Layout local graphic feature analysis method, storage medium and terminal

Abstract

The invention discloses a layout local graphic feature analysis method, a storage medium and a terminal, and the method comprises the steps: providing a to-be-detected layout which is provided with a plurality of to-be-detected graphs; acquiring a local analysis area in the to-be-detected layout, wherein the to-be-detected graph located in the local analysis area is a target graph; and performing different types of feature analysis on the plurality of target graphs in the local analysis area, and outputting a feature analysis result of each type. By establishing the local analysis area in the to-be-detected layout and performing automatic different types of feature analysis on the target graph in the local analysis area, the process of manual layout analysis is replaced, and the efficiency of local graph feature analysis of the layout can be effectively improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a method for analyzing local graphic features of a layout, a storage medium and a terminal. Background Art

[0002] In semiconductor manufacturing, layout is the key medium for pattern transfer. The actual pattern of integrated circuits is stored in the layout, including irregular connections, stacked transistors, and repeated unit blocks SRAM. After obtaining a layout, analyzing it can get a higher-dimensional understanding of the layout. It is also possible to obtain layout features based on the analysis, make targeted modifications to layouts with different characteristics, and speed up the process development process.

[0003] However, there are still many problems in the process of performing feature analysis on the layout in the prior art. Summary of the invention

[0004] The technical problem solved by the present invention is to provide a method, storage medium and terminal for analyzing local graphic features of a layout, so as to improve the efficiency of analyzing local graphic features of a layout.

[0005] To solve the above problems, the present invention provides a method for analyzing local graphic features of a layout, comprising: providing a layout to be detected, wherein the layout to be detected has a plurality of graphics to be detected; obtaining a local analysis area in the layout to be detected, wherein the graphics to be detected located in the local analysis area are target graphics; performing different types of feature analysis on the plurality of target graphics in the local analysis area, and outputting each type of feature analysis result.

[0006] Optionally, the method for obtaining a local analysis area in the to-be-detected layout includes: obtaining a positioning point; establishing a capture window based on the positioning point; and using an area captured by the capture window as the local analysis area.

[0007] Optionally, the capture window is a rectangle.

[0008] Optionally, the method for establishing the interception window based on the positioning point includes: obtaining a first interception size along a first direction; obtaining a second interception size along a second direction, the first direction being perpendicular to the second direction; establishing the interception window based on the first interception size, the second interception size and the positioning point; wherein the positioning point is the center point of the interception window, the first interception size is the spacing size between the positioning point and the side length of the interception window along the first direction, and the second interception size is the spacing size between the positioning point and the side length of the interception window along the second direction.

[0009] Optionally, the layout to be detected includes: a single-layer layout obtained by flattening layouts of different levels, or a multi-layer layout obtained by merging layouts of different layers.

[0010] Optionally, different types of feature analysis include: geometric feature analysis and environmental feature analysis.

[0011] Optionally, the geometric features include: the shape of the target graphic, the characteristic size of the target graphic, and the spacing size between adjacent target graphics.

[0012] Optionally, the environmental feature analysis includes: whether the target graphics in the local analysis area are repeated graphics, whether the target graphics are optical proximity correction graphics, and whether auxiliary graphics are inserted into the local analysis area.

[0013] Optionally, the method for analyzing the shape of the target graphic includes: obtaining the corner points of each of the target graphics; when the number of the corner points of the target graphic is 4, judging that the target graphic is a rectangle; when the number of the corner points of the target graphic is greater than 4, performing small line segment removal processing on the target graphic; after performing the small line segment removal processing, judging the shape of the target graphic.

[0014] Optionally, the method for removing small line segments includes: when the difference between adjacent corner points in the target graphic changes from a first coordinate difference less than a first preset value to a second coordinate difference less than a first preset value, or changes from a second coordinate difference less than a first preset value to a first coordinate difference less than a first preset value, then connecting the first and last corner points.

[0015] Optionally, after performing the small line segment removal process, the method for determining the shape of the target graphic includes: after traversing all adjacent corner points in the target graphic, obtaining the number of corner points of the target graphic; the number of polygons of the target graphic is the same as the number of corner points.

