Air spindle and its adjustment method

By using optical fibers in the air spindle to detect the air pressure value of the air floating bearing and adjusting the position of the air floating bearing with magnetic parts, the problem of inability to detect and correct deviation in the prior art is solved, and the rotation accuracy of the air spindle is improved.

CN119216615BActive Publication Date: 2025-03-25ZHEJIANG QIUSHI SEMICON EQUIP CO LTD +2
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Patent Information

Application Number
CN202411755131.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2024-09-20
Filing Date
2024-12-02
Publication Date
2025-03-25
Estimated Expiration
2044-12-02

AI Technical Summary

Technical Problem

The prior art cannot detect whether the air-floating bearings in the air spindle are inclined, and the air-floating bearings that have been inclined cannot be corrected, resulting in a reduced rotational accuracy.

Method used

An air spindle is designed, and optical fiber is used to detect the air pressure value between the airfloating bearing and the spindle. Through the cooperation of the first magnetic member and the second magnetic member, the distance between the airfloating bearing and the inner wall of the shell is adjusted to achieve deviation correction of the airfloating bearing.

Benefits of technology

The detection and correction of the inclined state of the air float bearing is realized, and the rotation accuracy of the air spindle is improved.

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Abstract

The present application discloses an air spindle and an adjustment method thereof, wherein the air spindle comprises a housing, a spindle, a rotor, a stator, an air bearing, a plurality of optical fibers, a first magnetic component and a second magnetic component. A plurality of mounting grooves are provided on a side of the air bearing close to the spindle, and the plurality of mounting grooves are distributed along the axial direction of the air bearing. Each optical fiber is installed in a mounting groove, and each optical fiber is configured to be able to detect the air pressure value between the air bearing and the spindle. The first magnetic component is installed on the housing, and the second magnetic component is installed between the air bearing and the inner wall of the housing. The second magnetic component cooperates with the first magnetic component so that the second magnetic component is configured to be able to adjust the distance between the air bearing and the inner wall of the housing. Through the above arrangement, it is possible to detect whether the air bearing in the air spindle is tilted, and the state of the tilted air bearing can be adjusted to return the air bearing to the normal position.
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Description

Technical Field

[0001] The present application relates to the field of precision mechanical technology, and in particular to an air spindle and an adjustment method thereof. Background Art

[0002] The air spindle is a device mainly used in precision machine tools, and its main features are high precision, high speed and low friction.

[0003] An air spindle usually consists of a spindle, a rotor, a stator, and an air bearing. The air bearing can reduce the friction of the spindle, thereby improving the rotation accuracy of the air spindle. Among them, an air bearing is a bearing that uses gas as a lubricating medium to form an air film between the bearing and the spindle, thereby achieving non-contact operation with the spindle. However, since the air bearing is not in direct contact with the spindle, the air bearing may tilt during the operation of the air spindle. The tilted air bearing will increase the friction between it and the spindle, thereby reducing the rotation accuracy of the air spindle.

[0004] However, in the prior art, it is not possible to detect whether the air bearing in the assembled air spindle is tilted, and it is also not possible to correct the tilted air bearing to return it to the normal position.

[0005] Therefore, how to detect whether the air bearing in the air spindle is tilted and correct the tilted air bearing is a technical problem that needs to be solved urgently in the art. Summary of the invention

[0006] In order to solve the deficiencies of the prior art, the purpose of the present application is to provide an air spindle and an adjustment method thereof that can detect whether an air bearing is tilted and correct the tilted air bearing.

[0007] To achieve the above objectives, this application adopts the following technical solutions:

[0008] An air spindle includes a shell, a spindle, a rotor, a stator, an air bearing, a plurality of optical fibers, a first magnetic component, and a second magnetic component. The spindle is at least partially located in the shell and is rotatably connected to the shell, the rotor is located in the shell and is connected to the spindle, the stator is located in the shell and is at least partially arranged around the rotor, and the air bearing is at least partially installed in the shell and rotatably connects the spindle to the shell. A plurality of mounting grooves are provided on the side of the air bearing close to the spindle, and the plurality of mounting grooves are distributed along the axial direction of the air bearing. Each optical fiber is installed in a mounting groove, and each optical fiber is configured to detect the air pressure value between the air bearing and the spindle. The first magnetic component is installed on the shell, and the second magnetic component is installed between the air bearing and the inner wall of the shell. The second magnetic component cooperates with the first magnetic component so that the second magnetic component is configured to adjust the distance between the air bearing and the inner wall of the shell, and the second magnetic component deviates from the middle position of the air bearing along its axial direction. The first magnetic element is configured to attract or repel the second magnetic element according to the air pressure value detected by the optical fiber, and / or the second magnetic element is configured to attract or repel the first magnetic element according to the air pressure value detected by the optical fiber.

[0009] Furthermore, at least two first magnetic parts and at least two second magnetic parts are provided, at least two first magnetic parts are distributed on the outside of the shell along the axial direction of the main shaft, and at least two second magnetic parts are distributed on the outer peripheral surface of the air bearing along the axial direction of the air bearing, and each first magnetic part corresponds to a second magnetic part.

[0010] Furthermore, the air spindle further comprises a plurality of insulating isolation layers, at least one insulating isolation layer is located between two adjacent first magnetic members, and at least one insulating isolation layer is located between two adjacent second magnetic members.

[0011] Furthermore, the air spindle includes a multi-layer protective layer, each installation groove is installed with a multi-layer protective layer, the multi-layer protective layer at least partially covers the optical fiber, and the multi-layer protective layer is configured to be deformed by the air pressure between the air bearing and the spindle, and the deformation makes the multi-layer protective layer have a force on the optical fiber. The side of the multi-layer protective layer facing away from the optical fiber and the side of the air bearing close to the spindle are basically located on the same circumference.

[0012] Furthermore, a plurality of mounting grooves are evenly distributed on the air bearing along the axial direction of the air bearing.

[0013] Furthermore, the first magnetic member or the second magnetic member is an electromagnet. The second magnetic member is configured as a flat arc-shaped sheet structure or a block structure.

