A glass fiber mesh performance testing device for semiconductor wafer cutting wheels

Abstract

The present invention relates to the field of performance testing of glass fiber mesh, specifically to a glass fiber mesh performance testing device for semiconductor wafer cutting grinding wheel, comprising a testing truncated table, a circular through hole is provided at the center of the testing truncated table, a heating unit for heating the glass fiber mesh is provided inside the circular through hole, a stretching unit for stretching the glass fiber mesh is provided at the upper end of the testing truncated table, and bending units for bending the glass fiber mesh are provided on the upper and lower sides of the testing truncated table. The present invention can perform both tensile performance testing and bending performance testing on the glass fiber mesh, a one-machine dual-purpose, saving testing time and testing costs while improving test accuracy and consistency, and is also conducive to improving testing efficiency. In addition, heating can simulate the high temperature environment encountered by the glass fiber mesh during use, and the tensile and bending performance testing of the glass fiber mesh in the high temperature environment can be performed.

Description

Technical Field

[0001] The invention relates to the field of performance detection of glass fiber meshes, in particular to a glass fiber mesh performance detection device for semiconductor wafer cutting grinding wheels. Background Art

[0002] Semiconductor wafer cutting wheels are precision cutting tools specially used to cut semiconductor wafers into many small pieces. In order to improve the strength and stability of the cutting wheel while maintaining its good processing performance, one or more layers of glass fiber mesh are usually laid on the grinding wheel. The glass fiber mesh can significantly increase the overall structural strength of the grinding wheel, making the grinding wheel more stable and reliable when rotating at high speed and under high cutting force, helping to reduce the risk of deformation or breakage. In order to ensure the quality of the cutting wheel and the reliability of the production process, the necessary tensile performance test of the glass fiber mesh is required.

[0003] However, there are currently the following problems in the performance testing of glass fiber mesh: (1) The data obtained by only performing tensile performance testing on the glass fiber mesh is less representative, while the bending performance testing of the glass fiber mesh is ignored. At the same time, due to temperature changes during the cutting operation of the semiconductor wafer cutting wheel, the tensile and bending test data obtained at room temperature are also difficult to effectively reflect the performance of the glass fiber mesh in actual use.

[0004] (2) The test results obtained by stretching and bending the glass fiber mesh at fixed points and in fixed directions are relatively simple. The limited test conditions will lead to certain errors or deviations in the test results. The authenticity and accuracy of the test results need to be improved.

[0005] Therefore, in order to solve the problems existing in the performance testing process of the glass fiber mesh, the present invention provides a glass fiber mesh performance testing device for semiconductor wafer cutting wheels. Summary of the invention

[0006] The present invention provides a performance detection device for a glass fiber mesh used in a semiconductor wafer cutting grinding wheel, including a detection turntable. A circular through-hole is opened at the center of the detection turntable. An heating unit for heating the glass fiber mesh is arranged inside the circular through-hole. A stretching unit for stretching the glass fiber mesh is arranged at the upper end of the detection turntable. Bending units for bending the glass fiber mesh are arranged on both the upper and lower sides of the detection turntable; The stretching unit includes a fixed ring installed at the upper end of the detection turntable and concentric with the circular through-hole. A clamping assembly is arranged inside the fixed ring in a circumferentially uniform distribution. The clamping assembly includes a U-shaped plate. A clamping plate is arranged between the upper and lower horizontal sections of the U-shaped plate and is connected to the vertical section in a vertically sliding manner. A threaded rod is rotatably installed at the upper end of the clamping plate and is threadedly connected to the upper horizontal section of the U-shaped plate. A stretching assembly for pulling the clamping assembly to move outward synchronously is arranged at the upper end of the detection turntable; Sleeves are arranged on both the upper and lower sides of the detection turntable. The bending unit includes a mounting circular plate installed at one end of the sleeve close to the detection turntable. A circumferentially uniformly distributed pressing rod is arranged at one end of the mounting circular plate away from the corresponding cross plate. An adjustment assembly for adjusting the position of the pressing rod is arranged on the mounting circular plate; The heating unit includes two semi-circular heating plates symmetrically distributed on the left and right. A matching groove for avoiding the U-shaped plate is opened at the upper end of the semi-circular heating plate. A moving assembly for driving the two semi-circular heating plates to move synchronously in opposite directions is arranged at the lower end of the detection turntable.

[0007] In a possible implementation manner, vertical guide rails are installed on both the left and right sides of the detection turntable. Baffles are installed between the upper ends and the lower ends of the left and right vertical guide rails. An auxiliary rod passing through the circular through-hole is installed in the middle of the upper end of the baffle located below. The auxiliary rod is matched with the mounting circular hole at the center of the glass fiber mesh. The auxiliary rod is connected to the sleeve and the mounting circular plate in a vertically sliding manner. An avoidance groove for avoiding the auxiliary rod is opened at the center of the semi-circular heating plate. Two cross plates distributed above and below the detection turntable are slidably installed between the left and right vertical guide rails. A sleeve is installed at the center of the cross plate. An electric slider connected to the corresponding vertical guide rail in a sliding manner is installed on the side of the cross plate away from the detection turntable.