[0016] Optionally, the difference between the first coordinates is: the difference between the horizontal coordinates or the difference between the vertical coordinates; the difference between the second coordinates is: the difference between the vertical coordinates or the difference between the horizontal coordinates.

[0017] Optionally, the method for analyzing the characteristic size of the target graphic and the spacing size between adjacent target graphics includes: selecting a measurement point in the local analysis area; forming a ray based on the measurement point; obtaining the number of intersections between the ray and all the edge lines of the target graphics in the local analysis area; when the number of intersections is an odd number, determining that the measurement point is located inside the target graphic; when the number of intersections is an even number, determining that the measurement point is located outside the target graphic; when it is determined that the measurement point is inside the target graphic, forming a first line segment along the first direction or the second direction through the measurement point until An intersection is generated with the sideline relative to the target figure, the first direction is perpendicular to the second direction, and the first line segment is perpendicular to the sideline of the target figure where the intersection is generated; the length dimension of the first line segment is used as the length characteristic dimension or the width characteristic dimension of the target figure; when it is judged that the measurement point is outside the target figure, a second line segment along the first direction or the second direction is formed through the measurement point until an intersection is generated with the sideline of the adjacent target figure, and the second line segment is perpendicular to the sideline of the adjacent target figure where the intersection is generated; the length dimension of the second line segment is used as the spacing dimension between adjacent target figures.

[0018] Optionally, the method for analyzing whether several target graphics in the local analysis area are repeated graphics includes: obtaining the corner points of each target graphic; based on each corner point in the target graphic, obtaining the length dimension of each edge line of the target graphic and the angle between adjacent edge lines, and forming a feature list according to a preset arrangement order; when the feature lists of two target graphics are exactly the same, the two target graphics are judged to be repetitive graphics.

[0019] Optionally, the method for analyzing whether the target graphic is an optical proximity correction graphic includes: obtaining the corner points of each of the target graphics; when the number of the corner points of the target graphic is greater than 4, and the difference in the horizontal coordinates or the difference in the vertical left sides between adjacent corner points is less than a second preset value, then judging that the target graphic is an optical proximity correction graphic.

[0020] Optionally, the method for analyzing whether an auxiliary graphic is inserted in the local analysis area includes: obtaining the corner points of each of the target graphics; when the number of the corner points of the target graphics is equal to 4, and the difference between the horizontal coordinate or the vertical coordinate between adjacent corner points is less than a third preset value, it is determined that the auxiliary graphic is inserted in the local analysis area.

[0021] Correspondingly, the technical solution of the present invention also provides a storage medium on which computer instructions are stored, and when the computer instructions are executed, the steps of the method described in any one of the above technical solutions are executed.

[0022] Correspondingly, the technical solution of the present invention also provides a terminal, including a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, and when the processor executes the computer instructions, the steps of the method described in any one of the above technical solutions are executed.

[0023] Compared with the prior art, the technical solution of the present invention has the following advantages:

[0024] In the method for analyzing local graphic features of a layout of the technical solution of the present invention, by establishing the local analysis area in the layout to be detected and automatically performing different types of feature analysis on the target graphic in the local analysis area, the process of manually analyzing the layout is replaced, and the efficiency of analyzing local graphic features of the layout can be effectively improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a flow chart of a method for analyzing local graphic features of a layout according to an embodiment of the present invention;

[0026] Figures 2 to 8 It is a structural schematic diagram of each step of the method for analyzing local graphic features of a layout in an embodiment of the present invention. DETAILED DESCRIPTION

[0027] As described in the background art, there are still many problems in the process of analyzing the characteristics of the layout in the prior art, which will be described in detail below.

[0028] At present, layout feature extraction is mainly for overall feature analysis, such as using the SVRF scripting language to calculate the occupied area, field of view, effective graphic area, etc. of the publication.

[0029] However, there is no corresponding analysis method for local features, and it is necessary to manually analyze the local position of the layout, which is time-consuming and labor-intensive. For example, given the location of a point in the layout, to establish the required measurement plan for the point, it is necessary to manually zoom in on the position step by step, analyze the environment of the position, and then determine the appropriate measurement plan. For a given point position, the local geometric features can be the shape analysis of the figure where the point is located, measuring the characteristic size values ​​in all directions at the point, analyzing the characteristics of the surrounding figures at the point, judging whether the part is a certain type of figure, judging whether the part is a repeated type of figure, etc.

