LCD exposure device

Abstract

The invention discloses an LCD (Liquid Crystal Display) exposure device which comprises an exposure machine, and a conveying groove for conveying an LCD substrate is formed in the bottom of the exposure machine; the conveying table is arranged in the conveying groove and transversely penetrates through the exposure machine, a containing groove is formed in the top of the conveying table, a conveying belt is rotationally connected into the containing groove and mainly comprises an inner belt and an outer belt, the outer belt is arranged on the outer side of the inner belt, a gap is reserved between the inner belt and the outer belt, and the edges of the two sides of the inner belt and the outer belt are fixedly connected through supporting blocks. The invention relates to the technical field of LCD panel exposure. According to the LCD exposure device, through the arrangement of the supporting piece, the conveying belt and the negative pressure assembly, when an LCD substrate is placed on the conveying belt, air flow is used for applying preliminary buffering to the LCD substrate, the impulsive force generated when the LCD substrate makes contact with the supporting piece is reduced, then when the LCD substrate is placed on the supporting piece, the supporting piece is used for supporting the LCD substrate, and the LCD substrate is exposed to the negative pressure assembly; and the edges are prevented from being broken due to direct contact with the conveying belt.

Description

Technical Field

[0001] The present invention relates to the technical field of LCD panel exposure, and in particular to an LCD exposure device. Background Art

[0002] LCD exposure usually refers to the process of transferring patterns onto the substrate of the liquid crystal display using photolithography technology during the manufacturing process of LCD panels. LCD exposure is an indispensable step in the production of liquid crystal displays. The pattern is accurately transferred to the substrate through photolithography technology to ensure the performance and quality of the final product. With the advancement of technology, the LCD exposure process is also constantly evolving to meet higher production requirements.

[0003] In the prior art, during the LCD exposure process, the LCD substrate to be exposed needs to be sent into the exposure machine through a conveying mechanism. However, since the LCD substrate needs to undergo a glue coating process before exposure, in order to protect the glue layer on the surface of the LCD substrate, it is avoided to use a negative pressure adsorption transfer method to transport the LCD substrate, which may cause the LCD substrate to tilt when placed on the conveying mechanism. At this time, the LCD substrate is not encapsulated, and its fragile edges are directly exposed. When the sharp edge contacts the bearing surface of the conveying mechanism, the edge is squeezed and the stress is concentrated, resulting in the substrate being scrapped, thereby increasing the difficulty of transporting the LCD substrate and the production cost of the LCD.

[0004] Therefore, those skilled in the art provide an LCD exposure device to solve the problems raised in the above background technology. Summary of the invention

[0005] The object of the present invention is to provide an LCD exposure device to solve the problems raised in the above background technology.

[0006] To achieve the above object, the present invention provides the following technical solutions: The above technical objectives of the present invention are achieved through the following technical solutions: An LCD exposure device includes an exposure machine, the bottom of which is provided with a conveying slot for conveying an LCD substrate; A conveyor platform is arranged in the conveyor slot and crosses the exposure machine. A receiving slot is provided on the top of the conveyor platform. A conveyor belt is rotatably connected in the receiving slot. The conveyor belt mainly consists of an inner belt and an outer belt. An outer belt is arranged on the outer side of the inner belt. A gap is left between the inner belt and the outer belt. The inner belt and the outer belt are fixedly connected at both side edges by support blocks. A support member, which is arranged in multiple groups at equal intervals along the circumference direction of the conveyor belt, and each group is arranged in multiple groups at equal intervals along the width direction of the conveyor belt, the support member includes a piston part and a suction cup part, the top of the piston part is convex to form a suction cup part, the top of the suction cup part is provided with a circular hole, the circular hole extends downward to the bottom of the piston part, and the bottom of the outer wall of the piston part is provided with multiple through grooves connected with the circular hole; A negative pressure assembly connected to the input side of the conveyor platform and used to generate negative pressure in the receiving tank and positive pressure in the gap of the conveyor belt; Through holes are evenly distributed on the surfaces of the inner belt and the outer belt. The diameter of the through holes on the outer belt surface is larger than the diameter of the through holes on the inner belt surface, so that the two through holes are respectively connected to the piston part and the suction cup part, and a positioning spring is fixedly connected between the bottom of the suction cup part and the surface of the inner belt.