[0008] In a possible implementation manner, the stretching assembly includes a pull rod installed on the side of the vertical section of each U-shaped plate close to the fixed ring. The pull rod slides radially through the fixed ring and is then installed with a rack. One side of the rack is meshed with a gear column rotatably connected to the detection turntable. The circumferentially arranged gear columns are meshed with the same internal gear ring located below the rack and rotatably connected to the detection turntable. The end of the rack away from the fixed ring is slidably connected to a guide block installed at the upper end of the detection turntable and located outside the internal gear ring. The lower end of the side of the front gear column away from the corresponding rack is meshed with a toothed plate slidably connected to the detection turntable in the front and back directions. The front end of the toothed plate is connected to the pushing end of an electric push rod installed on the detection turntable.

[0009] In a possible implementation manner, the moving component includes built-in grooves formed in the detection frustum corresponding to the positions of the semi-circular heating plates for avoiding the semi-circular heating plates. The built-in grooves communicate with the circular through holes. Support plates are installed on the sides of the left and right semi-circular heating plates away from each other. The lower end of the support plate away from the semi-circular heating plate is connected to the telescopic end of the electric telescopic rod. A strip-shaped through groove is formed in the bottom wall of the built-in groove, penetrating through the detection frustum and slidably connected to the fixed section of the electric telescopic rod on the left and right.

[0010] In a possible implementation manner, an external toothed ring is rotatably installed at the lower end of the detection frustum. An arc-shaped through groove is formed in the external toothed ring and is slidably connected to the fixed section of the corresponding electric telescopic rod. A rotating gear rotatably installed at the lower end of the detection frustum is meshed with the front side of the external toothed ring. The lower end face of the rotating gear is connected to the output shaft of the motor, and the motor is installed at the lower end of the detection frustum through a support.

[0011] In a possible implementation manner, a rotating wheel is installed at the upper end of the threaded rod. A circumferentially uniformly arranged card slot is formed on the outer ring surface of the rotating wheel. A vertical plate is installed at the upper end of the horizontal section on the upper side of the U-shaped plate. A card plate matched with the card slot is arranged on the side of the vertical plate close to the rotating wheel. A connecting column slidably penetrating through the vertical plate is installed on the side of the card plate away from the rotating wheel. A telescopic spring sleeved on the outside of the connecting column is connected between the card plate and the vertical plate.

[0012] In a possible implementation manner, the adjustment component includes a moving plate arranged on the side of the pressing rod close to the installation circular plate. The moving plate is slidably connected to the installation circular plate circumferentially around the installation circular plate. A circumferentially uniformly arranged insertion hole is formed on the side of the installation circular plate close to the corresponding cross plate. A control plate slidably connected to the installation circular plate is installed on the side of the moving plate away from the center of the installation circular plate. The control plate is inserted and matched with the corresponding insertion hole through an insertion rod.

[0013] In a possible implementation manner, side through grooves are formed on both sides of the moving plate arranged in the circumferential direction of the installation circular plate. A sliding through groove is formed on the side of the moving plate close to the pressing rod. An adjusting block movably matched with the sliding through groove is installed at the end of the pressing rod close to the moving plate. A bolt is installed on the adjusting block and is threadedly installed with a nut after threading through the side through groove.

[0014] In a possible implementation manner, two arc-shaped guiding frames are arranged on the side of the moving plate away from the corresponding installation circular plate. The two arc-shaped guiding frames are slidably connected to the moving plate in the radial direction of the installation circular plate and are symmetrically distributed about the pressing rod. Guide columns slidably connected to the corresponding arc-shaped guiding frames are installed on both sides of the fixed section of the pressing rod. A square plate rotatably sleeved on the outside of the bolt is installed on the side of the arc-shaped guiding frame.

[0015] In a possible implementation manner, the pressing rod is a threaded telescopic rod, and a pressing head is installed at the end of the telescopic section of the pressing rod.

[0016] The beneficial effects of the present invention are as follows: 1. The present invention can perform both tensile and bending performance tests on glass fiber meshes, and the one machine can serve two purposes, which saves testing time and testing costs while improving test accuracy and consistency, and is also beneficial to improving testing efficiency. In addition, the glass fiber mesh required for testing can be preheated to a certain temperature, and the high temperature environment encountered by the glass fiber mesh during use can be simulated by heating. The tensile and bending performance tests can be performed on the glass fiber mesh in the high temperature environment, simulating the actual use environment of the glass fiber mesh, further accurately evaluating the performance of the glass fiber mesh, and increasing the accuracy of the test results.

