Air pressure type chip pickup device

Abstract

The invention provides an air pressure type chip pickup device. The air pressure type chip pickup device comprises an inner shaft, a pressure taking head, a sealing sleeve, a first air pipe and an air inlet fixing end, one end of the inner shaft is connected with the pressure tapping head, and the inner shaft is used for driving the pressure tapping head to move; a first ventilation channel is formed in the inner shaft, one end of the first ventilation channel communicates with the pressure tapping head, and the first ventilation channel is used for conducting ventilation and heat dissipation on the pressure tapping head; the sealing sleeve sleeves the peripheral side of the inner shaft, a first air guide channel is formed in the sealing sleeve, the first air guide channel communicates with the air inlet fixing end through a first air pipe, and the first ventilation channel communicates with the first air guide channel; the air inlet fixed end is used for ventilating into the first air guide duct through the first air pipe; the outer side of the sealing sleeve is fixedly connected with a connecting block, and the two ends of the first air pipe are fixedly connected with the connecting block and the air inlet fixing end correspondingly. The precision of the inner shaft can be guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of integrated circuit packaging, and in particular to a pneumatic chip picking device. Background Art

[0002] During the integrated circuit packaging process, the pressure taking head needs to be connected to the driving component through the inner shaft so that the driving component can drive the device adsorbed by the suction nozzle in the pressure taking head to move.

[0003] In order to ensure the accuracy of device movement, especially the movement accuracy of the chip, the accuracy of the inner shaft is usually required to be high. Even if an expensive and high-precision inner shaft is used, for some heated pressure heads, the heat is transferred to the inner shaft, which will reduce the accuracy of the inner shaft and thus reduce the movement accuracy of the device. Summary of the invention

[0004] To solve the above problems, the pneumatic chip picking device provided by the present invention can ventilate and dissipate heat for the pressure taking head through a first ventilation duct opened in the inner shaft, thereby preventing the heat of the pressure taking head from being transferred to the inner shaft and affecting the accuracy of the inner shaft.

[0005] The present invention provides a pneumatic chip picking device, characterized in that it comprises: an inner shaft, a pressure taking head, a sealing sleeve, a first air pipe and an air intake fixed end;

[0006] One end of the inner shaft is connected to the pressure taking head, and the inner shaft is used to drive the pressure taking head to move;

[0007] A first ventilation channel is provided in the inner shaft, one end of the first ventilation channel is connected to the pressure taking head, and the first ventilation channel is used for ventilating and cooling the pressure taking head;

[0008] The sealing sleeve is sleeved on the outer peripheral side of the inner shaft, and a first air guide passage is provided in the sealing sleeve. The first air guide passage is connected to the air intake fixed end through the first air pipe, and the first ventilation passage is connected to the first air guide passage;

[0009] The air intake fixed end is used to ventilate the first air duct through the first air pipe;

[0010] The outer side of the sealing sleeve is fixedly connected with a connecting block, and the two ends of the first air pipe are fixedly connected to the connecting block and the air intake fixed end respectively.

[0011] Optionally, the pneumatic chip picking device further comprises: a housing;

[0012] A side wall of the shell is provided with an escape opening, and the connecting block extends out of the shell through the escape opening.

[0013] Optionally, a width of the avoidance opening perpendicular to the first direction is greater than a width of the connecting block perpendicular to the first direction.

[0014] Optionally, the inner shaft is rotatably connected to the shell along a direction perpendicular to the first direction.

[0015] Optionally, the pneumatic chip picking device further comprises: a second air pipe;

[0016] The pressure taking head is provided with an adsorption channel, the inner shaft is provided with a second ventilation channel, the sealing sleeve is provided with a second air guide channel, the second ventilation channel is communicated with the adsorption channel and the second air guide channel respectively, and the second air guide channel is communicated with the air intake fixed end through the second air pipe;

[0017] The fixed end is used to provide negative pressure to the second air pipe;

[0018] The pressure taking head passes through the negative pressure adsorption device in the adsorption channel.

[0019] Optionally, two ends of the second air pipe are fixedly connected to the connecting block and the air intake fixed end respectively.

[0020] Optionally, the pneumatic chip picking device further comprises: a third air pipe;

[0021] The pneumatic chip picking device is further provided with a telescopic chamber, the inner shaft is further provided with a third ventilation duct, the sealing sleeve is provided with a third air guide duct, the third ventilation duct is communicated with the telescopic chamber, the third air guide duct is respectively communicated with the third air pipe and the third ventilation duct, the third air pipe is communicated with the air intake fixed end, and the inner shaft is slidably connected with the shell along the straight line direction where the first direction is located;

[0022] The air inlet fixed end is used to adjust the pressure in the telescopic chamber through the third air pipe, so as to adjust the pressure applied by the pressure taking head to the chip.

[0023] Optionally, two ends of the third air pipe are fixedly connected to the connecting block and the air intake fixed end respectively.

[0024] Optionally, four sealing rings are provided on the inner wall of the sealing sleeve, the sealing rings are sleeved on the outer side of the inner shaft, and the four sealing rings are arranged in an interlaced manner relative to the first air guiding duct, the second air guiding duct and the third air guiding duct.

[0025] Optionally, the second ventilation passage is located on a side of the third ventilation passage facing the first direction, and the first ventilation passage is located on an outer peripheral side of the second ventilation passage.

