Multifunctional semiconductor anti-static workbench

Abstract

The invention relates to the technical field of dust removal, in particular to a multifunctional semiconductor anti-static workbench which comprises a workbench body. The static electricity removing assembly comprises electric ion static electricity removing devices embedded in the two sides of the table body; and the dust removal assembly is used for filtering dust and discharging filtered air into the working area of the table body again so as to be recycled. A sliding rod can be driven to slide in a fixing sleeve through a rotating disc, so that the sliding rod can drive a piston to slide in an air inlet cylinder through a C-shaped linkage rod, air is injected into a first air bag and a second air bag, meanwhile, the first air bag and the second air bag can inject air into a corrugated square pipe, the corrugated square pipe is driven to move, and the air inlet pipe is driven to move; and air is sprayed to the sliding supporting plate to clean the dust outlet holes, the blown air reversely blows and cleans the filter cotton driven to ascend, and the air after the filter cotton is cleaned is discharged into the dust discharging pipe through the first valve.

Description

Technical Field

[0001] The invention relates to the technical field of dust removal, and in particular to a multifunctional semiconductor antistatic workbench. Background Art

[0002] A semiconductor workbench is a workbench specifically used for processing, testing, and assembling semiconductor devices. Semiconductor workbenches are widely used in semiconductor manufacturing, electronic testing, maintenance, and laboratory research. Removing dust from semiconductor workbenches is of great significance, mainly in improving product quality and reliability. Dust may cause device contamination, affect electrical performance and the cleanliness of the manufacturing process, and thus increase the defect rate. Keeping the workbench clean can ensure higher manufacturing accuracy and consistency, reduce the risk of failure, and improve overall production efficiency. At the same time, a clean environment also helps maintain the health and safety of employees.

[0003] After searching, a purification and dust removal equipment disclosed in publication number CN116328452B is found. During the process of cleaning dust, the device uses a differential pressure gauge to determine whether the filter tube is blocked, but the device lacks cleaning and automatic judgment functions. In the daily production process, the filter equipment is cleaned by personnel, and the filter equipment needs to be disassembled and cleaned, which delays production time and requires certain manpower and material resources to clean the filter equipment. In addition, the device needs to be observed regularly to determine whether the filter device is blocked. If the blockage is not observed in time, the dust generated during production cannot be discharged normally. Summary of the invention

[0004] In view of the above-mentioned shortcomings of the prior art, the present invention provides a multifunctional semiconductor anti-static workbench, which can effectively solve the problem in the prior art that the blockage of the filtering equipment needs to be observed manually and the filtering equipment cannot be cleaned automatically.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: The present invention provides a multifunctional semiconductor antistatic workbench, comprising: Taiwan body; A static electricity removal component, the static electricity removal component includes an ion static electricity eliminator embedded on both sides of the platform; A dust removal component, which is used to filter dust and discharge the filtered air back into the working area of ​​the platform for recycling. The dust removal component includes a linkage plate, and a filter cotton is elastically mounted on the lower end of the linkage plate. The linkage plate and the filter cotton are driven to rise and fall; A backwash component includes a mounting box fixedly mounted on one side of a platform, a corrugated square tube fixedly mounted on the inner wall of the mounting box, one end of the corrugated square tube passes through the platform and is fixedly mounted with a push plate, a plurality of third valves are embedded in a linear array in the push plate.

[0006] The cam is provided with a plurality of filter grooves, and a plurality of filter grooves are provided in the cam body. The cam body is provided with a plurality of filter grooves. The cam body is provided with a plurality of filter grooves. The cam body is provided with a plurality of filter grooves. The cam body is provided with a plurality of filter grooves. The cam body is provided with a plurality of filter grooves. The cam body is provided with a plurality of filter grooves.

