Detector testing device and method
By designing a test device for infrared detectors, the reflection surface adjustment of the main spectrometer assembly and auxiliary spectrometer assembly is solved, the cumbersome problems of mobile detectors and data acquisition components are improved, and the testing efficiency and accuracy are achieved. High-efficiency response rate test of each detection abutment.
Patent Information
- Application Number
- CN202411314281.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-19
- Publication Date
- 2024-12-27
AI Technical Summary
In infrared detector response rate testing, the mobile detector, data acquisition components and related electrical circuits are cumbersome, resulting in low testing efficiency and high time cost, which affects the test accuracy.
A testing device is designed, including a first bold body, a plurality of detection bases, a main spectrometer assembly and an auxiliary spectrometer assembly. By adjusting the reflection surface orientation of the main spectrometer assembly and the auxiliary spectrometer assembly, a plurality of detection bases are realized. The response rate test of infrared detectors on the stage avoids the necessity of moving the detectors and data acquisition components.
The test process is simplified, efficiency is improved, signal interference is reduced, testing accuracy is guaranteed, and the testing of infrared detectors on multiple different detection abutments is completed in a short time.
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Figure CN119197774A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the field of infrared detector imaging, and in particular to a detector testing device and method. Background Art
[0002] The response rate test is one of the important tests to judge the performance of infrared detectors. It requires the infrared detector to receive the radiation emitted by the black body target surface, and then collect data through the data acquisition component connected to the infrared detector to collect the response of the infrared detector to the radiation emitted by the black body target surface.
[0003] When realizing that the radiation of the blackbody target surface is irradiated to the infrared detectors on different detection bases, it is often necessary to move the infrared detectors and data acquisition components, as well as related electrical circuits, to ensure that the uniformity of the blackbody target surface radiation received by the infrared detectors on different detection bases meets the test requirements.
[0004] However, the mobile infrared detectors, data acquisition components, and related electrical circuits are relatively cumbersome, which increases the time cost and reduces the test efficiency. Summary of the invention
[0005] The embodiment of the present invention provides a detector testing device and method, aiming to simply and efficiently perform response rate testing on a plurality of infrared detectors on different detection bases.
[0006] To achieve the above object, the embodiments of the present invention adopt the following technical solutions:
[0007] In a first aspect, the present application provides a detector testing device, the detector testing device comprising: a first black body, a plurality of detection bases, a main beam splitter assembly and a plurality of auxiliary beam splitter assemblies. The first black body comprises a first black body target surface, and the first black body target surface is configured to emit a first radiation. A plurality of detection bases are arranged around the first black body, and the detection base comprises a bearing surface for setting the detector. The main beam splitter assembly is arranged on one side of the first black body target surface, and the main beam splitter assembly has a first reflection surface. An auxiliary beam splitter assembly is arranged on one side of the bearing surface of a detection base, and the auxiliary beam splitter assembly has a second reflection surface. The main beam splitter assembly is configured to adjust the orientation of the first reflection surface to reflect the first radiation emitted by the first black body target surface to the second reflection surface of an auxiliary beam splitter assembly. The auxiliary beam splitter assembly is configured to adjust the orientation of the second reflection surface to reflect the first radiation reflected by the first reflection surface to the corresponding detection base.
[0008] Multiple detectors are arranged on each of the multiple detection bases, and an auxiliary beam splitter assembly is arranged above each detection base. The first radiation emitted by the first black body is irradiated on the first reflection surface of the main beam splitter assembly, and the first reflection surface of the main beam splitter assembly reflects the first radiation to the second reflection surface of the auxiliary beam splitter assembly, and the second reflection surface of the auxiliary beam splitter assembly then reflects the first radiation reflected by the first reflection surface to the multiple detectors on the detection base. Since the main beam splitter assembly and the auxiliary beam splitter assembly can be flipped and adjusted, and one auxiliary beam splitter assembly corresponds to one detection base, as long as the main beam splitter assembly and the auxiliary beam splitter assemblies corresponding to different detection bases are flipped and adjusted, the optical path can be changed so that the first radiation is incident on the infrared detector on the corresponding detection base after being reflected by the first reflection surface and the second reflection surface. For the detection of infrared detectors on any detection base, it is only necessary to adjust the direction of the first reflective surface of the main beam splitter assembly and the direction of the second reflective surface of the auxiliary beam splitter assembly. There is no need to move the infrared detector and data acquisition components, as well as related electrical circuits. This is simple and quick, so that the test of infrared detectors on multiple different detection bases can be completed in a relatively short time, greatly improving efficiency.
[0009] As a possible implementation, the main beam splitter assembly includes a main beam splitter and a first flip mechanism. One side surface of the main beam splitter is a first reflective surface. The first flip mechanism is connected to the main beam splitter, and the first flip mechanism is configured to be able to rotate around a first axis, the first axis is perpendicular to the direction in which the first black body emits the first radiation, so as to change the pitch angle of the main beam splitter. The first flip mechanism is also configured to be able to rotate around a second axis, the second axis is perpendicular to the first axis, so as to change the orientation of the main beam splitter.
[0010] As a possible implementation, the auxiliary beam splitter assembly includes an auxiliary beam splitter and a second flip mechanism, one side surface of the auxiliary beam splitter is a second reflective surface. The second flip mechanism is connected to the auxiliary beam splitter, and the second flip mechanism is configured to be able to rotate around a third axis, the third axis is parallel to the first axis, so as to change the pitch angle of the auxiliary beam splitter.
[0011] As a possible implementation method, the center of the orthographic projection of each detection base on the first reference plane intersects with the line connecting the center of the orthographic projection of the first black body on the first reference plane. The first reference plane is the plane where the multiple detection bases are located. The projection of the second reflection surface of the auxiliary beam splitter assembly on the bearing surface on the detection base covers the bearing surface. The projection of the first reflection surface of the main beam splitter assembly on the second reflection surface of the auxiliary beam splitter assembly in the horizontal direction falls on the second reflection surface.
[0012] As a possible implementation, the detector performance test device further includes a first filter set. The first filter set includes at least one first filter, and the first filter has a first transmittance. In the case where the first filter set includes a plurality of first filters, the first transmittances of the plurality of first filters are different. The first filter can be arranged between the detection base and the auxiliary spectrometer assembly corresponding to the detection base.
[0013] As a possible implementation, the detector performance test device also includes a second black body, the second black body includes a second black body target surface, and the second black body target surface is configured to emit a second radiation. The second black body and the first black body are respectively arranged on both sides of the main beam splitter assembly, and the first black body and the second black body are directly opposite in the vertical direction. The main beam splitter assembly is also configured to adjust the orientation of the first reflection surface to reflect the second radiation emitted by the second black body target surface to the second reflection surface of an auxiliary beam splitter assembly. The auxiliary beam splitter assembly is also configured to adjust the orientation of the second reflection surface to reflect the second radiation reflected by the second reflection surface to the corresponding detection base.