[0026] The pneumatic chip picking device provided in the embodiment of the present invention can ventilate and dissipate heat for the pressure taking head through the first ventilation duct by opening a first ventilation duct in the inner shaft, thereby preventing the heat generated by the pressure taking head itself and / or the heat from other devices from being conducted to the inner shaft, thereby avoiding the influence of heat on the accuracy of the inner shaft, and further ensuring the accuracy of the pressure taking head in driving the device to move. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 A partial cross-sectional view of a pneumatic chip pickup device according to an embodiment of the present application;

[0028] Figure 2 This is a structural diagram of a pneumatic chip pickup device according to an embodiment of the present application;

[0029] Figure 3 This is a structural diagram of a pneumatic chip pickup device according to an embodiment of the present application;

[0030] Figure 4 A partial cross-sectional view of a pneumatic chip pickup device according to an embodiment of the present application;

[0031] Figure 5 A partial cross-sectional view of a pneumatic chip pickup device according to an embodiment of the present application;

[0032] Figure 6 A partial cross-sectional view of a pneumatic chip pickup device according to an embodiment of the present application;

[0033] Figure 7 A partial cross-sectional view of a pressure taking head according to an embodiment of the present application;

[0034] Figure 8 This is a structural diagram of a pressure taking head according to an embodiment of the present application;

[0035] Fig. 9 This is a structural diagram of a pressure taking head according to an embodiment of the present application.

[0036] Reference numerals

[0037] 1. Casing; 11. Motor seat; 12. Bearing seat; 13. Shell; 131. Avoidance; 14. Fixed seat; 2. Inner shaft; 21. Shaft body; 22. Connector; 221. Connecting part; 222. Docking part; 223. Heat dissipation part; 23. Sealing plug; 241. First ventilation duct; 2411. Shaft ventilation duct; 2412. Head ventilation duct; 242. Second ventilation duct; 243. Third ventilation duct; 3. Pressure head; 31. Suction nozzle; 311. Adsorption end; 312. First connection end; 313, adsorption channel; 314, heat conducting plate; 32, heat conducting sleeve; 321, second connection end; 322, heat conducting end; 323, first connecting hole; 33, heat insulating sleeve; 331, ventilation slot; 332, plug-in compartment; 333, hoop opening; 334, second connecting hole; 335, third connecting hole; 34, heating plate; 35, pressing assembly; 351, pressing screw; 352, insulating sheet; 353, corrugated washer; 361, first fixing member; 362, second fixing member; 3 63, preload member; 364, first sealing member; 365, second sealing member; 366, positioning sleeve; 3661, positioning opening; 367, positioning rod; 37, thermocouple metal head; 41, bottom connecting member; 411, air supply duct; 42, telescopic connecting member; 421, telescopic chamber; 43, top connecting member; 51, active trigger member; 52, contact pressure block; 53, passive trigger member; 54, insulating sleeve; 541, insulating cylinder; 542, insulating support ring; 55, first connecting member; 55 1. Storage groove; 56. Second connecting piece; 561. Avoidance hole; 57. Air intake fixed end; 58. First air pipe; 59. Second air pipe; 510. Third air pipe; 511. First signal docking piece; 512. Second signal docking piece; 513. Ball bearing; 514. Sealing sleeve; 5141. First air duct; 5142. Second air duct; 5143. Third air duct; 515. Connecting block; 6. Connecting sleeve; 61. Supporting ring; 62. Heat dissipation hole; 7. Rotary drive assembly. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] It should be noted that, in the present invention, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0040] In addition, a rotational connection relative to a certain direction is a rotational connection perpendicular to that direction; a sliding connection relative to a certain direction is a sliding connection along a straight line in which the certain direction is located; a detachable fixed connection between objects includes: a connection method in which two objects are inserted through a positioning rod, a connection method in which two objects are fixed by screws, a connection method in which two objects are fixed by threads, and a connection method in which two objects are fixed by elastic clips, etc. The specific method used can be screened or adjusted according to the actual scenario.

[0041] This embodiment provides a pneumatic chip pickup device, combined with Figure 1 , Figure 2 and Figure 3 The pneumatic chip picking device includes: a rotating drive component 7, a housing 1, an air intake fixed end 57, a first air pipe 58, a second air pipe 59, a third air pipe 510, a first signal docking piece 511, a second signal docking piece 512, an inner shaft 2, a pressure taking head 3, an active triggering piece 51, a passive triggering piece 53, a bottom connecting piece 41, an insulating sleeve 54, a first connecting piece 55 and a second connecting piece 56.

[0042] The housing 1 includes: a motor seat 11, a bearing seat 12, a shell 13 and a fixing seat 14; the pressure head 3 can be a thermal pressure head, a bonding head or a manipulator, etc., and can take, place and press down the device in a first direction.

[0043] In this embodiment, the first direction is the downward direction, but is not limited thereto; the pressure head 3 is a bonding head, and is used to take, place, and press down the chip; the first connecting member 55 is a motor connecting seat; the rotary drive assembly 7 is a rotary motor. The air intake fixed end 57 is arranged on the casing 1, and the air intake fixed end 57 is respectively connected to the first air pipe 58, the second air pipe 59 and the third air pipe 510 to pass three-way air into the inner shaft 2. The rotary motor is fixed above the motor seat 11, the motor seat 11 is located above the bearing seat 12, the bearing seat 12 is located below the motor seat 11, and the housing 13 is located below the bearing seat 12. The motor seat 11 is detachably fixedly connected to the bearing seat 12 by screws, the bearing seat 12 is fixedly connected to the housing 13, and the housing 13 is fixedly connected to the casing 1 by the configuration of bolts and nuts. The ball bearing 513 is placed on the top of the bearing seat 12, and the first connecting member 55 passes through the ball bearing 513 from bottom to top and is fixedly connected to the output shaft of the rotating motor, so that the rotating motor can drive the first connecting member 55 to rotate in the horizontal direction.

