Method for extracting the smallest repeating unit, OPC verification method and apparatus

Abstract

A method for extracting the minimum repeating unit, an OPC verification method, and an apparatus are disclosed. The OPC verification method includes: acquiring a mask pattern, the mask pattern including IP patterns with an array of repeating units; extracting the minimum repeating array from the mask pattern, the minimum repeating array including all types of IP patterns, with at least one IP pattern of each type; performing a one-to-one matching between all types of IP patterns in the minimum repeating array and IP patterns in a database to obtain a comparison result; and confirming the completion of OPC verification based on the comparison result. By extracting the minimum repeating array from the mask pattern, and since the minimum repeating array includes all types of IP patterns in the mask pattern, subsequent OPC verification of the minimum repeating array can simultaneously achieve OPC verification of the entire mask pattern, effectively reducing OPC verification time and improving OPC verification efficiency.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing, and specifically to a method for extracting the smallest repeating unit, an OPC verification method, and an apparatus. Background Technology

[0002] In the process of creating photomasks for semiconductor manufacturing, OPC technology is generally used to correct the photomask pattern. After imaging the photomask corrected by OPC, the target pattern formed on the semiconductor substrate can meet the target requirements and eliminate the distortion or deformation caused by the optical proximity effect in the target pattern.

[0003] Before publication, the OPC-corrected mask still needs to undergo OPC verification to verify its correctness. In existing OPC verification, the results are generally categorized based on the design cell name. As chip size increases, the number of repetitive structures in different cells increases, and the number of repetitive structures at different locations within the same cell also increases. This leads to similar verification results appearing multiple times. A dozen or so structures can appear thousands of times in the verification report, making troubleshooting difficult.

[0004] Currently, OPC verification methods involve repeated verification, which increases the verification time and resources required, and reduces verification efficiency. Summary of the Invention

[0005] The technical problem solved by this invention is how to extract the smallest repeating unit in a masked pattern while improving verification efficiency.

[0006] To address the aforementioned technical problems, embodiments of the present invention provide a method for extracting the minimum repeating unit, comprising: acquiring a mask pattern, wherein the mask pattern includes an IP pattern having an array of repeating units; and extracting the minimum repeating array from the mask pattern, wherein the minimum repeating array includes all types of IP patterns, and each type of IP pattern has at least one.

[0007] Optionally, the step of extracting the minimum repeating array from the mask pattern includes: scanning all IP patterns in the mask pattern, extracting IP patterns of the same type from the mask pattern to obtain several types of IP patterns; merging the several types of IP patterns to obtain the minimum repeating array. The step of scanning all IP patterns in the mask pattern and extracting IP patterns of the same type from the mask pattern to obtain several types of IP patterns includes: setting several first scan lines and several second scan lines according to the size of the mask pattern, wherein the first scan lines and second scan lines are perpendicular to each other and arranged in a grid pattern; setting scan interval data for the several first scan lines and several second scan lines; driving the several first scan lines and several second scan lines to simultaneously scan all IP patterns in the mask pattern according to the scan interval data to obtain scan data; and extracting IP patterns of the same type from the mask pattern according to the scan data to obtain several types of IP patterns.

[0008] Optionally, the scanning data includes the coordinate information of the IP graphic, the graphic shape of the IP graphic, and the graphic size of the IP graphic.

[0009] Optionally, the step of extracting the same type of IP graphics from the mask pattern based on the scanning data to obtain several types of IP graphics includes: extracting the same type of IP graphics from the IP graphics based on the scanning data to obtain a first type of IP graphics, a second type of IP graphics, a third type of IP graphics, and a fourth type of IP graphics.

[0010] Optionally, the step of merging the several types of IP graphics to obtain the minimum repeating array includes: obtaining the line width between different types of IP graphics; merging the several types of IP graphics according to the line width between different types of IP graphics to obtain the minimum repeating array graphic with the size of the minimum repeating array graphic.

[0011] Optionally, the minimum repeating array includes: at least one first type of IP graphic, at least one second type of IP graphic, at least one third type of IP graphic, and at least one fourth type of IP graphic.

[0012] Accordingly, this invention provides an OPC verification method, comprising: acquiring a mask pattern, the mask pattern including an IP pattern with a repeating cell array; extracting the minimum repeating array from the mask pattern, the minimum repeating array including all types of IP patterns, and at least one IP pattern of each type; matching all types of IP patterns in the minimum repeating array with IP patterns in a database to obtain a comparison result; and confirming that OPC verification is complete based on the comparison result.

[0013] Optionally, the step of extracting the minimum repeating array in the mask pattern includes: scanning all IP patterns in the mask pattern, extracting the same type of IP patterns in the mask pattern to obtain several types of IP patterns; merging the several types of IP patterns to obtain the minimum repeating array.

[0014] Optionally, the step of scanning all IP graphics in the mask pattern and extracting IP graphics of the same type from the mask pattern to obtain several types of IP graphics includes: setting several first scan lines and several second scan lines according to the size of the mask pattern, wherein the first scan lines and the second scan lines are perpendicular to each other and are distributed in a grid pattern; setting scanning interval data for the several first scan lines and the several second scan lines; driving the several first scan lines and the several second scan lines to simultaneously start scanning all IP graphics in the mask pattern according to the scanning interval data to obtain scanning data; and extracting IP graphics of the same type from the mask pattern according to the scanning data to obtain several types of IP graphics.

[0015] Optionally, the scanning data includes the coordinate information of the IP graphic, the graphic shape of the IP graphic, and the graphic size of the IP graphic.

[0016] Optionally, the step of extracting the same type of IP graphics from the mask pattern based on the scanning data to obtain several types of IP graphics includes: extracting the same type of IP graphics from the IP graphics based on the scanning data to obtain a first type of IP graphics, a second type of IP graphics, a third type of IP graphics, and a fourth type of IP graphics.

[0017] Optionally, the step of merging the several types of IP graphics to obtain the minimum repeating array includes: obtaining the line width between different types of IP graphics; merging the several types of IP graphics according to the line width between different types of IP graphics to obtain the minimum repeating array graphic with the size of the minimum repeating array graphic.

[0018] Optionally, the minimum repeating array includes: at least one first type of IP graphic, at least one second type of IP graphic, at least one third type of IP graphic, and at least one fourth type of IP graphic.

[0019] Optionally, before the step of extracting the minimum repeating array from the mask pattern, the method further includes: creating a first database, which includes a number of IP patterns that have not undergone OPC processing; and creating a second database, which includes IP patterns that have undergone OPC processing.