[0014] Furthermore, an annular groove for fixing the air bearing is provided in the housing, the air bearing is at least partially located in the annular groove, and the second magnetic member is located between the bottom of the annular groove and the air bearing. A limiting protrusion is formed on the main shaft, a limiting groove is provided on the limiting protrusion, the air bearing is at least partially located in the limiting groove, and there is a gap between the air bearing and the limiting groove.

[0015] To achieve the above objectives, this application adopts the following technical solutions:

[0016] A method for adjusting an air spindle comprises: using an optical fiber to detect that an air bearing is tilted, a first magnetic component attracting or repelling a second magnetic component located between the air bearing and an inner wall of a shell, or the second magnetic component attracting or repelling the first magnetic component; and changing the distance between one side of the air bearing corresponding to the second magnetic component and the inner wall of the shell until the axis of the air bearing coincides with the axis of the spindle.

[0017] Furthermore, multiple optical fibers are provided, and multiple installation grooves are evenly distributed on the air bearing along the axial direction of the air bearing, and each optical fiber is installed in a installation groove. Optical fiber detection of the tilt of the air bearing includes: multiple optical fibers are numbered along the axial direction of the air bearing, and the air pressure values ​​at different positions between the air bearing and the main shaft are obtained by obtaining the air pressure values ​​corresponding to the optical fibers with different numbers; and the tilt state of the air bearing is judged according to the air pressure values ​​at different positions.

[0018] Furthermore, two first magnetic parts and two second magnetic parts are provided, the two first magnetic parts are distributed outside the shell along the axial direction of the main shaft, and the two second magnetic parts are distributed on the outer peripheral surface of the air bearing along the axial direction of the air bearing, and each first magnetic part corresponds to a second magnetic part. The two first magnetic parts are defined as the first magnetic part and the second magnetic part, respectively, the second magnetic part that cooperates with the first magnetic part is defined as the third magnetic part, and the second magnetic part that cooperates with the second magnetic part is defined as the fourth magnetic part. The adjustment method includes: if the tilt state of the optical fiber detection air bearing is approaching the first magnetic component, the first magnetic component repels the third magnetic component, so that the distance between the side of the air bearing corresponding to the first magnetic component and the inner wall of the shell increases until the axis of the air bearing coincides with the axis of the main shaft; or, the second magnetic component attracts the fourth magnetic component, so that the distance between the side of the air bearing corresponding to the second magnetic component and the inner wall of the shell decreases until the axis of the air bearing coincides with the axis of the main shaft; if the tilt state of the optical fiber detection air bearing is approaching the second magnetic component, the second magnetic component repels the fourth magnetic component, so that the distance between the side of the air bearing corresponding to the second magnetic component and the inner wall of the shell increases until the axis of the air bearing coincides with the axis of the main shaft; or, the first magnetic component attracts the third magnetic component, so that the distance between the side of the air bearing corresponding to the first magnetic component and the inner wall of the shell decreases until the axis of the air bearing coincides with the axis of the main shaft.

[0019] In the present application, the air pressure value between the air bearing and the main shaft can be detected by optical fiber, thereby detecting whether the air bearing is tilted, and the air bearing can be driven to deflect by the second magnetic component to correct the tilted air bearing, so that the air bearing is returned to the straight position, thereby improving the rotation accuracy of the air main shaft. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the overall cross-sectional structure of the air spindle of the present application;

[0021] Figure 2 This is a schematic diagram of the combined cross-sectional structure of the air bearing, optical fiber and main shaft of the air main shaft of the present application;

[0022] Figure 3 For this application Figure 1 An enlarged schematic diagram of A in FIG.

[0023] Figure 4 A schematic diagram of a flow chart of an adjustment method of an air spindle of the present application;

[0024] Figure 5 It is a schematic diagram of the process of using optical fiber to detect the tilt of the air bearing in the air spindle adjustment method of the present application;

[0025] Figure 6 It is a schematic diagram of a specific process flow in the air spindle adjustment method of the present application.

[0026] Among them, 100, air spindle; 11, shell; 111, annular groove; 12, spindle; 121, limiting protrusion; 1211, limiting groove; 13, rotor; 14, stator; 15, air bearing; 151, mounting groove; 16, optical fiber; 17, first magnetic component; 171, first magnetic component; 172, second magnetic component; 18, second magnetic component; 181, third magnetic component; 182, fourth magnetic component; 19, elastic component; 20, protective layer. DETAILED DESCRIPTION

[0027] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation manner of the present application will be clearly and completely described below in conjunction with the drawings in the implementation manner of the present application.

[0028] It should be noted that the words "first", "second" and similar words used in the specification and claims of this application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "a" do not indicate a quantitative limitation, but indicate the existence of at least one. "Multiple" or "several" means at least two. Unless otherwise specified, words such as "front", "back", "left", "right", "bottom" and / or "top" are only for the convenience of description and are not limited to one position or one spatial orientation. Words such as "include" or "comprise" mean that the elements or objects appearing before "include" or "comprise" include the elements or objects listed after "include" or "comprise" and their equivalents, and do not exclude other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, and may include electrical connections, whether direct or indirect.

[0029] The singular forms "a", "said" and "the" used in this specification and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0030] In order to clearly illustrate the technical solution of the present application, the up, down, left and right directions are also defined as shown in the figure.

[0031] like Figure 1 and Figure 2 As shown, the present application provides an air spindle 100, which includes a housing 11, a spindle 12, a rotor 13, a stator 14 and an air bearing 15. The spindle 12 is used to transmit and output torque, and the spindle 12 is at least partially located in the housing 11 and is rotatably connected to the housing 11. The rotor 13 is located in the housing 11 and is connected to the spindle 12. The stator 14 is located in the housing 11 and is at least partially arranged around the rotor 13. The rotor 13 can cooperate with the stator 14 to generate magnetic induction force and drive the spindle 12 to rotate. The air bearing 15 is used to support the spindle 12, and the air bearing 15 is at least partially installed in the housing 11. The air bearing 15 can rotatably connect the spindle 12 to the housing 11. In this way, the friction force on the spindle 12 can be reduced by the air bearing 15, which is conducive to the rotation of the air spindle 100 to increase the rotation speed of the air spindle 100.