[0014] As a possible implementation manner, the detector performance testing device further includes a second filter, and the second filter is configured to be disposed between the detection base and an auxiliary spectrometer assembly corresponding to the detection base.
[0015] As a possible implementation manner, the detector performance testing device further includes an aperture, and the aperture is arranged between the detection base and an auxiliary beam splitter assembly corresponding to the detection base.
[0016] As a possible implementation, the detection base includes a detector interface group and a data acquisition component, the detector interface group includes a plurality of interfaces, and a plurality of infrared detectors on the detection base are respectively connected to the data acquisition component through the plurality of interfaces.
[0017] As a possible implementation, the main beam splitter assembly further includes a first temperature sensor configured to sense the temperature of the main beam splitter. The auxiliary beam splitter assembly further includes a second temperature sensor configured to sense the temperature of the auxiliary beam splitter.
[0018] As a possible implementation method, the detector testing device also includes a processor, which is connected to the first temperature sensor and the second temperature sensor. The processor is configured to: obtain the temperature values sensed by the first temperature sensor and the second temperature sensor, and the actual voltage output by the device under test, to determine whether the device under test is qualified.
[0019] As a possible implementation, the main beam splitter assembly further includes a first temperature equalizing device configured to maintain the temperature of the main beam splitter within a first temperature range. The auxiliary beam splitter assembly further includes a second temperature equalizing device configured to maintain the temperature of the auxiliary beam splitter within a second temperature range.
[0020] In a second aspect, an embodiment of the present application further provides a method for testing a detector, which is applied to a detector testing device as mentioned in the first aspect and its possible implementation methods. The method includes: loading the detection base. Loading the detection base includes: setting a plurality of detectors on the detection base. Adjusting the main beam splitter plate assembly and the auxiliary beam splitter plate assembly corresponding to the detection base. Adjusting the main beam splitter plate assembly and the auxiliary beam splitter plate assembly corresponding to the detection base includes: adjusting the orientation of the first reflection surface in the main beam splitter plate assembly and the orientation of the second reflection surface in the auxiliary beam splitter plate assembly, so that the first radiation emitted by the first black body target surface is reflected to the plurality of detectors on the detection base. Collecting detection data, collecting detection data includes: collecting detection data on the first radiation emitted by the first black body target surface.
[0021] As a possible implementation, the main beam splitter includes a first flipping mechanism, and the auxiliary beam splitter includes a second flipping mechanism. Adjusting the main beam splitter assembly and the auxiliary beam splitter assembly so that the first radiation is reflected to multiple infrared detectors on the detection base includes: adjusting the first flipping mechanism so that the first flipping mechanism rotates around the first axis, and adjusting the second flipping mechanism so that the second flipping mechanism rotates around the second axis, so that the first reflection surface reflects the first radiation emitted by the first black body target surface to the second reflection surface of the auxiliary beam splitter assembly, and the second reflection surface reflects the first radiation reflected by the first reflection surface to the corresponding multiple detectors on the detection base.
[0022] As a possible implementation, the detector testing device further includes a first filter group, including at least one first filter, each first filter having a specific transmittance. A first filter is arranged between the corresponding auxiliary spectrometer assembly and the plurality of detectors on the detection base. Collecting detection data includes: collecting first detection data. Switching the first filter or removing the first filter. Collecting second detection data.
[0023] As a possible implementation, the detector testing device further includes a second black body. Adjusting the auxiliary beam splitter assembly corresponding to the main beam splitter assembly and the detection base also includes: adjusting the orientation of the first reflection surface in the main beam splitter assembly and the orientation of the second reflection surface in the auxiliary beam splitter assembly, so that the second radiation emitted by the second black body target surface is reflected to the multiple infrared detectors on the detection base. Collecting detection data also includes: collecting detection data on the first radiation emitted by the second black body target surface.
[0024] As a possible implementation, the detection base includes a detector interface group and a data acquisition module. After loading the detection base, the method further includes: powering on the data acquisition module. After collecting detection data, the method further includes: replacing multiple detectors on the detection base.
[0025] As a possible implementation, the detector test includes N detection bases. When powering on the data acquisition module of the i-th detection base, feeding the (i + 1)-th detection base. When performing data acquisition on the i-th detection base, powering on the data acquisition module on the (i + 1)-th detection base. When replacing multiple detectors on the i-th detection base, performing data acquisition on the (i + 1)-th detection base. Among them, performing the first data acquisition on the detection base includes: adjusting the main beam splitter assembly and the auxiliary beam splitter assembly corresponding to the detection base. Collecting detection data. 1 ≤ i < i + 1 < N, both i and N are positive integers. Description of the Drawings
[0026] Figure 1 Schematic diagram of the composition of a detector test device provided by an embodiment of the present application;
[0027] Figure 2 Partial side view of a detector test device provided by an embodiment of the present application;
[0028] Figure 3 Schematic diagram of a main beam splitter assembly provided by an embodiment of the present application;
[0029] Figure 4 Schematic diagram of an auxiliary beam splitter assembly provided by an embodiment of the present application;
[0030] Figure 5 Top view of a detector test device provided by an embodiment of the present application;
[0031] Figure 6 Schematic diagram of a flip adjustment provided by an embodiment of the present application;
[0032] Figure 7 Another schematic diagram of a flip adjustment provided by an embodiment of the present application;
[0033] Figure 8 Another partial side view of a detector test device provided by an embodiment of the present application;
[0034] Fig. 9 Another top view of a detector test device provided by an embodiment of the present application;
[0035] Fig.10 Flowchart of a detector performance test method provided by an embodiment of the present application;
[0036] Fig.11 Another schematic diagram of a flip adjustment provided by an embodiment of the present application;
[0037] Fig.12 Flowchart of a usage method provided by an embodiment of the present application;
[0038] Fig.13 A flowchart of another method of use provided in an embodiment of the present application. DETAILED DESCRIPTION
[0039] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0040] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.
[0041] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In addition, when describing the pipeline, the "connected" and "connection" used in the present invention have the meaning of conduction. The specific meaning needs to be understood in conjunction with the context.
[0042] In the embodiments of the present invention, words such as "exemplary" or "for example" are used to indicate examples, illustrations or explanations. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present invention should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.
[0043] Infrared radiation is an electromagnetic wave with a wavelength between visible light and microwaves. An infrared detector is a device that converts incident infrared radiation signals into electrical signals for output. An important indicator for judging the quality of infrared detectors is the responsivity, which is the ratio of the output voltage of the infrared detector to the infrared radiation power input to the infrared detector. The responsivity is related to the relative spectral distribution of the light source, the direction and polarization of the incident light, the intensity of the incident light, the uniformity of the irradiation, the temperature of the device, and the test circuit. Therefore, when marking the responsivity, the corresponding test conditions will also be noted.