[0007] Furthermore, the height of the through groove is the same as the thickness of the inner belt, and the height of the suction cup portion extending out of the outer belt is equal to twice the thickness of the inner belt.

[0008] Furthermore, a circular groove for airflow reverse thrust is provided on the top of the suction cup portion, and the circular groove is located outside the circular hole.

[0009] Furthermore, annular grooves are provided in the through holes of the inner belt and the outer belt, and sealing rings are connected in the annular grooves. The two sealing rings are in contact with the outer walls of the suction cup part and the piston part respectively.

[0010] Furthermore, the inner wall of the accommodating groove is concave to form a track groove, and both sides of the inner belt and the outer belt extend into the track groove.

[0011] Furthermore, the negative pressure assembly includes an air pump, a partition member and a diffusion nozzle, the partition member is arranged in the conveyor belt and is fixedly connected to the inner wall of the receiving groove, and a negative pressure chamber for suction is formed between the top of the partition member and the inner belt; The diffusion nozzle is fixedly connected to the outer wall of the conveying platform and communicated with the track groove; The air pump is installed on the outside of the conveying platform, the air pump input port is connected with the negative pressure chamber through the air inlet pipe, and the air pump output port is connected with the diffusion nozzle through the exhaust pipe.

[0012] Furthermore, the top of the conveying platform is composed of a material discharge area, an exposure area and a material unloading area, and the negative pressure chamber covers the material discharge area and the exposure area.

[0013] In summary, the present invention includes at least one of the following beneficial technical effects: 1. The LCD exposure device, through the support member, conveyor belt and negative pressure assembly, can make the LCD substrate be placed on the conveyor belt, and the airflow is used to apply preliminary buffering to the LCD substrate, so as to reduce the impact force when the LCD substrate contacts the support member. Then, when the LCD substrate is placed on the support member, the support member is used to prop up the LCD substrate, so as to avoid direct contact with the conveyor belt and cause edge fragmentation, which can effectively improve the protection effect of the LCD substrate. Then, when the LCD substrate is completely placed on the conveyor belt, the support force applied by the support member to the LCD substrate is converted into negative pressure suction force, so that the LCD substrate is closely attached to the conveyor belt, so that the LCD substrate is conveyed more stably, and the movement of the focus during exposure is reduced, thereby improving the exposure efficiency. 2. The LCD exposure device has a circular groove on the top of the suction cup part so that the airflow is intercepted by the circular groove when it rebounds, thereby increasing the thrust of the airflow on the suction cup part and enhancing the pre-pressure of the suction cup part. At this time, when the LCD substrate is slightly tilted, the suction cup part that is preferentially close to the LCD substrate will move downward slightly, so that the LCD substrate can contact with multiple suction cup parts at the same time when it is placed on the conveyor belt, effectively avoiding the pressure concentration caused by too small a contact surface due to early contact with a few suction cup parts when the LCD substrate is placed, avoiding uneven force damage on the surface of the LCD substrate, and further improving the protection performance of the LCD substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 It is a structural schematic diagram of an LCD exposure device of the present invention.

[0016] Figure 2 It is a regional schematic diagram of a conveying table in an LCD exposure device of the present invention.

[0017] Figure 3 It is a schematic diagram of the internal structure of a conveying table in an LCD exposure device of the present invention.

[0018] Figure 4 It is a schematic diagram of the state when a supporting member in an LCD exposure device of the present invention supports an LCD substrate.

[0019] Figure 5 It is a structural schematic diagram of a track groove in an LCD exposure device of the present invention.