[0032] Specifically, a plurality of mounting grooves 151 are provided on one side of the air bearing 15 close to the main shaft 12, and the plurality of mounting grooves 151 are distributed along the axial direction of the air bearing 15. The air main shaft 100 also includes a plurality of optical fibers 16, each of which is installed in a mounting groove 151, and each of which is configured to detect the air pressure value between the air bearing 15 and the main shaft 12. In this way, the optical fiber 16 detects the change of the air film pressure value corresponding to the optical fiber 16, thereby judging whether the air film corresponding to the optical fiber 16 is a coarse air film or a thin air film, and thus judging whether the air bearing 15 is tilted, which is conducive to detecting whether the air bearing 15 in the air main shaft 100 is tilted. In addition, by providing the mounting groove 151, it is convenient to install and limit the optical fiber 16 in the air bearing 15, thereby avoiding the situation that the optical fiber 16 is separated from the air bearing 15 during the operation of the air main shaft 100, thereby improving the installation stability of the optical fiber 16 on the air bearing 15, and improving the detection stability of the optical fiber 16.

[0033] In this embodiment, when the air film between the air bearing 15 and the main shaft 12 is a thin air film, the air flow velocity in the thin air film area is large, thereby reducing the air pressure; when the air film between the air bearing 15 and the main shaft 12 is a coarse air film, the air flow velocity in the coarse air film area is small, thereby increasing the air pressure.

[0034] Exemplarily, when the optical fiber 16 detects an increase in the air pressure value at its corresponding position, it can be determined that the position corresponding to the optical fiber 16 is a coarse air film, and it can be determined that the space at the position corresponding to the optical fiber 16 is increased, and thus it can be determined that the air bearing 15 is tilted away from the main axis 12 at the position corresponding to the optical fiber 16, that is, the air bearing 15 is tilted toward the inner wall of the shell 11 at the position corresponding to the optical fiber 16; when the optical fiber 16 detects a decrease in the air pressure value at its corresponding position, it can be determined that the position corresponding to the optical fiber 16 is a thin air film, and it can be determined that the space at the position corresponding to the optical fiber 16 is reduced, and thus it can be determined that the air bearing 15 is tilted toward the main axis 12 at the position corresponding to the optical fiber 16.

[0035] In some embodiments, the optical fiber 16 may be an optical fiber sensor, which can detect the magnitude of the air pressure value at the corresponding location.

[0036] More specifically, the air spindle 100 also includes a first magnetic component 17 and a second magnetic component 18. The first magnetic component 17 is installed outside the shell 11, and the second magnetic component 18 is located between the inner wall of the shell 11 and the air bearing 15. In addition, the second magnetic component 18 cooperates with the first magnetic component 17 so that the second magnetic component 18 is configured to be able to adjust the distance between the air bearing 15 and the inner wall of the shell 11. The second magnetic component 18 is connected to the air bearing 15, so that the second magnetic component 18 can be driven by the first magnetic component 17, and then the second magnetic component 18 can drive the air bearing 15 to deflect, that is, the second magnetic component 18 can adjust the distance between the air bearing 15 and the inner wall of the shell 11. With such arrangement, the second magnetic component 18 can drive the corresponding portion of the air bearing 15 to deflect, so as to correct the tilted air bearing 15, thereby adjusting the state of the air bearing 15 so that the axis of the air bearing 15 coincides with the axis of the main shaft 12, which is beneficial to reduce the friction between the air bearing 15 and the main shaft 12, thereby improving the rotation accuracy of the air main shaft 100.

[0037] It should be noted that, in the present application, the first magnetic member 17 and the second magnetic member 18 can drive the second magnetic member 18 to move by an attractive force, so that the second magnetic member 18 drives the air bearing 15 to deflect; or the first magnetic member 17 and the second magnetic member 18 can drive the second magnetic member 18 to move by a repulsive force, so that the second magnetic member 18 drives the air bearing 15 to deflect. With such a configuration, the state of the tilted air bearing 15 can be adjusted to return the air bearing 15 to the normal position.

[0038] In addition, the second magnetic member 18 deviates from the middle position of the air bearing 15 along its axial direction. Such a configuration can prevent the second magnetic member 18 from acting on the above-mentioned middle position, which causes the second magnetic member 18 to be unable to drive the air bearing 15 to deflect, thereby facilitating the second magnetic member 18 to accurately adjust the state of the air bearing 15, so as to facilitate the return of the air bearing 15 to the normal position.

[0039] In the present application, the alignment of the air bearing 15 refers to the working process in which the axis of the air bearing 15 is adjusted so as to coincide with the axis of the main shaft 12 .

[0040] More specifically, the first magnetic member 17 is configured to attract or repel the second magnetic member 18 according to the air pressure value detected by the optical fiber 16, and / or the second magnetic member 18 is configured to attract or repel the first magnetic member 17 according to the air pressure value detected by the optical fiber 16. In this way, the size of the attractive force or repulsive force between the first magnetic member 17 and the second magnetic member 18 can be adjusted according to the change of the air pressure value detected by the optical fiber 16, so that the second magnetic member 18 can be driven by the attractive force or repulsive force and move in the housing 11, and then the second magnetic member 18 can drive the air bearing 15 to deflect, so that the air bearing 15 returns to the normal position.

[0041] It should be noted that the first magnetic component 17 is configured to attract or repel the second magnetic component 18 according to the air pressure value detected by the optical fiber 16, and the second magnetic component 18 is configured to attract or repel the first magnetic component 17 according to the air pressure value detected by the optical fiber 16. The above two methods are both methods of forming an attractive force or a repulsive force between the first magnetic component 17 and the second magnetic component 18. The present application does not limit the method of forming an attractive force or a repulsive force between the first magnetic component 17 and the second magnetic component 18.

