Tooling fixture for probe wafer

Abstract

The application discloses a tool clamp for a probe wafer, comprising a support, a clamping mechanism, a base plate movably supported on the support, a clamping pressing plate detachably connected on the base plate, a first profile hole penetrating through the base plate and matched with the shape of the probe wafer is arranged on the base plate, a second profile hole corresponding to the first profile hole and penetrating through the clamping pressing plate is arranged on the clamping pressing plate, a first clamping part is arranged on the inner peripheral edge of the first profile hole, a second clamping part corresponding to the first clamping part is arranged on the inner peripheral edge of the second profile hole, and the first clamping part and the second clamping part can jointly clamp the probe wafer between the base plate and the clamping pressing plate, an electric connection structure, a conductive pressing plate detachably connected on the base plate, a receiving space formed between the base plate and the conductive pressing plate, a conductive part partially arranged in the receiving space and electrically connected with at least part of the probe wafer, and the conductive part is adapted to be electrically connected with the electrode of a power supply.

Description

Technical Field

[0001] This invention relates to the field of semiconductor wafer test probe technology, and in particular to a tooling fixture for probe sheets of probe cards. Background Technology

[0002] MEMS vertical probe cards are precision devices used for semiconductor testing. Manufactured using Microelectromechanical Systems (MEMS) technology, they enable high-density, high-pin-count probe arrangements to meet the testing requirements of high pin counts, high current, and long probe compression stroke. These probe cards are particularly suitable for testing small-pitch, high-frequency chips, such as CPUs, GPUs, and SoCs. A typical MEMS vertical probe card consists of three parts: a PCB, a space converter (such as MLO, MLC, or WST), and probe heads (usually machinable ceramic wafers). They employ a short, needle-like structure perpendicular to the substrate to accommodate the testing needs of small-pitch and high-frequency chips. In related technologies, probe cards typically use probe sheets to mount the probe heads. Pin holes are machined at the UD (Upper Die, the top chip in a stack) and LD (Lower Die, the bottom chip in a stack) positions on the probe sheet, and then tens of thousands of MEMS probes are inserted into these pin holes. High dimensional accuracy is required for each probe to ensure proper functioning. When fabricating pinholes on probe sheets, the probe shape is typically cut out using laser cutting or wire cutting. The probe sheet then undergoes multiple wet processing steps (such as immersing the cut sheet in cleaning, pickling, and electroplating tanks for surface cleaning, pickling, and electroplating) to remove dirt, impurities, and oxide films from the probe sheet surface and form a metal coating to improve its physical properties. The square pinholes require metal coating on all four sides. Because the cut probe sheets are narrow and typically less than 0.2 mm thick, they are difficult to hold during wet processing. Without proper fixing or with inadequate fixing, probe sheets are prone to warping during wet processing, especially at the outer edges, making it difficult to ensure the uniformity of the metal coating formed on the probe sheet surface. Furthermore, poor electrical contact between the probe sheet and the external power supply electrodes during electroplating can also reduce the electroplating effect. Therefore, there is an urgent need for a tooling fixture suitable for clamping probe sheets, so that the probe sheets can be immersed in a wet process treatment tank for corresponding wet process treatment, avoiding defects such as warping and deformation and poor electroplating uniformity of the probe sheets during the wet process treatment. Summary of the Invention

[0003] To address the aforementioned technical problems, the present invention aims to provide a tooling fixture for probe sheets, suitable for clamping probe sheets and immersing them in a wet process treatment tank for corresponding wet process treatment, and capable of avoiding defects such as warping and deformation and poor electroplating uniformity of probe sheets during wet process treatment.

[0004] On one hand, the present invention provides a tooling fixture for a probe sheet, suitable for clamping the probe sheet for immersion in a wet process treatment tank. The tooling fixture includes: a support frame configured to be supported on the upper part of the wet process treatment tank; and a clamping mechanism including a base plate movably supported on the support frame and a clamping plate detachably connected to the base plate. The base plate has a first contour hole that penetrates the base plate and matches the shape of the probe sheet. The clamping plate has a second contour hole that corresponds to the first contour hole and penetrates the clamping plate. At least one [missing information - likely a typo, should be inserted here] is provided on the inner peripheral edge of the first contour hole. The first clamping portion has at least one second clamping portion corresponding to the at least one first clamping portion on the inner peripheral edge of the second contour hole. The at least one first clamping portion and the at least one second clamping portion can jointly clamp the probe sheet between the substrate and the clamping pressure plate. The electrical connection structure includes a voltage conductive plate detachably connected to the substrate, a receiving space formed between the substrate and the voltage conductive plate, and a conductive element partially installed in the receiving space and in conductive contact with at least a portion of the probe sheet. Another portion of the conductive element is configured to be electrically connected to the electrode of a power source.

