Mask assembly and method of manufacturing a mask assembly

By designing a second rod with a cut concave in the mask assembly and applying tension using a clamp, the problem of deposition inaccurate caused by deformation of the support rod is solved, and accurate deposition of the organic material at the desired position is achieved.

CN119177416APending Publication Date: 2024-12-24SAMSUNG DISPLAY CO LTD
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Patent Information

Application Number
CN202410751549.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-06-22
Filing Date
2024-06-12
Publication Date
2024-12-24

AI Technical Summary

Technical Problem

During the deposition of organic materials, the support rods are deformed due to the applied tensile force, which causes the organic material to be unable to be deposited at the desired position, resulting in the problem of inaccurate deposition.

Method used

By designing a second rod with a cut concave portion, the degree of bending of the second rod is adjusted by applying a clamp to control its deformation and ensure accurate deposition of the organic material at a predetermined position.

Benefits of technology

The bending degree of the second rod is effectively adjusted, the deposition accuracy of the organic material in the mask assembly is improved, and the accuracy of the deposited material in the desired position is ensured.

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Abstract

Mask assemblies and methods of manufacturing mask assemblies are disclosed. The mask assembly includes: a mask frame including a frame opening; a first rod disposed on the mask frame, overlapping the frame opening, and extending in a first direction to have a first length; a second lever disposed on the first lever, overlapping the frame opening, and extending in a second direction intersecting the first direction to have a second length longer than the first length; and a mask disposed on the second rod and including a mask opening overlapping the frame opening. The second rod includes a first central portion spanning the frame opening and a first end portion extending from the first central portion in a second direction.
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Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This patent application claims priority to and the benefit of Korean Patent Application No. 10-2023-0080334, filed on June 22, 2023, the entire contents of which are incorporated herein by reference. Technical Field

[0003] Embodiments relate to a mask assembly and a method of manufacturing the mask assembly. More particularly, embodiments relate to a mask assembly including a rod having a cutout and a method of manufacturing the mask assembly. Background Art

[0004] The display device outputs a video or image through its display area to provide a user with various visual information. Among display devices, an organic light-emitting display device has the advantages of a wide viewing angle, excellent contrast, and a fast response speed. The display area of ​​the organic light-emitting display device includes pixels, and the pixels are formed in the display area by a deposition process using a deposition material. As an example, an organic material is deposited on a substrate using a fine metal mask (FMM) to form a thin film having a desired pattern.

[0005] In the case of depositing organic materials, the support rods are arranged between the mask assembly and the mask to form an inactive area through which no deposited material enters the display area. For example, the support rods are deformed due to the tension applied thereto, and due to the deformation caused by the tension, the organic material is not deposited at a desired position. Summary of the invention

[0006] The embodiment provides a mask assembly capable of adjusting the bending degree of support rods by applying differential tension.

[0007] The embodiment provides a method for manufacturing a mask assembly for adjusting the bending deformation degree of a support rod.

[0008] However, the embodiments of the present disclosure are not limited to those set forth herein. The following and other embodiments will become more apparent to those of ordinary skill in the art to which the present disclosure pertains by referring to the detailed description of the present disclosure given below.

[0009] In one embodiment, a mask assembly may include: a mask frame including a frame opening; a first rod disposed on the mask frame, overlapping the frame opening, and extending in a first direction to have a first length; a second rod disposed on the first rod, overlapping the frame opening, and extending in a second direction intersecting the first direction to have a second length longer than the first length; and a mask disposed on the second rod and including a mask opening overlapping the frame opening. The second rod may include: a first central portion spanning the frame opening; and a first end portion extending from the first central portion in the second direction. The first end portion may include a first cutout recessed portion, the first cutout recessed portion being defined by recessing a central portion of an outer side surface of the first end portion toward the first central portion when viewed in a plane, and the maximum width of the first cutout recessed portion may be substantially equal to or greater than about 40% of a width of the first end portion when viewed in the plane.

[0010] The maximum width of the first cutout concave portion may be equal to or less than about 80% of the width of the first end portion when viewed in the plane.

[0011] The first cutout recessed portion may include: a first-first cutout recessed portion having a substantially uniform width when viewed in the plane; and a first-second cutout recessed portion having a width that decreases as the distance from the first center portion decreases when viewed in the plane.

[0012] The first-second cutout concave portion may be a curve having a substantially uniform radius of curvature when viewed in the plane, and the substantially uniform radius of curvature may be approximately 0.5 times the maximum width of the first cutout concave portion when viewed in the plane.

[0013] When viewed in the plane, a length of the first-first notch recessed portion in the second direction may be substantially equal to or greater than about 8 mm and substantially equal to or less than about 12 mm.

[0014] The width of the first end portion may be substantially equal to or greater than about 25 mm.

[0015] The minimum width of the first central portion may be substantially equal to or less than about 5 mm.

[0016] The width of the first central portion in the first direction decreases with increasing distance from the first end portion.

[0017] The first end portion may further include a first portion and a second portion protruding outward from the first center portion, the first cutout recessed portion may be defined between the first portion and the second portion, and when viewed in the plane, the width of each of the first portion and the second portion in the first direction may be substantially uniform in the second direction.

[0018] The width of the first portion may be substantially equal to the width of the second portion when viewed in the plane.

[0019] The mask may include a plurality of masks, the first rod may include a plurality of first rods, the second rod may include a plurality of second rods, the plurality of first rods may be arranged in the second direction, the plurality of second rods may be arranged in the first direction, and the plurality of masks may be arranged in the second direction.

[0020] The mask and the mask frame may each include Invar alloy.

[0021] The first rod may include: a second central portion spanning the frame opening; and a second end portion extending from the second central portion in the first direction, the second end portion may include a second cutout recessed portion, when viewed in the plane, the second cutout recessed portion is defined by recessing a central portion of an outer side surface of the second end portion toward the second central portion, and when viewed in the plane, the maximum width of the second cutout recessed portion may be substantially equal to or greater than about 40% of the width of the second end portion.

[0022] The maximum width of the second cutout recessed portion may be equal to or less than about 80% of the width of the second end portion when viewed in the plane.

[0023] The second end portion may further include a third portion and a fourth portion protruding outward from the second center portion, the second cutout recess portion may be defined between the third portion and the fourth portion, and when viewed in the plane, the width of each of the third portion and the fourth portion in the second direction may be substantially uniform in the first direction.

[0024] The width of the third portion may be substantially equal to the width of the fourth portion when viewed in the plane.

[0025] In one embodiment, a method for manufacturing a mask assembly may include: disposing a first rod on a mask frame including a frame opening, the first rod extending in a first direction to have a first length; disposing a second rod on the first rod, the second rod extending in a second direction intersecting the first direction to have a second length longer than the first length, and including: a first central portion spanning the frame opening, and a first end portion extending from the first central portion in the second direction; holding a first portion of the first end portion and a second portion of the first end portion by a first clamp and a second clamp, respectively, to apply a tensile force to the first portion and the second portion; and attaching a mask to the mask frame, the mask being disposed on the second rod and including a mask opening overlapping the frame opening. The first end portion may include a first cutout recessed portion, the first cutout recessed portion being defined by recessing a central portion of an outer side surface of the first end portion toward the first central portion when viewed in a plane, and the maximum width of the first cutout recessed portion may be substantially equal to or greater than about 40% of a width of the first end portion when viewed in the plane.

[0026] The first clamp may apply a first tensile force to the first portion, and the second clamp may apply a second tensile force greater than the first tensile force to the second portion.

[0027] The first cutout recessed portion may be disposed between the first portion and the second portion, and a width of each of the first portion and the second portion in the first direction may be substantially uniform in the second direction when viewed in the plane.

[0028] A length of each of the first portion and the second portion in the second direction may be substantially equal to or greater than about 10 mm.

[0029] According to the mask assembly, the second rod may include a first cutout recessed portion defined in the first end portion and a first portion and a second portion protruding, the first cutout recessed portion being disposed between the first portion and the second portion, and different magnitudes of tension may be applied to the first portion and the second portion. Since the first end portion has a cutout shape, the bending degree of the second rod according to the differential tension may be increased. Therefore, the bending degree of the second rod can be adjusted.