[0020] Optionally, the step of matching all types of IP graphics in the minimum repeating array with IP graphics in the database one-to-one to obtain comparison results includes: matching all types of IP graphics in the minimum repeating array with IP graphics in the first database one-to-one to obtain a first comparison result; the first comparison result includes: all types of IP graphics in the minimum repeating array match or do not match IP graphics in the first database.

[0021] Optionally, after obtaining the first comparison result, the process includes: when all types of IP graphics in the minimum repeating array match IP graphics in the first database, performing OPC processing on the minimum repeating array to obtain an OPC-processed minimum repeating array; performing a one-to-one matching between all types of IP graphics in the OPC-processed minimum repeating array and IP graphics in the second database to obtain a second comparison result; the second comparison result includes: all types of IP graphics in the OPC-processed minimum repeating array match or do not match IP graphics in the second database.

[0022] Optionally, after obtaining the second comparison result, the method further includes: when all types of IP graphics in the minimum repeating array after OPC processing match the IP graphics in the second database, confirming that OPC verification is complete and that the fault points in the minimum repeating array will not have an impact at this time; when all types of IP graphics in the minimum repeating array after OPC processing do not match the IP graphics in the second database, examining the source of the difference between the minimum repeating array and the IP graphics in the second database.

[0023] Optionally, after obtaining the first comparison result, the method includes: when all types of IP graphics in the minimum repeating array do not match the IP graphics in the first database, marking all types of IP graphics in the minimum repeating array as graphics that need to be confirmed and storing them in the first database to update the first database.

[0024] Optionally, after obtaining the mask pattern, the method further includes: performing OPC processing on the mask pattern to obtain fault points in the mask pattern; detecting the fault points to obtain detection results; and confirming that OPC verification is complete based on the detection results.

[0025] Optionally, the step of performing OPC processing on the mask pattern to obtain fault points in the mask pattern is performed simultaneously with the step of extracting the minimum repeating array in the mask pattern.

[0026] Optionally, the IP pattern with repeating cell array includes one or more combinations of SRAM, MEM CELL, CISPIXEL, and other IPs with repeating cell arrays.

[0027] Accordingly, the present invention also provides an OPC verification device, comprising: an acquisition unit for acquiring a mask pattern, the mask pattern including different types of IP patterns; an extraction unit for extracting a minimum repeating array from the mask pattern, the minimum repeating array including all types of IP patterns, and at least one IP pattern of each type; a matching unit for matching all types of IP patterns in the minimum repeating array with IP patterns in a database to obtain a comparison result; and a confirmation unit for confirming that OPC verification is complete based on the comparison result.

[0028] Compared with the prior art, the technical solution of the present invention has the following beneficial effects: By extracting the minimum repeating array in the mask pattern, and since the minimum repeating array includes all types of IP patterns in the mask pattern, subsequent OPC verification of the minimum repeating array can be performed simultaneously on the entire mask pattern, effectively reducing OPC verification time and improving OPC verification efficiency; In addition, the present invention also matches the minimum repeating array with IP patterns in the database, thereby reducing repeated verification operations, reducing verification time, and improving verification efficiency.

[0029] Furthermore, the present invention scans the mask pattern by setting mutually perpendicular first and second scan lines, and extracts the same type of IP patterns in the mask pattern according to the coordinate information, shape, and size of the IP pattern, thus ensuring the accuracy of extracting the minimum repeating array.

[0030] Furthermore, the database of this invention is continuously updated after each match, thus achieving continuous optimization of the database, ensuring the diversity of data in the database, and thereby improving the efficiency and accuracy of OPC verification.

[0031] Furthermore, this invention provides two databases. The first database includes several IP graphics that have not undergone OPC processing, and the second database includes IP graphics that have undergone OPC processing. Before OPC processing, the IP graphics are matched against the first database (which has not undergone OPC processing). If an IP graphic does not match the first database, it is directly marked as a graphic requiring verification and stored in the first database to update it, eliminating the need for subsequent OPC processing steps. If an IP graphic matches the first database, the extracted minimum repeating array is further processed using OPC, saving verification time and improving verification efficiency. Moreover, when the OPC-processed minimum repeating array matches the second database, the impact of fault points in the current minimum repeating array can be ignored. When the OPC-processed minimum repeating array does not match the second database, the OPC engineer is reminded to further confirm the OPC verification results based on the source of the difference, further saving verification time and improving verification efficiency. Attached Figure Description

[0032] Figure 1 This is a flowchart illustrating a method for extracting the minimum repeating unit according to an embodiment of the present invention;

[0033] Figure 2 This is a flowchart illustrating one embodiment of the OPC verification method of the present invention;

[0034] Figure 3 This is a flowchart illustrating another OPC verification method described in an embodiment of the present invention;

[0035] Figure 4 This is a flowchart illustrating another OPC verification method in an embodiment of the present invention;

[0036] Figure 5 This is a flowchart illustrating another OPC verification method in an embodiment of the present invention;

[0037] Figure 6 This is a schematic diagram illustrating the extraction of the minimum repeating array in an OPC verification method according to an embodiment of the present invention;

[0038] Figure 7 This is a schematic diagram of extracting the minimum repeating array using another OPC verification method described in an embodiment of the present invention;

[0039] Figure 8 This is a schematic diagram of a verification system for one embodiment of the OPC verification method of the present invention;

[0040] Figure 9 This is a schematic diagram of a verification system for another OPC verification method described in this embodiment of the invention;

[0041] Figure 10 This is a schematic diagram of the structure of an OPC verification device according to an embodiment of the present invention. Detailed Implementation

[0042] Currently, OPC verification is generally based on the classification of design cells by name. However, as chip size increases, the number of repetitive structures in different cells increases, and the number of repetitive structures in different locations within the same cell also increases. This causes similar verification results to appear repeatedly. Dozens of structures can appear thousands of times in the verification report, making troubleshooting difficult, increasing the time and resources required for OPC verification, and reducing verification efficiency.

[0043] To address the aforementioned technical problems, this invention provides a method for extracting the minimum repeating unit and an OPC verification method. By extracting the minimum repeating array from the mask pattern, and since the minimum repeating array includes all types of IP patterns in the mask pattern, subsequent OPC verification of the minimum repeating array can simultaneously achieve OPC verification of the entire mask pattern, effectively reducing OPC verification time and improving OPC verification efficiency. Furthermore, this invention also matches the minimum repeating array with IP patterns in a database, thereby reducing redundant verification operations, reducing verification time, and improving verification efficiency.