[0005] According to one embodiment of the present invention, a plurality of first clamping portions are provided at intervals along the inner peripheral edge of the first contour hole, and a plurality of second clamping portions are provided at intervals along the inner peripheral edge of the second contour hole.

[0006] According to one embodiment of the present invention, the substrate and the clamping pressure plate are detachably connected by a snap fastener assembly. The substrate has a first mounting hole, and the clamping pressure plate has a second mounting hole corresponding to the first mounting hole. The snap fastener assembly includes a snap fastener inserted into the mounting hole and a spring sleeved on the outside of the snap fastener. The snap fastener includes a snap head, a snap rod connected to the snap head, and a pair of elastic barbs connected to the snap rod.

[0007] According to one embodiment of the present invention, the conductive element includes a conductive sheet disposed within the receiving space and a conductive connection portion connected to the conductive sheet and extending outward, the conductive connection portion being configured to be electrically connected to the electrodes of a power source.

[0008] According to one embodiment of the present invention, the conductive connection extends upward and passes through the bracket.

[0009] According to one embodiment of the present invention, the conductive component is one of metal foil, metal plate, metal sheet, and conductive cable.

[0010] According to one embodiment of the present invention, a height adjustment mechanism is further included for adjusting the height of the clamping mechanism relative to the bracket. The height adjustment mechanism includes a mounting groove formed on the bracket, an adjustment frame movably installed in the mounting groove in the vertical direction and connected to the clamping mechanism, a plurality of limiting holes arranged at intervals in the vertical direction on the adjustment frame, and a limiting plug that is detachably inserted into the limiting holes and supported on the bracket.

[0011] According to one embodiment of the present invention, the adjustment frame is detachably connected to the substrate or the voltage-conducting plate.

[0012] According to one embodiment of the present invention, the adjusting frame includes two adjusting rods arranged opposite to each other, and the limiting insertion hole is formed on the two adjusting rods.

[0013] According to one embodiment of the present invention, the height adjustment mechanism further includes a handle connected between the two adjustment rods.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0015] By providing a first contour hole on the substrate that matches the shape of the probe sheet and at least one first clamping part on the inner peripheral edge of the first contour hole, and providing a second contour hole on the clamping plate and at least one second clamping part on the inner peripheral edge of the second contour hole, the probe sheet can be clamped between the substrate and the clamping plate by at least one first clamping part and at least one second clamping part. This allows the probe sheet to be clamped and fixed along the outer contour edge, avoiding warping and deformation of the probe sheet during wet processing and preventing defects such as poor uniformity of the metal plating layer formed on the surface of the probe sheet. Furthermore, a conductive element that makes conductive contact with the probe sheet is installed in the receiving space between the substrate and the conductive plate, thereby ensuring that the probe sheet maintains electrical connection with the electrodes of the power supply during wet processing, ensuring the continuity and stability of the electroplating. Attached Figure Description

[0016] Figure 1 This is a perspective view of a tooling fixture according to an embodiment of the present invention;

[0017] Figure 2 yes Figure 1 Exploded perspective view of the tooling fixture shown;

[0018] Figure 3 yes Figure 2 A magnified view of a portion at point A shown in the image;

[0019] Figure 4 yes Figure 1 The side view of the tooling fixture shown;

[0020] Figure 5 yes Figure 4 The cross-sectional view along line BB shown in the figure;

[0021] Figure 6 yes Figure 5 A magnified view of section C shown in the image;

[0022] Figure 7 yes Figure 1 The layout of the tooling fixture shown is shown in a sectional perspective view.

[0023] Figure 8 yes Figure 7 A magnified view of a portion at point D shown in the diagram.