[0030] According to the method of manufacturing a mask assembly, a mask assembly capable of adjusting a bending degree of a second rod is provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The above and other advantages of the present disclosure will become apparent by referring to the following detailed description considered in conjunction with the accompanying drawings, in which:

[0032] Figure 1 is a schematic cross-sectional view of a deposition apparatus according to an embodiment;

[0033] Figure 2 is a schematic perspective view of a mask assembly according to an embodiment;

[0034] Figure 3 is a schematic exploded perspective view of a mask assembly according to an embodiment;

[0035] Figure 4 is a schematic enlarged plan view of a portion of a second rod according to an embodiment;

[0036] Figure 5A is a schematic plan view of a second rod before bending according to an embodiment;

[0037] Figure 5B is a schematic plan view of a bent second rod according to an embodiment;

[0038] Fig. 6A is a schematic plan view of a second rod in which no cutout recessed portion is defined;

[0039] Figure 6B is a schematic plan view of a second rod in which no cutout concave portion is defined and in which a differential tension is applied;

[0040] Figure 6C is a schematic plan view of the second rod after bending;

[0041] Fig.6D As an example Figure 6B a graph of the bending degree of the second rod as a function of the width of the second rod;

[0042] Fig. 7A is a schematic plan view of a second rod according to an embodiment;

[0043] Figure 7B is a schematic plan view of a second rod applying a differential tension according to an embodiment;

[0044] Figure 7C is a schematic plan view of a second rod before and after bending according to an embodiment;

[0045] Fig.7D As an example, according to an embodiment Figure 7B A graph showing a bending degree of the second rod as a function of a ratio of a width of a first cutout concave portion to a width of a first end portion when a width of the second rod is changed;

[0046] Figure 8 is a schematic perspective view of a mask assembly according to an embodiment;

[0047] Fig. 9 is a schematic enlarged plan view of a portion of a first rod according to an embodiment;

[0048] Fig. 10A , Fig. 10B , Fig. 10C , Fig. 10D and Fig. 10E A schematic diagram illustrating a method for manufacturing a mask assembly according to an embodiment;

[0049] Fig.11 is a schematic perspective view of an electronic device according to an embodiment;

[0050] Fig.12 is a schematic exploded perspective view of an electronic device according to an embodiment; and

[0051] Fig.13 is a schematic cross-sectional view of a display panel according to an embodiment. DETAILED DESCRIPTION

[0052] In the following description, for the purpose of illustration, many specific details are set forth in order to provide a thorough understanding of various embodiments or implementations of the present invention. As used herein, "embodiment" and "implementation" are interchangeable words, which are non-limiting examples of the devices or methods disclosed herein. However, it is apparent that various embodiments may be practiced without these specific details or with one or more equivalent arrangements. Here, various embodiments do not have to be exclusive, nor do they have to limit the present disclosure. For example, the specific shape, configuration, and characteristics of an embodiment may be used or implemented in another embodiment.

[0053] Unless otherwise expressly stated, the illustrated embodiments should be understood to provide features of the present invention. Therefore, unless otherwise expressly stated, the features, components, modules, layers, films, panels, regions and / or aspects of various embodiments, etc. (hereinafter individually or collectively referred to as "elements") may be combined, separated, interchanged and / or rearranged in other ways without departing from the present invention.

[0054] The use of cross hatching and / or shading in the drawings is generally provided to clarify the boundaries between adjacent elements. Thus, unless explicitly stated, the presence or absence of cross hatching or shading does not convey or represent any preference or requirement for the specific material, material properties, size, ratio, commonality between the illustrated elements and / or any other characteristics, attributes, properties, etc. of the element. Further, for clarity and / or descriptive purposes, in the drawings, the size (e.g., relative size) of the element may be magnified. When the embodiment may be implemented differently, a specific process sequence may be performed differently from the described sequence. For example, two processes described in succession may be performed substantially simultaneously or in an order opposite to the described order. In addition, the same reference numerals represent the same elements.

[0055] When an element or layer is referred to as being "on," "connected to," or "coupled to" another element or layer, it may be directly on, connected to, or coupled to the other element or layer, or there may be intervening elements or layers. However, when an element or layer is referred to as being "directly on," "directly connected to," or "directly coupled to" another element or layer, there are no intervening elements or layers. For this purpose, the term "connected" may refer to physical, electrical, and / or fluid connections with or without intervening elements. Further, the DR1 axis, the DR2 axis, and the DR3 axis are not limited to the three axes of a rectangular coordinate system, and may be interpreted in a broader sense. For example, the DR1 axis, the DR2 axis, and the DR3 axis may be perpendicular to each other, or may represent different directions that are not perpendicular to each other. For the purposes of the present disclosure, "at least one of A and B" may be understood to mean only A, only B, or any combination of A and B. Furthermore, “at least one of X, Y, and Z” and “at least one selected from the group consisting of X, Y, and Z” may be interpreted as any combination of only X, only Y, only Z, or two or more of X, Y, and Z. As used herein, the term “and / or” includes any and all combinations of one or more of the associated listed items.

[0056] Although the terms "first", "second", etc. may be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another element. Therefore, without departing from the teachings of the present disclosure, the first element discussed below may be referred to as the second element.

[0057] Spatially relative terms such as "below," "below," "below," "above," "upper," "above," "higher," "side" (e.g., as in "sidewall"), etc., may be used herein for descriptive purposes to describe the relationship of one element to another element as illustrated in the figures. Spatially relative terms are intended to encompass different orientations of the device in use, operation, and / or manufacture in addition to the orientation depicted in the figures. For example, if the device in the figure is flipped, an element described as being "below" or "beneath" other elements or features would then be oriented as being "above" the other elements or features. Thus, the term "below" may encompass both above and below orientations. Additionally, the device may be oriented in other ways (e.g., rotated 90 degrees or in other orientations), and as such, the spatially relative descriptors used herein are interpreted accordingly.

[0058] The terms used herein are for the purpose of describing specific embodiments, and are not intended to be restrictive. As used herein, the singular forms "one" and "the" are also intended to include plural forms, unless the context clearly indicates otherwise. Moreover, the terms "including" and / or "comprising" when used in this specification specify the existence of stated features, integers, steps, operations, elements, parts and / or their groups, but do not exclude the existence or addition of one or more other features, integers, steps, operations, elements, parts and / or their groups. It should also be noted that, as used herein, the terms "substantially", "about" and other similar terms are used as approximate terms, and are not used as degree terms, and so, are used to consider the measured values, calculated values ​​and / or the inherent deviations of the values ​​that will be recognized by those of ordinary skill in the art.

[0059] Various embodiments are described herein with reference to cross-sectional views and / or exploded views as schematic diagrams of embodiments and / or intermediate structures. As such, variations in the shapes of the figures due to, for example, manufacturing techniques and / or tolerances are expected. Therefore, the embodiments disclosed herein should not necessarily be understood as being limited to the specific shapes of the illustrated regions, but should include shape deviations, for example, caused by manufacturing. In this manner, the regions illustrated in the figures may be schematic in nature, and the shapes of these regions may not reflect the actual shapes of the regions of the device, and as such, are not necessarily intended to be restrictive.

[0060] As is customary in the art, some embodiments are described and illustrated in the accompanying drawings according to functional blocks, units and / or modules. It will be appreciated by those skilled in the art that these blocks, units and / or modules are physically implemented by electronic (or optical) circuits such as logic circuits, discrete components, microprocessors, hard-wired circuits, storage elements, wiring connectors, etc., which can be formed using semiconductor-based manufacturing techniques or other manufacturing techniques. In the case where blocks, units and / or modules are implemented by microprocessors or other similar hardware, they can be programmed and controlled using software (e.g., microcode) to perform the various functions discussed herein, and can be selectively driven by firmware and / or software. It is also conceivable that each block, unit and / or module can be implemented by dedicated hardware, or as a combination of dedicated hardware for performing certain functions and processors (e.g., one or more programmed microprocessors and associated circuits) for performing other functions. In addition, without departing from the scope of the present invention, each block, unit and / or module of some embodiments can be physically divided into two or more interacting and discrete blocks, units and / or modules. Further, the blocks, units and / or modules of some embodiments may be physically combined into more complex blocks, units and / or modules without departing from the scope of the invention.

[0061] Hereinafter, embodiments will be described with reference to the accompanying drawings.

[0062] Figure 1 is a schematic cross-sectional view of a deposition device ED according to an embodiment.

[0063] refer to Figure 1 , the deposition apparatus ED may include a chamber CB, a mask MK, a mask frame MF, a stage ST, a deposition source EP, and a fixing member PP. For example, the deposition apparatus ED may further include an additional mechanical device for implementing an inline system. The deposition apparatus ED may include a coupling member. The coupling member may be fixed to a side wall of the chamber CB, and the stage ST may be connected to the coupling member and may be stably maintained in the chamber CB. Accordingly, even if the stage ST is vertically arranged, the deposition process may be stably performed.

