Optical device and laser light source device

By designing an optical device including incident, double reflection and exit mirror components, the problem of large space occupancy of the optical path of the spatial light modulator is solved, the separation and collimation of the light beams are achieved, and the compactness of the optical device is improved.

CN119179171APending Publication Date: 2024-12-24WUXI PHOTONIC CHIP JOINT RES CENT
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202411322892.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-09-23
Publication Date
2024-12-24

AI Technical Summary

Technical Problem

The optical paths of existing spatial light modulators occupy a large space, making them unavailable on optical breadboards with limited space.

Method used

An optical device is designed, including a base, a first incident mirror assembly, a double reflection assembly and a first exit mirror assembly, by reflecting an input light beam to the front reflecting surface of the double reflection assembly and outputting it to a spatial light modulator, and then It is reflected from the rear reflection surface to the exit mirror assembly to separate the input beam and the output beam, save space, and achieve beam collimation through the fine-tuning rod and column structure.

Benefits of technology

It effectively saves space, shortens the length of the optical path, makes the input beam easy to separate from the output beam, and achieves the beam collimation, improving the compactness of the optical device.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119179171A_ABST
    Figure CN119179171A_ABST
Patent Text Reader

Abstract

The invention discloses an optical device and a laser light source device. The optical device comprises a base, a first incident reflector assembly, a double-reflection assembly and a first emergent reflector assembly. The double-reflection assembly is provided with a front reflection surface and a rear reflection surface, an input light beam is reflected by the first incident reflector assembly and then sequentially enters the front reflection surface and the spatial light modulator, the spatial light modulator adjusts the input light beam into an output light beam, and the output light beam is emitted to the rear reflection surface; and then the light enters the first emergent reflecting mirror assembly. An input light beam is reflected to a front reflecting surface by using a first incident reflecting mirror assembly and then reflected to a spatial light modulator, the incident input light beam is modulated into an output light beam, the output light beam is emitted to a rear reflecting surface, and the rear reflecting surface reflects the output light beam to a first emergent reflecting mirror assembly. The double-reflection assembly can be arranged adjacent to the spatial light modulator, the input light beam can be reflected from the front reflection surface, the output light beam can also be reflected from the rear reflection surface, separation is easy, and space can be saved.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present invention relates to the field of optics, and in particular to an optical device and a laser light source device. Background Art

[0002] Femtosecond laser is an extremely short pulse laser technology with a pulse width in the femtosecond range (i.e. 10^-15 seconds) and extremely high power density and spatial resolution. This laser is named for its extremely short pulse width and can achieve a variety of micro-processing operations such as cold processing, drilling, scribing, and cutting. A spatial light modulator is usually used in the optical path of a femtosecond laser. A spatial light modulator is an optical device used to modulate the spatial distribution of light waves. It changes certain parameters of the light field, such as amplitude, phase, and polarization state, by actively controlling liquid crystal molecules.

[0003] At present, the femtosecond lasers entering and exiting the spatial light modulator usually have a certain angle. Usually, when the femtosecond laser is more than 1m away from the spatial light modulator, the emitted light and the incident light can be easily separated, and the separated emitted light can be used by subsequent equipment. In this way, the optical path of the spatial light modulator often needs to occupy a large space, resulting in a waste of space. Especially on optical breadboards with limited space, the problem of not being able to use the spatial light modulator due to insufficient space often occurs. Summary of the invention

[0004] The technical problem to be solved by the present invention is to overcome the above-mentioned defect that the optical path of the spatial light modulator in the prior art occupies a large space, and to provide an optical device and a laser light source device.

[0005] The present invention solves the above technical problems through the following technical solutions: An optical device comprises: a base, a first incident reflector assembly, a double reflection assembly and a first exit reflector assembly, wherein the first incident reflector assembly is arranged on the base, and an input light beam is incident on the first incident reflector assembly; the double reflection assembly is arranged on the base, and the double reflection assembly has a front reflection surface and a rear reflection surface, and the input light beam is reflected by the first incident reflector assembly and incident on the front reflection surface and a spatial light modulator in sequence, and the spatial light modulator adjusts the input light beam into an output light beam and projects the output light beam to the rear reflection surface; the first exit reflector assembly is arranged on the base, and the output light beam is incident on the first exit reflector assembly via the rear reflection surface.

