Mask aligning and calibrating device

Abstract

The invention discloses a mask alignment calibration device which comprises a calibration mechanism, a cavity cover assembly, a cavity and a driving assembly, the interior of the cavity is a vacuum environment, the cavity cover assembly is movably arranged at the top of the cavity, and the cavity cover assembly is in sealed connection with the cavity; the calibration mechanism is arranged on a bottom plate in the cavity in a sliding manner, and the bottom plate is used for bearing a mask plate; the driving assembly is arranged on the side portion of the cavity, and the output end of the driving assembly penetrates through the side portion of the cavity and is connected with the calibration mechanism. And under the driving of the driving assembly, the calibration mechanism moves so as to adjust the position of the mask plate on the bottom plate. The device has the advantages of being compact in structure, small in size, high in stability, accurate in control and the like, the difficulty of alignment calibration work of the mask plate is lowered, and the position form of the mask plate in the cavity is ensured.

Description

Technical Field

[0001] The invention relates to the technical field of electron beam equipment, and in particular to a mask alignment and calibration device. Background Art

[0002] Electron beam exposure machine is an important device that uses electron beam generation, acceleration, focusing and deflection to expose materials with high precision to prepare micro-nano sized graphic structures. In the field of micro-nano processing technology, electron beam exposure is a crucial process and one of the core technologies for achieving high-precision pattern production of masks.

[0003] Since the exposure accuracy of the mask pattern is extremely high, the position and shape of the mask cannot have a large deviation before exposure, so the mask needs to be aligned and calibrated before exposure to ensure its position and shape. The diversity of mask size specifications also increases the difficulty of mask alignment and calibration. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a mask alignment and calibration device with compact structure, high stability and small size in view of the above-mentioned problems in the prior art.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0006] A mask alignment and calibration device comprises: a calibration mechanism, a cavity cover assembly, a cavity and a driving assembly; the interior of the cavity is a vacuum environment, the cavity cover assembly is movably arranged on the top of the cavity, and the cavity cover assembly is sealed and connected to the cavity; the calibration mechanism is slidably arranged on a bottom plate inside the cavity, and the bottom plate is used to carry the mask; the driving assembly is arranged on the side of the cavity, and the output end of the driving assembly passes through the side of the cavity and is connected to the calibration mechanism; under the drive of the driving assembly, the calibration mechanism moves to adjust the position of the mask on the bottom plate.

[0007] As a further improvement of the present invention, a plurality of support columns are symmetrically arranged on the base plate, and the support columns are used to carry the mask; the calibration mechanism includes a first calibration component, a second calibration component and a third calibration component; the first calibration component is slidably arranged on one side of the base plate to adjust the position of the mask in the Y-axis direction; the second calibration component and the third calibration component are respectively arranged on two adjacent sides of the first calibration component to adjust the position of the mask in the X-axis direction.

[0008] As a further improvement of the present invention, the bottom plate is provided with a first mounting groove and a second mounting groove perpendicular to each other, a first slide rail assembly parallel to the first mounting groove is provided on the side of the bottom plate, a second slide rail assembly is provided on one side of the second mounting groove, and a linkage rod is provided in the second mounting groove;

[0009] The first calibration assembly includes a first side push plate, a first connecting plate, a side arm, a positioning plate and a guide groove; a plurality of limit columns are evenly distributed on the side arm, one end of the side arm is connected to the first side push plate, and the other end of the side arm is connected to the positioning plate, and the positioning plate is provided with a guide groove, one end of the linkage rod is fixed in the guide groove, and the other end of the linkage rod is connected to the driving assembly through the first connecting plate, and the first connecting plate is connected to the second slide rail assembly;

[0010] The side arm passes through the first mounting groove, the positioning plate is located at the bottom of the base plate, and the first side push plate is connected to the first slide rail assembly; under the drive of the driving assembly, the linkage rod drives the side arm to reciprocate along the first mounting groove, and the side arm drives the first side push plate to reciprocate along the first slide rail assembly to drive the limiting column to push the mask plate to move along the Y-axis direction on the base plate.

[0011] As a further improvement of the present invention, a first limiting plate is further provided on the bottom plate, and the first limiting plate is located on the side of the first slide rail assembly to limit the displacement of the first side push plate in the Y-axis direction.