[0064] The chamber CB may provide an inner space therein, and the deposition source EP, the mask MK, the mask frame MF, and the stage ST may be disposed in the inner space of the chamber CB. The chamber CB may form a closed space, and the deposition condition of the chamber CB may be set to a vacuum state. The chamber CB may include at least one door and may be opened or closed by the door. The mask MK, the mask frame MF, and the substrate SUB may enter and leave through the door provided to the chamber CB.

[0065] The chamber CB may include a bottom surface BP, a top surface, and a sidewall. The bottom surface BP of the chamber CB may be substantially parallel to a plane defined by the first direction DR1 and the third direction DR3. A normal direction of the bottom surface BP of the chamber CB may be substantially parallel to the second direction DR2.

[0066] The fixing member PP may be disposed in the chamber CB and may face the deposition source EP in the third direction DR3. The fixing member PP may play a role in closely attaching the substrate SUB to the mask MK. The fixing member PP may include a magnetic substance for attaching the mask MK to the substrate SUB. As an example, the magnetic substance may generate a magnetic force for fixing the mask MK, and thus, the substrate SUB disposed between the mask MK and the fixing member PP may be closely attached to the mask MK. However, the embodiment is not limited thereto or thereby, and in another example, the fixing member PP may include a clamp or a robot arm for holding the mask MK.

[0067] The substrate SUB may be disposed between the mask MK and the fixing member PP. The substrate SUB may be a processing object on which a deposition material is deposited. The substrate SUB may include a support substrate and a synthetic resin layer disposed on the support substrate. The support substrate may be disposed between the display panel DP (refer to Fig.12 ) is removed in a later stage of the manufacturing process, and the synthetic resin layer may correspond to Fig.13 According to the components to be formed by the deposition process, the substrate SUB may include a display panel DP (refer to Fig.12) are formed on the base layer BL (reference Fig.13 )superior.

[0068] The deposition source EP may be disposed in the chamber CB to face the fixing member PP in the third direction DR3. The deposition source EP may include a space for accommodating a deposition material EV and at least one nozzle NZ. The deposition material EV may include an inorganic material, a metal material, or an organic material that can be sublimated or evaporated. As an example, the deposition material EV may include a material for forming the light emitting layer EML (refer to Fig.13 ) of the organic light emitting material. The sublimated or evaporated deposition material EV may be sprayed onto the substrate SUB through the nozzle NZ. The deposition material EV may be formed in the mask opening OP-MK (refer to Figure 2 ) is then deposited and patterned on a substrate SUB.

[0069] The stage ST may be disposed between the deposition source EP and the fixing member PP. The stage ST may support the rear surface of the mask frame MF and may be placed along a conveying path (or a spraying path) of the deposition material EV supplied from the deposition source EP to the substrate SUB. The stage ST may include (or be provided with) a stage opening OP-ST defined therethrough. The deposition material EV may be supplied to the mask MK through the stage opening OP-ST. A coupling groove may be defined in a corner portion of the stage ST to be coupled to the coupling member. The stage ST may be coupled to the coupling member via the coupling groove by a bolt fastening method.

[0070] The stage ST may include a seat surface SE1 on which the mask frame MF is placed and a rear surface SE2 facing the seat surface SE1. Each of the seat surface SE1 and the rear surface SE2 of the stage ST may be a surface parallel to the first direction DR1 and the second direction DR2. As an example, the seat surface SE1 and the rear surface SE2 of the stage ST may be substantially perpendicular to the bottom surface BP of the chamber CB. Accordingly, the rear surfaces of the mask frame MF and the mask MK sequentially disposed on the seat surface SE1 of the stage ST may be substantially perpendicular to the bottom surface BP of the chamber CB, and a deposition process may be performed. Accordingly, the mask MK having a large area may be prevented from sagging (or bending) due to gravity in a vertical deposition process, and deposition reliability may be improved.

[0071] However, the embodiments are not limited thereto or thereby. In another example, the seat surface SE1 and the back surface SE2 of the stage ST may be substantially parallel to the bottom surface BP of the chamber CB, and the back surfaces of the mask frame MF and the mask MK may be substantially parallel to the bottom surface BP of the chamber CB, and thus, a horizontal deposition process may be performed.

[0072] The mask frame MF may be coupled to the mask MK and may support the mask MK. The mask frame MF may include an upper surface facing the mask MK, a rear surface opposite to the upper surface and facing the seat surface SE1 of the stage ST, and a side surface connecting the upper surface and the rear surface. The mask frame MF may have a rectangular frame shape. Accordingly, the mask frame MF may include (or be provided with) a frame opening OP-MF overlapping with the stage opening OP-ST. The deposition material EV may be supplied to the mask MK through the frame opening OP-MF.

[0073] The mask frame MF may have a certain rigidity. As an example, the mask frame MF may include a metal material such as stainless steel (SUS), Invar, nickel (Ni), cobalt (Co), or the like.

[0074] The mask MK may be disposed between the substrate SUB and the mask frame MF. The mask MK may include (or be provided with) a mask opening OP-MK defining a deposition area (refer to Figure 2 ). Mask opening OP-MK (reference Figure 2 ) may overlap with the frame opening OP-MF. The deposition material EV may pass through the mask opening OP-MK (refer to Figure 2 ) is deposited onto the substrate SUB.

[0075] The mask MK may be provided in plural, and the mask MK may be disposed on a mask frame MF. Figure 2 Ten masks MK arranged in the first direction DR1 are shown, however, the shape and number of the masks MK should not be limited. Each of the masks MK may include Invar alloy.

[0076] The mask MK may be coupled to the mask frame MF. As an example, the mask MK may be coupled to the mask frame MF by a welding process. As an example, an end (e.g., opposite end) of each of the masks MK may be disposed on the mask frame MF, and a welding process may be performed on the end (e.g., opposite end) of the mask MK to couple the mask MK to the mask frame MF. A welding protrusion may be formed at the end (e.g., opposite end) of the mask MK by the welding process.

[0077] Figure 2 is a schematic perspective view of a mask assembly MSA according to an embodiment, and Figure 3 is a schematic exploded perspective view of a mask assembly MSA according to an embodiment.

[0078] refer to Figure 2 and Figure 3 , the mask assembly MSA may include a mask frame MF, a first rod ST1, a second rod ST2, and a mask MK.

[0079] The frame opening OP-MF may be formed (or defined) through the mask frame MF. The inner side surface of the mask frame MF may define the frame opening OP-MF. The frame opening OP-MF may overlap with the mask opening OP-MK of the mask MK.

[0080] The first rod ST1 may be disposed on the mask frame MF and may overlap the frame opening OP-MF. The first rod ST1 may be coupled to the mask frame MF by a welding process. The first rod ST1 may extend in the second direction DR2 and may span the frame opening OP-MF. The center portion of the first rod ST1 may overlap the frame opening OP-MF, and the end portion of the first rod ST1 may not overlap the frame opening OP-MF. The first rod ST1 may not overlap the mask opening OP-MK. The first rod ST1 may not overlap the effective area CEA of the mask MK. The first rod ST1 may extend in the second direction DR2 to have a first length L1.

[0081] The second rod ST2 may be disposed on the first rod ST1 and may overlap the frame opening OP-MF. The second rod ST2 may be disposed to cross the first rod ST1. The second rod ST2 may extend in the first direction DR1 intersecting the second direction DR2 and may cross the frame opening OP-MF. The second rod ST2 may not overlap the mask opening OP-MK. The second rod ST2 may not overlap the effective area CEA of the mask MK. The second rod ST2 may extend in the first direction DR1 to have a second length L2 longer than the first length L1. For example, the second rod ST2 may be longer than the first rod ST1. The first rod ST1 may be referred to as a short side rod, and the second rod ST2 may be referred to as a long side rod.

[0082] The second rod ST2 may be disposed between the mask MK and the first rod ST1. The second rod ST2 may be disposed (e.g., directly disposed) on the first rod ST1. However, the arrangement relationship between the first rod ST1 and the second rod ST2 should not be limited to or thereby, and in another example, the first rod ST1 may be disposed between the second rod ST2 and the mask MK. The first rod ST1 and the second rod ST2 may include a non-magnetic material. As an example, the first rod ST1 and the second rod ST2 may include aluminum. However, this is only an example, and the materials of the first rod ST1 and the second rod ST2 should not be limited to or thereby.