[0017] 2. The stretching unit used in the present invention can stretch the glass fiber mesh at different points, in different amounts and in different directions, further simulating various stretching conditions that the glass fiber mesh may encounter in actual use, ensuring the accuracy and comparability of the test results, and more comprehensively evaluating the tensile properties of the glass fiber mesh.

[0018] 3. The bending unit used in the present invention can apply pressure to the glass fiber mesh at different points, in different quantities and at different angles to change the bending load on the glass fiber mesh, causing the glass fiber mesh to bend and deform to different degrees, simulating the bending state that may exist in the glass fiber mesh during actual use, thereby obtaining richer and more realistic bending performance test data and better evaluating the reliability and safety of the glass fiber mesh in actual applications.

[0019] In addition to the technical problems solved by the embodiments of the present invention described above, the technical features that constitute the technical scheme, and the beneficial effects brought about by the technical features of the technical scheme, other technical problems that can be solved by a glass fiber mesh performance testing device for semiconductor wafer cutting grinding wheels provided in an embodiment of the present application, other technical features included in the technical scheme, and the beneficial effects brought about by these technical features will be further described in detail in the specific implementation manner. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0021] Figure 1 It is a schematic diagram of the main stereoscopic structure of the present invention.

[0022] Figure 2 It is a schematic diagram of the three-dimensional structure of the heating unit of the present invention.

[0023] Figure 3 It is a schematic diagram of the three-dimensional structure of the mobile component of the present invention.

[0024] Figure 4 It is a schematic diagram of the three-dimensional structure of the stretching unit of the present invention.

[0025] Figure 5 It is a schematic diagram of the three-dimensional structure of the clamping assembly of the present invention.

[0026] Figure 6 It is a schematic diagram of the three-dimensional structure of the horizontal plate, auxiliary rod and bending unit of the present invention.

[0027] Figure 7 It is a schematic diagram of the three-dimensional structure of the bending unit of the present invention.

[0028] Figure 8 It is a three-dimensional structural schematic diagram of the mounting circular plate, the plug rod and the plug hole of the present invention.

[0029] Fig. 9 It is a schematic diagram of the three-dimensional structure of the adjustment component of the present invention.

[0030] In the figure: 1. Detection truncated table; 11. Circular through hole; 111. Vertical guide rail; 112. Baffle; 113. Auxiliary rod; 114. Horizontal plate; 115. Electric slider; 2. Heating unit; 211. Semicircular heating plate; 213. Built-in groove; 214. Support plate; 215. Electric telescopic rod; 216. Strip groove; 217. External gear ring; 218. Arc groove; 219. Rotating gear; 220. Motor; 3. Stretching unit; 311. Fixed ring; 312. Shaped plate; 313. Clamp; 314. Thread rod; 315, rotating wheel; 316, card slot; 317, card plate; 318, connecting column; 319, telescopic spring; 321, pull rod; 322, rack; 323, gear column; 324, inner gear ring; 325, gear plate; 326, electric push rod; 4, bending unit; 411, sleeve; 412, mounting circular plate; 414, pressure rod; 415, pressure head; 416, moving plate; 417, socket; 418, plug rod; 419, side through groove; 421, adjustment block; 422, arc guide frame; 423, square plate. DETAILED DESCRIPTION

[0031] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described below, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0032] Please refer to Figure 1 , a performance detection device for a glass fiber mesh used in a semiconductor wafer cutting grinding wheel, including a detection frustum 1. A circular through hole 11 is opened at the center of the detection frustum 1. An heating unit 2 for heating the glass fiber mesh is arranged inside the circular through hole 11. A stretching unit 3 for stretching the glass fiber mesh is arranged at the upper end of the detection frustum 1. Bending units 4 for bending the glass fiber mesh are arranged on both the upper and lower sides of the detection frustum 1.

[0033] Please refer to Figure 1 , Figure 4 and Figure 5 , the stretching unit 3 includes a fixed ring 311 installed at the upper end of the detection frustum 1 and concentric with the circular through hole 11. A clamping assembly is arranged on the inner side of the fixed ring 311 and is circumferentially and uniformly arranged. The clamping assembly includes a U-shaped plate 312. A clamping plate 313 slidably connected to the vertical section is arranged between the upper and lower horizontal sections of the U-shaped plate 312. A threaded rod 314 threadedly connected to the upper horizontal section of the U-shaped plate 312 is rotatably installed at the upper end of the clamping plate 313. A runner 315 is installed at the upper end of the threaded rod 314. A circumferentially and uniformly arranged card slot 316 is opened on the outer ring surface of the runner 315. A vertical plate is installed at the upper end of the upper horizontal section of the U-shaped plate 312. A clamping plate 317 matched with the card slot 316 is arranged on one side of the vertical plate close to the runner 315. A connecting column 318 slidably penetrating the vertical plate is installed on the side of the clamping plate 317 away from the runner 315. A telescopic spring 319 sleeved on the outer part of the connecting column 318 is connected between the clamping plate 317 and the vertical plate. The clamping assembly can be connected to an existing universal material testing machine (the universal material testing machine is not shown in the figure). The universal material testing machine can monitor tensile performance parameters such as the breaking strength and yield strength of the glass fiber mesh in the stretching direction, and can also monitor performance indicators such as the bending strength and bending modulus of the glass fiber mesh, and record the stress-strain curve of the glass fiber mesh during stretching or bending.