[0030] On this basis, the present invention provides a method, storage medium and terminal for analyzing local graphic features of a layout. By establishing the local analysis area in the layout to be detected and automatically performing different types of feature analysis on the target graphic in the local analysis area, the process of manually analyzing the layout is replaced, and the efficiency of analyzing the local graphic features of the layout can be effectively improved.

[0031] Figure 1 1 is a flow chart of a method for analyzing local graphic features of a layout according to an embodiment of the present invention, comprising:

[0032] Step S101, providing a layout to be detected, wherein the layout to be detected has a plurality of graphics to be detected;

[0033] Step S102, obtaining a local analysis area in the to-be-detected layout, wherein the to-be-detected pattern located in the local analysis area is a target pattern;

[0034] Step S103, performing different types of feature analysis on the target graphics within the local analysis area, and outputting the feature analysis results of each type.

[0035] The following will describe in detail the steps of the method for analyzing local graphic features of a layout with reference to the accompanying drawings.

[0036] Figures 2 to 8 It is a structural schematic diagram of each step of the method for analyzing local graphic features of a layout in an embodiment of the present invention.

[0037] Please refer to Figure 2 In step S101, a layout 100 to be inspected is provided, wherein the layout 100 to be inspected has a plurality of graphics to be inspected.

[0038] It should be noted that, in this embodiment, the layout to be detected 100 may be a layout after optical proximity correction, or may be an initial layout without any correction, so it is necessary to perform feature analysis of local graphics on it in subsequent steps.

[0039] In this embodiment, the layout to be detected 100 includes: a single-layer layout formed by flattening layouts of different hierarchies, or a multi-layer layout formed by merging layouts of different layers.

[0040] Please refer to Figure 3 In step S102 , a local analysis area 101 is obtained in the to-be-detected layout 100 , and the to-be-detected graphic located in the local analysis area 101 is a target graphic 102 .

[0041] In this embodiment, the method for obtaining the local analysis area 101 in the to-be-detected layout 100 includes: obtaining a positioning point O1; establishing a capture window S based on the positioning point O1; and using the area captured by the capture window S as the local analysis area 101.

[0042] In this embodiment, the capture window S is a rectangle.

[0043] In this embodiment, the method for establishing the interception window S based on the positioning point O1 includes: obtaining a first interception size d1 along a first direction X; obtaining a second interception size d2 along a second direction Y, wherein the first direction X is perpendicular to the second direction Y; establishing the interception window S based on the first interception size d1, the second interception size d2 and the positioning point O1; wherein the positioning point O1 is the center point of the interception window S, the first interception size d1 is the spacing size of the positioning point O1 from the side length of the interception window S along the first direction X, and the second interception size d2 is the spacing size of the positioning point O1 from the side length of the interception window S along the second direction Y.

[0044] In step S103, different types of feature analysis are performed on the target graphics 102 in the local analysis area 101, and each type of feature analysis result is output.

[0045] By establishing the local analysis area 101 in the to-be-detected layout 100 and automatically performing different types of feature analysis on the target graphic 102 in the local analysis area 101, the process of manually analyzing the layout is replaced, which can effectively improve the efficiency of the local graphic feature analysis of the layout.

[0046] In this embodiment, different types of feature analysis include: geometric feature analysis and environmental feature analysis.

[0047] In this embodiment, the geometric features include: the shape of the target pattern 102 , the characteristic size of the target pattern 102 , and the spacing size between adjacent target patterns 102 .

[0048] In this embodiment, the environmental feature analysis includes: whether the target graphics 102 in the local analysis area 101 are repeated graphics, whether the target graphics 102 are optical proximity correction graphics, and whether auxiliary graphics are inserted in the local analysis area 101.

[0049] Please refer to Figure 4 In this embodiment, the method for analyzing the shape of the target graphic 102 includes: obtaining the corner points P of each of the target graphics 102; when the number of the corner points P of the target graphic 102 is 4, determining that the target graphic 102 is a rectangle.