[0007] Preferably, a dust filter box is fixedly installed at the middle position of the lower end surface of the platform body, the dust filter box is fixedly connected to the ventilation box, a linear driver is fixedly installed on one side of the dust filter box, a driving end of the linear driver passes through the dust filter box and is fixedly connected to a linkage plate, the linkage plate is slidably connected to the dust filter box, at least one second spring is fixedly installed between the linkage plate and the filter cotton, the linkage plate and the filter cotton are respectively fixed with a first magnetic contact and a second magnetic contact at corresponding positions, and the first magnetic contact and the second magnetic contact are magnetically matched, the first magnetic contact, the second magnetic contact and the second magnetic contact are magnetically attracted to each other, and the first magnetic contact, the second magnetic contact and the second magnetic contact are magnetically engaged, and the first magnetic contact, the second magnetic contact and the second magnetic contact are magnetically engaged. The two magnetic contacts are electrically connected to the controller through an external power supply, a first air bag is fixedly installed on the inner bottom end of the dust filter box, an air outlet box is fixedly installed on the lower end surface of the dust filter box, a rotating column is rotatably installed in the air outlet box, the upper end of the rotating column extends to the inner wall of the dust filter box, an exhaust fan blade is fixedly installed on the outer wall of the rotating column, the rotating column is driven to rotate, both sides of the air outlet box are connected to ventilation pipes, and an air outlet pipe is commonly fixedly installed on one side of the two ventilation pipes away from the dust filter box, and a plurality of air outlets facing the sliding part are opened in the air outlet pipe.

[0008] Preferably, a vertical plate is fixedly installed on the lower end surface of the platform and at a position away from the dust filter box, a driving source is fixedly installed on one side of the vertical plate away from the dust filter box, an output end of the driving source passes through the vertical plate and is fixedly connected to a linkage column, and transmission is performed between the linkage column and the rotating column via a bevel gear pair.

[0009] Preferably, a T-shaped column is fixedly installed on the lower end surface of the platform and at a position away from the vertical plate, an air intake cylinder is fixedly installed on the upper position of the side of the T-shaped column away from the vertical plate, a piston is slidably installed on the inner wall of the air intake cylinder, and the piston is driven to slide back and forth on the inner wall of the air intake cylinder, a second air bag is fixedly installed on the lower end surface of the platform and between the vertical plate and the T-shaped column, a short tube is connected to the side of the air intake cylinder close to the second air bag, the short tube passes through the T-shaped column and is connected with the second air bag, the second air bag is connected with the first air bag by passing through the dust filter box, a second valve is embedded in the short tube, and at least one air intake hole is opened on the outer wall of the air intake cylinder.

[0010] Preferably, a fixed sleeve is fixedly installed on the lower end surface of the T-shaped column, an electromagnetic clutch is fixedly installed on the lower end of the rotating column, the electromagnetic clutch is electrically connected to the controller, a rotating disk is fixedly installed on the lower end of the electromagnetic clutch, a rotating short shaft is fixedly installed on the lower end of the rotating disk, a rocker is provided on the outer wall rotating sleeve of the rotating short shaft, a sliding rod is slidably installed on the inner wall of the fixed sleeve, the rocker and the sliding rod are rotatably connected, and a C-shaped linkage rod is fixedly installed between the piston and the sliding rod.

[0011] Preferably, the second airbag passes through the installation box through a pipe and is connected to the corrugated square tube. The corrugated square tube is slidably connected to the inner wall of the partition during the process of being driven to retract and retract. Two baffles are symmetrically installed at the inner bottom end of the platform and close to the sliding support plate.

[0012] Compared with the known prior art, the technical solution provided by the present invention has the following beneficial effects: First, through the provision of the first magnetic contact and the second magnetic contact, after the filter cotton has been filtered for a long time and its interior is filled with dust, the filter cotton will drive the first magnetic contact and the second magnetic contact to disengage due to the inability to filter the air normally, so as to judge whether the inside of the filter cotton is blocked by dust. Through the provision of the electromagnetic clutch, the rotating column driven to rotate will drive the rotating disk to rotate through the electromagnetic clutch, and the rotating disk will drive the sliding rod to slide inside the fixed sleeve, so the sliding rod will drive the piston to slide inside the air intake cylinder through the C-shaped linkage rod, and inject air into the first air bag and the second air bag. At the same time, the first air bag and the second air bag will inject air into the interior of the corrugated square tube, drive the corrugated square tube to move, and perform pressure-accumulated jet injection toward the sliding support plate, and the ejected gas has a certain air pressure power to clean the dust outlet hole, and the blown air will reversely blow and clean the filter cotton driven to rise, and the air after cleaning the filter cotton will be discharged into the dust exhaust pipe through the first valve.

