Method for manufacturing vibrating element, quartz plate, and vibrating element

Abstract

The invention provides a manufacturing method of a vibration element, a quartz plate and a vibration element, which can reduce deviation of a fracture position when a vibration substrate is broken. A method of manufacturing a resonator element includes: forming a resonator substrate, a frame portion, and a connection portion connecting the resonator substrate and the frame portion by wet etching a quartz plate; and breaking the vibration substrate from a frame portion by breaking the vibration substrate at a connection portion, the frame portion and the connection portion including: forming a cutout portion as a groove or a through-hole in the connection portion along a width direction of the connection portion, the cutout portion includes a first end portion on one side in the width direction and a second end portion on the other side in the width direction, and at least one of the first end portion and the second end portion has a first side on the vibration substrate side and a second side on the frame portion side. And the distance between the first side and the second side is gradually reduced along with the distance away from the center of the notch part in the width direction.

Description

Technical Field

[0001] The present invention relates to a method for manufacturing a vibration element, a quartz plate and a vibration element. Background Art

[0002] Patent document 1 discloses a method for manufacturing a vibration element, which includes the following steps: a step of forming a quartz plate, a frame portion, and an arm portion as a connecting portion connecting the quartz plate and the frame portion by etching a quartz substrate; a step of forming electrodes on the surface of the quartz plate; and a step of mechanically breaking the arm portion to separate the quartz plate. In the method for manufacturing a vibration element disclosed in Patent document 1, a first arm portion extending from the frame portion and a second arm portion narrower in width than the first arm portion are formed in the arm portion, and in the step of separating the quartz plate into pieces, the arm portion is broken from the second arm portion.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2006-186847

[0004] However, in the method for manufacturing a vibration element disclosed in Patent Document 1, the breaking position of the second arm portion is likely to vary, and the shape of the remaining portion of the arm portion remaining on the quartz plate after breaking varies. Summary of the invention

[0005] One embodiment of a method for manufacturing a vibration element of the present invention includes:

[0006] forming a vibration substrate, a frame portion, and a connection portion connecting the vibration substrate and the frame portion by wet etching a quartz plate; and

[0007] The vibration substrate is separated from the frame by breaking the vibration substrate at the connecting portion,

[0008] The forming of the vibration substrate, the frame portion, and the connection portion includes: forming a notch portion as a groove or a through hole in the connection portion along the width direction of the connection portion;

[0009] The notch portion includes a first end portion on one side of the width direction and a second end portion on the other side of the width direction.

[0010] At least one of the first end portion and the second end portion has a first side close to the vibration substrate and a second side close to the frame portion.

[0011] The distance between the first side and the second side gradually decreases as it moves away from the center of the notch in the width direction.

[0012] One embodiment of the quartz plate of the present invention includes:

[0013] Vibrating substrate;

[0014] a frame; and

[0015] a connecting portion connecting the vibration substrate and the frame portion,

[0016] The connecting portion has a notch portion as a groove or a through hole formed along the width direction of the connecting portion.

[0017] The notch portion includes a first end portion on one side of the width direction and a second end portion on the other side of the width direction.

[0018] At least one of the first end portion and the second end portion has a first side close to the vibration substrate and a second side close to the frame portion.

[0019] The distance between the first side and the second side gradually decreases as it moves away from the center of the notch in the width direction.

[0020] One embodiment of the vibration element of the present invention includes:

[0021] A quartz substrate, wherein the crystal axes of quartz are the X-axis, the Y-axis and the Z-axis, the Y-axis and the Z-axis are rotated counterclockwise around the X-axis to form the Y′-axis and the Z′-axis, and the ±Y′ planes including the Z′-axis and the X-axis are the front and back main planes; and

[0022] a recessed portion provided on a side included in an outer edge of one main surface of the quartz substrate,

[0023] The recess includes:

[0024] a first outer edge, which is along the edge;

[0025] a second outer edge connected to one end of the first outer edge and inclined relative to the first outer edge; and

[0026] A third arc-shaped outer edge is connected to the other end of the first outer edge.

[0027] One embodiment of the vibration element of the present invention includes:

[0028] A quartz substrate, wherein the crystal axes of quartz are the X-axis, the Y-axis and the Z-axis, the Y-axis and the Z-axis are rotated counterclockwise around the X-axis to form the Y′-axis and the Z′-axis, and the ±Y′ planes including the Z′-axis and the X-axis are the front and back main planes; and

[0029] a protrusion provided at an end of the quartz substrate,

[0030] The protrusion has a first groove formed on one main surface of the quartz substrate,

[0031] The first groove includes a first surface and a second surface inclined relative to the one main surface,

[0032] A corner formed by the first surface and the second surface forms a bottom of the first groove. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a plan view schematically showing a vibration element manufactured by the vibration element manufacturing method according to the first embodiment.

[0034] Figure 2 This is a diagram for explaining an AT-cut quartz substrate.

[0035] Figure 3 This is a flowchart showing an example of the method for manufacturing the vibration element according to the first embodiment.

[0036] Figure 4 The diagram schematically shows the manufacturing process of the vibration element.

[0037] Figure 5 The diagram schematically shows the manufacturing process of the vibration element.

[0038] Figure 6 The diagram schematically shows the manufacturing process of the vibration element.

[0039] Figure 7 The diagram schematically shows the manufacturing process of the vibration element.

[0040] Figure 8 The diagram schematically shows the manufacturing process of the vibration element.

[0041] Fig. 9 1 is a top view schematically showing the first notch portion.

[0042] Fig.10 is a graph showing the miniaturization index Wi and the miniaturization index Li.

[0043] Fig.11 : is a graph showing the relationship between the angle θ1 and the combined miniaturization index Wi×Li.

[0044] Fig.12 Yes Fig.11 The graphs shown are enlarged graphs of the peak positions.

[0045] Fig.13 2 is a cross-sectional view schematically showing the first notch portion.

[0046] Fig.14 is a graph showing the miniaturization index Di and the miniaturization index Wi.

[0047] Fig.15 4 is a graph showing the relationship between the angle θ4′ and the combined miniaturization index Di×Wi.

[0048] Fig.16 Yes Fig.15 The graphs shown are enlarged graphs of the peak positions.

[0049] Fig.17 is a scanning electron microscope image of the first notch.

[0050] Fig.18 It is a cross-sectional view schematically showing the manufacturing process of the vibration element.

[0051] Fig.19 It is a cross-sectional view schematically showing the manufacturing process of the vibration element.

[0052] Fig. 20 It is a cross-sectional view schematically showing a modified example of the manufacturing process of the vibration element.

[0053] Fig.21 It is a cross-sectional view schematically showing the manufacturing process of the vibration element.

[0054] Fig. 22 It is a plan view schematically showing a vibration element according to the fifth embodiment.

[0055] Fig.23 is a top view schematically showing the first protrusion.

[0056] Fig.24 is a cross-sectional view schematically showing the first protrusion.

[0057] Fig.25 It is a cross-sectional view schematically showing a first protrusion of a vibration element according to the sixth embodiment.

[0058] Fig.26 It is a cross-sectional view schematically showing a first protrusion of a vibration element according to the seventh embodiment.

[0059] Description of symbols

[0060] 2 quartz plate; 2a main surface; 2b main surface; 3a first side; 3b second side; 3c third side; 3d fourth side; 3e fifth side; 4a first inclined surface; 4b second inclined surface; 5 corner; 5a corner; 5b corner; 6 first recess; 6a first outer edge; 6b second outer edge; 6c third outer edge; 6d side; 7 second recess; 8a first surface; 8b second surface; 8c third surface; 8d fourth surface; 8e fifth surface; 9 corner; 100 vibration element; 110 vibration substrate; 111 quartz substrate; 112 side; 120 first excitation electrode; 122 first lead electrode Pole; 124 first electrode disk; 130 second excitation electrode; 132 second extraction electrode; 134 second electrode disk; 200 frame; 300 first connecting portion; 302 side wall; 304 side wall; 310; first notch portion; 312 first end portion; 314 second end portion; 316 first groove; 318 second groove; 320 third notch portion; 400 second connecting portion; 410 second notch portion; 500 vibration element; 510 first protrusion; 512 first groove; 513 inclined portion; 514 second groove; 520 second protrusion; 600 vibration element; 700 vibration element. DETAILED DESCRIPTION

[0061] Hereinafter, preferred embodiments of the present invention will be described in detail using the accompanying drawings. In addition, the embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, the structures described below may not all be essential components of the present invention.

[0062] 1. First Implementation

[0063] 1.1. Vibration element

[0064] First, a vibration element manufactured by the vibration element manufacturing method according to the first embodiment will be described with reference to the drawings. Figure 1 1 is a plan view schematically showing an example of the vibration element 100 manufactured by the method for manufacturing the vibration element according to the first embodiment.

[0065] like Figure 1 As shown, the vibration element 100 includes a vibration substrate 110 , a first excitation electrode 120 , and a second excitation electrode 130 .

[0066] The vibration substrate 110 is composed of an AT-cut quartz substrate. That is, the vibration substrate 110 is a quartz plate in which the crystal axes of quartz are the X-axis, the Y-axis, and the Z-axis, the Y-axis and the Z-axis are rotated counterclockwise around the X-axis to form the Y′-axis and the Z′-axis, and the ±Y′ planes including the Z′-axis and the X-axis are the front and back principal planes.

[0067] Figure 2 1 is a diagram for explaining an AT-cut quartz substrate 111. Piezoelectric materials such as quartz are generally trigonal and have Figure 2 The crystal axes (X, Y, Z) shown. The X-axis is the electrical axis, the Y-axis is the mechanical axis, and the Z-axis is the optical axis. The quartz substrate 111 is a flat plate cut from a piezoelectric material along a plane after the XZ plane is rotated around the X-axis by an angle θ, a so-called rotated Y-cut quartz substrate. In addition, the Y-axis and the Z-axis are also rotated around the X-axis by θ, and serve as the Y′ axis and the Z′ axis, respectively. The quartz substrate 111 is a substrate with a plane including the X-axis and the Z′ axis as the main surface and a direction along the Y′ axis as the thickness. Here, when θ=35°15′, the quartz substrate 111 becomes an AT-cut quartz substrate. Therefore, the XZ′ plane of the quartz substrate 111, which is orthogonal to the Y′ axis, becomes the main surface, and can vibrate with thickness shear vibration as the main vibration.