[0020] In the figure, 1. exposure machine; 2. conveying table; 3. support member; 31. piston part; 32. suction cup part; 4. negative pressure assembly; 41. air pump; 42. partition member; 43. diffusion nozzle; 5. conveying trough; 6. containing trough; 7. conveyor belt; 71. inner belt; 72. outer belt; 73. support block; 8. round hole; 9. through groove; 10. through hole; 11. positioning spring; 12. round groove; 13. annular groove; 14. sealing ring; 15. track groove; 16. negative pressure chamber; 17. discharge area; 18. exposure area; 19. unloading area. DETAILED DESCRIPTION

[0021] The present invention is further described below with reference to the accompanying drawings and specific embodiments: Example

[0022] Reference Figure 1 - Figure 5 , an LCD exposure device disclosed in the present invention comprises an exposure machine 1, a conveying slot 5 for conveying an LCD substrate is provided at the bottom thereof; The conveyor platform 2 is arranged in the conveyor slot 5 and crosses the exposure machine 1. The top of the conveyor platform 2 is provided with a receiving slot 6. A conveyor belt 7 is rotatably connected in the receiving slot 6. The conveyor belt 7 is mainly composed of an inner belt 71 and an outer belt 72. The outer belt 72 is arranged on the outer side of the inner belt 71. A gap is left between the inner belt 71 and the outer belt 72. The inner belt 71 and the outer belt 72 are fixedly connected at their two side edges by support blocks 73. The support member 3 is provided with a plurality of groups equidistantly spaced along the circumference direction of the conveyor belt 7, and each group is provided with a plurality of groups equidistantly spaced along the width direction of the conveyor belt 7. The support member 3 includes a piston portion 31 and a suction cup portion 32. The top of the piston portion 31 is convexly formed with the suction cup portion 32. The top of the suction cup portion 32 is provided with a circular hole 8, and the circular hole 8 extends downward to the bottom of the piston portion 31. The bottom of the outer wall of the piston portion 31 is provided with a plurality of through grooves 9 connected with the circular hole 8. A negative pressure assembly 4, which is connected to the input side of the conveying platform 2, is used to generate negative pressure in the receiving groove 6 and generate positive pressure in the gap of the conveying belt 7; Through holes 10 are evenly distributed on the surfaces of the inner belt 71 and the outer belt 72. The diameter of the through holes 10 located on the surface of the outer belt 72 is larger than the diameter of the through holes 10 located on the surface of the inner belt 71, so that the two through holes 10 are respectively connected to the piston part 31 and the suction cup part 32, and a positioning spring 11 is fixedly connected between the bottom of the suction cup part 32 and the surface of the inner belt 71.

[0023] In this embodiment, observe Figure 1It can be found that by setting up the exposure machine 1 and the conveying table 2, the LCD substrate after glue coating can be transferred to the conveying table 2 by a robot, and then the conveyor belt 7 in the conveying table 2 is operated to transport the LCD substrate to the exposure machine 1 for exposure operation, and then the exposed LCD substrate will be transported out of the exposure machine 1 by the conveyor belt 7, and finally the exposed LCD substrate will be transferred to the next process by the robot.

[0024] However, since the LCD substrate is not packaged at this time, its fragile edges are directly exposed. If the robot arm does not keep it level with the surface of the conveyor belt 7 when placing the LCD substrate, the fragile edges of the LCD substrate will preferentially contact the surface of the conveyor belt 7, resulting in the sharp edge contacting the bearing surface of the conveying mechanism. The edge is squeezed and the stress is concentrated, resulting in the substrate being scrapped, thereby making it more difficult to transport the LCD substrate and increasing the production cost of the LCD.

[0025] So observe Figure 3 It can be found that multiple groups of support members 3 are arranged at equal intervals along the circumference direction of the conveyor belt 7, and each group has multiple support members 3 arranged at equal intervals along the width direction of the conveyor belt 7, which can be used to provide support for the LCD substrate when the LCD substrate is placed, avoid it from preferentially contacting the conveyor belt 7, and provide protection for the LCD substrate.

