Defect repair laser scribing equipment for thin film solar cell

Abstract

The invention relates to the technical field of solar cell processing, in particular to defect repair laser scribing equipment for a thin film solar cell, which comprises a shell, a laser, a connecting arm, an inner shell, a laser focus lens body, a camera body and a light source body, the laser device and the laser focus lens body are used in cooperation to generate laser to lineate the surface of the thin film solar cell, and the camera body is a high-definition camera. In the process that an electric cylinder is started to drive a frame to ascend, under cooperation of structures such as a second movable rod, a second piston, a first movable rod and a first gear, a first sealing cover is driven to be attached to the surface of a laser focus lens body, and sealing protection is achieved; the second sealing cover and the third sealing cover synchronously seal and protect the camera body and the light source body, the light-transmitting part is prevented from being scratched by blown materials, and after the frame body descends, the plurality of sealing covers can be synchronously opened, so that the facilities can work normally.

Description

Technical Field

[0001] The invention relates to the technical field of solar cell processing, in particular to a defect repair laser scribing device for thin-film solar cells. Background Art

[0002] Thin-film solar cells inevitably have pinhole problems. The presence of pinholes can cause an accidental short circuit between the front and rear electrodes of the solar cell, or a significant reduction in parallel resistance, resulting in a significant drop in the cell output voltage and current. Laser scribing is a technology that uses a laser beam to accurately scratch the surface of a material to form the desired pattern or path. It has the advantages of high precision, high efficiency, and non-contact processing, and is particularly suitable for processing fields with high precision requirements such as thin-film solar cells. Laser scribing is a conventional process in the manufacturing process of thin-film solar cells, and its function is to form an integrated series structure. Generally, it includes four processes: P1, P2, P3 and P4. Take the battery with the above substrate structure as an example: the purpose of P1 scribing is to divide the front electrode layer into multiple independent units of the same area; P2 scribing is generally performed before the deposition of the back electrode layer, and its main purpose is to remove part of the absorption layer material to expose the electrode layer grown in the early stage, and to form effective contact with the electrode layer deposited later in the subsequent process. Therefore, P2 scribing is generally staggered with the position of P1 scribing; P3 scribing is generally performed after the deposition of the back electrode, and its position is staggered with P1 and P2. Its purpose is to divide the back electrode into multiple independent units of the same area; The purpose of P4 scribing is to remove the film material at the edge of the battery to prevent interconnection or leakage, so as to solve the defects of thin-film solar cells.

[0003] During the marking process, laser scribing equipment is used together with laser focusing mirrors, high-definition cameras, light sources and other facilities. These facilities are equipped with lenses or light-transmitting components at the head end, and scratches need to be avoided during use. Laser scribing is to use high-energy laser beams to accurately cut on the surface of thin-film solar cells to form the required circuit structure or pattern. In this process, the high energy of the laser beam will cause some materials to reach the melting point and melt instantly, thereby producing melted materials. In order to prevent the melted and detached materials from affecting subsequent processing, auxiliary gas is introduced during the laser scribing process for purging to reduce the formation of residues. However, after the materials are blown away, they will inevitably go upwards, which is easy to scratch the laser focusing mirrors, high-definition cameras and light-transmitting components of the light source, affecting the normal processing of the equipment. In addition, the laser energy will be absorbed by the thin film material and converted into heat energy, resulting in local temperature rise. For thin-film solar cells, their materials are often sensitive to temperature, and high temperature may cause material performance degradation, structural changes or even damage. Summary of the invention

[0004] The object of the present invention is to provide a defect repair laser scribing device for thin-film solar cells, which can protect the head end of a facility with a light-transmitting component during the process of blowing away molten material to prevent scratches caused by the blown-away material.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a defect repair laser scribing device for thin-film solar cells, comprising a housing, a laser, a connecting arm, an inner housing, a laser focusing mirror body, a camera body and a light source body, wherein the laser and the laser focusing mirror body are used together to generate laser to scribing the surface of the thin-film solar cell, the camera body adopts a high-definition camera, and the laser focusing mirror body generates laser to carve a closed pattern on the back electrode to achieve electrical insulation between the pinhole area and the outer diameter, and further comprising: A base is arranged inside the housing, four corners of the top of the base are bolted with columns, the tops of the columns are bolted with a box, and the surface of the box is slidably connected with a frame; An electric cylinder bolted to the surface of the column, wherein the output shaft of the electric cylinder is bolted to the frame, and a first hose and a second hose are respectively connected to the two sides of the box, and the other ends of the first hose and the second hose are connected to the frame; A synchronous control mechanism for realizing the closing operation of the first sealing cover, the second sealing cover and the third sealing cover synchronously with the rising action of the frame body, and an adsorption positioning mechanism is also provided on the inner and outer sides of the box body; A circulation mechanism for cooling the thin-film solar cells scribed by the laser by circulating the flowing medium; An air delivery mechanism for cooling the flowing medium.