[0013] Second, through the setting of the sliding support plate, dust with static electricity will block the dust outlet holes, making it impossible for the flowing air to pass through the dust outlet holes opened in the sliding support plate, so that the wind receiving surface of the sliding support plate is increased and driven to slide, so that the voltage detection device can detect the changed resistance of the sliding rheostat, and increase the working power of the ion static eliminator accordingly, thereby improving the effect of static electricity removal and preventing incomplete static electricity removal in the working area and dust adsorption leading to reduced cleanliness.

[0014] Third, by setting the exhaust fan blades, the air in the table body can be drawn into the dust filter box and filtered through filter cotton, and the exhaust fan blades rotating in the opposite direction can discharge the filtered and static-free air back into the working area of ​​the table body for recycling, saving energy. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 It is a bottom view structural schematic diagram of the present invention; Figure 3 It is a side view structural schematic diagram of the present invention; Figure 4 It is a schematic diagram of the exploded structure of the partition of the present invention; Figure 5 It is a schematic diagram of the exploded structure of the external box of the present invention; Figure 6 It is a schematic diagram of the structure of the dust removal component of the present invention; Figure 7 It is a schematic diagram of the decomposed structure of the dust filter box of the present invention; Figure 8 It is a schematic diagram of the internal exploded structure of the dust filter box of the present invention; Fig. 9 It is a schematic diagram of the structure of the backwash component of the present invention; Fig.10 It is a schematic diagram of the side structure of the backwash component of the present invention.

[0017] Figure numerals: 1, platform; 2, static electricity removal component; 201, ion static electricity remover; 202, partition; 203, external box; 204, long filter slot; 205, sliding support plate; 206, support plate; 207, first spring; 208, connecting frame; 209, sliding rheostat; 210, ventilation box; 3, dust removal component; 301, dust filter box; 302, linkage plate; 303, filter cotton; 304, air outlet box; 305, first air bag; 306, rotating column; 307, exhaust fan blade; 308, linear drive; 309, second spring; 310, first magnetic contact; 311, second magnetic contact; 312 , vertical plate; 313, driving source; 314, linkage column; 315, ventilation pipe; 316, air outlet pipe; 317, air outlet; 318, first valve; 319, dust exhaust pipe; 4, backwash assembly; 401, T-shaped column; 402, fixed sleeve; 403, electromagnetic clutch; 404, rotating disk; 405, rotating short shaft; 406, rocker; 407, sliding rod; 408, C-shaped linkage rod; 409, air intake cylinder; 410, air intake hole; 411, piston; 412, second valve; 413, installation box; 414, corrugated square tube; 415, push plate; 416, second air bag; 417, baffle; 418, third valve. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] The present invention will be further described below in conjunction with the embodiments.

[0020] Example: Refer to Figures 1 to 10 , a multifunctional semiconductor anti-static workbench, comprising: Platform 1; The static electricity removal component 2 includes an ion static electricity remover 201 embedded on both sides of the platform 1. Through the setting of the ion static electricity remover 201, the high voltage power supply in the ion static electricity remover 201 generates an electric field on the electrode. This electric field ionizes the gas molecules in the air to generate positive and negative ions. These positive and negative ions will be sent to the surface where static electricity needs to be removed. The positive and negative ions neutralize the static electricity charge on the surface, thereby eliminating static electricity. Since the static electricity is neutralized, dust and particles are no longer attracted by static electricity, thereby reducing the adhesion of dust and particles on the platform 1; The dust removal component 3 is used to filter dust and re-discharge the filtered air into the working area of ​​the platform 1 for recycling. The dust removal component 3 includes a linkage plate 302. The lower end of the linkage plate 302 is elastically mounted with filter cotton 303. The linkage plate 302 and the filter cotton 303 are driven to rise and fall. After neutralizing static electricity, the dust removal component 3 can extract and filter the dust, and then re-discharge the filtered air into the working area of ​​the platform 1, saving energy consumption while recycling the filtered air for dust removal, and further removing the gas with static electricity in the air; The backwash component 4 includes a mounting box 413 fixedly mounted on one side of the platform 1, a corrugated square tube 414 fixedly mounted on the inner wall of the mounting box 413, one end of the corrugated square tube 414 passes through the platform 1 and is fixedly mounted with a push plate 415, a plurality of third valves 418 are embedded in a linear array in the push plate 415, and the backwash component 4 can detect the filtering efficiency of the filter cotton 303, and backflush the filter cotton 303 according to the filtering efficiency, so as to clean the filter cotton 303.