[0050] It should be noted that, in this embodiment, the corner point P of the target figure 102 is the intersection point between the edge lines in the target figure 102. Moreover, each of the images to be detected in the to-be-detected layout 100 is a Manhattan image, so when the number of the corner points P of the target figure 102 is 4, it can be directly determined that the figure is a rectangle.

[0051] When the number of the corner points P of the target graphic 102 is greater than 4, the target graphic 102 is subjected to a small line segment removal process; after the small line segment removal process is performed, the shape of the target graphic 102 is determined.

[0052] Please refer to Figure 5 In this embodiment, the method for removing small line segments includes: when the difference between adjacent corner points P in the target graphic 102 changes from a first coordinate difference less than a first preset value to a second coordinate difference less than a first preset value PV1, or changes from a second coordinate difference less than a first preset value PV1 to a first coordinate difference less than a first preset value PV1, then connecting the first and last corner points P.

[0053] It should be noted that, if the difference between the first coordinates or the difference between the second coordinates between adjacent corner points P in the target figure 102 is less than the first preset value PV1, the figure can be judged as an optical proximity correction figure. Based on this premise, the small line segment removal process is continued on the target figure 102, and the first preset value PV1 can be set based on experience.

[0054] Please continue to refer to Figure 5 After the small line segment removal process is performed, the method for determining the shape of the target graphic 102 includes: after traversing all adjacent corner points P in the target graphic 102, obtaining the number of corner points P of the target graphic 102; the number of polygons of the target graphic 102 is the same as the number of corner points P.

[0055] The difference between the first coordinates is: the difference between the horizontal coordinates or the difference between the vertical coordinates; the difference between the second coordinates is: the difference between the vertical coordinates or the difference between the horizontal coordinates.

[0056] In this embodiment, the difference between the first coordinates is the difference between the horizontal coordinates, and the difference between the second coordinates is the difference between the vertical coordinates; in other embodiments, the difference between the first coordinates may also be the difference between the vertical coordinates, and the difference between the second coordinates may be the difference between the horizontal coordinates.

[0057] Please refer to Figure 6In this embodiment, the method for analyzing the characteristic size of the target graphic 102 and the spacing size between adjacent target graphics 102 includes: selecting a measurement point O2 in the local analysis area 101; forming a ray L based on the measurement point O2; obtaining the number of intersections between the ray L and all the edges of the target graphics 102 in the local analysis area 101; when the number of intersections is an odd number, it is determined that the measurement point O2 is located inside the target graphic 102; when the number of intersections is an even number, it is determined that the measurement point O2 is located outside the target graphic 102; when it is determined that the measurement point O2 is inside the target graphic 102, a first line segment S along the first direction X or the second direction Y is formed through the measurement point O2 1, until an intersection is generated with the sideline opposite to the target graphic 102, the first direction X is perpendicular to the second direction Y, and the first line segment S1 is perpendicular to the sideline of the target graphic 102 generating the intersection; the length dimension of the first line segment S1 is used as the length characteristic dimension or the width characteristic dimension of the target graphic 102; when it is determined that the measuring point O2 is outside the target graphic 102, a second line segment S2 along the first direction X or the second direction Y is formed through the measuring point O2, until an intersection is generated with the sideline of the adjacent target graphic 102, the second line segment S2 is perpendicular to the sideline of the adjacent target graphic 102 generating the intersection; the length dimension of the second line segment S2 is used as the spacing dimension between adjacent target graphics 102.

[0058] In this embodiment, the method for analyzing whether the target graphics 102 in the local analysis area 101 are repeated graphics includes: obtaining the corner points P of each of the target graphics 102; based on each of the corner points P in the target graphics 102, obtaining the length dimensions of each edge line of the target graphics 102 and the angle between adjacent edge lines, and forming a feature list according to a preset arrangement order; when the feature lists of two target graphics 102 are exactly the same, the two target graphics 102 are judged to be repetitive graphics.