[0083] The second stem ST2 may include a first center portion CST and a first end portion EST. The first center portion CST may overlap with the frame opening OP-MF, and the first end portion EST may not overlap with the frame opening OP-MF.

[0084] The first center portion CST may span the frame opening OP-MF. The first center portion CST may have a width in the second direction DR2 that increases from a center portion of the second rod ST2 toward the first end portion EST when viewed in a plane. The first center portion CST may have a minimum width in the second direction DR2 at a center portion thereof when viewed in a plane, and may have a maximum width in the second direction DR2 at a boundary between the first center portion CST and the first end portion EST when viewed in a plane.

[0085] The first end portion EST may extend from the first center portion CST along the first direction DR1. The first end portion EST may be an end portion of the second rod ST2. The first end portion EST may have a cutout shape. This will be referred to as Figure 4 The first rod ST1 and the second rod ST2 may serve as a support member to prevent the mask MK from being separated.

[0086] The mask MK may be disposed on the second rod ST2, and the mask opening OP-MK overlapping the frame opening OP-MF may be formed (or defined) through the mask MK. The mask MK may be a fine metal mask. The mask MK may include a magnetic material. As an example, the mask MK may include an invar alloy. However, this is only a representative example of the mask MK, and the embodiment is not limited thereto or thereby.

[0087] The mask MK may include a plurality of active areas CEA and non-active areas NLE. The non-active area NLE may correspond to a portion of the mask MK other than the active area CEA of the mask MK. The non-active area NLE may surround the active area CEA. The mask opening OP-MK may be formed (or defined) through the active area CEA. The active area CEA may not overlap with the first rod ST1 and the second rod ST2. The non-active area NLE may overlap with the first rod ST1 and the second rod ST2.

[0088] The mask cutout MK-N may be defined in an end portion (eg, opposite end portion) of the mask MK in the second direction DR2. A concave portion may be formed in an outer side surface of the mask MK to be recessed toward a central portion of the mask MK. The concave portion may have a U shape.

[0089] According to an embodiment, each of the mask MK, the first rod ST1, and the second rod ST2 may be provided in plural. The first rod ST1 may be arranged spaced apart from each other in the first direction DR1. The second rod ST2 may be arranged spaced apart from each other in the second direction DR2. The mask MK may be arranged in the first direction DR1.

[0090] Figure 4 FIG. 1 is a schematic enlarged plan view of a portion of a second rod ST2 according to an embodiment. In more detail, Figure 4 for Figure 3 Schematic enlarged plan view of area AA.

[0091] refer to Figure 4 , the second stem ST2 may include a first center portion CST and a first end portion EST protruding from the first center portion CST in a first direction DR1. The first end portion EST may include a first notch recess portion OH1, a first portion NC1, and a second portion NC2.

[0092] When viewed in a plane, the first cutout recessed portion OH1 may be defined by recessing a central portion of an outer side surface of the first end portion EST toward the first center portion CST. When viewed in a plane, the first cutout recessed portion OH1 may have a U-shape. When viewed in a plane, a width D2 (i.e., a maximum width) of the first cutout recessed portion OH1 in the second direction DR2 may be substantially equal to or greater than about 40% of a width D1 of the first end portion EST in the second direction DR2. For example, the effect of correcting the bending of the second rod ST2 may be increased. Reference will be made later to 7A to 7D Describe this.

[0093] When viewed in a plane, the width D2 of the first cutout recessed portion OH1 in the second direction DR2 may be substantially equal to or less than about 80% of the width D1 of the first end portion EST in the second direction DR2. In the case where the width D2 of the first cutout recessed portion OH1 in the second direction DR2 is greater than about 80% of the width D1 of the first end portion EST in the second direction DR2, the widths DD1 and DD2 of the first portion NC1 and the second portion NC2 in the second direction DR2 may have too small a value. For example, in the first jig CLA1 (refer to FIG. 1 ) to be described later, Figure 5A ) and the second fixture CLA2 (reference Figure 5A ) When tensile force is applied to the first portion NC1 and the second portion NC2 respectively, the first portion NC1 and the second portion NC2 may be damaged.

[0094] When viewed in a plane, the width D1 of the first end portion EST in the second direction DR2 may be substantially equal to or greater than about 25 mm. For example, the first end portion EST may be formed by the first jig CLA1 and the second jig CLA2 (refer to Figure 5A ) is maintained stably.

[0095] The first notch recessed portion OH1 may include a first-first notch recessed portion OH1-a having a substantially uniform width in the second direction DR2 when viewed in a plane and a first-second notch recessed portion OH1-b having a width that decreases as the distance from the first center portion CST decreases (as it approaches the first center portion CST) in the second direction DR2 when viewed in a plane. The first-first notch recessed portion OH1-a may extend in the first direction DR1. The first-second notch recessed portion OH1-b may be a curve having a substantially uniform radius of curvature (e.g., radius of curvature R) when viewed in a plane. The radius of curvature of the first-second notch recessed portion OH1-b may be about 0.5 times the width D2 of the first notch recessed portion OH1 in the second direction DR2 when viewed in a plane. For example, in the case where the first-second notch recessed portion OH1-b forms a substantially uniform curvature and a tension described later is applied to the first portion NC1 and the second portion NC2, the applied tension may be substantially uniformly distributed throughout the first end portion EST.

[0096] The first portion NC1 and the second portion NC2 may protrude from the first center portion CST in a direction toward the outside (i.e., the first direction DR1). When viewed in a plane, the first portion NC1 and the second portion NC2 may have a rectangular shape. The first cutout recessed portion OH1 may be disposed between the first portion NC1 and the second portion NC2. The first portion NC1 may be disposed on the left side of the first cutout recessed portion OH1, and the second portion NC2 may be disposed on the right side of the first cutout recessed portion OH1. When viewed in a plane, the right side surface of the first portion NC1 and the left side surface of the second portion NC2 may form a first-first cutout recessed portion OH1-a. When viewed in a plane, a curve connecting the right side surface of the first portion NC1 and the left side surface of the second portion NC2 may form a first-second cutout recessed portion OH1-b.

[0097] When viewed in a plane, the width DD1 of the first portion NC1 in the second direction DR2 may be substantially uniform in the first direction DR1. When viewed in a plane, the width DD2 of the second portion NC2 in the second direction DR2 may be substantially uniform in the first direction DR1. Accordingly, the first jig CLA1 (refer to Figure 5A ) and the second fixture CLA2 (reference Figure 5A ) can stably maintain the first part NC1 and the second part NC2 respectively.

[0098] When viewed in a plane, the width DD1 of the first portion NC1 in the second direction DR2 and the width DD2 of the second portion NC2 in the second direction DR2 may be substantially the same as each other. Accordingly, the width of one of the first portion NC1 and the second portion NC2 in the second direction DR2 may be prevented from being too small, and the first portion NC1 and the second portion NC2 may be prevented from being too small due to the first clamp CLA1 and the second clamp CLA2 (refer to Figure 5A ) is damaged by the tensile force applied to it.

[0099] When viewed in a plane, the length D3 of the first-first notch recessed portion OH1-a in the first direction DR1 may be substantially equal to or greater than about 8 mm and substantially equal to or less than about 12 mm. For example, the length D3 of the first-first notch recessed portion OH1-a in the first direction DR1 and the lengths of the first portion NC1 and the second portion NC2 in the first direction DR1 may be substantially the same as each other. When viewed in a plane, in the case where the length D3 of the first-first notch recessed portion OH1-a in the first direction DR1 is less than about 8 mm, the first clamp CLA1 and the second clamp CLA2 (reference number 110) described later may be used. Figure 5A ) may have difficulty in separately holding the first portion NC1 and the second portion NC2. When viewed in a plane, in the case where the length D3 of the first-first notch recessed portion OH1-a in the first direction DR1 is greater than about 12 mm, the first portion NC1 and the second portion NC2 may become too long, and the first portion NC1 and the second portion NC2 may be damaged due to bending deformation caused by the tension applied to the first portion NC1 and the second portion NC2. When viewed in a plane, the length of the first portion NC1 and the second portion NC2 in the first direction DR1 may be substantially equal to or greater than about 10 mm. For example, when viewed in a plane, the length D3 of the first-first notch recessed portion OH1-a in the first direction DR1 may be about 10 mm.