[0034] During operation: Since the glass fiber mesh used to make the cutting grinding wheel is circular in shape, and an installation round hole for cooperating with the grinding wheel is opened at the center of the glass fiber mesh, the glass fiber mesh with the installation round hole is used as the detection object.

[0035] First, the fiberglass mesh needs to be horizontally placed on the upper end of the lower horizontal section of the circumferentially arranged U-shaped plate 312. The circumferentially arranged U-shaped plates 312 can provide stable support for the fiberglass mesh. Then, the rotating wheel 315 and the threaded rod 314 can be rotated. While the threaded rod 314 spirally moves downward, it drives the clamping plate 313 to move downward along the vertical section of the U-shaped plate 312 until the clamping plate 313 presses tightly against the fiberglass mesh. Under the action of the lower horizontal section of the U-shaped plate 312 and the clamping plate 313, the fiberglass mesh is stably and strongly clamped. During the rotation of the rotating wheel 315, the corresponding connecting column 318 can be toggled in a direction away from the threaded rod 314 to compress the telescopic spring 319, so that the clamping plate 317 moves away from the corresponding rotating wheel 315, facilitating the smooth rotation of the rotating wheel 315. After the clamping plate 313 clamps the fiberglass mesh, the connecting column 318 can be released. The clamping plate 317 is pressed into the corresponding card slot 316 on the outer ring surface of the rotating wheel 315 under the action of the telescopic spring 319. The cooperation between the clamping plate 317 and the card slot 316 can be used to circumferentially limit the rotating wheel 315, preventing the threaded rod 314 from rotating under the influence of external factors and affecting the stability of the clamping of the fiberglass mesh.

[0036] In addition, different numbers or different positions of clamping components can be selected to clamp the fiberglass mesh. The number of clamping components used determines the number of tensile forces exerted on the fiberglass mesh during subsequent tensile testing, and at the same time, the position of the clamping components used also determines the direction of the tensile force exerted on the fiberglass mesh during subsequent tensile testing.

[0037] Please refer to Figure 1 、 Figure 2 and Figure 3The heating unit 2 includes two semicircular heating plates 211 symmetrically distributed on the left and right sides, and a matching groove for avoiding the molded plate 312 is provided on the upper end of the semicircular heating plates 211. A moving component for driving the two semicircular heating plates 211 to move synchronously in the opposite direction is provided at the lower end of the detection table 1. The moving component includes built-in grooves 213 for avoiding the semicircular heating plates 211, which are opened at positions corresponding to the semicircular heating plates 211 inside the detection table 1. The built-in grooves 213 are connected to the circular through holes 11. A support plate 214 is installed on the side away from the left and right semicircular heating plates 211, and the support plate 214 is away from the semicircular heating plates 211. The lower end of one side of the hot plate 211 is connected to the telescopic end of the electric telescopic rod 215, and the bottom wall of the built-in groove 213 is provided with a strip-shaped through groove 216 that penetrates the detection table 1 and is slidably connected to the fixed section of the electric telescopic rod 215 left and right. An outer gear ring 217 is rotatably installed at the lower end of the detection table 1. The outer gear ring 217 is provided with an arc-shaped through groove 218 that is slidably connected to the fixed section of the corresponding electric telescopic rod 215. The front side of the outer gear ring 217 is meshed with a rotating gear 219 rotatably installed at the lower end of the detection table 1. The lower end surface of the rotating gear 219 is connected to the output shaft of the motor 220, and the motor 220 is installed at the lower end of the detection table 1 through a support.

[0038] When working: In the initial state, the left and right semicircular heating plates 211 are in a tightly fitted state and form a complete circular shape. The glass fiber mesh is placed between the upper end surfaces of the left and right semicircular heating plates 211, and the circumferentially arranged shaped plates 312 are placed in the corresponding matching grooves. After the glass fiber mesh is fixed, the semicircular heating plates 211 can be used to perform contact-type rapid heating treatment on the glass fiber mesh to heat the glass fiber mesh to a certain temperature. The heating can simulate the high temperature environment encountered by the glass fiber mesh during use. It can not only observe whether the glass fiber mesh is deformed under high temperature conditions and detect the thermal stability of the glass fiber mesh, but also perform tensile and bending performance tests on the glass fiber mesh under high temperature environments, simulate the actual use environment of the glass fiber mesh, further evaluate the performance of the glass fiber mesh, and increase the authenticity and effectiveness of the test results. The semicircular heating plate 211 is an existing electrically controlled heating plate.