[0021] Reference Figures 2 to 5A partition 202 is fixedly installed on the inner bottom end of the platform 1, and the partition 202 is provided with a dust inlet portion and a sliding portion. A plurality of long filter slots 204 are provided in the dust inlet portion. A sliding support plate 205 is embedded in the platform 1 and is far away from the installation box 413. A plurality of dust outlet holes are provided in the sliding support plate 205. An external box 203 is fixedly installed on the lower end surface of the platform 1 and close to the sliding support plate 205. Support plates 206 are fixedly installed on the inner walls of both sides of the external box 203. The support plates 206 are slidably connected to the sliding support plates 205. A connecting frame 208 is fixedly installed on the lower end surface of the sliding support plate 205. A sliding rheostat 209 is fixedly installed at the middle position of the inner bottom wall of the external box 203. The sliding rheostat 209 is composed of a rheostat rod and a sliding piece slidably arranged on the rheostat rod. The sliding piece is fixedly connected to the connecting frame 208. The sliding rheostat 209 is electrically connected to a voltage detection device and a controller. Electron static removal The device 201 is connected to the controller signal, and one side of the external box 203 is connected to the ventilation box 210. A first spring 207 is fixedly installed between the lower end surface of the sliding support plate 205 and the inner bottom wall of the external box 203. Through the setting of the sliding support plate 205, when static electricity appears in the working area of ​​the platform 1, dust will be blocked at the position of the dust removal hole due to static electricity, so that the dust outlet hole cannot circulate air normally, and the wind receiving surface of the sliding support plate is increased and driven to slide. The sliding support plate driven to slide adjusts the working efficiency of the ion static eliminator 201 by sliding, and further removes static electricity. The sliding part set on the partition 202 can facilitate personnel to support it on the top, and the dust inlet part can facilitate the collection of dust with static electricity. Two first springs 207 are symmetrically arranged to facilitate the stable support of the sliding support plate 205. The voltage detection device is connected to the connection terminal of the sliding rheostat 209 through a wire.

[0022] Reference Figures 6 to 8A dust filter box 301 is fixedly installed at the middle position of the lower end surface of the platform 1, and the dust filter box 301 is fixedly connected to the ventilation box 210. A linear driver 308 is fixedly installed on one side of the dust filter box 301. The driving end of the linear driver 308 passes through the dust filter box 301 and is fixedly connected to the linkage plate 302. The linkage plate 302 is slidably connected to the dust filter box 301. At least one second spring 309 is fixedly installed between the linkage plate 302 and the filter cotton 303. The linkage plate 302 and the filter cotton 303 are respectively fixed with a first magnetic contact 310 and a second magnetic contact 311 at corresponding positions, and the first magnetic contact 310 and the second magnetic contact 311 are magnetically matched. The first magnetic contact 310 and the second magnetic contact 311 are electrically connected to the controller through an external power supply. A first airbag 305 is fixedly installed on the inner bottom end of the dust filter box 301, and an air outlet box 304 is fixedly installed on the lower end surface of the dust filter box 301. The dust filter 301 of the embodiment of the present invention is provided with a plurality of air outlets 317 disposed on the second side of the filter housing 304. The dust filter 301 of the embodiment of the present invention is provided with a plurality of air outlets 317 disposed on the second side of the filter housing 304. The dust filter 301 of the embodiment of the present invention is provided with a plurality of air outlets 317 disposed on the second side of the filter housing 304.

[0023] Reference Figure 8 A vertical plate 312 is fixedly installed on the lower end surface of the platform 1 and at a position away from the dust filter box 301. A driving source 313 is fixedly installed on one side of the vertical plate 312 away from the dust filter box 301. The output end of the driving source 313 passes through the vertical plate 312 and is fixedly connected to a linkage column 314. The linkage column 314 and the rotating column 306 are transmitted through a bevel gear pair. Through the setting of the driving source 313, the driving source 313 can drive the exhaust fan blades 307 to work through the bevel gear pair. At the same time, after detecting that the efficiency of the filter cotton 303 is not up to the standard, the driving source 313 can also drive the backwash component 4 to clean the filter cotton 303.

