Trace water measuring device and method

Abstract

The invention discloses a trace water measuring device and method. Relates to the technical field of trace water determination. Relates to the technical field of trace water determination. The optical module is used for generating test laser; the first cavity is used for stabilizing moisture and temperature of the test laser to generate a low-cost signal; the optical module is arranged in the first cavity, and the first cavity and the second cavity are communicated in a sealing manner; a constant temperature mechanism and a moisture stabilizing mechanism are arranged in the first cavity; the second cavity is used for filling to-be-measured gas and testing the to-be-measured gas by a background signal; on the basis of a traditional measuring technology, the structure of the trace water measuring device is improved, the first cavity and the second cavity are arranged, so that an optical module is isolated from the environment, the optical module is isolated from gas to be measured, and meanwhile, the stability of test laser (background signals) is guaranteed through a constant-temperature mechanism and a moisture stabilizing mechanism in the first cavity.

Description

Technical Field

[0001] The present invention relates to the technical field of trace water determination, and in particular to a device and method for determining trace water. Background Art

[0002] Laser trace water detection plays a vital role in many fields such as semiconductor industry, high-purity gas preparation, lead-acid battery production, etc. During the detection process, the background signal is often affected by the internal circuit of the instrument, environmental noise or other external factors, resulting in reduced sensitivity, reduced consistency, large errors and poor long-term stability of trace water measurement. Summary of the invention

[0003] The technical problem to be solved by the present invention is that during the trace water determination process, the background signal is often affected by the internal circuit of the instrument, environmental noise or other external factors, resulting in reduced sensitivity, reduced consistency, large errors and poor long-term stability of the trace water measurement; the purpose of this scheme is to provide a trace water determination device and method, and on the basis of traditional determination technology, the structure of the trace water determination device is improved, and the isolation of the optical module from the environment and the isolation of the optical module from the gas to be determined are achieved by setting a first cavity and a second cavity, and at the same time, the stability of the test laser (background signal) is ensured by a constant temperature mechanism and a moisture stabilization mechanism in the first cavity.

[0004] The present invention is achieved through the following technical solutions:

[0005] This solution provides a trace water determination device, comprising:

[0006] An optical module, used to generate a test laser;

[0007] The first cavity is used to stabilize the moisture and temperature of the test laser to generate a background signal; the optical module is arranged in the first cavity, the first cavity is sealed and connected to the second cavity, and the test laser can pass through the first cavity into the second cavity; the first cavity includes a constant temperature mechanism and a moisture stabilization mechanism;

[0008] The second cavity is used to fill the gas to be measured and implement background signal testing of the gas to be measured.

[0009] Working principle of this scheme: During the trace water determination process, the background signal is often affected by the internal circuit of the instrument, environmental noise or other external factors, resulting in reduced sensitivity, reduced consistency, large errors and poor long-term stability of trace water measurement; the purpose of this scheme is to provide a trace water determination device and method. On the basis of traditional determination technology, the structure of the trace water determination device is improved. By setting a first cavity and a second cavity, the optical module is isolated from the environment, and the optical module is isolated from the gas to be determined. At the same time, the constant temperature mechanism and the moisture stabilization mechanism in the first cavity are used to ensure the stability of the test laser (background signal).

[0010] This solution also provides a new technical concept. Based on the trace water determination device, fixed parameters and adjustable parameters are set. The adjustable parameters are dynamically adjusted according to different test conditions to generate a more accurate background signal and ensure the accuracy of trace water determination. In particular, for the gas to be tested with a low water concentration, its own measurement signal is very weak, and when superimposed with the conventional background signal that is sensitive to the environment, the measurement result has a large error. This solution adjusts the source of the background signal and improves the accuracy of the measurement result by ensuring the stability of the background signal.

[0011] A further optimization scheme is that the first cavity includes a first air inlet and a first air outlet; the first air inlet and the first air outlet are both sealable air outlets; the first air inlet is located at the bottom of the first cavity; and the first air outlet is located at the top of the first cavity.

[0012] A further optimization solution is that the first cavity also includes a laser receiver for receiving the test laser reflected back from the second cavity.