[0039] After the heating is completed and before the detection, the electric telescopic rods 215 on both the left and right sides can be used to drive the corresponding support plates 214 to move downward simultaneously until they are in contact with the bottom wall of the built-in groove 213. At this time, the semi-circular heating plate moves downward synchronously with the support plate 214 to be away from the fiberglass mesh and the U-shaped plate 312. Subsequently, the motor 220 can be used to drive the rotating gear 219 to rotate, and the outer tooth ring 217 rotates synchronously. While the outer tooth ring 217 rotates, it drives the electric telescopic rod 215 to move outward along the strip-shaped groove 216 through the arc-shaped through groove 218. The support plate 214 drives the semi-circular heating plate 211 to move into the built-in groove 213 synchronously with the electric telescopic rod 215 until the semi-circular heating plate 211 is away from the fiberglass mesh and the clamping assembly, avoiding the semi-circular heating plate 211 from interfering with the subsequent tensile and bending performance detection of the fiberglass mesh. During the subsequent detection process, the semi-circular heating plate 211 can be used to heat the fiberglass mesh again in the same way. It should be noted that the parts involved in contact with the semi-circular heating plate 211 and the fiberglass mesh are all heat-resistant.

[0040] Please refer to Figure 4 , a stretching assembly for pulling the clamping assembly to move outward synchronously is arranged at the upper end of the detection frustum 1. The stretching assembly includes a pull rod 321 installed on one side of the vertical section of each U-shaped plate 312 close to the fixed ring 311. The pull rod 321 slides radially through the fixed ring 311 along the detection frustum 1 and is then installed with a rack 322. One side of the rack 322 is engaged with a gear column 323 rotatably connected to the detection frustum 1. The circumferentially arranged gear columns 323 are engaged with the same internal tooth ring 324 located below the rack 322 and rotatably connected to the detection frustum 1. The end of the rack 322 away from the fixed ring 311 is slidably connected to a guide block installed at the upper end of the detection frustum 1 and located outside the internal tooth ring 324. The lower end of the side of the front gear column 323 away from the corresponding rack 322 is engaged with a toothed plate 325 slidably connected to the front and back of the detection frustum 1. The front end of the toothed plate 325 is connected to the pushing end of an electric push rod 326 installed on the detection frustum 1.

[0041] During operation: After heating the fiberglass mesh and moving the semi-circular heating plate 211 away from the fiberglass mesh, the toothed plate 325 can be immediately pushed backward along the detection turntable 1 by the electric push rod 326. The front gear column 323 rotates counterclockwise synchronously, and the rack 322 engaged with the gear column 323 moves forward along the guide block synchronously. Under the cooperation of the internal gear ring 324 and the gear column 323, the circumferentially arranged racks 322 move outward along the corresponding guide blocks synchronously. The rack 322 drives the corresponding pull rod 321 to move radially outward along the fixed ring 311. The pull rod 321 drives the clamping assembly to move synchronously through the U-shaped plate 312. At this time, the clamping assembly clamping the fiberglass mesh can pull the fiberglass mesh outward, and the unclamped clamping assembly gradually moves away from the fiberglass mesh until the fiberglass mesh breaks. At this time, the universal material testing machine can record and display the obtained test results, so as to obtain the tensile test results of the fiberglass mesh.

[0042] In order to obtain more comprehensive test results and ensure the accuracy and comparability of the test results, multiple fiberglass meshes under the same temperature or different temperature conditions can be subjected to tensile tests at the same tensile position and in the same direction, or multiple fiberglass meshes under the same temperature or different temperature conditions can be subjected to tensile tests at different tensile positions or in different directions.

[0043] Please refer to Figure 1 、 Figure 2 、 Figure 6 、 Figure 7 、 Figure 8 and Fig. 9 As shown in

[0044] During operation: in the process of placing and clamping the glass fiber mesh, the mounting circular hole at the center of the glass fiber mesh can be passed through the auxiliary rod 113. The auxiliary rod 113 can not only be used to align the placement and clamping of the glass fiber mesh, but also can support and guide the subsequent up and down movement of the cross plate 114, sleeve 411 and mounting circular plate 412. When the glass fiber mesh is stretched at a single point or multiple points, the mounting circular hole of the glass fiber mesh may be stretched or bent due to the obstruction of the auxiliary rod 113. At this time, the tensile and bending properties near the mounting circular hole of the glass fiber mesh can be tested.