[0068] The vibration substrate 110 has a rectangular shape with the Y′ direction as the thickness direction, the X direction as the long side when viewed in a plan view from the Y′ direction, and the Z′ direction as the short side.

[0069] The first excitation electrode 120 is provided on the main surface of the vibration substrate 110 at the +Y′ side. The second excitation electrode 130 is provided on the main surface of the vibration substrate 110 at the −Y′ side. The first excitation electrode 120 and the second excitation electrode 130 overlap when viewed from the Y′ direction. The first excitation electrode 120 and the second excitation electrode 130 are formed by laminating a metal layer such as gold or silver on a base layer such as chromium or nickel, for example. The first excitation electrode 120 and the second excitation electrode 130 are electrodes for applying a voltage to the vibration substrate 110.

[0070] The first excitation electrode 120 is connected to the first electrode pad 124 via the first extraction electrode 122 . The second excitation electrode 130 is connected to the second electrode pad 134 via the second extraction electrode 132 .

[0071] In the vibration element 100, the vibration substrate 110 can be vibrated mainly in the thickness shear vibration mode by applying a voltage to the vibration substrate 110 using the first excitation electrode 120 and the second excitation electrode 130. In addition, although not shown in the figure, the vibration element 100 may be a mesa-type vibration element in which a peripheral portion and a vibration portion surrounded by the peripheral portion and thicker than the peripheral portion are formed on the vibration substrate 110.

[0072] 1.2. Manufacturing method

[0073] Next, a method for manufacturing the vibration element according to the first embodiment will be described with reference to the drawings. Figure 3 This is a flowchart showing an example of the method for manufacturing the vibration element according to the first embodiment. Figures 4 to 8 2 is a diagram schematically showing a manufacturing process of the vibration element 100 .

[0074] (1) Step S2 of wet etching the quartz plate

[0075] First, if Figure 4 As shown, by wet etching the quartz plate 2 , a plurality of vibration substrates 110 , the frame 200 , and the first and second connection portions 300 and 400 that connect the vibration substrates 110 and the frame 200 are formed.

[0076] Specifically, first, a quartz plate 2 is prepared. Then, the quartz plate 2 is patterned using photolithography and etching techniques. For example, a metal thin film composed of Cr, Au, etc. is formed on the surface of the quartz plate 2 as a corrosion-resistant film, and the metal thin film is patterned by photolithography to form a mask. Next, the quartz plate 2 formed with the mask is wet-etched using an etching solution such as hydrofluoric acid or ammonium fluoride. Thus, a quartz plate 2 including a plurality of vibration substrates 110, a frame 200, and a first connecting portion 300 and a second connecting portion 400 connecting each vibration substrate 110 to the frame 200 can be formed. In the quartz plate 2, the plurality of vibration substrates 110 are connected to the frame 200 by the first connecting portion 300 and the second connecting portion 400, respectively, and the plurality of vibration substrates 110 and the frame 200 are integrally formed.

[0077] When viewed from the Y′ direction, the first connection portion 300 is connected to the −Z′ side of one side 112 of the vibration substrate 110 along the Z′ direction, and the second connection portion 400 is connected to the +Z′ side of the side 112 of the vibration substrate 110. When viewed from the Y′ direction, the vibration substrate 110 is a rectangle having four sides, and the side 112 is the −X side of the two short sides along the Z′ direction.

[0078] In step S2, Figure 5 As shown, a first notch portion 310 is formed in the first connection portion 300 along the width direction of the first connection portion 300, and a second notch portion 410 is formed in the second connection portion 400 along the width direction of the second connection portion 400. The width direction of the first connection portion 300 and the width direction of the second connection portion 400 are directions along the Z′ axis. The first notch portion 310 and the second notch portion 410 are grooves formed in the main surface 2a of the quartz plate 2. The first notch portion 310 is formed to reduce the deviation of the fracture position in the first connection portion 300 when the vibration substrate 110 is broken as described later. The second notch portion 410 is formed to reduce the deviation of the fracture position in the second connection portion 400 when the vibration substrate 110 is broken as described later.

[0079] Although not shown, similarly, a third notch is formed in the first connecting portion 300 along the width direction of the first connecting portion 300 , and a fourth notch is formed in the second connecting portion 400 along the width direction of the second connecting portion 400 .

[0080] The first notch 310, the second notch 410, the third notch, and the fourth notch are formed simultaneously when the vibration substrate 110, the frame 200, the first connection portion 300, and the second connection portion 400 are formed by wet etching, for example. Since the first notch 310 has a small area on the main surface of the quartz plate 2, it is half-etched to form a groove when the vibration substrate 110 and the like are wet-etched. The second notch 410, the third notch, and the fourth notch are also half-etched to form a groove.

[0081] In step S2 , the shape of the first notch 310 can be controlled by adjusting the shape of the mask, the type of etching solution, etching time, etching speed, etc. The same applies to the second notch 410 , the third notch, and the fourth notch.

[0082] In addition, the process of forming the vibration substrate 110 and the like by wet etching and the process of forming the first notch 310, the second notch 410, the third notch and the fourth notch by wet etching may be separated. For example, after the outer shape of the vibration substrate 110 and the like is formed by wet etching, the first notch 310, the second notch 410, the third notch and the fourth notch may be formed by wet etching.

[0083] Figure 6 FIG. 3 is a top view schematically showing the first notch portion 310 . Figure 7 3 is a cross-sectional view schematically showing the first notch portion 310. Figure 7 is along Figure 6 A cross-sectional view taken along line VII-VII.

[0084] like Figure 6 As shown, the first notch portion 310 includes a first end portion 312 on one side of the first connecting portion 300 in the width direction and a second end portion 314 on the other side of the first connecting portion 300 in the width direction. Figure 6 In the example shown, the first end 312 is the end on the +Z′ side of the first connection portion 300, and the second end 314 is the end on the −Z′ side of the first connection portion 300. Although not shown in the figure, the first end 312 may be the end on the −Z′ side of the first connection portion 300, and the second end 314 may be the end on the +Z′ side of the first connection portion 300.

[0085] The first end portion 312 has a first side 3a on the vibration substrate 110 side and a second side 3b on the frame portion 200 side. Figure 6 In the example shown, the first side 3a is the side on the +X side of the first end 312, and the second side 3b is the side on the -X side of the first end 312. The first side 3a and the second side 3b are sides that show the outline of the first end 312 on the main surface 2a.

[0086] The distance between the first side 3a and the second side 3b in the X direction gradually decreases as the distance from the center O of the first notch 310 in the width direction of the first connecting portion 300 increases. Figure 6 In the example shown, the distance between the first side 3a and the second side 3b gradually decreases as it approaches from the -Z' side to the +Z' side. The distance between the first side 3a and the second side 3b in the X direction can also be said to be the width W of the first notch 310 at the first end 312. That is, the first end 312 has a tapered shape in which the width W gradually narrows as it approaches from the -Z' side to the +Z' side. The end of the first end 312 has, for example, a rounded corner. In addition, the end of the first end 312 can also be pointed.

[0087] like Figure 6 As shown, when viewed from the Y′ direction, the first notch portion 310 has a first side 3a and a second side 3b constituting a first end portion 312, a third side 3c connected to the first side 3a, a fourth side 3d connected to the second side 3b, and a fifth side 3e constituting a second end portion 314. The third side 3c is a side of the first notch portion 310 on the vibration substrate 110 side, and the fourth side 3d is a side of the first notch portion 310 on the frame portion 200 side. That is, the third side 3c is a side on the +X side of the first notch portion 310, and the fourth side 3d is a side on the −X side of the first notch portion 310. In the portion of the first notch portion 310 constituted by the third side 3c and the fourth side 3d, the width W of the first notch portion 310 is, for example, constant. The third side 3c and the fourth side 3d are, for example, parallel.

[0088] Here, when the angle between the first side 3a and the second side 3b is set to θ1, by satisfying 22°≤θ1≤76°, the first notch 310 can be miniaturized in the width direction and the length direction. Furthermore, by satisfying 27°≤θ1≤65°, the first notch 310 can be further miniaturized in the width direction and the length direction. Furthermore, by satisfying 35°≤θ1≤52°, the first notch 310 can be further miniaturized in the width direction and the length direction. The reason for this is explained in "1.3.1. Miniaturization of the first notch (W, L)" described later.

[0089] When the angle between the first side 3a and the third side 3c is set to θ2, θ2=180°-(θ1 / 2). Therefore, by satisfying 142°≤θ2≤169°, the first notch 310 can be miniaturized in the width direction and the length direction. Furthermore, by satisfying 147.5°≤θ2≤166.5°, the first notch 310 can be further miniaturized in the width direction and the length direction. Furthermore, by satisfying 154°≤θ2≤162.5°, the first notch 310 can be further miniaturized in the width direction and the length direction.

[0090] Similarly, when the angle between the second side 3b and the fourth side 3d is set to θ3, θ3=180°-(θ1 / 2). Therefore, by satisfying 142°≤θ3≤169°, the first notch 310 can be miniaturized in the width direction and the length direction. Furthermore, by satisfying 147.5°≤θ3≤166.5°, the first notch 310 can be further miniaturized in the width direction and the length direction. Furthermore, by satisfying 154°≤θ3≤162.5°, the first notch 310 can be further miniaturized in the width direction and the length direction.

[0091] The second end portion 314 has, for example, an arc-shaped fifth side 3e. One end of the fifth side 3e is connected to the third side 3c, and the other end of the fifth side 3e is connected to the fourth side 3d. In addition, in the example shown in the figure, the second end portion 314 has a shape different from that of the first end portion 312, but the second end portion 314 and the first end portion 312 may also have the same shape. That is, the second end portion 314 may also have a shape such that it has an edge on the vibration substrate 110 side and an edge on the frame portion 200 side, and the distance between the two edges gradually decreases as it moves away from the center O of the first notch portion 310 in the width direction of the first connecting portion 300.