[0044] Combination Figure 4 and Figure 5 , the passive trigger member 53 is located in the insulating sleeve 54, one end of the active trigger member 51 is connected to the bottom connecting member 41, and the other end of the active trigger member 51 is inserted into the insulating sleeve 54. A touch block 52 is fixedly provided at the other end of the active trigger member 51. The materials of the touch block 52 and the passive trigger member 53 are both conductive materials. The touch block 52 faces the passive trigger member 53 along a first direction, and the touch block 52 is in contact with the passive trigger member 53. The active trigger member 51 and the passive trigger member 53 are both located in the housing 1, and the bottom connecting member 41 is located on the side of the passive trigger member 53 facing the first direction. The bottom connecting member 41 can slide relative to the housing 1, and the second signal docking member 512 is electrically connected to the passive trigger member 53. The first signal docking member 511 is electrically connected to the touch block 52.

[0045] The pressure taking head 3 is located below the bottom connecting member 41, and the pressure taking head 3 is connected to the bottom connecting member 41 through the inner shaft 2; the first signal docking member 511 and the second signal docking member 512 are in conflict with the passive triggering member 53 through the contact block 52 to transmit the conduction signal; the trigger-type pressure taking device is used to determine whether the pressure taking head 3 conflicts with the object along the first direction through the conduction signal between the first signal docking member 511 and the second signal docking member 512.

[0046] In the pneumatic chip picking device, by setting the contact block 52 and the passive trigger member 53, when the pressure taking head 3 does not collide with the object along the first direction during movement, the contact block 52 can collide with the passive trigger member 53 under the action of gravity or other insulating elastic members, so that the first signal docking member 511 and the second signal docking member 512 are connected, and the conduction signal can be transmitted, so that the trigger-type pressure taking device can determine that the pressure taking head 3 is in contact with the object in the first direction when it is determined that the conduction signal can be transmitted between the first signal docking member 511 and the second signal docking member 512. There is no conflict with the object along the first direction; and when the pressure taking head 3 conflicts with the object along the first direction during its movement, the transmission of the conduction signal between the first signal docking component 511 and the second signal docking component 512 is disconnected, so that the first signal docking component 511 and the second signal docking component 512 are electrically disconnected, that is, the transmission of the conduction signal is stopped, and then the trigger-type pressure taking device can determine that the pressure taking head 3 has conflicted with the object along the first direction when it determines that the conduction signal cannot be transmitted between the first signal docking component 511 and the second signal docking component 512.

[0047] Furthermore, the pneumatic chip picking device further includes: a retractable connecting member 42 and a top connecting member 43 .

[0048] The insulating sleeve 54 is connected to the top connector 43, the first connector 55 is connected to the top connector 43, the retractable connector 42 is located on the side of the top connector 43 facing the first direction, the bottom connector 41 is located on the side of the retractable connector 42 facing the first direction, and the retractable connector 42 can be retracted along the first direction. The materials of the active trigger 51, the bottom connector 41, the retractable connector 42, the top connector 43 and the first connector 55 are all conductive materials; the material of the insulating sleeve 54 is insulating material, and this embodiment does not specifically limit the conductive material and insulating material. The first signal docking member 511 is fixedly connected to the first connector 55, and the first signal docking member 511 is electrically connected to the first connector 55.

[0049] The upper and lower ends of the retractable connector 42 are sealed and fixedly connected to the top connector 43 and the bottom connector 41 respectively; the retractable connector 42 is sleeved on the outer peripheral side of the active triggering member 51. One end of the first signal docking member 511 is fixedly connected to the first connector 55 by threads. The other end of the first signal docking member 511 extends out of the first connector 55 and is electrically connected to the signal processing module in the pneumatic chip pickup device through welding wires.

[0050] A storage groove 551 is provided on the lower surface of the first connector 55. The storage groove 551 is adapted to the second connector 56, and the second connector 56 is fixedly arranged in the storage groove 551. The passive trigger 53 and the insulating sleeve 54 are located directly below the second connector 56, and the top of the insulating sleeve 54 is in conflict with the bottom of the second connector 56; one end of the second connector 56 is bonded to the bottom of the second connector 56 through a copper column, and the other end of the second connector 56 is vertically downward and inserted into the insulating sleeve 54 to conflict with the passive trigger 53. The top connector 43 is located below the first connector 55; the top connector 43 and the first connector 55 are fixed by screws, and the two are pressed together with a sealing ring to form a sealed connection.

[0051] Specifically, the insulating sleeve 54 includes: an insulating tube 541 and an insulating support ring 542. The insulating tube 541 is sleeved in the top connecting member 43 and penetrates the top connecting member 43 in the up-down direction. A folded edge is provided at the top of the insulating sleeve 54. The top connecting member 43 supports the insulating tube 541 upward through the folded edge. The insulating support ring 542 and the passive trigger member 53 are both located in the insulating tube 541, and the insulating support ring 542 is fixedly connected to the insulating tube 541, and the insulating support ring 542 supports the passive trigger member 53 above it.

[0052] Further, combined with Figure 1 and Figure 6 The inner shaft 2 includes: a shaft body 21 and a connector 22. The inner shaft 2 is detachably fixedly connected to the pressure taking head 3 through the connector 22. The connector 22 includes: a connecting portion 221, a docking portion 222 and a heat dissipation portion 223.