[0026] The support member 3 includes a piston portion 31 and a suction cup portion 32, the top of the piston portion 31 is convex to form a suction cup portion 32, a circular hole 8 is opened on the top of the suction cup portion 32, and the circular hole 8 extends downward to the bottom of the piston portion 31, and a plurality of through grooves 9 connected with the circular hole 8 are opened on the bottom of the outer wall of the piston portion 31; the conveyor belt 7 is mainly composed of an inner belt 71 and an outer belt 72, an outer belt 72 is arranged on the outer side of the inner belt 71, a gap is left between the inner belt 71 and the outer belt 72, and the edges on both sides of the inner belt 71 and the outer belt 72 are fixedly connected by support blocks 73; then, the surfaces of the inner belt 71 and the outer belt 72 are evenly distributed with through holes 10, the diameter of the through holes 10 located on the surface of the outer belt 72 is larger than the diameter of the through holes 10 located on the surface of the inner belt 71, so that the two through holes 10 are respectively The piston part 31 and the suction cup part 32 are connected, and can be used to install the support member 3 on the conveyor belt 7; finally, the input side of the conveyor platform 2 is connected with a negative pressure component 4, which can be used to extract the air in the receiving groove 6, and then inject the air into the gap between the inner belt 71 and the outer belt 72. At this time, the injected air will approach the piston part 31 along the gap, and then enter the circular hole 8 through the through groove 9 on the outer wall of the piston part 31, and finally be ejected from the circular hole 8, so that a series of airflows are formed on the top of the support member 3. At this time, when the LCD substrate approaches the support member 3, it will be buffered by the airflow, reducing the speed of the LCD substrate approaching the support member 3, thereby reducing the impact force generated when the LCD substrate contacts the support member 3, which can further protect the LCD substrate.

[0027] When the gas in the containing groove 6 is evacuated, negative pressure is generated, which will attract the piston part 31 to move downward, causing the support member 3 to be sucked into the conveyor belt 7, thereby losing the effect of providing protection for the LCD substrate. Figure 3 and Figure 4 It can be found that a positioning spring 11 is fixedly connected between the bottom of the suction cup part 32 and the surface of the inner belt 71. At this time, the suction cup part 32 will be supported by the positioning spring 11 to move upward to resist the suction force from the receiving groove 6, so as to ensure that the support member 3 can provide a stable buffer protection for the LCD substrate when the LCD substrate is placed on the conveyor belt 7. As the LCD substrate is completely placed on the support member 3, the circular hole 8 is blocked, resulting in the inability to effectively discharge the airflow in the circular hole 8, thereby increasing the air pressure at the circular hole 8 and the gas pressure on the bottom of the circular hole 8. At this time, the weight pressure of the LCD substrate, the gas pressure in the circular hole 8, and the negative pressure suction force in the receiving groove 6 are in the same direction, so that the pressure of the support member 3 is greater than the elastic force of the positioning spring 11. At this time, the piston part 31 slides down, so that the through groove 9 of the piston part 31 extends into the receiving groove 6 (such as Figure 4 As shown in the figure, the thrust of the positive pressure of the airflow in the circular hole 8 is converted into the suction of negative pressure, which is used to suck the LCD substrate onto the surface of the conveyor belt 7, making the transportation of the LCD substrate more stable, and effectively ensuring that the LCD substrate will not deviate during transportation during the exposure process, reducing the movement amount when the exposure machine is positioned, saving energy consumption during exposure, and thus improving the efficiency of exposure.

[0028] In a further preferred embodiment of the present invention, Figure 3 - Figure 5 As shown, the height of the through slot 9 is the same as the thickness of the inner belt 71, and the height of the suction cup portion 32 extending out of the outer belt 72 is equal to twice the thickness of the inner belt 71; A circular groove 12 for reverse airflow thrust is formed on the top of the suction cup portion 32 , and the circular groove 12 is located outside the circular hole 8 .