[0100] Figure 5A is a plan view of the second rod ST2 before bending according to an embodiment, and Figure 5B FIG. 4 is a plan view of a bent second rod ST2 according to an embodiment.

[0101] refer to Figure 5A, the first portion NC1 of the first end portion EST may be held by the first jig CLA1. The second portion NC2 of the first end portion EST may be held by the second jig CLA2. The virtual vertical line VL may be a virtual vertical line passing through the center portion of the second rod ST2 before the second rod ST2 is bent. The first tension F1 may be applied to the first portion NC1 held by the first jig CLA1 in the first direction DR1 and in a direction opposite to the first direction DR1. The second tension F2 may be applied to the second portion NC2 held by the second jig CLA2 in the first direction DR1 and in a direction opposite to the first direction DR1. The second tension F2 may be greater than the first tension F1.

[0102] As described above, the bending deformation degree of the second rod ST2 may be controlled by applying different magnitudes of tension to the first portion NC1 and the second portion NC2. Figure 5A The second rod ST2 is shown as a representative example in a case where the second tension F2 is greater than the first tension F1, however, the magnitude of the second tension F2 and the magnitude of the first tension F1 may vary according to the degree of bending of the second rod ST2. As an example, the first tension F1 may be greater than the second tension F2, or the first tension F1 and the second tension F2 may be substantially the same as each other. For example, in a case where the first tension F1 is not applied to the first portion NC1, only the second tension F2 may be applied to the second portion NC2, or in a case where the second tension F2 is not applied to the second portion NC2, only the first tension F1 may be applied to the first portion NC1.

[0103] refer to Figure 5B Due to the tension applied to the first portion NC1 and the second portion NC2, bending deformation may occur in the second rod ST2. Figure 5A ) is greater than the first tension F1 (reference Figure 5A ), so the second rod ST2 may be bent in the second direction DR2. Compared to the central portion of the second rod ST2 through which the virtual vertical line VL passes before the second rod ST2 is bent, the central portion of the second rod ST2 may be located on the right side in the second direction DR2.

[0104] Figure 5B The second tension F2 (refer to Figure 5A ) is greater than the first tension F1 (reference Figure 5A ) situation. In the second tension F2 (reference Figure 5A ) is less than the first tension F1 (reference Figure 5A), the second rod ST2 may be bent in the direction opposite to the second direction DR2. For example, compared with the central portion of the second rod ST2 through which the virtual vertical line VL passes before the second rod ST2 is bent, the central portion of the second rod ST2 may be located on the left side in the direction opposite to the second direction DR2. As described above, the first pulling force F1 (reference Figure 5A ) and the second tension F2 (reference Figure 5A ) to adjust the bending degree of the second rod ST2.

[0105] Fig. 6A 2 is a plan view of the second shaft ST2 in which no cutout concave portion is defined. Figure 6B 2 is a plan view of the second rod ST2 in which no cutout concave portion is defined and in which a differential tension is applied. Figure 6C FIG. 4 is a plan view of the second rod ST2 after bending. Fig.6D As an example Figure 6B FIG. 5 is a graph showing the degree of bending of the second rod ST2 as a function of the width THc of the second rod ST2.

[0106] In more detail, Fig.6D Shown in FIG. 6A to FIG. 6C The results of simulating the bending deformation of the second rod ST2 under the conditions.

[0107] refer to Fig. 6A , Fig. 6A The second shot of ST2 and Figure 5A The second rod ST2 is different in that the first notch recessed portion OH1 (refer to Figure 4 ) may not be limited to the second rod ST2. Figure 6B , the first end portion EST may include a first area ESA1 and a second area ESA2. The first area ESA1 and the second area ESA2 may be held by a jig. For example, the tension F11 may be applied only to the first area ESA1. The tension F11 may be about 10 kgf. Figure 6C The second rod ST2 can be pulled by the tension F11 (refer to Figure 6B For example, the maximum displacement (or the maximum bending amount) BD may occur at the center portion of the first center portion CST in the second direction DR2.

[0108] Fig.6D The second rod ST2 is shown in the second direction DR2 (refer to Figure 6C ) on the maximum displacement (or maximum bending) BD (reference Figure 6C ) (hereinafter referred to as the bending amount BD of the second rod ST2) according to the bending amount BD of the second rod ST2 in the second direction DR2 (reference Figure 6C) on the minimum width THc (hereinafter, referred to as the width THc of the second rod ST2). In the case where the width THc of the second rod ST2 is about 10 mm, the bending amount BD of the second rod ST2 may be about 1.15 mm. In the case where the width THc of the second rod ST2 is about 5 mm, the bending amount BD of the second rod ST2 may be about 1 mm. In the case where the width THc of the second rod ST2 is about 3 mm, the bending amount BD of the second rod ST2 may be about 0.8 mm. In the case where the width THc of the second rod ST2 is about 2 mm, the bending amount BD of the second rod ST2 may be about 0.7 mm.

[0109] When applying the same differential tension F11 (reference Figure 6B ), the bending amount BD of the second rod ST2 decreases as the width THc of the second rod ST2 decreases. Accordingly, when the width THc of the second rod ST2 decreases, a higher differential tension F11 (refer to Figure 6B ) to achieve the desired bending amount BD of the second rod ST2.

[0110] Fig. 7A FIG. 4 is a plan view of a second rod ST2 according to an embodiment. Figure 7B FIG. 4 is a plan view of a second rod ST2 applying a differential tension according to an embodiment. Figure 7C 2 is a plan view of the second shaft ST2 before and after bending according to an embodiment. Fig.7D As an example, according to an embodiment Figure 7B FIG. 5 is a graph showing the degree of bending of the second shaft ST2 as a function of the ratio of the width D2 of the first cutout recess portion OH1 to the width D1 of the first end portion EST in a case where the width THc of the second shaft ST2 is changed.

[0111] In more detail, Figure 7C and Fig.7D Shown in Fig. 7A and Figure 7B The bending deformation of the second rod ST2 is simulated under the condition of 7A to 7C In the drawings, the same reference numerals denote Figures 1 to 5B The same elements are the same elements in FIG. 1 , and therefore, for convenience of description, detailed description of the same elements will be omitted.

[0112] refer to Fig. 7A , the first end portion EST of the second rod ST2 may have a cutout shape. Figure 7B , the first portion NC1 and the second portion NC2 may be held by a jig. The tension F11 may be applied only to the first portion NC1. The tension F11 may be about 10 kgf. The width D1 of the first end portion EST in the second direction DR2 may be about 25 mm. Figure 7CThe second rod ST2 can be due to the tension F11 applied only to the first portion NC1 (refer to Figure 7B ) and bend toward the second direction DR2. For example, the maximum displacement (or maximum bending amount) BD may occur in the center portion of the first center portion CST in the second direction DR2. The minimum width THc of the first center portion CST may be substantially equal to or less than about 5 mm.

[0113] Fig.7D It is shown that the second rod ST2 is in the second direction DR2 (reference Figure 7C ) on the minimum width THc (reference Figure 7C ) (hereinafter, referred to as the width THc of the second rod ST2) is about 2 mm, about 3 mm, about 5 mm and about 10 mm. Fig.7D The figure shown in FIG. 1 shows the first cutout recessed portion OH1 (reference Figure 7B ) in the second direction DR2 (reference Figure 7B ) and the width D2 of the first end portion EST in the second direction DR2 (reference Figure 7B ) of the second rod ST2 in the second direction DR2 (reference Figure 7C ) on the maximum displacement (or maximum bending) BD (reference Figure 7C ) (hereinafter, referred to as the bending amount BD of the second rod ST2).

[0114] When the general Fig.6D The picture and Fig.7D When comparing the graphs of Fig.7D The first cutout recessed portion OH1 shown in FIG. Figure 7B ) is limited to the first end portion EST (reference Figure 7B ), the bending amount BD of the second rod ST2 is large. Fig.6D FIG. 2 is a graph showing the bending amount BD of the second rod ST2 when the cutout ratio is 0%. Fig.6D , when the width THc of the second rod ST2 is about 5 mm, the bending amount BD of the second rod ST2 is about 1 mm. Fig.7D , when the width THc of the second rod ST2 is about 5 mm and the cut ratio is about 60%, the bending amount BD of the second rod ST2 is about 11 mm. Fig.6D Change from 0% to Fig.7D In 60% of the cases, the same tensile force of about 10kgf is applied to Fig. 6A The second shot ST2 and Fig. 7A In the case of the second rod ST2, the bending amount BD of the second rod ST2 may be increased from about 1 mm to about 11 mm.