[0045] Before the bending test of the glass fiber mesh is performed, the glass fiber mesh can be selectively clamped in the same manner as described above to keep it in a horizontal and straight state to ensure the stability of the glass fiber mesh. At the same time, the glass fiber mesh can be heated to a certain temperature. Then, the telescopic end of the pressure rod 414 can be rotated to move the pressure head 415 toward the direction close to the glass fiber mesh. In this process, the position of one or more pressure heads 415 can be adjusted to change the subsequent bending force points of the glass fiber mesh. The force points and the amount of force on the glass fiber mesh can be adjusted. After the adjustment of the position of the pressure head 415 is completed, the electric slider 115 can be used to drive the cross plate 114 along the left and right vertical guide rails 111 to approach the detection table 1. The circular plate 412 moves in the same direction as the horizontal plate 114 through the sleeve 411, and the circular plate 412 drives the pressing rod 414 and the pressing head 415 to move in the direction of the glass fiber mesh. The pressing head 415 after adjustment and extension gradually presses the glass fiber mesh to make it bend and deform, while the other pressing heads 415 that have not been adjusted do not contact the glass fiber mesh. The closer the circular plate 412 is to the glass fiber mesh, the greater the degree of bending and deformation of the glass fiber mesh. In this process, the bending load on the glass fiber mesh can be recorded by the universal material testing machine, and the deformation of the glass fiber mesh under different loads can be observed to see whether cracks or fractures occur, so as to analyze the bending deformation resistance of the glass fiber mesh.

[0046] In addition, the pressing head 415 can be rotated to remove it from the pressing rod 414 by threading, and replaced with a pressing head 415 of different sizes. The larger the pressing head 415, the larger the force-bearing area of ​​the glass fiber mesh, and the corresponding increase in the bending deformation of the glass fiber mesh as a whole, and vice versa. The two bending units 4 can perform comprehensive bending tests on the glass fiber mesh from the upper and lower sides, respectively, and can also act on the glass fiber mesh at the same time to make the glass fiber mesh bend in two directions at the same time, but at this time, the pressing rods 414 and the pressing heads 415 in the upper and lower bending units 4 need to be staggered.

[0047] See also Figure 7 , Figure 8 and Fig. 9 The mounting circular plate 412 is provided with an adjustment component for adjusting the position of the pressure rod 414, and the adjustment component includes a movable plate 416 arranged on one side of the pressure rod 414 close to the mounting circular plate 412, and the movable plate 416 is slidably connected with the mounting circular plate 412 in the circumferential direction, and the mounting circular plate 412 is provided with circumferentially evenly arranged sockets 417 on one side of the corresponding transverse plate 114, and a control board slidably connected with the mounting circular plate 412 is installed on the side of the movable plate 416 away from the center of the mounting circular plate 412, and the control board is plugged and matched with the corresponding socket 417 through a plug rod 418, and side through grooves 419 are provided on both sides of the movable plate 416 arranged along the circumferential direction of the mounting circular plate 412, and the movable plate 416 is close to the pressure rod 414. A sliding groove is provided on one side of the rod 414, and an adjusting block 421 that movably cooperates with the sliding groove is installed on the end of the pressure rod 414 close to the movable plate 416. A bolt is installed on the adjusting block 421, and a nut is installed on the bolt thread after passing through the side groove 419. Two arc guide frames 422 are provided on the side of the movable plate 416 away from the corresponding mounting circular plate 412. The two arc guide frames 422 are slidingly connected to the movable plate 416 along the radial direction of the mounting circular plate 412 and are symmetrically distributed about the pressure rod 414. Guide columns that are slidingly connected to the corresponding arc guide frames 422 are installed on both sides of the fixed section of the pressure rod 414, and a square plate 423 that is rotatably sleeved on the outside of the bolt is installed on the side of the arc guide frame 422.

[0048] During operation: before the bending performance test of the glass fiber mesh is carried out, the pressure rod 414 can also be adjusted to different positions and different states. During this process, the movable plate 416 can be rotated circumferentially around the mounting circular plate 412 through the control plate, and the movable plate 416 drives the corresponding pressure rod 414 and the pressure head 415 to move synchronously. After the movable plate 416 moves to a suitable position, the control plate and the movable plate 416 can be fixed on the mounting circular plate 412 through the cooperation between the insertion rod 418 and the corresponding insertion hole 417 to change the position of the pressure rod 414 and the pressure head 415 in the circumferential direction of the mounting circular plate 412.

[0049] At the same time, the pressure rod 414 and the pressure head 415 can be radially moved to different positions along the mounting circular plate 412 through the cooperation between the adjusting block 421 and the sliding groove. The adjusting block 421 drives the adjusting block 421 to move synchronously along the side groove 419. The adjusting block 421 drives the two arc-shaped guide frames 422 to move synchronously along the movable plate 416 through the cooperation between the bolts and the square plate 423 to change the positions of the pressure rod 414 and the pressure head 415 in the radial direction of the mounting circular plate 412.

