Pipeline system of anaerobic high-temperature nitrogen furnace and control method of pipeline system

Abstract

The invention relates to a pipeline system of an anaerobic high-temperature nitrogen furnace and a control method of the pipeline system in the technical field of wire plugs, the pipeline system comprises a main pipeline, an inner box, a large-flow nitrogen filling pipeline and a small-flow nitrogen filling pipeline, the main pipeline is sequentially provided with a single connecting piece, a gas source filter and a pressure detector, and an oxygen concentration analyzer is arranged in the inner box; the large-flow nitrogen filling pipeline is sequentially provided with an adjusting valve A, an electromagnetic valve A and a flow meter A. The small-flow nitrogen filling pipeline is sequentially provided with an adjusting valve B, an electromagnetic valve B and a flow meter B. The large-flow nitrogen filling pipeline and the small-flow nitrogen filling pipeline are arranged to be connected with the heating device and the inner box in a communicating mode. According to the condition of the oxygen concentration of the inner box, the corresponding nitrogen charging pipeline is charged with nitrogen for heating, so that the inner box can be kept in a positive pressure state, the oxygen concentration of the inner box is accurately controlled, the oxygen concentration is more stable, the condition that the temperature fluctuation of the inner box is large is reduced, the nitrogen consumption is small, and the test cost is saved.

Description

Technical Field

[0001] The invention relates to the technical field of anaerobic high-temperature nitrogen testing furnaces, and in particular to a pipeline system of an anaerobic high-temperature nitrogen furnace and a control method thereof. Background Art

[0002] At present, whether it is curing wafers (photoresists PI, PBO, BCB) in the semiconductor industry or baking glass substrates in the LED manufacturing industry, anaerobic high-temperature atmosphere furnaces are often used because they need to be carried out in an oxygen-free, high-temperature environment. Anaerobic high-temperature atmosphere furnaces are a type of equipment that is often used in military, automotive, electronics and other industries. The working process of the anaerobic high-temperature atmosphere furnace is: place the product in a high-temperature test box, and then replace the atmosphere in the box (containing 20.6% atmospheric oxygen) with nitrogen. When the oxygen concentration is lower than a certain level (usually below 100ppm), increase the temperature to start production or testing. Low concentrations of oxygen will not oxidize the product during production, thereby ensuring the quality of the product.

[0003] At present, the high-temperature baking equipment on the domestic market is mainly used for high-temperature aging, with simple structure and single function, which can no longer meet the development of semiconductor industry and high-performance electronics industry. Most high-temperature test chambers do not have nitrogen filling function, and the test process cannot prevent sample oxidation.

[0004] The main disadvantages are: (1) Nitrogen is directly passed into the test chamber. Since the temperature of nitrogen is low and the temperature inside the chamber is high, the temperature inside the chamber fluctuates greatly after filling with nitrogen; (2) There is no pressure detection device in the nitrogen pipeline. There is no alarm function when the nitrogen is cut off or the pressure is low; (3) There is no oxygen concentration analyzer installed. There is no alarm when the oxygen concentration is unstable or exceeds the standard. Therefore, in view of these current situations, it is urgent to develop a pipeline system and control method for an anaerobic high-temperature nitrogen furnace to meet the needs of actual use. Summary of the invention

[0005] The present invention aims to provide a piping system of an anaerobic high-temperature nitrogen furnace and a control method thereof, so as to solve the defects of the existing anaerobic high-temperature nitrogen furnace, that is, due to the low control accuracy of nitrogen replacement of oxygen, large temperature fluctuations in the box and uncontrollable oxygen concentration in the box, which may cause sample oxidation.

[0006] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0007] A pipeline system of an anaerobic high-temperature nitrogen furnace and a control method thereof, comprising a main pipeline, an inner box, a large-flow nitrogen filling pipeline, and a small-flow nitrogen filling pipeline, wherein the main pipeline is provided with a single joint, a gas source filter, and a pressure detector in sequence, an oxygen concentration analyzer is provided inside the inner box, the large-flow nitrogen filling pipeline is provided with a regulating valve A, a solenoid valve A, and a flowmeter A in sequence, and the small-flow nitrogen filling pipeline is provided with a regulating valve B, a solenoid valve B, and a flowmeter B in sequence;

[0008] A three-way valve is provided between the large-flow nitrogen charging pipeline, the small-flow nitrogen charging pipeline and the main pipeline, and the main pipeline is respectively connected with the large-flow nitrogen charging pipeline and the small-flow nitrogen charging pipeline through the three-way valve. A heating device is provided at one end of the large-flow nitrogen charging pipeline and the small-flow nitrogen charging pipeline, and the ends of the large-flow nitrogen charging pipeline and the small-flow nitrogen charging pipeline close to the heating device are both connected with the inner box.

