Figure 1 and Figure 2 In the illustrated embodiment, a plurality of positioning members 10 are sequentially arranged along a predetermined direction. Since the positioning members 10 can be rotated to adjust the angle, the central positioning member 100 and the edge positioning member 101 can be arbitrarily set, that is, one positioning member 10 among the plurality of positioning members 10 is arbitrarily set as the central positioning member 100, and the rest are edge positioning members 101. In other embodiments, the plurality of positioning members 10 can also be dispersedly and irregularly arranged, and this embodiment does not limit this.

[0056] As an optional embodiment, the grinding pad 40 is circular, the number of edge positioning members 101 is at least three, and the edge positioning marks 301 formed by at least three edge positioning members 101 are arranged around the edge of the grinding pad 40. Further, the edge positioning marks 301 formed by at least three edge positioning members 101 are evenly distributed around the edge of the grinding pad 40. It should be noted that, under normal circumstances, after determining the three points of the circular edge, the circular component can be positioned, but in actual operation, if the distance between the three points of the circular edge is close or unevenly distributed, accurate positioning cannot be achieved. Therefore, as a preferred embodiment, the edge positioning marks 301 formed by at least three edge positioning members 101 should be evenly distributed on the edge of the grinding pad 40, so that the operator can accurately align the grinding pad 40 and the grinding disc 30 when positioning the grinding pad 40.

[0057] Please refer to Figure 3The auxiliary positioning member 20 includes a transparent plate, on which there is a positioning pattern 200 that matches the shape of the grinding disc 30 and / or the grinding pad 40. When the auxiliary positioning member 20 is placed on the grinding disc 30 and / or the grinding pad 40, the positioning pattern 200 overlaps with the edge of the grinding disc 30 and / or the grinding pad 40 to form a positioning mark for the auxiliary positioning member 20. It should be noted that in this embodiment, the auxiliary positioning member 20 can be a transparent multi-ring plate, on which there are a plurality of concentrically arranged circular positioning patterns 200. When the auxiliary positioning member 20 contacts the grinding disc 30 and / or the grinding pad 40, the center of the grinding disc 30 and the position corresponding to the edge of the grinding disc 30 and / or the grinding pad 40 can be quickly located by coinciding the circumference of one of the circles of the positioning pattern 200 with the edge of the grinding disc 30 and / or the grinding pad 40. The operator rotates the positioning member 10 so that the rays emitted by the positioning member 10 can form positioning marks at the center of the grinding disc 30 and at the position corresponding to the edge of the grinding pad 40. Of course, in other embodiments, the grinding disc 30 and / or the grinding pad 40 have different shapes, and correspondingly, different positioning patterns 200 may be respectively provided on the transparent plate to achieve positioning.

[0058] In another embodiment, please refer to Figure 1 The present invention also provides a grinding device, including: a grinding disc 30, a grinding pad 40, a process chamber (not shown in the figure) and the auxiliary positioning device as described above; the grinding disc 30 is arranged in the process chamber, the positioning member 10 is arranged on the top and / or side wall of the process chamber and is located above the grinding disc 30, and the grinding pad 40 is laid on the grinding disc 30; the positioning member 10 cooperates with the auxiliary positioning member 20 to achieve positioning between the grinding disc 30 and the grinding pad 40 when the grinding pad 40 is replaced.

[0059] With such configuration, by using the above-mentioned auxiliary positioning device, the positioning member 10 is set on the top and / or side wall of the process chamber, there is no spatial interference, and there is no need for repeated disassembly and assembly during use. In addition, it cooperates with the auxiliary positioning member 20 so that the grinding disk 30 and the replaced grinding pad 40 are set concentrically, which reduces the probability of abnormalities in the process flow and indirectly improves the product yield.

[0060] In another embodiment, please refer to Figures 4 to 6 The present invention also provides a polishing pad positioning method, comprising:

[0061] Step S1: performing a positioning operation when laying the polishing pad 40 for the first time or when changing the size of the polishing pad 40;

[0062] Positioning operations include:

[0063] Step S10: Locate the center position of the grinding disc 30 and form a center positioning mark 300 (eg Figure 5 shown);

[0064] Step S11: Position the grinding disc 30 at a position corresponding to the edge of the grinding pad 40 to be replaced, forming a plurality of edge positioning marks 301 (such as Figure 6 shown);

[0065] Step S2: Based on the type of the polishing pad 40 , select the center positioning mark 300 and / or the edge positioning mark 301 for positioning.