[0050] In addition, the adjusting block 421 can be rotated, and the bolt is driven by the adjusting block 421 to rotate synchronously on the square plate 423. The center of the arc guide frame 422 and the axis of the bolt are in line, and the pressure rod 414 rotates synchronously along the arc guide frame 422 through the guide column to adjust the pressure rod 414 and the pressure head 415 to an inclined state. The arc guide frame 422 can support and guide the rotation of the pressure rod 414 to ensure that the pressure rod 414 remains stable when it is subsequently pressed against the glass fiber mesh. After reaching the appropriate position, the adjustment block 421 and the arc-shaped guide frame 422 can be fixed on the movable plate 416 by the cooperation of bolts and nuts. The point position and the action angle of the pressure head 415 acting on the glass fiber mesh in the circumferential and radial directions can be adjusted in the above manner, so as to detect the bending deformation of the glass fiber mesh when subjected to pressure at different positions and directions, simulate the bending state that may exist in the glass fiber mesh during actual use, and obtain richer and more realistic bending performance test results.

[0051] In addition, different glass fiber meshes can be subjected to bending tests under different clamping points and the same bending conditions. The clamping points of the glass fiber mesh affect the degree of bending deformation of the glass fiber mesh. Regardless of changing the position, direction or amount of the resistance pressure applied to the glass fiber mesh, multiple comparative bending tests need to be performed on multiple glass fiber meshes to ensure the authenticity of the test results, enrich the test results, further improve the accuracy and comparability of the test results, and more comprehensively evaluate the performance of the glass fiber mesh.

[0052] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0053] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "connect", "install", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, an integral connection, or a sliding connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0054] The embodiments of this specific implementation method are all preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Therefore, all equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A glass fiber mesh performance testing device for semiconductor wafer cutting grinding wheels, comprising a testing truncated table (1), a circular through hole (11) is provided at the center of the testing truncated table (1), and is characterized in that: A heating unit (2) for heating the glass fiber mesh is arranged inside the circular through hole (11), a stretching unit (3) for stretching the glass fiber mesh is arranged at the upper end of the detection truncated table (1), and bending units (4) for bending the glass fiber mesh are arranged on both the upper and lower sides of the detection truncated table (1); The stretching unit (3) comprises a fixing ring (311) mounted on the upper end of the detection truncated table (1) and concentric with the circular through hole (11); a clamping assembly evenly arranged in the circumferential direction is arranged on the inner side of the fixing ring (311); the clamping assembly comprises a shaped plate (312); a clamping plate (313) slidably connected to the vertical section is arranged between the upper and lower horizontal sections of the shaped plate (312); a threaded rod (314) threadedly connected to the upper horizontal section of the shaped plate (312) is rotatably mounted on the upper end of the clamping plate (313); and a stretching assembly for pulling the clamping assembly to move outward synchronously is arranged on the upper end of the detection truncated table (1); The upper and lower sides of the detection truncated platform (1) are both provided with sleeves (411), the bending unit (4) comprises a mounting circular plate (412) mounted at one end of the sleeve (411) close to the detection truncated platform (1), one end of the mounting circular plate (412) away from the corresponding transverse plate (114) is provided with circumferentially evenly arranged pressure rods (414), and the mounting circular plate (412) is provided with an adjustment component for adjusting the position of the pressure rods (414); The heating unit (2) comprises two semicircular heating plates (211) which are symmetrically distributed on the left and right sides, the upper ends of the semicircular heating plates (211) are provided with matching grooves for avoiding the molded plate (312), and the lower end of the detection truncated table (1) is provided with a moving component for driving the two semicircular heating plates (211) to move synchronously in opposite directions; The moving assembly comprises a built-in groove (213) for avoiding the semicircular heating disk (211) and provided at a position corresponding to the semicircular heating disk (211) inside the detection truncated table (1); the built-in groove (213) is connected to the circular through hole (11); a support plate (214) is installed on the side away from the left and right semicircular heating disks (211); the lower end of the side away from the semicircular heating disk (211) is connected to the telescopic end of the electric telescopic rod (215); and a strip-shaped through groove (216) is provided on the bottom wall of the built-in groove (213) which penetrates the detection truncated table (1) and is slidably connected to the fixed section of the electric telescopic rod (215) left and right; An outer gear ring (217) is rotatably mounted on the lower end of the detection truncated table (1); an arc-shaped through groove (218) is provided on the outer gear ring (217) and is slidably connected to the fixed section of the corresponding electric telescopic rod (215); a rotating gear (219) is meshed with the front side of the outer gear ring (217) and is rotatably mounted on the lower end of the detection truncated table (1); the lower end surface of the rotating gear (219) is connected to the output shaft of a motor (220); and the motor (220) is mounted on the lower end of the detection truncated table (1) via a support; The adjustment assembly comprises a movable plate (416) arranged on one side of the pressing rod (414) close to the mounting circular plate (412), the movable plate (416) being slidably connected to the mounting circular plate (412) in the circumferential direction, a side of the mounting circular plate (412) close to the corresponding transverse plate (114) being provided with circumferentially evenly arranged plug holes (417), a side of the movable plate (416) away from the center of the mounting circular plate (412) being provided with a control plate slidably connected to the mounting circular plate (412), the control plate being plugged into and matched with the corresponding plug holes (417) via an insertion rod (418); The movable plate (416) is provided with side through grooves (419) on both sides arranged along the circumferential direction of the mounting circular plate (412); a sliding through groove is provided on one side of the movable plate (416) close to the pressing rod (414); an adjusting block (421) movably matched with the sliding through groove is installed on one end of the pressing rod (414) close to the movable plate (416); a bolt is installed on the adjusting block (421); and a nut is installed after the bolt thread passes through the side through groove (419) and is threadedly mounted thereon; Two arc-shaped guide frames (422) are arranged on one side of the movable plate (416) away from the corresponding mounting circular plate (412). The two arc-shaped guide frames (422) are slidably connected to the movable plate (416) along the radial direction of the mounting circular plate (412) and are symmetrically distributed about the pressure rod (414). Guide columns slidably connected to the corresponding arc-shaped guide frames (422) are arranged on both sides of the fixed section of the pressure rod (414). A square plate (423) rotatably sleeved on the outside of the bolt is arranged on the side of the arc-shaped guide frame (422).