[0024] Reference Figures 9 and 10A T-shaped column 401 is fixedly installed on the lower end surface of the platform 1 and at a position away from the vertical plate 312. An air inlet cylinder 409 is fixedly installed on the upper position of the side of the T-shaped column 401 away from the vertical plate 312. A piston 411 is slidably installed on the inner wall of the air inlet cylinder 409. The piston 411 is driven to slide back and forth on the inner wall of the air inlet cylinder 409. A second air bag 416 is fixedly installed on the lower end surface of the platform 1 and between the vertical plate 312 and the T-shaped column 401. A short tube is connected to the side of the air inlet cylinder 409 close to the second air bag 416. The short tube The T-shaped column 401 is connected to the second airbag 416, and the second airbag 416 is connected to the first airbag 305 by passing through the dust filter box 301. The short tube is embedded with a second valve 412, and the outer wall of the air inlet cylinder 409 is provided with at least one air inlet hole 410. Through the setting of the electromagnetic clutch 403, after the filtration efficiency of the filter cotton 303 is detected, the controller will output a signal to the electromagnetic clutch 403, so that the rotating column 306 will drive the rotating disk 404 to rotate during the process of being driven to rotate.

[0025] Reference Fig. 9 A fixed sleeve 402 is fixedly installed on the lower end surface of the T-shaped column 401, and an electromagnetic clutch 403 is fixedly installed on the lower end of the rotating column 306. The electromagnetic clutch 403 is electrically connected to the controller, and a rotating disk 404 is fixedly installed on the lower end of the electromagnetic clutch 403. A rotating short shaft 405 is fixedly installed on the lower end of the rotating disk 404. A rocker 406 is rotatably sleeved on the outer wall of the rotating short shaft 405. A slide bar 407 is slidably installed on the inner wall of the fixed sleeve 402. The rocker 406 and the slide bar 407 are rotatably connected. A C-shaped linkage rod 408 is fixedly installed between the piston 411 and the slide bar 407. When the rotating disk 404 is driven to rotate, it will drive the piston 411 to slide inside the air inlet cylinder 409, so as to inject air into the second airbag 416.

[0026] Reference Figures 9 and 10 The second airbag 416 passes through the installation box 413 through a pipeline and is connected to the corrugated square tube 414. The corrugated square tube 414 is slidably connected to the inner wall of the partition 202 during the process of being driven to extend and retract. Two baffles 417 are symmetrically installed at the inner bottom end of the platform 1 and close to the sliding support plate 205. When the corrugated square tube 414 is driven, it will contact the baffle 417 and limit it.