[0115] refer to Figure 7C and Fig.7D , when the width THc of the second rod ST2 is about 2 mm, about 3 mm, or about 5 mm and the cut ratio is greater than about 40%, the bending amount BD of the second rod ST2 may increase sharply. When the width THc of the second rod ST2 is about 10 mm, the degree to which the bending amount BD of the second rod ST2 increases according to the increase in the cut ratio is not sharp compared to the case where the width THc of the second rod ST2 is about 2 mm, about 3 mm, or about 5 mm. When the width THc of the second rod ST2 is substantially equal to or less than about 5 mm and the cut ratio is substantially equal to or greater than about 40%, the bending amount BD of the second rod ST2 may increase when the same differential tension of about 10 kgf is applied.

[0116] In the case where the cut ratio is less than about 40%, as the width THc of the second rod ST2 increases, the bending amount BD of the second rod ST2 may tend to increase. In the case where the cut ratio is substantially equal to or greater than about 40%, as the width THc of the second rod ST2 decreases, the bending amount BD of the second rod ST2 may tend to increase. Accordingly, in the case where it is necessary to reduce the width THc of the second rod ST2, a cut ratio of about 40% or more may be suitable for increasing the bending amount BD of the second rod ST2.

[0117] like Fig.6D As shown in the figure, when the width THc of the second rod ST2 is reduced, the bending amount BD of the second rod ST2 is reduced. Fig.7D As shown in the figure, in the case where the cut ratio is substantially equal to or greater than about 40%, as the width THc of the second rod ST2 decreases, the degree of increase in the amount of bending BD of the second rod ST2 may increase. Accordingly, in the case where it is necessary to reduce the width THc of the second rod ST2, a cut ratio of about 40% or more may be suitable for increasing the amount of bending BD of the second rod ST2, and thus, the effect of correcting the bending of the second rod ST2 may increase.

[0118] Figure 8 is a schematic perspective view of a mask assembly MSA according to an embodiment. Fig. 9 FIG. 1 is a schematic enlarged plan view of a portion of a first rod ST1 according to an embodiment. In more detail, Fig. 9 for Figure 8 In addition to the second end portion EST2 of the first rod ST1, Figure 8 The mask assembly MSA shown in FIG. has the same Figure 2 The structure and function of the mask assembly MSA are substantially the same as those of EMBODIMENT 2, and therefore, for convenience of description, details of the same elements will be omitted.

[0119] refer to Figure 8 and Fig. 9, the first rod ST1 may have substantially the same structure as the second rod ST2. For example, the first rod ST1 may include a cross-frame opening OP-MF (refer to Figure 3 ) and a second central portion CST2 extending in the second direction DR2 and a second end portion EST2 extending from the second central portion CST2 in the second direction DR2. The second end portion EST2 may have a cutout shape. Fig. 9 As shown in FIG, the second end portion EST2 may include a second notch recess portion OH2, a third portion NC11, and a fourth portion NC22.

[0120] When viewed in a plane, the second cutout recessed portion OH2 may be defined by recessing a central portion of an outer side surface of the second end portion EST2 toward the second center portion CST2. The second cutout recessed portion OH2 may have a U-shape. When viewed in a plane, a width D22 (i.e., a maximum width) of the second cutout recessed portion OH2 in the first direction DR1 may be substantially equal to or greater than about 40% of a width D11 of the second end portion EST2 in the first direction DR1.

[0121] When viewed in a plane, the width D22 of the second cutout recess portion OH2 in the first direction DR1 may be substantially equal to or less than about 80% of the width D11 of the second end portion EST2 in the first direction DR1. When viewed in a plane, the width D11 of the second end portion EST2 in the first direction DR1 may be substantially equal to or greater than about 25 mm.

[0122] The second cutout recessed portion OH2 may include a second-first cutout recessed portion OH2-a having a substantially uniform width in the first direction DR1 when viewed in a plane and a second-second cutout recessed portion OH2-b having a width that decreases as the distance from the second center portion CST2 decreases in the first direction DR1 when viewed in a plane. The second-second cutout recessed portion OH2-b may be a curve having a substantially uniform radius of curvature (e.g., radius of curvature R2) when viewed in a plane. The radius of curvature of the second-second cutout recessed portion OH2-b may be about 0.5 times the width D22 of the second cutout recessed portion OH2 in the first direction DR1 when viewed in a plane.

[0123] The third portion NC11 and the fourth portion NC22 may protrude from the second center portion CST2 toward the outside in the second direction DR2. The second cutout recess portion OH2 may be provided between the third portion NC11 and the fourth portion NC22.

[0124] When viewed in a plane, a width DD1a of the third portion NC11 in the first direction DR1 may be substantially uniform in the second direction DR2. When viewed in a plane, a width DD2a of the fourth portion NC22 in the first direction DR1 may be substantially uniform in the second direction DR2. When viewed in a plane, a width DD1a of the third portion NC11 in the first direction DR1 and a width DD2a of the fourth portion NC22 in the first direction DR1 may be substantially the same as each other.

[0125] When viewed in a plane, the length D33 of the second-first cutout recessed portion OH2-a in the second direction DR2 may be substantially equal to or greater than about 8 mm and substantially equal to or less than about 12 mm. When viewed in a plane, the length D33 of the second-first cutout recessed portion OH2-a in the second direction DR2 may be about 10 mm.

[0126] Fig. 10A , Fig. 10B , Fig. 10C , Fig. 10D and Fig. 10E Schematic diagram illustrating a method for manufacturing a mask assembly according to an embodiment. Fig. 10A , Fig. 10B , Fig. 10C , Fig. 10D and Fig. 10E In the drawings, the same reference numerals denote Figures 1 to 5B The same elements are the same elements in FIG. 1 , and therefore, for convenience of description, detailed description of the same elements will be omitted.

[0127] refer to Fig. 10A , the first rods ST1 extending in the second direction DR2 may be disposed on the mask frame MF defining the frame opening OP-MF. The first rods ST1 may be arranged in the first direction DR1 and may be spaced apart from each other in the first direction DR1. The first rods ST1 may overlap with the frame opening OP-MF and may cross the frame opening OP-MF.

[0128] Fig. 10C for Fig. 10B Schematic enlarged plan view of region CC. Fig. 10B and Fig. 10C , the second rod ST2 may be disposed on the first rod ST1. The second rod ST2 may extend in the first direction DR1 intersecting the second direction DR2. The second rods ST2 may be arranged in the second direction DR2 and may be spaced apart from each other in the second direction DR2. The second rod ST2 may overlap with the frame opening OP-MF and may cross the frame opening OP-MF.

[0129] For example, the first portion NC1 of the first end portion EST may be held by the first jig CLA1 , the second portion NC2 of the first end portion EST may be held by the second jig CLA2 , and a tensile force may be applied. Fig. 10C The case where the second tension F2 applied by the second clamp CLA2 to the second portion NC2 is greater than the first tension F1 applied by the first clamp CLA1 to the first portion NC1 is shown, however, this is only an example. According to an embodiment, the first tension F1 may be greater than the second tension F2, and one of the first tension F1 and the second tension F2 may be zero. The degree of bending deformation of the second rod ST2 may be controlled by adjusting the first tension F1 and the second tension F2 applied to the first portion NC1 and the second portion NC2, respectively.

[0130] refer to Fig. 10D and Fig. 10E , including with frame opening OP-MF (reference Fig. 10A ) The mask MK having the overlapping mask opening OP-MK may be set on the second rod ST2. The mask frame MF may be bonded to the mask MK by the laser unit LZ. As an example, in the case where the mask frame MF is bonded to the mask MK using a welding process, a bonded portion of the mask frame MF and the mask MK may include a metal material having high rigidity. After the mask frame MF is bonded to the mask MK, the first clamp CLA1 and the second clamp CLA2 may be removed. The first clamp CLA1 and the second clamp CLA2 may prevent the second rod ST2 from moving during the welding process.

[0131] Fig.11 is a schematic perspective view of an electronic device EE according to an embodiment. Fig.12 is a schematic exploded perspective view of an electronic device EE according to an embodiment. Fig.13 FIG. 1 is a schematic cross-sectional view of a display panel DP according to an embodiment. Figure 3 ) can be used to form at least a part of a functional layer included in the electronic device EE.