[0053] The docking portion 222 is located below the connecting portion 221, the heat dissipation portion 223 is located below the docking portion 222, and the pressure head 3 is located below the heat dissipation portion 223. In this embodiment, the connecting portion 221, the docking portion 222 and the heat dissipation portion 223 are integrally formed and fixedly connected. The connecting head 22 is threadedly connected to the shaft body 21 through the connecting portion 221, the connecting head 22 is welded to the shaft body 21 through the docking portion 222, and the connecting head 22 is detachably fixedly connected to the pressure head 3 through the heat dissipation portion 223.

[0054] The bottom end of the bottom connector 41 is threadedly connected to the top end of the shaft body 21, and the bottom connector 41 and the shaft body 21 are pressed together with a sealing ring to form a sealed connection. An upper bearing and a lower bearing are fixedly arranged in the housing 13, and the shaft body 21 passes through the upper bearing and the lower bearing in the up-down direction. The shaft body 21 is connected to the housing 13 in a horizontal direction through the upper bearing and the lower bearing. In this embodiment, the upper bearing and the lower bearing are both ball bushings, which can realize the linear and horizontal rotational combined motion of the inner shaft 2 relative to the housing 13 in the up-down direction.

[0055] The inner shaft 2 is provided with a ventilation hole along the axial direction, and the ventilation hole passes through the shaft body 21 and the connector 22. A first ventilation channel 241 is provided at the bottom end of the inner shaft 2. The first ventilation channel 241 is located outside the ventilation hole. In this embodiment, the top end of the first ventilation channel 241 is located inside the shaft body 21, and the bottom end of the first ventilation channel 241 passes through the connector 22 to communicate with the pressure taking head 3; there are two first ventilation channels 241, which are respectively located on the left and right sides of the ventilation hole.

[0056] A sealing plug 23 is fixedly arranged in the ventilation hole. The sealing plug 23 is used to divide the ventilation hole into a second ventilation channel 242 and a third ventilation channel 243. The second ventilation channel 242 is located below the sealing plug 23, and the third ventilation channel 243 is located above the sealing plug 23.

[0057] Furthermore, a sealing sleeve 514 is also provided in the housing 13. The sealing sleeve 514 is fixedly sleeved on the circumference of the shaft body 21 by means of set screws. A connecting block 515 is fixedly connected to the outer side of the sealing sleeve 514. A sidewall of the housing 13 is provided with an escape opening 131. The connecting block 515 extends out of the housing 13 through the escape opening 131. The two ends of the first air pipe 58, the second air pipe 59 and the third air pipe 510 are fixedly connected to the connecting block 515 and the air intake fixed end 57, respectively.

[0058] The horizontal width of the avoidance opening 131 is greater than the horizontal width of the connecting block 515. In this way, when the rotary motor drives the pressure taking head 3 to rotate horizontally by a specified angle, the connecting block 515 can be prevented from colliding with the housing 13.

[0059] The inner wall of the sealing sleeve 514 is provided with a first air duct 5141, a second air duct 5142 and a third air duct 5143. The first air duct 5141 is connected to the air intake fixed end 57 through the first air pipe 58, and the first ventilation duct 241 is connected to the first air duct 5141. The second air duct 5142 is connected to the air intake fixed end 57 through the second air pipe 59, and the second ventilation duct 242 is connected to the second air duct 5142. The third air duct 5143 is connected to the air intake fixed end 57 through the third air pipe 510, and the third ventilation duct 243 is connected to the third air duct 5143. The first ventilation duct 241 is used to ventilate and dissipate heat for the pressure taking head 3 through the air intake fixed end 57.

[0060] The inner wall of the sealing sleeve 514 is provided with four sealing rings, and the four sealing rings are arranged in an interlaced manner relative to the first air duct 5141, the second air duct 5142 and the third air duct 5143, so as to improve the sealing performance of the connection between the ventilation duct and the corresponding air duct and ensure the stability of the air pressure.

[0061] Furthermore, the retractable connector 42 can be a connector with elasticity, such as a spring or a bellows with closed sidewalls. In this embodiment, the first signal docking member 511 is a terminal, the second signal docking member 512 is a probe, the passive trigger member 53 is a copper pad, the top connector 43 and the bottom connector 41 are the upper and lower flanges of the bellows, respectively, and the retractable connector 42 is a bellows, so that the internal cavity of the bellows forms a retractable chamber 421.

[0062] The bottom connecting member 41 is provided with an air supply duct 411. One end of the air supply duct 411 is in communication with the third ventilation duct 243, and the other end of the air supply duct 411 is in communication with the telescopic chamber 421. The air supply duct 411 is in communication with the telescopic chamber 421 in the following manners: the air supply duct 411 passes through the bottom connecting member 41 and is directly in communication with the telescopic chamber 421, or the other end of the air supply duct 411 passes through the interior of the active trigger member 51 and passes through the side wall or upper surface of the active trigger member 51 to communicate with the telescopic chamber 421. In the present embodiment, the other end of the air supply duct 411 passes through the interior of the active trigger member 51 and passes through the upper surface of the active trigger member 51 to communicate with the telescopic chamber 421.

[0063] The lower surface of the second connecting member 56 is provided with an escape hole 561. The escape hole 561 can be a blind hole or a through hole, and the downward opening of the escape hole 561 is directly facing the active trigger member 51 and the contact block 52. The size of the escape hole 561 is adapted to the active trigger member 51 and the contact block 52.