[0013] A further optimized solution is that the second cavity includes: a first lens and a second lens; the first lens is arranged at the beginning of the light path of the second cavity, and the second lens is arranged at the end of the light path of the second cavity to reflect the test laser back to the first lens.

[0014] A further optimized solution is that the second cavity includes a second air inlet and a second air outlet; the second air inlet and the second air outlet are both sealable air outlets;

[0015] The second air inlet and the second air outlet are both located at the top of the second cavity; the second air inlet and the second air outlet are respectively arranged at two ends of the top of the second cavity;

[0016] The sealable gas port includes a sealing ring and a welding cover.

[0017] A further optimization scheme is that the constant temperature mechanism includes a temperature collector and a heater; the temperature collector is used to collect the temperature in the first cavity; and the heater is used to increase the temperature when the temperature in the first cavity is lower than a preset temperature.

[0018] A further optimization scheme is that the moisture stabilization mechanism includes a moisture stabilizer; the moisture stabilizer includes one material or a plurality of mixed materials, and the material has the ability to absorb moisture or release moisture.

[0019] This solution also provides a trace water determination method, which is implemented based on the above-mentioned trace water determination device, and the method comprises:

[0020] Step 1, obtaining the water vapor concentration property of the gas to be measured;

[0021] Step 2: configuring fixed parameters of the trace water measuring device based on the water vapor concentration attribute, debugging adjustable parameters of the trace water measuring device according to the fixed parameters, and generating a local signal of the gas to be measured;

[0022] Step three: Determine the trace water content of the gas to be tested based on the local signal.

[0023] A further optimization scheme is that the fixed parameters of the trace water determination device are configured based on the water vapor concentration attribute, and the adjustable parameters of the trace water determination device are debugged according to the fixed parameters to generate a local signal of the gas to be determined; including the method:

[0024] S21, determining fixed parameters of the trace water determination device according to the water vapor concentration attribute, wherein the fixed parameters include a filling gas composition, a water content of the filling gas, and a recognition degree of the test laser in the first cavity;

[0025] S22, adjusting the adjustable parameters of the trace water determination device to meet the fixed parameters; the adjustable parameters include: the maintenance temperature of the first cavity and the composition of the moisture stabilizer;

[0026] S23, when the fixed parameters are met, the standard gas is filled into the second cavity, and the test laser generated by the optical module is reflected back to the first cavity by the first lens and the second lens and then collected by the laser receiver to obtain the local signal of the gas to be measured;

[0027] S24, keeping the first cavity airtight.

[0028] A further optimization scheme is that the trace water determination of the gas to be measured based on the local signal includes the following method:

[0029] The gas to be measured is filled into the second cavity, and the test laser generated by the optical module is reflected back to the first cavity by the first lens and the second lens and then collected by the laser receiver to obtain a test signal of the gas to be measured.

[0030] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0031] 1. The present invention provides a trace water determination device and method; based on the traditional determination technology, the structure of the trace water determination device is improved, and the optical module is isolated from the environment and the optical module is isolated from the gas to be determined by setting a first cavity and a second cavity. At the same time, the stability of the test laser (background signal) is ensured by the constant temperature mechanism and the moisture stabilization mechanism in the first cavity.

[0032] 2. The present invention provides a trace water determination device and method; through the constant temperature mechanism and the water stabilization mechanism in the first cavity, the trace water determination device can have the best signal-to-noise ratio in different concentration ranges, especially the trace water determination has obvious advantages in accuracy, detection limit, long-term stability and the like in the field of trace water measurement which is more difficult.

[0033] 3. The present invention provides a device and method for determining trace water; it also provides a new technical concept, based on the trace water determination device, sets fixed parameters and adjustable parameters, dynamically adjusts the adjustable parameters according to different test conditions, generates a more accurate background signal, and ensures the accuracy of trace water determination; especially for the gas to be measured with a low water concentration, its own measurement signal is very weak, and when superimposed with the conventional background signal that is sensitive to the environment, the measurement result has a large error; and this scheme adjusts the source of the background signal, and improves the accuracy of the measurement result by ensuring the stability of the background signal. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions of the exemplary embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and should not be regarded as limiting the scope. For those of ordinary skill in the art, other relevant drawings can be obtained based on these drawings without creative work. In the drawings:

[0035] Figure 1 It is a schematic diagram of the structure of the trace water determination device;

[0036] Figure 2 Schematic diagram of the trace water determination method.