[0044] To make the above-mentioned objectives, features and beneficial effects of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0045] Figure 1 This is a flowchart illustrating a method for extracting the smallest repeating unit according to an embodiment of the present invention.

[0046] Please refer to Figure 1 This invention provides a method for extracting the smallest repeating unit, comprising:

[0047] S31: Obtain a mask pattern, wherein the mask pattern includes an IP pattern with a repeating cell array.

[0048] In one embodiment of the present invention, the mask pattern includes an IP pattern having an array of repeating cells.

[0049] In specific embodiments, the IP graphics with repeating cell arrays include one or more combinations of SRAM, MEM CELL, CISPIXEL, and other IPs with repeating cell arrays.

[0050] S32: Extract the minimum repeating array from the mask pattern, the minimum repeating array including all types of IP patterns, and at least one IP pattern of each type.

[0051] In some embodiments of the present invention, the step of extracting the minimum repeating array in the mask pattern includes: scanning all IP patterns in the mask pattern, extracting the same type of IP patterns in the mask pattern to obtain several types of IP patterns; merging the several types of IP patterns to obtain the minimum repeating array.

[0052] In a specific embodiment, the step of scanning all IP graphics in the mask pattern and extracting IP graphics of the same type from the mask pattern to obtain several types of IP graphics includes: setting several first scan lines and several second scan lines according to the size of the mask pattern, wherein the first scan lines and the second scan lines are perpendicular to each other and are distributed in a grid pattern; setting scanning interval data for the several first scan lines and the several second scan lines; driving the several first scan lines and the several second scan lines to simultaneously start scanning all IP graphics in the mask pattern according to the scanning interval data to obtain scanning data; and extracting IP graphics of the same type from the mask pattern according to the scanning data to obtain several types of IP graphics.

[0053] The scanning data includes the coordinate information of the IP graphic, the graphic shape of the IP graphic, and the graphic size of the IP graphic.

[0054] In some embodiments of the present invention, the step of extracting the same type of IP graphics from the mask pattern based on scanning data to obtain several types of IP graphics includes: extracting the same type of IP graphics from the IP graphics based on scanning data to obtain a first type of IP graphics, a second type of IP graphics, a third type of IP graphics, and a fourth type of IP graphics. In some embodiments of the present invention, the step of merging the several types of IP graphics to obtain the minimum repeating array includes: obtaining the linewidths between different types of IP graphics; merging the several types of IP graphics based on the linewidths between different types of IP graphics to obtain the minimum repeating array pattern with the size of the minimum repeating array pattern.

[0055] The minimum repeating array includes: at least one first type of IP graphic, at least one second type of IP graphic, at least one third type of IP graphic, and at least one fourth type of IP graphic.

[0056] In the above scheme, the present invention scans the mask pattern by setting mutually perpendicular first scan lines and second scan lines, and extracts the same type of IP pattern in the mask pattern according to the coordinate information, shape and size of the IP pattern, thus ensuring the accuracy of extracting the minimum repeating array.

[0057] Furthermore, specific embodiments of the method for extracting the minimum repeating unit have been described in detail in the following OPC verification method scheme, and will not be repeated here.

[0058] Figure 2 This is a flowchart illustrating one embodiment of the OPC verification method of the present invention.

[0059] Please refer to Figure 2 This invention provides an OPC verification method, comprising:

[0060] S11: Obtain the mask image.

[0061] In one embodiment of the present invention, the mask pattern includes an IP pattern having an array of repeating cells.

[0062] In specific embodiments, the IP graphics with repeating cell arrays include one or more combinations of SRAM, MEM CELL, CISPIXEL, and other IPs with repeating cell arrays.

[0063] Of course, this invention is not limited to this, and other types of IP graphics with repeating unit arrays are also within the protection scope of this invention.

[0064] In one embodiment of the present invention, after the step of obtaining the mask pattern, the method further includes: performing OPC verification on the mask pattern to obtain fault points in the mask pattern; detecting the fault points to obtain detection results; and confirming that the OPC verification is completed based on the detection results.

[0065] In one embodiment of the present invention, the fault point is a weak point in the bridging or clamping process due to insufficient size.

[0066] Of course, this invention is not limited to this, and other types of fault points are also within the scope of protection of this invention.

[0067] In a specific embodiment, before the step of extracting the minimum repeating array in the mask pattern, the method further includes: creating a second database, the second database including IP patterns that have already undergone OPC verification. S12: Extract the minimum repeating array in the mask pattern.

[0068] In some embodiments of the present invention, the minimum repeating array includes all types of IP graphics, and there is at least one IP graphic of each type.

[0069] In one embodiment of the present invention, the step of extracting the minimum repeating array in the mask pattern includes: scanning all IP patterns in the mask pattern, extracting the same type of IP patterns in the mask pattern to obtain several types of IP patterns; merging the several types of IP patterns to obtain the minimum repeating array.

[0070] S13: Match all types of IP graphics in the minimum repeating array with the IP graphics in the database to obtain the comparison results.

[0071] S14: Based on the comparison results, confirm that OPC verification is complete.

[0072] In some embodiments of the present invention, the first comparison result includes: all types of IP graphics in the minimum repeating array match or do not match the IP graphics in the first database.

[0073] In a specific embodiment, when all types of IP graphics in the minimum repeating array match IP graphics in the first database, OPC verification is performed on the minimum repeating array to obtain the OPC-verified minimum repeating array; all types of IP graphics in the OPC-verified minimum repeating array are matched one-to-one with IP graphics in the second database to obtain a second comparison result; the second comparison result includes: all types of IP graphics in the OPC-verified minimum repeating array match or do not match IP graphics in the second database; when all types of IP graphics in the OPC-verified minimum repeating array match IP graphics in the second database, the OPC verification is confirmed to be complete, and at this time, the fault points in the minimum repeating array will not have an impact; when all types of IP graphics in the OPC-verified minimum repeating array do not match IP graphics in the second database, the source of the difference between the minimum repeating array and the IP graphics in the second database is examined.

[0074] When all types of IP graphics in the minimum repeating array do not match the IP graphics in the first database, all types of IP graphics in the minimum repeating array are marked as graphics that need to be confirmed. After confirmation, they are stored in the first database to update the first database.