[0024] The accompanying diagrams are labeled as follows:

[0025] 100. Tooling fixture; 200. Probe sheet; 201. Needle insertion hole; 202. Through hole;

[0026] 10. Bracket; 11. Support; 111. Limiting groove; 12. Limiting baffle;

[0027] 20. Clamping mechanism; 21. Substrate; 211. First contour hole; 212. First clamping part; 213. First mounting hole; 214. First positioning hole; 22. Clamping pressure plate; 221. Second contour hole; 222. Second clamping part; 223. Second mounting hole; 224. Second positioning hole;

[0028] 30. Electrical connection structure; 31. Voltage conductive plate; 32. Receiving space; 33. Conductive component; 331. Conductive sheet; 332. Conductive connection part;

[0029] 40. Height adjustment mechanism; 41. Mounting slot; 42. Adjustment bracket; 421. Adjustment rod; 43. Limiting hole; 44. Limiting insert; 45. Handle;

[0030] 50. Pin assembly; 51. Pin component; 511. Pin head; 512. Pin rod; 513. Elastic barb; 52. Spring. Detailed Implementation

[0031] It is readily understood that, based on the technical solution of this invention, those skilled in the art can propose various interchangeable structural methods and implementations without altering the essential spirit of the invention. Therefore, the following detailed embodiments and accompanying drawings are merely illustrative examples of the technical solution of this invention and should not be considered as the entirety of the invention or as limitations or restrictions on the technical solution of this invention.

[0032] One embodiment of the present invention provides a tooling fixture 100 for a probe sheet 200, which is adapted to clamp the probe sheet 200 for immersion in a wet process treatment tank / pool for corresponding process treatment. The structure and principle of the tooling fixture 100 of the present invention will be specifically described below with reference to the accompanying drawings.

[0033] according to Figure 1 and Figure 2 As shown, the tooling fixture 100 includes a support 10 and a clamping mechanism 20. The support 10 is configured to be supported on the upper part of a wet process treatment tank / pool. The support 10 includes a base 11 and limiting baffles 12 mounted on opposite sides of the base 11. The base 11 can be supported on the upper part of the wet process treatment tank / pool, and the two limiting baffles 12 limit the base 11 on the upper part of the wet process treatment tank / pool, thereby restricting the movement of the base 11 on the wet process treatment tank / pool and preventing the tooling fixture 100 from accidentally falling into the wet process treatment tank / pool due to vibration or other reasons when clamping the probe sheet 200 and immersing it in the wet process treatment tank / pool for corresponding process treatments (such as surface cleaning, pickling, electroplating, etc.). The limiting baffle 12 is installed on the opposite sides of the support 11 by fasteners such as screws. In other embodiments, the connection between the limiting baffle 12 and the support 11 can also be magnetic connection, adhesive connection, snap connection, hinge or welding, and there is no specific limitation.

[0034] The clamping mechanism 20 includes a substrate 21 and a clamping plate 22. The substrate 21 has a first contour hole 211 that penetrates the substrate 21 and matches the shape of the probe sheet 200. The clamping plate 22 is mounted on the substrate 21 and has a second contour hole 221 that corresponds to and penetrates the first contour hole 211. Six first clamping portions 212 are provided on the inner periphery of the first contour hole 211, and six second clamping portions 222, corresponding to the six first clamping portions 212, are provided on the inner periphery of the second contour hole 221. When clamping the probe sheet 200, the substrate 21 and the clamping plate 22 together clamp the probe sheet 200 between them, and the outer contour edge of the probe sheet 200 is pressed and clamped by the six first clamping portions 212 and the six second clamping portions 222.

[0035] The probe sheet 200 is fan-shaped. The shapes of the first contour hole 211 on the substrate 21 and the second contour hole 221 on the clamping plate 22 correspond to the shape of the probe sheet 200 and are also fan-shaped. This hollow structure design of the substrate 21 and the clamping plate 22 allows the tooling fixture 100 to hold the probe sheet 200 and immerse it in the wet process treatment tank / pool for the corresponding wet process treatment. Both sides of the probe sheet 200 can make good contact and react with the treatment solution in the wet process treatment tank / pool. The outer contour edge of the probe sheet 200 is clamped and fixed, which can also avoid the probe sheet 200 from warping and deformation during the wet process treatment, which would affect the wet process treatment. In other embodiments, the first contour hole 211 of the substrate 21 and the second contour hole 221 of the clamping plate 22 can be set according to the specific shape of the probe sheet 200, so that the first contour hole 211 and the second contour hole 221 match or fit the shape of the probe sheet 200; in addition, the first contour hole 211 and the second contour hole 221 can also be set into regular shapes, such as circles, rectangles, etc., without any specific limitation.