[0037] Marks and corresponding parts names in the attached drawings:

[0038] 1-first cavity, 2-second cavity, 3-optical module, 4-laser receiver, 5-heater, 6-temperature collector, 7-moisture stabilizer, 8-first air inlet, 9-first air outlet, 10-second air inlet, 11-second air outlet, 12-first lens, 13-optical path, 14-second lens. DETAILED DESCRIPTION

[0039] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with embodiments and drawings. The exemplary embodiments of the present invention and their description are only used to explain the present invention and are not intended to limit the present invention.

[0040] Laser trace water detection plays a vital role in many fields such as semiconductor industry, high-purity gas preparation, lead-acid battery production, etc. During the detection process, the background signal is often affected by the internal circuit of the instrument, environmental noise or other external factors, resulting in reduced sensitivity, reduced consistency, large errors and poor long-term stability of trace water measurement. In view of this, this solution provides the following embodiments to solve the above technical problems:

[0041] Example 1

[0042] This embodiment provides a trace water determination device, such as Figure 1 As shown, including:

[0043] Optical module 3, used to generate test laser; in this solution, optical module 3 is mainly a laser transmitter;

[0044] The first cavity 1 is used to stabilize the moisture and temperature of the test laser to generate a base signal; the optical module is arranged in the first cavity, the first cavity is sealed and connected with the second cavity, and the test laser can pass through the first cavity into the second cavity; the first cavity includes a constant temperature mechanism and a moisture stabilization mechanism;

[0045] The second cavity 2 is used to fill the gas to be measured and implement background signal testing of the gas to be measured.

[0046] The first cavity 2 includes a first air inlet 8 and a first air outlet 9; the first air inlet 8 and the first air outlet 9 are both sealable air outlets;

[0047] The first air inlet 8 is located at the bottom of the first cavity; the first air outlet 9 is located at the top of the first cavity.

[0048] The first cavity also includes a laser receiver 4 for receiving the test laser reflected from the second cavity.

[0049] The second cavity 2 includes: a first lens 12 and a second lens 14 ; the first lens 12 is arranged at the beginning of the optical path 13 of the second cavity 2 , and the second lens 14 is arranged at the end of the optical path 13 of the second cavity 2 to reflect the test laser back to the first lens 12 .

[0050] The second cavity 2 includes a second air inlet 10 and a second air outlet 11; the second air inlet 10 and the second air outlet 11 are both sealable air ports; and are sealed by using sealant, soldering, argon arc welding, laser welding, metal sealing gaskets, plastic or rubber sealing rings.

[0051] The second air inlet 10 and the second air outlet 11 are both located at the top of the second cavity 2 ; the second air inlet 10 and the second air outlet 11 are respectively arranged at two ends of the top of the second cavity 2 .

[0052] The sealable gas port includes a sealing ring and a welding cover.

[0053] The constant temperature mechanism includes a temperature collector 6 and a heater 5; the temperature collector 6 is used to collect the temperature in the first cavity; the heater 5 is used to increase the temperature when the temperature in the first cavity is lower than a preset temperature. The heater 5 is used to control the temperature in the first cavity, that is, the operating temperature of the optical module, so that the laser works at a specific wavelength.

[0054] The moisture stabilizing mechanism comprises a moisture stabilizer 7; the moisture stabilizer comprises one material or a plurality of mixed materials, and the material has the ability to absorb moisture or release moisture.

[0055] The moisture stabilizer is in a characteristic shape, including granules, flakes or strips; the material includes CaO or Al2O3. The material includes chemical reagents, such as CaO, etc., or physical stabilizers, such as Al2O3, etc. The stabilizer can be selected in the shape of granules, flakes or strips according to needs.