[0042] In this embodiment, the air spindle 100 also includes an elastic member 19, which is located between the inner wall of the shell 11 and the second magnetic member 18. The elastic member 19 has a deformable margin, and the deformable margin is configured to be deformed when the first magnetic member 17 attracts the second magnetic member 18, so that the distance between the second magnetic member 18 and the inner wall of the shell 11 is reduced, and the deformation of the deformable margin causes the deformable margin to have a force on the second magnetic member 18, and the force causes the second magnetic member 18 to have a tendency to move toward the inner wall of the shell 11; or, the deformation margin is configured to be deformed when the first magnetic member 17 repels the second magnetic member 18, so that the distance between the second magnetic member 18 and the inner wall of the shell 11 is increased, and the deformation of the deformable margin causes the deformable margin to have a force on the second magnetic member 18, and the force causes the second magnetic member 18 to have a tendency to move away from the inner wall of the shell 11. With such a configuration, the elastic member 19 can provide space for the displacement of the second magnetic member 18, thereby facilitating the movement of the second magnetic member 18 between the inner wall of the housing 11 and the main shaft 12. Moreover, in the present application, when the attraction or repulsion force on the second magnetic member 18 is enhanced, the force of the elastic member 19 on the second magnetic member 18 can be offset, so that the second magnetic member 18 moves after being acted upon by the attraction or repulsion force; when the attraction or repulsion force on the second magnetic member 18 is weakened, the force of the elastic member 19 on the second magnetic member 18 is greater than the attraction or repulsion force on the second magnetic member 18, so that the second magnetic member 18 moves after being acted upon by the elastic member 19. In addition, when the air bearing 15 does not need to be corrected, the attraction or repulsion force on the second magnetic member 18 can maintain a balance with the force of the elastic member 19 on the second magnetic member 18, so that the second magnetic member 18 does not move, thereby facilitating the improvement of the stability of the second magnetic member 18 in the air main shaft 100, and further facilitating the improvement of the stability of the air bearing 15 in the air main shaft 100.

[0043] For example, the first magnetic member 17 is configured to attract or repel the second magnetic member 18 according to the air pressure value detected by the optical fiber 16.

[0044] When the optical fiber 16 detects that the air pressure value at the corresponding position increases, it can be determined that the air bearing 15 is tilted toward the inner wall of the housing 11 at the corresponding position of the optical fiber 16. Reduce the attraction of the first magnetic member 17 to the second magnetic member 18, so that the attraction of the second magnetic member 18 is less than the force of the elastic member 19 on the second magnetic member 18, so that the second magnetic member 18 moves toward the main shaft 12 after being acted upon by the elastic member 19, and then the corresponding side of the air bearing 15 is driven to deflect toward the main shaft 12 through the second magnetic member 18, so that the tilted air bearing 15 is returned to the normal state. Or, increase the repulsive force of the first magnetic member 17 on the second magnetic member 18, so that the repulsive force of the second magnetic member 18 is greater than the force of the elastic member 19 on the second magnetic member 18, so that the second magnetic member 18 moves toward the main shaft 12 after being acted upon by the repulsive force, and then the corresponding side of the air bearing 15 is driven to deflect toward the main shaft 12 through the second magnetic member 18, so that the tilted air bearing 15 is returned to the normal state.

[0045] When the optical fiber 16 detects that the air pressure value at the corresponding position is reduced, it can be determined that the air bearing 15 is tilted toward the main shaft 12 at the corresponding position of the optical fiber 16. Increase the attraction of the first magnetic member 17 to the second magnetic member 18, so that the attraction of the second magnetic member 18 is greater than the force of the elastic member 19 on the second magnetic member 18, so that the second magnetic member 18 moves toward the inner wall of the shell 11 after being acted upon by the attraction, and then the corresponding side of the air bearing 15 is driven to deflect toward the inner wall of the shell 11 by the second magnetic member 18, so that the tilted air bearing 15 is returned to the normal state. Or, reduce the repulsive force of the first magnetic member 17 on the second magnetic member 18, so that the repulsive force of the second magnetic member 18 is less than the force of the elastic member 19 on the second magnetic member 18, so that the second magnetic member 18 moves toward the inner wall of the shell 11 after being acted upon by the elastic member 19, and then the corresponding side of the air bearing 15 is driven to deflect toward the inner wall of the shell 11 by the second magnetic member 18, so that the tilted air bearing 15 is returned to the normal state.

[0046] Therefore, through the above operation mode, the distance between the second magnetic member 18 and the inner wall of the housing 11 can be adjusted, so that the second magnetic member 18 drives the air bearing 15 to deflect, thereby returning the air bearing 15 to the normal position.

[0047] As an embodiment, at least two of the first magnetic member 17, the second magnetic member 18 and the elastic member 19 are provided, at least two first magnetic members 17 are distributed on the outside of the housing 11 along the axial direction of the main shaft 12, at least two second magnetic members 18 are distributed on the outer peripheral surface of the air bearing 15 along the axial direction of the air bearing 15, each elastic member 19 corresponds to a second magnetic member 18, and each first magnetic member 17 corresponds to a second magnetic member 18. In this embodiment, the first magnetic member 17, the second magnetic member 18 and the elastic member 19 are respectively arranged on both sides of the middle position of the air bearing 15 along its axial direction. In this way, the second magnetic members 18 arranged on both sides can adjust the two sides of the middle position of the air bearing 15 along its axial direction respectively, so that the air bearing 15 can be flexibly adjusted according to the tilt direction of the air bearing 15, which is conducive to improving the comprehensiveness and accuracy of the second magnetic member 18 in correcting the tilted air bearing 15.

[0048] Exemplarily, in some embodiments, the number of optical fibers 16 is two, and the two optical fibers 16 are respectively arranged on the left and right sides of the middle position along the axial direction of the air bearing 15. The number of the first magnetic member 17, the second magnetic member 18 and the elastic member 19 are two, and the first magnetic member 17, the second magnetic member 18 and the elastic member 19 are respectively arranged on the left and right sides of the middle position along the axial direction of the air bearing 15. That is, the axis of the air bearing 15 extends in the left and right directions of the air bearing.