[0075] In the above scheme, the present invention extracts the minimum repeating array from the mask pattern. Since the minimum repeating array includes all types of IP patterns in the mask pattern, subsequent OPC verification is performed on the minimum repeating array, while OPC verification of the entire mask pattern can be achieved simultaneously. This effectively reduces OPC verification time and improves OPC verification efficiency. In addition, the present invention also matches the minimum repeating array with IP patterns in the database, thereby reducing repeated verification operations, reducing verification time, and improving verification efficiency.

[0076] Figure 3 This is a flowchart illustrating another OPC verification method described in an embodiment of the present invention.

[0077] Please refer to Figure 3 This invention provides an OPC verification method, comprising:

[0078] S21: Obtain the mask image.

[0079] In some embodiments of the present invention, the mask pattern includes an IP pattern with a repeating cell array.

[0080] In specific embodiments, the IP graphics with repeating cell arrays include one or more combinations of SRAM, MEM CELL, CISPIXEL, and other IPs with repeating cell arrays.

[0081] Of course, this invention is not limited to this, and other types of IP graphics with repeating unit arrays are also within the protection scope of this invention.

[0082] In some embodiments of the present invention, step S21 is followed by step S202.

[0083] Step S201: Create a first database, which includes several IP images that have not undergone OPC processing;

[0084] Step S202: Create a second database, which includes IP graphics that have already undergone OPC processing.

[0085] This invention provides two databases. The first database includes several IP graphics that have not undergone OPC processing, and the second database includes IP graphics that have undergone OPC processing. Before OPC processing, the IP graphics are matched against the first database (which has not undergone OPC processing). If an IP graphic does not match the first database, it is directly marked as requiring verification and stored in the first database to update it, eliminating the need for subsequent OPC processing steps. When an IP graphic matches the first database, the extracted minimum repeating array is processed using OPC, saving verification time and improving verification efficiency. Furthermore, when the OPC-processed minimum repeating array matches the second database, the impact of fault points in the current minimum repeating array can be ignored. When the OPC-processed minimum repeating array does not match the second database, the OPC engineer is prompted to further confirm the OPC verification results based on the source of the discrepancy, further saving verification time and improving verification efficiency.

[0086] S22: Scan all IP graphics in the mask pattern, extract the same type of IP graphics in the mask pattern, and obtain several types of IP graphics.

[0087] In some embodiments of the present invention, the minimum repeating array includes all types of IP graphics, and there is at least one IP graphic of each type.

[0088] Figure 4 This is a flowchart illustrating another OPC verification method in an embodiment of the present invention.

[0089] Please refer to Figure 4 In one embodiment of the present invention, step S22 includes:

[0090] S221: Based on the size of the mask pattern, set a number of first scan lines and a number of second scan lines.

[0091] S222: Set the scanning interval data for a plurality of first scan lines and a plurality of second scan lines.

[0092] S223: Based on the scanning interval data, drive several first scan lines and several second scan lines to simultaneously start scanning all IP patterns in the mask pattern to obtain scan data.

[0093] S224: Based on the scanning data, extract the same type of IP graphics from the mask pattern to obtain several types of IP graphics.

[0094] In a specific embodiment, the first scan line and the second scan line are perpendicular to each other, and a plurality of first scan lines and a plurality of second scan lines are distributed in a grid pattern.

[0095] In a specific embodiment, the scanning data includes the coordinate information of the IP graphic, the graphic shape of the IP graphic, and the graphic size of the IP graphic.

[0096] In one embodiment of the present invention, step S224 includes: extracting the same type of IP graphics from the mask pattern according to the scanning data to obtain a first type of IP graphics, a second type of IP graphics, a third type of IP graphics, and a fourth type of IP graphics.

[0097] In the above scheme, the present invention scans the mask pattern by setting mutually perpendicular first scan lines and second scan lines, and extracts the same type of IP pattern in the mask pattern according to the coordinate information, shape and size of the IP pattern, thus ensuring the accuracy of extracting the minimum repeating array.

[0098] Please continue to refer to this. Figure 3 The OPC verification method further includes:

[0099] S23: Merge the several types of IP graphics to obtain the minimum repeating array.

[0100] Figure 5 This is a flowchart illustrating another OPC verification method in an embodiment of the present invention.

[0101] S231: Obtain the line width between different types of IP graphics.

[0102] S232: Merge the several types of IP graphics according to the line width between different types of IP graphics to obtain the minimum repeating array graphic with the size of the minimum repeating array graphic.

[0103] In a specific embodiment, the minimum repeating array includes: at least one first type of IP graphic, at least one second type of IP graphic, at least one third type of IP graphic, and at least one fourth type of IP graphic.

[0104] Figure 6 This is a schematic diagram of extracting the minimum repeating array in an OPC verification method according to an embodiment of the present invention.

[0105] Please refer to Figure 6 , Figure 6A mask pattern 301 is provided, which includes a plurality of IP patterns, the types of which are: a first type of IP pattern A1, a second type of IP pattern A2, a third type of IP pattern B1, and a fourth type of IP pattern B2.

[0106] In this embodiment, the size of the mask pattern 301 is 1000 micrometers * 1000 micrometers.

[0107] In one embodiment of the present invention, the step of extracting the minimum repeating array 302 includes: setting a plurality of first scan lines (Scan line 1) and a plurality of second scan lines (Scan line 2) according to the size of the mask pattern 301 (1000 μm * 1000 μm); setting the scan interval data of the plurality of first scan lines (Scan line 1) and the plurality of second scan lines (Scan line 2) to a scan step of 0; driving the plurality of first scan lines (Scan line 1) and the plurality of second scan lines (Scan line 2) to simultaneously scan all memory cell patterns in the mask pattern 301 according to the scan interval data; stopping the scan when the plurality of first scan lines (Scan line 1) and the plurality of second scan lines (Scan line 2) scan an IP pattern, and obtaining scan data; extracting the same type of IP patterns from the mask pattern 301 according to the scan data, obtaining a plurality of types of IP patterns; obtaining the line width between different types of IP patterns; merging the plurality of types of IP patterns according to the line width between different types of IP patterns to obtain the minimum repeating array 302, wherein the minimum repeating array includes a first type of IP pattern A1 and a second type of IP pattern A2.

[0108] In this embodiment, the same type of IP graphic is characterized as follows: when the size, shape, and environment of the IP graphic are all the same, the IP graphic is of the same type.

