A radiation structure clamping device and a microwave application method

Abstract

The present invention relates to the field of precision measurement, and particularly relates to a radiation structure clamping device and a microwave application method. A radiation structure is clamped between a first connection part and a second connection part in the radiation structure clamping device. The displacement stage moves to drive the radiation structure between the first connection part and the second connection part to move, adjusting the position of the radiation structure, so that the radiation structure has the property of being located at any position on the surface of the sample to be measured, meeting the test requirements of multiple and different measurement positions, and realizing the measurement of different positions to be measured of the sample to be measured; the radiation structure is cooled by a first cooling part and a second cooling part, and the temperature of the radiation structure is stabilized within a certain range, realizing the temperature control of the radiation structure, avoiding the temperature drift phenomenon caused by the increase in the temperature of the radiation structure heating the sample to be measured, that is, avoiding the disappearance of the color center position from the test field of view after the sample to be measured expands due to heat, resulting in test failure.

Description

Technical Field

[0001] The present invention relates to the field of precision measurement, and particularly relates to a radiation structure clamping device and a microwave application method. Background Art

[0002] In the optically detected magnetic resonance technology for quantum measurement, the radiation structure can generate a microwave field to regulate the spin population of color centers, and is an important component of the optically detected magnetic resonance device.

[0003] Since the microwave efficiency is inversely proportional to the cube of the distance, during the test process, the radiation structure needs to be as close as possible to the surface of the sample to be measured to better regulate the color centers. Currently, the commonly used method is to weld copper wires on the surface of the sample to be measured as the radiation structure. However, after welding the copper wires, the relative positions of the copper wires and the sample to be measured are fixed, and only the area near the welded copper wires can be measured. If other positions need to be measured, copper wires need to be re-welded at the new measurement positions. Therefore, the existing method of welding copper wires cannot meet the rapid test requirements for multiple and different measurement positions; moreover, as the microwave power increases, the heat generated by the copper wires will also continuously increase, resulting in the temperature of the sample to be measured rising with the increase in the temperature of the copper wires. After the sample to be measured expands due to heat, the position of the color center changes, causing the position of the color center to disappear from the test field of view, and the microscope cannot collect the corresponding optical signal, resulting in test failure and affecting the test results. Summary of the Invention

[0004] To solve the above technical problems, the present invention provides a radiation structure clamping device and a microwave application method.

[0005] To achieve the above object, the present invention provides a radiation structure clamping device, including:

[0006] A displacement stage, a first radio frequency arm, and a second radio frequency arm. The first radio frequency arm and the second radio frequency arm are fixed on the surface of the displacement stage and are arranged oppositely, and the first radio frequency arm and the second radio frequency arm move with the displacement stage;

[0007] The first radio frequency arm includes a first bracket, a first fixing part, a first refrigerating part, and a first connecting part; the first fixing part is arranged on the first bracket and is close to one end of the first bracket, and the first fixing part is used to fix the first radio frequency arm on the surface of the displacement stage; at the other end of the first bracket, the first connecting part and the first refrigerating part are arranged, the first connecting part and the first refrigerating part are located on opposite sides of the first bracket, and one end of the first refrigerating part and the first connecting part are connected;

[0008] The second radio frequency arm includes a second bracket, a second fixing part, a second refrigerating part, and a second connecting part; the second fixing part is arranged on the second bracket and close to one end of the second bracket, and the second fixing part is used to fix the second radio frequency arm on the surface of the displacement stage; at the other end of the second bracket, there are provided the second connecting part and the second refrigerating part, the second connecting part and the second refrigerating part are located on opposite sides of the second bracket and one ends of the second connecting part and the second refrigerating part are connected;

[0009] Wherein, the other end of the first connecting part and the other end of the second connecting part are arranged oppositely, a radiation structure is clamped between the other end of the first connecting part and the other end of the second connecting part, the displacement stage moves to drive the radiation structure between the first connecting part and the second connecting part to move, so as to adjust the position of the radiation structure, and the radiation structure is cooled by the first refrigerating part and the second refrigerating part.

[0010] Optionally, the first refrigerating part includes: a first heat sink, a first refrigerating chip, and a first heat conducting chip; one side of the first heat conducting chip is arranged at the other end of the first bracket, and on the other side of the first heat conducting chip, there are successively arranged the first refrigerating chip and the first heat sink, and one side of the first heat conducting chip is connected to one end of the first connecting part; the second refrigerating part includes: a second heat sink, a second refrigerating chip, and a second heat conducting chip; one side of the second heat conducting chip is arranged at the other end of the second bracket, and on the other side of the second heat conducting chip, there are successively arranged the second refrigerating chip and the second heat sink, and one side of the second heat conducting chip is connected to one end of the second connecting part.

[0011] Optionally, the first heat conducting chip and the second heat conducting chip are polycrystalline diamond chips; the first refrigerating chip and the second refrigerating chip are semiconductor refrigerating chips; the materials of the first heat sink and the second heat sink are one of aluminum and copper.