[0006] Preferably, the synchronous control mechanism includes a first cylinder and a second cylinder, the first cylinder is fixed to the bottom of the inner shell, the second cylinder is fixed to each other through a connecting rod and a connecting arm, the inner walls of the first cylinder and the second cylinder are slidably connected with a first piston and a second piston respectively, the bottoms of the first piston and the second piston are fixed with a first movable rod and a second movable rod respectively, the first movable rod is slidably connected to the inner wall at the outlet of the first cylinder, and the second movable rod is slidably connected to the inner wall at the outlet of the second cylinder, the upper and lower ends of one side of the first cylinder are respectively connected with a first connecting pipe and a second connecting pipe, and the ends of the first connecting pipe and the second connecting pipe away from the first cylinder are connected to the second cylinder, the synchronous control mechanism also includes a fixed rod, a first Racks and vertical plates, the number of the vertical plates is two groups and they are bolted to the bottom of the inner shell and close to the two sides of the laser focusing mirror body, the fixed rod and the bottom end of the first movable rod are bolted to each other, the surface of the vertical plate is rotatably connected with a transverse rod, the surface of the transverse rod is fixed with a first gear, and the first gear and the first rack are meshed with each other, the transverse rod and the first sealing cover are fixed to each other, one side of the vertical plates on both sides are respectively fixed with the first vertical rod and the second vertical rod through the bearing seat, and the first vertical rod and the second sealing cover are fixed to each other, the second vertical rod is fixed to the third sealing cover, the bottom end of the second movable rod is bolted with a weight block, and the two ends of the transverse rod are respectively connected to the first vertical rod and the second vertical rod through a bevel gear transmission.

[0007] Preferably, a slide rail is bolted to the bottom of the inner shell, and the first rack is slidably connected to the surface of the slide rail.

[0008] Preferably, the adsorption and positioning mechanism includes a support plate, a cushion layer and a through hole, the support plate is bolted to the top of the box body, the cushion layer is bonded to the top of the support plate, the number of the through holes is several and they penetrate through the surfaces of the support plate and the cushion layer, the adsorption and positioning mechanism also includes a third cylinder fixed to one side of the base, a third piston is slidably provided on the inner wall of the third cylinder, a third movable rod is fixed to the bottom of the third piston, a fixing plate is bolted to one side of the frame body, and the bottom end of the third movable rod is bolted to the fixing plate, a cover body is also bolted to the bottom of the support plate, a ventilation pipe is connected to the bottom of the cover body, and the end of the ventilation pipe away from the cover body is connected to the top of the third cylinder.

[0009] Preferably, the support plate is designed with a heat-conductive metal material, and the cushion layer is designed with a rubber material with good heat-conductive properties.

[0010] Preferably, the circulation mechanism includes a liquid storage tank, a pump body and a delivery pipe, the liquid storage tank and the pump body are bolted to the top of the base, the inlet end of the pump body is communicated with the liquid storage tank through a pipeline, the delivery pipe is communicated with the outlet end of the pump body, the circulation mechanism also includes a coil, the coil passes through the cover body and fits with the bottom of the support plate, one end of the delivery pipe away from the pump body is communicated with the coil, the other side of the liquid storage tank away from the pump body is connected to a return pipe, and the other end of the return pipe is communicated with the pump body.

[0011] Preferably, the air delivery mechanism includes a fan, a rotating column and a transmission column, the number of the fans is two groups and they are arranged inside the box, the fans on both sides are fixed to each other, one end of the rotating column is bolted to the fans, the other end of the rotating column is rotatably connected to the inner wall of the box, the transmission column is rotatably connected to the surface of the box, the two ends of the transmission column are respectively located on the inner and outer sides of the box, the surface of the transmission column is bolted with a second gear, the surface of the rotating column is bolted with a third gear meshing with the second gear, the surface of the transmission column and located on the outside of the box is also bolted with a fourth gear, the second gear and the third gear are meshed with each other, and one side of the frame is also bolted with a second rack meshing with the fourth gear, the inside of the box and one side close to the second hose are respectively bolted with an inclined plate and a partition net, the surfaces of the delivery pipe and the return pipe are welded with a plurality of fins, and the fins are located above the air inlet.

[0012] Preferably, connecting rods are bolted to both sides of the frame, and baffles are bolted to the lower ends of the connecting rods, and the length and width of the baffles are greater than the length and width of the air inlet.

[0013] Preferably, a sealing door is also provided on the surface of the box body.