[0109] In this embodiment, the step of setting a plurality of first scan lines Scan line 1 and a plurality of second scan lines Scan line 2 includes: setting the interval between adjacent first scan lines Scan line 1 to 30 nanometers and the interval between adjacent second scan lines Scan line 2 to 30 nanometers.

[0110] The number of IP graphics scanned by each of the first scan line (Scan line 1) or the second scan line (Scan line 2).

[0111] In this embodiment, the first scan line 1 scans one IP pattern, and the second scan line 2 scans one IP pattern.

[0112] In a specific embodiment, when the number of IP patterns scanned by the first scan line 1 and the second scan line 2 is 1, the scan interval data Scan step is 0; when the number of IP patterns scanned by the first scan line 1 and the second scan line 2 is 2, the scan interval data Scan step is 1; when the number of IP patterns scanned by the first scan line 1 and the second scan line 2 is 3, the scan interval data Scan step is 2, and so on. When the number of IP patterns scanned by the first scan line 1 and the second scan line 2 is N, the scan interval data Scan step is N-1, where N is a natural number.

[0113] The scan data is characterized as the coordinate information of the storage unit graphic, the graphic shape of the IP graphic, and the graphic size of the IP graphic.

[0114] Specifically, the plurality of first scan lines 1 scan from top to bottom along the Y direction, and the plurality of second scan lines 2 scan from left to right along the X direction. If the IP graphic is in the same first scan line 1 or second scan line 2 in either the X or Y direction, and the shape and direction are consistent, they are classified as the same type of IP graphic.

[0115] In this embodiment, the first type of IP graphic A1 and the second type of IP graphic A2 are of the same type, while the third type of IP graphic B1 and the fourth type of IP graphic B2 are of another type.

[0116] In other embodiments, the first type of IP graphic A1, the second type of IP graphic A2, the third type of IP graphic B1, and the fourth type of IP graphic B2 are four different types of IP graphics.

[0117] In one embodiment, when the first scan line Scan line 1 and the second scan line Scan line 2 first scan to the edge of the IP graphic, the first coordinate information of the first scan line Scan line 1 and the second scan line Scan line 2 at this time is recorded; when the first scan line Scan line 1 and the second scan line Scan line 2 scan to the edge of the IP graphic for the second time, the second coordinate information of the first scan line Scan line 1 and the second scan line Scan line 2 at this time is recorded; based on the difference between the first coordinate information and the second coordinate information, the graphic shape of the IP graphic and the graphic size of the IP graphic are obtained.

[0118] In one embodiment, in the step of extracting the minimum repeating array 302, the minimum repeating array is extracted for each layer to be verified (not shown in the figure).

[0119] The layer to be verified includes an active region layer, a gate layer, a contact hole layer, and a metal layer.

[0120] Figure 7 This is a schematic diagram of extracting the minimum repeating array in another OPC verification method described in this embodiment of the invention.

[0121] Please refer to Figure 7 , Figure 7 A mask pattern 401 is provided, which includes a plurality of IP patterns, the types of which are: a first type IP pattern A1, a second type IP pattern A2, a third type IP pattern B1, and a fourth type IP pattern B2.

[0122] In one embodiment, the mask pattern 401 has a size of 1000 micrometers * 1000 micrometers.

[0123] In one embodiment of the present invention, the step of extracting the minimum repeating array 402 includes: setting a plurality of first scan lines (Scan line 1) and a plurality of second scan lines (Scan line 2) according to the size of the mask pattern 401 (1000 μm * 1000 μm); setting the scan interval data of the plurality of first scan lines (Scan line 1) and the plurality of second scan lines (Scan line 2) to a scan step of 3; driving the plurality of first scan lines (Scan line 1) and the plurality of second scan lines (Scan line 2) to simultaneously start scanning all IP patterns in the mask pattern 401 according to the scan interval data; when the plurality of first scan lines (Scan line 1) and the plurality of second scan lines (Scan line 2) are scanned, the scan line 2 is scanned. When line 2 scans four IP graphics, the scan stops and scan data is obtained. Based on the scan data, IP graphics of the same type are extracted from the mask graphic 401 to obtain several types of IP graphics. The line widths between different types of IP graphics are obtained. Based on the line widths between different types of IP graphics, the several types of IP graphics are merged to obtain the minimum repeating array 402. The minimum repeating array includes a first type of IP graphic A1, a second type of IP graphic A2, a third type of IP graphic B1, and a fourth type of IP graphic B2.

[0124] In this embodiment, the same type of IP graphic is characterized as follows: when the size, shape, and environment of the IP graphic are all the same, the IP graphic is of the same type.

[0125] In this embodiment, the step of setting a plurality of first scan lines Scan line 1 and a plurality of second scan lines Scan line 2 includes: setting the interval between adjacent first scan lines Scan line 1 to 30 nanometers and the interval between adjacent second scan lines Scan line 2 to 30 nanometers.

[0126] The number of memory cell patterns scanned by each of the first scan line (Scan line 1) or the second scan line (Scan line 2).

[0127] In this embodiment, the first scan line 1 scans 4 IP patterns, and the second scan line 2 scans 4 IP patterns.

[0128] In a specific embodiment, when the number of IP patterns scanned by the first scan line 1 and the second scan line 2 is 1, the scan interval data Scan step is 0; when the number of IP patterns scanned by the first scan line 1 and the second scan line 2 is 2, the scan interval data Scan step is 1; when the number of IP patterns scanned by the first scan line 1 and the second scan line 2 is 3, the scan interval data Scan step is 2, and so on. When the number of IP patterns scanned by the first scan line 1 and the second scan line 2 is N, the scan interval data Scan step is N-1, where N is a natural number.

[0129] The scan data is characterized as the coordinate information of the IP graphic, the graphic shape of the IP graphic, and the graphic size of the IP graphic.

[0130] Specifically, the plurality of first scan lines 1 scan from top to bottom along the Y direction, and the plurality of second scan lines 2 scan from left to right along the X direction. If the IP graphic is in the same first scan line 1 or second scan line 2 in either the X or Y direction, and the shape and direction are consistent, they are classified as the same type of IP graphic.

[0131] In this embodiment, the first type of IP graphic A1, the second type of IP graphic A2, the third type of IP graphic B1, and the fourth type of IP graphic B2 are four different types of IP graphics. That is, extraction can be performed on the first type of IP graphic A1, the second type of IP graphic A2, the third type of IP graphic B1, and the fourth type of IP graphic B2 respectively. Figure 6The four IP diagrams shown are shown.