[0027] The working principle of the present invention is as follows: By setting the partition 202, the product can be placed on the upper end surface of the partition 202 for operation (such as assembly) during work. Through the long filter slot 204, the dust attached to the product can enter the gap between the partition 202 and the platform 1 through the long filter slot 204. The driving source 313 is turned on to drive the linkage column 314 to rotate. During the rotation process, the linkage column 314 drives the rotating column 306 to rotate through the bevel gear pair. During the rotation process, the rotating column 306 drives the exhaust fan blades 307 to rotate. The dust filter box 301 rotates inside and generates negative pressure suction inside the dust filter box 301. The exhaust fan blades 307 drive the air inside the dust filter box 301 to flow into the air outlet box 304 during the rotation process. Therefore, when dust enters the gap between the partition plate 202 and the platform 1, it flows from the sliding support plate 205 to the inside of the external box 203 along with the air flowing inside the dust filter box 301, and flows into the dust filter box 301 through the ventilation box 210, so as to intercept dust in the air. By setting the ion static eliminator 201, the ion static eliminator 201 can remove static electricity from the working area of ​​the platform 1 when it is working. When the working area of ​​the platform 1 is removing static electricity, the dust with static electricity removed loses its adhesion effect and flows to the inside of the dust filter box 301 under the negative pressure suction. When the static electricity accumulation in the working area of ​​the platform 1 is too high and the working efficiency of the ion static eliminator 201 cannot achieve an effective static electricity removal effect, some dust with static electricity will adhere to the sliding support plate 205 due to the static electricity force and block the dust outlet hole. The dust accumulated due to static electricity will accumulate at the dust outlet hole of the sliding support plate 205, increasing the wind receiving area of ​​the sliding support plate 205. The increased wind force will drive the connecting frame 208 and The support plate 206 is set inside the external box 203 to descend and compress the first spring 207. The descending connecting frame 208 will drive the sliding piece to descend, so as to change the resistance value of the sliding rheostat 209. After the sliding rheostat 209 changes its resistance value, the voltage change of the sliding rheostat 209 is detected by the voltage detection device and a signal is sent to the controller (not shown in the drawings). The controller controls the ionizing static eliminator 201 to increase the output power through the detection signal. After increasing the output power, the ionizing static eliminator 201 will improve the effect of static removal, so that the dust blocked at the dust outlet hole opened by the sliding support plate 205 is discharged into the dust filter box 301 together with the high-pressure gas. After the dust flows into the dust filter box 301 with the air, it enters the filter cotton 303 through the linkage plate 302 for filtration, and then enters the air outlet box 304 through the first air bag 305. At this time, the air has been filtered, and with the rotation of the exhaust fan blades 307, the air will enter the air outlet pipe 316 through the ventilation pipe 315, and be discharged to the inside of the platform 1 through the air outlet 317 (it should be noted that the air outlet 317 is arranged inside the platform 1, and the air outlet direction of the air outlet 317 is opened near the sliding part, and the height of the air outlet 317 is lower than the head height of the staff when working, so as to avoid the re-exhausted air blowing to the staff and making them uncomfortable). The setting of the filter cotton 303, the dust in the air will be filtered by the filter cotton 303. In the case of long-term filtering, the filtering efficiency of the filter cotton 303 will deteriorate and the internal circulation will deteriorate due to the accumulation of dust, and the air entering the dust filter box 301 will not be able to pass through the filter cotton 303 normally. At this time, when the air passes through the filter cotton 303, it will generate a downward force on the filter cotton 303 to move it down and stretch the second spring 309, so that the first magnetic contact 310 is separated from the second magnetic contact 311 (the first magnetic contact 310 and the second magnetic contact 311 are connected together by magnetism. When the resistance generated by the filter cotton 303 is greater than the magnetic attraction of the magnetic connection, the first magnetic contact 310 will be separated from the second magnetic contact 311). The disengaged first magnetic contact 310 and the second magnetic contact 311 will disconnect the power supply, and the externally connected controller will detect the power disconnection. The controller controls the electromagnetic clutch 403 to be energized, so that the friction disk or contact surface inside the electromagnetic clutch 403 is attracted or pressed, thereby realizing the power transmission, so that the electromagnetic clutch 403 will drive the rotating disk 404 to rotate. During the rotation process, the rotating disk 404 will rotate at its bottom through the rotating short shaft 405 and the rocker 406. The rotating rocker 406 will drive the sliding rod 407 to slide inside the fixed sleeve 402. When the fixed sleeve 402 slides, it will drive the piston 411 to slide inside the intake cylinder 409 through the C-shaped linkage rod 408. During the sliding of the piston 411 inside the air inlet cylinder 409, the outside air will enter the air inlet cylinder 409 from the air inlet hole 410, and the piston 411 will squeeze the air into the second airbag 416 through the second valve 412 when sliding, so that the second airbag 416 will expand, and the air inside the second airbag 416 will generate a certain air pressure. The air pressure generated inside the expanded second airbag 416 will be transmitted to the inside of the first airbag 305 through the pipeline, so that the first airbag 305 will expand and fit the outer circumference of the rotating column 306 to seal the dust filter box 301, so that the air inside the dust filter box 301 cannot flow into the air outlet box 304, and at the same time the controller will send a signal to the linear driver 308.The linear drive 308 will drive the linkage plate 302 and the filter cotton 303 to rise inside the dust filter box 301 to a position higher than the air inlet of the ventilation box 210. After continuously injecting air, the air with air pressure inside the first air bag 305 and the second air bag 416 will be transported to the inside of the corrugated square tube 414 through the pipeline, so that the corrugated square tube 414 will expand and retract inside the installation box 413. The retracted corrugated square tube 414 will drive the push plate 415 to move and contact the baffle 417, and abut against one side of the baffle 417. With the continuous injection of air with air pressure, the air pressure inside the corrugated square tube 414 will exceed the preset value of the third valve 418, and the air inside the corrugated square tube 414 will be ejected to the sliding support plate 205 through the second air bag 416. The ejected air has a certain pressure and drives the sliding support The impurities accumulated at the dust outlet hole of the plate 205 enter the interior of the dust filter box 301 through the external box 203 and the ventilation box 210, while the air entering through the expanded first airbag 305 cannot flow into the air outlet box 304, but flows into the filter cotton 303 which is moved and higher than the ventilation box 210, and the filter cotton 303 is backblown to blow out the impurities inside the filter cotton 303. The blown impurities will flow into the dust exhaust pipe 319 through the first valve 318, and the dust exhaust pipe 319 can be externally collected by a collecting device to collect the blown impurities, so as to clean up the dust and impurities blocked inside the filter cotton 303. It should also be noted that the first valve 318, the second valve 412 and the third valve 418 are all pressure valves, which are set with a certain pressure setting value. After the pressure exceeds the set setting value, the valve will open and allow air to flow; The time for backblowing the filter cotton 303 is set on the premise that the dust can be completely blown out. After the return of the filter cotton 303 is completed, through the setting of the second spring 309, the first magnetic contact 310 will re-contact the second magnetic contact 311 to be energized, and transmit a signal to the controller to disconnect the power supply of the electromagnetic clutch 403. Then the first airbag 305 and the second airbag 416 will retract, and the expanded and retractable corrugated square tube 414 will retract to the inside of the installation box 413, and the linear drive 308 will re-drive the linkage plate 302 and the filter cotton 303 to return to their original positions to re-filter the flowing air.