[0014] Preferably, the outer diameter of the first sealing cover is larger than the outer diameter of the laser focusing lens body.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. In the process of starting the electric cylinder to drive the frame to rise, the present invention drives the first sealing cover to fit on the surface of the laser focusing lens body with the cooperation of the second movable rod, the second piston, the first movable rod, the first gear and other structures to achieve sealing protection. The second sealing cover and the third sealing cover simultaneously seal the camera body and the light source body to prevent the light-transmitting components from being scratched by the blown materials. After the frame descends, multiple sealing covers can also be opened synchronously to allow these facilities to work normally.

[0016] 2. The present invention allows the cooling medium inside the liquid storage tank to circulate by opening the pump body, and with the cooperation of the coil, cools the thin-film solar cells to prevent the temperature of the thin-film solar cells from rising. At the same time, the circulating cooling medium is cooled by the cooperation of the fan, the air inlet and the air outlet to ensure the cooling effect on the thin-film solar cells. In the process of the frame rising, the second rack, the transmission column, the rotating column, etc. are used to drive the fan to change direction, so that the air is blown out through the first hose to blow away the melted and detached materials on the surface of the thin-film solar cells. Moreover, this part of the material enters the interior of the box through the second hose and is intercepted by the partition net for collection. The fan can not only cool the circulating medium during the marking process, but also generate wind power during the process of cleaning the surface of the thin-film solar cells, thus achieving dual purposes.

[0017] 3. The present invention uses the frame to drive the fixed plate, the third movable rod and the third piston to descend, so that negative pressure is generated inside the cover body and suction is generated at the through hole to adsorb and fix the thin-film solar cell to prevent it from shifting during the scribing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the present invention; Figure 2 It is a schematic diagram of the cross-sectional structure of the casing in the present invention; Figure 3 It is a schematic diagram of the local structure in the present invention; Figure 4 It is a schematic diagram of the structure of the connecting arm and its lower part in the present invention; Figure 5 For the present invention Figure 4 A schematic diagram of the enlarged structure at A in the middle; Figure 6 It is a structural schematic diagram of the synchronous control mechanism in the present invention; Figure 7 It is a cross-sectional view of the first cylinder and the second cylinder in the present invention; Figure 8 It is a schematic diagram of the structure of the box and its surroundings in the present invention; Fig. 9 It is a schematic diagram of the structure of the frame and its surface in the present invention; Fig.10 It is a cross-sectional view of the box body in the present invention; Fig.11 It is a structural schematic diagram of the air delivery mechanism in the present invention; Fig.12 It is a structural schematic diagram of the circulation mechanism in the present invention; Fig.13 It is a partial structural schematic diagram of the adsorption positioning mechanism in the present invention; Fig.14 is a cross-sectional view of the cover body of the present invention; Fig.15 It is a cross-sectional view of the third cylinder in the present invention.

[0019] In the figure: 1, housing; 2, laser; 3, connecting arm; 4, inner housing; 5, laser focusing lens body; 6, camera body; 7, light source body; 8, first sealing cover; 9, second sealing cover; 10, third sealing cover; 11, synchronous control mechanism; 111, first cylinder; 112, second cylinder; 113, first movable rod; 114, first piston; 115, second movable rod; 116, second piston; 117, first connecting pipe; 118, second connecting pipe; 119, fixed rod; 1110, first rack; 1111, vertical plate; 1112, horizontal rod; 1113, first gear; 1114, first vertical rod; 1115, second vertical rod; 1116, slide rail; 1117, weight block; 12, box; 13, frame; 14, electric cylinder; 15, first hose; 16. Second hose; 17. Base; 18. Column; 19. Adsorption positioning mechanism; 191. Support plate; 192. Cushion layer; 193. Through hole; 194. Third cylinder; 195. Third movable rod; 196. Third piston; 197. Fixed plate; 198. Ventilation pipe; 199. Cover body; 20. Circulation mechanism; 201. Liquid storage tank; 202. Pump body; 203. Delivery pipe; 204. Coil; 205. Return pipe; 206. Fin; 21. Air delivery mechanism; 211. Fan; 212. Rotating column; 213. Transmission column; 214. Second gear; 215. Third gear; 216. Second rack; 217. Fourth gear; 218. Air inlet; 219. Air outlet; 22. Inclined plate; 23. Partition net; 24. Connecting rod; 25. Baffle; 26. Sealing door. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] See also Figure 1-15, a defect repair laser scribing device for thin-film solar cells, including a housing 1, a laser 2, a connecting arm 3, an inner housing 4, a laser focusing mirror body 5, a camera body 6 and a light source body 7, the laser 2 and the laser focusing mirror body 5 are used together to generate laser to scribing the surface of the thin-film solar cell, the camera body 6 uses a high-definition camera, during the scribing process, the collected picture is transmitted to the background system, and the high-definition camera integrated in the scribing equipment is used to obtain a high-definition photo of the back electrode, the pinhole recognition relies on computer image recognition technology, the software is trained using artificial intelligence recognition technology to improve its recognition ability, the scribing isolation program issues instructions to the laser scribing machine, the laser focusing mirror body 5 generates laser to carve a closed pattern on the back electrode to achieve electrical insulation between the pinhole area and the outer diameter, the light source body 7 provides illumination, during the scribing process, the illumination is improved, the clarity of the picture captured by the camera body 6 is increased, and the recognition ability is further improved, the connecting arm 3 is used to the inner housing 4, the laser focusing mirror body 5, the camera body 6 and the light source body 7 The source body 7 is fixed and supported, the outer diameter of the first sealing cover 8 is larger than the outer diameter of the laser focusing mirror body 5. With this design, after the first sealing cover 8 is closed, it can completely cover the surface of the laser focusing mirror body 5. The device also includes a synchronous control mechanism 11, an adsorption positioning mechanism 19, a circulation mechanism 20 and an air supply mechanism 21. A base 17 is arranged inside the casing 1. The base 17 adopts a movable design and uses a stepping motor and a lead screw in the prior art to achieve movement of the X-axis and the Y-axis. These are all prior art and will not be described in detail here. The four corners of the top of the base 17 are bolted with columns 18, the top of the column 18 is bolted with a box body 12, the surface of the box body 12 is slidably connected to the frame body 13, the surface of the column 18 is bolted with an electric cylinder 14, the output shaft of the electric cylinder 14 is bolted to the frame body 13, and is used to control the lifting and lowering of the frame body 13. The two sides of the box body 12 are respectively connected with a first hose 15 and a second hose 16, and the other ends of the first hose 15 and the second hose 16 are connected to the frame body 13.