[0132] In one embodiment, when the first scan line Scan line 1 and the second scan line Scan line 2 first scan to the edge of the IP graphic, the first coordinate information of the first scan line Scan line 1 and the second scan line Scan line 2 at this time is recorded; when the first scan line Scan line 1 and the second scan line Scan line 2 scan to the edge of the IP graphic for the second time, the second coordinate information of the first scan line Scan line 1 and the second scan line Scan line 2 at this time is recorded; based on the difference between the first coordinate information and the second coordinate information, the graphic shape of the IP graphic and the graphic size of the IP graphic are obtained.

[0133] In specific implementation, when the Scan step is set to 3, according to Figure 7 It can be seen that the first scan line Scan line 1 can scan to the right to A1 shown in the red box, and the second scan line Scan line 2 can scan downwards to the first type of IP graphic A1 shown in the bottom left red box. Thus, the first type of IP graphic A1 with the most repetitions within the set range and the smallest distance between it and the first first type of IP graphic A1 at the scanning start point can be selected. This gives the cell array for the first type of IP graphic A1. Similarly, the cell arrays for the other graphics, the second type of IP graphic A2, the third type of IP graphic B1, and the fourth type of IP graphic B2, can be obtained. Subsequently, all IP graphics with the same line width are pieced together to obtain the minimum repetition array 402.

[0134] In one embodiment, in the step of extracting the minimum repeating array 402, the minimum repeating array is extracted for each layer to be verified (not shown in the figure).

[0135] The layer to be verified includes an active region layer, a gate layer, a contact hole layer, and a metal layer.

[0136] Please continue to refer to this. Figure 3 Step S23 is followed by:

[0137] S24: Whether all types of IP graphics in the minimum repeating array match the IP graphics in the first database.

[0138] When all types of IP graphics in the minimum repeating array match the IP graphics in the first database, step S25 is executed.

[0139] When all types of IP graphics in the minimum repeating array match the IP graphics in the first database, step S26 is executed.

[0140] S25: Perform OPC processing on the minimum repeating array to obtain the minimum repeating array after OPC processing.

[0141] S26: Mark all types of IP graphics in the minimum repeating array as graphics that need to be confirmed, and store them in the first database to update the first database.

[0142] In this embodiment, when the IP graphic does not match the first database without OPC processing, the IP graphic is directly marked as a graphic that needs to be verified and stored in the first database to update the first database. This eliminates the need for subsequent OPC processing steps, saving verification time and improving verification efficiency.

[0143] Furthermore, the database of this invention is continuously updated after each match, thus achieving continuous optimization of the database, ensuring the diversity of data in the database, and thereby improving the efficiency and accuracy of OPC verification.

[0144] S27: Whether all types of IP graphics in the minimum repeating array match the IP graphics in the second database.

[0145] When all types of IP graphics in the minimum repeating array match the IP graphics in the second database, proceed to step S28.

[0146] If all types of IP graphics in the minimum repeating array do not match the IP graphics in the second database, proceed to step S29.

[0147] S28: Confirm that OPC verification is complete and that the fault points in the minimum repeating array will not have any impact at this time.

[0148] In specific implementation, when all types of IP graphs in the minimum repeating array match the IP graphs in the second database, it will affect the determination of the fault point. The fault point here is the fault point obtained in the subsequent step S01.

[0149] In this embodiment, when all types of IP patterns in the minimum repeating array match the IP patterns in the second database, even if there are fault points in all types of IP patterns in the current minimum repeating array, the impact of the fault points can be ignored since all types of IP patterns in the minimum repeating array are already in the second database, thus reducing the time for subsequent fault point detection and improving verification efficiency.

[0150] S29: Examine the source of the difference between the minimum repeating array and the IP graph in the second database.

[0151] In a specific embodiment, after discovering the source of the difference, the method also includes reminding the OPC engineer to further confirm the above OPC verification results based on the source of the difference.

[0152] In some embodiments of the present invention, after performing step S21: obtaining the mask pattern, the method further includes:

[0153] S01: Perform OPC processing on the mask pattern to obtain the fault points in the mask pattern.

[0154] In one embodiment of the present invention, the fault point is a weak point in the bridging or clamping process due to insufficient size.

[0155] Of course, this invention is not limited to this; other types of fault points are also within the scope of protection of this invention. S02: Detect the fault point to obtain the detection result.

[0156] S03: Based on the test results, confirm that OPC verification is complete.

[0157] The above steps S01, S02, and S03 are conventional OPC flows. The step of performing OPC verification on the mask pattern to obtain the fault points in the mask pattern and the step of extracting the minimum repeating array in the mask pattern are performed simultaneously. That is, the conventional OPC flow and the extraction of the minimum repeating array (patternmatch flow) in the mask pattern are performed at the same time.

[0158] Figure 8 This is a schematic diagram of a verification system for one embodiment of the OPC verification method of the present invention.

[0159] Please refer to Figure 8 The window for performing OPC verification includes the PM (pattern match) branch and the regular OPC Flow (OPCV), which can then display the status of the cell pattern library (database).

[0160] In addition, pattern matching (i.e., one-to-one matching with IP patterns in the OPC verification database) can be performed in parallel according to different categories of IP graphics.

[0161] Figure 8 The Chinese map only contains SRAM and MEM CELL, therefore, Figure 8 The PM (pattern match) branch only includes SRAM and MEM CELL; and Figure 8 This is OPC verification for MEM CELL, specifically... Figure 8The LIB_PATH display box indicates the path of the database where the comparison is performed; the OPC_PATH display box indicates the path of OPC verification after extracting the minimum repeating array; the LAYOUT display box indicates the path of the original mask image; the LOCATION display box indicates the coordinates of the extracted IP image; the _ACT display box indicates that the minimum repeating array extraction step was performed on the ACT layer; and the match display box indicates that the comparison result is a successful match.

[0162] Figure 9 This is a schematic diagram of a verification system for another OPC verification method described in an embodiment of the present invention.

[0163] Figure 9 It's OPC verification for SRAM, specifically... Figure 9 The LIB_PATH display box indicates the path of the database used for alignment; the OPC_PATH display box indicates the path of OPC verification after extracting the minimum repeating array; the LAYOUT display box indicates the path of the original mask image; the LOCATION display box indicates the coordinates of the extracted IP image; the _ACT display box indicates that the minimum repeating array extraction step was performed on the ACT layer; the _CT display box indicates that the minimum repeating array extraction step was performed on the CT layer; the _M1 display box indicates that the minimum repeating array extraction step was performed on the M1 layer; the POLY display box indicates that the minimum repeating array extraction step was performed on the POLY layer; and the match display box indicates that the alignment result was a successful match.