[0012] Optionally, the first connecting part includes a first nut and a first connecting rod, an external thread is arranged at one end of the first connecting rod, an internal thread matching with the first connecting rod is arranged inside the first nut, a small hole is opened at the head end of the first nut for the radiation structure to pass through, and the other end of the first connecting rod is connected to the first refrigerating part; the second connecting part includes a second nut and a second connecting rod, an external thread is arranged at one end of the second connecting rod, an internal thread matching with the second connecting rod is arranged inside the second nut, a small hole is opened at the head end of the second nut for the radiation structure to pass through, and the other end of the second connecting rod is connected to the second refrigerating part.

[0013] Optionally, both the first connecting portion and the second connecting portion are downward and inclined relative to each other at an angle such that the distance between one end of the first connecting portion and one end of the second connecting portion is greater than the distance between the other end of the first connecting portion and the other end of the second connecting portion, and the first connecting portion and the second connecting portion are in the same vertical plane.

[0014] Optionally, the first fixing portion includes a first adjusting screw and a first fixing member matching the first adjusting screw, and the first bracket is fixed to the surface of the displacement stage through the first adjusting screw and the first fixing member; the second fixing portion includes a second adjusting screw and a second fixing member matching the second adjusting screw, and the second bracket is fixed to the surface of the displacement stage through the second adjusting screw and the second fixing member.

[0015] Optionally, through the cooperation of the first adjusting screw and the first fixing member, and the second adjusting screw and the second fixing member, the positions of the first radio frequency arm and the second radio frequency arm on the surface of the displacement stage are respectively adjusted, so as to adjust the tension degree of the radiation structure.

[0016] Optionally, the radiation structure is a copper wire.

[0017] Optionally, the temperature range during the operation of the radiation structure is 20 degrees Celsius to 30 degrees Celsius.

[0018] The present invention also provides a microwave application method, including:

[0019] Providing a radiation structure clamping device as described above;

[0020] Installing the radiation structure between the first connecting portion and the second connecting portion of the radiation structure clamping device;

[0021] Providing a microwave signal to the radiation structure, and the heat generated by the radiation structure is transferred to the first refrigerating portion and the second refrigerating portion through the first connecting portion and the second connecting portion, and the radiation structure is cooled by the first refrigerating portion and the second refrigerating portion until the temperature of the radiation structure is stable;

[0022] Providing a sample to be tested, and placing the sample to be tested on the sample stage;

[0023] Adjusting the positions of the sample stage and the displacement stage of the radiation structure clamping device, so that the first position to be tested on the surface of the sample to be tested is close to the radiation structure and then testing is performed, and this step is repeated until all positions to be tested are completed.

[0024] In summary, the advantages and beneficial effects of the present invention are:

[0025] The present invention provides a radiation structure clamping device and a microwave application method. The radiation structure clamping device includes: a first radio frequency arm and a second radio frequency arm, the first radio frequency arm and the second radio frequency arm are fixed on the surface of the displacement stage and are arranged oppositely, and the first radio frequency arm and the second radio frequency arm move along with the displacement stage; the first radio frequency arm includes a first bracket, a first fixing part, a first refrigerating part, and a first connecting part, and the second radio frequency arm includes a second bracket, a second fixing part, a second refrigerating part, and a second connecting part.

[0026] A radiation structure is clamped between the first connecting part and the second connecting part. The movement of the displacement stage drives the overall movement of the radiation structure between the first connecting part and the second connecting part, thereby adjusting the position of the radiation structure, so that the radiation structure has the property of being located at any position on the surface of the sample to be measured, meeting the rapid test requirements for multiple and different measurement positions, and realizing the measurement of different positions to be measured of the sample to be measured; the radiation structure is cooled by the first refrigerating part and the second refrigerating part and the temperature of the radiation structure is stabilized within a certain range, realizing the temperature control of the radiation structure, and avoiding the change of the color center position caused by the continuous increase of the temperature of the radiation structure, resulting in the disappearance of the color center from the test field of view and the microscope being unable to collect the corresponding optical signal, leading to the failure of the test. Description of the Drawings

[0027] Figure 1 It is a schematic structural diagram of a radiation structure clamping device according to an embodiment of the present invention;

[0028] Figure 2 It is a schematic structural diagram of the first radio frequency arm of a radiation structure clamping device according to an embodiment of the present invention;

[0029] Figure 3 It is a schematic structural diagram of the second radio frequency arm of a radiation structure clamping device according to an embodiment of the present invention;

[0030] Figure 4 It is a front view schematic diagram of the first radio frequency arm of a radiation structure clamping device according to an embodiment of the present invention;

[0031] Figure 5 It is a right view schematic diagram of the first radio frequency arm of a radiation structure clamping device according to an embodiment of the present invention

[0032] Figure 6 It is a cross-sectional schematic diagram of the connecting part of the first radio frequency arm of a radiation structure clamping device according to an embodiment of the present invention;

[0033] Figure 7 It is a schematic flow diagram of a microwave application method according to an embodiment of the present invention.