[0022] The synchronous control mechanism 11 includes a first cylinder 111 and a second cylinder 112. The first cylinder 111 is fixed to the bottom of the inner shell 4. The second cylinder 112 is fixed to the connecting arm 3 through a connecting rod. The inner walls of the first cylinder 111 and the second cylinder 112 are respectively slidably connected with a first piston 114 and a second piston 116. The bottoms of the first piston 114 and the second piston 116 are respectively fixed with a first movable rod 113 and a second movable rod 115. The first movable rod 113 is slidably connected to the inner wall at the outlet of the first cylinder 111, and the second movable rod 115 is slidably connected to the inner wall at the outlet of the second cylinder 112. The outlets of the first cylinder 111 and the second cylinder 112 are designed with oil seals to prevent leakage of internal hydraulic oil. The first cylinder 111 The upper and lower ends of one side are respectively connected with a first connecting pipe 117 and a second connecting pipe 118, and the ends of the first connecting pipe 117 and the second connecting pipe 118 away from the first cylinder 111 are connected to the second cylinder 112. The synchronous control mechanism 11 also includes a fixed rod 119, a first rack 1110 and a vertical plate 1111. The number of the vertical plates 1111 is two groups and they are bolted to the bottom of the inner shell 4 and close to the two sides of the laser focusing mirror body 5. The fixed rod 119 and the bottom end of the first movable rod 113 are bolted to each other. The surface of the vertical plate 1111 is rotatably connected to a transverse rod 1112. The surface of the transverse rod 1112 is fixed with a first gear 1113, and the first gear 1113 is meshed with the first rack 1110. The transverse rod 1112 is closely connected to the first gear 1113. The sealing covers 8 are fixed to each other, and the first vertical rotating rod 1114 and the second vertical rotating rod 1115 are fixed to one side of the vertical plates 1111 on both sides through the bearing seats, and the first vertical rotating rod 1114 and the second sealing cover 9 are fixed to each other, and the second vertical rotating rod 1115 and the third sealing cover 10 are fixed to each other. The bottom end of the second movable rod 115 is bolted with a weight block 1117, and the two ends of the horizontal rotating rod 1112 are respectively connected to the first vertical rotating rod 1114 and the second vertical rotating rod 1115 through bevel gear transmission. The interiors of the first cylinder 111, the second cylinder 112, the first connecting pipe 117 and the second connecting pipe 118 are all filled with hydraulic oil. Under the action of the weight block 1117, the second movable rod 115 moves downward, thereby driving the second piston 116 to move downward, squeezing the second The hydraulic oil at the bottom of the cylinder 112 increases the volume at the top. Under the action of oil transmission, the hydraulic oil in the first connecting tube 117 flows to the bottom of the first cylinder 111, and at the same time, the hydraulic oil at the top of the first cylinder 111 flows to the second connecting tube 118, and the hydraulic oil in the second connecting tube 118 flows to the top of the second cylinder 112, which makes the first piston 114 move upward and drives the first movable rod 113 to contract toward the inside of the first cylinder 111, so that the first rack 1110 rises, and drives the first gear 1113 and the horizontal rotation rod 1112 to rotate counterclockwise, so that the first sealing cover 8 is opened, and at the same time, the horizontal rotation rod 1112 drives the first vertical rotation rod 1114 and the second vertical rotation rod 1115 to rotate through the bevel gear.The second sealing cover 9 is kept away from the camera body 6, and the third sealing cover 10 is kept away from the light source body 7, so that the camera body 6, the camera body 6 and the laser focusing lens body 5 can work normally. The bottom of the inner shell 4 is also bolted with a slide rail 1116, and the first rack 1110 is slidably connected to the surface of the slide rail 1116 to increase the stability of the up and down movement of the first rack 1110.