[0044] When operators test the responsivity of infrared detectors (hereinafter referred to as responsivity test), black bodies are usually used. In the responsivity test, the infrared detectors are placed under black bodies with different temperatures in turn, and the radiation emitted by the target surface of the black body is received by the infrared detector under the black body.
[0045] Since there are many infrared detectors to be tested (Device Under TEST, DUT), a larger black body is usually used in the response rate test. The radiation emitted by the larger black body target surface can cover a larger area. Placing more infrared detectors under the area covered by the radiation emitted by the black body target surface can achieve synchronous detection of multiple infrared detectors.
[0046] In the response rate test, a data acquisition component is usually included. The data acquisition component is connected to multiple infrared detectors. When the radiation emitted by the black body target surface hits the multiple infrared detectors, the data acquisition component can collect the voltage response of each connected infrared detector to the radiation emitted by the black body target surface. After computer processing, the performance of each infrared detector on the response rate is obtained.
[0047] Since the infrared detector needs to receive radiation from at least two black body targets with different temperatures in the responsivity test, and the black body is relatively large, it is usually chosen to move the infrared detector, data acquisition components, and related electrical circuits to the bottom of the black body targets with different temperatures. However, in the process of moving the infrared detector, data acquisition components, and related electrical circuits, there is a high probability of signal interference, which affects the accuracy of the test, and the time cost is high, resulting in a low responsivity test.
[0048] In view of this, the present application proposes a detector testing device (hereinafter also referred to as a detector performance testing device), illustratively, as Figure 1 As shown, Figure 1 The components of the detector test device are shown. Figure 1 The detector testing device 100 includes: a first black body 1, a plurality of detection bases 2, a main beam splitter assembly 3 and a plurality of auxiliary beam splitter assemblies 4. Figure 1 The plurality of detection bases 2 shown in the figure include a first detection base 2a, a second detection base 2b and a third detection base 2c. Figure 1 The plurality of auxiliary beam splitter plate assemblies 4 shown in FIG. 4 include a first auxiliary beam splitter plate assembly 4 a , a second auxiliary beam splitter plate assembly 4 b and a third auxiliary beam splitter plate assembly 4 c .
[0049] For example, Figure 2 As shown, Figure 2 This is a partial side view of the detector test device, see Figure 2The first black body 1 includes a first black body target surface 11, and the first black body target surface 11 is configured to emit a first radiation, exemplarily as Figure 2 As shown by the middle arrow, the first black body target surface 11 can emit black body radiation along the first direction. A plurality of detectors 5 are arranged on each detection base 2, and a plurality of detection bases 2 are arranged around the first black body 1. The detection base 2 includes a bearing surface for arranging the detectors 5.
[0050] The main beam splitter assembly is arranged on one side of the first black body target surface, for example, Figure 2 As shown, the main beam splitter assembly 3 is arranged on one side of the first black body target surface 11 along the first direction and has a first reflecting surface. As a possible implementation, Figure 3 As shown, the main beam splitter assembly 3 includes a main beam splitter 31 and a first flip mechanism 32. One side surface of the main beam splitter 31 is a first reflection surface, exemplarily, as Figure 3 As shown, the main beam splitter plate 31 includes a first surface 311 and a second surface 312 opposite to each other, and the first surface 311 is a first reflection surface.
[0051] An auxiliary beam splitter assembly is disposed on one side of a bearing surface of a detection base, and the auxiliary beam splitter assembly has a second reflection surface. As a possible implementation, Figure 4 As shown, the auxiliary beam splitter assembly 4 includes an auxiliary beam splitter 41 and a second flip mechanism 42, and one side surface of the auxiliary beam splitter is a second reflective surface. Figure 4 As shown, the auxiliary beam splitter plate 41 includes a third surface 411 and a fourth surface 412 which are opposite to each other, and the third surface 411 is a second reflection surface.
[0052] "An auxiliary beam splitter assembly is arranged on one side of the bearing surface of a detection base" means that an auxiliary beam splitter assembly corresponds to a detection base, and Figure 1 That is to say, the first detection base 2a corresponds to the first auxiliary spectrometer assembly 4a, and the first auxiliary spectrometer assembly 4a is arranged on one side of the bearing surface of the first detection base 2a. The second detection base 2b corresponds to the second auxiliary spectrometer assembly 4b, and the second auxiliary spectrometer assembly 4b is arranged on one side of the bearing surface of the second detection base 2b. The third detection base 2c corresponds to the third auxiliary spectrometer assembly 4c, and the third auxiliary spectrometer assembly 4c is arranged on one side of the bearing surface of the third detection base.
[0053] Reference Figure 2 The main beam splitter assembly 3 is configured to adjust the orientation of the first reflection surface 311 to reflect the first radiation emitted by the first black body target surface 11 to the second reflection surface 411 of an auxiliary beam splitter assembly 4. The auxiliary beam splitter assembly 4 is configured to adjust the orientation of the second reflection surface 411 to reflect the first radiation reflected by the first reflection surface 311 to the corresponding detection base 2.
[0054] As a possible implementation, the operator can adjust the first flipping mechanism 32 of the main beam splitter assembly 3 to flip the main beam splitter assembly 3, thereby adjusting the orientation of the first reflection surface 311, and reflecting the first radiation emitted by the first black body target surface 11 to the second reflection surface 411 of the auxiliary beam splitter assembly 4 through the first reflection surface 311. The operator can adjust the second flipping mechanism 42 of the auxiliary beam splitter assembly 4 to flip the auxiliary beam splitter assembly 4, thereby adjusting the orientation of the second reflection surface 411, and reflecting the first radiation reflected by the first reflection surface 311 to the corresponding multiple detectors 5 on the detection base 2 through the second reflection surface 411. The optical path of the first radiation reflected by the main beam splitter assembly 3 and the auxiliary beam splitter assembly 4 is as follows: Figure 2 As indicated by the arrow in .
[0055] The embodiment provided in the present application supports the detection of detectors on multiple detection bases, where multiple detection bases are arranged around the first black body. More specifically, the center of the orthographic projection of each detection base 2 on the first reference plane intersects with the line connecting the center of the orthographic projection of the first black body 1 on the first reference plane. The first reference plane is the plane where the multiple detection bases are located. For example, Figure 5 As shown, Figure 5 This is a top view of the detector test device. Figure 5 , in the first reference plane A1, the line connecting the center of the first detection base 21 and the center of the orthographic projection of the first black body 1 on the first reference plane A1 is L1, the line connecting the center of the second detection base 22 and the center of the orthographic projection of the first black body 1 on the first reference plane A1 is L2, and the line L1 and the line L2 intersect. The line connecting the center of the orthographic projection of each detection base 2 on the first reference plane intersects with the line connecting the center of the orthographic projection of the first black body 1 on the first reference plane. It is ensured that two or more detection bases are not set in the same connection direction, so that the radiation emitted by the first black body target surface can be reflected to the detector of each detection base after being adjusted by the main beam splitter assembly and the auxiliary beam splitter assembly.