[0034] 1. Displacement stage, 2. Radiation structure, 10. First RF arm, 20. Second RF arm, 31. First fixing part, 32. First refrigeration part, 33. First connecting part, 41. Second fixing part, 42. Second refrigeration part, 43. Second connecting part, 301. First nut, 302 First connecting rod, 303. First heat conducting sheet, 304. First refrigeration sheet, 305. First heat sink, 306. First bracket, 307. First fixing piece, 308. First RF wire, 309. First adjusting screw, 401. Second nut, 402 Second connecting rod, 403. Second heat conducting sheet, 404. Second refrigeration sheet, 405. Second heat sink, 406. Second bracket, 407. Second fixing piece, 408. Second RF wire, 409. Second adjusting screw. Detailed implementation mode

[0035] For optically detected magnetic resonance testing of color centers in materials such as diamond, silicon carbide, or two-dimensional materials, a copper wire is used as the radiation structure to provide microwaves to the color center. The existing radiation structure determines the welding points based on the operator's experience and welds the copper wire to the surface of the sample to be tested. However, this method has limitations. On the one hand, after welding the copper wire, the copper wire cannot be moved, and the test position is relatively fixed, and only the area near the radiation structure can be tested. If the test position is incorrect and the test position needs to be adjusted, the operator's experience needs to be used to find a new test position again and weld the copper wire again. Each time, the test position is determined by experience and welded repeatedly, resulting in poor consistency and stability of the welding effect. Moreover, when welding the copper wire, the copper wire needs to be tightened and pressed on the surface of the sample to be tested, and the tension of the copper wire and its precise position on the surface of the sample to be tested are uncontrollable, which affects the test effect. On the other hand, during the test, to provide a microwave signal to the copper wire, the copper wire generates Joule heat and rapidly heats up under the action of the microwave. And as the power of the microwave signal increases, the heat generated by the radiation structure also increases, resulting in uncontrollable heating of the copper wire. During the test, the copper wire needs to be as close as possible to the sample to be tested, and the heat of the copper wire is conducted to the sample to be tested, causing the temperature of the sample to be tested to rise, resulting in thermal expansion of the sample to be tested, causing the color center (bright spot) observed under the microscope to move and disappear from the field of view, resulting in the problem of temperature drift at the test point, which also leads to the failure of microscopic positioning. Moreover, due to the diameter of the radiation structure being only a few hundred micrometers and the limitation of the operating space, it is difficult to directly provide a refrigeration part for the radiation structure in the prior art, which also leads to the radiation structure being difficult to maintain a stable temperature and affects the test results. To solve the above problems, the present invention provides a radiation structure clamping device and a microwave application method.

[0036] To make the objectives, technical solutions, and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with the specific embodiments of the present invention and the corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0037] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation to the present invention.

[0038] The present invention provides a radiation structure clamping device, as Figures 1 to 5 shown, comprising:

[0039] a displacement stage 1, a radiation structure 2, a first radio frequency arm 10, and a second radio frequency arm 20. The first radio frequency arm 10 and the second radio frequency arm 20 are fixed on the surface of the displacement stage 1 and are arranged opposite to each other. The first radio frequency arm 10 and the second radio frequency arm 20 move with the displacement stage 1. The radiation structure 2 is fixed to one end of the first radio frequency arm 10 and one end of the second radio frequency arm 20;

[0040] The first radio frequency arm 10 includes a first bracket 306, a first fixing part 31, a first refrigerating part 32, and a first connecting part 33. The first fixing part 31 is arranged on the first bracket 306 and close to one end of the first bracket 306. The first fixing part 31 is used to fix the first radio frequency arm 10 on the surface of the displacement stage 1. One end of the first refrigerating part 32 is arranged at the other end of the first bracket 306. One end of the first connecting part 33 is connected to the other end of the first refrigerating part 32;

[0041] The second radio frequency arm 20 includes a second bracket 406, a second fixing part 41, a second refrigerating part 42, and a second connecting part 43. The second fixing part 41 is arranged on the second bracket 406 and close to one end of the first bracket 306. The second fixing part 41 is used to fix the second radio frequency arm 20 on the surface of the displacement stage 1. One end of the second refrigerating part 42 is arranged at the other end of the second bracket 406. One end of the second connecting part 43 is connected to the other end of the second refrigerating part 42;

[0042] Wherein, the other ends of the first connecting portion 33 and the second connecting portion 43 are oppositely arranged, a radiation structure 2 is clamped between the other ends of the first connecting portion 33 and the second connecting portion 43, the displacement stage 1 moves to drive the movement of the radiation structure 2 between the first connecting portion 33 and the second connecting portion 43, the position of the radiation structure 2 is adjusted, and the radiation structure 2 is cooled by the first cooling portion 32 and the second cooling portion 42.

[0043] Specifically, in the embodiment of the present invention, the radiation structure 2 is a copper wire, and the copper wire is clamped by the first connecting portion 33 of the first radio frequency arm 10 and the second connecting portion 43 of the second radio frequency arm 20, so that the radiation structure 2 is fixed between the first radio frequency arm 10 and the second radio frequency arm 20.