[0049] When the optical fiber 16 located on the left side of the air bearing 15 detects that the air pressure value at the corresponding position increases, it can be determined that the left side of the air bearing 15 is tilted toward the inner wall of the housing 11. The attraction of the first magnetic member 17 disposed on the left side of the air bearing 15 to the second magnetic member 18 is reduced, so that the attraction of the second magnetic member 18 is smaller than the force of the elastic member 19 on the second magnetic member 18, so that the second magnetic member 18 moves toward the main shaft 12 after receiving the force of the elastic member 19, and then the left side of the air bearing 15 is driven to deflect toward the main shaft 12 through the second magnetic member 18, so that the tilted air bearing 15 is returned to the normal position. Alternatively, the repulsive force of the first magnetic component 17 arranged on the left side of the air bearing 15 on the second magnetic component 18 is increased, so that the repulsive force on the second magnetic component 18 is greater than the force acting on the second magnetic component 18 by the elastic component 19, so that the second magnetic component 18 moves toward the main shaft 12 after being acted upon by the repulsive force, and then drives the left side of the air bearing 15 to deflect toward the main shaft 12 through the second magnetic component 18, so that the tilted air bearing 15 is returned to the normal position.

[0050] When the optical fiber 16 located on the left side of the air bearing 15 detects that the air pressure value at the corresponding position decreases, it can be determined that the left side of the air bearing 15 is tilted toward the main shaft 12. The attraction of the first magnetic member 17 disposed on the left side of the air bearing 15 to the second magnetic member 18 is increased, so that the attraction of the second magnetic member 18 is greater than the force of the elastic member 19 on the second magnetic member 18, so that the second magnetic member 18 moves toward the inner wall of the housing 11 after being acted upon by the attraction, and then the left side of the air bearing 15 is driven to deflect toward the inner wall of the housing 11 through the second magnetic member 18, so that the tilted air bearing 15 is returned to the normal position. Alternatively, the repulsive force of the first magnetic component 17 arranged on the left side of the air bearing 15 on the second magnetic component 18 is reduced, so that the repulsive force on the second magnetic component 18 is smaller than the force acting on the second magnetic component 18 by the elastic component 19, so that the second magnetic component 18 moves toward the inner wall of the shell 11 after being acted upon by the elastic component 19, and then the left side of the air bearing 15 is driven by the second magnetic component 18 to deflect toward the inner wall of the shell 11, so that the tilted air bearing 15 is returned to the normal position.

[0051] When the optical fiber 16 located on the right side of the air bearing 15 detects that the air pressure value at the corresponding position increases, it can be determined that the right side of the air bearing 15 is tilted toward the inner wall of the housing 11. The attraction of the first magnetic member 17 disposed on the right side of the air bearing 15 to the second magnetic member 18 is reduced, so that the attraction of the second magnetic member 18 is smaller than the force of the elastic member 19 on the second magnetic member 18, so that the second magnetic member 18 moves toward the main shaft 12 after receiving the force of the elastic member 19, and then the right side of the air bearing 15 is driven to deflect toward the main shaft 12 through the second magnetic member 18, so that the tilted air bearing 15 is returned to the normal position. Alternatively, the repulsive force of the first magnetic component 17 arranged on the right side of the air bearing 15 on the second magnetic component 18 is increased, so that the repulsive force on the second magnetic component 18 is greater than the force acting on the second magnetic component 18 by the elastic component 19, so that the second magnetic component 18 moves toward the main shaft 12 after being acted upon by the repulsive force, and then the right side of the air bearing 15 is driven by the second magnetic component 18 to deflect toward the main shaft 12, so that the tilted air bearing 15 is returned to the normal position.

[0052] When the optical fiber 16 located on the right side of the air bearing 15 detects that the air pressure value at the corresponding position decreases, it can be determined that the right side of the air bearing 15 is tilted toward the main shaft 12. The attraction of the first magnetic member 17 disposed on the right side of the air bearing 15 to the second magnetic member 18 is increased, so that the attraction of the second magnetic member 18 is greater than the force of the elastic member 19 on the second magnetic member 18, so that the second magnetic member 18 moves toward the inner wall of the housing 11 after being acted upon by the attraction, and then the right side of the air bearing 15 is driven to deflect toward the inner wall of the housing 11 through the second magnetic member 18, so that the tilted air bearing 15 is returned to the normal position. Alternatively, the repulsive force of the first magnetic component 17 arranged on the right side of the air bearing 15 on the second magnetic component 18 is reduced, so that the repulsive force on the second magnetic component 18 is smaller than the force acting on the second magnetic component 18 by the elastic component 19, so that the second magnetic component 18 moves toward the inner wall of the shell 11 after being acted upon by the elastic component 19, and then the right side of the air bearing 15 is driven by the second magnetic component 18 to deflect toward the inner wall of the shell 11, so that the tilted air bearing 15 is returned to the normal position.

[0053] As an embodiment, the air spindle 100 further includes a plurality of insulating isolation layers (not shown). Among them, at least one insulating isolation layer is located between two adjacent first magnetic members 17, and at least one insulating isolation layer is located between two adjacent second magnetic members 18. In this configuration, the adjacent first magnetic members 17 and the adjacent second magnetic members 18 can be isolated by the insulating isolation layer, so that the magnetic fields of the adjacent first magnetic members 17 will not be magnetically coupled, and the magnetic fields of the adjacent second magnetic members 18 will not be magnetically coupled, so as to avoid mutual interference between the adjacent first magnetic members 17 and the adjacent second magnetic members 18, thereby facilitating the normal operation of the first magnetic members 17 and the second magnetic members 18.

[0054] In some embodiments, the insulating isolation layer is epoxy resin. It can be understood that epoxy resin has good bonding properties and electrical insulation properties, which is conducive to fixing and insulating the first magnetic member 17 and the second magnetic member 18. It should be noted that the insulating isolation layer can also be other materials with insulating properties, and this application does not limit this.

[0055] like Figure 2As shown, as an embodiment, the air spindle 100 includes a multi-layer protective layer 20, each installation groove 151 is installed with a multi-layer protective layer 20, and the multi-layer protective layer 20 at least partially covers the optical fiber 16. The multi-layer protective layer 20 is configured to be deformed by the air pressure between the air bearing 15 and the spindle 12, and the deformation enables the multi-layer protective layer 20 to have a force on the optical fiber 16. In this way, the protective layer 20 can improve the protection of the optical fiber 16, so as to avoid the situation where the optical fiber 16 contacts the high-speed rotating spindle 12 and causes the optical fiber 16 to be worn, thereby facilitating the service life of the optical fiber 16. In addition, the protective layer 20 can be deformed according to the change of the air film pressure between the air bearing 15 and the spindle 12, so that the optical fiber 16 can judge whether the air film corresponding to the optical fiber 16 is a coarse air film or a thin air film according to the deformation of the protective layer 20.