[0009] In the above description, as a further solution, the main pipeline, the large-flow nitrogen filling pipeline and the small-flow nitrogen filling pipeline are all composed of PU air pipes.

[0010] In the above description, as a further solution, the end of the large-flow nitrogen filling pipeline close to the regulating valve A is the input end A, and the end of the large-flow nitrogen filling pipeline close to the regulating valve B is the input end B. Both the input end A and the input end B are connected to the main pipeline through a three-way valve.

[0011] In the above description, as a further solution, flowmeter A and flowmeter B are both composed of float type flowmeters.

[0012] In the above description, as a further solution, the heating device consists of a heating box and two stainless steel pipes. The stainless steel pipes are spirally arranged inside the heating box, and the stainless steel pipes are respectively connected to the large-flow nitrogen filling pipeline and the small-flow nitrogen filling pipeline.

[0013] A pipeline control method for an anaerobic high-temperature nitrogen furnace, based on the pipeline system of the above-mentioned anaerobic high-temperature nitrogen furnace, comprises the following steps:

[0014] S1, preset the oxygen concentration range, start the oxygen concentration analyzer inside the inner box to detect the oxygen concentration, and obtain the oxygen concentration percentage A;

[0015] S2, fast nitrogen charging, start solenoid valve A and solenoid valve B, the large flow nitrogen charging pipeline and the small flow nitrogen charging pipeline are both connected to the main pipeline, and the large flow nitrogen charging pipeline and the small flow nitrogen charging pipeline charge nitrogen to the heating device at the same time;

[0016] S3, when the oxygen concentration percentage A is less than the preset oxygen concentration range, S2 is omitted, the solenoid valve A is closed, the solenoid valve B is started, the small flow nitrogen filling pipeline is connected to the main pipeline, and the small flow nitrogen filling pipeline is used to fill nitrogen to the heating device.

[0017] In the above description, as a further solution, regulating valve A and regulating valve B are used to regulate the nitrogen pressure in S2 or S3.

[0018] The beneficial effects produced by the present invention are as follows:

[0019] The present application discloses a pipeline system of an anaerobic high-temperature nitrogen furnace and a control method thereof. A large-flow nitrogen filling pipeline and a small-flow nitrogen filling pipeline are arranged to be conductively connected with a heating device and an inner box, and an oxygen concentration analyzer is used to detect the oxygen concentration of the inner box in real time, so that the corresponding nitrogen filling pipeline is used to fill nitrogen and heat the inner box according to the oxygen concentration of the inner box, so that the inner box can maintain a positive pressure state, accurately control the oxygen concentration of the inner box, and make the oxygen concentration more stable, thereby reducing the situation where the temperature of the inner box fluctuates greatly, reducing the amount of nitrogen used, and saving the test cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic structural diagram of a piping system of an anaerobic high-temperature nitrogen furnace according to the present invention;

[0021] Figure 2 It is a schematic flow chart of a pipeline control method of an anaerobic high-temperature nitrogen furnace according to the present invention;

[0022] In the figure: 1-main line, 11-single joint, 12-gas source filter, 13-pressure detector, 2-large flow nitrogen filling pipeline, 21-regulating valve A, 22-solenoid valve A, 23-flow meter A, 3-small flow nitrogen filling pipeline, 31-regulating valve B, 32-solenoid valve B, 33-flow meter B, 4-heating device, 41-heating box, 42-stainless steel pipe, 6-inner box, 61-oxygen concentration analyzer, 5-three-way valve. DETAILED DESCRIPTION

[0023] In order to facilitate the understanding of those skilled in the art, the present invention is further described below in conjunction with the embodiments and drawings, and the contents mentioned in the embodiments are not intended to limit the present invention. The present invention is described in detail below in conjunction with the drawings.