[0029] In this embodiment, when the LCD substrate is placed on the support member 3, the support member 3 is needed to provide support for the LCD substrate to prevent the edge corners of the LCD substrate from contacting the surface of the conveyor belt 7 first and being crushed, thereby providing protection for the LCD substrate. After the LCD substrate is completely put down, it is pressed downward so that the negative pressure in the accommodating groove 6 can suck the LCD substrate, thereby making the subsequent transportation of the LCD substrate more stable. Therefore, the height of the through groove 9 is made the same as the thickness of the inner belt 71, and the height of the suction cup part 32 extending out of the outer belt 72 is equal to twice the thickness of the inner belt 71. At this time, when the suction cup part 32 is pressed into the conveyor belt 7 so that the top of the suction cup part 32 is flush with the outer surface of the outer belt 72, the through groove 9 located above the inner belt 71 will be pressed under the inner belt 71. Figure 4 As shown in the state, the stability of the conversion between the blowing and suction states of the support member 3 can be effectively guaranteed.

[0030] Then, as the LCD substrate approaches the support member 3, the airflow ejected from the circular hole 8 will be blocked by the LCD substrate and produce a reverse thrust effect, so that the suction cup portion 32 is subjected to downward pressure. Figure 4 It can also be found that a circular groove 12 for airflow reverse thrust is opened on the top of the suction cup part 32, so that the airflow is intercepted by the circular groove 12 when it rebounds, thereby increasing the thrust of the airflow on the suction cup part 32 and enhancing the pre-down pressure of the suction cup part 32. At this time, when the LCD substrate is slightly tilted, the suction cup part 32 that is preferentially close to the LCD substrate will move downward slightly, so that the LCD substrate can contact with multiple suction cup parts 32 at the same time when it is placed on the conveyor belt 7, effectively avoiding the contact surface being too small and the pressure being concentrated due to the early contact with a few suction cup parts 32 when the LCD substrate is placed, avoiding uneven force damage on the surface of the LCD substrate, and further improving the protection performance of the LCD substrate.

[0031] In a further preferred embodiment of the present invention, Figure 4 and Figure 5 As shown, an annular groove 13 is provided in the through hole 10 of the inner belt 71 and the outer belt 72, and a sealing ring 14 is connected in the annular groove 13. The two sealing rings 14 are in contact with the outer wall of the suction cup part 32 and the piston part 31 respectively; The inner wall of the receiving groove 6 is concave to form a track groove 15 , and both sides of the inner belt 71 and the outer belt 72 extend into the track groove 15 .

[0032] In this embodiment, since the direction of the force applied to the LCD substrate will change when the support member 3 slides up and down in the through hole 10, thereby changing the effect of the support member 3 on the LCD substrate, in order to ensure the operating stability of the support member 3 and avoid air leakage, the through hole 10 is made Figure 4 As shown, a circular groove 13 is opened on the inner wall, and a sealing ring 14 is connected to the circular groove 13, so that the sealing ring 14 located in the inner band 71 and the outer band 72 are in contact with the outer walls of the piston part 31 and the suction cup part 32 respectively, so as to ensure the sealing performance of the support member 3 when sliding, thereby ensuring the operation stability of the support member 3.

[0033] Since the airflow is blown in through the gap between the outer belt 72 and the inner belt 71, and the conveyor belt 7 circulates in the receiving groove 6, in order to reduce air leakage in the gap between the conveyor belt 7 and the inner wall of the receiving groove 6, a track groove 15 is provided on the side wall of the receiving groove 6, and the side edges of the inner belt 71 and the outer belt 72 are extended into the track groove 15 to increase the overlapping area between the inner belt 71, the outer belt 72 and the inner wall of the receiving groove 6, so that when the air enters the track groove 15, the resistance to discharge along the gap between the inner belt 71 and the outer belt 72 and the track groove 15 is increased, so that the airflow preferentially enters the gap between the inner belt 71 and the outer belt 72, and is discharged through the circular hole 8, so as to ensure that the LCD substrate is stably blown by the airflow when placed on the support 3, thereby reducing the impact when contacting the support 3.