[0164] In this embodiment, the pattern match performed on the ACT layer was successful, the pattern match performed on the CT layer was found to be unsuccessful with five differences, the pattern match performed on the M1 layer was successful, and the pattern match performed on the POLY layer was successful.

[0165] In summary, this invention extracts the minimum repeating array from the mask pattern. Since the minimum repeating array includes all types of IP patterns in the mask pattern, subsequent OPC verification based on the minimum repeating array can simultaneously achieve OPC verification of the entire mask pattern, effectively reducing OPC verification time and improving OPC verification efficiency. Furthermore, this invention also matches the minimum repeating array with IP patterns in the database, thereby reducing redundant verification operations, reducing verification time, and improving verification efficiency.

[0166] Accordingly, please refer to Figure 10The present invention also provides an OPC verification device 500, comprising: an acquisition unit 501, an extraction unit 502, a matching unit 503, and a confirmation unit 504;

[0167] The acquisition unit 501 is used to acquire a mask pattern, which includes different types of IP patterns;

[0168] The extraction unit 502 is used to extract the minimum repeating array in the mask pattern, the minimum repeating array including all types of IP patterns, and at least one IP pattern of each type;

[0169] The matching unit 503 is used to perform a one-to-one matching of all types of IP graphics in the minimum repeating array with IP graphics in the database to obtain the comparison results.

[0170] The confirmation unit 504 is used to confirm that the OPC verification is complete based on the comparison results.

[0171] Other embodiments also provide a computer-readable storage medium having a computer program stored thereon, the computer program being executed by a processor to implement the steps of any of the above methods.

[0172] In specific implementations, the computer-readable storage medium may include ROM, RAM, disk, or optical disk, etc.

[0173] Other embodiments also provide an electronic device including a memory and a processor, wherein the memory stores a computer program that can run on the processor, and the processor executes the steps of any of the methods described above when running the computer program.

[0174] Regarding the modules / units included in the various devices and products described in the above embodiments, they can be software modules / units, hardware modules / units, or a combination of both. For example, for various devices and products applied to or integrated into a chip, all of their modules / units can be implemented using hardware methods such as circuits, or at least some modules / units can be implemented using software programs that run on a processor integrated within the chip, while the remaining (if any) modules / units can be implemented using hardware methods such as circuits; for various devices and products applied to or integrated into a chip module, all of their modules / units can be implemented using hardware methods such as circuits, and different modules / units can be located in the same component (e.g., chip, circuit module, etc.) or different components of the chip module, or at least some modules / units can be implemented using hardware methods such as circuits. The components can be implemented using software programs that run on the processor integrated within the chip module. The remaining (if any) modules / units can be implemented using hardware methods such as circuits. For various devices and products applied to or integrated into the terminal, each of its components / units can be implemented using hardware methods such as circuits. Different modules / units can be located in the same component (e.g., chip, circuit module, etc.) or in different components within the terminal. Alternatively, at least some modules / units can be implemented using software programs that run on the processor integrated within the terminal, while the remaining (if any) modules / units can be implemented using hardware methods such as circuits.

[0175] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A method of extracting a minimum repeating unit, characterized by, The method comprises the following steps: obtaining a mask pattern, wherein the mask pattern comprises IP patterns with a repeating unit array; extracting a minimum repeating array in the mask pattern, wherein the minimum repeating array comprises all types of IP patterns, and each type of IP pattern has at least one; wherein the step of extracting the minimum repeating array in the mask pattern comprises: scanning all IP patterns in the mask pattern, and extracting the same type of IP pattern in the mask pattern to obtain a plurality of types of IP patterns; the step of scanning all IP patterns in the mask pattern and extracting the same type of IP pattern in the mask pattern to obtain a plurality of types of IP patterns comprises: according to the size of the mask pattern, a plurality of first scanning lines and a plurality of second scanning lines are set, the first scanning lines and the second scanning lines are perpendicular to each other, and the plurality of first scanning lines and the plurality of second scanning lines are distributed in a grid shape; the scanning interval data of the plurality of first scanning lines and the plurality of second scanning lines are set; according to the scanning interval data, the plurality of first scanning lines and the plurality of second scanning lines are driven to start scanning all IP patterns in the mask pattern at the same time, and scanning data is obtained; according to the scanning data, the same type of IP pattern in the mask pattern is extracted to obtain a plurality of types of IP patterns.

2. The method of claim 1, wherein the minimum repeating unit is extracted by: The step of extracting the minimum repeating array in the mask pattern further comprises: merging the plurality of types of IP patterns to obtain the minimum repeating array.

3. The method of claim 1, wherein the minimum repeating unit is extracted by: The scanning data is coordinate information of the IP pattern, a pattern shape of the IP pattern, and a pattern size of the IP pattern.

4. The method of claim 3, wherein the minimum repeating unit is extracted by: The step of extracting the same type of IP pattern in the mask pattern according to the scanning data to obtain a plurality of types of IP patterns comprises: according to the scanning data, the same type of IP pattern in the IP pattern is extracted to obtain a first type of IP pattern, a second type of IP pattern, a third type of IP pattern and a fourth type of IP pattern, wherein the same type of IP pattern is characterized as: when the size of the IP pattern, the shape of the IP pattern and the environment of the IP pattern are all the same, the IP pattern is the same type of IP pattern.

5. The method of claim 4, wherein the minimum repeating unit is extracted by: The step of merging the plurality of types of IP patterns to obtain the minimum repeating array comprises: obtaining the line width between different types of IP patterns; merging the plurality of types of IP patterns according to the line width between different types of IP patterns to obtain the minimum repeating array pattern and the size of the minimum repeating array pattern.

6. The method of claim 4, wherein the minimum repeating unit is extracted by: The minimum repeating array comprises: at least one first type of IP pattern, at least one second type of IP pattern, at least one third type of IP pattern and at least one fourth type of IP pattern.