[0036] To ensure more uniform force distribution on the probe sheet 200 when it is clamped by the substrate 21 and the clamping plate 22, six first clamping portions 212 are evenly spaced along the inner periphery of the first contour hole 211. Six second clamping portions 222 are evenly spaced along the inner periphery of the second contour hole 221. In other embodiments, the number of first clamping portions 212 and the number of second clamping portions 222 are not limited to six. Alternatively, at least one first clamping portion 212 may be provided along the inner periphery of the first contour hole 211, and at least one second clamping portion 222 corresponding to the at least one first clamping portion 212 may be provided along the inner periphery of the second contour hole 221; or the number of first clamping portions 212 and second clamping portions 222 may be equal and their positions may correspond, with two or more of each type of clamping portion 212 and each type of clamping portion 222 provided. No specific limitation is imposed.

[0037] according to Figure 4 , Figure 5 and Figure 6 As shown, to facilitate the rapid assembly and disassembly of the probe sheet 200, the substrate 21 and the clamping plate 22 are detachably connected by a snap fastener assembly 50. The substrate 21 has a first mounting hole 213, and the clamping plate 22 has a second mounting hole 223 corresponding to the first mounting hole 213. The snap fastener assembly 50 includes a snap fastener 51 passing through the first mounting hole 213 and the second mounting hole 223, and a spring 52 sleeved on the outside of the snap fastener 51. The snap fastener 51 includes a snap head 511, a snap rod 512 connected to the snap head 511, and a pair of elastic barbs 513 connected to the snap rod 512.

[0038] During installation, the probe sheet 200 is clamped and pressed between the substrate 21 and the clamping plate 22. A snap fastener 51 passes through the first mounting hole 213 on the substrate 21 and the corresponding second mounting hole 223 on the clamping plate 22, thereby securing the snap fastener head 511 to the surface of the clamping plate 22 and the elastic barb 513 to the surface of the substrate 21. During disassembly, only a pair of elastic barbs 513 needs to be manually squeezed, causing them to retract from the first mounting hole 213 on the substrate 21 and the second mounting hole 223 on the clamping plate 22, thus removing the clamping plate 22 from the substrate 21 and allowing the probe sheet 200 to be removed.

[0039] To facilitate maintaining the flatness of the surfaces of the substrate 21 and the clamping plate 22, the mounting holes are countersunk holes. After the pin assembly 50 passes through the first mounting hole 213 on the substrate 21 and the corresponding second mounting hole 223 on the clamping plate 22 to connect the substrate 21 and the clamping plate 22, the pin head 511 of the pin 51 is concealed in the second mounting hole 223 of the clamping plate 22, and the elastic barb 513 of the pin 51 is concealed in the first mounting hole 213 of the substrate 21. In other embodiments, the first mounting hole 213 and the second mounting hole 223 can both be through holes, and there is no specific limitation.

[0040] according to Figure 2 and Figure 3 As shown, in order to more securely clamp the probe sheet 200 between the substrate 21 and the clamping plate 22, the substrate 21 is provided with a first positioning hole 214, the clamping plate 22 is provided with a second positioning hole 224, and the probe sheet 200 is provided with a through hole 202. After the probe sheet 200 is clamped and fixed by the substrate 21 and the clamping plate 22, the probe sheet 200 can be securely positioned between the substrate 21 and the clamping plate 22 by passing a positioning pin or positioning post through the first positioning hole 214 on the substrate 21, the second positioning hole 224 on the clamping plate 22, and the through hole 202 on the probe sheet 200.

[0041] In this embodiment, the first positioning hole 214 is formed on the first clamping part 212, and the second positioning part is formed on the second clamping part 222. In other embodiments, the first positioning hole 214 may also be formed at other positions on the substrate 21, and the second positioning hole 224 may also be formed at other positions on the clamping pressure plate 22. No specific limitation is imposed.