[0059] Please refer to Figure 7 In this embodiment, the method for analyzing whether the target graphic 102 is an optical proximity correction graphic includes: obtaining the corner points P of each of the target graphics 102; when the number of the corner points P of the target graphic 102 is greater than 4, and the difference in the horizontal coordinates or the difference in the vertical left sides between adjacent corner points P is less than a second preset value PV2, then the target graphic 102 is judged to be an optical proximity correction graphic.

[0060] It should be noted that, in the process of optical proximity correction, it is necessary to interrupt the edge lines of the target graphic 102 and then translate the small line segments formed after the interruption. Therefore, the difference in the horizontal coordinates or the difference in the vertical left sides between some adjacent corner points P will be very small. Therefore, the appropriate second preset value PV2 can be set based on experience to determine whether the graphic is an optical proximity correction graphic.

[0061] Please refer to Figure 8 , a method for analyzing whether an auxiliary graphic 103 is inserted into the local analysis area 101 includes: obtaining the corner points P of each of the target graphics 102; when the number of the corner points P of the target graphics 102 is equal to 4, and the difference between the horizontal coordinates or the vertical coordinates of adjacent corner points P is less than a third preset value PV3, it is determined that the auxiliary graphic 103 is inserted into the local analysis area 101.

[0062] It should be noted that, since the inserted auxiliary graphics 103 are sub-resolution graphics, the auxiliary graphics 103 will not be corrected when the layout is subjected to optical proximity correction, and the inserted auxiliary graphics 103 are all thin strips of rectangles. Therefore, when the number of the corner points P of the target graphics 102 is equal to 4, and the difference between the horizontal coordinates or the vertical coordinates of the adjacent corner points P is less than the third preset value PV3, it can be directly determined that the auxiliary graphics 103 are inserted in the local analysis area 101. The third preset value PV3 can be set based on experience.

[0063] Correspondingly, an embodiment of the present invention further provides a storage medium on which computer instructions are stored. When the computer instructions are executed, the steps of any one of the above-mentioned embodiment methods are executed.

[0064] Correspondingly, an embodiment of the present invention further provides a terminal, including a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, and when the processor executes the computer instructions, the steps of any one of the above-mentioned embodiment methods are executed.

[0065] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A method for analyzing local graphic features of a layout, characterized in that: include: Providing a layout to be detected, wherein the layout to be detected has a plurality of graphics to be detected; Acquire a local analysis area in the to-be-detected layout, wherein the to-be-detected pattern located in the local analysis area is a target pattern; Different types of feature analysis are performed on a plurality of the target graphics within the local analysis area, and each type of feature analysis result is output.

2. The method for analyzing local graphic features of a layout as claimed in claim 1, characterized in that: The method for obtaining a local analysis area in the to-be-detected layout includes: obtaining a positioning point; establishing a capture window based on the positioning point; and using the area captured by the capture window as the local analysis area.

3. The method for analyzing local graphic features of a layout as claimed in claim 2, characterized in that: The interception window is a rectangle.

4. The method for analyzing local graphic features of a layout as claimed in claim 3, characterized in that: The method for establishing the interception window based on the positioning point includes: obtaining a first interception size along a first direction; obtaining a second interception size along a second direction, the first direction being perpendicular to the second direction; establishing the interception window based on the first interception size, the second interception size and the positioning point; wherein the positioning point is the center point of the interception window, the first interception size is the spacing size of the positioning point from the side length of the interception window along the first direction, and the second interception size is the spacing size of the positioning point from the side length of the interception window along the second direction.

5. The method for analyzing local graphic features of a layout as claimed in claim 1, characterized in that: The layout to be detected includes: a single-layer layout formed by flattening layouts of different levels, or a multi-layer layout formed by merging layouts of different layers.

6. The method for analyzing local graphic features of a layout as claimed in claim 1, characterized in that: Different types of feature analysis include: geometric feature analysis and environmental feature analysis.

7. The method for analyzing local graphic features of a layout as claimed in claim 6, characterized in that: The geometric features include: the shape of the target pattern, the characteristic size of the target pattern, and the spacing size between adjacent target patterns.

8. The method for analyzing local graphic features of a layout as claimed in claim 6, characterized in that: The environmental feature analysis includes: whether the target graphics in the local analysis area are repeated graphics, whether the target graphics are optical proximity correction graphics, and whether auxiliary graphics are inserted in the local analysis area.