[0028] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of the present invention.

Claims

1. A multifunctional semiconductor anti-static workbench, characterized in that: include: Platform (1); A static electricity removal component (2), the static electricity removal component (2) comprising ion static electricity eliminators (201) embedded on both sides of the platform (1); A dust removal component (3), the dust removal component (3) being used to filter dust and discharge the filtered air back into the working area of ​​the platform (1) for recycling, the dust removal component (3) comprising a linkage plate (302), a filter cotton (303) being elastically mounted on the lower end of the linkage plate (302), the linkage plate (302) and the filter cotton (303) being driven to rise and fall; A backwash assembly (4), the backwash assembly (4) comprising a mounting box (413) fixedly mounted on one side of a platform (1), a corrugated square tube (414) fixedly mounted on the inner wall of the mounting box (413), one end of the corrugated square tube (414) passing through the platform (1) and fixedly mounted with a push plate (415), a plurality of third valves (418) embedded in a linear array in the push plate (415).

2. A multifunctional semiconductor anti-static workbench according to claim 1, characterized in that: A partition (202) is fixedly mounted on the inner bottom end of the platform (1), the partition (202) being provided with a dust inlet portion and a sliding portion, the dust inlet portion being provided with a plurality of long filter slots (204), a sliding support plate (205) being embedded in the platform (1) at a position away from the installation box (413), the sliding support plate (205) being provided with a plurality of dust outlet holes, an external box (203) being fixedly mounted on the lower end surface of the platform (1) and at a position close to the sliding support plate (205), support plates (206) being fixedly mounted on the inner walls of both sides of the external box (203), the support plates (206) being slidably connected to the sliding support plate (205), the sliding support plate (206) being provided with a plurality of dust outlet holes, and the external box (203) being fixedly mounted on the inner walls of both sides of the external box (203), the support plates (206) being slidably connected to the sliding support plate (205), and the sliding support plate (206) being provided with a plurality of dust outlet holes. A connecting frame (208) is fixedly installed on the lower end surface of the external box (203), a sliding rheostat (209) is fixedly installed at the middle position of the inner bottom wall of the external box (203), the sliding rheostat (209) is composed of a rheostat rod and a sliding plate slidably arranged on the rheostat rod, the sliding plate is fixedly connected to the connecting frame (208), the sliding rheostat (209) is electrically connected to a voltage detection device and a controller, the ion static eliminator (201) is connected to the controller signal, one side of the external box (203) is connected to a ventilation box (210), and a first spring (207) is fixedly installed between the lower end surface of the sliding support plate (205) and the inner bottom wall of the external box (203).