[0006] In this solution, by adopting the above structure, the first incident reflector assembly is used to reflect the input light beam to the front reflective surface of the double reflector assembly, the front reflective surface reflects the input light beam to the spatial light modulator, the spatial light modulator modulates the input light beam into an output light beam, and then the spatial light modulator emits the output light beam to the rear reflective surface of the double reflector assembly, and the rear reflective surface reflects the output light beam to the first output reflector assembly. The double reflector assembly can be arranged adjacent to the spatial light modulator, the input light beam can be reflected from the front reflective surface, the output light beam can also be reflected from the rear reflective surface, the input light beam and the output light beam are easy to separate, space can be saved, and the collimation of the output light beam can be achieved.

[0007] Optionally, the dual reflection assembly includes a triangular reflector, and the side of the triangular reflector facing the first incident reflector assembly is a front reflection surface; the side of the triangular reflector facing the first exit reflector assembly is a rear reflection surface.

[0008] In this solution, by adopting the above structure, the triangular reflector has a simple structure and can make the optical device more compact.

[0009] Optionally, the dual reflection assembly further includes a fixed seat, a floating seat and a fine-tuning rod, the triangular reflector is arranged on the floating seat, the floating seat is connected to the fixed seat, and the fine-tuning rod is used to adjust the position of the floating seat relative to the fixed seat.

[0010] In this solution, by adopting the above structure, the fine-tuning rod is used to adjust the position of the floating seat relative to the fixed seat, thereby realizing the adjustment of the triangular reflector, and the input light beam and the output light beam can be better adjusted.

[0011] Optionally, the double reflection assembly further includes a horizontal tube, and the horizontal tube is disposed on the floating seat.

[0012] In this solution, by adopting the above structure, the horizontal state of the floating seat is displayed by using a horizontal tube, which is convenient for assisting in adjusting the position of the triangular reflector.

[0013] Optionally, the dual reflection assembly further includes a column, a sleeve and a fixing part, wherein the sleeve is arranged on the base, the column is inserted into the sleeve, and the fixing part is used to fix the column relative to the sleeve; the fixing seat is arranged on the upper end of the column.

[0014] In this solution, by adopting the above structure, the column is inserted into the sleeve, which facilitates the rotation and lifting of the column relative to the sleeve. The fixing piece is convenient for fixing the column, making the double reflection assembly more stable.

[0015] Optionally, the angle between the front reflecting surface and the rear reflecting surface ranges from 45° to 135°.

[0016] Optionally, the first incident reflector assembly and the first exit reflector assembly are symmetrically arranged relative to the double reflection assembly.

[0017] In this solution, by adopting the above structure, the first incident reflector assembly and the first output reflector assembly are symmetrically arranged, so as to facilitate the collimation of the output light beam.

[0018] Optionally, the input light beam incident on the first incident reflector assembly is parallel to the output light beam from the first exit reflector assembly.

[0019] In this solution, by adopting the above structure, it is easy to achieve collimation of the output light beam.

[0020] The optical device further comprises a second incident reflector group, and the input beam is incident on the second incident reflector group and then incident on the first incident reflector group; And / or, the optical device further comprises a second exit reflector assembly, and the output light beam is incident upon the first exit reflector assembly and then incident upon the second exit reflector assembly.

[0021] In this solution, by adopting the above structure, the second incident reflector group can better adapt to the angle of the incident light beam, and the second output reflector group can better control the angle of the output light beam.

[0022] A laser light source device comprises a femtosecond laser generating device, a spatial light modulation device and the optical device as described above, wherein the light beam generated by the femtosecond laser generating device is incident upon the spatial light modulation device via the optical device, and then incident upon the optical device after being modulated by the spatial light modulation device.

[0023] In this solution, by adopting the above structure, the laser light source device utilizes an optical device, which can save space, improve the compactness of the laser light source device, and ensure the collimation of the output light beam.

[0024] On the basis of being in accordance with the common sense in the art, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present invention.