[0012] As a further improvement of the present invention, the second calibration component includes a second side push plate and a second connecting plate, the second side push plate is slidably arranged on the base plate, a plurality of limit columns are symmetrically arranged on both sides of the second side push plate, the second connecting plate is fixed on the second side push plate and connected to the driving component; under the drive of the driving component, the second connecting plate drives the second side push plate to reciprocate on the base plate, so as to drive the limit columns to push the mask plate to move along the X-axis direction on the base plate.

[0013] As a further improvement of the present invention, a second limiting plate is provided on the side of the bottom plate to limit the displacement of the second side push plate in the X-axis direction.

[0014] As a further improvement of the present invention, a positioning pin is provided on the bottom plate, and the positioning pin and the second limiting plate are arranged on both sides of the second side push plate opposite to each other to limit the displacement of the second side push plate in the X-axis direction.

[0015] As a further improvement of the present invention, a third slide rail assembly is provided on the base plate; the third calibration assembly includes a third side push plate and a third connecting plate, the top of the third side push plate is a stepped structure, and the third side push plate is connected to the third slide rail assembly; one end of the third connecting plate is connected to the driving assembly, and the other end of the third connecting plate is connected to the third side push plate, and under the drive of the driving assembly, the third connecting plate drives the third side push plate to reciprocate along the third slide rail assembly to push the mask plate to move along the X-axis direction on the base plate.

[0016] As a further improvement of the present invention, a third limiting plate is provided on the side of the bottom plate to limit the displacement of the third side push plate in the X-axis direction.

[0017] As a further improvement of the present invention, a photoelectric switch is provided on the bottom plate to detect the position of the mask on the bottom plate.

[0018] Compared with the prior art, the advantages of the present invention are:

[0019] The mask alignment and calibration device of the present invention comprises a calibration mechanism, a cavity cover assembly, a cavity and a driving assembly to form a main body of the mask alignment and calibration device with a compact structure and a small size; specifically, the cavity cover assembly is movably arranged on the top of the cavity, and the cavity cover assembly is sealed and connected to the cavity, which not only ensures the sealing performance of the cavity, but also facilitates the inspection and maintenance of the interior of the cavity; further, the calibration mechanism is slidably arranged on the bottom plate inside the cavity, and the bottom plate is used to carry the mask; at the same time, the driving assembly is arranged on the side of the cavity, and the output end of the driving assembly passes through the side of the cavity and is connected to the calibration mechanism; under the drive of the driving assembly, the calibration mechanism moves on the bottom plate, thereby pushing the mask to move, thereby realizing the alignment and calibration of masks of multiple specifications under a vacuum environment, ensuring a good position and morphological basis of the mask before exposure, thereby ensuring the smooth progress of the mask pattern exposure process. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure principle of the mask alignment and calibration device in a specific embodiment of the present invention;

[0021] Figure 2 It is a schematic diagram of the structural principle of the cavity cover assembly in a specific embodiment of the present invention;

[0022] Figure 3 It is a schematic diagram of the structural principle of the calibration mechanism in a specific embodiment of the present invention;

[0023] Figure 4 It is a schematic diagram of the structural principle of the first calibration component in a specific embodiment of the present invention;

[0024] Figure 5 It is a schematic diagram of the structural principle of the calibration mechanism and the mask assembly in a specific embodiment of the present invention;

[0025] Figure 6 It is a schematic diagram of the top view of the structural principle of the calibration mechanism and the mask assembly in a specific embodiment of the present invention;

[0026] Legend: 1. Calibration mechanism; 2. Cavity cover assembly; 3. First drive member; 4. Second drive member; 5. Third drive member; 6. Cavity; 7. Bellows; 11. Bottom plate; 12. First calibration assembly; 13. Second calibration assembly; 14. Third calibration assembly; 15. Photoelectric switch; 16. Support column; 17. Limit column; 18. Bearing; 19. Positioning pin; 100. Mask; 111. First mounting slot; 112. Linkage rod; 113. Second mounting slot; 114. First slide rail assembly Parts; 115, second slide rail assembly; 116, third slide rail assembly; 121, first side push plate; 122, first connecting plate; 123, first limit plate; 124, side arm; 125, positioning plate; 126, guide groove; 131, second side push plate; 132, second limit plate; 133, second connecting plate; 141, third side push plate; 142, third limit plate; 143, third connecting plate; 21, cover plate; 22, hinge; 23, nitrogen spring; 24, observation window; 25, handle. DETAILED DESCRIPTION