[0066] In an optional embodiment, taking the case where both the grinding disc 30 and the grinding pad 40 are circular components, different positioning marks need to be selected during positioning due to the different surface textures of the grinding pad 40. For example, if the grinding pad 40 to be replaced has cross textures, and a cross is usually set at the center of the grinding pad 40, then the operator can clearly identify the center of the grinding pad 40. At this time, it is only necessary to overlap the center of the grinding pad 40 with the center positioning mark 300 to achieve the concentric setting of the grinding disc 30 and the replaced grinding pad 40; and when the grinding pad 40 to be replaced does not have cross textures, the operator usually cannot clearly identify the center of the grinding pad 40, and at this time, it is necessary to use the edge positioning mark 301 for positioning. Therefore, setting the center positioning mark 300 and the edge positioning mark 301 on the grinding disc 30 at the same time can meet the replacement of grinding pads 40 of the same size and different types.

[0067] With such configuration, by using the above-mentioned auxiliary positioning device, it is only necessary to perform the positioning operation when laying the grinding pad 40 for the first time or changing the size of the grinding pad 40 to form the center positioning mark 300 and the edge positioning mark 301 respectively. When replacing the grinding pad 40 of the same size, it is only necessary to select the center positioning mark 300 and / or the edge positioning mark 301 according to the type of the grinding pad 40 to directly perform the positioning without repeating the positioning operation, thereby simplifying the process of replacing the grinding pad 40 and improving the replacement efficiency of the grinding pad 40.

[0068] Please refer to Figure 5 , locate the center position of the grinding disc 30, and form a center positioning mark 300, including: placing the auxiliary positioning member 20 on the grinding disc 30, the auxiliary positioning member 20 and the grinding disc 30 are arranged concentrically, and the positioning member 10 locates the center of the grinding disc 30 to form a center positioning mark 300. It should be noted that when the operator locates the center of the grinding disc 30, the auxiliary positioning member 20 is placed on the grinding disc 30, and the positioning pattern 200 is overlapped with the edge of the grinding disc 30. At this time, the center of the auxiliary positioning member 20 is the center of the grinding disc 30, and then the center positioning member 100 is rotated, and the rays emitted by the center positioning member 100 are formed at the center of the grinding disc 30. The center positioning mark 300.

[0069] Please refer to Figure 6 , positioning the grinding disc 30 at a position corresponding to the edge of the grinding pad 40 to be replaced, and forming a plurality of edge positioning marks 301, including: placing the grinding pad 40 to be replaced on the auxiliary positioning member 20, the auxiliary positioning member 20 and the grinding pad 40 are arranged concentrically, and the positioning member 10 positions the grinding disc 30 at a position corresponding to the edge of the grinding pad 40, and forming a plurality of edge positioning marks 301. It should be noted that when the operator positions the position corresponding to the edge of the grinding disc 30 and the grinding pad 40, the auxiliary positioning member 20 is placed on the grinding disc 30, and then the grinding pad 40 to be replaced is placed on the auxiliary positioning member 20, so that the circumference of one of the circles of the positioning figure 200 coincides with the edge of the grinding pad 40. At this time, three points are evenly found on the edge of the grinding pad 40, and different edge positioning members 101 are used to form edge positioning marks 301 at the three points.

[0070] In summary, in the auxiliary positioning device, grinding equipment and grinding pad positioning method provided in the embodiments of the present invention, the auxiliary positioning device includes: a positioning member and an auxiliary positioning member; the positioning member is arranged in the process chamber, and is used to form a positioning mark on the grinding disc; the positioning mark is used to realize the positioning between the grinding disc and the grinding pad during the process of replacing the grinding pad; the auxiliary positioning member is concentrically arranged with the grinding disc and / or the grinding pad during the positioning process of the positioning member, so as to assist the positioning member in forming the positioning mark; the positioning member cooperates with the auxiliary positioning member to ensure that the grinding disc is concentrically arranged with the replaced grinding pad.