[0023] The adsorption positioning mechanism 19 includes a support plate 191, a cushion layer 192 and a through hole 193. The support plate 191 is bolted to the top of the box body 12, and the cushion layer 192 is bonded to the top of the support plate 191. The number of through holes 193 is several and they penetrate and are opened on the surface of the support plate 191 and the cushion layer 192. The adsorption positioning mechanism 19 also includes a third cylinder 194 fixed to one side of the base 17. The inner wall of the third cylinder 194 is slidably provided with a third piston 196. The bottom of the third piston 196 is fixed with a third movable rod 195. The third movable rod 195 is fixed to the bottom of the third piston 196. 95 is slidably connected with the inlet and outlet of the third cylinder 194, a fixing plate 197 is bolted to one side of the frame 13, and the bottom end of the third movable rod 195 is bolted to the fixing plate 197, and a cover 199 is also bolted to the bottom of the support plate 191, and the cover 199 completely covers the through hole 193, and a vent pipe 198 is provided at the bottom of the cover 199, and one end of the vent pipe 198 away from the cover 199 is connected to the top of the third cylinder 194. When preparing for marking, it is necessary to first open the electric cylinder 14 to extend its output shaft to The frame 13 is driven to rise, and at the same time, the fixing plate 197, the third movable rod 195 and the third piston 196 are driven to rise, so that the third piston 196 is at a high position inside the third cylinder 194, and then the door outside the casing 1 is opened, and the thin-film solar cell to be scribed is placed on the top of the cushion layer 192, and the bottom of the thin-film solar cell is in contact with the through hole 193. Then, the door on the surface of the casing 1 is closed, and the electric cylinder 14 is turned on to retract its output shaft to drive the frame 13 to descend, so that the frame 13 drives the fixing plate 197, the third movable rod 195 and the third piston 196 to move upward, and the third piston 196 is placed at a high position inside the third cylinder 194. The movable rod 195 and the third piston 196 descend, which increases the volume above the interior of the third cylinder 194 and reduces the pressure. Then, most of the air inside the cover 199 and the ventilation pipe 198 enters the third cylinder 194, which reduces the pressure inside the cover 199 and generates suction at the through hole 193 to achieve adsorption and fixation of the thin-film solar cell. The non-clamping method is used to fix the thin-film solar cell, which not only does not affect the laser scribing operation, but also avoids indentations on the surface of the thin-film solar cell.

[0024] Afterwards, the frame 13 is lowered to a lower position, and the laser focusing mirror body 5 and the laser 2 are used to scribe the surface of the thin-film solar cell. By improving the P3 laser scribing machine, the camera body 6 adopts a high-resolution, high-speed camera, and the light source body 7 adopts a light source that is conducive to pinhole recognition, such as an infrared laser light source or an ultraviolet light source. A pinhole recognition and processing program is installed in the device's built-in computer, which should include a pinhole recognition function and a program for laser scribing and isolating pinholes. Artificial intelligence recognition technology can be used to train the software to improve its recognition ability. When completing the deposition of the back electrode of the solar cell or in After completing the post-processing of the back electrode, P3 laser scribing is performed. During the P3 laser scribing process, the image of the solar cell back electrode is obtained, the pinhole recognition program will recognize the pinhole based on the image, and the pinhole processing program will isolate the identified pinhole by laser scribing. A closed pattern is drawn between the pinhole area and the area outside the pinhole with a laser, and the back electrode material at the scribing point is removed to insulate the pinhole area from the outside. Various two-dimensional closed patterns can be used for isolation, including but not limited to circles, rectangles, pinhole outlines, etc. Image acquisition, pinhole recognition and laser scribing isolation can be performed simultaneously with P3 laser scribing or separately.