7. An OPC verification method, characterized by, The method comprises the following steps: obtaining a mask pattern, wherein the mask pattern comprises IP patterns with a repeating unit array; extracting a minimum repeating array in the mask pattern, wherein the minimum repeating array comprises all types of IP patterns, and each type of IP pattern has at least one; one-to-one corresponding matching all types of IP patterns in the minimum repeating array with IP patterns in a database to obtain a comparison result; according to the comparison result, confirming that the OPC verification is completed; The step of extracting the minimum repeating array in the mask layout includes: scanning all IP patterns in the mask layout, and extracting the same type of IP patterns in the mask layout to obtain several types of IP patterns. The step of scanning all IP patterns in the mask layout and extracting the same type of IP patterns in the mask layout to obtain several types of IP patterns includes: According to the size of the mask layout, a plurality of first scanning lines and a plurality of second scanning lines are arranged, the first scanning lines and the second scanning lines are perpendicular to each other, and the plurality of first scanning lines and the plurality of second scanning lines are distributed in a grid shape. The scanning interval data of the plurality of first scanning lines and the plurality of second scanning lines is set. According to the scanning interval data, all IP patterns in the mask layout are scanned simultaneously by the plurality of first scanning lines and the plurality of second scanning lines to obtain scanning data. According to the scanning data, the same type of IP patterns in the mask layout is extracted to obtain several types of IP patterns.

8. The OPC verification method of claim 7, wherein, The step of extracting the minimum repeating array in the mask layout further includes: The several types of IP patterns are merged to obtain the minimum repeating array.

9. The OPC verification method of claim 7, wherein, The scanning data is coordinate information of the IP pattern, a pattern shape of the IP pattern, and a pattern size of the IP pattern.

10. The OPC verification method of claim 9, wherein, The step of extracting the same type of IP pattern in the mask layout according to the scanning data to obtain several types of IP patterns includes: According to the scanning data, the same type of IP pattern in the IP pattern is extracted to obtain a first type of IP pattern, a second type of IP pattern, a third type of IP pattern, and a fourth type of IP pattern, wherein the same type of IP pattern is characterized in that: when the size of the IP pattern, the shape of the IP pattern, and the environment of the IP pattern are all the same, the IP pattern is the same type of IP pattern.

11. The OPC verification method of claim 10, wherein, The step of merging the several types of IP patterns to obtain the minimum repeating array includes: Obtaining the line width between different types of IP patterns; According to the line width between different types of IP patterns, the several types of IP patterns are merged to obtain the minimum repeating array pattern with the size of the minimum repeating array pattern.

12. The OPC verification method of claim 11, wherein, The minimum repeating array includes: at least one first type of IP pattern, at least one second type of IP pattern, at least one third type of IP pattern, and at least one fourth type of IP pattern.

13. The method of claim 7, wherein the OPC verification method is characterized by, The step of extracting the minimum repeating array in the mask layout further includes: A first database is created, and the first database includes several IP patterns without OPC processing; A second database is created, and the second database includes IP patterns that have been processed by OPC.

14. The OPC verification method of claim 13, wherein, The step of one-to-one corresponding matching all types of IP patterns in the minimum repeating array with IP patterns in the database to obtain a comparison result includes: All types of IP patterns in the minimum repeating array are one-to-one corresponding matched with IP patterns in the first database to obtain a first comparison result. The first comparison result includes: All types of IP patterns in the minimum repeat array are matched or not matched with the IP patterns in the first database.

15. The method of claim 14, wherein the OPC verification method is characterized by, After obtaining the first comparison result, the method further comprises: When all types of IP patterns in the minimum repeat array are matched with the IP patterns in the first database, the minimum repeat array is subjected to OPC processing to obtain an OPC-processed minimum repeat array; All types of IP patterns in the OPC-processed minimum repeat array are matched with the IP patterns in the second database to obtain a second comparison result; The second comparison result comprises: All types of IP patterns in the OPC-processed minimum repeat array are matched or not matched with the IP patterns in the second database.

16. The OPC verification method of claim 15, wherein, After obtaining the second comparison result, the method further comprises: When all types of IP patterns in the OPC-processed minimum repeat array are matched with the IP patterns in the second database, it is confirmed that the OPC verification is completed, and the fault points in the minimum repeat array will not have an impact at this time; When all types of IP patterns in the OPC-processed minimum repeat array are not matched with the IP patterns in the second database, the source of the difference between the minimum repeat array and the IP patterns in the second database is viewed.

17. The method of claim 14, wherein the OPC verification method is characterized by, After obtaining the first comparison result, the method further comprises: When all types of IP patterns in the minimum repeat array are not matched with the IP patterns in the first database, all types of IP patterns in the minimum repeat array are marked as patterns that need to be confirmed, and are stored in the first database to update the first database.

18. The OPC verification method of claim 7, wherein, After the step of obtaining the mask pattern, the method further comprises: The mask pattern is subjected to OPC processing to obtain fault points in the mask pattern; The fault points are detected to obtain a detection result; According to the detection result, it is confirmed that the OPC verification is completed.

19. The method of claim 18, wherein the OPC verification method is characterized by, The step of subjecting the mask pattern to OPC processing to obtain the fault points in the mask pattern is performed simultaneously with the step of extracting the minimum repeat array in the mask pattern.

20. The method of claim 8, wherein the OPC verification method is characterized by, The types in the IP pattern with the repeat unit array include a combination of one or more of SRAM, MEM CELL, and CIS PIXEL.

21. An OPC verification apparatus characterized by comprising: The method comprises: an obtaining unit configured to obtain a mask pattern, the mask pattern comprising IP patterns of different types; an extracting unit configured to extract a minimum repeat array in the mask pattern, the minimum repeat array comprising IP patterns of all types, and each type of IP pattern having at least one; a matching unit configured to match all types of IP patterns in the minimum repeat array with IP patterns in a database one by one to obtain a comparison result; a confirming unit configured to confirm, according to the comparison result, that the OPC verification is completed; and a confirming unit configured to confirm, according to the comparison result, that the OPC verification is completed. The extraction unit is further configured to set a plurality of first scanning lines and a plurality of second scanning lines according to the size of the mask pattern, the first scanning lines and the second scanning lines being perpendicular to each other, and the plurality of first scanning lines and the plurality of second scanning lines being distributed in a grid shape. Set the scanning interval data of the plurality of first scanning lines and the plurality of second scanning lines. According to the scanning interval data, drive the plurality of first scanning lines and the plurality of second scanning lines to simultaneously start scanning all IP patterns in the mask pattern, and obtain scanning data. According to the scanning data, extract the same type of IP patterns in the mask pattern, and obtain a plurality of types of IP patterns.

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