[0056] In this embodiment, the side of the multi-layer protective layer 20 facing away from the optical fiber 16 and the side of the air bearing 15 close to the main shaft 12 are basically located on the same circumference. This arrangement can avoid the protective layer 20 and the side of the air bearing 15 close to the main shaft 12 not being located on the same circumference, which may cause the protective layer 20 to interfere with the air film formed between the air bearing 15 and the main shaft 12, thereby facilitating the operation stability of the air bearing 15.

[0057] In some embodiments, the protective layer 20 may be a flexible rubber, and the flexible rubber can protect the optical fiber 16 in the installation groove 151. Moreover, the flexible rubber has a deformable property, so the protective layer 20 can be deformed according to the change of the air film pressure, and the protective layer 20 has a force on the optical fiber 16, so as to facilitate the optical fiber 16 to detect the air film pressure value. It should be noted that the protective layer 20 can also be made of other materials with protective and deformable properties, and this application is not limited.

[0058] As an optional implementation, a plurality of mounting grooves 151 are evenly distributed on the air bearing 15 along the axial direction of the air bearing 15. Such an arrangement can improve the comprehensiveness of the optical fiber 16 in detecting the tilt of the air bearing 15, thereby facilitating the improvement of the accuracy of the second magnetic member 18 in adjusting the state of the air bearing 15, so that the air bearing 15 can be accurately returned to the normal position.

[0059] As an embodiment, the first magnetic member 17 or the second magnetic member 18 is an electromagnet. With such a configuration, the electromagnet can change the strength of the magnetic field by changing the magnitude of the current or voltage, thereby changing the attraction or repulsion between the first magnetic member 17 and the second magnetic member 18, thereby facilitating the movement of the second magnetic member 18, so that the second magnetic member 18 can drive the corresponding side of the air bearing 15 to deflect, so as to adjust the state of the air bearing 15.

[0060] Exemplarily, taking the first magnetic component 17 as an electromagnet and the attraction between the first magnetic component 17 and the second magnetic component 18 as an example, increasing the current passed through the first magnetic component 17 can increase the magnetic field force of the first magnetic component 17, and then increase the attraction of the first magnetic component 17 to the second magnetic component 18, so that the attraction exerted on the second magnetic component 18 is greater than the force exerted by the elastic component 19 on the second magnetic component 18, and then the attraction can drive the second magnetic component 18 to move toward the inner wall of the shell 11, so that the second magnetic component 18 can adjust the state of the air bearing 15.

[0061] As an optional implementation, the second magnetic member 18 is configured as a flat arc-shaped sheet structure or a block structure. It can be understood that in the present application, the air bearing 15 is a cylindrical structure. Therefore, through the above-mentioned arrangement, the contact area between the second magnetic member 18 and the air bearing 15 can be increased, which is conducive to the second magnetic member 18 driving the air bearing 15 to move and return the air bearing 15 to the center. In addition, by increasing the contact area between the second magnetic member 18 and the air bearing 15, the force of the second magnetic member 18 on the air bearing 15 can be made more uniform, which is conducive to improving the return accuracy of the air bearing 15.

[0062] like Figure 1 As shown, as an embodiment, an annular groove 111 for fixing the air bearing 15 is provided in the housing 11, the air bearing 15 is at least partially located in the annular groove 111, and the second magnetic member 18 is located between the bottom of the annular groove 111 and the air bearing 15. In addition, a limiting protrusion 121 is formed on the main shaft 12, and a limiting groove 1211 is provided on the limiting protrusion 121, and the air bearing 15 is at least partially located in the limiting groove 1211. In this way, the air bearing 15 can be limited by the annular groove 111 and the limiting groove 1211, which is beneficial to the installation and limiting of the air bearing 15 in the air main shaft 100, and further beneficial to improving the stability of the air bearing 15 in the air main shaft 100. In addition, there is a gap between the air bearing 15 and the limiting groove 1211. With such arrangement, air can be introduced into the gap to form a gas film between the air bearing 15 and the spindle 12 , thereby facilitating reduction of friction between the air bearing 15 and the spindle 12 , and further facilitating increase of the rotation speed of the spindle 12 .

[0063] like Figure 4 As shown, as an embodiment, the present application also provides an adjustment method of the air spindle 100, and the adjustment method comprises the following steps:

[0064] S1: The optical fiber 16 detects that the air bearing 15 is tilted, and the first magnetic member 17 attracts or repels the second magnetic member 18 located between the air bearing 15 and the inner wall of the housing 11, or the second magnetic member 18 attracts or repels the first magnetic member 17;

[0065] S2: The distance between one side of the air bearing 15 corresponding to the second magnetic member 18 and the inner wall of the housing 11 changes until the axis of the air bearing 15 is parallel to the axis of the main shaft 12 .

[0066] Specifically, in step S1, when the optical fiber 16 detects a change in the air pressure value at the corresponding position, it can be determined that the air bearing 15 is tilted. Then, by changing the attraction or repulsion between the corresponding first magnetic member 17 and the second magnetic member 18, the second magnetic member 18 can be driven by the attraction or repulsion, thereby causing the second magnetic member 18 to move.

[0067] In step S2 , the corresponding second magnetic member 18 is moved so that the second magnetic member 18 can drive the corresponding side of the air bearing 15 to deflect until the axis of the air bearing 15 is parallel to the axis of the main shaft 12 , so that the air bearing 15 is returned to the normal position.

[0068] like Figure 5 As shown, as an embodiment, the optical fiber 16 is provided with a plurality of mounting grooves 151 uniformly distributed on the air bearing 15 along the axial direction of the air bearing 15, and each optical fiber 16 is installed in a mounting groove 151. Then in the above step S1, the optical fiber 16 detects the tilt of the air bearing 15, including the following steps:

[0069] S11: The plurality of optical fibers 16 are numbered along the axial direction of the air bearing 15 , and the air pressure values ​​at different positions between the air bearing 15 and the main shaft 12 are obtained by obtaining the air pressure values ​​corresponding to the optical fibers 16 with different numbers;

[0070] S12: judging the tilt state of the air bearing 15 according to the air pressure values ​​at different positions.