[0025] The positive and progressive effects of the present invention are: The present invention uses a first incident reflector assembly to reflect an input light beam to a front reflective surface of a double reflector assembly, and the front reflective surface reflects the input light beam to a spatial light modulator, and the spatial light modulator modulates the input light beam into an output light beam, and then the spatial light modulator emits the output light beam to a rear reflective surface of the double reflector assembly, and the rear reflective surface reflects the output light beam to a first output reflector assembly. The double reflector assembly can be arranged adjacent to the spatial light modulator, the input light beam can be reflected from the front reflective surface, and the output light beam can also be reflected from the rear reflective surface respectively, the input light beam and the output light beam are easy to separate, space can be saved, and the output light beam can be collimated. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 Schematic diagram of an optical device in an embodiment of the present invention.

[0027] Figure 2 for Figure 1 Schematic diagram of another perspective of the optical device.

[0028] Figure 3 for Figure 1 Schematic diagram of a fixed seat, a floating seat and a fine-tuning rod in a double-reflection assembly of an optical device.

[0029] Figure 4 for Figure 1 Schematic diagram of the first incident reflector assembly of the optical device.

[0030] Figure 5 Schematic diagram of a laser light source device according to an embodiment of the present invention.

[0031] Description of reference numerals: Optical device 100 Base 11 First incident reflector assembly 12 The second incident reflector assembly 13 Double reflection assembly 20 Front reflective surface 21 Rear reflective surface 22 Triangular reflector 23 Fixed seat 24 Floating seat 25 Fine-tuning lever 26 Horizontal pipe 27 Column 28 Casing 29 Fixing 30 First exit reflector assembly 41 The second exit reflection mirror group 42 Laser light source device 500 Spatial light modulator 51 Control panel 52 Input beam 91 Output beam 92 DETAILED DESCRIPTION

[0032] The present invention will be described more clearly and completely below by way of embodiments in conjunction with the accompanying drawings, but the present invention is not limited to the scope of the embodiments.

[0033] like Figures 1 to 5 As shown, this embodiment includes an optical device 100 and a laser light source device 500. The laser light source device 500 includes the optical device 100.

[0034] Combination Figure 1 The optical device 100 includes: a base 11, a first incident reflector assembly 12, a double reflection assembly 20 and a first exit reflector assembly 41. The first incident reflector assembly 12 is arranged on the base 11, and the input light beam 91 is incident on the first incident reflector assembly 12; the double reflection assembly 20 is arranged on the base 11, and the double reflection assembly 20 has a front reflection surface 21 and a rear reflection surface 22. After being reflected by the first incident reflector assembly 12, the input light beam 91 is incident on the front reflection surface 21 and the spatial light modulator 51 in sequence. The spatial light modulator 51 adjusts the input light beam 91 to an output light beam 92, and projects the output light beam 92 to the rear reflection surface 22; the first exit reflector assembly 41 is arranged on the base 11, and the output light beam 92 is incident on the first exit reflector assembly 41 through the rear reflection surface 22. The first incident reflector assembly 12 is used to reflect the input light beam 91 to the front reflective surface 21 of the double reflector assembly 20, and the front reflective surface 21 reflects the input light beam 91 to the spatial light modulator 51, and the spatial light modulator 51 modulates the input light beam 91 into an output light beam 92. Then, the spatial light modulator 51 emits the output light beam 92 to the rear reflective surface 22 of the double reflector assembly 20, and the rear reflective surface 22 reflects the output light beam 92 to the first exit reflector assembly 41. The double reflector assembly 20 can be arranged adjacent to the spatial light modulator 51, the input light beam 91 can be reflected from the front reflective surface 21, and the output light beam 92 can also be reflected from the rear reflective surface 22. The input light beam 91 and the output light beam 92 are easy to separate, which can save space and can achieve collimation of the output light beam 92.

[0035] The dual reflection assembly 20 can be understood as a component that can provide two or more reflection surfaces. Specifically, it can include a prism, a quadrangular prism, a pentaprism, etc. The prism can specifically be a right-angle prism. As an embodiment, the angle range between the front reflection surface 21 and the rear reflection surface 22 is 45°-135°.