[0027] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0028] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0029] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0030] Example

[0031] like Figures 1 to 6As shown, the mask alignment calibration device of the present invention comprises: a calibration mechanism 1, a cavity cover assembly 2, a cavity 6 and a driving assembly. The cavity 6 is a square rectangular structure, which is formed by purchasing stainless steel and welding, and the interior of the cavity 6 is a vacuum environment. The cavity cover assembly 2 is movably arranged on the top of the cavity 6, and the cavity cover assembly 2 is sealed and connected to the cavity 6. The calibration mechanism 1 is slidably arranged on the bottom plate 11 inside the cavity 6, and the bottom plate 11 is used to carry the mask 100. The driving assembly is arranged on the side of the cavity 6, and the output end of the driving assembly passes through the side of the cavity 6 and is connected to the calibration mechanism 1. Driven by the driving assembly, the calibration mechanism 1 moves to adjust the position of the mask 100 on the bottom plate 11.

[0032] like Figure 2 As shown, the cavity cover assembly 2 includes a cover plate 21, and a hinge 22 is provided at one end of the cover plate 21 to realize the hinged connection between the cover plate 21 and the cavity 6; nitrogen springs 23 are symmetrically arranged on both sides of the cover plate 21, and the cover plate 21 can be turned backward as a whole under the action of the nitrogen springs 23, so as to facilitate the maintenance of the interior of the cavity 6. At the same time, an observation window 24 is provided on the top of the cover plate 21 to facilitate the observation of the state inside the cavity 6; a handle 25 is provided on the cover plate 21 to facilitate opening or closing the cover plate 21.

[0033] In this embodiment, a mask alignment and calibration device body with a compact structure and small size is formed by a calibration mechanism 1, a cavity cover assembly 2, a cavity 6 and a driving assembly; specifically, the cavity cover assembly 2 is movably arranged on the top of the cavity 6, and the cavity cover assembly 2 is sealed and connected to the cavity 6, which not only ensures the sealing performance of the cavity 6, but also facilitates the inspection and maintenance of the interior of the cavity 6; further, the calibration mechanism 1 is slidably arranged on the bottom plate 11 inside the cavity 6, and the bottom plate is used to carry the mask; at the same time, the driving assembly is arranged on the side of the cavity 6, and the output end of the driving assembly passes through the side of the cavity 6 and is connected to the calibration mechanism 1; under the drive of the driving assembly, the calibration mechanism 1 moves on the bottom plate 11, thereby pushing the mask 100 to move, thereby realizing the alignment and calibration of multi-specification masks 100 under a vacuum environment, ensuring a good position and morphological basis for the mask 100 before exposure, thereby ensuring the smooth progress of the mask pattern exposure process.

[0034] like Figure 3As shown, according to the bearing requirements of the mask 100 of different sizes, a plurality of support columns 16 are symmetrically arranged at the four vertices of the base plate 11, and the mask 100 is carried by the support columns 16; a limit column 17 is correspondingly arranged on one side of the support column 16 to assist the mask 100 in alignment and calibration. The calibration mechanism 1 includes a first calibration component 12, a second calibration component 13 and a third calibration component 14; the first calibration component 12 is slidably arranged on one side of the base plate 11 to adjust the position of the mask 100 in the Y-axis direction; the second calibration component 13 and the third calibration component 14 are respectively arranged on the two adjacent sides of the first calibration component 12 to adjust the position of the mask 100 in the X-axis direction.