[0071] With such configuration, by setting the positioning piece above the grinding disc rather than the edge area of ​​the grinding disc, there is no need for repeated disassembly and assembly due to spatial interference from the grinding disc or the water baffle; at the same time, the positioning piece is used in conjunction with the auxiliary positioning piece, and positioning is achieved by forming a positioning mark on the grinding disc. Positioning operations only need to be performed during the initial installation and when the grinding pad size is changed. When replacing a grinding pad of the same specification, the positioning mark can be used directly for positioning without repeated positioning operations, thus saving the time and manpower required for the positioning operation and improving the replacement efficiency of the grinding pad.

[0072] The above description is only a description of the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention. Any changes or modifications made by a person skilled in the art in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. An auxiliary positioning device, characterized in that: include: Positioning parts and auxiliary positioning parts; The positioning member is arranged above the grinding disc and is used to form a positioning mark on the grinding disc; the positioning mark is used to realize the positioning between the grinding disc and the grinding pad during the process of replacing the grinding pad; The auxiliary positioning member is arranged concentrically with the grinding disc and / or the grinding pad during the positioning of the positioning member to assist the positioning member in forming the positioning mark; The positioning member cooperates with the auxiliary positioning member to ensure that the grinding disc and the replaced grinding pad are arranged concentrically.

2. The auxiliary positioning device according to claim 1, characterized in that: The positioning member comprises a ray emitting device, and the ray emitting device forms the positioning mark by emitting rays onto the grinding disc.

3. The auxiliary positioning device according to claim 2, characterized in that: The ray emitting device is rotatable to adjust the emitting angle of the ray.

4. The auxiliary positioning device according to claim 2, characterized in that: The auxiliary positioning device includes a plurality of positioning members, and the number of the positioning members matches the number of characteristic points of the grinding pad.

5. The auxiliary positioning device according to claim 4, characterized in that: The positioning member includes a plurality of edge positioning members and a central positioning member; The edge positioning member is used to form an edge positioning mark at a position corresponding to the edge of the grinding disc and the grinding pad; the center positioning member is used to form a center positioning mark at the center position of the grinding disc.

6. The auxiliary positioning device according to claim 5, characterized in that: The grinding pad is circular, the number of the edge positioning members is at least three, and the edge positioning marks formed by at least three edge positioning members are arranged around the edge of the grinding pad.

7. The auxiliary positioning device according to claim 6, characterized in that: The edge positioning marks formed by at least three edge positioning members are evenly distributed around the edge of the polishing pad.

8. The auxiliary positioning device according to claim 1, characterized in that: The auxiliary positioning member includes a transparent plate having a positioning pattern adapted to the shape of the grinding disk and / or the grinding pad. When the auxiliary positioning member is placed on the grinding disk and / or the grinding pad, the positioning pattern coincides with the edge of the grinding disk and / or the grinding pad to assist the positioning member in forming the positioning mark.

9. A grinding device, characterized in that: include: A grinding disc, a grinding pad, a process chamber, and an auxiliary positioning device as claimed in any one of claims 1 to 8; The grinding disc is arranged in the process chamber, the positioning member is arranged on the top and / or side wall of the process chamber and is located above the grinding disc, and the grinding pad is laid on the grinding disc; The positioning member cooperates with the auxiliary positioning member to achieve positioning between the grinding disc and the grinding pad when the grinding pad is replaced.

10. A method for positioning a polishing pad, characterized in that: include: When laying the grinding pad for the first time, or when changing the size of the grinding pad, performing a positioning operation; The positioning operation includes: Locate the center position of the grinding disc and form a center positioning mark; Positioning the grinding disc at a position corresponding to the edge of the grinding pad to be replaced, forming a plurality of edge positioning marks; Based on the type of the polishing pad, the center positioning mark and / or the edge positioning mark is selected for positioning.

11. The polishing pad positioning method according to claim 10, wherein: The method of positioning the center position of the grinding disc and forming a center positioning mark includes: An auxiliary positioning piece is placed on the grinding disc, wherein the auxiliary positioning piece is arranged concentrically with the grinding disc, and the positioning piece locates the center of the grinding disc to form the center positioning mark.

12. The polishing pad positioning method according to claim 10, wherein: The positioning of the grinding disc at a position corresponding to the edge of the grinding pad to be replaced to form a plurality of edge positioning marks includes: The grinding pad to be replaced is placed on an auxiliary positioning member, which is concentrically arranged with the grinding pad. The positioning member positions the grinding disc at positions corresponding to the edges of the grinding pad to form a plurality of edge positioning marks.

Images