[0064] In this embodiment, the avoidance hole 561 is a through hole. The top opening of the avoidance hole 561 is sealed by the first connecting member 55 with a sealing screw, or the first connecting member 55 is connected to the mounting hole of the output shaft of the rotary drive assembly 7 with a blind hole, and the first connecting member 55 seals the top opening of the avoidance hole 561 through a sealing gasket. In this embodiment, the top opening of the avoidance hole 561 is sealed by the first connecting member 55 with a sealing screw as an example, so that the top of the telescopic chamber 421 can be kept sealed under the cover of the first connecting member 55, the second connecting member 56 and the sealing screw. Therefore, when the pressure head 3 moves downward and collides with the chip or the workbench, the pressure head 3 can drive the pressure block 52 to move upward through the inner shaft 2, and the avoidance hole 561 can prevent the pressure head 3 from moving downward for a large distance, and the pressure block 52 collides with the second connecting member 56, thereby affecting the movement of the pressure head 3, thereby preventing the pressure head 3 from damaging the chip.

[0065] The air intake fixed end 57 is used to introduce positive pressure into the telescopic chamber 421 through the third air pipe 510, so as to apply a force in the first direction to the bottom connecting member 41. When it is not necessary to apply a force in the first direction to the bottom connecting member 41 by pressure, the air intake fixed end 57 can also be achieved by reducing the pressure in the third air pipe 510. In this way, by introducing positive pressure into the telescopic chamber 421 through the air intake fixed end 57, not only can the contact pressure block 52 move from a state of separation from the passive trigger member 53 to a state of conflict with the passive trigger member 53, but also when the pressure head 3 conflicts with the chip, the pressure applied by the pressure head 3 to the chip can be increased.

[0066] An adsorption channel 313 is provided in the pressure taking head 3. The second ventilation channel 242 is communicated with one end of the adsorption channel 313, and the other end of the adsorption channel 313 is communicated with the lower surface of the pressure taking head 3. The fixed end is used to provide negative pressure to the second air pipe 59. In this way, the pressure taking head 3 adsorbs the chip through the negative pressure in the adsorption channel 313, so that the pressure taking head 3 drives the chip to move.

[0067] In this embodiment, the first ventilation channel 241 includes: an axial ventilation channel 2411 and a head ventilation channel 2412. The axial ventilation channel 2411 is located on the shaft body 21 and on two opposite sides of the second ventilation channel 242, and the head ventilation channel 2412 is located on the connector 22. One end of the axial ventilation channel 2411 is connected to one end of the head ventilation channel 2412, and the other end of the axial ventilation channel 2411 is connected to the first air guide channel 5141. The other end of the head ventilation channel 2412 passes through the lower surface of the heat dissipation portion 223 and faces the pressure taking head 3. The air intake fixed end 57 is used to ventilate and dissipate heat for the pressure taking head 3 through the first air pipe 58 and the first ventilation channel 241.

[0068] In this embodiment, the inner shaft 2 is composed of the shaft body 21 and the connector 22, which can ensure the roughness and cylindricity of the shaft body 21 while facilitating the processing of the inner shaft 2, thereby reducing the processing cost of the inner shaft 2. In addition, by connecting and fixing the connector 22 to the shaft body 21 in sequence through the docking portion 222 and the connecting portion 221, the shaft ventilation duct 2411 and the head ventilation duct 2412 can be kept conductive. The inner shaft 2 enriches the functions of the pneumatic chip pickup device by providing the first ventilation duct 241, the second ventilation duct 242 and the third ventilation duct 243, has a high degree of integration, and improves the space utilization rate of the pneumatic chip pickup device, so that more pneumatic chip pickup devices can be loaded and used in the same space for operation.

[0069] Further, combined with Figure 6 and Figure 7 The pneumatic chip picking device further includes: a connecting sleeve 6. The top end of the connecting sleeve 6 is sleeved on the outside of the heat dissipation portion 223, and the connecting sleeve 6 is threadedly connected to the heat dissipation portion 223. A supporting ring 61 is fixedly disposed inside the bottom end of the connecting sleeve 6. The top end of the pressure taking head 3 is supported above the supporting ring 61.

[0070] Combination Figure 8 and Fig. 9 The pressure head 3 includes: a suction nozzle 31, a heat-conducting sleeve 32, a heat-insulating sleeve 33, a first fixing member 361, a second fixing member 362, a pre-tightening member 363, a first sealing member 364, a second sealing member 365, a heating plate 34 and a pressing assembly 35. The pressing assembly 35 is connected to the bottom end of the heat-insulating sleeve 33, and the pressing assembly 35 is used to make the heating plate 34 collide with the heat-conducting sleeve 32. The heating plate 34 is used to generate heat. The heating plate 34 can collide with the heat-conducting sleeve 32 through its own lower surface, upper surface or side surface. In this embodiment, the lower surface of the heating plate 34 is in conflict with the heat-conducting sleeve 32.

[0071] The top of the thermal insulation sleeve 33 is supported above the supporting ring 61. A ventilation groove 331 is provided on the upper surface of the thermal insulation sleeve 33. One end of the ventilation groove 331 is connected to the first ventilation duct 241, and the other end of the ventilation groove 331 passes through the outer wall of the thermal insulation sleeve 33. In an optional embodiment, a heat dissipation hole 62 is provided on the side wall of the connecting sleeve 6. The heat dissipation hole 62 is connected to the ventilation groove 331. In this way, the wind blown from the first ventilation duct 241 to the thermal insulation sleeve 33 takes away the heat on the thermal insulation sleeve 33 through the heat dissipation hole 62, thereby preventing the heat from continuing to be conducted upward along the inner shaft 2, so that the precision of the precision components above the pressure taking head 3 is reduced due to the heat.