[0025] The circulation mechanism 20 includes a liquid storage tank 201, a pump body 202 and a delivery pipe 203. The liquid storage tank 201 and the pump body 202 are both bolted to the top of the base 17. The inlet end of the pump body 202 is connected to the liquid storage tank 201 through a pipeline, and the delivery pipe 203 is connected to the outlet end of the pump body 202. The circulation mechanism 20 also includes a coil 204, which passes through the cover body 199 and fits with the bottom of the support plate 191. The support plate 191 is designed with a heat-conducting metal material, and the cushion layer 192 is made of a rubber material with good heat conductivity. The end of the delivery pipe 203 away from the pump body 202 is connected to the coil 204. A return pipe 205 is provided on the other side of the liquid storage tank 201 away from the pump body 202, and the other end of the return pipe 205 is connected to the pump body 202. The liquid storage tank 201 stores heat transfer oil as a cooling medium. During the laser scribing process, the pump body 202 is turned on, which allows the cooling medium inside the liquid storage tank 201 to enter the coil 204 through the delivery pipe 203. The heat generated by the thin-film solar cells after being heated by the laser can be transferred to the cushion layer 192 and the support plate 191, and then heat is exchanged through the coil 204 to reduce the heat of the thin-film solar cells and prevent deformation due to excessive temperature.

[0026] The air delivery mechanism 21 includes a fan 211, a rotating column 212 and a transmission column 213. The number of fans 211 is two groups and they are arranged inside the box 12. The fans 211 on both sides are fixed to each other. One end of the rotating column 212 is bolted to the fan 211, and the other end of the rotating column 212 is rotatably connected to the inner wall of the box 12. The transmission column 213 is rotatably connected to the surface of the box 12. The two ends of the transmission column 213 are respectively located on the inside and outside of the box 12. The surface of the transmission column 213 is bolted with a second gear 214, and the surface of the rotating column 212 is bolted with a third gear 215 that meshes with the second gear 214. The surface of the transmission column 213 and the outside of the box 12 are also bolted with a fourth gear 217. The second gear 214 and the third gear 215 are meshed with each other. One side of the frame 13 is also bolted with a fourth gear 217. The second rack 216 and the wheel 217 are meshed with each other. During the laser marking process, the outlet of the fan 211 faces upward and the inlet faces downward. Air inlets 218 are penetrated on both sides of the bottom of the box body 12, and air outlets 219 are penetrated on the side above the surface of the box body 12. When the fan 211 is turned on, air enters the interior of the box body 12 through the air inlet 218. A plurality of fins 206 are welded on the surfaces of the delivery pipe 203 and the return pipe 205. The delivery pipe 203, the return pipe 205 and the fins 206 are all made of heat-conducting metal materials. The fins 206 are located above the air inlet 218. When the fan 211 drives the flowing air to pass through the air inlet 218, it can exchange heat with the internal flowing medium to prevent the temperature of the circulating medium from rising, and the flowing air is discharged through the air outlet 219.

[0027] After a marking step is completed, it is necessary to clean up some of the melted and detached materials. At this time, the electric cylinder 14 can be turned on to extend its output shaft to drive the frame 13 to rise. Then the frame 13 contacts the weight block 1117, allowing the second movable rod 115 to shrink toward the inside of the second cylinder 112, and the first movable rod 113 is extended to drive the first rack 1110 to descend, and drive the first gear 1113 and the transverse rod 1112 to rotate clockwise, so that the first sealing cover 8 is closed. At the same time, the second sealing cover 9 and the third sealing cover 10 on both sides are close to the camera body 6 and the light source body 7 respectively. The second sealing cover 9 seals the camera body 6, and the third sealing cover 10 can seal the light source body 7. At the same time, the frame 13 drives The second rack 216 rises and the third movable rod 195 or the third piston 196 rises, temporarily pushing the gas inside the third cylinder 194 back into the cover body 199, temporarily releasing the adsorption fixation, and the second rack 216 rises to drive the fourth gear 217 to rotate counterclockwise, and drives the rotating column 212 to rotate clockwise through the transmission column 213, the second gear 214, and the third gear 215, so that the outlet of the fan 211 is aligned with the first hose 15, and the inlet is aligned with the second hose 16. The inside of the box 12 and the side close to the second hose 16 are bolted with an inclined plate 22 and a partition net 23 respectively, and the two sides of the frame 13 are also bolted with connecting rods 24, and the lower end of the connecting rod 24 is bolted with a baffle 25, and the length and width of the baffle 25 are greater than that of the air inlet 218. The frame 13 is of a substantially rectangular shape and has a substantially rectangular shape. The frame 13 has a substantially rectangular shape and a substantially rectangular shape. The frame 13 has a substantially rectangular shape and a substantially rectangular shape. The frame 13 has a substantially rectangular shape and a substantially rectangular shape. The frame 13 has a substantially rectangular shape and a substantially rectangular shape. The frame 13 has a substantially rectangular shape and a substantially rectangular shape. The frame 13 has a substantially rectangular shape and a substantially rectangular shape. The frame 13 has a substantially rectangular shape and a substantially rectangular shape. The frame 13 has a substantially rectangular shape and a substantially rectangular shape. The frame 13 has a substantially rectangular shape and a substantially rectangular shape. The frame 13 has a substantially rectangular shape and a substantially rectangular shape. The frame 13 has a substantially rectangular shape and a substantially rectangular shape. The auxiliary gas can blow the melted material away from the cutting area to reduce the formation of residues, and the first sealing cover 8, the second sealing cover 9 and the third sealing cover 10 above seal and protect important facilities to prevent them from being scratched by the blown materials. The wind fan 211 can not only cool the circulating medium during the marking process, but also generate wind during the cleaning of the surface of the thin-film solar cell, thus achieving dual purpose. After a short cleaning work is completed, the electric cylinder 14 is turned on again to drive the frame 13 to descend, and the subsequent marking steps are continued. A sealing door 26 is also provided on the surface of the box body 12, and the sealing door 26 can be opened to clean the collected materials inside when the equipment is idle.