[0092] like Figure 7 As shown, the first notch 310 is composed of a plurality of inclined surfaces with different inclination angles relative to the main surface 2a. The first notch 310 has a first inclined surface 4a and a second inclined surface 4b that intersect each other. The corner 5 formed by the first inclined surface 4a and the second inclined surface 4b forms the bottom of the groove. Figure 6 As shown in FIG. 1 , the corner portion 5 extends along the width direction of the first connecting portion 300, that is, the Z′ direction. Figure 7 In the example shown, the first notch portion 310 is composed of four inclined surfaces, but the number of inclined surfaces constituting the first notch portion 310 is not particularly limited, and the first notch portion 310 may be composed of five or more inclined surfaces.

[0093] Here, when the angle between the first inclined surface 4a and the second inclined surface 4b is set to θ4, by satisfying 30°≤θ4≤121°, the first notch portion 310 can be miniaturized in the width direction and the depth direction. Furthermore, by satisfying 35°≤θ4≤112°, the first notch portion 310 can be further miniaturized in the width direction and the depth direction. Furthermore, by satisfying 43°≤θ4≤100°, the first notch portion 310 can be further miniaturized in the width direction and the depth direction. The reason for this is explained in "1.3.2. Miniaturization of the first notch portion (W, D)" described later.

[0094] The third notch 320 has the same shape as the first notch 310. That is, the third notch 320 has an end on the +Z′ side of the first connection portion 300 and an end on the −Z′ side of the first connection portion 300, and the distance between the two sides constituting the end on the +Z′ side gradually decreases as it moves away from the center O of the first notch 310 in the width direction of the first connection portion 300. In addition, the third notch 320 is composed of a plurality of inclined surfaces having different inclination angles relative to the main surface 2a, and has two inclined surfaces forming the bottom of the groove.

[0095] The second notch portion 410 formed in the second connection portion 400 has the same shape as the first notch portion 310 , and the fourth notch portion has the same shape as the third notch portion 320 .

[0096] As described above, by wet etching the quartz plate 2, the following quartz plate 2 can be manufactured: the quartz plate 2 includes a plurality of vibration substrates 110, a frame portion 200, and a first connecting portion 300 and a second connecting portion 400 connecting each vibration substrate 110 to the frame portion 200, a first notch portion 310 and a third notch portion 320 are formed in the first connecting portion 300, and a second notch portion 410 and a fourth notch portion are formed in the second connecting portion 400.

[0097] (2) Step S4 of forming electrodes

[0098] Next, an electrode material is formed on the main surface 2a and the main surface 2b of the vibration substrate 110, and the formed electrode material is patterned by photolithography. Thus, the first excitation electrode 120, the first extraction electrode 122, the first electrode pad 124, the second excitation electrode 130, the second extraction electrode 132, and the second electrode pad 134 can be formed on the vibration substrate 110.

[0099] (3) Step S6 of Separating the Vibration Substrate into Individual Pieces

[0100] Next, the vibration substrate 110 is broken at the first connection portion 300 and the second connection portion 400, thereby disconnecting the vibration substrate 110 from the frame portion 200. Specifically, the suction nozzle is pressed against the vibration substrate 110. As a result, the first connection portion 300 and the second connection portion 400 are broken, and the vibration substrate 110 can be disconnected from the frame portion 200. The vibration substrate 110 disconnected from the frame portion 200 is supported by the suction nozzle.

[0101] Here, a first notch portion 310 is formed in the first connection portion 300, and a first end portion 312 of the first notch portion 310 has a shape in which the distance between the first side 3a and the second side 3b gradually decreases as the distance from the center O of the first notch portion 310 in the width direction of the first connection portion 300 increases. Therefore, when the vibration substrate 110 is broken, stress is concentrated at the end of the first end portion 312. That is, at the end of the first notch portion 310 in the +Z′ direction, the stress is concentrated at one point at the end of the first end portion 312. Therefore, as Figure 8 As shown, in the first connection part 300, the fracture is performed at or near the imaginary line A passing through the distal end of the first end part 312 and parallel to the Z' axis. Therefore, the deviation of the fracture position in the first connection part 300 can be reduced.

[0102] In addition, when the vibration substrate 110 is broken, stress is concentrated on the corner 5 formed by the first inclined surface 4a and the second inclined surface 4b at the bottom of the groove forming the first notch portion 310. Therefore, it is possible to reduce the deviation of the fracture position in the first connection portion 300. In addition, the third notch portion 320 also has the same shape as the first notch portion 310, so stress is concentrated on the same portion as the first notch portion 310. Therefore, it is possible to reduce the deviation of the fracture position in the first connection portion 300.

[0103] In this way, in the first connection portion 300 , by forming the first notch portion 310 and the third notch portion 320 , it is possible to reduce the variation in the breaking position.

[0104] The second connection portion 400 is also formed with the second notch portion 410 and the fourth notch portion similarly to the first connection portion 300 , and therefore, it is possible to reduce the variation in the breaking position.

[0105] Through the above steps, the vibration element 100 can be manufactured.

[0106] 1.3. Calculation

[0107] 1.3.1. Miniaturization of the first notch (W, L)

[0108] Fig. 9 FIG. 3 is a schematic top view of the first notch portion 310. Fig. 9 As shown, in the Z' direction, the distance between the intersection point P of the extension line of the first side 3a and the extension line of the second side 3b and the end of the first side 3a on the -Z' side is set to L1. In addition, in the X direction, the distance between the third side 3c and the fourth side 3d is set to W1. The distance L1 corresponds to the length of the first end 312, and the distance W1 corresponds to the width W of the first notch 310.

[0109] First, the distance L1 is fixed, the relationship between the angle θ1 and the distance W1 is obtained, and the miniaturization index Wi is obtained as an index representing the miniaturization effect in the width direction, that is, the X direction, of the first notch portion 310. In addition, the distance W1 is fixed, the relationship between the angle θ1 and the distance L1 is obtained, and the miniaturization index Li is obtained as an index representing the miniaturization effect in the length direction, that is, the Z′ direction, of the first notch portion 310.

[0110] Here, the miniaturization index Wi is set to Wi=(Wmax-W1) / Wmax. In addition, Wmax is the maximum distance W1 that the first notch portion 310 can take. The maximum distance Wmax can be set to an arbitrary value. The larger the miniaturization index Wi is, the greater the miniaturization effect is. In addition, the miniaturization index Li is represented by Li=(Lmax-L1) / Lmax. In addition, Lmax is the maximum distance L1 that the first notch portion 310 can take. The maximum distance Lmax can be set to an arbitrary value. The larger the miniaturization index Li is, the greater the miniaturization effect is.

[0111] Fig.10 is a graph showing the miniaturization index Wi and the miniaturization index Li. Fig.10 In the graph shown, the horizontal axis represents the angle θ1 and the vertical axis represents the miniaturization index.

[0112] Next, the miniaturization index Wi is multiplied by the miniaturization index Li, and correction is performed so that the maximum value becomes 1.0. This value is defined as the combined miniaturization index Wi×Li, and the relationship with the angle θ1 is obtained. The larger the combined miniaturization index Wi×Li is, the more miniaturization of the first notch 310 can be achieved.

[0113] Fig.11 : is a graph showing the relationship between the angle θ1 and the combined miniaturization index Wi×Li. Fig.11 The graph shown shows the relationship between the angle θ1 and the combined miniaturization index Wi×Li, with the horizontal axis being the angle θ1 and the vertical axis being the combined miniaturization index Wi×Li. Fig.12 Yes Fig.11 The graphs shown are enlarged graphs of the peak positions.

[0114] like Fig.12 As shown, it can be seen that when 22°≤θ1≤76°, the combined miniaturization index Wi×Li is 0.90 or more, and the first notch portion 310 can be miniaturized in the width direction and the length direction. In addition, it can be seen that when 27°≤θ1≤65°, the combined miniaturization index Wi×Li is 0.95 or more, and the first notch portion 310 can be further miniaturized in the width direction and the length direction. In addition, it can be seen that when 35°≤θ1≤52°, the combined miniaturization index Wi×Li is 0.99 or more, and the first notch portion 310 can be further miniaturized in the width direction and the length direction.

[0115] 1.3.2. Miniaturization of the first notch (W, D)

[0116] Fig.13 3 is a cross-sectional view schematically showing the first notch portion 310. Fig.13 As shown, in the X direction, the distance between the third side 3c and the fourth side 3d is set to W1, the height of the isosceles triangle with the straight line connecting the third side 3c and the fourth side 3d as the base is set to D1, and the angle of the vertex is set to θ4′. Fig.13 In FIG. 3 , an isosceles triangle having a base W1 and a height D1 is indicated by a dotted line. The height D1 corresponds to the depth D of the first notch 310 , and the angle θ4′ corresponds to the angle θ4 between the first inclined surface 4a and the second inclined surface 4b.

[0117] First, the distance W1 is fixed, the relationship between the angle θ4′ and the height D1 is obtained, and the miniaturization index Di is obtained as an index representing the miniaturization effect in the depth direction, i.e., the Y′ direction, of the first notch 310. In addition, the height D1 is fixed, the relationship between the angle θ1 and the distance W1 is obtained, and the miniaturization index Wi is obtained as an index representing the miniaturization effect in the width direction, i.e., the X direction, of the first notch 310.

[0118] Here, the miniaturization index Di is represented by Di=(Dmax-D1) / Dmax. In addition, Dmax is the maximum depth that the first notch portion 310 can take. The maximum depth Dmax can be set to an arbitrary value. The larger the miniaturization index Di, the greater the miniaturization effect. The miniaturization index Wi is represented by Wi=(Wmax-W1) / Wmax, and the larger the miniaturization index Wi, the greater the miniaturization effect.

[0119] Fig.14 is a graph showing the miniaturization index Di and the miniaturization index Wi. Fig.14 In the graph shown, the horizontal axis represents the angle θ4′, and the vertical axis represents the miniaturization index.

[0120] Next, the miniaturization index Di is multiplied by the miniaturization index Wi, and the correction is performed so that the maximum value becomes 1.0. This value is set as the combined miniaturization index Di×Wi, and the relationship with the angle θ4′ is obtained. The larger the combined miniaturization index Di×Wi is, the more miniaturization of the first notch 310 can be achieved.

[0121] Fig.15 4 is a graph showing the relationship between the angle θ4′ and the combined miniaturization index Di×Wi. Fig.15 The graph shown shows the relationship between the angle θ4′ and the combined miniaturization index Di×Wi, with the horizontal axis being the angle θ4′ and the vertical axis being the combined miniaturization index Di×Wi. Fig.16 Yes Fig.15 The graphs shown are enlarged graphs of the peak positions.