[0042] according to Figure 2 , Figure 7 and Figure 8As shown, to facilitate the tooling fixture 100 to be suitable not only for wet process treatment tanks / pools such as surface cleaning and pickling, but also for wet process treatment tanks / pools such as electroplating, the tooling fixture 100 also includes an electrical connection structure 30. The electrical connection structure 30 includes a voltage-conducting plate 31, a receiving space 32 formed between the substrate 21 and the voltage-conducting plate 31, and a conductive element 33 partially installed in the receiving space 32 and in conductive contact with the probe sheet 200. Another portion of the conductive element 33 is configured to be electrically connected to the electrodes of a power source.

[0043] In this embodiment, the voltage conductive plate 31 and the substrate 21 are connected by screws. In other embodiments, the voltage conductive plate 31 and the substrate 21 can also be connected by other detachable connection structures, such as magnetic connection, snap-fit ​​connection or plug-in connection. The voltage conductive plate 31 and the substrate 21 can also be integrally formed, welded or riveted, and there are no specific limitations.

[0044] In this embodiment, the conductive element 33 includes a conductive sheet 331 disposed within the receiving space 32 and a conductive connection portion 332 connected to and extending outward from the conductive sheet 331. The conductive connection portion 332 is configured to be electrically connected to the electrodes of a power source. The probe sheet 200 is pressed against the conductive sheet 331 and makes conductive contact with the conductive sheet 331. In other embodiments, at least a portion of the conductive element 33 may make conductive contact with the probe sheet 200. Furthermore, the conductive element 33 is not limited to the construction of the conductive sheet 331 and the conductive connection portion 332; it may also be made of conductive cables, metal foil (such as copper foil), metal sheets, metal plates, etc., and there are no specific limitations.

[0045] according to Figure 2 and Figure 4As shown, to facilitate adjustment of the immersion depth of the probe sheet 200 in the wet process treatment tank / pool, the tooling fixture 100 also includes a height adjustment mechanism 40. This height adjustment mechanism 40 is configured to adjust the height of the clamping mechanism 20 relative to the support 10. The clamping mechanism 20 is movably supported on the support 10 via this height adjustment mechanism 40. The height adjustment mechanism 40 includes a mounting slot 41 formed on the support 10, an adjustment frame 42 movably mounted in the mounting slot 41 in the vertical direction and connected to the clamping mechanism 20, a plurality of limiting holes 43 spaced vertically on the adjustment frame 42, and limiting inserts 44 detachably inserted into the limiting holes 43 and supported on the support 10. In this embodiment, the mounting groove 41 is formed on the support 11 and extends through the support 11 in the vertical direction. The adjusting frame 42 is movably installed in the mounting groove 41. The conductive connection portion 332 of the conductive element 33 extends upward and passes through the mounting groove 41 of the bracket 10, facilitating electrical connection with the electrodes of the power supply. The adjusting frame 42 includes two opposing adjusting rods 421, and limiting holes 43 are formed on the two adjusting rods 421. The adjusting rods 421 are connected to the voltage conductive plate 31 by screws. In other embodiments, the adjusting frame 42 may also be an integrally formed frame structure. The adjusting frame 42 is not limited to being connected to the voltage conductive plate 31 by screws. The connection between the adjusting frame 42 and the voltage conductive plate 31 may also be a snap-fit ​​connection, welding, or plug-in detachable connection structure, or it may be integrally formed. The adjusting frame 42 may also be detachably connected to the substrate 21, and there are no specific limitations.

[0046] To facilitate proper support of the limiting plug 44 on the bracket 10 and prevent the limiting plug 44 from accidentally coming out of the limiting socket 43, the upper surface of the support 11 of the bracket 10 is provided with limiting grooves 111 on opposite sides for accommodating the limiting plug 44. When the limiting plug 44 is inserted into different limiting sockets 43, the part of the limiting plug 44 that extends out of the limiting socket 43 is accommodated in the limiting groove 111.