[0132] refer to Fig.11 and Fig.12 , the electronic device EE may be a device activated in response to an electrical signal. The electronic device EE may include a mobile phone, a tablet computer, a car navigation unit, a game unit, or a wearable device, however, the embodiments are not limited thereto or thereby. Fig.11 and Fig.12 A mobile phone is shown as a representative example of the electronic device EE including the display panel DP.

[0133] The electronic device EE may display an image IM through the active area AA-ED. The active area AA-ED may include a plane defined by the first direction DR1 and the second direction DR2. The active area AA-ED may further include a curved surface bent from at least one side of the plane defined by the first direction DR1 and the second direction DR2. Fig.11 The electronic device EE shown in the figure may include two curved surfaces respectively bent from two opposite sides of a plane defined by the first direction DR1 and the second direction DR2. However, the shape of the active area AA-ED should not be limited thereto or thereby. For example, the active area AA-ED may include only a plane (or a flat area), or the active area AA-ED may include curved surfaces respectively bent from more sides of the plane, for example, four curved surfaces respectively bent from four sides of the plane.

[0134] The electronic device EE may include a sensing area SA-ED defined therein. Fig.11 One sensing area SA-ED is shown, however, the number of sensing areas SA-ED should not be limited thereto or thereby, and two or more sensing areas SA-ED may be defined. For example, the sensing area SA-ED may be defined in the active area AA-ED and may be a part of the active area AA-ED.

[0135] The electronic device EE may include an active area AA-ED and a peripheral area NAA-ED adjacent to the active area AA-ED. The active area AA-ED may correspond to the display area AA of the display panel DP, and the peripheral area NAA-ED may correspond to the non-display area NAA of the display panel DP.

[0136] The peripheral area NAA-ED may be an area for blocking optical signals and may be disposed outside the active area AA-ED to surround the active area AA-ED. According to an embodiment, the peripheral area NAA-ED may be defined in a side surface of the electronic device EE instead of in a front surface of the electronic device EE. The electronic device EE may include at least one curved side surface, and the peripheral area NAA-ED may be defined in the curved side surface.

[0137] The electronic device EE may include a display device DD, a housing HU, and an electro-optical module EOM. The display device DD may include a window WM, an upper member UM, a display panel DP, and a lower member SP.

[0138] The display device DD may include a window WM disposed on the display panel DP. The window WM may provide an exterior of the electronic device EE. The window WM may cover the front surface of the display panel DP and may protect the display panel DP from external impacts and scratches. The window WM may be attached to the upper member UM by an adhesive layer.

[0139] The window WM may include an optically transparent insulating material. As an example, the window WM may include a cover glass or a synthetic resin film as its covering member. The window WM may have a single-layer structure or a multi-layer structure. For example, the window WM may have a single-layer structure of cover glass, may have a structure in which a plurality of plastic films are coupled to each other by an adhesive, or may have a structure in which the cover glass and the plastic film are coupled to each other by an adhesive. The window WM may further include a functional layer disposed on a transparent substrate, such as an anti-fingerprint layer, a phase control layer, a hard coating layer, and the like.

[0140] In the display device DD, the upper member UM may be disposed below the window WM and on the display panel DP. The upper member UM may include an anti-reflection layer and an input sensing sensor. The anti-reflection layer may reduce the reflectivity of the display device DD relative to external light. The input sensing sensor may sense an external input generated by a user. The upper member UM may further include an adhesive layer for attaching the anti-reflection layer to the input sensing sensor.

[0141] In the display device DD, the display panel DP may be disposed under the upper member UM. The lower member SP may be disposed under the display panel DP.

[0142] The display panel DP may include a display area AA displaying an image IM and a non-display area NAA adjacent to the display area AA. For example, the front surface of the display panel DP may include the display area AA and the non-display area NAA. The display area AA may be activated in response to an electrical signal and may be an area generating an image IM displayed through the active area AA-ED of the electronic device EE.

[0143] The non-display area NAA may be defined as being adjacent to the display area AA. The non-display area NAA may surround the display area AA. A driving circuit or driving line for driving the display area AA, various signal lines or pads for providing electrical signals to the display area AA, or electronic components may be arranged in the non-display area NAA.

[0144] The electronic device EE may include (or be provided with) a through hole HH formed (or defined) through at least one component included therein. The through hole HH may be formed (or defined) through, for example, each of the display panel DP, the upper member UM, and the lower member SP.

[0145] The first panel hole H1 may be formed (or defined) in the display area AA of the display panel DP. The first panel hole H1 may be formed (or defined) to overlap with the sensing area SA-ED of the electronic device EE including the display panel DP. The first panel hole H1 may be formed (or defined) through a portion of the display panel DP that overlaps with the sensing area SA-ED of the electronic device EE. For example, the first panel hole H1 may be formed to have a shape that penetrates the display panel DP from the upper surface to the lower surface of the display panel DP, however, the embodiment is not limited thereto or thereby. In another example, one or more components of the display panel DP may not be penetrated in the portion defining the first panel hole H1. As an example, the base layer BL (reference layer) of the display panel DP Fig.13 ) may not be penetrated in a portion defining the first panel hole H1. The electro-optical module EOM may be disposed to correspond to (or overlap) a portion defining the first panel hole H1.

[0146] The second panel hole H2 may be formed (or defined) through the upper member UM to correspond to the first panel hole H1 of the display panel DP. The second panel hole H2 may be formed (or defined) to overlap the sensing area SA-ED of the electronic device EE. Fig.12 A structure in which the second panel hole H2 has substantially the same shape and size as the first panel hole H1 is shown as a representative example, however, the embodiment is not limited thereto or thereby. In another example, the shape and size of the second panel hole H2 may be different from that of the first panel hole H1.

[0147] The lower member SP may be disposed under the display panel DP. The lower member SP may support the display panel DP, may absorb impact applied to the display panel DP, and may dissipate heat generated by components disposed under the display panel DP (eg, an electronic module EM and a power supply module PSM described later).

[0148] The third panel hole H3 may be formed (or defined) through the lower member SP. Fig.12 A structure is shown in which the third panel hole H3 has a shape and size substantially the same as the shape and size of the first panel hole H1 and the second panel hole H2, however, the embodiments are not limited thereto or thereby. In another example, the shape and size of the third panel hole H3 may be different from the shape and size of the first panel hole H1 and the second panel hole H2.

[0149] The housing HU may house the electro-optical module EOM, the power supply module PSM, the electronic module EM, and the display panel DP. A window WM may be coupled to the housing HU to form the exterior of the electronic device EE.

[0150] The electro-optical module EOM may overlap with the sensing area SA-ED. The electro-optical module EOM may receive an external input through the sensing area SA-ED, or may output a signal through the sensing area SA-ED. The electro-optical module EOM may include a camera module or a sensor module.

[0151] The electronic module EM may include a control module, a wireless communication module, an image input module, an audio input module, an audio output module, a memory, and an external interface module. The electronic module EM may include a main circuit board, and these modules may be mounted on the main circuit board or may be electrically connected to the main circuit board via a flexible circuit board. The electronic module EM may be electrically connected to the power supply module PSM.

[0152] The power supply module PSM may supply power required for the overall operation of the electronic device EE. As an example, the power supply module PSM may include a conventional battery device.

[0153] Fig.13 For along Fig.12 A schematic cross-sectional view of the display panel DP taken along line II-II' of FIG. Figure 1 )manufacture Fig.13 The display panel DP shown in FIG.

[0154] refer to Fig.13 , the display panel DP may be a light-emitting display panel. Fig.13 A cross section corresponding to a representative one of the pixels, for example, a cross section corresponding to two transistors T1 and T2 and a light emitting element OLED is shown.

[0155] The display panel DP may include a base layer BL, a circuit element layer ML disposed on the base layer BL, a display element layer EL disposed on the circuit element layer ML, and an encapsulation layer TFE disposed on the display element layer EL.

[0156] The base layer BL may include a synthetic resin layer. The base layer BL may be formed by forming a synthetic resin layer on a support substrate used in the case of manufacturing the display panel DP, forming a conductive layer and an insulating layer on the synthetic resin layer, and removing the support substrate.

[0157] The circuit element layer ML may include at least one insulating layer and a circuit element. The circuit element may include a signal line and a pixel driving circuit. The insulating layer, the semiconductor layer, and the conductive layer may be formed by a coating or deposition process. For example, the insulating layer, the semiconductor layer, and the conductive layer may be patterned by a photoetching process, and thus, the circuit element layer ML may be formed.