[0122] like Fig.16 As shown, it can be seen that when 30°≤θ4′≤121°, the combined miniaturization index Di×Wi is 0.85 or more, and the first notch portion 310 can be miniaturized in the depth direction and the width direction. In addition, it can be seen that when 35°≤θ4′≤112°, the combined miniaturization index Di×Wi is 0.90 or more, and the first notch portion 310 can be further miniaturized in the depth direction and the width direction. In addition, it can be seen that when 43°≤θ4′≤100°, the combined miniaturization index Di×Wi is 0.95 or more, and the first notch portion 310 can be further miniaturized in the depth direction and the width direction.

[0123] 1.4. Effect

[0124] The manufacturing method of the vibration element of the first embodiment includes: step S2 of forming the vibration substrate 110, the frame 200, the first connection part 300 and the second connection part 400 connecting the vibration substrate 110 and the frame 200 by wet etching the quartz plate 2; and step S6 of breaking the vibration substrate 110 at the first connection part 300 and the second connection part 400 to separate the vibration substrate 110 from the frame 200. In addition, step S2 includes the following step: forming a first notch part 310 as a groove in the first connection part 300 along the width direction of the first connection part 300. In addition, the first notch part 310 includes a first end part 312 on one side of the first connection part 300 in the width direction and a second end part 314 on the other side of the first connection part 300 in the width direction. In addition, at least one of the first end 312 and the second end 314 has a first side 3a on the vibration substrate 110 side and a second side 3b on the frame portion 200 side, and the distance between the first side 3a and the second side 3b gradually decreases as it moves away from the center O of the first notch portion 310 in the width direction of the first connecting portion 300.

[0125] Thus, the first notch portion 310 has the first end portion 312 in which the distance between the first side 3a and the second side 3b gradually decreases as the distance from the center O of the first notch portion 310 in the width direction of the first connecting portion 300 increases. Therefore, when the vibration substrate 110 is broken, stress is concentrated on the tip of the first end portion 312. Therefore, in the manufacturing method of the vibration element of the first embodiment, the deviation of the fracture position can be reduced, and the deviation of the shape of the residual portion of the first connecting portion 300 remaining in the vibration element 100 after breaking can be reduced.

[0126] In the manufacturing method of the vibration element of the first embodiment, when the angle between the first side 3a and the second side 3b is set to θ1, 22°≤θ1≤76° is satisfied. Therefore, in the manufacturing method of the vibration element of the first embodiment, the first notch portion 310 can be miniaturized in the width direction and the length direction. Therefore, in the manufacturing method of the vibration element of the first embodiment, even when a small vibration element is manufactured, the deviation of the fracture position can be reduced.

[0127] The manufacturing method of the vibration element of the first embodiment satisfies 27°≤θ1≤65°. Therefore, in the manufacturing method of the vibration element of the first embodiment, the first notch portion 310 can be further miniaturized in the width direction and the length direction. Therefore, in the manufacturing method of the vibration element of the first embodiment, even when manufacturing a further miniaturized vibration element, the deviation of the fracture position can be reduced.

[0128] The manufacturing method of the vibration element of the first embodiment satisfies 35°≤θ1≤52°. Therefore, in the manufacturing method of the vibration element of the first embodiment, the first notch portion 310 can be further miniaturized in the width direction and the length direction. Therefore, in the manufacturing method of the vibration element of the first embodiment, even when manufacturing a further miniaturized vibration element, the deviation of the fracture position can be reduced.

[0129] In the manufacturing method of the vibration element of the first embodiment, the first notch portion 310 has a third side 3c connected to the first side 3a and a fourth side 3d connected to the second side 3b, and when the angle between the third side 3c and the first side 3a is set to θ2, 142°≤θ2≤169° is satisfied, and when the angle between the fourth side 3d and the second side 3b is set to θ3, 142°≤θ3≤169° is satisfied. When the angle θ2 and the angle θ3 satisfy 142°≤θ2≤169° and 142°≤θ3≤169°, the angle θ1 satisfies 22°≤θ1≤76°. Therefore, in the manufacturing method of the vibration element of the first embodiment, the first notch portion 310 can be miniaturized in the width direction and the length direction.

[0130] In the method for manufacturing the vibration element of the first embodiment, the first notch portion 310 is a groove. Therefore, the possibility of the vibration element 100 falling off from the frame portion 200 can be reduced during the manufacturing process.

[0131] In the manufacturing method of the vibration element of the first embodiment, the first notch portion 310 includes two inclined surfaces that intersect each other, namely, a first inclined surface 4a and a second inclined surface 4b, and the corner 5 formed by the first inclined surface 4a and the second inclined surface 4b forms the bottom of the groove. In addition, when the angle between the first inclined surface 4a and the second inclined surface 4b is set to θ4, 30°≤θ4≤121° is satisfied. Therefore, in the manufacturing method of the vibration element of the first embodiment, the first notch portion 310 can be miniaturized in the depth direction and the width direction. Therefore, in the manufacturing method of the vibration element of the first embodiment, even when a small vibration element using a thin vibration substrate 110 is manufactured, the deviation of the fracture position can be reduced.

[0132] In the manufacturing method of the vibration element of the first embodiment, 35°≤θ4≤112° is satisfied. Therefore, in the manufacturing method of the vibration element of the first embodiment, the first notch portion 310 can be further miniaturized in the depth direction and the width direction. Therefore, in the manufacturing method of the vibration element of the first embodiment, even when a small vibration element using a thinner vibration substrate 110 is manufactured, the deviation of the fracture position can be reduced.

[0133] In the manufacturing method of the vibration element of the first embodiment, 43°≤θ4≤100° is satisfied. Therefore, in the manufacturing method of the vibration element of the first embodiment, the first notch portion 310 can be further miniaturized in the depth direction and the width direction. Therefore, in the manufacturing method of the vibration element of the first embodiment, even when a small vibration element using a further thinner vibration substrate 110 is manufactured, the deviation of the fracture position can be reduced.

[0134] In the manufacturing method of the vibration element of the first embodiment, the quartz plate 2 is a quartz plate in which the crystal axes of the quartz are the X-axis, the Y-axis and the Z-axis, the Y-axis and the Z-axis are rotated counterclockwise around the X-axis to form the Y′-axis and the Z′-axis, and the ±Y′ planes including the Z′-axis and the X-axis are the front and back principal planes. In addition, the process of forming the vibration substrate 110, the frame 200, the first connecting part 300 and the second connecting part 400 includes the process of forming the first connecting part 300 connected to the -Z′ side of one side of the vibration substrate 110 along the Z′ direction and the second connecting part 400 connected to the +Z′ side of the one side as connecting parts, and the distance between the first side 3a and the second side 3b gradually decreases as it moves from the -Z′ side to the +Z′ side. In this way, in the manufacturing method of the vibration element of the first embodiment, even if the quartz plate 2 is an AT-cut quartz substrate, the deviation of the fracture position can be reduced.

[0135] The quartz plate 2 includes a vibration substrate 110, a frame 200, a first connection portion 300 and a second connection portion 400 that connect the vibration substrate 110 and the frame 200. In addition, a first notch portion 310 is formed in the first connection portion 300 along the width direction of the first connection portion 300 as a groove, and the first notch portion 310 includes a first end portion 312 on one side of the width direction of the first connection portion 300 and a second end portion 314 on the other side of the width direction of the first connection portion 300. In addition, at least one of the first end portion 312 and the second end portion 314 includes a first side 3a on the vibration substrate 110 side and a second side 3b on the frame 200 side, and the distance between the first side 3a and the second side 3b gradually decreases as it moves away from the center O of the first notch portion 310 in the width direction of the first connection portion 300.

[0136] Thus, the first notch portion 310 has the first end portion 312 in which the distance between the first side 3a and the second side 3b gradually decreases as the distance from the center O of the first notch portion 310 in the width direction of the first connection portion 300 increases. Therefore, when the vibration substrate 110 is broken, stress is concentrated on the tip of the first end portion 312. Therefore, in the quartz plate 2, the deviation of the fracture position can be reduced, and the deviation of the shape of the remaining portion of the first connection portion 300 remaining in the vibration element 100 after breaking can be reduced.

[0137] Fig.17 is a scanning electron microscope image of the first notch portion 310. Fig.17 As shown, by wet etching the quartz plate 2 , a first notch portion having an end portion where the distance between the first side 3 a and the second side 3 b gradually decreases as the distance increases away from the center O of the first notch portion 310 in the width direction of the first connecting portion 300 .

[0138] 2. Second Implementation

[0139] Next, a method for manufacturing a vibration element according to a second embodiment will be described with reference to the drawings. Fig.18 2 is a cross-sectional view schematically showing a manufacturing process of the vibration element 100. Hereinafter, in the manufacturing method of the vibration element of the second embodiment, detailed description of the points that are the same as those of the manufacturing method of the vibration element of the first embodiment will be omitted.

[0140] In the method for manufacturing a vibration element according to the second embodiment, Fig.18As shown, in the step S2 of etching the quartz plate 2, a first groove 316 is formed, and the first groove 316 connects the first end 312 of the first notch portion 310 and the side wall 302 on the +Z′ side of the first connecting portion 300. In addition, in the step S2 of etching the quartz plate 2, a second groove 318 is formed, and the second groove 318 connects the second end 314 of the first notch portion 310 and the side wall 304 on the −Z′ side of the first connecting portion 300.

[0141] The first groove 316 connects the side wall 302 of the first connection part 300 and the end of the first end 312 of the first notch 310. The width of the first groove 316 is smaller than the width of the first notch 310. The depth of the first groove 316 is smaller than the depth of the first notch 310.

[0142] The second groove 318 connects the side wall 304 of the first connection part 300 and the end of the second end 314 of the first notch part 310. The width of the second groove 318 is smaller than the width of the first notch part 310. The depth of the second groove 318 is smaller than the depth of the first notch part 310.