9. The method for analyzing local graphic features of a layout as claimed in claim 7, characterized in that: The method for analyzing the shape of the target graphic includes: obtaining the corner points of each of the target graphics; When the number of the corner points of the target figure is 4, the target figure is judged to be a rectangle; when the number of the corner points of the target figure is greater than 4, the target figure is subjected to small line segment removal processing; after the small line segment removal processing is performed, the shape of the target figure is judged.

10. The method for analyzing local graphic features of a layout as claimed in claim 9, characterized in that: The method for removing small line segments includes: when the difference between adjacent corner points in the target figure changes from a first coordinate difference less than a first preset value to a second coordinate difference less than a first preset value, or changes from a second coordinate difference less than a first preset value to a first coordinate difference less than a first preset value, then connecting the first and last corner points.

11. The method for analyzing local graphic features of a layout as claimed in claim 10, characterized in that: After performing the small line segment removal process, the method for determining the shape of the target graphic includes: after traversing all adjacent corner points in the target graphic, obtaining the number of corner points of the target graphic; the number of polygons of the target graphic is the same as the number of corner points.

12. The method for analyzing local graphic features of a layout as claimed in claim 10, characterized in that: The difference between the first coordinates is: the difference between the horizontal coordinates or the difference between the vertical coordinates; the difference between the second coordinates is: the difference between the vertical coordinates or the difference between the horizontal coordinates.

13. The method for analyzing local graphic features of a layout as claimed in claim 7, characterized in that: The method for analyzing the characteristic size of the target graphic and the spacing size between adjacent target graphics includes: selecting a measurement point in the local analysis area; forming a ray based on the measurement point; obtaining the number of intersections between the ray and all the edge lines of the target graphics in the local analysis area; when the number of intersections is an odd number, judging that the measurement point is inside the target graphic; when the number of intersections is an even number, judging that the measurement point is outside the target graphic; when judging that the measurement point is inside the target graphic, forming a first line segment along a first direction or a second direction through the measurement point until it intersects with the target graphic. The first direction is perpendicular to the second direction, and the first line segment is perpendicular to the sideline of the target graphic where the intersection is generated; the length of the first line segment is used as the length characteristic size or width characteristic size of the target graphic; when it is determined that the measuring point is outside the target graphic, a second line segment along the first direction or the second direction is formed through the measuring point until an intersection is generated with the sideline of the adjacent target graphic, and the second line segment is perpendicular to the sideline of the adjacent target graphic where the intersection is generated; the length of the second line segment is used as the spacing size between adjacent target graphics.

14. The method for analyzing local graphic features of a layout as claimed in claim 8, characterized in that: The method for analyzing whether several target graphics in the local analysis area are repeated graphics includes: obtaining the corner points of each target graphic; based on each corner point in the target graphic, obtaining the length of each edge line of the target graphic and the angle between adjacent edge lines, and forming a feature list according to a preset arrangement order; when the feature lists of two target graphics are exactly the same, the two target graphics are judged to be repetitive graphics.

15. The method for analyzing local graphic features of a layout as claimed in claim 8, characterized in that: The method for analyzing whether the target figure is an optical proximity correction figure includes: obtaining the corner points of each of the target figures; when the number of the corner points of the target figure is greater than 4, and the difference in the horizontal coordinates or the difference in the vertical left sides between adjacent corner points is less than a second preset value, then judging that the target figure is an optical proximity correction figure.

16. The method for analyzing local graphic features of a layout as claimed in claim 8, characterized in that: The method for analyzing whether an auxiliary graphic is inserted in the local analysis area includes: obtaining the corner points of each of the target graphics; when the number of the corner points of the target graphics is equal to 4, and the difference between the horizontal coordinate or the vertical coordinate between adjacent corner points is less than a third preset value, it is determined that the auxiliary graphic is inserted in the local analysis area.

17. A storage medium having computer instructions stored thereon, characterized in that: When the computer instructions are executed, the steps of the method according to any one of claims 1 to 16 are executed.

18. A terminal comprising a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, characterized in that: When the processor runs the computer instructions, the steps of the method according to any one of claims 1 to 16 are performed.

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