[0056] At a certain temperature, the moisture stabilizer is naturally decomposed or adsorbed to eventually reach an equilibrium state to ensure that the water content in the light source module exists and has a stable content for a long time as a background signal, greatly reducing the interference caused by environmental changes during the instrument measurement process.

[0057] In this embodiment, the connection between the first cavity and the second cavity is sealed by sealant, soldering, argon arc welding, laser welding, metal sealing gasket, plastic or rubber sealing ring to isolate the optical module from the external environment, isolate the second cavity from the external environment, and isolate the optical module from the second cavity.

[0058] Based on the traditional measurement technology, this embodiment improves the structure of the trace water measurement device, and realizes the isolation of the optical module from the environment and the isolation of the optical module from the gas to be measured by setting the first cavity and the second cavity, and at the same time, the stability of the test laser (background signal) is ensured by the constant temperature mechanism and the water stabilization mechanism in the first cavity. The first cavity is used to reduce the interference of the internal circuit, environmental noise or other external factors of the trace water measurement device, and control the background signal at a stable level.

[0059] Example 2

[0060] This embodiment provides a trace water determination system, including the trace water determination device described in Embodiment 1.

[0061] Obtain the water vapor concentration property of the gas to be measured;

[0062] Based on the water vapor concentration attribute, the fixed parameters of the trace water determination device are configured, and the adjustable parameters of the trace water determination device are debugged according to the fixed parameters to generate a local signal of the gas to be determined; this step specifically includes the following method:

[0063] Determining fixed parameters of the trace water determination device according to the water vapor concentration property, the fixed parameters including the filling gas composition, the water content of the filling gas, and the recognition degree of the test laser in the first cavity;

[0064] Adjusting the adjustable parameters of the trace water determination device to meet the fixed parameters; the adjustable parameters include: the maintenance temperature of the first cavity and the composition of the moisture stabilizer;

[0065] When the fixed parameters are met, the standard gas is filled into the second cavity, and the test laser generated by the optical module is reflected back to the first cavity by the first lens and the second lens and then collected by the laser receiver to obtain the local signal of the gas to be measured;

[0066] Keep the first cavity airtight.

[0067] The gas to be measured is filled into the second cavity, and the test laser generated by the optical module is reflected back to the first cavity by the first lens and the second lens and then collected by the laser receiver to obtain a test signal of the gas to be measured.

[0068] This solution can reduce the noise signal caused by environmental change factors by isolating and sealing the optical module with the first cavity and the second cavity, so that the instrument signal is always in the best measurement state. The light source module can be treated with a constant temperature according to the measurement range of the equipment. The constant temperature environment ensures that the water content stabilizer in the light source module is in an adsorption and desorption equilibrium state, and the changes in the external environment will not affect the background signal, ensuring the stability of the trace water determination device.

[0069] Through the constant temperature mechanism and the moisture stabilization mechanism in the first cavity, the trace water determination device can have the best signal-to-noise ratio in different concentration ranges, especially the trace water determination has obvious advantages in accuracy, detection limit, long-term stability and the like in the field of trace moisture measurement which is more difficult.

[0070] Example 3

[0071] This embodiment provides a method for determining trace water. Figure 2 As shown, based on the trace water determination device described in Example 1, the method includes:

[0072] Step 1, obtaining the water vapor concentration property of the gas to be measured;

[0073] Step 2: configuring fixed parameters of the trace water determination device based on the water vapor concentration attribute, debugging adjustable parameters of the trace water determination device according to the fixed parameters, and generating a local signal of the gas to be determined; this step specifically includes the following method:

[0074] S21, determining fixed parameters of the trace water determination device according to the water vapor concentration attribute, wherein the fixed parameters include a filling gas composition, a water content of the filling gas, and a recognition degree of the test laser in the first cavity;

[0075] S22, adjusting the adjustable parameters of the trace water determination device to meet the fixed parameters; the adjustable parameters include: the maintenance temperature of the first cavity and the composition of the moisture stabilizer;

[0076] S23, when the fixed parameters are met, the standard gas is filled into the second cavity, and the test laser generated by the optical module is reflected back to the first cavity by the first lens and the second lens and then collected by the laser receiver to obtain the local signal of the gas to be measured;

[0077] S24, keeping the first cavity airtight.