[0036] The front reflective surface 21 and the rear reflective surface 22 are only for the convenience of partitioning the optical paths of the input light beam 91 and the output light beam 92, and have no other meaning. The first output reflective mirror assembly 41, the second incident reflective mirror assembly 13, the first output reflective mirror assembly 41, the second output reflective mirror assembly 42, the input light beam 91 and the output light beam 92 are only for the convenience of distinction, and have no other meaning.

[0037] The base 11 can be understood as including components that can play a supporting role. In this example, the base 11 adopts a split design, and in other examples, the base 11 can be an integral body.

[0038] In the field of optics, the input light wave that illuminates the entire device and is modulated is usually called "readout light", and the light wave that is emitted after passing through the spatial light modulator 51 is called "output light". The readout light can usually illuminate all pixels of the spatial light modulator 51, and can receive information transmitted to it by the write light or write electrical signal, and is converted into output light after modulation or conversion. In this example, the input light wave is the input light beam 91, and the output light is the output light beam 92.

[0039] In this example, the dual reflection assembly 20 includes a triangular reflector 23, the side of the triangular reflector 23 facing the first incident reflector assembly 12 is the front reflector 21, and the side of the triangular reflector 23 facing the first exit reflector assembly 41 is the rear reflector 22. The triangular reflector 23 has a simple structure and can make the optical device 100 more compact. In other examples, two reflectors can also be used to form the dual reflection assembly 20.

[0040] The double reflection assembly 20 also includes a fixed seat 24, a floating seat 25 and a fine-tuning rod 26. The triangular reflector 23 is arranged on the floating seat 25, and the floating seat 25 is connected to the fixed seat 24. The fine-tuning rod 26 is used to adjust the position of the floating seat 25 relative to the fixed seat 24. The fine-tuning rod 26 is used to adjust the position of the floating seat 25 relative to the fixed seat 24, thereby realizing the adjustment of the triangular reflector 23, and the input light beam 91 and the output light beam 92 can be better adjusted.

[0041] The double reflection assembly 20 further includes a horizontal tube 27, which is disposed on the floating seat 25. The horizontal tube 27 is used to display the horizontal state of the floating seat 25, so as to assist in adjusting the position of the triangular reflector 23. Figure 3 The horizontal tube 27 is not shown in FIG. The horizontal tube 27 in the double reflection assembly 20 can be combined with Figure 4 The setting of the middle horizontal pipe 27.

[0042] The dual reflection assembly 20 further includes a column 28, a sleeve 29 and a fixing member 30. The sleeve 29 is arranged on the base 11, the column 28 is inserted into the sleeve 29, and the fixing member 30 is used to fix the column 28 relative to the sleeve 29; the fixing seat 24 is arranged on the upper end of the column 28. By inserting the column 28 into the sleeve 29, it is convenient to realize the rotation and lifting of the column 28 relative to the sleeve 29, and the fixing member 30 is convenient to fix the column 28, so that the dual reflection assembly 20 is more stable. Figure 4 It can be understood that the dual reflection assembly 20, the first incident reflector assembly 12, the second incident reflector assembly 13, the first exit reflector assembly 41 and the second exit reflector assembly 42 can all include a column 28, a sleeve 29 and a fixing member 30 of similar structure.

[0043] The first incident reflector assembly 12 and the first exit reflector assembly 41 are symmetrically arranged relative to the double reflection assembly 20. The symmetrical arrangement of the first incident reflector assembly 12 and the first exit reflector assembly 41 facilitates the collimation of the output light beam 92.

[0044] The input light beam 91 incident on the first incident reflector assembly 12 is parallel to the output light beam 92 from the first exit reflector assembly 41, so that the output light beam 92 can be collimated.

[0045] The optical device 100 further includes a second incident reflector assembly 13. The input beam is incident on the second incident reflector assembly and then incident on the first incident reflector assembly. The second incident reflector assembly 13 can better adapt to the angle of the incident beam.

[0046] The optical device 100 further includes a second output reflector assembly 42. The output light beam 92 enters the first output reflector assembly 13 and then enters the second output reflector assembly 42. The second output reflector assembly 42 can be used to better control the angle of the output light beam 92.