[0034] In a further preferred embodiment of the present invention, Figure 1 - Figure 3 As shown, the negative pressure assembly 4 includes an air pump 41, a partition member 42 and a diffusion nozzle 43. The partition member 42 is arranged in the conveyor belt 7 and is fixedly connected to the inner wall of the receiving groove 6. A negative pressure chamber 16 for suction is formed between the top of the partition member 42 and the inner belt 71; The diffusion nozzle 43 is fixedly connected to the outer wall of the conveying platform 2 and communicated with the track groove 15; The air pump 41 is installed on the outside of the conveying platform 2, the input port of the air pump 41 is connected to the negative pressure chamber 16 through the air inlet pipe, and the output port of the air pump 41 is connected to the diffusion nozzle 43 through the exhaust pipe; The top of the conveying platform 2 is composed of a discharge area 17 , an exposure area 18 and a discharge area 19 , and the negative pressure chamber 16 covers the discharge area 17 and the exposure area 18 .

[0035] In this embodiment, since the negative pressure component 4 needs to generate negative pressure in the receiving groove 6, a positive pressure is generated in the gap between the inner belt 71 and the outer belt 72. Figure 1 and Figure 3 It can be found that an air pump 41 is fixedly connected to the outer wall of the conveying platform 2, and the input port of the air pump 41 is connected to the receiving groove 6 through the air inlet pipe; the output port of the air pump 41 is connected to the track groove 15 through the exhaust pipe. At this time, the air pump 41 can be operated to extract the air in the receiving groove 6, and then inject it into the gap between the inner belt 71 and the outer belt 72, so that the support member 3 can operate stably. By fixing a diffusion nozzle 43 at the exhaust port of the exhaust pipe, the area of ​​the air flow spraying can be increased, thereby avoiding the air flow being too concentrated when spraying, resulting in an unbalanced air pressure in the gap between the inner belt 71 and the outer belt 72, which affects the stability of the support member 3.

[0036] However, when the LCD substrate is completely placed on the conveyor belt 7, the force applied by the support member 3 to the LCD substrate will change from a supporting force to a suction force. When the LCD substrate is transported out of the exposure machine 1 after exposure, the LCD substrate still maintains a close fit with the conveyor belt 7, which makes it more difficult to unload the LCD substrate and affects the production efficiency of the LCD.

[0037] Therefore, combined Figure 2 and Figure 3 It can be found that a partition member 42 is provided inside the conveyor belt 7, and the partition member 42 is fixedly connected to the inner wall of the receiving groove 6, and a negative pressure chamber 16 for air suction is formed between the partition member 42 and the inner belt 71, and the air inlet pipe is extended into the negative pressure chamber 16, which can be used to ensure that when the air pump 41 is running, the bottom of the inner belt 71 stably generates negative pressure for sucking the LCD substrate. Then look at Figure 2 It can be found that the top of the conveyor table 2 is centered on the exposure machine 1, and the two sides of the conveyor table 2 are separated, so that the top of the conveyor table 2 is divided into a discharge area 17, an exposure area 18 and a discharge area 19 in sequence, and the negative pressure chamber 16 covers the overlapping parts of the conveyor belt 7 and the discharge area 17 and the exposure area 18. At this time, when the LCD substrate is placed in the discharge area 17, the support member 3 will first support the LCD substrate, and then absorb the LCD substrate to ensure the close contact between the LCD substrate and the conveyor belt 7, so that the LCD substrate will not shift when the conveyor belt 7 transports the LCD substrate to the exposure machine 1. Then, after the exposure of the LCD substrate is completed, when the conveyor belt 7 moves the LCD substrate out of the exposure machine 1, the support member 3 used to absorb the LCD substrate is separated from the negative pressure chamber 16, so that the support member 3 loses the force of the negative pressure and breaks the balance. Then, the support member 3 gradually lifts the LCD substrate under the support of the positioning spring 11, so that the LCD substrate actively floats above the conveyor belt 7. At this time, the LCD substrate can be easily taken out, making the unloading of the LCD substrate simpler and more convenient.