[0072] The lower surface of the heat insulating sleeve 33 is provided with a plug-in compartment 332. The heat conductive sleeve 32 includes: a second connection end 321 and a heat conductive end 322. The second connection end 321 is plugged with the heat insulating sleeve 33 through the plug-in compartment 332, the heat conductive end 322 is located below the second connection end 321, the second connection end 321 and the heat conductive end 322 are integrally formed and fixedly connected, the heating plate 34 is sleeved on the outer peripheral side of the second connection end 321, and the upper surface of the heat conductive end 322 is in conflict with the heating plate 34.

[0073] The heat-conducting sleeve 32 is detachably fixedly connected to the heat-insulating sleeve 33 through the first fixing member 361. The first fixing member 361 can be a screw, a threaded rod, a positioning pin, etc. In this embodiment, the first fixing member 361 is a screw. Among them, a clamp opening 333 is provided on the lower surface of the heat-insulating sleeve 33. The first fixing member 361 passes through the clamp opening 333 in the horizontal direction and is threadedly connected to the heat-insulating sleeve 33, so that the first fixing member 361 can clamp the second connection end 321 in the plug-in compartment 332 through the clamp opening 333.

[0074] The suction nozzle 31 includes: an adsorption end 311 and a first connection end 312. The adsorption end 311 is located below the first connection end 312, and the adsorption end 311 is integrally formed and fixedly connected with the first connection end 312. The heat-conducting sleeve 32 is sleeved on the outer peripheral side of the top of the first connection end 312, and the first connection end 312 is in contact with the heat-conducting sleeve 32 and connected by sliding up and down. A heat-conducting plate 314 is fixedly provided on the outer peripheral side of the bottom end of the first connection end 312, and the heat-conducting plate 314 is located below the heat-conducting sleeve 32, and the upper surface of the heat-conducting plate 314 is in conflict with the lower surface of the heat-conducting sleeve 32. The adsorption end 311 is located below the heat-conducting plate 314. By providing the heat-conducting plate 314, the contact area between the suction nozzle 31 and the heat-conducting sleeve 32 can be increased, thereby improving the heating efficiency of the suction nozzle 31.

[0075] The adsorption end 311 is used to communicate with the air intake fixed end 57 through the adsorption channel 313 to adsorb the device. The adsorption channel 313 includes: a first adsorption sub-channel and a second adsorption sub-channel. The first adsorption sub-channel is inside the spacer sleeve. The first adsorption sub-channel passes through the upper surface of the insulation sleeve 33 in the up-down direction and is connected to the plug-in bin 332. The second adsorption sub-channel passes through the upper and lower surfaces of the suction nozzle 31. The second adsorption sub-channel is connected to the plug-in bin 332.

[0076] A first connecting hole 323 is formed on the upper surface of the heat-conducting sleeve 32. The first connecting hole 323 penetrates the heat-conducting sleeve 32 in the up-down direction, and the first connecting end 312 is plugged into the heat-conducting sleeve 32 through the first connecting hole 323. The first connecting end 312 is adapted to the first connecting hole 323, and the cross-section of the first connecting end 312 can be circular or regular polygonal, etc. In this embodiment, the first connecting end 312 is circular as an example.

[0077] The first connection end 312 is detachably fixedly connected to the heat-conducting sleeve 32 through the second fixing member 362. The second fixing member 362 can be a screw, a screw rod, a positioning pin, etc. In this embodiment, the second fixing member 362 is a screw. The second fixing member 362 is threadedly connected to the heat-conducting sleeve 32 in the horizontal direction, and one end of the second fixing member 362 extending into the heat-conducting sleeve 32 contacts the first connection end 312, thereby pressing the first connection end 312 into the first connecting hole 323. The second fixing member 362 can be provided to facilitate the replacement and maintenance of the suction nozzle 31.

[0078] The outer surface of the heat insulating sleeve 33 is further provided with a second connecting hole 334. The second connecting hole 334 penetrates the heat insulating sleeve 33 in the up-down direction. In this embodiment, there are two second connecting holes 334, and the two second connecting holes 334 are respectively located on the left and right sides of the plug-in compartment 332, but the present invention is not limited thereto.

[0079] The pressing assembly 35 includes: a pressing screw 351, an insulating sheet 352 and a wave washer 353. The pressing screw 351 is located at the bottom end of the second connecting hole 334, and the pressing screw 351 is threadedly connected to the heat insulation sleeve 33 through the second connecting hole 334. The insulating sheet 352 is located below the wave washer 353, the heating sheet 34 is located below the insulating sheet 352, the insulating sheet 352 conflicts with the heating sheet 34, the wave washer 353 conflicts with the insulating sheet 352, and the bottom end of the pressing screw 351 conflicts with the wave washer 353.

[0080] The second connecting hole 334 is provided to facilitate the installation of the pressing screw 351 and to adjust the distance between the pressing screw 351 and the heating plate 34, so as to adjust the degree of fit between the heating plate 34 and the heat-conducting sleeve 32. The elastic wave washer 353 is provided to increase the stability of the fit between the heating plate 34 and the heat-conducting sleeve 32. The insulating sheet 352 is provided to prevent the short circuit from occurring after the heating plate 34 is powered on.