[0035] like Figure 1 and Figure 5 As shown, the driving assembly includes a first driving member 3, a second driving member 4 and a third driving member 5. The first driving member 3 and the third driving member 5 are arranged on the same side of the cavity 6, and the second driving member 4 is relatively arranged on the other side of the cavity 6. The first driving member 3 is connected to the first calibration component 12, the second driving member 4 is connected to the second calibration component 13, and the third driving member 5 is connected to the third calibration component 14. Specifically, the first driving member 3, the second driving member 4 and the third driving member 5 are all cylinders, and the cylinder shaft is connected to the bellows 7 that can move telescopically, and an O-ring is used to seal the flange of the cavity 6. The push shaft at the end of the bellows 7 is connected to the calibration mechanism 1, which is used to drive the calibration mechanism 1 to move and realize the alignment and calibration of the mask 100. In other embodiments, the first driving member 3, the second driving member 4 and the third driving member 5 can also be a hydraulic cylinder or an electric push rod or a motor, as long as it can drive the calibration mechanism 1 to move smoothly.

[0036] like Figure 3 and Figure 4 As shown, the bottom plate 11 is provided with a first mounting groove 111 and a second mounting groove 113 perpendicular to each other, and two first mounting grooves 111 are provided in parallel. A first slide rail assembly 114 parallel to the first mounting groove 111 is provided on the side of the bottom plate 11, and two groups of the first slide rail assembly 114 are also provided in parallel. A second slide rail assembly 115 is provided on one side of the second mounting groove 113, and a linkage rod 112 is provided in the second mounting groove 113.

[0037] The first calibration assembly 12 includes a first side push plate 121, a first connecting plate 122, a side arm 124, a positioning plate 125 and a guide groove 126. A plurality of limit posts 17 are evenly distributed on the inclined side arm 124, one end of the side arm 124 is connected to the first side push plate 121, the other end of the side arm 124 is connected to the positioning plate 125, the positioning plate 125 is provided with a guide groove 126, one end of the linkage rod 112 is fixed in the guide groove 126 to realize the connection between the linkage rod 112 and the positioning plate 125, the other end of the linkage rod 112 is connected to the first driving member 3 through the first connecting plate 122, and the first connecting plate 122 is connected to the second slide rail assembly 115.

[0038] The side arm 124 penetrates the first mounting groove 111, the positioning plate 125 is located at the bottom of the base plate 11, and the first side push plate 121 is connected to the first slide rail assembly 114. Driven by the first driving member 3, the linkage rod 112 drives the side arm 124 to reciprocate along the first mounting groove 111, and the side arm 124 drives the first side push plate 121 to reciprocate along the first slide rail assembly 114, so as to drive the limiting column 17 to push the mask 100 to move along the Y-axis direction on the base plate 11. Further, in order to improve the smoothness of the movement of the mask 100, a bearing 18 is provided on the top of the limiting column 17, and the bearing 18 assists the movement of the mask 100 to improve the efficiency of the alignment and calibration of the mask 100.

[0039] like Figure 3 As shown, a first limiting plate 123 is further provided on the bottom plate 11 . The first limiting plate 123 is located on the side of the first slide rail assembly 114 to limit the displacement of the first side push plate 121 in the Y-axis direction.

[0040] like Figure 3 As shown, the second calibration assembly 13 includes a second side push plate 131 and a second connecting plate 133. The second side push plate 131 is slidably arranged on the bottom plate 11. A plurality of limiting posts 17 are symmetrically arranged on both sides of the second side push plate 131. The second connecting plate 133 is fixed on the second side push plate 131 and connected to the second driving member 4. Driven by the second driving member 4, the second connecting plate 133 drives the second side push plate 131 to reciprocate on the bottom plate 11, so as to drive the limiting posts 17 to push the mask 100 to move along the X-axis direction on the bottom plate 11. Further, in order to improve the smoothness of the movement of the mask 100, a bearing 18 is arranged on the top of the limiting post 17, and the mask 100 is assisted to move by the bearing 18, so as to improve the efficiency of the alignment and calibration of the mask 100.

[0041] like Figure 3 As shown, a second limiting plate 132 is provided on the side of the bottom plate 11 to limit the displacement of the second side push plate 131 in the X-axis direction.

[0042] Furthermore, a group of positioning pins 19 are symmetrically provided on the bottom plate 11, and the positioning pins 19 and the second limiting plates 132 are arranged on both sides of the second side push plate 131 to limit the displacement of the second side push plate 131 in the X-axis direction. Specifically, the positioning pins 19 are used to limit the displacement of the second side push plate 131 in the X-axis direction, and the second limiting plates 132 are used to limit the displacement of the second side push plate 131 in the X-axis direction.