[0078] Step 3: Determine the trace water content of the gas to be tested based on the local signal. This step specifically includes the following methods:

[0079] The gas to be measured is filled into the second cavity, and the test laser generated by the optical module is reflected back to the first cavity by the first lens and the second lens and then collected by the laser receiver to obtain a test signal of the gas to be measured.

[0080] The specific implementation methods described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific implementation method of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A trace water determination device, characterized in that: include: An optical module, used to generate a test laser; The first cavity is used to stabilize the moisture and temperature of the test laser to generate a background signal; the optical module is arranged in the first cavity, the first cavity is sealed and connected to the second cavity, and the test laser can pass through the first cavity into the second cavity; the first cavity includes a constant temperature mechanism and a moisture stabilization mechanism; The second cavity is used to fill the gas to be measured and implement background signal testing of the gas to be measured.

2. A trace water determination device according to claim 1, characterized in that: The first cavity comprises a first air inlet and a first air outlet; the first air inlet and the first air outlet are both sealable air outlets; the first air inlet is located at the bottom of the first cavity; and the first air outlet is located at the top of the first cavity.

3. A trace water determination device according to claim 1, characterized in that: The first cavity also includes a laser receiver for receiving the test laser reflected from the second cavity.

4. A trace water determination device according to claim 3, characterized in that: The second cavity comprises: a first lens and a second lens; the first lens is arranged at the beginning of the optical path of the second cavity, and the second lens is arranged at the end of the optical path of the second cavity to reflect the test laser back to the first lens.

5. A trace water determination device according to claim 4, characterized in that: The second cavity comprises a second air inlet and a second air outlet; the second air inlet and the second air outlet are both sealable air outlets; The second air inlet and the second air outlet are both located at the top of the second cavity; the second air inlet and the second air outlet are respectively arranged at two ends of the top of the second cavity; The sealable gas port includes a sealing ring and a welding cover.

6. A trace water determination device according to claim 5, characterized in that: The constant temperature mechanism includes a temperature collector and a heater; the temperature collector is used to collect the temperature in the first cavity; the heater is used to increase the temperature when the temperature in the first cavity is lower than a preset temperature.

7. A trace water determination device according to claim 6, characterized in that: The moisture stabilizing mechanism comprises a moisture stabilizer; the moisture stabilizer comprises one material or a plurality of mixed materials, and the material has the ability to absorb moisture or release moisture.

8. A method for determining trace water, characterized in that: Based on the trace water determination device according to claim 7, the method comprises: Obtain the water vapor concentration property of the gas to be measured; configuring fixed parameters of the trace water determination device based on the water vapor concentration attribute, debugging adjustable parameters of the trace water determination device according to the fixed parameters, and generating a local signal of the gas to be determined; Trace water determination in the test gas based on the local signal.

9. A method for determining trace water according to claim 8, characterized in that: The fixed parameters of the trace water determination device are configured based on the water vapor concentration attribute, and the adjustable parameters of the trace water determination device are debugged according to the fixed parameters to generate a local signal of the gas to be determined; Included methods: Determining fixed parameters of the trace water determination device according to the water vapor concentration property, the fixed parameters including the filling gas composition, the water content of the filling gas, and the recognition degree of the test laser in the first cavity; Adjusting the adjustable parameters of the trace water determination device to meet the fixed parameters; the adjustable parameters include: the maintenance temperature of the first cavity and the composition of the moisture stabilizer; When the fixed parameters are met, the standard gas is filled into the second cavity, and the test laser generated by the optical module is reflected back to the first cavity by the first lens and the second lens and then collected by the laser receiver to obtain the local signal of the gas to be measured; Keep the first cavity airtight.

10. A method for determining trace water according to claim 8, characterized in that: The method of measuring trace water in the gas to be measured based on the local signal includes: The gas to be measured is filled into the second cavity, and the test laser generated by the optical module is reflected back to the first cavity by the first lens and the second lens and then collected by the laser receiver to obtain a test signal of the gas to be measured.

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