[0081] One end of the pre-tightening member 363 is located in the first connecting hole 323, and the pre-tightening member 363 is used to clamp the first connecting end 312 in the horizontal direction. By providing the pre-tightening member 363, when the first connecting end 312 is fixed in the first connecting hole 323 by the second fixing member 362, the first connecting end 312 is first confined in the first connecting hole 323 by the pre-tightening member 363, so that when the second fixing member 362 is installed, there is no need to manually control the position of the suction nozzle 31 relative to the heat-conducting sleeve 32, thereby facilitating the installation of the second fixing member 362.

[0082] The preload member 363 may be an elastic card bean or an elastic card fixed on the inner wall of the first connecting hole 323, or may be a ball plunger with one end inserted into the first connecting hole 323. In the present embodiment, the preload member 363 is a ball plunger. Furthermore, a third connecting hole 335 is provided on the outer surface of the heat insulating sleeve 33 in the horizontal direction. The third connecting hole 335 is connected to the plug-in bin 332. There are multiple third connecting holes 335, and two are taken as an example in the present embodiment. The two third connecting holes 335 are relatively arranged at the left and right ends of the heat insulating sleeve 33. A ball plunger is arranged in each third connecting hole 335.

[0083] The ball end of the ball plunger passes through the heat-conducting sleeve 32 and is inserted into the first connecting hole 323. The ball plunger is threadedly connected to the heat-insulating sleeve 33 through the third connecting hole 335. When the first connecting end 312 is inserted into the first connecting hole 323, the ball plunger applies pressure to the ball end through its internal spring to clamp the first connecting end 312 in the first connecting hole 323.

[0084] Further, the two third connecting holes 335 are respectively connected to the corresponding second connecting holes 334. The number of the first sealing member 364 and the second sealing member 365 are two respectively, and each first sealing member 364 is located at one end of the pressing assembly 35 in a second connecting hole 334 away from the heating plate 34, and each second sealing member 365 is located at one end of the pre-tightening member 363 in a third connecting hole 335 away from the first connecting end 312. The first sealing member 364 is used to seal the second connecting hole 334; the second sealing member 365 is used to seal the third connecting hole 335. By connecting the second connecting hole 334 and the third connecting hole 335, it is not only easy to install the first fixing member 361 and the second fixing member 362, but also reduces the processing difficulty of the third connecting hole 335 and the second connecting hole 334. By providing the first sealing member 364 and the second sealing member 365, the airtightness inside the heat insulation sleeve 33 can be ensured.

[0085] The pressure taking head 3 also includes: a positioning sleeve 366 and a positioning rod 367. The number of the positioning rod 367 is one, but not limited thereto. The positioning rod 367 is detachably fixedly connected to the suction nozzle 31 in the horizontal direction. The positioning sleeve 366 is sleeved on the outer peripheral side of the suction nozzle 31 perpendicularly to the up and down directions. A positioning opening 3661 is provided at the downward end of the positioning sleeve 366. The positioning opening 3661 is adapted to the positioning rod 367. The number of the positioning openings 3661 is multiple, and the multiple positioning openings 3661 are arranged at the bottom end of the positioning sleeve 366 along a specified angle. In this embodiment, the positioning sleeve 366 is threadedly connected to the bottom of the heat conductive sleeve 32; the number of the positioning openings 3661 is two, and the two positioning openings 3661 are at a ninety degree angle relative to the center of the positioning sleeve 366.

[0086] By setting the positioning opening 3661 and the positioning rod 367, it is possible to facilitate the adjustment of the angle of the suction nozzle 31 relative to the heat-conducting sleeve 32 in the horizontal direction, so that the rotating drive component 7 can adjust the suction nozzle 31 to a required angle by rotating a smaller angle, thereby reducing the swing amplitude of the connecting block 515 in the horizontal direction, reducing the space occupied by the pneumatic chip picking device, and ensuring the airtightness of the connection at both ends of the first air pipe 58, the second air pipe 59 and the third air pipe 510.

[0087] The pick-and-place head has a simple structure, is easy to process and install, and has a heating function, which enables the suction nozzle 31 to vacuum-absorb the chip and heat the chip to the process-specified temperature, thus enriching the functions of the pneumatic chip picking device.

[0088] In an optional embodiment, the trigger-type pressure-taking device further includes: a lifting drive assembly. The lifting drive assembly is fixedly connected to the fixing seat 14. The lifting drive assembly is used to drive the pressure-taking head 3 to move in the up-down direction through the housing 1, thereby realizing the lifting and lowering of the pressure-taking head 3.

[0089] In this embodiment, when positive pressure gas is introduced into the retractable connector 42, the bottom connector 41 drives the inner shaft 221 to move downward, so that the contact block 52 contacts the passive trigger member 53, and the first signal docking member 511 and the second signal docking member 512 are connected. When the lifting drive assembly drives the pneumatic chip picking device to move downward, and the bottom end of the suction nozzle 31 contacts an obstacle or a workpiece table, the retractable connector 42 is compressed by the upward force, and the contact block 52 and the passive trigger member 53 switch from the conflicting state to the separated state, and the conduction signal between the first signal docking member 511 and the second signal docking member 512 disappears. In this way, the pneumatic chip picking device can record the distance moved by the fixed seat 14 from the start of movement to the change of the conduction signal. If the forward pressure-taking device has a similar spare reading head grating scale assembly, the height can be accurately measured. This embodiment is not specifically limited.