2. The glass fiber mesh performance testing device for semiconductor wafer cutting grinding wheel according to claim 1, characterized in that: The detection truncated platform (1) is provided with vertical guide rails (111) on both sides, and baffles (112) are provided between the upper ends and lower ends of the left and right vertical guide rails (111). An auxiliary rod (113) penetrating the circular through hole (11) is provided at the middle of the upper end of the baffle (112) located below. The auxiliary rod (113) is matched with the installation circular hole at the center of the glass fiber mesh. The auxiliary rod (113) is provided with a sleeve (411) and an installation circular plate (412). The semicircular heating plate (211) is slidably connected up and down, and a clearance groove for avoiding the auxiliary rod (113) is opened at the center of the circle. Two horizontal plates (114) distributed up and down with respect to the detection truncated table (1) are slidably installed between the left and right vertical guide rails (111). A sleeve (411) is installed at the center of the horizontal plate (114). An electric sliding block (115) slidably connected to the corresponding vertical guide rail (111) is installed on the side of the horizontal plate (114) away from the detection truncated table (1).

3. The glass fiber mesh performance testing device for semiconductor wafer cutting grinding wheel according to claim 1, characterized in that: The stretching assembly comprises a plurality of pull rods (321) installed on one side of the vertical sections of the profiled plates (312) close to the fixed ring (311). The pull rods (321) slide radially along the detection truncated plate (1) and penetrate the fixed ring (311) and are then installed with a rack (322). One side of the rack (322) is meshed with a gear column (323) rotatably connected to the detection truncated plate (1). The circumferentially arranged gear columns (323) are connected to the same gear column (323) located below the rack (322) and rotatably connected to the detection truncated plate (1). The toothed rack (322) is meshed with an inner toothed ring (324) connected thereto, one end of the toothed rack (322) away from the fixing ring (311) is slidably connected to a guide block mounted on the upper end of the detection truncated platform (1) and located outside the inner toothed ring (324), a lower end of a side of the gear column (323) located on the front side away from the corresponding toothed rack (322) is meshed with a toothed plate (325) slidably connected to the detection truncated platform (1) in a front and rear direction, and a front end of the toothed plate (325) is connected to a pushing end of an electric push rod (326) mounted on the detection truncated platform (1).

4. The performance testing device for glass fiber mesh for semiconductor wafer cutting grinding wheel according to claim 1, characterized in that: A rotating wheel (315) is installed at the upper end of the threaded rod (314), and the outer ring surface of the rotating wheel (315) is provided with circumferentially evenly arranged grooves (316), and a vertical plate is installed at the upper end of the upper horizontal section of the shaped plate (312), and a clamping plate (317) matching with the clamping groove (316) is arranged on the side of the vertical plate close to the rotating wheel (315), and a connecting column (318) sliding through the vertical plate is installed on the side of the clamping plate (317) away from the rotating wheel (315), and a telescopic spring (319) sleeved on the outside of the connecting column (318) is connected between the clamping plate (317) and the vertical plate.

5. The performance testing device for glass fiber mesh for semiconductor wafer cutting grinding wheel according to claim 1, characterized in that: The pressing rod (414) is a threaded telescopic rod, and a pressing head (415) is installed at the end of the telescopic section of the pressing rod (414).

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