[0143] The first groove 316 and the second groove 318 can be formed by wet etching the quartz plate 2. For example, when the vibration element 100 is a mesa-type vibration element in which a peripheral portion and a vibration portion surrounded by the peripheral portion and thicker than the peripheral portion are formed on the vibration substrate 110, the first groove 316 and the second groove 318 can also be formed when etching the vibration portion. Thus, the manufacturing process can be simplified. The depth of the first groove 316 and the depth of the second groove 318 can also be the same as the height of the vibration portion.

[0144] Although not shown, the third notch 320 is provided with a groove connecting the end of the third notch 320 and the side wall of the first connection part 300, similarly to the first notch 310. The structure of the second connection part 400 is the same as that of the first connection part 300, and its description is omitted.

[0145] In the method for manufacturing a vibration element of the second embodiment, in step S2 of etching the quartz plate 2, the first groove 316 and the second groove 318 are formed in the first connecting portion 300, so that, for example, compared with a case where the first groove 316 and the second groove 318 are not formed, the deviation of the fracture position can be reduced.

[0146] 3. Third Implementation

[0147] Next, a method for manufacturing a vibration element according to a third embodiment will be described with reference to the drawings. Fig.192 is a cross-sectional view schematically showing a manufacturing process of the vibration element 100. Hereinafter, in the manufacturing method of the vibration element of the third embodiment, detailed description of the points that are the same as those of the manufacturing method of the vibration element of the first embodiment will be omitted.

[0148] In the manufacturing method of the vibration element of the first embodiment, in the step S2 of etching the quartz plate 2, as shown in FIG. Figure 7 As shown, a first notch portion 310 is formed on the main surface 2 a of the quartz plate 2 , and a third notch portion 320 is formed on the main surface 2 b of the quartz plate 2 .

[0149] On the other hand, in the method for manufacturing the vibration element of the third embodiment, in the step S2 of etching the quartz plate 2, as shown in FIG. Fig.19 As shown, the first notch portion 310 is formed on the main surface 2 a of the quartz plate 2 , and no notch portion is formed on the main surface 2 b of the quartz plate 2 .

[0150] In the manufacturing method of the vibration element of the third embodiment, the first notch portion 310 is formed on the main surface 2a of the quartz plate 2, so that the deviation of the fracture position can be reduced. In addition, although not shown, the notch portion may be formed on the main surface 2b of the quartz plate 2 instead of on the main surface 2a of the quartz plate 2. Even in the case where the notch portion is formed on the main surface 2b of the quartz plate 2, the deviation of the fracture position can be reduced.

[0151] Fig. 20 1 is a cross-sectional view schematically showing a modified example of the manufacturing process of the vibration element 100. In the manufacturing method of the vibration element of the first embodiment, as Figure 7 As shown, the first notch portion 310 is a groove with a bottom.

[0152] In contrast, Fig. 20 As shown, the first notch 310 may also be a through hole penetrating the quartz plate 2. Even when the first notch 310 is a hole penetrating the quartz plate 2, since stress is concentrated at the end of the first end 312 of the first notch 310, the deviation of the fracture position can be reduced.

[0153] 4. Fourth Implementation

[0154] Next, a method for manufacturing a vibration element according to a fourth embodiment will be described with reference to the drawings. Fig.21 2 is a cross-sectional view schematically showing a manufacturing process of the vibration element 100. Hereinafter, in the manufacturing method of the vibration element of the fourth embodiment, detailed descriptions of points that are the same as those of the manufacturing method of the vibration element of the first embodiment will be omitted.

[0155] like Fig.21As shown, the distal end of the first end portion 312 of the first notch portion 310 is in contact with the side wall 302 of the first connecting portion 300. Thus, the deviation of the breaking position can be further reduced.

[0156] In addition, although not shown, the distal end of the second end portion 314 may be in contact with the side wall 304 of the first connecting portion 300 .

[0157] 5. Modifications

[0158] In addition, the present invention is not limited to the above-mentioned embodiment, and various modifications can be implemented within the scope of the gist of the present invention.

[0159] In the first to fourth embodiments described above, the quartz plate 2 is described as an AT-cut quartz substrate, but the quartz plate 2 may be another quartz substrate. For example, the quartz plate 2 may be a Z-plate. The Z-plate is a quartz substrate that is cut out along a plane defined by the X-axis and the Y'-axis and processed into a flat plate shape and has a predetermined thickness in the Z' direction orthogonal to the plane.

[0160] In the first to fourth embodiments described above, the vibration substrate 110 is connected to the frame 200 via the first connection portion 300 and the second connection portion 400 , but the vibration substrate 110 may be connected to the frame 200 only via the first connection portion 300 or only via the second connection portion 400 .

[0161] 6. Fifth Implementation

[0162] 6.1. Vibration element

[0163] Next, a vibration element according to a fifth embodiment will be described with reference to the drawings. Fig. 22 FIG. 1 is a top view schematically showing a vibration element 500 according to the fifth embodiment. Figure 1 The vibration element 100 and Figure 4 to Figure 7 Components having the same functions as the components of the quartz plate 2 shown are denoted by the same reference numerals, and detailed description thereof will be omitted.

[0164] The vibration element 500 is an example of a vibration element manufactured by the manufacturing method of the vibration element of the first embodiment. The vibration element 500 includes a vibration substrate 110, a first excitation electrode 120, and a second excitation electrode 130. The vibration substrate 110 is a quartz substrate in which the crystal axes of the quartz are the X-axis, the Y-axis, and the Z-axis, the Y-axis and the Z-axis are rotated counterclockwise around the X-axis to form the Y′-axis and the Z′-axis, and the ±Y′ planes including the Z′-axis and the X-axis are the front and back principal planes.

[0165] A first protrusion 510 and a second protrusion 520 are provided at the end of the vibration substrate 110. The first protrusion 510 is Figure 5 The second protrusion 520 is a residual portion of the first connecting portion 300. Figure 5 The remaining portion of the second connecting portion 400 is shown.

[0166] The first protrusion 510 and the second protrusion 520 are provided at the end of the -X side of the vibration substrate 110. The first protrusion 510 and the second protrusion 520 are portions of the vibration substrate 110 that protrude in the -X direction. The first protrusion 510 is provided at the -Z′ side of the vibration substrate 110, and the second protrusion 520 is provided at the +Z′ side of the vibration substrate 110. When viewed from the Y′ direction, the first protrusion 510 is connected to the -Z′ side of one side of the vibration substrate 110 along the Z′ direction. The second protrusion 520 is connected to the +Z′ side of one side of the vibration substrate 110 along the Z′ direction. The shape of the vibration substrate 110 is a rectangular shape having a long side along the X-axis and a short side along the Z′ direction. The first protrusion 510 and the second protrusion 520 are provided on the short side. The first protrusion 510 and the second protrusion 520 are provided on the short side of the -X side of the vibration substrate 110.

[0167] Fig.23 is a top view schematically showing the first protrusion 510. In addition, Fig.23 This is a diagram of the first protrusion 510 as viewed from the Y′ direction.

[0168] The first protrusion 510 includes a first recess 6 provided on a side 6d included in the outer edge of one main surface 2a of the vibration substrate 110. The side 6d is along the Z′ axis. The side 6d is formed by breaking the first connection part 300.

[0169] The first concave portion 6 includes a first outer edge 6a, a second outer edge 6b, and a third outer edge 6c. The first outer edge 6a, the second outer edge 6b, and the third outer edge 6c are edges included in the outer edge of the main surface 2a. The first outer edge 6a, the second outer edge 6b, and the third outer edge 6c constitute the outer edge of the -X side of the main surface 2a of the vibration substrate 110.

[0170] The first outer edge 6a is along the side 6d. The first outer edge 6a is along the Z′ axis. The first outer edge 6a is located closer to the +X side than the side 6d. The first outer edge 6a constitutes the bottom of the first concave portion 6. The first outer edge 6a is straight. Figure 6 The third side 3c of the first notch portion 310 shown corresponds.

[0171] The second outer edge 6b is connected to one end of the first outer edge 6a. The second outer edge 6b is connected to the end of the first outer edge 6a on the +Z' side. The end of the second outer edge 6b on the -Z' side is connected to the first outer edge 6a, and the end of the second outer edge 6b on the +Z' side is connected to the edge 6d. The second outer edge 6b is inclined relative to the first outer edge 6a. The second outer edge 6b is inclined relative to the Z' axis. The second outer edge 6b is straight. The second outer edge 6b is connected to Figure 6 The first edge 3a of the first notch portion 310 shown corresponds to the first edge 3a.

[0172] The third outer edge 6c is connected to the other end of the first outer edge 6a. The third outer edge 6c is connected to the end of the -Z' side of the first outer edge 6a. The end of the -Z' side of the third outer edge 6c is connected to the edge 6d, and the end of the +Z' side of the third outer edge 6c is connected to the first outer edge 6a. The third outer edge 6c is in an arc shape. The third outer edge 6c is connected to Figure 6 The fifth side 3e of the first notch portion 310 shown corresponds.

[0173] Angle θ between the first outer edge 6a and the second outer edge 6b A corresponds to angle θ2. Therefore, angle θ A Satisfy 142°≤θ A ≤169°. In addition, the angle θ A It can also satisfy 147.5°≤θ A ≤166.5°, and can also meet 154°≤θ A ≤162.5°.

[0174] Fig. 22 The second protrusion 520 shown has Fig.23 The second protrusion 520 has the same shape as the first protrusion 510 shown. That is, the second protrusion 520 includes the second recess 7, which is provided at the side included in the outer edge of the main surface 2a of the vibration substrate 110. The second recess 7 has the same shape as the first recess 6. The first recess 6 is provided on the -Z' side of the vibration substrate 110, and the second recess 7 is provided on the +Z' side of the vibration substrate 110.

[0175] Fig.24 is a cross-sectional view schematically showing the first protrusion 510. In addition, Fig.24 is along Fig.23 A cross-sectional view of line XXIV-XXIV.

[0176] like Fig.24 As shown, the first protrusion 510 includes a first groove 512. The first groove 512 is formed on one main surface 2a of the vibration substrate 110. The first groove 512 corresponds to the first notch 310 of the first connection part 300.

[0177] The first groove 512 includes a first surface 8a and a second surface 8b. The first surface 8a and the second surface 8b are inclined relative to the main surface 2a. The first surface 8a and the second surface 8b intersect each other. The corner 5a formed by the first surface 8a and the second surface 8b forms the bottom of the first groove 512.

