Adjustable diaphragm device for electron beam detection equipment

Abstract

The invention discloses an adjustable diaphragm device for electron beam detection equipment. The adjustable diaphragm device comprises a diaphragm base assembly, an X-axis driving assembly and a Y-axis driving assembly, the diaphragm base assembly comprises a base, a connecting seat, a diaphragm rod and a feed heating assembly; the Y-axis driving assembly is used for driving the diaphragm rod to autonomously move in the Y-axis direction, the X-axis driving assembly is used for driving the diaphragm rod to autonomously move in the X-axis direction, and the X-axis driving assembly is connected to the Y-axis driving assembly through the Y-axis moving seat and moves together with the Y-axis driving assembly. The connecting base is arranged on the base, the base is connected with the X-axis driving assembly, the feed heating assembly is arranged in the connecting base in a penetrating mode, the feed heating assembly is connected with the power source and the diaphragm rod, and the feed heating assembly is used for electrically heating the diaphragm rod so as to achieve self-cleaning of a diaphragm hole in the diaphragm rod. The device has the characteristics of compact structure, simplicity in operation, high positioning precision, stability in operation, high automation degree and the like, and the efficiency of diaphragm adjustment and diaphragm conversion is remarkably improved.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor electron beam equipment, and in particular relates to an adjustable aperture device for electron beam detection equipment. Background Art

[0002] In existing electron beam detection equipment, the adjustable aperture device is mostly adjusted manually, which takes a long time to adjust, has poor adjustment accuracy, and is highly dependent on operating skills. In addition, the existing adjustable aperture device does not have a high-temperature cleaning function, which often results in a long static time to reach a detectable state, affecting the detection efficiency. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide an adjustable aperture device for electron beam detection equipment with compact structure, simple operation, stable operation and high automation level in view of the deficiencies in the prior art.

[0004] To achieve the above object, the present invention can adopt the following technical solutions:

[0005] An adjustable aperture device for electron beam detection equipment comprises: an aperture base assembly, an X-axis drive assembly and a Y-axis drive assembly; the aperture base assembly comprises a base, a connecting seat, an aperture rod and a feeding heating assembly; the Y-axis drive assembly is used to drive the aperture rod to move autonomously along the Y-axis direction, the X-axis drive assembly is used to drive the aperture rod to move autonomously along the X-axis direction, the X-axis drive assembly is connected to the Y-axis drive assembly through the Y-axis motion seat, and moves together with the Y-axis drive assembly; the connecting seat is arranged on the base, the base is connected to the X-axis drive assembly, the feeding heating assembly is arranged through the connecting seat, the feeding heating assembly is respectively connected to the power supply and the aperture rod, and the feeding heating assembly is used to electrically heat the aperture rod to achieve self-cleaning of the aperture hole on the aperture rod.

[0006] As a further improvement of the present invention, the aperture base assembly also includes a mounting base connected to the X-axis drive assembly, a feedthrough hole is provided inside the mounting base, the top of the mounting base is sealed and connected to the positive pole of the power supply, the discharge rod of the positive pole of the power supply is installed to the top of the feedthrough hole through a feedthrough flange, and the bottom of the feedthrough hole is connected to the power feeding heating assembly.

[0007] As a further improvement of the present invention, the power feeding heating assembly includes an adapter, a terminal block and a heating rod, the adapter is connected to the bottom of the feedthrough hole, one end of the terminal block is connected to the adapter, the other end of the terminal block is connected to the heating rod, and the end of the terminal block close to the heating rod is connected to the negative pole of the power supply, and the heating rod is connected to the aperture rod; by connecting the terminal block to the power supply, the heating rod is heated and the aperture hole is cleaned.

[0008] As a further improvement of the present invention, a threading hole is provided inside the adapter, and the threading hole is used for installing a wiring terminal.

[0009] As a further improvement of the present invention, a connecting tube is provided on the connecting seat, and the connecting tube faces the aperture rod; a bellows is sleeved on the outside of the connecting terminal, one end of the bellows is connected to the adapter, and the other end of the bellows passes through the connecting seat and the connecting tube, and is nested in the end of the connecting tube.

[0010] As a further improvement of the present invention, a sealing ring is provided at the end of the connecting pipe to achieve a sealed connection between the adjustable aperture device and the electron beam device.

[0011] As a further improvement of the present invention, the aperture rod is provided with a clearance hole and a plurality of aperture holes side by side.

[0012] As a further improvement of the present invention, four aperture holes are arranged side by side on the aperture rod, and the aperture of the aperture hole is 0.02 mm.