[0043] like Figure 3 As shown, the bottom plate 11 is provided with a third slide rail assembly 116; the third calibration assembly 14 includes a third side push plate 141 and a third connecting plate 143, the top of the third side push plate 141 is a stepped structure to match the mask plates 100 of different sizes, and the third side push plate 141 is connected to the third slide rail assembly 116. One end of the third connecting plate 143 is connected to the third driving member 5, and the other end of the third connecting plate 143 is connected to the third side push plate 141. Under the drive of the third driving member 5, the third connecting plate 143 drives the third side push plate 141 to reciprocate along the third slide rail assembly 116 to push the mask plate 100 to move along the X-axis direction on the bottom plate 11. Further, in order to improve the smoothness of the movement of the mask plate 100, a bearing 18 is provided on the top of the third side push plate 141, and the bearing 18 assists the movement of the mask plate 100 to improve the efficiency of the alignment and calibration of the mask plate 100.

[0044] Furthermore, a third limiting plate 142 is provided on the side of the bottom plate 11 to limit the displacement of the third side pushing plate 141 in the X-axis direction.

[0045] like Figure 3 As shown, a photoelectric switch 15 is provided on the bottom plate 11, and the photoelectric switch 15 and the first calibration component 12 are arranged on both sides of the bottom plate 11 opposite to each other, so as to detect the position of the mask 100 on the bottom plate 11. Furthermore, for masks 100 of different specifications, photoelectric switches 15 can be designed at different positions on the bottom plate 11 to detect the presence or absence of the mask 100.

[0046] like Figure 5 and Figure 6 As shown, the working principle of the mask alignment and calibration device of this embodiment is:

[0047] The alignment and calibration of the mask 100 in the Y-axis direction is driven by the first driving member 3 to push the first connecting plate 122 and the linkage rod 112, and the linkage rod 112 drives the first side push plate 121 and the side arm 124 to move. The side arm 124 is provided with a limit column 17 and a bearing 18. The first side push plate 121 and the side arm 124 move so that the bearing 18 contacts with the mask 100 and pushes the mask 100 against the limit column 17 fixed on the opposite side of the base plate 11, thereby realizing the alignment and calibration of the mask 100 in the Y-axis direction.

[0048] Similarly, the mask 100 is aligned and calibrated in the X-axis direction, and the second driving member pushes the second connecting plate 133, and the second connecting plate 133 drives the second side push plate 131 to move along the -X direction. The second side push plate 131 stops moving after it supports the positioning pin 19, thereby realizing the unilateral positioning of the mask 100 in the X-axis direction; then, the third driving member 5 pushes the connecting plate 143, and the third connecting plate 143 drives the third side push plate 141. The bearing 18 on the top of the third side push plate 141 pushes the mask 100 to move along the +X direction until the mask 100 is close to the limiting column 17 on the second side push plate 131, thereby realizing the alignment and calibration of the mask 100 in the X-axis direction.

[0049] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A mask alignment and calibration device, characterized in that: include: A calibration mechanism (1), a cavity cover assembly (2), a cavity body (6) and a drive assembly; The interior of the cavity (6) is a vacuum environment; the cavity cover assembly (2) is movably arranged at the top of the cavity (6), and the cavity cover assembly (2) is sealed and connected to the cavity (6); the calibration mechanism (1) is slidably arranged on a bottom plate (11) inside the cavity (6), and the bottom plate (11) is used to carry the mask (100); the drive assembly is arranged on the side of the cavity (6), and the output end of the drive assembly passes through the side of the cavity (6) and is connected to the calibration mechanism (1); under the drive of the drive assembly, the calibration mechanism (1) moves to adjust the position of the mask (100) on the bottom plate (11).

2. The mask alignment and calibration device according to claim 1, characterized in that: A plurality of support columns (16) are symmetrically arranged on the base plate (11), and the support columns (16) are used to carry the mask (100); the calibration mechanism (1) comprises a first calibration component (12), a second calibration component (13) and a third calibration component (14); the first calibration component (12) is slidably arranged on one side of the base plate (11) to adjust the position of the mask (100) in the Y-axis direction; the second calibration component (13) and the third calibration component (14) are respectively arranged on two adjacent sides of the first calibration component (12) to adjust the position of the mask (100) in the X-axis direction.