[0056] Multiple detectors are arranged on each of the multiple detection bases, and an auxiliary beam splitter assembly is arranged above each detection base. The first radiation emitted by the first black body is irradiated on the first reflection surface of the main beam splitter assembly, and the first reflection surface of the main beam splitter assembly reflects the first radiation to the second reflection surface of the auxiliary beam splitter assembly, and the second reflection surface of the auxiliary beam splitter assembly then reflects the first radiation reflected by the first reflection surface to the multiple detectors on the detection base. Since the main beam splitter assembly and the auxiliary beam splitter assembly can be flipped and adjusted, and one auxiliary beam splitter assembly corresponds to one detection base, as long as the main beam splitter assembly and the auxiliary beam splitter assemblies corresponding to different detection bases are flipped and adjusted, the optical path can be changed so that the first radiation is incident on the infrared detector on the corresponding detection base after being reflected by the first reflection surface and the second reflection surface. For the detection of the infrared detector on any detection base, it is only necessary to adjust the direction of the first reflection surface of the main beam splitter assembly and the direction of the second reflection surface of the auxiliary beam splitter assembly. It is no longer necessary to move the infrared detector, data acquisition components and related electrical circuits, thus avoiding signal interference that may occur during the movement of the infrared detector, data acquisition components and related electrical circuits, and ensuring the accuracy of the response rate test. The entire detection process is simple and rapid, so that the test of infrared detectors on multiple different detection bases can be completed in a relatively short time, greatly improving efficiency.
[0057] Combination Figure 3 , Figure 6 as well as Figure 7 "The main beam splitter assembly 3 is configured to be able to adjust the orientation of the first reflecting surface 311 by flipping motion", which is specifically achieved by the first flipping mechanism 32 on the main beam splitter assembly 3. The first flipping mechanism 32 can rotate around the first axis L3, and the first axis L3 is perpendicular to the direction in which the first black body emits the first radiation, so as to change the pitch angle of the main beam splitter. And it can rotate around the second axis L4, and the second axis L4 is perpendicular to the first axis L3. The first axis L3 passes through the first flipping mechanism 32 and is perpendicular to the first direction. The second axis L4 passes through the first flipping mechanism 32, and the second axis L4 is perpendicular to the first axis L3. The first flipping mechanism 32 can rotate around the second axis L4, thereby changing the orientation of the main beam splitter.
[0058] Reference Figure 4 , Figure 6 as well as Figure 7 The auxiliary beam splitter assembly 4 is configured to adjust the orientation of the second reflective surface 411 by flipping motion, which is specifically achieved by the second flipping mechanism 42 on the auxiliary beam splitter assembly 4. As a possible implementation, the second flipping mechanism 42 can rotate around a third axis, thereby changing the pitch angle of the auxiliary beam splitter, and the third axis is parallel to the first axis.
[0059] In other embodiments, the second flip mechanism 42 can rotate around the fourth axis in addition to the third axis. In this case, the third axis is similar to the first axis, and the fourth axis is similar to the second axis. Figure 6 and Figure 7 The second flipping mechanism 42 is illustrated by L3 and L4 in FIG. The second flipping mechanism 42 is capable of rotating around a third axis (L3), and is capable of rotating around a fourth axis (L4). The third axis (L3) passes through the second flipping mechanism 42 and is parallel to the first direction. The fourth axis (L4) passes through the second flipping mechanism 42, and the fourth axis (L4) is perpendicular to the second reference plane A2, and the second reference plane A2 is perpendicular to the first reference plane A1 and parallel to the first direction. The more angles of rotation that the second flipping mechanism of the auxiliary beam splitter assembly can support, the more position adjustments the auxiliary beam splitter assembly can achieve, thereby enhancing its flexibility of use.
[0060] The main beam splitter assembly can realize rotational movement around the first axis L3 by adjusting the first flip mechanism, that is, the first reflection surface is rotated from Figure 6 The auxiliary beam splitter assembly can realize rotational movement around the third axis by adjusting the second flip mechanism, that is, the second reflective surface is changed from the C2 position to the C1 position. Figure 6 The C2 position in the detection device is changed to the C1 position. The adjustment of the rotational motion around the first axis L3 and the third axis is mainly used to adjust the optical path, so that the first radiation can be better hit on the infrared detector through the first reflection surface and the second reflection surface, and ensure that the radiation emitted by the black body target surface is reflected through the optical path to the radiation target surface within the field of view of the infrared detector at the edge of the detection base.
[0061] The main beam splitter assembly can realize rotational movement around the second axis L4 by adjusting the first flip mechanism, that is, the first reflecting surface is rotated from Figure 7 The auxiliary beam splitter assembly can realize rotational movement around the fourth axis by adjusting the second flip mechanism, that is, the second reflecting surface is changed from D1 to D2. Figure 7 The main beam splitter assembly rotates around the second axis L4 through the first flip mechanism and is mainly used for the response rate test of infrared detectors on different detection bases. For example, Figure 5, the infrared detector 51 on the first detection base 21 has completed the response rate test. In order to detect the response rate performance of the infrared detector 52 on the second detection base 22, it is necessary to rotate the main beam splitter assembly 3 around the second axis L4 so that the first radiation can be directed toward the top of the second detection base 22 after being reflected by the first reflection surface. In some embodiments, the projection of the second reflection surface of the auxiliary beam splitter assembly on the bearing surface on the detection base covers the bearing surface. The projection of the first reflection surface of the main beam splitter assembly on the second reflection surface of the auxiliary beam splitter assembly in the horizontal direction falls on the second reflection surface. The detector is arranged on the bearing surface of the detection base, and the projection of the second reflection surface of the auxiliary beam splitter assembly on the bearing surface of the detection base covers the bearing surface, which ensures that each detector on the bearing surface can receive the black body radiation reflected from the auxiliary beam splitter assembly. The horizontal direction is a direction parallel to the first reference plane. The projection of the first reflecting surface of the main beam splitter assembly on the second reflecting surface of the auxiliary beam splitter assembly in the horizontal direction falls on the second reflecting surface, ensuring that the black body radiation reflected by the first beam splitter can be completely incident on the second beam splitter, avoiding the situation where part of the black body radiation does not enter the second beam splitter due to the small size of the second beam splitter or the deviation in the horizontal position between the first beam splitter and the second beam splitter (the upper edge of the first beam splitter and the upper edge of the second beam splitter are at different heights relative to the ground), while the part of the black body radiation originally needs to be reflected from the second beam splitter to the detector. This further ensures that each detector on the bearing surface can receive the black body radiation reflected from the auxiliary beam splitter assembly.