[0024] See also Figure 1 , a piping system of an anaerobic high-temperature nitrogen furnace is specifically implemented, comprising a main pipe 1, an inner box 6, a large-flow nitrogen filling pipe 2 and a small-flow nitrogen filling pipe 3, wherein the main pipe 1 is provided with a single joint 11, a gas source filter 12 and a pressure detector 13 in sequence, and an oxygen concentration analyzer 61 is provided inside the inner box 6; the large-flow nitrogen filling pipe 2 is provided with a regulating valve A21, a solenoid valve A22 and a flowmeter A23 in sequence, and the small-flow nitrogen filling pipe 3 is provided with a regulating valve B31, a solenoid valve B32 and a flowmeter B33 in sequence;

[0025] A three-way valve 5 is provided between the large-flow nitrogen-charging pipeline 2, the small-flow nitrogen-charging pipeline 3 and the main pipeline 1. The main pipeline 1 is connected to the large-flow nitrogen-charging pipeline 2 and the small-flow nitrogen-charging pipeline 3 through the three-way valve 5. A heating device 4 is provided at one end of the large-flow nitrogen-charging pipeline 2 and the small-flow nitrogen-charging pipeline 3. The ends of the large-flow nitrogen-charging pipeline 2 and the small-flow nitrogen-charging pipeline 3 close to the heating device 4 are both connected to the inner box 6.

[0026] Specifically, the main line 1, the large-flow nitrogen filling line 2 and the small-flow nitrogen filling line 3 are all composed of PU air pipes, the end of the large-flow nitrogen filling line 2 close to the regulating valve A21 is the input end A, and the end of the large-flow nitrogen filling line 2 close to the regulating valve B31 is the input end B. The input end A and the input end B are both connected to the main line 1 through the three-way valve 5, and the flowmeter A23 and the flowmeter B33 are both composed of float flowmeters. The nitrogen pressure can be adjusted by the regulating valve A21 and the regulating valve B31, and the nitrogen flow rate is always controlled by the flowmeter A23 and the flowmeter B33, so that from the beginning to the end of the test, the nitrogen input box is always kept in a positive pressure state.

[0027] Specifically, the heating device 4 is composed of a heating box 41 and two stainless steel pipes 42. The stainless steel pipes 42 are arranged in a spiral structure inside the heating box 41. The stainless steel pipes 42 are respectively connected to the large flow nitrogen filling pipeline 2 and the small flow nitrogen filling pipeline 3. The nitrogen can increase the heating contact surface between the heating box 41 through the stainless steel pipes 42 with a spiral structure, so that the nitrogen is heated to the set temperature faster, the temperature difference between the nitrogen temperature and the inner box 6 is reduced, and the temperature fluctuation of the inner box 6 is further avoided.

[0028] See also Figure 2 The specific implementation of a pipeline control method of an anaerobic high-temperature nitrogen furnace is based on the pipeline system of the above-mentioned anaerobic high-temperature nitrogen furnace, and includes the following steps:

[0029] S1, preset the oxygen concentration interval, start the oxygen concentration analyzer 61 inside the inner box 6 to detect the oxygen concentration, and obtain the oxygen concentration percentage A;

[0030] S2, fast nitrogen charging, start the solenoid valve A22 and the solenoid valve B32, the large flow nitrogen charging pipeline 2 and the small flow nitrogen charging pipeline 3 are both connected to the main pipeline 1, and the large flow nitrogen charging pipeline 2 and the small flow nitrogen charging pipeline 3 simultaneously charge nitrogen to the heating device 4;

[0031] S3, when the oxygen concentration percentage A is less than the preset oxygen concentration range, S2 is omitted, the solenoid valve A22 is closed, the solenoid valve B32 is started, the small flow nitrogen filling pipeline 3 is connected to the main pipeline 1, and the small flow nitrogen filling pipeline 3 is charged with nitrogen to the heating device 4.

[0032] The process of replacing oxygen with nitrogen in the anaerobic high-temperature nitrogen furnace: the oxygen concentration inside the inner box 6 is detected by the oxygen concentration analyzer 61, and the heating device 4 can preheat the internal stainless steel pipe 42 to prevent the temperature inside the box from fluctuating, making the test more stable;

[0033] When the oxygen concentration percentage A is greater than the preset oxygen concentration range, S2 is executed to start the solenoid valve A22 and the solenoid valve B32, and the large-flow nitrogen filling pipeline 2 and the small-flow nitrogen filling pipeline 3 are both connected to the main pipeline 1, and the large-flow nitrogen filling pipeline 2 and the small-flow nitrogen filling pipeline 3 simultaneously fill nitrogen to the heating device 4;