[0178] The first surface 8a and Figure 7 The first inclined surface 4a of the first notch portion 310 shown in FIG. Figure 7 The second surface 8b corresponds to the second inclined surface 4b of the first notch portion 310. The second surface 8b is a part of the second inclined surface 4b. The corner 5a formed by the first surface 8a and the second surface 8b corresponds to the corner 5 formed by the first inclined surface 4a and the second inclined surface 4b.

[0179] Angle θ between the first surface 8a and the second surface 8b B corresponds to the angle θ4 between the first inclined surface 4a and the second inclined surface 4b. B Satisfy 30°≤θ B ≤121°. In addition, the angle θ B It can also satisfy 35°≤θ B ≤112°, and 43°≤θ can also be satisfied B ≤100°.

[0180] The first inclined surface 4a and the second inclined surface 4b are wet-etched surfaces formed by half-etching the quartz plate 2 in the step S2 of wet-etching the quartz plate 2. Therefore, the first surface 8a and the second surface 8b are wet-etched surfaces.

[0181] The first protrusion 510 includes a third surface 8c inclined with respect to the main surface 2a. The third surface 8c is connected to the second surface 8b, and the corner 9 formed by the second surface 8b and the third surface 8c constitutes the end of the first protrusion 510. The end of the first protrusion 510 is the portion closest to the -X side of the first protrusion 510. The third surface 8c is a fracture surface formed by fracture of the first connecting portion 300 in the step S6 of singulating the vibration substrate 110.

[0182] like Fig.24 As shown, the first protrusion 510 includes an inclined portion 513. The inclined portion 513 is formed on the other main surface 2b of the vibration substrate 110. The inclined portion 513 is composed of a plurality of inclined surfaces inclined relative to the main surface 2b. The inclined portion 513 connects the main surface 2b and the third surface 8c. The inclined portion 513 is composed of a portion of the plurality of inclined surfaces constituting the third notch portion 320. In the example shown in the figure, the inclined portion 513 and the third notch portion 320 are connected. Figure 7 Among the plurality of inclined surfaces of the third notch portion 320 shown, two inclined surfaces located closer to the +X side than the bottom of the groove of the third notch portion 320 correspond to each other.

[0183] 6.2. Manufacturing method

[0184] The method for manufacturing the vibration element 500 is the same as the method for manufacturing the vibration element of the first embodiment, and the description thereof is omitted.

[0185] 6.3. Effect

[0186] The vibration element 500 includes: a vibration substrate 110, which is composed of a quartz substrate, the crystal axis of the quartz being the X-axis, the Y-axis and the Z-axis, the Y-axis and the Z-axis being rotated counterclockwise around the X-axis as the Y′-axis and the Z′-axis, and the ±Y′ planes including the Z′-axis and the X-axis being the front and back principal planes; and a first recessed portion 6, which is provided at a side 6d included in the outer edge of one principal surface 2a of the vibration substrate 110. In addition, the first recessed portion 6 includes: a first outer edge 6a along the side 6d; a second outer edge 6b connected to one end of the first outer edge 6a and inclined relative to the first outer edge 6a; and a third outer edge 6c connected to the other end of the first outer edge 6a and in an arc shape.

[0187] Thus, in the vibration element 500, the first recess 6 is provided on the side 6d included in the outer edge of the vibration substrate 110, so that the bonding strength when the vibration element 500 is mounted on the mounting substrate using a bonding component such as a conductive adhesive or solder can be improved. In the vibration element 500, by forming the first recess 6 on the side 6d, the contact area with the bonding component can be increased compared to the case where there is no recess on the side 6d, so that the bonding strength when mounted on the mounting substrate can be improved.

[0188] In the vibration element 500, the first outer edge 6a is along the Z' axis, the second outer edge 6b is connected to the end of the first outer edge 6a on the +Z' side, and the third outer edge 6c is connected to the end of the first outer edge 6a on the -Z' side. Therefore, in the vibration element 500, the bonding strength when mounted on the mounting substrate can be improved compared to the case where there is no recess in the edge 6d.

[0189] In the vibration element 500, the angle between the first outer edge 6a and the second outer edge 6b is set to θ A In the case of 142°≤θ A ≤169°. Therefore, in the vibration element 500, the first notch portion 310 can be miniaturized, and thus the first connecting portion 300 can be miniaturized. Therefore, in the vibration element 500, the residual portion of the first connecting portion 300 remaining in the vibration element 500 after breaking, that is, the first protrusion 510 can be reduced, and thus a vibration element with less characteristic deviation can be realized.

[0190] The vibration element 500 includes a first recess 6 provided on the -Z' side of the vibration substrate 110 and a second recess 7 provided on the +Z' side of the vibration substrate 110 as recesses. Therefore, in the vibration element 500, the bonding strength when mounted on the mounting substrate can be improved compared to a case where there is only one recess.

[0191] The vibration element 500 includes: a vibration substrate 110, which is composed of a quartz substrate, the crystal axis of the quartz being the X-axis, the Y-axis and the Z-axis, the Y-axis and the Z-axis being rotated counterclockwise around the X-axis as the Y′-axis and the Z′-axis, and the ±Y′ planes including the Z′-axis and the X-axis being the front and back principal planes; and a first protrusion 510, which is provided at the end of the vibration substrate 110. In addition, the first protrusion 510 has a first groove 512 formed on one principal surface 2a of the vibration substrate 110, the first groove 512 including a first surface 8a and a second surface 8b inclined with respect to the principal surface 2a, and the corner 5a formed by the first surface 8a and the second surface 8b forming the bottom of the first groove 512.

[0192] In this way, in the vibration element 500, the first protrusion 510 has the first groove 512, so that the bonding strength when installed on the mounting substrate can be improved. In the vibration element 500, since the first protrusion 510 has the first groove 512, the contact area with the bonding component can be increased compared to the case where the first protrusion 510 has no groove. In addition, the anchoring effect is obtained by the bonding component entering the first groove 512. Therefore, in the vibration element 500, the bonding strength when installed on the mounting substrate can be improved.

[0193] In the vibration element 500, the first protrusion 510 includes a third surface 8c connected to the second surface 8b, and a corner portion 9 formed by the second surface 8b and the third surface 8c constitutes the end of the first protrusion 510. Therefore, in the vibration element 500, compared with a case where there is no corner portion 9 at the end of the first protrusion 510, the bonding strength when mounted on the mounting substrate can be improved.

[0194] In the vibration element 500, by satisfying 30°≤θ B ≤121°, the first notch 310 can be miniaturized in the width direction and the depth direction, so the first protrusion 510 can be reduced in size. B ≤112°, the first notch 310 can be further miniaturized in the width direction and the depth direction, so the first protrusion 510 can be further reduced in size. B≤100°, the first notch 310 can be further miniaturized in the width direction and the depth direction, and thus the first protrusion 510 can be further reduced. In this way, in the vibration element 500, the residual portion of the first connecting portion 300 remaining in the vibration element 500 after breaking, i.e., the first protrusion 510, can be reduced, and thus a vibration element with less characteristic deviation can be realized.

[0195] The vibration element 500 includes a first protrusion 510 provided on the -Z' side of the vibration substrate 110 and a second protrusion 520 provided on the +Z' side of the vibration substrate 110 as protrusions. Therefore, the vibration element 500 can improve the bonding strength when mounted on the mounting substrate compared to a case where there is only one protrusion.

[0196] 7. Sixth Implementation

[0197] 7.1. Vibration element

[0198] Next, a vibration element according to a sixth embodiment will be described with reference to the drawings. Fig.25 2 is a cross-sectional view schematically showing the first protrusion 510 of the vibration element 600 of the sixth embodiment. Hereinafter, in the vibration element 600 of the sixth embodiment, components having the same functions as those of the components of the vibration element 500 of the fifth embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.

[0199] In the above Fig.24 In the vibration element 500 shown in FIG. 1 , the first protrusion 510 has a first groove 512 formed on one main surface 2a and an inclined portion 513 formed on the other main surface 2b. Fig.25 In the vibration element 500 shown, the first protrusion 510 has a first groove 512 formed on one main surface 2 a and a second groove 514 formed on the other main surface 2 b .

[0200] The second groove 514 is formed on the main surface 2 b side of the vibration substrate 110 . The second groove 514 corresponds to the third notch portion 320 of the second connection portion 400 .

[0201] The second groove 514 includes a fourth surface 8d and a fifth surface 8e. The fourth surface 8d and the fifth surface 8e are inclined relative to the main surface 2b. The fourth surface 8d and the fifth surface 8e intersect each other. The corner 5b formed by the fourth surface 8d and the fifth surface 8e forms the bottom of the second groove 514.

[0202] The fourth surface 8d and the fifth surface 8e are Figure 7 The two inclined surfaces at the bottom of the groove forming the third notch portion 320 correspond to each other. The corner 5b formed by the fourth surface 8d and the fifth surface 8e corresponds to the corner formed by the two inclined surfaces at the bottom of the groove forming the third notch portion 320.

[0203] The two inclined surfaces at the bottom of the groove forming the third notch portion 320 are wet-etched surfaces formed by half-etching the quartz plate 2 in the step S2 of wet-etching the quartz plate 2. Therefore, the fourth surface 8d and the fifth surface 8e are wet-etched surfaces.

[0204] The third surface 8c connects the second surface 8b and the fifth surface 8e. The third surface 8c is a fracture surface formed by fracture of the first connecting portion 300 in the step S6 of singulating the vibration substrate 110. Therefore, in the vibration element 600, the first surface 8a, the second surface 8b, the fourth surface 8d, and the fifth surface 8e are wet-etched surfaces, and the third surface 8c is a fracture surface.

[0205] Although not shown, in the vibration element 600 , the shape of the second protrusion 520 is the same as the shape of the first protrusion 510 .

[0206] 7.2. Manufacturing method

[0207] The manufacturing method of the vibration element 600 is the same as the manufacturing method of the vibration element 500 except that the first connection part 300 and the second connection part 400 have different fracture positions due to different stresses etc. applied to the first connection part 300 and the second connection part 400 in the step S6 of singulating the vibration substrate 110 described above.