[0071] Specifically, in step S11 , each optical fiber 16 corresponds to a position on the air bearing 15 , which is helpful for determining the air pressure values ​​at different positions on the air bearing 15 .

[0072] In step S12 , by determining the tilt state of the air bearing 15 , it is helpful to control the movement of the second magnetic member 18 at the corresponding position, so that the second magnetic member 18 drives the corresponding side of the air bearing 15 to deflect, thereby improving the return accuracy of the air bearing 15 .

[0073] like Figure 3 and Figure 6As shown, as an implementation mode, two first magnetic parts 17 and two second magnetic parts 18 are provided, the two first magnetic parts 17 are distributed on the outside of the shell 11 along the axial direction of the main shaft 12, and the two second magnetic parts 18 are distributed on the outer peripheral surface of the air bearing 15 along the axial direction of the air bearing 15. Each first magnetic part 17 corresponds to one second magnetic part 18 for explanation.

[0074] Specifically, the two first magnetic members 17 are defined as the first magnetic member 171 and the second magnetic member 172, the second magnetic member 18 that cooperates with the first magnetic member 171 is defined as the third magnetic member 181, and the second magnetic member 18 that cooperates with the second magnetic member 172 is defined as the fourth magnetic member 182. Then, the adjustment method includes the following steps:

[0075] S1: If the optical fiber 16 detects that the tilt state of the air bearing 15 is approaching the first magnetic component 171, the first magnetic component 171 repels the third magnetic component 181, so that the distance between the side of the air bearing 15 corresponding to the first magnetic component 171 and the inner wall of the housing 11 increases, until the axis of the air bearing 15 is parallel to the axis of the spindle 12; or, the second magnetic component 172 attracts the fourth magnetic component 182, so that the distance between the side of the air bearing 15 corresponding to the second magnetic component 172 and the inner wall of the housing 11 decreases, until the axis of the air bearing 15 is parallel to the axis of the spindle 12;

[0076] S2: If the optical fiber 16 detects that the tilt state of the air bearing 15 is approaching the second magnetic component 172, the second magnetic component 172 repels the fourth magnetic component 182, so that the distance between the side of the air bearing 15 corresponding to the second magnetic component 172 and the inner wall of the shell 11 increases until the axis of the air bearing 15 is parallel to the axis of the main shaft 12; or, the first magnetic component 171 attracts the third magnetic component 181, so that the distance between the side of the air bearing 15 corresponding to the first magnetic component 171 and the inner wall of the shell 11 decreases until the axis of the air bearing 15 is parallel to the axis of the main shaft 12.

[0077] Specifically, in step S1, when the optical fiber 16 detects that the tilt state of the air bearing 15 is close to the first magnetic member 171, the repulsive force of the first magnetic member 171 on the third magnetic member 181 can be increased, so that the repulsive force on the third magnetic member 181 is greater than the force of the elastic member 19 on the third magnetic member 181, so that the third magnetic member 181 is moved toward the main shaft 12 by the repulsive force, and then the corresponding side of the air bearing 15 is driven to deflect toward the main shaft 12 by the third magnetic member 181, so that the air bearing 15 Return to the normal state; or, increase the attraction of the second magnetic component 172 to the fourth magnetic component 182, so that the attraction exerted on the fourth magnetic component 182 is greater than the force exerted on the fourth magnetic component 182 by the elastic component 19, so that the fourth magnetic component 182 is moved toward the inner wall of the shell 11 by the attraction, and then the corresponding side of the air bearing 15 is driven by the fourth magnetic component 182 to deflect toward the inner wall of the shell 11, so that the side of the air bearing 15 close to the third magnetic component 181 is deflected toward the main shaft 12, and then the air bearing 15 is returned to the normal state.

[0078] In step S2, when the optical fiber 16 detects that the tilt state of the air bearing 15 is close to the second magnetic member 172, the repulsive force of the second magnetic member 172 on the fourth magnetic member 182 can be increased, so that the repulsive force on the fourth magnetic member 182 is greater than the force of the elastic member 19 on the fourth magnetic member 182, so that the fourth magnetic member 182 is moved toward the main shaft 12 by the repulsive force, and then the corresponding side of the air bearing 15 is driven by the fourth magnetic member 182 to deflect toward the main shaft 12, so that the air bearing 15 is returned to the normal position; Alternatively, the attraction of the first magnetic component 171 to the third magnetic component 181 is increased so that the attraction exerted on the third magnetic component 181 is greater than the force exerted on the third magnetic component 181 by the elastic component 19, thereby causing the third magnetic component 181 to move toward the inner wall of the shell 11 under the action of the attraction, and then driving the corresponding side of the air bearing 15 to deflect toward the inner wall of the shell 11 through the third magnetic component 181, so that the side of the air bearing 15 close to the fourth magnetic component 182 is deflected toward the main shaft 12, and then the air bearing 15 is returned to the normal position.

[0079] It should be noted that the above operation method is an operation method for increasing the attraction or repulsion of the first magnetic member 17 on the second magnetic member 18, and the operation method for reducing the attraction or repulsion of the first magnetic member 17 on the second magnetic member 18 will not be repeated.

[0080] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to this application.

Claims

1. An air spindle, comprising: Housing (11); a main shaft (12), wherein at least a portion of the main shaft (12) is located inside the housing (11) and is rotationally connected to the housing (11); a rotor (13), the rotor (13) being located in the housing (11) and connected to the main shaft (12); a stator (14), the stator (14) being located in the housing (11) and at least partially arranged around the rotor (13); An air bearing (15), the air bearing (15) being at least partially mounted in the housing (11) and rotatably connecting the main shaft (12) to the housing (11); It is characterized in that A plurality of mounting grooves (151) are provided on a side of the air bearing (15) close to the main shaft (12), and the plurality of mounting grooves (151) are distributed along the axial direction of the air bearing (15); The air spindle also includes: a plurality of optical fibers (16), each of the optical fibers (16) being installed in one of the installation grooves (151), and each of the optical fibers (16) being configured to be able to detect an air pressure value between the air bearing (15) and the main shaft (12); A first magnetic component (17), wherein the first magnetic component (17) is mounted on the housing (11); a second magnetic member (18), the second magnetic member (18) being installed between the air bearing (15) and the inner wall of the shell (11), the second magnetic member (18) cooperating with the first magnetic member (17) so that the second magnetic member (18) is configured to be able to adjust the distance between the air bearing (15) and the inner wall of the shell (11), and the second magnetic member (18) is offset from the middle position of the air bearing (15) along its axial direction; The first magnetic member (17) is configured to attract or repel the second magnetic member (18) according to the air pressure value detected by the optical fiber (16), and / or the second magnetic member (18) is configured to attract or repel the first magnetic member (17) according to the air pressure value detected by the optical fiber (16).