3. A multifunctional semiconductor anti-static workbench according to claim 2, characterized in that: A dust filter box (301) is fixedly mounted at the middle position of the lower end surface of the platform (1); the dust filter box (301) is fixedly connected to the ventilation box (210); a linear drive (308) is fixedly mounted on one side of the dust filter box (301); a driving end of the linear drive (308) passes through the dust filter box (301) and is fixedly connected to a linkage plate (302); the linkage plate (302) is slidably connected to the dust filter box (301); at least one second spring (309) is fixedly mounted between the linkage plate (302) and the filter cotton (303); a first magnetic contact (310) and a second magnetic contact (311) are respectively fixed at corresponding positions of the linkage plate (302) and the filter cotton (303); the first magnetic contact (310) and the second magnetic contact (311) are magnetically matched; the first magnetic contact (310) and the second magnetic contact (311) are magnetically coupled; , the second magnetic contact (311) is electrically connected to the controller via an external power supply, a first air bag (305) is fixedly mounted on the inner bottom end of the dust filter box (301), an air outlet box (304) is fixedly mounted on the lower end surface of the dust filter box (301), a rotating column (306) is rotatably mounted in the air outlet box (304), the upper end of the rotating column (306) extends to the inner wall of the dust filter box (301), an exhaust fan blade (307) is fixedly mounted on the outer wall of the rotating column (306), the rotating column (306) is driven to rotate, both sides of the air outlet box (304) are connected to ventilation pipes (315), and an air outlet pipe (316) is fixedly mounted on the side of the two ventilation pipes (315) away from the dust filter box (301), and a plurality of air outlets (317) facing the sliding portion are opened in the air outlet pipe (316).

4. A multifunctional semiconductor anti-static workbench according to claim 3, characterized in that: A vertical plate (312) is fixedly mounted on the lower end surface of the platform (1) at a position away from the dust filter box (301); a driving source (313) is fixedly mounted on one side of the vertical plate (312) away from the dust filter box (301); an output end of the driving source (313) passes through the vertical plate (312) and is fixedly connected to a linkage column (314); and transmission is performed between the linkage column (314) and the rotating column (306) via a bevel gear pair.

5. A multifunctional semiconductor anti-static workbench according to claim 4, characterized in that: A T-shaped column (401) is fixedly mounted on the lower end surface of the platform (1) and at a position away from the vertical plate (312); an air intake cylinder (409) is fixedly mounted on the upper position of one side of the T-shaped column (401) away from the vertical plate (312); a piston (411) is slidably mounted on the inner wall of the air intake cylinder (409); the piston (411) is driven to slide back and forth on the inner wall of the air intake cylinder (409); and the lower end surface of the platform (1) and at a position between the vertical plate (312) and the T-shaped column (4 01), a second airbag (416) is fixedly installed between the air inlet cylinder (409), a short tube is connected to the side of the air inlet cylinder (409) close to the second airbag (416), the short tube passes through the T-shaped column (401) and is connected to the second airbag (416), the second airbag (416) is connected to the first airbag (305) by passing through the dust filter box (301), a second valve (412) is embedded in the short tube, and at least one air inlet hole (410) is opened on the outer wall of the air inlet cylinder (409).

6. A multifunctional semiconductor anti-static workbench according to claim 5, characterized in that: A fixed sleeve (402) is fixedly mounted on the lower end surface of the T-shaped column (401); an electromagnetic clutch (403) is fixedly mounted on the lower end of the rotating column (306); the electromagnetic clutch (403) is electrically connected to a controller; a rotating disk (404) is fixedly mounted on the lower end of the electromagnetic clutch (403); a rotating short shaft (405) is fixedly mounted on the lower end of the rotating disk (404); a rocker (406) is provided on the rotating sleeve of the outer wall of the rotating short shaft (405); a sliding rod (407) is slidably mounted on the inner wall of the fixed sleeve (402); the rocker (406) and the sliding rod (407) are rotationally connected; and a C-shaped linkage rod (408) is fixedly mounted between the piston (411) and the sliding rod (407).

7. A multifunctional semiconductor anti-static workbench according to claim 6, characterized in that: The second airbag (416) passes through the installation box (413) through a pipeline and is connected to the corrugated square tube (414). The corrugated square tube (414) is slidably connected to the inner wall of the partition (202) during the process of being driven to extend and retract. Two baffles (417) are symmetrically installed at the inner bottom end of the platform (1) and close to the sliding support plate (205).

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