[0208] 7.3. Effect

[0209] In the vibration element 600, the first protrusion 510 has the second groove 514 formed on the main surface 2b of the vibration substrate 110, and the second groove 514 includes the fourth surface 8d and the fifth surface 8e inclined relative to the main surface 2b, and the corner 5b formed by the fourth surface 8d and the fifth surface 8e forms the bottom of the second groove 514. In this way, in the vibration element 600, the first protrusion 510 has the first groove 512 and the second groove 514, so that, for example, compared with the case where the first protrusion 510 has one groove, the anchoring effect can be improved, and the bonding strength when mounted on the mounting substrate can be improved.

[0210] In the fifth and sixth embodiments, the first protrusion 510 and the second protrusion 520 have the same shape, but at least one of the first protrusion 510 and the second protrusion 520 has a Fig.24 or Fig.25 Alternatively, the first protrusion 510 and the second protrusion 520 may have Fig.24 The other party has Fig.25 structure.

[0211] 8. Seventh Implementation Method

[0212] 8.1. Vibration element

[0213] Next, a vibration element according to a seventh embodiment will be described with reference to the drawings. Fig.26 1 is a cross-sectional view schematically showing the first protrusion 510 of the vibration element 700 of the seventh embodiment. Hereinafter, in the vibration element 700 of the seventh embodiment, components having the same functions as the components of the vibration element 500 of the fifth embodiment and the vibration element 600 of the sixth embodiment described above are marked with the same reference numerals, and their detailed descriptions are omitted.

[0214] In the above Fig.25 In the vibration element 600 shown in FIG. 1 , the first protrusion 510 has a first groove 512 formed on one main surface 2a and a second groove 514 formed on the other main surface 2b. Fig.26 In the vibration element 700 shown, the first protrusion 510 has the first groove 512 formed on one main surface 2 a , and no groove is formed on the other main surface 2 b .

[0215] The third surface 8 c is a fracture surface formed by fracture of the first connection portion 300 in the step S6 of dividing the vibration substrate 110 into individual pieces, and connects the second surface 8 b and the main surface 2 b .

[0216] Although not shown, in the vibration element 600 , the shape of the second protrusion 520 is the same as the shape of the first protrusion 510 .

[0217] 8.2. Manufacturing method

[0218] The method for manufacturing the vibration element 700 is the same as the method for manufacturing the vibration element of the third embodiment described above, and the description thereof is omitted.

[0219] 8.3. Effect

[0220] The vibration element 700 , like the above-described vibration element 500 , can improve the bonding strength when mounted on a mounting substrate.

[0221] In addition, in this embodiment, the first protrusion 510 and the second protrusion 520 are described as having the same shape, but as long as at least one of them has Fig.26 The structure can be.

[0222] The present invention includes structures that are substantially the same as the structures described in the embodiments (for example, structures with the same functions, methods, and results, or structures with the same purposes and effects). In addition, the present invention includes structures that replace non-essential parts of the structures described in the embodiments. In addition, the present invention includes structures that have the same effects as the structures described in the embodiments or structures that can achieve the same purposes. In addition, the present invention includes structures that add known technologies to the structures described in the embodiments.

[0223] The following contents are derived from the above-mentioned embodiments.

[0224] One method of manufacturing a vibration element includes:

[0225] forming a vibration substrate, a frame portion, and a connection portion connecting the vibration substrate and the frame portion by wet etching a quartz plate; and

[0226] The vibration substrate is separated from the frame by breaking the vibration substrate at the connecting portion,

[0227] The forming of the vibration substrate, the frame portion, and the connection portion includes: forming a notch portion as a groove or a through hole in the connection portion along the width direction of the connection portion;

[0228] The notch portion includes a first end portion on one side of the width direction and a second end portion on the other side of the width direction.

[0229] At least one of the first end portion and the second end portion has a first side close to the vibration substrate and a second side close to the frame portion.

[0230] The distance between the first side and the second side gradually decreases as it moves away from the center of the notch in the width direction.

[0231] In the manufacturing method of the vibration element, the distance between the first side and the second side of at least one of the first end and the second end of the connecting portion gradually decreases as the distance from the center of the notch portion in the width direction of the connecting portion increases. Therefore, when the vibration substrate is broken, stress is concentrated on the end of at least one of the first end and the second end. Therefore, in the manufacturing method of the vibration element, the deviation of the fracture position can be reduced, and the deviation of the shape of the residual part of the connecting portion remaining in the vibration element after breaking can be reduced.

[0232] In one aspect of the method for manufacturing a vibration element, when an angle between the first side and the second side is θ1, 22°≤θ1≤76° may be satisfied.

[0233] In this method of manufacturing a vibration element, the notch portion can be miniaturized in the width direction and the length direction.

[0234] In one aspect of the method for manufacturing a vibration element, when an angle between the first side and the second side is θ1, 27°≤θ1≤65° may be satisfied.

[0235] In this method of manufacturing a vibration element, the notch portion can be further miniaturized in the width direction and the length direction.

[0236] In one aspect of the method for manufacturing a vibration element, when an angle between the first side and the second side is θ1, 35°≤θ1≤52° may be satisfied.

[0237] In this method of manufacturing a vibration element, the notch portion can be further miniaturized in the width direction and the length direction.

[0238] In one embodiment of the manufacturing method of a vibration element, the notch portion may have a third side connected to the first side and a fourth side connected to the second side, and when the angle between the third side and the first side is set to θ2, 142°≤θ2≤169° is satisfied, and when the angle between the fourth side and the second side is set to θ3, 142°≤θ3≤169° is satisfied.

[0239] In this method of manufacturing a vibration element, since 22°≤θ1≤76° is satisfied, the notch portion can be miniaturized in the width direction and the length direction.

[0240] In one aspect of the method for manufacturing a vibration element, the cutout portion may be a groove.

[0241] In this method of manufacturing a vibration element, the possibility of the vibration element falling off from the frame portion can be reduced during the manufacturing process.

[0242] In one embodiment of the manufacturing method of the vibration element, the notch portion may include two inclined surfaces intersecting each other, a corner formed by the two inclined surfaces forms the bottom of the groove, and when the angle between the two inclined surfaces is set to θ4, 30°≤θ4≤121° is satisfied.

[0243] In this method of manufacturing a vibration element, the notch portion can be miniaturized in the depth direction and the width direction.

[0244] In one embodiment of the manufacturing method of the vibration element, the notch portion may include two inclined surfaces intersecting each other, and a corner formed by the two inclined surfaces forms the bottom of the groove. When the angle between the two inclined surfaces is set to θ4, 35°≤θ4≤112° is satisfied.

[0245] In this method of manufacturing a vibration element, the notch portion can be further miniaturized in the depth direction and the width direction.

[0246] In one embodiment of the manufacturing method of the vibration element, the notch portion may include two inclined surfaces intersecting each other, a corner formed by the two inclined surfaces forms the bottom of the groove, and when the angle between the two inclined surfaces is set to θ4, 43°≤θ4≤100° is satisfied.

[0247] In this method of manufacturing a vibration element, the notch portion can be further miniaturized in the depth direction and the width direction.

[0248] In one embodiment of the method for manufacturing a vibration element, it is also possible that:

[0249] The quartz plate is a quartz plate in which the crystal axes of quartz are set as the X-axis, the Y-axis and the Z-axis, the Y-axis and the Z-axis are rotated counterclockwise around the X-axis as the Y′-axis and the Z′-axis, and the ±Y′ planes including the Z′-axis and the X-axis are set as the front and back principal planes.

[0250] The forming of the vibration substrate, the frame portion, and the connecting portion includes: forming a first connecting portion connected to the -Z' side of one side of the vibration substrate along the Z' direction and a second connecting portion connected to the +Z' side of the one side as the connecting portion,

[0251] The distance between the first side and the second side gradually decreases from the -Z' side to the +Z' side.

[0252] In this method of manufacturing a vibration element, even when the quartz plate is an AT-cut quartz substrate, it is possible to reduce the variation in the fracture position.

[0253] One way of quartz plate includes:

[0254] Vibrating substrate;

[0255] a frame; and

[0256] a connecting portion connecting the vibration substrate and the frame portion,

[0257] A notch portion serving as a groove or a through hole is formed in the connecting portion along the width direction of the connecting portion.

[0258] The notch portion includes a first end portion on one side of the width direction and a second end portion on the other side of the width direction.

[0259] At least one of the first end portion and the second end portion has a first side close to the vibration substrate and a second side close to the frame portion.

[0260] The distance between the first side and the second side gradually decreases as it moves away from the center of the notch in the width direction.

[0261] In the quartz plate, the distance between the first side and the second side of at least one of the first end and the second end of the connecting portion gradually decreases as the distance from the center of the notch portion in the width direction of the connecting portion increases. Therefore, when the vibration substrate is broken, stress is concentrated on the end of at least one of the first end and the second end. Therefore, in the quartz plate, the deviation of the fracture position can be reduced, and the shape deviation of the residual part of the connecting portion remaining on the vibration element after breaking can be reduced.

[0262] One way to vibrate an element includes:

[0263] A quartz substrate, wherein the crystal axes of quartz are the X-axis, the Y-axis and the Z-axis, the Y-axis and the Z-axis are rotated counterclockwise around the X-axis to form the Y′-axis and the Z′-axis, and the ±Y′ planes including the Z′-axis and the X-axis are the front and back main planes; and

[0264] a recessed portion provided on a side included in an outer edge of one main surface of the quartz substrate,

[0265] The recess includes:

[0266] a first outer edge, which is along the edge;

[0267] a second outer edge connected to one end of the first outer edge and inclined relative to the first outer edge; and

[0268] A third arc-shaped outer edge is connected to the other end of the first outer edge.

[0269] In this vibration element, the bonding strength when mounted on a mounting substrate can be improved.

[0270] In one embodiment of the vibration element, the first outer edge may be along the Z′ axis, the second outer edge may be connected to the end of the first outer edge on the +Z′ side, and the third outer edge may be connected to the end of the first outer edge on the −Z′ side.

[0271] In this vibration element, the bonding strength when mounted on a mounting substrate can be improved.

[0272] In one embodiment of the vibration element, when the angle between the first outer edge and the second outer edge is θ A In the case of 142°≤θ A ≤169°.