3. The mask alignment and calibration device according to claim 2, characterized in that: The bottom plate (11) is provided with a first mounting groove (111) and a second mounting groove (113) which are perpendicular to each other; a first slide rail assembly (114) which is parallel to the first mounting groove (111) is provided on the side of the bottom plate (11); a second slide rail assembly (115) is provided on one side of the second mounting groove (113); and a linkage rod (112) is provided in the second mounting groove (113); The first calibration component (12) comprises a first side push plate (121), a first connecting plate (122), a side arm (124), a positioning plate (125) and a guide groove (126); a plurality of limit columns (17) are evenly distributed on the side arm (124); one end of the side arm (124) is connected to the first side push plate (121); the other end of the side arm (124) is connected to the positioning plate (125); a guide groove (126) is provided on the positioning plate (125); one end of the linkage rod (112) is fixed in the guide groove (126); the other end of the linkage rod (112) is connected to the driving component through the first connecting plate (122); and the first connecting plate (122) is connected to the second slide rail component (115); The side arm (124) passes through the first mounting groove (111), the positioning plate (125) is located at the bottom of the base plate (11), and the first side push plate (121) is connected to the first slide rail assembly (114); under the drive of the driving assembly, the linkage rod (112) drives the side arm (124) to move back and forth along the first mounting groove (111), and the side arm (124) drives the first side push plate (121) to move back and forth along the first slide rail assembly (114), so as to drive the limiting column (17) to push the mask (100) to move along the Y-axis direction on the base plate (11).

4. The mask alignment and calibration device according to claim 3, characterized in that: A first limiting plate (123) is also provided on the bottom plate (11), and the first limiting plate (123) is located on the side of the first slide rail assembly (114) to limit the displacement of the first side push plate (121) in the Y-axis direction.

5. The mask alignment and calibration device according to claim 3, characterized in that: The second calibration component (13) comprises a second side push plate (131) and a second connecting plate (133), wherein the second side push plate (131) is slidably arranged on the base plate (11), a plurality of limiting columns (17) are symmetrically arranged on both sides of the second side push plate (131), and the second connecting plate (133) is fixed on the second side push plate (131) and connected to the driving component; under the drive of the driving component, the second connecting plate (133) drives the second side push plate (131) to move back and forth on the base plate (11), so as to drive the limiting columns (17) to push the mask (100) to move along the X-axis direction on the base plate (11).

6. The mask alignment and calibration device according to claim 5, characterized in that: A second limiting plate (132) is provided on the side of the bottom plate (11) for limiting the displacement of the second side push plate (131) in the X-axis direction.

7. The mask alignment and calibration device according to claim 6, characterized in that: The bottom plate (11) is provided with a positioning pin (19), and the positioning pin (19) and the second limiting plate (132) are arranged on both sides of the second side push plate (131) opposite to each other, so as to limit the displacement of the second side push plate (131) in the X-axis direction.

8. The mask alignment and calibration device according to claim 5, characterized in that: A third slide rail assembly (116) is provided on the base plate (11); the third calibration assembly (14) comprises a third side push plate (141) and a third connecting plate (143); the top of the third side push plate (141) is a stepped structure, and the third side push plate (141) is connected to the third slide rail assembly (116); one end of the third connecting plate (143) is connected to the driving assembly, and the other end of the third connecting plate (143) is connected to the third side push plate (141); under the drive of the driving assembly, the third connecting plate (143) drives the third side push plate (141) to reciprocate along the third slide rail assembly (116) to push the mask (100) to move along the X-axis direction on the base plate (11).

9. The mask alignment and calibration device according to claim 8, characterized in that: A third limiting plate (142) is provided on the side of the bottom plate (11) for limiting the displacement of the third side push plate (141) in the X-axis direction.

10. The mask alignment and calibration device according to any one of claims 1 to 9, characterized in that: The base plate (11) is provided with a photoelectric switch (15) for detecting the position of the mask plate (100) on the base plate (11).

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