2. The air spindle according to claim 1, characterized in that: At least two of the first magnetic components (17) and the second magnetic components (18) are provided, at least two of the first magnetic components (17) are distributed on the outside of the shell (11) along the axial direction of the main shaft (12), and at least two of the second magnetic components (18) are distributed on the outer peripheral surface of the air bearing (15) along the axial direction of the air bearing (15), and each of the first magnetic components (17) corresponds to one of the second magnetic components (18).

3. The air spindle according to claim 2, characterized in that: The air spindle further comprises a plurality of insulating isolation layers, at least one of the insulating isolation layers being located between two adjacent first magnetic members (17), and at least one of the insulating isolation layers being located between two adjacent second magnetic members (18).

4. The air spindle according to claim 1, characterized in that: The air spindle comprises multiple layers of protective layers (20), each of the installation grooves (151) is provided with multiple layers of the protective layers (20), the multiple layers of the protective layers (20) at least partially cover the optical fiber (16), and the multiple layers of the protective layers (20) are configured to be deformed by the air pressure between the air bearing (15) and the spindle (12), and the deformation enables the multiple layers of the protective layers (20) to exert a force on the optical fiber (16); A side of the multiple layers of the protective layer (20) facing away from the optical fiber (16) and a side of the air bearing (15) close to the main shaft (12) are substantially located on the same circumference.

5. The air spindle according to claim 4, characterized in that: The plurality of mounting grooves (151) are evenly distributed on the air bearing (15) along the axial direction of the air bearing (15).

6. The air spindle according to claim 1, characterized in that: The first magnetic member (17) or the second magnetic member (18) is an electromagnet; The second magnetic member (18) is configured as a flat arc-shaped sheet structure or a block structure.

7. The air spindle according to claim 1, characterized in that: An annular groove (111) for fixing the air bearing (15) is provided in the housing (11); the air bearing (15) is at least partially located in the annular groove (111); and the second magnetic member (18) is located between the bottom of the annular groove (111) and the air bearing (15); A limiting protrusion (121) is formed on the main shaft (12), a limiting groove (1211) is provided on the limiting protrusion (121), the air bearing (15) is at least partially located in the limiting groove (1211), and a gap exists between the air bearing (15) and the limiting groove (1211).

8. A method for adjusting an air spindle, applicable to the air spindle according to any one of claims 1 to 7, characterized in that: The adjustment method comprises: The optical fiber (16) detects that the air bearing (15) is tilted, and the first magnetic member (17) attracts or repels the second magnetic member (18) located between the air bearing (15) and the inner wall of the housing (11), or the second magnetic member (18) attracts or repels the first magnetic member (17); The distance between one side of the air bearing (15) corresponding to the second magnetic member (18) and the inner wall of the housing (11) changes until the axis of the air bearing (15) coincides with the axis of the main shaft (12).

9. The method for adjusting an air spindle according to claim 8, characterized in that: A plurality of optical fibers (16) are provided, and a plurality of mounting grooves (151) are evenly distributed on the air bearing (15) along the axial direction of the air bearing (15), and each optical fiber (16) is mounted in one of the mounting grooves (151); The optical fiber (16) detecting the tilt of the air bearing (15) comprises: The plurality of optical fibers (16) are numbered along the axial direction of the air bearing (15), and the air pressure values ​​corresponding to the optical fibers (16) with different numbers are obtained to obtain the air pressure values ​​at different positions between the air bearing (15) and the main shaft (12); The tilt state of the air bearing (15) is determined according to the air pressure values ​​at different positions.

10. The method for adjusting an air spindle according to claim 9, characterized in that: Two of the first magnetic member (17) and two of the second magnetic member (18) are provided, the two first magnetic members (17) are distributed outside the housing (11) along the axial direction of the main shaft (12), and the two second magnetic members (18) are distributed on the outer peripheral surface of the air bearing (15) along the axial direction of the air bearing (15), and each of the first magnetic members (17) corresponds to one of the second magnetic members (18); The two first magnetic components (17) are defined as a first magnetic component (171) and a second magnetic component (172), the second magnetic component (18) matched with the first magnetic component (171) is defined as a third magnetic component (181), and the second magnetic component (18) matched with the second magnetic component (172) is defined as a fourth magnetic component (182); The adjustment method comprises: If the optical fiber (16) detects that the tilt state of the air bearing (15) is approaching the first magnetic component (171), the first magnetic component (171) repels the third magnetic component (181) so that the distance between the side of the air bearing (15) corresponding to the first magnetic component (171) and the inner wall of the shell (11) increases until the axis of the air bearing (15) coincides with the axis of the main shaft (12); or, the second magnetic component (172) attracts the fourth magnetic component (182) so that the distance between the side of the air bearing (15) corresponding to the second magnetic component (172) and the inner wall of the shell (11) decreases until the axis of the air bearing (15) coincides with the axis of the main shaft (12); If the optical fiber (16) detects that the tilt state of the air bearing (15) is approaching the second magnetic component (172), the second magnetic component (172) repels the fourth magnetic component (182) so that the distance between the side of the air bearing (15) corresponding to the second magnetic component (172) and the inner wall of the shell (11) increases until the axis of the air bearing (15) coincides with the axis of the main shaft (12); or, the first magnetic component (171) attracts the third magnetic component (181) so that the distance between the side of the air bearing (15) corresponding to the first magnetic component (171) and the inner wall of the shell (11) decreases until the axis of the air bearing (15) coincides with the axis of the main shaft (12).

Citation Information

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