[0090] The heat-insulating sleeve 33 can be made of glass fiber composite material with low thermal conductivity. The heat-insulating sleeve 33 insulates the heating plate 34 and the main body of the device, reducing the heat of the main body including the bearing part, which affects the accuracy. The heat-conducting sleeve 32 can be made of alloy copper material with surface treatment, such as beryllium copper with titanium nitride coating, etc., to achieve high thermal conductivity and high temperature non-oxidation. The annular heating plate 34 is tightly fitted with the heat-conducting sleeve 32 by applying thermal conductive silicone. The heating plate 34 can be a ceramic heating plate 34. The corrugated washer 353 is inserted into the heat-conducting sleeve 32 and placed on the heating plate 34. The thermocouple metal head 37 is coated with an appropriate amount of thermal conductive silicone and inserted into the cylindrical side hole of the heat-conducting sleeve 32. Then, the thermocouple metal head 37 and the corrugated washer 353 are properly tightened with the two pressing screws 351, so that the heating plate 34 is tightly fitted with the heat-conducting sleeve 32 under the pressure of the corrugated washer 353. The main function of the corrugated gasket 353 is to subject the heating plate 34 to elastic pressure, so as to avoid damage to the ceramic heating plate 34 due to thermal stress during heating, and it can also play a role in heat insulation. The ball plunger is used to pre-fix the suction nozzle 31. Since the suction nozzle 31 of different chip sizes is often disassembled and replaced, the suction nozzle 31 is inserted into the heat-conducting sleeve 32 during installation and pre-fixed by the ball plunger to prevent it from falling off. It is further tightened by the second fixing member 362, making the installation of the suction nozzle 31 more convenient and quick, saving manpower. The first seal 364 and the second seal 365 are both sealed with the heat-insulating sleeve 33 by applying sealant, so that the suction nozzle 31 is passed into a vacuum for chip adsorption.

[0091] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A pneumatic chip picking device, characterized in that: include: Inner shaft, pressure tap, sealing sleeve, first air pipe and air intake fixed end; One end of the inner shaft is connected to the pressure taking head, and the inner shaft is used to drive the pressure taking head to move; A first ventilation channel is provided in the inner shaft, one end of the first ventilation channel is connected to the pressure taking head, and the first ventilation channel is used for ventilating and cooling the pressure taking head; The sealing sleeve is sleeved on the outer peripheral side of the inner shaft, and a first air guide passage is provided in the sealing sleeve. The first air guide passage is connected to the air intake fixed end through the first air pipe, and the first ventilation passage is connected to the first air guide passage; The air intake fixed end is used to ventilate the first air duct through the first air pipe; The outer side of the sealing sleeve is fixedly connected with a connecting block, and the two ends of the first air pipe are fixedly connected to the connecting block and the air intake fixed end respectively.

2. The pneumatic chip pickup device according to claim 1, characterized in that: The pneumatic chip pickup device further includes: a housing; A side wall of the shell is provided with an escape opening, and the connecting block extends out of the shell through the escape opening.

3. The pneumatic chip pickup device according to claim 2, characterized in that: The width of the avoidance opening perpendicular to the first direction is greater than the width of the connecting block perpendicular to the first direction.

4. The pneumatic chip pickup device according to claim 2, characterized in that: The inner shaft is rotatably connected to the housing along a direction perpendicular to the first direction.

5. The pneumatic chip pickup device according to claim 1, characterized in that: The pneumatic chip picking device further comprises: a second air pipe; The pressure taking head is provided with an adsorption channel, the inner shaft is provided with a second ventilation channel, the sealing sleeve is provided with a second air guide channel, the second ventilation channel is communicated with the adsorption channel and the second air guide channel respectively, and the second air guide channel is communicated with the air intake fixed end through the second air pipe; The fixed end is used to provide negative pressure to the second air pipe; The pressure taking head passes through the negative pressure adsorption device in the adsorption channel.

6. The pneumatic chip pickup device according to claim 5, characterized in that: Two ends of the second air pipe are fixedly connected to the connecting block and the air intake fixed end respectively.

7. The pneumatic chip pickup device according to claim 5, characterized in that: The pneumatic chip picking device further comprises: a third air pipe; The pneumatic chip picking device is further provided with a telescopic chamber, the inner shaft is further provided with a third ventilation duct, the sealing sleeve is provided with a third air guide duct, the third ventilation duct is communicated with the telescopic chamber, the third air guide duct is respectively communicated with the third air pipe and the third ventilation duct, the third air pipe is communicated with the air intake fixed end, and the inner shaft is slidably connected with the shell along the straight line direction where the first direction is located; The air inlet fixed end is used to adjust the pressure in the telescopic chamber through the third air pipe, so as to adjust the pressure applied by the pressure taking head to the chip.

8. The pneumatic chip pickup device according to claim 7, characterized in that: Both ends of the third air pipe are fixedly connected to the connecting block and the air intake fixed end respectively.

9. The pneumatic chip pickup device according to claim 7, characterized in that: The inner wall of the sealing sleeve is provided with four sealing rings, the sealing rings are sleeved on the outer side of the inner shaft, and the four sealing rings are arranged in an interlaced manner relative to the first air guiding duct, the second air guiding duct and the third air guiding duct.

10. The pneumatic chip pickup device according to claim 7, characterized in that: The second ventilation passage is located at one side of the third ventilation passage facing the first direction, and the first ventilation passage is located at an outer peripheral side of the second ventilation passage.

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