[0273] In this vibration element, the remaining portion of the connection portion remaining in the vibration element after breaking can be reduced, so that a vibration element with less characteristic variation can be realized.

[0274] In one aspect of the vibration element, the recessed portion may include a first recessed portion provided on the -Z' side of the quartz substrate and a second recessed portion provided on the +Z' side of the quartz substrate.

[0275] In this vibration element, the bonding strength when mounted on a mounting substrate can be improved.

[0276] One way to vibrate an element includes:

[0277] A quartz substrate, wherein the crystal axes of quartz are the X-axis, the Y-axis and the Z-axis, the Y-axis and the Z-axis are rotated counterclockwise around the X-axis to form the Y′-axis and the Z′-axis, and the ±Y′ planes including the Z′-axis and the X-axis are the front and back main planes; and

[0278] a protrusion provided at an end of the quartz substrate,

[0279] The protrusion has a first groove formed on one main surface of the quartz substrate,

[0280] The first groove includes a first surface and a second surface inclined relative to the one main surface,

[0281] A corner formed by the first surface and the second surface forms a bottom of the first groove.

[0282] In this vibration element, the bonding strength when mounted on a mounting substrate can be improved.

[0283] In one aspect of the vibration element, the protrusion may include a third surface connected to the second surface, and a corner formed by the second surface and the third surface may constitute a terminal end of the protrusion.

[0284] In this vibration element, the bonding strength when mounted on a mounting substrate can be improved.

[0285] In one embodiment of the vibration element, it is also possible that

[0286] The protrusion has a second groove formed on the other main surface, the second groove includes a fourth surface and a fifth surface inclined with respect to the other main surface, and a corner formed by the fourth surface and the fifth surface forms a bottom of the second groove.

[0287] In this vibration element, the bonding strength when mounted on a mounting substrate can be improved.

[0288] In one embodiment of the vibration element, when the angle between the first surface and the second surface is θ B When 30°≤θ is satisfied B ≤121°.

[0289] In this vibration element, since the protrusion, which is the remaining portion of the connection portion remaining on the vibration element after breaking, can be reduced, a vibration element with less variation in characteristics can be realized.

[0290] In one embodiment of the vibration element, when the angle between the first surface and the second surface is θ B When 35°≤θ is satisfied B ≤112°.

[0291] In this vibration element, since the protrusion, which is the remaining portion of the connection portion remaining on the vibration element after breaking, can be reduced, a vibration element with less variation in characteristics can be realized.

[0292] In one embodiment of the vibration element, when the angle between the first surface and the second surface is θ B When 43°≤θ is satisfied B ≤100°.

[0293] In this vibration element, since the protrusion, which is the remaining portion of the connection portion remaining on the vibration element after breaking, can be reduced, a vibration element with less variation in characteristics can be realized.

[0294] In one aspect of the vibration element, the protrusion may include a first protrusion provided on the -Z' side of the quartz substrate and a second protrusion provided on the +Z' side of the quartz substrate.

[0295] In this vibration element, the bonding strength when mounted on a mounting substrate can be improved.

[0296] In one embodiment of the vibration element, the first surface and the second surface may be wet-etched surfaces, and the protrusion may include a fracture surface connected to the second surface.

[0297] In this vibration element, the bonding strength when mounted on a mounting substrate can be improved.

[0298] In one embodiment of the vibration element, the first surface and the second surface may be wet-etched surfaces, and the third surface may be a fractured surface.

[0299] In this vibration element, the bonding strength when mounted on a mounting substrate can be improved.

[0300] In one embodiment of the vibration element, the first surface, the second surface, the fourth surface, and the fifth surface may be wet-etched surfaces, and the protrusion may include a fracture surface connecting the second surface and the fourth surface.

[0301] In this vibration element, the bonding strength when mounted on a mounting substrate can be improved.

Claims

1. A method for manufacturing a vibration element, comprising: forming a vibration substrate, a frame portion, and a connecting portion connecting the vibration substrate and the frame portion by wet etching a quartz plate; as well as The vibration substrate is separated from the frame by breaking the vibration substrate at the connecting portion, The forming of the vibration substrate, the frame portion, and the connection portion includes: forming a notch portion as a groove or a through hole in the connection portion along the width direction of the connection portion, The notch portion includes a first end portion on one side of the width direction and a second end portion on the other side of the width direction. At least one of the first end portion and the second end portion has a first side close to the vibration substrate and a second side close to the frame portion. The distance between the first side and the second side gradually decreases as it moves away from the center of the notch in the width direction.

2. The method for manufacturing a vibration element according to claim 1, wherein: When the angle between the first side and the second side is set to θ1, 22°≤θ1≤76° is satisfied.

3. The method for manufacturing a vibration element according to claim 1, wherein: When the angle between the first side and the second side is set to θ1, 27°≤θ1≤65° is satisfied.

4. The method for manufacturing a vibration element according to claim 1, wherein: When the angle between the first side and the second side is set to θ1, 35°≤θ1≤52° is satisfied.

5. The method for manufacturing a vibration element according to claim 1, wherein: The notch portion has a third side connected to the first side and a fourth side connected to the second side, When the angle between the third side and the first side is set to θ2, 142°≤θ2≤169° is satisfied, When the angle between the fourth side and the second side is set to θ3, 142°≤θ3≤169° is satisfied.

6. The method for manufacturing a vibration element according to claim 1, wherein: The notch portion is a groove.

7. The method for manufacturing a vibration element according to claim 6, wherein: The notch portion includes two inclined surfaces intersecting each other, The corner formed by the two inclined surfaces forms the bottom of the groove. When the angle between the two inclined surfaces is set to θ4, 30°≤θ4≤121° is satisfied.

8. The method for manufacturing a vibration element according to claim 6, wherein: The notch portion includes two inclined surfaces intersecting each other, The corner formed by the two inclined surfaces forms the bottom of the groove. When the angle between the two inclined surfaces is set to θ4, 35°≤θ4≤112° is satisfied.

9. The method for manufacturing a vibration element according to claim 6, wherein: The notch portion includes two inclined surfaces intersecting each other, The corner formed by the two inclined surfaces forms the bottom of the groove. When the angle between the two inclined surfaces is set to θ4, 43°≤θ4≤100° is satisfied.

10. The method for manufacturing a vibration element according to any one of claims 1 to 9, wherein: The quartz plate is a quartz plate in which the crystal axes of quartz are set as the X-axis, the Y-axis and the Z-axis, the Y-axis and the Z-axis are rotated counterclockwise around the X-axis as the Y′-axis and the Z′-axis, and the ±Y′ planes including the Z′-axis and the X-axis are set as the front and back principal planes. The forming of the vibration substrate, the frame portion, and the connecting portion includes: forming a first connecting portion connected to the -Z' side of one side of the vibration substrate along the Z' direction and a second connecting portion connected to the +Z' side of the one side as the connecting portion, The distance between the first side and the second side gradually decreases from the -Z' side to the +Z' side.

11. A quartz plate comprising: Vibrating substrate; Frame; as well as a connecting portion connecting the vibration substrate and the frame portion, A notch portion serving as a groove or a through hole is formed in the connecting portion along the width direction of the connecting portion. The notch portion includes a first end portion on one side of the width direction and a second end portion on the other side of the width direction. At least one of the first end portion and the second end portion has a first side on the vibration substrate side and a second side on the frame portion side. The distance between the first side and the second side gradually decreases as it moves away from the center of the notch in the width direction.

12. A vibration element, comprising: A quartz substrate, wherein the crystal axes of quartz are used as the X-axis, the Y-axis and the Z-axis, the Y-axis and the Z-axis are rotated counterclockwise around the X-axis as the Y′-axis and the Z′-axis, and the ±Y′ planes including the Z′-axis and the X-axis are used as the front and back main planes; as well as a recessed portion provided on a side included in an outer edge of one main surface of the quartz substrate, The recess includes: a first outer edge, which is along the edge; A second outer edge connected to one end of the first outer edge and inclined relative to the first outer edge; and A third arc-shaped outer edge is connected to the other end of the first outer edge.

13. The vibration element according to claim 12, wherein: The first outer edge is along the Z′ axis, The second outer edge is connected to the end of the first outer edge on the +Z′ side, The third outer edge is connected to an end portion of the first outer edge on the -Z′ side.

14. The vibration element according to claim 12 or 13, wherein: The angle between the first outer edge and the second outer edge is set to θ A In the case of 142°≤θ A ≤169°.

15. The vibration element according to claim 12 or 13, wherein: The recessed portion includes a first recessed portion provided on the -Z' side of the quartz substrate and a second recessed portion provided on the +Z' side of the quartz substrate.

16. A vibration element, comprising: A quartz substrate, wherein the crystal axes of quartz are the X-axis, the Y-axis and the Z-axis, the Y-axis and the Z-axis are rotated counterclockwise around the X-axis to form the Y′-axis and the Z′-axis, and the ±Y′ planes including the Z′-axis and the X-axis are the front and back main planes; and a protrusion provided at an end of the quartz substrate, The protrusion has a first groove formed on one main surface of the quartz substrate, The first groove includes a first surface and a second surface inclined relative to the one main surface, A corner formed by the first surface and the second surface forms a bottom of the first groove.

17. The vibration element according to claim 16, wherein The protrusion includes a third surface connected to the second surface, A corner formed by the second surface and the third surface constitutes a terminal end of the protrusion.

18. The vibration element according to claim 16, wherein The protrusion has a second groove formed on the other main surface of the quartz substrate, The second groove includes a fourth surface and a fifth surface inclined relative to the other main surface, A corner formed by the fourth surface and the fifth surface forms a bottom of the second groove.

19. The vibration element according to any one of claims 16 to 18, wherein: When the angle between the first surface and the second surface is set to θ B When 30°≤θ is satisfied B ≤121°.

20. The vibration element according to any one of claims 16 to 18, wherein When the angle between the first surface and the second surface is set to θ B When 35°≤θ is satisfied B ≤112°.

21. The vibration element according to any one of claims 16 to 18, wherein: When the angle between the first surface and the second surface is set to θ B When 43°≤θ is satisfied B ≤100°.

22. The vibration element according to any one of claims 16 to 18, wherein: The protrusions include a first protrusion provided on the -Z' side of the quartz substrate and a second protrusion provided on the +Z' side of the quartz substrate.

Images