[0047] The optical device 100 can separate the input light beam 91 and the output light beam 92 entering and exiting the spatial light modulator 51 in a very short optical path by using the double reflection component 20. In the conventional structure using a plane reflector, the optical path length will inevitably reach more than one meter. The optical device 100 of this embodiment uses the double reflection component 20 to make the optical path entering and exiting the spatial light modulator 51 less than 0.1 meters, which can greatly save space and greatly shorten the optical path length of the spatial light modulator 51, and realize the optical path adjustment of the input light beam 91 and the output light beam 92 to be parallel.

[0048] As an implementation manner, the distance between the dual reflection component 20 and the spatial light modulator 51 panel can be controlled to be 5 cm-50 cm.

[0049] This embodiment may also include a laser light source device 500, which includes a femtosecond laser generating device, a spatial light modulation device, and the above optical device 100. The light beam generated by the femtosecond laser generating device is injected into the spatial light modulation device via the optical device 100, and then injected into the optical device 100 after being modulated by the spatial light modulation device. The laser light source device 500 uses the optical device 100, which can save space, improve the compactness of the laser light source device 500, and ensure the collimation of the output light beam 92.

[0050] The femtosecond laser generating device may be understood to include a device capable of generating a femtosecond laser, and the spatial light modulation device may be understood to include a device capable of modulating a femtosecond laser.

[0051] Although the specific embodiments of the present invention are described above, it should be understood by those skilled in the art that this is only for illustration and the protection scope of the present invention is defined by the appended claims. Those skilled in the art may make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but these changes and modifications all fall within the protection scope of the present invention.

Claims

1. An optical device, characterized in that: The optical device comprises: Base; a first incident reflector assembly, wherein the first incident reflector assembly is disposed on the base, and the input light beam is incident on the first incident reflector assembly; A double reflection component, the double reflection component is arranged on the base, the double reflection component has a front reflection surface and a rear reflection surface, the input light beam is reflected by the first incident reflection mirror component and then incident on the front reflection surface and the spatial light modulator, the spatial light modulator adjusts the input light beam into an output light beam, and projects the output light beam to the rear reflection surface; A first exit reflector assembly is provided on the base, and the output light beam is incident into the first exit reflector assembly through the rear reflection surface.

2. The optical device according to claim 1, characterized in that The double reflection component includes a triangular reflector, wherein the side of the triangular reflector facing the first incident reflector component is a front reflection surface; and the side of the triangular reflector facing the first exit reflector component is a rear reflection surface.

3. The optical device according to claim 2, characterized in that The double reflection assembly also includes a fixed seat, a floating seat and a fine-tuning rod. The triangular reflector is arranged on the floating seat. The floating seat is connected to the fixed seat. The fine-tuning rod is used to adjust the position of the floating seat relative to the fixed seat.

4. The optical device according to claim 3, characterized in that The double reflection assembly also includes a horizontal tube, and the horizontal tube is arranged on the floating seat.

5. The optical device according to claim 3, characterized in that The double reflection assembly also includes a column, a sleeve and a fixing part. The sleeve is arranged on the base, the column is inserted into the sleeve, and the fixing part is used to fix the column relative to the sleeve. The fixing seat is arranged on the upper end of the column.

6. The optical device according to claim 1, wherein: The included angle between the front reflecting surface and the rear reflecting surface is in the range of 45°-135°.

7. The optical device according to claim 1, wherein: The first incident reflector assembly and the first exit reflector assembly are symmetrically arranged relative to the double reflection assembly.

8. The optical device according to claim 1, wherein: The input light beam incident on the first incident reflector assembly is parallel to the output light beam from the first exit reflector assembly.

9. The optical device according to claim 1, wherein: The optical device further comprises a second incident reflector assembly, and the input beam is incident on the second incident reflector assembly and then incident on the first incident reflector assembly; And / or, the optical device further comprises a second exit reflector assembly, and the output light beam is incident upon the first exit reflector assembly and then incident upon the second exit reflector assembly.

10. A laser light source device, characterized in that: The laser light source device includes a femtosecond laser generating device, a spatial light modulation device and an optical device as described in any one of claims 1 to 9. The light beam generated by the femtosecond laser generating device is emitted into the spatial light modulation device through the optical device, and is modulated by the spatial light modulation device and then emitted into the optical device.