[0034] At the same time, the oxygen concentration analyzer 61 continuously detects the oxygen concentration of the inner box 6. When the oxygen concentration percentage A is less than or equal to the preset oxygen concentration range, it proves that the oxygen concentration of the inner box 6 is suitable, and S3 is executed to close the solenoid valve A22, start the solenoid valve B32, and connect the small-flow nitrogen filling pipeline 3 to the main pipeline 1. The small-flow nitrogen filling pipeline 3 fills nitrogen to the heating device 4, and a small-flow nitrogen is kept charged, so that the oxygen concentration inside the inner box 6 is maintained within the preset oxygen concentration range, so that from the test to the end, the nitrogen input box is always kept in a positive pressure state.

[0035] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention is disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technician familiar with the profession can make some changes or modifications to equivalent embodiments of equivalent changes by using the technical contents disclosed above without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent changes and modifications made to the above embodiments according to the technology of the present invention are within the scope of the technical solution of the present invention without departing from the content of the technical solution of the present invention.

Claims

1. A piping system for an anaerobic high-temperature nitrogen furnace, characterized in that: include A main pipe and an inner box, wherein the main pipe is provided with a single joint, an air source filter and a pressure detector in sequence, and an oxygen concentration analyzer is provided inside the inner box; A large-flow nitrogen filling pipeline, wherein the large-flow nitrogen filling pipeline is provided with a regulating valve A, a solenoid valve A and a flow meter A in sequence; A small-flow nitrogen-filling pipeline, wherein the small-flow nitrogen-filling pipeline is provided with a regulating valve B, a solenoid valve B and a flowmeter B in sequence; A three-way valve is provided between the large-flow nitrogen filling pipeline, the small-flow nitrogen filling pipeline and the main pipeline, and the main pipeline is respectively connected with the large-flow nitrogen filling pipeline and the small-flow nitrogen filling pipeline through the three-way valve. A heating device is provided at one end of the large-flow nitrogen filling pipeline and the small-flow nitrogen filling pipeline, and the ends of the large-flow nitrogen filling pipeline and the small-flow nitrogen filling pipeline close to the heating device are both connected with the inner box.

2. The piping system of an anaerobic high-temperature nitrogen furnace according to claim 1, characterized in that: The main pipeline, the large-flow nitrogen filling pipeline and the small-flow nitrogen filling pipeline are all composed of PU air pipes.

3. The piping system of an anaerobic high-temperature nitrogen furnace according to claim 1, characterized in that: The end of the large-flow nitrogen filling pipeline close to the regulating valve A is the input end A, and the end of the large-flow nitrogen filling pipeline close to the regulating valve B is the input end B. Both the input end A and the input end B are connected to the main pipeline through a three-way valve.

4. The piping system of an anaerobic high-temperature nitrogen furnace according to claim 1, characterized in that: The flowmeter A and the flowmeter B are both composed of float type flowmeters.

5. The piping system of an anaerobic high-temperature nitrogen furnace according to claim 4, characterized in that: The heating device is composed of a heating box and two stainless steel pipes. The stainless steel pipes are arranged in a spiral structure inside the heating box. The stainless steel pipes are respectively connected to a large-flow nitrogen filling pipeline and a small-flow nitrogen filling pipeline.

6. A pipeline control method for an anaerobic high-temperature nitrogen furnace, based on a pipeline system of an anaerobic high-temperature nitrogen furnace according to any one of claims 1 to 5, characterized in that: The following steps are involved: S1, preset the oxygen concentration range, start the oxygen concentration analyzer inside the inner box to detect the oxygen concentration, and obtain the oxygen concentration percentage A; S2, fast nitrogen charging, start solenoid valve A and solenoid valve B, the large flow nitrogen charging pipeline and the small flow nitrogen charging pipeline are both connected to the main pipeline, and the large flow nitrogen charging pipeline and the small flow nitrogen charging pipeline charge nitrogen to the heating device at the same time; S3, when the oxygen concentration percentage A is less than the preset oxygen concentration range, S2 is omitted, the solenoid valve A is closed, the solenoid valve B is started, the small flow nitrogen filling pipeline is connected to the main pipeline, and the small flow nitrogen filling pipeline is used to fill nitrogen to the heating device.

7. The pipeline control method of an anaerobic high-temperature nitrogen furnace according to claim 6, characterized in that: The regulating valve A and regulating valve B are used to regulate the nitrogen pressure in S2 or S3.

Images