[0013] As a further improvement of the present invention, the heating rod is a ceramic rod.

[0014] As a further improvement of the present invention, the X-axis drive assembly and the Y-axis drive assembly are both provided with limit switches and stroke control adjustable switches to achieve an adjustable stroke of 25 mm in the X direction and an adjustable stroke of 10 mm in the Y direction.

[0015] Compared with the prior art, the advantages of the present invention are:

[0016] The adjustable aperture device for electron beam detection equipment of the present invention is connected by connecting the aperture base assembly and the X-axis drive assembly, and then connecting the X-axis drive assembly and the Y-axis drive assembly; further, the feeding heating assembly is set in the connection seat, and the feeding heating assembly is connected to the power supply and the aperture rod respectively; the X-axis drive assembly is used to drive the aperture rod to move autonomously along the X-axis direction, and the Y-axis drive assembly is used to drive the aperture rod to move autonomously along the Y-axis direction, so that the aperture rod is precisely adjustable in the X direction and the Y direction under vacuum conditions, and the feeding heating assembly is used to electrically heat the aperture rod, that is, the aperture hole on the aperture rod is self-cleaned, and the aperture hole is prevented from affecting the adjustment effect due to the condensation of water vapor. The adjustable aperture device of the present invention is used to precisely adjust the aperture hole of 0.02mm to the center of the electron beam of the equipment, thereby filtering out scattered electrons, forming a beam with a stable beam spot, and realizing the aperture hole in the X direction and the Y direction under vacuum conditions. The adjustment accuracy needs to reach the micron level, laying a good foundation for the shaping of the electron beam. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1It is a schematic diagram of the structural principle of an adjustable aperture device for an electron beam detection device in a specific embodiment of the present invention;

[0018] Figure 2 It is a schematic diagram of the structural principle of the aperture base assembly in a specific embodiment of the present invention;

[0019] Figure 3 It is a schematic diagram of the cross-sectional structure principle of the aperture base assembly in a specific embodiment of the present invention;

[0020] Figure 4 It is a schematic diagram of the connection structure principle between the X-axis driving assembly and the Y-axis driving assembly in a specific embodiment of the present invention;

[0021] Legend: 1. Aperture base assembly; 2. X-axis drive assembly; 3. Y-axis drive assembly; 31. Y-axis motion seat; 4. Base; 5. Aperture rod; 51. Air avoidance hole; 52. Aperture hole; 6. Mounting seat; 61. Feedthrough hole; 7. Feedthrough flange; 8. Sealing ring; 9. Connecting pipe; 10. Bellows; 11. Adapter; 111. Threading hole; 12. Wiring terminal; 13. Heating rod; 14. Positive pole of power supply; 15. Connecting seat. DETAILED DESCRIPTION

[0022] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0023] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0024] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0025] Example

[0026] like Figure 1 , Figure 2 and Figure 4 As shown, the adjustable aperture device for electron beam detection equipment of the present invention comprises: an aperture base assembly 1, an X-axis drive assembly 2 and a Y-axis drive assembly 3. The aperture base assembly 1 comprises a base 4, a connecting seat 15, an aperture rod 5 and a feeding heating assembly. The Y-axis driving assembly 3 is used to drive the aperture rod 5 to move autonomously along the Y-axis direction, the X-axis driving assembly 2 is used to drive the aperture rod 5 to move autonomously along the X-axis direction, and the X-axis driving assembly 2 is connected to the Y-axis driving assembly 3 through the Y-axis motion seat 31, and moves together with the Y-axis driving assembly 3. The connecting seat 15 is arranged on the base 4, and the base 4 is connected to the X-axis driving assembly 2. The feeding heating assembly is arranged through the connecting seat 15, and the feeding heating assembly is respectively connected to the power supply and the aperture rod 5. The feeding heating assembly is used to electrically heat the aperture rod 5 to achieve self-cleaning of the aperture hole on the aperture rod 5.

[0027] In this embodiment, both the X-axis drive assembly 2 and the Y-axis drive assembly 3 adopt conventional settings in this field. The X-axis drive assembly 2 is mainly used for precisely adjusting the X-direction displacement of the aperture, and includes components such as a motor, a grating ruler, and a travel switch. The Y-axis drive assembly 3 is mainly used for precisely adjusting the Y-direction displacement of the aperture, and includes components such as a motor, a grating ruler, and a travel switch, and a spring structure can be designed opposite the motor output shaft to form a unidirectional elastic force to minimize the impact of the reverse clearance. Furthermore, the motor can adopt a high-precision motor, and a grating ruler can be added in each direction of motion control to achieve closed-loop precision control of the motor, with a positioning accuracy of up to 0.006mm and a repeat positioning accuracy of up to 0.003mm. By providing limit switches and adjustable travel control switches in both the X-axis drive assembly 2 and the Y-axis drive assembly 3, the X-direction travel can be adjusted to 25mm and the Y-direction travel can be adjusted to 10mm.