[0038] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An LCD exposure device, characterized in that: It comprises an exposure machine (1), the bottom of which is provided with a conveying slot (5) for conveying an LCD substrate; A conveyor table (2) is arranged in a conveyor slot (5) and crosses the exposure machine (1). A receiving slot (6) is provided on the top of the conveyor table (2). A conveyor belt (7) is rotatably connected in the receiving slot (6). The conveyor belt (7) mainly consists of an inner belt (71) and an outer belt (72). An outer belt (72) is arranged on the outer side of the inner belt (71). A gap is left between the inner belt (71) and the outer belt (72). The inner belt (71) and the outer belt (72) are fixedly connected at their two side edges by support blocks (73). A support member (3) having a plurality of groups arranged at equal intervals along the circumference direction of the conveyor belt (7), each group having a plurality of members arranged at equal intervals along the width direction of the conveyor belt (7), the support member (3) comprising a piston portion (31) and a suction cup portion (32), the top of the piston portion (31) being raised to form the suction cup portion (32), the top of the suction cup portion (32) being provided with a circular hole (8), the circular hole (8) extending downward to the bottom of the piston portion (31), the outer wall bottom of the piston portion (31) being provided with a plurality of through grooves (9) communicating with the circular holes (8); A negative pressure component (4) connected to the input side of the conveying platform (2) and used to generate negative pressure in the containing groove (6) and generate positive pressure in the gap of the conveying belt (7); Through holes (10) are evenly distributed on the surfaces of the inner belt (71) and the outer belt (72); the diameter of the through holes (10) located on the surface of the outer belt (72) is larger than the diameter of the through holes (10) located on the surface of the inner belt (71), so that the two through holes (10) are respectively connected to the piston part (31) and the suction cup part (32); and a positioning spring (11) is fixedly connected between the bottom of the suction cup part (32) and the surface of the inner belt (71).

2. An LCD exposure device according to claim 1, characterized in that: The height of the through groove (9) is the same as the thickness of the inner belt (71), and the height of the suction cup portion (32) extending beyond the outer belt (72) is equal to twice the thickness of the inner belt (71).

3. An LCD exposure device according to claim 2, characterized in that: A circular groove (12) for airflow reverse thrust is provided on the top of the suction cup portion (32), and the circular groove (12) is located outside the circular hole (8).

4. An LCD exposure device according to claim 3, characterized in that: An annular groove (13) is provided in the through hole (10) of the inner belt (71) and the outer belt (72), and a sealing ring (14) is connected to the annular groove (13). The two sealing rings (14) are in contact with the outer wall of the suction cup portion (32) and the piston portion (31), respectively.

5. An LCD exposure device according to claim 4, characterized in that: The inner wall of the accommodating groove (6) is concave to form a track groove (15), and both sides of the inner belt (71) and the outer belt (72) extend into the track groove (15).

6. The LCD exposure device according to claim 5, characterized in that: The negative pressure assembly (4) comprises an air pump (41), a partition member (42) and a diffusion nozzle (43); the partition member (42) is arranged in the conveyor belt (7) and is fixedly connected to the inner wall of the receiving groove (6); a negative pressure chamber (16) for suction is formed between the top of the partition member (42) and the inner belt (71); The diffusion nozzle (43) is fixedly connected to the outer wall of the conveying platform (2) and communicates with the track groove (15); The air pump (41) is installed outside the conveying platform (2), the input port of the air pump (41) is connected to the negative pressure chamber (16) through an air inlet pipe, and the output port of the air pump (41) is connected to the diffusion nozzle (43) through an exhaust pipe.

7. An LCD exposure device according to claim 6, characterized in that: The top of the conveying platform (2) is composed of a discharge area (17), an exposure area (18) and a discharge area (19), and the negative pressure chamber (16) covers the discharge area (17) and the exposure area (18).

Images