[0044] In the embodiment of the present invention, the first cooling portion 32 includes: a first heat sink 305, a first thermoelectric cooler 304 and a first heat conducting sheet 303; one side of the first heat conducting sheet 303 is arranged at the other end of the first bracket 306, the other side of the first heat conducting sheet 303 is sequentially provided with the first thermoelectric cooler 304 and the first heat sink 305, and one side of the first heat conducting sheet 303 is connected to one end of the first connecting portion 33; the second cooling portion 42 includes: a second heat sink 405, a second thermoelectric cooler 404 and a second heat conducting sheet 403; one side of the second heat conducting sheet 403 is arranged at the other end of the second bracket 406, the other side of the second heat conducting sheet 403 is sequentially provided with the second thermoelectric cooler 404 and the second heat sink 405, and one side of the second heat conducting sheet 403 is connected to one end of the second connecting portion 43.

[0045] In other embodiments, the first connecting portion and the first cooling portion are both arranged at the other end of the first bracket, the first connecting portion and the first cooling portion are located on opposite sides of the first bracket, and the first connecting portion is connected to the first cooling portion through the first bracket; the second connecting portion and the second cooling portion are both arranged at the other end of the second bracket, the second connecting portion and the second cooling portion are located on opposite sides of the second bracket, and the second connecting portion is connected to the second cooling portion through the second bracket.

[0046] In the embodiment of the present invention, the first cooling portion 32 and the second cooling portion 42 are connected to an external temperature controller, so that the cooling temperatures of the first cooling portion 32 and the second cooling portion 42 are stably maintained at a set temperature value, and the temperature of the radiation structure 2 during operation is stably maintained at the set temperature value.

[0047] In an embodiment of the present invention, the first refrigeration chip 304 and the second refrigeration chip 404 are electronic refrigeration chips. One side of the first refrigeration chip 304 for refrigeration is connected to one end of the first connection part 33, and one side of the first refrigeration chip 304 for generating heat is connected to one side of the first heat sink 305; One side of the second refrigeration chip 404 for refrigeration is connected to one end of the second connection part 43, and one side of the second refrigeration chip 404 for generating heat is connected to one side of the second heat sink 405.

[0048] In an embodiment of the present invention, the other sides of the first heat sink 305 and the second heat sink 405 are both heat dissipation structures with a plurality of fins arranged in parallel, which is convenient for dissipating heat from the refrigeration chips.

[0049] In an embodiment of the present invention, the first refrigeration part 32 and the first bracket 306, and the second refrigeration part 42 and the second bracket 406 are fixed by matching threads and screws.

[0050] In other embodiments, the first refrigeration part and the second refrigeration part are respectively pasted on the first bracket and the second bracket.

[0051] In an embodiment of the present invention, the first heat conducting sheet 303 and the second heat conducting sheet 403 are polycrystalline diamond sheets or other suitable heat conducting materials; the first refrigeration chip 304 and the second refrigeration chip 404 are semiconductor refrigeration chips or other suitable cooling materials; the materials of the first heat sink 305 and the second heat sink 405 are aluminum, copper or other materials with good heat conductivity.

[0052] In an embodiment of the present invention, the sizes of the first refrigeration chip 304 and the second refrigeration chip 404 are 2 cm × 4 cm.

[0053] In an embodiment of the present invention, the temperature range of the radiation structure 2 during operation is 20 degrees Celsius to 30 degrees Celsius.

[0054] The first refrigeration chip 304 and the second refrigeration chip 404 are connected to the radiation structure 2 through the first heat conducting sheet 303, the second heat conducting sheet 403, the first connection part 33 and the second connection part 43, so as to control the radiation structure 2 at a stable operating temperature, without being affected by the change in heat generation caused by the change in microwave power. The sample to be measured will not disappear from the observed field of view due to the temperature drift problem, making the test stable. Moreover, the first refrigeration chip 304 and the second refrigeration chip 404 are small in volume and not affected by the operating space.

[0055] In other embodiments, the first refrigeration unit and the second refrigeration unit adopt structures and materials with fast heat dissipation performance, so that the heat generated by the radiation structure is quickly transferred, thereby achieving the purpose of reducing the temperature of the radiation structure.

[0056] The heat generated by the radiation structure 2 during operation is transferred to the first heat conducting sheet 303 and the second heat conducting sheet 403 through the first connecting portion 33 and the second connecting portion 43 connected to the radiation structure 2. At the same time, power is supplied to the first refrigeration sheet 304 and the second refrigeration sheet 404, and the first heat conducting sheet 303 and the second heat conducting sheet 403 are cooled by the first refrigeration sheet 304 and the second refrigeration sheet 404, thereby achieving the purpose of cooling the radiation structure 2 and keeping the temperature of the radiation structure 2 within a certain range, making the temperature stable when the radiation structure 2 is working, avoiding the problem that the temperature of the radiation structure 2 rises due to heat generation, causing the temperature of the sample to be measured to rise and expand thermally, resulting in a temperature drift problem in the test results, improving the stability of the test environment, and avoiding the traditional radiation structure 2 being welded to the surface of the sample to be measured. Since the diameter of the radiation structure 2 is only a few hundred micrometers, it is difficult to provide a refrigeration unit for the radiation structure 2, and the temperature of the sample to be measured is affected by the temperature rise of the radiation structure 2, resulting in the sample to be measured expanding thermally, causing a temperature drift problem and affecting the test effect.