[0028] In this embodiment, the aperture base assembly 1 and the X-axis drive assembly 2 are connected, and then the X-axis drive assembly 2 and the Y-axis drive assembly 3 are connected; further, the power feeding and heating assembly is set in the connecting seat 15, and the power feeding and heating assembly 2 is respectively connected to the power supply and the aperture rod 5; the X-axis drive assembly 2 is used to drive the aperture rod 5 to move autonomously along the X-axis direction, and the Y-axis drive assembly 3 is used to drive the aperture rod 5 to move autonomously along the Y-axis direction, so that precise adjustable control of the aperture rod in the X direction and the Y direction is achieved under vacuum conditions, and the power feeding and heating assembly is used to electrically heat the aperture rod, that is, the self-cleaning of the aperture hole on the aperture rod is achieved. The adjustable aperture device of the present invention is used to precisely adjust the aperture hole of 0.02mm to the center of the electron beam of the equipment, thereby filtering out scattered electrons, forming a beam with a stable beam spot, and laying a good foundation for the shaping of the electron beam.

[0029] like Figure 2 and Figure 3As shown, in this embodiment, the aperture base assembly 1 also includes a mounting base 6 connected to the X-axis drive assembly 2, a feedthrough hole 61 is provided inside the mounting base 6, the top of the mounting base 6 is sealed and connected to the positive electrode 14 of the power supply through a sealing ring 8, the discharge rod of the positive electrode 14 of the power supply is installed to the top of the feedthrough hole 61 through a feedthrough flange 7, and the bottom of the feedthrough hole 61 is connected to the feeding heating assembly.

[0030] like Figure 2 As shown, the feed heating assembly includes an adapter 11, a terminal 12 and a heating rod 13. The adapter 11 is connected to the bottom of the feed-through hole 61, one end of the terminal 12 is connected to the adapter 11, the other end of the terminal 12 is connected to the heating rod 13, and the end of the terminal 12 close to the heating rod 13 is connected to the negative pole of the power supply, and the heating rod 13 is connected to the aperture rod 5. By connecting the terminal 12 to the power supply, the heating rod 13 is heated and heated, thereby cleaning the aperture hole 52. Further, the heating rod 13 is a ceramic rod.

[0031] like Figure 2 As shown, a threading hole 111 is provided inside the adapter 11 , and the threading hole 111 is used for detachably installing the wiring terminal 12 .

[0032] like Figure 2 As shown, a connecting tube 9 is provided on the connecting seat 15, and the connecting tube 9 faces the aperture rod 5. A bellows 10 is sleeved outside the terminal 12, one end of the bellows 10 is connected to the adapter 11, and the other end of the bellows 10 passes through the connecting seat 15 and the connecting tube 9, and is nested in the end of the connecting tube 9. A sealing ring 8 is provided at the end of the connecting tube 9 to achieve a sealed connection between the adjustable aperture device and the electron beam device. The X-axis drive assembly 2 comprehensively utilizes the unidirectional elastic force of the bellows 10 to minimize the influence of the backlash.

[0033] like Figure 1 As shown, an air avoidance hole 51 and a plurality of aperture holes 52 are arranged side by side on the aperture rod 5, and the air avoidance hole 51 is close to the connecting seat 15. Further, four aperture holes 52 are arranged side by side on the aperture rod 5, and the aperture diameter of the aperture hole 52 is 0.02 mm. The four aperture holes 52 can be switched arbitrarily, so that the centering adjustment and hole position switching of the aperture can be realized without disassembly, thereby reducing maintenance costs and improving work efficiency.

[0034] In this embodiment, a protective shell may also be provided to cover and protect the entire structure to prevent accidental factors from causing damage to the structure.

[0035] Working principle: When the electron beam is shot down vertically, the electrons will be in a scattered state. At this time, the adjustable aperture provides a very small aperture to filter out the scattered electrons, leaving only the electron beam group with a larger central beam. How to make the main beam of the electron beam just pass through the center of the aperture hole 52, retaining the main beam and filtering out the scattered electrons, which requires precise control of the position of the aperture hole 52. The adjustable aperture device of this embodiment provides X-axis front and rear position positioning control, and Y-axis left and right position positioning control, and adjusts the aperture hole 52 to a precise position that retains the main beam and filters out the scattered electrons, thereby achieving precise filtering of the electron beam.