[0062] In some embodiments, Figure 2 As shown, the detector performance test device also includes a first filter set 6. The first filter set 6 includes at least one first filter, and the first filter has a first transmittance. In the case where the first filter set 6 includes multiple first filters, the first transmittances of the multiple first filters are different. The first filter can be arranged between the detection base and the auxiliary spectrometer assembly 42 corresponding to the detection base 2.
[0063] A filter is an optical element that can selectively transmit or absorb light within a specific frequency range. Generally speaking, the material of the filter has a specific energy level structure and can selectively absorb light of a specific wavelength. Since the first filter is configured to be disposed between the corresponding auxiliary spectrometer 42 component and the multiple detectors 5 on the detection base 2, the first radiation will pass through the first filter group 6 before being reflected on the detector 5 through the optical path. By switching different first filters, the detector can receive different first radiations, which is equivalent to switching different black bodies to test the detector. Therefore, in this case, only one black body and the first filter group are needed to complete the response rate test of the infrared detector, and the cost of the filter is lower than that of the black body, thus greatly reducing the test cost.
[0064] As a possible implementation, the first filter group has only one first filter. Since the first filter has a first transmittance, by switching the first filter, the first radiation with a transmittance of 100% and after the first transmittance can be formed.
[0065] In some embodiments, Figure 8 As shown, Figure 8 A partial side view of another detector performance testing device provided in an embodiment of the present application. Figure 8 , the detector performance test device also includes a second black body 7, the second black body 7 includes a second black body target surface 71, and the second black body target surface 71 is configured to emit second radiation along a second direction. The second black body 7 and the first black body 1 are respectively arranged on both sides of the main beam splitter assembly 3, and the first black body 1 and the second black body 7 are directly opposite in the vertical direction, and the vertical direction is a direction perpendicular to the first reference plane. The main beam splitter assembly 3 is also configured to be able to reflect the second radiation emitted by the second black body target surface 71 to the second reflection surface 411 of the auxiliary beam splitter assembly 4 by adjusting the orientation of the first reflection surface 311. The auxiliary beam splitter assembly 4 is also configured to adjust the orientation of the second reflection surface 411 to reflect the second radiation reflected by the second reflection surface 411 to the corresponding detection base 2.
[0066] For example, Fig. 9 As shown, Fig. 9 A top view of another detector performance test device provided in an embodiment of the present application. Using a double black body, i.e., a first black body and a second black body, to test the detector response rate can make the radiation emitted by the black body target surface more uniform through the optical path and reflected to the radiation target surface within the field of view of the infrared detector at the edge of the detection base. For the response rate test, the obtained test result is more accurate.
[0067] Since the double blackbody response rate test no longer requires the first filter in the filter assembly to form the first radiation with difference, the filter assembly is no longer needed, and the step of switching the first filter is also omitted in practical applications. As a possible implementation method, refer to Figure 8 The detector performance test device further includes a second filter 61, which is configured to be disposed between the detection base and the auxiliary beam splitter assembly 42 corresponding to the detection base 2. The second filter 61 is used to filter out interference clutter to further improve the accuracy of the detection result.
[0068] As a possible implementation, Figure 2 or Figure 8 As shown, the detector performance testing device further includes an aperture 8 , which is disposed between the detection base and an auxiliary beam splitter assembly 42 corresponding to the detection base 2 .
[0069] The aperture is an entity that limits the light beam in an optical system. It can be the edge of a lens, a frame, or a specially set screen with holes. Its role can be divided into two aspects: limiting the light beam or limiting the size of the field of view (imaging range). In this application, it is used to further ensure the uniformity of the radiation target surface within the field of view angle range of the infrared detector at the edge of the detection base, which is emitted by the black body target surface and reflected through the optical path.
[0070] As a possible implementation, refer to Figure 2 or Figure 8 The detection base 2 includes a detector interface group 21 and a data acquisition component 22. The detector interface group 21 includes multiple interfaces, and multiple infrared detectors 5 are connected to the data acquisition component 22 through multiple interfaces. The data acquisition component 22 collects the voltage responses of the infrared detectors 5 corresponding to each interface through different interfaces.
[0071] Taking into account the influence of temperature and radiation on the accuracy of response rate test of the main beam splitter assembly and the auxiliary beam splitter assembly, the test system calibration can be performed on the detector with known performance. The change of black body radiation energy after reflection by the first reflecting surface and the second reflecting surface is calibrated, and the energy difference when the detector is directly irradiated with the radiation emitted by the black body target surface is calibrated, and the original performance indicators are calibrated through data fitting method.
[0072] As a possible implementation, the main spectrometer assembly further includes at least one first temperature sensor configured to obtain the temperature change of the main spectrometer assembly. The auxiliary spectrometer assembly further includes at least one second temperature sensor configured to obtain the temperature change of the auxiliary spectrometer. The first temperature sensor can obtain the temperature of the main spectrometer assembly, and the second temperature sensor can obtain the temperature of the auxiliary spectrometer assembly. Then, according to the influence of the temperature measured by the first temperature sensor on the detection accuracy of the main spectrometer assembly and the influence of the temperature measured by the second temperature sensor on the detection accuracy of the auxiliary spectrometer assembly, calibration is performed to improve the accuracy of the response rate test.
[0073] Exemplarily, the operator conducts a responsivity test with a standard infrared detector, that is, a qualified product is used to conduct the test under black bodies of different temperatures, main beam splitter assemblies of different temperatures, and auxiliary beam splitter assemblies of different temperatures, to obtain the parameters of the standard infrared detector responsivity under black bodies of different temperatures, main beam splitter assemblies of different temperatures, and auxiliary beam splitter assemblies of different temperatures. For example, after the black body radiation emitted by a 100°C black body is reflected by a 25°C main beam splitter assembly and a 28°C auxiliary beam splitter assembly, the voltage response of the infrared detector is 10V. Then, when the temperature detected by the first temperature sensor is 25°C, the temperature detected by the second temperature sensor is 28°C, and the black body used is a 100°C black body, the voltage response of the infrared detector should be 10V. If it exceeds the error range, it is preliminarily judged that the infrared detector is unqualified.
[0074] As a possible implementation method, the detector testing device also includes a processor, which is connected to the first temperature sensor and the second temperature sensor. The processor is configured to: obtain the temperature values sensed by the first temperature sensor and the second temperature sensor, and the actual voltage output by the device under test, to determine whether the device under test is qualified.