[0057] In the embodiments of the present invention, such as Figure 6As shown, the first connecting portion 33 includes a first nut 301 and a first connecting rod 302. One end of the first connecting rod 302 is provided with an external thread, and the inside of the first nut 301 is provided with an internal thread that mates with the first connecting rod 302. A small hole is opened at the head end of the first nut 301 for the radiation structure 2 (copper wire) to pass through. The other end of the first connecting rod 302 is connected to the first refrigerating portion 32. After one end of the radiation structure 2 (copper wire) passes through the small hole opened at the head of the first nut 301 and winds around one end of the first connecting rod 302 for several turns, the first nut 301 and the first connecting rod 302 are tightened by the matching threads to fix one end of the radiation structure 2 (copper wire). The second connecting portion 43 includes a second nut 401 and a second connecting rod 402. One end of the second connecting rod 402 is provided with an external thread, and the inside of the second nut 401 is provided with an internal thread that mates with the second connecting rod 402. A small hole is opened at the head end of the second nut 401 for the radiation structure 2 (copper wire) to pass through. The other end of the second connecting rod 402 is connected to the second refrigerating portion 42. After one end of the radiation structure 2 (copper wire) passes through the small hole opened at the head of the second nut 401 and winds around one end of the second connecting rod 402 for several turns, the second nut 401 and the second connecting rod 402 are tightened by the matching threads to fix the other end of the radiation structure 2 (copper wire), and the radiation structure 2 is fixed through the first connecting portion 33 and the second connecting portion 43.

[0058] In an embodiment of the present invention, the other end of the first connecting rod 302 serves as one end of the first connecting portion 33, and the first connecting portion 33 is adhered to the first heat conducting sheet 303 so that the first connecting portion 33 is connected to the first refrigerating portion 32. The other end of the second connecting rod 402 serves as one end of the second connecting portion 43, and the second connecting portion 43 is adhered to the second heat conducting sheet 403 so that the second connecting portion 43 is connected to the second refrigerating portion 42.

[0059] In an embodiment of the present invention, both the first connecting portion 33 and the second connecting portion 43 are downwardly and relatively inclined at a certain angle, such that the distance between one end of the first connecting portion 33 and one end of the second connecting portion 43 is greater than the distance between the other end of the first connecting portion 33 and the other end of the second connecting portion 43, so that the length of the radiation structure 2 (copper wire) located between the other end of the first connecting portion 33 and the other end of the second connecting portion 43 is as short as possible, reducing the path from the radiation structure 2 to the first refrigerating portion 32 and the second refrigerating portion 42, thereby enabling the radiation structure 2 (copper wire) to quickly exchange heat with the first refrigerating portion 32 and the second refrigerating portion 42, achieving rapid cooling of the radiation structure 2; at the same time, through a certain inclination angle, a certain space is reserved for the lens of the microscope when testing the sample to be tested subsequently, facilitating the testing of the sample to be tested.

[0060] In an embodiment of the present invention, the first connecting portion 33 and the second connecting portion 43 are in the same vertical plane, and the angles at which the first connecting portion 33 and the second connecting portion 43 are downwardly inclined are both 45 degrees.

[0061] In other embodiments, the angles at which the first connecting portion and the second connecting portion are downwardly inclined are adjusted by rotating the first bracket and the second bracket to drive the first connecting portion and the second connecting portion to rotate by a certain angle, and the angles at which the first connecting portion and the second connecting portion are downwardly inclined are determined according to actual situations.

[0062] In an embodiment of the present invention, the ends of the first connecting rod 302 and the second connecting rod 402 provided with external threads are round heads, enabling the first connecting rod 302 and the second connecting rod 402 to better cooperate with the first nut 301 and the second nut 401.

[0063] In an embodiment of the present invention, insulation treatments are performed at the connection between the first connecting rod 302 and the first heat conducting portion and at the connection between the second connecting rod 402 and the second heat conducting portion to prevent current leakage, short circuits, or other electrical faults, ensuring the safety and reliability of the device.

[0064] In an embodiment of the present invention, the first fixing portion 31 includes a first adjusting screw 309 and a first fixing member 307 that mates with the first adjusting screw 309. The first fixing member 307 is integrated on the first bracket 306, and the first bracket 306 is fixed to the surface of the displacement stage 1 by the first adjusting screw 309 and the first fixing member 307. The second fixing portion 41 includes a second adjusting screw 409 and a second fixing member 407 that mates with the second adjusting screw 409. The second fixing member 407 is integrated on the second bracket 406, and the second bracket 406 is fixed to the surface of the displacement stage 1 by the second adjusting screw 409 and the second fixing member 407.