[0036] Although the present invention is disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any technician familiar with the art can use the above disclosed methods and technical contents to make many possible changes and modifications to the technical solutions of the present invention without departing from the spirit and technical solutions of the present invention, or modify them into equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solutions of the present invention still fall within the scope of protection of the technical solutions of the present invention.

Claims

1. An adjustable aperture device for an electron beam detection device, characterized in that: include: An aperture base assembly (1), an X-axis drive assembly (2) and a Y-axis drive assembly (3); the aperture base assembly (1) comprises a base (4), a connecting seat (15), an aperture rod (5) and a feeding heating assembly; the Y-axis drive assembly (3) is used to drive the aperture rod (5) to move autonomously along the Y-axis direction, the X-axis drive assembly (2) is used to drive the aperture rod (5) to move autonomously along the X-axis direction, the X-axis drive assembly (2) is connected to the Y-axis drive assembly (3) through a Y-axis motion seat (31), and moves together with the Y-axis drive assembly (3); the connecting seat (15) is arranged on the base (4), the base (4) is connected to the X-axis drive assembly (2), the feeding heating assembly is arranged through the connecting seat (15), the feeding heating assembly is connected to the power supply and the aperture rod (5) respectively, and the feeding heating assembly is used to electrically heat the aperture rod (5) to achieve self-cleaning of the aperture hole on the aperture rod (5).

2. The adjustable aperture device for electron beam detection equipment according to claim 1, characterized in that: The aperture base assembly (1) also includes a mounting base (6) connected to the X-axis drive assembly (2), a feedthrough hole (61) is provided inside the mounting base (6), the top of the mounting base (6) is sealedly connected to the positive electrode of the power supply (14), the discharge rod of the positive electrode of the power supply (14) is installed to the top of the feedthrough hole (61) through a feedthrough flange (7), and the bottom of the feedthrough hole (61) is connected to the feeding heating assembly.

3. The adjustable aperture device for electron beam detection equipment according to claim 2, characterized in that: The feeding heating assembly comprises an adapter (11), a terminal block (12) and a heating rod (13); the adapter (11) is connected to the bottom of the feedthrough hole (61); one end of the terminal block (12) is connected to the adapter (11); the other end of the terminal block (12) is connected to the heating rod (13); and the end of the terminal block (12) close to the heating rod (13) is connected to the negative pole of a power source; the heating rod (13) is connected to the aperture rod (5); by connecting the terminal block (12) to the power source, the heating rod (13) is heated and the aperture hole (52) is cleaned.

4. The adjustable aperture device for electron beam detection equipment according to claim 3, characterized in that: A wire threading hole (111) is provided inside the adapter (11), and the wire threading hole (111) is used to install a wiring terminal (12).

5. The adjustable aperture device for electron beam detection equipment according to claim 3, characterized in that: A connecting tube (9) is provided on the connecting seat (15), and the connecting tube (9) faces the aperture rod (5); a bellows (10) is sleeved on the outside of the connecting terminal (12), one end of the bellows (10) is connected to the adapter (11), and the other end of the bellows (10) passes through the connecting seat (15) and the connecting tube (9), and is nested in the end of the connecting tube (9).

6. The adjustable aperture device for electron beam detection equipment according to claim 5, characterized in that: The end of the connecting pipe (9) is provided with a sealing ring (8) to achieve a sealed connection between the adjustable aperture device and the electron beam device.

7. The adjustable aperture device for electron beam detection equipment according to any one of claims 1 to 6, characterized in that: The aperture rod (5) is provided with a clearance hole (51) and a plurality of aperture holes (52) arranged side by side.

8. The adjustable aperture device for electron beam detection equipment according to claim 7, characterized in that: Four aperture holes (52) are arranged side by side on the aperture rod (5), and the aperture of the aperture hole (52) is 0.02 mm.

9. The adjustable aperture device for an electron beam detection device according to any one of claims 4 to 6, characterized in that: The heating rod (13) is a ceramic rod.

10. The adjustable aperture device for electron beam detection equipment according to any one of claims 1 to 6, characterized in that: The X-axis drive assembly (2) and the Y-axis drive assembly (3) are both provided with a limit switch and a stroke control adjustable switch to achieve an adjustable stroke of 25 mm in the X direction and an adjustable stroke of 10 mm in the Y direction.

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