[0075] The processor stores the voltage response values of the standard infrared detector under black bodies at different temperatures, main beam splitter components at different temperatures, and auxiliary beam splitter components at different temperatures. Because the processor is connected to the first temperature sensor and the second temperature sensor respectively, the processor can obtain the temperature values sensed by the first temperature sensor and the second temperature sensor. For example, the temperature of the black body used in the test is also known, such as 100°C. The processor measures the temperature value of the main beam splitter component to be 25°C, and the temperature value of the auxiliary beam splitter component to be 28°C. In the processor storage, there will be a reference voltage value corresponding to the black body temperature, the main beam splitter component temperature, and the main beam splitter component temperature, that is, the voltage response value of the standard infrared detector after the black body radiation emitted by the 100°C black body is reflected by the 25°C main beam splitter component and the 28°C auxiliary beam splitter component. The processor determines whether the infrared detector on the detection base is qualified based on the reference voltage value and the actual voltage value of the infrared detector. If the difference between the actual voltage value of the infrared detector obtained by the processor and the corresponding reference voltage value exceeds the allowable error range, it means that the infrared detector is unqualified. If the difference between the actual voltage value of the infrared detector obtained by the processor and the corresponding reference voltage value is within the allowable error range, it means that the infrared detector is qualified.
[0076] As a possible implementation, the main beam splitter assembly also includes at least one first temperature averaging device, which is configured to maintain the temperature of the main beam splitter at a first temperature. The auxiliary beam splitter assembly also includes at least one second temperature averaging device, which is configured to maintain the temperature of the auxiliary beam splitter at a second temperature. By respectively providing at least one temperature averaging device in the main beam splitter assembly and the auxiliary beam splitter assembly, it is ensured that the temperatures of the main beam splitter assembly and the auxiliary beam splitter assembly remain the same. When the temperatures of the main beam splitter assembly and all the auxiliary beam splitter assembly are the same, the degree of influence of the temperature on the main beam splitter assembly and the auxiliary beam splitter assembly is also the same. At this time, the influence of the temperature on the main beam splitter assembly and the auxiliary beam splitter assembly can be regarded as being ignored, thereby improving the accuracy of the response rate test.
[0077] The present application also provides a detector performance testing method, which is applied to the detector performance testing device as described above. Fig.10 As shown, the method includes:
[0078] S1: Load the detection base.
[0079] Loading the detection base includes: arranging a plurality of infrared detectors on the detection base.
[0080] S2: Adjust the main beam splitter assembly and the auxiliary beam splitter assembly corresponding to the detection base.
[0081] Adjusting the auxiliary beam splitter assembly corresponding to the main beam splitter assembly and the detection base includes: adjusting the orientation of the first reflection surface in the main beam splitter assembly and the orientation of the second reflection surface in the auxiliary beam splitter assembly, so that the first radiation emitted by the first black body target surface is reflected to multiple detectors on the detection base.
[0082] For example, refer to Figure 2 , adjust the orientation of the first reflective surface 311 in the main beam splitter assembly 3 and the orientation of the second reflective surface 411 in the auxiliary beam splitter assembly 4, so that the line connecting the center of the first black body target surface 11 and the center of the first reflective surface 311 in the main beam splitter assembly 3 is parallel to the line connecting the center of the second reflective surface 411 in the auxiliary beam splitter assembly 4 and the center of the detection base 2. At this time, the optical path of the first radiation on the first reflective surface and the second reflective surface is vertical, and the first radiation emitted by the first black body target surface can be reflected to multiple detectors on the detection base.
[0083] Figure 2 The example shown is only a response rate test for multiple detectors on one detection base. When the response rate test for multiple detectors on other detection bases is to be performed, the main beam splitter assembly and the auxiliary beam splitter assembly on the corresponding detection base need to be adjusted. For example, Fig.11 After the multiple detectors 52 on the second detection base 22 complete the response rate test, the main beam splitter assembly 3 is flipped and adjusted to adjust the first radiation emitted by the first black body target surface to be reflected to the top of the first detection base 21 through the first reflection surface of the main beam splitter assembly 3, that is, Fig.11 The position shown to the right of the arrow.
[0084] S3: Collecting detection data. Collecting detection data includes: collecting detection data about the first radiation emitted by the first black body target surface. As a possible implementation, the detection base includes a detector interface group and a data acquisition component, and the data acquisition component is used to collect detection data for multiple detectors on the detection base.
[0085] As a possible implementation, refer to Figure 3 and Figure 4, the main beam splitter plate 3 includes a first flip mechanism 32, and the auxiliary beam splitter plate 4 includes a second flip mechanism 42. Adjusting the auxiliary beam splitter plate assembly corresponding to the main beam splitter plate assembly and the detection base includes: adjusting the first flip mechanism 32 to make the first flip mechanism 32 rotate around at least one of the first axis or the second axis, and adjusting the second flip mechanism 42 to make the second flip mechanism 42 rotate around at least one of the third axis or the fourth axis, so that the first reflection surface 311 reflects the first radiation emitted by the first black body target surface to the second reflection surface 411 of the auxiliary beam splitter plate assembly 4, and the second reflection surface 411 reflects the first radiation reflected by the first reflection surface 311 to the corresponding multiple detectors on the detection base.
[0086] For the first flip mechanism 32 to rotate about at least one of the first axis or the second axis, and for the second flip mechanism 42 to rotate about at least one of the third axis or the fourth axis, reference may be made to Figure 6 and Figure 7 , which has been described in detail above and will not be repeated here.
[0087] As a possible implementation, refer to Figure 2 The detector performance test device further includes a first filter group 6, the first filter group 6 includes at least one first filter, and each first filter has a first transmittance. In the case where the first filter group 6 includes a plurality of first filters, the first transmittances of the plurality of first filters are different. The first filter can be arranged between the detection base and the auxiliary spectrometer assembly 42 corresponding to the detection base 2. In this case, step S3 of collecting detection data includes:
[0088] S31: Collect the first detection data.
[0089] S32: Switch the first filter or remove the first filter.
[0090] Since the first filter is configured to be disposed between the corresponding auxiliary spectrometer plate 42 component and the multiple detectors 5 on the detection base 2, the first radiation passes through the first filter group 6 before being reflected on the detector 5 through the optical path. By switching different first filters, the detector can receive first radiation with differences, which is equivalent to switching different black bodies to test the detector.
[0091] As a possible implementation, the first filter group has only one first filter, the first filter has a first transmittance, and by switching the first filter, a first radiation with a transmittance of 100% and with the first transmittance can be formed.
[0092] S32 collects the second detection data.
[0093] In some other embodiments, such as Figure 8 As shown, the detector performance test device further includes a second blackbody 7. Adjusting the auxiliary beam splitter assembly 4 corresponding to the main beam splitter assembly 3 and the detection base 2 further includes: adjusting the orientation of the first reflecting surface 311 in the main beam splitter assembly 3 and the orientation of the second reflecting surface 411 in the auxiliary beam splitter assembly 4, so that the second radiation emitted from the second blackbody target surface 71 is reflected to the multiple detectors 5 on the detection base.
[0094] In this case, step S3 of collecting detection data includes, in addition to collecting detection data on the first radiation emitted from the first blackbody target surface, also collecting detection data on the first radiation emitted from the second blackbody target surface.