[0047] During operation, the user can insert the limit plug 44 into different limit holes 43 on the adjustment frame 42 to adjust the height of the clamping mechanism 20 relative to the bracket 10, thereby adjusting the immersion depth of the probe sheet 200 in the wet process treatment tank / pool.

[0048] To facilitate manual adjustment of the height of the clamping mechanism 20 relative to the bracket 10 by the user manually lifting the bracket 10, a handle 45 is connected between the two adjusting rods 421 of the bracket 10. The handle 45 is a sheet metal part with a curved protrusion in the middle, and its two ends are connected to the two adjusting rods 421 of the adjusting frame 42 by screws. In other embodiments, the handle 45 may also be welded, glued, or snap-fitted to the adjusting frame 42, and there is no specific limitation.

[0049] The technical scope of this invention is not limited to the contents of the above specification. Those skilled in the art can make various modifications and variations to the above embodiments without departing from the technical concept of this invention, and all such modifications and variations should fall within the protection scope of this invention.

Claims

1. A tooling fixture for probe sheets, suitable for clamping probe sheets for immersion in a wet process treatment tank, characterized in that, The tooling fixtures include: The support frame is constructed to be suitable for support on the upper part of the wet process tank; The clamping mechanism includes a base plate movably supported on the bracket and a clamping plate detachably connected to the base plate. The base plate has a first contour hole that penetrates the base plate and is adapted to the shape of the probe sheet. The clamping plate has a second contour hole that corresponds to the first contour hole and penetrates the clamping plate. At least one first clamping part is provided on the inner peripheral edge of the first contour hole, and at least one second clamping part is provided on the inner peripheral edge of the second contour hole that corresponds to the at least one first clamping part. The at least one first clamping part and the at least one second clamping part can jointly clamp the probe sheet between the base plate and the clamping plate. An electrical connection structure includes a voltage-conducting plate detachably connected to the substrate, a receiving space sandwiched between the substrate and the voltage-conducting plate, and a conductive element partially disposed within the receiving space and in conductive contact with at least a portion of the probe sheet, wherein another portion of the conductive element is configured to be electrically connected to the electrodes of a power source. The substrate and the clamping plate are detachably connected by a snap fastener assembly. The substrate has a first mounting hole, and the clamping plate has a second mounting hole corresponding to the first mounting hole. The snap fastener assembly includes a snap fastener inserted into the mounting hole and a spring sleeved on the outside of the snap fastener. The snap fastener includes a snap head, a snap rod connected to the snap head, and a pair of elastic barbs connected to the snap rod. The conductive element includes a conductive sheet disposed within the receiving space and a conductive connection portion connected to and extending outward from the conductive sheet. The conductive connection portion is configured to be electrically connected to an electrode of a power source. The probe sheet is pressed onto the conductive sheet and makes conductive contact with the conductive sheet.

2. The tooling fixture according to claim 1, characterized in that: The first contour hole has a plurality of first clamping portions spaced apart on its inner peripheral edge, and the second contour hole has a plurality of second clamping portions spaced apart on its inner peripheral edge.

3. The tooling fixture according to claim 1, characterized in that: The conductive connection extends upward and passes through the bracket.

4. The tooling fixture according to claim 1, characterized in that: The conductive component is one of the following: metal foil, metal plate, metal sheet, or conductive cable.

5. The tooling fixture according to any one of claims 1 to 4, characterized in that: It also includes a height adjustment mechanism for adjusting the height of the clamping mechanism relative to the bracket. The height adjustment mechanism includes a mounting slot formed on the bracket, an adjustment frame movably installed in the mounting slot in the vertical direction and connected to the clamping mechanism, a plurality of limiting holes arranged at intervals in the vertical direction on the adjustment frame, and a limiting plug that is detachably inserted into the limiting holes and supported on the bracket.

6. The tooling fixture according to claim 5, characterized in that: The adjustment frame is detachably connected to the substrate or the voltage-conducting plate.

7. The tooling fixture according to claim 5, characterized in that: The adjustment frame includes two adjusting rods arranged opposite each other, the limiting insertion hole is opened on the two adjusting rods, and the upper surface of the bracket is provided with a limiting groove for receiving the limiting insertion plug.

8. The tooling fixture according to claim 7, characterized in that: The height adjustment mechanism also includes a handle connected between the two adjustment rods.

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