[0158] In this embodiment, the circuit element layer ML may include a buffer layer BFL, an isolation layer BRL, and first, second, third, fourth, fifth, sixth, and seventh insulating layers 10, 20, 30, 40, 50, 60, and 70. The buffer layer BFL, the isolation layer BRL, and the first, second, third, fourth, fifth, sixth, and seventh insulating layers 10, 20, 30, 40, 50, 60, and 70 may include one of an inorganic layer and an organic layer. The buffer layer BFL and the isolation layer BRL may include an inorganic layer. At least one of the fifth, sixth, and seventh insulating layers 50, 60, and 70 may include an organic layer.

[0159] Fig.13 The arrangement relationship of the first active portion A1, the second active portion A2, the first gate G1, the second gate G2, the first source S1, the second source S2, the first drain DE1 and the second drain DE2 forming the first transistor T1 and the second transistor T2 as a representative example is illustrated. In this embodiment, the first active portion A1 and the second active portion A2 may include materials different from each other. The first active portion A1 may include a polysilicon semiconductor material, and the second active portion A2 may include a metal oxide semiconductor material. The first source S1 and the first drain DE1 may have a doping concentration higher than that of the first active portion A1 and may be used as electrodes. The second source S2 and the second drain DE2 may correspond to a region where the metal oxide semiconductor material is reduced and may be used as electrodes.

[0160] According to an embodiment, the first active portion A1 and the second active portion A2 may include substantially the same semiconductor material as each other, and the stack structure of the circuit element layer ML may be simplified.

[0161] The display element layer EL may include a pixel defining layer PDL and a light emitting element OLED. The light emitting element OLED may be an organic light emitting diode or a quantum dot light emitting diode. The anode AE ​​may be disposed on the seventh insulating layer 70. At least a portion of the anode AE ​​may be exposed through a pixel opening PDL-OP of the pixel defining layer PDL. The pixel opening PDL-OP of the pixel defining layer PDL may define a light emitting area PXA. The non-light emitting area NPXA may surround the light emitting area PXA.

[0162] The hole control layer HCL and the electron control layer ECL may be disposed together in the light emitting area PXA and the non-light emitting area NPXA. The light emitting layer EML may contain a light emitting material and may be formed in a pattern shape corresponding to the pixel opening PDL-OP. Unlike the hole control layer HCL and the electron control layer ECL, each having a film shape, the light emitting layer EML may be deposited in a different manner. As an example, the hole control layer HCL and the electron control layer ECL may be formed together in a pixel using a mask called an open mask. The light emitting layer EML may be formed in a pattern shape corresponding to the pixel opening PDL-OP using a mask assembly according to the present disclosure.

[0163] The cathode CE may be disposed on the electronic control layer ECL. The encapsulation layer TFE may be disposed on the cathode CE. The encapsulation layer TFE may be a thin film encapsulation layer for encapsulating the display element layer EL. The encapsulation layer TFE may include a plurality of thin layers. These thin layers may include an inorganic layer and an organic layer. The encapsulation layer TFE may include an insulating layer for encapsulating the display element layer EL and a plurality of insulating layers for improving the luminous efficiency.

[0164] In summarizing the detailed description, those skilled in the art will appreciate that many changes and modifications may be made to the embodiments without departing substantially from the principles, spirit and scope of the present disclosure. Therefore, the disclosed embodiments are used in a general and descriptive sense only and not for the purpose of limitation.

Claims

1. A mask assembly, comprising: a mask frame, including a frame opening; a first rod disposed on the mask frame, overlapping the frame opening, and extending in a first direction to have a first length; a second rod disposed on the first rod, overlapping the frame opening, and extending in a second direction intersecting the first direction to have a second length longer than the first length; as well as a mask disposed on the second rod and including a mask opening overlapping the frame opening, the second rod comprising: a first central portion spanning the frame opening; and a first end portion extending from the first central portion in the second direction, wherein: The first end portion includes a first cutout recessed portion defined by recessing a central portion of an outer side surface of the first end portion toward the first central portion when viewed in a plane, and The maximum width of the first cutout concave portion is equal to or greater than 40% of the width of the first end portion when viewed in the plane. 2 . The mask assembly according to claim 1 , wherein the maximum width of the first cutout concave portion is equal to or less than 80% of the width of the first end portion when viewed in the plane.

3. The mask assembly according to claim 1, wherein the first cutout concave portion comprises: first - a first cutout concave portion having a uniform width when viewed in said plane; and The first-second cutout concave portion has a width which decreases as the distance from the first center portion decreases when viewed in the plane.

4. The mask assembly according to claim 3, wherein: When viewed in the plane, the first-second cutout concave portion is a curve having a uniform radius of curvature, and When viewed in the plane, the uniform radius of curvature is 0.5 times the maximum width of the first cutout concave portion. 5 . The mask assembly according to claim 3 , wherein a length of the first-first notch concave portion in the second direction when viewed in the plane is equal to or greater than 8 mm and equal to or less than 12 mm. The mask assembly of claim 1 , wherein the width of the first end portion is equal to or greater than 25 mm. The mask assembly according to claim 1 , wherein a minimum width of the first central portion is equal to or less than 5 mm. 8 . The mask assembly of claim 1 , wherein a width of the first center portion in the first direction decreases as a distance from the first end portion increases.

9. The mask assembly according to claim 1, wherein: The first end portion further includes a first portion and a second portion protruding outwardly from the first central portion, The first cutout recessed portion is defined between the first portion and the second portion, and When viewed in the plane, a width of each of the first portion and the second portion in the first direction is uniform in the second direction. 10 . The mask assembly of claim 9 , wherein the width of the first portion is equal to the width of the second portion when viewed in the plane.

11. The mask assembly according to claim 1, wherein: The mask comprises a plurality of masks, The first rod comprises a plurality of first rods, The second rod comprises a plurality of second rods, The plurality of first rods are arranged in the second direction, The plurality of second rods are arranged in the first direction, and The plurality of masks are arranged in the second direction.

12. The mask assembly of claim 1, wherein the mask and the mask frame each comprise Invar.

13. The mask assembly of claim 1, wherein: The first rod comprises: a second central portion spanning the frame opening; and a second end portion extending from the second central portion in the first direction, The second end portion includes a second cutout recessed portion defined by recessing a central portion of an outer side surface of the second end portion toward the second central portion when viewed in the plane, and The maximum width of the second cutout concave portion when viewed in the plane is equal to or greater than 40% of the width of the second end portion. 14 . The mask assembly of claim 13 , wherein the maximum width of the second cutout concave portion is equal to or less than 80% of the width of the second end portion when viewed in the plane.

15. The mask assembly of claim 13, wherein: The second end portion further includes a third portion and a fourth portion protruding outwardly from the second central portion, The second cutout recessed portion is defined between the third portion and the fourth portion, and When viewed in the plane, a width of each of the third portion and the fourth portion in the second direction is uniform in the first direction. 16 . The mask assembly of claim 15 , wherein the width of the third portion is equal to the width of the fourth portion when viewed in the plane.

17. A method of manufacturing a mask assembly, the method comprising: disposing a first rod on a mask frame including a frame opening, the first rod extending in a first direction to have a first length; A second rod is disposed on the first rod, the second rod extends in a second direction intersecting the first direction to have a second length longer than the first length, and comprises: a first central portion spanning the frame opening, and a first end portion extending from the first central portion in the second direction; holding a first portion of the first end portion and a second portion of the first end portion by a first clamp and a second clamp, respectively, to apply a tensile force to the first portion and the second portion; and Attaching a mask to the mask frame, the mask being disposed on the second rod and comprising a mask opening overlapping the frame opening, wherein: The first end portion includes a first cutout recessed portion defined by recessing a central portion of an outer side surface of the first end portion toward the first central portion when viewed in a plane, and The maximum width of the first cutout concave portion is equal to or greater than 40% of the width of the first end portion when viewed in the plane.

18. The method of claim 17, wherein: The first clamp applies a first pulling force to the first portion, and The second clamp applies a second tensile force, which is greater than the first tensile force, to the second portion.

19. The method of claim 17, wherein: The first cutout recessed portion is disposed between the first portion and the second portion, and When viewed in the plane, a width of each of the first portion and the second portion in the first direction is uniform in the second direction. 20 . The method of claim 17 , wherein a length of each of the first portion and the second portion in the second direction is equal to or greater than 10 mm.