[0095] As a possible implementation, the detection base includes a detector interface group and a data acquisition component. In this case, in step S1: after loading the detection base, it further includes: S11: powering on the data acquisition component. After step S3: collecting detection data, it further includes: S4: replacing the multiple detectors on the detection base.
[0096] To more efficiently implement the responsivity test of the infrared detector, based on the detector performance test device and the detector performance test method, this application also provides a corresponding usage method. The usage method is as follows: The detector performance test device includes N detection bases. When powering on the data acquisition component of the i-th detection base, load the (i + 1)-th detection base. When collecting data from the i-th detection base, power on the data acquisition component of the (i + 1)-th detection base. When replacing the multiple detectors on the i-th detection base, collect data from the (i + 1)-th detection base. Among them, collecting data from the detection base includes: adjusting the auxiliary beam splitter assembly corresponding to the main beam splitter assembly and the detection base and collecting detection data. 1 ≤ i < i + 1 < N, both i and N are positive integers.
[0097] According to the different numbers of blackbodies in the detector performance test device, it can be divided into two usage methods. When the detector performance test device only includes the first blackbody, the usage method flow chart is as shown in FIG. 12. When the detector performance test device includes not only the first blackbody but also the second blackbody, the usage method flow chart is as Fig.13 shown.
[0098] Exemplarily, referring to Figure 2 , Figure 5 , and Fig.12When the detectors on three detection bases need to be tested for response rate, the first detection base is loaded first. The multiple detectors 5 are connected to the data acquisition component through the multiple interfaces of the detector interface group. Then, the data acquisition component of the first detection base is powered on for test preparation. Since the time spent on the power-on test preparation of the data acquisition component is close to the time spent on loading the detection base, the second detection base can be loaded while the data acquisition component of the first detection base is powered on for test preparation.
[0099] When the data acquisition component of the first detection base station is ready for power-on testing, the second detection base station is almost finished loading. At this time, the main beam splitter assembly and the auxiliary beam splitter assembly corresponding to the first detection base station are adjusted to make the first radiation emitted from the first black body target surface reflect to the detector of the first detection base station, and the data acquisition component of the first detection base station collects the first detection data. After the first detection data is collected, the first filter is switched or removed to collect the second detection data.
[0100] Since the time spent on collecting detection data and loading materials on the detection base is similar, when the second detection data collection is completed, the second detection base also completes loading synchronously. Then, the detector on the first detection base is replaced. At the same time, the data acquisition component of the second detection base is prepared for power-on testing, and the third detection base is loaded. Since the time spent on the data acquisition component for power-on test preparation is similar to the time spent on loading materials on the detection base, when the new detector is replaced on the first detection base, the data acquisition component of the second detection base also completes the power-on test preparation.
[0101] Then the second detection base station starts to collect detection data, and the data acquisition components of the first and third detection base stations start to power on and prepare for testing. By repeating the whole process continuously, the response rate test efficiency of infrared detectors on different detection base stations can be maximized.
[0102] For example, refer to Figure 2 , Figure 5 ,as well as Fig.13 When the detectors on three detection bases need to be tested for response rate, the first detection base is loaded first. The multiple detectors 5 are connected to the data acquisition component through the multiple interfaces of the detector interface group. Then, the data acquisition component of the first detection base is powered on for test preparation. Since the time spent on the power-on test preparation of the data acquisition component is close to the time spent on loading the detection base, the second detection base can be loaded while the data acquisition component of the first detection base is powered on for test preparation.
[0103] When the data acquisition component of the first detection base station is ready for power-on testing, the second detection base station has almost completed loading. At this time, adjust the main beam splitter plate assembly and the auxiliary beam splitter plate assembly corresponding to the first detection base station so that the first radiation emitted from the first black body target surface is reflected to the detector of the first detection base station, and the data acquisition component of the first detection base station collects the first detection data. After the first detection data is collected, adjust the main beam splitter plate assembly and the auxiliary beam splitter plate assembly corresponding to the first detection base station so that the first radiation emitted from the second black body target surface is reflected to the detector of the first detection base station, and the data acquisition component of the first detection base station collects the second detection data.
[0104] Since the time spent on collecting detection data and loading materials on the detection base is similar, when the second detection data collection is completed, the second detection base also completes loading synchronously. Then, the detector on the first detection base is replaced. At the same time, the data acquisition component of the second detection base is prepared for power-on testing, and the third detection base is loaded. Since the time spent on the data acquisition component for power-on test preparation is similar to the time spent on loading materials on the detection base, when the new detector is replaced on the first detection base, the data acquisition component of the second detection base also completes the power-on test preparation.
[0105] Then the second detection base station starts to collect detection data, and the data acquisition components of the first and third detection base stations start to power on and prepare for testing. By repeating the whole process continuously, the response rate test efficiency of infrared detectors on different detection base stations can be maximized.
[0106] It should be noted that the descriptions in the embodiments of the present application are all based on three different detection bases as an example. In actual applications, there may be a greater or lesser number of detection bases, and the present application does not impose any limitation thereto.
[0107] Those skilled in the art will readily appreciate other embodiments of the present application after considering the specification and practicing the invention disclosed herein. The present application is intended to cover any modification, use or adaptation of the present application, which follows the general principles of the present application and includes common knowledge or customary technical means in the art that are not disclosed in the present application.
[0108] Finally, it should be noted that the above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.
Claims
1. A detector testing device, characterized in that: include: A first black body, comprising a first black body target surface, wherein the first black body target surface is configured to emit a first radiation; A plurality of detection bases are arranged around the first black body, and the detection bases include a bearing surface for arranging a detector; A main beam splitter assembly is arranged on one side of the first black body target surface, and the main beam splitter assembly has a first reflecting surface; A plurality of auxiliary beam splitter plate assemblies, one of the auxiliary beam splitter plate assemblies is arranged on one side of the bearing surface of one of the detection bases, and the auxiliary beam splitter plate assembly has a second reflecting surface; The main beam splitter assembly is configured to adjust the orientation of the first reflective surface to reflect the first radiation emitted by the first black body target surface to the second reflective surface of one of the auxiliary beam splitter assemblies; The auxiliary beam splitter assembly is configured to adjust the orientation of the second reflective surface to reflect the first radiation reflected by the first reflective surface to the corresponding detection base.
2. The detector testing device according to claim 1, characterized in that: The main beam splitter assembly comprises: A main beam splitter plate, one side surface of which is the first reflecting surface; A first flipping mechanism is connected to the main beam splitter, and the first flipping mechanism is configured to rotate around a first axis, wherein the first axis is perpendicular to the direction in which the first black body emits the first radiation, so as to change the pitch angle of the main beam splitter; the first flipping mechanism is also configured to rotate around a second axis, wherein the second axis is perpendicular to the first axis, so as to change the orientation of the main beam splitter.