[0065] In an embodiment of the present invention, the cooperation between the first adjusting screw 309 and the first fixing member 307 adjusts the first bracket 306, and the cooperation between the second adjusting screw 409 and the second fixing member 407 adjusts the second bracket 406. Accordingly, the positions of the first radio frequency arm 10 and the second radio frequency arm 20 on the surface of the displacement stage 1 are adjusted, so as to adjust the included angle between the first radio frequency arm 10 and the second radio frequency arm 20, thereby adjusting the tension degree of the radiation structure 2 (copper wire). Specifically, with the first fixing member 307 as the center, the position of the first bracket 306 on the surface of the displacement stage 1 is adjusted, and with the second fixing member 407 as the center, the position of the second bracket 406 on the surface of the displacement stage 1 is adjusted. Correspondingly, the positions of the first radio frequency arm 10 and the second radio frequency arm 20 on the surface of the displacement stage 1 can be adjusted.

[0066] In an embodiment of the present invention, the first fixing member 307 includes an annular structure connected to the first bracket 306, and the inside of the first fixing member 307 has an internal thread that mates with the first adjusting screw 309. The second fixing member 407 includes an annular structure connected to the second bracket 406, and the inside of the second fixing member 407 has an internal thread that mates with the second adjusting screw 409.

[0067] When the first adjusting screw 309 and the second adjusting screw 409 are loosened, the positions of the first radio frequency arm 10 and the second radio frequency arm 20 on the surface of the displacement stage 1 are adjusted until the radiation structure 2 between the first connecting portion 33 and the second connecting portion 43 is tightened. Then, the first adjusting screw 309 and the second adjusting screw 409 are tightened to fix the first radio frequency arm 10 and the second radio frequency arm 20 on the surface of the displacement stage 1, avoiding the movement of the first radio frequency arm 10 and the second radio frequency arm 20 from affecting the test results.

[0068] In an embodiment of the present invention, the radiation structure clamping device further includes a first radio frequency line 308 and a second radio frequency line 408; the first radio frequency line 308 is arranged along the first bracket 306, one end of the first radio frequency line 308 is connected to the other end of the first connecting rod 302, and the other end of the first radio frequency line 308 is connected to a radio frequency source; the second radio frequency line 408 is arranged along the second bracket 406, one end of the second radio frequency line 408 is connected to the other end of the second connecting rod 402, and the other end of the second radio frequency line 408 is grounded. Microwave signals are provided to the radiation structure 2 through the first radio frequency line 308 and the second radio frequency line 408.

[0069] In other embodiments, the positions of the first radio frequency line and the second radio frequency line are determined according to actual situations.

[0070] The present invention also provides a method for applying a microwave field, as Figure 7 shown, including:

[0071] Step S10, providing a radiation structure clamping device as described above;

[0072] Step S20, installing the radiation structure between the first connection part and the second connection part of the radiation structure clamping device;

[0073] Step S30, providing microwave signals to the radiation structure. The heat generated by the radiation structure is transferred to the first refrigerating part and the second refrigerating part through the first connection part and the second connection part, and the radiation structure is cooled by the first refrigerating part and the second refrigerating part until the temperature of the radiation structure is stable;

[0074] Step S40, providing a sample to be tested and placing the sample to be tested on the sample stage;

[0075] Step S50, adjusting the positions of the sample stage and the displacement stage of the radiation structure clamping device so that the first position to be tested on the surface of the sample to be tested is close to the radiation structure and then performing a test. Repeat this step until all positions to be tested are completed.

[0076] Specifically, execute step S10 to provide a radiation structure clamping device as described above.

[0077] Execute S20 to install the radiation structure 2 between the first connection part 33 and the second connection part 43 of the radiation structure clamping device.

[0078] Both ends of the radiation structure 2 pass through the first nut 301 of the first connection part 33 and the second nut 401 of the second connection part 43 respectively. After winding several turns on the corresponding first connecting rod 302 and second connecting rod 402, the first nut 301 and the first connecting rod 302 are tightened, and the second nut 401 and the second connecting rod 402 are tightened, so that the radiation structure 2 is fixed between the first connection part 33 and the second connection part 43.

[0079] In the embodiment of the present invention, the first fixing part 31 and the second fixing part 41 are adjusted to make the radiation structure 2 in tension. Loosen the first adjusting screw 309 of the first fixing part 31 and the second adjusting screw 409 of the second fixing part 41, and adjust the positions of the first radio frequency arm 10 and the second radio frequency arm 20 on the surface of the displacement stage 1 until the radiation structure 2 located between the first connection part 33 and the second connection part 43 is in tension, and make the first radio frequency arm 10 and the second radio frequency arm 20 fixed on the surface of the displacement stage 1 to avoid the movement of the first radio frequency arm 10 and the second radio frequency arm 20 from affecting the test results.

[0080] Execute step S30 to provide a microwave signal for the radiation structure 2. The heat generated by the radiation structure 2 is transferred to the first refrigerating part 32 and the second refrigerating part 42 through the first connection part 33 and the second connection part 43. Set the refrigerating temperature, and cool down the radiation structure 2 through the first refrigerating part 32 and the second refrigerating part 42 until the temperature of the radiation structure 2 is stable.