[0028] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0029] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A defect repair laser scribing device for thin-film solar cells, comprising a housing (1), a laser (2), a connecting arm (3), an inner housing (4), a laser focusing mirror body (5), a camera body (6) and a light source body (7), wherein the laser (2) and the laser focusing mirror body (5) are used in conjunction with each other to generate laser light to scribing the surface of the thin-film solar cell, the camera body (6) is a high-definition camera, and the laser focusing mirror body (5) generates laser light to carve a closed pattern on the back electrode to achieve electrical insulation between the pinhole area and the outer diameter, characterized in that: Also includes: A base (17) is arranged inside the housing (1), the four corners of the top of the base (17) are bolted to columns (18), the tops of the columns (18) are bolted to the box (12), and the surface of the box (12) is slidably connected to the frame (13); An electric cylinder (14) is bolted to the surface of the column (18), the output shaft of the electric cylinder (14) is bolted to the frame (13), and a first hose (15) and a second hose (16) are respectively connected to the two sides of the box (12), and the other ends of the first hose (15) and the second hose (16) are both connected to the frame (13); a synchronous control mechanism (11) for realizing the closing operation of the first sealing cover (8), the second sealing cover (9) and the third sealing cover (10) synchronously with the rising action of the frame (13); and adsorption positioning mechanisms (19) are also provided on the inner side and the outer side of the box (12); A circulation mechanism (20) for cooling the thin-film solar cell scribed by the laser by circulating a flowing medium; An air delivery mechanism (21) for cooling the flowing medium.

2. The defect repair laser scribing equipment for thin-film solar cells according to claim 1, characterized in that: The synchronous control mechanism (11) comprises a first cylinder (111) and a second cylinder (112), wherein the first cylinder (111) is fixed to the bottom of the inner shell (4), and the second cylinder (112) is fixed to the connecting arm (3) via a connecting rod, and the inner walls of the first cylinder (111) and the second cylinder (112) are respectively slidably connected with a first piston (114) and a second piston (116), and the bottoms of the first piston (114) and the second piston (116) are respectively fixed with a first movable rod (113) and a second movable rod (115), and the first piston (114) and the second piston (116) are respectively fixed with a first movable rod (113) and a second movable rod (115), and the first piston (114) and the second piston (116) are respectively fixed with a first movable rod (113) and a second movable rod (115), and the first piston (114) and the second piston (116) are respectively fixed with a first movable rod (113) and a second movable rod (115), and the first piston (114) and the second piston (116) are respectively fixed with a first movable rod (114 ... A movable rod (113) is slidably connected to the inner wall at the outlet of the first cylinder (111), and a second movable rod (115) is slidably connected to the inner wall at the outlet of the second cylinder (112); the upper and lower ends of one side of the first cylinder (111) are respectively connected to a first connecting pipe (117) and a second connecting pipe (118), and the ends of the first connecting pipe (117) and the second connecting pipe (118) away from the first cylinder (111) are both connected to the second cylinder (112); the synchronous control mechanism (11) further includes a fixed rod (119), a first rack (1110), and vertical plates (1111), the number of the vertical plates (1111) being two groups and being bolted to the bottom of the inner shell (4) and close to the two sides of the laser focusing mirror body (5), the fixing rod (119) and the bottom end of the first movable rod (113) being bolted to each other, the surface of the vertical plate (1111) being rotatably connected to a traverse rod (1112), the surface of the traverse rod (1112) being fixed with a first gear (1113), and the first gear (1113) being meshed with a first rack (1110), the traverse rod (1112) being connected to a first sealing cover (8) are fixed to each other, one side of the vertical plates (1111) on both sides is respectively fixed with a first vertical rotation rod (1114) and a second vertical rotation rod (1115) through a bearing seat, and the first vertical rotation rod (1114) and the second sealing cover (9) are fixed to each other, and the second vertical rotation rod (1115) and the third sealing cover (10) are fixed to each other, and a weight block (1117) is bolted to the bottom end of the second movable rod (115), and the two ends of the horizontal rotation rod (1112) are respectively connected to the first vertical rotation rod (1114) and the second vertical rotation rod (1115) through a bevel gear transmission.