3. The detector testing device according to claim 2, characterized in that: The auxiliary beam splitter assembly comprises: An auxiliary beam splitter plate, one side surface of the auxiliary beam splitter plate being a second reflecting surface; The second flipping mechanism is connected to the auxiliary beam splitter plate, and the second flipping mechanism is configured to be rotatable around a third axis, and the third axis is parallel to the first axis, so as to change the pitch angle of the auxiliary beam splitter plate.
4. The detector testing device according to claim 3, characterized in that: The center of the orthographic projection of each of the detection bases on the first reference plane intersects with the line connecting the center of the orthographic projection of the first black body on the first reference plane; the first reference plane is the plane where the multiple detection bases are located; The projection of the second reflective surface of the auxiliary beam splitter assembly on the bearing surface of the detection base covers the bearing surface; The projection of the first reflection surface of the main beam splitter assembly on the second reflection surface of the auxiliary beam splitter assembly in the horizontal direction falls on the second reflection surface.
5. The detector testing device according to any one of claims 1 to 4, characterized in that: The detector testing device also includes: A first filter group includes at least one first filter, wherein the first filter has a first transmittance; when the first filter group includes a plurality of the first filters, the first transmittances of the plurality of the first filters are different; The first filter can be arranged between the detection base and an auxiliary spectrometer assembly corresponding to the detection base.
6. The detector testing device according to any one of claims 1 to 4, characterized in that: The detector testing device also includes: A second black body, comprising a second black body target surface, wherein the second black body target surface is configured to emit a second radiation; the second black body and the first black body are respectively arranged on two sides of the main beam splitter assembly; the first black body and the second black body are facing each other in a vertical direction; The main beam splitter assembly is further configured to adjust the orientation of the first reflective surface to reflect the second radiation emitted by the second black body target surface to the second reflective surface of one of the auxiliary beam splitter assemblies; The auxiliary beam splitter assembly is further configured to adjust the orientation of the second reflective surface to reflect the second radiation reflected by the second reflective surface to the corresponding detection base.
7. The detector testing device according to claim 6, characterized in that: The detector testing device further comprises a second filter, and the second filter is configured to be arranged between the detection base and an auxiliary beam splitter assembly corresponding to the detection base.
8. The detector testing device according to any one of claims 1 to 4, characterized in that: The detector testing device also includes: The aperture is arranged between the detection base and the auxiliary beam splitter assembly corresponding to the detection base.
9. The detector testing device according to claim 1 or 2, characterized in that: The detection base station includes a detector interface group and a data acquisition component. The detector interface group includes a plurality of interfaces. The plurality of infrared detectors on the detection base station are respectively connected to the data acquisition component through the plurality of interfaces.
10. The detector testing device according to any one of claims 1 to 4, characterized in that: The main beam splitter assembly further includes a first temperature sensor configured to sense the temperature of the main beam splitter; The auxiliary beam splitter assembly further includes a second temperature sensor configured to sense the temperature of the auxiliary beam splitter.
11. The detector testing device according to claim 10, characterized in that: The detector testing device also includes a processor, which is connected to the first temperature sensor and the second temperature sensor. The processor is configured to obtain the temperature values sensed by the first temperature sensor and the second temperature sensor, and the actual voltage output by the device under test, to determine whether the device under test is qualified.
12. The detector testing device according to any one of claims 1 to 4, characterized in that: The main beam splitter assembly further comprises a first temperature equalizing device configured to maintain the temperature of the main beam splitter within a first temperature range; The auxiliary beam splitter assembly further includes a second temperature equalizing device configured to maintain the temperature of the auxiliary beam splitter within a second temperature range.
13. A detector testing method, applied to the detector testing device according to any one of claims 1 to 12, characterized in that: The method comprises: Loading the detection base; the loading of the detection base includes: placing a plurality of the detectors on the detection base; Adjusting the main beam splitter assembly and the auxiliary beam splitter assembly corresponding to the detection base; the adjusting the main beam splitter assembly and the auxiliary beam splitter assembly corresponding to the detection base comprises: adjusting the orientation of the first reflection surface in the main beam splitter assembly and the orientation of the second reflection surface in the auxiliary beam splitter assembly, so that the first radiation emitted by the first black body target surface is reflected to the multiple detectors on the detection base; Collecting detection data, wherein collecting detection data includes: collecting detection data about first radiation emitted by the first black body target surface.
14. The detector testing method according to claim 13, characterized in that: The main beam splitter includes a first flip mechanism, and the auxiliary beam splitter includes a second flip mechanism; the method of adjusting the main beam splitter assembly and the auxiliary beam splitter assembly so that the first radiation is reflected to the plurality of infrared detectors on the detection base comprises: Adjust the first flipping mechanism to rotate the first flipping mechanism about the first axis, and adjust the second flipping mechanism to rotate the second flipping mechanism about the second axis, so that the first reflecting surface reflects the first radiation emitted by the first blackbody target surface to the second reflecting surface of the auxiliary beam splitter assembly, and the second reflecting surface reflects the first radiation reflected by the first reflecting surface to a plurality of detectors on the corresponding detection base.
15. The detector testing method according to claim 13, characterized in that: The detector testing device further includes a first filter set including at least one first filter, and each first filter has a specific transmittance; the first filter is disposed between the corresponding auxiliary beam splitter assembly and the plurality of detectors on the detection base; The collecting of detection data includes: Collect the first detection data; Switch the first filter or remove the first filter; Collect the second detection data.
16. The detector testing method according to claim 13, characterized in that: The detector testing device further includes a second blackbody; adjusting the main beam splitter assembly and the corresponding auxiliary beam splitter assembly of the detection base further includes: Adjust the orientation of the first reflecting surface in the main beam splitter assembly and the orientation of the second reflecting surface in the auxiliary beam splitter assembly, so that the second radiation emitted by the second blackbody target surface is reflected to a plurality of infrared detectors on the detection base; The collecting of detection data further includes: collecting detection data regarding the first radiation emitted by the second blackbody target surface.
17. The detector testing method according to any one of claims 13 to 16, characterized in that: The detection base includes a detector interface group and a data acquisition module, After loading the detection base, it further includes: Power on the data acquisition module; After collecting detection data, it further includes: Replace the plurality of detectors on the detection base.
18. The detector testing method according to claim 17, characterized in that: The detector test includes N detection bases, When powering on the data acquisition module of the i-th detection base, load the (i + 1)-th detection base; When collecting data from the i-th detection base, power on the data acquisition module of the (i + 1)-th detection base; When replacing the plurality of detectors on the i-th detection base, collect data from the (i + 1)-th detection base; Among them, the first data collection from the detection base includes: adjusting the main beam splitter assembly and the corresponding auxiliary beam splitter assembly of the detection base; collecting detection data; 1 ≤ i < i + 1 < N, both i and N are positive integers.