[0081] In the embodiment of the present invention, turn on the radio frequency source, and use the first radio frequency line 308 arranged along the first bracket 306 and the second radio frequency line 408 arranged along the second bracket 406 to provide a microwave signal for the radiation structure 2. One end of the first radio frequency line 308 is connected to the other end of the first connecting rod 302, the other end of the first radio frequency line 308 is connected to the microwave source, one end of the second radio frequency line 408 is connected to the other end of the second connecting rod 402, and the other end of the second radio frequency line 408 is grounded.

[0082] In other embodiments, the positions of the first radio frequency line and the second radio frequency line are determined according to the actual situation.

[0083] In the embodiment of the present invention, set the refrigerating temperature for the first refrigerating part 32 and the second refrigerating part 42 to keep the temperature of the radiation structure 2 within a certain range. Specifically, the set range of the refrigerating temperature of the first refrigerating part 32 and the second refrigerating part 42 is 20 °C to 30 °C.

[0084] In an embodiment of the present invention, the heat generated by the radiation structure 2 during operation is transferred to the first heat conducting sheet 303 and the second heat conducting sheet 403 through the first connecting portion 33 and the second connecting portion 43 connected to the radiation structure 2, that is, transferred to the first refrigerating portion 32 and the second refrigerating portion 42. Meanwhile, power is supplied to the first refrigerating sheet 304 and the second refrigerating sheet 404, and the first refrigerating portion 32 and the second refrigerating portion 42 are cooled by the first refrigerating sheet 304 and the second refrigerating sheet 404, so as to achieve the purpose of cooling the radiation structure 2, avoid the temperature drift problem caused by the heating of the radiation structure 2, and improve the stability of the test environment.

[0085] Execute step S40, provide a sample to be tested, and place the sample to be tested on the sample stage.

[0086] In an embodiment of the present invention, the surface to be tested of the sample to be tested is set to be opposite to and close to the radiation structure 2, which is convenient for better regulating the color center of the sample to be tested by the radiation structure 2 during subsequent testing.

[0087] Execute step S50, adjust the positions of the sample stage and the displacement stage 1 of the radiation structure clamping device, so that the first position to be tested on the surface of the sample to be tested approaches the radiation structure 2 for testing, and repeat this step until all positions to be tested are completed.

[0088] In an embodiment of the present invention, after the radiation structure 2 is made to approach the sample as close as possible by using the displacement stage 1 and reach a suitable test position, measurement is performed. Specifically, the steps of adjusting the sample to be tested and the radiation structure 2 to a suitable test position include:

[0089] By adjusting the position of the displacement stage 1, the radiation structure 2 and the sample to be tested are both located within the field of view of the microscope;

[0090] Adjust the distance between the displacement stage 1 and the surface of the sample, so that the radiation structure 2 is close to the surface of the sample to be tested.

[0091] In an embodiment of the present invention, by adjusting the displacement stage 1 or adjusting the sample stage, the positions of the sample to be tested and the radiation structure 2 reach a suitable test condition.

[0092] In an embodiment of the present invention, after the measurement of the first position to be tested of the sample to be tested is completed, the displacement stage 1 is adjusted to make the radiation structure 2 leave the surface of the sample to be tested. According to needs, in cooperation with moving the displacement stage 1 and the sample stage, the radiation structure 2 reaches the next position to be tested and measurement is performed until all positions to be tested are completed.

[0093] Since the radiation structure 2 is clamped and fixed by the radiation structure clamping device and moves with the movement of the displacement stage 1, the radiation structure 2 has the property of movement, which enables the radiation structure 2 to adjust its position relative to the sample to be measured, so that the radiation structure 2 can be attached to any position on the surface of the sample to be measured, avoiding the fixed position caused by welding the existing radiation structure 2 to the surface of the sample to be measured, and realizing the measurement of multiple positions to be measured of the sample to be measured;

[0094] Moreover, during the operation of the radiation structure 2, the heat generated is used by the first refrigerating unit 32 and the second refrigerating unit 42 to cool down the radiation structure 2 and maintain it within a certain temperature range, avoiding the problem that when the existing radiation structure 2 is welded to the surface of the sample to be measured, the heat generated during the operation of the radiation structure 2 cannot be dissipated quickly, resulting in the thermal expansion of the sample to be measured and the temperature drift of the measurement point. This realizes the temperature control of the radiation structure 2 and avoids the interference with the measurement results caused by the continuous increase in the temperature of the radiation structure 2.

[0095] Finally, it should be noted that any modification or equivalent replacement of some or all of the technical features based on the device structure of the present invention and the technical solutions of the embodiments, as long as the essence does not deviate from the corresponding technical solutions of the present invention, falls within the scope of the patent of the device structure of the present invention and the embodiments.