3. The defect repair laser scribing equipment for thin-film solar cells according to claim 2, characterized in that: The bottom of the inner shell (4) is also bolted with a slide rail (1116), and the first rack (1110) is slidably connected to the surface of the slide rail (1116).

4. The defect repair laser scribing equipment for thin-film solar cells according to claim 1, characterized in that: The adsorption positioning mechanism (19) comprises a support plate (191), a cushion layer (192) and a through hole (193); the support plate (191) is bolted to the top of the box body (12); the cushion layer (192) is bonded to the top of the support plate (191); a plurality of through holes (193) are provided through the surfaces of the support plate (191) and the cushion layer (192); the adsorption positioning mechanism (19) further comprises a third cylinder (194) fixed to one side of the base (17); the third cylinder (194) A third piston (196) is slidably arranged on the inner wall, a third movable rod (195) is fixed to the bottom of the third piston (196), a fixing plate (197) is bolted to one side of the frame (13), and the bottom end of the third movable rod (195) and the fixing plate (197) are bolted to each other, a cover body (199) is also bolted to the bottom of the support plate (191), a ventilation pipe (198) is arranged at the bottom of the cover body (199), and one end of the ventilation pipe (198) away from the cover body (199) is connected to the top of the third cylinder (194).

5. The defect repair laser scribing equipment for thin-film solar cells according to claim 4, characterized in that: The support plate (191) is designed using a heat-conducting metal material, and the soft cushion layer (192) is designed using a rubber material with good heat-conducting properties.

6. The defect repair laser scribing equipment for thin-film solar cells according to claim 4, characterized in that: The circulation mechanism (20) comprises a liquid storage tank (201), a pump body (202) and a delivery pipe (203); the liquid storage tank (201) and the pump body (202) are both bolted to the top of the base (17); the inlet end of the pump body (202) and the liquid storage tank (201) are in communication with each other through a pipeline; the delivery pipe (203) and the outlet end of the pump body (202) are in communication with each other; the circulation mechanism (20) further comprises a coil (204); the coil (204) passes through the cover body (199) and fits with the bottom of the support plate (191); one end of the delivery pipe (203) away from the pump body (202) is in communication with the coil (204); the other side of the liquid storage tank (201) away from the pump body (202) is in communication with a return pipe (205); and the other end of the return pipe (205) is in communication with the pump body (202).

7. The defect repair laser scribing equipment for thin-film solar cells according to claim 6, characterized in that: The air delivery mechanism (21) comprises a fan (211), a rotating column (212) and a transmission column (213); the fan (211) is provided in two groups and is arranged inside the box (12); the fans (211) on both sides are fixed to each other; one end of the rotating column (212) is bolted to the fan (211); the other end of the rotating column (212) is rotatably connected to the inner wall of the box (12); the transmission column (213) is rotatably connected to the surface of the box (12); the two ends of the transmission column (213) are respectively located on the inner side and the outer side of the box (12); the surface of the transmission column (213) is bolted with a second gear (214); the surface of the rotating column (212) is bolted to the second gear (214); A third gear (215) meshing with the second gear (214) is connected, a fourth gear (217) is bolted to the surface of the transmission column (213) and located outside the box body (12), the second gear (214) and the third gear (215) are meshing with each other, a second rack (216) meshing with the fourth gear (217) is bolted to one side of the frame body (13), an inclined plate (22) and a partition net (23) are bolted to the inside of the box body (12) and the side close to the second hose (16), a plurality of fins (206) are welded to the surfaces of the delivery pipe (203) and the return pipe (205), and the fins (206) are located above the air inlet (218).

8. The defect repair laser scribing equipment for thin-film solar cells according to claim 7, characterized in that: Connecting rods (24) are bolted to both sides of the frame (13), and baffles (25) are bolted to the lower ends of the connecting rods (24), and the length and width of the baffles (25) are greater than the length and width of the air inlet (218).

9. The defect repair laser scribing equipment for thin-film solar cells according to claim 1, characterized in that: A sealing door (26) is also provided on the surface of the box body (12).

10. The defect repair laser scribing equipment for thin-film solar cells according to claim 1, characterized in that: The outer diameter of the first sealing cover (8) is greater than the outer diameter of the laser focusing lens body (5).

Images