Claims

1. A radiant structure clamping device, characterized in that: include: A translation stage, a radiation structure, a first radio frequency arm and a second radio frequency arm, wherein the first radio frequency arm and the second radio frequency arm are fixed on the surface of the translation stage and arranged opposite to each other, the first radio frequency arm and the second radio frequency arm move with the translation stage, the radiation structure is fixed between one end of the first radio frequency arm and one end of the second radio frequency arm, the radiation structure is used to generate a microwave field, and the radiation structure is close to a position to be tested on the surface of the sample to be tested to perform sample testing; The first RF arm includes a first bracket, a first fixing portion, a first cooling portion, and a first connecting portion; the first fixing portion is disposed on the first bracket and close to one end of the first bracket, and the first fixing portion is used to fix the first RF arm to the surface of the translation stage; one end of the first cooling portion is disposed at the other end of the first bracket, and one end of the first connecting portion is connected to the other end of the first cooling portion; The second RF arm includes a second bracket, a second fixing portion, a second cooling portion, and a second connecting portion; the second fixing portion is disposed on the second bracket and close to one end of the second bracket, and the second fixing portion is used to fix the second RF arm to the surface of the translation stage; one end of the second cooling portion is disposed at the other end of the second bracket, and one end of the second connecting portion is connected to the other end of the second cooling portion; Among them, the other end of the first connecting part and the other end of the second connecting part are arranged opposite to each other, and a radiation structure is clamped between the other end of the first connecting part and the other end of the second connecting part. The movement of the displacement platform drives the radiation structure between the first connecting part and the second connecting part to move, and the position of the radiation structure is adjusted. The radiation structure is cooled by the first refrigeration part and the second refrigeration part, and the radiation structure is a copper wire.

2. A radiant structure clamping device as claimed in claim 1, characterized in that: The first refrigeration part includes: a first heat sink, a first refrigeration fin and a first heat conductive sheet; one side of the first heat conductive sheet is arranged at the other end of the first bracket, and the other side of the first heat conductive sheet is sequentially provided with the first refrigeration fin and the first heat sink, and one side of the first heat conductive sheet is connected to one end of the first connecting part; the second refrigeration part includes: a second heat sink, a second refrigeration fin and a second heat conductive sheet; one side of the second heat conductive sheet is arranged at the other end of the second bracket, and the other side of the second heat conductive sheet is sequentially provided with the second refrigeration fin and the second heat sink, and one side of the second heat conductive sheet is connected to one end of the second connecting part.

3. A radiating structure clamping device as claimed in claim 2, characterized in that: The first heat conducting plate and the second heat conducting plate are polycrystalline diamond plates; the first cooling plate and the second cooling plate are semiconductor cooling plates; the material of the first heat sink and the second heat sink is one of aluminum and copper.

4. A radiant structure clamping device as claimed in claim 1, characterized in that: The first connecting part includes a first nut and a first connecting rod, one end of the first connecting rod is provided with an external thread, the first nut is provided with an internal thread matching the first connecting rod, the head end of the first nut is provided with a small hole for the radiation structure to pass through, and the other end of the first connecting rod is connected to the first refrigeration part; the second connecting part includes a second nut and a second connecting rod, one end of the second connecting rod is provided with an external thread, the second nut is provided with an internal thread matching the second connecting rod, the head end of the second nut is provided with a small hole for the radiation structure to pass through, and the other end of the second connecting rod is connected to the second refrigeration part.

5. A radiant structure clamping device as claimed in claim 1, characterized in that: The first connection portion and the second connection portion are both downward and relatively inclined at a certain angle, so that the distance between one end of the first connection portion and one end of the second connection portion is greater than the distance between the other end of the first connection portion and the other end of the second connection portion, and the first connection portion and the second connection portion are in the same vertical plane.

6. A radiating structure clamping device as claimed in claim 1, characterized in that: The first fixing portion includes a first adjusting screw and a first fixing member matching the first adjusting screw, and the first bracket is fixed to the surface of the translation platform through the first adjusting screw and the first fixing member; the second fixing portion includes a second adjusting screw and a second fixing member matching the second adjusting screw, and the second bracket is fixed to the surface of the translation platform through the second adjusting screw and the second fixing member.

7. A radiant structure clamping device as claimed in claim 6, characterized in that: The positions of the first RF arm and the second RF arm on the surface of the translation stage are adjusted respectively by the cooperation between the first adjusting screw and the first fixing member, and the second adjusting screw and the second fixing member, so as to adjust the tension of the radiation structure.

8. A radiant structure clamping device as claimed in claim 1, characterized in that: The temperature range of the radiation structure when working is 20 degrees Celsius to 30 degrees Celsius.

9. A microwave application method, characterized in that: include: Provide a radiating structure clamping device as claimed in claim 1; Installing the radiation structure between the first connection part and the second connection part of the radiation structure clamping device; Providing a microwave signal to the radiation structure, so that the heat generated by the radiation structure is transferred to the first refrigeration part and the second refrigeration part through the first connection part and the second connection part, and the radiation structure is cooled by the first refrigeration part and the second refrigeration part until the temperature of the radiation structure is stable; Providing a sample to be tested, and placing the sample to be tested on a sample stage; The positions of the sample stage and the displacement stage of the radiation structure clamping device are adjusted so that the first position to be tested on the surface of the sample to be tested and the radiation structure are close to each other for testing, and this step is repeated until all the positions to be tested are tested.

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